Diamond Or Silicon Carbide Patents (Class 257/77)
  • Patent number: 11804453
    Abstract: A semiconductor device includes a semiconductor element, a lead frame, a conductive member, a resin composition and a sealing resin. The semiconductor element has an element front surface and an element back surface facing away in a first direction. The semiconductor element is mounted on the lead frame. The conductive member is bonded to the lead frame, electrically connecting the semiconductor element and the lead frame. The resin composition covers a bonded region where the conductive member and lead frame are bonded while exposing part of the element front surface. The sealing resin covers part of the leadframe, the semiconductor element, and the resin composition. The resin composition has a greater bonding strength with the lead frame than a bonding strength between the sealing resin and lead frame and a greater bonding strength with the conductive member than a bonding strength between the sealing resin and conductive member.
    Type: Grant
    Filed: December 2, 2022
    Date of Patent: October 31, 2023
    Assignee: ROHM CO., LTD.
    Inventors: Hidetoshi Abe, Makoto Ikenaga, Kensei Takamoto
  • Patent number: 11800823
    Abstract: Some embodiments relate to a method for manufacturing a memory device. The method includes forming a bottom electrode over a substrate. A heat dispersion layer is formed over the bottom electrode. A dielectric layer is formed over the heat dispersion layer. A top electrode is formed over the dielectric layer. The heat dispersion layer comprises a first dielectric material.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: October 24, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fa-Shen Jiang, Hsing-Lien Lin
  • Patent number: 11795577
    Abstract: A SiC epitaxial wafer includes a SiC substrate and an epitaxial layer laminated on the SiC substrate, wherein the epitaxial layer contains an impurity element which determines the conductivity type of the epitaxial layer and boron which has a conductivity type different from the conductivity type of the impurity element, and the concentration of boron is less than 1.0×1014 cm?3 at any position in the plane of the epitaxial layer.
    Type: Grant
    Filed: August 2, 2022
    Date of Patent: October 24, 2023
    Assignee: Resonac Corporation
    Inventors: Kensho Tanaka, Yoshikazu Umeta
  • Patent number: 11798982
    Abstract: Methods may include providing a device structure including a well formed in an epitaxial layer, and forming a plurality of shielding layers in the device structure, wherein at least one shielding layer is formed between a pair of adjacent sacrificial gates of a plurality of sacrificial gates. The method may further include forming a contact over the at least one shielding layer, forming a fill layer over the contact, and forming a plurality of trenches into the device structure, wherein at least one trench of the plurality of trenches is formed between a pair of adjacent shielding layers of the plurality of shielding layers, and wherein the at least one trench of the plurality of trenches is defined in part by a sidewall of the fill layer. The method may further include forming a gate structure within the at least one trench of the plurality of trenches.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: October 24, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Qintao Zhang, Samphy Hong, Jason Appell, David J. Lee
  • Patent number: 11789098
    Abstract: A measurement device for measuring MR signals in a MR device may include first and second magnetometers and a controller. The first magnetometer may be a quantum spin magnetometer that includes a sensor material having a spin defect center including Zeeman splitting states dependent on an external magnetic field of the MR device, an optical excitation source and a microwave excitation source for electromagnetically exciting the sensor material, and a measurement sensor for measuring optical signals emitted by the excited sensor material element and depending on the Zeeman splitting states. The controller may be configured to determine a working frequency of the microwave excitation source of the first magnetometer from the total magnetic field strength measured by the second magnetometer, and control the microwave excitation source to use the determined working frequency as microwave frequency, such that the first magnetometer measures the MR signals as the optical signal.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: October 17, 2023
    Assignee: Siemens Healthcare GmbH
    Inventor: Stefan Popescu
  • Patent number: 11784050
    Abstract: A microelectronic device may have side surfaces each including a first portion and a second portion. The first portion may have a highly irregular surface topography extending from an adjacent surface of the microelectronic device. The second portion may have a less uneven surface extending from the first portion to an opposing surface of the microelectronic device. Methods of forming the microelectronic device may include creating dislocations in the wafer in a street between the one or more microelectronic devices by implanting ions and cleaving the wafer responsive to failure of stress concentrations near the dislocations through application of heat, tensile forces or a combination thereof. Related packages and methods are also disclosed.
    Type: Grant
    Filed: April 27, 2021
    Date of Patent: October 10, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Andrew M. Bayless, Brandon P. Wirz
  • Patent number: 11784038
    Abstract: The present disclosure relates to the technical field of silicon carbide processing, and discloses a method and device for preferential etching of dislocation of a silicon carbide wafer. According to the method and device of the present disclosure, a concentration of the etchant is effectively reduced while the high-temperature etching activity is guaranteed, the dislocations on the carbon surface and the silicon surface of the silicon carbide wafer are exposed, and dislocation etching pits with high distinguishing degree are obtained on the carbon surface and the silicon surface of the silicon carbide wafer and thus identified clearly.
