Load Element Being A Resistor (epo) Patents (Class 257/E27.101)
  • Patent number: 11923295
    Abstract: A semiconductor structure includes a first dielectric layer over a first conductive line and a second conductive line, a high resistance layer over a portion of the first dielectric layer, a second dielectric layer on the high resistance layer, a low-k dielectric layer over the second dielectric layer, a first conductive via extending through the low-k dielectric layer and the second dielectric layer, and a second conductive via extending through the low-k dielectric layer and the first dielectric layer to the first conductive line. The first conductive via extends into the high resistance layer.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hong-Wei Chan, Yung-Shih Cheng, Wen-Sheh Huang, Yu-Hsiang Chen
  • Patent number: 11832429
    Abstract: A Static Random Access Memory (SRAM) cell includes a write port including a first inverter including a first pull-up transistor and a first pull-down transistor, and a second inverter including a second pull-up transistor and a second pull-down transistor and cross-coupled with the first inverter; and a read port including a read pass-gate transistor and a read pull-down transistor serially connected to each. A first doped concentration of impurities doped in channel regions of the second pull-down transistor and the read pull-down transistor is greater than a second doped concentration of the impurities doped in a channel region of the first pull-down transistor, or the impurities are doped in the channel regions of the second pull-down transistor and the read pull-down transistor and are not doped in the channel region of the first pull-down transistor.
    Type: Grant
    Filed: December 21, 2020
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shau-Wei Lu, Hao Chang, Kun-Hsi Li, Kuo-Hung Lo, Kang-Yu Hsu, Yao-Chung Hu
  • Patent number: 11605629
    Abstract: A method for preparing a semiconductor device structure is provided. The method includes forming an isolation structure in a semiconductor substrate, and recessing the semiconductor substrate to form a first opening and a second opening. The first opening and the second opening are on opposite sides of the isolation structure, and a width of the second opening is greater than a width of the first opening. The method also includes forming an electrode layer over the semiconductor substrate. The first opening and the second opening are filled by the electrode layer. The method further includes polishing the electrode layer to form a gate electrode in the first opening and a resistor electrode in the second opening, and forming a source/drain (S/D) region in the semiconductor substrate.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: March 14, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Tse-Yao Huang
  • Patent number: 11410719
    Abstract: SRAM arrays are provided. Each SRAM cell is arranged in the same column of a cell array and includes a first transistor formed in a P-type well region of a substrate. The first transistor includes an active region formed by a Si-content fin. Each well strap cell is arranged on one of the columns in the cell array and includes a P-well strap structure formed on the P-type well region and configured to connect a VSS line to the P-type well region. The P-well strap structure includes an active region formed by a fin. In the P-type well region of two adjacent columns of the cell array, a first fin-to-fin distance between the fins of the P-well strap structures of two adjacent well strap cells is less than a second fin-to-fin distance between the Si-content fins of the first transistors of two adjacent SRAM cells.
    Type: Grant
    Filed: June 28, 2021
    Date of Patent: August 9, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Jhon-Jhy Liaw
  • Patent number: 11393840
    Abstract: A non-volatile semiconductor storage device has a plurality of memory strings to each of which a plurality of electrically rewritable memory cells are connected in series. Each of the memory strings includes first semiconductor layers each having a pair of columnar portions extending in a vertical direction with respect to a substrate and a coupling portion formed to couple the lower ends of the pair of columnar portions; a charge storage layer formed to surround the side surfaces of the columnar portions; and first conductive layers formed to surround the side surfaces of the columnar portions and the charge storage layer. The first conductive layers function as gate electrodes of the memory cells.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: July 19, 2022
    Assignee: KIOXIA CORPORATION
    Inventors: Yoshiaki Fukuzumi, Ryota Katsumata, Masaru Kidoh, Masaru Kito, Hiroyasu Tanaka, Yosuke Komori, Megumi Ishiduki, Hideaki Aochi
  • Patent number: 8507995
    Abstract: In a static memory cell configured using four MOS transistors and two load resistance elements, the MOS transistors are formed on diffusion layers formed on a substrate. The diffusion layers serve as memory nodes. The drain, gate and source of the MOS transistors are arranged in the direction orthogonal to the substrate, and the gate surrounds a columnar semiconductor layer. In addition, the load resistance elements are formed by contact plugs. In this way, it is possible to form a SRAM cell with a small area.
    Type: Grant
    Filed: September 15, 2010
    Date of Patent: August 13, 2013
    Assignee: Unisantis Electronics Singapore Pte Ltd.
