For Thin Film Transistors With Insulated Gate (epo) Patents (Class 257/E29.117)
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Patent number: 8471259Abstract: Disclosed is a display device and an electronic apparatus incorporating the display device. The display device includes a transistor and a planarization film over the transistor. The planarization film has an opening where an edge portion is rounded. The display device further includes a first electrode over the planarization film and an organic resin film over the first electrode. The organic resin film also has an opening where an edge portion is rounded. The organic resin film is located in the opening of the planarization film. The first electrode and the transistor are electrically connected to each other through a conductive film. The first electrode is in contact with a top surface of the conductive film. Over the first electrode, a light-emitting member and a second electrode are provided.Type: GrantFiled: June 25, 2012Date of Patent: June 25, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Satoshi Murakami, Mitsuaki Osame
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Patent number: 8471255Abstract: Provided is a thin film transistor, wherein the on-off ratio thereof is increased by decreasing the OFF current thereof. A bottom-gate TFT (10) is provided with a channel layer (40) obtained by forming a second silicon layer (35) on a first silicon layer (30). Since amorphous silicon regions (32), which surround multiple grains (31) contained in the first silicon layer (30), contain hydrogen in an amount sufficient to enable termination of dangling bonds, most of dangling bonds in the amorphous silicon region (32) are terminated by hydrogen. For this reason, it becomes less likely to have defect levels formed in the amorphous silicon regions (32), and an OFF current that flows through defect levels is therefore decreased. A high number of the grains (31) are retained in the first silicon layer (30), and cause a large ON current to flow. Consequently, the on-off ratio of the TFT (10) is increased.Type: GrantFiled: April 14, 2010Date of Patent: June 25, 2013Assignee: Sharp Kabushiki KaishaInventor: Tohru Okabe
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Patent number: 8471256Abstract: Disclosed is a semiconductor device comprising a thin film transistor and wirings connected to the thin film transistor, in which the thin film transistor has a channel formation region in an oxide semiconductor layer, and a copper metal is used for at least one of a gate electrode, a source electrode, a drain electrode, a gate wiring, a source wiring, and a drain wiring. The extremely low off current of the transistor with the oxide semiconductor layer contributes to reduction in power consumption of the semiconductor device. Additionally, the use of the copper metal allows the combination of the semiconductor device with a display element to provide a display device with high display quality and negligible defects, which results from the low electrical resistance of the wirings and electrodes formed with the copper metal.Type: GrantFiled: November 24, 2010Date of Patent: June 25, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Miyuki Hosoba, Suzunosuke Hiraishi
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Patent number: 8466465Abstract: Disclosed is a thin film transistor which has an oxide semiconductor as an activation layer, a method of manufacturing the same and a flat panel display device having the same. The thin film transistor includes an oxide semiconductor layer formed on a substrate and including a channel region, a source region and a drain region, a gate electrode insulated from the oxide semiconductor layer by a gate insulating film, and source electrode and drain electrode which are coupled to the source region and the drain region, respectively. The oxide semiconductor layer includes a first layer portion and a second layer portion. The first layer portion has a first thickness and a first carrier concentration, and the second layer portion has a second thickness and a second carrier concentration. The second carrier concentration is lower than the first carrier concentration.Type: GrantFiled: March 23, 2009Date of Patent: June 18, 2013Assignee: Samsung Display Co., Ltd.Inventors: Jong-Han Jeong, Tae-Kyung Ahn, Jae-Kyeong Jeong, Jin-Sung Park, Hun-Jung Lee, Hyun-Soo Shin, Yeon-Gon Mo
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Patent number: 8461591Abstract: An organic light emitting display device with a simplified manufacturing process and improved electrical characteristics, along with a method of manufacturing the device, are disclosed. The device includes: a substrate having a display area and a non-display area; a thin film transistor (TFT) in the display area; a wiring portion in the non-display area; an intermediate layer electrically connected to the TFT and including an organic light emitting layer; and a counter electrode on the intermediate layer. The TFT includes an active layer, a gate electrode, and source/drain electrodes electrically connected to the active layer. The source/drain electrodes include a first conductive layer, a second conductive layer, and a third conductive layer that are sequentially stacked. The wiring portion includes the same material as the first conductive layer. One of the source/drain electrodes is longer than the other, to function as a pixel electrode, and is electrically connected to the intermediate layer.Type: GrantFiled: November 24, 2010Date of Patent: June 11, 2013Assignee: Samsung Display Co., Ltd.Inventors: Yul-Kyu Lee, Chun-Gi You, Sun Park, Jong-Hyun Park, Jin-Hee Kang
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Patent number: 8461596Abstract: The present invention has an object to provide an active-matrix liquid crystal display device that realizes the improvement in productivity as well as in yield. In the present invention, a laminate film comprising the conductive film comprising metallic material and the second amorphous semiconductor film containing an impurity element of one conductivity type and the amorphous semiconductor film is selectively etched with the same etching gas to form a side edge of the first amorphous semiconductor film 1001 into a taper shape. Thereby, a coverage problem of a pixel electrode 1003 can be solved and an inverse stagger type TFT can be completed with three photomask.Type: GrantFiled: November 3, 2011Date of Patent: June 11, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hideomi Suzawa, Yoshihiro Kusuyama, Shunpei Yamazaki
