With Specified Electrode Means Patents (Class 257/587)
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Patent number: 8159048Abstract: Embodiments of methods, apparatus, devices and/or systems associated with bipolar junction transistor are disclosed.Type: GrantFiled: January 30, 2004Date of Patent: April 17, 2012Assignee: TriQuint Semiconductor, Inc.Inventors: Thomas R. Apel, Jeremy R. Middleton
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Patent number: 8129819Abstract: A layout of a cell of a semiconductor device is disclosed to include a diffusion level layout including a plurality of diffusion region layout shapes, including p-type and n-type diffusion regions. The layout of the cell also includes a gate electrode level layout is defined to include a number of linear-shaped layout features placed to extend in only a first parallel direction. Each of the number of the linear-shaped layout features within the gate electrode level layout of the restricted layout region is rectangular-shaped. Linear-shaped layout features within the gate electrode level layout extend over one or more of the p-type and/or n-type diffusion regions to form PMOS and NMOS transistor devices. A number of the PMOS transistor devices is equal to a number of the NMOS transistor devices in the cell.Type: GrantFiled: September 25, 2009Date of Patent: March 6, 2012Assignee: Tela Innovations, Inc.Inventors: Scott T. Becker, Michael C. Smayling
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Patent number: 8124449Abstract: A device including a semiconductor chip and metal foils. One embodiment provides a device including a semiconductor chip having a first electrode on a first face and a second electrode on a second face opposite to the first face. A first metal foil is attached to the first electrode of the semiconductor chip in an electrically conductive manner. A second metal foil is attached to the second electrode of the semiconductor chip in an electrically conductive manner.Type: GrantFiled: December 2, 2008Date of Patent: February 28, 2012Assignee: Infineon Technologies AGInventors: Georg Meyer-Berg, Andreas Schloegl
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Publication number: 20120032303Abstract: The present invention relates to semiconductor technologies, and more particularly to a bipolar junction transistor (BJT) in a CMOS base technology and methods of forming the same. The BJT includes a semiconductor substrate having an emitter region, a base having a first contact, and a collector having a second contact and a well plug; a first silicide film on the first contact; a second silicide film on the second contact; a first silicide blocking layer on or over the semiconductor substrate between the first and second silicide films, and a second silicide blocking layer on the semiconductor substrate between the first silicide film and the emitter region.Type: ApplicationFiled: October 29, 2010Publication date: February 9, 2012Inventors: Badih ELKAREH, Kyu Ok LEE, Sang Yong LEE
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Publication number: 20120018846Abstract: A bipolar semiconductor component, in particular a diode, comprising an anode structure which controls its emitter efficiency in a manner dependent on the current density in such a way that the emitter efficiency is low at small current densities and sufficiently high at large current densities, and an optional cathode structure, which can inject additional holes during commutation, and production methods therefor.Type: ApplicationFiled: September 30, 2010Publication date: January 26, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Roman Baburske, Josef Lutz, Ralf Siemieniec, Hans-Joachim Schulze
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Patent number: 8084786Abstract: High frequency performance of (e.g., silicon) bipolar devices is improved by reducing the extrinsic base resistance Rbx. Emitter, base and collector regions are formed in or on a semiconductor substrate. The emitter contact has a portion that overhangs a portion of the extrinsic base contact, thereby forming a cave-like cavity between the overhanging portion of the emitter contact and the underlying regions of the extrinsic base contact. When the emitter contact and the extrinsic base contact are silicided, some of the metal atoms forming the silicide penetrate into the cavity so that the highly conductive silicided extrinsic base contact extends under the edge of the emitter contact closer to the base itself, thereby reducing Rbx. Smaller Rbx provides transistors with higher fMAX.Type: GrantFiled: July 29, 2010Date of Patent: December 27, 2011Assignee: Freescale Semiconductor, Inc.Inventors: Jay P. John, James A. Kirchgessner, Vishal P. Trivedi
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Patent number: 8035190Abstract: A device comprises a first sub-collector formed in an upper portion of a substrate and a lower portion of a first epitaxial layer and a second sub-collector formed in an upper portion of the first epitaxial layer and a lower portion of a second epitaxial layer. The device further comprises a reach-through structure connecting the first and second sub-collectors and an N-well formed in a portion of the second epitaxial layer and in contact with the second sub-collector and the reach-through structure. The device further comprises N+ diffusion regions in contact with the N-well, a P+ diffusion region in contact with the N-well, and shallow trench isolation structures between the N+ and P+ diffusion regions.Type: GrantFiled: March 17, 2010Date of Patent: October 11, 2011Assignee: International Business Machines CorporationInventors: Xuefeng Liu, Robert M. Rassel, Steven H. Voldman
