Bipolar Electrically Programmable Memory Structure (epo) Patents (Class 257/E27.078)
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Patent number: 8912576Abstract: A bipolar junction transistor built with a mesh structure of cells provided on a semiconductor body is disclosed. The mesh structure has at least one emitter cell with a first type of implant. At least one emitter cell has at least one side coupled to at least one cell with a first type of implant to serve as collector of the bipolar. The spaces between the emitter and collector cells are the intrinsic base of a bipolar device. At least one emitter cell has at least one vortex coupled to at least one cell with a second type of implant to serve as the extrinsic base of the bipolar. The emitter, collector, or base cells can be arbitrary polygons as long as the overall geometry construction can be very compact and expandable. The implant regions between cells can be separated with a space. A silicide block layer can cover the space and overlap into at least a portion of both implant regions.Type: GrantFiled: March 15, 2013Date of Patent: December 16, 2014Inventor: Shine C. Chung
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Patent number: 8809179Abstract: A method for forming a semiconductor structure includes providing a substrate; forming a gate stack of a flash memory cell, wherein a top portion of the gate stack comprises a capping layer; forming a gate having at least a portion over the capping layer; and reducing a thickness of the portion of the gate over the capping layer. The topography height difference between the flash memory cell and MOS devices on the same chip is reduced.Type: GrantFiled: March 9, 2007Date of Patent: August 19, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih Wei Wang, Derek Lin, Chen-Ming Huang, Chang-Jen Hsieh, Chi-Hsin Lo, Chung-Yi Yu, Feng-Jia Shiu, Yeur-Luen Tu, Yi-Shin Chu, Jen-Sheng Yang
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Patent number: 8722469Abstract: A memory cell and a process for manufacturing the same are provided. In the process, a first electrode layer is formed on a conductive layer over a substrate, and then a transition metal layer is formed on the first electrode layer. After that, the transition metal layer is subjected to a plasma oxidation step to form a transition metal oxide layer as a precursor of a data storage layer, and a second electrode layer is formed on the transition metal oxide layer. A memory cell is formed after the second electrode layer, the transition metal oxide layer and the first electrode layer are patterned into a second electrode, a data storage layer and a first electrode, respectively.Type: GrantFiled: October 4, 2007Date of Patent: May 13, 2014Assignee: MACRONIX International Co., Ltd.Inventors: Ming-Daou Lee, Chia-Hua Ho, Erh-Kun Lai, Kuang-Yeu Hsieh
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Patent number: 8685799Abstract: An RRAM at an STI region is disclosed with a vertical BJT selector. Embodiments include defining an STI region in a substrate, implanting dopants in the substrate to form a well of a first polarity around and below an STI region bottom portion, a band of a second polarity over the well on opposite sides of the STI region, and an active area of the first polarity over each band of second polarity at the surface of the substrate, forming a hardmask on the active areas, removing an STI region top portion to form a cavity, forming an RRAM liner on cavity side and bottom surfaces, forming a top electrode in the cavity, removing a portion of the hardmask to form spacers on opposite sides of the cavity, and implanting a dopant of the second polarity in a portion of each active area remote from the cavity.Type: GrantFiled: September 12, 2012Date of Patent: April 1, 2014Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Shyue Seng Tan, Eng Huat Toh, Elgin Quek
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Patent number: 8674434Abstract: Impact ionization devices including vertical and recessed impact ionization metal oxide semiconductor field effect transistor (MOSFET) devices and methods of forming such devices are disclosed. The devices require lower threshold voltage than conventional MOSET devices while maintaining a footprint equal to or less than conventional MOSFET devices.Type: GrantFiled: March 24, 2008Date of Patent: March 18, 2014Assignee: Micron Technology, Inc.Inventor: Venkatesan Ananthan
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Patent number: 8569822Abstract: A memory structure having a memory cell including a first dielectric layer, a gate, a semiconductor layer, a first doped region, a second doped region and a charge storage layer is provided. The first dielectric layer is on the substrate. The gate includes a base portion on the first dielectric layer and a protruding portion disposed on the base portion and partially exposing the base portion. The semiconductor layer is conformally disposed on the gate, and includes a top portion over the protruding portion, a bottom portion over the base portion exposed by the protruding portion and a side portion located at a sidewall of the protruding portion and connecting the top and bottom portions. The first and second doped regions are respectively in the top and bottom portions. The side portion serves as a channel region. The charge storage layer is between the gate and the semiconductor layer.Type: GrantFiled: November 2, 2011Date of Patent: October 29, 2013Assignee: MACRONIX International Co., Ltd.Inventors: Jyun-Siang Huang, Wen-Jer Tsai, Shih-Guei Yan
