With Irregularities On Electrode To Facilitate Charging Or Discharging Of Floating Electrode Patents (Class 257/317)
  • Patent number: 11869917
    Abstract: Aspects of the technology described herein relate to improved semiconductor-based image sensor designs. In some embodiments, an integrated circuit may comprise a photodetection region and a drain region electrically coupled to the photodetection region, and the photodetection region may be configured to induce an intrinsic electric field in a direction from the photodetection region to the drain region(s). In some embodiments, a charge storage region and the drain region may be positioned on a same side of the photodetection region. In some embodiments, at least one drain layer may be configured to receive incident photons and/or charge carriers via the photodetection region. In some embodiments, an integrated circuit may comprise a plurality of pixels and a control circuit configured to control a transfer of charge carriers in the plurality of pixels.
    Type: Grant
    Filed: January 14, 2021
    Date of Patent: January 9, 2024
    Assignee: Quantum-Si Incorporated
    Inventors: Eric A. G. Webster, Changhoon Choi, Dajiang Yang, Xin Wang, Todd Rearick, Kyle Preston, Ali Kabiri, Gerard Schmid
  • Patent number: 11854632
    Abstract: A semiconductor memory structure includes a substrate having thereon a transistor forming region and a capacitor forming region. A transistor is disposed on the substrate within the transistor forming region. A capacitor is disposed within the capacitor forming region and electrically coupled to the transistor. A first inter-layer dielectric layer covers the transistor forming region and the capacitor forming region. The first inter-layer dielectric layer surrounds a metal gate of the transistor and a bottom plate of the capacitor. A cap layer is disposed on the first inter-layer dielectric layer. The cap layer has a first thickness within the transistor forming region and a second thickness within the capacitor forming region. The first thickness is greater than the second thickness. The cap layer within the capacitor forming region acts as a capacitor dielectric layer of the capacitor.
    Type: Grant
    Filed: October 15, 2021
    Date of Patent: December 26, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kuo-Hsing Lee, Chien-Liang Wu, Wen-Kai Lin, Te-Wei Yeh, Sheng-Yuan Hsueh, Chi-Horn Pai
  • Patent number: 11812561
    Abstract: Thermally induced graphene sensing circuitry and methods for producing circuits from such thermally induced circuits are presented in conjunction with applications to hydrocarbon exploration and production, and related subterranean activities. The thermally induced graphene circuity advantageously brings electrically interconnections otherwise absent on oilfield service tools, enabling components and tools to become smart.
    Type: Grant
    Filed: April 8, 2020
    Date of Patent: November 7, 2023
    Assignee: Schlumberger Technology Corporation
    Inventors: Manuel Marya, Alireza Zolfaghari, Srinand Karuppoor
  • Patent number: 11765886
    Abstract: The present invention discloses a semiconductor memory device, including a substrate, active areas, first wires and at least one first plug. The active areas extend parallel to each other along a first direction, and the first wires cross over the active areas, wherein each of the first wires has a first end and a second end opposite to each other. The first plug is disposed on the first end of the first wire and electrically connected with the first wire, wherein the first plug entirely wraps the first end of the first wire and is in direct contact with a top surface, sidewalls and an end surface of the first end. Therefore, the contact area between the plug and the first wires may be increased, the contact resistance of the plug may be reduced, and the reliability of electrical connection between the plug and the first wires may be improved.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: September 19, 2023
    Assignee: Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Yu-Cheng Tung, Huixian Lai, Yi-Wang Jhan
  • Patent number: 11756603
    Abstract: On a substrate, dynamic flash memory cell transistors and, on their outside, driving-signal processing circuit transistors are disposed. A source line wiring layer, a bit line wiring layer, a plate line wiring layer, and a word line wiring layer extend in the horizontal direction relative to the substrate and connect, from the outside of a dynamic flash memory region, in the perpendicular direction, to lead-out wiring layers on an insulating layer. The transistors in driving-signal processing circuit regions connect, via multilayered wiring layers, to upper wiring layers on the insulating layer. A high-thermal-conductivity layer is disposed over the entirety of the dynamic flash memory region and in a portion above the bit line wiring layer.
