Solid-state Devices Adapted For Rectifying, Amplifying, Oscillating, Or Switching Without Potential-jump Barrier Or Surface Barrier, E.g., Dielectric Triodes; Ovshinsky-effect Devices, Processes, Or Apparatus Peculiar To Manufacture Or Treatment Thereof, Or Of Parts Thereof (epo) Patents (Class 257/E45.001)
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Patent number: 8816313Abstract: Provided are a memory element and a memory device. A memory layer is provided with an ion source layer. The ion source layer includes Zr (zirconium), Cu (copper), and Al (aluminum) as a metal element together with an ion conductive material such as S (sulfur), Se (selenium), and Te (tellurium) (chalcogen element). The amount of Al in the ion source layer is 30 to 50 atomic percent. The amount of Zr is preferably 7.5 to 25 atomic percent, and more preferably, the composition ratio of Zr to the chalcogen element in total included in the ion source layer (=Zr (atomic percent)/chalcogen element in total (atomic percent)) falls within a range from 0.2 to 0.74.Type: GrantFiled: August 28, 2009Date of Patent: August 26, 2014Assignee: Sony CorporationInventors: Kazuhiro Ohba, Tetsuya Mizuguchi, Shuichiro Yasuda
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Patent number: 8809830Abstract: A variable resistance memory according to the present embodiment includes a memory cell including an ion source electrode including metal atoms, an opposite electrode, an amorphous silicon film formed between the ion source electrode and the opposite electrode, and a polysilicon film formed between the amorphous silicon film and the ion source electrode.Type: GrantFiled: March 21, 2012Date of Patent: August 19, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Hirohisa Kawasaki
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Patent number: 8803125Abstract: Memory devices utilizing memory cells including a resistive element and a diode coupled in series between two conductors. The diodes include a ruthenium material and a silicon material. The diodes further include an interface on the silicon material of ruthenium or ruthenium silicide. A ruthenium silicide interface may be a polycrystalline ruthenium silicide.Type: GrantFiled: March 11, 2013Date of Patent: August 12, 2014Assignee: Micron Technology, Inc.Inventors: Nirmal Ramaswamy, Kirk D. Prall
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Patent number: 8803122Abstract: Phase-change memory structures are formed with ultra-thin heater liners and ultra-thin phase-change layers, thereby increasing heating capacities and lowering reset currents. Embodiments include forming a first interlayer dielectric (ILD) over a bottom electrode, removing a portion of the first ILD, forming a cell area, forming a u-shaped heater liner within the cell area, forming an interlayer dielectric structure within the u-shaped heater liner, the interlayer dielectric structure including a protruding portion extending above a top surface of the first ILD, forming a phase-change layer on side surfaces of the protruding portion and/or on the first ILD surrounding the protruding portion, and forming a dielectric spacer surrounding the protruding portion.Type: GrantFiled: July 31, 2012Date of Patent: August 12, 2014Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Shyue Seng (Jason) Tan, Eng Huat Toh
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Patent number: 8803121Abstract: Resistive memory elements and arrays of resistive memory elements are disclosed. In one embodiment, a resistive memory element includes a top electrode element lying in a plane parallel to a reference plane, and having, in perpendicular projection on the reference plane, a top electrode projection; a bottom electrode element lying in a plane parallel to the reference plane, and having, in perpendicular projection on the reference plane, a bottom electrode projection; and an active layer with changeable resistivity interposed between the top electrode element and the bottom electrode element. The top electrode projection and the bottom electrode projection overlap in an overlapping region that comprises a corner of the top electrode projection and/or a corner of the bottom electrode projection, and an area of the overlapping region constitutes less than 10% of a total projected area of the top electrode element and the bottom electrode element on the reference plane.Type: GrantFiled: March 9, 2012Date of Patent: August 12, 2014Assignee: IMECInventor: Ludovic Goux
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Patent number: 8759808Abstract: A memory cell including a via made of a phase-change material arranged between a lower electrode and an upper electrode, wherein the via includes a first region adjacent to a second region itself adjacent to at least one third region, the first, second, and third regions each extending from the upper electrode to the lower electrode, the crystallization temperature of the second region ranging between that of the first region and that of the third region, and the melting temperatures of the first, second, and third regions being substantially identical.Type: GrantFiled: September 4, 2013Date of Patent: June 24, 2014Assignees: STMicroelectronics (Crolles 2) SAS, Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Jean-Francois Nodin, Veronique Sousa, Sandrine Lhostis