    Type: Grant
    Filed: December 21, 2022
    Date of Patent: October 10, 2023
    Assignee: ZJU-Hangzhou Global Scientific and Technological Innovation Center
    Inventors: Jiajun Li, Rong Wang, Xiaodong Pi, Deren Yang
  • Patent number: 11784244
    Abstract: A method for manufacturing a semiconductor device having a junction field effect transistor, includes: preparing a substrate having a first conductivity type drift layer; forming a first conductivity type channel layer above the drift layer by an epitaxial growth, to thereby produce a semiconductor substrate; forming a second conductivity type gate layer within the channel layer by performing an ion-implantation; forming a second conductivity type body layer at a position separated from the gate layer within the channel layer by performing an ion-implantation; and forming a second conductivity type shield layer at a position that is to be located between the gate layer and the drift layer within the channel layer by performing an ion-implantation. The shield layer is formed to face the gate layer while being separated from the gate layer, and is kept to a potential different from that of the gate layer.
    Type: Grant
    Filed: June 25, 2021
    Date of Patent: October 10, 2023
    Assignee: DENSO CORPORATION
    Inventor: Kenji Kono
  • Patent number: 11784049
    Abstract: A method for manufacturing an electronic device based on SiC includes forming a structural layer of SiC on a front side of a substrate. The substrate has a back side that is opposite to the front side along a direction. Active regions of the electronic device are formed in the structure layer, and the active regions are configured to generate or conduct electric current during the use of the electronic device. A first electric terminal is formed on the structure layer, and an intermediate layer is formed at the back side of the substrate. The intermediate layer is heated by a LASER beam in order to generate local heating such as to favor the formation of an ohmic contact of Titanium compounds. A second electric terminal of the electronic device is formed on the intermediate layer.
    Type: Grant
    Filed: March 3, 2021
    Date of Patent: October 10, 2023
    Assignee: STMicroelectronics S.r.l.
    Inventors: Simone Rascuna', Paolo Badala', Anna Bassi, Mario Giuseppe Saggio, Giovanni Franco
  • Patent number: 11784641
    Abstract: Various examples are provided related to supercascode power switches that can be used in, e.g., HV and MV applications. This disclosure introduces a cascaded supercascode (CSC) power switch which can include a series of unit supercascode (USC) circuits; a control switch coupled in series with the series of USC circuits; and an external balancing network coupled to each of the n USC circuits. The series has a plurality of USC circuits, with each of the USC circuits including first and second switches coupled in series and an internal balancing network coupled across the first and second switches. A source of each of the USC circuits is a source of the first switch. The internal balancing network can include a capacitor connected between a gate of the second switch and the source of the first switch and a diode connected in parallel with the capacitor.
    Type: Grant
    Filed: January 15, 2022
    Date of Patent: October 10, 2023
    Assignee: NORTH CAROLINA STATE UNIVERSITY
    Inventors: Utkarsh Mehrotra, Douglas C. Hopkins
  • Patent number: 11776994
    Abstract: A silicon carbide MOSFET device and method for making thereof are disclosed. The silicon carbide MOSFET device comprises a substrate heavily doped with a first conductivity type and an epitaxial layer lightly doped with the first conductivity type. A body region of a second conductivity type opposite the first is formed in epitaxial layer and an accumulation mode region of the first conductivity type is formed in the body region and an inversion mode region of the second conductivity type formed in the body region. The accumulation mode region is located between the inversion mode region and a junction field effect transistor (JFET) region of the epitaxial layer.
    Type: Grant
    Filed: February 16, 2021
    Date of Patent: October 3, 2023
    Assignee: Alpha and Omega Semiconductor International LP
    Inventors: David Sheridan, Arash Salemi, Madhur Bobde
  • Patent number: 11776962
    Abstract: An integrated circuit device is provided. The integrated circuit device includes a fin-type active region that extends in a first direction on a substrate, a gate structure that intersects with the fin-type active region and extends in a second direction, perpendicular to the first direction, on the substrate, and a first contact structure that is disposed on the gate structure, and has a greater width at a top surface than a bottom surface thereof.
    Type: Grant
    Filed: April 7, 2022
    Date of Patent: October 3, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hong-sik Shin, Heung-sik Park, Do-haing Lee, In-keun Lee, Seung-ho Chae, Ha-young Choi
  • Patent number: 11769801
    Abstract: In a guard ring section of a silicon carbide semiconductor device, an electric field relaxation layer for relaxing an electric field is formed in a surface layer portion of a drift layer, so that electric field is restricted from penetrating between guard rings. Thus, an electric field concentration is relaxed. Accordingly, a SiC semiconductor device having a required withstand voltage is obtained.