    Type: Grant
    Filed: April 11, 2022
    Date of Patent: September 12, 2023
    Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
    Inventors: Nozomu Harada, Koji Sakui
  • Patent number: 11721738
    Abstract: An integrated circuit includes a power transistor having at least one transistor finger that lies within a semiconductor material substrate. Each transistor finger has a source region stripe and a substantially parallel drain region stripe. A gate structure lies between the source region stripe and the drain region stripe and has a plurality of fingers that extend over the source region stripe. Contacts are formed that connect to the fingers of the gate structure over thick oxide islands in the source region stripes. A conductive gate runner is connected to the contacts of the gate layer structure over the thick oxide islands in the source region stripe.
    Type: Grant
    Filed: March 10, 2021
    Date of Patent: August 8, 2023
    Assignee: Texas Instmments Incorporated
    Inventors: Sameer Pendharkar, Guru Mathur
  • Patent number: 11688809
    Abstract: A semiconductor device structure includes a fin structure, a semiconductive capping layer, an oxide layer, and a gate structure. The fin structure protrudes above a substrate. The semiconductive capping layer wraps around three sides of a channel region of the fin structure. The oxide layer wraps around three sides of the semiconductive capping layer. A thickness of a top portion of the semiconductive capping layer is less than a thickness of a top portion of the oxide layer. The gate structure wraps around three sides of the oxide layer.
    Type: Grant
    Filed: April 17, 2021
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Ching, Kuan-Ting Pan, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11690220
    Abstract: A flash includes a substrate. Two gate structures are disposed on the substrate. Each of the gate structures includes a floating gate and a control gate. The control gate is disposed on the floating gate. An erase gate is disposed between the gate structures. Two word lines are respectively disposed at a side of each of the gate structures. A top surface of each of the word lines includes a first concave surface and a sharp angle. The sharp angle is closed to a sidewall of the word line which the sharp angle resided. The sidewall is away from each of the gate structures. The sharp angle connects to the first concave surface.
    Type: Grant
    Filed: July 12, 2022
    Date of Patent: June 27, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Xiaojuan Gao, Chi Ren
  • Patent number: 11552088
    Abstract: A method of forming a flash memory cell includes the following steps. A first dielectric layer and a floating gate layer are deposited on a substrate sequentially. Three blocking structures having oblique sidewalls broaden from bottom to top penetrating through the first dielectric layer and the floating gate layer are formed. A first part and a second part of the floating gate layer between two adjacent blocking structures are etched respectively, so that a first floating gate having two sharp top corners and oblique sidewalls, and a second floating gate having two sharp top corners and oblique sidewalls, are formed. The three blocking structures are removed. A first isolating layer and a first selective gate covering the first floating gate are formed and a second isolating layer and a second selective gate covering the second floating gate are formed. A flash memory cell formed by said method is also provided.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: January 10, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Min Hung, Ping-Chia Shih, Che-Hao Kuo, Kuei-Ya Chuang, Ssu-Yin Liu, Po-Hsien Chen, Wan-Chun Liao
  • Patent number: 11532745
    Abstract: Integrated circuit (IC) structures including asymmetric, recessed source and drain regions and methods for forming are provided. In an example, the IC structure includes a substrate, a gate structure over the substrate, first and second spacers contacting respective, opposite sidewalls of the gate structure, and source and drain regions on opposite sides of the gate structure. In one configuration, the source region includes an upper source portion having a first lateral width, and a lower source portion having a second lateral width greater than the first lateral width, and the drain region includes an upper drain portion having a third lateral width, and a lower drain portion having a fourth lateral width that is substantially the same as the third lateral width.
    Type: Grant
    Filed: March 2, 2020
    Date of Patent: December 20, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Man Gu, Wenjun Li
  • Patent number: 11527631
    Abstract: Memory cells having a first dielectric between a charge storage material and a semiconductor, conductive nanodots between the charge storage material and a control gate, and a second dielectric between the control gate and the conductive nanodots.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: December 13, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Nirmal Ramaswamy
  • Patent number: 11398279
    Abstract: The present disclosure provides a method for programming charge trap flash memory, including: enabling a channel of a charge trap storage component, to form a transverse electric field between a source and a drain, to generate primary electrons flowing from the source to the drain; colliding, by the primary electrons after a preset time, with the drain to generate electron holes; applying voltages to the drain and a substrate, where the electron holes are accelerated downward by the action of the electric field to collide with the substrate, to generate secondary electrons; and applying voltages to a gate and the substrate, to form a vertical electric field, wherein the secondary electrons generate tertiary electrons under the action of the vertical electric field and the tertiary electrons are injected into an insulating storage medium layer of the charge trap storage component, to complete a programming operation.