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Patent number: 8754391Abstract: Nonvolatile memory devices including a first interlayer insulating film and a second interlayer insulating film separated from each other and are stacked sequentially, a first electrode penetrating the first interlayer insulating film and the second interlayer insulating film, a resistance change film along a top surface of the first interlayer insulating film, side surfaces of the first electrode, and a bottom surface of the second interlayer insulating film, and a second electrode between the first interlayer insulating film and the second interlayer insulating film.Type: GrantFiled: February 6, 2012Date of Patent: June 17, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-Jun Seong, Chan-Jin Park
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Patent number: 8735859Abstract: A nonvolatile semiconductor memory device includes: a first interconnect; a second interconnect at a position opposing the first interconnect; and a variable resistance layer between the first interconnect and the second interconnect, the variable resistance layer being capable of reversibly changing between a first state and a second state by a voltage applied via the first interconnect and the second interconnect or a current supplied via the first interconnect and the second interconnect, the first state having a first resistivity, the second state having a second resistivity higher than the first resistivity. Wherein the variable resistance layer has a compound of carbon and silicon as a main component and including hydrogen.Type: GrantFiled: November 29, 2010Date of Patent: May 27, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Shuichi Kuboi, Masayuki Takata, Tsukasa Nakai, Hiroyuki Fukumizu, Yasuhiro Nojiri, Kenichi Ootsuka
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Patent number: 8735862Abstract: Some embodiments include memory cells which have multiple programmable material structures between a pair of electrodes. One of the programmable material structures has a first edge, and another of the programmable material structures has a second edge that contacts the first edge. Some embodiments include methods of forming an array of memory cells. First programmable material segments are formed over bottom electrodes. The first programmable material segments extend along a first axis. Lines of second programmable material are formed over the first programmable material segments, and are formed to extend along a second axis that intersects the first axis. The second programmable material lines have lower surfaces that contact upper surfaces of the first programmable material segments. Top electrode lines are formed over the second programmable material lines.Type: GrantFiled: April 11, 2011Date of Patent: May 27, 2014Assignee: Micron Technology, Inc.Inventors: Jun Liu, John K. Zahurak
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Patent number: 8723153Abstract: Formulations for voltage switchable dielectric materials include two or more different types of semiconductive materials uniformly dispersed within a dielectric matrix material. The semiconductive materials are selected to have different bandgap energies in order to provide the voltage switchable dielectric material with a stepped voltage response. The semiconductive materials may comprise inorganic particles, organic particles, or an organic material that is soluble in, or miscible with, the dielectric matrix material. Formulations optionally can also include electrically conductive materials. At least one of the conductive or semiconductive materials in a formulation can comprise particles characterized by an aspect ratio of at least 3 or greater.Type: GrantFiled: April 14, 2012Date of Patent: May 13, 2014Assignee: Littelfuse, Inc.Inventors: Lex Kosowsky, Robert Fleming
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Patent number: 8722445Abstract: A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes forming a plurality of discrete wires on a substrate. The method further includes forming a sacrificial cavity layer on the discrete wires. The method further includes forming trenches in an upper surface of the sacrificial cavity layer. The method further includes filling the trenches with dielectric material. The method further includes depositing metal on the sacrificial cavity layer and on the dielectric material to form a beam with at least one dielectric bumper extending from a bottom surface thereof.Type: GrantFiled: December 20, 2010Date of Patent: May 13, 2014Assignee: International Business Machines CorporationInventors: Dinh Dang, Thai Doan, Jeffrey C. Maling, Anthony K. Stamper
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Patent number: 8723151Abstract: A resistive random access memory cell formed in an integrated circuit includes a first resistive random access memory device including an anode and a cathode, a second resistive random access memory device including an anode and a cathode, the cathode of the second resistive random access memory device connected to the anode of the first resistive random access memory device, a programming transistor having a first source/drain terminal connected to a programming potential node, a second source/drain terminal connected to the anode of the first resistive random access memory device and the cathode of the second resistive random access memory device, and a gate connected to a program-enable nod, and at least one switch transistor having a gate connected to the anode of the first resistive random access memory device and the cathode of the second resistive random access memory device.Type: GrantFiled: March 15, 2013Date of Patent: May 13, 2014Assignee: Microsemi SoC CorporationInventors: Jonathan Greene, Frank W. Hawley, John McCollum
