In Different Semiconductor Regions (e.g., Heterojunctions) (epo) Patents (Class 257/E29.081)
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Patent number: 12159906Abstract: The present disclosure provides a semiconductor device and a fabrication method thereof. The semiconductor device includes a substrate, a first nitride semiconductor layer, a second nitride semiconductor layer, and a carbonitride semiconductor layer. The first nitride semiconductor layer is over the substrate. The second nitride semiconductor layer is formed on the first nitride semiconductor layer and has a greater bandgap than that of the first nitride semiconductor layer. The carbonitride semiconductor layer is between the substrate and the first nitride semiconductor layer.Type: GrantFiled: January 26, 2021Date of Patent: December 3, 2024Assignee: INNOSCIENCE (SUZHOU) TECHNOLOGY CO., LTD.Inventors: Yi-Lun Chou, Peng-Yi Wu
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Patent number: 12107056Abstract: The present disclosure provides a semiconductor device package. The semiconductor device package includes a dielectric layer. The semiconductor device package further includes an antenna structure disposed in the dielectric layer. The semiconductor device package further includes a semiconductor device disposed on the dielectric layer. The semiconductor device package further includes an encapsulant covering the semiconductor device. The semiconductor device package further includes a conductive pillar having a first portion and a second portion. The first portion surrounded by the encapsulant and the second portion embedded in the dielectric layer.Type: GrantFiled: January 16, 2020Date of Patent: October 1, 2024Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.Inventors: Ya Fang Chan, Yuan-Feng Chiang, Po-Wei Lu
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Patent number: 12066537Abstract: A LIDAR system comprising a laser configured to output a beam, a modulator configured to receive the beam and modulate the beam to generate a modulated beam, a photonic integrated circuit having an amplifier coupled to receive the modulated beam from the modulator and generate an amplified beam, the amplifier having an active layer and an alternating or periodic or a super lattice structure configured to dissipate heat; and a transceiver chip coupled to the photonic integrated circuit, the transceiver chip configured to emit the amplified beam and receive a reflected beam from a target.Type: GrantFiled: December 30, 2022Date of Patent: August 20, 2024Assignee: Aurora Operations, IncInventors: Ashish Bhardwaj, Amir Hosseini
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Patent number: 12056574Abstract: The present disclosure generally relates to compositions and devices for, e.g., hosting qubits, and processes of use. In an embodiment, a quantum device is provided. The quantum device includes a composition, the composition comprising a first component comprising a nanotube and a second component comprising a compound, the compound comprising a metal-bound cyclic tetrapyrrole, an ion thereof, or a combination thereof. In another embodiment, a process for controlling a quantum spin is provided. The process includes cooling a composition described herein to a temperature of about 1 K or more, applying a voltage to the composition, introducing a magnetic field to the composition, and introducing microwave radiation to the composition.Type: GrantFiled: October 14, 2021Date of Patent: August 6, 2024Assignee: Honda Motor Co., Ltd.Inventor: Avetik Harutyunyan
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Patent number: 12034055Abstract: A semiconductor device includes a substrate, a semiconductor channel layer, a semiconductor barrier layer, a gate electrode, a first electrode, a second electrode, a first dielectric layer and a second dielectric layer. The semiconductor channel layer is disposed on the substrate. The semiconductor barrier layer is disposed on the semiconductor channel layer. The gate electrode is disposed on the semiconductor barrier layer. The first electrode is disposed at one side of the gate electrode. The first electrode includes a body portion and a vertical extension portion. The second electrode is disposed at another side of the gate electrode. The second electrode includes a body portion and a vertical extension portion. The first dielectric layer is disposed between the vertical extension portion of the first electrode and the semiconductor channel layer. The second dielectric layer is disposed between the vertical extension portion of the second electrode and the semiconductor channel layer.Type: GrantFiled: December 14, 2022Date of Patent: July 9, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventor: Po-Yu Yang
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Patent number: 11978827Abstract: An optical device includes a multilayered GaAs structure including a plurality of sublayers and an optical structure layer on the multilayered GaAs structure, the optical structure layer including a Group III-V compound semiconductor material. The optical structure layer may be, for example, a light-emitting layer having a multi-quantum well structure.Type: GrantFiled: October 28, 2022Date of Patent: May 7, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Changyoung Park, Sanghun Lee
