Schottky Diode (epo) Patents (Class 257/E29.338)
  • Patent number: 11973078
    Abstract: Apparatus and circuits including transistors with different threshold voltages and methods of fabricating the same are disclosed. In one example, a semiconductor structure is disclosed. The semiconductor structure includes: a substrate; an active layer that is formed over the substrate and comprises a plurality of active portions; a polarization modulation layer comprising a plurality of polarization modulation portions each of which is disposed on a corresponding one of the plurality of active portions; and a plurality of transistors each of which comprises a source region, a drain region, and a gate structure formed on a corresponding one of the plurality of polarization modulation portions. The transistors have at least three different threshold voltages.
    Type: Grant
    Filed: February 1, 2023
    Date of Patent: April 30, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Chan-Hong Chern
  • Patent number: 11887858
    Abstract: A semiconductor device includes a semiconductor part, first and second electrodes. The semiconductor part is provided between the first and second electrodes. A method of manufacturing the device includes forming the first electrode covering a back surface of a wafer after the second electrode is formed on a front surface of the wafer; forming a first groove by selectively removing the first electrode; and dividing the wafer by forming a second groove at the front surface side. The wafer includes a region to be the semiconductor part; and the first and second grooves are provided along a periphery of the region. The first groove is in communication with the first groove. The second groove has a width in a direction along the front surface of the wafer, the width of the first groove being narrower than a width of the first groove in the same direction.
    Type: Grant
    Filed: April 20, 2022
    Date of Patent: January 30, 2024
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventors: Shinji Nunotani, Shinji Onzuka
  • Patent number: 11784238
    Abstract: A high electron mobility transistor (HEMT) includes a buffer layer on a substrate, a barrier layer on the buffer layer, a gate electrode on the barrier layer, a field plate adjacent to two sides of the gate electrode, and a first passivation layer adjacent to two sides of the gate electrode. Preferably, a sidewall of the field plate includes a first curve.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: October 10, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: An-Chi Liu, Chun-Hsien Lin
  • Patent number: 11777027
    Abstract: A first semiconductor region, a second semiconductor region, and a third semiconductor region are arranged in layers. Trenches penetrate through the second semiconductor region and reach the first semiconductor region. Each of the trenches may include a gate electrode, and an insulating film insulating the gate electrode from the first semiconductor region and the second semiconductor region. An upper electrode is electrically connected to the second semiconductor region and the third semiconductor region. A fourth semiconductor region of the second conductivity type is arranged on an outer side of the trench of which the gate electrode is an outermost gate electrode in a plan view. An edge trench is arranged on an outer side of the fourth semiconductor region. The fourth semiconductor region is electrically connected to the upper electrode and a bottom of the fourth semiconductor may be arranged deeper than a bottom of the second semiconductor region.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: October 3, 2023
    Assignees: SANKEN ELECTRIC CO., LTD., Allegro MicroSystems, LLC
    Inventor: Bungo Tanaka
  • Patent number: 11765910
    Abstract: The disclosed technology relates to a selector device for a memory array, and a method of forming the selector device. In some embodiments, the selector device comprises a first electrode layer embedded in an oxide; a second electrode layer arranged above the first electrode layer and separated from the first electrode layer by the oxide; and a semiconductor material forming a semiconductor layer on the top surface of the second electrode layer, and extending through the second electrode layer and the oxide onto the top surface of the first electrode layer, wherein the semiconductor material contacts the first electrode layer and the second electrode layer. In some embodiments, the selector device helps to solve the sneak path problem in the memory array it is inserted into.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: September 19, 2023
    Assignee: IMEC vzw
    Inventors: Gaspard Hiblot, Shamin Houshmand Sharifi, Luka Kljucar
  • Patent number: 11749751
    Abstract: A lateral transistor having a well region, a body region, a source region, a drain region, a gate structure and a trenched Schottky barrier structure. The trenched Schottky barrier structure extended vertically from a top surface of the well region through the source region and the body region and penetrated into at least a portion of the well region to form a vertical Schottky contact.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: September 5, 2023
    Assignee: Chengdu Monolithic Power Systems Co., Ltd.
    Inventors: Tao Hong, Daping Fu
  • Patent number: 11631773
    Abstract: A Schottky diode includes an upper region having a first doping concentration of a first conductivity type, the upper region disposed above the SiC substrate and extending up to a top planar surface. First and second layers of a second conductivity type are disposed in the upper region adjoining the top planar surface and extending downward to a depth. Each of the first and second layers has a second doping concentration, the depth, first doping concentration, and second doping concentration being selected such that the first and second layers are depleted of carriers at a zero bias condition of the Schottky diode. A top metal layer disposed along the top planar surface in direct contact with the upper region and the first and second layers is the anode, and bottom metal layer disposed beneath the SiC substrate is the cathode, of the Schottky diode.
