Active Channel Region Has A Graded Dopant Concentration Decreasing With Distance From Source Region (e.g., Double Diffused Device, Dmos Transistor) Patents (Class 257/335)
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Patent number: 11949011Abstract: A semiconductor structure including a bottom source drain region arranged on a substrate, a semiconductor channel region extending vertically upwards from a top surface of the bottom source drain region, a metal gate disposed around the semiconductor channel region, a top source drain region above the semiconductor channel region, an amorphous silicon layer directly on top of the metal gate, and an oxidation layer directly on top of the amorphous silicon layer, where the amorphous silicon layer and the oxidation layer together completely separate the metal gate from a surrounding interlevel dielectric layer.Type: GrantFiled: November 30, 2021Date of Patent: April 2, 2024Assignee: International Business Machines CorporationInventors: Chen Zhang, ChoongHyun Lee
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Patent number: 11862713Abstract: Doping techniques for fin-like field effect transistors (FinFETs) are disclosed herein. An exemplary method includes forming a fin structure, forming a doped amorphous layer over a portion of the fin structure, and performing a knock-on implantation process to drive a dopant from the doped amorphous layer into the portion of the fin structure, thereby forming a doped feature. The doped amorphous layer includes a non-crystalline form of a material. In some implementations, the knock-on implantation process crystallizes at least a portion of the doped amorphous layer, such that the portion of the doped amorphous layer becomes a part of the fin structure. In some implementations, the doped amorphous layer includes amorphous silicon, and the knock-on implantation process crystallizes a portion of the doped amorphous silicon layer.Type: GrantFiled: July 28, 2022Date of Patent: January 2, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Sai-Hooi Yeong, Sheng-Chen Wang, Bo-Yu Lai, Ziwei Fang, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 11616130Abstract: Techniques and mechanisms to provide electrical insulation between a gate and a channel region of a non-planar circuit device. In an embodiment, the gate structure, and insulation spacers at opposite respective sides of the gate structure, each extend over a semiconductor fin structure. In a region between the insulation spacers, a first dielectric layer extends conformally over the fin, and a second dielectric layer adjoins and extends conformally over the first dielectric layer. A third dielectric layer, adjoining the second dielectric layer and the insulation spacers, extends under the gate structure. Of the first, second and third dielectric layers, the third dielectric layer is conformal to respective sidewalls of the insulation spacers. In another embodiment, the second dielectric layer is of dielectric constant which is greater than that of the first dielectric layer, and equal to or less than that of the third dielectric layer.Type: GrantFiled: March 25, 2019Date of Patent: March 28, 2023Assignee: Intel CorporationInventors: Seung Hoon Sung, Jack Kavalieros, Ian Young, Matthew Metz, Uygar Avci, Devin Merrill, Ashish Verma Penumatcha, Chia-Ching Lin, Owen Loh
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Patent number: 11527624Abstract: A method of manufacturing a semiconductor device includes forming a gate structure over an active region of a substrate, the gate structure comprising a first section and a second section. The first section and the second section dividing the active region into a first source/drain region between the first section and the second section, and a pair of second source/drain regions arranged on opposite sides of the gate structure. The method further includes forming a conductive field plate over the substrate, the field plate extending between the first section and the second section and overlapping an edge of the active region. The method further includes implanting a first well in the substrate, wherein the first well overlaps the edge of the active region. The method further includes forming an isolation structure in the substrate, wherein the conductive field plate extends over the isolation structure.Type: GrantFiled: January 28, 2020Date of Patent: December 13, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Po-Yu Chen, Wan-Hua Huang, Jing-Ying Chen
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Patent number: 11515330Abstract: A 3-dimensional vertical memory string array includes high-speed ferroelectric field-effect transistor (FET) cells that are low-cost, low-power, or high-density and suitable for SCM applications. The memory circuits of the present invention provide random-access capabilities. The memory string may be formed above a planar surface of substrate and include a vertical gate electrode extending lengthwise along a vertical direction relative to the planar surface and may include (i) a ferroelectric layer over the gate electrode, (ii) a gate oxide layer; (iii) a channel layer provided over the gate oxide layer, and (iv) conductive semiconductor regions embedded in and isolated from each other by an oxide layer, wherein the gate electrode, the ferroelectric layer, the gate oxide layer, the channel layer and each adjacent pair of semiconductor regions from a storage transistor of the memory string, and wherein the adjacent pair of semiconductor regions serve as source and drain regions of the storage transistor.Type: GrantFiled: August 31, 2019Date of Patent: November 29, 2022Inventor: Yung-Tin Chen