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Patent number: 8026575Abstract: The present invention provides a technology that makes it possible to enhance the gain and the efficiency of an RF bipolar transistor. Device isolation is given between a p+ type isolation region and an n+ type collector embedded region and between a p+ type isolation region and an n type collector region (an n+ type collector extraction region) with an isolation section that surrounds the collector extraction region in a plan view and is formed by embedding a dielectric film in a groove penetrating an isolation section, a collector region, and a collector embedded region and reaching a substrate. Further, a current route is formed between an emitter wiring (a wiring) and the substrate with an electrically conductive layer formed by embedding the electrically conductive layer in a groove penetrating a dielectric film, silicon oxide films, a semiconductor region, and the isolation regions and reaching the substrate, and thereby the impedance between the emitter wiring and the substrate is reduced.Type: GrantFiled: May 5, 2009Date of Patent: September 27, 2011Assignee: Renesas Electronics CorporationInventor: Hisashi Toyoda
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Patent number: 8008712Abstract: The invention relates to a metallization for an IGBT or a diode. In the case of this metallization, a copper layer (10, 12) having a layer thickness of approximately 50 ?m is applied to the front side and/or rear side of a semiconductor body (1) directly or if need be via a diffusion barrier layer (13, 14). The layer (8, 12) has a specific heat capacity that is at least a factor of 2 higher than the specific heat capacity of the semiconductor body (1). It simultaneously serves for producing a field stop layer (5) by proton implantation through the layer (12) from the rear side and for masking a proton or helium implantation for the purpose of charge carrier lifetime reduction from the front side of the chip (1).Type: GrantFiled: March 16, 2005Date of Patent: August 30, 2011Assignee: Infineon Technologies AGInventors: Frank Hille, Hans-Joachim Schulze
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Patent number: 7998861Abstract: Disclosed is a method of manufacturing a through-via. The through-via manufacturing method includes forming a core-via hole in a wafer, forming a suction-via hole adjacent to the core-via hole in the wafer, forming a via core in the core-via hole, forming a polymer-via hole connected to the suction-via hole in the wafer, filling the polymer-via hole with polymer solution by creating a vacuum inside the polymer-via hole by drawing air out of the suction-via hole, and polishing the wafer such that the via core formed in the core-via hole is exposed.Type: GrantFiled: October 22, 2009Date of Patent: August 16, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Jong-jin Lee, Hyun-seo Kang, Jai-sang Koh
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Patent number: 7982280Abstract: An integrated circuit includes N plane-like metal layers. A first plane-like metal layer includes M contact portions that communicate with the N plane-like metal layers, respectively. The first source region is arranged between first sides of the first and second drain regions and the second and third source regions are arranged adjacent to second sides of the first and second drain regions. A fourth source region is arranged adjacent to third sides of the first and second drain regions and a fifth source region is arranged adjacent to fourth sides of the first and second drain regions. First and second drain contacts are arranged in the first and second drain regions, respectively. At least two of the first, second, third, fourth and fifth source regions and the first and second drain regions communicate with at least two of the N plane-like metal layers.Type: GrantFiled: May 30, 2008Date of Patent: July 19, 2011Assignee: Marvell World Trade Ltd.Inventor: Sehat Sutardja
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Patent number: 7973387Abstract: An insulated gate bipolar transistor includes bump pad connectors to provide thermal contact with a heat spreader for dissipating heat away form the insulated gate bipolar transistor.Type: GrantFiled: May 21, 2008Date of Patent: July 5, 2011Assignee: Continental Automotive Systems US, Inc.Inventor: Fred Flett
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Patent number: 7968972Abstract: A high-frequency bipolar transistor includes an emitter contact adjoining an emitter connection region, a base contact adjoining a base connection region, and a collector contact adjoining a collector connection region. A first insulation layer is disposed on the base connection region. The collector connection region contains a buried layer, which connects the collector contact to a collector zone. A silicide or salicide region is provided on the buried layer and connects the collector contact to the collector zone in a low-impedance manner. A second insulation layer is disposed on the collector connection region but not on the silicide region.Type: GrantFiled: March 3, 2010Date of Patent: June 28, 2011Assignee: Infineon Technologies AGInventors: Josef Böck, Thomas Meister, Reinhard Stengl, Herbert Schäfer
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Patent number: 7932580Abstract: In the substrate and the epitaxial layer, isolation regions are formed to divide the substrate and the epitaxial layer into a plurality of element formation regions. Each of the isolation regions is formed by connecting first and second P type buried diffusion layers with a P type diffusion layer. By disposing the second P type buried diffusion layer between the first P type buried diffusion layer and the P type diffusion layer, a lateral diffusion width of the first P type buried diffusion layer is reduced. This structure allows a formation region of the isolation region to be reduced in size.Type: GrantFiled: December 20, 2007Date of Patent: April 26, 2011Assignees: Sanyo Electric Co., Ltd., Sanyo Semiconductor Co., Ltd.Inventors: Mitsuru Soma, Hirotsugu Hata, Yoshimasa Amatatsu