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Patent number: 8445902Abstract: Provided are a coplanar structure thin film transistor that allows a threshold voltage to change only a little under electric stress, and a method of manufacturing the same. The thin film transistor includes on a substrate at least: a gate electrode; a gate insulating layer; an oxide semiconductor layer including a source electrode, a drain electrode, and a channel region; a channel protection layer; and an interlayer insulating layer. The channel protection layer includes one or more layers, the layer in contact with the oxide semiconductor layer among the one or more layers being made of an insulating material containing oxygen, ends of the channel protection layer are thinner than a central part of the channel protection layer, the interlayer insulating layer contains hydrogen, and regions of the oxide semiconductor layer that are in direct contact with the interlayer insulating layer form the source electrode and the drain electrode.Type: GrantFiled: April 28, 2009Date of Patent: May 21, 2013Assignee: Canon Kabushiki KaishaInventors: Ayumu Sato, Ryo Hayashi, Hisato Yabuta, Masafumi Sano
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Patent number: 8441012Abstract: The present invention provides an array substrate, a method for manufacturing an array substrate, and a display device which are such that reflow failure of a resist mask does not occur readily at the time of manufacture of the array substrate, so the array substrate can be manufactured reliably. At the time of forming a TFT, third wiring 37 between source wiring 13 and the source electrode 22 of the TFT is provided with a narrow portion 38 that is formed with a narrow width by narrowing a midpoint at a portion of the wiring in planar shape, and the resist film on the source electrode 22 and a drain electrode 23 is reflowed so as to cover the surface of a channel region Q, thus forming a reflowed resist film 42. A semiconductor film 20 is etched using this as the etching mask in a state in which the area between the source and the drain is protected, thus making the semiconductor film 20 into an island shape.Type: GrantFiled: June 8, 2010Date of Patent: May 14, 2013Assignee: Sharp Kabushiki KaishaInventor: Makoto Juhmonji
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Patent number: 8421135Abstract: In a display device such as a liquid crystal display device, a large-sized display screen is realized under low power consumption. A surface of a source wiring line of a pixel portion employed in an active matrix type liquid crystal display device is processed by way of a plating process operation so as to lower a resistance value of this source wiring line. The source wiring line of the pixel portion is manufactured at a step different from a step for manufacturing a source wiring line of a drive circuit portion. Further, electrodes of a terminal portion are processed by a plating process operation so as to reduce a resistance value thereof.Type: GrantFiled: November 26, 2008Date of Patent: April 16, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Hideaki Kuwabara, Saishi Fujikawa
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Patent number: 8415667Abstract: One object is to provide a p-channel transistor including an oxide semiconductor. Another object is to provide a complementary metal oxide semiconductor (CMOS) structure of an n-channel transistor including an oxide semiconductor and a p-channel transistor including an oxide semiconductor. A p-channel transistor including an oxide semiconductor includes a gate electrode layer, a gate insulating layer, an oxide semiconductor layer, and a source and drain electrode layers in contact with the oxide semiconductor layer. When the electron affinity and the band gap of an oxide semiconductor used for the oxide semiconductor layer in the semiconductor device, respectively, are ? (eV) and Eg (eV), the work function (?m) of the conductor used for the source electrode layer and the drain electrode layer satisfies ?m>?+Eg/2 and the barrier for holes (?Bp) represented by (?+Eg??m) is less than 0.25 eV.Type: GrantFiled: December 1, 2010Date of Patent: April 9, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Daisuke Kawae, Hiromichi Godo
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Patent number: 8405081Abstract: An organic thin field transistor is disclosed. The organic thin field transistor includes a first and a second insulting layers, a metal structure and an organic layer serving as an active layer. Materials of the first and the second insulting layers are different, and by performing an etching process, a surface of the metal structure and a surface of the second insulting layer are effectively aligned. Because of the high flatness of the surface of the metal structure and the second insulting layer, a continuous film-forming property and crystallinity of the active layer of the organic thin field transistor are improved, so as to achieve a better the electrical characteristic.Type: GrantFiled: March 31, 2011Date of Patent: March 26, 2013Assignee: National Taiwan University of Science and TechnologyInventors: Ching-Lin Fan, Yu-Zuo Lin, Chao-Hung Huang
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Patent number: 8405085Abstract: A thin film transistor includes a gate, a pair of electrodes, a first semiconductor layer disposed between the gate and the pair of electrodes, and a semiconductor stacked layer disposed between the first semiconductor layer and the pair of the electrodes. The semiconductor stacked layer includes a second semiconductor layer disposed adjacent to the pair of electrodes and at least one pair of semiconductor layers including a third semiconductor layer and a fourth semiconductor layer, the third semiconductor layer being sandwiched between the second semiconductor layer and the fourth semiconductor layer. In particular, the electric conductivity of the third semiconductor layer is substantially smaller than the electric conductivity of the second semiconductor layer and the electric conductivity of the fourth semiconductor layer.Type: GrantFiled: December 1, 2010Date of Patent: March 26, 2013Assignee: Au Optronics CorporationInventors: Wen-Shin Wu, Chun-Yao Huang, Hsin-Hua Lin