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Patent number: 11508661Abstract: An integrated circuit includes a set of active regions in a substrate, a first set of conductive structures, a shallow trench isolation (STI) region, a set of gates and a first set of vias. The set of active regions extend in a first direction and is located on a first level. The first set of conductive structures and the STI region extend in at least the first direction or a second direction, is located on the first level, and is between the set of active regions. The STI region is between the set of active regions and the first set of conductive structures. The set of gates extend in the second direction and overlap the first set of conductive structures. The first set of vias couple the first set of conductive structures to the set of gates.Type: GrantFiled: July 22, 2020Date of Patent: November 22, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Pochun Wang, Ting-Wei Chiang, Chih-Ming Lai, Hui-Zhong Zhuang, Jung-Chan Yang, Ru-Gun Liu, Ya-Chi Chou, Yi-Hsiung Lin, Yu-Xuan Huang, Yu-Jung Chang, Guo-Huei Wu, Shih-Ming Chang
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Patent number: 11508842Abstract: An integrated circuit (IC) having a fin field effect transistor (FinFET) includes a substrate with a fin extending from a surface of the substrate. The fin includes a source region, a drain region, a drift region, and field plating oxide layer. The drift region is adjacent the drain region. The field plating oxide layer is on a first side, a second side, and a third side of the drift region.Type: GrantFiled: July 6, 2020Date of Patent: November 22, 2022Assignee: Texas Instruments IncorporatedInventor: Ming-Yeh Chuang
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Patent number: 11393921Abstract: A high-voltage semiconductor device includes a substrate, a first insulating structure, a gate, a drain region, a source region and a doped region. The substrate has a first conductive type, and the first insulating structure is disposed on the substrate. The drain region and the source region are disposed in the substrate. The source region has a first portion and a second portion. The first portion has the second conductive type and the second portion has the first conductive type. The gate is disposed on the substrate, between the source region and the drain region to partially cover a side of the first insulating structure. The doped region is disposed in the substrate and has a first doped region and a second doped region, and the first doped region and the second doped region both include the first conductive type and separately disposed under the first insulating structure.Type: GrantFiled: August 26, 2020Date of Patent: July 19, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Hung-Chih Tan, Hsing-Chao Liu, Hsiao-Ying Yang, Chih-Cherng Liao
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Patent number: 11380703Abstract: A memory structure may be provided, including a substrate, and a first well region, a second well region, and a third well region arranged within the substrate, where the first well region and the third well region may have a first conductivity type, and the second well region may have a second conductivity type different from the first conductivity type, and where the second well region may be arranged laterally between the first well region and the third well region. The memory structure may further include a first gate structure and a second gate structure arranged over the second well region. The first gate structure may extend over the third well region and the second gate structure may extend over the first well region.Type: GrantFiled: November 3, 2020Date of Patent: July 5, 2022Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Xinshu Cai, Yongshun Sun, Lanxiang Wang, Eng Huat Toh, Shyue Seng Tan
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Patent number: 11270993Abstract: An integrated MOSFET device is formed in a body of silicon carbide and with a first type of conductivity. The body accommodates a first body region, with a second type of conductivity; a JFET region adjacent to the first body region; a first source region, with the first type of conductivity, extending into the interior of the first body region; an implanted structure, with the second type of conductivity, extending into the interior of the JFET region. An isolated gate structure lies partially over the first body region, the first source region and the JFET region. A first metallization layer extends over the first surface and forms, in direct contact with the implanted structure and with the JFET region, a JBS diode.Type: GrantFiled: February 3, 2020Date of Patent: March 8, 2022Assignee: STMICROELECTRONICS S.R.L.Inventors: Mario Giuseppe Saggio, Simone RascunĂ¡
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Patent number: 11245007Abstract: A semiconductor device includes a semiconductor body of a wide-bandgap semiconductor material. A plurality of first bond areas is connected to a first load terminal of the semiconductor device. First gate fingers are arranged between the first bond areas. The first gate fingers extend in a first lateral direction and branch off from at least one of a first gate line portion and a second gate line portion. Second gate fingers extend in the first lateral direction. A first length of any of the first gate fingers along the first lateral direction is greater than a second length of any of the second gate fingers along the first lateral direction. A sum of the first length and the second length is equal to or greater than a lateral distance between the first gate line portion and the second gate line portion along the first lateral direction.Type: GrantFiled: May 14, 2018Date of Patent: February 8, 2022Assignee: Infineon Technologies AGInventor: Dethard Peters
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Patent number: 11227921Abstract: A transistor includes a trench formed in a semiconductor substrate with the trench having a first sidewall and a second sidewall. A gate region includes a conductive material filled in the trench. A drift region having a first conductivity type is formed in the semiconductor substrate adjacent to the second sidewall. A drain region is formed in the drift region and separated from the second sidewall by a first distance. A dielectric layer is formed at the top surface of the semiconductor substrate covering the gate region and the drift region between the second sidewall and the drain region. A field plate is formed over the dielectric layer and isolated from the conductive material and the drift region by way of the dielectric layer.Type: GrantFiled: November 22, 2019Date of Patent: January 18, 2022Assignee: NXP USA, INC.Inventors: Saumitra Raj Mehrotra, Bernhard Grote, Ljubo Radic
