Insulated Gate Field Effect Transistor Adapted To Function As Load Element For Switching Insulated Gate Field Effect Transistor Patents (Class 257/393)
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Patent number: 7030449Abstract: In a complete CMOS SRAM having a memory cell composed of six MISFETs formed over a substrate, a capacitor element having a stack structure is formed of a lower electrode covering the memory cell, an upper electrode, and a capacitor insulating film (dielectric film) interposed between the lower electrode and the upper electrode. One electrode (the lower electrode) of the capacitor element is connected to one storage node of a flip-flop circuit, and the other electrode (the upper electrode) is connected to the other storage node. As a result, the storage node capacitance of the memory cell of the SRAM is increased to improve the soft error resistance.Type: GrantFiled: September 29, 2004Date of Patent: April 18, 2006Assignee: Renesas Technology Corp.Inventors: Naotaka Hashimoto, Yutaka Hoshino, Shuji Ikeda
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Patent number: 7019369Abstract: In an SRAM, memory cells are each constructed of four NMOS transistors and two PMOS transistors 25 and 26. The four NMOS transistors are each constructed of DTMOS in which the channel region is electrically connected to the gate. In each NMOS transistor, a threshold voltage Vth is lower in an ON stage than in an OFF stage. The threshold voltage Vth in the OFF stage is equivalent to that of an ordinary NMOS transistor in which the channel region is not electrically connected to the gate. Read and write circuits of the SRAM also include MOS transistors formed of DTMOS in which the channel region is electrically connected to the gate.Type: GrantFiled: February 10, 2004Date of Patent: March 28, 2006Assignee: Sharp Kabushiki KaishaInventor: Yuichi Sato
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Patent number: 6992916Abstract: A high resistor SRAM memory cell to reduce soft error rate includes a first inverter having an output as a first memory node, and a second inverter having an output as a second memory node. The second memory node is coupled to an input of the first inverter through a first resistor. The first memory node is coupled to an input of the second inverter through a second resistor. A pair of access transistors are respectively coupled to a pair of bit lines, a split word line and one of the memory nodes. The resistors are prepared by coating a layer of silicide material on a selective portion of the gate structure of the transistors included in the first inverter, and connecting a portion of the gate structure that is substantially void of the silicide material to the drain of the transistors included in the second inverter.Type: GrantFiled: June 13, 2003Date of Patent: January 31, 2006Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Jhon-Jhy Liaw
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Patent number: 6984859Abstract: An access transistor, provided between a storage node in a memory cell and a bit line is formed of a P channel MOS transistor including P type first and second impurity regions formed in an N type well and a gate electrode. Buried interconnection is formed of metal having high melting point such as tungsten and provided stacked on a driver transistor formed on a main surface of a P type well and the access transistor. A polysilicon film forming a P channel TFT as a load element is formed on the buried interconnection, which is planarized, with an interlayer insulating film interposed.Type: GrantFiled: March 17, 2004Date of Patent: January 10, 2006Assignee: Renesas Technology Corp.Inventor: Motoi Ashida
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Patent number: 6975041Abstract: A semiconductor storage device with high soft-error immunity is obtained. A semiconductor storage device has SRAM memory cells. NMOS transistors (Q1, Q4) are driver transistors, NMOS transistors (Q3, Q6) are access transistors, and PMOS transistors (Q2, Q5) are load transistors. An NMOS transistor (Q7) is a transistor for adding a resistance. The NMOS transistor (Q7) has its gate connected to a power supply (1). The NMOS transistor (Q7) has one of its source and drain connected to a storage node (ND1) and the other connected to the gates of the NMOS transistor (Q4) and the PMOS transistor (Q5). The resistance between the source and drain of the NMOS transistor (Q7) can be adjusted with the gate length, the gate width, the source/drain impurity concentration, etc., which is, for example, about several tens of kilohms (k?).Type: GrantFiled: March 31, 2004Date of Patent: December 13, 2005Assignee: Renesas Technology Corp.Inventors: Yuuichi Hirano, Takashi Ipposhi
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Patent number: 6975018Abstract: In a fabrication method of a semiconductor device including a plurality of silicon-based transistors or capacitors, there exist hydrogen at least in a part of a silicon surface in advance, and the hydrogen is removed by exposing the silicon surface to a first inert gas plasma. Thereafter, plasma is generated by a mixed gas of a second inert gas and one or more gaseous molecules, and a silicon compound layer containing at least a part of the elements constituting the gaseous molecules is formed on the surface of the silicon gas.Type: GrantFiled: December 27, 2001Date of Patent: December 13, 2005Inventors: Tadahiro Ohmi, Shigetoshi Sugawa, Masaki Hirayama, Yasuyukil Shirai
