All Contacts On Same Surface (e.g., Lateral Structure) Patents (Class 257/343)
  • Patent number: 8759913
    Abstract: The present invention discloses a double diffused drain metal oxide semiconductor (DDMOS) device and a manufacturing method thereof. The DDDMOS device is formed in a substrate, and includes: a drift region, a gate, a source, a drain, a dielectric layer, and a conductive layer. The drift region includes a first region and a second region. The gate is formed on the substrate, and overlaps the first region from top view. The source and drain are formed at both sides of the gate respectively, and the drain is located in the second region. The drain and the gate are separated by a portion of the second region from top view. The dielectric layer is formed by dielectric material on the gate and the second region. The conductive layer is formed by conductive material on the dielectric layer, and overlaps at least part of the second region from top view.
    Type: Grant
    Filed: May 15, 2012
    Date of Patent: June 24, 2014
    Assignee: Richtek Technology Corporation
    Inventors: Tsung-Yi Huang, Ching-Yao Yang, Wen-Yi Liao
  • Publication number: 20140167159
    Abstract: The invention provides an LDMOS transistor of which the time-dependent degrading of the performance due to the trapping of hot electrons in the gate insulation film is decreased. A body layer is disposed in a surface portion of an N?-type semiconductor layer. A source layer including an N?-type layer is disposed in a surface portion of the body layer. An N? type drift layer is formed in a surface portion of the N?-type semiconductor layer. This drift layer includes a first region having a first N type impurity concentration peak region and a second region having a second N type impurity concentration peak region that is positioned deeper than the first N type impurity concentration peak region, the second region adjoining this first region. An N+ type drain layer is formed in a surface portion of the second region.
    Type: Application
    Filed: February 24, 2014
    Publication date: June 19, 2014
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Yasuhiro Takeda, Shinya Inoue, Yuzo Otsuru
  • Patent number: 8754442
    Abstract: A silicon on insulator N type semiconductor device, includes a N type drift region, a P type deep well, an N type buffer well, a P type drain region, an N type source region and a P type body contact region; a field oxide layer and a gate oxide layer arranged on a silicon surface, and a polysilicon lattice arranged on the gate oxide layer; and an N type triode drift region, a P type deep well, an N type triode buffer well, a P type emitting region, an N type base region, an N type source region and a P type body contact region; a field oxide layer and a gate oxide layer arranged on a silicon surface, and a polysilicon lattice arranged on the gate oxide layer.
    Type: Grant
    Filed: July 11, 2011
    Date of Patent: June 17, 2014
    Assignee: Southeast University
    Inventors: Longxing Shi, Qinsong Qian, Changlong Huo, Weifeng Sun, Shengli Lu
  • Patent number: 8754471
    Abstract: There are provided a semiconductor device which can be miniaturized without being deteriorated in characteristics, and a manufacturing method thereof. The semiconductor device includes a semiconductor substrate having a main surface, a source region and a drain region formed apart from each other in the main surface, a gate electrode layer formed over the main surface sandwiched between the source region and the drain region, a first conductive layer formed so as to be in contact with the surface of the source region, and a second conductive layer formed so as to be in contact with the surface of the drain region. A recess is formed in the main surface so as to extend from the contact region between the first conductive layer and the source region through a part underlying the gate electrode layer to the contact region between the second conductive layer and the drain region.
    Type: Grant
    Filed: March 4, 2011
    Date of Patent: June 17, 2014
    Assignee: Renesas Electronics Corporation
    Inventors: Toshiaki Iwamatsu, Kozo Ishikawa, Masashi Kitazawa, Kiyoshi Hayashi, Takahiro Maruyama, Masaaki Shinohara, Kenji Kawai
  • Publication number: 20140159154
    Abstract: A semiconductor device includes an electrode arranged on a main surface of a semiconductor body and an insulating structure insulating the electrode from the semiconductor body. The insulating structure includes in a vertical cross-section a gate dielectric portion forming a first horizontal interface at least with a drift region of the device and having a first maximum vertical extension between the first horizontal interface and the electrode, and a field dielectric portion forming with the drift region second, third and fourth horizontal interfaces. The second through fourth horizontal interfaces are arranged below the main surface. The third horizontal interface is arranged between the second and fourth horizontal interfaces. A second maximum vertical extension is larger than the first maximum vertical extension and a third maximum vertical extension is larger than the second maximum vertical extension. The electrode only partially overlaps the third horizontal interface.
    Type: Application
    Filed: February 11, 2014
    Publication date: June 12, 2014
    Inventors: Marc Strasser, Karl-Heinz Gebhardt, Ralf Rudolf, Lincoln O'Riain
  • Publication number: 20140159155
    Abstract: A layout pattern of an implant layer includes at least a linear region and at least a non-linear region. The linear region includes a plurality of first patterns to accommodate first dopants and the non-linear region includes a plurality of second patterns to accommodate the first dopants. The linear region abuts the non-linear region. Furthermore, a pattern density of the first patterns in the linear region is smaller than a pattern density of the second patterns in the non-linear region.