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Patent number: 7911024Abstract: The present invention provides a “collector-less” silicon-on-insulator (SOI) bipolar junction transistor (BJT) that has no impurity-doped collector. Instead, the inventive vertical SOI BJT uses a back gate-induced, minority carrier inversion layer as the intrinsic collector when it operates. In accordance with the present invention, the SOI substrate is biased such that an inversion layer is formed at the bottom of the base region serving as the collector. The advantage of such a device is its CMOS-like process. Therefore, the integration scheme can be simplified and the manufacturing cost can be significantly reduced. The present invention also provides a method of fabricating BJTs on selected areas of a very thin BOX using a conventional SOI starting wafer with a thick BOX. The reduced BOX thickness underneath the bipolar devices allows for a significantly reduced substrate bias compatible with the CMOS to be applied while maintaining the advantages of a thick BOX underneath the CMOS.Type: GrantFiled: February 17, 2010Date of Patent: March 22, 2011Assignee: International Business Machines CorporationInventors: Herbert L. Ho, Mahender Kumar, Qiqing Ouyang, Paul A. Papworth, Christopher D. Sheraw, Michael D. Steigerwalt
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Patent number: 7902633Abstract: Provided is a semiconductor device including: a silicon substrate; at least two trenches spaced apart from each other, being in parallel with each other, and being formed by vertically etching the silicon substrate from a surface thereof; an electrically insulating film for burying therein at least bottom surfaces of the trenches; a base region formed in a region of the silicon substrate located between the two trenches; and an emitter region and a collector region formed on portions of side surfaces of the trenches, respectively, the portions of the sides located above the insulating film and formed in the base region.Type: GrantFiled: May 21, 2007Date of Patent: March 8, 2011Assignee: Seiko Instruments Inc.Inventor: Kazuhiro Tsumura
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Patent number: 7880271Abstract: Emitter contact holes formed under emitter electrodes in a first layer and emitter through holes formed thereon are arranged so as not to overlap each other, and, for each emitter electrode, the multiple emitter contact holes and the multiple emitter through holes are provided so as to be separated from each other. Thereby, the top surface of an emitter electrode in a second layer is influenced by at most only a level difference of each emitter through hole formed in an insulating film having a larger thickness, and thus the flatness of the top surface of the emitter electrode in the second layer is improved. Accordingly, fixation failure of a metal plate can be avoided.Type: GrantFiled: August 26, 2009Date of Patent: February 1, 2011Assignees: Sanyo Electric Co., Ltd, Sanyo Semiconductor Co., LtdInventor: Kazuya Takahashi
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Patent number: 7863709Abstract: Methods and apparatuses directed to low base resistance bipolar junction transistor (BJT) devices are described herein. A low base resistance BJT device may include a collector layer, a base layer formed on the collector layer, a plurality of isolation trench lines formed in the base layer and extending into the collector layer, and a plurality of polysilicon lines formed on the base layer parallel to and overlapping the plurality of isolation trench lines. The base layer may be N-doped or P-doped.Type: GrantFiled: April 16, 2008Date of Patent: January 4, 2011Assignee: Marvell International Ltd.Inventors: Pantas Sutardja, Albert Wu, Runzi Chang, Chien-Chuan Wei, Winston Lee, Peter Lee
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Publication number: 20100314664Abstract: High frequency performance of (e.g., silicon) bipolar devices is improved by reducing the extrinsic base resistance Rbx. Emitter, base and collector regions are formed in or on a semiconductor substrate. The emitter contact has a portion that overhangs a portion of the extrinsic base contact, thereby forming a cave-like cavity between the overhanging portion of the emitter contact and the underlying regions of the extrinsic base contact. When the emitter contact and the extrinsic base contact are silicided, some of the metal atoms forming the silicide penetrate into the cavity so that the highly conductive silicided extrinsic base contact extends under the edge of the emitter contact closer to the base itself, thereby reducing Rbx. Smaller Rbx provides transistors with higher fMAX.Type: ApplicationFiled: July 29, 2010Publication date: December 16, 2010Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Jay P. John, James A. Kirchgessner, Vishal P. Trivedi
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Patent number: 7821102Abstract: A power transistor (210) comprises a plurality of unit cell devices (212), a base contact configuration, an emitter contact configuration, and a collector contact configuration. The plurality of unit cell devices is arranged along an axis (194), each unit cell device including base (80), emitter (82), and collector (84) portions. The base contact configuration includes (i) a first base feed (150) coupled to the base portion of each unit cell device via a first end of at least one base finger (154) associated with a corresponding unit cell device and (ii) a second base feed (152) coupled to the base portion of each unit cell device via an opposite end of the at least one base finger associated with the corresponding unit cell device.Type: GrantFiled: February 5, 2007Date of Patent: October 26, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Dragan Zupac, Sandra J. Wipf, Theresa M. Keller, Elizabeth C. Glass
