Plural Magnetic Deposition Layers Patents (Class 29/603.14)
  • Patent number: 8578594
    Abstract: A process for fabricating a magnetic recording transducer for use in a data storage system comprises providing a substrate, an underlayer and a first nonmagnetic intermediate layer deposited to a first thickness on and in contact with the underlayer, performing a first scanning polishing on a first section of the first intermediate layer to planarize the first section of the first intermediate layer to a second thickness, providing a main pole in the planarized first section of the first intermediate layer, providing a first pattern of photoresist on and in contact with the first section of the first intermediate layer, the pattern comprising an aperture to define a side shield trench, performing a wet etch to remove at least a portion of the first intermediate layer thereby exposing at least one of the plurality of main pole sides, and depositing side shield material in the side shield trench.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: November 12, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ming Jiang, Ronghui Zhou, Guanghong Luo, Masahiro Osugi, Danning Yang
  • Patent number: 8567045
    Abstract: As track densities increase, it becomes increasingly important, while writing in a given track, not to inadvertently write data in adjoining tracks. This problem has been overcome by limiting the width of material in the ABS plane to what it is at the write gap. The part of the lower pole that is wider than this is recessed back away from the ABS, thereby greatly reducing its magnetic influence on adjacent tracks. Four different embodiments of write heads that incorporate this notion are described together with a description of a general process for their manufacture.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: October 29, 2013
    Assignee: Headway Technologies, Inc.
    Inventors: Moris Dovek, Glen Garfunkel, Po Kang Wang
  • Patent number: 8559136
    Abstract: A magnetic recording medium according to one embodiment includes at least a ground layer above a non-magnetic substrate; a magnetic recording layer above the ground layer; and an overcoat above the magnetic recording layer, the overcoat characterized in that said overcoat is an amorphous carbon film having a ratio of sp3 bonding with respect to sp2 bonding (sp3/(sp2+sp3)) of at least 0.5, and hydrogen content in the overcoat in a center layer thereof in a film thickness direction of said overcoat is from 0.1 atom % to 0.6 atom %. Additional products and methods are also presented.
    Type: Grant
    Filed: November 14, 2012
    Date of Patent: October 15, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Toru Matsumura, Hiroshi Inaba, Hiroyuki Matsumoto
  • Patent number: 8555486
    Abstract: A method for fabricating a magnetic recording transducer is described. The transducer has an ABS location and a nonmagnetic intermediate layer having a pole trench. The method includes depositing at least one magnetic pole layer having a top surface and a pole tip portion proximate to the ABS location. A first portion of the magnetic pole layer(s) resides in the pole trench. The magnetic pole layer(s) have a seam in the pole tip portion that extends to the top surface. The method also includes cathodically etching a second portion of the magnetic pole layer(s) from the seam at a rate of not more than 0.1 nanometers/second, thereby forming a seam trench in the magnetic pole layer(s). The method also includes refilling the seam trench with at least one magnetic refill layer. At least an additional magnetic pole layer is deposited on the top surface and the magnetic refill layer(s).
    Type: Grant
    Filed: December 6, 2011
    Date of Patent: October 15, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jose A. Medina, Tiffany Yun Wen Jiang, Ming Jiang
  • Patent number: 8551347
    Abstract: A method in one embodiment includes forming a layer of a nonmagnetic material above an upper surface of a substrate; forming a resist structure above the layer of nonmagnetic material, wherein the resist structure has an undercut; removing a portion of the layer of nonmagnetic material not covered by the resist structure; depositing a layer of magnetic material above the substrate adjacent a remaining portion of the layer of nonmagnetic material such that at least portions of the layer of magnetic material and the remaining portion of the layer of nonmagnetic material lie in a common plane; removing the resist structure; and forming a write pole above the layer of magnetic material and the remaining portion of the layer of nonmagnetic material. Additional methods are also presented.