    Type: Grant
    Filed: September 16, 2021
    Date of Patent: September 26, 2023
    Assignees: DENSO CORPORATION, TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Yuichi Takeuchi, Ryota Suzuki, Tatsuji Nagaoka, Sachiko Aoi
  • Patent number: 11764275
    Abstract: An apparatus including a transistor device disposed on a surface of a circuit substrate, the device including a body including opposing sidewalls defining a width dimension and a channel material including indium, the channel material including a profile at a base thereof that promotes indium atom diffusivity changes in the channel material in a direction away from the sidewalls. A method including forming a transistor device body on a circuit substrate, the transistor device body including opposing sidewalls and including a buffer material and a channel material on the buffer material, the channel material including indium and the buffer material includes a facet that promotes indium atom diffusivity changes in the channel material in a direction away from the sidewalls; and forming a gate stack on the channel material.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: September 19, 2023
    Assignee: Intel Corporation
    Inventors: Chandra S. Mohapatra, Glenn A. Glass, Harold W. Kennel, Anand S. Murthy, Willy Rachmady, Gilbert Dewey, Sean T. Ma, Matthew V. Metz, Jack T. Kavalieros, Tahir Ghani
  • Patent number: 11756863
    Abstract: According to an embodiment, provided is a semiconductor device includes a semiconductor layer; a first electrode; a second electrode; an electrode pad; a wiring layer electrically connected to the gate electrode; a first polycrystalline silicon layer electrically connected to the electrode pad and the wiring layer; and an insulating layer provided between the first polycrystalline silicon layer and the electrode pad and between the first polycrystalline silicon layer and the wiring layer and having a first opening and a second opening. The electrode pad and the first polycrystalline silicon layer are electrically connected via an inside of the first opening. The wiring layer and the first polycrystalline silicon layer are electrically connected via an inside of the second opening, A first opening area of the first opening is larger than a second opening area of the second opening.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: September 12, 2023
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventor: Hiroshi Kono
  • Patent number: 11749722
    Abstract: A semiconductor device of embodiments includes a silicon carbide layer having a first face and a second face, a gate electrode, a gate insulating layer on the first face. The silicon carbide layer includes a first silicon carbide region of a first conductive type; a second silicon carbide region of a second conductive type disposed between the first silicon carbide region and the first face; a third silicon carbide region of a second conductive type between the first silicon carbide region and the first face; a fourth silicon carbide region; a fifth silicon carbide region; a sixth silicon carbide region of a second conductive type between the first silicon carbide region and the first face and between the second silicon carbide region and the third silicon carbide region; and a crystal defect. The crystal defect is in the sixth silicon carbide region.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: September 5, 2023
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventors: Takuma Suzuki, Sozo Kanie, Chiharu Ota, Susumu Obata, Kazuhisa Goto
  • Patent number: 11735415
    Abstract: A first main surface is a (000-1) plane or a plane inclined by an angle of less than or equal to 8° relative to the (000-1) plane. A reaction chamber has a cross-sectional area of more than or equal to 132 cm2 and less than or equal to 220 cm2 in a plane perpendicular to a direction of movement of a mixed gas. When an X axis indicates a first value and a Y axis indicates a second value, the first value and the second value fall within a hexagonal region surrounded by first coordinates, second coordinates, third coordinates, fourth coordinates, fifth coordinates and sixth coordinates in XY plane coordinates, where the first coordinates are (0.038, 0.0019), the second coordinates are (0.069, 0.0028), the third coordinates are (0.177, 0.0032), the fourth coordinates are (0.038, 0.0573), the fifth coordinates are (0.069, 0.0849), and the sixth coordinates are (0.177, 0.0964).
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: August 22, 2023
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Takaya Miyase, Keiji Wada
  • Patent number: 11735654
    Abstract: A silicon carbide semiconductor device includes a substrate, a drift layer disposed above the substrate, a base region disposed above the drift layer, a source region disposed above the base region, a gate trench formed deeper than the base region from a surface of the source region, a gate insulating film covering an inner wall surface of the gate trench, a gate electrode disposed on the gate insulating film, an interlayer insulating film covering the gate electrode and the gate insulating film and having a contact hole, a source electrode brought in ohmic contact with the source region through the contact hole, and a drain electrode disposed to a rear surface of the substrate. The source region has a lower impurity concentration on a side close to the base region than on a surface side brought in ohmic contact with the source region.
    Type: Grant
    Filed: October 26, 2021
    Date of Patent: August 22, 2023
    Assignee: DENSO CORPORATION
    Inventors: Aiko Kaji, Yuichi Takeuchi, Shuhei Mitani, Ryota Suzuki, Yusuke Yamashita
  • Patent number: 11735633
    Abstract: A silicon carbide device includes a silicon carbide body having a hexagonal crystal lattice with a c-plane and with further main planes. The further main planes include a-planes and m-planes. A mean surface plane of the silicon carbide body is tilted to the c-plane by an off-axis angle. The silicon carbide body includes a columnar portion with column sidewalls. At least three of the column sidewalls are oriented along a respective one of the further main planes. A trench gate structure is in contact with the at least three of the column sidewalls.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: August 22, 2023
    Assignee: Infineon Technologies AG
    Inventors: Ralf Siemieniec, Rudolf Elpelt, Anton Mauder
  • Patent number: 11735469
    Abstract: A method includes depositing a second dielectric layer over a first dielectric layer, depositing a third dielectric layer over the second dielectric layer, patterning a plurality of first openings in the third dielectric layer, etching the second dielectric layer through the first openings to form second openings in the second dielectric layer, performing a plasma etching process directed at the second dielectric layer from a first direction, the plasma etching process extending the second openings in the first direction, and etching the first dielectric layer through the second openings to form third openings in the first dielectric layer.
