With One Or Zero Or Quasi-one Or Quasi-zero Dimensional Charge Carrier Gas Channel, E.g., Quantum Wire Fet; Single Electron Trans Istor (set); Striped Channel Transistor; Coulomb Blockade Device (epo) Patents (Class 257/E21.404)
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Publication number: 20120015467Abstract: A biosensor using a nanodot and a method of manufacturing the same are provided. A silicon nanowire can be formed by a CMOS process to reduce manufacturing costs. In addition, an electrically charged nanodot is coupled to a target molecule to be detected, in order to readily change conductivity of the silicon nanowire, thereby making it possible to implement a biosensor capable of providing good sensitivity and being manufactured at a low cost.Type: ApplicationFiled: September 22, 2011Publication date: January 19, 2012Applicant: Electronics and Telecommunications Research InstituteInventors: Tae Youb KIM, Chil Seong AH, Chang Geun AHN, Han Young YU, Jong Heon YANG, Moon Gyu JANG
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Publication number: 20120009749Abstract: Embodiments relate to a method for fabricating nano-wires in nano-devices, and more particularly to nano-device fabrication using end-of-range (EOR) defects. In one embodiment, a substrate with a surface crystalline layer over the substrate is provided and EOR defects are created in the surface crystalline layer. One or more fins with EOR defects embedded within is formed and oxidized to form one or more fully oxidized nano-wires with nano-crystals within the core of the nano-wire.Type: ApplicationFiled: July 8, 2010Publication date: January 12, 2012Applicants: NANYANG TECHNOLOGICAL UNIVERSITY, GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Dexter TAN, Kin Leong PEY, Sai Hooi YEONG, Yoke King CHIN, Kuang Kian ONG, Chee Mang NG
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Publication number: 20110315953Abstract: A method of forming a semiconductor is provided and includes patterning a pad and a nanowire onto a wafer, the nanowire being substantially perpendicular with a pad sidewall and substantially parallel with a wafer surface and epitaxially growing on an outer surface of the nanowire a secondary layer of semiconductor material, which is lattice mismatched with respect to a material of the nanowire and substantially free of defects.Type: ApplicationFiled: June 28, 2010Publication date: December 29, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Sarunya Bangsaruntip, Mikael Bjoerk, Guy M. Cohen, Heike E. Riel, Heinz Schmid
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Publication number: 20110315950Abstract: In one embodiment, a method of providing a nanowire semiconductor device is provided, in which the gate structure to the nanowire semiconductor device has a trapezoid shape. The method may include forming a trapezoid gate structure surrounding at least a portion of a circumference of a nanowire. The first portion of the trapezoid gate structure that is in direct contact with an upper surface of the nanowire has a first width and a second portion of the trapezoid gate structure that is in direct contact with a lower surface of the nanowire has a second width. The second width of the trapezoid gate structure is greater than the first width of the trapezoid gate structure. The exposed portions of the nanowire that are adjacent to the portion of the nanowire that the trapezoid gate structure is surrounding are then doped to provide source and drain regions.Type: ApplicationFiled: June 28, 2010Publication date: December 29, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Jeffrey W. Sleight, Sarunya Bangsaruntip, Sebastian U. Engelmann, Ying Zhang
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Publication number: 20110278542Abstract: A tunnel field effect transistor (TFET) includes a source region, the source region comprising a first portion of a nanowire; a channel region, the channel region comprising a second portion of the nanowire; a drain region, the drain region comprising a portion of a silicon pad, the silicon pad being located adjacent to the channel region; and a gate configured such that the gate surrounds the channel region and at least a portion of the source region.Type: ApplicationFiled: May 11, 2010Publication date: November 17, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Sarunya Bangsaruntip, Isaac Lauer, Amlan Majumdar, Jeffrey Sleight
