Abstract: A strut used to support various specifications of glasshouse construction including a plurality of arms articulated to a fixture disk to support abutted glass blocks. Each arm includes a primary rod, an extended rod and a suction base to allow adjustment of angles of the arm for adjusting the angles, and additional extended rod may be articulated for extra length of the arm to cope with individual construction of the glasshouse.
Abstract: A rotary chuck with indexed rotation promotes rapid rotation of a device under test and increases the productivity of a probe station on which the device is being tested. A device mounting member of a rotatable chuck is supported for rotation on a first surface of a base until a vacuum is applied drawing the device mounting member into contact with a second surface of the base and constraining the device mounting member against rotation.
Abstract: The present invention provides apparatus for supporting during a testing operation a leadframe formed with at least one row of non-singulated semiconductor devices. The apparatus comprises a main body and a leadframe support member, and the leadframe support member is formed with at least one groove for receiving semiconductor devices such that in use leads extending from said devices lie on a surface of said support member.
Type:
Application
Filed:
April 22, 2004
Publication date:
October 7, 2004
Applicant:
ASM ASSEMBLY AUTOMATION LIMITED
Inventors:
Ching Man Tsui, Lap Kei Chow, Hui Fai Ho, Cam Nguyen Ronald Ngo
Abstract: A method and article are provided for batch processing of a plurality of MEMS dice. The MEMS dice are secured in a holder having multiple stations adapted to secure a MEMS die. A process step is then performed on the plurality of MEMS dice while they are secured in the holder and may be performed simultaneously on all of the MEMS dice secured in the holder.
Abstract: Apparatuses and methods for supporting a workpiece such as a semiconductor wafer. A support system is configured to support the workpiece while allowing thermally-induced motion of the workpiece, which may include thermal bowing or thermal bending. The system may include a support member having a moveable engagement portion engageable with the workpiece, the engagement portion being moveable to allow the thermally-induced motion of the workpiece while supporting the workpiece. The moveable engagement portion may include a plurality of moveable engagement portions of a plurality of respective support members, which may be resiliently engageable with the workpiece. The support members may include flexible support members each having an unconstrained portion and a constrained portion, and the moveable engagement portions may include the unconstrained portions.
Type:
Application
Filed:
December 19, 2003
Publication date:
September 16, 2004
Inventors:
David Malcolm Camm, Guillaume Sempere, Ljubomir Kaludjercic, Gregory Stuart, Mladen Bumbulovic, Tim Tran, Sergiy Dets, Tony Komasa, Marc Rudolph, Joseph Cibere
Abstract: The present invention provides apparatus for supporting during a testing operation a leadframe formed with at least one row of non-singulated semiconductor devices. The apparatus comprises a main body and a leadframe support member, and the leadframe support member is formed with at least one groove for receiving semiconductor devices such that in use leads extending from said devices lie on a surface of said support member. The invention also relates to a system for transporting devices to and from a test probe head.
Type:
Grant
Filed:
June 26, 2001
Date of Patent:
August 31, 2004
Assignee:
ASM Assembly Automation Limited
Inventors:
Ching Man Tsui, Lap Kei Chow, Hui Fai Ho, Cam Nguyin Ngo
Abstract: A carrier (20) is used in the thin film coating of disks (35). The disks (35) are held in a disk tray (30). The disks (35) have a center (35a) through which the thin film coating can go through. The carrier (20) includes a base plate (21) for receiving the disk tray (30). A plurality of discrete shields (24) are positioned in alignment with the center openings of the disk (35). The shields (24) are releasably connected to the base plate (21). Preferably, the shields (24) are releasably connected by a magnetic force.
Abstract: An apparatus and method for positioning packaged semiconductor devices having different rectangular shapes and sizes. A positioning apparatus includes an adjustable alignment guide releasably coupled to a base. The adjustable alignment guide may be positioned along a first axis to partially define a recess into which the packaged semiconductor devices are placed during positioning. The positioning apparatus may also include additional adjustable alignment guides that may be positioned along the first or a second axis to further define the recess into which the packaged semiconductor device is to placed during positioning. The adjustable alignment guides may have alignment surfaces against which the integrated circuit rests when placed into the recess that is partially defined by the alignment surfaces.