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Patent number: 11961931Abstract: A method of manufacturing a solar cell that includes providing a semiconductor growth substrate; depositing on said growth substrate a sequence of layers of semiconductor material forming a solar cell; applying a metal contact layer over said sequence of layers; affixing the adhesive polyimide surface of a permanent supporting substrate directly over said metal contact layer and permanently bonding it thereto by a thermocompressive technique; and removing the semiconductor growth substrate.Type: GrantFiled: August 17, 2022Date of Patent: April 16, 2024Assignee: SolAero Technologies CorpInventors: Arthur B. Cornfeld, Jeff Steinfeldt
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Patent number: 11906463Abstract: A sensing system and a method utilizing same for determining and/or monitoring a presence and/or level of an analyte in a sample are provided. The sensing system is made of a nanostructure, or a plurality of nanostructures, having covalently attached thereto and a hydrogel having associated therewith a sensing moiety which selectively interacts with the analyte and being configured such that upon contacting the analyte, the nanostructure(s) exhibit a detectable change in an electrical property.Type: GrantFiled: August 22, 2017Date of Patent: February 20, 2024Assignee: Ramot at Tel-Aviv University Ltd.Inventors: Fernando Patolsky, Vadim Krivitsky, Marina Zverzhinetsky
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Patent number: 11810955Abstract: Semiconductor structures and methods of forming semiconductor structures that inhibit the conductivity of parasitic channels are described. In one example, a semiconductor structure includes a semiconductor substrate and a III-nitride material region over a top surface of the semiconductor substrate. The semiconductor substrate includes a bulk region below the top surface and a parasitic channel that extends to a depth from the top surface toward the bulk region of the semiconductor substrate. The parasitic channel comprises a first region and a second region. The first region of the parasitic channel comprises an implanted species having a relative atomic mass of less than 5, and the second region of the parasitic channel is free from the implanted species or the implanted species is present in the second region at a concentration that is less than in the first region.Type: GrantFiled: January 14, 2022Date of Patent: November 7, 2023Assignee: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.Inventor: Kevin J. Linthicum
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Patent number: 11764270Abstract: A semiconductor device according to an embodiment includes: a silicon carbide layer; a silicon oxide layer; and a region disposed between the silicon carbide layer and the silicon oxide layer and having a nitrogen concentration equal to or more than 1×1021 cm?3. Nitrogen concentration distribution in the silicon carbide layer, the silicon oxide layer, and the region have a peak in the region, a nitrogen concentration at a position 1 nm away from the peak to the side of the silicon oxide layer is equal to or less than 1×1018 cm?3, and a carbon concentration at the position is equal to or less than 1×1018 cm?3.Type: GrantFiled: August 13, 2020Date of Patent: September 19, 2023Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Tatsuo Shimizu, Yukio Nakabayashi, Johji Nishio, Chiharu Ota, Toshihide Ito
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Patent number: 11742390Abstract: Fabrication methods and gallium nitride transistors, in which an electronic device includes a substrate, a buffer structure, a hetero-epitaxy structure over the buffer structure, and a transistor over or in the hetero-epitaxy structure. In one example, the buffer structure has an extrinsically carbon doped gallium nitride layer over a dual superlattice stack or over a multilayer composition graded aluminum gallium nitride stack, and a silicon nitride cap layer over the hetero-epitaxy structure.Type: GrantFiled: October 30, 2020Date of Patent: August 29, 2023Assignee: Texas Instruments IncorporatedInventors: Qhalid R S Fareed, Dong Seup Lee, Nicholas S. Dellas
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Patent number: 11630007Abstract: Pressure/strain piezoresistive are described that include a poled piezoelectric polymer such as PVDF or P(VDF-TrFE) and graphene. The poled piezoelectric polymer and the graphene are electronically coupled to form a heterojunction and provide an ultra-high sensitivity pressure/strain sensor. The sensors can be carried on a flexible supporting substrate such as PDMS or PET to exhibit high flexibility. The materials of formation can be biocompatible and the sensors can be wearable or implantable.Type: GrantFiled: June 23, 2020Date of Patent: April 18, 2023Assignee: Clemson UniversityInventors: Soaram Kim, Goutam Koley, Yongchang Dong, Apparao M. Rao
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Patent number: 11571695Abstract: The present disclosure provides a device for separating biomolecules comprising a substrate having a planar surface, nanowires disposed on at least a portion of the planar surface, and a fluid chamber formed to include at least a portion of the nanowires.Type: GrantFiled: July 5, 2019Date of Patent: February 7, 2023Assignee: Craif Inc.Inventors: Takao Yasui, Yoshinobu Baba