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Patent number: 8030186Abstract: A method and apparatus for an electronic substrate having a plurality of semiconductor devices is described. A thin film of nanowires is formed on a substrate. The thin film of nanowires is formed to have a sufficient density of nanowires to achieve an operational current level. A plurality of semiconductor regions are defined in the thin film of nanowires. Contacts are formed at the semiconductor device regions to thereby provide electrical connectivity to the plurality of semiconductor devices. Furthermore, various materials for fabricating nanowires, thin films including p-doped nanowires and n-doped nanowires, nanowire heterostructures, light emitting nanowire heterostructures, flow masks for positioning nanowires on substrates, nanowire spraying techniques for depositing nanowires, techniques for reducing or eliminating phonon scattering of electrons in nanowires, and techniques for reducing surface states in nanowires are described.Type: GrantFiled: November 5, 2010Date of Patent: October 4, 2011Assignee: Nanosys, Inc.Inventors: Linda T. Romano, Jian Chen
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Patent number: 8022393Abstract: The disclosure pertains to a method for making a nanoscale filed effect transistor structure on a semiconductor substrate. The method comprises disposing a mask on a semiconductor upper layer of a multi-layer substrate, and removing areas of the upper layer not covered by the mask in a nanowire lithography process. The mask includes two conductive terminals separated by a distance, and a nanowire in contact with the conductive terminals across the distance. The nanowire lithography may be carried out using a deep-reactive-ion-etching, which results in an integration of the nanowire mask and the underlying semiconductor layer to form a nanoscale semiconductor channel for the field effect transistor.Type: GrantFiled: July 29, 2008Date of Patent: September 20, 2011Assignee: Nokia CorporationInventor: Alan Colli
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Patent number: 7960251Abstract: Disclosed herein is a method for producing nanowires. The method comprises the steps of providing a porous template with a plurality of holes in the form of tubes, filling the tubes with nanoparticles or nanoparticle precursors, and forming the filled nanoparticles or nanoparticle precursors into nanowires. According to the method, highly rectilinear and well-ordered nanowires can be produced in a simple manner.Type: GrantFiled: June 6, 2006Date of Patent: June 14, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Byoung Lyong Choi, Jong Min Kim, Eun Kyung Lee
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Patent number: 7955932Abstract: A single electron transistor includes source/drain layers disposed apart on a substrate, at least one nanowire channel connecting the source/drain layers, a plurality of oxide channel areas in the nanowire channel, the oxide channel areas insulating at least one portion of the nanowire channel, a quantum dot in the portion of the nanowire channel insulated by the plurality of oxide channel areas, and a gate electrode surrounding the quantum dot.Type: GrantFiled: October 3, 2007Date of Patent: June 7, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Sung-Dae Suk, Kyoung-Hwan Yeo, Ming Li, Yun-Young Yeoh
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Patent number: 7948016Abstract: The present disclosure provides a method of making a thin film semiconductor device such as a transistor comprising the steps of: a) providing a substrate bearing first and second conductive zones which define a channel therebetween, where the channel does not border more than 75% of the perimeter of either conductive zone; and b) depositing a discrete aliquot of a solution comprising an organic semiconductor adjacent to or on the channel, where a majority of the solution is deposited to one side of the channel and not on the channel. In some embodiments of the present disclosure, the solution is deposited entirely to one side of the channel, not on the channel, and furthermore the solution is deposited in a band having a length that is less than the channel length. The present disclosure additionally provides thin film semiconductor devices such as a transistors.Type: GrantFiled: November 3, 2009Date of Patent: May 24, 2011Assignee: 3M Innovative Properties CompanyInventors: Scott M. Schnobrich, Robert S. Clough, Dennis E. Vogel, Michael E. Griffin
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Patent number: 7939398Abstract: A method of manufacturing a single-electron transistor device is provided. The method includes forming a thinned region in a silicon substrate, the thinned region offset by a non-selected region. The method also includes forming at least one quantum island from the thinned region by subjecting the thinned region to an annealing process. The non-selected region is aligned with the quantum island and tunnel junctions are formed between the quantum island and the non-selected region. The present invention also includes a single-electron device, and a method of manufacturing an integrated circuit that includes a single-electron device.Type: GrantFiled: November 16, 2009Date of Patent: May 10, 2011Assignee: Texas Instruments IncorporatedInventors: Christoph Wasshuber, Gabriel G. Barna, Olivier A. Faynot
