Variable Threshold (e.g., Floating Gate Memory Device) Patents (Class 257/314)
- With additional contacted control electrode (Class 257/316)
- With irregularities on electrode to facilitate charging or discharging of floating electrode (Class 257/317)
- Additional control electrode is doped region in semiconductor substrate (Class 257/318)
- Plural additional contacted control electrodes (Class 257/319)
- With thin insulator region for charging or discharging floating electrode by quantum mechanical tunneling (Class 257/321)
- With charging or discharging by control voltage applied to source or drain region (e.g., by avalanche breakdown of drain junction) (Class 257/322)
- With means to facilitate light erasure (Class 257/323)
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Patent number: 12046527Abstract: A semiconductor device includes: a protruding conductive structure that protrudes to a height from a first surface of the semiconductor device; and a first passivation layer, the first passivation layer overlaying the protruding conductive structure by a first thickness, the first passivation layer overlaying the first surface by a second thickness greater than the first thickness, wherein the first passivation layer is planar at a top surface over the first thickness and the second thickness.Type: GrantFiled: May 20, 2022Date of Patent: July 23, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Po-Shu Wang
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Patent number: 12046512Abstract: A semiconductor device may comprise a plurality of conductive lines and a plurality of contact plugs. The plurality of conductive lines may include a first conductive line a second conductive line. The plurality of contact plugs may include a first contact plug and a second contact plug. The first contact plug may have a first pillar portion and a first protruding portion protruding from a sidewall of the first pillar portion at a first depth, so as to be in alignment and contact with a sidewall of the first conductive line. The second contact plug may have a second pillar portion and a second protruding portion protruding from a sidewall of the second pillar portion at a second depth, so as to be in alignment and contact with a sidewall of the second conductive line.Type: GrantFiled: September 1, 2021Date of Patent: July 23, 2024Assignee: SK hynix Inc.Inventor: Nam Jae Lee
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Patent number: 12046555Abstract: In a method for fabricating a semiconductor device, an initial stack of sacrificial word line layers and insulating layers is formed over a substrate of the semiconductor device. The sacrificial word line layers and the insulating layers are disposed over the substrate alternately. A first staircase is formed in a first staircase region of a connection region of the initial stack. A second staircase is formed in a second staircase region of the connection region of the initial stack. The connection region of the initial stack includes a separation region between the first and second staircases, and the connection region is positioned between array regions of the initial stack at opposing sides of the initial stack.Type: GrantFiled: October 10, 2023Date of Patent: July 23, 2024Assignee: Yangtze Memory Technologies Co., Ltd.Inventors: Zhongwang Sun, Zhong Zhang, Wenxi Zhou, Zhiliang Xia
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Patent number: 12048160Abstract: A semiconductor device includes a stacked structure with insulating layers and conductive layers that are alternately stacked on each other, a hard mask pattern on the stacked structure, a channel structure penetrating the hard mask pattern and the stacked structure, insulating patterns interposed between the insulating layers and the channel structure, wherein the insulating patterns protrude farther towards the channel structure than a sidewall of the hard mask pattern, and a memory layer interposed between the stacked structure and the channel structure, wherein the memory layer fills a space between the insulating patterns.Type: GrantFiled: March 17, 2023Date of Patent: July 23, 2024Assignee: SK hynix Inc.Inventors: Changhan Kim, In Ku Kang, Sun Young Kim
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Patent number: 12048168Abstract: A semiconductor device may include a source layer, a stack structure, a channel layer, a slit, and a source pick-up line. The source layer may include at least one groove in an upper surface thereof. The stack structure may be formed over the source layer. The channel layer may pass through the stack structure. The channel layer may be in contact with the source layer. The slit may pass through the stack structure. The slit may expose the groove of the source layer therethrough. The source pick-up line may be formed in the slit and the groove. The source pick-up line may be contacted with the source layer.Type: GrantFiled: April 15, 2022Date of Patent: July 23, 2024Assignee: SK hynix Inc.Inventor: Ki Hong Lee
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Patent number: 12041773Abstract: A semiconductor device is provided. The semiconductor device includes a stack of word line layers and insulating layers that are stacked alternatingly over a substrate. The semiconductor device also includes a first dielectric trench structure. The first dielectric trench structure is positioned in a bottom select gate (BSG) layer of the word line layers to separate the BSG layer and extends in a first direction of substrate. The semiconductor device further includes a second dielectric trench structure. The second dielectric trench structure is positioned in a top select gate (TSG) layer of the word line layers to separate the TSG layer and extends in the first direction of the substrate. The second dielectric trench structure is offset from the first dielectric trench structure in a second direction of the substrate that is perpendicular to the first direction.Type: GrantFiled: December 7, 2020Date of Patent: July 16, 2024Assignee: Yangtze Memory Technologies Co., Ltd.Inventors: Zhongwang Sun, Rui Su, Wenxi Zhou, Zhiliang Xia