Abstract: A device for handling blanks, comprises a blank pallet-receiving portion to be positioned downstream of a blank forming machine. The blank pallet-receiving portion defines a plane substantially parallel with a blank-receiving surface on a pallet positioned on the blank-receiving portion. Support means is positioned adjacent the plane beyond at least one edge of the blank-receiving surface. The support means is operable to support a free edge region of a blank resting on the blank-receiving surface and which free edge region extends beyond the blank-receiving surface. The support means is operable to be retracted when a predetermined number of blanks are present on the blank-receiving surface.
Abstract: A wafer lifter for self-centering a wafer onto a wafer pedestal situated in a physical vapor deposition chamber and a method for self-centering a wafer onto the wafer pedestal are described. The wafer lifter is constructed by a lifter body of annular shape, at least four support fingers emanating upwardly from the wafer lifter body and are spaced-apart from each other, and a platform on a tip portion of each of the at least four support fingers defined by a slanted surface from a vertical plane of an outside surface of the support finger. The platform, when supporting a wafer thereon, leaves substantially no gap between the slanted surface and an outer periphery of the wafer.
Abstract: An apparatus and method to position a wafer onto a wafer holder and to maintain a uniform wafer temperature is disclosed. The wafer holder or susceptor comprises a recess or pocket whose surface is concave and includes a grid containing a plurality of grid grooves separating protrusions. The concavity and grid grooves define an enclosed flow volume between a supported wafer and the susceptor surface, as well as an escape area, or total cross-sectional area of the grid grooves opening out from under the periphery of the wafer. These are chosen to reduce the wafer slide and curl during wafer drop-off and wafer stick during wafer pick-up, while improving thermal uniformity and reducing particle problems. In another embodiment, centering locators in the form of thin, radially placed protrusions are provided around the edge of the susceptor pocket to reduce further the possibility of contact between the wafer and the outer edge of the susceptor.
Abstract: A workpiece table assembly is configured to hold a plurality of workpieces (e.g. conductive strands) so that the workpieces can be modified (e.g. bent). In one embodiment, the workpiece table assembly advantageously comprises a table, a saddle, a lift mechanism, and a die. The saddle is advantageously recessed below the table and raised or lowered by the lift mechanism. The table advantageously has a top surface with holes adapted to accept quick-release pins from a step-off board. The step-off board also has notches to accept and position the strands for die pressing. In one exemplary operation, the step-off board is used to stagger the strands over the down-positioned saddle. The saddle is then raised by the lift mechanism and the die placed within the saddle on top of the strands. A force is applied to the die to bend the strands.
Abstract: A steering wheel rim for an automobile is manufactured by attaching a masking tape to a boundary portion of the steering wheel rim, marking a conjunction line using a blade in a middle portion the masking tape and detaching a lower half portion of the masking tape, covering an upper portion of the masking tape with a protective masking tape, performing transfer printing on a surface lower than the conjunction line, cleaning and drying the transfer-printed surface, and removing the masking tape and the protective masking tape. Another masking tape is attached to a first transfer printing boundary portion of the steering wheel rim, a separation line is marked using a blade at a position about 0.05-0.2 mm lower than the conjunction line and removing the upper half of the masking tape is removed, the lower portion of the masking tape is covered with another protective masking tape, and transfer printing is performed on an upper surface above the conjunction line.
Abstract: A circuit board stripper includes a deck having a top pattern plate for supporting circuit boards. The deck defines a plurality of first through-holes and the pattern plate defines a plurality of second through-holes aligned with the first through-holes. A slider is movable under the deck, and has a top face formed with a plurality of slopes under the aligned through-holes of the deck and the pattern plate. A plurality of lifting pins extend upward through the aligned through-holes, and are each formed with a bottom wheel adapted to roll on corresponding one of the slopes of the deck so that the lifting pins are lifted up when the slider is moved in a first direction and are lowered down when the slider is moved in an opposite second direction. Additionally, there is a pneumatic cylinder having a ram for moving the slider in the directions.
