All Contacts On Same Surface (e.g., Lateral Structure) Patents (Class 257/343)
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Patent number: 8237223Abstract: A semiconductor device including a substrate, an epitaxial layer, a first sinker, a transistor, a diode unit, a first buried layer, and a second buried layer is provided. When the semiconductor device is operated at the high voltage, the highly large substrate current due to the external load is avoided through the diode unit disposed in the semiconductor device of an embodiment consistent with the invention. Furthermore, according to the design of the semiconductor device, the issue of the narrow input voltage range is improved, and interference of the semiconductor device with the other semiconductor devices is prevented.Type: GrantFiled: September 10, 2009Date of Patent: August 7, 2012Assignee: Episil Technologies Inc.Inventors: Shih-Kuei Ma, Ta-Chuan Kuo
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Publication number: 20120193711Abstract: A gate electrode, an element isolation film and a drain region in an LDMOS transistor formation region and a gate electrode, an element isolation film and an anode region in an ESD protection element formation region are formed to satisfy relationships of A1?A2 and B1<B2 where the LDMOS transistor formation region has an overlap length A1 of the gate electrode and the element isolation film and a distance B1 between the gate electrode and the drain region, and the ESD protection element formation region has an overlap length A2 of the gate electrode and the element isolation film and a distance B2 between the gate electrode and the anode region.Type: ApplicationFiled: November 21, 2011Publication date: August 2, 2012Applicant: FUJITSU SEMICONDUCTOR LIMITEDInventors: Masayoshi Asano, Junichi Mitani
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Patent number: 8232596Abstract: A method for fabrication of a semiconductor device is provided. A first type doped body region is formed in a first type substrate. A first type heavily-doped region is formed in the first type doped body region. A second type well region and second type bar regions are formed in the first type substrate with the second type bar regions between the second type well region and the first type doped body region. The first type doped body region, the second type well region, and each of the second type bar regions are separated from each other by the first type substrate. The second type bar regions are inter-diffused to form a second type continuous region adjoining the second type well region. A second type heavily-doped region is formed in the second type well region.Type: GrantFiled: April 17, 2009Date of Patent: July 31, 2012Assignee: Vanguard International Semiconductor CorporationInventors: Shang-Hui Tu, Hung-Shern Tsai
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Publication number: 20120187485Abstract: According to an embodiment of the invention, a semiconductor device includes a substrate, a second conductive type source region formed in the substrate, a second conductive type drain region formed in the substrate, a first conductive type channel region formed in the substrate, a second conductive type drift region formed between the first conductive type channel region and the second conductive type drain region, an insulator film buried on a surface of the second conductive type drift region, and a gate electrode including an opening between the first conductive type channel region and the insulator film and covering a surface of the substrate from the first conductive type channel region to part of the insulator film via a gate insulator. The second conductive type drift region includes a second portion of the second conductive type drift region formed in the substrate below the opening.Type: ApplicationFiled: August 5, 2011Publication date: July 26, 2012Applicant: Kabushiki Kaisha ToshibaInventor: Jun MORIOKA
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Patent number: 8227862Abstract: A field-effect transistor (142) includes a lowly p-doped region 110 formed on a surface of a substrate (102), an n-doped drain region 112 and n-doped source region 114 arranged on a surface of the lowly p-doped region 110, and a device isolation insulating film 132 and device isolation insulating film 134. Here, the device isolation insulating film 132 is formed greater in film thickness than the device isolation insulating film 134; and in the n-doped source region 114, the peak concentration section having a highest dopant concentration is formed in a deeper position than in the n-doped drain region 112.Type: GrantFiled: January 10, 2012Date of Patent: July 24, 2012Assignee: Renesas Electronics CorporationInventor: Hiroki Fujii
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Patent number: 8227871Abstract: A semiconductor device and a method for manufacturing the same are disclosed. The semiconductor device includes a substrate having a first conductor-type, a buried layer of a second conductor-type on the substrate, a drain, and a first guard-ring on one side of the drain, a second guard-ring on one side of the first guard-ring, and a third guard-ring on one side of the second guard-ring.Type: GrantFiled: December 4, 2009Date of Patent: July 24, 2012Assignee: Dongbu HiTek Co., Ltd.Inventor: Choul Joo Ko
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Patent number: 8227856Abstract: Provided is an ESD protection element, in which: LOCOS oxide films are formed at both ends of a gate electrode, and a conductivity type of a diffusion layer formed below one of the LOCOS oxide films which is not located on a drain side is set to a p-type, to thereby limit an amount of a current flowing in a portion below a source-side n-type high concentration diffusion layer, the current being generated due to surface breakdown of a drain. With this structure, even in a case of protecting a high withstanding voltage element, it is possible to easily satisfy a function required for the ESD protection element, the function of being constantly in an off-state during a steady state, while operating, upon application of a surge or noise to a semiconductor device, so as not to reach a breakage of an internal element, discharging a generated large current, and then returning to the off-state again.Type: GrantFiled: August 12, 2009Date of Patent: July 24, 2012Assignee: Seiko Instruments Inc.Inventor: Yuichiro Kitajima