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Patent number: 12041783Abstract: Provided is a ferroelectric memory device having a multi-layer stack disposed over a substrate and including a plurality of conductive layers and a plurality of dielectric layers stacked alternately. A channel layer penetrates through the plurality of conductive layers and the plurality of dielectric layers. A plurality of ferroelectric portions are discretely disposed between the channel layer and the plurality of conductive layers. The plurality of ferroelectric portions are vertically separated from one another by one or more non-zero distances.Type: GrantFiled: August 4, 2022Date of Patent: July 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Chieh Lu, Han-Jong Chia, Sai-Hooi Yeong, Bo-Feng Young, Yu-Ming Lin
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Patent number: 12040253Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers above a conductor tier. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The channel-material strings directly electrically couple with conductor material of the conductor tier by conducting material that is in a lowest of the conductive tiers and that is directly against multiple of the channel-material strings. A through-array-via (TAV) region comprises TAVs that individually extend through the lowest conductive tier and into the conductor tier. Individual of the TAVs in the lowest conductive tier comprise a conductive core having an annulus circumferentially there-about. The annulus has dopant therein at a total dopant concentration of 0.01 to 30 atomic percent.Type: GrantFiled: October 22, 2021Date of Patent: July 16, 2024Assignee: Micron Technology, Inc.Inventors: Alyssa N. Scarbrough, John D. Hopkins, Chet E. Carter, Justin D. Shepherdson, Collin Howder, Joshua Wolanyk
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Patent number: 12040223Abstract: A microelectronic device comprises a stack structure comprising a vertically alternating sequence of conductive structures and insulative structures arranged in tiers, strings of memory cells vertically extending through the stack structure, the strings of memory cells individually comprising a channel material vertically extending through the stack structure, a conductive contact structure vertically overlying and in electrical communication with the channel material of a string of memory cells of the strings of memory cells, and a void laterally neighboring the conductive contact structure, the conductive contact structure separated from a laterally neighboring conductive contact structure by the void, a dielectric material, and an additional void laterally neighboring the laterally neighboring conductive contact structure. Related memory devices, electronic systems, and methods are also described.Type: GrantFiled: January 5, 2021Date of Patent: July 16, 2024Assignee: Micron Technology, Inc.Inventors: Darwin A. Clampitt, John D. Hopkins, Madison D. Drake
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Patent number: 12035528Abstract: A semiconductor device includes gate electrodes stacked along a direction perpendicular to an upper surface of a substrate, the gate electrodes extending to different lengths in a first direction, and each gate electrode including subgate electrodes spaced apart from each other in a second direction perpendicular to the first direction, and gate connection portions connecting subgate electrodes of a same gate electrode of the gate electrodes to each other, channels extending through the gate electrodes perpendicularly to the upper surface of the substrate, and dummy channels extending through the gate electrodes perpendicularly to the upper surface of the substrate, the dummy channels including first dummy channels arranged in rows and columns, and second dummy channels arranged between the first dummy channels in a region including the gate connection portions.Type: GrantFiled: August 5, 2021Date of Patent: July 9, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seung Jun Shin, Hyun Mog Park, Joong Shik Shin
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Patent number: 12033944Abstract: In a method for fabricating a semiconductor device, an initial stack of sacrificial word line layers and insulating layers is formed over a substrate of the semiconductor device. The sacrificial word line layers and the insulating layers are disposed over the substrate alternately. A first staircase is formed in a first staircase region of a connection region of the initial stack. A second staircase is formed in a second staircase region of the connection region of the initial stack. The connection region of the initial stack includes a separation region between the first and second staircases, and the connection region is positioned between array regions of the initial stack at opposing sides of the initial stack.Type: GrantFiled: September 28, 2021Date of Patent: July 9, 2024Assignee: Yangtze Memory Technologies Co., Ltd.Inventors: Zhongwang Sun, Zhong Zhang, Wenxi Zhou, Zhiliang Xia
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Patent number: 12029039Abstract: Some embodiments include an integrated structure having vertically-stacked conductive levels. Upper conductive levels are memory cell levels, and a lower conductive level is a select device level. Conductively-doped semiconductor material is under the select device level. Channel material extends along the memory cell levels and the select device level, and extends into the conductively-doped semiconductor material. A region of the channel material that extends into the conductively-doped semiconductor material is a lower region of the channel material and has a vertical sidewall. Tunneling material, charge-storage material and charge-blocking material extend along the channel material and are between the channel material and the conductive levels. The tunneling material, charge-storage material and charge-blocking material are not along at least a portion of the vertical sidewall of the lower region of the channel material, and the conductively-doped semiconductor material is directly against such portion.Type: GrantFiled: January 12, 2023Date of Patent: July 2, 2024Inventors: Guangyu Huang, Haitao Liu, Chandra Mouli, Justin B. Dorhout, Sanh D. Tang, Akira Goda
