From The Substrate During Epitaxy, E.g., Autodoping; Preventing Or Using Autodoping (epo) Patents (Class 257/E21.136)
  • Patent number: 8652937
    Abstract: A back-illuminated semiconductor imaging device on a semiconductor-on-insulator substrate is disclosed. The device includes an insulator layer, a semiconductor substrate having an interface with the insulator layer, an epitaxial layer grown on the semiconductor substrate; and one or more imaging components in the epitaxial layer. The semiconductor substrate and the epitaxial layer exhibit a net doping concentration profile having a maximum value at a predetermined distance from the interface which decreases monotonically on both sides of the profile. The doping profile between the interface with the insulation layer and the peak of the doping profile functions as a “dead band” to prevent dark current carriers from penetrating to the front side of the device.
    Type: Grant
    Filed: March 13, 2012
    Date of Patent: February 18, 2014
    Assignee: SRI International
    Inventors: Levine Peter Alan, Pradyumna Swain, Mahalingam Bhaskaran
  • Patent number: 8106429
    Abstract: Disclosed is an image sensor. The image sensor includes a semiconductor substrate including a lower interconnection, a plurality of upper interconnection sections protruding upward from the semiconductor substrate, a first trench disposed between the upper interconnection sections such that the upper interconnection sections are spaced apart from each other, a bottom electrode disposed on an outer peripheral surfaces of the upper interconnection sections, a first conductive layer disposed on an outer peripheral surface of the bottom electrode, an intrinsic layer disposed on the semiconductor substrate including the first conductive layer and the first trench, and having a second trench on the first trench, a second conductive layer disposed on the intrinsic layer and having a third trench on the second trench, a light blocking part disposed in the third trench, and a top electrode disposed on the light blocking part and the second conductive layer.
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: January 31, 2012
    Assignee: Dongbu HiTek Co., Ltd.
    Inventor: Tae Gyu Kim
  • Patent number: 7902642
    Abstract: A resin composition for sealing a light-emitting device of the present invention includes a silsesquioxane resin including two or more oxetanyl groups, an aliphatic hydrocarbon including one or more epoxy groups and a cationic polymerization initiator. Furthermore, a lamp of the present invention includes a package equipped with a cup-shaped sealing member, an electrode exposed in the bottom portion of the sealing member, and a light-emitting device arranged on the bottom portion and electrically connected with the electrode, wherein the light-emitting device is sealed with the above-described resin composition for sealing a light-emitting device filled in the sealing member.
    Type: Grant
    Filed: December 27, 2007
    Date of Patent: March 8, 2011
    Assignee: Showa Denko K.K.
    Inventors: Tomoyuki Takei, Yuko Sakata
  • Publication number: 20110017127
    Abstract: An apparatus and process for plasma enhanced chemical vapor deposition with an inductively coupled plasma with ion densities above 1010 cm?3 and energies below 20 eV at the substrate enables epitaxial deposition of group IV and compound semiconductor layers at high rates and low substrate temperatures. The epitaxial reactor allows for in-situ plasma cleaning by chlorine and fluorine containing gaseous species.
    Type: Application
    Filed: August 14, 2008
    Publication date: January 27, 2011
    Applicant: EpiSpeed SA
    Inventors: Hans von Kanel, Emmanuil Choumas
  • Patent number: 7700449
    Abstract: A method of forming an electrostatic discharging (ESD) device includes forming a first and a second semiconductor fin over a substrate and adjacent to each other; epitaxially growing a semiconductor material on the first and the second semiconductor fins, wherein a first portion of the semiconductor material grown from the first semiconductor fin joins a second portion of the semiconductor material grown from the second semiconductor fin; and implanting a first end and a second end of the semiconductor material and first end portions of the first and the second semiconductor fins to form a first and a second implant region, respectively. A P-N junction is formed between the first end and the second end of the semiconductor material. The P-N junction is a junction of an ESD diode, or a junction in an NPN or a PNP BJT.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: April 20, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jam-Wem Lee
  • Publication number: 20100081259
    Abstract: A method for generating patterned strained regions in a semiconductor device is provided. The method includes directing a light-emitting beam locally onto a surface portion of a semiconductor body; and manipulating a plurality of dislocations located proximate to the surface portion of the semiconductor body utilizing the light-emitting beam, the light-emitting beam being characterized as having a scan speed, so as to produce the patterned strained regions.
    Type: Application
    Filed: October 1, 2008
    Publication date: April 1, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Chung Woh Lai, Xiao Hu Liu, Anita Madan, Klaus W. Schwarz, J. Campbell Scott
  • Patent number: 7687385
    Abstract: The invention provides a semiconductor device exhibiting a stable and high breakdown voltage, which is manufactured at a low manufacturing cost. The semiconductor device of the invention includes an n-type silicon substrate; a p-type base region in the surface portion of substrate; an n-type drain region in the surface portion of n-type substrate; a p-type offset region in the surface portion of n-type substrate; an n-type source region in the surface portion of p-type base region; a p-type contact region in the surface portion of p-type base region; a gate electrode above the extended portion of p-type base region extending between n-type source region and n-type substrate (or p-type offset region), with a gate insulation film interposed therebetween; an insulation film on gate electrode and p-type offset region; a source electrode on n-type source region; and a drain electrode on n-type drain region.
    Type: Grant
    Filed: March 2, 2007
    Date of Patent: March 30, 2010
    Assignee: Fuji Electric Holdings Co., Ltd.
    Inventors: Kazuo Matsuzaki, Naoto Fujishima, Akio Kitamura, Gen Tada, Masaru Saito
  • Patent number: 7303967
    Abstract: Disclosed is a method for fabricating a transistor of a semiconductor device, the method comprising the steps of: providing a semiconductor; forming a gate electrode; performing a low-density ion implantation process with respect to the substrate, thereby forming an LDD ion implantation layer; forming an insulation spacer on a sidewall of the gate electrode; forming a diffusion barrier; performing a high-density ion implantation process with respect to the substrate, thereby forming a source/drain; performing a first thermal treatment process with respect to a resultant structure, so as to activate impurities in the source/drain, and simultaneously causing a diffusion velocity of the impurities in the source/drain to be reduced by the diffusion barrier; and forming a salicide layer.
    Type: Grant
    Filed: June 23, 2004
    Date of Patent: December 4, 2007
    Assignee: Hynix Semiconductor Inc.
    Inventor: Seung Hoon Sa