Including Component Using Galvano-magnetic Effects, E.g. Hall Effect (epo) Patents (Class 257/E27.005)
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Patent number: 11644485Abstract: A current sensor integrated circuit configured to sense a current through a current conductor includes a lead frame at least one signal lead, a fan out wafer level package (FOWLP), and a mold material enclosing the FOWLP and a portion of the lead frame. The FOWLP includes a semiconductor die configured to support at least one magnetic field sensing element to sense a magnetic field associated with the current, wherein the semiconductor die has a first surface on which at least one connection pad is accessible, a redistribution layer in contact with the at least one connection pad, and an insulating layer in contact with the redistribution layer, wherein the insulating layer is configured to extend beyond a periphery of the semiconductor die by a minimum distance. The die connection pad is configured to be electrically coupled to the at least one signal lead.Type: GrantFiled: October 7, 2021Date of Patent: May 9, 2023Assignee: Allegro MicroSystems, LLCInventors: Shixi Louis Liu, Paul A. David, Natasha Healey
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Patent number: 11631807Abstract: Aspects of the present technology are directed toward Integrated Circuits (IC) including a plurality of trenches disposed in a substrate about a set of silicide regions. The trenches can extend down into the substrate below the set of silicide regions. The silicide regions can be formed by implanting metal ions into portions of a substrate exposed by a mask layer with narrow pitch openings. The trenches can be formed by selectively etching the substrate utilizing the set of silicide regions as a trench mask. An semiconductor material with various degree of crystallinity can be grown from the silicide regions, in openings that extend through subsequently formed layers down to the silicide regions.Type: GrantFiled: August 16, 2021Date of Patent: April 18, 2023Assignee: Integrated Silicon Solution, (Cayman) Inc.Inventors: Kuk-Hwan Kim, Dafna Beery, Marcin Gajek, Michail Tzoufras, Kadriye Deniz Bozdag, Eric Ryan, Satoru Araki, Andy Walker
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Patent number: 11621294Abstract: A technique relates to an integrated circuit (IC). Pillars of a set of memory elements are formed. A bilayer dielectric is formed between the pillars, the bilayer dielectric having an upper dielectric material formed on a lower dielectric material without requiring an etch of the lower dielectric material prior to forming the upper dielectric material, thereby preventing a void in the bilayer dielectric, the lower dielectric material including one or more flowable dielectric materials.Type: GrantFiled: May 29, 2020Date of Patent: April 4, 2023Assignee: International Business Machines CorporationInventors: Ashim Dutta, Saumya Sharma, Tianji Zhou, Chih-Chao Yang
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Patent number: 11594673Abstract: A memory device includes a first electrode including a spin-orbit material, a magnetic junction on a portion of the first electrode and a first structure including a dielectric on a portion of the first electrode. The first structure has a first sidewall and a second sidewall opposite to the first sidewall. The memory device further includes a second structure on a portion of the first electrode, where the second structure has a sidewall adjacent to the second sidewall of the first structure. The memory device further includes a first conductive interconnect above and coupled with each of the magnetic junction and the second structure and a second conductive interconnect below and coupled with the first electrode, where the second conductive interconnect is laterally distant from the magnetic junction and the second structure.Type: GrantFiled: March 27, 2019Date of Patent: February 28, 2023Assignee: Intel CorporationInventors: Noriyuki Sato, Angeline Smith, Tanay Gosavi, Sasikanth Manipatruni, Kaan Oguz, Kevin O'Brien, Benjamin Buford, Tofizur Rahman, Rohan Patil, Nafees Kabir, Michael Christenson, Ian Young, Hui Jae Yoo, Christopher Wiegand
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Patent number: 11569440Abstract: The invention disclosed a method to make an implanted hard mask with ultra-small dimensions for fabricating integrated nonvolatile random access memory. Instead of directly depositing hard mask material on top of the memory film stack element, we first make ultra-small VIA holes on a pattern transfer molding (PTM) layer using a reverse memory mask, then fill in the hard mask material into the VIA holes within the PTM material. Ultra-small hard mask pillars are formed after removing the PTM material. To improve the adhesion of the hard mask pillars with the underneath memory stack element, a hard mask sustaining element (HMSE) is added below PTM. Due to a better materials adhesion between HMSE and the hard mask, a stronger hard mask array can be formed.Type: GrantFiled: January 23, 2017Date of Patent: January 31, 2023Inventors: Yimin Guo, Rongfu Xiao, Jun Chen
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Patent number: 11563167Abstract: A magnetic memory device includes a bottom electrode, a magnetic tunneling junction disposed over the bottom electrode, and a top electrode disposed over the magnetic tunneling junction, wherein the top electrode includes a first top electrode layer and a second top electrode layer above the first top electrode layer, and wherein the second top electrode layer is thicker than the first top electrode layer.Type: GrantFiled: July 12, 2019Date of Patent: January 24, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Hao Liao, Hsi-Wen Tien, Chih-Wei Lu, Pin-Ren Dai, Chung-Ju Lee