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Publication number: 20110089995Abstract: Provided is a graphene device and a method of manufacturing the same. The graphene device may include an upper oxide layer on at least one embedded gate, and a graphene channel and a plurality of electrodes on the upper oxide layer. The at least one embedded gate may be formed on the substrate. The graphene channel may be formed on the plurality of electrodes, or the plurality of electrodes may be formed on the graphene channel.Type: ApplicationFiled: August 25, 2010Publication date: April 21, 2011Applicant: Samsung Electronics Co., Ltd.Inventors: Jin seong Heo, Sun-ae Seo, Dong-chul Kim, Yun-sung Woo, Hyun-jong Chung
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Patent number: 7928017Abstract: A method of forming a nanowire and a semiconductor device comprising the nanowire are provided. The method of forming a nanowire includes forming a patterned SiyGe1-y layer (where, y is a real number that satisfies 0?y<1) on a base layer, and forming a first oxide layer and at least one nanowire within the first oxide layer by performing a first oxidation process on the patterned SiyGe1-y layer.Type: GrantFiled: March 17, 2008Date of Patent: April 19, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Jun-youn Kim, Joong S. Jeong, Eun-ju Bae
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Publication number: 20110079770Abstract: The invented ink-jet printing method for the construction of thin film transistors using all SWNTs on flexible plastic films is a new process. This method is more practical than all of exiting printing methods in the construction TFT and RFID tags because SWNTs have superior properties of both electrical and mechanical over organic conducting oligomers and polymers which often used for TFT. Furthermore, this method can be applied on thin films such as paper and plastic films while silicon based techniques can not used on such flexible films. These are superior to the traditional conducting polymers used in printable devices since they need no dopant and they are more stable. They could be used in conjunction with conducting polymers, or as stand-alone inks.Type: ApplicationFiled: September 14, 2010Publication date: April 7, 2011Applicant: William Marsh Rice UniversityInventors: Gyou-Jin Cho, Min Hun Jung, Jared L. Hudson, James M. Tour
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Patent number: 7915176Abstract: A method for manufacturing a device including a field of micrometric tips, including forming a polycrystalline layer on a support; performing an anisotropic plasma etching of all or part of the polycrystalline layer by using a gas mixture including chlorine and helium, whereby tips are formed at the surface of the polycrystalline layer.Type: GrantFiled: June 30, 2006Date of Patent: March 29, 2011Assignee: STMicroelectronics Crolles 2 SASInventors: Olivier De Sagazan, Matthieu Denoual
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Patent number: 7880202Abstract: A semiconductor field effect transistor can be used with RF signals in an amplifier circuit. The transistor includes a source region and a drain region with a channel region interposed in between the source and drain regions. The transistor is structured such that the threshold voltage for current flow through the channel region varies at different points along the width direction, e.g., to give an improvement in the distortion characteristics of the transistor.Type: GrantFiled: November 27, 2006Date of Patent: February 1, 2011Assignee: Infineon Technologies AGInventor: Peter Baumgartner
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Patent number: 7880318Abstract: A sensing system includes a nanowire, a passivation layer established on at least a portion of the nanowire, and a barrier layer established on the passivation layer.Type: GrantFiled: April 27, 2007Date of Patent: February 1, 2011Assignee: Hewlett-Packard Development Company, L.P.Inventors: Theodore I. Kamins, Zhiyong Li, Duncan R. Stewart
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Publication number: 20110012177Abstract: A structure and a method for a semiconductor including a nanostructure semiconductor channel. The semiconductor may include a dielectric and an electrode, the electrode attached to the dielectric, a semiconductor channel may be disposed proximate to the dielectric, wherein the semiconductor channel has an electric mobility and is configured to have at least one dimension, and wherein the dielectric may be configured to apply a force at the at least one dimension.Type: ApplicationFiled: July 20, 2009Publication date: January 20, 2011Inventors: Dureseti Chidambarrao, Oki Gunawan, Xiao Hu Liu, Amlan Majumdar, Lidija Sekaric, Jeffrey W. Sleight
