With Edge Protection, E.g., Doped Guard Ring Or Mesa Structure Patents (Class 257/452)
  • Patent number: 11195872
    Abstract: A semiconductor image sensor includes a plurality of pixels. Each pixel of the sensor includes a semiconductor substrate having opposite front and back sides and laterally delimited by a first insulating wall including a first conductive core insulated from the substrate, electron-hole pairs being capable of forming in the substrate due to a back-side illumination. A circuit is configured to maintain, during a first phase in a first operating mode, the first conductive core at a first potential and to maintain, during at least a portion of the first phase in a second operating mode, the first conductive core at a second potential different from the first potential.
    Type: Grant
    Filed: August 21, 2019
    Date of Patent: December 7, 2021
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Francois Roy, Stephane Hulot, Andrej Suler, Nicolas Virollet
  • Patent number: 11177374
    Abstract: A heterojunction bipolar transistor includes an emitter layer on a base layer on a collector layer on an upper sub-collector layer over a bottom sub-collector layer, a first dielectric film over the bottom sub-collector layer, the base layer and the emitter layer, a base electrode on the first dielectric film, electrically connected to the base layer through at least one first via hole in the first dielectric film, a second dielectric film on the first dielectric film and the base electrode, and a conductive layer on the second dielectric film, with conductive layer electrically connected to base electrode through a second via hole disposed in the second dielectric film, first dielectric film between the base electrode and first sidewall of a stack including the base layer and the collector layer, and second via hole laterally separated from the base layer.
    Type: Grant
    Filed: August 11, 2020
    Date of Patent: November 16, 2021
    Assignee: WIN SEMICONDUCTORS CORP.
    Inventors: She-Hsin Hsiao, Rong-Hao Syu, Shu-Hsiao Tsai
  • Patent number: 11037977
    Abstract: Various embodiments of the present technology may comprise methods and apparatus for an image sensor capable of simultaneous integration of electrons and holes. According to an exemplary embodiment, the image sensor comprises a backside-illuminated hybrid bonded stacked chip image senor comprising a pixel circuit array, and each pixel circuit comprising a charge storage capacitor oriented in a vertical direction in a deep trench isolation region. Both the electrons and holes are integrated (collected) using a global shutter operation, and the charge storage capacitor is used for storing a signal generated by the holes.
    Type: Grant
    Filed: August 3, 2018
    Date of Patent: June 15, 2021
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Jaroslav Hynecek
  • Patent number: 10868054
    Abstract: A photoelectric conversion substrate, a method for manufacturing the photoelectric conversion substrate, a display panel and a display device are provided. The photoelectric conversion substrate includes a TFT and a photosensitive element on a base substrate, wherein the photosensitive element includes a light-transmissible electrode, a signal output electrode, and a photosensitive layer between the light-transmissible electrode and the signal output electrode. The light-transmissible electrode allows predetermined light rays to pass therethrough and to be incident onto the photosensitive layer, and the signal output electrode is connected to the TFT, and the photosensitive layer is an uneven layer.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: December 15, 2020
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Yunke Qin, Xue Dong, Zhifu Li, Haisheng Wang, Chunwei Wu, Yingming Liu, Yanan Jia, Lijun Zhao
  • Patent number: 10388807
    Abstract: An example device in accordance with an aspect of the present disclosure includes a photodetector disposed on a substrate, and a mirror disposed on the photodetector. The mirror is to reflect light back into the photodetector. The mirror includes a reflective layer and a second layer. The second layer is disposed between the reflective layer and the photodetector.
    Type: Grant
    Filed: April 30, 2014
    Date of Patent: August 20, 2019
    Assignee: Hewlett Packard Enterprise Development LP
    Inventors: Sagi Varghese Mathai, Michael Renne Ty Tan
  • Patent number: 9811712
    Abstract: Provided is a intensified sensor array for static electricity having a structure in which a static electricity preventing wiring covers an upper surface of a pixel circuit to cut off static electricity, so when static electricity of a high voltage is momentarily generated, the static electricity induced through the static electricity preventing wiring is discharged, thereby being capable of effectively protecting the pixel circuit of a lower part from the static electricity.
    Type: Grant
    Filed: June 22, 2012
    Date of Patent: November 7, 2017
    Assignee: SILICON DISPLAY TECHNOLOGY
    Inventors: Moon Hyo Kang, Ji Ho Hur, Hyo Jun Kim, Bong Yeob Hong
  • Patent number: 9806072
    Abstract: This application is directed to a low cost IC solution that provides Super CMOS microelectronics macros. Hereinafter, SCMOS refers to Super CMOS and Schottky CMOS. SCMOS device solutions includes a niche circuit element, such as complementary low threshold Schottky barrier diode pairs (SBD) made by selected metal barrier contacts (Co, Ti, Ni or other metal atoms or compounds) to P- and N- Si beds of the CMOS transistors. A DTL like new circuit topology and designed wide contents of broad product libraries, which used the integrated SBD and transistors (BJT, CMOS, and Flash versions) as basic components.