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Patent number: 11527865Abstract: An optoelectronic semiconductor device includes a semiconductor body in which an active layer configured to generate or detect electromagnetic radiation, a first interlayer and a p-conducting contact layer are formed, and a connection layer applied to the semiconductor body, wherein the contact layer is disposed between the first interlayer and the connection layer and adjoins the connection layer, the active layer is arranged on a side of the first interlayer remote from the contact layer, the first interlayer and the contact layer are based on a nitride compound semiconductor, the contact layer is doped with a p-dopant, the contact layer has a thickness of at most 50 nm, and the contact layer includes a lower aluminum content than the first interlayer.Type: GrantFiled: August 10, 2018Date of Patent: December 13, 2022Assignee: OSRAM OLED GmbHInventors: Matthias Peter, Teresa Wurm, Christoph Eichler
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Patent number: 11527562Abstract: Techniques for realizing compound semiconductor (CS) optoelectronic devices on silicon (Si) substrates are disclosed. The integration platform is based on heteroepitaxy of CS materials and device structures on Si by direct heteroepitaxy on planar Si substrates or by selective area heteroepitaxy on dielectric patterned Si substrates. Following deposition of the CS device structures, device fabrication steps can be carried out using Si complimentary metal-oxide semiconductor (CMOS) fabrication techniques to enable large-volume manufacturing. The integration platform can enable manufacturing of optoelectronic module devices including photodetector arrays for image sensors and vertical cavity surface emitting laser arrays.Type: GrantFiled: June 7, 2022Date of Patent: December 13, 2022Assignee: Aeluma, Inc.Inventor: Jonathan Klamkin
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Patent number: 11450754Abstract: Semiconductor devices using a dielectric structure and methods of manufacturing are described herein. The semiconductor devices are directed towards gate-all-around (GAA) devices that are formed over a substrate and are isolated from one another by the dielectric structure. The dielectric structure is formed over the fin between two GAA devices and cuts a gate electrode that is formed over the fin into two separate gate electrodes. The two GAA devices are also formed with bottom spacers underlying source/drain regions of the GAA devices. The bottom spacers isolate the source/drain regions from the substrate. The dielectric structure is formed with a shallow bottom that is located above the bottoms of the bottom spacers.Type: GrantFiled: May 11, 2020Date of Patent: September 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Zhi-Chang Lin, Shih-Cheng Chen, Lo-Heng Chang, Jung-Hung Chang, Kuo-Cheng Chiang
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Patent number: 11444172Abstract: Examples of a method for producing a semiconductor device includes: forming a barrier layer having a composition of InAlN or InAlGaN over a channel layer; forming a transition layer having a composition of InGaN on the barrier layer while raising a growth temperature; and forming a cap layer of GaN on the transition layer.Type: GrantFiled: December 1, 2017Date of Patent: September 13, 2022Assignee: Mitsubishi Electric CorporationInventor: Atsushi Era
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Patent number: 10563424Abstract: A dual authentication system of an electronic locking device using an electronic key according to an exemplary embodiment of the present invention includes a receiving unit that receives UID data pre-stored in the electronic key and encoding data generated by an input of a button provided in the electronic key, when a terminal portion provided in a key head of the electronic key is in electrical contact with a data communication unit of the electronic locking device; an authentication unit that performs dual authentication based on the UID data and the encoding data; and a command unit that commands the unlocking of the electronic locking device when the dual authentication on the UID data and the encoding data is successfully performed.Type: GrantFiled: June 9, 2016Date of Patent: February 18, 2020Inventor: Bum Soo Kim
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Patent number: 9799154Abstract: The invention relates to an electronic key (32) having at least two contacts (324, 325, 326) for the transmission of data and/or energy to an electronic lock (16). In accordance with the invention, the housing (321) of the electronic key (32) comprises an input device (33) for the entry of an authorization code (36). The invention also relates to an electronic closure system with an electronic key (32) and an electronic lock (16) as well as to a method for secure acquisition of an access authorization or for secure delivery of a key to at least one user (22) by means of an electronic lock (16) and at least one electronic key (32) carried by the user (22).Type: GrantFiled: October 27, 2014Date of Patent: October 24, 2017Assignee: Lock Your World GmbH & Co. KGInventors: Manuela Engel-Dahan, Ralf Knobling, Thilo Meisel