    Type: Grant
    Filed: May 2, 2022
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-Nien Su, Shu-Huei Suen, Jyu-Horng Shieh, Ru-Gun Liu
  • Patent number: 11735595
    Abstract: Thin film tunnel field effect transistors having relatively increased width are described. In an example, integrated circuit structure includes an insulator structure above a substrate. The insulator structure has a topography that varies along a plane parallel with a global plane of the substrate. A channel material layer is on the insulator structure. The channel material layer is conformal with the topography of the insulator structure. A gate electrode is over a channel portion of the channel material layer on the insulator structure. A first conductive contact is over a source portion of the channel material layer on the insulator structure, the source portion having a first conductivity type. A second conductive contact is over a drain portion of the channel material layer on the insulator structure, the drain portion having a second conductivity type opposite the first conductivity type.
    Type: Grant
    Filed: April 14, 2022
    Date of Patent: August 22, 2023
    Assignee: Intel Corporation
    Inventors: Prashant Majhi, Brian S. Doyle, Ravi Pillarisetty, Abhishek A. Sharma, Elijah V. Karpov
  • Patent number: 11728377
    Abstract: A semiconductor device, including a substrate of a first conductivity type, an active region and a termination structure portion formed on a front surface of the substrate, and a plurality of regions of a second conductivity type formed concentrically surrounding the periphery of the active region in the termination structure portion. Each region has a higher impurity concentration than one of the regions adjacent thereto on an outside thereof. The plurality regions include first and second semiconductor regions, and an intermediate region sandwiched between, and in contact with, the first and second semiconductor regions, and a third semiconductor region. The intermediate region includes a plurality of first subregions and a plurality of second subregions that are alternately arranged along a path in parallel to a boundary between the active region and the termination structure portion, the second subregions having a lower impurity concentration than the first subregions.
    Type: Grant
    Filed: October 7, 2021
    Date of Patent: August 15, 2023
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Shoji Kitamura
  • Patent number: 11728440
    Abstract: A Schottky diode includes an upper region having a first doping concentration of a first conductivity type, the upper region disposed above the SiC substrate and extending up to a top planar surface. First and second layers of a second conductivity type are disposed in the upper region adjoining the top planar surface and extending downward to a depth. Each of the first and second layers has a second doping concentration, the depth, first doping concentration, and second doping concentration being selected such that the first and second layers are depleted of carriers at a zero bias condition of the Schottky diode. A top metal layer disposed along the top planar surface in direct contact with the upper region and the first and second layers is the anode, and bottom metal layer disposed beneath the SiC substrate is the cathode, of the Schottky diode.
    Type: Grant
    Filed: November 1, 2021
    Date of Patent: August 15, 2023
    Assignee: SEMIQ INCORPORATED
    Inventors: James A. Cooper, Rahul R. Potera
  • Patent number: 11721660
    Abstract: There is provided a novel Cu bonding wire that achieves a favorable FAB shape and reduces a galvanic corrosion in a high-temperature environment to achieve a favorable bond reliability of the 2nd bonding part. The bonding wire for semiconductor devices includes a core material of Cu or Cu alloy, and a coating layer having a total concentration of Pd and Ni of 90 atomic % or more formed on a surface of the core material. The bonding wire is characterized in that: in a concentration profile in a depth direction of the wire obtained by performing measurement using Auger electron spectroscopy (AES) so that the number of measurement points in the depth direction is 50 or more for the coating layer, a thickness of the coating layer is 10 nm or more and 130 nm or less, an average value X is 0.2 or more and 35.
    Type: Grant
    Filed: March 23, 2022
    Date of Patent: August 8, 2023
    Assignee: NIPPON MICROMETAL CORPORATION
    Inventors: Daizo Oda, Motoki Eto, Takashi Yamada, Teruo Haibara, Ryo Oishi
  • Patent number: 11721755
    Abstract: A semiconductor device includes a semiconductor layer structure comprising a source/drain region, a gate dielectric layer on the semiconductor layer structure, and a gate electrode on the gate dielectric layer. The source/drain region comprises a first portion comprising a first dopant concentration and a second portion comprising a second dopant concentration. The second portion is closer to a center of the gate electrode than the first portion.