    Type: Grant
    Filed: November 21, 2016
    Date of Patent: October 31, 2017
    Assignee: SCHOTTKY LSI, INC.
    Inventor: Augustine Wei-Chun Chang
  • Patent number: 9515106
    Abstract: A photosensor pixel includes a thin film transistor (TFT) and a metal-insulator-semiconductor (MIS) photodetector. The TFT includes a gate, a gate insulator layer, a semiconductor layer forming a channel region, a drain, and a source. The MIS photodetector includes a transparent conductor layer, a semiconductor layer including a photosensitive semiconductor, and an insulator layer between the transparent conductor layer and the semiconductor layer. The semiconductor layer of the MIS photodetector is connected to the source or the drain of the TFT, and the thickness of the insulator layer of the MIS photodetector is less than the thickness of the gate insulator layer of the TFT.
    Type: Grant
    Filed: November 10, 2014
    Date of Patent: December 6, 2016
    Assignee: PerkinElmer Holdings, Inc.
    Inventor: Farhad Taghibakhsh
  • Patent number: 9484366
    Abstract: A photodiode array has a plurality of photodetector channels formed on an n-type substrate having an n-type semiconductor layer, with a light to be detected being incident to the photodetector channels. The array comprises: a p?-type semiconductor layer on the n-type semiconductor layer of the substrate; resistors is provided to each of the photodetector channels and is connected to a signal conductor at one end thereof; and an n-type separating part between the plurality of photodetector channels. The p?-type semiconductor layer forms a pn junction at the interface between the substrate, and comprises a plurality of multiplication regions for avalanche multiplication of carriers produced by the incidence of the light to be detected so that each of the multiplication regions corresponds to each of the photodetector channels.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: November 1, 2016
    Assignee: HAMAMATSU PHONOTICS K.K.
    Inventors: Kazuhisa Yamamura, Kenichi Sato
  • Patent number: 9423447
    Abstract: A method and apparatus for extracting the contents (39) of voids (13) and/or pores present in a semiconductor device to obtain information indicative of the nature of the voids and/or pores, e.g. to assist with metrology measurements. The method includes heating the semiconductor wafer to expel the contents of the voids and/or pores, collecting the expelled material (41) in a collector, and measuring a consequential change in mass of the semiconductor wafer (29) and/or the collector (37), to extract information indicative of the nature of the voids. This information may include information relating to the distribution of the voids and/or pores, and/or the sizes of the voids and/or pores, and/or the chemical contents of the voids and/or pores. The collector may include a condenser having a temperature-controlled surface (e.g. in thermal communication with a refrigeration unit) for condensing the expelled material.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: August 23, 2016
    Assignee: METRYX LIMITED
    Inventor: Adrian Kiermasz
  • Patent number: 8928120
    Abstract: Among other things, one or more wafer edge protection structures and techniques for forming such wafer edge protection structures are provided. A substrate of a semiconductor wafer comprises an edge, such as a beveled wafer edge portion, that is susceptible to Epi growth which results in undesirable particle contamination of the semiconductor wafer. Accordingly, a wafer edge protection structure is formed over the beveled wafer edge portion. The wafer edge protection structure comprises an Epi growth resistant material, such as an amorphous material, a non-crystalline material, oxide, or other material. In this way, the wafer edge protection structure mitigates Epi growth on the beveled wafer edge portion, where the Epi growth increases a likelihood of particle contamination from cracking or peeling of an Epi film resulting from the Epi growth. The wafer edge protection structure thus mitigates at least some contamination of the wafer.
    Type: Grant
    Filed: June 28, 2013
    Date of Patent: January 6, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Ming Chyi Liu, Sheng-de Liu, Chi-Ming Chen, Yuan-Tai Tseng, Chung-Yen Chou, Chia-Shiung Tsai
  • Patent number: 8841683
    Abstract: A semiconductor rectifier device includes a semiconductor substrate of a first conductive type of a wide gap semiconductor; a semiconductor layer of the first conductive type of the wide gap semiconductor formed on an upper surface of the semiconductor substrate, wherein an impurity concentration of the semiconductor layer is between 1E+14 atoms/cm3 and 5E+16 atoms/cm3 inclusive, and a thickness thereof is 8 ?m or more; a first semiconductor region of the first conductive type of the wide gap semiconductor formed at the semiconductor layer surface; a plurality of second semiconductor regions of a second conductive type of the wide gap semiconductor formed as sandwiched by the first semiconductor regions, wherein a width of each of the second semiconductor regions is 15 ?m or more; a first electrode formed on the first and second semiconductor regions; and a second electrode formed on a lower surface of the semiconductor substrate.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: September 23, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Makoto Mizukami
  • Patent number: 8836131
    Abstract: A semiconductor module is disclosed, including a substrate and at least one semiconductor component in bottom contact with the substrate. The semiconductor component including a main current branch sandwiched between the bottom and top of the semiconductor component. The side edges of a barrier layer zone coincide with the side edge portions of the semiconductor component between the top and the bottom. The space above the substrate and to the side of the semiconductor component is packed with an insulating compound at least up to the level of the top of the semiconductor component. Topping the semiconductor component and parallel thereto is a patterned or unpatterned metallization connected to a contact pad on the top of the semiconductor component.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: September 16, 2014
    Assignee: Infineon Technologies AG
    Inventors: Peter Kanschat, Indrajit Paul
  • Patent number: 8772911
    Abstract: A semiconductor diode has a first semiconductor layer (102) of a first conductivity type and a second semiconductor layer of a second conductivity type having a doping. The second semiconductor layer has a vertical electrical via region (106) which is connected to the first semiconductor layer and in which the doping is modified in such a way that the electrical via region (106) has the first conductivity type. A method for producing such a semiconductor diode is described.
