Abstract: A semiconductor device comprises a first gate structure extending in a first direction and including a first gate electrode and a first gate capping pattern, a second gate structure spaced apart from the first gate structure and extending in the first direction, and including a second gate electrode and a second gate capping pattern, an active pattern extending in a second direction, the active pattern below the second gate structure, an epitaxial pattern on one side of the second gate structure and on the active pattern, a gate contact connected to the first gate electrode, and a node contact connected to the second gate electrode and to the epitaxial pattern. An upper surface of the gate contact is at a same level as the first gate capping pattern, and an upper surface of the node contact is lower than the upper surface of the first gate capping pattern.

Abstract: A power planning phase module, a placement phase module, and a routing phase module are provided that can replace, supplement, or enhance existing electronic design automation (EDA) software tools. The power planning phase module adds distributed power sources and a network of switching elements to the power frame or ring assigned to regions of a chip (that may be identified during a floor planning stage). The placement phase module optimizes a number and type of cells attached to each power source of the distributed power sources already added or to be added during the power planning phase. The routing phase module optimizes routing length to, for example, mask power consumption.

Abstract: Disclosed is a semiconductor memory device comprising a plurality of memory cells each including an access transistor, a pull-up transistor, and a pull-down transistor on a substrate, a first line layer on the memory cells and including a first lower landing pad and a second lower landing pad, a second line layer on the first line layer and including a ground line having an opening and an upper landing pad in the opening, and a third line layer including a word line on the second line layer. The ground line is electrically connected through the first lower landing pad to a terminal of the pull-down transistor. The word line is electrically connected through the upper landing pad and the second lower landing pad to a terminal of the access transistor.

Abstract: Integrated circuit devices including standard cells are provided. The integrated devices may include a lower transistor region and an upper transistor region. The lower transistor region may include a lower active region, lower source/drain regions, and lower gate structures arranged alternately with the lower source/drain regions. The upper transistor region may include an upper active region, upper source/drain regions, and upper gate structures arranged alternately with the upper source/drain regions. The upper gate structures may include a first upper gate structure. The integrated devices may also include an input wire, an input via electrically connecting the input wire to the first upper gate structure, and a routing wire electrically connecting a pair of the lower source/drain regions or a pair of the upper source/drain regions. An upper surface of the routing wire may be closer to the substrate than an upper surface of the input wire.

Abstract: A method and apparatus for improving display contrast, the method includes: providing a display array substrate having a metal layer; forming a photoresist layer on a surface of the metal layer; performing an exposure and development processes on the photoresist layer to expose a portion of the metal layer; performing an etching process on the portion of the metal layer to form metal wires; and subjecting an oxidation treatment to sidewalls of the metal wires to generate an oxide on the sidewalls of the metal wires.

Abstract: A semiconductor memory device includes an array of memory cells arranged in a plurality of rows and columns, with each memory cell including a plurality of bit cell transistors. The semiconductor memory device further includes a plurality of write assist circuits, including one or more write assist circuits within each column of the array of memory cells, each write assist circuit configured to provide a core voltage to memory cells within the same column and to reduce the core voltage during a write operation. The array of memory cells and the plurality of write assist circuits have a common semiconductor layout.

Abstract: An integrated circuit includes a first type-one transistor, a second type-one transistor, a third type-one transistor, and a fourth type-one transistor. The first type-one transistor and the third type-one transistor are in the first portion of the type-one active zone. The integrated circuit includes a first type-two transistor in the first portion of the type-two active zone. The first type-one transistor has a gate configured to have a first supply voltage of a first power supply. The first type-two transistor has a gate configured to have a second supply voltage of the first power supply. The third type-one transistor has a gate configured to have the first supply voltage of a second power supply. The third type-one transistor has a first active-region conductively connected with an active-region of the first type-one transistor.

Abstract: To provide a transistor with favorable electrical characteristics, a transistor with stable electrical characteristics, or a highly integrated semiconductor device. By covering a side surface of an oxide semiconductor layer in which a channel is formed with an oxide semiconductor layer, diffusion of impurities into the inside from the side surface of the oxide semiconductor layer is prevented. By forming a gate electrode in a damascene process, miniaturization and high density of a transistor are achieved. By providing a protective layer covering a gate electrode over the gate electrode, the reliability of the transistor is increased.