    Type: Grant
    Filed: December 22, 2008
    Date of Patent: October 8, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Amanda Baer, Wen-Chien David Hsiao, John I. Kim, Vladimir Nikitin, Trevor W. Olson, John Bruce Piggott, Jr., Yuan Yao
  • Patent number: 8533937
    Abstract: A method or forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.
    Type: Grant
    Filed: October 18, 2011
    Date of Patent: September 17, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jinwen Wang, Weimin Si, Jianxin Fang, Ying Hong, Hongzhou Jiang, Ching-Huang Lu, Yan Chen, Donghong Li, Lien-Chang Wang, Lieping Zhong, Tao Pan
  • Patent number: 8499435
    Abstract: A thin-film magnetic head is constructed such that a main magnetic pole layer, a lower shield layer, an upper shield layer and a thin-film coil are laminated on a substrate. A method of manufacturing the thin-film magnetic head has a lower shield layer forming step. This step comprises a step of forming a first lower shield part in a lower shield planned area, including a planned line along the medium-opposing surface, a step of forming a partial lower seed layer having a partial arrangement structure in which the partial lower seed layer is arranged on a lower formation zone except a lower exception zone including the planned line, a step of forming a second lower shield part on the partial lower seed layer.
    Type: Grant
    Filed: October 24, 2011
    Date of Patent: August 6, 2013
    Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.
    Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Shigeki Tanemura, Kazuki Sato, Atsushi Iijima
  • Patent number: 8495813
    Abstract: A method of making an energy-assisted magnetic recording apparatus is provided. The method comprises the step of aligning a first wafer including a plurality of vertical cavity surface emitting lasers (VCSELs) with a second wafer including a plurality of magnetic recording heads, such that an emitting region of each of the plurality of VCSELs is disposed over a light redirecting structure of a corresponding one of the plurality of magnetic recording heads. The method further comprises the step of bonding the first wafer to the second wafer.
    Type: Grant
    Filed: August 7, 2012
    Date of Patent: July 30, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yufeng Hu, Jinshan Li
  • Patent number: 8484830
    Abstract: A CPP-GMR spin valve having a CoFe/NiFe composite free layer is disclosed in which Fe content of the CoFe layer ranges from 20 to 70 atomic % and Ni content in the NiFe layer varies, from 85 to 100 atomic % to maintain low Hc and ?s values. A small positive magnetostriction value in a Co75Fe25 layer is used to offset a negative magnetostriction value in a Ni90Fe10layer. The CoFe layer is deposited on a sensor stack in which a seed layer, AFM layer, pinned layer, and non-magnetic spacer layer are sequentially formed on a substrate. After a NiFe layer and capping layer are sequentially deposited on the CoFe layer, the sensor stack is patterned to give a sensor element with top and bottom surfaces and a sidewall connecting the top and bottom surfaces. Thereafter, a dielectric layer is formed adjacent to the sidewalls.
    Type: Grant
    Filed: April 4, 2011
    Date of Patent: July 16, 2013
    Assignee: Headway Technologies, Inc.
    Inventors: Kunliang Zhang, Min Li, Yu-Hsia Chen, Chyu-Jiuh Torng
  • Patent number: 8488276
    Abstract: A perpendicular magnetic recording (PMR) media including a non-magnetic or superparamagnetic grain isolation magnetic anisotropy layer (GIMAL) to provide a template for initially well-isolated small grain microstructure as well as improvement of Ku in core grains of a magnetic recording layer. The GIMAL composition may be adjusted to have lattice parameters similar to a bottom magnetic recording layer and to provide a buffer for reducing interface strains caused by lattice mismatch between the bottom magnetic recording layer and an underlying layer.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: July 16, 2013
    Assignee: WD Media, LLC
    Inventors: Hong-Sik Jung, Donald Stafford, B. Ramamurthy Acharya, Sudhir S. Malhotra, Gerardo A. Bertero
  • Patent number: 8474127
    Abstract: A method for enhancing thermal stability, improving biasing and reducing damage from electrical surges in self-pinned abutted junction heads. The method includes forming a free layer, forming first hard bias layers abutting the free layer and forming second hard bias layers over the first hard bias layers discontiguous from the free layer, the second hard bias layers being anti-parallel to the first hard bias layers, the first and second hard bias layers providing a net longitudinal bias on the free layer.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: July 2, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Hardayal Singh Gill, Wen-Chien Hsiao, Jih-Shiuan Luo
  • Patent number: 8468682
    Abstract: A method for providing a perpendicular magnetic recording transducer is described. The method and system include providing a metallic underlayer and providing an insulator, at least a portion of which is on the metallic underlayer. The method and system also include forming a trench in the insulator. The bottom of the trench is narrower than the top of the trench and includes a portion of the metallic underlayer. The method and system also include providing a nonmagnetic seed layer that substantially covers at least the bottom and sides of the trench. The method and system also include plating a perpendicular magnetic pole material on at least a portion of the seed layer and removing a portion of the perpendicular magnetic pole material. A remaining portion of the perpendicular magnetic pole material forms a perpendicular magnetic recording pole.