    Type: Grant
    Filed: February 10, 2011
    Date of Patent: July 8, 2014
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Tony Albrecht, Markus Maute, Martin Reufer, Heribert Zull
  • Patent number: 8759935
    Abstract: A power semiconductor device includes an active device region disposed in a semiconductor substrate, an edge termination region disposed in the semiconductor substrate between the active device region and a lateral edge of the semiconductor substrate and a trench disposed in the edge termination region which extends from a first surface of the semiconductor substrate toward a second opposing surface of the semiconductor substrate. The trench has an inner sidewall, an outer sidewall and a bottom. The inner sidewall is spaced further from the lateral edge of the semiconductor substrate than the outer sidewall, and an upper portion of the outer sidewall is doped opposite as the inner sidewall and bottom of the trench to increase the blocking voltage capacity. Other structures can be provided which yield a high blocking voltage capacity such as a second trench or a region of chalcogen dopant atoms disposed in the edge termination region.
    Type: Grant
    Filed: June 3, 2011
    Date of Patent: June 24, 2014
    Assignee: Infineon Technologies Austria AG
    Inventor: Gerhard Schmidt
  • Patent number: 8710590
    Abstract: In a method for producing an electronic component, a substrate is doped by introducing doping atoms. In the doped substrate, at least one connection region of the electronic component is formed by doping with doping atoms. Furthermore, at least one additional doped region is formed at least below the at least one connection region by doping with doping atoms. Furthermore, at least one well region is formed in the substrate by doping with doping atoms in such a way that the well region doping is blocked at least below the at least one additional doped region.
    Type: Grant
    Filed: June 16, 2006
    Date of Patent: April 29, 2014
    Assignee: Infineon Technologies AG
    Inventors: Philipp Riess, Henning Feick, Martin Wendel
  • Patent number: 8686508
    Abstract: Structures and methods are provided for nanosecond electrical pulse anneal processes. The method of forming an electrostatic discharge (ESD) N+/P+ structure includes forming an N+ diffusion on a substrate and a P+ diffusion on the substrate. The P+ diffusion is in electrical contact with the N+ diffusion. The method further includes forming a device between the N+ diffusion and the P+ diffusion. A method of annealing a structure or material includes applying an electrical pulse across an electrostatic discharge (ESD) N+/P+ structure for a plurality of nanoseconds.
    Type: Grant
    Filed: September 3, 2009
    Date of Patent: April 1, 2014
    Assignee: International Business Machines Corporation
    Inventors: Michel J. Abou-Khalil, Robert J. Gauthier, Jr., Tom C. Lee, Junjun Li, Souvick Mitra, Christopher S. Putnam, Robert Robison
  • Patent number: 8633543
    Abstract: An electro-static discharge protection circuit includes: a PNPN junction, a P-type side of the PNPN junction being coupled to a terminal, an N-type side of the PNPN junction being coupled to ground; and a P-type metal oxide semiconductor transistor, a source and a gate of the P-type metal oxide semiconductor transistor being coupled to an N-type side of a PN junction whose P-type side coupled to the ground, and a drain of the P-type metal oxide semiconductor transistor being coupled to the terminal.
    Type: Grant
    Filed: March 2, 2011
    Date of Patent: January 21, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Kazutoshi Ohta, Kenji Hashimoto
  • Patent number: 8513761
    Abstract: A backside illumination semiconductor image sensor, wherein each photodetection cell includes a semiconductor body of a first conductivity type of a first doping level delimited by an insulation wall, electron-hole pairs being capable in said body after a backside illumination; on the front surface side of said body, a ring-shaped well of the second conductivity type, this well delimiting a substantially central region having its upper portion of the first conductivity type of a second doping level greater than the first doping level; and means for controlling the transfer of charge carriers from said body to said upper portion.