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Patent number: 8399313Abstract: A gate electrode is formed by forming a first conductive layer containing aluminum as its main component over a substrate, forming a second conductive layer made from a material different from that used for forming the first conductive layer over the first conductive layer; and patterning the first conductive layer and the second conductive layer. Further, the first conductive layer includes one or more selected from carbon, chromium, tantalum, tungsten, molybdenum, titanium, silicon, and nickel. And the second conductive layer includes one or more selected from chromium, tantalum, tungsten, molybdenum, titanium, silicon, and nickel, or nitride of these materials.Type: GrantFiled: July 19, 2011Date of Patent: March 19, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Kengo Akimoto, Hotaka Maruyama
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Patent number: 8383470Abstract: One of factors that increase the contact resistance at the interface between a first semiconductor layer where a channel is formed and source and drain electrode layers is a film with high electric resistance formed by dust or impurity contamination of a surface of a metal material serving as the source and drain electrode layers. As a solution, a first protective layer and a second protective layer including a second semiconductor having a conductivity that is less than or equal to that of the first semiconductor layer is stacked successively over source and drain electrode layers without exposed to air, the stack of films is used for the source and drain electrode layers.Type: GrantFiled: December 9, 2009Date of Patent: February 26, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Kengo Akimoto, Masashi Tsubuku
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Patent number: 8373173Abstract: The object of the present invention is to form a low-concentration impurity region with good accuracy in a top gate type TFT. Phosphorus is added to a semiconductor layer by using a pattern made of a conductive film as a mask to form an N-type impurity region in a self-alignment manner. A positive photoresist is applied to a substrate so as to cover the pattern and then is exposed to light applied to the back of the substrate and then is developed, whereby a photoresist 110 is formed. The pattern is etched by using the photoresist pattern as an etching mask to form a gate electrode. A channel forming region, a source region, a drain region, and low-concentration impurity regions, are formed in the semiconductor layer in a self-alignment manner by using the gate electrode as a doping mask.Type: GrantFiled: August 6, 2012Date of Patent: February 12, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Hisashi Ohtani
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Patent number: 8368142Abstract: A semiconductor device having performance comparable with a MOSFET is provided. An active layer of the semiconductor device is formed by a crystalline silicon film crystallized by using a metal element for promoting crystallization, and further by carrying out a heat treatment in an atmosphere containing a halogen element to carry out gettering of the metal element. The active layer after this process is constituted by an aggregation of a plurality of needle-shaped or column-shaped crystals. A semiconductor device manufactured by using this crystalline structure has extremely high performance.Type: GrantFiled: September 19, 2006Date of Patent: February 5, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Hisashi Ohtani, Jun Koyama, Takeshi Fukunaga
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Patent number: 8357570Abstract: A method for fabricating a pixel structure includes providing a substrate having a pixel area. A first metal layer, a gate insulator and a semiconductor layer are formed on the substrate and patterned by using a first half-tone mask or a gray-tone mask to form a transistor pattern, a lower capacitance pattern and a lower circuit pattern. Next, a dielectric layer and an electrode layer both covering the three patterns are sequentially formed and patterned to expose a part of the lower circuit pattern, a part of the lower capacitance pattern and a source/drain region of the transistor pattern. A second metal layer formed on the electrode layer and the electrode layer are patterned by using a second half-tone mask or the gray-tone mask to form an upper circuit pattern, a source/drain pattern and an upper capacitance pattern. A portion of the electrode layer constructs a pixel electrode.Type: GrantFiled: March 21, 2011Date of Patent: January 22, 2013Assignee: Au Optronics CorporationInventor: Yu-Cheng Chen
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Patent number: 8357977Abstract: A method for manufacturing a semiconductor device, which includes the steps of: forming a mask layer (20) on a gate insulating film (18), the mask layer (20) having openings over the portions of first and second semiconductor layers that are destined to become low-concentration impurity regions and source and drain regions; forming first conductivity type implantation regions (24b, 24c) in the first and second semiconductor layers respectively by implanting a first conductivity type impurity (22) to the first and second semiconductor layers through the openings in the mask layer (20); forming first and second gate electrodes (26b, 26c) to cover a portion of the first conductivity type implantation regions and portions of the first and second semiconductor layers that are destined to become channel regions; forming another mask layer (28) which has openings over portions of the first conductivity type implantation region (24b) of the first semiconductor layer, said portions being located at both ends of the fiType: GrantFiled: October 22, 2009Date of Patent: January 22, 2013Assignee: Sharp Kabushiki KaishaInventor: Hiroyuki Kaigawa
