Abstract: One aspect of the invention provides a substrate position detecting method for charged particle beam photolithography apparatus in order to be able to measure accurately and simply a substrate position on a stage.

Abstract: A three-dimensional position detecting device includes an electromagnetic radiation source, a first sensing module having first sensing elements, and a second sensing module having second sensing elements. The first and the second sensing elements receive different radiation energies from different spatial direction angles generated by the electromagnetic radiation source relative to the first and the second sensing elements, so values of two spatial direction angles of the electromagnetic radiation source relative to the first and the second sensing modules are obtained according to magnitude relationship of the radiation energies received by the first and the second sensing modules. According to matrix operation of two spatial distances from the electromagnetic radiation source to the first and the second sensing modules and the two spatial direction angles, a spatial coordinate position of the electromagnetic radiation source relative to the first and the second sensing modules is obtained.

Abstract: A first method locates a component positioned underneath a surface of a target object using a pointing instrument, wherein a position of the component in the target object coordinate system is known. The first method includes calculating an orientation of the aim point axis of the instrument in the instrument coordinate system for the aim point axis of the instrument to be aligned with the component using at least an inverse calibration matrix, the position of the component in the target object coordinate system, and inverse kinematics of the instrument. The first method also includes rotating the aim point axis of the instrument to the calculated orientation. Second and third methods also are described for locating an access panel for accessing the component and/or maintenance zones in which the component resides.

Abstract: A surface sensing device for use in position determining apparatus has an elongate stylus with a tip for scanning the surface of a workpiece to be measured. Lateral displacements of the stylus tip are detected by a light beam which passes along the stylus from a light source to a retroreflector. This reflects the beam back via a beamsplitter to a position sensitive detector. The stylus is mounted for longitudinal displacement on a carriage. The longitudinal displacement is measured by another light beam projected by the beamsplitter onto a second position sensitive detector.

Abstract: A system and method for performing optical navigation uses scattered light to produce frames of image data to estimate displacement with respect to a target surface. The scattered light is produced from an illumination beam of light emitted along a first optical axis onto the target surface. The illumination beam of light also produces a specularly reflected beam of light along a second optical axis. The scattered light about a third optical axis, which is offset by a predefined angle with respect to the second optical axis, is received at an image sensor array to produce the frames of image.

Abstract: A review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated, and a field of view necessary for the specimen to be within the field of view is set according to a convergence value of the calculated deviation amount.

Abstract: A method detects a center of a wafer having a notch when aligning the wafer mounted on a movable mounting table. The method includes capturing an image of the wafer by using an imaging unit, the image including the notch; extracting an edge line from the image of the wafer; detecting a shape of the notch from the edge line; and calculating the center of the wafer based on the shape of the notch.

Abstract: An optical beam scanning apparatus and an image forming apparatus having the optical beam scanning apparatus are provided. The optical beam scanning apparatus includes a light source; a pre-deflection optical system; an optical beam deflecting device; a sensor; and a post-deflection optical system. An exit surface of the imaging lens includes a lens-shaped portion for imaging the light flux on a scanned surface of the scanned object, and a totally reflecting surface-shaped portion having a totally reflecting surface for totally reflecting a portion of the light flux from the deflecting surface of the optical beam deflecting device at least two times, and the incident surface of the imaging lens includes a transmission surface-shaped portion having a transmission surface for transmitting the light flux totally reflected by the totally reflecting surface, and the light flux transmitted through the transmission surface is directed to the sensor.

Abstract: Image sequences are accessed, the sequences each taken, from a different perspective, of a portion of a radiation region defined by projected electromagnetic radiation. The image sequences each include a projection image taken during an emitting period in which the projected electromagnetic radiation is emitted, the projection image being of ambient electromagnetic radiation and of an object within the portion being illuminated with the projected electromagnetic radiation, and an ambient image taken during an extinguishing period in which the projected electromagnetic radiation is extinguished, the ambient image being of the ambient electromagnetic radiation. A position of the object using the projection images and the ambient images is determined, an application is controlled based on the determined position.

