Bipolar Device (epo) Patents (Class 257/E29.171)

  • Patent number: 12009273
    Abstract: A semiconductor apparatus includes a substrate, plural transistor groups disposed on the substrate, an insulating film, and a metal member. Each of the plural transistor groups includes plural unit transistors arranged in a first direction within a plane of a top surface of the substrate. The plural transistor groups are arranged in a second direction perpendicular to the first direction. The insulating film covers the plural unit transistors and includes at least one cavity. The metal member is disposed on the insulating film and is electrically connected to the plural unit transistors via the at least one cavity. A heat transfer path is formed by a metal in a region from each of the plural unit transistors to a top surface of the metal member. Thermal resistance values of the heat transfer paths are different from each other among the plural unit transistors.
    Type: Grant
    Filed: January 22, 2020
    Date of Patent: June 11, 2024
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Atsushi Kurokawa, Koshi Himeda, Kazuya Kobayashi
  • Patent number: 11961901
    Abstract: The disclosure provides a bipolar transistor structure with multiple bases, and related methods. A bipolar transistor structure includes a first emitter/collector (E/C) material above an insulator. The first E/C material has first sidewall and a second sidewall over the insulator. A first base is above the insulator adjacent the first sidewall of the first E/C material. A second base is above the insulator adjacent the second sidewall of the first E/C material. A second E/C material is above the insulator and adjacent the first base. A width of the first base between the first E/C material and the second E/C material is less than a width of the first E/C material, and the first base protrudes horizontally outward from an end of the first E/C material and an end of the second E/C material.
    Type: Grant
    Filed: April 15, 2022
    Date of Patent: April 16, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Shesh Mani Pandey
  • Patent number: 11843038
    Abstract: Embodiments include a first set of fins having an emitter of a bipolar junction transistor (BJT) disposed over the first set of fins, a second set of fins having a base of the BJT disposed over the second set of fins, and a third set of fins having a collector of the BJT disposed over the third set of fins. A first gate structure is disposed over the first set of fins adjacent to the emitter. A second gate structure is disposed over the second set of fins adjacent to the base. A third gate structure is disposed over the third set of fins adjacent to the collector. The first gate structure, second gate structure, and third gate structure are physically and electrically separated.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: December 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ming-Shuan Li, Zi-Ang Su, Ying-Keung Leung
  • Patent number: 8912574
    Abstract: A method of making a semiconductor structure includes forming a trench through a shallow trench isolation (STI) structure and into a substrate, and forming a liner including an electrical insulator material on sidewalls of the trench. The method also includes forming a core including a high thermal conductivity material in the trench and on the liner, and forming a cap in the trench and on the core.
    Type: Grant
    Filed: December 14, 2010
    Date of Patent: December 16, 2014
    Assignee: International Business Machines Corporation
    Inventors: Mattias E. Dahlstrom, Dinh Dang, Qizhi Liu, Ramana M. Malladi
  • Patent number: 8912631
    Abstract: A heterojunction bipolar transistor (HBT) is provided with an improved on-state breakdown voltage VCE. The improvement of the on-state breakdown voltage for the HBT improves the output power characteristics of the HBT and the ability of the HBT to withstand large impedance mismatch (large VSWR). The improvement in the on-state breakdown voltage is related to the suppression of high electric fields adjacent a junction of a collector layer and a sub-collector layer forming a collector region of the HBT.
    Type: Grant
    Filed: March 1, 2011
    Date of Patent: December 16, 2014
    Assignee: MicroLink Devices, Inc.
    Inventors: Noren Pan, Andree Wibowo
  • Patent number: 8890213
    Abstract: There is provided a semiconductor wafer including a base wafer that has an impurity region in which an impurity atom has been introduced into silicon, a plurality of seed bodies provided in contact with the impurity region, and a plurality of compound semiconductors each provided in contact with the corresponding seed bodies and lattice-matched or pseudo-lattice-matched to the corresponding seed bodies. The semiconductor wafer can further include an inhibitor provided on the base wafer and in which a plurality of apertures exposing at least a part of the impurity region are provided.
    Type: Grant
    Filed: November 21, 2011
    Date of Patent: November 18, 2014
    Assignee: Sumitomo Chemical Company, Limited
    Inventors: Sadanori Yamanaka, Masahiko Hata, Noboru Fukuhara
  • Patent number: 8823054
    Abstract: A semiconductor switching device includes a package, and a semiconductor switching element provided in the package and having a collector electrode and an emitter electrode. A main collector terminal and a main emitter terminal reflect voltage drop generated during application of current by a floating component in the package. A second collector terminal and a second emitter terminal detect a voltage between the collector electrode and the emitter electrode without reflecting the voltage drop. A third emitter terminal is arranged close to the second emitter terminal, and detects the voltage drop generated between the main emitter terminal and the second emitter terminal.