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Patent number: 8222694Abstract: A semiconductor package may comprise a semiconductor substrate, a MOSFET device having a plurality cells formed on the substrate, and a source region common to all cells disposed on a bottom of the substrate. Each cell comprises a drain region on a top of the semiconductor device, a gate to control a flow of electrical current between the source and drain regions, a source contact proximate the gate; and an electrical connection between the source contact and source region. At least one drain connection is electrically coupled to the drain region. Source, drain and gate pads are electrically connected to the source region, drain region and gates of the devices. The drain, source and gate pads are formed on one surface of the semiconductor package. The cells are distributed across the substrate, whereby the electrical connections between the source contact of each device and the source region are distributed across the substrate.Type: GrantFiled: December 10, 2010Date of Patent: July 17, 2012Assignee: Alpha and Omega Semiconductor IncorporatedInventor: François Hébert
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Patent number: 8217452Abstract: A p-channel LDMOS device with a controlled n-type buried layer (NBL) is disclosed. A Shallow Trench Isolation (STI) oxidation is defined, partially or totally covering the drift region length. The NBL layer, which can be defined with the p-well mask, connects to the n-well diffusion, thus providing an evacuation path for electrons generated by impact ionization. High immunity to the Kirk effect is also achieved, resulting in a significantly improved safe-operating-area (SOA). The addition of the NBL deep inside the drift region supports a space-charge depletion region which increases the RESURF effectiveness, thus improving BV. An optimum NBL implanted dose can be set to ensure fully compensated charge balance among n and p doping in the drift region (charge balance conditions). The p-well implanted dose can be further increased to maintain a charge balance, which leads to an Rdson reduction.Type: GrantFiled: August 5, 2010Date of Patent: July 10, 2012Assignees: Atmel Rousset S.A.S., LAAS-CNREInventors: Willem-Jan Toren, Bruno Villard, Elsa Hugonnard-Bruyere, Gaetan Toulon, Frederic Morancho, Ignasi Cortes Mayol, Thierry Pedron
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Patent number: 8212329Abstract: A short channel Lateral MOSFET (LMOS) and method are disclosed with interpenetrating drain-body protrusions (IDBP) for reducing channel-on resistance while maintaining high punch-through voltage. The LMOS includes lower device bulk layer; upper source and upper drain region both located atop lower device bulk layer; both upper source and upper drain region are in contact with an intervening upper body region atop lower device bulk layer; both upper drain and upper body region are shaped to form a drain-body interface; the drain-body interface has an IDBP structure with a surface drain protrusion lying atop a buried body protrusion while revealing a top body surface area of the upper body region; gate oxide-gate electrode bi-layer disposed atop the upper body region forming an LMOS with a short channel length defined by the horizontal length of the top body surface area delineated between the upper source region and the upper drain region.Type: GrantFiled: November 6, 2010Date of Patent: July 3, 2012Assignee: Alpha and Omega Semiconductor Inc.Inventors: Shekar Mallikarjunaswamy, Amit Paul
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Patent number: 8212310Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type; a deep well of a second conductivity type formed in a portion of an upper layer portion of the semiconductor layer; a well of the first conductivity type formed in a portion of an upper layer portion of the deep well; a source layer of the second conductivity type formed in the well; a drain layer of the second conductivity type formed in the well apart from the source layer; and a contact layer of the second conductivity type formed outside the well in an upper layer portion of the deep well and connected to the drain layer. The drain layer is electrically connected to the deep well via the well by applying a driving voltage between the source layer and the drain layer.Type: GrantFiled: February 7, 2011Date of Patent: July 3, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Tomoko Matsudai, Norio Yasuhara, Kazutoshi Nakamura
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Publication number: 20120161233Abstract: An apparatus is disclosed to increase a reduced a parasitic capacitance of a semiconductor device. The semiconductor device includes a modified gate region to effectively reduce an overlap capacitance and modified well regions to effectively reduce a junction capacitance. The modified gate region includes a doped region and an undoped to decrease an effective area of the overlap capacitance. The modified well regions are separated by a substantially horizontal distance to increase an effective distance of the junction capacitance. This decrease in the effective area of the overlap capacitance and this increase in the effective distance of the junction capacitance reduces the parasitic capacitance of the semiconductor device.Type: ApplicationFiled: February 2, 2011Publication date: June 28, 2012Applicant: Broadcom CorporationInventor: Akira ITO
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Publication number: 20120153391Abstract: A semiconductor subassembly, a modular sidewall element having modular dimensions that accommodates placement of the semiconductor subassembly in a modular layout and a semiconductor substrate base element coupled to the modular sidewall element. The semiconductor substrate base element has at least one semiconductor element with a layout sized to be accommodated by modular dimensions of the modular sidewall element and the semiconductor substrate base element configured to form a base of the semiconductor subassembly.Type: ApplicationFiled: February 28, 2012Publication date: June 21, 2012Applicant: STMicroelectronics, Inc.Inventor: Craig J. Rotay
