With Thick Insulator Over Source Or Drain Region Patents (Class 257/389)
  • Patent number: 11152394
    Abstract: A structure includes a semiconductor-on-insulator (SOI) substrate including a semiconductor substrate, a buried insulator layer over the semiconductor substrate, and an SOI layer over the buried insulator layer. The structure also includes a first active device and a second active device. At least one polycrystalline active region fill shape is in the SOI layer. A polycrystalline isolation region is in the semiconductor substrate under the buried insulator layer. The polycrystalline isolation region is under the first active device, but not under the second active device. The polycrystalline isolation region extends to different depths into the semiconductor substrate. The first and second active devices may include monocrystalline active regions, and a third polycrystalline active region may also be in the SOI layer over the polycrystalline isolation region.
    Type: Grant
    Filed: August 13, 2020
    Date of Patent: October 19, 2021
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Mark D. Levy, Siva P. Adusumilli
  • Patent number: 9178140
    Abstract: A nonvolatile memory device contains a resistive switching memory element with improved device switching performance and life and methods for forming the same. The nonvolatile memory device has a first layer on a substrate, a resistive switching layer on the first layer, and a second layer. The resistive switching layer is disposed between the first layer and the second layer and the resistive switching layer comprises a material having the same morphology as the top surface of the first layer. A method of forming a nonvolatile memory element in a ReRAM device includes forming a resistive switching layer on a first layer and forming a second layer, so that the resistive switching layer is disposed between the first layer and the second layer. The resistive switching layer comprises a material formed with the same morphology as the top surface of the first layer.
    Type: Grant
    Filed: February 17, 2015
    Date of Patent: November 3, 2015
    Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLC
    Inventors: Federico Nardi, Yun Wang
  • Patent number: 8803240
    Abstract: The use of strained gate electrodes in integrated circuits results in a transistor having improved carrier mobility, improved drive characteristics, and reduced source drain junction leakage. The gate electrode strain can be obtained through non symmetric placement of stress inducing structures as part of the gate electrode.
    Type: Grant
    Filed: January 6, 2012
    Date of Patent: August 12, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Kunal R. Parekh
  • Patent number: 8785312
    Abstract: Electronic apparatus and methods of forming the electronic apparatus include HfSiON for use in a variety of electronic systems. In various embodiments, conductive material is coupled to a dielectric containing HfSiON, where such conductive material may include one or more monolayers of titanium nitride, tantalum, or combinations of titanium nitride and tantalum.
    Type: Grant
    Filed: November 28, 2011
    Date of Patent: July 22, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Kie Y. Ahn, Leonard Forbes
  • Patent number: 8618608
    Abstract: A lateral silicon controlled rectifier structure includes a P-type substrate; an N-well region in the P-type substrate; a first P+ doped region in the N-well region and being connected to an anode; a P-well region in the P-type substrate and bordering upon the N-well region; a first N+ doped region formed in the P-well region and separated from the first P+ doped region by a spacing distance, the first N+ doped region being connected to a cathode; and a gate structure overlying a portion of the P-type substrate between the first P+ doped region and the first N+ doped region.
    Type: Grant
    Filed: December 31, 2008
    Date of Patent: December 31, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Ta-Cheng Lin, Te-Chang Wu
  • Patent number: 8614133
    Abstract: A semiconductor device that includes a gate structure on a channel region of a semiconductor substrate. A first source region and a first drain region are present in the semiconductor substrate on opposing sides of the gate structure. At least one spacer is present on the sidewalls of the gate structure. The at least one spacer includes a first spacer and a second spacer. The first spacer of the at least one spacer is in direct contact with the sidewall of the gate structure and is present over an entire width of the first source region and the first drain region. The second spacer of the at least one spacer extends from the first spacer of the at least one spacer and has a length that covers an entire length of a first source region and a first drain region.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: December 24, 2013
    Assignee: International Business Machines Corporation
    Inventor: Reinaldo A. Vega
  • Patent number: 8581247
    Abstract: There is provided a flexible semiconductor device. The flexible semiconductor device of the present invention comprising a support layer, a semiconductor structure portion formed on the support layer, and a resin film formed on the semiconductor structure portion. The resin film comprises an opening formed by a laser irradiation therein, and also an electroconductive member which is in contact with the surface of the semiconductor structure portion is disposed within the opening of the resin film.