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Publication number: 20100330751Abstract: The present invention relates to a single-electron transistor (SET) operating at room temperature and a method of manufacturing the same, and to be specific, to a single-electron transistor operating at room temperature and a method of manufacturing the same, which are capable of minimizing influence of the gate voltage on tunneling barriers and effectively controlling the electric potential of a quantum dot (QD), by forming the quantum dot using a trenched nano-wire structure and forming the gate to wrap most of the way around the quantum dot.Type: ApplicationFiled: September 1, 2010Publication date: December 30, 2010Applicant: Chungbuk National University Industry-Academic Cooperation FoundationInventors: Jung Bum Choi, Seung Jun Shin
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Patent number: 7851242Abstract: An embodiment is a method and apparatus for a white or full-color light-emitting diode. First single or multiple quantum wells (QWs) at a first wavelength are formed at an active region between a p-type layer and an n-type layer of a light-emitting diode. Multiple passive quantum wells (QWs) are formed within the p-type layer or the n-type layer. The multiple passive QWs are optically pumped by the first or single multiple QWs to generate a desired color.Type: GrantFiled: December 17, 2008Date of Patent: December 14, 2010Assignee: Palo Alto Research Center IncorporatedInventors: David P. Bour, Christopher L. Chua, Noble M. Johnson
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Publication number: 20100285639Abstract: A method includes an act of providing a crystalline substrate with a diamond-type lattice and an exposed substantially (111)-surface. The method also includes an act of forming a graphene layer or a graphene-like layer on the exposed substantially (111)-surface.Type: ApplicationFiled: July 19, 2010Publication date: November 11, 2010Inventors: Jorge Manuel Garcia, Loren N. Pfeiffer
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Method for forming quantum dot, and quantum semiconductor device and method for fabricating the same
Patent number: 7755080Abstract: The method for forming a quantum dot according to the present invention comprises the step of forming an oxide in a dot-shape on the surface of a semiconductor substrate 10, the step of removing the oxide to form a concavity 16 in the position from which the oxide has been removed, and the step of growing a semiconductor layer 18 on the semiconductor substrate with the concavity formed in to form a quantum dot 20 of the semiconductor layer in the concavity. The concavity is formed in the semiconductor substrate by forming the oxide dot in the surface of the semiconductor substrate and removing the oxide, whereby the concavity can be formed precisely in a prescribed position and in a prescribed size. The quantum dot is grown in such a concavity, whereby the quantum dot can have good quality and can be formed in a prescribed position and in a prescribed size.Type: GrantFiled: October 30, 2007Date of Patent: July 13, 2010Assignee: Fujitsu LimitedInventors: Hai-Zhi Song, Toshio Ohshima -
Patent number: 7749922Abstract: The present invention provides structures and devices comprising conductive segments and conductance constricting segments of a nanowire, such as metallic, superconducting or semiconducting nanowire. The present invention provides structures and devices comprising conductive nanowire segments and conductance constricting nanowire segments having accurately selected phases including crystalline and amorphous states, compositions, morphologies and physical dimensions, including selected cross sectional dimensions, shapes and lengths along the length of a nanowire. Further, the present invention provides methods of processing nanowires capable of patterning a nanowire to form a plurality of conductance constricting segments having selected positions along the length of a nanowire, including conductance constricting segments having reduced cross sectional dimensions and conductance constricting segments comprising one or more insulating materials such as metal oxides.Type: GrantFiled: May 4, 2006Date of Patent: July 6, 2010Assignee: The Board of Trustees of the University of IllinoisInventors: Alexey Bezryadin, Mikas Remeika
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Patent number: 7737432Abstract: A computing element for use in a quantum computer has at least three coupled quantum dots, and at least one gate for applying an electric field to manipulate the state of said qubit.Type: GrantFiled: June 14, 2005Date of Patent: June 15, 2010Assignee: National Research Council of CanadaInventors: Pawel Hawrylak, Marek Korkusinski