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Patent number: 8502299Abstract: In a method of making a semiconductor device, a gate dielectric is formed over the semiconductor body. A floating gate is formed over the gate dielectric, an insulating region over the floating gate, and a control gate over the insulating region. The gate dielectric, floating gate, insulating region, and control gate constitute a gate stack. A stress is caused in the gate stack, whereby the band gap of the gate dielectric is changed by the stress.Type: GrantFiled: February 1, 2012Date of Patent: August 6, 2013Assignee: Infineon Technologies AGInventors: Jiang Yan, Danny Pak-Chum Shum
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Patent number: 8378341Abstract: A semiconductor device of the present invention has a first interconnect layer formed over the semiconductor substrate, and a semiconductor element; the first interconnect layer has an insulating layer, and a first interconnect filled in a surficial portion of the insulating layer; the semiconductor element has a semiconductor layer, a gate insulating film, and a gate electrode; the semiconductor layer is positioned over the first interconnect layer; the gate insulating film is positioned over or below semiconductor layer; and the gate electrode is positioned on the opposite side of the semiconductor layer while placing the gate insulating film in between.Type: GrantFiled: December 14, 2009Date of Patent: February 19, 2013Assignee: Renesas Electronics CorporationInventors: Yoshihiro Hayashi, Naoya Inoue, Kishou Kaneko
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Patent number: 8354704Abstract: A method of processing a flash memory device provides a semiconductor substrate including a surface region and forming a gate dielectric layer overlying the surface region. The method forms a floating gate layer having a thickness and including a first floating gate structure overlying a first portion of the gate dielectric layer and a second floating gate structure overlying a second portion of the gate dielectric layer. The method forms a trench region interposed between the first and second floating gate structures and extending through the entire thickness and through a portion of the surface region into a depth of the substrate. The method fills the entire depth of the trench region in the substrate and a portion of the trench region over the substrate using a dielectric fill material. The method forms an oxide on nitride on oxide (ONO) layer overlying the first and second floating gate structures and the dielectric material and a control gate overlying the ONO layer.Type: GrantFiled: November 1, 2010Date of Patent: January 15, 2013Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventors: Li Jiang, Hong Xiu Peng, Jong Woo Kim
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Patent number: 8338879Abstract: A transistor construction includes a first floating gate having a first conductive or semiconductive surface and a second floating gate having a second conductive or semiconductive surface. A dielectric region is circumferentially surrounded by the first surface. The region is configured to reduce capacitive coupling between the first and second surfaces. Another transistor construction includes a floating gate having a cavity extending completely through the floating gate from a first surface of the floating gate to an opposing second surface of the floating gate. The floating gate otherwise encloses the cavity, which is filled with at least one dielectric. A method includes closing an upper portion of an opening in insulator material with a gate material during the deposition before filling a lower portion with the gate material. The depositing and closing provide an enclosed cavity within the lower portion of the opening.Type: GrantFiled: July 7, 2011Date of Patent: December 25, 2012Assignee: Micron Technology, Inc.Inventor: Seiichi Aritome
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Patent number: 8334558Abstract: A new structure is disclosed for source/drain bit lines in arrays of MOSFET devices. Rows of conducting regions are formed by ion implantation through openings adjacent to gate structures and in isolation regions separating columns of active areas of the arrays. The openings are filled with insulating material.Type: GrantFiled: April 22, 2003Date of Patent: December 18, 2012Assignee: Taiwan Semiconductor Manufacturing CompanyInventor: Chia-Ta Hsieh
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Patent number: 8278698Abstract: A nonvolatile memory device includes a device isolation pattern, a charge trap layer, and a plurality of word lines. The device isolation pattern defines an active region in a semiconductor substrate and extends in a first direction. The charge trap layer covers the active region and the device isolation pattern. The word lines on the charge trap layer cross the active region and extend in a second direction. The charge trap layer disposed in a first region where the word line and the active region cross each other has a different nitrogen content ratio from the charge trap layer disposed in a second region surrounding the first region.Type: GrantFiled: February 9, 2010Date of Patent: October 2, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Toshiro Nakanishi, Chanjin Park, Siyoung Choi, Bonyoung Koo
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Patent number: 8183613Abstract: A memory device includes an insulation layer, an active pattern, a gate insulation layer and a gate electrode. The insulation layer is formed on a substrate. The active pattern is formed on the insulation layer, and includes two protrusions and a recess between the protrusions. The active pattern includes a first impurity region and a second impurity region at upper portions of the protrusions distal from the substrate, respectively, and a base region at the other portions serving as a floating body for storing data. The gate insulation layer is formed on a surface of the active pattern. The gate electrode is formed on the gate insulation layer, and surrounds a lower portion of the active pattern and partially fills the recess.Type: GrantFiled: January 6, 2010Date of Patent: May 22, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Hoon Jeong, Yong-Chul Oh, Sung-In Hong, Sung-Hwan Kim, Yong-Lack Choi, Ho-Ju Song