    Type: Grant
    Filed: February 1, 2010
    Date of Patent: August 20, 2013
    Assignees: STMicroelectronics (Grenoble) SAS, STMicroelectronics (Crolles 2) SAS
    Inventors: François Roy, Pierrick Descure
  • Patent number: 8471353
    Abstract: A mesa photodiode which includes a mesa, the side wall of the mesa (a light-receiving region mesa) and at least a shoulder portion of the mesa in an upper face of the mesa are continuously covered with a semiconductor layer of a first conductivity type, a second conductivity type, a semi-insulating type, or an undoped type (an undoped InP layer, for example) that is grown on the side wall and the upper face of the mesa. In the semiconductor layer, a layer thickness D1 of a portion covering the side wall of the mesa is equal to or greater than 850 nm.
    Type: Grant
    Filed: June 8, 2010
    Date of Patent: June 25, 2013
    Assignee: Renesas Electronics Corporation
    Inventors: Tomoaki Koi, Isao Watanabe, Takashi Matsumoto
  • Patent number: 8436442
    Abstract: The present invention is to provide an electromagnetic wave detecting element that can prevent a decrease in light utilization efficiency at sensor portions. The sensor portions are provided so as to correspond to respective intersection portions of scan lines and signal lines, and have semiconductor layer that generate charges due to electromagnetic waves being irradiated, and at whose electromagnetic wave irradiation surface sides upper electrodes are formed, and at whose electromagnetic wave non-irradiation surface sides lower electrodes are formed. Bias voltage is supplied to the respective upper electrodes via respective contact holes by a common electrode line that is formed further toward an electromagnetic wave downstream side than the semiconductor layer.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: May 7, 2013
    Assignee: FUJIFILM Corporation
    Inventor: Yoshihiro Okada
  • Patent number: 8426939
    Abstract: The present invention provides a semiconductor device including: a base substrate; a first semiconductor layer which is disposed on the base substrate and has a front surface and a rear surface opposite to the front surface; first ohmic electrodes disposed on the front surface of the first semiconductor layer; a second ohmic electrode disposed on the rear surface of the first semiconductor layer; a second semiconductor layer interposed between the first semiconductor layer and the first ohmic electrodes; and a Schottky electrode part which covers the first ohmic electrodes on the front surface of the first semiconductor layer.
    Type: Grant
    Filed: January 8, 2010
    Date of Patent: April 23, 2013
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Woo Chul Jeon, Jung Hee Lee, Young Hwan Park, Ki Yeol Park
  • Patent number: 8373245
    Abstract: Disclosed is a semiconductor device including: a base substrate; a semiconductor layer disposed on the base substrate; an ohmic electrode part which has ohmic electrode lines disposed in a first direction, on the semiconductor layer; and a Schottky electrode part which is disposed to be spaced apart from the ohmic electrode lines on the semiconductor layer and includes Schottky electrode lines disposed in the first direction, wherein the Schottky electrode lines and the ohmic electrode lines are alternately disposed in parallel, and the ohmic electrode part further includes first ohmic electrodes covered by the Schottky electrode lines on the semiconductor layer.
    Type: Grant
    Filed: January 8, 2010
    Date of Patent: February 12, 2013
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Woo Chul Jeon, Jung Hee Lee, Young Hwan Park, Ki Yeol Park
  • Patent number: 8344398
    Abstract: A method of making a diode begins by depositing an AlxGa1-xN nucleation layer on a SiC substrate, then depositing an n+ GaN buffer layer, an n? GaN layer, an AlxGa1-xN barrier layer, and an SiO2 dielectric layer. A portion of the dielectric layer is removed and a Schottky metal deposited in the void. The dielectric layer is affixed to the support layer with a metal bonding layer using an Au—Sn utectic wafer bonding process, the substrate is removed using reactive ion etching to expose the n+ layer, selected portions of the n+, n?, and barrier layers are removed to form a mesa diode structure on the dielectric layer over the Schottky metal, and an ohmic contact is deposited on the n+ layer.
    Type: Grant
    Filed: October 15, 2010
    Date of Patent: January 1, 2013
    Assignee: Cree, Inc.
    Inventors: Primit Parikh, Sten Heikman
  • Patent number: 8314469
    Abstract: An image sensor structure and a method for making the image sensor structure, for avoiding or mitigating lens shading effect. The image sensor structure includes a substrate, a sensor array disposed at the surface of the substrate, a dielectric layer covering the sensor array, wherein the dielectric layer includes a top surface having a dishing structure, an under layer filled into the dishing structure and having a refraction index greater than that of the dielectric layer, a filter array disposed on the under layer corresponding to the sensor array, and a microlens array disposed above the filter array. A top layer may be additionally disposed to cover the filter array and the microlens array is disposed on the top layer.
    Type: Grant
    Filed: September 4, 2009
    Date of Patent: November 20, 2012
    Assignee: United Microelectronics Corp.