    Type: Grant
    Filed: July 24, 2012
    Date of Patent: September 2, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventor: Kazuhiro Kurachi
  • Patent number: 8652919
    Abstract: Embodiments of the present invention include a method for forming a tunable semiconductor device. In one embodiment, the method comprises: forming a semiconductor substrate; patterning a first mask over the semiconductor substrate; doping regions of the semiconductor substrate not protected by the first mask to form a first discontinuous subcollector; removing the first mask; patterning a second mask over the semiconductor substrate; doping regions of the semiconductor substrate not protected by the second mask and on top of the first discontinuous subcollector to form a second discontinuous subcollector; removing the second mask; and forming a single continuous collector above the second discontinuous subcollector.
    Type: Grant
    Filed: January 14, 2013
    Date of Patent: February 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: David L. Harame, Alvin J. Joseph, Qizhi Liu, Ramana M. Malladi
  • Patent number: 8610174
    Abstract: Disclosed is a transistor with a raised collector pedestal in reduced dimension for reduced base-collector junction capacitance. The raised collector pedestal is on the top surface of a substrate, extends vertically through dielectric layer(s), is un-doped or low-doped, is aligned above a sub-collector region contained within the substrate and is narrower than that sub-collector region. An intrinsic base layer is above the raised collector pedestal and the dielectric layer(s). An extrinsic base layer is above the intrinsic base layer. Thus, the space between the extrinsic base layer and the sub-collector region is increased. This increased space is filled by dielectric material and the electrical connection between the intrinsic base layer and the sub-collector region is provided by the relatively narrow, un-doped or low-doped, raised collector pedestal. Consequently, base-collector junction capacitance is reduced and, consequently, the maximum oscillation frequency is increased.
    Type: Grant
    Filed: November 30, 2011
    Date of Patent: December 17, 2013
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, John J. Ellis-Monaghan, David L. Harame, Qizhi Liu, John J. Pekarik
  • Patent number: 8564098
    Abstract: Disclosed is a method for controlling the recombination rate in the base region of a bipolar semiconductor component, and a bipolar semiconductor component.
    Type: Grant
    Filed: March 5, 2010
    Date of Patent: October 22, 2013
    Assignee: Infineon Technologies Austria AG
    Inventors: Anton Mauder, Franz Hirler, Frank Pfirsch, Hans-Joachim Schulze
  • Publication number: 20130249057
    Abstract: The product of the breakdown voltage (BVCEO) and the cutoff frequency (fT) of a SiGe heterojunction bipolar transistor (HBT) is increased beyond the Johnson limit by utilizing a doped region with a hollow core that extends down from the base to the heavily-doped buried collector region. The doped region and the buried collector region have opposite dopant types.
    Type: Application
    Filed: March 23, 2012
    Publication date: September 26, 2013
    Inventors: Jeffrey A. Babcock, Alexei Sadovnikov
  • Publication number: 20130168821
    Abstract: A Bipolar Junction Transistor with an intrinsic base, wherein the intrinsic base includes a top surface and two side walls orthogonal to the top surface, and a base contact electrically coupled to the side walls of the intrinsic base. In one embodiment an apparatus can include a plurality of Bipolar Junction Transistors, and a base contact electrically coupled to the side walls of the intrinsic bases of each BJT.
    Type: Application
    Filed: January 4, 2012
    Publication date: July 4, 2013
    Applicant: International Business Machines Corporation
    Inventors: Jin Cai, Tak H. Ning
  • Publication number: 20130168819
    Abstract: A bipolar junction transistor (BJT) formed using a fin field-effect transistor (FinFET) complimentary metal-oxide-semiconductor (CMOS) process flow is provided. The BJT includes an emitter fin, a base fin, and a collector fin formed on a substrate. The base fin encloses the emitter fin and collector fin encloses the emitter fin. In some embodiments, the emitter fin, base fin, and collector fin have a square shape when viewed from above and are concentric with each other.
    Type: Application
    Filed: December 28, 2011
    Publication date: July 4, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Sheng Chang, Yi-Tang Lin, Ming-Feng Shieh
  • Publication number: 20130153958
    Abstract: A semiconductor switching device includes a package, and a semiconductor switching element provided in the package and having a collector electrode and an emitter electrode. A main collector terminal and a main emitter terminal reflect voltage drop generated during application of current by a floating component in the package. A second collector terminal and a second emitter terminal detect a voltage between the collector electrode and the emitter electrode without reflecting the voltage drop. A third emitter terminal is arranged close to the second emitter terminal, and detects the voltage drop generated between the main emitter terminal and the second emitter terminal.