    Type: Grant
    Filed: February 2, 2010
    Date of Patent: November 12, 2013
    Assignee: Panasonic Corporation
    Inventors: Takeshi Suzuki, Kenichi Hotehama, Seiichi Nakatani, Koichi Hirano, Tatsuo Ogawa
  • Patent number: 8487349
    Abstract: The invention describes in detail the structure of a CMOS image sensor pixel that senses color of impinging light without having absorbing filters placed on its surface. The color sensing is accomplished by having a vertical stack of three-charge detection nodes placed in the silicon bulk, which collect electrons depending on the depth of their generation. The small charge detection node capacitance and thus high sensitivity with low noise is achieved by using fully depleted, potential well forming, buried layers instead of undepleted junction electrodes. Two embodiments of contacting the buried layers without substantially increasing the node capacitances are presented.
    Type: Grant
    Filed: April 24, 2009
    Date of Patent: July 16, 2013
    Assignee: Foveon, Inc.
    Inventors: Jaroslav Hynecek, Richard B. Merrill, Russel A. Martin
  • Patent number: 8421160
    Abstract: A semiconductor device that includes a gate structure on a channel region of a semiconductor substrate. A first source region and a first drain region are present in the semiconductor substrate on opposing sides of the gate structure. At least one spacer is present on the sidewalls of the gate structure. The at least one spacer includes a first spacer and a second spacer. The first spacer of the at least one spacer is in direct contact with the sidewall of the gate structure and is present over an entire width of the first source region and the first drain region. The second spacer of the at least one spacer extends from the first spacer of the at least one spacer and has a length that covers an entire length of a first source region and a first drain region.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: April 16, 2013
    Assignee: International Business Machines Corporation
    Inventor: Reinaldo A. Vega
  • Patent number: 8390057
    Abstract: Method and apparatus for providing a lateral double-diffused MOSFET (LDMOS) transistor having a dual gate. The dual gate includes a first gate and a second gate. The first gate includes a first oxide layer formed over a substrate, and the second gate includes a second oxide layer formed over the substrate. The first gate is located a pre-determined distance from the second gate. A digitally implemented voltage regulator is also provided that includes a switching circuit having a dual gate LDMOS transistor.
    Type: Grant
    Filed: July 16, 2008
    Date of Patent: March 5, 2013
    Assignee: Volterra Semiconductor Corporation
    Inventors: Marco A. Zuniga, Budong You
  • Patent number: 8378355
    Abstract: A thin film transistor array substrate including a substrate, a gate line intersecting a data line to define a pixel region on the substrate, a switching element disposed at an intersection of the gate line and the data line, a plurality of pixel electrodes and a plurality of first common electrodes alternately arranged in the pixel region, a second common electrode overlapping the data line and interposed between a gate insulation film and a protective film, a first storage electrode on the substrate, a second storage electrode overlapping the first storage electrode, and an organic insulation film on the switching element, the second storage electrode, the data line, a gate pad, and a data pad, wherein the second common electrode covers the data line, the protective film, the organic insulation film, and the gate insulation film, and has inclined surfaces connected to the surface of the substrate.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: February 19, 2013
    Assignee: LG Display Co., Ltd.
    Inventors: Hee Young Kwack, Heung Lyul Cho, Jeong Yun Lee, Jung Ho Son
  • Patent number: 8368071
    Abstract: A semiconductor device and a method for preparing the same that can solve crack of a semiconductor film, capacitance electrodes and the like due to stress when forming a source electrode and a drain electrode in a semiconductor device having a thin film transistor and a holding capacitance with three or more capacitance electrodes is provided. Before forming the source electrode and the drain electrode, a crystalline silicon film for relaxing the stress is formed, then a contact hole connecting to the semiconductor film of the thin film transistor is opened, and a metal film to be the source electrode and the drain electrode is formed.
    Type: Grant
    Filed: March 9, 2007
    Date of Patent: February 5, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Akira Ishikawa
  • Patent number: 8354292
    Abstract: In a method of manufacturing a CMOS image sensor, a P type epitaxial layer is formed on an N type substrate. A deep P+ type well layer is formed in the P type epitaxial layer. An N type deep guardring well is formed in a photodiode guardring region. The N type deep guardring region makes contact with the N type substrate and also be connected with an operational voltage terminal. A triple well is formed in a photodiode region and a peripheral circuit region. The triple well is used for forming a PMOS and an NMOS having different operational voltages. An isolation region is formed in the photodiode region. The isolation region in the photodiode region has a depth different from a depth of an isolation region in the peripheral circuit region.