    Type: Application
    Filed: February 17, 2014
    Publication date: June 12, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Ming-Tsung Lee, Cheng-Hua Yang, Wen-Fang Lee, Chih-Chung Wang, Chih-Wei Hsu, Po-Ching Chuang
  • Publication number: 20140159153
    Abstract: A radio frequency (RF) laterally diffused metal oxide semiconductor (LDMOS) device is disclosed, which includes: a gate structure on a surface of a substrate; and a source region and a drain region beneath the surface of the substrate, the source region and the drain region formed on opposite sides of the gate structure, wherein the gate structure includes a first section proximal to the source region and a second section proximal to the drain region, and wherein the first section of the gate structure has a dopant concentration at least one decimal order higher than a dopant concentration of the second section of the gate structure. A method of forming an RF LDMOS device is also disclosed. With the gate structure including two sections having different dopant concentrations, the present invention is capable of reducing the hot carrier injection effect while possessing a low on-resistance.
    Type: Application
    Filed: December 6, 2013
    Publication date: June 12, 2014
    Applicant: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING CORPORATION
    Inventor: Wensheng QIAN
  • Patent number: 8748277
    Abstract: According to an exemplary embodiment, a method for fabricating a MOS transistor, such as an LDMOS transistor, includes forming a self-aligned lightly doped region in a first well underlying a first sidewall of a gate. The method further includes forming a self-aligned extension region under a second sidewall of the gate, where the self-aligned extension region extends into the first well from a second well. The method further includes forming a drain region spaced apart from the second sidewall of the gate. The method further includes forming a source region in the self-aligned lightly doped region and the first well. The self-aligned lightly doped region and the self-aligned extension region define a channel length of the MOS transistor, such as an LDMOS transistor.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: June 10, 2014
    Assignee: Broadcom Corporation
    Inventors: Xiangdong Chen, Wei Xia, Henry Kuo-Shun Chen
  • Patent number: 8748981
    Abstract: Semiconductor device structures and related fabrication methods are provided. An exemplary semiconductor device structure includes a first vertical drift region of semiconductor material, a second vertical drift region of semiconductor material, and a buried lateral drift region of semiconductor material that abuts the vertical drift regions. In one or more embodiments, the vertical drift regions and buried lateral drift region have the same conductivity type, wherein a body region of the opposite conductivity type overlies the buried lateral drift region between the vertical drift regions.
    Type: Grant
    Filed: September 7, 2012
    Date of Patent: June 10, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Hongning Yang, Xin Lin, Jiang-Kai Zuo
  • Publication number: 20140151800
    Abstract: A LDMOS transistor is implemented in a first impurity region on a substrate. The LDMOS transistor has a source that includes a second impurity region. The second impurity region is implanted into the surface of the substrate within the first impurity region. Additionally, the LDMOS transistor has a drain that includes a third impurity region. The third impurity region is implanted into the surface of the substrate within the first impurity region. The third impurity region is spaced a predetermined distance away from a gate of the LDMOS transistor. The drain of the LDMOS transistor further includes a fourth impurity region within the third impurity region. The fourth impurity region provides an ohmic contact for the drain.
    Type: Application
    Filed: February 7, 2014
    Publication date: June 5, 2014
    Applicant: Volterra Semiconductor Corporation
    Inventors: Budong You, Marco A. Zuniga
  • Publication number: 20140151799
    Abstract: The present invention discloses a double diffused drain metal oxide semiconductor (DDDMOS) device and a manufacturing method thereof. The DDDMOS device is formed in a substrate, and includes a first well, a gate, a diffusion region, a source, and a drain. A low voltage device is also formed in the substrate, which includes a second well and a lightly doped drain (LDD) region, wherein the first well and the diffusion region are formed by process steps which also form the second well and the LDD region in the low voltage device, respectively.
    Type: Application
    Filed: February 5, 2014
    Publication date: June 5, 2014
    Applicant: RICHTEK TECHNOLOGY CORPORATION, R.O.C.
    Inventors: Tsung-Yi Huang, Chien-Hao Huang
  • Patent number: 8729631
    Abstract: A MOS transistor is described, including: a source region and a drain region in a semiconductor substrate, an isolation between the source region and the drain region, a first gate conductor between the source region and the isolation, at least one conductive plug electrically connected to the first gate conductor and penetrating into the isolation, and at least one second gate conductor on the isolation, which is electrically connected to the first gate conductor and the at least one conductive plug. One of the at least one conductive plug is between the first gate conductor and the at least one second gate conductor.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: May 20, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Kun-Huang Yu, Chin-Fu Chen
  • Publication number: 20140131798
    Abstract: A semiconductor device includes: a semiconductor substrate including a first semiconductor layer on the semiconductor substrate; multiple semiconductor elements in the semiconductor substrate; and an ineffective region. Each semiconductor element includes: a second semiconductor layer in a surface portion of the first semiconductor layer; a third semiconductor layer disposed in another surface portion of the first semiconductor layer and spaced a part from the second semiconductor layer; and a control layer disposed on a portion of the first semiconductor layer between the second semiconductor layer and the third semiconductor layer. The ineffective region is disposed in the semiconductor substrate between at least two adjacent semiconductor elements; and does not provide a function of the semiconductor elements.