    Type: Grant
    Filed: November 1, 2021
    Date of Patent: April 18, 2023
    Assignee: SEMIQ INCORPORATED
    Inventors: James A. Cooper, Rahul R. Potera
  • Patent number: 11355651
    Abstract: The semiconductor device of the present invention includes a first conductivity type semiconductor layer made of a wide bandgap semiconductor and a Schottky electrode formed to come into contact with a surface of the semiconductor layer, and has a threshold voltage Vth of 0.3 V to 0.7 V and a leakage current Jr of 1×10?9 A/cm2 to 1×10?4 A/cm2 in a rated voltage VR.
    Type: Grant
    Filed: January 14, 2021
    Date of Patent: June 7, 2022
    Assignee: ROHM CO., LTD.
    Inventors: Masatoshi Aketa, Yuta Yokotsuji
  • Patent number: 10418494
    Abstract: In a method of manufacturing a semiconductor device, a Schottky electrode is formed on an upper surface of a semiconductor substrate. A second region of the semiconductor substrate is etched such that a first region becomes higher than a second region, a rising surface is formed between the first and second regions, and an outer peripheral edge of the Schottky electrode is located on the first region. An insulating film is formed on the upper surface of the semiconductor substrate such that the insulating film annularly extends along the rising surface. A field plate electrode is formed. The field plate electrode is electrically connected with the Schottky electrode and faces the upper surface of the semiconductor substrate via the insulating film within an area extending from the outer peripheral edge of the Schottky electrode to the second region over the rising surface.
    Type: Grant
    Filed: January 10, 2018
    Date of Patent: September 17, 2019
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventor: Tatsuji Nagaoka
  • Patent number: 9035321
    Abstract: There is provided a semiconductor device including an ohmic junction layer which is excellent in surface flatness and uniformity of composition in an interface with a semiconductor substrate and thus can give a sufficiently high adhesiveness with a Schottky junction layer.
    Type: Grant
    Filed: August 20, 2009
    Date of Patent: May 19, 2015
    Assignee: SHOWA DENKO K.K.
    Inventors: Akihiro Matsuse, Kotaro Yano
  • Patent number: 9029975
    Abstract: An electronic device includes a silicon carbide layer including an n-type drift region therein, a contact forming a junction, such as a Schottky junction, with the drift region, and a p-type junction barrier region on the silicon carbide layer. The p-type junction barrier region includes a p-type polysilicon region forming a P-N heterojunction with the drift region, and the p-type junction barrier region is electrically connected to the contact. Related methods are also disclosed.
    Type: Grant
    Filed: March 8, 2010
    Date of Patent: May 12, 2015
    Assignee: Cree, Inc.
    Inventor: Qingchun Zhang
  • Patent number: 9006746
    Abstract: A Schottky barrier diode and a method of manufacturing the diode are provided. The diode includes an n? type epitaxial layer disposed on a first surface of an n+ type silicon carbide substrate and a plurality of p+ regions disposed within the n? type epitaxial layer. An n+ type epitaxial layer is disposed on the n? type epitaxial layer, a Schottky electrode is disposed on the n+ type epitaxial layer, and an ohmic electrode is disposed on a second surface of the n+ type silicon carbide substrate. The n+ type epitaxial layer includes a plurality of pillar parts disposed on the n? type epitaxial layer and a plurality of openings disposed between the pillar parts and that expose the p+ regions. Each of the pillar parts includes substantially straight parts that contact the n? type epitaxial layer and substantially curved parts that extend from the substantially straight parts.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: April 14, 2015
    Assignee: Hyundai Motor Company
    Inventors: Youngkyun Jung, Dae Hwan Chun, Kyoung-Kook Hong, Jong Seok Lee, Junghee Park
  • Patent number: 8994140
    Abstract: A vertical conduction nitride-based Schottky diode is formed using an insulating substrate which was lifted off after the diode device is encapsulated on the front side with a wafer level molding compound. The wafer level molding compound provides structural support on the front side of the diode device to allow the insulating substrate to be lifted off so that a conductive layer can be formed on the backside of the diode device as the cathode electrode. A vertical conduction nitride-based Schottky diode is thus realized. In another embodiment, a protection circuit for a vertical GaN Schottky diode employs a silicon-based vertical PN junction diode connected in parallel to the GaN Schottky diode to divert reverse bias avalanche current.
    Type: Grant
    Filed: May 15, 2014
    Date of Patent: March 31, 2015
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: TingGang Zhu, Anup Bhalla, Ping Huang, Yueh-Se Ho
  • Patent number: 8969993
    Abstract: A wide gap semiconductor device includes a substrate and a Schottky electrode. The substrate formed of a wide gap semiconductor material has a main face, and includes a first-conductivity-type region and a second-conductivity-type region. The Schottky electrode is arranged adjoining the main face of the substrate. At the substrate, there is foamed a trench having a side face continuous with the main face and a bottom continuous with the side face. The Schottky electrode adjoins the first-conductivity-type region at the side face of the trench and the main face, and adjoins the second-conductivity-type region at the bottom of the trench. The side face of the trench is inclined relative to the main face of the substrate.