    Type: Grant
    Filed: March 6, 2012
    Date of Patent: January 15, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Won-Je Park, Young-Hoon Park, Ui-Sik Kim, Dae-Cheol Seong, Yeo-Ju Yoon, Bo-Bae Kang
  • Patent number: 8288828
    Abstract: A via contact is provided to a diffusion region at a top surface of a substrate which includes a single-crystal semiconductor region. The via contact includes a first layer which consists essentially of a silicide of a first metal in contact with the diffusion region at the top surface. A dielectric region overlies the first layer, the dielectric region having an outer surface and an opening extending from the outer surface to the top surface of the substrate. A second layer lines the opening and contacts the top surface of the substrate in the opening, the second layer including a second metal which lines a sidewall of the opening and a silicide of the second metal which is self-aligned to the top surface of the substrate in the opening. A diffusion barrier layer overlies the second layer within the opening. A third layer including a third metal overlies the diffusion barrier layer and fills the opening.
    Type: Grant
    Filed: September 9, 2004
    Date of Patent: October 16, 2012
    Assignee: International Business Machines Corporation
    Inventors: Michael M. Iwatake, Kevin E. Mello, Matthew W. Oonk, Amanda L. Piper, Yun Y. Wang, Keith K. Wong
  • Patent number: 8138530
    Abstract: In a method of manufacturing a CMOS image sensor, a P type epitaxial layer is formed on an N type substrate. A deep P+ type well layer is formed in the P type epitaxial layer. An N type deep guardring well is formed in a photodiode guardring region. The N type deep guardring region makes contact with the N type substrate and also be connected with an operational voltage terminal. A triple well is formed in a photodiode region and a peripheral circuit region. The triple well is used for forming a PMOS and an NMOS having different operational voltages. An isolation region is formed in the photodiode region. The isolation region in the photodiode region has a depth different from a depth of an isolation region in the peripheral circuit region.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: March 20, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Won-Je Park, Young-Hoon Park, Ui-Sik Kim, Dae-Cheol Seong, Yeo-Ju Yoon, Bo-Bae Keang
  • Patent number: 8093658
    Abstract: The use of strained gate electrodes in integrated circuits results in a transistor having improved carrier mobility, improved drive characteristics, and reduced source drain junction leakage. The gate electrode strain can be obtained through non symmetric placement of stress inducing structures as part of the gate electrode.
    Type: Grant
    Filed: February 1, 2010
    Date of Patent: January 10, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Kunal R. Parekh
  • Patent number: 8089128
    Abstract: A transistor gate forming method includes forming a first and a second transistor gate. Each of the two gates includes a lower metal layer and an upper metal layer. The lower metal layer of the first gate originates from an as-deposited material exhibiting a work function the same as exhibited in an as-deposited material from which the lower metal layer of the second gate originates. However, the first gate's lower metal layer exhibits a modified work function different from a work function exhibited by the second gate's lower metal layer. The first gate's lower metal layer may contain less oxygen and/or carbon in comparison to the second gate's lower metal layer. The first gate's lower metal layer may contain more nitrogen in comparison to the second gate's lower metal layer. The first gate may be a n-channel gate and the second gate may be a p-channel gate.
    Type: Grant
    Filed: April 15, 2009
    Date of Patent: January 3, 2012
    Assignee: Micron Technology, Inc.
    Inventors: D. V. Nirmal Ramaswamy, Ravi Iyer
  • Patent number: 8080853
    Abstract: A semiconductor device includes a vertical IGBT and a vertical free-wheeling diode in a semiconductor substrate. A plurality of base regions is disposed at a first-surface side portion of the semiconductor substrate, and a plurality of collector regions and a plurality of cathode regions are alternately disposed in a second-surface side portion of the semiconductor substrate. The base regions include a plurality of regions where channels are provided when the vertical IGBT is in an operating state. The first-side portion of the semiconductor substrate include a plurality of IGBT regions each located between adjacent two of the channels, including one of the base regions electrically coupled with an emitter electrode, and being opposed to one of the cathode regions. The IGBT regions include a plurality of narrow regions and a plurality of wide regions.
    Type: Grant
    Filed: December 15, 2009
    Date of Patent: December 20, 2011
    Assignee: DENSO CORPORATION
    Inventors: Yukio Tsuzuki, Hiromitsu Tanabe, Kenji Kouno
  • Patent number: 8053845
    Abstract: In a reliable semiconductor device and a method of fabricating the semiconductor device, a difference in height between upper surfaces of a cell region and a peripheral region (also referred to as a level difference) is minimized by optimizing dummy gate parts. The semiconductor device includes a semiconductor substrate including a cell region and a peripheral region surrounding the cell region, a plurality of dummy active regions surrounded by a device isolating region and formed apart from each other, and a plurality of dummy gate parts formed on the dummy active regions and on the device isolating regions located between the dummy active regions, wherein each of the dummy gate parts covers two or more of the dummy active regions.