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Patent number: 6972450Abstract: A new method to form a SRAM memory cell in an integrated circuit device is achieved. The method comprises providing a bi-stable flip-flop cell having a data storage node and a data bar storage node. A first capacitor is formed coupled to the data bar storage node, and a second capacitor is formed coupled to the data storage node. The first and second capacitors comprise a first conductor layer overlying a second conductor layer with a dielectric layer therebetween. One of the first and second conductor layers is coupled to ground. A new SRAM device is disclosed.Type: GrantFiled: October 7, 2003Date of Patent: December 6, 2005Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Jhon-Jhy Liaw
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Patent number: 6953975Abstract: In an integrated circuit device, there are various optimum gate lengths, thickness of gate oxide films, and threshold voltages according to the characteristics of circuits. In a semiconductor integrated circuit device in which the circuits are integrated on the same substrate, the manufacturing process is complicated in order to set the circuits to the optimum values. As a result, in association with deterioration in the yield and increase in the number of manufacturing days, the manufacturing cost increases. In order to solve the problems, according to the invention, transistors of high and low thresholds are used in a logic circuit, a memory cell uses a transistor of the same high threshold voltage and a low threshold voltage transistor, and an input/output circuit uses a transistor having the same high threshold voltage and the same concentration in a channel, and a thicker gate oxide film.Type: GrantFiled: December 10, 2003Date of Patent: October 11, 2005Assignee: Renesas Technology Corp.Inventors: Koichiro Ishibashi, Kenichi Osada
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Patent number: 6943373Abstract: The invention provides a semiconductor memory device comprising a plurality of word lines, a plurality of bit lines, and a plurality of static memory cells each having a first, second, third, fourth, fifth, and sixth transistors. While each of channels of the first, second, third, and fourth transistors are formed vertical against a substrate of the semiconductor memory device. Each of semiconductor regions forming a source or a drain of the fifth and sixth transistors forms a PN junction against the substrate. According to another aspect of the invention, the SRAM device of the invention has a plurality of SRAM cells, at least one of which is a vertical SRAM cell comprising at least four vertical transistors onto a substrate, and each vertical transistor includes a source, a drain, and a channel therebetween aligning in one aligning line which penetrates into the substrate surface at an angle greater than zero degree.Type: GrantFiled: October 28, 2003Date of Patent: September 13, 2005Assignee: Renesas Technology Corp.Inventors: Norikatsu Takaura, Hideyuki Matsuoka, Riichiro Takemura, Kousuke Okuyama, Masahiro Moniwa, Akio Nishida, Kota Funayama, Tomonori Sekiguchi
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Patent number: 6933578Abstract: A configuration is provided to reduce the difference in characteristics caused between transistors even in the case where the shapes of gate electrodes vary. To do this, a dummy gate contact region disposed on an isolation region between an n-channel type transistor and a p-channel type transistor is provided in a gate electrode in a manner of corresponding to a gate contact region of another gate electrode.Type: GrantFiled: June 10, 2004Date of Patent: August 23, 2005Assignee: Seiko Epson CorporationInventor: Tetsumasa Sato
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Patent number: 6927429Abstract: Well bias circuitry for selectively biasing the voltages of the well areas of an integrated circuit. In one embodiment, the well bias circuitry includes a switching cell located in a row of cells of the integrated circuit for selectively coupling a voltage supply line to a well bias line. The switching cell may include two level shifters, each for providing a voltage to a gate of a coupling transistor to make the coupling transistor non conductive in response to an enable signal. The switching cells may be sequentially coupled such that the coupling transistors of each of the switching cells are not made conductive at the same time so as to reduce inrush current due to changing the well bias from a well bias voltage to a supply voltage. In one example, the switching cells may include delay circuitry for delaying the change in state of the enable signal before being provided to the next switching cell.Type: GrantFiled: February 14, 2003Date of Patent: August 9, 2005Assignee: Freescale Semiconductor, Inc.Inventors: Christopher K. Y. Chun, Der Yi Sheu
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Patent number: 6911702Abstract: A first dielectric layer is formed over a first transistor gate and a second transistor source/drain region. Contact openings are formed in the first dielectric layer to the first transistor gate and to the second transistor source/drain region. A second dielectric layer is formed over the first dielectric layer and to within the contact openings. The second dielectric layer is etched selectively relative to the first dielectric layer to form at least a portion of a local interconnect outline within the second dielectric layer to extend between the first transistor gate and the second transistor source/drain region. The etching removes at least some of the second dielectric layer within the contact openings. Conductive material is formed within the local interconnect outline within the second dielectric layer which electrically connects the first transistor gate with the second transistor source/drain region. Other aspects are disclosed.Type: GrantFiled: November 26, 2002Date of Patent: June 28, 2005Assignee: Micron Technology, Inc.Inventor: Todd R. Abbott