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Patent number: 12027519Abstract: Provided is a semiconductor super junction power device which includes a super junction MOSFET cell array composed of multiple super junction MOSFET cells. A gate structure of the super junction MOSFET cell includes a gate dielectric layer, a gate and an n-type floating gate. The gate and the n-type floating gate are located above the gate dielectric layer; the gate is located on a side close to the n-type source region, and the n-type floating gate is located on a side close to the n-type drift region; the gate acts on the n-type floating gate through capacitive coupling. The n-type floating gate of at least one MOSFET cell is isolated from the p-type body region through the gate dielectric layer, and the n-type floating gate of at least one MOSFET cell contacts the p-type body region through an opening in the gate dielectric layer to form a p-n junction diode.Type: GrantFiled: December 5, 2019Date of Patent: July 2, 2024Assignee: SUZHOU ORIENTAL SEMICONDUCTOR CO., LTD.Inventors: Yi Gong, Wei Liu, Lei Liu, Yuanlin Yuan, Rui Wang
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Patent number: 12020750Abstract: In certain aspects, a three-dimensional (3D) memory device includes a first semiconductor structure, a second semiconductor structure, a third semiconductor structure, a first bonding interface between the first semiconductor structure and the second semiconductor structure, and a second bonding interface between the second semiconductor structure and the third semiconductor structure. The first semiconductor structure includes an array of memory cells and a first semiconductor layer in contact with sources of the array of NAND memory strings. The second semiconductor structure includes a first peripheral circuit of the array of memory cells including a first transistor, and a second semiconductor layer in contact with the first transistor. A third semiconductor structure includes a second peripheral circuit of the array of memory cells including a second transistor, and a third semiconductor layer in contact with the second transistor.Type: GrantFiled: September 21, 2021Date of Patent: June 25, 2024Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Yuancheng Yang, Wenxi Zhou, Zhiliang Xia, Wei Liu
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Patent number: 12021126Abstract: Aspects of the disclosure provide a method for fabricating a semiconductor device having an first stack of alternating insulating layers and sacrificial word line layers arranged over a substrate, the first stack including a core region and a staircase region. The method can include forming a first dielectric trench in the core region of the first stack, forming a second dielectric trench that is adjacent to and connected with the first dielectric trench in the staircase region of the first stack, and forming dummy channel structures extending through the first stack where the dummy channel structures are spaced apart from the second dielectric trench.Type: GrantFiled: December 23, 2020Date of Patent: June 25, 2024Assignee: Yangtze Memory Technologies Co., Ltd.Inventors: Hang Yin, Zhipeng Wu, Kai Han, Lu Zhang, Pan Wang, Xiangning Wang, Hui Zhang, Jingjing Geng, Meng Xiao
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Patent number: 12016179Abstract: A memory device includes an alternating stack of insulating layers and control gate layers, a memory opening vertically extending through the alternating stack, and a memory opening fill structure containing a memory film and a vertical semiconductor channel located within the memory opening. The memory film contains a resonant tunneling barrier stack, a semiconductor barrier layer, and a memory material layer located between the resonant tunneling barrier stack and the semiconductor barrier layer.Type: GrantFiled: November 24, 2021Date of Patent: June 18, 2024Assignee: SANDISK TECHNOLOGIES LLCInventors: Peter Rabkin, Masaaki Higashitani
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Patent number: 12015010Abstract: A semiconductor device includes a first semiconductor die, a second semiconductor die including a side surface bonded to the first semiconductor die, such that the second semiconductor die is perpendicular to the first semiconductor die, and a junction circuit for connecting the first semiconductor die to the second semiconductor die.Type: GrantFiled: September 17, 2021Date of Patent: June 18, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Jen-Yuan Chang, Chia-Ping Lai
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Patent number: 12016180Abstract: A three-dimensional (3D) memory device and a manufacturing method thereof are provided. The 3D memory device includes a substrate, insulation layers, gate material layers, and a vertical structure. The insulation layers and the gate material layers are disposed on the substrate and alternately stacked in a vertical direction. The vertical structure penetrates the gate material layers in the vertical direction. The vertical structure includes a semiconductor layer and a trapping layer. The semiconductor layer is elongated in the vertical direction. The trapping layer surrounds the semiconductor layer in a horizontal direction. The trapping layer includes trapping sections aligned in the vertical direction and separated from one another. The electrical performance of the 3D memory device may be improved by the trapping sections separated from one another.Type: GrantFiled: December 1, 2021Date of Patent: June 18, 2024Assignee: Yangtze Memory Technologies Co., Ltd.Inventor: Qiguang Wang
