Resistor Has Same Doping As Emitter Or Collector Of Bipolar Transistor Patents (Class 257/542)
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Patent number: 9666700Abstract: The present disclosure relates to a vertical bipolar junction transistor. A vertical bipolar junction transistor includes a high concentration doping region emitter terminal disposed on a semiconductor substrate; a high concentration doping region collector terminal disposed on a semiconductor substrate; a high concentration doping region base terminal disposed between the emitter terminal and the collector terminal; a drift region having a first doping concentration surrounding the emitter terminal and being deeper than either the base terminal or the collector terminal; a base layer disposed below the drift region; a collector layer in contact with the base layer, the collector layer having a second doping concentration higher than the first doping concentration. The manufacturing cost of the vertical bipolar junction transistor can be lowered and a current gain can be elevated using a low-cost BCD process.Type: GrantFiled: October 28, 2014Date of Patent: May 30, 2017Assignee: MagnaChip Semiconductor, Ltd.Inventors: Francois Hebert, Yon Sup Pang, Seong Min Cho, Ju Ho Kim
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Patent number: 8916950Abstract: A semiconductor structure and method for forming a shallow trench isolation (STI) structure having one or more oxide layers and a nitride plug. Specifically, the structure and method involves forming one or more trenches in a substrate. The STI structure is formed having one or more oxide layers and a nitride plug, wherein the STI structure is formed on and adjacent to at least one of the one or more trenches. One or more gates are formed on the substrate and spaced at a distance from each other. A dielectric layer is formed on and adjacent to the substrate, the STI structure, and the one or more gates.Type: GrantFiled: October 18, 2011Date of Patent: December 23, 2014Assignee: International Business Machines CorporationInventors: Byeong Y. Kim, Shreesh Narasimha
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Patent number: 8598682Abstract: A resistor structure incorporated into a resistive switching memory cell or device to form memory devices with improved device performance and lifetime is provided. The resistor structure may be a two-terminal structure designed to reduce the maximum current flowing through a memory device. A method is also provided for making such memory device. The method includes depositing a resistor structure and depositing a variable resistance layer of a resistive switching memory cell of the memory device, where the resistor structure is disposed in series with the variable resistance layer to limit the switching current of the memory device. The incorporation of the resistor structure is very useful in obtaining desirable levels of device switching currents that meet the switching specification of various types of memory devices. The memory devices may be formed as part of a high-capacity nonvolatile memory integrated circuit, which can be used in various electronic devices.Type: GrantFiled: November 13, 2012Date of Patent: December 3, 2013Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLCInventors: Dipankar Pramanik, Tony P. Chiang, Mankoo Lee
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Patent number: 8283753Abstract: A semiconductor device, which exhibits an increased design flexibility for a capacitor element, and can be manufactured with simple method, is provided. A semiconductor device 100 includes: a silicon substrate 101; an interlayer film 103 provided on the silicon substrate 101; a multiple-layered interconnect embedded in the interlayer film 103; a flip-chip pad 111, provided so as to be opposite to an upper surface of an uppermost layer interconnect 105 in the multiple-layered interconnect and having a solder ball 113 for an external coupling mounted thereon; and a capacitance film 109 provided between said uppermost layer interconnect 105 and the flip-chip pad 111. Such semiconductor device 100 includes the flip-chip pad 111 composed of an uppermost layer interconnect 105, a capacitive film 109 and a capacitor element 110.Type: GrantFiled: March 2, 2007Date of Patent: October 9, 2012Assignee: Renesas Electronics CorporationInventor: Ryuichi Okamura
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Patent number: 8022496Abstract: A structure comprises a single wafer with a first subcollector formed in a first region having a first thickness and a second subcollector formed in a second region having a second thickness, different from the first thickness. A method is also contemplated which includes providing a substrate including a first layer and forming a first doped region in the first layer. The method further includes forming a second layer on the first layer and forming a second doped region in the second layer. The second doped region is formed at a different depth than the first doped region. The method also includes forming a first reachthrough in the first layer and forming a second reachthrough in second layer to link the first reachthrough to the surface.Type: GrantFiled: October 17, 2007Date of Patent: September 20, 2011Assignee: International Business Machines CorporationInventors: Douglas D. Coolbaugh, Alvin J. Joseph, Seong-dong Kim, Louis D. Lanzerotti, Xuefeng Liu, Robert M. Rassel