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Patent number: 6909135Abstract: In the semiconductor storage device, a dummy P+ diffusion region which does not contribute to a storage operation is formed in the vicinity of two P+ diffusion regions constituting a storage node. Moreover, a dummy N+ diffusion region which does not contribute to the storage operation is formed in the vicinity of N+ diffusion regions FL210 and FL220 constituting a storage node. Consequently, a part of electrons generated in a P well region PW by irradiation of ? rays or neutron rays can be collected into the dummy N+ diffusion region FL250, and a part of holes generated in an N well region NW by the irradiation of the ? rays or the neutron rays can be collected into the dummy P+ diffusion region FL150.Type: GrantFiled: March 13, 2002Date of Patent: June 21, 2005Assignee: Renesas Technology Corp.Inventors: Koji Nii, Shoji Okuda
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Patent number: 6906962Abstract: A method for predetermining the initial state of the memory cells of a static random access memory such that when the memory is powered up the predetermined initial states are attained. The initial states can be predetermined by modifying one or more physical or operational parameters of the MOSFETS comprising the memory cells.Type: GrantFiled: September 30, 2002Date of Patent: June 14, 2005Assignee: Agere Systems Inc.Inventors: Paul Arthur Layman, Samir Chaudhry, James Gary Norman, J. Ross Thomson
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Patent number: 6900513Abstract: The present invention relates to a semiconductor memory device having a SRAM in which a memory cell comprises a pair of transmission transistors and a flip-flop circuit containing a pair of driver transistors and a pair of load transistors, wherein: a first conductive film interconnection formed from a first conductive film which is set on a semiconductor substrate, constitutes respective gate electrodes of said driver transistors, load transistors and transmission transistors; an inlaid interconnection set in a first insulating film lying on said semiconductor substrate, constitutes one of a pair of local interconnections cross-coupling a pair of input/output terminals in said flip-flop circuit; and a second conductive film interconnection formed from a second conductive film which is set on a second insulating film lying on said first insulating film, constitutes the other one of said pair of local interconnections.Type: GrantFiled: January 15, 2002Date of Patent: May 31, 2005Assignee: NEC Electronics CorporationInventor: Hidetaka Natsume
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Patent number: 6894356Abstract: A static random access memory (SRAM) cell is given increased stability and latch-up immunity by fabricating the PMOS load transistors of the SRAM cell to have a very low drain/source dopant concentration. The drain/source regions of the PMOS load transistors are formed entirely by a P?? blanket implant. The PMOS load transistors are masked during subsequent implant steps, such that the drain/source regions of the PMOS load transistors do not receive additional P-type (or N-type) dopant. The P?? blanket implant results in PMOS load transistors having drain/source regions with dopant concentrations of 1e17 atoms/cm3 or less. The dopant concentration of the drain/source regions of the PMOS load transistors is significantly lower than the dopant concentration of lightly doped drain/source regions in PMOS transistors used in peripheral circuitry.Type: GrantFiled: March 15, 2002Date of Patent: May 17, 2005Assignee: Integrated Device Technology, Inc.Inventor: Jeong Yeol Choi
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Patent number: 6888202Abstract: An integrated circuit is provided comprising a latch circuit including, a first inverter including a first high threshold voltage PMOS transistor and a first high threshold voltage NMOS transistor with a first data node comprising interconnected source/drains (S/D) of the first PMOS and NMOS transistors; a second inverter including a second high threshold voltage PMOS transistor and a second high threshold voltage NMOS transistor with a second data node comprising interconnected source/drains (S/D) of the second PMOS and NMOS transistors; wherein the gates of the first PMOS and first NMOS transistors are coupled to the second data node; wherein the gates of the second PMOS and second NMOS transistors are coupled to the first data node; a first low threshold voltage access transistor including a first S/D coupled to the first data node and to the gate of the second PMOS transistor and to the gate of the second NMOS transistor and including a second S/D coupled to a first data access node and including a gate cType: GrantFiled: March 27, 2003Date of Patent: May 3, 2005Assignee: The Regents of the University of CaliforniaInventors: Sung-Mo Kang, Seung-Moon Yoo
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Patent number: 6881998Abstract: A semiconductor device of the present invention includes a semiconductor substrate including an active region and an isolating region provided so as to enclose the active region; a capacitance insulating film that is provided on the active region and has a boundary portion in contact with the isolating region; an upper electrode provided on the capacitance insulating film so as to be spaced away from the isolating region; an electrode pad provided on the isolating region; a lead conductive film provided over a part of the capacitance insulating film and a part of the isolating region for connecting the upper electrode and the electrode pad; and an interlayer insulating film provided over the substrate.Type: GrantFiled: September 24, 2001Date of Patent: April 19, 2005Assignee: Matsushita Electric Industrial Co., Ltd.Inventor: Shinichi Imai