Abstract: A microplate for use within an interrogation system and a method of using the microplate are disclosed. The microplate contains within the bottom of each well, an optical waveguide grating based sensor. Approximate to each sensor is a mask having an aperture of predetermined size. The aperture regulates the light that enters and exits the sensor upon successive scans and ensures repeatable readings from the sensor. In an extended embodiment, a method of detection is disclosed that utilizes a launch and receive system while employing the aforementioned microplate.

Abstract: A method for determining a position of a selected area of a sheet of material relative to a reference plane includes launching a first incident light beam at the selected area of the sheet of material such that the first incident light beam strikes the selected area at a first position and a first angle, thereby producing a first reflected light beam. A second incident light beam is launched at the selected area of the sheet of material such that the second incident light beam strikes the selected area at a second position and a second angle, thereby producing a second reflected light beam. The second position and second angle are different from the first position and first angle, respectively. The first reflected light beam and the second reflected light beam are intercepted at the reference plane.

Abstract: A substrate transfer apparatus 100 includes a substrate transport means 4 having a transport base 5 and a plurality of retention arms 41a-41e for retaining substrates W, an optical sensor 62 that is used to define a horizontal optical axis L, an elevator means 52 for moving the transport base 5 up and down, and a height detection means 54 for detecting the height of the transport base 5 relative to the optical axis L. In accordance with a light-reception/no-light-reception detection result fed from the optical sensor 62 and the height of the transport base 5, a judgment means 72a of a control section 7 judges whether the postures of the retention arms 41a-41e relative to the horizontal plane are normal. When the judgment means 72a judges that the postures of the retention arms 41a-41e relative to the horizontal plane are abnormal, the control section 7 exercises control to stop the substrate transport means 4.

Abstract: A paper carrying device includes a carrying path, a light sensor, a contact sensor, and a judgment section. Both of the light sensor and the contact sensor output a presence-signal indicating that paper exists at a predetermined position in the carrying path or an absence-signal indicating that paper does not exist at the predetermined position. The judgment section judges that a signal output from the light sensor is an error when the light sensor outputs the presence-signal while the contact sensor outputs the absence-signal.

Abstract: The present invention is to provide a laser irradiation method for performing homogeneous laser irradiation to the irradiation object even when the thickness of the irradiation object is not even. In the case of irradiating the irradiation object having uneven thickness, the laser irradiation is performed while keeping the distance between the irradiation object and the lens for condensing the laser beam on the surface of the irradiation object constant by using an autofocusing mechanism. In particular, when the irradiation object is irradiated with the laser beam by moving the irradiation object relative to the laser beam in the first direction and the second direction of the beam spot formed on the irradiation surface, the distance between the irradiation object and the lens is controlled by the autofocusing mechanism before the irradiation object is moved in the first and second directions.

Abstract: A method and system analyzes data acquired by image systems to more rapidly identify objects of interest in the data. In one embodiment, z-depth data are segmented such that neighboring image pixels having similar z-depths are given a common label. Blobs, or groups of pixels with a same label, may be defined to correspond to different objects. Blobs preferably are modeled as primitives to more rapidly identify objects in the acquired image. In some embodiments, a modified connected component analysis is carried out where image pixels are pre-grouped into regions of different depth values preferably using a depth value histogram. The histogram is divided into regions and image cluster centers are determined. A depth group value image containing blobs is obtained, with each pixel being assigned to one of the depth groups.

Abstract: An apparatus for detecting the position of application of a sealing strip of heat-seal plastic material onto a multilayer web of packaging material for food products advanced along a predetermined path and including at least one base layer for stiffness and strength and one or more heat-seal plastic layers; the sealing strip has a first longitudinal portion, applied onto a longitudinal edge of the web, and a second longitudinal portion projecting laterally from the longitudinal edge. The apparatus comprises a light source for irradiating a transversal portion of the web during movement thereof along its path, and a sensor detecting a quantity related to different behavior of the materials forming the web and the sealing strip to light exposure and generating an output signal related to the width of the second portion of the sealing strip in a direction orthogonal to the web travelling direction and parallel to said web.