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Publication number: 20100090197Abstract: Provided are a method of manufacturing a semiconductor nanowire sensor device and a semiconductor nanowire sensor device manufactured according to the method. The method includes preparing a first conductive type single crystal semiconductor substrate, forming a line-shaped first conductive type single crystal pattern from the first conductive type single crystal semiconductor substrate, forming second conductive type epitaxial patterns on both sidewalls of the first conductive type single crystal pattern, and forming source and drain electrodes at both ends of the second conductive type epitaxial patterns.Type: ApplicationFiled: June 30, 2009Publication date: April 15, 2010Applicant: Electonics and Telecommunications Research InstituteInventors: Chan-Woo PARK, Chang-Geun AHN, Jong-Heon YANG, In-Bok BAEK, Chil-Seong AH, An-Soon KIM, Tae-Youb KIM, Gun-Yong SUNG, Seon-Hee PARK
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Publication number: 20100072460Abstract: An electronic device and method of manufacturing the device. The device includes a semiconducting region, which can be a nanowire, a first contact electrically coupled to the semiconducting region, and at least one second contact capacitively coupled to the semiconducting region. At least a portion of the semiconducting region between the first contact and the second contact is covered with a dipole layer. The dipole layer can act as a local gate on the semiconducting region to enhance the electric properties of the device.Type: ApplicationFiled: September 22, 2009Publication date: March 25, 2010Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Mikael T. Bjoerk, Joachim Knoch, Heike E. Riel, Walter Heinrich Riess, Heinz Schmid
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Patent number: 7671357Abstract: A method of fabricating a semiconductor device having high output power and excellent long-term reliability by preventing thermal adverse influence exerted at the time of window structure formation is provided. The method comprises a 1st step of forming predetermined semiconductor layers 2 to 9 containing at least an active layer 4b consisting of a quantum well active layer on a semiconductor substrate 1; a 2nd step of forming a first dielectric film 10 on a first portion of the surface of the semiconductor layers 2 to 9; a 3rd step of forming a second dielectric film 12 made of the same material as that of the first dielectric film 10 and having a density lower than that of the first dielectric film 10 on a second portion of the surface of the semiconductor layers 2 to 9; and a 4th step of heat-treating a multilayer body containing the semiconductor layers 2 to 9, the first dielectric film 10, and the second dielectric film 12 to disorder the quantum well layer below the second dielectric film 12.Type: GrantFiled: June 15, 2006Date of Patent: March 2, 2010Assignee: The Furukawa Electric Co., Ltd.Inventor: Yumi Yamada
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Patent number: 7588954Abstract: Method for making an InGaAs/GaAs quantum well laser (10) on a Silicon substrate (15.1). The method comprises the steps: Formation of a virtual Germanium substrate (15) on the Silicon substrate (15.1) by means of a low-energy plasma-enhanced chemical vapour deposition (LEPECVD). The virtual Germanium substrate (15) comprises a pure Germanium layer (15.3). Formation of a Gallium Arsenide structure on the virtual Germanium substrate (15) by means of a metal organic chemical vapour deposition process.Type: GrantFiled: September 4, 2004Date of Patent: September 15, 2009Assignee: Epispeed S.A.Inventors: Hans Von Kaenel, Isabelle Sagnes, Guillaume Jacques Saint-Girons, Sophie Bouchoule
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Publication number: 20090209067Abstract: A semiconductor device (1) and a method are disclosed for obtaining on a substrate (2) a multilayer structure (3) with a quantum well structure (4). The quantum well structure (4) comprises a semiconductor layer (5) sandwiched by insulating layers (6,6?), wherein the material of the insulating layers (6,6?) has preferably a high dielectric constant. In a FET the quantum wells (4,9) function as channels, allowing a higher drive current and a lower off current. Short channel effects are reduced. The multi-channel FET is suitable to operate even for sub-35 nm gate lengths. In the method the quantum wells are formed by epitaxial growth of the high dielectric constant material and the semiconductor material alternately on top of each other, preferably with MBE.Type: ApplicationFiled: April 24, 2009Publication date: August 20, 2009Applicant: NXP B.V.Inventor: Youri PONOMAREV