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Patent number: 8716691Abstract: According to one embodiment, a nonvolatile memory device includes a lower electrode layer, a nanomaterial assembly layer, and an upper electrode layer. The nanomaterial assembly layer is provided on the lower electrode layer and includes a plurality of micro conductive bodies assembled via a gap. The upper electrode layer is provided on the nanomaterial assembly layer. The portion of the micro conductive bodies is buried at least in a lower part of the upper electrode layer.Type: GrantFiled: December 20, 2010Date of Patent: May 6, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Shigeto Oshino
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Publication number: 20140117301Abstract: A device is disclosed. The device includes a top electrode, a bottom electrode and a storage element between the top and bottom electrodes. The storage element includes a heat generating element disposed on the bottom electrode, a phase change element wrapping around an upper portion of the heat generating element, and a dielectric liner sandwiched between the phase change element and the heat generating element.Type: ApplicationFiled: October 30, 2012Publication date: May 1, 2014Applicant: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Khee Yong LIM, Zufa ZHANG
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Publication number: 20140110657Abstract: Some embodiments include memory constructions having a plurality of bands between top and bottom electrically conductive materials. The bands include chalcogenide bands alternating with non-chalcogenide bands. In some embodiments, there may be least two of the chalcogenide bands and at least one of the non-chalcogenide bands. In some embodiments, the memory cells may be between a pair of electrodes; with one of the electrodes being configured as a lance, angled plate, container or beam. In some embodiments, the memory cells may be electrically coupled with select devices, such as, for example, diodes, field effect transistors or bipolar junction transistors.Type: ApplicationFiled: October 23, 2012Publication date: April 24, 2014Applicant: MICRON TECHNOLOGY, INC.Inventors: Andrea Redaelli, Agostino Pirovano
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Publication number: 20140110658Abstract: Some embodiments include memory constructions having a film of phase change material between first and second materials; with the entirety of film having a thickness of less than or equal to about 10 nanometers. The memory constructions are configured to transit from one memory state having a first phase of the phase change material to a second memory state having a second phase of the phase change material, and are configured so that an entirety of the phase change material film changes from the first phase to the second phase in transitioning from the first memory state to the second memory state. In some embodiments, at least one of the first and second materials may be carbon, W, TiN, TaN or TiAlN. In some embodiments, at least one of the first and second materials may be part of a structure having bands of two or more different compositions.Type: ApplicationFiled: October 23, 2012Publication date: April 24, 2014Applicant: MICRON TECHNOLOGY, INC.Inventor: Andrea Redaelli
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Patent number: 8692223Abstract: A resistance variable memory device includes: a first electrode; a second electrode; a resistance variable layer interposed between the first electrode and the second electrode; and nano particles that are disposed in the resistance variable layer and have a lower dielectric constant than the resistance variable layer.Type: GrantFiled: August 28, 2012Date of Patent: April 8, 2014Assignee: SK Hynix Inc.Inventors: Ji-Won Moon, Moon-Sig Joo, Sung-Hoon Lee, Jung-Nam Kim
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Publication number: 20140091273Abstract: A resistive random access memory (RRAM) unit includes at least one bit line extending along a first direction, at least one word line disposed on a substrate and extending along a second direction so as to intersect the bit line, a hard mask layer on the word line to isolate the word line from the bit line, a first memory cell on a sidewall of the word line, and a second memory cell on the other sidewall of the word line.Type: ApplicationFiled: November 13, 2012Publication date: April 3, 2014Applicant: POWERCHIP TECHNOLOGY CORPORATIONInventors: Chan-Ching Lin, Chen-Hao Huang, Tzung-Bin Huang, Chun-Cheng Chen, Ching-Hua Chen
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Patent number: 8686384Abstract: According to one embodiment, a memory device includes a nanomaterial assembly layer, a first electrode layer and a second electrode layer. The nanomaterial assembly layer is formed of an assembly of a plurality of micro conductors via gaps between the micro conductors. The first electrode layer is provided on the nanomaterial assembly layer. The second electrode layer is provided on the first electrode layer.Type: GrantFiled: March 21, 2011Date of Patent: April 1, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Kenji A{dot over (o)}yama, Kazuhiko Yamamoto, Satoshi Ishikawa, Shigeto Oshino