    Type: Grant
    Filed: October 20, 2021
    Date of Patent: July 26, 2022
    Assignee: CHINA FLASH CO., LTD.
    Inventors: Hong Nie, Jingwei Chen
  • Patent number: 10957774
    Abstract: An integrated circuit includes a power transistor having at least one transistor finger that lies within a semiconductor material substrate. Each transistor finger has a source region stripe and a substantially parallel drain region stripe. A gate structure lies between the source region stripe and the drain region stripe and has a plurality of fingers that extend over the source region stripe. Contacts are formed that connect to the fingers of the gate structure over thick oxide islands in the source region stripes. A conductive gate runner is connected to the contacts of the gate layer structure over the thick oxide islands in the source region stripe.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: March 23, 2021
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Sameer Pendharkar, Guru Mathur
  • Patent number: 10861737
    Abstract: A semiconductor device is provided. The semiconductor device includes a semiconductor layer, and a trench formed in a top surface of the semiconductor layer. The trench has a bottom surface and a sidewall. The semiconductor device further includes source and drain regions. One of the source and drain regions may be disposed at the bottom surface of the trench, and the other may be disposed at the top surface of the semiconductor layer, or vice versa. Alternatively, both source and drain regions may be disposed at the bottom surface of the trench. The semiconductor device may further include a first insulator disposed in the trench and in between the source and drain regions. The semiconductor device may further include a second insulator disposed between first insulator and the source region. The semiconductor device may further include a conductive member that disposed on the first insulator, or on the first and second insulators.
    Type: Grant
    Filed: April 19, 2018
    Date of Patent: December 8, 2020
    Assignee: Vanguard International Semiconductor Corporation
    Inventor: Chien-Hsien Song
  • Patent number: 10777511
    Abstract: A semiconductor device includes a semiconductor substrate, at least two first films, a bridge portion, and a conductive member. The two first films are spaced apart from each other, along a first direction which is an in-plane direction of the semiconductor substrate, and along a second direction which is in the in-plane direction of the semiconductor substrate and is perpendicular to the first direction. The bridge portion connects portions of side facing surfaces of the two first films to each other, and has a flat bottom surface. The conductive member is provided under the bottom surface of the bridge portion.
    Type: Grant
    Filed: August 31, 2018
    Date of Patent: September 15, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Kazuhiro Ooshima
  • Patent number: 10714690
    Abstract: The invention discloses a dopamine-based self-polymerization electric storage material and a preparation method thereof and the application thereof in an electric storage device, and the self-polymerization of dopamine is generated by solving the problems of complicated preparation process, poor environment and high temperature stability of the current organic electric storage material. The organic electric storage device prepared by the polymer into a sandwich structure successfully realizes the organic electric storage behavior. In the preparation process, the molecular synthesis and the device preparation are completed simultaneously, the device environment and the high temperature stability are good, and it is of great significance to the research progress of the organic electric storage technology and practical value.
    Type: Grant
    Filed: April 10, 2019
    Date of Patent: July 14, 2020
    Assignee: SOOCHOW UNIVERSITY
    Inventors: Jianmei Lu, Jinghui He
  • Patent number: 10700171
    Abstract: A method for manufacturing a flash memory device on a substrate may include: preparing the substrate with shallow trench isolation to define active sections; depositing a floating gate oxide layer on the prepared substrate; depositing a floating gate polysilicon layer on the floating gate oxide layer; polishing the floating gate polysilicon layer to isolate a plurality of floating gates above the active sections of the substrate; depositing a silicon nitride layer on top of the plurality of floating gates; patterning and etching the silicon nitride layer to create silicon nitride features; depositing a set of oxide spacers along sides of the silicon nitride features; implanting a source junction into the substrate beneath the individual floating gates; removing the floating gate polysilicon layer except where beneath individual oxide spacers, then removing the set of oxide spacers; depositing an inter-poly layer on top of the remaining floating gates; depositing a second polysilicon layer on top of the inter-
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: June 30, 2020
    Assignee: MICROCHIP TECHNOLOGY INCORPORATED
    Inventors: Sonu Daryanani, Bomy Chen, Mel Hymas
  • Patent number: 10256309
    Abstract: Memory cells having electrically conductive nanodots between a charge storage material and a control gate are useful in non-volatile memory devices and electronic systems.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: April 9, 2019
    Assignee: Micron Technology, Inc.