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Patent number: 11217490Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a substrate having a first device region and a second device region, a first fin over the substrate in the first device region, a second fin over the substrate in the second device region, a first epitaxial feature over the first fin in the source/drain region of the first fin, a second epitaxial feature over the second fin in the source/drain region of the second fin, and a dielectric layer on the first and second epitaxial features. The first epitaxial feature is doped with a first dopant of a first conductivity and the second epitaxial feature is doped with a second dopant of a second conductivity different from the first conductivity. The dielectric layer is doped with the first dopant.Type: GrantFiled: August 14, 2020Date of Patent: January 4, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 11211484Abstract: The present disclosure describes vertical transistor device and methods of making the same. The vertical transistor device includes substrate layer of first conductivity type, drift layer of first conductivity type formed over substrate layer, body region of second conductivity type extending vertically into drift layer from top surface of drift layer, source region of first conductivity type extending vertically from top surface of drift layer into body region, dielectric region including first and second sections formed over top surface, buried channel region of first conductivity type at least partially sandwiched between body region on first side and first and second sections of dielectric region on second side opposite to first side, gate electrode formed over dielectric region, and drain electrode formed below substrate layer. Dielectric region laterally overlaps with portion of body region. Thickness of first section is uniform and thickness of second section is greater than first section.Type: GrantFiled: February 10, 2020Date of Patent: December 28, 2021Assignee: Monolithic Power Systems, Inc.Inventors: Vipindas Pala, Sundarsan Uppili
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Patent number: 11210447Abstract: The first type of semiconductor device includes a first fin structure extending in a first direction, a first gate, and a first slot contact disposed over the first fin structure. The first gate extends in a second direction and has a first gate dimension measured in the first direction. The first slot contact has a first slot contact dimension measured in the first direction. A second type of semiconductor device includes: a second fin structure extending in a third direction, a second gate, and a second slot contact disposed over the second fin structure. The second gate extends in a fourth direction and has a second gate dimension measured in the third direction. The second slot contact has a second slot contact dimension measured in the third direction. The second slot contact dimension is greater than the second gate dimension and greater than the first slot contact dimension.Type: GrantFiled: May 16, 2019Date of Patent: December 28, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jiefeng Jeff Lin, Chih-Yung Lin, Dian-Sheg Yu, Hsiao-Lan Yang, Jhon Jhy Liaw
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Patent number: 11177380Abstract: A drift structure having a drift zone of a first conductivity type is formed in a SiC semiconductor body of a semiconductor component. Transistor cells each include a doping region and a source region in the SiC semiconductor body. The doping region forms a first pn junction with the drift structure and a second pn junction with the source region. The doping region is electrically connected to a first load electrode. A diode region is formed between the transistor cells and a side surface of the SiC semiconductor body. The diode region is electrically connected to the first load electrode and forms a third pn junction with the drift structure. An emitter efficiency of the diode region is higher than an emitter efficiency of the doping region.Type: GrantFiled: March 22, 2019Date of Patent: November 16, 2021Assignee: Infineon Technologies AGInventors: Larissa Wehrhahn-Kilian, Reinhold Schoerner
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Patent number: 11164978Abstract: A device includes a substrate having a top surface and a bottom surface. A first doping well having a first part and a second part is located in the substrate. An undoped moat is in the substrate between the first doping well and a second doping well. A diode includes an anode with an increased first doping concentration region in the first doping well and a cathode with an increased second doping concentration region in the second doping well. An isolation region is in the first doping well having a first portion proximate the top surface and a second portion distal to the top surface. A gap made of an undoped region is in the first doping well between the first part and the second part. The gap is located between the distal portion of the isolation region and the bottom surface of the substrate.Type: GrantFiled: January 28, 2020Date of Patent: November 2, 2021Assignee: GLOBALFOUNDRIES U.S. Inc.Inventors: Jagar Singh, Sudarshan Narayanan
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Patent number: 11158739Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a substrate; a gate structure formed over the substrate; a source region and a drain region formed in the substrate on either side of the gate structure, the source region and the drain region both having a first type of conductivity; and a field plate formed over the substrate between the gate structure and the drain region; wherein the field plate is coupled to the source region or a bulk electrode of the substrate. An associated method for fabricating the semiconductor structure is also disclosed.Type: GrantFiled: February 12, 2019Date of Patent: October 26, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chih-Chang Cheng, Fu-Yu Chu, Ruey-Hsin Liu, Kuang-Hsin Chen, Chih-Hsin Ko, Shih-Fen Huang