    Type: Grant
    Filed: March 6, 2012
    Date of Patent: June 25, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventor: Lei Larry Zhang
  • Patent number: 8468692
    Abstract: A variable resistance memory device has memory cells that are operated by Joule's heat and which are highly thermally efficient. Conductive patterns are formed on a substrate; sacrificial patterns exposing a portion of the top surface of each of the conductive patterns are formed on the conductive patterns, lower electrodes are formed by etching upper portions of the conductive patterns using the sacrificial patterns as an etching mask, then mold patterns are formed on the lower electrodes and cover exposed sidewall surfaces of the sacrificial patterns, and then the sacrificial patterns are replaced with variable resistance patterns.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: June 25, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Byeung Chul Kim
  • Patent number: 8468683
    Abstract: Methods of making write poles for perpendicular magnetic recording write heads. The bevel angle of the write pole for a perpendicular magnetic recording write head affects the performance of the write head. By forming reinforcement layer on the polymeric underlayer mask to enhance the mask durability during ion mill and tapering the polymeric underlayer above the non-magnetic mill mask layer using oxygen and nitrogen based reactive ion etch process, the bevel angle of the magnetic write pole can be increased greatly to meet the demands of the next and future generations of magnetic recording write heads.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: June 25, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Guomin Mao, Yi Zheng
  • Patent number: 8453316
    Abstract: A method of forming a magnetic head comprises the steps of: selectively exposing through the use of a photomask a photoresist layer unpatterned; forming a pattern for forming a pole layer by developing the photoresist layer after the exposure; and forming the pole layer through the use of the pattern. The photomask includes first to third regions. The first region has such a perimeter that a projection image thereof is shaped along a perimeter of an ideal shape of the top surface of the pole layer. The second region touches the perimeter of the first region, and is located outside the first region. The third region is located inside the first region without touching the perimeter of the first region. The third region suppresses deviation of the pole layer from its desired shape which may be caused by the effect of light reflected while the photoresist layer is exposed.
    Type: Grant
    Filed: July 2, 2009
    Date of Patent: June 4, 2013
    Assignee: Headway Technologies, Inc.
    Inventors: Yoshitaka Sasaki, Kazuo Ishizaki, Hiroyuki Itoh
  • Patent number: 8451563
    Abstract: A method fabricates a side shield for a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. The nonmagnetic layer has a pole trench therein. The pole trench has a shape and location corresponding to the pole. A wet etchable layer is deposited. Part of the wet etchable layer resides in the pole trench. A pole is formed. The pole has a bottom and a top wider than the bottom in the pole tip region. Part of the pole in the pole tip region is in the pole trench on at least part of the wet etchable layer. At least parts of the wet etchable layer and the nonmagnetic layer are removed, forming an air bridge. The air bridge is between part of the pole at the ABS location and an underlying layer. Side shield layer(s) that substantially fill the air bridge are deposited.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: May 28, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jinqiu Zhang, Feng Liu, Shaoping Li, Ming Sun
  • Patent number: 8451567
    Abstract: A CPP (Current Perpendicular to Plane) MR (Magnetoresistive) read head and its method of fabrication includes a patterned CPP MR sensor stack having a SAF (Synthetic Antiferromagnetic) free layer structure that is longitudinally biased by the combination of an exchange biasing layer formed over the sensor stack and hard biasing layers that are formed adjacent to the patterned sides of the stack. The combination provides the stack with high resolution reading capabilities without the necessity for a narrow read gap formed by closely spaced top and bottom shields. Sixteen embodiments are described that provide different versions of the exchange biasing layer, different positions of the hard biasing layers and different patternings of the CPP MR sensor stack.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: May 28, 2013
    Assignee: Headway Technologies, Inc.