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Patent number: 11545616Abstract: A magnetic memory device includes a conductive line extending in a first direction, a magnetic line extending in a second direction intersecting the first direction on the conductive line, the magnetic line intersecting the conductive line, and a magnetic pattern disposed between the conductive line and the magnetic line. The magnetic pattern has first sidewalls opposite to each other in the first direction, and second sidewalls opposite to each other in the second direction. The second sidewalls of the magnetic pattern are aligned with sidewalls of the conductive line, respectively.Type: GrantFiled: June 5, 2020Date of Patent: January 3, 2023Inventors: Ung Hwan Pi, Dongkyu Lee
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Patent number: 11545618Abstract: A spin element includes a wiring, a laminated body including a first ferromagnetic layer laminated on the wiring, a first conductive part and a second conductive part which sandwich the first ferromagnetic layer in a plan view in a laminating direction, and a first high resistance layer which is in contact with the wiring between the first conductive part and the wiring and has an electrical resistivity equal to or higher than that of the wiring.Type: GrantFiled: January 24, 2020Date of Patent: January 3, 2023Assignee: TDK CORPORATIONInventors: Tomoyuki Sasaki, Yohei Shiokawa
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Patent number: 11536784Abstract: A magnetic sensor comprising a resin layer having a first surface and a second surface, which is opposite to the first surface and a magnetoresistive effect unit that detects a magnetic field in a predetermined direction, wherein the magnetoresistive effect unit includes at least a first magnetoresistive effect unit that detects a magnetic field in a first direction, the first direction is a direction orthogonal to the first surface of the resin layer, an inclined surface that is inclined at a predetermined angle with respect to the first surface is formed in the first surface of the resin layer, and the first magnetoresistive effect unit is formed in the inclined surface.Type: GrantFiled: October 11, 2021Date of Patent: December 27, 2022Assignee: TDK CorporationInventors: Naoki Ohta, Hiroshi Yamazaki, Satoshi Miura, Kenkichi Anagawa, Yosuke Komasaki
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Patent number: 11501829Abstract: A resistive random-access memory (RRAM) system includes an RRAM cell. The RRAM cell includes a first select line and a second select line, a word line, a bit line, a first resistive memory device, a first switching device, a second resistive memory device, a second switching device, and a comparator. The first resistive memory device is coupled between a first access node and the bit line. The first switching device is coupled between the first select line and the first access node. The second resistive memory device is coupled between a second access node and the bit line. The second switching device is coupled between the second select line and the second access node. The comparator includes a first input coupled to the bit line, a second input, and an output.Type: GrantFiled: July 6, 2020Date of Patent: November 15, 2022Assignee: Arizona Board of Regents on behalf of Arizona State UniversityInventors: Jae-sun Seo, Shimeng Yu
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Patent number: 11502125Abstract: A magnetoresistive memory device according to one embodiment includes: first and second layer stacks, each of which includes: a first ferromagnetic layer having a magnetization directed in a first direction; a non-magnetic first conductive layer above the first ferromagnetic layer, a second ferromagnetic layer provided above the first conductive layer and having a magnetization directed in a second direction different from the first direction, a first insulating layer on an upper surface of the second ferromagnetic layer, and a third ferromagnetic layer above the first insulating layer. The second ferromagnetic layer of the second layer stack is thicker than the second ferromagnetic layer of the first layer stack.Type: GrantFiled: March 12, 2020Date of Patent: November 15, 2022Assignee: KIOXIA CORPORATIONInventors: Masaru Toko, Tadaomi Daibou, Junichi Ito, Taichi Igarashi, Tadashi Kai
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Patent number: 11492437Abstract: The present invention relates to a method of preparing an ASA graft copolymer, a method of preparing a thermoplastic resin composition including the ASA graft copolymer, and a method of manufacturing a molded article using the thermoplastic resin composition.Type: GrantFiled: January 12, 2018Date of Patent: November 8, 2022Assignee: LG CHEM, LTD.Inventors: Min Jung Kim, Yong Yeon Hwang, Hyun Taek Oh, Bong Keun Ahn, Chun Ho Park, Eun Soo Kang, Yong Hee An, Jang Won Park
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Patent number: 11488662Abstract: Concurrent access of multiple memory cells in a cross-point memory array is disclosed. In one aspect, a forced current approach is used in which, while a select voltage is applied to a selected bit line, an access current is driven separately through each selected word line to concurrently drive the access current separately through each selected memory cell. Hence, multiple memory cells are concurrently accessed. In some aspects, the memory cells are accessed using a self-referenced read (SRR), which improves read margin. Concurrently accessing more than one memory cell in a cross-point memory array improves bandwidth. Moreover, such concurrent accessing allows the memory system to be constructed with fewer, but larger cross-point arrays, which increases array efficiency. Moreover, concurrent access as disclosed herein is compatible with memory cells such as MRAM which require bipolar operation.Type: GrantFiled: November 16, 2020Date of Patent: November 1, 2022Assignee: SanDisk Technologies LLCInventors: Nathan Franklin, Ward Parkinson, Michael Grobis, James O'Toole
