All Contacts On Same Surface (e.g., Lateral Structure) Patents (Class 257/343)
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Patent number: 8759913Abstract: The present invention discloses a double diffused drain metal oxide semiconductor (DDMOS) device and a manufacturing method thereof. The DDDMOS device is formed in a substrate, and includes: a drift region, a gate, a source, a drain, a dielectric layer, and a conductive layer. The drift region includes a first region and a second region. The gate is formed on the substrate, and overlaps the first region from top view. The source and drain are formed at both sides of the gate respectively, and the drain is located in the second region. The drain and the gate are separated by a portion of the second region from top view. The dielectric layer is formed by dielectric material on the gate and the second region. The conductive layer is formed by conductive material on the dielectric layer, and overlaps at least part of the second region from top view.Type: GrantFiled: May 15, 2012Date of Patent: June 24, 2014Assignee: Richtek Technology CorporationInventors: Tsung-Yi Huang, Ching-Yao Yang, Wen-Yi Liao
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Publication number: 20140167159Abstract: The invention provides an LDMOS transistor of which the time-dependent degrading of the performance due to the trapping of hot electrons in the gate insulation film is decreased. A body layer is disposed in a surface portion of an N?-type semiconductor layer. A source layer including an N?-type layer is disposed in a surface portion of the body layer. An N? type drift layer is formed in a surface portion of the N?-type semiconductor layer. This drift layer includes a first region having a first N type impurity concentration peak region and a second region having a second N type impurity concentration peak region that is positioned deeper than the first N type impurity concentration peak region, the second region adjoining this first region. An N+ type drain layer is formed in a surface portion of the second region.Type: ApplicationFiled: February 24, 2014Publication date: June 19, 2014Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Yasuhiro Takeda, Shinya Inoue, Yuzo Otsuru
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Patent number: 8754442Abstract: A silicon on insulator N type semiconductor device, includes a N type drift region, a P type deep well, an N type buffer well, a P type drain region, an N type source region and a P type body contact region; a field oxide layer and a gate oxide layer arranged on a silicon surface, and a polysilicon lattice arranged on the gate oxide layer; and an N type triode drift region, a P type deep well, an N type triode buffer well, a P type emitting region, an N type base region, an N type source region and a P type body contact region; a field oxide layer and a gate oxide layer arranged on a silicon surface, and a polysilicon lattice arranged on the gate oxide layer.Type: GrantFiled: July 11, 2011Date of Patent: June 17, 2014Assignee: Southeast UniversityInventors: Longxing Shi, Qinsong Qian, Changlong Huo, Weifeng Sun, Shengli Lu
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Patent number: 8754471Abstract: There are provided a semiconductor device which can be miniaturized without being deteriorated in characteristics, and a manufacturing method thereof. The semiconductor device includes a semiconductor substrate having a main surface, a source region and a drain region formed apart from each other in the main surface, a gate electrode layer formed over the main surface sandwiched between the source region and the drain region, a first conductive layer formed so as to be in contact with the surface of the source region, and a second conductive layer formed so as to be in contact with the surface of the drain region. A recess is formed in the main surface so as to extend from the contact region between the first conductive layer and the source region through a part underlying the gate electrode layer to the contact region between the second conductive layer and the drain region.Type: GrantFiled: March 4, 2011Date of Patent: June 17, 2014Assignee: Renesas Electronics CorporationInventors: Toshiaki Iwamatsu, Kozo Ishikawa, Masashi Kitazawa, Kiyoshi Hayashi, Takahiro Maruyama, Masaaki Shinohara, Kenji Kawai
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Publication number: 20140159154Abstract: A semiconductor device includes an electrode arranged on a main surface of a semiconductor body and an insulating structure insulating the electrode from the semiconductor body. The insulating structure includes in a vertical cross-section a gate dielectric portion forming a first horizontal interface at least with a drift region of the device and having a first maximum vertical extension between the first horizontal interface and the electrode, and a field dielectric portion forming with the drift region second, third and fourth horizontal interfaces. The second through fourth horizontal interfaces are arranged below the main surface. The third horizontal interface is arranged between the second and fourth horizontal interfaces. A second maximum vertical extension is larger than the first maximum vertical extension and a third maximum vertical extension is larger than the second maximum vertical extension. The electrode only partially overlaps the third horizontal interface.Type: ApplicationFiled: February 11, 2014Publication date: June 12, 2014Inventors: Marc Strasser, Karl-Heinz Gebhardt, Ralf Rudolf, Lincoln O'Riain
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Publication number: 20140159155Abstract: A layout pattern of an implant layer includes at least a linear region and at least a non-linear region. The linear region includes a plurality of first patterns to accommodate first dopants and the non-linear region includes a plurality of second patterns to accommodate the first dopants. The linear region abuts the non-linear region. Furthermore, a pattern density of the first patterns in the linear region is smaller than a pattern density of the second patterns in the non-linear region.Type: ApplicationFiled: February 17, 2014Publication date: June 12, 2014Applicant: UNITED MICROELECTRONICS CORP.Inventors: Ming-Tsung Lee, Cheng-Hua Yang, Wen-Fang Lee, Chih-Chung Wang, Chih-Wei Hsu, Po-Ching Chuang