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Publication number: 20100182729Abstract: Embodiments of the present invention provide a semiconductor device that includes a transistor device having a first, a second, and a third node; and an interconnect structure having at least one wire and the wire having a first and a second end with the first end of the wire being connected to one of the first, the second, and the third node of the transistor device. The wire is conductive and adapted to provide an operating current in a first direction during a normal operating mode, and adapted to provide a repairing current in a second direction opposite to the first direction during a repair mode of the semiconductor device. In one embodiment the transistor device is a bipolar transistor with the first, second, and third nodes being an emitter, a base, and a collector of the bipolar transistor. The wire is connected to one of the emitter and the collector. Method of operating the semiconductor device and current supplying circuit for the semiconductor device are also disclosed.Type: ApplicationFiled: January 19, 2009Publication date: July 22, 2010Applicant: International Business Machines CorporationInventors: Ping-Chuan Wang, Zhijian Yang, Fernando J. Guarin, J. Edwin Hostetter, Kai D. Feng
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Patent number: 7755168Abstract: A semiconductor device has a first conductivity-type first semiconductor region, a second conductivity-type second semiconductor region and a second conductivity-type third semiconductor region both located on or above the first semiconductor region, a second conductivity-type fourth semiconductor region between the second semiconductor region and the third semiconductor region, and a first conductivity-type fifth semiconductor region between the third semiconductor region and the fourth semiconductor region. The fourth semiconductor region and the fifth semiconductor region are electrically connected by a conductive member. A distance between the fourth semiconductor region and the third semiconductor region is larger than a width of the fourth semiconductor region.Type: GrantFiled: April 20, 2007Date of Patent: July 13, 2010Assignee: Mitsubishi Electric CorporationInventors: Tomohide Terashima, Shiori Uota
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Publication number: 20100155896Abstract: A high-frequency bipolar transistor includes an emitter contact adjoining an emitter connection region, a base contact adjoining a base connection region, and a collector contact adjoining a collector connection region. A first insulation layer is disposed on the base connection region. The collector connection region contains a buried layer, which connects the collector contact to a collector zone. A silicide or salicide region is provided on the buried layer and connects the collector contact to the collector zone in a low-impedance manner. A second insulation layer is disposed on the collector connection region but not on the silicide region.Type: ApplicationFiled: March 3, 2010Publication date: June 24, 2010Inventors: Josef Böck, Thomas Meister, Reinhard Stengl, Herbert Schafer
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Patent number: 7719088Abstract: A high-frequency bipolar transistor includes an emitter contact adjoining an emitter connection region, a base contact adjoining a base connection region, and a collector contact adjoining a collector connection region. A first insulation layer is disposed on the base connection region. The collector connection region contains a buried layer, which connects the collector contact to a collector zone. A silicide or salicide region is provided on the buried layer and connects the collector contact to the collector zone in a low-impedance manner. A second insulation layer is disposed on the collector connection region but not on the silicide region.Type: GrantFiled: October 20, 2005Date of Patent: May 18, 2010Assignee: Infineon Technologies AGInventors: Josef Böck, Thomas Meister, Reinhard Stengl, Herbert Schäfer
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Patent number: 7709931Abstract: An IGBT is disclosed which has a set of inside trenches and an outside trench formed in its semiconductor substrate. The substrate has emitter regions adjacent the trenches, a p-type base region adjacent the emitter regions and trenches, and an n-type base region comprising a first and a second subregion contiguous to each other. The first subregion of the n-type base region is contiguous to the inside trenches whereas the second subregion, less in impurity concentration than the first, is disposed adjacent the outside trench. Breakdown is easier to occur than heretofore adjacent the inside trenches, saving the device from destruction through mitigation of a concentrated current flow adjacent the outside trench.Type: GrantFiled: June 13, 2008Date of Patent: May 4, 2010Assignee: Sanken Electric Co., Ltd.Inventor: Katsuyuki Torii