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Patent number: 9040331Abstract: In accordance with an embodiment, a diode comprises a substrate, a dielectric material including an opening that exposes a portion of the substrate, the opening having an aspect ratio of at least 1, a bottom diode material including a lower region disposed at least partly in the opening and an upper region extending above the opening, the bottom diode material comprising a semiconductor material that is lattice mismatched to the substrate, a top diode material proximate the upper region of the bottom diode material, and an active diode region between the top and bottom diode materials, the active diode region including a surface extending away from the top surface of the substrate.Type: GrantFiled: July 20, 2012Date of Patent: May 26, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Anthony J. Lochtefeld
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Patent number: 8999793Abstract: A Multi-Gate Field-Effect Transistor includes a fin-shaped structure, a gate structure, at least an epitaxial structure and a gradient cap layer. The fin-shaped structure is located on a substrate. The gate structure is disposed across a part of the fin-shaped structure and the substrate. The epitaxial structure is located on the fin-shaped structure beside the gate structure. The gradient cap layer is located on each of the epitaxial structures. The gradient cap layer is a compound semiconductor, and the concentration of one of the ingredients of the compound semiconductor has a gradient distribution decreasing from inner to outer. Moreover, the present invention also provides a Multi-Gate Field-Effect Transistor process forming said Multi-Gate Field-Effect Transistor.Type: GrantFiled: June 17, 2014Date of Patent: April 7, 2015Assignee: United Microelectronics Corp.Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
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Patent number: 8987782Abstract: There is provided a compound semiconductor wafer that is suitably used to form a plurality of different types of devices such as an HBT and an FET thereon. The semiconductor wafer includes a first semiconductor, a carrier-trapping layer that is formed on the first semiconductor and has an electron-trapping center or a hole-trapping center, a second semiconductor that is epitaxially grown on the carrier-trapping layer and serves as a channel in which a free electron or a free hole moves, and a third semiconductor including a stack represented by n-type semiconductor/p-type semiconductor/n-type semiconductor or represented by p-type semiconductor/n-type semiconductor/p-type semiconductor, where the stack is epitaxially grown on the second semiconductor.Type: GrantFiled: October 5, 2011Date of Patent: March 24, 2015Assignee: Sumitomo Chemical Company, LimitedInventor: Osamu Ichikawa
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Patent number: 8975674Abstract: A bridge structure for use in a semiconductor device includes a semiconductor substrate and a semiconductor structure layer. The semiconductor structure layer is formed on a surface of the semiconductor substrate and a lattice difference is formed between the semiconductor structure layer and the semiconductor substrate. The semiconductor structure layer includes at least a first block, at least a second block and at least a third block, wherein the first block and the third block are bonded on the surface of the semiconductor substrate, the second block is floated over the semiconductor substrate and connected with the first block and the third block.Type: GrantFiled: November 9, 2012Date of Patent: March 10, 2015Assignee: National Applied Research LaboratoriesInventors: Chun-Lin Chu, Shu-Han Hsu, Guang-Li Luo, Chee-Wee Liu
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Patent number: 8963151Abstract: A high efficiency HFET may include a substrate, a semi-insulating gallium nitride (GaN) layer formed on the substrate, an aluminum gallium nitride (AlGaN) layer formed on the GaN layer, and a silicon carbide (SixC1-x) functional layer formed on the AlGaN layer.Type: GrantFiled: September 6, 2011Date of Patent: February 24, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Jae Hoon Lee, Ki Se Kim
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Patent number: 8884268Abstract: The present disclosure is directed to an integrated circuit and its formation. In some embodiments, the integrated circuit includes a diffusion barrier layer. The diffusion barrier layer can be arranged to prevent diffusion of the Si and O2 from a Si substrate into a Group III nitride layer. The diffusion barrier layer can comprise Al2O3. In some embodiments, the integrated circuit further comprises a lattice-matching structure disposed between the silicon substrate and a Group III nitride layer.Type: GrantFiled: July 16, 2012Date of Patent: November 11, 2014Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chi-Ming Chen, Han-Chin Chiu, Chung-Yi Yu, Chia-Shiung Tsai
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Patent number: 8853744Abstract: Some exemplary embodiments of a III-nitride power device including a HEMT with multiple interconnect metal layers and a solderable front metal structure using solder bars for external circuit connections have been disclosed. The solderable front metal structure may comprise a tri-metal such as TiNiAg, and may be configured to expose source and drain contacts of the HEMT as alternating elongated digits or bars. Additionally, a single package may integrate multiple such HEMTs wherein the front metal structures expose alternating interdigitated source and drain contacts, which may be advantageous for DC-DC power conversion circuit designs using III-nitride devices. By using solder bars for external circuit connections, lateral conduction is enabled, thereby advantageously reducing device Rdson.Type: GrantFiled: March 14, 2013Date of Patent: October 7, 2014Assignee: International Rectifier CorporationInventors: Chuan Cheah, Michael A. Briere
