With One Or Zero Or Quasi-one Or Quasi-zero Dimensional Charge Carrier Gas Channel, E.g., Quantum Wire Fet; Single Electron Trans Istor (set); Striped Channel Transistor; Coulomb Blockade Device (epo) Patents (Class 257/E21.404)
  • Publication number: 20120015467
    Abstract: A biosensor using a nanodot and a method of manufacturing the same are provided. A silicon nanowire can be formed by a CMOS process to reduce manufacturing costs. In addition, an electrically charged nanodot is coupled to a target molecule to be detected, in order to readily change conductivity of the silicon nanowire, thereby making it possible to implement a biosensor capable of providing good sensitivity and being manufactured at a low cost.
    Type: Application
    Filed: September 22, 2011
    Publication date: January 19, 2012
    Applicant: Electronics and Telecommunications Research Institute
    Inventors: Tae Youb KIM, Chil Seong AH, Chang Geun AHN, Han Young YU, Jong Heon YANG, Moon Gyu JANG
  • Publication number: 20120009749
    Abstract: Embodiments relate to a method for fabricating nano-wires in nano-devices, and more particularly to nano-device fabrication using end-of-range (EOR) defects. In one embodiment, a substrate with a surface crystalline layer over the substrate is provided and EOR defects are created in the surface crystalline layer. One or more fins with EOR defects embedded within is formed and oxidized to form one or more fully oxidized nano-wires with nano-crystals within the core of the nano-wire.
    Type: Application
    Filed: July 8, 2010
    Publication date: January 12, 2012
    Applicants: NANYANG TECHNOLOGICAL UNIVERSITY, GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Dexter TAN, Kin Leong PEY, Sai Hooi YEONG, Yoke King CHIN, Kuang Kian ONG, Chee Mang NG
  • Publication number: 20110315953
    Abstract: A method of forming a semiconductor is provided and includes patterning a pad and a nanowire onto a wafer, the nanowire being substantially perpendicular with a pad sidewall and substantially parallel with a wafer surface and epitaxially growing on an outer surface of the nanowire a secondary layer of semiconductor material, which is lattice mismatched with respect to a material of the nanowire and substantially free of defects.
    Type: Application
    Filed: June 28, 2010
    Publication date: December 29, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Sarunya Bangsaruntip, Mikael Bjoerk, Guy M. Cohen, Heike E. Riel, Heinz Schmid
  • Publication number: 20110315950
    Abstract: In one embodiment, a method of providing a nanowire semiconductor device is provided, in which the gate structure to the nanowire semiconductor device has a trapezoid shape. The method may include forming a trapezoid gate structure surrounding at least a portion of a circumference of a nanowire. The first portion of the trapezoid gate structure that is in direct contact with an upper surface of the nanowire has a first width and a second portion of the trapezoid gate structure that is in direct contact with a lower surface of the nanowire has a second width. The second width of the trapezoid gate structure is greater than the first width of the trapezoid gate structure. The exposed portions of the nanowire that are adjacent to the portion of the nanowire that the trapezoid gate structure is surrounding are then doped to provide source and drain regions.
    Type: Application
    Filed: June 28, 2010
    Publication date: December 29, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Jeffrey W. Sleight, Sarunya Bangsaruntip, Sebastian U. Engelmann, Ying Zhang
  • Publication number: 20110278542
    Abstract: A tunnel field effect transistor (TFET) includes a source region, the source region comprising a first portion of a nanowire; a channel region, the channel region comprising a second portion of the nanowire; a drain region, the drain region comprising a portion of a silicon pad, the silicon pad being located adjacent to the channel region; and a gate configured such that the gate surrounds the channel region and at least a portion of the source region.
    Type: Application
    Filed: May 11, 2010
    Publication date: November 17, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Sarunya Bangsaruntip, Isaac Lauer, Amlan Majumdar, Jeffrey Sleight
  • Patent number: 8030186
    Abstract: A method and apparatus for an electronic substrate having a plurality of semiconductor devices is described. A thin film of nanowires is formed on a substrate. The thin film of nanowires is formed to have a sufficient density of nanowires to achieve an operational current level. A plurality of semiconductor regions are defined in the thin film of nanowires. Contacts are formed at the semiconductor device regions to thereby provide electrical connectivity to the plurality of semiconductor devices. Furthermore, various materials for fabricating nanowires, thin films including p-doped nanowires and n-doped nanowires, nanowire heterostructures, light emitting nanowire heterostructures, flow masks for positioning nanowires on substrates, nanowire spraying techniques for depositing nanowires, techniques for reducing or eliminating phonon scattering of electrons in nanowires, and techniques for reducing surface states in nanowires are described.