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Patent number: 8198679Abstract: High voltage NMOS devices with low on resistance and associated methods of making are disclosed herein. In one embodiment, a method for making N typed MOSFET devices includes forming an N-well and a P-well with twin well process, forming field oxide, forming gate comprising an oxide layer and a conducting layer, forming a P-base in the P-well, the P-base being self-aligned to the gate, side diffusing the P-base to contact the N-well, and forming N+ source pickup region and N+ drain pickup region.Type: GrantFiled: May 28, 2009Date of Patent: June 12, 2012Assignee: Monolithic Power Systems, Inc.Inventor: Ji-Hyoung Yoo
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Patent number: 8198154Abstract: Lateral DMOS devices having improved drain contact structures and methods for making the devices are disclosed. A semiconductor device comprises a semiconductor substrate; an epitaxial layer on top of the substrate; a drift region at a top surface of the epitaxial layer; a source region at a top surface of the epitaxial layer; a channel region between the source and drift regions; a gate positioned over a gate dielectric on top of the channel region; and a drain contact trench that electrically connects the drift layer and substrate. The contact trench includes a trench formed vertically from the drift region, through the epitaxial layer to the substrate and filled with an electrically conductive drain plug; electrically insulating spacers along sidewalls of the trench; and an electrically conductive drain strap on top of the drain contact trench that electrically connects the drain contact trench to the drift region.Type: GrantFiled: September 27, 2010Date of Patent: June 12, 2012Assignee: Alpha and Omega Semiconductor IncorporatedInventor: François Hébert
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Patent number: 8193585Abstract: Methods and apparatus are provided for fabricating a semiconductor device structure. The semiconductor device structure comprises a buried region having a first conductivity type, a first region having a second conductivity type overlying the buried region, a source region having the first conductivity type overlying the first region, and a drain region having the first conductivity type overlying the first region. The semiconductor device structure further comprises a second region having the first conductivity type overlying the buried region, the second region abutting the buried region to form an electrical contact with the buried region, and a first resistance configured electrically in series with the second region and the buried region. The combined series resistance of the first resistance and the second region is greater than a resistance of the buried region.Type: GrantFiled: October 29, 2009Date of Patent: June 5, 2012Assignee: Freescale Semiconductor, Inc.Inventors: Bernhard H. Grote, Vishnu K. Khemka, Tahir A. Khan, Weixiao Huang, Ronghua Zhu
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Publication number: 20120126324Abstract: The invention provides an LDMOS transistor of which the time-dependent degrading of the performance due to the trapping of hot electrons in the gate insulation film is decreased. A body layer is disposed in a surface portion of an N? type semiconductor layer. A source layer including an N? type layer is disposed in a surface portion of the body layer. An N? type drift layer is formed in a surface portion of the N? type semiconductor layer. This drift layer includes a first region having a first N type impurity concentration peak region and a second region having a second N type impurity concentration peak region that is positioned deeper than the first N type impurity concentration peak region, the second region adjoining this first region. An N+ type drain layer is formed in a surface portion of the second region.Type: ApplicationFiled: November 23, 2011Publication date: May 24, 2012Applicant: Semiconductor Components Industries, LLCInventors: Yasuhiro TAKEDA, Shinya Inoue, Yuzo Otsuru
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Publication number: 20120126323Abstract: A semiconductor device comprises a source region, a drain region, and a drift region between the source and drain regions. A split gate is disposed over a portion of the drift region, and between the source and drain regions. The split gate includes first and second gate electrodes separated by a gate oxide layer. A super-junction structure is disposed within the drift region between the gate and the drain region.Type: ApplicationFiled: November 23, 2010Publication date: May 24, 2012Applicant: MACRONIX INTERNATIONAL CO., LTD.Inventors: Shyi-Yuan Wu, Wing Chor Chan, Chien-Wen Chu
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Patent number: 8183632Abstract: Disclosed are a semiconductor device and a method of manufacturing the same. The semiconductor device includes a substrate formed therein with a first conductive type well, and an LDMOS device formed on the substrate. The LDMOS device includes a gate electrode, gate oxides formed below the gate electrode, a source region formed in the substrate at one side of the gate electrode, and a drain region formed in the substrate at an opposite side of the gate electrode. The gate oxide includes first and second gate oxides disposed side-by-side and having thicknesses different from each other.Type: GrantFiled: December 9, 2009Date of Patent: May 22, 2012Assignee: Dongbu Hitek Co., Ltd.Inventor: Cheol Ho Cho