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Patent number: 11152506Abstract: A semiconductor device includes an extended drain finFET. The drain drift region of the finFET extends between a drain contact region and a body of the finFET. The drain drift region includes an enhanced portion of the drain drift region between the drain contact region and the body. The drain drift region also includes a first charge balance region and a second charge balance region laterally adjacent to, and on opposite sides of, the enhanced portion of the drain drift region. The enhanced portion of the drain drift region and the drain contact region have a first conductivity type; the body, the first charge balance region, and the second charge balance region have a second, opposite, conductivity type. The drain drift region is wider than the body.Type: GrantFiled: June 15, 2020Date of Patent: October 19, 2021Assignee: TEXAS INSTRUMENTS INCORPORATEDInventor: Ming-Yeh Chuang
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Patent number: 11133414Abstract: A semiconductor device includes a substrate, a first P-type well region and a second P-type well region disposed in the substrate, wherein the first P-type well region and the second P-type well region are spaced apart from each other, an N-type source region disposed in the substrate, wherein the N-type source region is disposed spaced apart from the second P-type well region, an N-type drain region disposed in the second P-type well region, an N-type LDD region disposed near the N-type drain region, and a gate insulating layer and a gate electrode on the substrate, wherein the gate electrode partially overlaps the second P-type well region.Type: GrantFiled: April 17, 2020Date of Patent: September 28, 2021Assignee: MagnaChip Semiconductor, Ltd.Inventors: Jae Hyung Jang, Jin Yeong Son, Hee Hwan Ji
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Patent number: 11133413Abstract: In one embodiment, method of making a high voltage PMOS (HVPMOS) transistor, can include: (i) providing a P-type substrate; (ii) implanting N-type dopants in the P-type substrate; (iii) dispersing the implanted N-type dopants in the P-type substrate to form a deep N-type well; (iv) implanting P-type dopants of different doping concentrations in the deep N-type well along a horizontal direction of the deep N-type well; and (v) dispersing the implanted P-type dopants to form a composite drift region having an increasing doping concentration and an increasing junction depth along the horizontal direction of the deep N-type well.Type: GrantFiled: June 15, 2018Date of Patent: September 28, 2021Assignee: Silergy Semiconductor Technology (Hangzhou) LTDInventor: Chenggong Han
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Patent number: 11088031Abstract: Provided are a semiconductor device, a method of manufacturing the same, and a method of forming a uniform doping concentration of each semiconductor device when manufacturing a plurality of semiconductor devices. When a concentration balance is disrupted due to an increase in doping region size, doping concentration is still controllable by using ion blocking patterns to provide a semiconductor device with uniform doping concentration and a higher breakdown voltage obtainable as a result of such doping.Type: GrantFiled: October 16, 2019Date of Patent: August 10, 2021Assignee: KEY FOUNDRY CO., LTD.Inventors: Young Bae Kim, Kwang Il Kim
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Patent number: 11081581Abstract: The n-type body extension region BER is separated from the n+ buried region BL by the p-type impurity region PIR and is in contact with the p-type drift region DFT1. At the end of the n-type body extension region BER closest to the p+ drain region DC, the first portion FP of the n-type body extension region BER located closest to the second surface SS is located closer to the p+ drain region DC than the second portion SP of the n-type body extension region BER located at the first surface FS, and is located closer to the second surface SS than the bottom surface BS of the element isolation insulating film SIS.Type: GrantFiled: February 6, 2020Date of Patent: August 3, 2021Assignee: RENESAS ELECTRONICS CORPORATIONInventor: Yuji Ishii
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Patent number: 11075298Abstract: One illustrative integrated circuit product disclosed herein includes a gate structure positioned above a semiconductor substrate, a source region and a drain region, both of which include an epi semiconductor material, wherein at least a portion of the epi semiconductor material in the source and drain regions is positioned in the substrate. In this example, the IC product also includes an isolation structure positioned in the substrate between the source region and the drain region, wherein the isolation structure includes a channel-side edge and a drain-side edge, wherein the channel-side edge is positioned vertically below the gate structure and wherein a portion of the substrate laterally separates the isolation structure from the epi semiconductor material in the drain region.Type: GrantFiled: June 27, 2019Date of Patent: July 27, 2021Assignee: GLOBALFOUNDRIES U.S. Inc.Inventors: Jiehui Shu, Judson R. Holt, Sipeng Gu, Halting Wang
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Patent number: 11069804Abstract: A power device, comprising, a semiconductor substrate composition having a substrate layer of a first conductivity type, one or more lateral double diffused metal oxide semiconductor (LDMOS) devices formed in the substrate layer. LDMOS structures are integrated in to the isolation region of a high voltage well. Each LDMOS is isolated from a power device substrate area by an isolator structure formed from the substrate layer. Each LDMOS comprises a continuous field plate formed at least partially on the thick insulation layer over each of the one or more LDMOS devices and in conductive contact with the power device substrate area.Type: GrantFiled: August 31, 2018Date of Patent: July 20, 2021Assignee: Alpha and Omega Semiconductor (Cayman) Ltd.Inventor: Vipindas Pala