    Type: Grant
    Filed: November 5, 2010
    Date of Patent: October 4, 2011
    Assignee: Nanosys, Inc.
    Inventors: Linda T. Romano, Jian Chen
  • Patent number: 8022393
    Abstract: The disclosure pertains to a method for making a nanoscale filed effect transistor structure on a semiconductor substrate. The method comprises disposing a mask on a semiconductor upper layer of a multi-layer substrate, and removing areas of the upper layer not covered by the mask in a nanowire lithography process. The mask includes two conductive terminals separated by a distance, and a nanowire in contact with the conductive terminals across the distance. The nanowire lithography may be carried out using a deep-reactive-ion-etching, which results in an integration of the nanowire mask and the underlying semiconductor layer to form a nanoscale semiconductor channel for the field effect transistor.
    Type: Grant
    Filed: July 29, 2008
    Date of Patent: September 20, 2011
    Assignee: Nokia Corporation
    Inventor: Alan Colli
  • Patent number: 7960251
    Abstract: Disclosed herein is a method for producing nanowires. The method comprises the steps of providing a porous template with a plurality of holes in the form of tubes, filling the tubes with nanoparticles or nanoparticle precursors, and forming the filled nanoparticles or nanoparticle precursors into nanowires. According to the method, highly rectilinear and well-ordered nanowires can be produced in a simple manner.
    Type: Grant
    Filed: June 6, 2006
    Date of Patent: June 14, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Byoung Lyong Choi, Jong Min Kim, Eun Kyung Lee
  • Patent number: 7955932
    Abstract: A single electron transistor includes source/drain layers disposed apart on a substrate, at least one nanowire channel connecting the source/drain layers, a plurality of oxide channel areas in the nanowire channel, the oxide channel areas insulating at least one portion of the nanowire channel, a quantum dot in the portion of the nanowire channel insulated by the plurality of oxide channel areas, and a gate electrode surrounding the quantum dot.
    Type: Grant
    Filed: October 3, 2007
    Date of Patent: June 7, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung-Dae Suk, Kyoung-Hwan Yeo, Ming Li, Yun-Young Yeoh
  • Patent number: 7948016
    Abstract: The present disclosure provides a method of making a thin film semiconductor device such as a transistor comprising the steps of: a) providing a substrate bearing first and second conductive zones which define a channel therebetween, where the channel does not border more than 75% of the perimeter of either conductive zone; and b) depositing a discrete aliquot of a solution comprising an organic semiconductor adjacent to or on the channel, where a majority of the solution is deposited to one side of the channel and not on the channel. In some embodiments of the present disclosure, the solution is deposited entirely to one side of the channel, not on the channel, and furthermore the solution is deposited in a band having a length that is less than the channel length. The present disclosure additionally provides thin film semiconductor devices such as a transistors.
    Type: Grant
    Filed: November 3, 2009
    Date of Patent: May 24, 2011
    Assignee: 3M Innovative Properties Company
    Inventors: Scott M. Schnobrich, Robert S. Clough, Dennis E. Vogel, Michael E. Griffin
  • Patent number: 7939398
    Abstract: A method of manufacturing a single-electron transistor device is provided. The method includes forming a thinned region in a silicon substrate, the thinned region offset by a non-selected region. The method also includes forming at least one quantum island from the thinned region by subjecting the thinned region to an annealing process. The non-selected region is aligned with the quantum island and tunnel junctions are formed between the quantum island and the non-selected region. The present invention also includes a single-electron device, and a method of manufacturing an integrated circuit that includes a single-electron device.