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Patent number: 11488863Abstract: A method for manufacturing a semiconductor device includes forming a plurality of memory elements on a first interconnect level, and forming an etch stop layer on the plurality of memory elements. A dielectric layer is formed on the etch stop layer, and a portion of the dielectric over the plurality of memory elements is removed to expose a portion of the etch stop layer. The method further includes removing the exposed portion of the etch stop layer. The removing of the portion of the dielectric layer and of the exposed portion of the etch stop layer forms a trench. A metallization layer is formed in the trench on the plurality of memory elements, wherein the metallization layer is part of a second interconnect level.Type: GrantFiled: July 15, 2019Date of Patent: November 1, 2022Assignee: International Business Machines CorporationInventors: Benjamin D. Briggs, Nicholas Anthony Lanzillo, Michael Rizzolo
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Patent number: 11489116Abstract: Thermal field controlled electrical conductivity change devices and applications therefore are provided. In some embodiments, a thermal switch, comprises: a metal-insulator-transition (MIT) material; first and second terminals electrically coupled to the MIT material; and a heater disposed near the MIT material.Type: GrantFiled: February 13, 2020Date of Patent: November 1, 2022Assignee: Hefei Reliance Memory LimitedInventors: Liang Zhao, Zhichao Lu
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Patent number: 11462682Abstract: A magnetic device may include a layer stack including a work function structure, a dielectric layer, and a ferromagnetic layer, where the ferromagnetic layer is positioned between the work function structure and the dielectric layer. The work function structure is configured to deplete electrons from the ferromagnetic layer or accumulate electrons in the ferromagnetic layer. A magnetization orientation of the ferromagnetic layer is configured to be switched by a voltage applied across the layer stack or by a voltage applied across or through the work function structure.Type: GrantFiled: February 19, 2021Date of Patent: October 4, 2022Assignee: Regents of the University of MinnesotaInventors: Jian-Ping Wang, Thomas Jon Peterson, Anthony William Hurben, Delin Zhang
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Patent number: 11448659Abstract: A movement sensor comprises a multi-pole ring magnet, a semiconductor substrate, a first magnetic sensor formed on the semiconductor substrate, and a second magnetic sensor formed on the semiconductor substrate. The first magnetic sensor is configured to produce a first output signal in response to movement of the multi-pole ring magnet, and a centroid of the first and second magnetic sensors are separate and radially aligned on the semiconductor substrate relative to the multi-pole ring magnet. The second magnetic sensor is arranged at a predetermined angle with respect to the first magnetic sensor and is configured to produce a second output signal in response to the movement of the multi-pole ring magnet. The predetermined angle is between 0° and 90° exclusive and is configured to produce a difference in phase between the first and second output signals in response to the movement of the multi-pole ring magnet.Type: GrantFiled: September 27, 2016Date of Patent: September 20, 2022Assignee: HONEYWELL INTERNATIONAL INC.Inventors: Anthony J Bussan, Jason Chilcote, Joel Stolfus, Junheng Zhang
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Patent number: 11444241Abstract: A method for etching a magnetic tunneling junction (MTJ) structure is described. A MTJ stack is deposited on a bottom electrode wherein the MTJ stack comprises at least a pinned layer, a barrier layer on the pinned layer, and a free layer on the barrier layer, A top electrode layer is deposited on the MTJ stack. A hard mask is deposited on the top electrode layer. The top electrode layer and hard mask are etched. Thereafter, the MTJ stack not covered by the hard mask is etched, stopping at or within the pinned layer. Thereafter, an encapsulation layer is deposited over the partially etched MTJ stack and etched away on horizontal surfaces leaving a self-aligned hard mask on sidewalls of the partially etched MTJ stack. Finally, the remaining MTJ stack not covered by hard mask and self-aligned hard mask is etched to complete the MTJ structure.Type: GrantFiled: December 14, 2020Date of Patent: September 13, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi Yang, Dongna Shen, Vignesh Sundar, Yu-Jen Wang
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Patent number: 11437391Abstract: A method of forming a microelectronic device comprises forming a stack structure. Pillar structures are formed to vertically extend through the stack structure. At least one trench and additional trenches are formed to substantially vertically extend through the stack structure. Each of the additional trenches comprises a first portion having a first width, and a second portion at a horizontal boundary of the first portion and having a second width greater than the first width. A dielectric structure is formed within the at least one trench and the additional trenches. The dielectric structure comprises at least one angled portion proximate the horizontal boundary of the first portion of at least some of the additional trenches. The at least one angled portion extends at an acute angle to each of a first direction and a second direction transverse to the first direction. Microelectronic devices and electronic systems are also described.Type: GrantFiled: July 6, 2020Date of Patent: September 6, 2022Assignee: Micron Technology, Inc.Inventors: Raja Kumar Varma Manthena, Anilkumar Chandolu