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Patent number: 11056587Abstract: A semiconductor device includes an active region defined by an element isolation region in a base substrate, source and drain regions of a first conductivity type spaced apart from each other, and formed in the active region, a body region of a second conductivity type surrounding the source region, and formed in the base substrate, a drift region of the first conductivity type surrounding the drain region, having a lower impurity concentration than the drain region, and formed in the base substrate, an insulating structure including a buried insulating pattern and a semiconductor pattern sequentially stacked on the drift region, a gate dielectric film including a first portion extending along an upper surface of the body region and a second portion extending along a side surface and an upper surface of the insulating structure, and a gate electrode extending along an upper surface of the gate dielectric film.Type: GrantFiled: November 26, 2019Date of Patent: July 6, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hui Chul Shin, Woo Yeol Maeng
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Patent number: 11038051Abstract: A semiconductor device includes a semiconductor substrate including a first epitaxial layer having a first surface and a second surface, a second epitaxial layer, a buried region formed across the first epitaxial layer and the second epitaxial layer, and a gate electrode. The second epitaxial layer includes a drain region, a source region, a body region, a drift region, a first region, and a second region. The first region is formed below at least the drain region. The second region has first and second ends in a channel length direction. The first end is located between the body region and the drain region in the channel length direction. The second region extends from the first end toward the second end such that the second end extends below at least the source region. An impurity concentration of the second region is greater than an impurity concentration of the first region.Type: GrantFiled: February 5, 2020Date of Patent: June 15, 2021Assignee: RENESAS ELECTRONICS CORPORATIONInventor: Takahiro Mori
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Patent number: 11024712Abstract: A semiconductor device is proposed. The semiconductor device includes a source region of a field effect transistor having a first conductivity type, a body region of the field effect transistor having a second conductivity type, and a drain region of the field effect transistor having the first conductivity type. The source region, the drain region, and the body region are located in a semiconductor substrate of the semiconductor device and the body region is located between the source region and the drain region. The drain region extends from the body region through a buried portion of the drain region to a drain contact portion of the drain region located at a surface of the semiconductor substrate, the buried portion of the drain region is located beneath a spacer doping region, and the spacer doping region is located within the semiconductor substrate.Type: GrantFiled: June 27, 2018Date of Patent: June 1, 2021Assignee: Intel IP CorporationInventors: Vase Jovanov, Peter Baumgartner, Gregor Bracher, Luis Giles, Uwe Hodel, Andreas Lachmann, Philipp Riess, Karl-Henrik Ryden
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Patent number: 10928047Abstract: A package for a power supply circuit and an LED illumination module are provided. The package includes: a first package body, configured to package a power device, a control chip and a passive element; an inductive element; a connector configured to connect an electrode of the inductive element to a corresponding electrode of the power device; an encapsulant configured to encapsulate the first package body, the inductive element and the connector; and multiple pins exposed through the encapsulant and configured to achieve external electrical connection. In the package, the control chip, the inductive element and the passive element are packaged together, thereby reducing an area occupied by the drive circuit in the LED illumination module.Type: GrantFiled: March 27, 2019Date of Patent: February 23, 2021Assignee: SILERGY SEMICONDUCTOR TECHNOLOGY (HANGZHOU) LTDInventors: Wei Chen, Jian Wei
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Patent number: 10916546Abstract: A semiconductor device includes a substrate, a fin structure and an isolation layer formed on the substrate and adjacent to the fin structure. The semiconductor device includes a gate structure formed on at least a portion of the fin structure and the isolation layer. The semiconductor device includes an epitaxial layer including a strained material that provides stress to a channel region of the fin structure. The epitaxial layer has a first region and a second region, in which the first region has a first doping concentration of a first doping agent and the second region has a second doping concentration of a second doping agent. The first doping concentration is greater than the second doping concentration. The epitaxial layer is doped by ion implantation using phosphorous dimer.Type: GrantFiled: December 23, 2019Date of Patent: February 9, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Chang Lin, Chun-Feng Nieh, Huicheng Chang, Hou-Yu Chen, Yong-Yan Lu
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Patent number: 10916633Abstract: A method for forming the semiconductor device that includes forming an etch mask covering a drain side of the gate structure and the silicon containing fin structure; etching a source side of the silicon containing fin structure adjacent to the channel region; and forming a germanium containing semiconductor material on an etched sidewall of the silicon containing fin structure adjacent to the channel region. Germanium from the germanium containing semiconductor material is diffused into the channel region to provide a graded silicon germanium region in the channel region having germanium present at a highest concentration in the channel region at the source end of the channel region and a germanium deficient concentration at the drain end of the channel region.Type: GrantFiled: October 23, 2018Date of Patent: February 9, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Shogo Mochizuki, Kangguo Cheng, Choonghyun Lee, Juntao Li