    Inventor: Cheng-Hung Yu
  • Patent number: 8274080
    Abstract: A semiconductor wafer includes semiconductor chip areas on a semiconductor substrate, the semiconductor chip areas having thereon semiconductor circuit patterns and inner guard ring patterns surrounding the semiconductor circuit patterns; and scribe lanes on the semiconductor substrate between the semiconductor chip areas, the scribe lanes having thereon outer guard ring patterns surrounding the inner guard ring patterns and a process monitoring pattern between the outer guard ring patterns, the outer guard ring patterns and the process monitoring pattern being merged with each other.
    Type: Grant
    Filed: October 15, 2009
    Date of Patent: September 25, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Dong-Hyun Han
  • Patent number: 8212323
    Abstract: A seal ring structure for an integrated circuit includes a seal ring being disposed along a periphery of the integrated circuit and being divided into at least a first portion and a second portion, wherein the second portion is positioned facing an analog and/or RF circuit block and is different from the first portion in structure. A P+ region is provided in a P substrate and positioned under the second portion. A shallow trench isolation (STI) structure surrounds the P+ region and laterally extends underneath a conductive rampart of the second portion.
    Type: Grant
    Filed: August 5, 2010
    Date of Patent: July 3, 2012
    Assignee: Mediatek Inc.
    Inventors: Tung-Hsing Lee, Tien-Chang Chang, Yuan-Hung Chung
  • Patent number: 8198651
    Abstract: A semiconductor device for protecting against an electro static discharge is disclosed. In one embodiment, the semiconductor device includes a first low doped region disposed in a substrate, a first heavily doped region disposed within the first low doped region, the first heavily doped region comprising a first conductivity type, and the first low doped region comprising a second conductivity type, the first and the second conductivity types being opposite, the first heavily doped region being coupled to a node to be protected. The semiconductor device further includes a second heavily doped region coupled to a first power supply potential node, the second heavily doped region being separated from the first heavily doped region by a portion of the first low doped region, and a second low doped region disposed adjacent the first low doped region, the second low doped region comprising the first conductivity type.
    Type: Grant
    Filed: October 13, 2008
    Date of Patent: June 12, 2012
    Assignee: Infineon Technologies AG
    Inventors: Gernot Langguth, Wolfgang Soldner, Cornelius Christian Russ
  • Patent number: 8188578
    Abstract: A seal ring structure disposed along a periphery of an integrated circuit. The seal ring is divided into at least a first portion and a second portion. The second portion is positioned facing and shielding an analog and/or RF circuit block from a noise. A deep N well is disposed in a P substrate and is positioned under the second portion. The deep N well reduces the substrate noise coupling.
    Type: Grant
    Filed: November 19, 2008
    Date of Patent: May 29, 2012
    Assignee: Mediatek Inc.
    Inventors: Tung-Hsing Lee, Tien-Chang Chang, Yuan-Hung Chung
  • Patent number: 8174087
    Abstract: The present invention is to provide an electromagnetic wave detecting element that can prevent a decrease in light utilization efficiency at sensor portions. The sensor portions are provided so as to correspond to respective intersection portions of scan lines and signal lines, and have semiconductor layer that generate charges due to electromagnetic waves being irradiated, and at whose electromagnetic wave irradiation surface sides upper electrodes are formed, and at whose electromagnetic wave non-irradiation surface sides lower electrodes are formed. Bias voltage is supplied to the respective upper electrodes via respective contact holes by a common electrode line that is formed further toward an electromagnetic wave downstream side than the semiconductor layer.
    Type: Grant
    Filed: January 22, 2009
    Date of Patent: May 8, 2012
    Assignee: FUJIFILM Corporation
    Inventor: Yoshihiro Okada
  • Patent number: 8164154
    Abstract: A low profile high power Schottky barrier bypass diode for solar cells and panels with the cathode and anode electrodes on the same side of the diode and a method of fabrication thereof are disclosed for generating a thin chip with both electrodes being on the same side of the chip. In an embodiment, a mesa isolation with a Zener diode over the annular region surrounding the central region of the mesa anode in the Epi of the substrate is formed. In an embodiment, a P-type Boron dopant layer is ion implanted in the annular region for the Zener Diode. This controls recovery from high voltage spikes from the diode rated voltage. A Schottky barrier contact for the anode and a contact for the cathode are simultaneously created on the same side of the chip.
    Type: Grant
    Filed: December 17, 2010
    Date of Patent: April 24, 2012
    Inventors: Aram Tanielian, Garo Tanielian
  • Patent number: 8120023
    Abstract: The present invention is directed to novel front side illuminated, back side contact photodiodes and arrays thereof. In one embodiment, the photodiode has a substrate with at least a first and a second side and a plurality of electrical contacts physically confined to the second side. The electrical contacts are in electrical communication with the first side through a doped region of a first type and a doped region of a second type, each of the regions substantially extending from the first side through to the second side. In another embodiment, the photodiode comprises a wafer with at least a first and a second side; and a plurality of electrical contacts physically confined to the second side, where the electrical contacts are in electrical communication with the first side through a diffusion of a p+ region through the wafer and a diffusion of an n+ region through the wafer.
