Application Of Electric Current Or Fields, E.g., For Electroforming (epo) Patents (Class 257/E21.498)
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Patent number: 8735858Abstract: An ionic device includes a layer of an ionic conductor containing first and second species of impurities. The first species of impurity in the layer is mobile in the ionic conductor, and a concentration profile of the first species determines a functional characteristic of the device. The second species of impurity in the layer interacts with the first species within the layer to create a structure that limits mobility of the first species in the layer.Type: GrantFiled: April 30, 2010Date of Patent: May 27, 2014Assignee: Hewlett-Packard Development Company, L.P.Inventors: Dmitri B. Strukov, Alexandre M. Bratkovski, R. Stanley Williams, Zhiyong Li
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Patent number: 8685790Abstract: A method and apparatus for forming a backside contact, electrical and/or thermal, for die encapsulated in a semiconductor device package are provided. Die of varying thicknesses can be accommodated within the semiconductor device package. Embodiments of the present invention provide a conductive pedestal coupled to a backside contact of a die, where the coupling is performed prior to encapsulating the die within the package. In addition, conductive pedestals coupled to varying die within a semiconductor device package are of such a thickness that each conductive pedestal can be exposed on the back side of the package without exposing or damaging the backside of any encapsulated die. Embodiments of the present invention provide for the conductive pedestals being made of electrically or thermally conductive material and coupled to the device die contact using an electrically and/or thermally conductive adhesive.Type: GrantFiled: February 15, 2012Date of Patent: April 1, 2014Assignee: Freescale Semiconductor, Inc.Inventors: Alan J. Magnus, Carl E. D. Acosta, Douglas G. Mitchell, Justin E. Poarch
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Patent number: 8436330Abstract: An electrically actuated device includes a first electrode, a second electrode, and an active region disposed between the first and second electrodes. At least two dopants are present in a spatially varying region of the active region prior to device actuation. The at least two dopants have opposite conductivity types and different mobilities.Type: GrantFiled: December 23, 2008Date of Patent: May 7, 2013Assignee: Hewlett-Packard Development Company, L.P.Inventors: Theodore I Kamins, R Stanley Williams
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Patent number: 8431440Abstract: A substrate table used for manufacturing a chip is provided. The substrate table includes a substrate stage, a substrate placement surface formed on the substrate stage, and on which a substrate is placed, and a guiding member that can project and retract from the substrate placement surface. The guiding member positions the substrate when the guiding member is at a projected position abutting an edge portion of the substrate placed on the substrate placement surface, and the guiding member retracts at a time of applying a tape to the substrate.Type: GrantFiled: June 16, 2010Date of Patent: April 30, 2013Assignee: Lapis Semiconductor Co., Ltd.Inventor: Hiromi Morita
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Patent number: 8372730Abstract: An electric fuse includes: a first interconnect and a second interconnect, formed on a semiconductor substrate; a fuse link, formed on the semiconductor substrate and provided so that an end thereof is coupled to the first interconnect, the fuse link being capable of electrically cutting the second interconnect from the first interconnect; and an electric current inflow terminal and an electric current drain terminal for cutting the fuse link, formed on the semiconductor substrate and provided in one end and another end of the first interconnect, respectively.Type: GrantFiled: June 23, 2011Date of Patent: February 12, 2013Assignee: Renesas Electronics CorporationInventor: Takehiro Ueda
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Patent number: 8268669Abstract: A method is provided for detecting laser optical paths in integrated circuit (IC) packages. The method provides an IC die encapsulated as a package in a compound of glass spheres and epoxy. Power is supplied to the IC. The IC is scanned with a laser. Typically, a laser wavelength is used that is minimally absorbed by the glass spheres in the epoxy compound of the IC package, and changes in current to the IC are detected. A detected current change is cross-referenced against a scanned IC package surface region. This process identifies an optical pathway underlying the scanned IC package surface region. In some aspects, this process leads to the identification of a glass sphere-collecting package structure underlying the optical pathway. Examples of a glass sphere-collecting structure might include an inner lead wire, lead frame edge, or die edge.Type: GrantFiled: March 17, 2011Date of Patent: September 18, 2012Assignee: Applied Micro Circuits CorporationInventor: Joseph Martin Patterson