    Inventor: Nirmal Ramaswamy
  • Patent number: 10211511
    Abstract: The purpose of the present invention is to provide a terahertz detector using a field-effect transistor capable of implementing high sensitivity by exhibiting an asymmetric characteristic only with a form of a source/drain and a gate. To this end, the present invention relates to the terahertz detector using a field-effect transistor comprising: a source formed by being doped on a portion of a silicon base; a channel formed so as to encompass the source on a plane; a drain formed outside the channel; a dielectric layer formed on an upper end of the source, the channel and the drain; and a gate located at an upper end of the dielectric layer, wherein when terahertz electromagnetic waves are applied through the gate, the intensity of the electromagnetic waves is detected using a current/voltage outputted from the source and the drain.
    Type: Grant
    Filed: January 23, 2015
    Date of Patent: February 19, 2019
    Assignee: UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
    Inventors: Kyung Rok Kim, Min Woo Ryu, Kwan Sung Kim
  • Patent number: 9978635
    Abstract: A semiconductor device is provided. The semiconductor device includes a semiconductor layer, and a trench formed in a top surface of the semiconductor layer. The trench has a bottom surface and a sidewall. The semiconductor device further includes source and drain regions. One of the source and drain regions may be disposed at the bottom surface of the trench, and the other may be disposed at the top surface of the semiconductor layer, or vice versa. Alternatively, both source and drain regions may be disposed at the bottom surface of the trench. The semiconductor device may further include a first insulator disposed in the trench and in between the source and drain regions. The semiconductor device may further include a second insulator disposed between first insulator and the source region. The semiconductor device may further include a conductive member that disposed on the first insulator, or on the first and second insulators.
    Type: Grant
    Filed: April 1, 2014
    Date of Patent: May 22, 2018
    Assignee: Vanguard International Semiconductor Corporation
    Inventor: Chien-Hsien Song
  • Patent number: 9627474
    Abstract: A semiconductor device and a method for fabricating the same are disclosed. The semiconductor device comprises: a semiconductor substrate with an active area defined by a plurality of isolation features; a gate stack extending across the active area onto portions of the isolation features, wherein the gate stack comprising a gate dielectric layer on the active area and the portions of the isolation features, and a gate electrode on the gate dielectric layer; and a protective seal comprising a vertical portion lining sidewalls of the gate stack and a horizontal portion extending onto a top surface of the isolation features, wherein the horizontal portion surrounding portions of the gate stack outside the active area in a top view.
    Type: Grant
    Filed: September 18, 2015
    Date of Patent: April 18, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Po-Shu Wang, Chien-Mao Chen
  • Patent number: 9627312
    Abstract: An on-chip capacitor a semiconductive substrate is fabricated in a passivation layer that is above the back-end metallization. At least three electrodes are configured in the on-chip capacitor and power and ground vias couple at least two of the at least three electrodes. The first via has a first-coupled configuration to at least one of the first- second- and third electrodes and the second via has a second-coupled configuration to at least one of the first- second- and third electrodes.
    Type: Grant
    Filed: October 1, 2011
    Date of Patent: April 18, 2017
    Assignee: Intel Corporation
    Inventors: Michael A. Childs, Kevin J. Fischer, Sanjay S. Natarajan
  • Patent number: 9592664
    Abstract: An integrated circuit including a first EPROM, a second EPROM, and a circuit. The first EPROM is configured to provide a first state and a second state. The second EPROM is configured to provide a third state and a fourth state. The circuit is configured to select the first EPROM and the second EPROM individually and in parallel with each other.
    Type: Grant
    Filed: September 27, 2011
    Date of Patent: March 14, 2017
    Assignee: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
    Inventors: Ning Ge, Paul I. Mikulan, Bee Ling Peh
  • Patent number: 9576840
    Abstract: A method of manufacturing a semiconductor device includes forming a first plurality of recessed regions in a substrate, the substrate having a protruded active region between the first plurality of recessed regions and the protruded active region having an upper surface and a sidewall, forming a device isolation film in the first plurality of recessed regions, the device isolation film exposing the upper surface and an upper portion of the sidewall of the protruded active region, and performing a first plasma treatment on the exposed surface of the protruded active region, wherein the plasma treatment is performed using a plasma gas containing at least one of an inert gas and a hydrogen gas in a temperature of less than or equal to about 700.