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Patent number: 8174069Abstract: A power semiconductor device has a top surface and an opposed bottom surface below a part of which is a thick portion of semiconductor substrate. At least a portion of a drift region of the device has either no or only a thin portion of semiconductor substrate positioned thereunder. The top surface has a high voltage terminal and a low voltage terminal connected thereto to allow a voltage to be applied laterally across the drift region. At least two MOS (metal-oxide-semiconductor) gates are provided on the top surface. The device has at least one relatively highly doped region at its top surface extending between and in contact with said first and second MOS gates. The device has improved protection against triggering of parasitic transistors or latch-up without the on-state voltage drop or switching speed being compromised.Type: GrantFiled: August 5, 2008Date of Patent: May 8, 2012Assignee: Cambridge Semiconductor LimitedInventors: Florin Udrea, Vasantha Pathirana, Tanya Trajkovic, Nishad Udugampola
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Patent number: 8174071Abstract: An LDMOS transistor structure and methods of making the same are provided. The structure includes a gate electrode extended on an upper boundary of an extension dielectric region that separates the gate electrode from the drain region of the LDMOS transistor. Moreover, at an area close to an edge of the extended gate electrode portion, the gate electrode further projects downwards into a convex-shaped recess or groove in the upper boundary of the extension dielectric region, forming a tongue. LDMOS transistors with this structure may provide improved suppression of hot carrier effects.Type: GrantFiled: May 2, 2008Date of Patent: May 8, 2012Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: William Wei-Yuan Tien, Chao-Wei Tseng, Fu-Hsin Chen
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Patent number: 8174077Abstract: Formation of an electrostatic discharge (ESD) protection device having a desired breakdown voltage (BV) is disclosed. The breakdown voltage (BV) of the device can be set, at least in part, by varying the degree to which a surface junction between two doped areas is covered. This junction can be covered in one embodiment by a dielectric material and/or a semiconductor material. Moreover, a variable breakdown voltage can be established by concurrently forming, in a single process flow, multiple diodes that have different breakdown voltages, where the diodes are also formed concurrently with circuitry that is to be protected. To generate the variable or different breakdown voltages, respective edges of isolation regions can be extended to cover more of the surface junctions of different diodes. In this manner, a first diode can have a first breakdown voltage (BV1), a second diode can have a second breakdown voltage (BV2), a third diode can have a third breakdown voltage (BV3), etc.Type: GrantFiled: July 26, 2011Date of Patent: May 8, 2012Assignee: Texas Instruments IncorporatedInventors: Martin B. Mollat, Tony Thanh Phan
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Publication number: 20120104494Abstract: A field-effect transistor (142) includes a lowly p-doped region 110 formed on a surface of a substrate (102), an n-doped drain region 112 and n-doped source region 114 arranged on a surface of the lowly p-doped region 110, and a device isolation insulating film 132 and device isolation insulating film 134. Here, the device isolation insulating film 132 is formed greater in film thickness than the device isolation insulating film 134; and in the n-doped source region 114, the peak concentration section having a highest dopant concentration is formed in a deeper position than in the n-doped drain region 112.Type: ApplicationFiled: January 10, 2012Publication date: May 3, 2012Applicant: RENESAS ELECTRONICS CORPORATIONInventor: Hiroki FUJII
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Patent number: 8169081Abstract: An integrated circuit structure includes a first conductive layer and an under bump metallization layer over the first conductive layer. The first conductive layer has a first conductive region and a second conductive region electrically isolated from the first conductive region. The under bump metallization layer has a first conductive area and a second conductive area electrically isolated from the first conductive area, the first conductive area substantially located over the first conductive region and the second conductive area substantially located over the second conductive region. At least one of the first conductive area or the first conductive region includes a first protrusion extending toward the second conductive area or second conductive region, respectively. Conductive vias connect the first conductive region to the second conductive area and connect the second conductive region to the first conductive area, and the vias include at least one via connected to the first protrusion.Type: GrantFiled: December 23, 2008Date of Patent: May 1, 2012Assignee: Volterra Semiconductor CorporationInventors: Ilija Jergovic, Efren M. Lacap
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Patent number: 8168494Abstract: Trench portions (10) are formed in a well (5) in order to provide unevenness in the well (5). A gate electrode (2) is formed via an insulating film (7) on the upper surface and inside of the trench portions (10). A source region (3) is formed on one side of the gate electrode (2) in a gate length direction while a drain region (4) on another side. Both of the source region (3) and the drain region (4) are formed down to near the bottom portion of the gate electrode (2). By deeply forming the source region (3) and the drain region (4), current uniformly flows through the whole trench portions (10), and the unevenness formed in the well (5) increase the effective gate width to decrease the on-resistance of a semiconductor device 1 and to enhance the drivability thereof.Type: GrantFiled: February 7, 2008Date of Patent: May 1, 2012Assignee: Seiko Instruments Inc.Inventors: Tomomitsu Risaki, Jun Osanai