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Patent number: 8816391Abstract: An integrated circuit structure includes a substrate, and a channel over the substrate. The channel includes a first III-V compound semiconductor material formed of group III and group V elements. A gate structure is over the channel. A source/drain region is adjacent the channel and includes a group-IV region formed of a doped group-IV semiconductor material selected from the group consisting essentially of silicon, germanium, and combinations thereof.Type: GrantFiled: November 10, 2009Date of Patent: August 26, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Hsin Ko, Clement Hsingjen Wann
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Patent number: 8796054Abstract: A direct wafer bonding process for joining GaN and silicon substrates involves pre-treating each of the wafers in an ammonia plasma in order to render the respective contact surfaces ammophilic. The GaN substrate and the silicon substrate may each comprise single crystal wafers. The resulting hybrid semiconductor structure can be used to form high quality, low cost LEDs.Type: GrantFiled: May 31, 2012Date of Patent: August 5, 2014Assignee: Corning IncorporatedInventor: Alexander Usenko
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Patent number: 8754393Abstract: A method of fabricating a semiconductor device is disclosed. A first contact layer of the semiconductor device is fabricated. An electrical connection is formed between a carbon nanotube and the first contact layer by electrically coupling of the carbon nanotube and a second contact layer. The first contact layer and second contact layer may be electrically coupled.Type: GrantFiled: August 14, 2012Date of Patent: June 17, 2014Assignee: International Business Machines CorporationInventors: Qing Cao, Aaron D. Franklin, Joshua T. Smith
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Publication number: 20140131768Abstract: A bridge structure for use in a semiconductor device includes a semiconductor substrate and a semiconductor structure layer. The semiconductor structure layer is formed on a surface of the semiconductor substrate and a lattice difference is formed between the semiconductor structure layer and the semiconductor substrate. The semiconductor structure layer includes at least a first block, at least a second block and at least a third block, wherein the first block and the third block are bonded on the surface of the semiconductor substrate, the second block is floated over the semiconductor substrate and connected with the first block and the third block.Type: ApplicationFiled: November 9, 2012Publication date: May 15, 2014Applicant: National Applied Research LaboratoriesInventors: Chun-Lin Chu, Shu-Han Hsu, Guang-Li Luo, Chee-Wee Liu
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Patent number: 8716695Abstract: A method of fabricating a FET device is provided which includes the following steps. Nanowires/pads are formed in a SOI layer over a BOX layer, wherein the nanowires are suspended over the BOX. A HSQ layer is deposited that surrounds the nanowires. A portion(s) of the HSQ layer that surround the nanowires are cross-linked, wherein the cross-linking causes the portion(s) of the HSQ layer to shrink thereby inducing strain in the nanowires. One or more gates are formed that retain the strain induced in the nanowires. A FET device is also provided wherein each of the nanowires has a first region(s) that is deformed such that a lattice constant in the first region(s) is less than a relaxed lattice constant of the nanowires and a second region(s) that is deformed such that a lattice constant in the second region(s) is greater than the relaxed lattice constant of the nanowires.Type: GrantFiled: June 21, 2013Date of Patent: May 6, 2014Assignee: International Business Machines CorporationInventors: Guy Cohen, Michael A. Guillorn, Conal E. Murray
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Patent number: 8685841Abstract: The present invention is directed to a novel synthetic method for producing nanoscale heterostructures, and particularly nanoscale heterostructure particles, rods and sheets, that comprise a metal core and a monocrystalline semiconductor shell with substantial lattice mismatches between them. More specifically, the invention concerns the use of controlled soft acid-base coordination reactions between molecular complexes and colloidal nanostructures to drive the nanoscale monocrystalline growth of the semiconductor shell with a lattice structure incommensurate with that of the core. The invention also relates to more complex hybrid core-shell structures that exhibit azimuthal and radial nano-tailoring of structures. The invention is additionally directed to the use of such compositions in semiconductor devices.Type: GrantFiled: March 23, 2012Date of Patent: April 1, 2014Assignee: University of Maryland College ParkInventors: Jiatao Zhang, Yun Tang, Min Ouyang