    Type: Grant
    Filed: November 17, 2014
    Date of Patent: February 21, 2017
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jaeyoung Park, Sungho Kang, Kichul Kim, Sunyoung Lee, Han Ki Lee, Bonyoung Koo
  • Patent number: 9293358
    Abstract: A method of forming active areas and isolation regions in a semiconductor substrate using a double patterning process. The method include forming a first material on the substrate surface, forming a second material on the first material, forming a plurality of first trenches into the second material wherein the plurality of first trenches are parallel to each other, forming a second trench into the second material wherein the second trench is perpendicular to and crosses the plurality of first trenches in a central region of the substrate, filling the first and second trenches with a third material, removing the second material to form third trenches in the third material that are parallel to each other and do not extend through the central region of the substrate, and extending the third trenches through the first material and into the substrate.
    Type: Grant
    Filed: January 23, 2014
    Date of Patent: March 22, 2016
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Jeng-Wei Yang, Chien-Sheng Su
  • Patent number: 9171861
    Abstract: A semiconductor memory device includes a first dummy transistor coupled to a bit line, a first select transistor formed where a first selection line surrounds a vertical channel layer, a second dummy transistor coupled to a common source line, a second select transistor formed where a second selection line surrounds the vertical channel layer, and main cell transistors coupled between the first and second select transistors.
    Type: Grant
    Filed: August 2, 2013
    Date of Patent: October 27, 2015
    Assignee: SK Hynix Inc.
    Inventor: Il Young Kwon
  • Patent number: 9130085
    Abstract: An apparatus comprises a graphene film; a first arrangement of quantum dots of a first type located in contact with the graphene film as a first monolayer; a second arrangement of quantum dots of a second type located in contact with the graphene film as a second monolayer; an input voltage source connected to an end of the graphene film; and an output voltage probe connected to the graphene film between the first arrangement of quantum dots and the second arrangement of quantum dots.
    Type: Grant
    Filed: April 5, 2013
    Date of Patent: September 8, 2015
    Assignee: Nokia Technologies Oy
    Inventor: Alan Colli
  • Patent number: 9029936
    Abstract: A memory device includes a semiconductor channel, a tunnel dielectric layer located over the semiconductor channel, a first charge trap including a plurality of electrically conductive nanodots located over the tunnel dielectric layer, dielectric separation layer located over the nanodots, a second charge trap including a continuous metal layer located over the separation layer, a blocking dielectric located over the second charge trap, and a control gate located over the blocking dielectric.
    Type: Grant
    Filed: December 7, 2012
    Date of Patent: May 12, 2015
    Assignee: SanDisk Technologies Inc.
    Inventors: Vinod Purayath, George Samachisa, George Matamis, James Kai, Yuan Zhang
  • Patent number: 9024377
    Abstract: A semiconductor device capable of reducing influences of adjacent word lines is provided in the present invention. The semiconductor device includes: a substrate, and a word line disposed in the substrate. The word line includes: a gate electrode, a gate dielectric layer disposed between the gate electrode and the substrate and at least one first charge trapping dielectric layer disposed adjacent to the gate electrode, wherein the first charge trapping dielectric layer comprises HfO2, TiO2, ZrO2, a germanium nanocrystal layer, an organic charge trapping material, HfSiOxNy, or MoSiOqNz.
    Type: Grant
    Filed: December 14, 2011
    Date of Patent: May 5, 2015
    Assignee: Nanya Technology Corp.
    Inventor: Shian-Jyh Lin
  • Publication number: 20150115346
    Abstract: A semiconductor memory device includes a substrate, shallow trench isolations protruding from the substrate, a floating gate formed conformally on the surface of the recess between each shallow trench isolation, a tunnel layer formed between each floating gate and the substrate, a dielectric layer formed conformally on the floating gates, and a control gate formed on the dielectric layer.