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Patent number: 11417378Abstract: An integrated circuit device of the invention, includes: a first resistance variable memory element provided on a semiconductor substrate; a second resistance variable memory element provided on the semiconductor substrate; and a semiconductor circuit for controlling write and read of the first resistance variable memory element and the second resistance variable memory element, which is provided on the semiconductor substrate, in which the second resistance variable memory element has a write current that is smaller than a write current of the first resistance variable memory element, and the second resistance variable memory element is disposed farther from the semiconductor substrate than the first resistance variable memory element.Type: GrantFiled: March 12, 2019Date of Patent: August 16, 2022Assignee: TOHOKU UNIVERSITYInventors: Tetsuo Endoh, Shoji Ikeda, Hiroki Koike
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Patent number: 11380844Abstract: A semiconductor device including at least one variable resistance device is provided. A variable resistance element includes: an ion supply layer having a top, a bottom and a sidewall connecting the top to the bottom; an ion-receiving layer having an inner sidewall connected to at least a portion of the sidewall of the ion supply layer; a gate pattern connected to an outer sidewall of the ion-receiving layer; and a source pattern connected to one of the top or bottom of the ion supply layer, and a drain pattern connected to the other one or the top or bottom of the ion supply layer. A resistance of the ion supply layer is varies depending on an amount of ions supplied from the ion supply layer to the ion-receiving layer in response to a voltage applied to the gate pattern.Type: GrantFiled: June 3, 2021Date of Patent: July 5, 2022Assignee: SK hynix Inc.Inventor: Jae-Hyun Han
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Patent number: 11366141Abstract: A current sensor includes a lead frame having a plurality of leads, at least two of which form a current conductor configured to carry a current that generates a magnetic field and a substrate having first and second opposing surfaces, the first surface proximate to said current conductor and the second surface distal from the current conductor. A first magnetic field transducer is disposed on the substrate and a first coil is disposed on the substrate adjacent to the first magnetic field transducer, wherein the first magnetic field transducer and the first coil are positioned on a first side of the current conductor. A second magnetic field transducer is disposed on the substrate and a second coil is disposed on the substrate adjacent to the second magnetic field transducer, wherein the second magnetic field transducer and the second coil are positioned on a second side of the current conductor.Type: GrantFiled: January 28, 2021Date of Patent: June 21, 2022Assignee: Allegro MicroSystems, LLCInventors: Steven Daubert, Sina Haji Alizad, Srujan Shivanakere, Maxwell McNally, Alexander Latham
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Patent number: 11177010Abstract: The present disclosure provides bit cells with data redundancy according to various aspects. In certain aspects, a bit cell includes a first memory element coupled to a write bit line, and a first write-access switch coupled between the first memory element and a ground. The bit cell also includes a second memory element coupled to the write bit line, and a second write-access switch coupled between the second memory element and the ground. The bit cell further includes a read-access switch coupled between the first memory element and a read bit line, wherein a control input of the read-access switch is coupled to a read-select line.Type: GrantFiled: July 13, 2020Date of Patent: November 16, 2021Assignee: QUALCOMM INCORPORATEDInventors: Hochul Lee, Anil Chowdary Kota, Anne Srikanth
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Patent number: 11170805Abstract: A method of producing a multilayer magnetoelectronic device and a related device. The method includes depositing a multilayer structure including at least two ferromagnetic layers disposed one on top of the other and each having a magnetic anisotropy with a corresponding magnetic moment. A magnetization curve is specified for the magnetoelectronic device. The number of ferromagnetic layers and, for each of the ferromagnetic layers, the magnetic moment and the magnetic hardness for obtaining the specified magnetization curve are determined. For each of the ferromagnetic layers a magnetic material, a thickness, an azimuthal angle and an angle of incidence are determined for obtaining the determined magnetic moment and magnetic hardness of the respective ferromagnetic layer. The multilayer structure is deposited using the determined material, thickness, azimuthal angle and angle of incidence for each of the ferromagnetic layers.Type: GrantFiled: February 13, 2018Date of Patent: November 9, 2021Assignee: Deutsches Elektronen-Synchrotron DESYInventors: Kai Schlage, Denise Erb, Ralf Röhlsberger, Hans-Christian Wille, Daniel Schumacher, Lars Bocklage
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Patent number: 11101429Abstract: A method of forming integrated circuits includes forming Magnetic Tunnel Junction (MTJ) stack layers, depositing a conductive etch stop layer over the MTJ stack layers, depositing a conductive hard mask over the conductive etch stop layer, and patterning the conductive hard mask to form etching masks. The patterning is stopped by the conductive etch stop layer. The method further includes etching the conducive etch stop layer using the etching masks to define patterns, and etching the MTJ stack layers to form MTJ stacks.Type: GrantFiled: April 1, 2019Date of Patent: August 24, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tai-Yen Peng, Sin-Yi Yang, Chen-Jung Wang, Yu-Shu Chen, Chien Chung Huang, Han-Ting Lin, Jyu-Horng Shieh, Chih-Yuan Ting