Abstract: Processing methods to create self-aligned contacts are described. A conformal liner can be deposited in a feature in a substrate surface leaving a gap between the walls of the liner. A tungsten film can be deposited in the gap of the liner and volumetrically expanded. The expanded film can be removed and replaced with a contact material to a make a contact. In some embodiments, a conformal tungsten film can be formed in the feature leaving a gap between the walls. A dielectric can be deposited in the gap and the conformal tungsten film can be volumetrically expanded to grow two pillars. The pillars can be removed and replaced with a contact material to make two contacts.

Abstract: A butted contact structure is provided. In one embodiment, a structure includes a first transistor on a substrate, the first transistor comprising a first source or drain region, a first gate, and a first gate spacer being disposed between the first gate and the first source or drain region. The structure includes a second transistor on the substrate, the second transistor comprising a second source or drain region, a second gate, and a second gate spacer being disposed between the second gate and the second source or drain region. The structure includes a butted contact disposed above and extending from the first source or drain region to at least one of the first or second gate, a portion of the first gate spacer extending a distance into the butted contact to separate a first bottom surface of the butted contact from a second bottom surface of the butted contact.

Abstract: The power circuit includes: a main substrate; a first electrode pattern disposed on the main substrate and connected to a positive-side power terminal P; a second electrode pattern disposed on a main substrate and connected to a negative-side power terminal N; a third electrode pattern disposed on the main substrate and connected to an output terminal O; a first MISFET Q1 of which a first drain is disposed on the first electrode pattern; a second MISFET Q4 of which a second drain is disposed on the third electrode pattern; a first control circuit (DG1) connected between a first gate G1 and a first source S1 of the first MISFET, and configured to control a current path conducted from the first source towards the first gate.

Abstract: A semiconductor structure includes a vertical transport logic circuit cell. The vertical transport logic cell includes a first logic gate and at least a second logic gate. The first logic gate includes at least one input terminal and at least one output terminal. The second logic gate includes at least one input terminal and at least one output terminal. One of the input terminal and the output terminal of the first logic gate shares a pitch of the vertical transport logic circuit cell with one of the input terminal and the output terminal of the second logic gate. The first and second logic gates can include the same type or different types of logic functions.

Abstract: A method of manufacturing an integrated circuit chip includes doping a substrate with a p-type dopant to form a first p-well region in a first memory cell and a second p-well region in a second memory cell; forming first and second semiconductor fins over the first and second p-well regions, respectively; forming a first work function layer over the first semiconductor fin; forming a second work function layer over the second semiconductor fin and having a thickness different from a thickness of the first work function layer; and forming a metal fill layer over the first and second work function layers.

Abstract: A semiconductor device includes a fin structure, first and second gate structures, a source/drain region, a source/drain contact layer and a separation layer. The fin structure protrudes from an isolation insulating layer disposed over a substrate and extends in a first direction. The first and second gate structures are formed over the fin structure and extend in a second direction crossing the first direction. The source/drain region is disposed between the first and second gate structures. The interlayer insulating layer is disposed over the fin structure, the first and second gate structures and the source/drain region. The first source/drain contact layer is disposed on the first source/drain region. The separation layer is disposed adjacent to the first source/drain contact layer. Ends of the first and second gate structures and an end of the source drain contact layer are in contact with a same face of the separation layer.

Abstract: A thin film transistor, a TFT substrate, and a display panel are provided. The TFT includes a gate, a source, and a drain. The source is a first bending structure. The drain is a second bending structure. The gate is a third bending structure. The first bending structure of the source and the second bending structure of the drain are arranged opposite. The third bending structure of the gate is arranged between the first bending structure of the source and the second bending structure of the drain. The present disclosure facilitates fabrication of a narrow bezel of a display panel.

Abstract: An apparatus comprises a plurality of memory cells in rows and columns, a first word line electrically coupled to a first group of memory cells through a first word line strap structure comprising a first gate contact, a first-level via, a first metal line and a second-level via and a second word line electrically coupled to a second group of memory cells through a second word line strap structure, wherein the second word line strap structure and the first word line strap structure are separated by at least two memory cells.

Abstract: A semiconductor device for fabricating an IC is provided. The semiconductor device includes an interconnect structure and a first conductive line. The interconnect structure is made of conductive material and includes a first interconnect portion and a second interconnect portion. The second interconnect portion is connected to a first end of the first interconnect portion, and a width of the second interconnect portion is less than a width of the first interconnect portion. The first conductive line is arranged over or below the first interconnect portion and providing an electrical connection between the interconnect structure and an electrical structure. A distance between the first conductive line and the first end is less than a distance between the first conductive line and a second end of the first interconnect portion which is opposite to the first end.