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Patent number: 7560753Abstract: A field effect transistor and a method of fabricating the field effect transistor. The field effect transistor includes: a silicon body, a perimeter of the silicon body abutting a dielectric isolation; a source and a drain formed in the body and on opposite sides of a channel formed in the body; and a gate dielectric layer between the body and an electrically conductive gate electrode, a bottom surface of the gate dielectric layer in direct physical contact with a top surface of the body and a bottom surface the gate electrode in direct physical contact with a top surface of the gate dielectric layer, the gate electrode having a first region having a first thickness and a second region having a second thickness, the first region extending along the top surface of the gate dielectric layer over the channel region, the second thickness greater than the first thickness.Type: GrantFiled: February 26, 2008Date of Patent: July 14, 2009Assignee: International Business Machines CorporationInventors: Brent Alan Anderson, Andres Bryant, William F. Clark, Jr., Edward Joseph Nowak
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Patent number: 7465953Abstract: The present invention includes single electron structures and devices comprising a substrate having an upper surface, one or more dielectric layers formed on the upper surface of the substrate and having at least one exposed portion, at least one monolayer of self-assembling molecules attracted to and in contact with the at least one exposed portion of only one of the one or more dielectric layers, one or more nanoparticles attracted to and in contact with the at least one monolayer, and at least one tunneling barrier in contact with the one or more nanoparticles. Typically, the single electron structure or device formed therefrom further comprise a drain, a gate and a source to provide single electron behavior, wherein there is a defined gap between source and drain and the one or more nanoparticles is positioned between the source and drain.Type: GrantFiled: April 27, 2006Date of Patent: December 16, 2008Assignee: Board of Regents, The University of Texas SystemInventors: Seong Jin Koh, Choong-Un Kim, Liang-Chieh Ma, Ramkumar Subramanian
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Patent number: 7423285Abstract: The difficulty of miniaturization of large-scale integrated circuits in electric devices based on the conventional techniques involving three-dimensional device structures or the introduction of novel materials is solved. Wires 2 and 3 are disposed to intersect one another in midair in a matrix. The ends of the wires 2 and 3 in midair are designed to be in direct contact with the insides of a package which contains a semiconductor device so that electrical connection and/or physical support can be acquired. Cross point 1 where wires 2 and 3 are in contact with each other is a region which has current switching function similar to the function of a channel of a common MOSFET. Cross point 1 is a region where base wire 2 functioning as a substrate and gate electrode wire 3 functioning as a control electrode (gate electrode) intersect in contact with one another, or a region where base wire 2 and a lead wire 4 overlap.Type: GrantFiled: January 10, 2006Date of Patent: September 9, 2008Assignee: Sharp Kabushiki KaishaInventor: Hiroshi Ohki
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Patent number: 7374980Abstract: A field effect transistor and a method of fabricating the field effect transistor. The field effect transistor includes: a silicon body, a perimeter of the silicon body abutting a dielectric isolation; a source and a drain formed in the body and on opposite sides of a channel formed in the body; and a gate dielectric layer between the body and an electrically conductive gate electrode, a bottom surface of the gate dielectric layer in direct physical contact with a top surface of the body and a bottom surface the gate electrode in direct physical contact with a top surface of the gate dielectric layer, the gate electrode having a first region having a first thickness and a second region having a second thickness, the first region extending along the top surface of the gate dielectric layer over the channel region, the second thickness greater than the first thickness.Type: GrantFiled: October 13, 2006Date of Patent: May 20, 2008Assignee: International Business Machines CorporationInventors: Brent Alan Anderson, Andres Bryant, William F. Clark, Jr., Edward Joseph Nowak
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Patent number: 7358139Abstract: The invention includes methods of forming field effect transistors. In one implementation, a method of forming a field effect transistor having a gate comprising a conductive metal or metal compound received over conductively doped semiconductive material includes forming transistor gate semiconductive material into a gate line over a semiconductive material channel region. The gate line includes semiconductive material sidewalls. The semiconductive material sidewalls of the gate line are oxidized. After the oxidizing, at least one of a conductive metal or metal compound is formed in electrical connection with the transistor gate semiconductive material to comprise a substantially coextensive elongated portion of a final construction of the gate line of the field effect transistor being formed.Type: GrantFiled: July 20, 2006Date of Patent: April 15, 2008Assignee: Micron Technology, Inc.Inventors: Andrew R. Bicksler, Sukesh Sandhu