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Publication number: 20140084232Abstract: In one embodiment of the present invention, a memory cell includes a first resistive switching element having a first terminal and a second terminal, and a second resistive switching element having a first terminal and a second terminal. The memory further includes a three terminal transistor, which has a first terminal, a second terminal, and a third terminal. The first terminal of the three terminal transistor is coupled to the first terminal of the first resistive switching element. The second terminal of the three terminal transistor is coupled to the first terminal of the second resistive switching element. The third terminal of the three terminal transistor is coupled to a word line.Type: ApplicationFiled: September 24, 2012Publication date: March 27, 2014Applicant: ADESTO TECHNOLOGIES CORPORATIONInventor: Adesto Technologies Corporation
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Publication number: 20140084233Abstract: A method of forming a resistive switching device includes forming a wiring structure over a first dielectric and substrate, forming a junction layer over the wiring structure, forming a resistive switching layer over the junction layer, forming an active metal over the resistive switching layer, forming a tungsten layer over the active metal, forming a barrier layer over the tungsten, depositing a mask over the barrier layer, etching the barrier layer to form a hard mask, etching the junction layer, the resistive switching layer, the active metal layer, and the adhesion layer using the hard mask to form a stack of material, while the adhesion layer maintains adhesion between the barrier layer and the active metal and while side walls of the stack of material have reduced contaminants and have reduced gap regions between the barrier layer and the resistive switching layer.Type: ApplicationFiled: September 24, 2012Publication date: March 27, 2014Applicant: Crossbar, Inc.Inventor: Steven Patrick MAXWELL
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Publication number: 20140084234Abstract: A semiconductor device includes a channel strain altering material formed over or in the source and drain regions of the device. The channel strain altering material may be used to alter the strain in a channel region of the device after manufacturing of the device (e.g., after the device is formed or during operable use of the device). Changes in one or more of material properties of the channel strain altering material may be used to change the strain in the channel region. Changes in the material properties of the channel strain altering material may change a physical size or structure of the channel strain altering material. The channel strain altering material may include materials such as phase change materials or ferromagnetic materials.Type: ApplicationFiled: September 27, 2012Publication date: March 27, 2014Applicant: APPLE INC.Inventor: Michael R Seningen
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Patent number: 8680505Abstract: A semiconductor memory device, including: plural parallel first lines; plural second lines disposed to intersect the first lines; and a memory cell array including memory cells, disposed at intersections of the first lines and the second lines, each of the memory cells configured by a rectifier element and a variable resistor connected in series. The rectifier element includes: a first semiconductor region including an impurity of a first conductivity type at a first impurity concentration; and a second semiconductor region including an impurity of a second conductivity type at a second impurity concentration lower than the first impurity concentration and including an impurity of the first conductivity type at a third impurity concentration lower than the second impurity concentration, the first and second semiconductor regions being formed by silicon.Type: GrantFiled: August 7, 2013Date of Patent: March 25, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Hiroomi Nakajima
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Patent number: 8673717Abstract: A method to prevent a gate contact from electrically connecting to a source contact for a plurality of memory cells on a substrate. The method includes forming pillars with a doped silicon region on the substrate. An electrically conductive gate material is deposited between and over the pillars. The gate material is etched such that the gate material partially fills a space between the pillars. The pillars are then etched such that a pair of pillars from the pillars include an insulating material over the doped silicon region. A gate contact is deposited between the pair of pillars such that the gate contact electrically couples the gate material at a contact interface level, and the insulating material extends below the contact interface level.Type: GrantFiled: July 18, 2012Date of Patent: March 18, 2014Assignee: International Business Machines CorporationInventors: Matthew J. BrightSky, Chung H. Lam, Gen P. Lauer
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Publication number: 20140061575Abstract: Three dimensional memory array architectures and methods of forming the same are provided. An example memory array can include a stack comprising a plurality of first conductive lines at a number of levels separated from one another by at least an insulation material, and at least one conductive extension arranged to extend substantially perpendicular to the plurality of first conductive lines. Storage element material is formed around the at least one conductive extension. Cell select material is formed around the at least one conductive extension. The at least one conductive extension, storage element material, and cell select material are located between co-planar pairs of the plurality of first conductive lines.Type: ApplicationFiled: August 31, 2012Publication date: March 6, 2014Applicant: Micron Technology, Inc.Inventor: Federico Pio