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Patent number: 8183552Abstract: A semiconductor memory device having a first wiring layer which is provided on a first insulator, and which extends in a first direction, and a non-volatile memory cell which is provided in a pillar shape on the first wiring layer, and which includes a non-ohmic element and variable resistance element connected in series. The resistance value of the variable resistance element changes in accordance with a voltage or current applied thereto. A barrier layer is provided on the memory cell and is configured in an in-plane direction. A conductive layer is provided on the barrier layer and is configured in an in-plane direction. A second insulator is provided on the first insulator and covers side surfaces of the memory cell, the barrier layer, and the conductive layer. A second wiring layer is provided on the conductive layer and extends in a second direction.Type: GrantFiled: August 13, 2009Date of Patent: May 22, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Shingo Nakajima, Eiji Ito, Mitsuhiro Noguchi
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Patent number: 8154090Abstract: The invention relates to a nonvolatile semiconductor memory cell and to an associated fabrication method, a source region (7), a drain region (8) and a channel region lying in between being formed in a substrate (1). In order to realize locally delimited memory locations (LB, RB), an electrically non-conductive charge storage layer (3) situated on a first insulation layer (2) is divided by an interruption (U), thereby preventing, in particular, a lateral charge transport between the memory locations (LB, RB) and significantly improving the charge retention properties.Type: GrantFiled: March 24, 2008Date of Patent: April 10, 2012Assignee: Infineon Technologies AGInventors: Franz Schuler, Georg Tempel
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Patent number: 8143150Abstract: A method of fabricating a semiconductor device includes forming a well impurity region, a lower impurity region and an upper impurity region in a semiconductor substrate. The lower impurity region has a different conductivity type than a conductivity type of the well impurity region, the upper impurity region has a different conductivity type than the conductivity type of the lower impurity region, and the upper impurity region has a same conductivity type as the conductivity type of the well impurity region and has a higher impurity concentration than an impurity concentration of the well impurity region. The semiconductor substrate is etched to form lower semiconductor patterns, upper semiconductor patterns upwardly projecting from predetermined regions of the lower semiconductor patterns. An isolation layer filling the first and second spaces between the lower semiconductor patterns and between the upper semiconductor patterns, respectively is formed.Type: GrantFiled: January 17, 2011Date of Patent: March 27, 2012Assignee: Samsung Electronics Co., Ltd.Inventor: Hoon Jeong
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Patent number: 8129243Abstract: Methods of forming non-volatile memory cell structures are described that facilitate the use of band-gap engineered gate stacks with asymmetric tunnel barriers in reverse and normal mode floating node memory cells that allow for direct tunnel programming and erase, while maintaining high charge blocking barriers and deep carrier trapping sites for good charge retention. The low voltage direct tunneling program and erase capability reduces damage to the gate stack and the crystal lattice from high energy carriers, reducing write fatigue and enhancing device lifespan. The low voltage direct tunnel program and erase capability also enables size reduction through low voltage design and further device feature scaling. Such memory cells also allow multiple bit storage. These characteristics allow such memory cells to operate within the definition of a universal memory, capable of replacing both DRAM and ROM in a system.Type: GrantFiled: October 8, 2008Date of Patent: March 6, 2012Assignee: Micron Technology, Inc.Inventor: Arup Bhattacharyya
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Patent number: 8124514Abstract: A nonvolatile semiconductor storage device includes: a plurality of stacked units juxtaposed on a major surface of a substrate, each stacked unit aligning in a first direction parallel to the major surface of the substrate; and a gate electrode aligning parallel to the major surface in a second direction non-parallel to the first direction. Each of the plurality of stacked units includes a plurality of stacked semiconductor layers via an insulating layer. The plurality of stacked units are juxtaposed so that the spacings between adjacent stacked units are alternately a first spacing and a second spacing larger than the first spacing. The second spacing is provided at a periodic interval four times a size of a half pitch F of the bit line. The gate electrode includes a protruding portion that enters into a gap of the second spacing between the stacked units.Type: GrantFiled: October 15, 2010Date of Patent: February 28, 2012Assignee: Kabushiki Kaisha ToshibaInventor: Masahiro Kiyotoshi