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Publication number: 20140084239Abstract: Non-planar semiconductor devices having channel regions with low band-gap cladding layers are described. For example, a semiconductor device includes a vertical arrangement of a plurality of nanowires disposed above a substrate. Each nanowire includes an inner region having a first band gap and an outer cladding layer surrounding the inner region. The cladding layer has a second, lower band gap. A gate stack is disposed on and completely surrounds the channel region of each of the nanowires. The gate stack includes a gate dielectric layer disposed on and surrounding the cladding layer and a gate electrode disposed on the gate dielectric layer. Source and drain regions are disposed on either side of the channel regions of the nanowires.Type: ApplicationFiled: September 27, 2012Publication date: March 27, 2014Inventors: Marko Radosavljevic, Gilbert Dewey, Benjamin Chu-Kung, Dipanjan Basu, Sanaz K. Gardner, Satyarth Suri, Ravi Pillarisetty, Niloy Mukherjee, Han Wui Then, Robert S. Chau
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Publication number: 20140053894Abstract: A method of fabricating a solar cell on a silicon substrate includes providing a crystalline silicon substrate, selecting a grading profile, epitaxially growing a template on the silicon substrate including a single crystal GeSn layer using the grading profile to grade Sn through the layer. The single crystal GeSn layer has a thickness in a range of approximately 3 ?m to approximately 5 ?m. At least two layers of high band gap material are epitaxially and sequentially grown on the template to form at least three junctions. The grading profile starts with the Sn at or near zero with the Ge at zero, the percentage of Sn varies to a maximum mid-area, and reduces the percentage of Sn to zero adjacent an upper surface.Type: ApplicationFiled: August 23, 2012Publication date: February 27, 2014Inventors: Radek Roucka, Michael Lebby, Scott Semans
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Patent number: 8653616Abstract: It is aimed to provide a photoelectric conversion device having high adhesion between a first semiconductor layer and an electrode layer as well as high photoelectric conversion efficiency. A photoelectric conversion device comprises an electrode layer, a first semiconductor layer located on the electrode layer and comprising a chalcopyrite-based compound semiconductor of group I-III-VI and oxygen, and a second semiconductor layer located on the first semiconductor layer and forming a pn junction with the first semiconductor layer. In the photoelectric conversion device, the first semiconductor layer has a higher molar concentration of oxygen in a part located on the electrode layer side with respect to a center portion in a lamination direction of the first semiconductor layer than a molar concentration of oxygen in the whole of the first semiconductor layer.Type: GrantFiled: June 28, 2011Date of Patent: February 18, 2014Assignee: KYOCERA CorporationInventors: Rui Kamada, Shuichi Kasai
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Patent number: 8633514Abstract: A group III nitride semiconductor device and a group III nitride semiconductor wafer are provided. The group III nitride semiconductor device has a channel layer comprising group III nitride-based semiconductor containing Al. The group III nitride semiconductor device can enhance the mobility of the two-dimensional electron gas and improve current characteristics. The group III nitride semiconductor wafer is used to make the group III nitride semiconductor device. The group III nitride semiconductor wafer comprises a substrate made of AlXGa1-XN (0<X?1), a first AlGaN layer made of group III nitride-based semiconductor containing Al and disposed on the substrate, and a second AlGaN layer made of group III nitride-based semiconductor having a bandgap greater than the first AlGaN layer and disposed thereon. The full width at half maximum values of X-ray rocking curves for (0002) and (10-12) planes of the first AlGaN layer are less than 1000 arcseconds.Type: GrantFiled: March 1, 2012Date of Patent: January 21, 2014Assignee: Sumitomo Electric Industries, Ltd.Inventors: Shin Hashimoto, Tatsuya Tanabe, Katsushi Akita, Hideaki Nakahata, Hiroshi Amano
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Patent number: 8633471Abstract: Embodiments of an apparatus and methods for providing three-dimensional complementary metal oxide semiconductor devices comprising modulation doped transistors are generally described herein. Other embodiments may be described and claimed, which may include a modulation doped heterostructure, wherein the modulation doped heterostructure may comprise an active portion having a first bandgap and a delta doped portion having a second bandgap.Type: GrantFiled: February 23, 2011Date of Patent: January 21, 2014Assignee: Intel CorporationInventors: Ravi Pillarisetty, Mantu Hudait, Marko Radosavljevic, Willy Rachmady, Gilbert Dewey, Jack Kavalieros
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Patent number: 8633466Abstract: A compound semiconductor device includes: a substrate; a first compound semiconductor layer formed over the substrate; a second compound semiconductor layer formed over the first compound semiconductor layer; and an upper electrode formed over the first compound semiconductor layer, wherein two-dimensional hole gas is generated in a region of the first compound semiconductor layer, the region being located at an interface between the first compound semiconductor layer and the second compound semiconductor layer, so as to have a hole concentration that decreases with increasing distance from the upper electrode.Type: GrantFiled: February 13, 2012Date of Patent: January 21, 2014Assignee: Fujitsu LimitedInventor: Naoya Okamoto