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Publication number: 20080067495Abstract: Tunnel field-effect transistors (TFETs) are regarded as successors of metal-oxide semiconductor field-effect transistors (MOSFETs), but silicon-based TFETs typically suffer from low on-currents, a drawback related to the large resistance of the tunnel barrier. To achieve higher on-currents a nanowire-based TFET with a germanium (Ge) tunnel barrier in an otherwise silicon (Si) channel is used. A nanowire is introduced such that the lattice mismatch between silicon and germanium does not result in a highly defective interface. A dynamic power reduction as well as a static power reduction can result, compared to conventional MOSFET configurations. Multiple layers of logic can therefore be envisioned with these nanowire Si/Ge TFETs resulting in ultra-high on-chip transistor densities.Type: ApplicationFiled: June 20, 2007Publication date: March 20, 2008Applicant: Interuniversitair Microelektronica Centrum (IMEC)Inventor: Anne S. Verhulst
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Patent number: 7176066Abstract: A silicon substrate is coated with one or more layers of resist. First and second circuit patterns are exposed in sequence, where the second pattern crosses the first pattern. The patterned resist layers are developed to open holes which extend down to the substrate only where the patterns cross over each other. These holes provide a mask suitable for implanting single phosphorous ions in the substrate, for a solid state quantum computer. Further development of the resist layers provides a mask for the deposition of nanoelectronic circuits, such as single electron transistors, aligned to the phosphorous ions.Type: GrantFiled: May 19, 2005Date of Patent: February 13, 2007Assignee: Unisearch LimitedInventors: Rolf Brenner, Tilo Marcus Buehler, Robert Graham Clark, Andrew Steven Dzurak, Alexander Rudolf Hamilton, Nancy Ellen Lumpkin, Rita Paytricia McKinnon
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Patent number: 7166858Abstract: The present invention provides a single-electron transistor device 100. The device comprises a source 105 and drain 110 located over a substrate 115 and a quantum island 120 situated between the source and drain, to form tunnel junctions 125, 130 between the source and drain. The device further includes a fixed-gate electrode 135 located adjacent the quantum island 120. The fixed-gate electrode has a capacitance associated therewith that varies as a function of an applied voltage to the fixed-gate electrode. The present invention also includes a method of fabricating a single-electron device 300, and a transistor circuit 800 that include a single-electron device 810.Type: GrantFiled: October 7, 2004Date of Patent: January 23, 2007Assignee: Texas Instruments IncorporatedInventor: Christoph Wasshuber
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Patent number: 7041539Abstract: A method produces a microstructure comprising an island of material confined between two electrodes forming barriers, the island (30) of material having lateral flanks running parallel to and lateral flanks running perpendicular to the barriers, wherein the lateral flanks of the island are defined by etching of at least one layer (16), called the template layer, and the barriers are formed by damascening. The method includes (a) a first etching of the template layer using a first etching mask having at least one filiform part, and (b) a second etching of the template layer, subsequent to the first etching, using a second etching mask also having at least one filiform part, oriented in a direction forming a non-zero angle with a direction of orientation of the filiform part of the first mask, in the vicinity of the site of formation of the island.Type: GrantFiled: December 17, 2001Date of Patent: May 9, 2006Assignees: Commissariat a l'Energie Atomique, STMicroelectronicsInventors: David Fraboulet, Denis Mariolle, Yves Morand
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Patent number: 6888665Abstract: A molecule is wired into an electronic circuit by attaching a metal nanoparticle to the molecule and then electrically connecting a metal nanoparticle to the electric circuit. The metal nanoparticle interconnects can bridge the gap between small molecules and conventional electric circuits. An optical second harmonic also may be generated by impinging optical radiation having a first frequency on an array of molecularly bridged metal nanoparticles, to generate optical energy at a second frequency that is twice the first frequency. Red to blue light conversion thereby may be provided.Type: GrantFiled: August 9, 2002Date of Patent: May 3, 2005Assignee: North Carolina State UniversityInventors: Daniel Feldheim, Louis C. Brousseau, III, James P. Novak