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Patent number: 8110865Abstract: A semiconductor device includes a semiconductor substrate, a first insulating film formed on the semiconductor substrate, a charge storage layer formed on the first insulating film, a second insulating film formed on the charge storage layer, and a control electrode formed on the second insulating film, the second insulating film including a lower silicon nitride film, a lower silicon oxide film formed on the lower silicon nitride film, an intermediate insulating film formed on the lower silicon oxide film and containing a metal element, the intermediate insulating film having a relative dielectric constant of greater than 7, an upper silicon oxide film formed on the intermediate insulating film, and an upper silicon nitride film formed on the upper silicon oxide film.Type: GrantFiled: September 22, 2010Date of Patent: February 7, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Masayuki Tanaka, Daisuke Nishida, Ryota Fujitsuka, Katsuyuki Sekine, Akihito Yamamoto, Katsuaki Natori, Yoshio Ozawa
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Patent number: 8101989Abstract: A memory cell comprising: a semiconductor substrate with a surface with a source region and a drain region disposed below the surface of the substrate and separated by a channel region; a tunneling barrier dielectric structure with an effective oxide thickness of greater than 3 nanometers disposed above the channel region; a conductive layer disposed above the tunneling barrier dielectric structure and above the channel region; a charge trapping structure disposed above the conductive layer and above the channel region; a top dielectric structure disposed above the charge trapping structure and above the channel region; and a top conductive layer disposed above the top dielectric structure and above the channel region are described along with devices thereof and methods for manufacturing.Type: GrantFiled: May 31, 2007Date of Patent: January 24, 2012Assignee: Macronix International Co., Ltd.Inventor: Hang-Ting Lue
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Patent number: 8049298Abstract: A first dielectric plug is formed in a portion of a trench that extends into a substrate of a memory device so that an upper surface of the first dielectric plug is recessed below an upper surface of the substrate. The first dielectric plug has a layer of a first dielectric material and a layer of a second dielectric material formed on the layer of the first dielectric material. A second dielectric plug of a third dielectric material is formed on the upper surface of the first dielectric plug.Type: GrantFiled: September 27, 2010Date of Patent: November 1, 2011Assignee: Micron Technology, Inc.Inventor: Michael Violette
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Patent number: 7999302Abstract: A memory cell comprising: a semiconductor substrate with a surface with a source region and a drain region disposed below the surface of the substrate and separated by a channel region; a tunneling barrier dielectric structure with an effective oxide thickness of greater than 3 nanometers disposed above the channel region; a conductive layer disposed above the tunneling barrier dielectric structure and above the channel region; a charge trapping structure disposed above the conductive layer and above the channel region; a top dielectric structure disposed above the charge trapping structure and above the channel region; and a top conductive layer disposed above the top dielectric structure and above the channel region are described along with devices thereof and methods for manufacturing.Type: GrantFiled: May 31, 2007Date of Patent: August 16, 2011Assignee: Macronix International Co., Ltd.Inventor: Hang-Ting Lue
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Patent number: 7989873Abstract: Memory elements, switching elements, and peripheral circuits to constitute a nonvolatile memory are integrally formed on a substrate by using TFTs. Since semiconductor active layers of memory element TFTs are thinner than those of other TFTs, impact ionization easily occurs in channel regions of the memory element TFTs. This enables low-voltage write/erase operations to be performed on the memory elements, and hence the memory elements are less prone to deteriorate. Therefore, a nonvolatile memory capable of miniaturization can be provided.Type: GrantFiled: March 12, 2008Date of Patent: August 2, 2011Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Keisuke Hayashi
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Patent number: 7977730Abstract: A method of forming a memory device, where a first insulator layer and a charge trapping layer may be formed on a substrate, and at least one of the first insulator layer and charge trapping layer may be patterned to form patterned areas. A second insulation layer and a conductive layer may be formed on the patterned areas, and one or more of the conductive layer, second insulator layer, charge trapping layer and first insulator layer may be patterned to form a string selection line, ground selection line, a plurality of word lines between the string selection and ground selection lines on the substrate, a low voltage gate electrode, and a plurality of insulators of varying thickness. The formed memory device may be a NAND-type non-volatile memory device having a SONOS gate structure, for example.Type: GrantFiled: April 15, 2009Date of Patent: July 12, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Yoo-Cheol Shin, Jeong-Hyuk Choi, Sung-Hoi Hur
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Patent number: 7977226Abstract: A flash memory device and a method for fabricating the same are disclosed. The flash memory device includes an ONO layer on a substrate, polysilicon gates on the ONO layer, a gate oxide layer on the substrate, the ONO layer and the polysilicon gates, and a low temperature oxide layer and polysilicon sidewall spacers on outer side surfaces of the polysilicon gates, except in a region between nearest adjacent polysilicon gates.Type: GrantFiled: December 21, 2009Date of Patent: July 12, 2011Assignee: Dongbu HiTek Co., Ltd.Inventor: Ki Jun Yun