    Inventors: Fujio Masuoka, Shintaro Arai
  • Patent number: 8351242
    Abstract: Some embodiments include electronic devices having two capacitors connected in series. The two capacitors share a common electrode. One of the capacitors includes a region of a semiconductor substrate and a dielectric between such region and the common electrode. The other of the capacitors includes a second electrode and ion conductive material between the second electrode and the common electrode. At least one of the first and second electrodes has an electrochemically active surface directly against the ion conductive material. Some embodiments include memory cells having two capacitors connected in series, and some embodiments include memory arrays containing such memory cells.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: January 8, 2013
    Assignee: Micron Technology, Inc.
    Inventors: D. V. Nirmal Ramaswamy, Kirk D. Prall
  • Publication number: 20120181622
    Abstract: It is intended to achieve a sufficiently-small SRAM cell area and a stable operation margin in an E/R type 4T-SRAM comprising a vertical transistor SGT. In a static type memory cell made up using four MOS transistors and two load resistor elements, each of the MOS transistor constituting the memory cell is formed on a planar silicon layer formed on a buried oxide film, to have a structure where a drain, a gate and a source are arranged in a vertical direction, wherein the gate is formed to surround a pillar-shaped semiconductor layer, and each of the load resistor elements is made of polysilicon and formed on the planar silicon layer.
    Type: Application
    Filed: March 12, 2012
    Publication date: July 19, 2012
    Inventors: Fujio Masuoka, Shintaro Arai
  • Patent number: 8203134
    Abstract: Memory cells of a memory device including a variable resistance material have a cavity between the memory cells. Electronic systems include such memory devices. Methods of forming a memory device include providing a cavity between memory cells of the memory device.
    Type: Grant
    Filed: September 21, 2009
    Date of Patent: June 19, 2012
    Assignee: Micron Technology, Inc.
    Inventor: Jun Liu
  • Patent number: 7923783
    Abstract: A semiconductor memory device according to an embodiment of the present invention includes a resistance element which is constructed with a first conductor which extends in a first direction and is connected to a first contact; a second conductor which extends in said first direction and is connected to a second contact; and a first insulation film which exists between said first conductor and said second conductor, said first insulation film also having an opening in which a third conductor which connects said first conductor and said second conductor is arranged.
    Type: Grant
    Filed: March 20, 2009
    Date of Patent: April 12, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Takumi Abe
  • Publication number: 20110012195
    Abstract: Between a source electrode (25) of a main device (24) and a current sensing electrode (22) of a current detection device (21), a resistor for detecting current is connected. Dielectric withstand voltage of gate insulator (36) is larger than a product of the resistor and maximal current flowing through the current detection device (21) with reverse bias. A diffusion length of a p-body region (32) of the main device (24) is shorter than that of a p-body (31) of the current detection device (21). A curvature radius at an end portion of the p-body region (32) of the main device (24) is smaller than that of the p-body (31) of the current detection device (21). As a result, at the inverse bias, electric field at the end portion of the p-body region (32) of the main device (24) becomes stronger than that of the p-body region (31) of the current detection device (21). Consequently, avalanche breakdown tends to occur earlier in the main device 24 than the current detection device (21).
    Type: Application
    Filed: January 28, 2009
    Publication date: January 20, 2011
    Applicants: FUJI ELECTRIC SYSTEMS CO., LTD., DENSO CORPORATION
    Inventors: Seiji Momota, Hitoshi Abe, Takashi Shiigi, Takeshi Fujii, Koh Yoshikawa, Tetsutaro Imagawa, Masaki Koyama, Makoto Asai
  • Publication number: 20100320543
    Abstract: A semiconductor device manufacturing method includes, forming isolation region having an aspect ratio of 1 or more in a semiconductor substrate, forming a gate insulating film, forming a silicon gate electrode and a silicon resistive element, forming side wall spacers on the gate electrode, heavily doping a first active region with phosphorus and a second active region and the resistive element with p-type impurities by ion implantation, forming salicide block at 500° C. or lower, depositing a metal layer covering the salicide block, and selectively forming metal silicide layers. The method may further includes, forming a thick and a thin gate insulating films, and performing implantation of ions of a first conductivity type not penetrating the thick gate insulating film and oblique implantation of ions of the opposite conductivity type penetrating also the thick gate insulating film before the formation of side wall spacers.