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Patent number: 7838377Abstract: A bipolar junction transistor includes a collector having a first conductivity type, a drift layer having the first conductivity type on the collector, a base layer on the drift layer and having a second conductivity type opposite the first conductivity type, a lightly doped buffer layer having the first conductivity type on the base layer and forming a p-n junction with the base layer, and an emitter mesa having the first conductivity type on the buffer layer and having a sidewall. The buffer layer includes a mesa step adjacent to and spaced laterally apart from the sidewall of the emitter mesa, and a first thickness of the buffer layer beneath the emitter mesa is greater than a second thickness of the buffer layer outside the mesa step.Type: GrantFiled: September 9, 2008Date of Patent: November 23, 2010Assignee: Cree, Inc.Inventors: Qingchun Zhang, Anant K. Agarwal
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Patent number: 7659179Abstract: A method of forming a memory device includes forming first and second isolation structures on a semiconductor substrate, the first and second isolation structures defining an active region therebetween; and etching a portion of the semiconductor substrate provided within the active region to define a step profile, so that the active region includes a first vertical portion and an upper primary surface, the first vertical portion extending above the upper primary surface.Type: GrantFiled: December 29, 2005Date of Patent: February 9, 2010Assignee: Hynix Semiconductor Inc.Inventor: Hyun Hu
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Patent number: 7602044Abstract: A semiconductor device has a semiconductor substrate, a first insulating film disposed on the semiconductor substrate, and groups of resistors made of polycrystalline silicon and disposed on the first insulating film. At least some of the groups of resistors include at least one dummy resistor made of polycrystalline silicon. A second insulating film is disposed on the resistors and on the at least one dummy resistor of the resistor groups. First metal portions are disposed in respective contact holes disposed in the second insulating film for connecting respective portions of the resistors in the respective resistor groups. Second metal portions are disposed on the second insulating film and over the resistors and the at least one dummy resistor in the respective resistor groups.Type: GrantFiled: March 22, 2006Date of Patent: October 13, 2009Assignee: Seiko Instruments Inc.Inventor: Hirofumi Harada
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Patent number: 7319254Abstract: A semiconductor device having resistors in a peripheral area and fabrication method thereof are provided. A mold layer is formed on a semiconductor substrate. The mold layer is patterned to form first molding holes and a second molding hole in the mold layer. A storage node layer is formed on the mold layer as well as in the first and second molding holes. The storage node layer is patterned to form storage nodes in the first molding holes and a portion of a resistor in the second hole.Type: GrantFiled: August 2, 2004Date of Patent: January 15, 2008Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-Hwa Kwak, Byung-Seo Kim
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Patent number: 7211494Abstract: Semiconductor structures and methods for fabricating semiconductor structures are provided. The method comprises forming a first insulating layer having a substantially planar surface overlying a first conductive layer of an interconnect stack. A thin film resistor is formed overlying the first insulating layer and a second insulating layer is deposited overlying the first insulating layer and the resistor. A portion of the second insulating layer is removed to form a substantially planar surface. The second insulating layer is anisotropically etched to form a first via to the first conductive layer and a fill material comprising tungsten is deposited within the first via. The second insulating layer is wet etched to form a second via to the thin film resistor and a second conductive layer is deposited overlying the second insulating layer and within the second via.Type: GrantFiled: December 28, 2004Date of Patent: May 1, 2007Assignee: Medtronic, Inc.Inventor: Ralph B Danzl