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Publication number: 20120098065Abstract: An integrated circuit containing an MOS transistor with a drain drift region adjacent to the channel region, a field oxide element in the drain region, a first gate section over the channel region and a second gate section over the field oxide element, with a gap between the gate sections so that at least half of the drift region is not covered by gate. A process of forming an integrated circuit containing an MOS transistor with a drain drift region adjacent to the channel region, a field oxide element in the drain region, a first gate section over the channel region and a second gate section over the field oxide element, with a gap between the gate sections so that at least half of the drift region is not covered by gate, so that the source/drain implant is blocked from the drift region below the gap.Type: ApplicationFiled: October 25, 2011Publication date: April 26, 2012Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: Sameer P. Pendharkar
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Patent number: 8164111Abstract: A high voltage semiconductor device includes a semiconductor substrate, a p type base region in a first main surface, an n+ type emitter region in the p type base region, an n+ type cathode region adjacent to an end surface of the semiconductor substrate and not penetrating the semiconductor substrate, a p+ type collector region in a second main surface, a first main electrode, a second main electrode, a third main electrode, and a connection portion connecting the second main electrode and the third main electrode. A resistance between the p type base region and the n+ type cathode region is greater than a resistance between the p type base region and the p+ type collector region. In the high voltage semiconductor device in which an IGBT and a free wheel diode are formed in a single semiconductor substrate, occurrence of a snap-back phenomenon is suppressed.Type: GrantFiled: October 7, 2010Date of Patent: April 24, 2012Assignee: Mitsubishi Electric CorporationInventors: Shigeru Kusunoki, Junji Yahiro, Yoshihiko Hirota
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Publication number: 20120091527Abstract: Methods of making, structures, devices, and/or applications for lateral double-diffused metal oxide semiconductor (LDMOS) transistors are disclosed. In one embodiment, an LDMOS transistor can include: (i) an n-doped deep n-well (DNW) region on a substrate; (ii) a gate oxide and a drain oxide between a source region and a drain region of the LDMOS transistor, the gate oxide being adjacent to the source region, the drain oxide being adjacent to the drain region; (iii) a conductive gate over the gate oxide and a portion of the drain oxide; (iv) a p-doped p-body region in the source region; (v) an n-doped drain region in the drain region; (vi) a first n-doped n+ region and a p-doped p+ region adjacent thereto in the p-doped p-body region of the source region; and (vii) a second n-doped n+ region in the drain region.Type: ApplicationFiled: December 20, 2011Publication date: April 19, 2012Applicant: SILERGY TECHNOLOGYInventor: Budong You
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Patent number: 8159001Abstract: A graded junction space decreasing an implant concentration gradient between n-well and p-well regions of a semiconductor device is provided for enhancing breakdown voltage in high voltage applications. Split or unified FOX regions may be provided overlapping with the graded junction space. By using a p-well blocking layer to separate the p-well(s) and the n-well, breakdown voltage characteristic is improved without the cost of an additional mask or process change.Type: GrantFiled: July 19, 2006Date of Patent: April 17, 2012Assignee: Synopsys, Inc.Inventor: Bin Wang
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Patent number: 8159029Abstract: A semiconductor device includes a semiconductor substrate, a source region and a drain region formed in the substrate, a gate structure formed on the substrate disposed between the source and drain regions, and a first isolation structure formed in the substrate between the gate structure and the drain region, the first isolation structure including projections that are located proximate to an edge of the drain region. Each projection includes a width measured in a first direction along the edge of the drain region and a length measured in a second direction perpendicular to the first direction, and adjacent projections are spaced a distance from each other.Type: GrantFiled: October 22, 2008Date of Patent: April 17, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ru-Yi Su, Puo-Yu Chiang, Jeng Gong, Tsung-Yi Huang, Chun-Lin Tsai, Chien-Chih Chou
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Patent number: 8154079Abstract: A semiconductor device, which can prevent an element breakdown by alleviating of electric field concentrations, and can also prevent reduction of gain, includes: a source electrode formed on a semiconductor layer; a drain electrode formed on the semiconductor layer; a gate electrode formed between the source electrode and the drain electrode; an insulating film formed on the semiconductor layer and the gate electrode; a field plate electrode formed on the insulating film; and a resistor for connecting the field plate electrode and the source electrode.Type: GrantFiled: November 28, 2007Date of Patent: April 10, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Keiichi Matsushita, Kazutaka Takagi, Naotaka Tomita
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Patent number: 8148758Abstract: A high-voltage field-effect device contains an extended drain or “drift” region including an embedded stack of JFET regions separated by intervening layers of the drift region. Each of the JFET regions is filled with material of an opposite conductivity type to that of the drift region, and the floor and ceiling of each JFET region is lined with an oxide layer. When the device is blocking a voltage in the off condition, the semiconductor material inside the JFET regions and in the drift region that separates the JFET regions is depleted. This improves the voltage-blocking ability of the device while conserving chip area. The oxide layer prevents dopant from the JFET regions from diffusing into the drift region.Type: GrantFiled: December 16, 2010Date of Patent: April 3, 2012Assignee: Alpha and Omega Semiconductor Inc.Inventor: Hamza Yilmaz