    Type: Grant
    Filed: November 16, 2009
    Date of Patent: May 10, 2011
    Assignee: Texas Instruments Incorporated
    Inventors: Christoph Wasshuber, Gabriel G. Barna, Olivier A. Faynot
  • Publication number: 20110089995
    Abstract: Provided is a graphene device and a method of manufacturing the same. The graphene device may include an upper oxide layer on at least one embedded gate, and a graphene channel and a plurality of electrodes on the upper oxide layer. The at least one embedded gate may be formed on the substrate. The graphene channel may be formed on the plurality of electrodes, or the plurality of electrodes may be formed on the graphene channel.
    Type: Application
    Filed: August 25, 2010
    Publication date: April 21, 2011
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Jin seong Heo, Sun-ae Seo, Dong-chul Kim, Yun-sung Woo, Hyun-jong Chung
  • Patent number: 7928017
    Abstract: A method of forming a nanowire and a semiconductor device comprising the nanowire are provided. The method of forming a nanowire includes forming a patterned SiyGe1-y layer (where, y is a real number that satisfies 0?y<1) on a base layer, and forming a first oxide layer and at least one nanowire within the first oxide layer by performing a first oxidation process on the patterned SiyGe1-y layer.
    Type: Grant
    Filed: March 17, 2008
    Date of Patent: April 19, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jun-youn Kim, Joong S. Jeong, Eun-ju Bae
  • Publication number: 20110079770
    Abstract: The invented ink-jet printing method for the construction of thin film transistors using all SWNTs on flexible plastic films is a new process. This method is more practical than all of exiting printing methods in the construction TFT and RFID tags because SWNTs have superior properties of both electrical and mechanical over organic conducting oligomers and polymers which often used for TFT. Furthermore, this method can be applied on thin films such as paper and plastic films while silicon based techniques can not used on such flexible films. These are superior to the traditional conducting polymers used in printable devices since they need no dopant and they are more stable. They could be used in conjunction with conducting polymers, or as stand-alone inks.
    Type: Application
    Filed: September 14, 2010
    Publication date: April 7, 2011
    Applicant: William Marsh Rice University
    Inventors: Gyou-Jin Cho, Min Hun Jung, Jared L. Hudson, James M. Tour
  • Patent number: 7915176
    Abstract: A method for manufacturing a device including a field of micrometric tips, including forming a polycrystalline layer on a support; performing an anisotropic plasma etching of all or part of the polycrystalline layer by using a gas mixture including chlorine and helium, whereby tips are formed at the surface of the polycrystalline layer.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: March 29, 2011
    Assignee: STMicroelectronics Crolles 2 SAS
    Inventors: Olivier De Sagazan, Matthieu Denoual
  • Patent number: 7880202
    Abstract: A semiconductor field effect transistor can be used with RF signals in an amplifier circuit. The transistor includes a source region and a drain region with a channel region interposed in between the source and drain regions. The transistor is structured such that the threshold voltage for current flow through the channel region varies at different points along the width direction, e.g., to give an improvement in the distortion characteristics of the transistor.
    Type: Grant
    Filed: November 27, 2006
    Date of Patent: February 1, 2011
    Assignee: Infineon Technologies AG
    Inventor: Peter Baumgartner
  • Patent number: 7880318
    Abstract: A sensing system includes a nanowire, a passivation layer established on at least a portion of the nanowire, and a barrier layer established on the passivation layer.
    Type: Grant
    Filed: April 27, 2007
    Date of Patent: February 1, 2011
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Theodore I. Kamins, Zhiyong Li, Duncan R. Stewart
  • Publication number: 20110012177
    Abstract: A structure and a method for a semiconductor including a nanostructure semiconductor channel. The semiconductor may include a dielectric and an electrode, the electrode attached to the dielectric, a semiconductor channel may be disposed proximate to the dielectric, wherein the semiconductor channel has an electric mobility and is configured to have at least one dimension, and wherein the dielectric may be configured to apply a force at the at least one dimension.