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Patent number: 6867460Abstract: An electronic device, and SRAM and a method of forming the electronic device and SRAM. The semiconductor device including: a pass gate transistor having a fin body having opposing sidewalls aligned in a first direction and having a first majority carrier mobility and a gate adjacent to both sidewalls of the fin body; a pull down latch transistor having a fin body having opposing sidewalls aligned in a second direction and having a second majority carrier mobility and a gate adjacent to both sidewalls of thc fin body; a pull up latch transistor having a fin body having opposing sidewalls aligned in a third direction and having a third majority carrier mobility and a gate adjacent to both sidewalls of the fin body; and CMOS chevron logic circuits, wherein crystal planes of each fin body and of CMOS transistor of the chevron logic are co-aligned.Type: GrantFiled: November 5, 2003Date of Patent: March 15, 2005Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, Edward J. Nowak
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Patent number: 6864550Abstract: A source electrode Vdd is formed in a region between a field PMOS 1 and a field PMOS 2 as high side switches of a latch circuit. This latch circuit is utilized in the state where a lower side of one of the two high side switches is completely depleted. Field PMOS 1 and field PMOS 2 share a P+-type impurity diffusion region, an N+-type impurity diffusion region and a P+-type impurity diffusion region, which are connected to source electrode Vdd. It is therefore possible to provide a semiconductor device capable of reducing the area thereof in the direction parallel to the main surface of a semiconductor substrate.Type: GrantFiled: August 26, 2003Date of Patent: March 8, 2005Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Tomohide Terashima
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Patent number: 6853072Abstract: Posts are disposed at the surroundings of an FET and a shield metal supported by the posts is placed above the FET to create a void between the FET and the shield metal. Since the separation between the FET and the shield metal is small, the resin does not enter the void. A resin layer cover the shield metal. The shield metal is connected to an electrode pad that receives a DC control signal. Although high frequency signals that are applied to the FET may leak between the source and drain electrodes of the FET through the resin layer covering the FET even when the FET is switched off, the void and the shield metal prevent such signal leakage.Type: GrantFiled: April 16, 2003Date of Patent: February 8, 2005Assignee: Sanyo Electric Co., Ltd.Inventors: Tetsuro Asano, Mikito Sakakibara
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Patent number: 6849905Abstract: An array of transistors includes a plurality of transistors, a plurality of word lines extending in a first direction and a plurality of bit lines extending in a second direction. Each transistor includes a source, a drain, a channel and a localized charge storage dielectric. A first transistor of the plurality of transistors and a second transistor of the plurality of transistors share a common source/drain. A first localized charge storage dielectric of the first transistor does not overlap the common source/drain and a second localized charge storage dielectric of the second transistor overlaps the common source/drain.Type: GrantFiled: December 23, 2002Date of Patent: February 1, 2005Assignee: Matrix Semiconductor, Inc.Inventors: Alper Ilkbahar, Roy Scheuerlein, Andrew J. Walker, Luca Fasoli
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Publication number: 20040245577Abstract: The invention includes SRAM constructions comprising at least one transistor device having an active region extending into a crystalline layer comprising Si/Ge. A majority of the active region within the crystalline layer is within a single crystal of the crystalline layer, and in particular aspects an entirety of the active region within the crystalline layer is within a single crystal of the crystalline layer. The SRAM constructions can be formed in semiconductor on insulator assemblies, and such assemblies can be supported by a diverse range of substrates, including, for example, glass, semiconductor substrates, metal, insulative materials, and plastics. The invention also includes electronic systems comprising SRAM constructions.Type: ApplicationFiled: June 3, 2003Publication date: December 9, 2004Inventor: Arup Bhattacharyya
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Publication number: 20040238899Abstract: An integrated semiconductor memory can include a plurality of subcircuit blocks arranged on nonoverlapping area sections. The subcircuit blocks each have a block supply line and a block ground line, which supply individual switching elements of the subcircuit blocks with a voltage. Each block supply line and block ground line is connected to a chip supply line and a chip ground line, which run outside the area sections of the subcircuit blocks. At least one connection between the chip supply line and the block supply line of at least one subcircuit block or between the chip ground line and the block ground line of at least one subcircuit block can be isolated by a switching device. Furthermore, a method for reducing leakage currents in a semiconductor memory, which, depending on the operating state of the semiconductor memory, isolates or connects individual subcircuit blocks of the semiconductor memory from or to a voltage supply.Type: ApplicationFiled: May 12, 2004Publication date: December 2, 2004Inventors: Helmut Fischer, Jens Egerer