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Patent number: 8143671Abstract: A semiconductor structure and associated method of formation. The semiconductor structure includes a semiconductor substrate, a first doped transistor region of a first transistor and a first doped Source/Drain portion of a second transistor on the semiconductor substrate, a second gate dielectric layer and a second gate electrode region of the second transistor on the semiconductor substrate, a first gate dielectric layer and a first gate electrode region of the first transistor on the semiconductor substrate, and a second doped transistor region of the first transistor and a second doped Source/Drain portion of the second transistor on the semiconductor substrate. The first and second gate dielectric layers are sandwiched between and electrically insulate the semiconductor substrate from the first and second gate electrode regions, respectively. The first and second gate electrode regions are totally above and totally below, respectively, the top substrate surface.Type: GrantFiled: December 17, 2009Date of Patent: March 27, 2012Assignee: International Business Machines CorporationInventor: Steven Howard Voldman
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Patent number: 8138545Abstract: A semiconductor device includes: a substrate on and/or over which a first conductive type well is formed; and an LDMOS device that includes a gate electrode and has a drain region formed in the substrate. The LDMOS device includes a trench formed on the substrate, a second conductive type body that is formed on one side of the trench and on the substrate therebeneath, and a first conductive type source region that is formed in the second conductive type body.Type: GrantFiled: December 11, 2009Date of Patent: March 20, 2012Assignee: Dongbu HiTek Co., Ltd.Inventor: Hyon-Chol Lim
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Publication number: 20120061758Abstract: A semiconductor device and a related fabrication process are presented here. The device includes a support substrate, a buried oxide layer overlying the support substrate, a first semiconductor region located above the buried oxide layer and having a first conductivity type. The device also includes second, third, fourth, and fifth semiconductor regions. The second semiconductor region is located above the first semiconductor region, and it has a second conductivity type. The third semiconductor region is located above the second semiconductor region, and it has the first conductivity type. The fourth semiconductor region is located above the third semiconductor region, and it has the second conductivity type. The fifth semiconductor region extends through the fourth semiconductor region and the third semiconductor region to the second semiconductor region, and it has the second conductivity type.Type: ApplicationFiled: September 15, 2010Publication date: March 15, 2012Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Tahir A. Khan, Bernhard H. Grote, Vishnu K. Khemka, Ronghua Zhu
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Patent number: 8134207Abstract: In a high breakdown voltage semiconductor element among elements integrated together on an SOI substrate in which its rated voltage is shared between an embedded oxide layer and a drain region formed by an element active layer, both high integration and high breakdown voltage are realized while also securing suitability for practical implementation and practical use. The high breakdown voltage is realized without hampering size reduction of the element by forming an electrically floating layer of a conductivity type opposite to that of the drain region at the surface of the drain region. Further, the thickness of the embedded oxide layer is reduced to a level suitable for the practical implementation and practical use by setting the thickness of the element active layer of the SOI substrate at 30 ?m or more.Type: GrantFiled: February 8, 2008Date of Patent: March 13, 2012Assignee: Hitachi, Ltd.Inventor: Atsuo Watanabe
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Patent number: 8134204Abstract: A drain extended MOS (DEMOS) transistor with an element of field oxide separating the drain contact from the gate, and a compensation region of opposite polarity in the drain under the gate, is disclosed. The inventive DEMOS may be fabricated in a CMOS IC without adding any process steps. Both n-channel and p-channel versions may be fabricated in CMOS ICs with an n-type buried layer. Furthermore, the inventive transistor may be fabricated in an IC built in an SOI wafer. The width of the compensation region may be varied across multiple instances of the inventive DEMOS transistor to provide a capability for handling multiple signals with different voltage levels in the same IC without adding fabrication steps. The compensation region may be biased by a control voltage to modulate the depletion of the drain extension and provide a capability for handling multiple signal voltage levels in a single transistor.Type: GrantFiled: August 6, 2009Date of Patent: March 13, 2012Assignee: Texas Instruments IncorporatedInventors: Kamel Benaissa, Hisashi Shichijo
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Patent number: 8129785Abstract: A semiconductor device according to the present invention includes: a semiconductor layer of a first conductivity type; an annular deep trench penetrating the semiconductor layer in the depth direction to surround an element forming region; a drain region of a second conductivity type formed in a surface layer portion of the semiconductor layer in the element forming region; a drift region of the second conductivity type formed in the surface layer portion of the semiconductor layer to come into contact with the drain region in the element forming region; a body region of the first conductivity type formed in the surface layer portion of the semiconductor layer at an interval from the drift region in the element forming region; a source region of the second conductivity type formed in a surface layer portion of the body region; and a first high-concentration buried region, formed in the semiconductor layer between a portion opposed to the source region in the depth direction and the deep trench, having a highType: GrantFiled: September 26, 2008Date of Patent: March 6, 2012Assignee: Rohm Co., Ltd.Inventors: Naoki Izumi, Tomoyasu Sada