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Patent number: 8338256Abstract: A multi-gate transistor having a plurality of sidewall contacts and a fabrication method that includes forming a semiconductor fin on a semiconductor substrate and etching a trench within the semiconductor fin, depositing an oxide material within the etched trench, and etching the oxide material to form a dummy oxide layer along exposed walls within the etched trench; and forming a spacer dielectric layer along vertical sidewalls of the dummy oxide layer. The method further includes removing exposed dummy oxide layer in a channel region in the semiconductor fin and beneath the spacer dielectric layer, forming a high-k material liner along sidewalls of the channel region in the semiconductor fin, forming a metal gate stack within the etched trench, and forming a plurality of sidewall contacts within the semiconductor fin along adjacent sidewalls of the dummy oxide layer.Type: GrantFiled: July 8, 2010Date of Patent: December 25, 2012Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Dechao Guo, Shu-Jen Han, Chung-Hsun Lin
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Patent number: 8330162Abstract: A pixel structure includes a drain extension portion disposed on an islanding semiconductor layer, wherein the islanding semiconductor layer is formed together with a thin-film transistor channel layer. Therefore, the total thickness of the islanding semiconductor layer and the drain extension portion is increased, such that the distance between the gate line and the drain extension portion is enlarged, and the coupling capacitance between the gate line and the drain extension portion can be lowered. Therefore, the display panel with the pixel structure of the present invention can have low coupling capacitance so as to improve the flicker phenomena obviously.Type: GrantFiled: July 8, 2009Date of Patent: December 11, 2012Assignee: Chunghwa Picture Tubes, Ltd.Inventors: Ssu-Lin Yen, Chia-Ming Chiang
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Patent number: 8309959Abstract: A display device which surely allows the black-spot-forming correction at the time of forming an opening portion in a portion of a scanning signal line where a scanning signal line and a video signal line intersects each other and forming a semiconductor layer and a conductor layer by a resist flow method is provided. A scanning signal line which forms an opening portion in a portion thereof which intersects a video signal line, an insulation film, a semiconductor layer which covers a region which spreads larger than a conductor layer, and the conductor layer are sequentially stacked. The conductor layer includes the video signal line, a drain electrode and a source electrode of a thin film transistor, and a connecting line which connects the video signal line and the drain electrode.Type: GrantFiled: May 28, 2009Date of Patent: November 13, 2012Assignee: Panasonic Liquid Crystal Display Co., Ltd.Inventors: Jun Matsumoto, Kazushi Yamamoto
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Patent number: 8304780Abstract: A method for making an electronic device, such as a MOS transistor, including the steps of forming a plurality of semiconductor islands on an electrically functional substrate, printing a first dielectric layer on or over a first subset of the semiconductor islands and optionally a second dielectric layer on or over a second subset of the semiconductor islands, and annealing. The first dielectric layer contains a first dopant, and the (optional) second dielectric layer contains a second dopant different from the first dopant. The dielectric layer(s), semiconductor islands and substrate are annealed sufficiently to diffuse the first dopant into the first subset of semiconductor islands and, when present, the second dopant into the second subset of semiconductor islands.Type: GrantFiled: June 9, 2010Date of Patent: November 6, 2012Assignee: Kovio, Inc.Inventors: Arvind Kamath, James Montague Cleeves, Joerg Rockenberger, Patrick Smith, Fabio Zürcher
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Patent number: 8294158Abstract: A thin film transistor (TFT) includes a substrate, a semiconductor layer disposed on the substrate and including source and drain regions, each having a first metal catalyst crystallization region and a second metal catalyst crystallization region, and a channel region having the second metal catalyst crystallization region, a gate electrode disposed in a position corresponding to the channel region of the semiconductor layer, a gate insulating layer interposed between the semiconductor layer and the gate electrode to electrically insulate the semiconductor layer from the gate electrode, and source and drain electrodes electrically insulated from the gate electrode and electrically connected to the source and drain regions, respectively. An OLED display device includes the thin film transistor and a first electrode, an organic layer, and a second electrode electrically connected to the source and drain electrodes.Type: GrantFiled: December 30, 2009Date of Patent: October 23, 2012Assignee: Samsung Display Co., Ltd.Inventors: Byoung-Keon Park, Jin-Wook Seo, Tae-Hoon Yang, Kil-Won Lee, Dong-Hyun Lee, Maxim Lisachenko, Ki-Yong Lee
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Patent number: 8288194Abstract: A method of fabricating a thin film transistor (TFT) is provided. The method comprises the steps of providing a substrate with a gate electrode formed thereon; forming an insulating layer on the substrate and covering the gate electrode; forming an intrinsic amorphous silicon layer (intrinsic a-Si layer) on the insulating layer; forming an etch-stop layer on the intrinsic amorphous silicon layer, and the etch-stop layer positioned correspondingly to the gate electrode; treating the etch-stop layer to form an oxide layer, and the oxide layer covering the etch-stop layer; forming a n+ a-Si layer above the intrinsic amorphous silicon layer, and the n+ a-Si layer covering partial surface of the etch-stop layer and the oxide layer separating a sidewall of the etch-stop layer and the n+ a-Si layer; and forming a conductive layer on the n+ a-Si layer.Type: GrantFiled: May 9, 2011Date of Patent: October 16, 2012Assignee: Au Optronics Corp.Inventor: Tung Yu Chen