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Patent number: 8143694Abstract: Implementations are presented herein that relate to a fuse device, an integrated circuit including a fuse device, a method of implementing a fuse device and a method of programming a fuse device.Type: GrantFiled: June 2, 2008Date of Patent: March 27, 2012Assignee: Infineon Technologies AGInventors: Vianney Choserot, Gunther Lehmann, Franz Ungar
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Publication number: 20120062308Abstract: Power switching circuits and power management techniques are provided that can reduce static power of ICs, including digital core processors. In one embodiment, the power switching circuit includes a footer (power-gating transistor) between the core and a ground rail and at least two additional power-gating transistors parallel to the footer. The power-gating transistors are controlled by respective control signals to enable selective switching. In a specific embodiment, for each sleep mode, at most, a single one of the transistors is turned on. Multiple sleep modes are accomplished according to the relative sizing of the additional power-gating transistors. A larger of the additional transistors is used to provide a standby mode during short idling times by providing a fast wake-up time and some reduction in static power. For standby modes during longer idling periods, smaller sized transistors are turned on. For longest idling periods, all transistors are turned off.Type: ApplicationFiled: September 15, 2010Publication date: March 15, 2012Inventors: KRISHNENDU CHAKRABARTY, Chrysovalantis Kavousianos, Zhaobo Zhang
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Patent number: 8080861Abstract: A semiconductor device includes an electric fuse and first and second large area wirings for applying a voltage to the electric fuse. The electric fuse includes a fuse unit which includes an upper-layer fuse wiring, a lower-layer fuse wiring, and a via connecting the upper-layer fuse wiring and the lower-layer fuse wiring, an upper-layer lead-out wiring which connects the upper-layer fuse wiring and the first large area wiring and has a bent pattern, and a lower-layer lead-out wiring which connects the lower-layer fuse wiring and the second large area wiring and has a bent pattern.Type: GrantFiled: October 7, 2009Date of Patent: December 20, 2011Assignee: Renesas Electronics CorporationInventors: Hiroshi Tsuda, Yoshitaka Kubota, Hiromichi Takaoka
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Publication number: 20110250735Abstract: An electric fuse includes: a first interconnect and a second interconnect, formed on a semiconductor substrate; a fuse link, formed on the semiconductor substrate and provided so that an end thereof is coupled to the first interconnect, the fuse link being capable of electrically cutting the second interconnect from the first interconnect; and an electric current inflow terminal and an electric current drain terminal for cutting the fuse link, formed on the semiconductor substrate and provided in one end and another end of the first interconnect, respectively.Type: ApplicationFiled: June 23, 2011Publication date: October 13, 2011Applicant: RENESAS ELECTRONICS CORPORATIONInventor: Takehiro Ueda
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Publication number: 20110181352Abstract: An electrically actuated device includes a first electrode, a second electrode, and an active region disposed between the first and second electrodes. At least two dopants are present in a spatially varying region of the active region prior to device actuation. The at least two dopants have opposite conductivity types and different mobilities.Type: ApplicationFiled: December 23, 2008Publication date: July 28, 2011Applicant: Hewlett-Packard Development Company, LPInventors: Theodore I. Kamins, R. Stanley Williams
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Patent number: 7955968Abstract: A method and apparatus are described for fabricating an ultra low-k interconnect structure by depositing and curing a first via layer (43) of ultra low dielectric constant (ULK) material, depositing a second uncured trench layer (51) of the same ULK material, selectively etching a via opening (62) and trench opening (72) with a dual damascene etch process which uses a trench etch end point signal from the chemical differences between uncured trench layer (51) and the underlying cured via layer (43), and then curing the second trench layer (83) before forming an interconnect structure (91) by filling the trench opening (72) and via opening (62) with an interconnection material so that there is no additional interface or higher dielectric constant material left behind.Type: GrantFiled: March 6, 2009Date of Patent: June 7, 2011Assignee: Freescale Semiconductor, Inc.Inventors: Pak K. Leung, Terry G. Sparks, David V. Horak, Stephen M. Gates