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Patent number: 7705425Abstract: A high-power solid-state transistor structure comprised of a plurality of emitter or gate fingers arranged in a uniform or non-uniform manner to provide improved high power performance is disclosed. Each of the fingers is associated with a corresponding one of a plurality of sub-cells. In an exemplary embodiment, the fingers may be arranged in a 1-D or 2-D form having a “hollow-center” layout where one or more elongated emitter fingers or subcells are left out during design or disconnected during manufacture. In another exemplary embodiment, the fingers may be arranged in a 1-D or 2-D form having one or more “arc-shaped” rows that includes one or more elongated emitter fingers or subcells. The structure can be practically implemented and the absolute thermal stability can be maintained for very high power transistors with reduced adverse effects due to random variation in the manufacturing and design process.Type: GrantFiled: August 2, 2006Date of Patent: April 27, 2010Assignee: Wisconsin Alumni Research FoundationInventors: Zhenqiang Ma, Ningyue Jiang
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Publication number: 20100078765Abstract: A power semiconductor component is described. One embodiment provides a semiconductor body having an inner zone and an edge zone. A base zone of a first conduction type is provided. The base zone is arranged in the at least one inner zone and the at least one edge zone. An emitter zone of a second conduction type is provided. The emitter zone is arranged adjacent to the base zone in a vertical direction of the semiconductor body. A field stop zone of the first conduction type is provided. The field stop zone is arranged in the base zone and has a first field stop zone section having a first dopant dose in the edge zone and a second field stop zone section having a second dopant dose in the inner zone. The first dopant dose is higher than the second dopant dose.Type: ApplicationFiled: September 30, 2008Publication date: April 1, 2010Applicant: Infineon Technologies Austria AGInventors: Hans-Joachim Schulze, Manfred Pfaffenlehner
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Publication number: 20100052102Abstract: Emitter contact holes formed under emitter electrodes in a first layer and emitter through holes formed thereon are arranged so as not to overlap each other, and, for each emitter electrode, the multiple emitter contact holes and the multiple emitter through holes are provided so as to be separated from each other. Thereby, the top surface of an emitter electrode in a second layer is influenced by at most only a level difference of each emitter through hole formed in an insulating film having a larger thickness, and thus the flatness of the top surface of the emitter electrode in the second layer is improved. Accordingly, fixation failure of a metal plate can be avoided.Type: ApplicationFiled: August 26, 2009Publication date: March 4, 2010Applicants: SANYO Electric Co., Ltd., SANYO Semiconductor Co., Ltd.Inventor: Kazuya Takahashi
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Publication number: 20090321879Abstract: High frequency performance of (e.g., silicon) bipolar devices (100, 100?) is improved by reducing the extrinsic base resistance Rbx. Emitter (160), base (161) and collector (190) are formed in or on a semiconductor substrate (110). The emitter contact (154) has a portion (154?) that overhangs a portion (1293, 293?) of the extrinsic base contact (129), thereby forming a cave-like cavity (181, 181?) between the overhanging portion (154?) of the emitter contact (154) and the underlying regions (1293, 1293?) of the extrinsic base contact (129). When the emitter contact and the extrinsic base contact are silicided, some of the metal atoms forming the silicide penetrate into the cavity (181, 181?) so that the highly conductive silicided extrinsic base contact extends under the edge of the emitter contact (154?) closer to the base (161, 163) itself, thereby reducing Rbx. Smaller Rbx provides transistors with higher fMAX.Type: ApplicationFiled: June 26, 2008Publication date: December 31, 2009Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Jay P. John, James A. Kirchgessner, Vishal P. Trivedi
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Patent number: 7629669Abstract: A semiconductor apparatus includes a first transistor having a first emitter electrode, a first base electrode, and a first collector electrode in a region over a first region. Base lead-out polysilicon connecting the first base electrode and a first base region passes over a second region provided out of the first region and a resistor element is added. A writing voltage is reduced in an antifuse using two bipolar transistors.Type: GrantFiled: April 26, 2006Date of Patent: December 8, 2009Assignee: Hitachi, Ltd.Inventors: Koji Ishikawa, Kazutaka Mori, Hiroshige Kogayu, Tamotsu Miyake, Mitsugu Kusunoki
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Patent number: 7622796Abstract: A semiconductor package is disclosed. The package includes a leadframe having drain, source and gate leads, and a semiconductor die coupled to the leadframe, the semiconductor die having a plurality of metalized source contacts. A bridged source plate interconnection has a bridge portion, valley portions disposed on either side of the bridge portion, plane portions disposed on either side of the valley portions and the bridge portion, and a connection portion depending from one of the plane portions, the bridged source plate interconnection connecting the source lead with the plurality of metalized source contacts. The bridge portion is disposed in a plane above the plane of the valley portions while the plane portions are disposed in a plane intermediate the plane of the bridge portion and the plane of the valley portions.Type: GrantFiled: September 28, 2007Date of Patent: November 24, 2009Assignee: Alpha and Omega Semiconductor LimitedInventors: Lei Shi, Ming Sun, Kai Liu