    Type: Application
    Filed: July 26, 2013
    Publication date: May 15, 2014
    Applicant: Denso Corporation
    Inventors: Syunsuke HARADA, Takashi NAKANO, Takuya OKUNO
  • Patent number: 8723258
    Abstract: An ESD tolerance of an LDMOS transistor is improved. An N+ type source layer shaped in a ladder and having a plurality of openings in its center is formed in a surface of a P type base layer using a gate electrode and a resist mask. A P+ type contact layer is formed to be buried in the opening. At that time, a distance from an edge of the opening, that is an edge of the P+ type contact layer, to an edge of the N+ type source layer is set to a predetermined distance. The predetermined distance is equal to a distance at which an HBM+ESD tolerance of the LDMOS transistor, which increases as the distance increases, begins to saturate.
    Type: Grant
    Filed: September 9, 2011
    Date of Patent: May 13, 2014
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Kiyofumi Nakaya, Tetsuro Hirano, Shuji Fujiwara
  • Publication number: 20140124858
    Abstract: A semiconductor device is provided. The device includes a semiconductor substrate and a gate structure thereon. A well region is formed in the semiconductor substrate. A drain region and a source region are respectively formed in the semiconductor substrate inside and outside of the well region. At least one set of the first and second heavily doped regions is formed in the well region between the drain region and the source region, wherein the first and second heavily doped regions are stacked vertically from bottom to top and have a doping concentration which is larger than that of the well region. The semiconductor substrate and the first heavily doped region have a first conductivity type and the well region and the second heavily doped region have a second conductivity type. A method for fabricating a semiconductor device is also disclosed.
    Type: Application
    Filed: November 7, 2012
    Publication date: May 8, 2014
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Wen-Cheng LIN, Shang-Hui TU, Shin-Cheng LIN
  • Patent number: 8716793
    Abstract: Disclosed are an LDMOS device and a method for manufacturing the same capable of decreasing the concentration of a drift region between a source finger tip and a drain, thereby increasing a breakdown voltage. An LDMOS device includes a gate which is formed on a substrate, a source and a drain which are separately arranged on both sides of the substrate with the gate interposed therebetween, a field oxide film which is formed to have a step between the gate and the drain, a drift region which is formed of first condition type impurity ions between the gate and the drain on the substrate, and at least one internal field ring which is formed inside the drift region and formed by selectively ion-implanting second conduction type impurity ions in accordance with the step of the field oxide film.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: May 6, 2014
    Assignee: Dongbu HiTek Co., Ltd.
    Inventors: Jae Hyun Yoo, Jong Min Kim
  • Patent number: 8716796
    Abstract: A semiconductor device includes a second conductive-type deep well configured above a substrate. The deep well includes an ion implantation region and a diffusion region. A first conductive-type first well is formed in the diffusion region. A gate electrode extends over portions of the ion implantation region and of the diffusion region, and partially overlaps the first well. The ion implantation region has a uniform impurity concentration whereas the impurity concentration of the diffusion region varies from being the highest concentration at the boundary interface between the ion implantation region and the diffusion region to being the lowest at the portion of the diffusion region that is the farthest away from the boundary interface.
    Type: Grant
    Filed: August 1, 2013
    Date of Patent: May 6, 2014
    Assignee: MagnaChip Semiconductor, Ltd.
    Inventors: Jae-Han Cha, Kyung-Ho Lee, Sun-Goo Kim, Hyung-Suk Choi, Ju-Ho Kim, Jin-Young Chae, In-Taek Oh
  • Patent number: 8716794
    Abstract: The present invention relates to a semiconductor power device and power integrated circuits (ICs). The lateral SOI MOSFET in the present comprises a trench gate extended to the dielectric buried layer, one or multiple dielectric trenches in the drift region, and a buried gate in said dielectric trench. The permittivity of the dielectric in said dielectric trench is lower than that of said active layer. Firstly, said dielectric trench not only greatly improves breakdown voltage, but also reduces pitch size. Secondly, the trench gate widens the effective conductive region in the vertical direction. Thirdly, dual gates of said trench gate and buried gate increase channel and current densities. Thereby, specific on-resistance and the power loss are reduced. The device of the present invention has many advantages, such as high voltage, high speed, low power loss, low cost and ease of integration.