    Type: Application
    Filed: July 20, 2009
    Publication date: January 20, 2011
    Inventors: Dureseti Chidambarrao, Oki Gunawan, Xiao Hu Liu, Amlan Majumdar, Lidija Sekaric, Jeffrey W. Sleight
  • Publication number: 20100330751
    Abstract: The present invention relates to a single-electron transistor (SET) operating at room temperature and a method of manufacturing the same, and to be specific, to a single-electron transistor operating at room temperature and a method of manufacturing the same, which are capable of minimizing influence of the gate voltage on tunneling barriers and effectively controlling the electric potential of a quantum dot (QD), by forming the quantum dot using a trenched nano-wire structure and forming the gate to wrap most of the way around the quantum dot.
    Type: Application
    Filed: September 1, 2010
    Publication date: December 30, 2010
    Applicant: Chungbuk National University Industry-Academic Cooperation Foundation
    Inventors: Jung Bum Choi, Seung Jun Shin
  • Patent number: 7851242
    Abstract: An embodiment is a method and apparatus for a white or full-color light-emitting diode. First single or multiple quantum wells (QWs) at a first wavelength are formed at an active region between a p-type layer and an n-type layer of a light-emitting diode. Multiple passive quantum wells (QWs) are formed within the p-type layer or the n-type layer. The multiple passive QWs are optically pumped by the first or single multiple QWs to generate a desired color.
    Type: Grant
    Filed: December 17, 2008
    Date of Patent: December 14, 2010
    Assignee: Palo Alto Research Center Incorporated
    Inventors: David P. Bour, Christopher L. Chua, Noble M. Johnson
  • Publication number: 20100285639
    Abstract: A method includes an act of providing a crystalline substrate with a diamond-type lattice and an exposed substantially (111)-surface. The method also includes an act of forming a graphene layer or a graphene-like layer on the exposed substantially (111)-surface.
    Type: Application
    Filed: July 19, 2010
    Publication date: November 11, 2010
    Inventors: Jorge Manuel Garcia, Loren N. Pfeiffer
  • Patent number: 7755080
    Abstract: The method for forming a quantum dot according to the present invention comprises the step of forming an oxide in a dot-shape on the surface of a semiconductor substrate 10, the step of removing the oxide to form a concavity 16 in the position from which the oxide has been removed, and the step of growing a semiconductor layer 18 on the semiconductor substrate with the concavity formed in to form a quantum dot 20 of the semiconductor layer in the concavity. The concavity is formed in the semiconductor substrate by forming the oxide dot in the surface of the semiconductor substrate and removing the oxide, whereby the concavity can be formed precisely in a prescribed position and in a prescribed size. The quantum dot is grown in such a concavity, whereby the quantum dot can have good quality and can be formed in a prescribed position and in a prescribed size.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: July 13, 2010
    Assignee: Fujitsu Limited
    Inventors: Hai-Zhi Song, Toshio Ohshima
  • Patent number: 7749922
    Abstract: The present invention provides structures and devices comprising conductive segments and conductance constricting segments of a nanowire, such as metallic, superconducting or semiconducting nanowire. The present invention provides structures and devices comprising conductive nanowire segments and conductance constricting nanowire segments having accurately selected phases including crystalline and amorphous states, compositions, morphologies and physical dimensions, including selected cross sectional dimensions, shapes and lengths along the length of a nanowire. Further, the present invention provides methods of processing nanowires capable of patterning a nanowire to form a plurality of conductance constricting segments having selected positions along the length of a nanowire, including conductance constricting segments having reduced cross sectional dimensions and conductance constricting segments comprising one or more insulating materials such as metal oxides.
    Type: Grant
    Filed: May 4, 2006
    Date of Patent: July 6, 2010
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Alexey Bezryadin, Mikas Remeika
  • Patent number: 7737432
    Abstract: A computing element for use in a quantum computer has at least three coupled quantum dots, and at least one gate for applying an electric field to manipulate the state of said qubit.
    Type: Grant
    Filed: June 14, 2005
    Date of Patent: June 15, 2010
    Assignee: National Research Council of Canada
    Inventors: Pawel Hawrylak, Marek Korkusinski
  • Publication number: 20100090197
    Abstract: Provided are a method of manufacturing a semiconductor nanowire sensor device and a semiconductor nanowire sensor device manufactured according to the method. The method includes preparing a first conductive type single crystal semiconductor substrate, forming a line-shaped first conductive type single crystal pattern from the first conductive type single crystal semiconductor substrate, forming second conductive type epitaxial patterns on both sidewalls of the first conductive type single crystal pattern, and forming source and drain electrodes at both ends of the second conductive type epitaxial patterns.