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Patent number: 11056641Abstract: A spin-orbit-torque magnetization rotational element includes: a first ferromagnetic layer; and a spin-orbit torque wiring in which a first surface faces the first ferromagnetic layer and a long axis extends in a first direction when viewed in plan view from a lamination direction of the first ferromagnetic layer, wherein the first surface spreads along a reference plane orthogonal to the lamination direction of the first ferromagnetic layer, the spin-orbit torque wiring contains a first virtual cross-section which passes through a first end of the first ferromagnetic layer in the first direction and is orthogonal to the first direction and a second virtual cross-section which passes through a second end of the first ferromagnetic layer in the first direction and is orthogonal to the first direction, and an area of the first virtual cross-section is different from an area of the second virtual cross-section.Type: GrantFiled: September 23, 2019Date of Patent: July 6, 2021Assignee: TDK CORPORATIONInventors: Atsushi Tsumita, Yohei Shiokawa, Tomoyuki Sasaki
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Patent number: 11031549Abstract: A method of manufacturing an MRAM device, the method including forming a first magnetic layer on a substrate; forming a first tunnel barrier layer on the first magnetic layer such that the first tunnel barrier layer includes a first metal oxide, the first metal oxide being formed by oxidizing a first metal layer at a first temperature; forming a second tunnel barrier layer on the first tunnel barrier layer such that the second tunnel barrier layer includes a second metal oxide, the second metal oxide being formed by oxidizing a second metal layer at a second temperature that is greater than the first temperature; and forming a second magnetic layer on the second tunnel barrier layer.Type: GrantFiled: September 2, 2020Date of Patent: June 8, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Whan-Kyun Kim, Deok-Hyeon Kang, Woo-Jin Kim, Woo-Chang Lim, Jun-Ho Jeong
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Patent number: 10879860Abstract: A magnetic operational amplifier having a differential stage includes a first magnetic field effect transistor MAGFET and a differential signal conditioner, the differential signal conditioner including a load stage, a differential input pair connected to the load stage and a biasing current source connected to the differential input pair; the magnetic field effect transistor MAGFET being connected to the load stage as a second differential input pair and the differential signal conditioner including a second biasing current source connected to the magnetic field effect transistor MAGFET.Type: GrantFiled: April 28, 2017Date of Patent: December 29, 2020Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS), UNIVERSITE DE STRASBOURGInventors: Vincent Frick, Laurent Osberger
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Patent number: 10804896Abstract: The invention relates to a proximity magnetic induction switch control chip and a control method thereof. A proximity magnetic induction switch control chip includes a voltage regulator module, a control module, an output type detection module, a first controllable switch and a second controllable switch. An output type detection module detects proximity magnets. An output type detection module detects a load connected between a voltage input and a signal output of a proximity magnetic induction switch control chip or a load connected between a signal output and a ground terminal. The detection result is transmitted to the control module. The control module controls the first controllable switch or the second controllable switch to actuate the load according to the detection result.Type: GrantFiled: March 6, 2017Date of Patent: October 13, 2020Assignee: SHENZHEN MOJAY SEMICONDUCTOR LIMITEDInventor: Jian Wang
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Patent number: 10756138Abstract: A method of forming a device that includes encapsulating a magnetic resistive access memory (MRAM) stack with a first patternable low-k dielectric material that is patterned by an exposure to produce a via pattern that extends to circuitry to logic devices. The via pattern is developed forming a via opening. The method further includes forming a second patternable low-k dielectric material over first patternable low-k dielectric material and filling the via opening. The second patternable low-k dielectric material is patterned by a light exposure to produce a first line pattern to the MRAM stack and a second line pattern to the via opening. The first line pattern and the second line pattern are developed to form trench openings. Thereafter, electrically conductive material is formed in the trench openings and the via opening.Type: GrantFiled: November 1, 2019Date of Patent: August 25, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventor: Qinghuang Lin
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Patent number: 10746814Abstract: Apparatus and methods provide an output signal indicative of a failure of a filter circuit and/or a Schmitt trigger circuit of a magnetic field sensor. A magnetic field sensor includes one or more magnetic field sensing elements that generate a magnetic field signal, a filter circuit that filters the magnetic field signal, a Schmitt trigger circuit that compares the filtered signal to a Schmitt trigger threshold during a first time period, and a diagnostic circuit coupled to the filter circuit that compares the Schmitt trigger threshold to a diagnostic threshold during a second time period that does not overlap with the first time period. An output signal indicative of a failure is output when the diagnostic threshold is greater than a predetermined percentage or absolute value above or below the Schmitt trigger threshold.Type: GrantFiled: June 21, 2018Date of Patent: August 18, 2020Assignee: Allegro MicroSystems, LLCInventors: Ezequiel Rubinsztain, Pablo Javier Bolsinger