    Type: Application
    Filed: August 11, 2010
    Publication date: December 23, 2010
    Applicant: FUJITSU SEMICONDUCTOR LIMITED
    Inventors: Taiji EMA, Hideyuki KOJIMA, Toru ANEZAKI
  • Patent number: 7791169
    Abstract: Disclosed is a semiconductor structure that incorporates a capacitor for reducing the soft error rate of a device within the structure. The multi-layer semiconductor structure includes an insulator-filled deep trench isolation structure that is formed through an active silicon layer, a first insulator layer, and a first bulk layer and extends to a second insulator layer. The resulting isolated portion of the first bulk layer defines the first capacitor plate. A portion of the second insulator layer that is adjacent the first capacitor plate functions as the capacitor dielectric. Either the silicon substrate or a portion of a second bulk layer that is isolated by a third insulator layer and another deep trench isolation structure can function as the second capacitor plate. A first capacitor contact couples, either directly or via a wire array, the first capacitor plate to a circuit node of the device in order to increase the critical charge, Qcrit, of the circuit node.
    Type: Grant
    Filed: April 18, 2008
    Date of Patent: September 7, 2010
    Assignee: International Business Machines Corporation
    Inventors: John M. Aitken, Ethan H. Cannon, Philip J. Oldiges, Alvin W. Strong
  • Publication number: 20100200918
    Abstract: A CMOS memory element comprising silicon-on-insulator MOSFET transistors is disclosed wherein at least one of the MOSFET transistors is configured such that the body of the transistor is not connected to a voltage source and is instead permitted to electrically float. Implementations of the disclosed memory element with increased immunity to errors caused by heavy ion radiation are also disclosed.
    Type: Application
    Filed: February 10, 2009
    Publication date: August 12, 2010
    Applicant: Honeywell International Inc.
    Inventors: Bradley J. Larsen, Todd A. Randazzo, Cheisan Yue
  • Publication number: 20100065900
    Abstract: A semiconductor device includes a resistance element. The resistance element includes a first and second conductive films, second insulating film, and contact plugs. The first conductive film is formed on a semiconductor substrate with a first insulating film interposed therebetween. The second insulating film is formed on the first conductive film. The second conductive film is formed on the second insulating film. In the first connection portion, the second insulating film is removed. The first connection portion connects the first conductive film and the second conductive film together. The contact plugs are formed on the second conductive film. The contact plugs are arranged such that a region located on the second conductive film and immediately above the connection portion is sandwiched between the contact plugs.
    Type: Application
    Filed: September 16, 2009
    Publication date: March 18, 2010
    Inventors: Takeshi MURATA, Takeshi Kamigaichi, Itaru Kawabata, Shinya Takahashi
  • Publication number: 20090034319
    Abstract: A phase change memory device includes wordlines extending along a direction on a semiconductor substrate. Low concentration semiconductor patterns are disposed on the wordlines. Node electrodes are disposed on the low concentration semiconductor patterns. Schottky diodes are disposed between the low concentration semiconductor patterns and the node electrodes. Phase change resistors are disposed on the node electrodes.
    Type: Application
    Filed: May 14, 2008
    Publication date: February 5, 2009
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dae-Won HA, Gi-Tae JEONG
  • Patent number: 7388274
    Abstract: Disclosed is a semiconductor structure that incorporates a capacitor for reducing the soft error rate of a device within the structure. The multi-layer semiconductor structure includes an insulator-filled deep trench isolation structure that is formed through an active silicon layer, a first insulator layer, and a first bulk layer and extends to a second insulator layer. The resulting isolated portion of the first bulk layer defines the first capacitor plate. A portion of the second insulator layer that is adjacent the first capacitor plate functions as the capacitor dielectric. Either the silicon substrate or a portion of a second bulk layer that is isolated by a third insulator layer and another deep trench isolation structure can function as the second capacitor plate. A first capacitor contact couples, either directly or via a wire array, the first capacitor plate to a circuit node of the device in order to increase the critical charge, Qcrit, of the circuit node.
    Type: Grant
    Filed: August 15, 2007
    Date of Patent: June 17, 2008
    Assignee: International Business Machines Corporation
    Inventors: John M. Aitken, Ethan H. Cannon, Philip J. Oldiges, Alvin W. Strong
  • Patent number: 7348653
    Abstract: A resistive memory cell employs a photoimageable switchable material, which is patternable by actinic irradiation and is reversibly switchable between distinguishable resistance states, as a memory element. Thus, the photoimageable switchable material is directly patterned by the actinic irradiation so that it is possible to fabricate the resistive memory cell through simple processes, and avoiding ashing and stripping steps.