    Type: Application
    Filed: June 30, 2009
    Publication date: April 15, 2010
    Applicant: Electonics and Telecommunications Research Institute
    Inventors: Chan-Woo PARK, Chang-Geun AHN, Jong-Heon YANG, In-Bok BAEK, Chil-Seong AH, An-Soon KIM, Tae-Youb KIM, Gun-Yong SUNG, Seon-Hee PARK
  • Publication number: 20100072460
    Abstract: An electronic device and method of manufacturing the device. The device includes a semiconducting region, which can be a nanowire, a first contact electrically coupled to the semiconducting region, and at least one second contact capacitively coupled to the semiconducting region. At least a portion of the semiconducting region between the first contact and the second contact is covered with a dipole layer. The dipole layer can act as a local gate on the semiconducting region to enhance the electric properties of the device.
    Type: Application
    Filed: September 22, 2009
    Publication date: March 25, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Mikael T. Bjoerk, Joachim Knoch, Heike E. Riel, Walter Heinrich Riess, Heinz Schmid
  • Patent number: 7671357
    Abstract: A method of fabricating a semiconductor device having high output power and excellent long-term reliability by preventing thermal adverse influence exerted at the time of window structure formation is provided. The method comprises a 1st step of forming predetermined semiconductor layers 2 to 9 containing at least an active layer 4b consisting of a quantum well active layer on a semiconductor substrate 1; a 2nd step of forming a first dielectric film 10 on a first portion of the surface of the semiconductor layers 2 to 9; a 3rd step of forming a second dielectric film 12 made of the same material as that of the first dielectric film 10 and having a density lower than that of the first dielectric film 10 on a second portion of the surface of the semiconductor layers 2 to 9; and a 4th step of heat-treating a multilayer body containing the semiconductor layers 2 to 9, the first dielectric film 10, and the second dielectric film 12 to disorder the quantum well layer below the second dielectric film 12.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: March 2, 2010
    Assignee: The Furukawa Electric Co., Ltd.
    Inventor: Yumi Yamada
  • Patent number: 7588954
    Abstract: Method for making an InGaAs/GaAs quantum well laser (10) on a Silicon substrate (15.1). The method comprises the steps: Formation of a virtual Germanium substrate (15) on the Silicon substrate (15.1) by means of a low-energy plasma-enhanced chemical vapour deposition (LEPECVD). The virtual Germanium substrate (15) comprises a pure Germanium layer (15.3). Formation of a Gallium Arsenide structure on the virtual Germanium substrate (15) by means of a metal organic chemical vapour deposition process.
    Type: Grant
    Filed: September 4, 2004
    Date of Patent: September 15, 2009
    Assignee: Epispeed S.A.
    Inventors: Hans Von Kaenel, Isabelle Sagnes, Guillaume Jacques Saint-Girons, Sophie Bouchoule
  • Publication number: 20090209067
    Abstract: A semiconductor device (1) and a method are disclosed for obtaining on a substrate (2) a multilayer structure (3) with a quantum well structure (4). The quantum well structure (4) comprises a semiconductor layer (5) sandwiched by insulating layers (6,6?), wherein the material of the insulating layers (6,6?) has preferably a high dielectric constant. In a FET the quantum wells (4,9) function as channels, allowing a higher drive current and a lower off current. Short channel effects are reduced. The multi-channel FET is suitable to operate even for sub-35 nm gate lengths. In the method the quantum wells are formed by epitaxial growth of the high dielectric constant material and the semiconductor material alternately on top of each other, preferably with MBE.
    Type: Application
    Filed: April 24, 2009
    Publication date: August 20, 2009
    Applicant: NXP B.V.
    Inventor: Youri PONOMAREV
  • Patent number: 7560753
    Abstract: A field effect transistor and a method of fabricating the field effect transistor. The field effect transistor includes: a silicon body, a perimeter of the silicon body abutting a dielectric isolation; a source and a drain formed in the body and on opposite sides of a channel formed in the body; and a gate dielectric layer between the body and an electrically conductive gate electrode, a bottom surface of the gate dielectric layer in direct physical contact with a top surface of the body and a bottom surface the gate electrode in direct physical contact with a top surface of the gate dielectric layer, the gate electrode having a first region having a first thickness and a second region having a second thickness, the first region extending along the top surface of the gate dielectric layer over the channel region, the second thickness greater than the first thickness.