    Type: Grant
    Filed: November 7, 2008
    Date of Patent: November 8, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Byoung-ho Kwon, Sang-youn Jo, Jin-sook Choi, Chang-ki Hong, Bo-un Yoon, Hong-soo Kim, Se-rah Yun
  • Patent number: 8035140
    Abstract: An semiconductor device is disclosed. The device includes a semiconductor body, a layer of insulating material disposed over the semiconductor body, and a region of gate electrode material disposed over the layer of insulating material. Also included are a source region adjacent to gate region and a drain region adjacent to the gate region. A gate connection is disposed over the semiconductor body, wherein the gate connection includes a region of gate electrode material electrically coupling a contact region to the gate electrode. An insulating region is disposed on the semiconductor body beneath the gate connection.
    Type: Grant
    Filed: July 26, 2007
    Date of Patent: October 11, 2011
    Assignee: Infineon Technologies AG
    Inventors: Albert Birner, Qiang Chen
  • Patent number: 8022483
    Abstract: A semiconductor device and a manufacturing method for the same are disclosed. The semiconductor device includes a gate pattern formed at an upper part of the semiconductor substrate to overlap one side of a drift region, and a shallow oxide region disposed adjacent to the gate pattern, having a shallower depth than a plurality of device isolation layers.
    Type: Grant
    Filed: November 23, 2009
    Date of Patent: September 20, 2011
    Assignee: Dongbu HiTek Co., Ltd.
    Inventor: Kwang Young Ko
  • Publication number: 20110156165
    Abstract: A thin film transistor array substrate including a substrate, a gate line intersecting a data line to define a pixel region on the substrate, a switching element disposed at an intersection of the gate line and the data line, a plurality of pixel electrodes and a plurality of first common electrodes alternately arranged on a protective film in the pixel region, a second common electrode overlapping the data line, a first storage electrode on the substrate, a second storage electrode overlapping the first storage electrode, and an organic insulation film on the switching element, the second storage electrode, the data line, a gate pad, and a data pad, wherein the second common electrode covers the data line, the protective film and the organic insulation film, and has inclined surfaces connected to the protective film within the pixel region.
    Type: Application
    Filed: December 10, 2010
    Publication date: June 30, 2011
    Inventors: Jin Hee JANG, Heung Lyul Cho
  • Patent number: 7928481
    Abstract: An semiconductor device is disclosed. The device includes a semiconductor body, a layer of insulating material disposed over the semiconductor body, and a region of gate electrode material disposed over the layer of insulating material. Also included are a source region adjacent to gate region and a drain region adjacent to the gate region. A gate connection is disposed over the semiconductor body, wherein the gate connection includes a region of gate electrode material electrically coupling a contact region to the gate electrode. An insulating region is disposed on the semiconductor body beneath the gate connection.
    Type: Grant
    Filed: July 26, 2007
    Date of Patent: April 19, 2011
    Assignee: Infineon Technologies AG
    Inventors: Albert Birner, Qiang Chen
  • Patent number: 7919822
    Abstract: A semiconductor device that suppresses variation and a drop in the breakdown voltage of transistors. In the semiconductor device in which a logic transistor and a high-breakdown-voltage transistor are formed on one Si substrate, an insulating film which has an opening region and which is thick around the opening region is formed on a low concentration drain region formed in the Si substrate on one side of a gate electrode of the high-breakdown-voltage transistor. The insulating film around the opening region has a two-layer structure including a gate insulating film and a sidewall insulating film. When ion implantation is performed on the low concentration drain region beneath the opening region to form a high concentration drain region, the insulating film around the opening region prevents impurities from passing through.
    Type: Grant
    Filed: March 10, 2006
    Date of Patent: April 5, 2011
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Hitoshi Asada
  • Patent number: 7855419
    Abstract: An improved layout pattern for electrostatic discharge protection is disclosed. A first heavily doped region of a first type is formed in a well of said first type. A second heavily doped region of a second type is formed in a well of said second type. A battlement layout pattern of said first heavily doped region is formed along the boundary of said first heavily doped region and said second heavily doped region. A battlement layout pattern of said second heavily doped region is formed along the boundary of said first heavily doped region and said second heavily doped region. By adjusting a distance between the battlement layout pattern of a heavily doped region and a edge of well of said second type, i.e. n-well, a first distance will be shorter than what is typically required by the layout rules of internal circuit; and a second distance will be longer than the first distance to ensure that the I/O device have a better ESD protection capability.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: December 21, 2010
    Assignee: Himax Technologies Limited
    Inventor: Tung-Yang Chen
  • Patent number: 7829956
    Abstract: Both a compressive-stress-applying insulating film and a tensile-stress-applying insulating film cover an N-type MIS transistor formed at an SRAM access region of a semiconductor substrate. On the other hand, a tensile-stress-applying insulating film covers an N-type MIS transistor formed at an SRAM drive region of the semiconductor substrate.