    Type: Application
    Filed: July 24, 2012
    Publication date: June 20, 2013
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Kazuhiro KURACHI
  • Publication number: 20130126944
    Abstract: A heterojunction bipolar transistor (HBT) may include an n-type doped crystalline collector formed in an upper portion of a crystalline silicon substrate layer; a p-type doped crystalline p+Si1-xGex layer, formed above the n-type doped collector, that forms a p-type doped internal base of the HBT; a crystalline silicon cap formed on the p-type doped crystalline p+Si1-xGex layer, in which the crystalline silicon cap includes an n-type impurity and forms an n-type doped emitter of the HBT; and an n-type doped crystalline silicon emitter stack formed within an opening through an insulating layer to an upper surface of the crystalline silicon cap.
    Type: Application
    Filed: November 23, 2011
    Publication date: May 23, 2013
    Applicant: International Business Machines Corporation
    Inventors: Thomas N. Adam, David L. Harame, Qizhi Liu, Alexander Reznicek
  • Patent number: 8421185
    Abstract: A parasitic vertical PNP device in one type of BiCMOS process with shallow trench isolation (STI) comprises a collector formed by a p type impurity ion implantation layer inside active area, the bottom of collector connects to a p type buried layer, the p type pseudo buried layer is formed in bottom of shallow trench at both sides of collector active region through ion implantation, deep contacts through field oxide to connect pseudo buried layers and to pick up the collector; a base, formed by n type impurity ion implantation layer which sits on top of above stated collector; an emitter, a p type epitaxy layer lies above base and is connected out directly by a metal contact. Part of the p type epitaxy layer is converted into n type, which serves as connection path of base. Present invented PNP can be used as output device of BiCMOS high frequency circuit. It has a small device area and conduction resistance.
    Type: Grant
    Filed: December 25, 2010
    Date of Patent: April 16, 2013
    Assignee: Shanghai Hua Hong NEC Electronics Company, Limited
    Inventors: Tzuyin Chiu, TungYuan Chu, Wensheng Qian, YungChieh Fan, Donghua Liu, Jun Hu
  • Publication number: 20130069154
    Abstract: The present invention is directed to a semiconductor chip comprising a high voltage device and a low voltage device disposed thereon. The chip may be formed in several different configurations. For example, the semiconductor chip may include a NPN bipolar transistor, PNP bipolar transistor, a diode, an N channel DMOS transistor and the like. the first doped well being configured as a base of the DMOS transistor, a P channel DMOS transistor and the like. These and other embodiments are described in further detail below.
    Type: Application
    Filed: September 20, 2011
    Publication date: March 21, 2013
    Applicant: Alpha and Omega Semiconductor Incorporated
    Inventor: Hideaki Tsuchiko
  • Publication number: 20130062614
    Abstract: An apparatus includes an enhancement mode transistor having multiple Group III-V layers above a substrate and a gate above the Group III-V layers. The gate includes multiple layers of material that form at least a portion of a thyristor. The multiple layers of material may include a first p-type layer of material, an n-type layer of material on the first p-type layer, and a second p-type layer of material on the n-type layer. The multiple layers of material may also include a p-type layer of material, an n-type layer of material on the p-type layer, and a Schottky metal layer on the n-type layer. The enhancement mode transistor may represent a high electron mobility transistor (HEMT) or a heterostructure field effect transistor (HFET).
    Type: Application
    Filed: August 21, 2012
    Publication date: March 14, 2013
    Applicant: Texas Instruments Incorporated
    Inventors: Naveen Tipirneni, Sameer Pendharkar
  • Patent number: 8384154
    Abstract: A bidirectional power transistor formed horizontally in a semiconductor layer disposed on a heavily-doped semiconductor wafer with an interposed insulating layer, the wafer being capable of being biased to a reference voltage, the product of the average dopant concentration and of the thickness of the semiconductor layer ranging between 5·1011 cm?2 and 5·1012 cm?2.
    Type: Grant
    Filed: November 22, 2010
    Date of Patent: February 26, 2013
    Assignees: STMicroelectronics (Tours) SAS, Universite Francois Rabelais UFR Sciences et Techniques
    Inventors: Jean-Baptiste Quoirin, Luong Viêt Phung, Nathalie Batut
  • Patent number: 8304814
    Abstract: A bipolar power semiconductor device is provided with an emitter electrode on an emitter side and a collector electrode on a collector side. The device has a trench gate electrode and a structure with a plurality of layers of different conductivity types in the following order: at least one n doped source region, a p doped base layer, which surrounds the at least one source region, an n doped enhancement layer, a p doped additional well layer, an additional n doped enhancement layer, an additional p doped well layer, an n doped drift layer and a p doped collector layer. The trench gate electrode has a gate bottom, which is located closer to the collector side than the additional enhancement layer bottom.