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Publication number: 20140061576Abstract: Memory devices and methods for forming a device are disclosed. A substrate prepared with a lower electrode level with bottom electrodes is provided. Fin stack layers are formed on the lower electrode level. Spacers are formed on top of the fin stack layers. The spacers have a width which is less than a lithographic resolution. The fin stack layers are patterned using the spacers as a mask to form fin stacks. The fin stacks contact the bottom electrodes. An interlevel dielectric (ILD) layer is formed on the substrate. The ILD layer fills spaces around the fin stacks. An upper electrode level is formed on the ILD layer. The upper electrode level has top electrodes in contact with the fin stacks. The electrodes and fin stacks form fin-type memory cells.Type: ApplicationFiled: September 3, 2012Publication date: March 6, 2014Applicant: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Eng Huat TOH, Elgin QUEK, Shyue Seng TAN
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Publication number: 20140061574Abstract: Three dimension memory arrays and methods of forming the same are provided. An example three dimension memory array can include a stack comprising a plurality of first conductive lines separated from one another by at least an insulation material, and at least one conductive extension arranged to extend substantially perpendicular to the plurality of first conductive lines, such that the at least one conductive extension intersects a portion of at least one of the plurality of first conductive lines. Storage element material is formed around the at least one conductive extension. Cell select material is formed around the at least one conductive extension.Type: ApplicationFiled: August 31, 2012Publication date: March 6, 2014Applicant: MICRON TECHNOLOGY, INC.Inventor: Federico Pio
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Patent number: 8664631Abstract: According to one embodiment, a nonvolatile memory device includes a word line interconnect layer, a bit line interconnect layer, a pillar, and charge bearing members. The word line interconnect layer includes a plurality of word lines extending in a first direction. The bit line interconnect layer includes a plurality of bit lines extending in a second direction that intersects the first direction. The pillar is disposed between each of the word lines and each of the bit lines. The charge bearing members contain a negative fixed charge, and provided on side faces of the pillars. The pillars includes a diode film provided with a p-type layer and an n-type layer and a variable resistance film stacked on the diode film. The charge bearing member is disposed on side faces of the p-type layer, and is not disposed on side faces of the n-type layer.Type: GrantFiled: September 20, 2011Date of Patent: March 4, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Jun Hirota, Yoko Iwakaji, Moto Yabuki
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Publication number: 20140056053Abstract: Electronic apparatus, systems, and methods can include a resistive memory cell having a dielectric structured as an operably variable resistance region between an oxygen source and an oxygen sink. The dielectric, oxygen source, and an oxygen sink can be structured as a field driven unipolar memory element with respect to generation and healing of a filament in the dielectric. Additional apparatus, systems, and methods are disclosed.Type: ApplicationFiled: August 21, 2012Publication date: February 27, 2014Inventors: Durai Vishak Nirmal Ramaswamy, Lei Bi
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Patent number: 8659001Abstract: Embodiments of the present invention generally relate to a resistive switching nonvolatile memory element that is formed in a resistive switching memory device that may be used in a memory array to store digital data. The memory element is generally constructed as a metal-insulator-metal stack. The resistive switching portion of the memory element includes a getter portion and/or a defect portion. In general, the getter portion is an area of the memory element that is used to help form, during the resistive switching memory device's fabrication process, a region of the resistive switching layer that has a greater number of vacancies or defects as compared to the remainder of resistive switching layer. The defect portion is an area of the memory element that has a greater number of vacancies or defects as compared to the remainder of the resistive switching layer, and is formed during the resistive switching memory device's fabrication process.Type: GrantFiled: September 1, 2011Date of Patent: February 25, 2014Assignees: Sandisk 3D LLC, Kabushiki Kaisha ToshibaInventors: Yun Wang, Tony Chiang, Imran Hashim
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Patent number: 8653496Abstract: Some embodiments include a memory cell that contains programmable material sandwiched between first and second electrodes. The memory cell can further include a heating element which is directly against one of the electrodes and directly against the programmable material. The heating element can have a thickness in a range of from about 2 nanometers to about 30 nanometers, and can be more electrically resistive than the electrodes. Some embodiments include methods of forming memory cells that include heating elements directly between electrodes and programmable materials.Type: GrantFiled: July 24, 2012Date of Patent: February 18, 2014Assignee: Micron Technology, Inc.Inventor: Jun Liu