    Inventors: Yuchen Zhou, Wenyu Chen, Joe Smyth
  • Patent number: 8443510
    Abstract: A method for providing at least one transducer including magnetic structure and having an air-bearing surface (ABS) are described. The method includes providing a lapping electronic lapping guide (lapping ELG) and a targeting ELG. The lapping ELG and targeting ELG each are coplanar with the desired thickness of the magnetic structure and have a back edge at the distance from the ABS such that the ELG back edges are substantially aligned with the flare point. The targeting ELG has a front edge at a front edge distance from the ABS corresponding to an intersection of the bevel and the desired thickness. The method further includes lapping the transducer and terminating the lapping based on a first resistance of the lapping ELG and a second resistance of the targeting ELG.
    Type: Grant
    Filed: May 28, 2009
    Date of Patent: May 21, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Changqing Shi, Ming Jiang, Lijie Guan
  • Patent number: 8424192
    Abstract: A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.
    Type: Grant
    Filed: August 8, 2005
    Date of Patent: April 23, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Danning Yang, Lei Wang, Yingjian Chen, Brant Nease, Kyusik Sin
  • Patent number: 8416540
    Abstract: A method and system define a magnetoresistive junction in a magnetic recording transducer. The method and system include performing a first mill at a first angle from a normal to the surface of the magnetic recording transducer. A second mill is performed at a second angle from the normal to the surface. The second angle is larger than the first angle. A third mill is performed at a third angle from the normal to the surface. The third angle is not larger than the first angle.
    Type: Grant
    Filed: June 26, 2008
    Date of Patent: April 9, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanxiong Li, Xiaozhong Dang, Mahendra Pakala, Yong Shen
  • Patent number: 8413317
    Abstract: A method and system for fabricating a microelectric device are described. A write pole of an energy assisted magnetic recording head or a capacitor might be fabricated. The method includes depositing a resist film and curing the resist film at a temperature of at least 180 degrees centigrade. A cured resist film capable of supporting a line having an aspect ratio of at least ten is thus provided. A portion of the cured resist film is removed. A remaining portion of the resist film forms the line. An insulating or nonmagnetic layer is deposited after formation of the line. The line is removed to provide a trench in the insulating or nonmagnetic layer. The trench has a height and a width. The height divided by the width corresponds to the aspect ratio. At least part of the structure is provided in the trench.
    Type: Grant
    Filed: November 12, 2010
    Date of Patent: April 9, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Dujiang Wan, Hai Sun, Ge Yi, Wei Gao, Hong Zhang, Guanghong Luo, Yunjun Tang, Tiffany Yun Wen Jiang, Zhigang Zhou, Wencheng Su
  • Patent number: 8407882
    Abstract: According to one embodiment, a method for manufacturing a thin film magnetic head includes forming on a substrate magnetic head portions having a magnetoresistive element and resistance detection elements for measuring an amount of polishing; slicing the substrate to form at least one row bar; polishing the ABS of each row bar; forming rails on the polished ABS; and cutting each row bar to separate each magnetic head portion. The step of polishing the ABS includes measuring a resistance of each resistance detection element and a resistance of each magnetoresistive element; calculating an offset value between the resistance detection element and the magnetoresistive element; and calculating a final resistance of the resistance detection element by using the calculated offset value. When the resistance of the resistance detection element reaches the final resistance, polishing of the ABS of the row bar is terminated. Other methods are presented as well.