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Patent number: 7208814Abstract: A resistive device includes a resistive region of a semiconductor material that includes a first region and a second region, wherein the first region has a higher dopant concentration than the second region, and wherein a resistance-determining width of a current path through the first region is determined by a portion of a doping boundary between the first region and the second region.Type: GrantFiled: August 20, 2004Date of Patent: April 24, 2007Assignee: Infineon Technologies AGInventor: Stefan Pompl
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Patent number: 7135755Abstract: An electric motor drive system is disclosed which includes a required number of motor driver circuits connected one to each motor armature coil. Fabricated in the form of an integrated circuit, each such motor driver circuit has a parasitic transistor unavoidably created between two neighboring transistors. The parasitic transistor would become conductive when the driver circuit output had a negative potential, adversely affecting the driver circuit operation. An additional transistor is provided in one embodiment of the invention in order to inhibit such action of the parasitic transistor. Becoming conductive when the driver circuit output goes negative, the additional transistor prevents conduction through the parasitic transistor. Another parasitic transistor is intentionally created in another embodiment for the same purpose.Type: GrantFiled: September 24, 2004Date of Patent: November 14, 2006Assignee: Sanken Electric Co., Ltd.Inventors: Daiji Uehara, Hiroaki Nakamura
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Patent number: 7136299Abstract: A phase change memory device and, more particularly, to a phase change memory cell array suitable for the implementation of a high-density memory device. The phase change memory cell array includes a first access transistor pair and a second access transistor pair formed on a semiconductor substrate to be adjacent to each other while each of the first and second access transistor pairs having a common drain, phase change resistance elements formed on source regions of the access transistors, respectively, and a semiconductor region formed on the same plane as the common drains to electrically connect the common drains of the first and second transistor pairs. The phase change memory cell array and the memory device of are suitable for the implementation of a high-density semiconductor device, and capable of improving the reliability of a contact forming process by securing a sufficient space for the contact forming process.Type: GrantFiled: August 30, 2004Date of Patent: November 14, 2006Assignee: BeyondMicro IncInventors: Eu Gene Chu, Ju Ho Mo, Seong Taek Park, Jung Ho Kim, Hyun Yong Lim, Pyeong Han Lee, Ja Choon Jeong
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Patent number: 7064413Abstract: A method of forming a Fin structure including a resistor present in the thin vertically oriented semiconductor body is provided. The method includes the steps of forming at least one vertically-oriented semiconductor body having exposed vertical surfaces on a substrate; implanting dopant ions into the exposed vertical surfaces of the at least one semiconductor body off-axis at a concentration and energy sufficient to penetrate into the exposed vertical surfaces of the at least one semiconductor body without saturation; and forming contacts to the at least one semiconductor body. The present invention is directed to a Fin structure which includes a resistor present within the thin vertically oriented semiconductor body.Type: GrantFiled: February 9, 2004Date of Patent: June 20, 2006Assignee: International Business Machines CorporationInventors: David M. Fried, Edward J. Nowak
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Patent number: 7026690Abstract: The invention includes BIFETRAM devices. Such devices comprise a bipolar transistor in combination with a field effect transistor (FET) in a three-dimensional stacked configuration. The memory devices can be incorporated within semiconductor-on-insulator (SOI) constructions. The base region of the bipolar device can be physically and electrically connected to one of the source/drain regions of the FET to act as a storage node for the memory cell. The semiconductor material of the SOI constructions can comprise Si/Ge, and the active region of the FET can extend into the Si/Ge. The SOI constructions can be formed over any of a number of substrates, including, for example, semiconductive materials, glass, aluminum oxide, silicon dioxide, metals and/or plastics.Type: GrantFiled: February 12, 2003Date of Patent: April 11, 2006Assignee: Micron Technology, Inc.Inventor: Arup Bhattacharyya
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Patent number: 6979879Abstract: In a zener zap diode device and a system for making such a device using a double poly process, p+ and n+regions are formed in a tub by means of p-doped and n-doped polysilicon regions, and a p-n junction is formed between the p+ region and an n-tub or between the n+ region and a p-tub. Cobalt or other refractory metal is reacted with silicon to form a silicide on at least the p-doped polysilicon region. By reverse biasing the p-n junction and establishing a sufficiently high zap current, the silicide can be forced to migrate across the junction to form a silicide bridge thereby selectively shorting out the p-n junction.Type: GrantFiled: April 30, 2004Date of Patent: December 27, 2005Assignee: National Semiconductor CorporationInventors: Wipawan Yindeepol, Andy Strachan