    Type: Grant
    Filed: August 10, 2010
    Date of Patent: May 6, 2014
    Assignee: University of Electronic Science and Technology of China
    Inventors: Xiaorong Luo, Florin Udrea
  • Patent number: 8716811
    Abstract: A semiconductor device includes a first conduction-type semiconductor substrate, a first semiconductor region of a first conduction-type formed on the semiconductor substrate, a second semiconductor region of a second conduction-type formed on a surface of the first semiconductor region, a third semiconductor region of the second conduction-type formed to be separated from the second semiconductor region on the surface of the first semiconductor region, a fourth semiconductor region of the second conduction-type formed to be separated from the second semiconductor region and the third semiconductor region on the surface of the first semiconductor region, and a first electrode connected to the second semiconductor region and the third semiconductor region.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: May 6, 2014
    Assignee: Sony Corporation
    Inventors: Hideki Mori, Chihiro Arai
  • Patent number: 8716795
    Abstract: Methods of making, structures, devices, and/or applications for lateral double-diffused metal oxide semiconductor (LDMOS) transistors are disclosed. In one embodiment, a method of fabricating an LDMOS transistor with source, drain, and gate regions on a substrate, can include: forming p-type and n-type buried layer (PBL, NBL) regions; growing an epitaxial (N-EPI) layer on the NBL/PBL regions; forming a p-doped deep p-well (DPW) region on the PBL region; forming a well region in the N-EPI layer; forming a doped body region; forming an active area and a field oxide (FOX) region, and forming a drain oxide between the source and drain regions of the LDMOS transistor; forming a gate oxide adjacent to the source and drain regions, and forming a gate on the gate oxide and a portion of the drain oxide; and forming a doped drain region, and first and second doped source regions.
    Type: Grant
    Filed: December 21, 2011
    Date of Patent: May 6, 2014
    Assignees: Silergy Technology, Silergy Semiconductor Technology (Hangzhou) Ltd.
    Inventor: Budong You
  • Publication number: 20140117446
    Abstract: A device includes a semiconductor substrate, source and drain regions in the semiconductor substrate and having a first conductivity type, a gate structure supported by the semiconductor substrate between the source and drain regions, a well region in the semiconductor substrate, having a second conductivity type, and in which a channel region is formed under the gate structure during operation, and a shunt region adjacent the well region in the semiconductor substrate and having the second conductivity type. The shunt region has a higher dopant concentration than the well region to establish a shunt path for charge carriers of the second conductivity type that electrically couples the well region to a potential of the source region.
    Type: Application
    Filed: October 31, 2012
    Publication date: May 1, 2014
    Inventors: Xiaowei Ren, David C. Burdeaux, Robert P. Davidson, Michele L. Miera
  • Patent number: 8710544
    Abstract: The present invention discloses an isolated SCR ESD device, comprising: a substrate; a first well located in the substrate, which is floating and has a first conductivity type; a first high density doped region located in the first well and having a second conductivity type; a second well nearby the first well and having the second conductivity type; a second high density doped region located in the second well and having the second conductivity type; and a third high density doped region located in the second well and having the first conductivity type, wherein the first high density doped region is for electrical connection with a pad, and wherein the first well is not provided with a high density doped region having the first conductivity type for connection with the pad.
    Type: Grant
    Filed: January 7, 2012
    Date of Patent: April 29, 2014
    Assignee: Richtek Technology Corporation
    Inventor: Chih-Feng Huang
  • Patent number: 8710557
    Abstract: The present invention discloses a MOS transistor having a combined-source structure with low power consumption, which relates to a field of field effect transistor logic devices and circuits in CMOS ultra-large-scaled integrated circuits. The MOS transistor includes a control gate electrode layer, a gate dielectric layer, a semiconductor substrate, a Schottky source region, a highly-doped source region and a highly-doped drain region. An end of the control gate extends to the highly-doped source region to form a T shape, wherein the extending region of the control gate is an extending gate and the remaining region of the control gate is a main gate. The active region covered by the extending gate is a channel region, and material thereof is the substrate material. A Schottky junction is formed between the Schottky source region and the channel under the extending gate.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: April 29, 2014
    Assignee: Peking University
    Inventors: Ru Huang, Qianqian Huang, Zhan Zhan, Xin Huang, Yangyuan Wang
  • Publication number: 20140110782
    Abstract: The present disclosure provides a method for fabricating a high-voltage semiconductor device. The method includes designating first, second, and third regions in a substrate. The first and second regions are regions where a source and a drain of the semiconductor device will be formed, respectively. The third region separates the first and second regions. The method further includes forming a slotted implant mask layer at least partially over the third region. The method also includes implanting dopants into the first, second, and third regions. The slotted implant mask layer protects portions of the third region therebelow during the implanting. The method further includes annealing the substrate in a manner to cause diffusion of the dopants in the third region.