    Type: Grant
    Filed: September 14, 2009
    Date of Patent: April 2, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Takateru Seki, Zhou Wenjun, Kazuo Takeda, Takefumi Kubota
  • Patent number: 8404128
    Abstract: A method and system for providing a magnetic recording transducer having a pole are disclosed. The pole has side(s), a bottom, and a top wider than the bottom. The method and system include providing at least one side gap layer that covers the side(s) and the top of the pole. At least one sacrificial layer is provided on the side gap layer(s). The sacrificial layer(s) are wet etchable and cover the side gap layer(s). The magnetic recording transducer is planarized after the sacrificial layer(s) are provided. Thus, a portion of the side gap and sacrificial layer(s) is removed. A remaining portion of the sacrificial layer(s) is thus left. The method and system also include wet etching the sacrificial layer(s) to remove the remaining portion of the sacrificial layer(s). A wrap around shield is provided after the remaining portion of the sacrificial layer(s) is removed.
    Type: Grant
    Filed: February 23, 2009
    Date of Patent: March 26, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Hong Zhang, Ge Yi, Lei Wang, Dujiang Wan, Guanghong Luo, Xiaohai Xiang
  • Patent number: 8402635
    Abstract: A method of manufacturing a magnetic head, including a magneto resistance effect (MR) element that reads a magnetic recording medium, is disclosed. A multilayer film is formed on a shield layer. Unnecessary portions of the multilayer film are removed from both sides of the MR element in a first direction orthogonal to a lamination direction of the multilayer film and parallel to the MR element surface facing the magnetic recording medium. An insulating layer is formed on a surface exposed by removal of the unnecessary portions. An integrated soft magnetic layer covering both sides of the MR element in the first direction and an upper side of the MR element is formed, thereby configuring a second shield layer. An anisotropy application layer is formed on the second shield layer, thereby providing exchange anisotropy to the soft magnetic layer, and magnetizing the soft magnetic layer in a predetermined direction.
    Type: Grant
    Filed: March 21, 2011
    Date of Patent: March 26, 2013
    Assignee: TDK Corporation
    Inventors: Naomichi Degawa, Takumi Yanagisawa, Satoshi Miura, Yoshikazu Sawada, Takahiko Machita, Kenzo Makino, Takekazu Yamane, Shohei Kawasaki
  • Patent number: 8405930
    Abstract: A method and system for providing a magnetic recording head is described. The magnetic recording head has an ABS configured to reside in proximity to a media during use. The magnetic recording head includes a main pole, first and second auxiliary poles, a backgap, a nonmagnetic spacer, and at least one coil. The main pole includes a pole tip occupying a portion of the ABS and a back edge distal from the ABS. Each auxiliary pole has a front recessed from the ABS and a back portion. A portion of the main pole distal from the ABS resides between the auxiliary poles. The auxiliary poles are magnetically coupled with the main pole. The backgap magnetically couples the back portions of the auxiliary poles. The nonmagnetic spacer adjoins the back edge of the main pole and is between the auxiliary poles. The coil(s) energize the main pole.
    Type: Grant
    Filed: March 23, 2011
    Date of Patent: March 26, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Zhanjie Li, Zhigang Bai, Feng Liu, Yugang Wang
  • Patent number: 8393073
    Abstract: A method for constructing a magnetoresistive sensor that avoids shadowing effects of a mask structure during sensor definition. The method includes the use of an antireflective coating (ARC) and a photosensitive mask deposited there over. The photosensitive mask is formed to cover a desired sensor area, leaving non-sensor areas exposed. A reactive ion etch is performed to transfer the pattern of the photosensitive mask onto the underlying ARC layer. The reactive ion etch (RIE) is performed with a relatively high amount of platen power. The higher platen power increases ion bombardment of the wafer, thereby increasing the physical (ie mechanical) component of material removal relative to the chemical component. This increase in the physical component of material removal result in an increased rate of removal of the photosensitive mask material relative to the ion mill resistant mask.