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Publication number: 20090250724Abstract: A bipolar transistor is formed on a heavily doped silicon substrate (1). An epitaxially grown collector (12) is formed on the substrate (1) and comprises silicon containing germanium at least at the top of the collector (12). An epitaxial base (13) is formed on the collector (12) to have the opposite polarity and also comprises silicon containing germanium at least at the bottom of the base (13). An emitter is formed at the top of the base (13) and comprises polysilicon doped to have the same polarity as the collector (12).Type: ApplicationFiled: December 14, 2005Publication date: October 8, 2009Applicant: X-FAB SEMICONDUCTOR FOUNDRIES AGInventor: John Nigel Ellis
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Patent number: 7598521Abstract: A semiconductor device includes a semiconductor chip having a collector region, a base region, and an emitter region that are formed in a semiconductor substrate. The semiconductor chip also includes a base electrode strip in contact with the base region, an emitter electrode strip in contact with the emitter region, an emitter electrode plate disposed above the base electrode strip and the emitter electrode strip, and a base electrode plate disposed adjacent the emitter electrode plate. The device also includes a base terminal external to the semiconductor chip and connected to the base electrode plate and an emitter terminal external to the semiconductor chip and connected to the emitter electrode plate. The base terminal and the emitter terminal are disposed along an edge of the semiconductor chip, and the base electrode strip and the emitter electrode strip are perpendicular to the edge of the semiconductor chip.Type: GrantFiled: February 25, 2005Date of Patent: October 6, 2009Assignee: Sanyo Electric Co., Ltd.Inventor: Osamu Akaki
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Patent number: 7589379Abstract: This invention is generally concerned with power semiconductors such as power MOS transistors, insulated gate by bipolar transistors (IGBTs), high voltage diodes and the like, and methods for their fabrication. A power semiconductor, the semiconductor comprising: a power device, said power device having first and second electrical contact regions and a drift region extending therebetween; and a semiconductor substrate mounting said device; and wherein said power semiconductor includes an electrically insulating layer between said semiconductor substrate and said power device, said electrically insulating layer having a thickness of at least 5 ?m.Type: GrantFiled: September 9, 2004Date of Patent: September 15, 2009Assignee: Cambridge Semiconductor LimitedInventors: Gehan Anil Joseph Amaratunga, Florin Udrea
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Publication number: 20090218658Abstract: The present invention provides a technology that makes it possible to enhance the gain and the efficiency of an RF bipolar transistor. Device isolation is given between a p+ type isolation region and an n+ type collector embedded region and between a p+ type isolation region and an n type collector region (an n+ type collector extraction region) with an isolation section that surrounds the collector extraction region in a plan view and is formed by embedding a dielectric film in a groove penetrating an isolation section, a collector region, and a collector embedded region and reaching a substrate. Further, a current route is formed between an emitter wiring (a wiring) and the substrate with an electrically conductive layer formed by embedding the electrically conductive layer in a groove penetrating a dielectric film, silicon oxide films, a semiconductor region, and the isolation regions and reaching the substrate, and thereby the impedance between the emitter wiring and the substrate is reduced.Type: ApplicationFiled: May 5, 2009Publication date: September 3, 2009Inventor: HISASHI TOYODA
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Publication number: 20090212394Abstract: The invention provides a bipolar transistor with an improved performance because of a reduced collector series resistance and a reduced collector to substrate capacitance. The bipolar transistor includes a protrusion (5) which size may be reduced to a dimension that cannot be achieved with lithographic techniques. The protrusion (5) comprises a collector region (21) and a base region (22), in which the collector region (21) covers and electrically connects to a first portion of a first collector connecting region (3). A second collector connecting region (13) covers a second portion of the first collector connecting region (3) and is separated from the protrusion (5) by an insulation layer (10, 11), which covers the sidewalls of the protrusion (5). A contact to the base region (22) is provided by a base connecting region (15), which adjoins the protrusion (5) and which is separated from the second collector connecting region (13) by an insulation layer (14).Type: ApplicationFiled: April 21, 2006Publication date: August 27, 2009Applicant: NXP B.V.Inventors: Joost Melai, Vijayarachavan Madakasira
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Publication number: 20090194846Abstract: The present invention discloses a fully Cu-metallized III-V group compound semiconductor device, wherein the fully Cu-metallized of a III-V group compound semiconductor device is realized via using an N-type gallium arsenide ohmic contact metal layer formed of a palladium/germanium/copper composite metal layer, a P-type gallium arsenide ohmic contact metal layer formed of a platinum/titanium/platinum/copper composite metal layer, and interconnect metals formed of a titanium/platinum/copper composite metal layer. Thereby, the fabrication cost of III-V group compound semiconductor devices can be greatly reduced, and the performance of III-V group compound semiconductor devices can be greatly promoted. Besides, the heat-dissipation effect can also be increased, and the electric impedance can also be reduced.Type: ApplicationFiled: February 2, 2008Publication date: August 6, 2009Inventors: Edward Yi CHANG, Ke-Shian Chen