    Type: Grant
    Filed: June 29, 2011
    Date of Patent: November 6, 2012
    Assignee: ABB Research Ltd
    Inventor: Friedhelm Bauer
  • Publication number: 20120248573
    Abstract: Embodiments of the invention include a method for forming a tunable semiconductor device and the resulting structure. The invention comprises forming a semiconductor substrate. Next, pattern a first mask over the semiconductor substrate. Dope regions of the semiconductor substrate not protected by the first mask to form a first discontinuous subcollector. Remove the first mask. Pattern a second mask over the semiconductor substrate. Dope regions of the semiconductor substrate not protected by the second mask and on top of the first discontinuous subcollector to form a second discontinuous subcollector. Remove the second mask and form a collector above the second discontinuous subcollector. Breakdown voltage of the device may be tuned by varying the gaps separating doped regions within the first and second discontinuous subcollectors. Doped regions of the first and second discontinuous subcollectors may be formed in a mesh pattern.
    Type: Application
    Filed: March 31, 2011
    Publication date: October 4, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: David Louis Harame, Alvin Jose Joseph, Qizhi Liu, Ramana Murty Malladi
  • Publication number: 20120248574
    Abstract: A semiconductor structure and a manufacturing method and an operating method for the same are provided. The semiconductor structure comprises a first well region, a second well region, a first doped region, a second doped region, an anode, and a cathode. The second well region is adjacent to the first well region. The first doped region is on the second well region. The second doped region is on the first well region. The anode is coupled to the first doped region and the second well region. The cathode is coupled to the first well region and the second doped region. The first well region and the first doped region have a first conductivity type. The second well region and the second doped region have a second conductivity type opposite to the first conductivity type.
    Type: Application
    Filed: March 28, 2011
    Publication date: October 4, 2012
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Hsin-Liang Chen, Wing-Chor Chan, Shyi-Yuan Wu
  • Patent number: 8269313
    Abstract: A bipolar transistor at least includes a semiconductor substrate including an N? epitaxial growth layer and a P? silicon substrate, an N+ polysilicon layer, a tungsten layer, two silicide layers, a base electrode, an emitter electrode, and a collector electrode. The N+ polysilicon layer formed on the semiconductor substrate is covered with one of the silicide layers. The tungsten layer that is formed on the silicide layer is covered with the other silicide layer.
    Type: Grant
    Filed: April 1, 2010
    Date of Patent: September 18, 2012
    Assignee: Renesas Electronics Corporation
    Inventor: Akio Matsuoka
  • Publication number: 20120168908
    Abstract: A bipolar transistor is fabricated having a collector (52) in a substrate (1) and a base (57, 58) and an emitter (59) formed over the substrate. The base has a stack region (57) which is laterally separated from the emitter (59) by an electrically insulating spacer (71). The insulating spacer (71) has a width dimension at its top end at least as large as the width dimension at its bottom end and forms a ?-shape or an oblique shape. The profile reduces the risk of silicide bridging at the top of the spacer in subsequent processing, while maintaining the width of emitter window.
    Type: Application
    Filed: March 30, 2011
    Publication date: July 5, 2012
    Applicant: NXP B.V.
    Inventors: Tony Vanhoucke, Johannes Josephus Theodorus Marinus Donkers, Hans Mertens, Philippe Meunier-Beillard
  • Publication number: 20120168906
    Abstract: An electrostatic discharge (ESD) device includes a high-voltage well (HVW) region of a first conductivity type; a first heavily doped region of a second conductivity type opposite the first conductivity type over the HVW region; and a doped region of the first conductivity type contacting the first heavily doped region and the HVW region. The doped region is under the first heavily doped region and over the HVW region. The doped region has a first impurity concentration higher than a second impurity concentration of the HVW region and lower than a third impurity concentration of the first heavily doped region. The ESD device further includes a second heavily doped region of the second conductivity type over the HVW region; and a third heavily doped region of the first conductivity type over and contacting the HVW region.
    Type: Application
    Filed: April 21, 2011
    Publication date: July 5, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsi-Yu Kuo, Jam-Wem Lee, Yi-Feng Chang
  • Publication number: 20120146098
    Abstract: A method of making a semiconductor structure includes forming a trench through a shallow trench isolation (STI) structure and into a substrate, and forming a liner including an electrical insulator material on sidewalls of the trench. The method also includes forming a core including a high thermal conductivity material in the trench and on the liner, and forming a cap in the trench and on the core.