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Publication number: 20140014967Abstract: The present disclosure is directed to an integrated circuit and its formation. In some embodiments, the integrated circuit includes a diffusion barrier layer. The diffusion barrier layer can be arranged to prevent diffusion of the Si and O2 from a Si substrate into a Group III nitride layer. The diffusion barrier layer can comprise Al2O3. In some embodiments, the integrated circuit further comprises a lattice-matching structure disposed between the silicon substrate and a Group III nitride layer.Type: ApplicationFiled: July 16, 2012Publication date: January 16, 2014Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chi-Ming Chen, Han-Chin Chiu, Chung-Yi Yu, Chia-Shiung Tsai
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Patent number: 8629478Abstract: A vertical fin structure for a semiconductor transistor includes a semiconductor substrate, a fin layer on top of the substrate, a capping layer overlaying the fin layer, wherein the substrate comprises group IV semiconductor material, the fin layer comprises group IV semiconductor material, the capping layer comprises semiconductor compound from group III-V. The fin layer can comprise Ge, SiGe, SiC, or any combinations thereof. The semiconductor substrate can comprise Si, Ge, SiGe, or SiC. The capping layer can comprise GaAs, InGaAs, InAs, InSb, GaSb, GaN, InP, or any combinations thereof. The capping layer can provide more than a 4 percent lattice mismatch with the semiconductor substrate. The fin layer can be located in between shallow trench insulation (STI) layers that provide isolation from adjacent devices. The vertical fin structure can further include a high-k dielectric layer overlaying the capping layer and a metal gate layer overlaying the high-k dielectric layer.Type: GrantFiled: June 10, 2010Date of Patent: January 14, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Hsin Ko, Clement Hsingjen Wann
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Patent number: 8618556Abstract: An integrated circuit device and method for manufacturing the same are disclosed. An exemplary device includes a semiconductor substrate having a substrate surface and a trench isolation structure disposed in the semiconductor substrate for isolating an NMOS region of the device and from a PMOS region of the device. The device further includes a first fin structure comprising silicon or SiGe disposed over a layer of III-V semiconductor material having a high band gap energy and a lattice constant greater than that of Ge; a second fin structure comprising silicon or SiGe disposed over a layer of III-V semiconductor material having a high band gap energy and a lattice constant smaller than that of Ge; and a gate structure disposed over and arranged perpendicular to the first and second fin structures.Type: GrantFiled: June 30, 2011Date of Patent: December 31, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Hsien Wu, Chih-Hsin Ko, Yao-Tsung Huang, Clement Hsingjen Wann
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Publication number: 20130320404Abstract: A direct wafer bonding process for joining GaN and silicon substrates involves pre-treating each of the wafers in an ammonia plasma in order to render the respective contact surfaces ammophilic. The GaN substrate and the silicon substrate may each comprise single crystal wafers. The resulting hybrid semiconductor structure can be used to form high quality, low cost LEDs.Type: ApplicationFiled: May 31, 2012Publication date: December 5, 2013Inventor: Alexander Usenko
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Patent number: 8558285Abstract: A method for fabricating an electronic device, comprising wafer bonding a first semiconductor material to a III-nitride semiconductor, at a temperature below 550° C., to form a device quality heterojunction between the first semiconductor material and the III-nitride semiconductor, wherein the first semiconductor material is different from the III-nitride semiconductor and is selected for superior properties, or preferred integration or fabrication characteristics in the injector region as compared to the III-nitride semiconductor.Type: GrantFiled: March 23, 2011Date of Patent: October 15, 2013Assignee: The Regents of the University of CaliforniaInventors: Umesh K. Mishra, Lee S. McCarthy
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Publication number: 20130256760Abstract: A method for forming a conformal group III/V layer on a silicon substrate and the resulting substrate with the group III/V layers formed thereon. The method includes removing the native oxide from the substrate, positioning a substrate within a processing chamber, heating the substrate to a first temperature, cooling the substrate to a second temperature, flowing a group III precursor into the processing chamber, maintaining the second temperature while flowing a group III precursor and a group V precursor into the processing chamber until a conformal layer is formed, heating the processing chamber to an annealing temperature, while stopping the flow of the group III precursor, and cooling the processing chamber to the second temperature. Deposition of the III/V layer may be made selective through the use of halide gas etching which preferentially etches dielectric regions.Type: ApplicationFiled: March 30, 2012Publication date: October 3, 2013Applicant: APPLIED MATERIALS, INC.Inventors: Xinyu Bao, Errol Antonio C. Sanchez, David K. Carlson, Zhiyuan Ye