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Patent number: 10903312Abstract: A semiconductor device includes a semiconductor substrate in which an active region and an edge termination region are defined, a semiconductor element formed in the active region, and first to fourth P layers formed in a region spanning from an edge portion of the active region to the edge termination region in the surface of the semiconductor substrate. The first to fourth P layers respectively have surface concentrations P(1) to P(4) that decrease in this order, bottom-end distances D(1) to D(4) that increase in this order, and distances B(1) to B(4) to the edge of the semiconductor substrate that increase in this order. The surface concentration P(4) is 10 to 1000 times the impurity concentration of the semiconductor substrate, and the bottom-end distance D(4) is in the range of 15 to 30 ?m.Type: GrantFiled: October 22, 2019Date of Patent: January 26, 2021Assignee: Mitsubishi Electric CorporationInventors: Ze Chen, Katsumi Nakamura
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Patent number: 10886405Abstract: A semiconductor structure includes a first source/drain region, a second source/drain region, a channel doping region, a gate structure, a first well and a second well. The second source/drain region is disposed opposite to the first source/drain region. The channel doping region is disposed between the first source/drain region and the second source/drain region. The gate structure is disposed on the channel doping region. The first well has a first portion disposed under the first source/drain region. The second well is disposed opposite to the first well and separated from the second source/drain region. The first source/drain region, the second source/drain region and the channel doping region have a first conductive type. The first well and the second well have a second conductive type different from the first conductive type.Type: GrantFiled: December 7, 2016Date of Patent: January 5, 2021Assignee: MACRONIX INTERNATIONAL CO., LTD.Inventors: Yung-Hsiang Chen, Yao-Wen Chang, Chu-Yung Liu, I-Chen Yang, Hsin-Wen Chang
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Patent number: 10886418Abstract: An IC with a split-gate transistor includes a substrate doped the second conductivity type having a semiconductor surface layer doped the first conductivity type. The transistor includes a first doped region formed as an annulus, a second doped region including under the first doped region, and a third doped region under the second doped region, all coupled together and doped the second conductivity type. A fourth doped region doped the first conductivity type is above the third doped region. A fifth doped region doped the first conductivity type is outside the annulus. Sixth doped regions doped the first conductivity type include a first sixth doped region surrounded by the annulus in the semiconductor surface layer and a second sixth doped region in the fifth doped region. Field oxide includes a field oxide portion between the fifth and the first doped region. A field plate is on the field oxide portion.Type: GrantFiled: February 21, 2019Date of Patent: January 5, 2021Assignee: TEXAS INSTRUMENTS INCORPORATEDInventor: Sheldon Douglas Haynie
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Patent number: 10879395Abstract: A method for forming a semiconductor device structure is provided. The method includes providing a substrate having a base, a first fin structure, and a second fin structure. The method includes forming a gate structure over the first fin structure and the second fin structure. The method includes forming a first source structure and a first drain structure on the first fin structure and on two opposite sides of the gate structure. The first source structure and the first drain structure are made of an N-type conductivity material. The method includes forming a cap layer over the first source structure and the first drain structure. The cap layer is doped with a Group IIIA element, and the cap layer adjacent to a top surface of the first source structure is thicker than the cap layer adjacent to a bottom surface of the first source structure.Type: GrantFiled: December 30, 2019Date of Patent: December 29, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 10861948Abstract: An integrated circuit which includes a field-plated FET is formed by forming a first opening in a layer of oxide mask, exposing an area for a drift region. Dopants are implanted into the substrate under the first opening. Subsequently, dielectric sidewalls are formed along a lateral boundary of the first opening. A field relief oxide is formed by thermal oxidation in the area of the first opening exposed by the dielectric sidewalls. The implanted dopants are diffused into the substrate to form the drift region, extending laterally past the layer of field relief oxide. The dielectric sidewalls and layer of oxide mask are removed after the layer of field relief oxide is formed. A gate is formed over a body of the field-plated FET and over the adjacent drift region. A field plate is formed immediately over the field relief oxide adjacent to the gate.Type: GrantFiled: November 14, 2019Date of Patent: December 8, 2020Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Henry Litzmann Edwards, Binghua Hu, James Robert Todd
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Patent number: 10847652Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a substrate of a first conductivity; a first region of the first conductivity formed in the substrate; a second region of the first conductivity formed in the first region, wherein the second region has a higher doping density than the first region; a source region of a second conductivity formed in the second region; a drain region of the second conductivity formed in the substrate; a pickup region of the first conductivity formed in the second region and adjacent to the source region; and a resist protective oxide (RPO) layer formed on a top surface of the second region. An associated fabricating method is also disclosed.Type: GrantFiled: November 16, 2017Date of Patent: November 24, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chen-Liang Chu, Ta-Yuan Kung, Ker-Hsiao Huo, Yi-Huan Chen
