Load Element Being A Resistor (epo) Patents (Class 257/E27.101)
-
Patent number: 11923295Abstract: A semiconductor structure includes a first dielectric layer over a first conductive line and a second conductive line, a high resistance layer over a portion of the first dielectric layer, a second dielectric layer on the high resistance layer, a low-k dielectric layer over the second dielectric layer, a first conductive via extending through the low-k dielectric layer and the second dielectric layer, and a second conductive via extending through the low-k dielectric layer and the first dielectric layer to the first conductive line. The first conductive via extends into the high resistance layer.Type: GrantFiled: June 19, 2020Date of Patent: March 5, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hong-Wei Chan, Yung-Shih Cheng, Wen-Sheh Huang, Yu-Hsiang Chen
-
Patent number: 11832429Abstract: A Static Random Access Memory (SRAM) cell includes a write port including a first inverter including a first pull-up transistor and a first pull-down transistor, and a second inverter including a second pull-up transistor and a second pull-down transistor and cross-coupled with the first inverter; and a read port including a read pass-gate transistor and a read pull-down transistor serially connected to each. A first doped concentration of impurities doped in channel regions of the second pull-down transistor and the read pull-down transistor is greater than a second doped concentration of the impurities doped in a channel region of the first pull-down transistor, or the impurities are doped in the channel regions of the second pull-down transistor and the read pull-down transistor and are not doped in the channel region of the first pull-down transistor.Type: GrantFiled: December 21, 2020Date of Patent: November 28, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shau-Wei Lu, Hao Chang, Kun-Hsi Li, Kuo-Hung Lo, Kang-Yu Hsu, Yao-Chung Hu
-
Patent number: 11605629Abstract: A method for preparing a semiconductor device structure is provided. The method includes forming an isolation structure in a semiconductor substrate, and recessing the semiconductor substrate to form a first opening and a second opening. The first opening and the second opening are on opposite sides of the isolation structure, and a width of the second opening is greater than a width of the first opening. The method also includes forming an electrode layer over the semiconductor substrate. The first opening and the second opening are filled by the electrode layer. The method further includes polishing the electrode layer to form a gate electrode in the first opening and a resistor electrode in the second opening, and forming a source/drain (S/D) region in the semiconductor substrate.Type: GrantFiled: November 5, 2021Date of Patent: March 14, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Tse-Yao Huang
-
Patent number: 11410719Abstract: SRAM arrays are provided. Each SRAM cell is arranged in the same column of a cell array and includes a first transistor formed in a P-type well region of a substrate. The first transistor includes an active region formed by a Si-content fin. Each well strap cell is arranged on one of the columns in the cell array and includes a P-well strap structure formed on the P-type well region and configured to connect a VSS line to the P-type well region. The P-well strap structure includes an active region formed by a fin. In the P-type well region of two adjacent columns of the cell array, a first fin-to-fin distance between the fins of the P-well strap structures of two adjacent well strap cells is less than a second fin-to-fin distance between the Si-content fins of the first transistors of two adjacent SRAM cells.Type: GrantFiled: June 28, 2021Date of Patent: August 9, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Jhon-Jhy Liaw
-
Patent number: 11393840Abstract: A non-volatile semiconductor storage device has a plurality of memory strings to each of which a plurality of electrically rewritable memory cells are connected in series. Each of the memory strings includes first semiconductor layers each having a pair of columnar portions extending in a vertical direction with respect to a substrate and a coupling portion formed to couple the lower ends of the pair of columnar portions; a charge storage layer formed to surround the side surfaces of the columnar portions; and first conductive layers formed to surround the side surfaces of the columnar portions and the charge storage layer. The first conductive layers function as gate electrodes of the memory cells.Type: GrantFiled: December 11, 2019Date of Patent: July 19, 2022Assignee: KIOXIA CORPORATIONInventors: Yoshiaki Fukuzumi, Ryota Katsumata, Masaru Kidoh, Masaru Kito, Hiroyasu Tanaka, Yosuke Komori, Megumi Ishiduki, Hideaki Aochi
-
Patent number: 8507995Abstract: In a static memory cell configured using four MOS transistors and two load resistance elements, the MOS transistors are formed on diffusion layers formed on a substrate. The diffusion layers serve as memory nodes. The drain, gate and source of the MOS transistors are arranged in the direction orthogonal to the substrate, and the gate surrounds a columnar semiconductor layer. In addition, the load resistance elements are formed by contact plugs. In this way, it is possible to form a SRAM cell with a small area.Type: GrantFiled: September 15, 2010Date of Patent: August 13, 2013Assignee: Unisantis Electronics Singapore Pte Ltd.Inventors: Fujio Masuoka, Shintaro Arai