    Type: Application
    Filed: December 14, 2010
    Publication date: June 14, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Mattias E. DAHLSTROM, Dinh DANG, Qizhi LIU, Ramana M. MALLADI
  • Patent number: 8178947
    Abstract: There is provided a semiconductor device in which an amount of fluctuations in output capacitance and feedback capacitance is reduced. In a trench-type insulated gate semiconductor device, a width of a portion of an electric charge storage layer in a direction along which a gate electrode and a dummy gate are aligned is set to be at most 1.4 ?m.
    Type: Grant
    Filed: October 1, 2008
    Date of Patent: May 15, 2012
    Assignee: Mitsubishi Electric Corporation
    Inventors: Tetsuo Takahashi, Yoshifumi Tomomatsu
  • Patent number: 8159048
    Abstract: Embodiments of methods, apparatus, devices and/or systems associated with bipolar junction transistor are disclosed.
    Type: Grant
    Filed: January 30, 2004
    Date of Patent: April 17, 2012
    Assignee: TriQuint Semiconductor, Inc.
    Inventors: Thomas R. Apel, Jeremy R. Middleton
  • Publication number: 20120061730
    Abstract: There is provided a semiconductor wafer including a base wafer that has an impurity region in which an impurity atom has been introduced into silicon, a plurality of seed bodies provided in contact with the impurity region, and a plurality of compound semiconductors each provided in contact with the corresponding seed bodies and lattice-matched or pseudo-lattice-matched to the corresponding seed bodies. The semiconductor wafer can further include an inhibitor provided on the base wafer and in which a plurality of apertures exposing at least a part of the impurity region are provided.
    Type: Application
    Filed: November 21, 2011
    Publication date: March 15, 2012
    Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Sadanori YAMANAKA, Masahiko HATA, Noboru FUKUHARA
  • Patent number: 8129248
    Abstract: In the method of producing bipolar transistor structures in a semiconductor process, an advanced epitaxial trisilane process can be used without the risk of poly stringers being formed. A base window is structured in a polycrystalline silicon layer covered with an oxide layer, and a further step is epitaxial growing of a silicon layer in the base window from trisilane. The window structuring is performed in a sequence of anisotropic etch and isotropic ash steps, thereby creating stepped and inwardly sloping window edges. Due to the inwardly sloping side walls of the window, the epitaxially grown silicon layer is formed without inwardly overhanging structures, and the cause of poly stringers forming is thus eliminated.
    Type: Grant
    Filed: July 9, 2010
    Date of Patent: March 6, 2012
    Assignee: Texas Instruments Incorporated
    Inventors: Thomas Scharnagl, Berthold Staufer
  • Publication number: 20120049940
    Abstract: An embodiment of a vertical-conduction integrated electronic device formed in a body of semiconductor material which includes: a substrate made of a first semiconductor material and with a first type of conductivity, the first semiconductor material having a first bandgap; an epitaxial region made of the first semiconductor material and with the first type of conductivity, which overlies the substrate and defines a first surface; and a first epitaxial layer made of a second semiconductor material, which overlies the first surface and is in direct contact with the epitaxial region, the second semiconductor material having a second bandgap narrower than the first bandgap. The body moreover includes a deep region of a second type of conductivity, extending underneath the first surface and within the epitaxial region.
    Type: Application
    Filed: August 30, 2011
    Publication date: March 1, 2012
    Applicant: STMICROELECTRONICS S.R.L.
    Inventors: Ferruccio FRISINA, Mario Giuseppe SAGGIO, Angelo MAGRI'
  • Publication number: 20120032233
    Abstract: A Silicon-Germanium heterojunction bipolar transistor (SiGe HBT) formed on a silicon substrate, wherein, an active region is isolated by field oxide regions, a collector region is formed in the active region and extends into the bottom of the field oxide regions; pseudo buried layers are formed at the bottom of the field oxide regions. Each of the pseudo buried layers is a lateral distance away from the active region and contacts with a part of the collector region. Deep-hole contacts are formed in the field oxide regions located on top of the pseudo buried layers to pick up the collector region. The present invention can adjust the breakdown voltage of devices through adjusting the lateral distance. A method for manufacturing the SiGe HBT is also disclosed.
    Type: Application
    Filed: August 4, 2011
    Publication date: February 9, 2012
    Inventor: Wensheng Qian
  • Publication number: 20120001199
    Abstract: A bipolar power semiconductor device is provided with an emitter electrode on an emitter side and a collector electrode on a collector side. The device has a trench gate electrode and a structure with a plurality of layers of different conductivity types in the following order: at least one n doped source region, a p doped base layer, which surrounds the at least one source region, an n doped enhancement layer, a p doped additional well layer, an additional n doped enhancement layer, an additional p doped well layer, an n doped drift layer and a p doped collector layer. The trench gate electrode has a gate bottom, which is located closer to the collector side than the additional enhancement layer bottom.