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Patent number: 10847618Abstract: A semiconductor device may include a semiconductor layer, spaced apart source and drain regions in the semiconductor layer with a channel region extending therebetween, and a gate on the channel region. The semiconductor device may further include a body contact in the semiconductor layer and comprising a body contact dopant diffusion blocking superlattice extending through the body contact to divide the body contact into a first body contact region and an second body contact region with the second body contact region having a same conductivity and higher dopant concentration than the first body contact region. The body contact dopant diffusion blocking superlattice may include a respective plurality of stacked groups of layers, with each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.Type: GrantFiled: November 16, 2018Date of Patent: November 24, 2020Assignee: ATOMERA INCORPORATEDInventors: Hideki Takeuchi, Daniel Connelly, Marek Hytha, Richard Burton, Robert J. Mears
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Patent number: 10847658Abstract: An inverse diode die has a high reverse breakdown voltage, a short reverse recovery time Trr, and is rugged in terms of reverse breakdown voltage stability over long term use in hard commutation applications. The die has an unusually lightly doped bottomside P type anode region and also has an N? type drift region above it. Both regions are of bulk wafer material. An N+ type contact region extends down into the drift region. A topside metal electrode is on the contact region. A P type silicon peripheral sidewall region laterally rings around the drift region. A topside passivation layer rings around the topside electrode. A bottomside metal electrode is on the bottom of the die. The die has a deep layer of hydrogen ions that extends through the N? drift region. The die also has a shallow layer of ions. Both ion layers are implanted from the bottomside.Type: GrantFiled: May 26, 2020Date of Patent: November 24, 2020Assignee: Littelfuse, Inc.Inventor: Elmar Wisotzki
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Patent number: 10840370Abstract: A lateral double diffused MOS transistor includes a drain region positioned in a central region of an upper surface portion of an epitaxial layer, the drain region including a first well of a second conductive type, a source region positioned in the upper surface portion of the epitaxial layer and spaced apart from the drain region, the source region having a ring shape to surround the drain region and including a second well of the first conductive type, a first gate electrode disposed on the epitaxial layer and between the drain region and the source region, a P-sub region disposed on an upper surface of the epitaxial layer and laterally spaced apart from the source region, and a deep well of the second conductive type, disposed in the epitaxial layer, the deep well radially extending from the first well through the second well to entirely surround the drain region and the source region.Type: GrantFiled: February 1, 2019Date of Patent: November 17, 2020Assignee: DB HITEK CO., LTD.Inventors: Jong Min Kim, Chul Jin Yoon
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Patent number: 10825927Abstract: A first diffusion region of a first conductivity type and a second diffusion region of a second conductivity type are formed next to each other in a semiconductor substrate. Drain and source contact regions of the first conductivity type are formed in the first and second diffusion region, respectively. A trench insulating region is formed in the first diffusion region between the drain and source contact regions. A third diffusion region of the second conductivity type is formed next to a side wall of the trench insulating region on the source contact region side in the first diffusion region between the source contact region and the trench insulating region. A gate electrode is formed on the semiconductor substrate through a gate insulating film to cover an area from an end portion of the source contact region to at least a part of a top surface of the trench insulating region.Type: GrantFiled: November 8, 2018Date of Patent: November 3, 2020Assignee: ABLIC INC.Inventors: Ryuhei Kojima, Keisuke Nagao
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Patent number: 10825904Abstract: Provided is a semiconductor device including a buffer region. Provided is a semiconductor device including: semiconductor substrate of a first conductivity type; a drift layer of the first conductivity type provided in the semiconductor substrate; and a buffer region of the first conductivity type provided in the drift layer, the buffer region having a plurality of peaks of a doping concentration, wherein the buffer region has: a first peak which has a predetermined doping concentration, and is provided the closest to a back surface of the semiconductor substrate among the plurality of peaks; and a high-concentration peak which has a higher doping concentration than the first peak, and is provided closer to an upper surface of the semiconductor substrate than the first peak is.Type: GrantFiled: December 21, 2018Date of Patent: November 3, 2020Assignee: FUJI ELECTRIC CO., LTD.Inventors: Yasunori Agata, Takashi Yoshimura, Hiroshi Takishita
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Patent number: 10804267Abstract: The present disclosure describes a metal-oxide-semiconductor field-effect transistor (MOSFET) device. The MOSFET device includes a first-type substrate, a deep-second-type well in the first-type substrate, a first-type well over the deep-second-type well, and a second-type well over the deep-second-type well. The second-type well and the deep-second-type well form an enclosed space that includes the first-type well. The MOSFET also includes an embedded semiconductor region (ESR) in a vicinity of the enclosed space. The ESR includes a dopant concentration lower than at least one of a dopant concentration of the first-type well, a dopant concentration of the second-type well, and a dopant concentration of the deep-second-type well.Type: GrantFiled: January 26, 2018Date of Patent: October 13, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chien Yao Huang, Yu-Ti Su