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Patent number: 7968933Abstract: A nonvolatile semiconductor memory device includes a tunnel insulating film, a floating gate electrode, an inter-electrode insulating film, and a control gate electrode. The tunnel insulating film is formed on a selected part of a surface of a semiconductor substrate. The floating gate electrode is formed on the tunnel insulating film. At least that interface region of the floating gate electrode, which is opposite to the substrate, is made of n-type Si or metal-based conductive material. The inter-electrode insulating film is formed on the floating gate electrode and made of high-permittivity material. The control gate electrode is formed on the inter-electrode insulating film. At least that interface region of the control gate electrode, which is on the side of the inter-electrode insulating film, is made of a p-type semiconductor layer containing at least one of Si and Ge.Type: GrantFiled: May 27, 2009Date of Patent: June 28, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Shoko Kikuchi, Naoki Yasuda, Koichi Muraoka, Yukie Nishikawa, Hirotaka Nishino
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Patent number: 7910983Abstract: A MOS transistor having an increased gate-drain capacitance is described. One embodiment provides a drift zone of a first conduction type. At least one transistor cell has a body zone, a source zone separated from the drift zone by the body zone, and a gate electrode, which is arranged adjacent to the body zone and which is dielectrically insulated from the body zone by a gate dielectric. At least one compensation zone of the first conduction type is arranged in the drift zone. At least one feedback electrode is arranged at a distance from the body zone, which is dielectrically insulated from the drift zone by a feedback dielectric and which is electrically conductively connected to the gate electrode.Type: GrantFiled: September 30, 2008Date of Patent: March 22, 2011Assignee: Infineon Technologies Austria AGInventors: Armin Willmeroth, Michael Treu
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Patent number: 7906774Abstract: A phase change memory device is disclosed, including a substrate, a phase change layer over the substrate, a first electrode electrically connecting a first side of the phase change layer, a second electrode electrically connecting a second side of the phase change layer, wherein the phase change layer composes mainly of gallium (Ga), antimony (Sb) and tellurium (Te) and unavoidable impurities, having the composition range of GaxTeySbz, 5<x<40; 8?y<48; 42<z<80; and x+y+z=100.Type: GrantFiled: August 8, 2008Date of Patent: March 15, 2011Assignees: Industrial Technology Research Institute, National Tsing Hua UniversityInventors: Tsung-Shune Chin, Chin-Fu Kao, Ming-Jinn Tsai, Chien-Min Lee
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Patent number: 7897455Abstract: A semiconductor device manufacturing method includes forming a first insulating film on a semiconductor substrate containing silicon, the first insulating film having a first dielectric constant and constituting a part of a tunnel insulating film, forming a floating gate electrode film on the first insulating film, the floating gate electrode film being formed of a semiconductor film containing silicon, patterning the floating gate electrode film, the first insulating film, and the semiconductor substrate to form a first structure having a first side surface, exposing the first structure to an atmosphere containing an oxidizing agent, oxidizing that part of the floating gate electrode film which corresponds to a boundary between the first insulating film and the floating gate electrode film using the oxidizing agent, to form a second insulating film having a second dielectric constant smaller than the first dielectric constant and constituting a part of the tunnel insulating film.Type: GrantFiled: September 22, 2006Date of Patent: March 1, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Yoshio Ozawa, Isao Kamioka
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Patent number: 7851849Abstract: A nonvolatile semiconductor storage device includes: a plurality of stacked units juxtaposed on a major surface of a substrate, each stacked unit aligning in a first direction parallel to the major surface of the substrate; and a gate electrode aligning parallel to the major surface in a second direction non-parallel to the first direction. Each of the plurality of stacked units includes a plurality of stacked semiconductor layers via an insulating layer. The plurality of stacked units are juxtaposed so that the spacings between adjacent stacked units are alternately a first spacing and a second spacing larger than the first spacing. The second spacing is provided at a periodic interval four times a size of a half pitch F of the bit line. The gate electrode includes a protruding portion that enters into a gap of the second spacing between the stacked units.Type: GrantFiled: June 2, 2009Date of Patent: December 14, 2010Assignee: Kabushiki Kaisha ToshibaInventor: Masahiro Kiyotoshi
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Patent number: 7847336Abstract: Methods are described for fabricating NAND-type EEPROMs without field oxide isolation. P+ implantations are employed to isolate adjacent memory cells.Type: GrantFiled: May 30, 2008Date of Patent: December 7, 2010Assignee: Macronix International Co., Ltd.Inventors: Ming-Shang Chen, Wen-Pin Lu
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Patent number: 7816724Abstract: A memory device (100) may include a substrate (110), a dielectric layer (210) formed on the substrate (110) and a charge storage element (220) formed on the dielectric layer (210). The memory device (100) may also include an inter-gate dielectric (230) formed on the charge storage element (220), a barrier layer (240) formed on the inter-gate dielectric (230) and a control gate (250) formed on the barrier layer (240). The barrier layer (240) prevents reaction between the control gate (250) and the inter-gate dielectric (230).Type: GrantFiled: July 21, 2006Date of Patent: October 19, 2010Assignee: Spansion LLCInventors: Youseok Suh, Satoshi Torii, Lei Xue