Abstract: Embodiments relate to a MEMS device including a scanner rotatable about at least one rotation axis, with the scanner having a characteristic resonant frequency. According to one embodiment, the MEMS device includes drive electronics operable to generate a drive signal that causes the scanner to oscillate at an operational frequency about the at least one rotation axis. The drive signal has a drive frequency selected to be about equal to the characteristic resonant frequency or a sub-harmonic frequency of the characteristic resonant frequency. According to another embodiment, the drive electronics are operable to generate a drive signal having a plurality of drive-signal pulses that moves the scanner at an operational frequency and sensing electronics are operable to sense a position of the scanner only when the drive-signal pulses of the drive signal are not being transmitted by the drive electronics. The MEMS device embodiments may be incorporated in scanned beam imagers, endoscopes, and displays.

Abstract: A system is provided where the system comprises a plurality of optical sources, each optical source configured to generate an optical beam and direct the optical beam from each of the plurality of optical sources towards a target; a beam discriminator module configured to monitor a parameter for each optical beam generated from each of the optical source; and a position sensor configured to receive a feedback from the beam discriminator module based on the monitored parameter; wherein based on the feedback, the position sensor determines if any optical beam at the target is off-target.

Abstract: There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions.

Abstract: A method to sense pH of a fluid and an optical pH sensor. The method includes the steps of supplying at least a portion of an optical source through an input fiber. The optical source is passed through a sensor head having a sapphire window to a fluid. Optical power reflected from the fluid is collected in a plurality of output fibers in the sensor head. The reflected optical power in the output fibers in the sensor head is thereafter converted to an electrical signal which is used to determine the pH of the fluid.

Abstract: An optical locating and tracking system may have two or more optical scanners, one or more optical detectors responsive to radiation from one or more optical sources, and a controller coupled to the detector(s) and the scanner(s). Each scanner has a reflector mounted to a two-dimensional actuator that tilts the reflector about first and second axes. The controller determines whether a given reflector of a given scanner is aligned to provide an optical path between the optical source(s) and the detector(s) from one or more detection signals from the one or more optical detectors. The optical path originates, terminates or is deflected at the object. The controller also determines the object's position in three dimensions from control signals to the two-dimensional actuators of the scanners obtained the reflectors are aligned to provide the optical path. The control signals determine a tilt of each reflector about its first and second axes.

Abstract: A method of guiding a vehicle comprises sensing a position of a laser beam using a laser sensor and receiving a signal from the laser sensor wherein the signal is representative of the position of the laser beam. The method further includes interpreting the signal, generating a control signal in response to the laser beam being greater than a predetermined distance from a predetermined reference position and wherein the control signal is configured to control the vehicle to track the position of the laser beam. The method additionally comprises sending the control signal to a drive actuator.

Abstract: An apparatus for the measurement of optical sensor performance includes a light emitter, a focuser and a controller. The optical sensor comprises a plurality of pixels, which may be arranged as a pixel array. The light emitter projects a light spot onto the sensor. The focuser focuses the light spot onto a specified portion of the sensor in accordance with a control signal. The controller analyzes an output signal of the optical sensor, and generates the control signal to an accuracy substantially confining the light spot to a single pixel in accordance with the analysis.

Abstract: A defect review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated, minimizing a reduction in throughput. field of view (FOV) necessary for the specimen to be within the FOV is set according to a convergence value of the calculated deviation amount.

Abstract: The image sensor 15 of the information processing apparatus 1 can capture the retroreflective sheet 17 subjected to infrared light emitted from the infrared emitting diodes 11 since the retroreflective sheet 17 is exposed when the open-close portion 19 is opened. Therefore, it is possible to detect the input device 3. On the other hand, when the open-close portion 19 is closed, the image sensor 15 can not capture the retroreflective sheet 17 since the reflective sheet 17 is not exposed. Therefore, the input device is not detected.

Abstract: A telescope having a focus display includes a tube assembly, a sensor and a focus display. The tube assembly has a first tube and a second tube connected within the first tube. The first tube has an opening. The sensor is provided on the second tube. The focus display is provided in the opening of the first tube. The focus display is provided with a screen, a processing unit and an electromagnetic sensing unit. The electromagnetic sensing unit, the processing unit and the screen are electrically connected with each other. When the first tube is telescopically moved with respect to the second tube, the electromagnetic sensing unit receives and senses the change in the electromagnetic field of the sensor. The processing unit then calculates the displacement and displays the data on the screen, so that the user can focus the telescope to obtain the clearest image.