    Type: Application
    Filed: October 25, 2013
    Publication date: April 30, 2015
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Cheng-Yuan Hsu, ZHIGUO LI, CHI REN
  • Patent number: 9018690
    Abstract: A memory device, and method of make same, having a substrate of semiconductor material of a first conductivity type, first and second spaced-apart regions in the substrate of a second conductivity type, with a channel region in the substrate therebetween, a conductive floating gate over and insulated from the substrate, wherein the floating gate is disposed at least partially over the first region and a first portion of the channel region, a conductive second gate laterally adjacent to and insulated from the floating gate, wherein the second gate is disposed at least partially over and insulated from a second portion of the channel region, and a stressor region of embedded silicon carbide formed in the substrate underneath the second gate.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: April 28, 2015
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Mandana Tadayoni, Nhan Do
  • Patent number: 9013910
    Abstract: Provided is an OTP memory cell including a first antifuse unit, a second antifuse unit, a select transistor, and a well region. The first and the second antifuse unit respectively include an antifuse layer and an antifuse gate disposed on a substrate in sequence. The select transistor includes a select gate, a gate dielectric layer, a first doped region, and a second doped region. The select gate is disposed on the substrate. The gate dielectric layer is disposed between the select gate and the substrate. The first and the second doped region are respectively disposed in the substrate at two sides of the select gate, wherein the second doped region is disposed in the substrate at the periphery of the first and the second antifuse unit. The well region is disposed in the substrate below the first and the second antifuse unit and is connected to the second doped region.
    Type: Grant
    Filed: December 10, 2013
    Date of Patent: April 21, 2015
    Assignee: eMemory Technology Inc.
    Inventors: Chin-Yi Chen, Lun-Chun Chen, Yueh-Chia Wen, Meng-Yi Wu, Hsin-Ming Chen
  • Patent number: 8994095
    Abstract: A semiconductor memory device with a buried drain is provided. The device comprises a semiconductor substrate (107); one drain region (108) of a first doping type; two source regions (101a, 101b) of a second doping type; and a stacked gate provided on the semiconductor substrate for capturing electrons. A memory array formed by a plurality of semiconductor memory devices and a manufacturing method thereof are also provided. The semiconductor memory device has the advantages of small cell area, simple manufacturing process and the like. The manufacturing cost of the memory device is reduced and the storing density of the memory device is increased.
    Type: Grant
    Filed: December 24, 2010
    Date of Patent: March 31, 2015
    Assignee: Fudan University
    Inventors: Pengfei Wang, Qingqing Sun, Shijin Ding, Wei Zhang
  • Patent number: 8981452
    Abstract: Methods for forming or patterning nanostructure arrays are provided. The methods involve formation of arrays on coatings comprising nanostructure association groups, formation of arrays in spin-on-dielectrics, solvent annealing after nanostructure deposition, patterning using resist, and/or use of devices that facilitate array formation. Related devices for forming nanostructure arrays are also provided, as are devices including nanostructure arrays (e.g., memory devices). Methods for protecting nanostructures from fusion during high temperature processing also are provided.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: March 17, 2015
    Assignee: SanDisk Corporation
    Inventors: Jian Chen, Xiangfeng Duan, Chao Liu, Madhuri Nallabolu, J. Wallace Parce, Srikanth Ranganathan
  • Patent number: 8969997
    Abstract: A method of forming of a semiconductor structure has isolation structures. A substrate having a first region and a second region is provided. The first region and the second region are implanted with neutral dopants to form a first etching stop feature and a second stop feature in the first region and the second region, respectively. The first etching stop feature has a depth D1 and the second etching stop feature has a depth D2. D1 is less than D2. The substrate in the first region and the second region are etched to form a first trench and a second trench respectively. The first trench and the second trench land on the first etching stop feature and the second etching stop feature, respectively.
    Type: Grant
    Filed: November 14, 2012
    Date of Patent: March 3, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Chang-Sheng Tsao
  • Patent number: 8940623
    Abstract: A process for obtaining an array of nanodots (212) for microelectronic devices, characterized in that it comprises the following steps: deposition of a silicon layer (210) on a substrate (100, 132), formation, above the silicon layer (210), of a layer (240) of a material capable of self-organizing, in which at least one polymer substantially forms cylinders (242) organized into an array within a matrix (244), formation of patterns (243) in the layer (240) of a material capable of self-organizing by elimination of the said cylinders (242), formation of a hard mask (312) by transfer of the said patterns (243), production of silicon dots (212) in the silicon layer (210) by engraving through the hard mask (312), silicidation of the silicon dots (212), comprising deposition of a metal layer (510).