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Publication number: 20130256629Abstract: Graphene semiconductor device, a method of manufacturing a graphene semiconductor device, an organic light emitting display and a memory, include forming a multilayered member including a sacrificial substrate, a sacrificial layer, and a semiconductor layer deposited in sequence, forming a transfer substrate on the semiconductor layer, forming a first laminate including the transfer substrate and the semiconductor layer by removing the sacrificial layer to separate the sacrificial substrate from the semiconductor layer, forming a second laminate by forming a graphene layer on a base substrate, combining the first laminate and the second laminate such that the semiconductor layer contacts the graphene layer, and removing the transfer substrate.Type: ApplicationFiled: June 14, 2012Publication date: October 3, 2013Applicant: Samsung Electronics Co., Ltd.Inventors: Chang Seung LEE, Young Bae KIM, Young Jun YUN, Yong Sung KIM, David SEO, Joo Ho LEE
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Patent number: 8507952Abstract: To improve the flatness of the surface and improve the reliability of a semiconductor device when expitaxially growing semiconductor crystal layers of different types on a single silicon wafer, provided is a semiconductor wafer which includes: a base wafer having a silicon crystal in the surface thereof, the silicon crystal having a first dent and a second dent; a first Group IVB semiconductor crystal located in the first dent and exposed; a second Group IVB semiconductor crystal located in the second dent; and a Group III-V compound semiconductor crystal located above the second Group IVB semiconductor crystal in the second dent and exposed.Type: GrantFiled: June 13, 2012Date of Patent: August 13, 2013Assignee: Sumitomo Chemical Company, LimitedInventors: Sadanori Yamanaka, Tomoyuki Takada, Masahiko Hata
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Patent number: 8492771Abstract: A semiconductor device includes a first semiconductor substrate of a first band-gap material and a second semiconductor substrate of a second band-gap material. The second band-gap material has a lower band-gap than the first band-gap material. A heterojunction is formed between the first semiconductor substrate and the second semiconductor substrate substantially in a first plane. The semiconductor device further includes, in a cross-section which is perpendicular to the first plane, a first semiconductor region of a first conductivity type and a second semiconductor region of the first conductivity type both of which extend from the second semiconductor substrate at least partially into the first semiconductor substrate.Type: GrantFiled: September 27, 2007Date of Patent: July 23, 2013Assignee: Infineon Technologies Austria AGInventors: Michael Rüb, Michael Treu, Armin Willmeroth, Franz Hirler
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Publication number: 20130161637Abstract: Embodiments relate to semiconductor structures and methods of forming semiconductor structures. The semiconductor structures include a substrate layer having a CTE that closely matches a CTE of one or more layers of semiconductor material formed over the substrate layer. In some embodiments, the substrate layers may comprise a composite substrate material including two or more elements. The substrate layers may comprise a metal material and/or a ceramic material in some embodiments.Type: ApplicationFiled: December 23, 2011Publication date: June 27, 2013Applicant: SOITECInventors: Christiaan J. Werkhoven, Chantal Arena
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Patent number: 8441036Abstract: A trench is formed extending from a surface of a hetero semiconductor region of a polycrystal silicon to the drain region. Further, a driving point of the field effect transistor, where a gate insulating film, the hetero semiconductor region and the drain region are adjoined, is formed at a position spaced apart from a side wall of the trench.Type: GrantFiled: March 15, 2007Date of Patent: May 14, 2013Assignee: Nissan Motor Co., Ltd.Inventors: Yoshio Shimoida, Tetsuya Hayashi, Hideaki Tanaka, Shigeharu Yamagami, Masakatsu Hoshi
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Patent number: 8426892Abstract: A compound semiconductor device has a buffer layer formed on a conductive SiC substrate, an AlxGa1-xN layer formed on the buffer layer in which an impurity for reducing carrier concentration from an unintentionally doped donor impurity is added and in which the Al composition x is 0<x<1, a GaN-based carrier transit layer formed on the AlxGa1-xN layer, a carrier supply layer formed on the carrier transit layer, a source electrode and a drain electrode formed on the carrier supply layer, and a gate electrode formed on the carrier supply layer between the source electrode and the drain electrode. Therefore, a GaN-HEMT that is superior in device characteristics can be realized in the case of using a relatively less expensive conductive SiC substrate compared with a semi-insulating SiC substrate.Type: GrantFiled: February 20, 2008Date of Patent: April 23, 2013Assignee: Fujitsu LimitedInventors: Kenji Imanishi, Toshihide Kikkawa