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Patent number: 7566947Abstract: Disclosed is a semiconductor device with a bipolar transistor and method of fabricating the same. The device may include a collector region in a semiconductor substrate. A base pattern may be disposed on the collector region. A hard mask pattern may be disposed on the base pattern. The hard mask pattern may include a buffering insulation pattern and a flatness stopping pattern stacked in sequence. An emitter electrode may be disposed in a hole that locally exposes the base pattern, penetrating the hard mask pattern. A base electrode may contact an outer sidewall of the hard mask pattern and may be disposed on the base pattern. The flatness stopping pattern may contain an insulative material with etching selectivity to the buffering insulation pattern, the emitter electrode, and the base electrode.Type: GrantFiled: December 29, 2006Date of Patent: July 28, 2009Assignee: Samsung Electronics Co., Ltd.Inventor: Bong-Gil Yang
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Patent number: 7554174Abstract: Disclosed are a bipolar transistor comprising an emitter terminal and a base terminal having substantially equal heights, and a method of fabricating the same. The bipolar transistor comprises a silicon-germanium layer acting as a base and formed on a semiconductor layer acting as a collector. The bipolar transistor further comprises an insulating layer having contact windows for an emitter terminal and a collector terminal. The emitter and collector terminals are formed by forming a polysilicon layer filling the contact windows and performing a planarization process on the polysilicon layer. An ion implantation process is performed to form a polysilicon emitter terminal and a polysilicon base terminal.Type: GrantFiled: January 24, 2006Date of Patent: June 30, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Young-Dae Seo, Bong-Gil Yang
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Patent number: 7550852Abstract: An integrated circuit chip which has a plurality of pads and non-reflowable contact members to be connected by reflow attachment to external parts. Each of these contact members has a height-to-diameter ratio and uniform diameter favorable for absorbing strain under thermo-mechanical stress. The members have a solderable surface on each end and a layer of reflowable material on each end. Each member is solder-attached at one end to a chip contact pad, while the other end of each member is operable for reflow attachment to external parts.Type: GrantFiled: September 6, 2006Date of Patent: June 23, 2009Assignee: Texas Instruments IncorporatedInventors: John P Tellkamp, Akira Matsunami
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Patent number: 7538407Abstract: A semiconductor apparatus (100) comprises a low potential reference circuit region (1) and a high potential reference circuit region (2), and the high potential reference circuit region (2) is surrounded by a high withstand voltage separating region (3). By a trench (4) formed in the outer periphery of the high withstand voltage separating region (3), the low potential reference circuit region (1) and high potential reference circuit region (2) are separated from each other. Further, the trench (4) is filled up with an insulating material, and insulates the low potential reference circuit region (1) and high potential reference circuit region (2). The high withstand voltage separating region (3) is partitioned by the trench (4), high withstand voltage NMOS (5) or high withstand voltage PMOS (6) is provided in the partitioned position.Type: GrantFiled: October 8, 2004Date of Patent: May 26, 2009Assignee: Toyota Jidosha Kabushiki KaishaInventors: Masato Taki, Hideki Tojima
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Publication number: 20090057774Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may comprise forming an opening in a masking layer, implanting an amorphizing species into a silicon region disposed within the opening, wherein the silicon region comprises a portion of an emitter of a bipolar transistor; and forming a silicide layer on the silicon region.Type: ApplicationFiled: October 24, 2008Publication date: March 5, 2009Inventors: Kelin J. Kuhn, Bo Zheng
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Patent number: 7498658Abstract: A trench gate type IGBT includes: a first semiconductor layer; a second semiconductor on the first semiconductor layer; a third semiconductor on the second semiconductor layer; trenches for separating the third semiconductor layer into first regions and second regions; a gate insulation film on an inner wall of each trench; a gate electrode on the gate insulation film; a fourth semiconductor layer in a surface portion of each first region and contacting each trench; a first electrode connecting to the first region and the fourth semiconductor layer; and a second electrode connecting to the first semiconductor layer. The first regions and the second regions are alternately arranged. Two second regions are continuously connected together to be integrated into one body.Type: GrantFiled: April 13, 2006Date of Patent: March 3, 2009Assignee: DENSO CORPORATIONInventors: Yoshihiko Ozeki, Kensaku Yamamoto