    Type: Grant
    Filed: June 5, 2006
    Date of Patent: February 21, 2012
    Assignee: UDT Sensors, Inc.
    Inventors: Peter Steven Bui, Narayan Dass Taneja
  • Patent number: 8084836
    Abstract: A photodiode array PD1 comprises an n-type semiconductor substrate one face of which is an incident surface of light to be detected; a plurality of pn junction-type photosensitive regions 3 as photodiodes formed on the side of a detecting surface that is opposite to the incident surface of the semiconductor substrate; and a carrier capturing portion 12 formed between adjacent photosensitive regions 3 from among the plurality of photosensitive regions 3 on the detecting surface side of the semiconductor substrate. The carrier capturing portion 12 has one or plurality of carrier capturing regions 13 respectively including pn-junctions, arranged at intervals. Thereby can be realized a semiconductor photodetector and a radiation detecting apparatus which can favorably restrain crosstalk from occurring.
    Type: Grant
    Filed: December 27, 2006
    Date of Patent: December 27, 2011
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Tatsumi Yamanaka, Masanori Sahara, Hideki Fujiwara
  • Patent number: 8053858
    Abstract: A lateral Insulated Gate Bipolar Transistor (LIGBT) includes a semiconductor substrate and an anode region in the semiconductor substrate. A cathode region of a first conductivity type in the substrate is laterally spaced from the anode region, and a cathode region of a second conductivity type in the substrate is located proximate to and on a side of the cathode region of the first conductivity type opposite from the anode region. A drift region in the semiconductor substrate extends between the anode region and the cathode region of the first conductivity type. An insulated gate is operatively coupled to the cathode region of the first conductivity type and is located on a side of the cathode region of the first conductivity type opposite from the anode region. An insulating spacer overlies the cathode region of the second conductivity type.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: November 8, 2011
    Assignee: Fairchild Semiconductor Corporation
    Inventor: Jun Cai
  • Patent number: 8022414
    Abstract: The silicon carbide semiconductor device includes a trench formed from a surface of a drift layer of a first conductivity type formed on a substrate of the first conductivity type, and a deep layer of a second conductivity type located at a position in the drift layer beneath the bottom portion of the trench. The deep layer is formed at a certain distance from base regions of the second conductivity type formed on the drift layer so as to have a width wider than the width of the bottom portion of the trench, and surround both the corner portions of the bottom portion of the trench.
    Type: Grant
    Filed: March 19, 2008
    Date of Patent: September 20, 2011
    Assignee: DENSO CORPORATION
    Inventors: Naohiro Suzuki, Tsuyoshi Yamamoto
  • Patent number: 7999343
    Abstract: An arrangement for use in a semiconductor component includes a semiconductor body and an edge structure. The semiconductor body having a first face, a second face, a first semiconductor zone of a first conductance type, at least one second semiconductor zone of a second conductance type, and a semiconductor junction formed therebetween running substantially parallel to the first face. The edge structure is laterally adjacent to the second semiconductor zone and includes at least a first trench. The first trench extends in a vertical direction into the semiconductor body and is filled with a dielectric material. The edge structure further includes a third semiconductor zone of the second conductance type, which, at least partially, is adjacent to a face of the at least one trench which faces away from the first face. The edge structure further includes a fourth semiconductor zone of the first conductance type, which is more heavily doped than the first semiconductor zone, and is proximate to the first face.
    Type: Grant
    Filed: September 1, 2006
    Date of Patent: August 16, 2011
    Assignee: Infineon Technologies AG
    Inventors: Jenoe Tihanyi, Nada Tihanyi, legal representative
  • Patent number: 7960198
    Abstract: A wide bandgap semiconductor device with surge current protection and a method of making the device are described. The device comprises a low doped n-type region formed by plasma etching through the first epitaxial layer grown on a heavily doped n-type substrate and a plurality of heavily doped p-type regions formed by plasma etching through the second epitaxial layer grown on the first epitaxial layer. Ohmic contacts are formed on p-type regions and on the backside of the n-type substrate. Schottky contacts are formed on the top surface of the n-type region. At normal operating conditions, the current in the device flows through the Schottky contacts. The device, however, is capable of withstanding extremely high current densities due to conductivity modulation caused by minority carrier injection from p-type regions.
    Type: Grant
    Filed: June 28, 2007
    Date of Patent: June 14, 2011
    Assignee: Semisouth Laboratories
    Inventors: Igor Sankin, Joseph Neil Merrett
  • Patent number: 7948006
    Abstract: A photodetector with an improved electrostatic discharge damage threshold is disclosed, suitable for applications in telecommunication systems operating at elevated data rates. The photodetector may be a PIN or an APD fabricated in the InP compound semiconductor system. The increased ESD damage threshold is achieved by reducing the ESD induced current density in the photodetector by a suitable widening of the contact at a critical location, increasing the series resistance and promoting lateral current spreading by means of a current spreading layer.
