Bipolar Thin-film Transistors (epo) Patents (Class 257/E29.182)
  • Patent number: 9006809
    Abstract: A method for contacting MOS devices. First openings in a photosensitive material are formed over a substrate having a top dielectric in a first die area and a second opening over a gate stack in a second die area having the top dielectric, a hard mask, and a gate electrode. The top dielectric layer is etched to form a semiconductor contact while etching at least a portion the hard mask layer thickness over a gate contact area exposed by the second opening. An inter-layer dielectric (ILD) is deposited. A photosensitive material is patterned to generate a third opening in the photosensitive material over the semiconductor contact and a fourth opening inside the gate contact area. The ILD is etched through to reopen the semiconductor contact while etching through the ILD and residual hard mask if present to provide a gate contact to the gate electrode.
    Type: Grant
    Filed: May 19, 2014
    Date of Patent: April 14, 2015
    Assignee: Texas Instruments Incorporated
    Inventors: Fei Xie, Wen Cheng Tien, Ya Ping Chen, Li Bin Man, Kuo Jung Chen, Yu Liu, Tian Yi Zhang, Sisi Xie
  • Patent number: 8685800
    Abstract: A technique for addressing single-event latch-up (SEL) in a semiconductor device includes determining a location of a parasitic silicon-controlled rectifier (SCR) in an integrated circuit design of the semiconductor device. In this case, the parasitic SCR includes a parasitic pnp bipolar junction transistor (BJT) and a parasitic npn BJT. The technique also includes incorporating a first transistor between a first power supply node and an emitter of the parasitic pnp BJT in the integrated circuit design. The first transistor includes a first terminal coupled to the first power supply node, a second terminal coupled to the emitter of the parasitic pnp BJT, and a control terminal. The first transistor is not positioned between a base of the pnp BJT and the first power supply node. The first transistor limits current conducted by the parasitic pnp bipolar junction transistor following an SEL.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: April 1, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Jianan Yang, James D. Burnett, Brad J. Garni, Thomas W. Liston, Huy Van Pham
  • Patent number: 8497507
    Abstract: An array substrate for a liquid crystal display device includes a gate line on a substrate; a gate insulating layer on the gate line; a data line crossing the gate line; a gate electrode connected to the gate line; an active layer on the gate insulating layer and overlapping the gate electrode; first and second ohmic contact layers on the active layer, the first and second ohmic contact layers spaced apart from each other by a first distance; first and second barrier patterns spaced apart from each other by the first distance and on the first and second ohmic contact layers, respectively. The active layer is exposed through the first and second barrier patterns; source and drain electrodes spaced apart from each other by a second distance greater than the first distance and on the first and second barrier patterns, respectively.
    Type: Grant
    Filed: December 26, 2007
    Date of Patent: July 30, 2013
    Assignee: LG Display Co., Ltd.
    Inventor: Joon-Young Yang
  • Patent number: 8294243
    Abstract: Conduction between source and drain or emitter and collector regions is an important characteristic in transistor operation, particularly for lateral bipolar transistors. Accordingly, techniques that can facilitate control over this characteristic can mitigate yield loss by promoting the production of transistors that have an increased likelihood of exhibiting desired operational performance. As disclosed herein, well regions are established in a semiconductor substrate to facilitate, among other things, control over the conduction between the source and drain regions of a lateral bipolar transistor, thus mitigating yield loss and other associated fabrication deficiencies. Importantly, an additional mask is not required in establishing the well regions, thus further mitigating (increased) costs associated with promoting desired device performance.
    Type: Grant
    Filed: November 8, 2010
    Date of Patent: October 23, 2012
    Assignee: Texas Instruments Incorporated
    Inventor: Kamel Benaissa
  • Patent number: 8294150
    Abstract: Provided may be a panel structure, a display device including the panel structure, and methods of manufacturing the panel structure and the display device. Via holes for connecting elements of the panel structure may be formed by performing one process. For example, via holes for connecting a transistor and a conductive layer spaced apart from the transistor may be formed by performing only one process.
    Type: Grant
    Filed: October 8, 2009
    Date of Patent: October 23, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyung-bae Park, Myung-kwan Ryu, Kee-chan Park, Jong-baek Seon
  • Patent number: 8183097
    Abstract: A thin-film transistor (TFT) substrate includes a semiconductor pattern, a conductive pattern, a first wiring pattern, an insulation pattern and a second wiring pattern. The semiconductor pattern is formed on a substrate. The conductive pattern is formed as a layer identical to the semiconductor pattern on the substrate. The first wiring pattern is formed on the semiconductor pattern. The first wiring pattern includes a source electrode and a drain electrode spaced apart from the source electrode. The insulation pattern is formed on the substrate having the first wiring pattern to cover the first wiring pattern. The second wiring pattern is formed on the insulation pattern. The second wiring pattern includes a gate electrode formed on the source and drain electrodes. Therefore, a TFT substrate is manufactured using two or three masks, so that manufacturing costs may be decreased.