    Type: Grant
    Filed: July 25, 2013
    Date of Patent: March 3, 2015
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Keiji Wada, Takeyoshi Masuda, Toru Hiyoshi
  • Patent number: 8969994
    Abstract: An MPS diode includes a III-nitride substrate characterized by a first conductivity type and a first dopant concentration and having a first side and a second side. The MPS diode also includes a III-nitride epitaxial structure comprising a first III-nitride epitaxial layer coupled to the first side of the substrate, wherein a region of the first III-nitride epitaxial layer comprises an array of protrusions. The III-nitride epitaxial structure also includes a plurality of III-nitride regions of a second conductivity type, each partially disposed between adjacent protrusions. Each of the plurality of III-nitride regions of the second conductivity type comprises a first section laterally positioned between adjacent protrusions and a second section extending in a direction normal to the first side of the substrate. The MPS diode further includes a first metallic structure electrically coupled to one or more of the protrusions and to one or more of the second sections.
    Type: Grant
    Filed: August 14, 2012
    Date of Patent: March 3, 2015
    Assignee: Avogy, Inc.
    Inventors: Madhan M. Raj, Brian Alvarez, David P. Bour, Andrew P. Edwards, Hui Nie, Isik C. Kizilyalli
  • Patent number: 8963276
    Abstract: A semiconductor device that can achieve a high-speed operation at a time of switching, and the like. The semiconductor device includes: a p-type buried layer buried within an n?-type semiconductor layer; and a p-type surface layer formed in a central portion of each of cells. In a contact cell, the p-type buried layer is in contact with the p-type surface layer. The semiconductor device further includes: a p+-type contact layer formed on the p-type surface layer of the contact cell; and an anode electrode provided on the n?-type semiconductor layer. The anode electrode forms a Schottky junction with the n?-type semiconductor layer and forms an ohmic junction with the p+-type contact layer.
    Type: Grant
    Filed: December 22, 2011
    Date of Patent: February 24, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventors: Hiroshi Watanabe, Naoki Yutani, Yoshiyuki Nakaki, Kenichi Ohtsuka
  • Patent number: 8957404
    Abstract: A hot hole transistor with a graphene base comprises on a substrate an emitter layer, a collector layer, and a base layer that comprises a graphene layer, wherein an emitter barrier layer is arranged between the base layer and the emitter layer, and a collector barrier layer is arranged between the base and the collector layers and adjacent to the graphene layer.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: February 17, 2015
    Assignee: IHP GmbH—Innovations for High Performance Microelectronics
    Inventors: Wolfgang Mehr, Jaroslaw Dabrowski, Max Lemme, Gunther Lippert, Grzegorz Lupina, Johann Christoph Scheytt
  • Patent number: 8933532
    Abstract: A semiconductor structure includes a III-nitride substrate characterized by a first conductivity type and having a first side and a second side opposing the first side, a III-nitride epitaxial layer of the first conductivity type coupled to the first side of the III-nitride substrate, and a plurality of III-nitride epitaxial structures of a second conductivity type coupled to the III-nitride epitaxial layer. The semiconductor structure further includes a III-nitride epitaxial formation of the first conductivity type coupled to the plurality of III-nitride epitaxial structures, and a metallic structure forming a Schottky contact with the III-nitride epitaxial formation and coupled to at least one of the plurality of III-nitride epitaxial structures.
    Type: Grant
    Filed: October 11, 2011
    Date of Patent: January 13, 2015
    Assignee: Avogy, Inc.
    Inventors: Andrew Edwards, Hui Nie, Isik C. Kizilyalli, Richard J. Brown, David P. Bour, Linda Romano, Thomas R. Prunty
  • Patent number: 8928108
    Abstract: An electronic device includes a silicon carbide layer including an n-type drift region therein, a contact forming a junction, such as a Schottky junction, with the drift region, and a p-type junction barrier region on the silicon carbide layer. The p-type junction barrier region includes a p-type polysilicon region forming a P-N heterojunction with the drift region, and the p-type junction barrier region is electrically connected to the contact. Related methods are also disclosed.
    Type: Grant
    Filed: March 8, 2010
    Date of Patent: January 6, 2015
    Assignee: Cree, Inc.
    Inventor: Qingchun Zhang
  • Patent number: 8901699
    Abstract: Integral structures that block the current conduction of the built-in PiN diode in a junction barrier Schottky (JBS) structure are provided. A Schottky diode may be incorporated in series with the PiN diode, where the Schottky diode is of opposite direction to that of the PiN diode. A series resistance or and insulating layer may be provided between the PiN diode and a Schottky contact. Silicon carbide Schottky diodes and methods of fabricating silicon carbide Schottky diodes that include a silicon carbide junction barrier region disposed within a drift region of the diode are also provided. The junction barrier region includes a first region of silicon carbide having a first doping concentration in the drift region of the diode and a second region of silicon carbide in the drift region and disposed between the first region of silicon carbide and a Schottky contact of the Schottky diode. The second region is in contact with the first region of silicon carbide and the Schottky contact.