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Patent number: 7807989Abstract: Provided is a phase-change memory using a single-element semimetallic thin film. The device includes a storage node having a phase-change material layer and a switching element connected to the storage node, wherein the storage node includes a single-element semimetallic thin film which is formed between an upper electrode and a lower electrode. Thus, the write speed of the phase-change memory can be increased compared with the case of a Ge—Sb—Te (GST) based material.Type: GrantFiled: June 17, 2008Date of Patent: October 5, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Tae-yon Lee, Ki-joon Kim, Jun-ho Lee, Cheol-kyu Kim
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Patent number: 7763933Abstract: A transistor construction includes a first floating gate having a first conductive or semiconductive surface and a second floating gate having a second conductive or semiconductive surface. A dielectric region is circumferentially surrounded by the first surface. The region is configured to reduce capacitive coupling between the first and second surfaces. Another transistor construction includes a floating gate having a cavity extending completely through the floating gate from a first surface of the floating gate to an opposing second surface of the floating gate. The floating gate otherwise encloses the cavity, which is filled with at least one dielectric. A method includes closing an upper portion of an opening in insulator material with a gate material during the deposition before filling a lower portion with the gate material. The depositing and closing provide an enclosed cavity within the lower portion of the opening.Type: GrantFiled: February 15, 2007Date of Patent: July 27, 2010Assignee: Micron Technology, Inc.Inventor: Seiichi Aritome
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Patent number: 7692234Abstract: A semiconductor device, which ensures device reliability especially in fine regions and enables great capacitance and high-speed operations, has memory cells including, in a first region of a main surface of a semiconductor substrate, a gate insulating film, a floating gate electrode, an interlayer insulating film, a control gate electrode, and source and drain regions of the second conduction type arranged in a matrix, with a shallow isolation structure for isolating the memory cells. When using a shallow structure buried with an insulating film for element isolation, the isolation withstand voltage in fine regions can be prevented from lowering and the variation in threshold level of selective transistors can be reduced. When the memory cells in a memory mat are divided by means of selective transistors, the disturb resistance of the memory cells can be improved.Type: GrantFiled: September 27, 2007Date of Patent: April 6, 2010Assignee: Renesas Technology Corp.Inventors: Tetsuo Adachi, Masataka Kato, Toshiaki Nishimoto, Nozomu Matsuzaki, Takashi Kobayashi, Yoshimi Sudou, Toshiyuki Mine
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Patent number: 7629669Abstract: A semiconductor apparatus includes a first transistor having a first emitter electrode, a first base electrode, and a first collector electrode in a region over a first region. Base lead-out polysilicon connecting the first base electrode and a first base region passes over a second region provided out of the first region and a resistor element is added. A writing voltage is reduced in an antifuse using two bipolar transistors.Type: GrantFiled: April 26, 2006Date of Patent: December 8, 2009Assignee: Hitachi, Ltd.Inventors: Koji Ishikawa, Kazutaka Mori, Hiroshige Kogayu, Tamotsu Miyake, Mitsugu Kusunoki
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Patent number: 7615436Abstract: There is provided a floating gate transistor, such as an EEPROM transistor, and method of making the transistor using two masking steps. The method of making a transistor includes patterning a floating gate layer using a first photoresist mask to form a floating gate rail and doping an active area using the floating gate rail as a mask to form source and drain regions in the active area. The method also includes patterning a control gate layer, a control gate dielectric layer, the floating gate rail, a tunnel dielectric layer and the active area using a second photoresist mask to form a control gate, a control gate dielectric, a floating gate, a tunnel dielectric and a channel island region.Type: GrantFiled: May 20, 2004Date of Patent: November 10, 2009Assignee: SanDisk 3D LLCInventors: Igor G. Kouznetsov, Andrew J. Walker
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Patent number: 7612403Abstract: Non-volatile memory devices and arrays are described that facilitate the use of band-gap engineered gate stacks with asymmetric tunnel barriers in reverse and normal mode floating node memory cells in NOR or NAND memory architectures that allow for direct tunnel programming and erase, while maintaining high charge blocking barriers and deep carrier trapping sites for good charge retention. The low voltage direct tunneling program and erase capability reduces damage to the gate stack and the crystal lattice from high energy carriers, reducing write fatigue and enhancing device lifespan. The low voltage direct tunnel program and erase capability also enables size reduction through low voltage design and further device feature scaling. Memory cells of the present invention also allow multiple bit storage. These characteristics allow memory device embodiments of the present invention to operate within the definition of a universal memory, capable of replacing both DRAM and ROM in a system.Type: GrantFiled: May 17, 2005Date of Patent: November 3, 2009Assignee: Micron Technology, Inc.Inventor: Arup Bhattacharyya