    Type: Grant
    Filed: June 1, 2009
    Date of Patent: May 24, 2011
    Assignee: JDS Uniphase Corporation
    Inventors: Zhong Pan, David Venables
  • Patent number: 7928527
    Abstract: A plurality of image sensor structures and a plurality of methods for fabricating the plurality of image sensor structures provide for inhibited cracking and delamination of a lens capping layer with respect to a planarizing layer within the plurality of image sensor structures. Particular image sensor structures and related methods include at least one dummy lens layer of different dimensions than active lens layer located over a circuitry portion of a substrate within the particular image sensor structures. Additional particular image sensor structures include at least one of an aperture within the planarizing layer and a sloped endwall of the planarizing layer located over a circuitry portion within the particular image sensor structures.
    Type: Grant
    Filed: June 4, 2008
    Date of Patent: April 19, 2011
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey P. Gambino, Mark D. Jaffe, Robert K. Leidy, Charles F. Musante, Richard J. Rassel
  • Patent number: 7880240
    Abstract: A semiconductor device has a high voltage circuit section disposed on a semiconductor substrate having a first conductivity. The high voltage circuit section has a well region with a second conductivity, a first heavily doped impurity region with the first conductivity and disposed on the well region, a second heavily doped impurity region having a second conductivity and disposed on the semiconductor substrate, a trench isolation region disposed between the first and second heavily doped impurity regions, and an interconnect disposed over the trench isolation region. First and second electrodes are disposed above the trench isolation region, below the interconnect, and on opposite sides of a junction between the well region and the semiconductor substrate. The first electrode is disposed above the semiconductor substrate, and the second electrode is disposed above the well region.
    Type: Grant
    Filed: February 15, 2008
    Date of Patent: February 1, 2011
    Assignee: Seiko Instruments Inc.
    Inventor: Hiroaki Takasu
  • Patent number: 7863682
    Abstract: A semiconductor device having a junction barrier Schottky diode includes: a SiC substrate; a drift layer on the substrate; an insulation film on the drift layer having an opening in a cell region; a Schottky barrier diode having a Schottky electrode contacting the drift layer through the opening of the insulation film and an ohmic electrode on the substrate; a terminal structure having a RESURF layer surrounding the cell region; and multiple second conductive type layers on an inner side of the RESURF layer. The second conductive type layers and the drift layer provide a PN diode. The Schottky electrode includes a first Schottky electrode contacting the second conductive type layers with ohmic contact and a second Schottky electrode contacting the drift layer with Schottky contact.
    Type: Grant
    Filed: March 31, 2008
    Date of Patent: January 4, 2011
    Assignee: Denso Corporation
    Inventors: Eiichi Okuno, Takeo Yamamoto
  • Patent number: 7859076
    Abstract: A semiconductor device has active region (30) and edge termination region (32) which includes a plurality of floating field regions (46). Field plates (54) extend in the edge termination region (32) inwards from contact holes (56) towards the active region (30) over a plurality of floating field regions (46). Pillars (40) may be provided.
    Type: Grant
    Filed: May 22, 2006
    Date of Patent: December 28, 2010
    Assignee: NXP B.V.
    Inventors: Rob Van Dalen, Maarten J. Swanenberg
  • Patent number: 7851873
    Abstract: The HVIC includes a dielectric layer and an SOI active layer stacked on a silicon substrate, a transistor formed in the surface of the SOI active layer, and a trench isolation region formed around the transistor. The dielectric layer includes a first buried oxide film formed in the surface of the silicon substrate, a shield layer formed below the first buried oxide film opposite the element area, a second buried oxide film formed around the shield layer, and a third buried oxide film formed below the shield layer and the second buried oxide film. Therefore, the potential distribution curves PC within the dielectric layer are low in density and a high withstand voltage is achieved.
    Type: Grant
    Filed: May 20, 2008
    Date of Patent: December 14, 2010
    Assignee: Mitsubishi Electric Corporation
    Inventor: Hajime Akiyama
  • Patent number: 7843019
    Abstract: In mixed-component, mixed-signal, semiconductor devices, selective seal ring isolation from the substrate and its electrical potential is provided in order to segregate noise sensitive circuitry from electrical noise generated by electrically noisy circuitry. Appropriate predetermined sections of such a mixed use chip are isolated from the substrate through a non-ohmic contact with the substrate without compromising reliability of the chip's isolation from scribe region contamination.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: November 30, 2010
    Assignee: Micrel, Incorporated
    Inventors: Shekar Mallikarjunaswamy, Martin Alter
  • Patent number: 7834367
    Abstract: A method of making a diode begins by depositing an AlxGa1?xN nucleation layer on a SiC substrate, then depositing an n+ GaN buffer layer, an n? GaN layer, an AlxGa1?xN barrier layer, and an SiO2 dielectric layer. A portion of the dielectric layer is removed and a Schottky metal deposited in the void. The dielectric layer is affixed to the support layer with a metal bonding layer using an Au-Sn utectic wafer bonding process, the substrate is removed using reactive ion etching to expose the n+ layer, selected portions of the n+, n?, and barrier layers are removed to form a mesa diode structure on the dielectric layer over the Schottky metal,; and an ohmic contact is deposited on the n+ layer.