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Publication number: 20140159153Abstract: A radio frequency (RF) laterally diffused metal oxide semiconductor (LDMOS) device is disclosed, which includes: a gate structure on a surface of a substrate; and a source region and a drain region beneath the surface of the substrate, the source region and the drain region formed on opposite sides of the gate structure, wherein the gate structure includes a first section proximal to the source region and a second section proximal to the drain region, and wherein the first section of the gate structure has a dopant concentration at least one decimal order higher than a dopant concentration of the second section of the gate structure. A method of forming an RF LDMOS device is also disclosed. With the gate structure including two sections having different dopant concentrations, the present invention is capable of reducing the hot carrier injection effect while possessing a low on-resistance.Type: ApplicationFiled: December 6, 2013Publication date: June 12, 2014Applicant: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING CORPORATIONInventor: Wensheng QIAN
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Patent number: 8748277Abstract: According to an exemplary embodiment, a method for fabricating a MOS transistor, such as an LDMOS transistor, includes forming a self-aligned lightly doped region in a first well underlying a first sidewall of a gate. The method further includes forming a self-aligned extension region under a second sidewall of the gate, where the self-aligned extension region extends into the first well from a second well. The method further includes forming a drain region spaced apart from the second sidewall of the gate. The method further includes forming a source region in the self-aligned lightly doped region and the first well. The self-aligned lightly doped region and the self-aligned extension region define a channel length of the MOS transistor, such as an LDMOS transistor.Type: GrantFiled: September 13, 2012Date of Patent: June 10, 2014Assignee: Broadcom CorporationInventors: Xiangdong Chen, Wei Xia, Henry Kuo-Shun Chen
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Patent number: 8748981Abstract: Semiconductor device structures and related fabrication methods are provided. An exemplary semiconductor device structure includes a first vertical drift region of semiconductor material, a second vertical drift region of semiconductor material, and a buried lateral drift region of semiconductor material that abuts the vertical drift regions. In one or more embodiments, the vertical drift regions and buried lateral drift region have the same conductivity type, wherein a body region of the opposite conductivity type overlies the buried lateral drift region between the vertical drift regions.Type: GrantFiled: September 7, 2012Date of Patent: June 10, 2014Assignee: Freescale Semiconductor, Inc.Inventors: Hongning Yang, Xin Lin, Jiang-Kai Zuo
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Publication number: 20140151800Abstract: A LDMOS transistor is implemented in a first impurity region on a substrate. The LDMOS transistor has a source that includes a second impurity region. The second impurity region is implanted into the surface of the substrate within the first impurity region. Additionally, the LDMOS transistor has a drain that includes a third impurity region. The third impurity region is implanted into the surface of the substrate within the first impurity region. The third impurity region is spaced a predetermined distance away from a gate of the LDMOS transistor. The drain of the LDMOS transistor further includes a fourth impurity region within the third impurity region. The fourth impurity region provides an ohmic contact for the drain.Type: ApplicationFiled: February 7, 2014Publication date: June 5, 2014Applicant: Volterra Semiconductor CorporationInventors: Budong You, Marco A. Zuniga
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Publication number: 20140151799Abstract: The present invention discloses a double diffused drain metal oxide semiconductor (DDDMOS) device and a manufacturing method thereof. The DDDMOS device is formed in a substrate, and includes a first well, a gate, a diffusion region, a source, and a drain. A low voltage device is also formed in the substrate, which includes a second well and a lightly doped drain (LDD) region, wherein the first well and the diffusion region are formed by process steps which also form the second well and the LDD region in the low voltage device, respectively.Type: ApplicationFiled: February 5, 2014Publication date: June 5, 2014Applicant: RICHTEK TECHNOLOGY CORPORATION, R.O.C.Inventors: Tsung-Yi Huang, Chien-Hao Huang
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Patent number: 8729631Abstract: A MOS transistor is described, including: a source region and a drain region in a semiconductor substrate, an isolation between the source region and the drain region, a first gate conductor between the source region and the isolation, at least one conductive plug electrically connected to the first gate conductor and penetrating into the isolation, and at least one second gate conductor on the isolation, which is electrically connected to the first gate conductor and the at least one conductive plug. One of the at least one conductive plug is between the first gate conductor and the at least one second gate conductor.Type: GrantFiled: August 28, 2012Date of Patent: May 20, 2014Assignee: United Microelectronics Corp.Inventors: Kun-Huang Yu, Chin-Fu Chen