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Patent number: 8288774Abstract: A dual gate layout of a thin film transistor of liquid crystal display to alleviate dark current leakage is disclosed. The layout includes (1) a polysilicon on a substrate having a shaped of L- or of snake from top-view, having a heavily doped source region, a first lightly doped region, a first gate channel, a second lightly doped region, a second gate channel, a third lightly doped region and a heavily doped drain region formed in order therein; (2) a gate oxide layer formed on the poly-Si layer and the substrate, (3) a gate metal layer then formed on the gate oxide layer having a scanning line and an extension portion with a L-shaped or an I-shaped. The gate metal intersects with the poly-Si layer thereto define the forgoing gate channels. Among of gate channels, at least one is along the signal line through a source contact.Type: GrantFiled: January 12, 2012Date of Patent: October 16, 2012Assignee: Au Optronics Corp.Inventors: Wein-Town Sun, Chun-Sheng Li, Jian-Shen Yu
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Patent number: 8278161Abstract: A thin film transistor array substrate and a fabricating method are disclosed. A gate line and a data line cross each other and a thin film transistor (TFT) is provided at the intersection between the gate and data lines. A protective film covers the data line and the thin film transistor and has a contact hole exposing a drain electrode of the TFT. A pixel electrode is connected, via the contact hole, to the drain electrode of the TFT. A storage capacitor includes a gate insulating film between the pixel electrode and the gate line and/or a common line. Some or all of the protective film within the storage capacitor is removed such that the storage capacitor contains no protective film or a layer of protective film that is thinner than the portion covering the TFT.Type: GrantFiled: January 24, 2008Date of Patent: October 2, 2012Assignee: LG Display Co., Ltd.Inventors: Sung Jin Kim, Woo Young Choi
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Patent number: 8269221Abstract: Provided is a thin film device and an associated method of making a thin film device. For example, a thin film transistor with nano-gaps in the gate electrode. The method involves providing a substrate. Upon the substrate are then provided a plurality of parallel spaced electrically conductive strips. A plurality of thin film device layers are then deposited upon the conductive strips. A 3D structure is provided upon the plurality of thin film device layers, the structure having a plurality of different heights. The 3D structure and the plurality of thin film device layers are then etched to define a thin film device, such as for example a thin film transistor that is disposed above at least a portion of the conductive strips.Type: GrantFiled: January 24, 2008Date of Patent: September 18, 2012Assignee: Hewlett-Packard Development Company, L.P.Inventors: Ping Mei, Albert Jeans, Carl Taussig
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Patent number: 8263978Abstract: A thin film transistor (TFT) and a method of manufacturing the same are provided, the TFT including a gate insulating layer on a gate. A channel may be formed on a portion of the gate insulating layer corresponding to the gate. A metal material may be formed on a surface of the channel. The metal material crystallizes the channel. A source and a drain may contact side surfaces of the channel.Type: GrantFiled: May 6, 2009Date of Patent: September 11, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Byung-wook Yoo, Sang-yoon Lee, Myung-kwan Ryu, Tae-sang Kim, Jang-yeon Kwon, Kyung-bae Park, Kyung-seok Son, Ji-sim Jung
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Patent number: 8237169Abstract: The object of the present invention is to form a low-concentration impurity region with good accuracy in a top gate type TFT. Phosphorus is added to a semiconductor layer by using a pattern made of a conductive film as a mask to form an N-type impurity region in a self-alignment manner. A positive photoresist is applied to a substrate so as to cover the pattern and then is exposed to light applied to the back of the substrate and then is developed, whereby a photoresist 110 is formed. The pattern is etched by using the photoresist pattern as an etching mask to form a gate electrode. A channel forming region, a source region, a drain region, and low-concentration impurity regions, are formed in the semiconductor layer in a self-alignment manner by using the gate electrode as a doping mask.Type: GrantFiled: September 23, 2011Date of Patent: August 7, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Hisashi Ohtani
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Patent number: 8227803Abstract: An organic electroluminescent display device includes at least one switching transistor and driving transistor formed on an array substrate, wherein the array substrate includes a gate pad and a date pad formed thereon; a contact electrode, a gate pad top electrode of the gate pad and a data pad top electrode of the data pad formed on a passivation layer, a contact electrode, a top gate pad electrode and a top data pad electrode electrically connected to the exposed portion of a drain electrode of the driving transistor, a gate pad bottom electrode and a data pad bottom electrode respectively; a light-emitting cell including a cathode electrode, an anode electrode and an organic layer interposed therebetween formed on the planarization layer; wherein the cathode electrode is electrically connected to the contact electrode via one of the contact hole; wherein the contact electrode has acid-resistance with respect to an etchant used in patterning the cathode electrode.Type: GrantFiled: September 22, 2010Date of Patent: July 24, 2012Assignee: LG Display Co., Ltd.Inventor: Dong-Sik Park