    Type: Application
    Filed: January 13, 2014
    Publication date: April 24, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
  • Patent number: 8704304
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a semiconductor substrate, a dielectric layer, a dielectric structure and an electrode structure. The dielectric layer is on an upper substrate surface of the semiconductor substrate. The dielectric structure and the semiconductor substrate have opposing first and second interfaces therebetween. The electrode structure comprises an electrode truck portion and at least one electrode branch portion. The at least one electrode branch portion is extended from the electrode truck portion down into the dielectric structure. The at least one electrode branch portion and the first interface have the smallest gap distance substantially bigger than 300 ? therebetween.
    Type: Grant
    Filed: October 5, 2012
    Date of Patent: April 22, 2014
    Assignee: United Microelectronics Corp.
    Inventor: Kun-Huang Yu
  • Patent number: 8704301
    Abstract: A DMOS transistor is fabricated with its source/body/deep body regions formed on the walls of a first set of trenches, and its drain regions formed on the walls of a different set of trenches. A gate region that is formed in a yet another set of trenches can be biased to allow carriers to flow from the source to the drain. Lateral current low from source/body regions on trench walls increases the active channel perimeter to a value well above the amount that would be present if the device was fabricated on just the surface of the wafer. Masking is avoided while open trenches are present. A transistor with a very low on-resistance per unit area is obtained.
    Type: Grant
    Filed: December 10, 2012
    Date of Patent: April 22, 2014
    Assignee: Fairchild Semiconductor Corporation
    Inventor: Richard A. Blanchard
  • Publication number: 20140103432
    Abstract: According to one embodiment, a semiconductor device includes a base region of a second conductivity type, a drift region of a first conductivity type, an insulating layer, a drain region of the first conductivity type, a gate oxide film, a gate electrode, a first main electrode, and a second main electrode. The base region includes a source region of the first conductivity type. The drift region is adjacent to the base region. The insulating layer is provided from a surface to inside of the drift region. The drain region is provided in the surface of the drift region and opposed to the source region across the base region and the insulating layer. The gate oxide film is provided on a surface of the base region. The gate electrode is provided on the gate oxide film. The first main electrode is connected to the source region. The second main electrode is connected to the drain region.
    Type: Application
    Filed: December 19, 2013
    Publication date: April 17, 2014
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Manji OBATAKE, Tomoko MATSUDAI
  • Publication number: 20140103431
    Abstract: An LDMOS transistor includes a substrate of semiconductor material, an insulator layer overlying the substrate, a semiconductor layer overlying the insulator layer, a RESURF region, and a gate. The semiconductor layer includes a first conductivity type well region, a second conductivity type source region in contact with the first conductivity type well region, a second conductivity type drain region. The RESURF region includes at least one first conductivity type material portion, and at least one portion of the at least one first conductivity type material portion electrically coupled to the first conductivity type well region. A semiconductor material having a second conductivity type is located below the RESURF region. The second conductivity type semiconductor material is also located over a part of the RESURF region. The gate is located over the first conductivity type well region and over the RESURF region.
    Type: Application
    Filed: December 19, 2013
    Publication date: April 17, 2014
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: BERNHARD H. GROTE, TAHIR A. KHAN, VISHNU K. KHEMKA, RONGHUA ZHU
  • Patent number: 8698242
    Abstract: A LDMOS transistor is implemented in a first impurity region on a substrate. The LDMOS transistor has a source that includes a second impurity region. The second impurity region is implanted into the surface of the substrate within the first impurity region. Additionally, the LDMOS transistor has a drain that includes a third impurity region. The third impurity region is implanted into the surface of the substrate within the first impurity region. The third impurity region is spaced a predetermined distance away from a gate of the LDMOS transistor. The drain of the LDMOS transistor further includes a fourth impurity region within the third impurity region. The fourth impurity region provides an ohmic contact for the drain.
    Type: Grant
    Filed: January 14, 2013
    Date of Patent: April 15, 2014
    Assignee: Volterra Semiconductor Corporation
    Inventors: Budong You, Marco A. Zuniga
  • Patent number: 8698236
    Abstract: The invention provides an LDMOS transistor of which the time-dependent degrading of the performance due to the trapping of hot electrons in the gate insulation film is decreased. A body layer is disposed in a surface portion of an N?? type semiconductor layer. A source layer including an N? type layer is disposed in a surface portion of the body layer. An N? type drift layer is formed in a surface portion of the N?? type semiconductor layer. This drift layer includes a first region having a first N type impurity concentration peak region and a second region having a second N type impurity concentration peak region that is positioned deeper than the first N type impurity concentration peak region, the second region adjoining this first region. An N+ type drain layer is formed in a surface portion of the second region.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: April 15, 2014
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Yasuhiro Takeda, Shinya Inoue, Yuzo Otsuru
  • Patent number: 8698241
    Abstract: A semiconductor device with improved characteristics is provided. The semiconductor device includes a LDMOS, a source plug electrically coupled to a source region of the LDMOS, a source wiring disposed over the source plug, a drain plug electrically coupled to a drain region of the LDMOS, and a drain wiring disposed over the drain plug. The structure of the source plug of the semiconductor device is devised. The semiconductor device is structured such that the drain plug is linearly disposed to extend in a direction Y, and the source plug includes a plurality of separated source plugs arranged at predetermined intervals in the direction Y. In this way, the separation of the source plug decreases an opposed area between the source plug and the drain plug, and can thus decrease the parasitic capacitance therebetween.