    Type: Grant
    Filed: February 10, 2012
    Date of Patent: January 27, 2015
    Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, CNRS-Centre National de la Recherche Scientifique, Universite Joseph Fourier
    Inventors: Guillaume Gay, Thierry Baron, Eric Jalaguier
  • Patent number: 8933516
    Abstract: A three-dimensional nonvolatile memory array includes a select layer that selectively connects vertical bit lines to horizontal bit lines. Individual select switches of the select layer include two separately controllable transistors that are connected in series between a horizontal bit line and a vertical bit line. Each transistor in a select switch is connected to a different control circuit by a different select line.
    Type: Grant
    Filed: June 24, 2013
    Date of Patent: January 13, 2015
    Assignee: SanDisk 3D LLC
    Inventors: Ming-Che Wu, Wei-Te Wu, Yung-Tin Chen
  • Patent number: 8912611
    Abstract: A method of fabricating a semiconductor device includes forming a lower interfacial layer on a semiconductor layer, the lower interfacial layer being a nitride layer, forming an intermediate interfacial layer on the lower interfacial layer, the intermediate interfacial layer being an oxide layer, and forming a high-k dielectric layer on the intermediate interfacial layer. The high-k dielectric layer has a dielectric constant that is higher than dielectric constants of the lower interfacial layer and the intermediate interfacial layer.
    Type: Grant
    Filed: February 26, 2014
    Date of Patent: December 16, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: WeonHong Kim, Dae-Kwon Joo, Hajin Lim, Jinho Do, Kyungil Hong, Moonkyun Song
  • Patent number: 8907396
    Abstract: Devices, memory arrays, and methods are disclosed. In an embodiment, one such device has a source/drain zone that has first and second active regions, and an isolation region and a dielectric plug between the first and second active regions. The dielectric plug may extend below upper surfaces of the first and second active regions and may be formed of a dielectric material having a lower removal rate than a dielectric material of the isolation region for a particular isotropic removal chemistry.
    Type: Grant
    Filed: January 4, 2012
    Date of Patent: December 9, 2014
    Assignee: Micron Technology, Inc
    Inventors: John Hopkins, James Mathew, Jie Sun, Gordon Haller
  • Patent number: 8907373
    Abstract: A protection device includes a triac and triggering units. Each triggering unit is formed by a MOS transistor configured to operate at least temporarily in a hybrid operating mode and a field-effect diode. The field-effect diode has a controlled gate that is connected to the gate of the MOS transistor.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: December 9, 2014
    Assignee: STMicroelectronics SA
    Inventors: Philippe Galy, Jean Jimenez, Johan Bourgeat, Boris Heitz
  • Patent number: 8907403
    Abstract: Memory devices are provided, the memory devices include a tunneling insulating layer disposed on a substrate, a charge storage layer disposed on the tunneling insulating layer, a blocking insulating layer disposed on the charge storage layer and a control gate electrode disposed on the blocking insulating layer. The control gate electrode may have an edge portion spaced farther apart from the blocking insulating layer than a central portion of the control gate electrode to concentrate charge density distribution on a central portion of a memory cell.
    Type: Grant
    Filed: February 26, 2014
    Date of Patent: December 9, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kwang-soo Seol
  • Patent number: 8895390
    Abstract: Embodiments of the invention generally relate to memory devices and methods for manufacturing such memory devices. In one embodiment, a method for forming a memory device with a textured electrode is provided and includes forming a silicon oxide layer on a lower electrode disposed on a substrate, forming metallic particles on the silicon oxide layer, wherein the metallic particles are separately disposed from each other on the silicon oxide layer. The method further includes etching between the metallic particles while removing a portion of the silicon oxide layer and forming troughs within the lower electrode, removing the metallic particles and remaining silicon oxide layer by a wet etch process while revealing peaks separated by the troughs disposed on the lower electrode, forming a metal oxide film stack within the troughs and over the peaks of the lower electrode, and forming an upper electrode over the metal oxide film stack.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: November 25, 2014
    Assignee: Intermolecular, Inc.
    Inventor: Dipankar Pramanik
  • Patent number: 8890228
    Abstract: Provided are a semiconductor device and a method of manufacturing the same. The semiconductor device includes: a memory array on a first substrate; and a peripheral circuit on a second substrate, wherein the first substrate and the second substrate may be attached to each other so that the memory array and the peripheral circuit are electrically connected to each other.