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Patent number: 8652923Abstract: Embodiments of the invention generally relate to a resistive switching nonvolatile memory device having an interface layer structure disposed between at least one of the electrodes and a variable resistance layer formed in the nonvolatile memory device, and a method of forming the same. Typically, resistive switching memory elements may be formed as part of a high-capacity nonvolatile memory integrated circuit, which can be used in various electronic devices, such as digital cameras, mobile telephones, handheld computers, and music players. In one configuration of the resistive switching nonvolatile memory device, the interface layer structure comprises a passivation region, an interface coupling region, and/or a variable resistance layer interface region that are configured to adjust the nonvolatile memory device's performance, such as lowering the formed device's switching currents and reducing the device's forming voltage, and reducing the performance variation from one formed device to another.Type: GrantFiled: March 14, 2013Date of Patent: February 18, 2014Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLCInventors: Yun Wang, Tony P. Chiang, Imran Hashim
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Patent number: 8653497Abstract: A memory device includes an upper conductive layer, a lower conductive layer, and a resistive, optical or magnetic matrix positioned between the upper and lower conductive layers.Type: GrantFiled: February 21, 2013Date of Patent: February 18, 2014Inventor: Bao Tran
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Publication number: 20140042382Abstract: A memory device includes a first conductor, a diode, a memory element, and a second conductor arranged in series. The diode includes a first semiconductor layer over and in electrical communication with the first conductor. A patterned insulating layer has a sidewall over the first semiconductor layer. The diode includes an intermediate semiconductor layer on a first portion of the sidewall, and in contact with the first semiconductor layer. The intermediate semiconductor layer has a lower carrier concentration than the first semiconductor layer, and can include an intrinsic semiconductor. A second semiconductor layer on a second portion of the sidewall, and in contact with the intermediate semiconductor layer, has a higher carrier concentration than the intermediate semiconductor layer. A memory element is electrically coupled to the second semiconductor layer. The second conductor is electrically coupled to the memory element.Type: ApplicationFiled: August 9, 2012Publication date: February 13, 2014Inventor: HSIANG-LAN LUNG
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Patent number: 8633463Abstract: Organometallic precursors may be utilized to form titanium silicon nitride films that act as heaters for phase change memories. By using a combination of TDMAT and TrDMASi, for example in a metal organic chemical vapor deposition chamber, a relatively high percentage of silicon may be achieved in reasonable deposition times, in some embodiments. In one embodiment, two separate bubblers may be utilized to feed the two organometallic compounds in gaseous form to the deposition chamber so that the relative proportions of the precursors can be readily controlled.Type: GrantFiled: July 18, 2013Date of Patent: January 21, 2014Assignee: Micron Technology, Inc.Inventors: Jong-Won Lee, Kuo-Wei Chang, Michael L. McSwiney
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Publication number: 20140008602Abstract: Thermal isolation in memory cells is described herein. A number of embodiments include a storage element, a selector device formed in series with the storage element, and an electrode between the storage element and the selector device, wherein the electrode comprises an electrode material having a thermal conductivity of less than 0.15 Watts per Kelvin-centimeter (W/K-cm).Type: ApplicationFiled: July 6, 2012Publication date: January 9, 2014Applicant: MICRON TECHNOLOGY, INC.Inventors: Elijah V. Karpov, David L. Kencke
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Patent number: 8618525Abstract: Embodiments of the invention generally relate to a resistive switching nonvolatile memory device having an interface layer structure disposed between at least one of the electrodes and a variable resistance layer formed in the nonvolatile memory device, and a method of forming the same. Typically, resistive switching memory elements may be formed as part of a high-capacity nonvolatile memory integrated circuit, which can be used in various electronic devices, such as digital cameras, mobile telephones, handheld computers, and music players. In one configuration of the resistive switching nonvolatile memory device, the interface layer structure comprises a passivation region, an interface coupling region, and/or a variable resistance layer interface region that are configured to adjust the nonvolatile memory device's performance, such as lowering the formed device's switching currents and reducing the device's forming voltage, and reducing the performance variation from one formed device to another.Type: GrantFiled: June 9, 2011Date of Patent: December 31, 2013Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLCInventors: Yun Wang, Tony Chiang, Imran Hashim