    Type: Grant
    Filed: August 6, 2008
    Date of Patent: May 22, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sang-Ki Kwak, Hyang-Shik Kong, Sun-Il Kim
  • Patent number: 8115210
    Abstract: A semiconductor display device with an interlayer insulating film in which surface levelness is ensured with a limited film formation time, heat treatment for removing moisture does not take long, and moisture in the interlayer insulating film is prevented from escaping into a film or electrode adjacent to the interlayer insulating film. A TFT is formed and then a nitrogen-containing inorganic insulating film that transmits less moisture compared to organic resin film is formed so as to cover the TFT. Next, organic resin including photosensitive acrylic resin is applied and an opening is formed by partially exposing the organic resin film to light. The organic resin film where the opening is foamed, is then covered with a nitrogen-containing inorganic insulating film which transmits less moisture than organic resin film does.
    Type: Grant
    Filed: June 17, 2011
    Date of Patent: February 14, 2012
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Murakami, Masahiko Hayakawa, Kiyoshi Kato, Mitsuaki Osame, Takashi Hirosue, Saishi Fujikawa
  • Patent number: 7977200
    Abstract: A semiconductor device including at least one capacitor formed in wiring levels on a silicon-on-insulator (SOI) substrate, wherein the at least one capacitor is coupled to an active layer of the SOI substrate. A method of fabricating a semiconductor structure includes forming an SOI substrate, forming a BOX layer over the SOI substrate, and forming at least one capacitor in wiring levels on the BOX layer, wherein the at least one capacitor is coupled to an active layer of the SOI substrate.
    Type: Grant
    Filed: March 12, 2008
    Date of Patent: July 12, 2011
    Assignee: International Business Machines Corporation
    Inventors: William F. Clark, Jr., Stephen E. Luce
  • Patent number: 7968971
    Abstract: A thin-body bipolar device includes: a semiconductor substrate, a semiconductor fin constructed over the semiconductor substrate, a first region of the semiconductor fin having a first conductivity type, the first region serving as a base of the thin-body bipolar device, and a second and third region of the semiconductor fin having a second conductivity type opposite to the first conductivity type, the second and third region being both juxtaposed with and separated by the first region, the second and third region serving as an emitter and collector of the thin-body bipolar device, respectively.
    Type: Grant
    Filed: July 10, 2009
    Date of Patent: June 28, 2011
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shine Chung, Fu-Lung Hsueh
  • Publication number: 20100320572
    Abstract: A thin-body bipolar device includes: a semiconductor substrate, a semiconductor fin constructed over the semiconductor substrate, a first region of the semiconductor fin having a first conductivity type, the first region serving as a base of the thin-body bipolar device, and a second and third region of the semiconductor fin having a second conductivity type opposite to the first conductivity type, the second and third region being both juxtaposed with and separated by the first region, the second and third region serving as an emitter and collector of the thin-body bipolar device, respectively.
    Type: Application
    Filed: July 10, 2009
    Publication date: December 23, 2010
    Inventors: Shine Chung, Fu-Lung Hsueh
  • Patent number: 7816712
    Abstract: A thin film transistor array and method of manufacturing the same include a pixel electrode formed of a transparent conductive layer on a substrate, a gate line formed of the transparent conductive layer and an opaque conductive layer on the substrate, a gate electrode connected to the gate line and formed of the transparent conductive layer and an opaque conductive layer on the substrate, a gate insulating layer which covers the gate line and the gate electrode, a semiconductor layer formed on the gate insulating layer to overlap the gate electrode, a data line which intersects the gate line, a source electrode connected to the data line to overlap a part of the semiconductor layer, and a drain electrode connected to the pixel electrode to overlap a part of the semiconductor layer.