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Patent number: 12010835Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, memory opening fill structures vertically extending through the alternating stack in a memory array region, and an electrically conductive spacer extending vertically and electrically connecting a first drain-select-level electrically conductive layer to a second drain-select-level electrically conductive layer.Type: GrantFiled: April 27, 2021Date of Patent: June 11, 2024Assignee: SANDISK TECHNOLOGIES LLCInventors: Zhixin Cui, Satoshi Shimizu
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Patent number: 12009364Abstract: In some embodiments, a method of making a semiconductor device includes forming a recess in a first region of a first dielectric material, the first dielectric material at least partially embedding a semiconductor region, the recess having a first surface portion separated by a distance in a first direction from the semiconductor region by a portion of the first dielectric material; depositing a second dielectric material in the recess to form a second surface portion oriented at an oblique angle from the first surface portion; and depositing a conductive material in the recess. In some embodiments, the method further includes partially exposing the semiconductor region in a second recess in the first dielectric material and selectively depositing the second dielectric material on the first dielectric material, but not the semiconductor region, in the second recess.Type: GrantFiled: May 8, 2023Date of Patent: June 11, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Te-Hsin Chiu, Shih-Wei Peng, Meng-Hung Shen, Jiann-Tyng Tzeng
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Patent number: 12002764Abstract: An integrated circuit device comprising a base structure, a gate stack on the base structure and comprising a plurality of gate electrodes spaced apart from each other, a first upper insulating layer on the gate stack, a plurality of channel structures that penetrate the gate stack, each of the plurality of channel structures comprises a respective alignment key protruding from the gate stack, a second upper insulating layer that overlaps the respective alignment key of each of the plurality of channel structures, a top supporting layer on the second upper insulating layer, a bit line on the top supporting layer, and a plurality of bit line contacts that electrically connect respective ones of the plurality of channel structures to the bit line. A sidewall of the first upper insulating layer includes a first step.Type: GrantFiled: November 18, 2021Date of Patent: June 4, 2024Assignee: Samsung Electronics Co., Ltd.Inventors: Jongsoo Kim, Juyoung Lim, Sunil Shim, Wonseok Cho
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Patent number: 12002757Abstract: In an example of the present disclosure, a three-dimensional (3D) memory device includes a memory array structure and a staircase structure dividing the memory array structure into a first memory array structure and a second memory array structure along a lateral direction. The staircase structure includes a plurality of stairs, and a bridge structure in contact with the first memory array structure and the second memory array structure. A stair of the plurality of stairs includes a conductor portion on a top surface of the stair and electrically connected to the bridge structure, and a dielectric portion at a same level and in contact with the conductor portion. The stair is electrically connected to at least one of the first memory array structure and the second memory array structure. The conductor portion includes a portion overlapping with an immediately-upper stair and in contact with the dielectric portion and the bridge structure.Type: GrantFiled: April 17, 2023Date of Patent: June 4, 2024Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Di Wang, Wenxi Zhou, Zhiliang Xia, Zhong Zhang
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Patent number: 12004353Abstract: Semiconductor devices are provided. A semiconductor device includes a substrate and a stacked structure in which a plurality of insulating layers and a plurality of electrode layers are alternately stacked on the substrate. The semiconductor device includes a plurality of dummy channel structures that pass through the stacked structure. Moreover, the semiconductor device includes a contact structure in contact with at least one of the plurality of dummy channel structures adjacent thereto, and in contact with one of the plurality of electrode layers.Type: GrantFiled: April 12, 2023Date of Patent: June 4, 2024Assignee: Samsung Electronics Co., Ltd.Inventors: Joo Won Park, Kyeong Jin Park, Kwang Soo Kim
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Patent number: 12002777Abstract: According to one or more embodiments, a semiconductor device includes a first substrate and a second substrate. The first substrate includes a first metal layer and a first insulating layer. The first insulating layer surrounds the first metal layer. The second substrate includes a second metal layer, a second insulating layer, and a first conducive body. The second metal layer is in contact with the first metal layer. The second insulating layer surrounds the second metal layer and is in contact with the first insulating layer. A part of the first conductive body is in the second metal layer and extends in a first direction toward the first metal layer.Type: GrantFiled: August 30, 2021Date of Patent: June 4, 2024Assignee: Kioxia CorporationInventors: Kotaro Fujii, Shinya Watanabe
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Patent number: 12001593Abstract: An embodiment system comprises a physical unclonable function device, wherein the device comprises a first assembly of non-volatile memory cells each having a selection transistor embedded in a semiconductor substrate and a depletion-type state transistor having a control gate and a floating gate that are electrically connected, the state transistors having respective effective threshold voltages belonging to a common random distribution, and a processing circuit configured to deliver, to an output interface of the device, a group of output data based on a reading of the effective threshold voltages of the state transistors of the memory cells of the first assembly.Type: GrantFiled: March 12, 2021Date of Patent: June 4, 2024Assignee: STMICROELECTRONICS (ROUSSET) SASInventor: Francesco La Rosa