    Type: Grant
    Filed: September 11, 2006
    Date of Patent: November 9, 2010
    Assignee: Panasonic Corporation
    Inventor: Naoki Kotani
  • Patent number: 7791087
    Abstract: An integrated circuit and method are provided for preventing reverse engineering by monitoring light emissions emitted from transistors and such electrically active devices in the integrated circuit. The method prevents, in an integrated circuit, a pattern of light emitted from at least one active device in the integrated circuit from being detected external to the integrated circuit by fading the light emitted from the at least one active device in the integrated circuit and that is emitted external to the integrated circuit. Bright light emission emitted in substantial close proximity to the at least one active device in the integrated circuit, and emitted external to the integrated circuit, fades a pattern of light emission emitted from the at least one active device.
    Type: Grant
    Filed: November 2, 2009
    Date of Patent: September 7, 2010
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey A. Kash, James C. Tsang, Daniel R. Knebel
  • Patent number: 7791086
    Abstract: An integrated circuit and method are provided for preventing reverse engineering by monitoring light emissions emitted from transistors and such electrically active devices in the integrated circuit. The method prevents, in an integrated circuit, a pattern of light emitted from at least one active device in the integrated circuit from being detected external to the integrated circuit by reduction of the intensity of light emitted from the at least one active device in the integrated circuit thereby preventing the reduced intensity light emitted from the at least one active device in the integrated circuit from being detected external to the integrated circuit. The intensity of light emitted from the at least one active device in the integrated circuit can be reduced by modification of operational characteristics of the at least one active device during switching transitions.
    Type: Grant
    Filed: November 2, 2009
    Date of Patent: September 7, 2010
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey A. Kash, James C. Tsang, Daniel R. Knebel
  • Patent number: 7781782
    Abstract: An integrated circuit and method are provided for preventing reverse engineering by monitoring light emissions emitted from transistors and such electrically active devices in the integrated circuit. The method prevents, in an integrated circuit, a pattern of light emitted from at least one active device in the integrated circuit from being detected external to the integrated circuit by randomizing a pattern of light emitted from the at least one active device in an integrated circuit and that is emitted external to the integrated circuit. The pattern of light emitted from the at least one active device in the integrated circuit and that is emitted external to the integrated circuit can be randomized by randomizing a clock signal applied to a clocked circuit comprising the at least one active device in the integrated circuit.
    Type: Grant
    Filed: November 2, 2009
    Date of Patent: August 24, 2010
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey A. Kash, James C. Tsang, Daniel R. Knebel
  • Patent number: 7704865
    Abstract: Methods of forming charge-trapping dielectric layer structures in semiconductor memory devices which comprise: (a) providing a semiconductor substrate; (b) forming an oxide layer on at least a portion of the substrate; (c) forming two or more source/drain regions in the substrate below the oxide layer; (d) re-oxidizing the oxide layer; (e) forming a charge-trapping dielectric layer on the oxide layer; and (f) forming an insulating layer on the charge-trapping dielectric layer; as well as methods which comprise: (a) providing a semiconductor substrate; (b) forming an oxide layer on at least a portion of the substrate in a dry atmosphere; (c) forming two or more source/drain regions in the substrate below the oxide layer; (d) forming a charge-trapping dielectric layer on the oxide layer; (e) forming an insulating layer on the charge-trapping dielectric layer; and (f) annealing the insulating layer in an atmosphere having a hydrogen content of less than about 0.01% are described.