Abstract: A manufacturing pallet 100 has provisions for supporting an opto-electronic package 10 on a frame 112. Openings 110A, 110B are provided through the frame to enable mechanical access to the opto-electronic package from below the frame. Additionally, lead access openings 114A, 114B are provided to enable electrical access to the leads 12 of the package 10. As a result, the opto-electronic package need not be manipulated. Instead, the package can be carried on the frame, which is then installed directly on top of a given machine. The machine mechanically engages the package via the openings.
Abstract: The invention provides a device for holding a substrate during deposition processes that includes a rotation member rotatable about a first, central axis, and a plurality of substrate holders positioned on the rotation member, the substrate holders being rotatable about second axes. In another aspect, the invention provides a method of applying a substantially uniform coating on a substrate including the steps of providing a device of the invention; mounting a substrate onto the substrate mounts; providing at least one substrate coating station in spaced relation to the substrate mounts; rotating the rotation member about a central axis to position one or more of the substrate mounts at the substrate coating station; supplying the coating through the nozzle; moving the nozzle of the coating station in a direction parallel to the substrate at a predetermined rate to apply a uniform coating on the substrate; and rotating the substrate mounts about the second axes during the coating process.
Abstract: A mechanism for adjusting an object in terms of its position along a vertical axis, and its rotational orientation about either two orthogonal horizontal axes or about a vertical and a horizontal axis, utilizes a set of electric motors in conjunction with a mechanical guiding structure that substantially restricts the movement of the object to the desired translational and rotational directions.
Abstract: A clamping jig particularly adapted for use with elongate work pieces. The jig has an elongate work face, a work stop abutment the length of the work face, a plurality of toggle clamps affixed to the work face. One or more elongate or linear work pieces to be worked are positioned on the work face and held in place by the work stop abutment. The plurality of toggle clamps may be used to either hold the work piece in place or hold one or more additional work pieces to the first work piece. The work face or faces are rotatable around the elongate axis. Each toggle clamp has a toggle clamp arm with which the toggle clamp is set. On rotation of the work face, an actuating bar engages the toggle clamp arms to release the toggle clamps for removal of the work piece.
Abstract: A road restraint system part is made of polyolefin material having an energy absorption of at least 10 kJ/m2 at +23° C. and at least 5 kJ/m2 at −20° C. (determined according to ISO 179/1eA with notched specimens).
Type:
Application
Filed:
July 14, 2003
Publication date:
February 26, 2004
Inventors:
Carl-Gustaf Ek, Tony Lindstrm, Cecilia Rydin, Svein Jamtvedt
Abstract: In accordance with the present invention a scanning method for flat objects obtains reciprocating ballistic motion without any physical contact between the mutually moving parts, as contact can create particulate matter causing defects. The method ensures that the peak forces attained during scanning are minimized to prevent dislodgement of particulate material and excessive vibration. The method furthermore ensures that both surfaces of flat plate objects be scanned simultaneously.
Abstract: A machine tool in which a plurality of machining positions is orbited by a work spindle unit carrying a workpiece and capable of radial displacement relative to the central axis of rotation. The work spindle unit may be one of one or more such units mounted upon a bridge element angularly displaceable about that axis.
Abstract: A device for processing workpieces utilizes a frame and a fixture. The frame has a perimeter with an opening, and inner and outer side walls. A pair of shelves are located in the opening for supporting a workpiece and a spring retains the workpiece on the frame. The fixture has work locations with elevators that are moved by an elevator handle. The fixture also has an engagement handle for actuating the springs. The workpieces may be simultaneously mounted to or removed from the frames with the fixture. The frames are loaded into the locations and both handles are rotated to raise the elevators and bend the springs. The workpieces are then placed on top of the elevators, and the elevator handle is rotated to lower the workpieces. Next, the engagement handle is rotated to release the springs to form assemblies that can be removed from the fixture.
Type:
Grant
Filed:
February 9, 2001
Date of Patent:
April 29, 2003
Assignee:
International Business Machines Corporation
Inventors:
Nick Karmaniolas, Wesley Hiroshi Tao, Li Zheng
Abstract: A supporting framework for a display panel or a probe block is capable of properly coping with display panels of different sizes in a testing apparatus. By moving a framework 1 with a display panel supported thereon or by moving frame members 2, 3, 4, 5 of the framework 1 with a probe block supported thereon, an opening (or space) defined by the respective frame members can be enlarged or reduced.