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Patent number: 10665636Abstract: A method of forming a device that includes encapsulating a magnetic resistive access memory (MRAM) stack with a first patternable low-k dielectric material that is patterned by an exposure to produce a via pattern that extends to circuitry to logic devices. The via pattern is developed forming a via opening. The method further includes forming a second patternable low-k dielectric material over first patternable low-k dielectric material and filling the via opening. The second patternable low-k dielectric material is patterned by a light exposure to produce a first line pattern to the MRAM stack and a second line pattern to the via opening. The first line pattern and the second line pattern are developed to form trench openings. Thereafter, electrically conductive material is formed in the trench openings and the via opening.Type: GrantFiled: November 1, 2019Date of Patent: May 26, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventor: Qinghuang Lin
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Patent number: 10593869Abstract: The present disclosure is directed towards a method for patterning a magnetic sensing layer. The method includes disposing a protective layer on a first of a substrate, disposing a first insulating layer on a first surface of protective layer. An opening is formed in the first insulating layer to expose the first surface of the protective layer. A magnetic sensing layer is disposed over the first insulating layer and a predetermined portion of the first surface of the protective layer within the opening. A second insulating layer can be disposed over the magnetic sensing layer. The second insulation layer and the magnetic sensing layer can be removed from the first insulation layer. Thus, the opening includes the magnetic sensing layer and the second insulation layer after the removal of the second insulation layer and magnetic sensing layer from the first insulation layer.Type: GrantFiled: July 26, 2016Date of Patent: March 17, 2020Assignee: Allegro MicroSystems, LLCInventors: Harianto Wong, William P. Taylor
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Patent number: 10573687Abstract: A method of forming a device that includes encapsulating a magnetic resistive access memory (MRAM) stack with a first patternable low-k dielectric material that is patterned by a exposure to produce a via pattern that extends to circuitry to logic devices. The via pattern is developed forming a via opening. The method further includes forming a second patternable low-k dielectric material over first patternable low-k dielectric material and filling the via opening. The second patternable low-k dielectric material is patterned by a light exposure to produce a first line pattern to the MRAM stack and a second line pattern to the via opening. The first line pattern and the second line pattern are developed to form trench openings. Thereafter, electrically conductive material is formed in the trench openings and the via opening.Type: GrantFiled: October 31, 2017Date of Patent: February 25, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventor: Qinghuang Lin
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Patent number: 10562658Abstract: According to an embodiment, a magnetic shield tray includes a main body with a plate form including a magnetic material, and mount portions as holes disposed in the main body. The magnetic material is exposed on an inner surface of the holes.Type: GrantFiled: December 1, 2017Date of Patent: February 18, 2020Assignee: TOSHIBA MEMORY CORPORATIONInventor: Takeshi Fujimori
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Patent number: 10559746Abstract: The methods of manufacturing an MRAM device and MRAM devices are provided. The methods may include forming a first electrode on an upper surface of a substrate, forming a first magnetic layer on the first electrode, forming a tunnel barrier structure on the first magnetic layer, forming a second magnetic layer on the tunnel barrier structure, and forming a second electrode on the second magnetic layer. The tunnel barrier structure may include a first tunnel barrier layer and a second tunnel barrier layer that are sequentially stacked on the first magnetic layer and may have different resistivity distributions from each other along a horizontal direction that may be parallel to the upper surface of the substrate.Type: GrantFiled: August 22, 2018Date of Patent: February 11, 2020Assignee: Samsung Electronics Co., Ltd.Inventors: Yong-Sung Park, Woo-Jin Kim, Jeong-Heon Park, Se-Chung Oh, Joon-Myoung Lee, Hyun Cho
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Patent number: 10541269Abstract: A semiconductor device includes a magnetic random access memory (MRAM) cell. The MRAM cell includes a first magnetic layer disposed over a substrate, a first non-magnetic material layer made of a non-magnetic material and disposed over the first magnetic layer, a second magnetic layer disposed over the first non-magnetic material layer, and a second non-magnetic material layer disposed over the second magnetic layer. The second magnetic layer includes a plurality of magnetic material pieces separated from each other.Type: GrantFiled: June 26, 2018Date of Patent: January 21, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ji-Feng Ying, Duen-Huei Hou
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Patent number: 10510391Abstract: Embodiments of the invention are directed to a magnetic tunnel junction (MTJ) storage element that includes a reference layer, a tunnel barrier and a free layer on an opposite side of the tunnel barrier layer from the reference layer. The reference layer has a fixed magnetization direction. The free layer includes a first region, a second region and a third region. The third region is formed from a third material that is configured to magnetically couple the first region and the second region. The first region is formed from a first material having a first predetermined magnetic moment, and the second region is formed from a second material having a second predetermined magnetic moment. The first predetermined magnetic moment is lower that the second predetermined magnetic moment.Type: GrantFiled: November 3, 2017Date of Patent: December 17, 2019Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, SAMSUNG ELECTRONICS CO., LTD.Inventors: Guohan Hu, Jeong-Heon Park, Daniel C. Worledge