    Type: Grant
    Filed: May 11, 2005
    Date of Patent: December 2, 2014
    Assignee: Cree, Inc.
    Inventors: Sei-Hyung Ryu, Anant K. Agarwal
  • Patent number: 8896084
    Abstract: A semiconductor device includes a first semiconductor region of a first conductivity type and formed of a material having a band gap wider than that of silicon; a first layer selectively disposed on a surface of and forming a first junction with the first semiconductor region; a second layer selectively disposed on the first semiconductor region and forming a second junction with the first semiconductor region; a first diode formed by a region including the first junction; a second diode formed by a region including the second junction; and a fourth semiconductor region of a second conductivity type and disposed in the first semiconductor region, between and contacting the first and second junctions. A recess and elevated portion are disposed on the first semiconductor region. The first and the second junctions are formed at different depths. The second diode has a lower built-in potential than the first diode.
    Type: Grant
    Filed: February 23, 2011
    Date of Patent: November 25, 2014
    Assignees: Fuji Electric Co., Ltd.
    Inventor: Yoshitaka Sugawara
  • Patent number: 8890277
    Abstract: Various embodiments are provided for graphite and/or graphene based semiconductor devices. In one embodiment, a semiconductor device includes a semiconductor layer and a semimetal stack. In another embodiment, the semiconductor device includes a semiconductor layer and a zero gap semiconductor layer. The semimetal stack/zero gap semiconductor layer is formed on the semiconductor layer, which forms a Schottky barrier. In another embodiment, a semiconductor device includes first and second semiconductor layers and a semimetal stack. In another embodiment, a semiconductor device includes first and second semiconductor layers and a zero gap semiconductor layer. The first semiconductor layer includes a first semiconducting material and the second semi conductor layer includes a second semiconducting material formed on the first semiconductor layer. The semimetal stack/zero gap semiconductor layer is formed on the second semiconductor layer, which forms a Schottky barrier.
    Type: Grant
    Filed: March 14, 2011
    Date of Patent: November 18, 2014
    Assignee: University of Florida Research Foundation Inc.
    Inventors: Arthur Foster Hebard, Sefaattin Tongay
  • Patent number: 8865540
    Abstract: A method for forming a Schottky diode including forming first and second trenches in a semiconductor layer, forming a thin dielectric layer lining sidewalls of the first and second trenches; forming a trench conductor layer in the first and second trenches where the trench conductor layer fills a portion of each of the first and second trenches and being the only one trench conductor layer in the first and second trenches; forming a first dielectric layer in the first and second trenches to fill the remaining portions of the first and second trenches; and forming a Schottky metal layer on a top surface of the lightly doped semiconductor layer between the first trench and the second trench to form a Schottky junction. The Schottky diode is formed with the Schottky metal layer as the anode and the lightly doped semiconductor layer between the first and second trenches as the cathode.
    Type: Grant
    Filed: November 18, 2013
    Date of Patent: October 21, 2014
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Daniel Calafut, Yi Su, Jongoh Kim, Hong Chang, Hamza Yilmaz, Daniel S. Ng
  • Patent number: 8860169
    Abstract: The present invention aims to enhance the reliability of a semiconductor device equipped with a Schottky barrier diode within the same chip, and its manufacturing technology. The semiconductor device includes an n-type n-well region formed over a p-type semiconductor substrate, an n-type cathode region formed in part thereof and higher in impurity concentration than the n-well region, a p-type guard ring region formed so as to surround the n-type cathode region, an anode conductor film formed so as to integrally cover the n-type cathode region and the p-type guard ring region and to be electrically coupled thereto, n-type cathode conduction regions formed outside the p-type guard ring region with each separation portion left therebetween, and a cathode conductor film formed so as to cover the n-type cathode conduction regions and to be electrically coupled thereto. The anode conductor film and the n-type cathode region are Schottky-coupled to each other.
    Type: Grant
    Filed: November 6, 2013
    Date of Patent: October 14, 2014
    Assignee: Renesas Electronics Corporation
    Inventors: Kunihiko Kato, Hideki Yasuoka, Masatoshi Taya, Masami Koketsu
  • Patent number: 8841697
    Abstract: A method of manufacturing a semiconductor device is disclosed. The method includes forming a first trench and a second trench in an n-type substrate surface, the first trenches being spaced apart from each other, the second trench surrounding the first trenches, the second trench being wider than the first trench. The method also includes forming a gate oxide film on the inner surfaces of the first and second trenches, and depositing an electrically conductive material to the thickness a half or more as large as the first trench width. The method further includes removing the electrically conductive material using the gate oxide film as a stopper layer, forming an insulator film thicker than the gate oxide film, and polishing the insulator film by CMP for exposing the n-type substrate and the electrically conductive material in the first trench.