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Patent number: 8212256Abstract: A pixel structure disposed on a substrate including a thin film transistor (TFT), a bottom capacitor electrode, a dielectric layer, an upper capacitor electrode, a passivation layer, and a pixel electrode is provided. The TFT having a source/drain and the bottom capacitor electrode are disposed on the substrate. The dielectric layer is disposed on the bottom capacitor electrode. The upper capacitor electrode has a semiconductor layer, a barrier layer, and a metal layer. The semiconductor layer is disposed on the dielectric layer above the bottom capacitor electrode. The barrier layer is disposed on the semiconductor layer. The metal layer whose material includes copper, a copper alloy, or a combination thereof is disposed on the barrier layer. The passivation layer covers the TFT and the upper capacitor electrode and has a first opening exposing the source/drain. The pixel electrode is electrically connected to the TFT through the first opening.Type: GrantFiled: April 2, 2008Date of Patent: July 3, 2012Assignee: Au Optronics CorporationInventors: Po-Lin Chen, Chun-Nan Lin, Shu-Feng Wu, Wen-Ching Tsai
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Patent number: 8207537Abstract: A display device according to the present invention includes a barrier layer formed over the transistor and a planarization layer formed over the barrier layer. The planarization layer has an opening and an edge portion of the planarization layer formed at the opening of the planarization layer is rounded. Further, a resin film is formed over the planarization layer and in the opening of the planarization layer, and the resin film also has an opening and an edge portion of the resin film formed at the opening of the resin film is rounded. A light emitting member is formed over the resin film.Type: GrantFiled: July 28, 2011Date of Patent: June 26, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Satoshi Murakami, Mitsuaki Osame
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Patent number: 8198110Abstract: This invention is related to a thin film transistor (TFT) array and method of making same, for use in an active matrix liquid crystal display (AMLCD) having a high pixel aperture ratio. The TFT array and corresponding display are made by forming the TFTs and corresponding address lines on a substrate, coating the address lines and TFTs with a photo-imageable insulating layer which acts as a negative resist, exposing portions of the insulating layer with UV light which are to remain on the substrate, removing non-exposed areas of the insulating layer so as to form contact vias, and depositing pixel electrodes on the substrate over the insulating layer so that the pixel electrodes contact respective TFT source electrodes through the contact vias. The resulting display has an increased pixel aperture ratio because the pixel electrodes are formed over the insulating layer so as to overlap portions of the array address lines.Type: GrantFiled: October 14, 2008Date of Patent: June 12, 2012Assignee: LG Display Co., Ltd.Inventors: Willem Den Boer, John Z. Z. Zhong, Tieer Gu
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Patent number: 8188472Abstract: A thin film transistor (TFT), a method of manufacturing the TFT, and a flat panel display comprising the TFT are provided. The TFT includes a gate, a gate insulating layer that contacts the gate, a channel layer that contacts the gate insulating layer and faces the gate with the gate insulating layer therebetween, a source that contacts an end of the channel layer; and a drain that contacts an other end of the channel layer, wherein the channel layer is an amorphous oxide semiconductor layer, and each of the source and the drain is a conductive oxide layer comprising an oxide semiconductor layer having a conductive impurity in the oxide semiconductor layer. A low resistance metal layer can further be included on the source and drain. A driving circuit of a unit pixel of a flat panel display includes the TFT.Type: GrantFiled: January 7, 2008Date of Patent: May 29, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Jae-chul Park, Chang-jung Kim, Sun-il Kim, I-hun Song, Young-soo Park
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Patent number: 8183097Abstract: A thin-film transistor (TFT) substrate includes a semiconductor pattern, a conductive pattern, a first wiring pattern, an insulation pattern and a second wiring pattern. The semiconductor pattern is formed on a substrate. The conductive pattern is formed as a layer identical to the semiconductor pattern on the substrate. The first wiring pattern is formed on the semiconductor pattern. The first wiring pattern includes a source electrode and a drain electrode spaced apart from the source electrode. The insulation pattern is formed on the substrate having the first wiring pattern to cover the first wiring pattern. The second wiring pattern is formed on the insulation pattern. The second wiring pattern includes a gate electrode formed on the source and drain electrodes. Therefore, a TFT substrate is manufactured using two or three masks, so that manufacturing costs may be decreased.Type: GrantFiled: August 6, 2008Date of Patent: May 22, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Sang-Ki Kwak, Hyang-Shik Kong, Sun-Il Kim
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Patent number: 8148727Abstract: A display device including an oxide thin film transistor (TFT) is disclosed. A nitride-based gate insulating layer of a gate pad area is etched when an oxide semiconductor layer of a pixel area is etched by using a half-tone mask, a metal layer is formed at a contact hole of the etched gate insulting layer, and then a passivation layer formed thereon is etched. Thus, an overhang of the passivation layer can be prevented from being generated when the gate insulating layer is etched, and accordingly, the fabrication process can be simplified.Type: GrantFiled: June 22, 2011Date of Patent: April 3, 2012Assignee: LG Display Co., Ltd.Inventors: Im-Kuk Kang, Dae-Won Kim