    Type: Grant
    Filed: February 11, 2022
    Date of Patent: August 8, 2023
    Assignee: Wolfspeed, Inc.
    Inventors: Philipp Steinmann, Edward Van Brunt, Jae Hyung Park, Vaishno Dasika
  • Patent number: 11721617
    Abstract: The present disclosure describes a power module having a substrate, first and second pluralities of vertical power devices, and first and second terminal assemblies. The substrate has a top surface with a first trace and a second trace. The first plurality of vertical power devices and the second plurality of vertical power devices are electrically coupled to form part of a power circuit. The first plurality of vertical power devices is electrically and mechanically directly coupled between the first trace and a bottom of a first elongated bar of the first terminal assembly. The second plurality of vertical power devices are electrically and mechanically directly coupled between the second trace and a bottom of a second elongated bar of the second terminal assembly.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: August 8, 2023
    Assignee: WOLFSPEED, INC.
    Inventors: Brice McPherson, Brandon Passmore, Roberto M. Schupbach, Jennifer Stabach-Smith
  • Patent number: 11715768
    Abstract: A method for producing a silicon carbide component includes forming a silicon carbide layer on an initial wafer, forming a doping region of the silicon carbide component to be produced in the silicon carbide layer, and forming an electrically conductive contact structure of the silicon carbide component to be produced on a surface of the silicon carbide layer. The electrically conductive contact structure electrically contacts the doping region. Furthermore, the method includes splitting the silicon carbide layer or the initial wafer after forming the electrically conductive contact structure, such that a silicon carbide substrate at least of the silicon carbide component to be produced is split off.
    Type: Grant
    Filed: June 17, 2021
    Date of Patent: August 1, 2023
    Assignee: Infineon Technologies AG
    Inventors: Roland Rupp, Ronny Kern
  • Patent number: 11705329
    Abstract: According to the present invention, there is provided a SiC epitaxial wafer including: a 4H-SiC single crystal substrate which has a surface with an off angle with respect to a c-plane as a main surface and a bevel part on a peripheral part; and a SiC epitaxial layer having a film thickness of 20 ?m or more, which is formed on the 4H-SiC single crystal substrate, in which a density of an interface dislocation extending from an outer peripheral edge of the SiC epitaxial layer is 10 lines/cm or less.
    Type: Grant
    Filed: May 14, 2018
    Date of Patent: July 18, 2023
    Assignee: SHOWA DENKO K.K.
    Inventor: Koji Kamei
  • Patent number: 11705372
    Abstract: The embodiments described herein are directed to a method for reducing fin oxidation during the formation of fin isolation regions. The method includes providing a semiconductor substrate with an n-doped region and a p-doped region formed on a top portion of the semiconductor substrate; epitaxially growing a first layer on the p-doped region; epitaxially growing a second layer different from the first layer on the n-doped region; epitaxially growing a third layer on top surfaces of the first and second layers, where the third layer is thinner than the first and second layers. The method further includes etching the first, second, and third layers to form fin structures on the semiconductor substrate and forming an isolation region between the fin structures.
    Type: Grant
    Filed: February 11, 2020
    Date of Patent: July 18, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung-Ju Chou, Chih-Chung Chang, Jiun-Ming Kuo, Che-Yuan Hsu, Pei-Ling Gao, Chen-Hsuan Liao
  • Patent number: 11695044
    Abstract: A semiconductor device is provided and includes a substrate and a stack on the substrate. The stack includes plural active layers that are vertically stacked and spaced apart from each other, and plural gate electrodes that are on the active layers, respectively, and vertically stacked. Each active layer includes a channel layer under a corresponding one of the gate electrodes, and a source/drain layer disposed at a side of the channel layer and electrically connected to the channel layer. The channel layer is made of a two-dimensional atomic layer of a first material.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: July 4, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Shigenobu Maeda, Seunghan Seo, Yeohyun Sung
  • Patent number: 11682984
    Abstract: A converter with a half bridge circuit with at least one active half bridge branch, of which the phase connection in each case is connected via a respective switching device to a respective reference potential. A control device of the converter is configured to alternatingly conductively and non-conductively switch the respective switching device. The first and second switching device in each case includes a parallel connection of at least one transistor of a first type and at least one transistor of a second type.
    Type: Grant
    Filed: December 15, 2021
    Date of Patent: June 20, 2023
    Assignee: AUDI AG
    Inventor: Daniel Ruppert
  • Patent number: 11677023
    Abstract: A semiconductor device and a method of manufacturing a semiconductor are provided. In an embodiment, a first trench is formed in a silicon carbide layer. A second trench is formed in the silicon carbide layer to define a mesa in the silicon carbide layer between the first trench and the second trench. A first doped semiconductor material is formed in the first trench and a second doped semiconductor material is formed in the second trench. A third doped semiconductor material is formed over the mesa to define a heterojunction at an interface between the third doped semiconductor material and the mesa.