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Patent number: 10510390Abstract: Embodiments of the invention are directed to a magnetic tunnel junction (MTJ) storage element that includes a reference layer, a tunnel barrier and a free layer on an opposite side of the tunnel barrier layer from the reference layer. The reference layer has a fixed magnetization direction. The free layer includes a first region, a second region and a third region. The third region is formed from a third material that is configured to magnetically couple the first region and the second region. The first region is formed from a first material having a first predetermined magnetic moment, and the second region is formed from a second material having a second predetermined magnetic moment. The first predetermined magnetic moment is lower that the second predetermined magnetic moment.Type: GrantFiled: June 7, 2017Date of Patent: December 17, 2019Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, SAMSUNG ELECTRONICS CO., LTD.Inventors: Guohan Hu, Jeong-Heon Park, Daniel C. Worledge
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Patent number: 10482955Abstract: A storage array and a storage chip and method for storing a logic relationship between objects. The storage array comprises first leading-out wires and second leading-out wires, and a storage unit is connected between each first leading-out wire and each second leading-out wire having different serial numbers. A controllable switch is connected between each first leading-out wire and each second leading-out wire having a same serial number. The storage chip comprises an interface module. A control module is used for producing a control signal. A driving module is used for producing write current, erase current or read current. A first decoder and a second decoder are used for gating the first leading-out wires and the second leading-out wires. A storage array is used for storing a logic relationship value. The storage method comprises write and read operations.Type: GrantFiled: December 24, 2015Date of Patent: November 19, 2019Assignee: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCInventors: Sannian Song, Xiaogang Chen, Zhitang Song, Tianqi Guo
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Patent number: 10453509Abstract: Embodiments of the invention are directed to a magnetic tunnel junction (MTJ) storage element that includes a reference layer, a tunnel barrier and a free layer on an opposite side of the tunnel barrier layer from the reference layer. The reference layer has a fixed magnetization direction. The free layer includes a first region, a second region and a third region. The third region is formed from a third material that is configured to magnetically couple the first region and the second region. The first region is formed from a first material having a first predetermined magnetic moment, and the second region is formed from a second material having a second predetermined magnetic moment. The first predetermined magnetic moment is lower that the second predetermined magnetic moment.Type: GrantFiled: November 3, 2017Date of Patent: October 22, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Guohan Hu, Daniel C. Worledge
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Patent number: 10439130Abstract: A spin-orbit torque type magnetoresistance effect element including a magnetoresistance effect element having a first ferromagnetic metal layer with a fixed magnetization direction, a second ferromagnetic metal layer with a varying magnetization direction, and a non-magnetic layer sandwiched between the first ferromagnetic metal layer and the second ferromagnetic metal layer; and spin-orbit torque wiring that extends in a first direction intersecting with a stacking direction of the magnetoresistance effect element and that is joined to the second ferromagnetic metal layer; wherein the magnetization of the second ferromagnetic metal layer is oriented in the stacking direction of the magnetoresistance effect element; and the second ferromagnetic metal layer has shape anisotropy, such that a length along the first direction is greater than a length along a second direction orthogonal to the first direction and to the stacking direction.Type: GrantFiled: September 12, 2017Date of Patent: October 8, 2019Assignee: TDK CORPORATIONInventors: Tomoyuki Sasaki, Yohei Shiokawa
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Patent number: 10388346Abstract: An object of the present technology is to improve the performance of a memory cell that stores the value reflecting the direction of an electric current. The memory cell includes an N-type transistor, a P-type transistor, and a storage element. The N-type transistor supplies a current either from a source to a drain thereof or from the drain to the source. The P-type transistor supplies a current from a source to a drain thereof. The storage element stores a logical value reflecting the direction of the current supplied from the drain of the N-type transistor and from the drain of the P-type transistor.Type: GrantFiled: January 14, 2016Date of Patent: August 20, 2019Assignee: SONY CORPORATIONInventors: Mikio Oka, Yasuo Kanda, Yutaka Higo
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Patent number: 10360283Abstract: A method, computer program product, and circuit are provided for noise and bound management for a Resistive Processing Unit (RPU) array having an op-amp. The method includes reducing the noise in an output signal from the RPU array by using a largest value, in a sigma vector having a plurality of values, as a representation for a window for an input signal to the RPU array. The input signal to the RPU array is formed from the plurality of values. The method further includes sensing saturation at an output of the op-amp. The method also includes managing the bound to eliminate the saturation by reducing the plurality of values from which the input signal to the RPU is formed.Type: GrantFiled: December 12, 2017Date of Patent: July 23, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Tayfun Gokmen, Oguzhan Murat Onen