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Patent number: 6878976Abstract: Selectively implanting carbon in a transistor lowers the collector-to-emitter breakdown (BVCEO) of the transistor. This transistor, with the lowered BVCEO, is then used as a “trigger” device in an Electrostatic Discharge (ESD) power clamp comprising a first low breakdown trigger device and a second high breakdown clamp device. ESD power clamps are constructed using epitaxial base pseudomorphic Silicon Germanium heterojunction transistors in a common-collector Darlington configuration.Type: GrantFiled: March 13, 2002Date of Patent: April 12, 2005Assignee: International Business Machines CorporationInventors: Douglas D. Coolbaugh, Steven H. Voldman
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Patent number: 6849921Abstract: A semiconductor device includes: a semiconductor substrate; a first insulating film formed on the semiconductor substrate; a polysilicon resistor film formed on the first insulating film; a second insulating film formed on the resistor film; a high heat conductor film consisting of a highly heat-conducting material formed on the second insulating film; and a pair of terminal wirings formed on the second insulating film and connected to the resistor film, in which a thickness T3 of the second insulating film is thinner than a thickness T2 of the resistor film.Type: GrantFiled: July 10, 2001Date of Patent: February 1, 2005Assignee: Renesas Technology Corp.Inventor: Akio Uenishi
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Patent number: 6642604Abstract: A resistor layer (5) is formed on an isolation insulating film (4) selectively formed in a major surface (1S) of a semiconductor substrate (1). An interlayer insulation film (7) covering the resistor layer (5) has first and second plugs (9, 19) buried therein in the form of buried interconnections. The first and second plugs (9, 19) provide connection not only between an end portion of the resistor layer (5) and first and second interconnection layers (8, 18) but also between the end portion of the resistor layer (5) and the major surface (1S) of the semiconductor substrate (1).Type: GrantFiled: August 1, 2002Date of Patent: November 4, 2003Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Yasuo Yamaguchi
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Patent number: 6639300Abstract: A semiconductor integrated circuit device comprises an active device and a resistance element formed monolithically on a common substrate wherein the resistance element includes a dummy pattern having a layered structure identical with a layered structure of the active device, and first and second electrodes are provided inside a mesa structure provided for the resistance element with a separation from a sidewall of the mesa structure, the first and second electrodes being formed in correspondence to openings formed in the dummy pattern.Type: GrantFiled: February 1, 2001Date of Patent: October 28, 2003Assignee: Fujitsu Quantum Devices LimitedInventor: Jun Wada
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Patent number: 6590272Abstract: A structure for a semiconductor resistive element, applicable in particular to power components, having a high concentration substrate of the n type, a first epitaxial layer of the n type, a region of the p type arranged on said first epitaxial layer so to form the resistive element proper, a second epitaxial layer of n type grown on said first epitaxial layer to make the region of the p type a buried region, and an additional layer of the n type with a higher concentration with respect to the second epitaxial level, positioned on the embedded region. Low resistivity regions of the p type adapted to make low resistivity deep contacts for the resistor are provided. The buried region can be made either with a development that is substantially uniform in its main direction of extension or so to present, at on part of its length, a structure of adjacent subregions in marginal continuity.Type: GrantFiled: November 21, 2001Date of Patent: July 8, 2003Assignee: STMicroelectronics S.r.l.Inventor: Davide Patti
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Patent number: 6545340Abstract: A semiconductor device of the invention in the form of a superlattice-heterojunction bipolar transistor (SL-HBT) 10 incorporates a superlattice region 16 within an emitter mesa 21. The superlattice region 16 provides a non-linear response to a sufficiently high level of device current to counteract thermal runaway. This protects the device from damaging levels of current. The device 10 may be a radio-frequency SL-HBT with performance equivalent to that of a conventional heterojunction bipolar transistor. The invention may also be implemented as a semiconductor laser.Type: GrantFiled: March 6, 2001Date of Patent: April 8, 2003Assignee: Qinetiq LimitedInventors: Anthony W Higgs, David G Hayes, Robert G Davis