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Publication number: 20120049277Abstract: A lateral-diffusion metal-oxide-semiconductor device includes a semiconductor substrate having at least a field oxide layer, a gate having a layout pattern of a racetrack shape formed on the substrate, a common source formed in the semiconductor substrate and enclosed by the gate, and a drain surrounding the gate and formed in the semiconductor substrate. The gate covers a portion of the field oxide layer. The common source includes a first doped region having a first conductive type and a plurality of islanding second doped regions having a second conductive type. The drain includes a third doped region having the first conductive type. The third doped region overlaps a portion of the field oxide layer and having an overlapping area between the third doped region and the field oxide layer.Type: ApplicationFiled: August 27, 2010Publication date: March 1, 2012Inventors: Hong-Ze Lin, Bo-Jui Huang, Chin-Lung Chen, Ting-Zhou Yan, Wei-Shan Liao, Han-Min Huang, Chun-Yao Lee, Kun-Yi Chou
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Publication number: 20120049278Abstract: The semiconductor device includes: a first conductive-type first well and a second conductive-type second well configured over substrate to contact each other; a second conductive-type anti-diffusion region configured in an interface where the first conductive-type first well contacts the second conductive-type second well over the substrate; and a gate electrode configured to simultaneously cross the first conductive-type first well, the second conductive-type anti-diffusion region, and the second conductive-type second well over the substrate.Type: ApplicationFiled: November 7, 2011Publication date: March 1, 2012Inventors: Jae-Han CHA, Kyung-Ho LEE, Sun-Goo KIM, Hyung-Suk CHOI, Ju-Ho KIM, Jin-Young CHAE, In-Taek OH
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Patent number: 8124466Abstract: The present invention provides a self-driven LDMOS which utilizes a parasitic resistor between a drain terminal and an auxiliary region. The parasitic resistor is formed between two depletion boundaries in a quasi-linked deep N-type well. When the two depletion boundaries pinch off, a gate-voltage potential at a gate terminal is clipped at a drain-voltage potential at said drain terminal. Since the gate-voltage potential is designed to be equal to or higher than a start-threshold voltage, the LDMOS is turned on accordingly. Besides, no additional die space and masking process are needed to manufacture the parasitic resistor. Furthermore, the parasitic resistor of the present invention does not lower the breakdown voltage and the operating speed of the LDMOS. In addition, when the two depletion boundaries pinch off, the gate-voltage potential does not vary in response to an increment of the drain-voltage potential.Type: GrantFiled: June 3, 2008Date of Patent: February 28, 2012Assignee: System General Corp.Inventors: Chiu-Chih Chiang, Chih-Feng Huang
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Patent number: 8125030Abstract: An integrated circuit containing an SCRMOS transistor. The SCRMOS transistor has one drain structure with a centralized drain diffused region and distributed SCR terminals, and a second drain structure with distributed drain diffused regions and SCR terminals. An MOS gate between the centralized drain diffused region and a source diffused region is shorted to the source diffused region. A process of forming the integrated circuit having the SCRMOS transistor is also disclosed.Type: GrantFiled: January 27, 2010Date of Patent: February 28, 2012Assignee: Texas Instruments IncorporatedInventor: Sameer P. Pendharkar
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Publication number: 20120043608Abstract: An partially depleted Dieler LDMOSFET transistor (100) is provided which includes a substrate (150), a drift region (110) surrounding a drain region (128), a first well region (107) surrounding source region (127), a well buffer region (106) separating the drift region and first well region to at least partly define a first channel region, a gate electrode (118) formed over the first channel region having a source-side gate edge aligned with the first well region (107), an LDD extension region (120) extending from the source region to the channel region, and a dielectric RESURF drain extension structure (161) formed at the drain of the gate electrode (118) using the plurality of STI stripes (114).Type: ApplicationFiled: August 20, 2010Publication date: February 23, 2012Inventors: Hongning Yang, Jiang-Kai Zuo
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Patent number: 8120105Abstract: A method of forming a lateral DMOS transistor includes performing a low energy implantation using a first dopant type and being applied to the entire device area. The dopants of the low energy implantation are blocked by the conductive gate. The method further includes performing a high energy implantation using a third dopant type and being applied to the entire device area. The dopants of the high energy implantation penetrate the conductive gate and is introduced into the entire device active area including underneath the conductive gate. After annealing, a double-diffused lightly doped drain (DLDD) region is formed from the high and low energy implantations and is used as a drift region of the lateral DMOS transistor. The DLDD region overlaps with the body region at a channel region and interacts with the dopants of the body region to adjust a threshold voltage of the lateral DMOS transistor.Type: GrantFiled: July 31, 2009Date of Patent: February 21, 2012Assignee: Micrel, Inc.Inventors: David R. Zinn, Paul M. Moore