    Type: Grant
    Filed: June 24, 2013
    Date of Patent: September 23, 2014
    Assignee: Fuji Electric Co., Ltd.
    Inventor: Tomonori Mizushima
  • Patent number: 8841683
    Abstract: A semiconductor rectifier device includes a semiconductor substrate of a first conductive type of a wide gap semiconductor; a semiconductor layer of the first conductive type of the wide gap semiconductor formed on an upper surface of the semiconductor substrate, wherein an impurity concentration of the semiconductor layer is between 1E+14 atoms/cm3 and 5E+16 atoms/cm3 inclusive, and a thickness thereof is 8 ?m or more; a first semiconductor region of the first conductive type of the wide gap semiconductor formed at the semiconductor layer surface; a plurality of second semiconductor regions of a second conductive type of the wide gap semiconductor formed as sandwiched by the first semiconductor regions, wherein a width of each of the second semiconductor regions is 15 ?m or more; a first electrode formed on the first and second semiconductor regions; and a second electrode formed on a lower surface of the semiconductor substrate.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: September 23, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Makoto Mizukami
  • Patent number: 8816468
    Abstract: A semiconductor rectifier includes a semiconductor substrate having a first type of conductivity. A first layer, which is formed on the substrate, has the first type of conductivity and is more lightly doped than the substrate. A second layer having a second type of conductivity is formed on the substrate and a metal layer is disposed over the second layer. The second layer is lightly doped so that a Schottky contact is formed between the metal layer and the second layer. A first electrode is formed over the metal layer and a second electrode is formed on a backside of the substrate.
    Type: Grant
    Filed: August 31, 2011
    Date of Patent: August 26, 2014
    Assignee: Vishay General Semiconductor LLC
    Inventors: Chih-Wei Hsu, Florin Udrea, Yih-Yin Lin
  • Patent number: 8816355
    Abstract: For suggesting a structure capable of achieving both a low start-up voltage and high breakdown voltage, a SiC vertical diode includes a cathode electrode, an n++ cathode layer, an n? drift layer on the n++ cathode layer, a pair of p+ regions, an n+ channel region formed between the n? drift layer and the p+ region and sandwiched between the pair of p+ regions, n++ anode regions and an anode electrode formed on the n++ anode regions and the p+ regions.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: August 26, 2014
    Assignee: Hitachi, Ltd.
    Inventor: Hidekatsu Onose
  • Patent number: 8809107
    Abstract: A method for making a Schottky barrier diode includes the following steps. A first metal layer, a second metal layer and a carbon nanotube composite material are provided. The carbon nanotube composite material is applied on the first metal layer and the second metal layer to form a semiconductor layer. The carbon nanotube composite material includes an insulated polymer and a number of carbon nanotubes dispersed in the insulated polymer. The semiconductor layer is in Schottky contact with the first metal layer and in ohmic contact with the second metal layer.
    Type: Grant
    Filed: December 26, 2011
    Date of Patent: August 19, 2014
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Chun-Hua Hu, Chang-Hong Liu, Shou-Shan Fan
  • Patent number: 8796088
    Abstract: A semiconductor device and a method of fabricating the semiconductor device is provided. In the method, a semiconductor substrate defining a device region and an outer region at a periphery of the device region is provided, an align trench is formed in the outer region, a dummy trench is formed in the device region, an epi layer is formed over a top surface of the semiconductor substrate and within the dummy trench, a current path changing part is formed over the epi layer, and a gate electrode is formed over the current path changing part. When the epi layer is formed, a current path changing trench corresponding to the dummy trench is formed over the epi layer, and the current path changing part is formed within the current path changing trench.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: August 5, 2014
    Assignee: Dongbu HiTek Co., Ltd.
    Inventor: Chul Jin Yoon
  • Patent number: 8779545
    Abstract: A semiconductor structure with dispersedly arranged active region trenches is provided. The semiconductor structure comprises a semiconductor substrate, an epitaxial layer, and an active region dielectric layer. The semiconductor substrate is doped with impurities of a first conductive type having a first impurity concentration. The epitaxial layer is doped with impurities of the first conductive type having a second impurity concentration and is formed on the semiconductor substrate. The epitaxial layer has a plurality of active region trenches formed therein being arranged in a dispersed manner. The active region dielectric layer covers a bottom and a sidewall of the active region trenches. Wherein, the active region trench has an opening in a tetragonal shape on a surface of the epitaxial layer, and the first impurity concentration is greater than the second impurity concentration.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: July 15, 2014
    Assignee: Taiwan Semiconductor Co., Ltd.
    Inventors: Chao-Hsin Huang, Chih-Chiang Chuang
  • Patent number: 8772901
    Abstract: A termination structure for a nitride-based Schottky diode includes a guard ring formed by an epitaxially grown P-type nitride-based compound semiconductor layer and dielectric field plates formed on the guard ring. The termination structure is formed at the edge of the anode electrode of the Schottky diode and has the effect of reducing electric field crowding at the anode electrode edge, especially when the Schottky diode is reverse biased. In one embodiment, the P-type epitaxial layer includes a step recess to further enhance the field spreading effect of the termination structure.