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Patent number: 6107671Abstract: A film device provided with a resistance-adjustable resistive element comprises a base film, a resistive element, a conductive circuit pattern wherein the resistive element is formed on and connected to the conductive circuit pattern, and a corrective layer formed so as to partially cover the resistive element. The resistance of the resistive element is corrected by the corrective layer formed on the resistive element.Type: GrantFiled: September 30, 1997Date of Patent: August 22, 2000Assignee: Alps Electric Co., Ltd.Inventor: Norio Onodera
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Patent number: 5880513Abstract: An asymmetric snubber resistor in accordance with the present invention includes a cathode, an N+ region, an N- region, a plurality of P+ regions, and an anode. The N+ region is disposed over the cathode, the N- region is disposed over the N+ region, the plurality of P+ regions are disposed over the N- region, and the anode is disposed over the plurality of P+ regions and exposed portions of the N- region. The asymmetric snubber may also include N regions between the P+ regions. The asymmetric snubber resistor replaces the snubber diode and the snubber resistor in a typical snubber circuit.Type: GrantFiled: April 18, 1996Date of Patent: March 9, 1999Assignee: Harris CorporationInventors: Victor A.K. Temple, Stephen D. Arthur, Sabih Al-Marayati, Eric X. Yang
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Patent number: 5736755Abstract: Disclosed are devices having emitters having resistive emitter diffusion sections are in a radial pattern. Such devices include vertical PNP power devices. The radial pattern of holes defines resistive emitter diffusion sections between adjacent holes. The resistive emitter diffusion sections result in a lower emitter ballast resistance due to the higher emitter sheet resistance of PNP devices. This allows all the periphery of the emitter to be active, not just two sides. The device has improved emitter ballast resistance while at the same time remaining efficient with low saturation resistance.Type: GrantFiled: September 8, 1995Date of Patent: April 7, 1998Assignee: Delco Electronics CorporationInventors: John Rothgeb Fruth, John Kevin Kaszyca, Mark Wendell Gose
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Patent number: 5652460Abstract: An integrated circuit for implementing a resistor network on a die of the integrated circuit. The integrated circuit includes a common conductor, which is disposed on a first side of the die and coupled to resistors of the resistor network. The integrated circuit further includes a substantially conductive substrate through the die. There is further included a conductive back side contact coupled to the substantially conductive substrate. The conductive back side contact is disposed on a second side of the die opposite the first side, whereby the common conductor, the substantially conductive substrate, and the conductive back side contact form a common conducting bus from the common conductor to the conductive back side contact through the die.Type: GrantFiled: October 6, 1995Date of Patent: July 29, 1997Assignee: California Micro Devices CorporationInventors: Jeffrey Clifford Kalb, Peruvamba Hariharan, John Dericourt Hurd, Gregg Duncan
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Patent number: 5321279Abstract: Generally, and in one form of the invention a semiconductor device is presented comprising: a transistor comprising an emitter finger and a base finger; and a ballast impedance connected to the base finger. Other devices and methods are also disclosed.Type: GrantFiled: November 9, 1992Date of Patent: June 14, 1994Assignee: Texas Instruments IncorporatedInventors: M. Ali Khatibzadeh, Wiliam U. Liu
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Patent number: 5304838Abstract: A semiconductor device comprises a semiconductor substrate of a first conductivity type; an epitaxial layer of a second conductivity type formed on the semiconductor substrate; an impurity diffusion layer of the second conductivity type embedded between the semiconductor substrate and the epitaxial layer and having an impurity concentration greater than that of the epitaxial layer; a resistance region reaching the impurity diffusion layer from a surface of the epitaxial layer and extending substantially vertically to the surface of the epitaxial layer; an insulating film defining the resistance region; and a lead region selectively formed between the surface of the epitaxial layer and the impurity diffusion layer.Type: GrantFiled: August 29, 1991Date of Patent: April 19, 1994Assignee: NEC CorporationInventor: Tadashi Ozawa