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Publication number: 20040227193Abstract: A circuit for preventing shoot-through in a high side switching transistor coupled in series with a low side switching transistor across a supply voltage, the circuit comprising a voltage reference circuit having an output providing a reference voltage which is negative with respect to the supply voltage provided to the high side switching transistor, the reference voltage being applied to the control electrode of the high side switching transistor when the high side switching transistor is off and the source of the high side switching transistor exceeds the reference voltage and the low side switching transistor is on.Type: ApplicationFiled: December 23, 2003Publication date: November 18, 2004Applicant: International Rectifier CorporationInventors: Chik Yam Lee, Vincent Thiery
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Patent number: 6815777Abstract: A semiconductor device is provided with a memory cell. The semiconductor device includes a first gate-gate electrode layer, a second gate-gate electrode layer, a first drain-drain wiring layer, a second drain-drain wiring layer, a first drain-gate wiring layer and a second drain-gate wiring layer. The first drain-gate wiring layer and an upper layer and a lower layer of the second drain-gate wiring layer are located in different layers, respectively.Type: GrantFiled: March 5, 2002Date of Patent: November 9, 2004Assignee: Seiko Epson CorporationInventors: Junichi Karasawa, Kunio Watanabe
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Patent number: 6812532Abstract: To provide an address programming device free from laser-blowing, a first, thin gate oxide film is formed on a semiconductor substrate, a first gate electrode is formed thereon, a second, thick gate oxide film is formed thereon, and a second gate electrode is formed thereon. Such a device is connected in series to a MOS transistor of the opposite polarity and such arrangements are cross-connected together to form a latch circuit. Data to be programmed and the inverted version thereof are written in the programming device. Programmed information is read depending on the change in weight of the latch when the power supply is turned on.Type: GrantFiled: July 30, 2002Date of Patent: November 2, 2004Assignee: Renesas Technology Corp.Inventors: Tsukasa Ooishi, Hiroki Shimano, Shigeki Tomishima
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Publication number: 20040212018Abstract: First and second MOS transistors are formed in first and second active areas, respectively, and their gates are configured from a first gate electrode in the first and second transistors. Third and fourth MOS transistors are formed in the second and a third active areas, respectively, and their gates are configured from second and third gate electrodes in the third and fourth transistors. Fifth and sixth MOS transistors are formed in a fourth active area, and their gates are configured from the third and fourth gate electrodes in the fifth and sixth transistors. An end portion of the first gate electrode projecting from the first active area is obliquely arranged relative to a gate width direction of the first transistor, and an end portion of the third gate electrode projecting from the third active area is obliquely arranged relative to a gate width direction of the fourth transistor.Type: ApplicationFiled: September 12, 2003Publication date: October 28, 2004Inventor: Tomoaki Shino
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Patent number: 6809387Abstract: A power switching device comprises a semiconductor substrate; a plurality of cells, each of which switches a current from a power supply to a load on the basis of a potential at a gate electrode, said cells being arranged on said semiconductor substrate to form a cell array; and a plurality of drivers connected to the gate electrode, said plurality of drivers being distributively arranged in said cell array or being distributively arranged peripheral said cell array.Type: GrantFiled: April 10, 2003Date of Patent: October 26, 2004Assignee: Kabushiki Kaisha ToshibaInventor: Mitsuhiro Kameda
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Publication number: 20040207028Abstract: The present invention relates to a structure of a static random access memory (SRAM) having an asymmetric silicide layer and a method for manufacturing the same.Type: ApplicationFiled: May 12, 2004Publication date: October 21, 2004Applicant: HYNIX SEMICONDUCTOR INC.Inventor: Byung-ho Min
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Publication number: 20040207027Abstract: A semiconductor switching device (10) is formed on a semiconductor substrate (12) having a trench (44) formed on one of its surfaces (42). A control electrode (32) activates a wall of the trench to form a conduction channel (36). A first conduction electrode (40) is disposed on the semiconductor substrate to have a first doped region (34) for receiving a current and a second doped region (24) for routing the current to the conduction channel.Type: ApplicationFiled: May 6, 2004Publication date: October 21, 2004Inventors: Yujing Wu, Jeffrey Pearse