    Type: Grant
    Filed: February 26, 2008
    Date of Patent: July 14, 2009
    Assignee: International Business Machines Corporation
    Inventors: Brent Alan Anderson, Andres Bryant, William F. Clark, Jr., Edward Joseph Nowak
  • Patent number: 7465953
    Abstract: The present invention includes single electron structures and devices comprising a substrate having an upper surface, one or more dielectric layers formed on the upper surface of the substrate and having at least one exposed portion, at least one monolayer of self-assembling molecules attracted to and in contact with the at least one exposed portion of only one of the one or more dielectric layers, one or more nanoparticles attracted to and in contact with the at least one monolayer, and at least one tunneling barrier in contact with the one or more nanoparticles. Typically, the single electron structure or device formed therefrom further comprise a drain, a gate and a source to provide single electron behavior, wherein there is a defined gap between source and drain and the one or more nanoparticles is positioned between the source and drain.
    Type: Grant
    Filed: April 27, 2006
    Date of Patent: December 16, 2008
    Assignee: Board of Regents, The University of Texas System
    Inventors: Seong Jin Koh, Choong-Un Kim, Liang-Chieh Ma, Ramkumar Subramanian
  • Patent number: 7423285
    Abstract: The difficulty of miniaturization of large-scale integrated circuits in electric devices based on the conventional techniques involving three-dimensional device structures or the introduction of novel materials is solved. Wires 2 and 3 are disposed to intersect one another in midair in a matrix. The ends of the wires 2 and 3 in midair are designed to be in direct contact with the insides of a package which contains a semiconductor device so that electrical connection and/or physical support can be acquired. Cross point 1 where wires 2 and 3 are in contact with each other is a region which has current switching function similar to the function of a channel of a common MOSFET. Cross point 1 is a region where base wire 2 functioning as a substrate and gate electrode wire 3 functioning as a control electrode (gate electrode) intersect in contact with one another, or a region where base wire 2 and a lead wire 4 overlap.
    Type: Grant
    Filed: January 10, 2006
    Date of Patent: September 9, 2008
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Hiroshi Ohki
  • Patent number: 7374980
    Abstract: A field effect transistor and a method of fabricating the field effect transistor. The field effect transistor includes: a silicon body, a perimeter of the silicon body abutting a dielectric isolation; a source and a drain formed in the body and on opposite sides of a channel formed in the body; and a gate dielectric layer between the body and an electrically conductive gate electrode, a bottom surface of the gate dielectric layer in direct physical contact with a top surface of the body and a bottom surface the gate electrode in direct physical contact with a top surface of the gate dielectric layer, the gate electrode having a first region having a first thickness and a second region having a second thickness, the first region extending along the top surface of the gate dielectric layer over the channel region, the second thickness greater than the first thickness.
    Type: Grant
    Filed: October 13, 2006
    Date of Patent: May 20, 2008
    Assignee: International Business Machines Corporation
    Inventors: Brent Alan Anderson, Andres Bryant, William F. Clark, Jr., Edward Joseph Nowak
  • Patent number: 7358139
    Abstract: The invention includes methods of forming field effect transistors. In one implementation, a method of forming a field effect transistor having a gate comprising a conductive metal or metal compound received over conductively doped semiconductive material includes forming transistor gate semiconductive material into a gate line over a semiconductive material channel region. The gate line includes semiconductive material sidewalls. The semiconductive material sidewalls of the gate line are oxidized. After the oxidizing, at least one of a conductive metal or metal compound is formed in electrical connection with the transistor gate semiconductive material to comprise a substantially coextensive elongated portion of a final construction of the gate line of the field effect transistor being formed.
    Type: Grant
    Filed: July 20, 2006
    Date of Patent: April 15, 2008
    Assignee: Micron Technology, Inc.