    Type: Grant
    Filed: November 11, 2011
    Date of Patent: July 8, 2014
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: TingGang Zhu, Anup Bhalla, Madhur Bodbe
  • Patent number: 8772900
    Abstract: The present invention discloses a trench Schottky barrier diode (SBD) and a manufacturing method thereof. The trench SBD includes: an epitaxial layer, formed on a substrate; multiple mesas, defined by multiple trenches; a field plate, formed on the epitaxial layer and filled in the multiple trenches, wherein a Schottky contact is formed between the field plate and top surfaces of the mesas; a termination region, formed outside the multiple mesas and electrically connected to the field plate; a field isolation layer, formed on the upper surface and located outside the termination region; and at least one mitigation electrode, formed below the upper surface outside the termination region, and is electrically connected to the field plate through the field isolation layer, wherein the mitigation electrode and the termination region are separated by part of a dielectric layer and part of the epitaxial layer.
    Type: Grant
    Filed: July 8, 2012
    Date of Patent: July 8, 2014
    Assignee: Richteck Technology Corporation
    Inventors: Tsung-Yi Huang, Chien-Hao Huang
  • Patent number: 8772842
    Abstract: A diode is described with a III-N material structure, an electrically conductive channel in the III-N material structure, two terminals, wherein a first terminal is an anode adjacent to the III-N material structure and a second terminal is a cathode in ohmic contact with the electrically conductive channel, and a dielectric layer over at least a portion of the anode. The anode comprises a first metal layer adjacent to the III-N material structure, a second metal layer, and an intermediary electrically conductive structure between the first metal layer and the second metal layer. The intermediary electrically conductive structure reduces a shift in an on-voltage or reduces a shift in reverse bias current of the diode resulting from the inclusion of the dielectric layer. The diode can be a high voltage device and can have low reverse bias currents.
    Type: Grant
    Filed: March 4, 2011
    Date of Patent: July 8, 2014
    Assignee: Transphorm, Inc.
    Inventor: Yuvaraj Dora
  • Patent number: 8765523
    Abstract: A method for manufacturing a semiconductor device includes the steps of preparing a substrate made of silicon carbide and having an n type region formed to include a main surface, forming a p type region in a region including the main surface, forming an oxide film on the main surface across the n type region and the p type region, by heating the substrate having the p type region formed therein at a temperature of 1250° C. or more, removing the oxide film to expose at least a part of the main surface, and forming a Schottky electrode in contact with the main surface that has been exposed by removing the oxide film.
    Type: Grant
    Filed: November 6, 2012
    Date of Patent: July 1, 2014
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Keiji Wada, Takeyoshi Masuda
  • Patent number: 8759888
    Abstract: A Schottky diode includes an n+-substrate, an n-epilayer, trenches introduced into the n-epilayer, floating Schottky contacts being located on their side walls and on the entire trench bottom, mesa regions between the adjacent trenches, a metal layer on its back face, this metal layer being used as a cathode electrode, and an anode electrode on the front face of the Schottky diode having two metal layers, the first metal layer of which forms a Schottky contact and the second metal layer of which is situated below the first metal layer and also forms a Schottky contact. Preferably, these two Schottky contacts have different barrier heights.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: June 24, 2014
    Assignee: Robert Bosch GmbH
    Inventors: Ning Qu, Alfred Goerlach
  • Patent number: 8749014
    Abstract: The present invention discloses a Schottky diode. The Schottky diode comprises a cathode region, an anode region and a guard ring region. The anode region may comprise a metal Schottky contact. The guard ring region may comprise an outer guard ring and a plurality of inner guard stripes inside the outer guard ring. And wherein the inner guard stripe has a shallower junction depth than the outer guard ring.
    Type: Grant
    Filed: September 7, 2011
    Date of Patent: June 10, 2014
    Assignee: Monolithic Power Systems, Inc.
    Inventor: Ji-Hyoung Yoo
  • Patent number: 8742533
    Abstract: This invention reveals a constant current semiconductor device of an N-type or a P-type epitaxial layer on a semi-insulating substrate, the device is treated by using a Schottky barrier to cut off current in conduction channels under certain bias and to provide constant current within cut-off voltage and breakdown voltage region between Schottky barrier section/ohmic contact section as the first electrode and the other ohmic contact section as the second electrode respectively, and has excellent characteristics as lower cut-off voltage (Vkp) than bipolar devices and easily gets higher constant current (Ip) by integrating several constant current units.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: June 3, 2014
    Assignee: Formosa Microsemi Co., Ltd
    Inventors: Sheau-Feng Tsai, Wen-Ping Huang, Tzuu-Chi Hu
  • Patent number: 8736013
    Abstract: In one general aspect, an apparatus includes a metal or metal silicide contact layer disposed on an n-well region of a semiconductor substrate to form a primary Schottky diode. The apparatus includes a p-well guard ring region of the semiconductor substrate abutting the primary Schottky diode. The metal silicide contact layer has a perimeter portion extending over the p-well guard ring region of the semiconductor substrate and the p-well guard ring region has a doping level establishing a work function difference relative to the perimeter portion of the metal silicide contact layer to form a guard ring Schottky diode. The guard ring Schottky diode is in series with a p-n junction interface of the p-well region and the n-well region and the guard ring Schottky diode has a polarity opposite to that of the primary Schottky diode.