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Patent number: 7932119Abstract: A method is provided for detecting laser optical paths in integrated circuit (IC) packages. The method provides an IC die encapsulated as a package in a compound of glass spheres and epoxy. Power is supplied to the IC. The IC is scanned with a laser. Typically, a laser wavelength is used that is minimally absorbed by the glass spheres in the epoxy compound of the IC package, and changes in current to the IC are detected. A detected current change is cross-referenced against a scanned IC package surface region. This process identifies an optical pathway underlying the scanned IC package surface region. In some aspects, this process leads to the identification of a glass sphere-collecting package structure underlying the optical pathway. Examples of a glass sphere-collecting structure might include an inner lead wire, lead frame edge, or die edge.Type: GrantFiled: June 25, 2008Date of Patent: April 26, 2011Assignee: Applied Micro Circuits CorporationInventor: Joseph Martin Patterson
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Patent number: 7811918Abstract: A conformal metallic layer is applied to a selected region of a substrate by forming a pattern of electrically conductive lines on the substrate, placing a bead of a selected metal on the substrate at an edge of the region selected for coating, and passing an electric current through the bead and through conductive lines that extend over the region of the substrate selected for coating with the electric current having a current density sufficient to melt the bead so that metallic material therefrom flows over the conductive lines to form the coating. A pair of electrically conductive connectors is placed in contact with the electrically conductive lines, and an electric power supply is connected to the pair of electrically conductive connectors such that electric current passes through the bead, melts the bead to form a liquid metal, and carries the liquid metal in a continuous stream along the conductive lines, coating the conductive lines conformally in the process.Type: GrantFiled: January 9, 2009Date of Patent: October 12, 2010Assignee: The United States of America as represented by the Secretary of the NavyInventor: Indranath Dutta
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Publication number: 20100255615Abstract: A fin-shaped semiconductor region is formed on a substrate, and then the substrate is placed in a chamber. Then, an ignition gas is introduced into a chamber to thereby turn the ignition gas into a plasma, and then a process gas containing an impurity is introduced into the chamber to thereby turn the process gas into a plasma. Then, a bias voltage is applied to the substrate so as to dope the semiconductor region with the impurity after confirming attenuation of an amount of the ignition gas remaining in the chamber.Type: ApplicationFiled: October 2, 2008Publication date: October 7, 2010Inventors: Katsumi Okashita, Yuichiro Sasaki, Keiichi Nakamoto, Bunji Mizuno
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Patent number: 7763916Abstract: A substrate table used for manufacturing a chip is provided. The substrate table includes a substrate stage, a substrate placement surface formed on the substrate stage, and on which a substrate is placed, and a guiding member that can project and retract from the substrate placement surface. The guiding member positions the substrate when the guiding member is at a projected position abutting an edge portion of the substrate placed on the substrate placement surface, and the guiding member retracts at a time of applying a tape to the substrate.Type: GrantFiled: April 17, 2008Date of Patent: July 27, 2010Assignee: Oki Semiconductor Co., Ltd.Inventor: Hiromi Morita
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Publication number: 20100159673Abstract: A semiconductor device includes a semiconductor substrate, and an electrical fuse including a first conductor including a first cutting target region, and a second conductor branched from the first conductor and connected to the first conductor and including a second cutting target region, which are formed on the semiconductor substrate, wherein a flowing-out region is formed of the first conductor flowing toward outside between the first cutting target region and the second cutting target region in a condition of cutting the electrical fuse.Type: ApplicationFiled: March 2, 2010Publication date: June 24, 2010Applicant: NEC Electronics CorporationInventor: Takehiro Ueda
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Publication number: 20100015785Abstract: According to one embodiment, at least a portion of the phase change material including a first crystalline phase is converted to one of a second crystalline phase and an amorphous phase. The second crystalline phase transitions to the amorphous phase more easily than the first crystalline phase. For example, the first crystalline phase may be a hexagonal closed packed structure, and the first crystalline phase may be a face centered cubic structure.Type: ApplicationFiled: September 21, 2009Publication date: January 21, 2010Inventors: Chang-Wook Jeong, Jun-Hyok Kong, Ji-Hye Yi, Beak-Hyung Cho