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Publication number: 20140131798Abstract: A semiconductor device includes: a semiconductor substrate including a first semiconductor layer on the semiconductor substrate; multiple semiconductor elements in the semiconductor substrate; and an ineffective region. Each semiconductor element includes: a second semiconductor layer in a surface portion of the first semiconductor layer; a third semiconductor layer disposed in another surface portion of the first semiconductor layer and spaced a part from the second semiconductor layer; and a control layer disposed on a portion of the first semiconductor layer between the second semiconductor layer and the third semiconductor layer. The ineffective region is disposed in the semiconductor substrate between at least two adjacent semiconductor elements; and does not provide a function of the semiconductor elements.Type: ApplicationFiled: July 26, 2013Publication date: May 15, 2014Applicant: Denso CorporationInventors: Syunsuke HARADA, Takashi NAKANO, Takuya OKUNO
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Patent number: 8723258Abstract: An ESD tolerance of an LDMOS transistor is improved. An N+ type source layer shaped in a ladder and having a plurality of openings in its center is formed in a surface of a P type base layer using a gate electrode and a resist mask. A P+ type contact layer is formed to be buried in the opening. At that time, a distance from an edge of the opening, that is an edge of the P+ type contact layer, to an edge of the N+ type source layer is set to a predetermined distance. The predetermined distance is equal to a distance at which an HBM+ESD tolerance of the LDMOS transistor, which increases as the distance increases, begins to saturate.Type: GrantFiled: September 9, 2011Date of Patent: May 13, 2014Assignee: Semiconductor Components Industries, LLCInventors: Kiyofumi Nakaya, Tetsuro Hirano, Shuji Fujiwara
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Publication number: 20140124858Abstract: A semiconductor device is provided. The device includes a semiconductor substrate and a gate structure thereon. A well region is formed in the semiconductor substrate. A drain region and a source region are respectively formed in the semiconductor substrate inside and outside of the well region. At least one set of the first and second heavily doped regions is formed in the well region between the drain region and the source region, wherein the first and second heavily doped regions are stacked vertically from bottom to top and have a doping concentration which is larger than that of the well region. The semiconductor substrate and the first heavily doped region have a first conductivity type and the well region and the second heavily doped region have a second conductivity type. A method for fabricating a semiconductor device is also disclosed.Type: ApplicationFiled: November 7, 2012Publication date: May 8, 2014Applicant: Vanguard International Semiconductor CorporationInventors: Wen-Cheng LIN, Shang-Hui TU, Shin-Cheng LIN
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Patent number: 8716793Abstract: Disclosed are an LDMOS device and a method for manufacturing the same capable of decreasing the concentration of a drift region between a source finger tip and a drain, thereby increasing a breakdown voltage. An LDMOS device includes a gate which is formed on a substrate, a source and a drain which are separately arranged on both sides of the substrate with the gate interposed therebetween, a field oxide film which is formed to have a step between the gate and the drain, a drift region which is formed of first condition type impurity ions between the gate and the drain on the substrate, and at least one internal field ring which is formed inside the drift region and formed by selectively ion-implanting second conduction type impurity ions in accordance with the step of the field oxide film.Type: GrantFiled: March 2, 2012Date of Patent: May 6, 2014Assignee: Dongbu HiTek Co., Ltd.Inventors: Jae Hyun Yoo, Jong Min Kim
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Patent number: 8716796Abstract: A semiconductor device includes a second conductive-type deep well configured above a substrate. The deep well includes an ion implantation region and a diffusion region. A first conductive-type first well is formed in the diffusion region. A gate electrode extends over portions of the ion implantation region and of the diffusion region, and partially overlaps the first well. The ion implantation region has a uniform impurity concentration whereas the impurity concentration of the diffusion region varies from being the highest concentration at the boundary interface between the ion implantation region and the diffusion region to being the lowest at the portion of the diffusion region that is the farthest away from the boundary interface.Type: GrantFiled: August 1, 2013Date of Patent: May 6, 2014Assignee: MagnaChip Semiconductor, Ltd.Inventors: Jae-Han Cha, Kyung-Ho Lee, Sun-Goo Kim, Hyung-Suk Choi, Ju-Ho Kim, Jin-Young Chae, In-Taek Oh
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Patent number: 8716794Abstract: The present invention relates to a semiconductor power device and power integrated circuits (ICs). The lateral SOI MOSFET in the present comprises a trench gate extended to the dielectric buried layer, one or multiple dielectric trenches in the drift region, and a buried gate in said dielectric trench. The permittivity of the dielectric in said dielectric trench is lower than that of said active layer. Firstly, said dielectric trench not only greatly improves breakdown voltage, but also reduces pitch size. Secondly, the trench gate widens the effective conductive region in the vertical direction. Thirdly, dual gates of said trench gate and buried gate increase channel and current densities. Thereby, specific on-resistance and the power loss are reduced. The device of the present invention has many advantages, such as high voltage, high speed, low power loss, low cost and ease of integration.Type: GrantFiled: August 10, 2010Date of Patent: May 6, 2014Assignee: University of Electronic Science and Technology of ChinaInventors: Xiaorong Luo, Florin Udrea