    Type: Application
    Filed: June 29, 2011
    Publication date: January 5, 2012
    Applicant: ABB RESEARCH LTD
    Inventor: Friedhelm BAUER
  • Publication number: 20120001192
    Abstract: A semiconductor device, comprising a substrate layer made of a semiconductor material of a first conductivity type and having a first insulation region, and a vertical bipolar transistor having a first vertical portion of a collector made of monocrystalline semiconductor material of a second conductivity type and disposed in an opening of the first insulation region, a second insulation region lying partly on the first vertical portion of the collector and partly on the first insulation region and having an opening in the region of the collector, in which opening a second vertical portion of the collector made of monocrystalline material is disposed, said portion including an inner region of the second conductivity type, a base made of monocrystalline semiconductor material of the first conductivity type, a base connection region surrounding the base in the lateral direction, a T-shaped emitter made of semiconductor material of the second conductivity type and overlapping the base connection region, wherein t
    Type: Application
    Filed: December 3, 2009
    Publication date: January 5, 2012
    Inventors: Alexander Fox, Bernd Heinemann, Steffen Marschmeyer
  • Publication number: 20110309412
    Abstract: Superjunction collectors for transistors are discussed in this application. According to one embodiment, a bipolar transistor having a superjunction collector structure can comprise a collector electrode, a base electrode, an emitter electrode, a collector-base space charge region, and a superjunction collector. The collector-base space charge region can be disposed in electrical communication between the collector electrode and the base electrode. The superjunction collector region can be disposed in the collector-base space charge region. The superjunction collector region can comprise a plurality of alternating horizontally disposed P-type and N-type layers. The layers can be horizontally disposed layers that are layered on top of each other. The P-type and N-type layers can be doped with different types of doping levels. Other aspects, embodiments, and features are also discussed and claimed.
    Type: Application
    Filed: April 8, 2010
    Publication date: December 22, 2011
    Applicant: Georgia Tech Research Corporation
    Inventors: Jiahui Yuan, John D. Cressler
  • Publication number: 20110284963
    Abstract: A semiconductor device includes: a gate electrode formed above a semiconductor region; a drain region and a source region formed in portions of the semiconductor region located below sides of the gate electrode in a gate length direction, respectively; a plurality of drain contacts formed on the drain region to be spaced apart in a gate width direction of the gate electrode; and a plurality of source contacts formed on the source region to be spaced apart in the gate width direction of the gate electrode. The intervals between the drain contacts are greater than the intervals between the source contacts.
    Type: Application
    Filed: August 1, 2011
    Publication date: November 24, 2011
    Applicant: Panasonic Corporation
    Inventors: Hiroaki YABU, Toshihiro KOGAMI, Katsuya ARI
  • Publication number: 20110233727
    Abstract: The present invention discloses a vertical SOI bipolar junction transistor and a manufacturing method thereof. The bipolar junction transistor includes an SOI substrate from down to up including a body region, a buried oxide layer and a top silicon film; an active region located in the top silicon film formed by STI process; a collector region located in the active region deep close to the buried oxide layer formed by ion implantation; a base region located in the active region deep close to the top silicon film formed by ion implantation; an emitter and a base electrode both located over the base region; a side-wall spacer located around the emitter and the base electrode. The present invention utilizing a simple double poly silicon technology not only can improve the performance of the transistor, but also can reduce the area of the active region in order to increase the integration density.
    Type: Application
    Filed: July 14, 2010
    Publication date: September 29, 2011
    Applicant: SHANGHAI INSTITUTE OF MICROELECTRONICS AND INFORMATION TECHNOLOGY, CHINESE ACADEMY
    Inventors: Jing Chen, Jiexin Luo, Qingqing Wu, Jianhua Zhou, Xiaolu Huang, Xi Wang
  • Patent number: 7977708
    Abstract: A co-integrated HBT/FET apparatus and system, and methods for making the same, are disclosed. A co-integrated HBT/FET apparatus may include a first epitaxial structure formed over a substrate, the first epitaxial structure forming, at least in part, a FET device, a separation layer formed over the first epitaxial structure, and a second epitaxial structure formed over the separation layer, the second epitaxial structure forming, at least in part, a heterojunction bipolar transistor (HBT) device.
    Type: Grant
    Filed: November 15, 2007
    Date of Patent: July 12, 2011
    Assignee: Triquint Semiconductor, Inc.