Abstract: A document capture arm connected to an imaging device and positionable over a platen for retaining a document on the platen for imaging. The document capture arm holds one or more documents against the platen in a selected position or arrangement. The document capture arm may be configured as an arm that may insert into a receiver. The document capture arm may be easily installed for use and may be easily removed for storage when not needed. Alternately, the document capture arm may include an actuator that is attached to and extends from the arm, projecting beyond the axis of rotation of the platen cover at the hinge. When the platen cover is lifted to an open position, the capture arm actuator is acted upon by the platen cover, lifting the document capture arm to an open position.
Abstract: A first disk carrier constructed in accordance with the invention is substantially circular, and has a size and shape such that it can be placed in an opening in a second, larger disk carrier. In one embodiment, the second, large disk carrier is a conventional disk carrier, e.g. used to hold a substrate during a magnetic disk manufacturing process. The first disk carrier is circular, and has a diameter equal (or substantially equal) to common substrates currently being manufactured. Therefore, the first disk carrier fits in and can be held by the second disk carrier. The first disk carrier has one or more openings for holding one or more substrates that have a diameter substantially less than the diameter of the opening of the second disk carrier.
Abstract: An apparatus for centering preferably flat objects, in particular, printing plates, includes a centering device with portion that can be moved, in particular, can be driven, in opposite directions with respect to one another. The portions are coupled to one another for movement such that, during the centering operation, they move jointly and uniformly toward an axis of symmetry, which, at the same time, is the centering axis for the object that is to be centered. The centering operation results in reliable alignment of the object, following which it is basically unnecessary to check the position of the object.
Abstract: A bushing installation and removal assembly includes mounting table fitted with a vice fixture, a press/ram assembly having a controlled hydraulic press whereby a separate hydraulic repositioning system disposes the work piece into the press/ram assembly in a controlled manner. The worktable, fixtures and press/ram assembly are designed to receive and securely position the housing assembly (work piece) onto a controlled substrate. The substrate is then designed to reposition the housing assembly (work piece) proximate to the press ram, which suitably presses the bushing member onto the housing assembly (work piece). The substrate is then retracted to its original position where the housing assembly (work piece) is removed for further processing.
Type:
Grant
Filed:
July 31, 2000
Date of Patent:
November 26, 2002
Assignee:
Spicer Technology, Inc.
Inventors:
Roderick Brent Dillon, Jeff D. Buchanan, Karl J. Goede, Samuel J. Wirts, Ronald Lee Zimmerman, Michael L. Gamble
Abstract: A method and a system for transporting and cleaning slaughter equipment especially knives (3), gloves and aprons at slaughterhouses, the system comprising knife holding members for receiving and releasably holding one or more knives (3), glove holding members for receiving and releasably holding the gloves, apron holding members for receiving and releasably holding the aprons and a cleaning installation for cleaning the knives and/or gloves and/or aprons and/or the holding members. The holding members may be transported on trolleys, and the knife holding members may comprise a basked (4), wherein the knives are positioned so that the blunt knives have a different orientation than the other knives. The basket (4) may be positioned on the trolley on projections (26′) through the handgrips (13).
Abstract: A tool for holding a blade blank (1) comprises a frame (13) in which a control system using clamping jaws (18, 19) and lifters (30, 34, 35) grips the blade and holds it in position vertically on two supporting faces (22, 23), while the blade has been laid on three lateral faces (41, 42, 43). The blade is thus simultaneously held in a precise position and gripped sufficiently tightly, with a single control main mechanism. The mounting of the blade is thus greatly simplified and it may be subjected without further precaution to a manufacturing operation such as welding by friction to a rotor disk.
Type:
Application
Filed:
December 3, 2001
Publication date:
June 13, 2002
Applicant:
SNECMA-MOTEURS
Inventors:
Andre Claude F. Collot, Jean-Pierre Ferte
Abstract: An improvement in the structure of a worktable for a wood carving machine includes a positioning device provided with a sleeve having a U-shaped recess at the top for mounting a supporting arm of a clamping device, the supporting arm being provided with an eccentric roller close to an intermediate portion thereof and adapted for sliding on the upper edge of the positioning device, and the clamping device being replaceable with a holder which can be moved up and down along a rod and rotated with respect to a cross-shaped sleeve for holding a workpiece in place.