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Patent number: 8143706Abstract: Embodiments of methods, apparatuses, devices, and/or systems for forming a component having dielectric sub-layers are described.Type: GrantFiled: July 16, 2007Date of Patent: March 27, 2012Assignee: Hewlett-Packard Development Company, L.P.Inventors: Peter Mardilovich, Laura Kramer, Gregory S Herman, Randy Hoffman, David Punsalan
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Patent number: 8120029Abstract: Disclosed is a thin film transistor (TFT). The TFT may include an intermediate layer between a channel and a source and drain. An increased off current, which may occur to a drain area of the TFT, is reduced due to the intermediate layer. Accordingly, the TFT may be stably driven.Type: GrantFiled: May 6, 2009Date of Patent: February 21, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Kyung-bae Park, Myung-kwan Ryu, Byung-wook Yoo, Sang-yoon Lee, Tae-sang Kim, Jang-yeon Kwon, Kyung-seok Son, Ji-sim Jung
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Patent number: 8115209Abstract: A dual gate layout of a thin film transistor of liquid crystal display to alleviate dark current leakage is disclosed. The layout includes (1) a polysilicon on a substrate having a L-shaped or a snake shaped from top-view, which has a heavily doped source region, a first lightly doped region, a first gate channel, a second lightly doped region, a second gate channel, a third lightly doped region and a heavily doped drain region formed in order therein; (2) a gate oxide layer formed on the polysilicon layer and the substrate, (3) a gate metal layer then formed on the gate oxide layer having a scanning line and an extension portion with a L-shaped or an I-shaped. The gate metal intersects with the polysilicon layer thereto define the forgoing gate channels. Among of gate channels, at least one is along the signal line, which is connected to the source region through a source contact.Type: GrantFiled: February 14, 2011Date of Patent: February 14, 2012Assignee: Au Optronics Corp.Inventors: Wein-Town Sun, Chun-Sheng Li, Jian-Shen Yu
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Patent number: 8097882Abstract: An organic electroluminescent device includes first and second substrates facing and spaced apart from each other; a gate line on the first substrate; a data line intersecting the gate line to define a pixel region; a switching element connected to the gate line and the data line; an organic electroluminescent diode on the second substrate; and a driving element connected to the switching element and the organic electroluminescent diode, the driving element including a plurality of driving negative-type polycrystalline silicon thin film transistors connected to the organic electroluminescent diode in parallel.Type: GrantFiled: December 21, 2004Date of Patent: January 17, 2012Assignee: LG Display Co., Ltd.Inventor: Jae-Yong Park
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Patent number: 8093585Abstract: Each TFT for driving each of a plurality of pixels arranged in a matrix-like configuration is configured using a stagger-type polycrystalline-Si TFT. A gate electrode, which is composed of a high-heat-resistant material capable of resisting high temperature at the time of polycrystalline-Si film formation, is disposed at a lower layer as compared with the polycrystalline-Si layer that forms a channel of each TFT. A gate line, which is composed of a low-resistance material, is disposed at an upper layer as compared with the polycrystalline-Si layer. The gate electrode and the gate line are connected to each other via a through-hole bored in a gate insulation film. Respective configuration components of each organic electro-luminescent element are partially co-used at the time of the line formation, thereby suppressing an increase in the steps, processes, and configuration components.Type: GrantFiled: November 21, 2008Date of Patent: January 10, 2012Assignee: Hitachi, Ltd.Inventors: Etsuko Nishimura, Masatoshi Wakagi, Kenichi Onisawa, Mieko Matsumura
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Patent number: 8093601Abstract: In an active matrix substrate (100) of the present invention, a gate bus line (105) and a gate electrode (166) extend in the first direction (the x direction). At a contact portion (168) for electrically connecting the gate bus line (105) with the drain regions of a first-conductivity-type transistor section (162) and a second-conductivity-type transistor section (164), the direction of the straight line (L1) of the shortest distance (d1) between one of a plurality of first-conductivity-type drain connecting portions (168c) that is closest to the gate bus line (105) and the gate bus line (105) is inclined with respect to the second direction (the y direction).Type: GrantFiled: September 25, 2007Date of Patent: January 10, 2012Assignee: Sharp Kabushiki KaishaInventors: Tadayoshi Miyamoto, Mitsuhiro Tanaka
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Patent number: 8089575Abstract: A display device includes a sequentially stacked body formed of a gate signal line, an insulation film, a semiconductor layer and a conductor layer on a substrate. The conductive layer forms a drain electrode and a source electrode of a thin film transistor which are arranged with a channel region of the semiconductor layer therebetween, and one of the drain and source electrode is formed in an approximately U shape having an open-ended one end side and a connecting portion on another end side so that the one electrode surrounds a distal end portion of another electrode as viewed in a plan view, and a projecting portion is formed on a side of the connecting portion opposite to the another electrode.Type: GrantFiled: September 14, 2010Date of Patent: January 3, 2012Assignees: Hitachi Displays, Ltd., Panasonic Liquid Crystal Display Co., Ltd.Inventors: Miyo Ishii, Junichi Uehara, Kunihiko Watanabe