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Publication number: 20090294900Abstract: Implementations are presented herein that relate to a fuse device, an integrated circuit including a fuse device, a method of implementing a fuse device and a method of programming a fuse device.Type: ApplicationFiled: June 2, 2008Publication date: December 3, 2009Applicant: INFINEON TECHNOLOGIES AGInventors: Vianney CHOSEROT, Gunther LEHMANN, Franz UNGAR
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Publication number: 20090283853Abstract: Programmable devices, methods of manufacture thereof, and methods of programming devices are disclosed. In one embodiment, a programmable device includes a link and at least one first contact coupled to a first end of the link. The at least one first contact is adjacent a portion of a top surface of the link and at least one sidewall of the link. The programmable device includes at least one second contact coupled to a second end of the link. The at least one second contact is adjacent a portion of the top surface of the link and at least one sidewall of the link.Type: ApplicationFiled: May 13, 2008Publication date: November 19, 2009Inventor: Frank Huebinger
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Patent number: 7582572Abstract: A method of manufacturing an insulating film includes coating a first liquid material in which polysilazane is dissolved on a substrate; decreasing dangling bonds of silicon (Si) in the first liquid material; after decreasing the dangling bonds, coating a second liquid material which is similar to the first liquid material on the first liquid material; and converting the first liquid material and the second liquid material into a silicon (Si) insulating film.Type: GrantFiled: December 14, 2006Date of Patent: September 1, 2009Assignee: Kabushiki Kaisha ToshibaInventor: Kazuaki Iwasawa
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Publication number: 20090206419Abstract: A monolithically integrated semiconductor assembly having a power component, and a method for manufacturing a semiconductor assembly, are proposed, a monolithically integrated resistor element being provided between a first terminal and the second region, and a comparatively low-impedance electrical connection through the first region being provided between the resistor element and the second region.Type: ApplicationFiled: April 27, 2006Publication date: August 20, 2009Inventor: Klaus Heyke
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Patent number: 7550323Abstract: A metal layer is deposited on the patterned semiconductor material layer containing a cathode semiconductor portion, a fuselink semiconductor portion, and an anode semiconductor portion. The metal layer may be patterned so that a middle portion of the fuselink semiconductor portion has a thin metal layer, which upon annealing produces a thinner metal semiconductor alloy portion than surrounding metal semiconductor alloy portion on the fuselink semiconductor portion. Alternatively, a middle portion of the metal semiconductor alloy having a uniform thickness throughout the fuselink may be lithographically patterned and etched to form a thin metal semiconductor alloy portion in the middle of the fuselink, while thick metal semiconductor alloy portions are formed on the end portions of the fuselink. The resulting inventive electrical fuse has interfaces at which a thinner metal semiconductor alloy abuts a thicker metal semiconductor alloy in the fuselink to enhance the divergence of electrical current.Type: GrantFiled: August 8, 2007Date of Patent: June 23, 2009Assignee: International Business Machines CorporationInventors: Dureseti Chidambarrao, William K. Henson, Deok-kee Kim, Chandrasekharan Kothandaraman
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Publication number: 20080305617Abstract: In one disclosed embodiment, the present method for depositing a conductive capping layer on metal lines comprises forming metal lines on a dielectric layer, applying a voltage to the metal lines, and depositing the conductive capping layer on the metal lines. The applied voltage increases the selectivity of the deposition process used, thereby preventing the conductive capping layer from causing a short between the metal lines. The conductive capping layer may be deposited through electroplating, electrolessly, by atomic layer deposition (ALD), or by chemical vapor deposition (CVD), for example. In one embodiment, the present method is utilized to fabricate a semiconductor wafer. In one embodiment, the metal lines comprise copper lines, while the conductive capping layer may comprise tantalum or cobalt. The present method enables deposition of a capping layer having high electromigration resistance.Type: ApplicationFiled: June 7, 2007Publication date: December 11, 2008Inventors: E. Todd Ryan, John A. Iacoponi
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Publication number: 20080206964Abstract: During fabrication of single-walled carbon nanotube transistor devices, a porous template with numerous parallel pores is used to hold the single-walled carbon nanotubes. The porous template or porous structure may be anodized aluminum oxide or another material. A gate region may be provided one end or both ends of the porous structure. The gate electrode may be formed and extend into the porous structure.Type: ApplicationFiled: October 11, 2007Publication date: August 28, 2008Applicant: ATOMATE CORPORATIONInventors: Thomas W. Tombler, Brian Y. Lim