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Patent number: 11991878Abstract: A semiconductor device include a nonvolatile memory device, including a first well region formed in a substrate, a tunneling gate insulator formed on the first well region, a floating gate formed on the tunneling gate insulator, a control gate insulator formed on the substrate, a control gate formed on the control gate insulator, and a first source region and a first drain region formed on opposite sides of the control gate, respectively, and a first logic device, including a first logic well region formed in the substrate, a first logic gate insulator formed on the first logic well region, a first logic gate formed on the first logic gate insulator, wherein the first logic gate comprises substantially a same material as a material of the control gate of the nonvolatile memory device.Type: GrantFiled: April 12, 2023Date of Patent: May 21, 2024Assignee: SK keyfoundry Inc.Inventors: Kwang Il Kim, Yang Beom Kang, Jung Hwan Lee, Min Kuck Cho, Hyun Chul Kim
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Patent number: 11990506Abstract: Embodiments of three-dimensional (3D) memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a memory stack on the substrate, a plurality of channel structures each extending vertically through the memory stack, and one or more isolation structures. The memory stack includes a plurality of interleaved conductive layers and dielectric layers. An outmost one of the conductive layers toward the substrate is a source select gate line (SSG). Each isolation structure surrounds at least one of the channel structures in a plan view to separate the SSG and the at least one channel structure.Type: GrantFiled: October 29, 2020Date of Patent: May 21, 2024Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Jiajia Wu, Jingjing Geng, Yang Zhou, Zhen Guo, Meng Xiao, Hui Zhang
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Patent number: 11991881Abstract: A three-dimensional memory device includes alternating stacks of insulating layers and electrically conductive layers, and memory stack structures vertically extending through a respective one of the alternating stacks and located within the first memory array region and the second memory array region. An inter-array region containing lower and upper staircases is located between the first and the second memory array regions. The first memory array region may have a greater length than the second memory array region, or the lower staircase may generally ascend in an opposite direction from the upper staircase.Type: GrantFiled: April 9, 2021Date of Patent: May 21, 2024Assignee: SANDISK TECHNOLOGIES LLCInventors: Hiroyuki Tanaka, Hiroyuki Ogawa
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Patent number: 11990528Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and control gate levels. Channel material extends vertically along the stack. The control gate levels comprising conductive regions. The conductive regions include at least three different materials. Charge-storage regions are adjacent the control gate levels. Charge-blocking regions are between the charge-storage regions and the conductive regions.Type: GrantFiled: December 16, 2022Date of Patent: May 21, 2024Inventors: David Ross Economy, Rita J. Klein, Jordan D. Greenlee, John Mark Meldrim, Brenda D. Kraus, Everett A. McTeer
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Patent number: 11990189Abstract: A nonvolatile memory device includes at least one memory block and a control circuit. The at least one memory block includes a plurality of cell strings that are divided into a plurality of stacks disposed in the vertical direction, and each of the plurality of stacks includes at least one dummy word-line. The control circuit controls a program operation by applying a program voltage to a selected word-line of the plurality of cell strings during a program execution period and by reducing a voltage level of a dummy voltage applied to the at least one dummy word-line of at least one upper stack from among the plurality of stacks during the program execution period. The at least one upper stack is disposed at a higher position than a selected stack in the vertical direction and the selected stack from among the plurality of stacks includes the selected word-line.Type: GrantFiled: June 13, 2022Date of Patent: May 21, 2024Assignee: Samsung Electronics Co., Ltd.Inventors: Younghwi Yang, Joonsuc Jang
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Patent number: 11985821Abstract: The present disclosure may provide a semiconductor device having a stable structure and a low manufacturing degree of the difficulty. The device may include conductive layers and insulating layers which are alternately stacked; a plurality of pillars passing through the conductive layers and the insulating layers; and a plurality of deposition inhibiting patterns, each deposition inhibiting pattern being formed along a portion of an interface between a side-wall of each of the pillars and each of the conductive layers and along a portion of an interface between each of the insulating layers and each of the conductive layers.Type: GrantFiled: November 14, 2019Date of Patent: May 14, 2024Assignee: SK hynix Inc.Inventor: Young Jin Lee
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Patent number: 11978774Abstract: A field effect transistor for a high voltage operation can include vertical current paths, which may include vertical surface regions of a pedestal semiconductor portion that protrudes above a base semiconductor portion. The pedestal semiconductor portion can be formed by etching a semiconductor material layer employing a gate structure as an etch mask. A dielectric gate spacer can be formed on sidewalls of the pedestal semiconductor portion. A source region and a drain region may be formed underneath top surfaces of the base semiconductor portion. Alternatively, epitaxial semiconductor material portions can be grown on the top surfaces of the base semiconductor portions, and a source region and a drain region can be formed therein. Alternatively, a source region and a drain region can be formed within via cavities in a planarization dielectric layer.Type: GrantFiled: October 5, 2020Date of Patent: May 7, 2024Assignee: SANDISK TECHNOLOGIES LLCInventor: Mitsuhiro Togo