Abstract: A hand-operated test head positioner for positioning the test head of a semiconductor device testing apparatus is provided which is easy to operate, highly safe in operation, and yet inexpensive. Two air cylinders are installed one at each of two opposed positions of the test head. The sum of driving forces of these air cylinders is set at a level approximately equivalent to the weight of the test head to act as a counterbalancer. Hand-operated jack mechanisms are disposed on the opposite side walls of the test head, respectively. The jack mechanisms comprise long lead screws rotatably supported, two movable screw members in threaded engagement with the respective lead screws, drive arms pivotally connected at one ends to the respective movable screw members, and driven arms having approximately the same shape and size as the drive arms and being pivotally connected to the respective drive arms, respectively.
Abstract: A temporary gutter retainer includes an attachment member, support member, and lateral containment member. A bottom gusset is preferably formed behind the attachment member, support member, and lateral containment member. A top gusset is preferably formed above the junction between the attachment member and support member. At least two holes are formed through the attachment member. Each of the holes are sized to provide clearance for a suitable screw. The temporary gutter retainer is preferably used in the following manner. A first temporary gutter retainer is attached near one end of a facia board and a second temporary gutter retainer is attached near the other end of the facia board with screws and a portable power tool. The installer places the gutter segment into the first and second temporary gutter retainers. A level is placed inside the gutter segment at one of the ends thereof; the gutter segment is raised or lowered to the correct height; and the gutter segment is then attached to the facia board.
Abstract: An electronic component mounting apparatus is provided with a plurality of support blocks for supporting boards. A support block is automatically selected from among the plurality of support blocks and exchanged in accordance with the switching of the kind of boards to be supported by the support block, so that the time required for switching the kind of boards is reduced, thereby improving the productivity.
Abstract: A device for placing pipes (5′) into a case (1) and taking pipes (5) out therefrom, wherein the pipes (5) are placed in stacks (2, 3, 4) each with one pipe across, and wherein the stacks are supported laterally by supports (6, 7, 8, 9) projecting upwardly from the bottom of the case (1). The bottom of the case 91) is provided with apertures (10, 11), and the case (1) is carried by a tilting device (13) capable of raising and lowering the case 91), respectively, and of turning it about an axis (14) parallel to the pipes (5) within the case (1), to take an unloading position and a loading position, respectively, wherein the supports (6, 7, 8, 9) are nearly horizontal, flushing with a substantially horizontal support for pipes (5), and wherein a pushing device (16) is adapted to be guided through the apertures (10, 11) in the nearly vertical bottom of the case (1), in order to push pipes (5) laterally out of the case (1), upon said support, which may be a conveyor belt or another conveyor (12).
Abstract: In an apparatus for minimizing vacuum losses from a permeable support surface having one or more layers of sheet-type work material positioned thereon, the support surface includes opposed lateral edge surfaces, each defining an upper and lower section. At least two upper seals are coupled to the frame, each engaging the upper section of one of the lateral edge surfaces and extending approximately the length of the support surface. At least two side seals are also provided and are coupled to the frame, each engaging the side section of one of the lateral edge surfaces and also extending approximately the length of the support surface. During operation of the apparatus, vacuum is drawn through the permeable support surface and causes the upper and side seals to be drawn and held against the lateral side sections, forming a seal there against.
Type:
Grant
Filed:
July 15, 1998
Date of Patent:
January 16, 2001
Assignee:
Gerber Technology, Inc.
Inventors:
Richard Kuchta, Alexander Zusmanovich, Joseph Vivirito
Abstract: A wafer carrier adapter for use with a 200 millimeter wafer carrier and a pod door opener to a front end of a semiconductor processing environment. The 200 millimeter wafer carrier has a bottom surface and is provided with a plurality of recesses extending through the bottom surface in a predetermined configuration and a front opening for accessing silicon wafers in the wafer carrier. The pod door opener has a platform with a kinematic coupling which includes a plurality of pins extending upwardly in a predetermined pattern from the platform for aligning and supporting 300 millimeter wafer carriers relative to a port in the pod door opener. The wafer carrier adapter comprises a support structure having top and bottom surfaces. The support structure is provided with a plurality of recesses extending through the bottom surface adapted to receive the plurality of pins.