-
Patent number: 8351242Abstract: Some embodiments include electronic devices having two capacitors connected in series. The two capacitors share a common electrode. One of the capacitors includes a region of a semiconductor substrate and a dielectric between such region and the common electrode. The other of the capacitors includes a second electrode and ion conductive material between the second electrode and the common electrode. At least one of the first and second electrodes has an electrochemically active surface directly against the ion conductive material. Some embodiments include memory cells having two capacitors connected in series, and some embodiments include memory arrays containing such memory cells.Type: GrantFiled: September 29, 2010Date of Patent: January 8, 2013Assignee: Micron Technology, Inc.Inventors: D. V. Nirmal Ramaswamy, Kirk D. Prall
-
Publication number: 20120181622Abstract: It is intended to achieve a sufficiently-small SRAM cell area and a stable operation margin in an E/R type 4T-SRAM comprising a vertical transistor SGT. In a static type memory cell made up using four MOS transistors and two load resistor elements, each of the MOS transistor constituting the memory cell is formed on a planar silicon layer formed on a buried oxide film, to have a structure where a drain, a gate and a source are arranged in a vertical direction, wherein the gate is formed to surround a pillar-shaped semiconductor layer, and each of the load resistor elements is made of polysilicon and formed on the planar silicon layer.Type: ApplicationFiled: March 12, 2012Publication date: July 19, 2012Inventors: Fujio Masuoka, Shintaro Arai
-
Patent number: 8203134Abstract: Memory cells of a memory device including a variable resistance material have a cavity between the memory cells. Electronic systems include such memory devices. Methods of forming a memory device include providing a cavity between memory cells of the memory device.Type: GrantFiled: September 21, 2009Date of Patent: June 19, 2012Assignee: Micron Technology, Inc.Inventor: Jun Liu
-
Patent number: 7923783Abstract: A semiconductor memory device according to an embodiment of the present invention includes a resistance element which is constructed with a first conductor which extends in a first direction and is connected to a first contact; a second conductor which extends in said first direction and is connected to a second contact; and a first insulation film which exists between said first conductor and said second conductor, said first insulation film also having an opening in which a third conductor which connects said first conductor and said second conductor is arranged.Type: GrantFiled: March 20, 2009Date of Patent: April 12, 2011Assignee: Kabushiki Kaisha ToshibaInventor: Takumi Abe
-
Publication number: 20110012195Abstract: Between a source electrode (25) of a main device (24) and a current sensing electrode (22) of a current detection device (21), a resistor for detecting current is connected. Dielectric withstand voltage of gate insulator (36) is larger than a product of the resistor and maximal current flowing through the current detection device (21) with reverse bias. A diffusion length of a p-body region (32) of the main device (24) is shorter than that of a p-body (31) of the current detection device (21). A curvature radius at an end portion of the p-body region (32) of the main device (24) is smaller than that of the p-body (31) of the current detection device (21). As a result, at the inverse bias, electric field at the end portion of the p-body region (32) of the main device (24) becomes stronger than that of the p-body region (31) of the current detection device (21). Consequently, avalanche breakdown tends to occur earlier in the main device 24 than the current detection device (21).Type: ApplicationFiled: January 28, 2009Publication date: January 20, 2011Applicants: FUJI ELECTRIC SYSTEMS CO., LTD., DENSO CORPORATIONInventors: Seiji Momota, Hitoshi Abe, Takashi Shiigi, Takeshi Fujii, Koh Yoshikawa, Tetsutaro Imagawa, Masaki Koyama, Makoto Asai
-
Publication number: 20100320543Abstract: A semiconductor device manufacturing method includes, forming isolation region having an aspect ratio of 1 or more in a semiconductor substrate, forming a gate insulating film, forming a silicon gate electrode and a silicon resistive element, forming side wall spacers on the gate electrode, heavily doping a first active region with phosphorus and a second active region and the resistive element with p-type impurities by ion implantation, forming salicide block at 500° C. or lower, depositing a metal layer covering the salicide block, and selectively forming metal silicide layers. The method may further includes, forming a thick and a thin gate insulating films, and performing implantation of ions of a first conductivity type not penetrating the thick gate insulating film and oblique implantation of ions of the opposite conductivity type penetrating also the thick gate insulating film before the formation of side wall spacers.Type: ApplicationFiled: August 11, 2010Publication date: December 23, 2010Applicant: FUJITSU SEMICONDUCTOR LIMITEDInventors: Taiji EMA, Hideyuki KOJIMA, Toru ANEZAKI