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Patent number: 8716811Abstract: A semiconductor device includes a first conduction-type semiconductor substrate, a first semiconductor region of a first conduction-type formed on the semiconductor substrate, a second semiconductor region of a second conduction-type formed on a surface of the first semiconductor region, a third semiconductor region of the second conduction-type formed to be separated from the second semiconductor region on the surface of the first semiconductor region, a fourth semiconductor region of the second conduction-type formed to be separated from the second semiconductor region and the third semiconductor region on the surface of the first semiconductor region, and a first electrode connected to the second semiconductor region and the third semiconductor region.Type: GrantFiled: March 2, 2012Date of Patent: May 6, 2014Assignee: Sony CorporationInventors: Hideki Mori, Chihiro Arai
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Patent number: 8716795Abstract: Methods of making, structures, devices, and/or applications for lateral double-diffused metal oxide semiconductor (LDMOS) transistors are disclosed. In one embodiment, a method of fabricating an LDMOS transistor with source, drain, and gate regions on a substrate, can include: forming p-type and n-type buried layer (PBL, NBL) regions; growing an epitaxial (N-EPI) layer on the NBL/PBL regions; forming a p-doped deep p-well (DPW) region on the PBL region; forming a well region in the N-EPI layer; forming a doped body region; forming an active area and a field oxide (FOX) region, and forming a drain oxide between the source and drain regions of the LDMOS transistor; forming a gate oxide adjacent to the source and drain regions, and forming a gate on the gate oxide and a portion of the drain oxide; and forming a doped drain region, and first and second doped source regions.Type: GrantFiled: December 21, 2011Date of Patent: May 6, 2014Assignees: Silergy Technology, Silergy Semiconductor Technology (Hangzhou) Ltd.Inventor: Budong You
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Publication number: 20140117446Abstract: A device includes a semiconductor substrate, source and drain regions in the semiconductor substrate and having a first conductivity type, a gate structure supported by the semiconductor substrate between the source and drain regions, a well region in the semiconductor substrate, having a second conductivity type, and in which a channel region is formed under the gate structure during operation, and a shunt region adjacent the well region in the semiconductor substrate and having the second conductivity type. The shunt region has a higher dopant concentration than the well region to establish a shunt path for charge carriers of the second conductivity type that electrically couples the well region to a potential of the source region.Type: ApplicationFiled: October 31, 2012Publication date: May 1, 2014Inventors: Xiaowei Ren, David C. Burdeaux, Robert P. Davidson, Michele L. Miera
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Patent number: 8710544Abstract: The present invention discloses an isolated SCR ESD device, comprising: a substrate; a first well located in the substrate, which is floating and has a first conductivity type; a first high density doped region located in the first well and having a second conductivity type; a second well nearby the first well and having the second conductivity type; a second high density doped region located in the second well and having the second conductivity type; and a third high density doped region located in the second well and having the first conductivity type, wherein the first high density doped region is for electrical connection with a pad, and wherein the first well is not provided with a high density doped region having the first conductivity type for connection with the pad.Type: GrantFiled: January 7, 2012Date of Patent: April 29, 2014Assignee: Richtek Technology CorporationInventor: Chih-Feng Huang
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Patent number: 8710557Abstract: The present invention discloses a MOS transistor having a combined-source structure with low power consumption, which relates to a field of field effect transistor logic devices and circuits in CMOS ultra-large-scaled integrated circuits. The MOS transistor includes a control gate electrode layer, a gate dielectric layer, a semiconductor substrate, a Schottky source region, a highly-doped source region and a highly-doped drain region. An end of the control gate extends to the highly-doped source region to form a T shape, wherein the extending region of the control gate is an extending gate and the remaining region of the control gate is a main gate. The active region covered by the extending gate is a channel region, and material thereof is the substrate material. A Schottky junction is formed between the Schottky source region and the channel under the extending gate.Type: GrantFiled: October 14, 2011Date of Patent: April 29, 2014Assignee: Peking UniversityInventors: Ru Huang, Qianqian Huang, Zhan Zhan, Xin Huang, Yangyuan Wang
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Publication number: 20140110782Abstract: The present disclosure provides a method for fabricating a high-voltage semiconductor device. The method includes designating first, second, and third regions in a substrate. The first and second regions are regions where a source and a drain of the semiconductor device will be formed, respectively. The third region separates the first and second regions. The method further includes forming a slotted implant mask layer at least partially over the third region. The method also includes implanting dopants into the first, second, and third regions. The slotted implant mask layer protects portions of the third region therebelow during the implanting. The method further includes annealing the substrate in a manner to cause diffusion of the dopants in the third region.Type: ApplicationFiled: January 13, 2014Publication date: April 24, 2014Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