Abstract: When scarfing the end portion of a plate-like material with irregular deformations or undulations, such as distortions, undulations and warps, the undulations are successively corrected flat and the flattened end portion is scarfed by a rotary cutter to form a highly precise scarfed surface. When the end portion of the plate-like material 3 is scarfed by the rotary cutter 5, the pressing member 11 presses, while the cutting operation proceeds, at least a part of the surface of at least that portion of the plate-like material 3 which is to be cut away as a chip 17 at a position near the blades 5b of the rotary cutter 5 on a downstream side of the rotary cutter with respect to a rotary cutter movement direction, the surface of the plate-like material 3 pressed by the pressing member 11 being opposite the other surface held in contact with the cutter receiving table 7.
Abstract: A vehicle assembly tool includes a base and a frame pivotably coupled to the base. The frame is configured for holding a plurality of vehicle parts to be welded together. A motor is coupled to the frame via a gear system to move the frame relative to the base. Per the present disclosure, the base can be juxtaposed with a plurality of robotic welders, each having an end effector with six degrees of freedom, and the frame then moved relative to the base to essentially provide a seventh degree of freedom for welding the parts together. Also, the frame can be programmed to return, after welding, to one of several user-defined load positions, each of which load positions can be tailored to a respective individual for facilitating ergonomic loading of parts into the frame by the particular individual.
Abstract: A vehicle assembly tool includes a base and a frame pivotably coupled to the base. The frame is configured for holding a plurality of vehicle parts to be welded together. A motor is coupled to the frame via a gear system to move the frame relative to the base. Per the present disclosure, the base can be juxtaposed with a plurality of robotic welders, each having an end effector with six degrees of freedom, and the frame then moved relative to the base to essentially provide a seventh degree of freedom for welding the parts together. Also, the frame can be programmed to return, after welding, to one of several user-defined load positions, each of which load positions can be tailored to a respective individual for facilitating ergonomic loading of parts into the frame by the particular individual.
Abstract: A mini-workbench made of a flat bar having a top surface and a bottom surface, a planar tab extending from said bottom surface and a tridental clamp mounted to the top surface for clamping the bar of a chain saw. The planar tab is insertable in a slot cut in a tree stump for retaining the flat bar to the tree stump. The tridental clamp is usable for retaining the saw bar to the flat bar, whereby the chain saw may be filed with ease, firmness and precision. In one aspect of the invention, the thickness of the planar tab is similar to a common chain saw kerf. A woodcutter may use his/her power saw for slotting the upper end of a tree stump having a proper height and location, and easily mount the mini-workbench to that stump.
Abstract: The present invention is a universal fixture for holding printed circuit boards with different sizes and shapes during stencil printing and other manufacturing processes related to printed circuit boards. In one embodiment, a universal fixture for holding a printed circuit board has a platform with a work surface, a first support member attached to the platform to hold a portion of a printed circuit board, and a second moveable support member attached to the first support member to support another portion of the printed circuit board. The platform is preferably adapted to be attached to a workstation of a processing machine, such as a stenciling machine for printing older or adhesive onto the printed circuit board. The first support member preferably has an elongated sidewall, a first endwall extending transversely from the sidewall, and a second endwall spaced apart from the first endwall along the sidewall and extending transversely from the sidewall.
Abstract: A vise for securing plastic pipe while sawing a section of pipe to length is formed by a U-shaped base supported by a plurality of short legs. A V-shaped cradle is pivotally connected by its legs with the legs of the U-shaped member for successively receiving and holding a plurality of pipe of different diameters. The confronting surfaces of the V-shaped legs have a layer of material having a high coefficient of friction bonded thereto.
Abstract: A workpiece holder includes a template and a pair of slide blocks mounted to the template for slideable movement with respect to the template. The slide blocks and the template can be mounted to a base plate or can be mounted to each other without the use of a base plate. The slide blocks include straight edge surface and L-shaped notched surface which can be reversed to accommodate templates and workpieces of varying shapes.