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Publication number: 20080182389Abstract: A semiconductor structure, particularly a pFET, which includes a dielectric material that has a dielectric constant of greater than that of SiO2 and a Ge or Si content of greater than 50% and at least one other means for threshold/flatband voltage tuning by material stack engineering is provided. The other means contemplated in the present invention include, for example, utilizing an insulating interlayer atop the dielectric for charge fixing and/or by forming an engineered channel region. The present invention also relates to a method of fabricating such a CMOS structure.Type: ApplicationFiled: April 4, 2008Publication date: July 31, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Eduard A. Cartier, Matthew W. Copel, Martin M. Frank, Evgeni P. Gousev, Paul C. Jamison, Rajarao Jammy, Barry P. Linder, Vijay Narayanan
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Publication number: 20080122027Abstract: A semiconductor device includes a semiconductor substrate, and an electrical fuse including a first conductor including a first cutting target region, and a second conductor branched from the first conductor and connected to the first conductor and including a second cutting target region, which are formed on the semiconductor substrate, wherein a flowing-out region is formed of the first conductor flowing toward outside between the first cutting target region and the second cutting target region in a condition of cutting the electrical fuse.Type: ApplicationFiled: May 16, 2007Publication date: May 29, 2008Applicant: NEC ELECTRONICS CORPORATIONInventor: Takehiro Ueda
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Publication number: 20080050893Abstract: A method of manufacturing a display device to improve the quality of a polycrystal silicon upon dehydrogenating and polycrystallizing an amorphous silicon at the outside of a display region of a substrate, by forming a plurality of pixels having TFT devices using an amorphous silicon in the display region of the substrate, and forming a plurality of driving circuits having semiconductor devices using a polycrystal silicon at the outside of the display region, the method including irradiation of a first continuous oscillation laser only to the amorphous silicon in the region for forming the driving circuit and the peripheral region thereof to conduct dehydrogenation and then irradiation of a second continuous oscillation region only to the dehydrogenated region to polycrystallize the amorphous silicon, wherein the region to which the first continuous oscillation laser is irradiated is wider than the region to which the second continuous oscillation laser is irradiated.Type: ApplicationFiled: August 6, 2007Publication date: February 28, 2008Inventors: Hideaki Shimmoto, Mikio Hongo, Akio Yazaki, Takeshi Noda, Takuo Kaitoh
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Patent number: 7303962Abstract: A complementary metal-oxide-semiconductor (CMOS) device comprising a substrate, a first type of metal-oxide-semiconductor (MOS) transistor, a second type of MOS transistor, an etching stop layer, a first stress layer and a second stress layer is provided. The substrate has a first and a second active region. The first active region is isolated from the second active region through an isolation structure. The first type of MOS transistor is disposed in the first active region of the substrate and the second type of MOS transistor is disposed in the second active region of the substrate. The etching stop layer covers conformably the first type of MOS transistor, the second type of MOS transistor and the isolation structure. The first stress layer is disposed on the etching stop layer in the first active region and the second stress layer is disposed on the etching stop layer in the second active region.Type: GrantFiled: November 16, 2005Date of Patent: December 4, 2007Assignee: United Microelectronics Corp.Inventors: Pei-Tu Chou, Min-Chieh Yang, Wen-Han Hung
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Patent number: 7084068Abstract: An annealing furnace, includes a processing chamber configured to store a substrate; a susceptor located in the processing chamber so as to load the substrate and having an auxiliary heater for heating the substrate at 650° C. or less, the susceptor having a surface being made of quartz; a gas supply system configured to supply a gas required for a thermal processing on the substrate in parallel to a surface of the substrate; a transparent window located on an upper part of the processing chamber facing the susceptor; and a main heater configured to irradiate a pulsed light on the surface of the substrate to heat the substrate from the transparent window, the pulsed light having a pulse duration of approximately 0.1 ms to 200 ms and having a plurality of emission wavelengths.Type: GrantFiled: September 15, 2003Date of Patent: August 1, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Kyoichi Suguro, Takayuki Ito, Takaharu Itani