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Patent number: 6800909Abstract: There are provided a gate electrode formed on a semiconductor substrate of one conductivity type via a gate insulating film, ion-implantation controlling films formed on both side surfaces of the gate electrode and having a space between the gate electrode and an upper surface of the semiconductor substrate, first and second impurity diffusion regions of opposite conductivity type formed in the semiconductor substrate on both sides of the gate electrode and serving as source/drain, a channel region of one conductivity type formed below the gate electrode between the first and second impurity diffusion regions of opposite conductivity type, and pocket regions of one conductivity type connected to end portions of the impurity diffusion regions of opposite conductivity type in the semiconductor substrate below the gate electrode and having an impurity concentration of one conductivity type higher than the channel region.Type: GrantFiled: October 2, 2002Date of Patent: October 5, 2004Assignee: Fujitsu LimitedInventors: Koichi Sugiyama, Yoshihiro Takao, Shinji Sugatani, Daisuke Matsunaga, Takayuki Wada, Tohru Fujita, Hikaru Kokura
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Publication number: 20040164360Abstract: An object is to improve soft error resistance of the memory cell of an SRAM without increasing its chip size. In deep through-holes formed by perforating a silicon oxide film, a silicon nitride film and a silicon oxide film, a capacitor element having a TiN film as a lower electrode, a silicon nitride film as an insulator and a TiN film as an upper electrode. This capacitor element is connected between a storage node and a supply voltage line, between a storage node and a reference voltage line, or between storage nodes of the memory cell of the SRAM.Type: ApplicationFiled: February 20, 2004Publication date: August 26, 2004Inventors: Akio Nishida, Hiraku Chakihara, Koichi Toba
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Publication number: 20040155303Abstract: A power switching device comprises a semiconductor substrate; a plurality of cells, each of which switches a current from a power supply to a load on the basis of a potential at a gate electrode, said cells being arranged on said semiconductor substrate to form a cell array; and a plurality of drivers connected to the gate electrode, said plurality of drivers being distributively arranged in said cell array or being distributively arranged peripheral said cell array.Type: ApplicationFiled: April 10, 2003Publication date: August 12, 2004Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Mitsuhiro Kameda
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Patent number: 6765272Abstract: A semiconductor device has a gate electrode which is formed on a first conductive-type well set in semiconductor substrate, with a gate insulating film lying therebetween; a LDD structure in which, on either side of said gate electrode, there are formed a LDD region and a source/drain region; an interlayer insulating film to cover said gate electrode as well as said LDD regions; and contact sections. A contact section connecting to one side of the source/drain regions having a potential equal to a potential of said first conductive-type well is disposed so as to come into contact with the LDD region lying thereunder; and a contact section connecting to the other side of the source/drain region having a potential different from the potential of said first conductive-type well is disposed so as not to come into contact with the LDD region lying thereunder.Type: GrantFiled: April 25, 2002Date of Patent: July 20, 2004Assignee: NEC Electronics CorporationInventor: Hidetaka Natsume
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Patent number: 6756692Abstract: A semiconductor storage device with high soft-error immunity is obtained. A semiconductor storage device has SRAM memory cells. NMOS transistors are driver transistors, NMOS transistors are access transistors, and PMOS transistors are load transistors. An NMOS transistor is a transistor for adding a resistance. The NMOS transistor has its gate connected to a power supply. The NMOS transistor has one of its source and drain connected to a storage node and the other connected to the gates of the NMOS transistor and the PMOS transistor. The resistance between the source and drain of the NMOS transistor can be adjusted with the gate length, the gate width, the source/drain impurity concentration, etc., which is, for example, about several tens of kilohms (k &OHgr;).Type: GrantFiled: July 25, 2002Date of Patent: June 29, 2004Assignee: Renesas Technology Corp.Inventors: Yuuichi Hirano, Takashi Ipposhi
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Publication number: 20040113207Abstract: A method of forming an SRAM cell device includes the following steps. Form pass gate FET transistors and form a pair of vertical pull-down FET transistors with a first common body and a first common source in a silicon layer patterned into parallel islands formed on a planar insulator. Etch down through upper diffusions between cross-coupled inverter FET transistors to form pull-down isolation spaces bisecting the upper strata of pull-up and pull-down drain regions of the pair of vertical pull-down FET transistors, with the isolation spaces reaching down to the common body strata. Form a pair of vertical pull-up FET transistors with a second common body and a second common drain. Then, connect the FET transistors to form an SRAM cell.Type: ApplicationFiled: December 11, 2002Publication date: June 17, 2004Applicant: International Business Machines CorporationInventors: Louis L. Hsu, Oleg Gluschenkov, Jack A. Mandelman, Carl J. Radens