Abstract: An object-detecting lighting system comprises a light source emitting visible light. A source controller is connected to the light source to drive the light source into emitting the visible light in a predetermined mode. An optical detector is positioned with respect to the light source and is adapted to detect the visible light as reflected/backscattered by an object. A data/signal processor is connected to the source controller and the optical detector to receive detection data from the optical detector. The data/signal processor produces a data output associated to the object as a function of the predetermined mode and the detection data.

Abstract: A surface sensing device for use in position determining apparatus has an elongate stylus (74) with a tip (82) for scanning the surface of a workpiece to be measured. Lateral displacements of the stylus tip are detected by a light beam which passes along the stylus from a light source (66) to a retroreflector (78). This reflects the beam back via a beamsplitter (70) to a position sensitive detector (76). The stylus is mounted for longitudinal displacement on a carriage (72). The longitudinal displacement is measured by another light beam projected by the beamsplitter (70) onto a second position sensitive detector (84).

Abstract: A universal self-contained proximity sensor for attachment to any night-vision device that does not have such a sensor or for replacement of the existing sensor. The proposed sensor has a cable with a connection cap that connects terminal contacts of the sensor with the master battery of the night-vision device and can be mechanically connected to the master-battery compartment of the night-vision device by replacing the existing cap of mastery-battery compartment. The sensor can be attached to any selected area on the surface of the night-vision device by means of tiny hooks and loops known under trademark Velcro®. This attachment is carried out with the use of two parts, one of which is adhesively attached to the substrate of the sensor and the other to the housing of the night-vision device, while both parts engage through the aforementioned tiny hooks and loops.

Abstract: Disclosed herein are a system to test an electronic part and a method of controlling the same, which are capable of automatically detecting a position of a socket according to a variation in a position of the socket to efficiently test the electronic part. The system to test an electronic part using a robot to automatically test the electronic part includes: a distance measuring unit measuring a distance between a socket mounted on a substrate to test the electronic part and a reference block to provide a reference position; a position measuring unit detecting positional information of the reference block; and a controller calculating positional information of the socket using the measured distance between the socket and the reference block on the basis of the detected positional information of the reference block and controlling the robot using the calculated positional information of the socket.

Abstract: An optical position tracking device and a method of testing the same are provided. The device includes: a controller for generating at least one test operation signal in response to a command signal; a test signal generator for generating a test signal during a test operation in response to the test operation signal; a motion calculator for receiving the test signal during the test operation and performing operations in response to the test operation signal to output an output signal; and an output signal analyzer for determining whether the output signal is correct during the test operation in response to the test operation signal to output a result signal. Thus, the complexity of the method of testing the optical position tracking device can be markedly reduced and it is unnecessary to employ a high-performance test apparatus.

Abstract: A map of the surface of a substrate is generated at a measurement station. The substrate is then moved to where a space between a projection lens and the substrate is filled with a liquid. The substrate is then aligned using, for example, a transmission image sensor and, using the previous mapping, the substrate can be accurately exposed. Thus the mapping does not take place in a liquid environment.

Abstract: Particle detection systems without knowledge of a location and velocity of a particle passing through a volume of space, are less efficient than if knowledge of the particle location is known. An embodiment of a particle position detection system capable of determining an exact location of a particle in a fluid stream is discussed. The detection system may employ a patterned illuminating beam, such that once a particle passes through the various portions of the patterned illuminating beam, a light scattering is produced. The light scattering defines a temporal profile that contains measurement information indicative of an exact particle location. However, knowledge of the exact particle location has several advantages. These advantages include correction of systematic particle measurement errors due to variability of the particle position within the sample volume, targeting of particles based on position, capture of particles based on position, reduced system energy consumption and reduced system complexity.

Abstract: There are many inventions described herein. Some aspects are directed to methods and/or apparatus to provide relative movement between optics, or portion(s) thereof, and sensors, or portion(s) thereof, in a digital camera. The relative movement may be in any of various directions. In some aspects, relative movement between an optics portion, or portion(s) thereof, and a sensor portion, or portion(s) thereof, are used in providing any of various features and/or in the various applications disclosed herein, including, for example, but not limited to, increasing resolution, optical and electronic zoom, image stabilization, channel alignment, channel-channel alignment, image alignment, lens alignment, masking, image discrimination, range finding, 3D imaging, auto focus, mechanical shutter, mechanical iris, multi and hyperspectral imaging, and/or combinations thereof.