    Type: Grant
    Filed: February 2, 2012
    Date of Patent: April 15, 2014
    Assignee: Renesas Electronics Corporation
    Inventor: Kyoya Nitta
  • Publication number: 20140097492
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a semiconductor substrate, a dielectric layer, a dielectric structure and an electrode structure. The dielectric layer is on an upper substrate surface of the semiconductor substrate. The dielectric structure and the semiconductor substrate have opposing first and second interfaces therebetween. The electrode structure comprises an electrode truck portion and at least one electrode branch portion. The at least one electrode branch portion is extended from the electrode truck portion down into the dielectric structure. The at least one electrode branch portion and the first interface have the smallest gap distance substantially bigger than 300 ? therebetween.
    Type: Application
    Filed: October 5, 2012
    Publication date: April 10, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventor: Kun-Huang Yu
  • Patent number: 8692326
    Abstract: A layout pattern of a high voltage metal-oxide-semiconductor transistor device includes a first doped region having a first conductivity type, a second doped region having the first conductivity type, and an non-continuous doped region formed in between the first doped region and the second doped region. The non-continuous doped region includes a plurality of gaps formed therein. The non-continuous doped region further includes a second conductivity type complementary to the first conductivity type.
    Type: Grant
    Filed: February 28, 2012
    Date of Patent: April 8, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Ming-Tsung Lee, Cheng-Hua Yang, Wen-Fang Lee, Chih-Chung Wang, Chih-Wei Hsu, Po-Ching Chuang
  • Patent number: 8692328
    Abstract: A semiconductor device includes a second conductive-type deep well configured above a substrate. The deep well includes an ion implantation region and a diffusion region. A first conductive-type first well is formed in the diffusion region. A gate electrode extends over portions of the ion implantation region and of the diffusion region, and partially overlaps the first well. The ion implantation region has a uniform impurity concentration whereas the impurity concentration of the diffusion region varies from being the highest concentration at the boundary interface between the ion implantation region and the diffusion region to being the lowest at the portion of the diffusion region that is the farthest away from the boundary interface.
    Type: Grant
    Filed: August 1, 2013
    Date of Patent: April 8, 2014
    Assignee: MagnaChip Semiconductor, Ltd.
    Inventors: Jae-Han Cha, Kyung-Ho Lee, Sun-Goo Kim, Hyung-Suk Choi, Ju-Ho Kim, Jin-Young Chae, In-Taek Oh
  • Patent number: 8691659
    Abstract: A method for forming a dielectric layer free of voids is disclosed. First, a substrate, a first stressed layer including a recess, a second stressed layer disposed on the first stressed layer and covering the recess and a patterned photoresist embedded in the recess are provided. Second, a first etching step is performed to totally remove the photoresist so that the remaining second stressed layer forms at least one protrusion adjacent to the recess. Then, a trimming photoresist is formed without exposure to fill the recess and to cover the protrusion. Later, a trimming etching step is performed to eliminate the protrusion and to collaterally remove the trimming photoresist.
    Type: Grant
    Filed: October 26, 2011
    Date of Patent: April 8, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Ching-Pin Hsu, Yi-Po Lin, Jiunn-Hsiung Liao, Chieh-Te Chen, Feng-Yi Chang, Shang-Yuan Tsai, Li-Chiang Chen
  • Patent number: 8692324
    Abstract: A laterally diffused metal-oxide-semiconductor transistor device includes a substrate having a first conductivity type with a semiconductor layer formed over the substrate. A source region and a drain extension region of the first conductivity type are formed in the semiconductor layer. A body region of a second conductivity type is formed in the semiconductor layer. A conductive gate is formed over a gate dielectric layer that is formed over a channel region. A drain contact electrically connects the drain extension region to the substrate and is laterally spaced from the channel region. The drain contact includes a highly-doped drain contact region formed between the substrate and the drain extension region in the semiconductor layer, wherein a topmost portion of the highly-doped drain contact region is spaced from the upper surface of the semiconductor layer. A source contact electrically connects the source region to the body region.
    Type: Grant
    Filed: June 16, 2008
    Date of Patent: April 8, 2014
    Assignee: Ciclon Semiconductor Device Corp.
    Inventors: Jacek Korec, Shuming Xu, Christopher Boguslaw Kocon
  • Patent number: 8692325
    Abstract: There is provided a semiconductor device in which the degradation of electric characteristics can be inhibited. A semiconductor substrate has a main surface, and a trench in the main surface. A buried insulating film is buried in the trench. The trench has one wall surface and the other wall surface which oppose each other. A gate electrode layer is located over at least the buried insulating film. The trench has angular portions which are located between the main surface of at least either one of the one wall surface and the other wall and a bottom portion of the trench.