    Inventors: Timothy Henderson, Jeremy Middleton, Sumir Varma, Corey Jordan, Gerard Mahoney, Bradley Avrit, Lucius Rivers
  • Publication number: 20110156202
    Abstract: A parasitic vertical PNP device in one type of BiCMOS process with shallow trench isolation (STI) comprises a collector formed by a p type impurity ion implantation layer inside active area, the bottom of collector connects to a p type buried layer, the p type pseudo buried layer is formed in bottom of shallow trench at both sides of collector active region through ion implantation, deep contacts through field oxide to connect pseudo buried layers and to pick up the collector; a base, formed by n type impurity ion implantation layer which sits on top of above stated collector; an emitter, a p type epitaxy layer lies above base and is connected out directly by a metal contact. Part of the p type epitaxy layer is converted into n type, which serves as connection path of base. Present invented PNP can be used as output device of BiCMOS high frequency circuit. It has a small device area and conduction resistance.
    Type: Application
    Filed: December 25, 2010
    Publication date: June 30, 2011
    Inventors: Tzuyin CHIU, TungYuan Chu, Wensheng Qian, YungChieh Fan, Donghua Liu, Jun Hu
  • Publication number: 20110156151
    Abstract: This invention disclosed a kind of electrode pick up structure in shallow trench isolation process. The active region is isolated by shallow trench. A pseudo-buried layer under the bottom of shallow trench is formed. The pseudo-buried layer extends into active region and connects to doping region one which needs to be picked up by an electrode. The pick up is realized by deep trench contacts which etch through STI and get in touch with pseudo buried layer. This invention can reduce the device size, pick up electrode resistance, collector parasitic capacitance, and increase device cut off frequency.
    Type: Application
    Filed: December 28, 2010
    Publication date: June 30, 2011
    Inventors: Tzuyin CHIU, TungYuan Chu, YungChieh Fan, Wensheng Qian, Jiong Xu, Fan Chen, Haifang Zhang
  • Publication number: 20110147892
    Abstract: A structure and fabrication method for a bipolar transistor with shallow trench isolation (STI) comprises a collector formed by implanting first electric type impurity in active area; pseudo buried layers at the bottom of STI at both sides of active area by implanting heavy dose of first electric type impurity; deep contacts through field oxide to connect to pseudo buried layers and to pick up the collector; a base, a thin film deposited on the collector and doped with second electric type impurity; an emitter, a polysilicon film doped by heavy dose implant of first electric type impurity. This transistor has smaller device area, less parasitic effect, less photo layers and lower process cost.
    Type: Application
    Filed: December 13, 2010
    Publication date: June 23, 2011
    Inventors: Tzuyin Chiu, TungYuan Chu, Wensheng Qian, YungChieh Fan
  • Publication number: 20110147893
    Abstract: By providing a novel bipolar device design implementation, a standard CMOS process can be used unchanged to fabricate useful bipolar transistors and other bipolar devices having adjustable properties by partially blocking the P or N well doping used for the transistor base. This provides a hump-shaped base region with an adjustable base width, thereby achieving, for example, higher gain than can be obtained with the unmodified CMOS process alone. By further partially blocking the source/drain doping step used to form the emitter of the bipolar transistor, the emitter shape and effective base width can be further varied to provide additional control over the bipolar device properties. The embodiments thus include prescribed modifications to the masks associated with the bipolar device that are configured to obtain desired device properties. The CMOS process steps and flow are otherwise unaltered and no additional process steps are required.
    Type: Application
    Filed: March 7, 2011
    Publication date: June 23, 2011
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Xin Lin, Bernhard H. Grote, Hongning Yang, Jiang-Kai Zuo
  • Publication number: 20110140239
    Abstract: A high voltage bipolar transistor with shallow trench isolation (STI) comprises the areas of a collector formed by implanting first electric type impurities into active area and connected with pseudo buried layers at two sides; Pseudo buried layers which are formed by implanting high dose first type impurity through the bottoms of STI at two sides if active area, and do not touch directly; deep contact through field oxide to contact pseudo buried layers and pick up the collectors; a base deposited on the collector by epitaxial growth and in-situ doped by second electric type impurity, in which the intrinsic base touches local collector and extrinsic base is used for base pick-up; a emitter which is a polysilicon layer deposited on the intrinsic base and doped with first electric type impurities. This invention makes the depletion region of collector/base junction from 1D (vertical) distribution to 2D (vertical and lateral) distribution.