Abstract: Systems and methods adapted for use with uncalibrated patterned surfaces for sensing any of position, displacement, velocity, acceleration, area, and volume are provided. A system includes a memory, processing electronics, and at least one readhead adapted to move relative to the surface and including a radiation source, lens, and an optical array transducer. One aspect includes generating a mapping data set representative of an intensity map of the patterned surface. Another aspect provides a variable travel speed readhead. Other aspects include multiple readheads adapted to travel in concert. Incremental and absolute sensing are provided, including systems having sub-pixel spatial resolution.

Abstract: An optical measurement device for determining at least two parameters of a measurement location of a surface of at least one workpiece positioned in a known coordinate system is described. The device comprises a first light source providing a first measurement beam. The first measurement beam is directed at a first surface of a workpiece. The device also comprises a second light source providing a second measurement beam. The second measurement beam is directed at a second surface of a workpiece facing opposite the first surface. Further, the device comprises a first system of receiving optics. The first system of receiving optics detects the incoming position of the first measurement beam. The first system of receiving optics is positioned on an opposite side of a workpiece from the first light source. Further still, the device comprises a second imaging system. The second system of receiving optics detects the incoming position of the second measurement beam.

Abstract: A device and method for detecting the presence or absence of an object which has repetitive motion are disclosed comprising, a receiver for receiving a signal from the object, and circuitry for determining the presence or absence of the object to be detected, wherein the circuitry records the signal from the receiver as a pattern of data during at least part of the repetitive motion of the object, compares the data with a previously recorded data pattern and, produces an output signal based on the comparison. The signal may be received during discrete time intervals, and may be light which can be transmitted with varying intensity. The circuitry may determine the value of signal received at a receiver and produce a binary value. The signal received at the receiver can be reflected from the object to be detected.

Abstract: The image sensor 15 of the information processing apparatus 1 can capture the retroreflective sheet 17 subjected to infrared light emitted from the infrared emitting diodes 11 since the retroreflective sheet 17 is exposed when the open-close portion 19 is opened. Therefore, it is possible to detect the input device 3. On the other hand, when the open-close portion 19 is closed, the image sensor 15 can not capture the retroreflective sheet 17 since the reflective sheet 17 is not exposed. Therefore, the input device is not detected.

Abstract: There is provided a surface position measuring system which includes a reflectivity computing module which computes predictive reflectivities of a plurality of circuit patterns, an inspection light source which irradiates an inspection light onto each of a plurality of inspection areas, area by area, above the plurality of circuit patterns under irradiation conditions determined based on a corresponding each of the predictive reflectivities of the plurality of circuit patterns, and a photodetector which detects a reflected inspection light reflected from each of the plurality of inspection areas to detect a surface position of a corresponding each of the plurality of inspection areas.

Abstract: A system including a data acquisition system and a processing system is provided. The data acquisition system is configured to capture a first reference frame that includes a first feature in a first imaging area on a substrate prior to a relative position between the data acquisition system and the substrate being adjusted by approximately a predetermined distance during a first time period, capture a first comparison frame that includes the first feature in a second imaging area on the substrate and a second reference frame that includes a second feature in the first imaging area on the substrate subsequent to the first time period, and capture a second comparison frame that includes the second feature in the second imaging area on the substrate subsequent to the relative position being adjusted by approximately the predetermined distance during a second time period that is subsequent to the first time period. The second imaging area is separated from the first imaging area by the predetermined distance.

Abstract: A method and apparatus wherein a substrate is provided with a preformatted structure, with structural elements arranged in a matrix, wherein the matrix extends in an X-direction and Y-direction, wherein a processing head is provided, wherein a camera is provided which is connected with the processing head and which comprises at least one series of sensors arranged along a main line, wherein the camera scans the substrate and thereby provides at least one one-dimensional camera signal, wherein, for real-time determining at least the X-position and the Y-position of the structure with respect to the camera, the said main line includes an angle with the X-direction and with the Y-direction, wherein the angle is chosen such that the camera signal contains spatially separated X-position information and Y-position information and that the X-position information and the Y-position information can be separated from the sensor signal with the aid of signal processing.