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Patent number: 11974430Abstract: A microelectronic device includes a stack structure comprising a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. At least one pillar, comprising a channel material, extends through the stack structure. A source region, below the stack structure, comprises a doped material. A vertical extension of the doped material protrudes upward to an interface with the channel material at elevation within the stack structure (e.g., an elevation proximate or laterally overlapping in elevation at least one source-side GIDL region). The microelectronic device structure may be formed by a method that includes forming a lateral opening through cell materials of the pillar, recessing the channel material to form a vertical recess, and forming the doped material in the vertical recess. Additional microelectronic devices are also disclosed, as are related methods and electronic systems.Type: GrantFiled: January 26, 2021Date of Patent: April 30, 2024Assignee: Micron Technology, Inc.Inventors: Albert Fayrushin, Haitao Liu, Chris M. Carlson
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Patent number: 11974435Abstract: A semiconductor device includes a stack structure, a channel layer passing through the stack structure, a memory layer enclosing the channel layer and including first and second openings which expose the channel layer, a well plate coupled to the channel layer through the first opening, and a source plate coupled to the channel layer through the second opening.Type: GrantFiled: September 19, 2022Date of Patent: April 30, 2024Assignee: SK hynix Inc.Inventor: In Su Park
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Patent number: 11968825Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and word-line-level electrically conductive layers located over a substrate, and a vertical layer stack located over the alternating stack, the vertical layer stack including an insulating cap layer, drain select electrodes, and a drain-select-level insulating layer. The drain select electrodes are laterally spaced apart from each other by drain-select-level isolation structures. Memory stack structures including a respective vertical semiconductor channel and a respective memory film vertically extend through the alternating stack and the vertical layer stack. Each of the vertical semiconductor channels includes a word-line-level semiconductor channel portion extending through the alternating stack, a connection channel portion contacting a top end of the word-line-level semiconductor channel, and a drain-select-level semiconductor channel portion vertically extending through the vertical layer stack.Type: GrantFiled: December 18, 2020Date of Patent: April 23, 2024Assignee: SANDISK TECHNOLOGIES LLCInventors: Zhen Chen, Yanli Zhang
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Patent number: 11968834Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory openings vertically extending through the alternating stack and having lateral protrusions at levels of the electrically conductive layers, and memory opening fill structures located in the memory openings. Each of the memory opening fill structures includes a vertical semiconductor channel, a dielectric material liner laterally surrounding the vertical semiconductor channel, and a vertical stack of discrete memory elements laterally surrounding the dielectric material liner and located within volumes of the lateral protrusions. Each discrete memory element includes a vertical inner sidewall and a convex or stepped outer sidewall.Type: GrantFiled: March 4, 2021Date of Patent: April 23, 2024Assignee: SANDISK TECHNOLOGIES LLCInventors: Ramy Nashed Bassely Said, Raghuveer S. Makala, Senaka Kanakamedala, Fei Zhou
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Patent number: 11968822Abstract: A first dynamic flash memory cell formed on a first Si pillar 25a including an N+ layer 21a, a P layer 22a, and an N+ layer 21b, and a second dynamic flash memory cell formed on a second Si pillar 25b including a P layer 22b and an N+ layer 21c, the first dynamic flash memory cell and the second dynamic flash memory cell sharing the N+ layer 21b that is connected to a first bit line BL1, are stacked on top of one another on a P-layer substrate 20 to form a dynamic flash memory. In plan view, a first plate line PL1, a first word line WL1, a second word line WL2, and a second plate line PL2 extend in the same direction and are formed to be perpendicular to a direction in which the first bit line BL1 extends.Type: GrantFiled: July 6, 2022Date of Patent: April 23, 2024Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.Inventors: Nozomu Harada, Koji Sakui
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Patent number: 11956959Abstract: A semiconductor memory device includes a semiconductor substrate including a diode formed in an upper layer portion of the semiconductor substrate, a first insulating film provided above the semiconductor substrate, a first conductive film provided above the first insulating film and coupled to the diode, a stacked body provided above the first conductive film, an insulator and an electrode film being stacked alternately in the stacked body, a semiconductor member piercing the stacked body and being connected to the first conductive film, and a charge storage member provided between the electrode film and the semiconductor member.Type: GrantFiled: May 24, 2021Date of Patent: April 9, 2024Assignee: Kioxia CorporationInventors: Jun Fujiki, Shinya Arai, Kotaro Fujii