    Type: Grant
    Filed: November 21, 2008
    Date of Patent: November 18, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Myoung-jae Lee, Young-soo Park, Chang-bum Lee, Seung-eon Ahn, Ki-hwan Kim, Bo-soo Kang
  • Patent number: 8872249
    Abstract: The technology of the present invention relates to a non-volatile memory device and a fabrication method thereof. The non-volatile memory device includes channel layers protruding vertically from a substrate, a plurality of hole-supply layers and a plurality of gate electrodes, which are alternately stacked along the channel layers, and a memory film interposed between the channel layers and the gate electrodes and between the hole-supply layers and the gate electrodes. According to this technology, the hole-supply layers are formed between the memory cells such that sufficient holes are supplied to the memory cells during the erase operation of the memory cells, whereby the erase operation of the memory cells is smoothly performed without using the GIDL current, and the properties of the device are protected from being deteriorated due to program/erase cycling.
    Type: Grant
    Filed: September 5, 2012
    Date of Patent: October 28, 2014
    Assignee: SK Hynix Inc.
    Inventor: Sung-Wook Jung
  • Patent number: 8800130
    Abstract: A charge-coupled device (CCD) image sensor includes multiple vertical charge-coupled device (VCCD) shift registers and independently-controllable gate electrodes disposed over the VCCD shift registers and arranged into physically separate and distinct sections that are non-continuous across the plurality of VCCD shift registers. The CCD image sensor can be configured to operate in two or more operating modes, including a full resolution charge multiplication mode.
    Type: Grant
    Filed: May 25, 2011
    Date of Patent: August 12, 2014
    Assignee: Truesense Imaging, Inc.
    Inventors: Antonio S. Ciccarelli, Eric J. Meisenzahl
  • Patent number: 8779501
    Abstract: Provided is an ultra highly-integrated flash memory cell device. The cell device includes a semiconductor substrate, a first doping semiconductor area formed on the semiconductor substrate, a second doping semiconductor area formed on the first doping semiconductor area, and a tunneling insulating layer, a charge storage node, a control insulating layer, and a control electrode which are sequentially formed on the second doping semiconductor area. The first and second doping semiconductor areas are doped with impurities of the different semiconductor types According to the present invention, it is possible to greatly improve miniaturization characteristics and performance of the cell devices in conventional NOR or NAND flash memories. Unlike conventional transistor type cell devices, the cell device according to the present invention does not have a channel and a source/drain.
    Type: Grant
    Filed: May 8, 2009
    Date of Patent: July 15, 2014
    Assignee: SNU R&DB Foundation
    Inventor: Jong-Ho Lee
  • Patent number: 8772856
    Abstract: Memory cells formed to include a charge storage node having conductive nanodots over a charge storage material are useful in non-volatile memory devices and electronic systems.
    Type: Grant
    Filed: January 25, 2010
    Date of Patent: July 8, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Nirmal Ramaswamy
  • Patent number: 8748967
    Abstract: An aspect of the present embodiment, there is provided a semiconductor device, including a semiconductor substrate, a first insulator above the semiconductor substrate, the first insulator containing tungsten, germanium and silicon, a charge storage film on the first insulator, a second insulator on the charge storage film and, a control gate electrode on the second insulator.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: June 10, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kenichiro Toratani, Masayuki Tanaka
  • Publication number: 20140151781
    Abstract: A process for fabricating a transistor may include forming source and drain regions in a substrate, and forming a floating gate having electrically conductive nanoparticles able to accumulate electrical charge. The process may include deoxidizing part of the floating gate located on the source side, and oxidizing the space resulting from the prior deoxidation so as to form an insulating layer on the source side.
    Type: Application
    Filed: February 5, 2014
    Publication date: June 5, 2014
    Inventor: PHILIPPE BOIVIN
  • Patent number: 8742486
    Abstract: An embodiment of the present invention is directed to a memory cell. The memory cell includes a first trench formed in a semiconductor substrate and a second trench formed in said semiconductor substrate adjacent to said first trench. The first trench and the second trench each define a first side wall and a second sidewall respectively. The memory cell further includes a first storage element formed on the first sidewall of the first trench and a second storage element formed on the second sidewall of the second trench.
    Type: Grant
    Filed: February 5, 2007
    Date of Patent: June 3, 2014
    Assignee: Spansion, LLC
    Inventors: Wei Zheng, Chi Chang, Unsoon Kim