    Type: Grant
    Filed: May 4, 2021
    Date of Patent: June 13, 2023
    Assignee: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Jens Peter Konrath, Georg Pfusterschmied, Gregor Pobegen, Ulrich Schmid, Fabian Triendl
  • Patent number: 11677011
    Abstract: A method of fabricating transistors with a vertical gate in trenches includes lithographing to form wide trenches; forming dielectric in the trenches and filling the trenches with flowable material; and lithography to form narrow trenches within the wide trenches thereby exposing well or substrate before epitaxially growing semiconductor strips atop substrate exposed by the narrow trenches; removing the flowable material; growing gate oxide on the semiconductor strip; forming gate conductor over the gate oxide and into gaps between the epitaxially-grown semiconductor strips and the dielectric; masking and etching the gate conductor; and implanting source and drain regions. The transistors formed have semiconductor strips extending from a source region to a drain region, the semiconductor strips within trenches, the trench walls insulated with a dielectric, a gate oxide formed on both vertical walls of the semiconductor strip; and gate material between the dielectric and gate oxide.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: June 13, 2023
    Assignee: OmniVision Technologies, Inc.
    Inventors: Yuanliang Liu, Hui Zang
  • Patent number: 11674983
    Abstract: A SiC semiconductor device is provided that is capable of improving the detection accuracy of the current value of a principal current detected by a current sensing portion by restraining heat from escaping from the current sensing portion to a wiring member joined to a sensing-side surface electrode. The semiconductor device 1 includes a SiC semiconductor substrate, a source portion 27 including a principal-current-side unit cell 34, a current sensing portion 26 including a sensing-side unit cell 40, a source-side surface electrode 5 disposed above the source portion 27, and a sensing-side surface electrode 6 that is disposed above the current sensing portion 26 and that has a sensing-side pad 15 to which a sensing-side wire is joined, and, in the semiconductor device 1, the sensing-side unit cell 40 is disposed so as to avoid being positioned directly under the sensing-side pad 15.
    Type: Grant
    Filed: November 29, 2021
    Date of Patent: June 13, 2023
    Assignee: ROHM CO., LTD.
    Inventor: Katsuhisa Nagao
  • Patent number: 11677009
    Abstract: A semiconductor device of an embodiment includes: a silicon carbide layer including a first silicon carbide region of n-type containing one metal element selected from a group consisting of nickel (Ni), palladium (Pd), platinum (Pt), and chromium (Cr) and a second silicon carbide region of p-type containing the metal element; and a metal layer electrically connected to the first silicon carbide region and the second silicon carbide region. Among the metal elements contained in the first silicon carbide region, a proportion of the metal element positioned at a carbon site is higher than a proportion of the metal element positioned at an interstitial position. Among the metal elements contained in the second silicon carbide region, a proportion of the metal element positioned at an interstitial position is higher than a proportion of the metal element positioned at a carbon site.
    Type: Grant
    Filed: May 2, 2022
    Date of Patent: June 13, 2023
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Tatsuo Shimizu
  • Patent number: 11670685
    Abstract: A method for manufacturing a SiC-based electronic device, that includes implanting, at a front side of a solid body of SiC having a conductivity of N type, dopant species of P type, thus forming an implanted region that extends in depth in the solid body starting from the front side and has a top surface co-planar with said front side; and generating a laser beam directed towards the implanted region in order to generate heating of the implanted region at temperatures comprised between 1500° C. and 2600° C. so as to form an ohmic contact region including one or more carbon-rich layers, for example graphene and/or graphite layers, in the implanted region and, simultaneously, activation of the dopant species of P type.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: June 6, 2023
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Simone Rascuná, Paolo Badalá, Anna Bassi, Gabriele Bellocchi
  • Patent number: 11670696
    Abstract: The present invention provides a semiconductor device relaxing the electric field concentration in a gate insulating film just below a gate electrode, and a production method therefor. The semiconductor device has a third semiconductor layer, a gate insulating film, a gate electrode, and a passivation film. The gate insulating film has a gate electrode contact region being in contact with the gate electrode, and a gate electrode non-contact region not being in contact with the gate electrode. The passivation film has a dielectric constant higher than the dielectric constant of the gate insulating film. A thickness of the gate electrode contact region and a thickness of the gate electrode non-contact region satisfy the following equation 0.8?t2/t1<1.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: June 6, 2023
    Assignee: TOYODA GOSEI CO., LTD.
    Inventors: Nariaki Tanaka, Go Nishio
  • Patent number: 11658108
    Abstract: A power semiconductor device including a first and second die, each including a plurality of conductive contact regions and a passivation region including a number of projecting dielectric regions and a number of windows. Adjacent windows are separated by a corresponding projecting dielectric region with each conductive contact region arranged within a corresponding window. A package of the surface mount type houses the first and second dice. The package includes a first bottom insulation multilayer and a second bottom insulation multilayer carrying, respectively, the first and second dice. A covering metal layer is arranged on top of the first and second dice and includes projecting metal regions extending into the windows to couple electrically with corresponding conductive contact regions. The covering metal layer moreover forms a number of cavities, which are interposed between the projecting metal regions so as to overlie corresponding projecting dielectric regions.