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Patent number: 11956960Abstract: A semiconductor device includes a gate stack with conductive layers and insulating layers that are stacked alternately with each other, a first channel pattern passing through the gate stack, a second channel pattern coupled to the first channel pattern, the second channel pattern protruding above a top surface of the gate stack, an insulating core formed in the first channel pattern, the insulating core extending into the second channel pattern, a gate liner with a first portion that surrounds a top surface of the gate stack and a second portion that surrounds a portion of a sidewall of the second channel pattern, and a barrier pattern coupled to the gate liner, the barrier pattern surrounding a remaining portion of the sidewall of the second channel pattern.Type: GrantFiled: July 9, 2021Date of Patent: April 9, 2024Assignee: SK hynix Inc.Inventor: Ki Hong Lee
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Patent number: 11950417Abstract: A semiconductor device including a stack structure including gate layers and interlayer insulating layers spaced apart in a vertical direction, a channel hole penetrating the stack structure in the vertical direction, a core region extending within the channel hole, a channel layer disposed on a side surface of the core region, a first dielectric layer, a data storage layer and a second dielectric layer, which are disposed between the channel layer and the gate layers, and a pad pattern disposed on the core region, in the channel hole, and in contact with the channel layer. A first horizontal distance between a side surface of a first portion of an uppermost gate layer and an outer side surface of the channel layer is greater than a second horizontal distance between a side surface of a second portion of the uppermost gate layer and an outer side surface of the pad pattern.Type: GrantFiled: February 10, 2021Date of Patent: April 2, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Wukang Kim, Sejun Park, Hyoje Bang, Jaeduk Lee, Junghoon Lee
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Patent number: 11950426Abstract: Some embodiments include apparatuses and methods forming the apparatuses. One of the apparatuses includes a first transistor including a first channel region, and a charge storage structure separated from the first channel region; a second transistor including a second channel region formed over the charge storage structure; and a data line formed over and contacting the first channel region and the second channel region, the data line including a portion adjacent the first channel region and separated from the first channel region by a dielectric material.Type: GrantFiled: March 27, 2023Date of Patent: April 2, 2024Assignee: Micron Technology, Inc.Inventors: Kamal M. Karda, Eric S. Carman, Karthik Sarpatwari, Durai Vishak Nirmal Ramaswamy, Richard E Fackenthal, Haitao Liu
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Patent number: 11942136Abstract: Some embodiments include apparatuses and methods operating the apparatuses. One of the apparatuses includes a first data line located over a substrate, a second data line located over the first data line, a third data line located over the second data line and electrically separated from the first and second data lines, and a memory cell coupled to the first, second, and third data lines. The memory cell includes a first material between the first and second data lines and electrically coupled to the first and second data lines; a second material located over the first data line and the first material, the second material electrically separated from the first material and electrically coupled to the third data line; and a memory element electrically coupled to the second material and electrically separated from the first material and first and second data lines.Type: GrantFiled: August 15, 2022Date of Patent: March 26, 2024Assignee: Micron Technology, Inc.Inventors: Karthik Sarpatwari, Kamal M. Karda, Durai Vishak Nirmal Ramaswamy
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Patent number: 11943926Abstract: A semiconductor device including a substrate; a horizontal conductive layer disposed on the substrate; a support layer disposed on the horizontal conductive layer; a stack structure including a plurality of gate electrodes, stacked to be spaced apart from each other in a direction perpendicular to an upper surface of the support layer, and a plurality of interlayer insulating layers stacked alternately with the plurality of gate electrodes; a channel structure penetrating through the stack structure; a separation structure penetrating through the horizontal conductive layer, the support layer, and the stack structure and extending in a first direction; and a conductive pattern disposed on a level between the horizontal conductive layer and a lowermost interlayer insulating layer, among the plurality of interlayer insulating layers, and protruding outwardly of the separation structure from a side surface of the separation structure.Type: GrantFiled: July 16, 2021Date of Patent: March 26, 2024Assignee: Samsung Electronics Co., Ltd.Inventors: Wonseok Cho, Seulbi Lee
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Patent number: 11935598Abstract: A semiconductor storage device is provided. The semiconductor storage device includes a first voltage supply line coupled to a gate electrode of a first memory transistor through a first transistor, a first signal supply line coupled to a gate electrode of the first transistor, a first capacitor coupled to the gate electrode of the first memory transistor, and a first wiring coupled between the gate electrode of the first memory transistor and the first transistor through the first capacitor. In a write operation on the first memory transistor, at a second timing after a first timing, a voltage present on the first signal supply line decreases from a second voltage to a fourth voltage lower than the second voltage, and at a third timing after the second timing, the voltage present on the first wiring increases from a third voltage to a fifth voltage higher than the third voltage.Type: GrantFiled: March 3, 2022Date of Patent: March 19, 2024Assignee: KIOXIA CORPORATIONInventor: Kiyoshi Okuyama