Abstract: The present invention is a universal fixture for holding printed circuit boards with different sizes and shapes during stencil printing and other manufacturing processes related to printed circuit boards. In one embodiment, a universal fixture for holding a printed circuit board has a platform with a work surface, a first support member attached to the platform to hold a portion of a printed circuit board, and a second moveable support member attached to the first support member to support another portion of the printed circuit board. The platform is preferably adapted to be attached to a workstation of a processing machine, such as a stenciling machine for printing solder or adhesive onto the printed circuit board. The first support member preferably has an elongated sidewall, a first endwall extending transversely from the sidewall, and a second endwall spaced apart from the first endwall along the sidewall and extending transversely from the sidewall.
Abstract: A table apparatus for a machine tool for moving a table along a guide member by a driving mechanism, feeding of the table being controlled by a feedback scale in cooperation with the driving mechanism, the feedback scale having a scale portion and a detecting portion, with opposed vicinal surfaces for accepting the feedback scale defined on the guide member and the table, respectively, the scale portion of the feedback scale being mounted on one of the surfaces, while the detecting portion is mounted on the other.
Abstract: A polishing apparatus has a turntable and a top ring for gripping a semiconductor wafer to be polished by an abrasive cloth on the turntable. The polishing apparatus incorporates a loading and unloading unit having a supply holder for holding and supplying a semiconductor wafer to be polished to the top ring at a transfer position, and a reception holder for receiving a polished semiconductor wafer from the top ring at the transfer position. The reception holder and the supply holder are mounted on respective opposite ends of a support block which is angularly movable in a vertical plane by a turning mechanism for moving the supply holder and the reception holder alternatively to the transfer position.
Abstract: A dual guide beam stage mechanism for accurate X-Y positioning for use e.g. in semiconductor processing equipment provides accurate planar motion and yaw control. Over-constraint between components in their relative motion is minimized by utilizing flexibly mounted air bearings at the connection between at least one of the moveable guide beams and its corresponding stationary guide, and between at least one of the guide beams and the adjacent stage itself. Thus stage yaw motion is provided by allowing yaw motion of one of the guide beams. Preloading provides enough constraint through the air bearings without over-constraining the moving components, thereby improving accuracy and also reducing the need for close manufacturing tolerances.
Abstract: An adjustable supporting apparatus supports a workpiece feeding machine on a worktable and includes a base member fixed on the worktable and provided with a neck. A pivot member has a vertical sleeve portion sleeved rotatably on the neck and locked releasably on the neck by means of a vertical lock bolt unit, and a horizontal nose projecting from the vertical sleeve portion. When released, the pivot member can rotate about a vertical axis on the neck. A horizontal sleeve member is sleeved rotatably on the nose and locked releasably on the nose by means of a horizontal lock bolt unit. When released, the sleeve member can rotate about a horizontal axis on the nose. A positioning assembly has a tubular unit fastened to the sleeve member and formed with a passage into which a straight first end portion of a coupler rod is inserted.
Abstract: A substrate includes a flat principal member having a surface, and at least three first holding portions projecting from the principal member. Each of the first holding portions includes a pair of horizontal contact surfaces which are parallel to the surface of the principal member and which are disposed facing opposite to each other. At least three second holding portions are also disposed on the principal member, each of the second holding portions including a pair of vertical contact surfaces which are perpendicular to the surface of the principal member and are disposed facing opposite to each other. Method and apparatus for holding such a substrate includes structure and steps for grasping the at least three first holding portions and the at least three second holding portions. The structure and functions provide a platform for stably gripping a substrate.
Abstract: A stator support assembly for use during the manufacture of electric motor stator assemblies includes a pallet, a rotatable stator support nest mounted on the pallet, and a lock arrangement that resists rotation of the nest from plural, locked, rotary orientations. The nest has generally horizontal, upwardly-facing, stator core supporting surfaces and generally vertical stator core confining wall portions. Accordingly, a stator assembly being manufactured is supported in a substantially fixed position or orientation as required when a stator assembly is being transferred from one workstation to the next but can be manually rotated from one locked position to the next for the convenience of a human operator when manual operations on the stator assembly are performed. Lock arrangements that may be used comprise recesses and one or more cooperating spring-biased detents or, alternatively, holes and a spring-biased shot pin.