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Patent number: 8704304Abstract: A semiconductor structure is provided. The semiconductor structure includes a semiconductor substrate, a dielectric layer, a dielectric structure and an electrode structure. The dielectric layer is on an upper substrate surface of the semiconductor substrate. The dielectric structure and the semiconductor substrate have opposing first and second interfaces therebetween. The electrode structure comprises an electrode truck portion and at least one electrode branch portion. The at least one electrode branch portion is extended from the electrode truck portion down into the dielectric structure. The at least one electrode branch portion and the first interface have the smallest gap distance substantially bigger than 300 ? therebetween.Type: GrantFiled: October 5, 2012Date of Patent: April 22, 2014Assignee: United Microelectronics Corp.Inventor: Kun-Huang Yu
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Patent number: 8704301Abstract: A DMOS transistor is fabricated with its source/body/deep body regions formed on the walls of a first set of trenches, and its drain regions formed on the walls of a different set of trenches. A gate region that is formed in a yet another set of trenches can be biased to allow carriers to flow from the source to the drain. Lateral current low from source/body regions on trench walls increases the active channel perimeter to a value well above the amount that would be present if the device was fabricated on just the surface of the wafer. Masking is avoided while open trenches are present. A transistor with a very low on-resistance per unit area is obtained.Type: GrantFiled: December 10, 2012Date of Patent: April 22, 2014Assignee: Fairchild Semiconductor CorporationInventor: Richard A. Blanchard
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Publication number: 20140103432Abstract: According to one embodiment, a semiconductor device includes a base region of a second conductivity type, a drift region of a first conductivity type, an insulating layer, a drain region of the first conductivity type, a gate oxide film, a gate electrode, a first main electrode, and a second main electrode. The base region includes a source region of the first conductivity type. The drift region is adjacent to the base region. The insulating layer is provided from a surface to inside of the drift region. The drain region is provided in the surface of the drift region and opposed to the source region across the base region and the insulating layer. The gate oxide film is provided on a surface of the base region. The gate electrode is provided on the gate oxide film. The first main electrode is connected to the source region. The second main electrode is connected to the drain region.Type: ApplicationFiled: December 19, 2013Publication date: April 17, 2014Applicant: Kabushiki Kaisha ToshibaInventors: Manji OBATAKE, Tomoko MATSUDAI
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Publication number: 20140103431Abstract: An LDMOS transistor includes a substrate of semiconductor material, an insulator layer overlying the substrate, a semiconductor layer overlying the insulator layer, a RESURF region, and a gate. The semiconductor layer includes a first conductivity type well region, a second conductivity type source region in contact with the first conductivity type well region, a second conductivity type drain region. The RESURF region includes at least one first conductivity type material portion, and at least one portion of the at least one first conductivity type material portion electrically coupled to the first conductivity type well region. A semiconductor material having a second conductivity type is located below the RESURF region. The second conductivity type semiconductor material is also located over a part of the RESURF region. The gate is located over the first conductivity type well region and over the RESURF region.Type: ApplicationFiled: December 19, 2013Publication date: April 17, 2014Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: BERNHARD H. GROTE, TAHIR A. KHAN, VISHNU K. KHEMKA, RONGHUA ZHU
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Patent number: 8698242Abstract: A LDMOS transistor is implemented in a first impurity region on a substrate. The LDMOS transistor has a source that includes a second impurity region. The second impurity region is implanted into the surface of the substrate within the first impurity region. Additionally, the LDMOS transistor has a drain that includes a third impurity region. The third impurity region is implanted into the surface of the substrate within the first impurity region. The third impurity region is spaced a predetermined distance away from a gate of the LDMOS transistor. The drain of the LDMOS transistor further includes a fourth impurity region within the third impurity region. The fourth impurity region provides an ohmic contact for the drain.Type: GrantFiled: January 14, 2013Date of Patent: April 15, 2014Assignee: Volterra Semiconductor CorporationInventors: Budong You, Marco A. Zuniga
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Patent number: 8698236Abstract: The invention provides an LDMOS transistor of which the time-dependent degrading of the performance due to the trapping of hot electrons in the gate insulation film is decreased. A body layer is disposed in a surface portion of an N?? type semiconductor layer. A source layer including an N? type layer is disposed in a surface portion of the body layer. An N? type drift layer is formed in a surface portion of the N?? type semiconductor layer. This drift layer includes a first region having a first N type impurity concentration peak region and a second region having a second N type impurity concentration peak region that is positioned deeper than the first N type impurity concentration peak region, the second region adjoining this first region. An N+ type drain layer is formed in a surface portion of the second region.Type: GrantFiled: November 23, 2011Date of Patent: April 15, 2014Assignee: Semiconductor Components Industries, LLCInventors: Yasuhiro Takeda, Shinya Inoue, Yuzo Otsuru