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Patent number: 8614433Abstract: A memory device includes a lower interconnection in a semiconductor substrate, the lower interconnection being made of a material different from the semiconductor substrate, a selection element on the lower interconnection, and a memory element on the selection element.Type: GrantFiled: May 3, 2012Date of Patent: December 24, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Jaekyu Lee, Kiseok Suh, Tae Eung Yoon
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Patent number: 8597968Abstract: An active device array substrate is provided. First, a substrate having a display area and a sensing area is provided. Then, a first patterned conductor layer is disposed on the display area of the substrate. A gate insulator is disposed on the substrate. A patterned semiconductor layer, a second patterned conductor layer and a patterned photosensitive dielectric layer are disposed on the gate insulator, wherein the second patterned conductor layer includes a source electrode, a drain electrode and a lower electrode, the patterned photosensitive dielectric layer covering the second patterned conductor layer includes an interface protection layer disposed on the source electrode and the drain electrode and a photo-sensing layer disposed on the lower electrode. A passivation layer is then disposed on the substrate. After that, a third patterned conductor layer including a pixel electrode and an upper electrode is disposed on the passivation layer.Type: GrantFiled: January 19, 2012Date of Patent: December 3, 2013Assignee: Au Optronics CorporationInventors: Yu-Cheng Chen, Chen-Yueh Li, Ching-Sang Chuang, Ching-Chieh Shih, An-Thung Cho
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Publication number: 20130313501Abstract: A method of storing a bit at a memory device is disclosed. A memory cell the memory device is formed of a germanium-deficient chalcogenide glass configured to alternate between an amorphous phase and a crystalline phase upon application of a selected voltage, wherein a drift coefficient of the germanium-deficient chalcogenide glass is less than a drift coefficient of an undoped chalcogenide glass. A voltage is applied to the formed memory cell to select one of the amorphous phase and the crystalline phase to store the bit.Type: ApplicationFiled: June 19, 2012Publication date: November 28, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Chung H. Lam, Jing Li, Binquan Luan, Glenn J. Martyna, Dennis M. Newns
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Publication number: 20130313504Abstract: A resistive memory device capable of suppressing disturbance between cells and a fabrication method thereof are provided. The resistive memory device includes a word line formed, in a first direction, on a semiconductor substrate, lower access structures, each having a pillar shape, formed on the word line, a first insulating layer formed around an outer circumference of each of the lower access structures, a heat-absorption layer formed on a surface of each of the to heat-absorption layers, a variable resistive material formed on the lower access structures, and an upper electrode formed on each variable resistive material.Type: ApplicationFiled: August 31, 2012Publication date: November 28, 2013Inventor: Nam Kyun PARK
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Publication number: 20130313502Abstract: A high density variable resistive random access memory device and a method of fabricating the same are provided. The device includes first word lines, each separated from each other by a width of first word line; bit lines, each separated from each other by a width of bit line; and second word lines, each located between two adjacent first word lines, wherein the widths of first word line and the bit line are substantially same, and the bit lines are located over the first and second word lines.Type: ApplicationFiled: August 31, 2012Publication date: November 28, 2013Inventor: Nam Kyun PARK
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Publication number: 20130306929Abstract: A multilayer-stacked phase change memory (PCM) device is provided that includes a substrate that is electrically insulative and thermally conductive, a number (n) of PCM layers deposited on the substrate, where each PCM layer is thicker than a previous PCM layer, a number (n?1) layers of passivation layer deposited between the PCM layers, where the (n) PCM layers, and the (n?1) passivation layers form a stacked multi-layer PCM on the substrate, a first electrode deposited on a first side of the multi-layer PCM stack, and a second electrode deposited on a second side of the multi-layer PCM stack, where the first side is opposite the second side, where charge transport is decoupled by stacking the PCM layers with the pasivation layers.Type: ApplicationFiled: May 16, 2012Publication date: November 21, 2013Inventors: Jaeho Lee, John P. Reifenberg, Mehdi Asheghi, Kenneth E. Goodson, H.S. Philip Wong, SangBum Kim
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Publication number: 20130299764Abstract: A device is disclosed. The device includes a gate disposed on a substrate in a device region, the gate having first and second sidewalls. The gate includes a gate electrode and a resistive layer disposed between the gate electrode and substrate. First doped regions of a first polarity type are disposed in the substrate adjacent to the first and second sidewalls of the gate. The gate overlaps the first doped regions by a first distance to form overlap portions. A portion of the resistive layer between the gate electrode and overlap portions form first and second storage elements of a multi-bit resistive memory cell.Type: ApplicationFiled: May 11, 2012Publication date: November 14, 2013Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Shyue Seng TAN, Eng Huat TOH, Elgin QUEK