    Inventors: Andrew R. Bicksler, Sukesh Sandhu
  • Publication number: 20080067495
    Abstract: Tunnel field-effect transistors (TFETs) are regarded as successors of metal-oxide semiconductor field-effect transistors (MOSFETs), but silicon-based TFETs typically suffer from low on-currents, a drawback related to the large resistance of the tunnel barrier. To achieve higher on-currents a nanowire-based TFET with a germanium (Ge) tunnel barrier in an otherwise silicon (Si) channel is used. A nanowire is introduced such that the lattice mismatch between silicon and germanium does not result in a highly defective interface. A dynamic power reduction as well as a static power reduction can result, compared to conventional MOSFET configurations. Multiple layers of logic can therefore be envisioned with these nanowire Si/Ge TFETs resulting in ultra-high on-chip transistor densities.
    Type: Application
    Filed: June 20, 2007
    Publication date: March 20, 2008
    Applicant: Interuniversitair Microelektronica Centrum (IMEC)
    Inventor: Anne S. Verhulst
  • Patent number: 7176066
    Abstract: A silicon substrate is coated with one or more layers of resist. First and second circuit patterns are exposed in sequence, where the second pattern crosses the first pattern. The patterned resist layers are developed to open holes which extend down to the substrate only where the patterns cross over each other. These holes provide a mask suitable for implanting single phosphorous ions in the substrate, for a solid state quantum computer. Further development of the resist layers provides a mask for the deposition of nanoelectronic circuits, such as single electron transistors, aligned to the phosphorous ions.
    Type: Grant
    Filed: May 19, 2005
    Date of Patent: February 13, 2007
    Assignee: Unisearch Limited
    Inventors: Rolf Brenner, Tilo Marcus Buehler, Robert Graham Clark, Andrew Steven Dzurak, Alexander Rudolf Hamilton, Nancy Ellen Lumpkin, Rita Paytricia McKinnon
  • Patent number: 7166858
    Abstract: The present invention provides a single-electron transistor device 100. The device comprises a source 105 and drain 110 located over a substrate 115 and a quantum island 120 situated between the source and drain, to form tunnel junctions 125, 130 between the source and drain. The device further includes a fixed-gate electrode 135 located adjacent the quantum island 120. The fixed-gate electrode has a capacitance associated therewith that varies as a function of an applied voltage to the fixed-gate electrode. The present invention also includes a method of fabricating a single-electron device 300, and a transistor circuit 800 that include a single-electron device 810.
    Type: Grant
    Filed: October 7, 2004
    Date of Patent: January 23, 2007
    Assignee: Texas Instruments Incorporated
    Inventor: Christoph Wasshuber
  • Patent number: 7041539
    Abstract: A method produces a microstructure comprising an island of material confined between two electrodes forming barriers, the island (30) of material having lateral flanks running parallel to and lateral flanks running perpendicular to the barriers, wherein the lateral flanks of the island are defined by etching of at least one layer (16), called the template layer, and the barriers are formed by damascening. The method includes (a) a first etching of the template layer using a first etching mask having at least one filiform part, and (b) a second etching of the template layer, subsequent to the first etching, using a second etching mask also having at least one filiform part, oriented in a direction forming a non-zero angle with a direction of orientation of the filiform part of the first mask, in the vicinity of the site of formation of the island.
    Type: Grant
    Filed: December 17, 2001
    Date of Patent: May 9, 2006
    Assignees: Commissariat a l'Energie Atomique, STMicroelectronics
    Inventors: David Fraboulet, Denis Mariolle, Yves Morand
  • Patent number: 6888665
    Abstract: A molecule is wired into an electronic circuit by attaching a metal nanoparticle to the molecule and then electrically connecting a metal nanoparticle to the electric circuit. The metal nanoparticle interconnects can bridge the gap between small molecules and conventional electric circuits. An optical second harmonic also may be generated by impinging optical radiation having a first frequency on an array of molecularly bridged metal nanoparticles, to generate optical energy at a second frequency that is twice the first frequency. Red to blue light conversion thereby may be provided.
    Type: Grant
    Filed: August 9, 2002
    Date of Patent: May 3, 2005
    Assignee: North Carolina State University
    Inventors: Daniel Feldheim, Louis C. Brousseau, III, James P. Novak