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Patent number: 7608885Abstract: A non-volatile memory device has a gate dielectric film formed between a floating gate and a control gate. The gate dielectric film is formed by forming an oxide film and a ZrO2/Al2O3/ZrO2 (ZAZ) film. Accordingly, the reliability of non-volatile memory devices can be improved while securing a high coupling ratio.Type: GrantFiled: May 19, 2007Date of Patent: October 27, 2009Assignee: Hynix Semiconductor Inc.Inventors: Kwon Hong, Eun Shil Park, Min Sik Jang
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Patent number: 7560768Abstract: Provided are a nonvolatile memory device and a method of manufacturing the same. A floating gate electrode of the nonvolatile memory device may have a cross-shaped section as taken along a direction extending along a control gate electrode. The floating gate electrode may have an inverse T-shaped section as taken along a direction extending along an active region perpendicular to the control gate electrode. The floating gate electrode may include a lower gate pattern, a middle gate pattern and an upper gate pattern sequentially disposed on a gate insulation layer, in which the middle gate pattern is larger in width than the lower gate pattern and the upper gate pattern. A boundary between the middle gate pattern and the upper gate pattern may have a rounded corner.Type: GrantFiled: November 9, 2006Date of Patent: July 14, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Cha-Won Koh, Byung-Hong Chung, Sang-Gyun Woo, Jeong-Lim Nam, Seok-Hwan Oh, Jai-Hyuk Song, Hyun Park, Yool Kang
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Patent number: 7550801Abstract: A nonvolatile semiconductor memory device includes a tunnel insulating film, a floating gate electrode, an inter-electrode insulating film, and a control gate electrode. The tunnel insulating film is formed on a selected part of a surface of a semiconductor substrate. The floating gate electrode is formed on the tunnel insulating film. At least that interface region of the floating gate electrode, which is opposite to the substrate, is made of n-type Si or metal-based conductive material. The inter-electrode insulating film is formed on the floating gate electrode and made of high-permittivity material. The control gate electrode is formed on the inter-electrode insulating film. At least that interface region of the control gate electrode, which is on the side of the inter-electrode insulating film, is made of a p-type semiconductor layer containing at least one of Si and Ge.Type: GrantFiled: May 15, 2006Date of Patent: June 23, 2009Assignee: Kabushiki Kaisha ToshibaInventors: Shoko Kikuchi, Naoki Yasuda, Koichi Muraoka, Yukie Nishikawa, Hirotaka Nishino
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Patent number: 7541637Abstract: The invention relates to a nonvolatile semiconductor storage element and an associated production and control method, the storage element includes a semiconductor substrate having a source region, a drain region and an intermediate channel region. On a first portion of the channel region, a control layer is formed and insulated from the channel region by a first insulating layer whereas respective charge storage layers are formed in a second portion of the channel region and are insulated from the channel region by a second insulating layer. On the charge storage layer, a programming layer is formed and insulated from the charge storage layer by a third insulating layer and is electrically connected to a respective source region and drain region via a respective interconnect layer.Type: GrantFiled: August 8, 2003Date of Patent: June 2, 2009Assignee: Infineon Technologies AGInventors: Franz Schuler, Georg Tempel
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Patent number: 7538385Abstract: A method of forming a memory device, where a first insulator layer and a charge trapping layer may be formed on a substrate, and at least one of the first insulator layer and charge trapping layer may be patterned to form patterned areas. A second insulation layer and a conductive layer may be formed on the patterned areas, and one or more of the conductive layer, second insulator layer, charge trapping layer and first insulator layer may be patterned to form a string selection line, ground selection line, a plurality of word lines between the string selection and ground selection lines on the substrate, a low voltage gate electrode, and a plurality of insulators of varying thickness. The formed memory device may be a NAND-type non-volatile memory device having a SONOS gate structure, for example.Type: GrantFiled: April 23, 2007Date of Patent: May 26, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Yoo-Cheol Shin, Jeong-Hyuk Choi, Sung-Hoi Hur
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Patent number: 7508027Abstract: The invention relates to a single-poly EPROM comprising a source, a drain, a control gate, a floating gate and an additional gate. The control gate is positioned laterally of a channel between the source and the drain. The floating gate is positioned above the channel above the control gate. The additional gate is positioned above the floating gate, wherein the additional gate is electrically connected to the control gate.Type: GrantFiled: August 28, 2006Date of Patent: March 24, 2009Assignee: Texas Instruments IncorporatedInventors: Ralph Oberhuber, Reiner Jumpertz