Abstract: The semiconductor device has insulating films 40, 42 formed over a substrate 10; an interconnection 58 buried in at least a surface side of the insulating films 40, 42; insulating films 60, 62 formed on the insulating film 42 and including a hole-shaped via-hole 60 and a groove-shaped via-hole 66a having a pattern bent at a right angle; and buried conductors 70, 72a buried in the hole-shaped via-hole 60 and the groove-shaped via-hole 66a. A groove-shaped via-hole 66a is formed to have a width which is smaller than a width of the hole-shaped via-hole 66. Defective filling of the buried conductor and the cracking of the inter-layer insulating film can be prevented. Steps on the conductor plug can be reduced. Accordingly, defective contact with the upper interconnection layer and the problems taking place in forming films can be prevented.

Abstract: An organic light-emitting diode (OLED) display is disclosed. In one aspect, the OLED display includes a substrate and an active pattern formed over the substrate. The OLED display also includes first and second gate electrodes formed over the active pattern. The first gate electrode defines a first transistor together with the active pattern. The second gate electrode defines a second transistor and a third transistor together with the active pattern. The OLED display further includes a first conductive pattern formed over the first and second gate electrodes. The first conductive pattern overlaps at least a portion of the second and/or third transistors so as to define a parasitic capacitor.

Abstract: A vertical tunneling FET (TFET) provides low-power, high-speed switching performance for transistors having critical dimensions below 7 nm. The vertical TFET uses a gate-all-around (GAA) device architecture having a cylindrical structure that extends above the surface of a doped well formed in a silicon substrate. The cylindrical structure includes a lower drain region, a channel, and an upper source region, which are grown epitaxially from the doped well. The channel is made of intrinsic silicon, while the source and drain regions are doped in-situ. An annular gate surrounds the channel, capacitively controlling current flow through the channel from all sides. The source is electrically accessible via a front side contact, while the drain is accessed via a backside contact that provides low contact resistance and also serves as a heat sink. Reliability of vertical TFET integrated circuits is enhanced by coupling the vertical TFETs to electrostatic discharge (ESD) diodes.

Abstract: Monolithic 3D ICs employing one or more local inter-level interconnect integrated intimately with at least one structure of at least one transistor on at least one transistor level within the 3D IC. In certain embodiments the local inter-level interconnect intersects a gate electrode or a source/drain region of at least one transistor and extends through at least one inter-level dielectric layer disposed between a first and second transistor level in the 3D IC. Local inter-level interconnects may advantageously make a direct vertical connection between transistors in different levels of the 3D IC without being routed laterally around the footprint (i.e., lateral, or planar, area) of either the overlying or underlying transistor level that is interconnected.

Abstract: An organic light emitting display device includes a plurality of pixels each having a pixel driving circuit. Each of the pixels includes an organic light emitting diode and a driving TFT that controls driving of the organic light emitting diode and includes an active layer of low temperature poly-silicon, a gate node, a source node, and a drain node. The pixels include first to fifth switching TFTs electrically connected to the driving TFT and each including an active layer of an oxide semiconductor, a gate node, a source node, and a drain node. Further, the pixels include a storage capacitor connected between the gate node of the driving TFT and the source node of the fifth switching TFT and a coupling capacitor electrically connected in series to the storage capacitor and configured to cause capacitive coupling to supply a bootstrapped voltage to the gate node of the driving TFT.

Abstract: An SRAM includes a substrate containing a plurality of first substrate regions and a plurality of second substrate regions, a plurality of pull-down transistors formed in the first substrate regions with each pull-down transistor including a first gate structure, and a plurality of pass-gate transistors formed in the second substrate regions with each pass-gate transistor including a second gate structure. A portion of the first substrate region under each first gate structure is doped with first doping ions and a portion of the second substrate region under each second gate structure is doped with second doping ions. Moreover, the concentration of the first doping ions is less than the concentration of the second doping ions, and the work function of the first work function layer in the first gate structures is greater than the work function of the second work function layer in the second gate structures.