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: May 27, 2014
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Chris Nassar, Dan Hahn, Sunglyong Kim, Jongjib Kim
  • Patent number: 8736012
    Abstract: A trenched semiconductor structure comprises a semiconductor substrate, an epitaxial layer, an ion implantation layer, a termination region dielectric layer, an active region dielectric layer, and a first polysilicon layer. The epitaxial layer doped with impurities of a first conductive type is formed on the semiconductor substrate. A plurality of active region trenches and a termination region trench are formed in the epitaxial layer. The ion implantation layer is formed in the active region trenches by doping impurities of a second conductive type. The termination region dielectric layer covers the termination region trench. The active region dielectric layer covers the ion implantation region. The first polysilicon layer covers the active region dielectric layer and fills the active region trenches. The depth of the termination region trench is greater than that of the active region trenches and close to that of the depletion region under reverse breakdown.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: May 27, 2014
    Assignee: Taiwan Semiconductor Co., Ltd.
    Inventors: Chao-Hsin Huang, Chih-Chiang Chuang
  • Patent number: 8716825
    Abstract: A semiconductor structure and a manufacturing method for the same are provided. The semiconductor structure includes a well region, a dielectric structure, a first doped layer, a second doped layer and a first doped region. The dielectric structure is on the well region. The dielectric structure has a first dielectric sidewall and a second dielectric sidewall opposite to each other. The dielectric structure includes a first dielectric portion and a second dielectric portion, between the first dielectric sidewall and the second dielectric sidewall. The first doped layer is on the well region between the first dielectric portion and the second dielectric portion. The second doped layer is on the first doped layer. The first doped region is in the well region on the first dielectric sidewall.
    Type: Grant
    Filed: June 22, 2011
    Date of Patent: May 6, 2014
    Assignee: Macronix International Co., Ltd.
    Inventors: Wing-Chor Chan, Chung-Yu Hung, Chien-Wen Chu
  • Patent number: 8680643
    Abstract: A Schottky diode includes a Schottky barrier and a plurality of dopant regions disposed near the Schottky barrier as floating islands to function as PN junctions for preventing a leakage current generated from a reverse voltage. At least a trench opened in a semiconductor substrate with a Schottky barrier material disposed therein constitutes the Schottky barrier. The Schottky barrier material may also be disposed on sidewalls of the trench for constituting the Schottky barrier. The trench may be filled with the Schottky barrier material composed of Ti/TiN or a tungsten metal disposed therein for constituting the Schottky barrier. The trench is opened in a N-type semiconductor substrate and the dopant regions includes P-doped regions disposed under the trench constitute the floating islands. The P-doped floating islands may be formed as vertical arrays under the bottom of the trench.
    Type: Grant
    Filed: June 27, 2012
    Date of Patent: March 25, 2014
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Ji Pan, Anup Bhalla
  • Publication number: 20140061731
    Abstract: A device includes a semiconductor substrate, first and second electrodes supported by the semiconductor substrate, laterally spaced from one another, and disposed at a surface of the semiconductor substrate to form an Ohmic contact and a Schottky junction, respectively. The device further includes a conduction path region in the semiconductor substrate, having a first conductivity type, and disposed along a conduction path between the first and second electrodes, a buried region in the semiconductor substrate having a second conductivity type and disposed below the conduction path region, and a device isolating region electrically coupled to the buried region, having the second conductivity type, and defining a lateral boundary of the device. The device isolating region is electrically coupled to the second electrode such that a voltage at the second electrode during operation is applied to the buried region to deplete the conduction path region.
    Type: Application
    Filed: September 6, 2012
    Publication date: March 6, 2014
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Weize Chen, Xin Lin, Patrice M. Parris
  • Publication number: 20140061733
    Abstract: A semiconductor device includes a semiconductor body with a first surface, a contact electrode arranged on the first surface, and a passivation layer on the first surface adjacent the contact electrode. The passivation layer includes a layer stack with an amorphous semi-insulating layer on the first surface, a first nitride layer on the amorphous semi-insulating layer, and a second nitride layer on the first nitride layer.
    Type: Application
    Filed: August 29, 2012
    Publication date: March 6, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Gerhard Schmidt, Josef-Georg Bauer, Carsten Schaeffer, Oliver Humbel, Angelika Koprowski, Sirinpa Monayakul
  • Publication number: 20140048903
    Abstract: A method for fabricating edge termination structures in gallium nitride (GaN) materials includes providing an n-type GaN substrate having a first surface and a second surface, forming an n-type GaN epitaxial layer coupled to the first surface of the n-type GaN substrate, and forming one or more p-type regions in the n-type GaN epitaxial layer by using a first ion implantation. At least one of the one or more p-type regions includes an edge termination structure.