    Type: Grant
    Filed: January 6, 2021
    Date of Patent: May 23, 2023
    Assignee: STMICROELECTRONICS S.r.l.
    Inventors: Cristiano Gianluca Stella, Agatino Minotti
  • Patent number: 11652164
    Abstract: An IGBT and a manufacturing method therefor, wherein a target region in the IGBT is doped with first ions; the target region comprises at least one of a P-type substrate (11), a P-type well region (13), and a P-type source region (14); and the diffusion coefficient of the first ions is greater than the diffusion coefficients of boron ions. A PN junction formed by means of the present invention is a gradual junction, thereby improving breakdown voltage, shortening turn-off time, and improving anti-latch capability.
    Type: Grant
    Filed: June 12, 2019
    Date of Patent: May 16, 2023
    Assignee: GTA Semiconductor Co., Ltd.
    Inventors: Xueliang Wang, Jianhua Liu, Jinrong Lang, Yaneng Min
  • Patent number: 11652022
    Abstract: A power semiconductor device includes: a semiconductor body having a front side and a backside and configured to conduct a load current between the front side and the backside; and a plurality of control cells configured to control the load current. Each control cell is at least partially included in the semiconductor body at the front side and includes a gate electrode that is electrically insulated from the semiconductor body by a gate insulation layer. The gate insulation layer is or includes a first boron nitride layer.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: May 16, 2023
    Assignee: Infineon Technologies AG
    Inventors: Josef Schaetz, Dethard Peters, Stephan Pindl, Hans-Joachim Schulze
  • Patent number: 11646357
    Abstract: The present application provides a method for preparing a p-type semiconductor structure, an enhancement mode device and a method for manufacturing the same. The method for preparing a p-type semiconductor structure includes: preparing a p-type semiconductor layer; preparing a protective layer on the p-type semiconductor layer, in which the protective layer is made of AlN or AlGaN; and annealing the p-type semiconductor layer under protection of the protective layer, and at least one of the p-type semiconductor layer and the protective layer is formed by in-situ growth. In this way, the protective layer can protect the p-type semiconductor layer from volatilization and to form high-quality surface morphology in the subsequent high-temperature annealing treatment of the p-type semiconductor layer.
    Type: Grant
    Filed: January 18, 2021
    Date of Patent: May 9, 2023
    Assignee: ENKRIS SEMICONDUCTOR, INC.
    Inventor: Kai Cheng
  • Patent number: 11646209
    Abstract: A method of cleaning a wafer comprises: a scrubbing operation comprising treating a target wafer to be cleaned with a brush at a rotation rate of 200 rpm or less to prepare a brush cleaned wafer; and a cleaning operation comprising cleaning the brush cleaned wafer with a cleaning solution to prepare a cleaned bare wafer, wherein the cleaning operation comprises a first cleaning operation and a second cleaning operation sequentially.
    Type: Grant
    Filed: September 17, 2021
    Date of Patent: May 9, 2023
    Assignee: SENIC INC.
    Inventors: Jong Hwi Park, Il Hwan Yoo, Kap-Ryeol Ku, Jung-Gyu Kim, Jung Woo Choi, Eun Su Yang, Byung Kyu Jang, Sang Ki Ko
  • Patent number: 11641211
    Abstract: Provided is a receiver device including a first A/D converter (203), a second A/D converter (204), an amplifier (205) which is provided at a previous stage of the second A/D converter (204), and a digital signal processing unit (207). The digital signal processing unit (207) includes an amplitude comparison unit (211) configured to compare an amplitude of a digital signal output from the first A/D converter (203) and an amplitude of a digital signal output from the second A/D converter (204) to make a determination, and to output a determination result, and a selector (212) configured to select one of the digital signal output from the first A/D converter (203) or the digital signal output from the second A/D converter (204) based on the determination result.
    Type: Grant
    Filed: July 28, 2021
    Date of Patent: May 2, 2023
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Kiyoshi Onohara
  • Patent number: 11637176
    Abstract: Provided is a first vertical field effect transistor in which first source regions and first connection portions via which a first body region is connected to a first source electrode are disposed alternately and cyclically in a first direction in which first trenches extend. In a second direction orthogonal to the first direction, Lxm?Lxr?0.20 ?m holds true where Lxm denotes a distance between adjacent first trenches and Lxr denotes the inner width of a first trench. The lengths of the first connection portions are in a convergence region in which the on-resistance of the vertical field effect transistor at the time when a voltage having a specification value is applied to first gate conductors to supply current having a specification value does not decrease noticeably even when the lengths of the first connection portions are made much shorter.