    Type: Application
    Filed: December 13, 2010
    Publication date: June 16, 2011
    Inventors: Tzuyin CHIU, TungYuan CHU, Wensheng QIAN, YungChieh FAN, Jun HU, Donghua LIU, Yukun LV
  • Publication number: 20110024791
    Abstract: A bipolar semiconductor device and method are provided. One embodiment provides a bipolar semiconductor device including a first semiconductor region of a first conductivity type having a first doping concentration, a second semiconductor region of a second conductivity type forming a pn-junction with the first semiconductor region, and a plurality of third semiconductor regions of the first conductivity type at least partially arranged in the first semiconductor region and having a doping concentration which is higher than the first doping concentration. Each of the third semiconductor regions is provided with at least one respective junction termination structure.
    Type: Application
    Filed: July 30, 2009
    Publication date: February 3, 2011
    Applicant: Infineon Technologies Austria AG
    Inventors: Hans-Joachim Schulze, Frank Pfirsch, Franz-Josef Niedemostheide
  • Publication number: 20110018608
    Abstract: The present invention provides a bipolar transistor, a method for forming the bipolar transistor, a method for turning on the bipolar transistor, and a band-gap reference circuit, virtual ground reference circuit and double band-gap reference circuit with the bipolar transistor. The bipolar transistor includes: a Silicon-On-Insulator wafer; a base area, an emitter area and a collector area; a base area gate dielectric layer on a top silicon layer and atop the base area; a base area control-gate on the base area gate dielectric layer; an emitter electrode connected to the emitter area via a first contact; a collector electrode connected to the collector area via a second contact; and a base area control-gate electrode connected to the base area control-gate via a third contact.
    Type: Application
    Filed: July 23, 2010
    Publication date: January 27, 2011
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Min-hwa Chi, Lihying Ching, Deyuan Xiao
  • Publication number: 20110006341
    Abstract: An electrostatic discharge (ESD) protection element using an NPN bipolar transistor, includes: a trigger element connected at one end with a pad. The NPN bipolar transistor includes: a first base diffusion layer; a collector diffusion layer connected with the pad; a trigger tap formed on the first base diffusion layer and connected with the other end of the trigger element through a first wiring; and an emitter diffusion layer and a second base diffusion layer formed on the first base diffusion layer and connected in common to a power supply through a second wiring which is different from the first wiring.
    Type: Application
    Filed: June 29, 2010
    Publication date: January 13, 2011
    Applicant: RENESAS ELECTRONICS CORPORATION
    Inventor: Kouichi SAWAHATA
  • Patent number: 7755168
    Abstract: A semiconductor device has a first conductivity-type first semiconductor region, a second conductivity-type second semiconductor region and a second conductivity-type third semiconductor region both located on or above the first semiconductor region, a second conductivity-type fourth semiconductor region between the second semiconductor region and the third semiconductor region, and a first conductivity-type fifth semiconductor region between the third semiconductor region and the fourth semiconductor region. The fourth semiconductor region and the fifth semiconductor region are electrically connected by a conductive member. A distance between the fourth semiconductor region and the third semiconductor region is larger than a width of the fourth semiconductor region.
    Type: Grant
    Filed: April 20, 2007
    Date of Patent: July 13, 2010
    Assignee: Mitsubishi Electric Corporation
    Inventors: Tomohide Terashima, Shiori Uota
  • Publication number: 20100127304
    Abstract: A bipolar semiconductor device and manufacturing method. One embodiment provides a diode structure including a structured emitter coupled to a first metallization is provided. The structured emitter includes a first weakly doped semiconductor region of a first conductivity type which forms a pn-load junction with a weakly doped second semiconductor region of the diode structure. The structured emitter includes at least a highly doped first semiconductor island of the first conductivity type which at least partially surrounds a highly doped second semiconductor island of the second conductivity type.
    Type: Application
    Filed: November 26, 2008
    Publication date: May 27, 2010
    Applicant: Infineon Technologies Austria AG
    Inventors: Hans-Joachim Schulze, Frank Pfirsch
  • Publication number: 20100102391
    Abstract: In a gated diode ESD protection structure, the gate is split into two parts to divide the total reverse voltage between two gate regions.
    Type: Application
    Filed: October 27, 2008
    Publication date: April 29, 2010
    Inventors: Vladislav Vashchenko, Konstantin G. Korablev
  • Patent number: 7705427
    Abstract: An integrated circuit includes a bipolar transistor comprising a substrate and a collector formed in the substrate. The collector includes a highly doped lateral zone, a very lightly doped central zone and a lightly doped intermediate zone located between the central zone and the lateral zone 4a of the collector. The substrate includes a lightly doped lateral zone and a highly doped central zone. The dopant species in the zone of the substrate are electrically inactive.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: April 27, 2010
    Assignee: STMicroelectronics SA
    Inventors: Damien Lenoble, Thierry Schwartzmann, Laurence Boissonnet