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Patent number: 10353020Abstract: A method of manufacturing a magnetic-field sensor includes forming an insulating layer on a first surface of a substrate. First and second magnetoresistors are formed at different above the first surface of the substrate and are spaced apart from the first surface by different distances. The first and second magnetoresistors have respective main axes of magnetization transverse to one another, and respective secondary axes of magnetization transverse to one another. The method further includes forming a first magnetic-field generator configured to generate a first magnetic field having field lines along the main axis of magnetization of the first magnetoresistor, and forming a second magnetic-field generator configured to generate a second magnetic field having field lines along the main axis of magnetization of the second magnetoresistor.Type: GrantFiled: February 2, 2016Date of Patent: July 16, 2019Assignee: STMicroelectronics S.r.l.Inventors: Dario Paci, Sarah Zerbini, Benedetto Vigna
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Patent number: 10354725Abstract: A method for rewriting a semiconductor storage device includes: a first rewriting step of applying a pre-charge voltage to both of a plurality of bit lines and a plurality of source lines; a second rewriting step of applying a rewrite voltage to one of a selected bit line or a selected source line; a third rewriting step of applying a rewrite voltage to both of the selected bit line and the selected source line; a fourth rewriting step of applying a pre-charge voltage to one of the selected bit line or the selected source line; and a fifth rewriting step of applying a pre-charge voltage to both of the selected bit line and the selected source line.Type: GrantFiled: August 28, 2017Date of Patent: July 16, 2019Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventor: Hiroyasu Nagai
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Patent number: 10332576Abstract: Embodiments of the invention are directed to a magnetic tunnel junction (MTJ) storage element that includes a reference layer, a tunnel barrier and a free layer on an opposite side of the tunnel barrier layer from the reference layer. The reference layer has a fixed magnetization direction. The free layer includes a first region, a second region and a third region. The third region is formed from a third material that is configured to magnetically couple the first region and the second region. The first region is formed from a first material having a first predetermined magnetic moment, and the second region is formed from a second material having a second predetermined magnetic moment. The first predetermined magnetic moment is lower that the second predetermined magnetic moment.Type: GrantFiled: June 7, 2017Date of Patent: June 25, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Guohan Hu, Daniel C. Worledge
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Patent number: 10325007Abstract: A method, computer program product, and circuit are provided for noise and bound management for a Resistive Processing Unit (RN) array having an op-amp. The method includes reducing the noise in an output signal from the RPU array by using a largest value, in a sigma vector having a plurality of values, as a representation for a window for an input signal to the RPU array. The input signal to the RPU array is formed from the plurality of values. The method further includes sensing saturation at an output of the op-amp. The method also includes managing the bound to eliminate the saturation by reducing the plurality of values from which the input sign to the RPU is formed.Type: GrantFiled: April 5, 2017Date of Patent: June 18, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Tayfun Gokmen, Oguzhan Murat Onen
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Patent number: 10263179Abstract: A method includes performing an ion beam etching process on a tunnel magnetoresistance (TMR) stack to remove material portions of a first magnetic layer and a tunnel barrier layer of the TMR stack. The ion beam etching process stops at a top surface of a second magnetic layer of the TMR stack. A protective layer is deposited over the TMR stack. Another etch process is performed to remove the protective layer such that a portion of the second magnetic layer is exposed from the protective layer and a spacer is formed from a remaining portion of the protective layer. The spacer surrounds sidewalls of the first magnetic layer and the tunnel barrier layer. The portion of the second magnetic layer exposed from the protective layer is removed so that a TMR sensor element remains, where the TMR sensor element includes a bottom magnet, a top magnet, and a tunnel junction.Type: GrantFiled: July 18, 2017Date of Patent: April 16, 2019Assignee: NXP B.V.Inventors: Mark Isler, Klaus Reimann, Hartmut Matz, Jörg Kock
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Patent number: 10177306Abstract: An integrated magnetoresistive device includes a substrate of semiconductor material that is covered, on a first surface, by an insulating layer. A magnetoresistor of ferromagnetic material extends within the insulating layer and defines a sensitivity plane of the sensor. A concentrator of ferromagnetic material includes at least one arm that extends in a transversal direction to the sensitivity plane and is vertically offset from the magnetoresistor. The concentrator concentrates deflects magnetic flux lines perpendicular to the sensitivity plane so as to generate magnetic-field components directed in a parallel direction to the sensitivity plane.Type: GrantFiled: November 11, 2015Date of Patent: January 8, 2019Assignee: STMicroelectronics S.r.l.Inventors: Dario Paci, Marco Morelli, Caterina Riva