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Patent number: 8698241Abstract: A semiconductor device with improved characteristics is provided. The semiconductor device includes a LDMOS, a source plug electrically coupled to a source region of the LDMOS, a source wiring disposed over the source plug, a drain plug electrically coupled to a drain region of the LDMOS, and a drain wiring disposed over the drain plug. The structure of the source plug of the semiconductor device is devised. The semiconductor device is structured such that the drain plug is linearly disposed to extend in a direction Y, and the source plug includes a plurality of separated source plugs arranged at predetermined intervals in the direction Y. In this way, the separation of the source plug decreases an opposed area between the source plug and the drain plug, and can thus decrease the parasitic capacitance therebetween.Type: GrantFiled: February 2, 2012Date of Patent: April 15, 2014Assignee: Renesas Electronics CorporationInventor: Kyoya Nitta
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Publication number: 20140097492Abstract: A semiconductor structure is provided. The semiconductor structure includes a semiconductor substrate, a dielectric layer, a dielectric structure and an electrode structure. The dielectric layer is on an upper substrate surface of the semiconductor substrate. The dielectric structure and the semiconductor substrate have opposing first and second interfaces therebetween. The electrode structure comprises an electrode truck portion and at least one electrode branch portion. The at least one electrode branch portion is extended from the electrode truck portion down into the dielectric structure. The at least one electrode branch portion and the first interface have the smallest gap distance substantially bigger than 300 ? therebetween.Type: ApplicationFiled: October 5, 2012Publication date: April 10, 2014Applicant: UNITED MICROELECTRONICS CORP.Inventor: Kun-Huang Yu
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Patent number: 8692326Abstract: A layout pattern of a high voltage metal-oxide-semiconductor transistor device includes a first doped region having a first conductivity type, a second doped region having the first conductivity type, and an non-continuous doped region formed in between the first doped region and the second doped region. The non-continuous doped region includes a plurality of gaps formed therein. The non-continuous doped region further includes a second conductivity type complementary to the first conductivity type.Type: GrantFiled: February 28, 2012Date of Patent: April 8, 2014Assignee: United Microelectronics Corp.Inventors: Ming-Tsung Lee, Cheng-Hua Yang, Wen-Fang Lee, Chih-Chung Wang, Chih-Wei Hsu, Po-Ching Chuang
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Patent number: 8692328Abstract: A semiconductor device includes a second conductive-type deep well configured above a substrate. The deep well includes an ion implantation region and a diffusion region. A first conductive-type first well is formed in the diffusion region. A gate electrode extends over portions of the ion implantation region and of the diffusion region, and partially overlaps the first well. The ion implantation region has a uniform impurity concentration whereas the impurity concentration of the diffusion region varies from being the highest concentration at the boundary interface between the ion implantation region and the diffusion region to being the lowest at the portion of the diffusion region that is the farthest away from the boundary interface.Type: GrantFiled: August 1, 2013Date of Patent: April 8, 2014Assignee: MagnaChip Semiconductor, Ltd.Inventors: Jae-Han Cha, Kyung-Ho Lee, Sun-Goo Kim, Hyung-Suk Choi, Ju-Ho Kim, Jin-Young Chae, In-Taek Oh
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Patent number: 8691659Abstract: A method for forming a dielectric layer free of voids is disclosed. First, a substrate, a first stressed layer including a recess, a second stressed layer disposed on the first stressed layer and covering the recess and a patterned photoresist embedded in the recess are provided. Second, a first etching step is performed to totally remove the photoresist so that the remaining second stressed layer forms at least one protrusion adjacent to the recess. Then, a trimming photoresist is formed without exposure to fill the recess and to cover the protrusion. Later, a trimming etching step is performed to eliminate the protrusion and to collaterally remove the trimming photoresist.Type: GrantFiled: October 26, 2011Date of Patent: April 8, 2014Assignee: United Microelectronics Corp.Inventors: Ching-Pin Hsu, Yi-Po Lin, Jiunn-Hsiung Liao, Chieh-Te Chen, Feng-Yi Chang, Shang-Yuan Tsai, Li-Chiang Chen
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Patent number: 8692324Abstract: A laterally diffused metal-oxide-semiconductor transistor device includes a substrate having a first conductivity type with a semiconductor layer formed over the substrate. A source region and a drain extension region of the first conductivity type are formed in the semiconductor layer. A body region of a second conductivity type is formed in the semiconductor layer. A conductive gate is formed over a gate dielectric layer that is formed over a channel region. A drain contact electrically connects the drain extension region to the substrate and is laterally spaced from the channel region. The drain contact includes a highly-doped drain contact region formed between the substrate and the drain extension region in the semiconductor layer, wherein a topmost portion of the highly-doped drain contact region is spaced from the upper surface of the semiconductor layer. A source contact electrically connects the source region to the body region.Type: GrantFiled: June 16, 2008Date of Patent: April 8, 2014Assignee: Ciclon Semiconductor Device Corp.Inventors: Jacek Korec, Shuming Xu, Christopher Boguslaw Kocon