    Type: Grant
    Filed: April 5, 2010
    Date of Patent: April 8, 2014
    Assignee: Renesas Electronics Corporation
    Inventor: Shinichiro Yanagi
  • Patent number: 8691653
    Abstract: A semiconductor structure and a manufacturing process thereof are disclosed. The semiconductor structure includes a substrate having a first conductive type, a first well having a second conductive type formed in the substrate, a doped region having the second conductive type formed in the first well, a field oxide and a second well having the first conductive type. The doped region has a first net dopant concentration. The field oxide is formed on a surface area of the first well. The second well is disposed underneath the field oxide and connected to a side of the doped region. The second well has a second net dopant concentration smaller than the first net dopant concentration.
    Type: Grant
    Filed: March 5, 2012
    Date of Patent: April 8, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Chih-Chia Hsu, Yu-Hsien Chin, Yin-Fu Huang
  • Patent number: 8692327
    Abstract: An LDMOS device may include at least one of a second conduction type buried layer and a first conduction type drain extension region. An LDMOS device may include a second conduction type drain extension region configured to be formed in a portion of the first conduction type drain extension region. The second conduction type drain extension region may include a gate pattern and a drain region. An LDMOS device may include a first conduction type body having surface contact with the second conduction type drain extension region and may include a source region. An LDMOS device may include a first guard ring formed around the second conduction type drain extension region. An LDMOS device may include a second guard ring configured to be formed around the first guard ring and configured to be connected to a different region of the second conduction type buried layer.
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: April 8, 2014
    Assignee: Dongbu HiTek Co., Ltd.
    Inventors: Choul Joo Ko, Cheol Ho Cho
  • Patent number: 8686504
    Abstract: The present invention discloses a double diffused drain metal oxide semiconductor (DDDMOS) device and a manufacturing method thereof. The DDDMOS device is formed in a substrate, and includes a first well, a gate, a diffusion region, a source, and a drain. A low voltage device is also formed in the substrate, which includes a second well and a lightly doped drain (LDD) region, wherein the first well and the diffusion region are formed by process steps which also form the second well and the LDD region in the low voltage device, respectively.
    Type: Grant
    Filed: July 22, 2012
    Date of Patent: April 1, 2014
    Assignee: Richtek Technology Corporation, R.O.C.
    Inventors: Tsung-Yi Huang, Chien-Hao Huang
  • Patent number: 8685824
    Abstract: The present invention discloses a hybrid high voltage device and a manufacturing method thereof. The hybrid high voltage device is formed in a first conductive type substrate, and includes at least one lateral double diffused metal oxide semiconductor (LDMOS) device region and at least one vent device region, wherein the LDMOS device region and the vent device region are connected in a width direction and arranged in an alternating order. Besides, corresponding high voltage wells, sources, drains, body regions, and gates of the LDMOS device region and the vent device region are connected to each other respectively.
    Type: Grant
    Filed: June 21, 2012
    Date of Patent: April 1, 2014
    Assignee: Richtek Technology Corporation, R.O.C.
    Inventors: Tsung-Yi Huang, Chien-Hao Huang
  • Patent number: 8686500
    Abstract: The present invention discloses a double diffused metal oxide semiconductor (DMOS) device and a manufacturing method thereof. The DMOS device is formed in a first conductive type substrate, and includes a second conductive type high voltage well, a field oxide region, a gate, a second conductive type source, a second conductive type drain, a first conductive type body region, and a first conductive type deep well. The deep well is formed beneath and adjacent to the high voltage well in a vertical direction. The deep well and the high voltage well are defined by a same lithography process step.
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: April 1, 2014
    Assignee: Richtek Technology Corporation
    Inventors: Tsung-Yi Huang, Ching-Yao Yang
  • Patent number: 8686498
    Abstract: A semiconductor device is provided. The semiconductor device includes a gate on a substrate, a source region at a first side of the gate, a first conductive type body region under the source region, a second conductive type drain region at a second side of the gate, a device isolation region in the substrate between the source region and the drain region and overlapping part of the gate, and a first buried layer extending in a direction from the source region to the drain region, the first buried layer under the body region, overlapping part of the device isolation region, and not overlapping the drain region.