Abstract: An integrated circuit is provided that includes memory elements that exhibit immunity to soft error upset (SEU) events when subjected to high-energy atomic particle strikes. Each memory element may include at least two inverting circuits coupled in a feedback loop. Transistors in the memory element may be grouped in one contiguous region or divided into multiple separate regions. The memory element may include a long gate conductor that extends outside the boundary of the one contiguous region or the multiple separated regions. The long gate conductor may serve to provide parasitic resistance in the feedback loop to help mitigate SEU disturbances.

Abstract: A method including patterning a continuous fin having a first segment and a second segment in a semiconductor layer, the first segment is arranged at an angle relative to the second line segment, and forming a first gate and a second gate substantially parallel to each other, the first gate substantially covering sides and a top of a portion of the first segment of the continuous fin, the second gate substantially covering sides and a top of a portion of the second segment of the continuous fin.

Abstract: A layout includes a plurality of cells and at least one dummy gate electrode continuously extends across the cells. Since the dummy gate electrode is electrically conductive, the dummy gate electrode can be utilized for interconnecting the cells. That is, some signals may travel through the dummy gate electrode rather than through a metal one line or a metal two line. Therefore, an amount of metal one lines and/or metal two lines for interconnecting the cells can be reduced.

Abstract: Characteristics of a semiconductor device are improved. An active region including a MOS transistor is structured such that the active region includes, in a plan view, a first side extending in X direction, a second side opposing the first side, an extension part projecting from the first side, and a cut-away portion recessed from the second side. By forming the cut-away portion on the second side opposing the first side where the extension part is formed, the active-region area increase caused by a first rounded portion can be cancelled by the active-region area decrease caused by a second rounded portion. Therefore, even when a gate electrode is disposed near the extension part, gate width variation can be inhibited and characteristics of the MOS transistor can be improved. The distance between the extension part and the gate electrode can be reduced to facilitate miniaturization of the MOS transistor.

Abstract: A method including patterning a continuous fin having a first segment and a second segment in a semiconductor layer, the first segment is arranged at an angle relative to the second segment, and forming a first gate and a second gate substantially parallel to each other, the first gate substantially covering sides and a top of a portion of the first segment of the continuous fin, the second gate substantially covering sides and a top of a portion of the second segment of the continuous fin.

Abstract: A continuous fin having a first segment and a second segment in a semiconductor layer, the first segment is arranged at an angle relative to the second segment, and a first gate and a second gate substantially parallel to each other, the first gate substantially covering sides and a top of a portion of the first segment of the continuous fin, the second gate substantially covering sides and a top of a portion of the second segment of the continuous fin.

Abstract: In accordance with some embodiments of the present disclosure, a circuit structure is provided. The circuit structure comprises a first transistor, a second transistor, a storage node and a word-line. Each of the two transistors comprises a gate, a source and a drain. The storage node is connected to the gate of the first transistor. The word-line is connected to the gate of the second transistor. The first and second transistors are serially connected. The first and second threshold voltages are respectively associated with the first and second transistors, and the first threshold voltage is lower than the second threshold voltage.

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to segmented or cut finFET structures and methods of manufacture. The structure includes at least one logic finFET device having a fin of a first length, and at least one memory finFET device having a fin of a second length. The second length is shorter than the first length.

Abstract: A semiconductor light-receiving includes: a substrate; a semiconductor light-receiving element that is provided on the substrate and has a first conductivity region and a second conductivity region; a first electrode electrically coupled to the first conductivity region; a second electrode electrically coupled to the second conductivity region; an insulating layer located on the second conductivity region; and a wiring that is located on the insulating layer and is electrically coupled to the first electrode, the wiring being elongated from the first electrode to a peripheral region of the semiconductor light-receiving element, the wiring having a region of first width and a region of second width narrower than the first width, the region of second width of the wiring being located on the second conductivity region.

Abstract: The generation of a variation in properties of vertical transistors is restrained. A vertical MOS transistor is formed in a semiconductor substrate. A first interlayer dielectric film and a first source wiring are formed over the front surface of the substrate. The first source wiring is formed over the first interlayer dielectric film, and is overlapped with the vertical MOS transistor as viewed in plan. Contacts are buried in the first interlayer dielectric film. Through the contacts, an n-type source layer of vertical MOS transistor is coupled with the first source wiring. Openings are made in the first source wiring.