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Patent number: 7501680Abstract: The memory device includes a source region and a drain region in a substrate and spaced apart from each other; a memory cell formed on a surface of the substrate, wherein the memory cell connects the source region and the drain region and includes a plurality of nanocrystals; a control gate formed on the memory cell. The memory cell includes a first tunneling oxide layer formed on the substrate; a second tunneling oxide layer formed on the first tunneling oxide layer; and a control oxide layer formed on the second tunneling oxide layer. The control oxide layer includes the nanocrystals. The second tunneling oxide layer, having an aminosilane group the increases electrostatic attraction, may be hydrophilic, enabling the formation of a monolayer of the nanocrystals.Type: GrantFiled: February 28, 2007Date of Patent: March 10, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Kwang-soo Seol, Seong-jae Choi, Jae-young Choi, Yo-sep Min, Eun-joo Jang, Dong-kee Yi
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Patent number: 7462906Abstract: A method of embedding the forming of peripheral devices such as HV-LDMOS into the forming of flash memory is presented. A layered structure is formed with a first insulating layer formed on a substrate, and a poly silicon formed on the first insulating layer in the flash memory region. A mask layer is formed. Openings are formed in the flash memory region in the peripheral region. A local oxidation of silicon (LOCOS) is performed to form thick oxides on poly silicon, and a field oxide on silicon substrate respectively. The mask layer is removed. A control gate and a control gate oxide are formed on the thick oxide and the poly silicon. A gate electrode is formed with at least one end residing on a field oxide so that the resulting HV-LDMOS has a high breakdown voltage. Spacers and a source/drain of the flash cells and HV-LDMOSs are then formed.Type: GrantFiled: August 30, 2007Date of Patent: December 9, 2008Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsiang-Tai Lu, Cheng-Hsiung Kuo, Chin-Huang Wang
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Patent number: 7456465Abstract: A split gate memory cell has a select gate, a control gate, and a charge storage structure. The select gate includes a first portion located over the control gate and a second portion not located over the control gate. In one example, the first portion of the select gate has a sidewall aligned with a sidewall of the control gate and aligned with a sidewall of the charge storage structure. In one example, the control gate has a p-type conductivity. In one example, the gate can be programmed by a hot carrier injection operation and can be erased by a tunneling operation.Type: GrantFiled: September 30, 2005Date of Patent: November 25, 2008Assignee: Freescale Semiconductor, Inc.Inventors: Erwin J. Prinz, Michael A. Sadd, Robert F. Steimle
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Patent number: 7456460Abstract: Thin-film phase-change memories having small phase-change switching volume formed by overlapping thing films. Exemplary embodiments include a phase-change memory element, including a first phase change layer having a resistance, a second phase change layer having a resistance, an insulating layer disposed between the first and second phase change layers; and a third phase change layer having a resistance, and coupled to each of the first and second phase change layers, bridging the insulating layer and electrically coupling the first and second phase change layers, wherein the resistance of the third phase change layer is greater than both the resistance of the first phase change layer and the second phase change layer.Type: GrantFiled: January 29, 2007Date of Patent: November 25, 2008Assignees: International Business Machines Corporation, Macronix International Co., Ltd.Inventors: Geoffrey W. Burr, Yi-Chou Chen, Hsiang-Lan Lung
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Patent number: 7446012Abstract: The present invention relates to a lateral PNP transistor and the method of manufacturing the same. The medium doping N-type base area and the light doping P? collector area were first introduced in the structure before the formation of P+ doping emitter area and the collector area. The emitter-base-collector doping profile in the lateral and the base width of LPNP were similar to NPN. The designer can optimize the doping profile and area size of each area according to the request of the current gain (Hfe), collector-base breakdown voltage (BVceo), and early voltage (VA) of LPNP transistor. These advantages may cause to reduce the area and enhance performance of the LPNP transistor.Type: GrantFiled: January 20, 2006Date of Patent: November 4, 2008Assignee: BCD Semiconductor Manufacturing LimitedInventors: Chong Ren, Xian-Feng Liu, Bin Qiu
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Patent number: 7442987Abstract: A semiconductor memory device includes a substrate having first and second source/drain regions therein and a channel region therebetween. The device also includes first and second charge storage layers on the channel region, a first insulating layer on the channel region between the first and second charge storage layers, and a gate electrode on the insulating layer opposite the channel region and between inner sidewalls of the first and second charge storage layers. The gate electrode extends away from the substrate beyond the first and second charge storage layers. The device further includes second and third insulating layers extending from adjacent the inner sidewalls of the first and second charge storage layers along portions of the gate electrode beyond the first and second charge storage layers. Related methods of fabrication are also discussed.Type: GrantFiled: January 15, 2008Date of Patent: October 28, 2008Assignee: Samsung Electronics Co., Ltd.Inventors: Sung-min Kim, Dong-won Kim, Eun-jung Yun