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Patent number: 8692325Abstract: There is provided a semiconductor device in which the degradation of electric characteristics can be inhibited. A semiconductor substrate has a main surface, and a trench in the main surface. A buried insulating film is buried in the trench. The trench has one wall surface and the other wall surface which oppose each other. A gate electrode layer is located over at least the buried insulating film. The trench has angular portions which are located between the main surface of at least either one of the one wall surface and the other wall and a bottom portion of the trench.Type: GrantFiled: April 5, 2010Date of Patent: April 8, 2014Assignee: Renesas Electronics CorporationInventor: Shinichiro Yanagi
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Patent number: 8691653Abstract: A semiconductor structure and a manufacturing process thereof are disclosed. The semiconductor structure includes a substrate having a first conductive type, a first well having a second conductive type formed in the substrate, a doped region having the second conductive type formed in the first well, a field oxide and a second well having the first conductive type. The doped region has a first net dopant concentration. The field oxide is formed on a surface area of the first well. The second well is disposed underneath the field oxide and connected to a side of the doped region. The second well has a second net dopant concentration smaller than the first net dopant concentration.Type: GrantFiled: March 5, 2012Date of Patent: April 8, 2014Assignee: Macronix International Co., Ltd.Inventors: Chih-Chia Hsu, Yu-Hsien Chin, Yin-Fu Huang
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Patent number: 8692327Abstract: An LDMOS device may include at least one of a second conduction type buried layer and a first conduction type drain extension region. An LDMOS device may include a second conduction type drain extension region configured to be formed in a portion of the first conduction type drain extension region. The second conduction type drain extension region may include a gate pattern and a drain region. An LDMOS device may include a first conduction type body having surface contact with the second conduction type drain extension region and may include a source region. An LDMOS device may include a first guard ring formed around the second conduction type drain extension region. An LDMOS device may include a second guard ring configured to be formed around the first guard ring and configured to be connected to a different region of the second conduction type buried layer.Type: GrantFiled: May 21, 2012Date of Patent: April 8, 2014Assignee: Dongbu HiTek Co., Ltd.Inventors: Choul Joo Ko, Cheol Ho Cho
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Patent number: 8686504Abstract: The present invention discloses a double diffused drain metal oxide semiconductor (DDDMOS) device and a manufacturing method thereof. The DDDMOS device is formed in a substrate, and includes a first well, a gate, a diffusion region, a source, and a drain. A low voltage device is also formed in the substrate, which includes a second well and a lightly doped drain (LDD) region, wherein the first well and the diffusion region are formed by process steps which also form the second well and the LDD region in the low voltage device, respectively.Type: GrantFiled: July 22, 2012Date of Patent: April 1, 2014Assignee: Richtek Technology Corporation, R.O.C.Inventors: Tsung-Yi Huang, Chien-Hao Huang
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Patent number: 8685824Abstract: The present invention discloses a hybrid high voltage device and a manufacturing method thereof. The hybrid high voltage device is formed in a first conductive type substrate, and includes at least one lateral double diffused metal oxide semiconductor (LDMOS) device region and at least one vent device region, wherein the LDMOS device region and the vent device region are connected in a width direction and arranged in an alternating order. Besides, corresponding high voltage wells, sources, drains, body regions, and gates of the LDMOS device region and the vent device region are connected to each other respectively.Type: GrantFiled: June 21, 2012Date of Patent: April 1, 2014Assignee: Richtek Technology Corporation, R.O.C.Inventors: Tsung-Yi Huang, Chien-Hao Huang
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Patent number: 8686500Abstract: The present invention discloses a double diffused metal oxide semiconductor (DMOS) device and a manufacturing method thereof. The DMOS device is formed in a first conductive type substrate, and includes a second conductive type high voltage well, a field oxide region, a gate, a second conductive type source, a second conductive type drain, a first conductive type body region, and a first conductive type deep well. The deep well is formed beneath and adjacent to the high voltage well in a vertical direction. The deep well and the high voltage well are defined by a same lithography process step.Type: GrantFiled: May 21, 2012Date of Patent: April 1, 2014Assignee: Richtek Technology CorporationInventors: Tsung-Yi Huang, Ching-Yao Yang
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Patent number: 8686498Abstract: A semiconductor device is provided. The semiconductor device includes a gate on a substrate, a source region at a first side of the gate, a first conductive type body region under the source region, a second conductive type drain region at a second side of the gate, a device isolation region in the substrate between the source region and the drain region and overlapping part of the gate, and a first buried layer extending in a direction from the source region to the drain region, the first buried layer under the body region, overlapping part of the device isolation region, and not overlapping the drain region.Type: GrantFiled: March 2, 2011Date of Patent: April 1, 2014Assignee: Samsung Electronics Co., Ltd.Inventor: Mueng-Ryul Lee