Abstract: A semiconductor device includes an active layer, source electrodes, drain electrodes, gate electrodes, a first dielectric layer, source trace, first source vias, a second dielectric layer, a source pad, and second source vias. The first dielectric layer covers the source electrodes, the drain electrodes, and the gate electrodes. The source traces are disposed on the first dielectric layer, are electrically connected to the source electrodes, and are covered by the second dielectric layer. The source pad is disposed on the second dielectric layer, and includes a first source trunk, a first source branch, and a source sub-branch. The first source branch is protruded from the first source trunk and is electrically connected to one of the drain traces through the second source vias. The source sub-branch is protruded from the first source branch and is electrically connected one of the source electrodes through the third source vias.

Abstract: An integrated circuit includes a gate electrode level region that includes a plurality of linear-shaped conductive structures. Each of the plurality of linear-shaped conductive structures is defined to extend lengthwise in a first direction. Some of the plurality of linear-shaped conductive structures form one or more gate electrodes of corresponding transistor devices. A local interconnect conductive structure is formed between two of the plurality of linear-shaped conductive structures so as to extend in the first direction along the two of the plurality of linear-shaped conductive structures.

Abstract: An epitaxial structure for a non-planar transistor is provided. A substrate has a fin-shaped structure. A gate is disposed across the fin-shaped structure. A silicon germanium epitaxial structure is disposed on the fin-shaped structure beside the gate, wherein the silicon germanium epitaxial structure has 4 <1,1,1> surfaces and its aspect ratio of width and thickness is at a range of 1:1˜1.3. A method for forming said epitaxial structure is also provided.

Abstract: A semiconductor device includes: a semiconductor substrate; a first transistor which is formed on the semiconductor substrate and includes a source/drain region and a gate electrode; an insulating film which covers the source/drain region and the gate electrode of the first transistor; and a first contact plug which is formed in the insulating film and is connected to the source/drain region or the gate electrode of the first transistor, wherein the first contact plug includes a first column section which extends in a thickness direction of the insulating film and is in contact with the source/drain region or the gate electrode of the first transistor, and a first flange section which juts out from an upper portion of the first column section in a direction parallel to a surface of the insulating film, and an upper surface of the first flange section is planarized.

Abstract: A transfer transistor includes a pair of first diffusion regions and a gate electrode layer. The pair of first diffusion regions are formed in a surface of a semiconductor substrate, and are each connected to a contact. The gate electrode layer is formed on the semiconductor substrate via a gate insulating layer and has a pair of openings each surrounding the contact.

Abstract: An electronic device including at least first and second transistors integrated together on a substrate and each including an organic semiconductor region, wherein the first and second transistors are either both n-type or both p-type but wherein one of the first and second transistors is a normally-ON transistor and the other of the first and second transistors is a normally-OFF transistor.

Abstract: According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a channel body, a memory film, first and second insulating separation films, a first and a second inter-layer insulating films, a selection gate, a conductive layer, and resistance elements. The substrate includes a memory cell array region and a peripheral region. The stacked body includes electrode films and insulating films. The channel body extends in a stacking direction. The memory film includes a charge storage film. The first insulating separation films divide the stacked body. The first and the second inter-layer insulating films are on the stacked body and on the conductive layer, respectively. The selection gate is on the first inter-layer insulating film. The conductive layer is on the peripheral region. The resistance elements are on the second inter-layer insulating film. The second insulating separation films divide the conductive layer.

Abstract: SRAM integrated circuits are provided having pull up and pull down transistors of an SRAM cell fabricated in and on a silicon substrate. A layer of insulating material overlies the pull up and pull down transistors. Pass gate transistors of the SRAM cell are fabricated in a semiconducting layer overlying the layer of insulating material.

Abstract: The semiconductor device includes a semiconductor substrate having a first active area defined by a first isolation layer; a gate insulating layer formed on the semiconductor substrate; a first conductive layer formed on the gate insulating layer; a dielectric layer formed on the first conductive layer; at least one first contact hole passing through the dielectric layer; a second conductive layer, formed on the dielectric layer, the second conductive layer filling the at least one first contact hole to contact the first conductive layer; and at least one first contact plug connected to the second conductive layer in the first active area, wherein the at least one first contact plug is offset from the at least one first contact hole to overlap the dielectric layer.