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Patent number: 8120104Abstract: A sinker layer is in contact with a first conductivity-type well, and is separated from a first conductivity-type collector layer and a second conductivity-type drift layer. A second conductivity-type diffusion layer (second second-conductivity-type high-concentration diffusion layer) is formed in the surface layer of the sinker layer. The second conductivity-type diffusion layer has a higher impurity concentration than that of the sinker layer. The second conductivity-type diffusion layer and the first conductivity-type collector layer are isolated from each other with an element isolation insulating film interposed therebetween.Type: GrantFiled: January 31, 2011Date of Patent: February 21, 2012Assignee: Renesas Electronics CorporationInventor: Hiroki Fujii
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Patent number: 8120108Abstract: An integrated circuit having an SCRMOS transistor with a RESURF region around the drain region and SCR terminal. The RESURF region is the same conductivity type as the drift region and is more heavily doped than the drift region. An SCRMOS transistor with a RESURF region around the drain region and SCR terminal. A process of forming an integrated circuit having an SCRMOS transistor with a RESURF region around the drain region and SCR terminal.Type: GrantFiled: January 27, 2010Date of Patent: February 21, 2012Assignee: Texas Instruments IncorporatedInventor: Sameer P. Pendharkar
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Publication number: 20120037989Abstract: LDMOS devices having a single-strip contact pad in the source region, and related methods of manufacturing are disclosed. The LDMOS may comprise a first well lightly doped with a first dopant and formed into a portion of a substrate, the first well having a drain region at its surface heavily doped with the first dopant, and a second well lightly doped with a second dopant formed in another portion of the substrate, the second well having a source region at its surface comprising first portions heavily doped with the first dopant directly adjacent second portions heavily doped with the second dopant. Also, the LDMOS device may comprise a field oxide at the upper surface of the substrate between the source and drain regions, and contacting the first well but separated from the second well, and a gate formed partially over the field oxide and partially over the source region.Type: ApplicationFiled: August 16, 2010Publication date: February 16, 2012Applicant: MACRONIX INTERNATIONAL CO., LTD.Inventors: Hsueh-I Huang, Shuo-Lun Tu, Ming-Tung Lee, Yin-Fu Huang, Shih-Chin Lien, Shyi-Yuan WU
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Publication number: 20120037988Abstract: A semiconductor device can include a source region near a working top surface of a semiconductor region. The device can also include a gate located above the working top surface and located laterally between the source and a drain region. The source region and the gate can at least partially laterally overlap a body region near the working top surface. The source region can include a first portion having the first conductivity type, a second portion having a second conductivity type, and a third portion having the second conductivity type. The second portion can be located laterally between the first and third portions and can penetrate into the semiconductor region to a greater depth than the third portion but no more than the first portion. The lateral location of the third portion can be determined at least in part using the lateral location of the gate.Type: ApplicationFiled: August 11, 2010Publication date: February 16, 2012Inventor: Jifa Hao
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Publication number: 20120032262Abstract: A p-channel LDMOS device with a controlled n-type buried layer (NBL) is disclosed. A Shallow Trench Isolation (STI) oxidation is defined, partially or totally covering the drift region length. The NBL layer, which can be defined with the p-well mask, connects to the n-well diffusion, thus providing an evacuation path for electrons generated by impact ionization. High immunity to the Kirk effect is also achieved, resulting in a significantly improved safe-operating-area (SOA). The addition of the NBL deep inside the drift region supports a space-charge depletion region which increases the RESURF effectiveness, thus improving BV. An optimum NBL implanted dose can be set to ensure fully compensated charge balance among n and p doping in the drift region (charge balance conditions). The p-well implanted dose can be further increased to maintain a charge balance, which leads to an Rdson reduction.Type: ApplicationFiled: August 5, 2010Publication date: February 9, 2012Applicants: LAAS-CNRS, ATMEL ROUSSET SASInventors: Willem-Jan Toren, Bruno Villard, Elsa Hugonnard-Bruyere, Gaetan Toulon, Frederic Morancho, Ignasi Cortes Mayol, Thierry Pedron
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Patent number: 8110462Abstract: The present invention relates to electrostatic discharge (ESD) protection circuitry. Multiple techniques are presented to adjust one or more ends of one or more fingers of an ESD protection device so that the ends of the fingers have a reduced initial trigger or breakdown voltage as compared to other portions of the fingers, and in particular to central portions of the fingers. In this manner, most, if not all, of the adjusted ends of the fingers are likely to trigger or fire before any of the respective fingers completely enters a snapback region and begins to conduct ESD current. Consequently, the ESD current is more likely to be distributed among all or substantially all of the plurality of fingers rather than be concentrated within one or merely a few fingers. As a result, potential harm to the ESD protection device (e.g., from current crowding) is mitigated and the effectiveness of the device is improved.Type: GrantFiled: February 16, 2006Date of Patent: February 7, 2012Assignee: Texas Instruments IncorporatedInventor: Robert Michael Steinhoff