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Publication number: 20130299770Abstract: A resistive memory device includes: a memory cell comprising first and second electrodes and a resistive layer formed therebetween, wherein the resistive layer is formed of a resistance change material; and a strained film formed adjacent to the resistive layer and configured to apply a strain to the resistive layer.Type: ApplicationFiled: August 27, 2012Publication date: November 14, 2013Inventors: Sung-Joon YOON, Hyung-Dong LEE
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Patent number: 8581222Abstract: The present invention relates to a phase change memory device comprising bismuth-tellurium nanowires. More specifically, the bismuth-tellurium nanowires having PRAM characteristics may be prepared by using a porous nano template without any high temperature process and said nanowires may be used in the phase change memory device by using their phase change characteristics to identify memory characteristics.Type: GrantFiled: January 21, 2011Date of Patent: November 12, 2013Assignee: Industry-Academic Cooperation Foundation, Yonsei UniversityInventors: Kyung Hwa Yoo, Nal Ae Han, Sung In Kim, Jeong Do Yang
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Publication number: 20130292633Abstract: Methods and memory devices formed using etch bias homogenization are provided. One example method of forming a memory device using etch bias homogenization includes forming conductive material at respective levels over a substrate. Each respective level of conductive material is electrically coupled to corresponding circuitry on the substrate during patterning of the respective level of conductive material so that each respective level of conductive material has a homogenized etch bias during patterning thereof. Each respective level of conductive material electrically coupled to corresponding circuitry on the substrate is patterned.Type: ApplicationFiled: May 3, 2012Publication date: November 7, 2013Applicant: MICRON TECHNOLOGY, INC.Inventors: Fabio Pellizzer, Hernan A. Castro, Eddie T. Flores
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Publication number: 20130285002Abstract: A phase change memory cell has first and second electrodes having phase change material there-between. The phase change memory cell is devoid of heater material as part of either of the first and second electrodes and being devoid of heater material between either of the first and second electrodes and the phase change material. A method of forming a memory cell having first and second electrodes having phase change material there-between includes lining elevationally inner sidewalls of an opening with conductive material to comprise the first electrode of the memory cell. Elevationally outer sidewalls of the opening are lined with dielectric material. Phase change material is formed in the opening laterally inward of and electrically coupled to the conductive material in the opening. Conductive second electrode material is formed that is electrically coupled to the phase change material. Other implementations are disclosed.Type: ApplicationFiled: April 30, 2012Publication date: October 31, 2013Applicant: Micron Technology, Inc.Inventors: Damon E. Van Gerpen, Roberto Bez
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Patent number: 8569734Abstract: A resistive random access memory array may be formed on the same substrate with a fuse array. The random access memory and the fuse array may use the same active material. For example, both the fuse array and the memory array may use a chalcogenide material as the active switching material. The main array may use a pattern of perpendicular sets of trench isolations and the fuse array may only use one set of parallel trench isolations. As a result, the fuse array may have a conductive line extending continuously between adjacent trench isolations. In some embodiments, this continuous line may reduce the resistance of the conductive path through the fuses.Type: GrantFiled: August 4, 2010Date of Patent: October 29, 2013Assignee: Micron Technology, Inc.Inventors: Andrea Redaelli, Agostino Pirevano, Umberto M. Meotto, Giorgio Servalli
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Patent number: 8552412Abstract: Provided are a variable resistance memory device and a method of forming the same. The variable resistance memory device may include a substrate, a plurality of bottom electrodes on the substrate, and a first interlayer insulating layer including a trench formed therein. The trench exposes the bottom electrodes and extends in a first direction. The variable resistance memory device further includes a top electrode provided on the first interlayer insulating layer and extending in a second direction crossing the first direction and a plurality of variable resistance patterns provided in the trench and having sidewalls aligned with a sidewall of the top electrode.Type: GrantFiled: December 20, 2010Date of Patent: October 8, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Jeonghee Park, Hideki Horii, Hyeyoung Park, Jin Ho Oh, Hyun-Suk Kwon