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Patent number: 6747322Abstract: A semiconductor device having a memory cell including first and second load transistors, first and second driver transistors, and first and second transfer transistors. The semiconductor device includes first and second gate—gate electrode layers, first and second drain—drain wiring layers, and first and second drain-gate wiring layers. The first drain-gate wiring layer and the second drain-gate wiring layer are located in different layers. The first drain-gate wiring layer is located below the first drain—drain wiring layer, and the second drain-gate wiring layer is located in above the first drain—drain wiring layer. This structure provides a semiconductor device that has reduced cell area. The invention also provides a memory system and electronic apparatus that include the above semiconductor device.Type: GrantFiled: May 21, 2002Date of Patent: June 8, 2004Assignee: Seiko Epson CorporationInventors: Junichi Karasawa, Kunio Watanabe
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Patent number: 6747324Abstract: Disclosed is a semiconductor integrated circuit device (e.g., an SRAM) having memory cells each of a flip-flop circuit constituted by a pair of drive MISFETS and a pair of load MISFETs, the MISFETs being cross-connected by a pair of local wiring lines, and having transfer MISFETs, wherein gate electrodes of all of the MISFETs are provided in a first level conductive layer, and the pair of local wiring lines are provided respectively in second and third level conductive layers. The local wiring lines can overlap and have a dielectric therebetween so as to form a capacitance element, to increase alpha particle soft error resistance. Moreover, by providing the pair of local wiring lines respectively in different levels, integration of the device can be increased.Type: GrantFiled: June 16, 2003Date of Patent: June 8, 2004Assignee: Hitachi, Ltd.Inventors: Kenichi Kikushima, Fumio Ootsuka, Kazushige Sato
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Patent number: 6747323Abstract: A static semiconductor memory device capable of preventing soft errors is provided. The static semiconductor memory device includes: a silicon substrate having a p-type well region; a storage node; an n-type-low-concentration impurity region and a high-concentration impurity region formed in the surface of p-type well region and connected to storage node; and a p-type impurity region formed to have contact with high-concentration impurity region.Type: GrantFiled: December 30, 2002Date of Patent: June 8, 2004Assignee: Renesas Technology Corp.Inventor: Shigeki Komori
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Patent number: 6744082Abstract: Systems and methods are provided for static pass transistor logic having transistors with multiple vertical gates. The multiple vertical gates are edge defined such that only a single transistor is required for multiple logic inputs. Thus a minimal surface area is required for each logic input. The novel static pass transistor of the present invention includes a transistor which has a horizontal depletion mode channel region between a single source and drain region. A number of vertical gates are located above different portions of the depletion mode channel region. At least one of the vertical gates is located above a first portion of the depletion mode channel region and is separated from the channel region by a first thickness insulator material. At least one of the vertical gates is located above a second portion of the channel region and is separated from the channel region by a second thickness insulator material.Type: GrantFiled: May 30, 2000Date of Patent: June 1, 2004Assignee: Micron Technology, Inc.Inventors: Leonard Forbes, Kie Y. Ahn
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Patent number: 6737712Abstract: In a complete CMOS SRAM having a memory cell composed of six MISFETs formed over a substrate, a capacitor element having a stack structure is formed of a lower electrode covering the memory cell, an upper electrode, and a capacitor insulating film (dielectric film) interposed between the lower electrode and the upper electrode. One electrode (the lower electrode) of the capacitor element is connected to one storage node of a flip-flop circuit, and the other electrode (the upper electrode) is connected to the other storage node. As a result, the storage node capacitance of the memory cell of the SRAM is increased to improve the soft error resistance.Type: GrantFiled: October 15, 2002Date of Patent: May 18, 2004Assignee: Hitachi, Ltd.Inventors: Naotaka Hashimoto, Yutaka Hoshino, Shuji Ikeda
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Patent number: 6737675Abstract: A semiconductor device comprises two transistors where a gate electrode of one transistor and source or drain of another transistor are located in the same rail. A monolithic three dimensional array contains a plurality of such devices. The transistors in different levels of the array preferably have a different orientation.Type: GrantFiled: June 27, 2002Date of Patent: May 18, 2004Assignee: Matrix Semiconductor, Inc.Inventors: Kedar Patel, Alper Ilkbahar, Roy Scheuerlein, Andrew J. Walker
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Patent number: 6734509Abstract: A semiconductor integrated circuit device includes a silicon substrate having a first region and a second region identical in conductivity type to the first region and having a lower dopant concentration than the first region, a second MOS transistor on a main surface of the second region as a radio frequency switch circuit switching on and off input and output of a radio frequency signal, and a first MOS transistor on a main surface of the first region in a radio frequency circuit other than the radio frequency switch circuit. A high performance, highly reliable semiconductor integrated circuit with an RE switch circuit provided on a silicon substrate as a system on a chip.Type: GrantFiled: October 21, 2002Date of Patent: May 11, 2004Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Takahiro Ohnakado, Akihiko Furukawa