    Type: Grant
    Filed: March 2, 2011
    Date of Patent: April 1, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Mueng-Ryul Lee
  • Patent number: 8686505
    Abstract: A method produces a semiconductor device including a semiconductor body, an electrode thereon, and an insulating structure insulating the electrode from the semiconductor body. The semiconductor body includes a first contact region of a first conductivity type, a body region of a second conductivity type, a drift region of the first conductivity type, and a second contact region having a higher maximum doping concentration than the drift region. The insulating structure includes a gate dielectric portion forming a first horizontal interface. with the drift region and has a first maximum vertical extension A field dielectric portion forms with the drift region second and third horizontal interfaces arranged below the main surface. A second maximum vertical extension of the field dielectric portion is larger than the first maximum vertical extension. A third maximum vertical extension of the field dielectric portion is larger than the second maximum vertical extension.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: April 1, 2014
    Assignee: Infineon Technologies Dresden GmbH
    Inventors: Marc Strasser, Karl-Heinz Gebhardt, Ralf Rudolf, Lincoln O'Riain
  • Patent number: 8674436
    Abstract: Disclosed is an LDMOS device, which is configured to reduce an electric field concentrated to a gate oxide film and lower an ON-resistance produced when the device conducts a forward action, and a method for manufacturing the same. More specifically, when an n-drift region is formed on a P-type substrate, a p-body is formed on the n-drift region through an epitaxial process, and then the p-body region is partially etched to form a plurality of p-epitaxial layers, so that when the device executes an action for blocking a reverse voltage, depletion layers are formed between the junction surfaces of the p-epitaxial layers and the n-drift region including the junction surfaces between the n-drift region and the p-body.
    Type: Grant
    Filed: February 28, 2012
    Date of Patent: March 18, 2014
    Assignee: Hyundai Motor Company
    Inventors: Jong Seok Lee, Kyoung Kook Hong
  • Patent number: 8674441
    Abstract: A high voltage metal-oxide-semiconductor transistor device includes a substrate, a gate formed on the substrate, a source region and a drain region formed in the substrate at respective sides of the gate, and a first isolation structure formed under the gate. The first isolation structure is overlapped by the entire gate.
    Type: Grant
    Filed: July 9, 2012
    Date of Patent: March 18, 2014
    Assignee: United Microelectronics Corp.
    Inventor: Chin-Fu Chen
  • Publication number: 20140070315
    Abstract: A double-RESURF LDMOS transistor has a gate dielectric structure including a shallow field “bump” oxide region and an optional raised dielectric structure that provides a raised support for the LDMOS transistor's polysilicon gate electrode. Fabrication of the shallow field oxide region is performed through a hard “bump” mask and controlled such that the bump oxide extends a minimal depth into the LDMOS transistor's drift (channel) region. The hard “bump” mask is also utilized to produce an N-type drift (N-drift) implant region and a P-type surface effect (P-surf) implant region, whereby these implants are “self-aligned” to the gate dielectric structure. The N-drift implant is maintained at Vdd by connection to the LDMOS transistor's drain diffusion. An additional Boron implant is utilized to form a P-type buried layer that connects the P-surf implant to the P-body region of the LDMOS transistor, whereby the P-surf implant is maintained at 0V.
    Type: Application
    Filed: November 14, 2013
    Publication date: March 13, 2014
    Applicant: Tower Semiconductor Ltd.
    Inventors: Sagy Levy, Sharon Levin, Noel Berkovitch
  • Publication number: 20140061721
    Abstract: An improved MOS device is provided whereby the p-top layer is defined by a series of discretely placed p type top diffusion regions. The invention also provides methods for fabricating the MOS device of the invention.
    Type: Application
    Filed: August 28, 2012
    Publication date: March 6, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Ching-Lin Chan, Shyi-Yuan Wu, Cheng-Chi Lin, Shih-Chin Lien
  • Publication number: 20140061791
    Abstract: A MOS transistor is described, including: a source region and a drain region in a semiconductor substrate, an isolation between the source region and the drain region, a first gate conductor between the source region and the isolation, at least one conductive plug electrically connected to the first gate conductor and penetrating into the isolation, and at least one second gate conductor on the isolation, which is electrically connected to the first gate conductor and the at least one conductive plug. One of the at least one conductive plug is between the first gate conductor and the at least one second gate conductor.
    Type: Application
    Filed: August 28, 2012
    Publication date: March 6, 2014
    Applicant: United Microelectronics Corp.
    Inventors: KUN-HUANG YU, Chin-Fu Chen
  • Patent number: 8664767
    Abstract: An integrated circuit structure includes a first conductive layer and an under bump metallization layer over the first conductive layer. The first conductive layer has a first conductive region and a second conductive region electrically isolated from the first conductive region. The under bump metallization layer has a first conductive area and a second conductive area electrically isolated from the first conductive area, the first conductive area substantially located over the first conductive region and the second conductive area substantially located over the second conductive region. At least one of the first conductive area or the first conductive region includes a first protrusion extending toward the second conductive area or second conductive region, respectively. Conductive vias connect the first conductive region to the second conductive area and connect the second conductive region to the first conductive area, and the vias include at least one via connected to the first protrusion.
    Type: Grant
    Filed: April 24, 2012
    Date of Patent: March 4, 2014
    Assignee: Volterra Semiconductor Corporation
    Inventors: Ilija Jergovic, Efren M. Lacap