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Patent number: 10777663Abstract: A method includes forming a fin structure over a substrate; forming a source/drain structure adjoining the fin structure, in which the source/drain structure includes tin; and exposing the source/drain structure to a boron-containing gas to diffuse boron into the source/drain structure to form a doped region in the source/drain structure.Type: GrantFiled: October 2, 2018Date of Patent: September 15, 2020Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITYInventors: Chung-En Tsai, Fang-Liang Lu, Pin-Shiang Chen, Chee-Wee Liu
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Patent number: 10763358Abstract: Disclosed is a high voltage semiconductor device and a method of manufacturing the same.Type: GrantFiled: December 10, 2018Date of Patent: September 1, 2020Assignee: DB HiTek Co., Ltd.Inventor: Jong Ho Lee
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Patent number: 10748820Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a substrate having a first device region and a second device region, a first fin over the substrate in the first device region, a second fin over the substrate in the second device region, a first epitaxial feature over the first fin in the source/drain region of the first fin, a second epitaxial feature over the second fin in the source/drain region of the second fin, and a dielectric layer on the first and second epitaxial features. The first epitaxial feature is doped with a first dopant of a first conductivity and the second epitaxial feature is doped with a second dopant of a second conductivity different from the first conductivity. The dielectric layer is doped with the first dopant.Type: GrantFiled: December 17, 2019Date of Patent: August 18, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 10741549Abstract: The present disclosure provides a FINFET device integrated with a TFET and its manufacturing method. Two end portions of the fin structure respectively form an N-type doped drain and a source which is consisted by a top P-type doped region and a bottom N-type doped region. As a result, the bottom N-type doped region of the source, the drain, the channel, the high-k dielectric layer and the gate structure on the surface of the sidewall of the fin structure form a MOS FINFET device, and the top P-type doped region of the source, the drain, the channel, the high-k dielectric layer and the gate structure on the top surface of the fin structure form the TFET device. The integration of the TFET and the FINFET is achieved, which decreases the cost.Type: GrantFiled: November 22, 2017Date of Patent: August 11, 2020Assignees: SHANGHAI IC R&D CENTER CO., LTD, CHENGDU IMAGE DESIGN TECHNOLOGY CO., LTD.Inventor: Deming Sun
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Patent number: 10741610Abstract: A memory cell includes a substrate including a first diode region, a second diode region, a third diode region, and a fourth diode region, a first well region formed in the first diode region and the second diode region, a second well region formed in the third diode region and the fourth diode region, a doped conductive region formed on the first well region and the second well region, and a deep trench isolation structure formed in the substrate to electrically isolate different portions of each of the first well region, the second well region, and the doped conductive region formed over different diode regions. The second well region and the first well region have different doping types. The memory cell includes a resistance random access memory device formed over the substrate and electrically connected to the doped conductive region in the second diode region and the third diode region.Type: GrantFiled: March 21, 2018Date of Patent: August 11, 2020Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventors: Sheng Fen Chiu, Heng Cao
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Patent number: 10741685Abstract: Structures for laterally-diffused metal-oxide-semiconductor devices and drain-extended metal-oxide-semiconductor devices, as well as methods of forming laterally-diffused metal-oxide-semiconductor devices and drain-extended metal-oxide-semiconductor devices. A gate electrode is arranged to extend about a semiconductor fin projecting from a substrate. A drain region is arranged in the substrate, and a source region is coupled with the semiconductor fin. The source region is arranged over the semiconductor fin. A drift region is arranged in the substrate between the drain region and the semiconductor fin. The drain region, source region, and drift region have a given conductivity type. The drift region has a lower electrical conductivity than the drain region.Type: GrantFiled: September 21, 2018Date of Patent: August 11, 2020Assignee: GLOBALFOUNDRIES INC.Inventors: Robert Gauthier, Jr., Souvick Mitra, Alain Loiseau, Tsai Tsung-Che, Mickey Yu, You Li
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Patent number: 10727333Abstract: According to one embodiment, a semiconductor device includes a semiconductor device includes a first semiconductor region, a second semiconductor region, a third semiconductor region, an insulating unit, a void, a gate insulating film and a gate electrode. The second semiconductor region provides on a part of the first semiconductor region. The third semiconductor region provides on one other part of the first semiconductor region. The insulating unit provides on a part of the second semiconductor region. The void provides at a lower part of the insulating unit. The gate insulating film provides on a part of the first semiconductor region between the second semiconductor region and the third semiconductor region. The gate electrode provides on the gate insulating film. A position in a first direction of at least a part of the void is between the insulating unit and the third semiconductor region.Type: GrantFiled: January 17, 2017Date of Patent: July 28, 2020Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Hirofumi Nagano, Koichi Ozaki