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Patent number: 7466010Abstract: The present invention provides a bipolar transistor having a raised extrinsic base silicide and an emitter contact border that are self-aligned. The bipolar transistor of the present invention exhibit reduced parasitics as compared with bipolar transistors that do not include a self-aligned silicide and a self-aligned emitter contact border. The present invention also is related to methods of fabricating the inventive bipolar transistor structure. In the methods of the present invention, a block emitter polysilicon region replaces a conventional T-shaped emitter polysilicon.Type: GrantFiled: July 5, 2005Date of Patent: December 16, 2008Assignee: International Business Machines CorporationInventors: David C. Ahlgren, Gregory G. Freeman, Marwan H. Khater, Richard P. Volant
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Patent number: 7465969Abstract: A bipolar transistor includes a Si single crystalline layer serving as a collector, a single crystalline Si/SiGeC layer and a polycrystalline Si/SiGeC layer which are formed on the Si single crystalline layer, an oxide film having an emitter opening portion, an emitter electrode, and an emitter layer. An intrinsic base layer is formed on the single crystalline Si/SiGeC layer, part of the single crystalline Si/SiGeC layer, the polycrystalline Si/SiGeC layer and the Co silicide layer together form an external base layer. The thickness of the emitter electrode is set so that boron ions implanted into the emitter electrode and diffused therein do not reach an emitter-base junction portion.Type: GrantFiled: June 12, 2006Date of Patent: December 16, 2008Assignee: Panasonic CorporationInventors: Teruhito Ohnishi, Koichiro Yuki, Tsuneichiro Sano, Tohru Saitoh, Ken Idota, Takahiro Kawashima, Shigeki Sawada
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Patent number: 7456487Abstract: This disclosure concerns a semiconductor device that includes a first base layer; second base layers provided on a part of a first surface of the first base layer; trenches formed on each side of the second base layers; an emitter layer formed on a surface of the second base layers; a collector layer provided below a second surface of the first base layer, an insulating film formed on an inner wall of the trench, the insulating film being thicker on a bottom of the trench than on a side surface of the trench; a gate electrode formed within the trench, and isolated by the insulating film; and a space section provided between the second base layers adjacent to each other, the space section being electrically isolated from the emitter layer and the second base layers, wherein the space section includes a semiconductor layer being deeper than the second base layers.Type: GrantFiled: October 28, 2004Date of Patent: November 25, 2008Assignee: Kabushiki Kaisha ToshibaInventors: Tsuneo Ogura, Masakazu Yamaguchi, Tomoki Inoue, Hideaki Ninomiya, Koichi Sugiyama
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Patent number: 7420227Abstract: The present invention is a compound semiconductor device characterized in that it is Cu-metalized to improved the reliability of the device and to greatly reduce the cost of production.Type: GrantFiled: June 22, 2005Date of Patent: September 2, 2008Assignee: National Chiao Tung UniversityInventors: Edward Yi Chang, Shang-Wen Chang, Cheng-Shih Lee
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Publication number: 20080169513Abstract: Integrated circuits (ICs) utilize bipolar transistors in electro-static discharge (ESD) protection circuits to shunt discharge currents during ESD events to protect the components in the ICs. Bipolar transistors are subject to non-uniform current crowding across the emitter-base junction during ESD events, which results in less protection for the IC components and degradation of the bipolar transistor. This invention comprises multiple contact islands (126) on the emitter (116) of a bipolar transistor, which act to spread current uniformly across the emitter-base junction. Also included in this invention is segmentation of the emitter diffused region to further improve current uniformity and biasing of the transistor. This invention can be combined with drift region ballasting or back-end ballasting to optimize an ESD protection circuit.Type: ApplicationFiled: September 28, 2007Publication date: July 17, 2008Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: Marie Denison
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Publication number: 20080157280Abstract: According to one embodiment, a collector electrode including metal is used for a sink region for connecting an n+ type buried layer, so that the sink region can be narrowly formed. Further, an interval between a base region and the collector electrode can be reduced, thereby considerably decreasing the size of the transistor. Furthermore, collector resistance is reduced, so that the performance of the transistor can be improved.Type: ApplicationFiled: October 31, 2007Publication date: July 3, 2008Inventor: Nam Joo KIM
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Publication number: 20080150083Abstract: In the substrate and the epitaxial layer, isolation regions are formed to divide the substrate and the epitaxial layer into a plurality of element formation regions. Each of the isolation regions is formed by connecting first and second P type buried diffusion layers with a P type diffusion layer. By disposing the second P type buried diffusion layer between the first P type buried diffusion layer and the P type diffusion layer, a lateral diffusion width of the first P type buried diffusion layer is reduced. This structure allows a formation region of the isolation region to be reduced in size.Type: ApplicationFiled: December 20, 2007Publication date: June 26, 2008Applicants: Sanyo Electric Co., Ltd., Sanyo Semiconductor Co., Ltd.Inventors: Mitsuru Soma, Hirotsugu Hata, Yoshimasa Amatatsu