Abstract: A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.

Abstract: Input apparatus and methods are described. An object is illuminated with output light. Diffuse reflections of the output light from the object are captured. Diffuse reflection optical data is produced from the captured diffuse reflections. Specular reflections of the output light from the object are captured. Specular reflection optical data is produced from the captured specular reflections. A first set of motion measures indicative of movement in relation to the object is produced from the diffuse reflection optical data. A second set of motion measures indicative of movement in relation to the object is produced from the specular reflection optical data.

Abstract: A multifunction detector for detecting energy reflected from the surface, the detector comprising: a focal plane array in communication with the optical receiving path; and an optical receiving path; a read-only integrated circuit in communication with the optical receiving path, integrated with a focal plane array; and a processor programmed to operate the focal plane array and read-out integrated circuit in a first mode to process signals in a first frequency band, and in a second mode to process signals in a second, wider frequency band.

Abstract: This patent specification describes a relative position detection device and a detector for a rotary body and an image forming apparatus including the relative position detection device. The relative position detection device includes a scale comprising a pattern continuously formed by changing reflectance or transmittance and moving in a direction, a light source to irradiate the scale, a light receiving unit to read the pattern and output a signal, and a signal processing unit to process the output signal of the light receiving unit. The pattern is formed by a line pattern having regularly spaced lines perpendicular to the direction of movement of the scale, the light receiving unit is slanted with respect to the lines, and the relative position detection device detects a relative position change and speed change of the scale.

Abstract: Remote control systems that can distinguish predetermined light sources from stray light sources, e.g., environmental light sources and/or reflections are provided. The predetermined light sources can be disposed in asymmetric substantially linear or two-dimensional patterns. The predetermined light sources also can output waveforms modulated in accordance with one or more signature modulation characteristics. The predetermined light sources also can output light at different signature wavelengths.

Abstract: A magnetic field gradient is generated in a space, and a microparticle is flied downward in the space, thereby applying a magnetic force from the magnetic field gradient onto the microparticle. Then, a velocity and an acceleration of the microparticle due to the magnetic force are measured, thereby measuring a mass of the microparticle on the measured velocity and a magnetic susceptibility of the microparticle.

Abstract: A static/dynamic multi-function measuring device for linear unit, includes a foundation, a multi-direction sliding unit having eddy current detector, a linear motor, a linear unit with a sensing element and an optical measuring unit; the static/dynamic multi-function measuring device uses the linear motor to drive the multi-direction sliding unit with low friction to provide a non-contact measurement of a parallel alignment of the linear unit, a linear accuracy measurement of the linear unit, and a vibration measurement of the linear unit to detect the parallel alignment of the linear unit and the linear accuracy of a slide rail and so on, the static/dynamic multi-function measuring device also measures errors of the linear unit and a slide block moving in the vibrating and the rolling direction.

Abstract: An optical encoder which is designed to convert light generated from a light source into parallel light rays by using a collimator lens, thereby allowing the collimated light to radiate to gratings (a first grating, a second grating and a third grating). A diffusing element (a diffusion plate or a diffusion surface) is provided between the light source and the collimator lens to mitigate the parallelization degree of light, thereby weakening the second-order and the third-order or high-order diffraction light. Consequently, even where a light emitting diode (LED) or laser diode (LD) is used as the light source, a favorable interference output can be obtained.

Abstract: The invention provides a measuring apparatus that can efficiently analyze a three-dimensional image by simultaneously recording a circular streak image and a straight-line streak image at a measured point, even when a large number of circular streak images are present. A measuring apparatus includes: a 3CCD camera; a cubic beam splitter that combines optical images incident from plural routes; a mirror that shifts an image focusing position of an optical image at a measured point by a predetermined distance; a coloring unit that applies a predetermined color to an optical image incident to a route of the beam splitter; a motor that rotates the beam splitter and the mirror in a direction of an arrowhead; and a PC that calculates a three-dimensional position of the measured point based on the optical image recorded by a camera.