    Type: Application
    Filed: August 15, 2012
    Publication date: February 20, 2014
    Applicant: AVOGY, INC.
    Inventors: Andrew Edwards, Hui Nie, Isik Kizilyalli, Dave Bour
  • Publication number: 20140048902
    Abstract: An MPS diode includes a III-nitride substrate characterized by a first conductivity type and a first dopant concentration and having a first side and a second side. The MPS diode also includes a III-nitride epitaxial structure comprising a first III-nitride epitaxial layer coupled to the first side of the substrate, wherein a region of the first III-nitride epitaxial layer comprises an array of protrusions. The III-nitride epitaxial structure also includes a plurality of III-nitride regions of a second conductivity type, each partially disposed between adjacent protrusions. Each of the plurality of III-nitride regions of the second conductivity type comprises a first section laterally positioned between adjacent protrusions and a second section extending in a direction normal to the first side of the substrate. The MPS diode further includes a first metallic structure electrically coupled to one or more of the protrusions and to one or more of the second sections.
    Type: Application
    Filed: August 14, 2012
    Publication date: February 20, 2014
    Applicant: AVOGY , INC.
    Inventors: Madhan M. Raj, Brian Alvarez, David P. Bour, Andrew P. Edward, Hui Nie, Isik C. Kizilyalli
  • Publication number: 20140048815
    Abstract: A Schottky barrier diode (SBD) is disclosed, which includes: a gallium nitride (GaN) layer, formed on a substrate; an aluminum gallium nitride (AlGaN), formed on the GaN layer; an insulation layer, formed on the AlGaN layer; an anode conducive layer, formed on the insulation layer, wherein Schottky contact is formed between a part of the anode conductive layer and the AlGaN layer or between a part of the anode conductive layer and the GaN layer, and another part of the anode conductive layer is separated from the AlGaN layer by the insulation layer; and a cathode conductive layer, formed on the AlGaN layer, wherein an ohmic contact is formed between the cathode conductive layer and the GaN layer or between the cathode conductive layer and the AlGaN layer, and wherein the anode conductive layer is not directly connected to the cathode conductive layer.
    Type: Application
    Filed: August 20, 2012
    Publication date: February 20, 2014
    Inventors: Tsung-Yi Huang, Chien-Wei Chiu, Chih-Fang Huang, Tsung-Yu Yang
  • Patent number: 8653534
    Abstract: An electronic device includes a silicon carbide drift region having a first conductivity type, a Schottky contact on the drift region, and a plurality of junction barrier Schottky (JBS) regions at a surface of the drift region adjacent the Schottky contact. The JBS regions have a second conductivity type opposite the first conductivity type and have a first spacing between adjacent ones of the JBS regions. The device further includes a plurality of surge protection subregions having the second conductivity type. Each of the surge protection subregions has a second spacing between adjacent ones of the surge protection subregions that is less than the first spacing.
    Type: Grant
    Filed: July 11, 2012
    Date of Patent: February 18, 2014
    Assignee: Cree, Inc.
    Inventors: Qingchun Zhang, Sei-Hyung Ryu
  • Patent number: 8648437
    Abstract: A Schottky photodiode may include a monocrystalline semiconductor substrate having a front surface, a rear surface, and a first dopant concentration and configured to define a cathode of the Schottky photodiode, a doped epitaxial layer over the front surface of the monocrystalline semiconductor substrate having a second dopant concentration less than the first dopant concentration, and parallel spaced apart trenches in the doped epitaxial layer and having of a depth less than a depth of the doped epitaxial layer.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: February 11, 2014
    Assignee: STMicroelectronics S.R.L.
    Inventor: Massimo Cataldo Mazzillo
  • Patent number: 8637872
    Abstract: A high-performance semiconductor device capable of suppressing a leak current with little electric field concentration, reducing an invalid region in a PN junction region, securing a sufficient area for a Schottky junction region, and achieving efficient and easy manufacturing, in which, in one surface of a semiconductor substrate (1) having a first conduction type made of SiC, a PN junction region (7a) and a Schottky junction region (7b) are provided, in the PN junction region (7a), a convex portion (2a) which has a trapezoidal shape in sectional view and includes a second conduction type layer (2) provided on the semiconductor substrate (1) and a contact layer (3) which is in ohmic contact with the second conduction type layer (2) of the convex portion (2a) are provided, and Schottky electrode (4) covers the side surface of the convex portion (2a) and the contact layer (3), and is provided continuously over the PN junction region (7a) and the Schottky junction region (7b).
    Type: Grant
    Filed: October 23, 2009
    Date of Patent: January 28, 2014
    Assignee: Showa Denko K.K.
    Inventor: Akihiko Sugai