Abstract: Multiple threshold voltage (Vt) field-effect transistor (FET) devices and techniques for the fabrication thereof are provided. In one aspect, a FET device is provided including a source region; a drain region; at least one channel interconnecting the source and drain regions; and a gate, surrounding at least a portion of the channel, configured to have multiple threshold voltages due to the selective placement of at least one band edge metal throughout the gate.

Abstract: In one aspect, the present invention provides electronic devices that comprise a doped semiconductor shared contact between (a) a gate conductor region of at least one transistor and (b) a source/drain diffusion region of at least one transistor. One specific example of such as shared contact, among many others, is a doped SiGe shared contact between (a) a gate conductor region shared by an N-channel MOSFET and a P-channel MOSFET and (b) a drain diffusion region of an N-channel MOSFET or of a P-channel MOSFET.

Abstract: Embodiments of transistors comprise a gate stack overlying a semiconductor material. The gate stack comprises a deposited oxide layer overlying the semiconductor material, an oxygen-diffusion barrier layer overlying the deposited oxide layer, a high-k dielectric layer overlying the oxygen-diffusion barrier layer, and a conductive material (e.g., an oxygen-gettering conductive material) overlying the high-k dielectric layer. When the conductive material is an oxygen-gettering conductive material, the oxygen-diffusion barrier layer prevents diffusion of oxygen from the deposited oxide layer to the oxygen-gettering conductive material.

Abstract: A semiconductor device includes MOS transistors, capacitor elements, a voltage generating circuit, a contact plug, and a memory cell. The MOS transistor and the capacitor element are formed on a first one of the element regions and a second one of the element regions, respectively. In the voltage generating circuit, current paths of the MOS transistors are series-connected and the capacitor elements are connected to the source or drain of the MOS transistors. The contact plug is formed on the source or the drain to connect the MOS transistors or one of the MOS transistors and one of the capacitor elements. A distance between the gate and the contact plug both for a first one of the MOS transistors located in the final stage in the series connection is larger than that for a second one of the MOS transistors located in the initial stage in the series connection.

Abstract: A display device in which not only a variation in a current value due to a threshold voltage but also a variation in a current value due to mobility are prevented from influencing luminance with respect to all the levels of grayscale to be displayed. After applying an initial potential for correction to a gate and a drain of a driving transistor, the gate and the drain of the driving transistor is kept connected in a floating state, and a voltage is held in a capacitor before a voltage between the gate and a source of the driving transistor becomes equal to a threshold voltage. When a voltage obtained by subtracting the voltage held in the capacitor from a voltage of a video signal is applied to the gate and the source of the driving transistor, a current is supplied to a light-emitting element. A value of an initial voltage for correction differs in accordance with the voltage of the video signal.

Abstract: A Static Random Access Memory (SRAM) cell includes a first pull-up Fin Field-Effect Transistor (FinFET) and a second pull-up FinFET, and a first pull-down FinFET and a second pull-down FinFET forming cross-latched inverters with the first pull-up FinFET and the second pull-up FinFET. A first pass-gate FinFET is connected to drains of the first pull-up FinFET and the first pull-down FinFET. A second pass-gate FinFET is connected to drains of the second pull-up FinFET and the second pull-down FinFET, wherein the first and the second pass-gate FinFETs are p-type FinFETs. A p-well region is in a center region of the SRAM cell and underlying the first and the second pull-down FinFETs. A first and a second n-well region are on opposite sides of the p-well region.

Abstract: A multi-layer integrated circuit package includes a switched-mode power supply circuit including a plurality of transistors which form part of a main current loop of the switched-mode power supply circuit. The plurality of transistors are arranged in one or more layers of the integrated circuit package. The package further includes a conductive plate arranged in a different layer of the integrated circuit package than the plurality of transistors. The conductive plate is in close enough proximity to at least part of the main current loop so that a current can be electromagnetically induced in the conductive plate responsive to a change in current in the main current loop.

Abstract: An object is to provide a semiconductor device which can suppress characteristic deterioration in each transistor without destabilizing operation. In a non-selection period, a transistor is turned on at regular intervals, so that a power supply potential is supplied to an output terminal of a shift register circuit. A power supply potential is supplied to the output terminal of the shift register circuit through the transistor. Since the transistor is not always on in a non-selection period, a shift of the threshold voltage of the transistor is suppressed. In addition, a power supply potential is supplied to the output terminal of the shift register circuit through the transistor at regular intervals. Therefore, the shift register circuit can suppress noise which is generated in the output terminal.