    Type: Grant
    Filed: August 23, 2005
    Date of Patent: April 27, 2010
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Yen-Hao Shih, Shih-Chin Lee, Jung-Yu Hsieh, Erh-Kun Lai, Kuang Yeu Hsieh
  • Patent number: 7656049
    Abstract: The use of strained gate electrodes in integrated circuits results in a transistor having improved carrier mobility, improved drive characteristics, and reduced source drain junction leakage. The gate electrode strain is obtained through non symmetric placement of stress inducing structures as part of the gate electrode. Silicon nitride layers may be placed on one side of the gate electrode in a compressive mode, or on the other side of the gate electrode in a tensile mode to obtain similar results.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: February 2, 2010
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Kunal R. Parekh
  • Patent number: 7642577
    Abstract: The method for fabricating a semiconductor device comprises the steps of: forming a dummy electrode 22n and a dummy electrode 22p; forming a metal film 32 on the dummy electrode 22p; conducting a thermal treatment at a first temperature to substitute the dummy electrode 22n with an electrode 34a of a material containing the constituent material of the metal film 32; forming a metal film 36 on the dummy electrode 22n; and conducting a thermal treatment at a second temperature, which is lower than the first temperature and at which an interdiffusion of constituent materials between the electrode 34a and the metal film 36 does not take place, to substitute the second dummy electrode with an electrode 34b of a material containing the constituent material of the metal film 36.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: January 5, 2010
    Assignee: Fujitsu Microelectronics Limited
    Inventors: Hiroshi Kudo, Junko Naganuma, Sadahiro Kishii
  • Patent number: 7633124
    Abstract: A silicon nitride film having a thickness of 3 nm or less is formed on the surfaces of a P-well and N-well, as well as on the upper and side surfaces of a gate electrode, in which the silicon nitride film can be formed, for example, by exposing the surface of the P-well and N-well, and the upper and side surfaces of the gate electrode to a nitrogen-gas-containing plasma using a magnetron RIE apparatus. Then, pocket layers, extension layers and source/drain layers are formed while leaving the silicon nitride film unremoved.
    Type: Grant
    Filed: July 14, 2006
    Date of Patent: December 15, 2009
    Assignee: Fujitsu Microelectronics Limited
    Inventor: Takashi Saiki
  • Patent number: 7612382
    Abstract: A method for an electronic device is provided for preventing reverse engineering by monitoring light emissions emitted from transistors and such electrically active devices in the electronic device. The method emits extraneous randomized light emissions in substantial close proximity to the transistors to hide a pattern of light emissions emitted from the transistors. As one feature, the device can include a source of randomized light emissions in substantial close proximity to the transistors to hide a pattern of the emitted light from the transistors in randomized light emissions emitted by the source. As a second feature, the device can emit the randomized light emissions by randomly delaying an electrical signal that is electrically coupled to the transistors and, in response to the randomly delayed electrical signal, the transistors randomly emitting light emissions thereby hiding a separate pattern of light emission emitted from the transistors.
    Type: Grant
    Filed: June 17, 2008
    Date of Patent: November 3, 2009
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey A. Kash, James C. Tsang, Daniel R. Knebel
  • Patent number: 7541661
    Abstract: Provided is a manufacturing method of a semiconductor integrated circuit device having a plurality of first MISFETs in a first region and a plurality of second MISFETs in a second region, which comprises forming a first insulating film between two adjacent regions of the first MISFET forming regions in the first region and the second MISFET forming regions in the second region; forming a second insulating film over the surface of the semiconductor substrate between the first insulating films in each of the first and second regions; depositing a third insulating film over the second insulating film; forming a first conductive film over the third insulating film in the second region; forming, after removal of the third and second insulating films from the first region, a fourth insulating film over the surface of the semiconductor substrate in the first region; and forming a second conductive film over the fourth insulating film; wherein the third insulating film remains over the first insulating film in the se
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: June 2, 2009
    Assignee: Renesas Technology Corp.
    Inventors: Hideki Yasuoka, Masami Kouketsu, Susumu Ishida, Kazunari Saitou
  • Patent number: 7541627
    Abstract: The invention describes in detail the structure of a CMOS image sensor pixel that senses color of impinging light without having absorbing filters placed on its surface. The color sensing is accomplished by having a vertical stack of three-charge detection nodes placed in the silicon bulk, which collect electrons depending on the depth of their generation. The small charge detection node capacitance and thus high sensitivity with low noise is achieved by using fully depleted, potential well forming, buried layers instead of undepleted junction electrodes. Two embodiments of contacting the buried layers without substantially increasing the node capacitances are presented.
    Type: Grant
    Filed: March 8, 2004
    Date of Patent: June 2, 2009
    Assignee: Foveon, Inc.
    Inventors: Jaroslav Hynecek, Richard B. Merrill, Russel A. Martin
  • Publication number: 20090026539
    Abstract: An semiconductor device is disclosed. The device includes a semiconductor body, a layer of insulating material disposed over the semiconductor body, and a region of gate electrode material disposed over the layer of insulating material. Also included are a source region adjacent to gate region and a drain region adjacent to the gate region. A gate connection is disposed over the semiconductor body, wherein the gate connection includes a region of gate electrode material electrically coupling a contact region to the gate electrode. An insulating region is disposed on the semiconductor body beneath the gate connection.