    Type: Grant
    Filed: July 7, 2022
    Date of Patent: April 25, 2023
    Assignee: NUVOTON TECHNOLOGY CORPORATION JAPAN
    Inventors: Hironao Nakamura, Ryosuke Okawa, Tsubasa Inoue, Akira Kimura, Eiji Yasuda
  • Patent number: 11637198
    Abstract: A semiconductor device including a semiconductor element is provided. The semiconductor element includes a saturation current suppression layer formed above a drift layer and including electric field block layers arranged in a stripe manner and JFET portions arranged in a stripe manner. The electric field block layers and the JFET portions are alternately arranged. The semiconductor element includes trench gate structures. A longer direction of the trench gate structure intersects with a longer direction of the electric field block layer and a longer direction of JFET portion. The JFET portion includes a first layer having a first conductivity type impurity concentration larger than the drift layer and a second layer formed above the first layer and having a first conductivity type impurity concentration smaller than the first layer.
    Type: Grant
    Filed: October 26, 2021
    Date of Patent: April 25, 2023
    Assignee: DENSO CORPORATION
    Inventors: Yuichi Takeuchi, Yasuhiro Ebihara, Masahiro Sugimoto, Yusuke Yamashita
  • Patent number: 11631762
    Abstract: A silicon carbide planar MOSFET includes a junction field-effect transistor (JFET) region that extends up to a top planar surface of the substrate. The JFET region includes a central area, which comprises a portion of the drift region that extends vertically to the top planar surface. First and second sidewall areas are disposed on opposite sides of the central area. The central area has a first lateral width and a first doping concentration. The first and second sidewall areas extend vertically to the top planar surface, with each having a second lateral width. The first and second sidewall areas each have a second doping concentration that is greater than the first doping concentration such that, at a zero bias condition, first and second depletion regions respectively extend only within the first and second sidewall areas of the JFET region.
    Type: Grant
    Filed: May 10, 2021
    Date of Patent: April 18, 2023
    Assignee: SEMIQ INCORPORATED
    Inventor: Rahul R. Potera
  • Patent number: 11626478
    Abstract: There is disclosed a structure in a wide band gap material such as silicon carbide wherein there is a buried grid and shields covering at least one middle point between two adjacent parts of the buried grid, when viewed from above. Advantages of the invention include easy manufacture without extra lithographic steps compared with standard manufacturing process, an improved trade-off between the current conduction and voltage blocking characteristics of a JBSD comprising the structure.
    Type: Grant
    Filed: May 22, 2019
    Date of Patent: April 11, 2023
    Assignee: II-VI DELAWARE INC.
    Inventor: Hossein Elahipanah
  • Patent number: 11626325
    Abstract: The method of manufacturing an integrated circuit includes obtaining a silicon carbide substrate of a first conductivity type having an epitaxial layer of a second conductivity type thereon. A dopant is implanted in the epitaxial layer to form a first region of the first conductivity type that extends the full depth of the epitaxial layer. A first transistor is formed in the first region and a second transistor is formed in the epitaxial layer.
    Type: Grant
    Filed: August 9, 2022
    Date of Patent: April 11, 2023
    Assignee: Raytheon Systems Limited
    Inventors: David Trann Clark, Robin Forster Thompson
  • Patent number: 11618334
    Abstract: A solar power generation control device, controlling a solar power generation system configured to charge a power storage device of a vehicle with electric power generated by a solar cell provided in the vehicle, includes: a determination unit configured to determine whether irradiation light to the vehicle is sunlight based on an output of an optical sensor; and a control unit configured to control an operation mode of the solar power generation system, including a first mode, in which the power storage device is charged with electric power generated by the solar cell, and a second mode, in which power consumption of the solar power generation system is lower than in the first mode, based on a determination result of the determination unit. The control unit sets the solar power generation system to the first mode when the determination unit determines that the irradiation light is sunlight.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: April 4, 2023
    Assignee: HONDA MOTOR CO., LTD.
    Inventors: Noriyuki Abe, Yoshio Kojima
  • Patent number: 11621321
    Abstract: According to one aspect of the present disclosure, a semiconductor device includes a substrate; a drift layer of a first conductivity type provided on the substrate; a base layer of a second conductivity type provided above the drift layer on the substrate; a source layer of the first conductivity type provided on an upper surface side of the base layer; a first electrode electrically connected to the source layer; a second electrode provided on the rear surface of the substrate; a gate electrode; a trench gate extending from an upper surface of the substrate to the drift layer; and a first bottom layer of the second conductivity type provided below the trench gate in the drift layer, wherein a first distance between a portion of the first bottom layer where an impurity concentration peaks in a thickness direction and the trench gate is larger than 1 ?m.
    Type: Grant
    Filed: June 22, 2021
    Date of Patent: April 4, 2023
    Assignee: Mitsubishi Electric Corporation
    Inventors: Kazuya Konishi, Tetsuya Nitta, Tomohiro Tamaki, Shinya Soneda