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Patent number: 6730974Abstract: Semiconductor devices are provided that include a memory cell having load transistors, driver transistors, and transfer transistors. The semiconductor device has a first element-forming region that can be provided in, for example, a p-well region. The first element-forming region can include includes a first active region, a second active region, a third active region, a fourth active region and a fifth active region. The third active region, the fourth active region and the fifth active region can be provided between the first active region and the second active region. The first active region and the second active region can be continuous with the third active region, the fourth active region and the fifth active region, respectively. Thus, semiconductor devices can be provided having element-forming regions that can be readily formed. Memory systems and electronic equipment that include such semiconductor devices can also be provided.Type: GrantFiled: May 16, 2002Date of Patent: May 4, 2004Assignee: Seiko Epson CorporationInventors: Junichi Karasawa, Kunio Watanabe
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Patent number: 6720628Abstract: A semiconductor device is provided with a memory cell. The semiconductor device includes a first gate—gate electrode layer, a second gate—gate electrode layer, a first drain—drain wiring layer, a second drain—drain wiring layer, a first drain-gate wiring layer and second drain-gate wiring layers. The first drain-gate wiring layer and an upper layer and a lower layer of the second drain-gate wiring layer are located in different layers, respectively. The width of the first gate—gate electrode layer in the first load transistor is larger than the width of the first gate—gate electrode layer in the first driver transistor.Type: GrantFiled: February 6, 2002Date of Patent: April 13, 2004Assignee: Seiko Epson CorporationInventors: Junichi Karasawa, Kunio Watanabe
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Patent number: 6717223Abstract: N well contact area 13 is integrally formed with second diffused area 12 within the upper parts of a N well and a P well, and P well contact area 14 is integrally formed with first diffused area 11 in the upper parts of the P well and the N well.Type: GrantFiled: August 5, 2002Date of Patent: April 6, 2004Assignee: Renesas Technology Corp.Inventors: Koji Nii, Yoshiki Tsujihashi, Hisashi Matsumoto
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Patent number: 6713345Abstract: A semiconductor memory device includes a trench type SRAM(Static Random Access Memory) cell having a higher integration than a stack type SRAM. The SRAM cell memory device is provided with a trench formed in a semiconductor substrate and having four side walls therein, wherein a source and drain region of a drive transistor is formed in two of the four side walls, respectively, a pair of active layers respectively having a source and drain regions of a first load transistor is formed on the substrate adjacent to the side walls, and a gate electrode common to the load transistor is formed on a gate oxide film, whereby the gate electrode of the access transistor is vertically formed toward a direction vertical to the semiconductor substrate instead of being formed on the substrate for thereby decreasing an area to be occupied by transistor.Type: GrantFiled: March 19, 2003Date of Patent: March 30, 2004Assignee: Hyundai Electronics Industries Co., Ltd.Inventor: Seen-Suk Kang
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Publication number: 20040056318Abstract: A non-volatile memory device that has an increased density of storage elements formed thereon. A non-volatile memory device includes a substrate supporting an array of field effect transistor devices. A plate is movable with respect to the substrate supporting an array of insulated charge storing elements each having gate-forming metal plates adjacent thereto. There is also means for moving the plate with respect to the substrate such that, in use, the plate can be moved to position different charge storing elements over one of the array of field effect transistors so that each field effect transistor is able to determine the charge stored on more than one element. A corresponding magnetic effect device is also provided.Type: ApplicationFiled: July 16, 2003Publication date: March 25, 2004Inventor: Charles Gordon Smith
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Patent number: RE38545Abstract: A semiconductor memory device having a plurality of memory cells each comprising two CMOS inverters cross-coupled to each other and arranged at intersections between a plurality of word lines extending in a column direction and a plurality of complementary data line pairs extending in a row direction; wherein p-channel type load MISFETs of the memory cells arranged in the column direction are formed on the main surface of an n-type well region in the direction in which the word lines extend, the source regions of the p-channel type load MISFETs of the memory cells arranged in the column direction are electrically connected to the n-type well region through conductor layers, and each of the conductor layer is formed independently of the memory cells arranged in the column direction.Type: GrantFiled: August 8, 2000Date of Patent: July 6, 2004Assignee: Renesas Technology CorporationInventors: Toshiro Hiramoto, Nobuo Tamba, Motoki Kasai