-
Patent number: 7791169Abstract: Disclosed is a semiconductor structure that incorporates a capacitor for reducing the soft error rate of a device within the structure. The multi-layer semiconductor structure includes an insulator-filled deep trench isolation structure that is formed through an active silicon layer, a first insulator layer, and a first bulk layer and extends to a second insulator layer. The resulting isolated portion of the first bulk layer defines the first capacitor plate. A portion of the second insulator layer that is adjacent the first capacitor plate functions as the capacitor dielectric. Either the silicon substrate or a portion of a second bulk layer that is isolated by a third insulator layer and another deep trench isolation structure can function as the second capacitor plate. A first capacitor contact couples, either directly or via a wire array, the first capacitor plate to a circuit node of the device in order to increase the critical charge, Qcrit, of the circuit node.Type: GrantFiled: April 18, 2008Date of Patent: September 7, 2010Assignee: International Business Machines CorporationInventors: John M. Aitken, Ethan H. Cannon, Philip J. Oldiges, Alvin W. Strong
-
Publication number: 20100200918Abstract: A CMOS memory element comprising silicon-on-insulator MOSFET transistors is disclosed wherein at least one of the MOSFET transistors is configured such that the body of the transistor is not connected to a voltage source and is instead permitted to electrically float. Implementations of the disclosed memory element with increased immunity to errors caused by heavy ion radiation are also disclosed.Type: ApplicationFiled: February 10, 2009Publication date: August 12, 2010Applicant: Honeywell International Inc.Inventors: Bradley J. Larsen, Todd A. Randazzo, Cheisan Yue
-
Publication number: 20100065900Abstract: A semiconductor device includes a resistance element. The resistance element includes a first and second conductive films, second insulating film, and contact plugs. The first conductive film is formed on a semiconductor substrate with a first insulating film interposed therebetween. The second insulating film is formed on the first conductive film. The second conductive film is formed on the second insulating film. In the first connection portion, the second insulating film is removed. The first connection portion connects the first conductive film and the second conductive film together. The contact plugs are formed on the second conductive film. The contact plugs are arranged such that a region located on the second conductive film and immediately above the connection portion is sandwiched between the contact plugs.Type: ApplicationFiled: September 16, 2009Publication date: March 18, 2010Inventors: Takeshi MURATA, Takeshi Kamigaichi, Itaru Kawabata, Shinya Takahashi
-
Publication number: 20090034319Abstract: A phase change memory device includes wordlines extending along a direction on a semiconductor substrate. Low concentration semiconductor patterns are disposed on the wordlines. Node electrodes are disposed on the low concentration semiconductor patterns. Schottky diodes are disposed between the low concentration semiconductor patterns and the node electrodes. Phase change resistors are disposed on the node electrodes.Type: ApplicationFiled: May 14, 2008Publication date: February 5, 2009Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dae-Won HA, Gi-Tae JEONG
-
Patent number: 7388274Abstract: Disclosed is a semiconductor structure that incorporates a capacitor for reducing the soft error rate of a device within the structure. The multi-layer semiconductor structure includes an insulator-filled deep trench isolation structure that is formed through an active silicon layer, a first insulator layer, and a first bulk layer and extends to a second insulator layer. The resulting isolated portion of the first bulk layer defines the first capacitor plate. A portion of the second insulator layer that is adjacent the first capacitor plate functions as the capacitor dielectric. Either the silicon substrate or a portion of a second bulk layer that is isolated by a third insulator layer and another deep trench isolation structure can function as the second capacitor plate. A first capacitor contact couples, either directly or via a wire array, the first capacitor plate to a circuit node of the device in order to increase the critical charge, Qcrit, of the circuit node.Type: GrantFiled: August 15, 2007Date of Patent: June 17, 2008Assignee: International Business Machines CorporationInventors: John M. Aitken, Ethan H. Cannon, Philip J. Oldiges, Alvin W. Strong
-
Patent number: 7348653Abstract: A resistive memory cell employs a photoimageable switchable material, which is patternable by actinic irradiation and is reversibly switchable between distinguishable resistance states, as a memory element. Thus, the photoimageable switchable material is directly patterned by the actinic irradiation so that it is possible to fabricate the resistive memory cell through simple processes, and avoiding ashing and stripping steps.Type: GrantFiled: April 13, 2006Date of Patent: March 25, 2008Assignee: Samsung Electronics Co., Ltd.Inventors: Byeong-Ok Cho, Moon-Sook Lee, Takahiro Yasue
-