    Type: Application
    Filed: July 26, 2007
    Publication date: January 29, 2009
    Inventors: Albert Birner, Qiang Chen
  • Patent number: 7420241
    Abstract: A semiconductor memory device includes a memory cell which includes a first gate insulation film provided on the semiconductor substrate; a floating gate electrode provided on the first gate insulation film; a second gate insulation film provided on the floating gate electrode; a control gate electrode provided on the second gate insulation film; a source layer and a drain layer that are provided in the semiconductor substrate, the source layer and the drain layer respectively being provided either side of a channel region which is below the floating gate electrode; a source electrode that is electrically connected to the source layer; a buffer film provided on the drain layer; and a memory cell including a drain electrode electrically connected to the drain layer through the buffer film, wherein when viewing the surface of the semiconductor substrate from above, an overlapped area between the floating gate electrode and the drain layer is smaller than an overlapped area between the floating gate electrode an
    Type: Grant
    Filed: November 21, 2005
    Date of Patent: September 2, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Takamitsu Ishihara
  • Patent number: 7399992
    Abstract: An integrated circuit chip (IC) is equipped with a device for preventing reverse engineering by monitoring light emissions emitted from transistors and such electrically active devices in a circuit located in the IC. The device emits extraneous randomized light emissions in substantial close proximity to the transistors to hide a pattern of light emissions emitted from the transistors. As one feature, the device can include a source of randomized light emissions in substantial close proximity to the transistors to hide a pattern of the emitted light from the transistors in randomized light emissions emitted by the source. As a second feature, the device can emit the randomized light emissions by randomly delaying an electrical signal that is electrically coupled to the transistors and, in response to the randomly delayed electrical signal, the transistors randomly emitting light emissions thereby hiding a separate pattern of light emission emitted from the transistors.
    Type: Grant
    Filed: October 2, 2006
    Date of Patent: July 15, 2008
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey A. Kash, James C. Tsang, Daniel R. Knebel
  • Patent number: 7355245
    Abstract: A field effect transistor (FET) device includes a gate conductor formed over a semiconductor substrate, a source region having a source extension that overlaps and extends under the gate conductor, and a drain region having a drain extension that overlaps and extends under the gate conductor only at selected locations along the width of the gate conductor.
    Type: Grant
    Filed: March 28, 2007
    Date of Patent: April 8, 2008
    Assignee: International Business Machines Corporation
    Inventors: Huilong Zhu, Oleg Gluschenkov
  • Patent number: 7307323
    Abstract: An etch resistant liner covering sidewalls of a transistor gate stack and along a portion of the substrate at a base of the transistor gate stack. The liner prevents silicide formation on the sidewalls of the gate stack, which may produce electrical shorting, and determines the location of silicide formation within source and drain regions within the substrate at the base of the transistor gate stack. The liner also covers a resistor gate stack preventing silicide formation within or adjacent to the resistor gate stack.
    Type: Grant
    Filed: March 7, 2006
    Date of Patent: December 11, 2007
    Assignee: International Business Machines Corporation
    Inventors: Hung Y. Ng, Haining S. Yang
  • Patent number: 7268392
    Abstract: A semiconductor device comprises: a first semiconductor region of a first conductivity type; a second semiconductor region of a second conductivity type provided on the first semiconductor region; a trench formed in the second semiconductor region; a thick gate insulating film selectively provided in a center area of a bottom surface of the trench; a thin gate insulating film provided along a periphery of the bottom surface and on a sidewall of the trench; a third semiconductor region of the first conductivity type that is selectively provided below the thin gate insulating film provided along the periphery of the bottom surface of the trench and that extends to the first semiconductor region; a fourth semiconductor region of the first conductivity type selectively provided in the surface of the second semiconductor region; and a gate electrode filling the trench via the gate insulating film.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: September 11, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hironobu Shibata, Noboru Matsuda
  • Patent number: 7268393
    Abstract: Semiconductor devices and methods of manufacturing semiconductor devices which achieve higher integration and higher operating speed are provided. A disclosed example semiconductor device includes a semiconductor substrate of a first conductivity type; a gate insulating layer on the substrate; and a gate on the gate insulating layer. The substrate also includes first spacers on opposite side walls of the gate. Each of the first spacers has a notch at a lower end adjacent the substrate. The example device also includes second spacers on side walls of respective ones of the first spacers; source/drain junction regions of a second conductivity type in the substrate on opposite sides of the gate and the second spacers; and LDD regions of the second conductivity type in the substrate at opposite sides of the gate and the first spacers. Each of the LDD regions has an end adjacent a respective one of the junction regions.