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Patent number: 8686505Abstract: A method produces a semiconductor device including a semiconductor body, an electrode thereon, and an insulating structure insulating the electrode from the semiconductor body. The semiconductor body includes a first contact region of a first conductivity type, a body region of a second conductivity type, a drift region of the first conductivity type, and a second contact region having a higher maximum doping concentration than the drift region. The insulating structure includes a gate dielectric portion forming a first horizontal interface. with the drift region and has a first maximum vertical extension A field dielectric portion forms with the drift region second and third horizontal interfaces arranged below the main surface. A second maximum vertical extension of the field dielectric portion is larger than the first maximum vertical extension. A third maximum vertical extension of the field dielectric portion is larger than the second maximum vertical extension.Type: GrantFiled: July 27, 2012Date of Patent: April 1, 2014Assignee: Infineon Technologies Dresden GmbHInventors: Marc Strasser, Karl-Heinz Gebhardt, Ralf Rudolf, Lincoln O'Riain
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Patent number: 8674436Abstract: Disclosed is an LDMOS device, which is configured to reduce an electric field concentrated to a gate oxide film and lower an ON-resistance produced when the device conducts a forward action, and a method for manufacturing the same. More specifically, when an n-drift region is formed on a P-type substrate, a p-body is formed on the n-drift region through an epitaxial process, and then the p-body region is partially etched to form a plurality of p-epitaxial layers, so that when the device executes an action for blocking a reverse voltage, depletion layers are formed between the junction surfaces of the p-epitaxial layers and the n-drift region including the junction surfaces between the n-drift region and the p-body.Type: GrantFiled: February 28, 2012Date of Patent: March 18, 2014Assignee: Hyundai Motor CompanyInventors: Jong Seok Lee, Kyoung Kook Hong
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Patent number: 8674441Abstract: A high voltage metal-oxide-semiconductor transistor device includes a substrate, a gate formed on the substrate, a source region and a drain region formed in the substrate at respective sides of the gate, and a first isolation structure formed under the gate. The first isolation structure is overlapped by the entire gate.Type: GrantFiled: July 9, 2012Date of Patent: March 18, 2014Assignee: United Microelectronics Corp.Inventor: Chin-Fu Chen
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Publication number: 20140070315Abstract: A double-RESURF LDMOS transistor has a gate dielectric structure including a shallow field “bump” oxide region and an optional raised dielectric structure that provides a raised support for the LDMOS transistor's polysilicon gate electrode. Fabrication of the shallow field oxide region is performed through a hard “bump” mask and controlled such that the bump oxide extends a minimal depth into the LDMOS transistor's drift (channel) region. The hard “bump” mask is also utilized to produce an N-type drift (N-drift) implant region and a P-type surface effect (P-surf) implant region, whereby these implants are “self-aligned” to the gate dielectric structure. The N-drift implant is maintained at Vdd by connection to the LDMOS transistor's drain diffusion. An additional Boron implant is utilized to form a P-type buried layer that connects the P-surf implant to the P-body region of the LDMOS transistor, whereby the P-surf implant is maintained at 0V.Type: ApplicationFiled: November 14, 2013Publication date: March 13, 2014Applicant: Tower Semiconductor Ltd.Inventors: Sagy Levy, Sharon Levin, Noel Berkovitch
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Publication number: 20140061721Abstract: An improved MOS device is provided whereby the p-top layer is defined by a series of discretely placed p type top diffusion regions. The invention also provides methods for fabricating the MOS device of the invention.Type: ApplicationFiled: August 28, 2012Publication date: March 6, 2014Applicant: MACRONIX INTERNATIONAL CO., LTD.Inventors: Ching-Lin Chan, Shyi-Yuan Wu, Cheng-Chi Lin, Shih-Chin Lien
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Publication number: 20140061791Abstract: A MOS transistor is described, including: a source region and a drain region in a semiconductor substrate, an isolation between the source region and the drain region, a first gate conductor between the source region and the isolation, at least one conductive plug electrically connected to the first gate conductor and penetrating into the isolation, and at least one second gate conductor on the isolation, which is electrically connected to the first gate conductor and the at least one conductive plug. One of the at least one conductive plug is between the first gate conductor and the at least one second gate conductor.Type: ApplicationFiled: August 28, 2012Publication date: March 6, 2014Applicant: United Microelectronics Corp.Inventors: KUN-HUANG YU, Chin-Fu Chen
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Patent number: 8664767Abstract: An integrated circuit structure includes a first conductive layer and an under bump metallization layer over the first conductive layer. The first conductive layer has a first conductive region and a second conductive region electrically isolated from the first conductive region. The under bump metallization layer has a first conductive area and a second conductive area electrically isolated from the first conductive area, the first conductive area substantially located over the first conductive region and the second conductive area substantially located over the second conductive region. At least one of the first conductive area or the first conductive region includes a first protrusion extending toward the second conductive area or second conductive region, respectively. Conductive vias connect the first conductive region to the second conductive area and connect the second conductive region to the first conductive area, and the vias include at least one via connected to the first protrusion.Type: GrantFiled: April 24, 2012Date of Patent: March 4, 2014Assignee: Volterra Semiconductor CorporationInventors: Ilija Jergovic, Efren M. Lacap