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Patent number: 11935574Abstract: A memory cell comprises a capacitor comprising a first capacitor electrode having laterally-spaced walls, a second capacitor electrode comprising a portion above the first capacitor electrode, and capacitor insulator material between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the capacitor insulator material. A parallel current leakage path is between the second capacitor electrode and the first capacitor electrode. The parallel current leakage path is circuit-parallel with the intrinsic current leakage path, of lower total resistance than the intrinsic current leakage path, and comprises leaker material that is everywhere laterally-outward of laterally-innermost surfaces of the laterally-spaced walls of the first capacitor electrode. Other embodiments, including methods, are disclosed.Type: GrantFiled: October 7, 2021Date of Patent: March 19, 2024Assignee: Micron Technology, Inc.Inventors: Michael Mutch, Ashonita A. Chavan, Sameer Chhajed, Beth R. Cook, Kamal Kumar Muthukrishnan, Durai Vishak Nirmal Ramaswamy, Lance Williamson
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Patent number: 11923289Abstract: A method of forming circuitry components includes forming a stack of horizontally extending and vertically overlapping features. The features extend horizontally though a primary portion of the stack with at least some of the features extending farther in the horizontal direction in an end portion. Operative structures are formed vertically through the features in the primary portion and dummy structures are formed vertically through the features in the end portion. Openings are formed through the features to form horizontally elongated and vertically overlapping lines from material of the features. The lines individually extend laterally about sides of vertically extending portions of both the operative structures and the dummy structures. Sacrificial material that is elevationally between the lines is at least partially removed in the primary and end portions laterally between the openings. Other aspects and implementations are disclosed.Type: GrantFiled: June 10, 2022Date of Patent: March 5, 2024Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Roger W. Lindsay, Krishna K. Parat
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Patent number: 11925019Abstract: A three-dimensional (3D) memory device includes a memory stack including conductive layers and dielectric layers interleaving the conductive layers, and a channel structure extending through the memory stack along a vertical direction. The channel structure has a plurality of protruding portions protruding along a lateral direction and facing the conductive layers, respectively, and a plurality of normal portions facing the dielectric layers, respectively, without protruding along the lateral direction. The channel structure includes a plurality of blocking structures in the protruding portions, respectively, and a plurality of storage structures in the protruding portions and over the plurality of blocking structures, respectively. A vertical dimension of each of the blocking structures is nominally the same as a vertical dimension of a respective one of the storage structures over the blocking structure.Type: GrantFiled: December 10, 2020Date of Patent: March 5, 2024Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Wanbo Geng, Lei Xue, Xiaoxin Liu, Tingting Gao
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Patent number: 11923033Abstract: A semiconductor device includes: a first memory block having a first block pitch; and a second memory block belonging to a same plane as the first memory block, the second memory block located closer to a plane edge than the first memory block, the plane edge being an edge of the plane, wherein the second memory block has a second block pitch that is larger than the first block pitch.Type: GrantFiled: May 5, 2022Date of Patent: March 5, 2024Assignee: SK hynix Inc.Inventor: Jae Taek Kim
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Patent number: 11917823Abstract: A first opening extending vertically through a dielectric stack is formed above a substrate. The dielectric stack includes vertically interleaved dielectric layers and sacrificial layers. Parts of the sacrificial layers facing the opening are removed to form a plurality of first recesses. A plurality of stop structures are formed along sidewalls of the plurality of first recesses. A plurality of storage structures are formed over the plurality of stop structures in the plurality of first recesses. The plurality of sacrificial layers are removed to expose the plurality of stop structures from a plurality of second recesses opposing the plurality of first recesses. The plurality of stop structures are removed to expose the plurality of storage structures. A plurality of blocking structures are formed over the plurality of storage structures in the plurality of second recesses.Type: GrantFiled: December 10, 2020Date of Patent: February 27, 2024Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Wanbo Geng, Lei Xue, Xiaoxin Liu, Tingting Gao
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Patent number: 11908522Abstract: In certain aspects, a memory device includes memory cells, and a peripheral circuit coupled to the memory cells. The peripheral circuit is configured to initiate a program operation on a selected memory cell of the memory cells, obtain a number of occurrences of one or more suspensions during the program operation, and determine a program pulse limit for the program operation based on the number of occurrences of the suspensions.Type: GrantFiled: September 29, 2021Date of Patent: February 20, 2024Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Huangpeng Zhang, Zhichao Du, Ke Jiang, Cong Luo, Daesik Song