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: September 11, 2007
    Assignee: Dongbu Electronics Co., Ltd.
    Inventor: Jea-Hee Kim
  • Patent number: 7253482
    Abstract: A field effect transistor (FET) device includes a gate conductor formed over a semiconductor substrate, a source region having a source extension that overlaps and extends under the gate conductor, and a drain region having a drain extension that overlaps and extends under the gate conductor only at selected locations along the width of the gate conductor.
    Type: Grant
    Filed: August 3, 2005
    Date of Patent: August 7, 2007
    Assignee: International Business Machines Corporation
    Inventors: Huilong Zhu, Oleg Gluschenkov
  • Publication number: 20070158761
    Abstract: Embodiments relate to a gate structure of a semiconductor device and a method of manufacturing the gate structure. An oxide layer may be formed on a silicon substrate before a gate insulating layer is formed. The oxide layer may be etched to form an opening exposing a channel area of the silicon substrate. After forming the gate insulating layer in the opening, a gate conductive layer may be deposited and etched to form a gate. The oxide layer may be continuously etched such that the oxide layer remains at both edge portions of the gate insulating layer. The oxide layer formed at both edge portions of the gate insulating layer may protect the gate insulating layer during a gate etching process, and may improve a reliability of the semiconductor device.
    Type: Application
    Filed: December 26, 2006
    Publication date: July 12, 2007
    Inventor: Dae Kyeun Kim
  • Patent number: 7224037
    Abstract: Provided is a manufacturing method of a semiconductor integrated circuit device having a plurality of first MISFETs in a first region and a plurality of second MISFETs in a second region, which comprises forming a first insulating film between two adjacent regions of the first MISFET forming regions in the first region and the second MISFET forming regions in the second region; forming a second insulating film over the surface of the semiconductor substrate between the first insulating films in each of the first and second regions; depositing a third insulating film over the second insulating film; forming a first conductive film over the third insulating film in the second region; forming, after removal of the third and second insulating films from the first region, a fourth insulating film over the surface of the semiconductor substrate in the first region; and forming a second conductive film over the fourth insulating film; wherein the third insulating film remains over the first insulating film in the se
    Type: Grant
    Filed: July 20, 2004
    Date of Patent: May 29, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Hideki Yasuoka, Masami Kouketsu, Susumu Ishida, Kazunari Saitou
  • Patent number: 7221028
    Abstract: The present invention relates to a high voltage transistor and method of manufacturing the same.
    Type: Grant
    Filed: July 26, 2004
    Date of Patent: May 22, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Tae-kwang Yu, Hee-seog Jeon, Seung-beom Yoon, Yong-tae Kim
  • Patent number: 7180129
    Abstract: A method of manufacturing an insulating layer that ensures reproducibility across like manufacturing apparatus. The insulating layer is formed on the substrate by (a) flowing an oxidizing gas at an oxidizing gas flow rate, (b) flowing a first carrier gas at a first carrier gas flow rate while carrying a first impurity including boron flowing at a first impurity flow rate, (c) flowing a second carrier gas at a second carrier gas flow rate while carrying a second impurity including phosphorus flowing at a second impurity flow rate, and (d) flowing a silicon source material at a silicon source flow rate. The second carrier gas flow rate is greater than the first carrier gas flow rate.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: February 20, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Woo-Chan Jung, Jin-Ho Jeon, Jeon-Sig Lim, Jong-Seung Yi
  • Patent number: 7176527
    Abstract: A semiconductor device and a method of fabricating the same suppress a substrate floating effect without causing lowering of a degree of integration. The semiconductor device has a Silicon-On-Insulator structure which includes a semiconductor layer formed on an insulator, and has at least one MOSFET element. The MOSFET element includes a source region; a drain region which is opposed to the source region; a body region disposed between the source and drain regions; a gate region positioned on or close to a surface of the body region, so as to form an electrically conducting channel in the body region; and an extracting region being in contact with both of the body region and the source region. The extracting region has a conductivity type which is the same as a conductivity type of the body region and has a concentration higher than that of the body region.
    Type: Grant
    Filed: October 10, 2003
    Date of Patent: February 13, 2007
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Koichi Fukuda
  • Patent number: 7161210
    Abstract: A semiconductor device is provided with a gate electrode formed over a substrate that has gate oxide films disposed thereon. Source-drain regions of low and high concentration are formed next to the gate electrode. A diffusion region width of the source side of the source-drain regions is smaller than at least a diffusion region width of the drain side.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: January 9, 2007
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Eiji Nishibe, Shuichi Kikuchi, Takuya Suzuki