    Type: Grant
    Filed: January 19, 2007
    Date of Patent: November 16, 2010
    Assignee: Cree, Inc.
    Inventors: Primit Parikh, Sten Heikman
  • Patent number: 7816733
    Abstract: A semiconductor device having a JBS diode includes: a SiC substrate; a drift layer on the substrate; an insulation film on the drift layer having an opening in a cell region; a Schottky barrier diode having a Schottky electrode contacting the drift layer through the opening and an ohmic electrode on the substrate; a terminal structure having a RESURF layer in the drift layer surrounding the cell region; and multiple second conductive type layers in the drift layer on an inner side of the RESURF layer contacting the Schottky electrode. The second conductive type layers are separated from each other. The second conductive type layers and the drift layer provide a PN diode. Each second conductive type layer has a depth larger than the RESURF layer.
    Type: Grant
    Filed: March 31, 2008
    Date of Patent: October 19, 2010
    Assignee: DENSO CORPORATION
    Inventors: Eiichi Okuno, Takeo Yamamoto
  • Patent number: 7804143
    Abstract: A “tabbed” MOS device provides radiation hardness while supporting reduced gate width requirements. The “tabbed” MOS device also utilizes a body tie ring, which reduces field threshold leakage. In one implementation the “tabbed” MOS device is designed such that a width of the tab is based on at least a channel length of the MOS device such that a radiation-induced parasitic conduction path between the source and drain region of the device has a resistance that is higher than the device channel resistance.
    Type: Grant
    Filed: February 18, 2009
    Date of Patent: September 28, 2010
    Assignee: Intersil Americas, Inc.
    Inventors: Stephen Joseph Gaul, Michael D. Church, Brent R. Doyle
  • Publication number: 20100237452
    Abstract: A semiconductor substrate has a first principal face and a second principal face opposite thereto. A pixel unit, an analog circuit and a digital circuit are formed in a first, second and third region of the semiconductor substrate. An interconnect is formed on each of the first and second principal faces of the second region. A plurality of penetrative electrodes is formed in the semiconductor substrate to penetrate the first and second principal faces. These penetrative electrodes are electrically connected with interconnects formed in the first and second principal faces of the second region. A guard ring is formed in the semiconductor substrate to penetrate the first and second principal faces, the guard ring is surrounding the penetrative electrodes.
    Type: Application
    Filed: March 17, 2010
    Publication date: September 23, 2010
    Inventors: Kenichiro HAGIWARA, Ikuko INOUE
  • Patent number: 7701028
    Abstract: The pixel for use in an image sensor comprises a low-doped semiconductor substrate (A). On the substrate (A), an arrangement of a plurality of floating areas e.g., floating gates (FG2-FG6), is provided. Neighboring floating gates are electrically isolated from each other yet capacitively coupled to each other. By applying a voltage (V2-V1) to two contact areas (FG1, FG7), a lateral steplike electric field is generated. Photogenerated charge carriers move along the electric-field lines to the point of highest potential energy, where a floating diffusion (D) accumulate the photocharges. The charges accumulated in the various pixels are sequentially read out with a suitable circuit known from image-sensor literature, such as a source follower or a charge amplifier with row and column select mechanisms. The pixel of offers at the same time a large sensing area, a high photocharge-detection sensitivity and a high response speed without any static current consumption.
    Type: Grant
    Filed: March 31, 2005
    Date of Patent: April 20, 2010
    Assignee: MESA Imaging AG
    Inventors: Rolf Kaufmann, Michael Lehmann, Peter Seitz
  • Patent number: 7679662
    Abstract: Disclosed herein is a solid-state imaging element which includes a plurality of drive signal inputs, a plurality of bus lines, and a plurality of vertical transfer register electrodes. In the solid-state imaging element, a charge accumulated in light-receiving elements in a pixel region is vertically transferred by the drive signals input to the electrodes. Each of the electrodes has a contact part connected to the second contact and having a width smaller than a width of the electrodes in the pixel region, and a blank region is formed between predetermined adjacent two of the contact parts so that a width of the blank region is larger than a distance between respective two of the contact parts other than the predetermined adjacent two of the contact parts. The first contact is disposed on the blank region.
    Type: Grant
    Filed: November 9, 2006
    Date of Patent: March 16, 2010
    Assignee: Sony Corporation
    Inventors: Sadamu Suizu, Masaaki Takayama