Patent number: 7320923Abstract: A method for forming a resistor of high value in a semiconductor substrate including forming a stack of a first insulating layer, a first conductive layer, a second insulating layer, and a third insulating layer, the third insulating layer being selectively etchable with respect to the second insulating layer; etching the stack, to expose the substrate and keep the stack in the form of a line; forming insulating spacers on the lateral walls of the line; performing an epitaxial growth of a single-crystal semiconductor on the substrate, on either side of the line; selectively removing the third insulating layer to partially expose the second insulating layer at a predetermined location; and depositing and etching a conductive material to fill the cavity formed by the previous removal of the third insulating layer.Type: GrantFiled: December 16, 2005Date of Patent: January 22, 2008Assignee: STMicroelectronics Crolles 2 SASInventors: Bertrand Borot, Philippe Coronel
-
Patent number: 7304352Abstract: A D-Cache SRAM cell having a modified design in schematic and layout that exhibits increased symmetry from the circuit schematic and the physical cell layout perspectives. That is, the SRAM cell includes two read ports and minimizes asymmetry by provisioning one read port on a true side and one on the complement side. Asymmetry is additionally minimized in layout as cross coupling on both the true and complement sides rises up one level by providing from the local interconnect level a via connection to a M1 or metallization level. Moreover, the distance between the local interconnect (MC) and the gate conductor structure (PC) has been enlarged and equalized for each of the pFETs in the cross-latched SRAM cell. As a result, the SRAM cell has been rendered insensitive to overlay (local interconnect processing too close) by maximizing this MC-PC distance.Type: GrantFiled: April 21, 2005Date of Patent: December 4, 2007Assignee: International Business Machines CorporationInventors: K. Paul Muller, Kevin A. Batson, Michael J. Lee
-
Patent number: 7256463Abstract: It is an object to provide a semiconductor device having an SOI structure in which an electric potential of a body region in an element formation region isolated by a partial isolation region can be fixed with a high stability. A MOS transistor comprising a source region (51), a drain region (61) and an H gate electrode (71) is formed in an element formation region isolated by a partial oxide film (31). The H gate electrode (71) electrically isolates a body region (13) formed in a gate width W direction adjacently to the source region (51) and the drain region (61) from the drain region (61) and the source region (51) through “I” in a transverse direction (a vertical direction in the drawing), a central “-” functions as a gate electrode of an original MOS transistor.Type: GrantFiled: May 10, 2004Date of Patent: August 14, 2007Assignee: Renesas Technology Corp.Inventors: Takuji Matsumoto, Shigenobu Maeda, Toshiaki Iwamatsu, Takashi Ipposhi
-
Publication number: 20070158690Abstract: Programmable resistive RAM cells have a resistance that depends on the size of the programmable resistive elements. Manufacturing methods and integrated circuits for programmable resistive elements with uniform resistance are disclosed that have a cross-section of reduced size compared to the cross-section of the interlayer contacts.Type: ApplicationFiled: July 31, 2006Publication date: July 12, 2007Applicant: Macronix International Co., Ltd.Inventors: ChiaHua Ho, Erh Kun Lai, Kuang Yeu Hsieh
-
Patent number: 7122850Abstract: A semiconductor device having a local interconnection layer and a method for manufacturing the same are provided. A local interconnection layer is formed in an interlayer dielectric (ILD) layer on an isolation layer and a junction layer, for covering a semiconductor substrate, the isolation layer, and a gate pattern. An etch stopper pattern having at least one layer for preventing the etching of the isolation layer is formed under the local interconnection layer. The etch stopper pattern having at least one layer for preventing the etching of the isolation layer can be included when forming the local interconnection layer, thereby preventing leakage current caused by the etching of the isolation layer, improving the electrical characteristics of a semiconductor device, and improving the yield of a process of manufacturing a semiconductor device.Type: GrantFiled: August 30, 2002Date of Patent: October 17, 2006Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-kyun Nam, Heon-jong Shin, Hyung-tae Ji
-
Publication number: 20060118909Abstract: A semiconductor device includes a semiconductor substrate having a resistor region, an isolation layer disposed in the resistor region, the isolation layer defining active regions, first conductive layer patterns disposed on the active regions, a second conductive layer pattern covering the first conductive layer patterns and disposed on the isolation layer, the second conductive layer pattern and the first conductive layer patterns constituting a load resistor pattern, an upper insulating layer disposed over the load resistor pattern, and resistor contact plugs disposed over the active regions, the resistor contact plugs penetrating the upper insulating layer to contact the load resistor pattern.Type: ApplicationFiled: December 2, 2005Publication date: June 8, 2006Inventors: Eun-Young Choi, Eun-Jin Baek