    Type: Grant
    Filed: April 13, 2006
    Date of Patent: March 25, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Byeong-Ok Cho, Moon-Sook Lee, Takahiro Yasue
  • Patent number: 7320923
    Abstract: A method for forming a resistor of high value in a semiconductor substrate including forming a stack of a first insulating layer, a first conductive layer, a second insulating layer, and a third insulating layer, the third insulating layer being selectively etchable with respect to the second insulating layer; etching the stack, to expose the substrate and keep the stack in the form of a line; forming insulating spacers on the lateral walls of the line; performing an epitaxial growth of a single-crystal semiconductor on the substrate, on either side of the line; selectively removing the third insulating layer to partially expose the second insulating layer at a predetermined location; and depositing and etching a conductive material to fill the cavity formed by the previous removal of the third insulating layer.
    Type: Grant
    Filed: December 16, 2005
    Date of Patent: January 22, 2008
    Assignee: STMicroelectronics Crolles 2 SAS
    Inventors: Bertrand Borot, Philippe Coronel
  • Patent number: 7304352
    Abstract: A D-Cache SRAM cell having a modified design in schematic and layout that exhibits increased symmetry from the circuit schematic and the physical cell layout perspectives. That is, the SRAM cell includes two read ports and minimizes asymmetry by provisioning one read port on a true side and one on the complement side. Asymmetry is additionally minimized in layout as cross coupling on both the true and complement sides rises up one level by providing from the local interconnect level a via connection to a M1 or metallization level. Moreover, the distance between the local interconnect (MC) and the gate conductor structure (PC) has been enlarged and equalized for each of the pFETs in the cross-latched SRAM cell. As a result, the SRAM cell has been rendered insensitive to overlay (local interconnect processing too close) by maximizing this MC-PC distance.
    Type: Grant
    Filed: April 21, 2005
    Date of Patent: December 4, 2007
    Assignee: International Business Machines Corporation
    Inventors: K. Paul Muller, Kevin A. Batson, Michael J. Lee
  • Patent number: 7256463
    Abstract: It is an object to provide a semiconductor device having an SOI structure in which an electric potential of a body region in an element formation region isolated by a partial isolation region can be fixed with a high stability. A MOS transistor comprising a source region (51), a drain region (61) and an H gate electrode (71) is formed in an element formation region isolated by a partial oxide film (31). The H gate electrode (71) electrically isolates a body region (13) formed in a gate width W direction adjacently to the source region (51) and the drain region (61) from the drain region (61) and the source region (51) through “I” in a transverse direction (a vertical direction in the drawing), a central “-” functions as a gate electrode of an original MOS transistor.
    Type: Grant
    Filed: May 10, 2004
    Date of Patent: August 14, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Takuji Matsumoto, Shigenobu Maeda, Toshiaki Iwamatsu, Takashi Ipposhi
  • Publication number: 20070158690
    Abstract: Programmable resistive RAM cells have a resistance that depends on the size of the programmable resistive elements. Manufacturing methods and integrated circuits for programmable resistive elements with uniform resistance are disclosed that have a cross-section of reduced size compared to the cross-section of the interlayer contacts.
    Type: Application
    Filed: July 31, 2006
    Publication date: July 12, 2007
    Applicant: Macronix International Co., Ltd.
    Inventors: ChiaHua Ho, Erh Kun Lai, Kuang Yeu Hsieh
  • Patent number: 7122850
    Abstract: A semiconductor device having a local interconnection layer and a method for manufacturing the same are provided. A local interconnection layer is formed in an interlayer dielectric (ILD) layer on an isolation layer and a junction layer, for covering a semiconductor substrate, the isolation layer, and a gate pattern. An etch stopper pattern having at least one layer for preventing the etching of the isolation layer is formed under the local interconnection layer. The etch stopper pattern having at least one layer for preventing the etching of the isolation layer can be included when forming the local interconnection layer, thereby preventing leakage current caused by the etching of the isolation layer, improving the electrical characteristics of a semiconductor device, and improving the yield of a process of manufacturing a semiconductor device.
    Type: Grant
    Filed: August 30, 2002
    Date of Patent: October 17, 2006
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-kyun Nam, Heon-jong Shin, Hyung-tae Ji
  • Publication number: 20060118909
    Abstract: A semiconductor device includes a semiconductor substrate having a resistor region, an isolation layer disposed in the resistor region, the isolation layer defining active regions, first conductive layer patterns disposed on the active regions, a second conductive layer pattern covering the first conductive layer patterns and disposed on the isolation layer, the second conductive layer pattern and the first conductive layer patterns constituting a load resistor pattern, an upper insulating layer disposed over the load resistor pattern, and resistor contact plugs disposed over the active regions, the resistor contact plugs penetrating the upper insulating layer to contact the load resistor pattern.
    Type: Application
    Filed: December 2, 2005
    Publication date: June 8, 2006
    Inventors: Eun-Young Choi, Eun-Jin Baek