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Patent number: 8076704Abstract: An organic light emitting device according to an embodiment includes a thin film transistor substrate including a plurality of thin film transistors and an over-coating film formed on the thin film transistors. The over-coating film includes a curved surface on at least two pixels among pixels of different colors and the slope angles of depressed portions forming the curved surface are respectively different from each other depending on the colors of the pixels. A plurality of first electrodes formed on the over-coating film includes a surface formed according to the curved surface, an organic light emitting member formed on the first electrodes includes a surface formed according to the curved surface, and a second electrode formed on the organic light emitting member includes a surface formed according to the curved surface. Slope angles of the depressed portions increase according to a decrease of wavelengths of the colors of the pixels.Type: GrantFiled: May 27, 2008Date of Patent: December 13, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Baek-Woon Lee, Young-In Hwang
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Patent number: 8058651Abstract: A thin film transistor array substrate and a method for manufacturing the thin film transistor array substrate are disclosed. Specifically, a thin film transistor array may be formed using a reduced number of masks.Type: GrantFiled: April 29, 2010Date of Patent: November 15, 2011Assignee: LG Display Co., Ltd.Inventors: Yong In Park, Jae Young Oh, Soo Pool Kim
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Patent number: 8053839Abstract: A semiconductor structure includes of a plurality of semiconductor fins overlying an insulator layer, a gate dielectric overlying a portion of said semiconductor fin, and a gate electrode overlying the gate dielectric. Each of the semiconductor fins has a top surface, a first sidewall surface, and a second sidewall surface. Dopant ions are implanted at a first angle (e.g., greater than about 7°) with respect to the normal of the top surface of the semiconductor fin to dope the first sidewall surface and the top surface. Further dopant ions are implanted with respect to the normal of the top surface of the semiconductor fin to dope the second sidewall surface and the top surface.Type: GrantFiled: March 25, 2010Date of Patent: November 8, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yee-Chia Yeo, Ping-Wei Wang, Hao-Yu Chen, Fu-Liang Yang, Chenming Hu
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Patent number: 8049218Abstract: A TFT LCD array substrate and a manufacturing method thereof. The TFT LCD array substrate comprises a substrate. A gate line and a gate electrode that is formed integrally with the gate line are formed on the substrate. A first insulating layer and a semiconductor layer are formed sequentially on the gate line and the gate electrode. A second insulting layer covers sidewalls of the gate line and the gate electrode, the first insulating layer, and the semiconductor layer. An etching stop layer is formed on the semiconductor layer and exposes a part of the semiconductor layer on both sides of the etching stop layer. The TFT LCD of the present invention can be manufactured with a four-mask process.Type: GrantFiled: July 6, 2010Date of Patent: November 1, 2011Assignee: Beijing Boe Optoelectronics Technology Co., Ltd.Inventors: Zhangtao Wang, Haijun Qiu, Tae Yup Min, Seung Moo Rim
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Patent number: 8049255Abstract: A semiconductor device includes an insulating substrate and a TFT element disposed on the substrate. The TFT element includes a gate electrode, a gate insulating film, a semiconductor layer, and a source electrode and a drain electrode arranged in that order on the insulating substrate. The semiconductor layer includes an active layer composed of polycrystalline semiconductor and a contact layer segment interposed between the active layer and the source electrode and another contact layer segment interposed between the active layer and the drain electrode. The source and drain electrodes each have a first face facing the opposite face of the active layer from the interface with the gate insulating layer and a second face facing an etched side face of the active layer. Each contact layer segment is disposed between the active layer and each of the first and second faces of the source or drain electrode.Type: GrantFiled: June 5, 2008Date of Patent: November 1, 2011Assignee: Hitachi Displays, Ltd.Inventors: Takeshi Sakai, Toshio Miyazawa, Takuo Kaitoh, Hidekazu Miyake
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Patent number: 8044399Abstract: A display has a glass substrate provided with a transparent conducting film, thin-film transistors, and an aluminum alloy wiring film electrically connecting the thin-film transistors to the transparent conducting film. The aluminum alloy wiring film is a layered structure having a first layer (X) of an aluminum alloy comprising at least one element selected from the specific element group Q including Ni and Ag, and at least one element selected from the specific element group R including rare-earth elements and Mg in a content in the specific range, and a second layer (Y) of an aluminum alloy containing having a resistivity lower than that of the first layer (X). The first layer (X) is in direct contact with the transparent conducting film.Type: GrantFiled: September 13, 2007Date of Patent: October 25, 2011Assignee: Kobe Steel, Ltd.Inventors: Aya Hino, Hiroshi Gotou, Hiroyuki Okuno, Junichi Nakai
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Patent number: 8039844Abstract: This invention provides a top-gate microcrystalline thin film transistor and a method for manufacturing the same. An inversion layer channel is formed in a top interface of a microcrystalline active layer, and being separated from an incubation layer in a bottom interface of the microcrystalline active layer. The inversion layer channel is formed in the crystallized layer of the top interface of the microcrystalline active layer. As such, the present microcrystalline thin film transistor has better electrical performance and reliability.Type: GrantFiled: August 12, 2008Date of Patent: October 18, 2011Assignee: Industrial Technology Research InstituteInventors: Cheng-Ju Tsai, Bo-Chu Chen, Ding-Kang Shih, Jung-Jie Huang, Yung-Hui Yeh