    Type: Grant
    Filed: November 20, 2007
    Date of Patent: October 19, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-Hyun Choung, Hong-Sick Park, Joo-Ae Youn, Sun-Young Hong, Bong-Kyun Kim, Won-Suk Shin, Byeong-Jin Lee
  • Publication number: 20100207683
    Abstract: The present invention provides a “collector-less” silicon-on-insulator (SOI) bipolar junction transistor (BJT) that has no impurity-doped collector. Instead, the inventive vertical SOI BJT uses a back gate-induced, minority carrier inversion layer as the intrinsic collector when it operates. In accordance with the present invention, the SOI substrate is biased such that an inversion layer is formed at the bottom of the base region serving as the collector. The advantage of such a device is its CMOS-like process. Therefore, the integration scheme can be simplified and the manufacturing cost can be significantly reduced. The present invention also provides a method of fabricating BJTs on selected areas of a very thin BOX using a conventional SOI starting wafer with a thick BOX. The reduced BOX thickness underneath the bipolar devices allows for a significantly reduced substrate bias compatible with the CMOS to be applied while maintaining the advantages of a thick BOX underneath the CMOS.
    Type: Application
    Filed: February 17, 2010
    Publication date: August 19, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Herbert L. Ho, Mahender Kumar, Qiqing Ouyang, Paul A. Papworth, Christopher D. Sheraw, Michael D. Steigerwalt
  • Publication number: 20100025808
    Abstract: The invention provides a bipolar transistor with a reduced collector series resistance integrated in a trench (4, 44) of a standard CMOS shallow trench isolation region. The bipolar transistor includes a collector region (6, 34) manufactured in one fabrication step, therefore having a shorter conductive path with a reduced collector series resistance, improving the high frequency performance of the bipolar transistor. The bipolar transistor further includes a base region (8, 22, 38) with a first part on a selected portion of the collector region (6, 34), which is on the bottom of the trench (4, 44), and an emitter region (10, 24, 39) on a selected portion of the first part of the base region (8, 22, 38). A base contact (11, 26, 51) electrically contacts the base region (8, 22, 38) on a second part of the base region (8, 22, 38), which is on an insulating region (2, 42). The collector region (6, 34) is electrically contacted on top of a protrusion (5, 45) with a collector contact (13, 25, 50).
    Type: Application
    Filed: January 12, 2006
    Publication date: February 4, 2010
    Applicant: NXP B.V.
    Inventors: Johannes J. T. M. Donkers, Wibo D. Van Noort, Philippe Meunier-Beillard
  • Patent number: 7656002
    Abstract: The present invention relates to a microelectronic device having a bipolar epitaxial structure that provides at least one bipolar transistor element formed over at least one field effect transistor (FET) epitaxial structure that provides at least one FET element. The epitaxial structures are separated with at least one separation layer. Additional embodiments of the present invention may use different epitaxial layers, epitaxial sub-layers, metallization layers, isolation layers, layer materials, doping materials, isolation materials, implant materials, or any combination thereof.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: February 2, 2010
    Assignee: RF Micro Devices, Inc.
    Inventors: Curtis A. Barratt, Michael T. Fresina, Brian G. Moser, Dain C. Miller, Walter A. Wohlmuth
  • Patent number: 7332778
    Abstract: To refine a semiconductor device (100), in particular a S[ilicon]O[n]I[nsulator] device, comprising: at least one isolating layer (10) made of a dielectric material; at least one silicon substrate (20) arranged on said isolating layer (10); at least one component (30) integrated in the silicon substrate (20), which component has at least one slightly doped zone (34); as well as at least a first, in particular planar, metallization region (40) arranged between the isolating layer (10) and the component (30), in particular between the isolating layer (10) and the slightly doped zone (34) of the component (30), as well as a method of manufacturing at least one semiconductor device (100) in such a manner that trouble-free operation also of slightly doped components (30), such as pnp transistors, is guaranteed in a SOI process transferred onto the insulator, it is proposed that at least a second, in particular planar, metallization region (42) is arranged on the side of the silicon substrate (20) facing away fr
    Type: Grant
    Filed: June 2, 2003
    Date of Patent: February 19, 2008
    Inventors: Wolfgang Schnitt, Hauke Pohlmann
  • Patent number: 7288829
    Abstract: Disclosed is a method of forming a transistor in an integrated circuit structure that begins by forming a collector in a substrate and an intrinsic base above the collector. Then, the invention patterns an emitter pedestal for the lower portion of the emitter on the substrate above the intrinsic base. Before actually forming the emitter or associates spacer, the invention forms an extrinsic base in regions of the substrate not protected by the emitter pedestal. After this, the invention removes the emitter pedestal and eventually forms the emitter where the emitter pedestal was positioned.
    Type: Grant
    Filed: November 10, 2004
    Date of Patent: October 30, 2007
    Assignee: International Business Machines Corporation
    Inventors: Marwan H Khater, Francois Pagette