    Type: Grant
    Filed: July 21, 2008
    Date of Patent: March 12, 2013
    Assignee: HGST Netherlands B.V.
    Inventors: Richard Jule Contreras, Michael Feldbaum, Mustafa Michael Pinarbasi
  • Patent number: 8381391
    Abstract: A method for providing a magnetic recording transducer is described. The method includes providing a pinned layer for a magnetic element. In one aspect, a portion of a tunneling barrier layer for the magnetic element is provided. The magnetic recording transducer annealed is after the portion of the tunneling barrier layer is provided. The annealing is at a temperature higher than room temperature. A remaining portion of the tunneling barrier layer is provided after the annealing. In another aspect, the magnetic transducer is transferred to a high vacuum annealing apparatus before annealing the magnetic transducer. In this aspect, the magnetic transducer may be annealed before any portion of the tunneling barrier is provided or after at least a portion of the tunneling barrier is provided. The annealing is performed in the high vacuum annealing apparatus. A free layer for the magnetic element is also provided.
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: February 26, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Chando Park, Qunwen Leng, Mahendra Pakala
  • Patent number: 8381392
    Abstract: A method, including depositing a layer of material onto a base portion of a wafer, is disclosed. The layer of material has a first surface adjacent the base portion. The method also includes depositing a pattern of masking material onto a portion of a second surface of the layer. Material from the layer of material that is unprotected by the pattern of masking material is removed from the layer of material. By removing such material a portion of the layer of material is suspended from the base portion.
    Type: Grant
    Filed: May 11, 2010
    Date of Patent: February 26, 2013
    Assignee: Seagate Technology LLC
    Inventors: Jie Zou, Kaizhong Gao
  • Patent number: 8375564
    Abstract: A method provides a pole of magnetic recording transducer. A nonmagnetic stop layer having a thickness and a top surface is provided. A depression that forms a bevel is provided in the stop layer. The bevel has a depth less than the thickness and a bevel angle with respect to a remaining portion of the top surface. The bevel angle is greater than zero and less than ninety degrees. An intermediate layer having a substantially flat top surface is provided over the stop layer. A trench is formed in the intermediate layer via a removal process. The trench has a profile corresponding to the pole. The stop layer is a stop for the removal process. The method also includes providing the pole in the trench. The pole has a leading edge bevel corresponding to the bevel in the stop layer.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: February 19, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Guanghong Luo, Danning Yang, Weimin Si, Dujiang Wan, Yun-Fei Li, Lijie Guan, Ming Jiang
  • Patent number: 8375565
    Abstract: A method fabricates a transducer having an air-bearing surface (ABS). The method includes providing at least one near-field transducer (NFT) film and providing an electronic lapping guide (ELG) film substantially coplanar with a portion of the at least one NFT film. The method also includes defining a disk portion of an NFT from the portion of the at least one NFT film and at least one ELG from the ELG film. The disk portion corresponds to a critical dimension of the NFT from an ABS location. The method also includes lapping the at least one transducer. The lapping is terminated based on a signal from the ELG.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: February 19, 2013
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yufeng Hu, Zhongyan Wang, Jinshan Li
  • Patent number: 8371019
    Abstract: A method for manufacturing a magnetic write head having a write pole with a very narrow track width, straight well defined sides and a well defined trailing edge width (e.g. track-width). The method includes uses two separate chemical mechanical polishing processes that stop at separate CMP stop layers. The first CMP stop layer is deposited directly over a RIEable fill layer. A RIE mask, is formed over the fill layer and first CMP stop layer, the RIE mask having an opening. A trench then is formed in the RIEable fill layer. A second CMP stop layer is then deposited into the trench and over the RIE mask, followed by plating of a magnetic material. First and second chemical mechanical polishing processes are then performed, the first stopping at the first CMP stop and the second stopping at the second CMP stop.
    Type: Grant
    Filed: July 20, 2011
    Date of Patent: February 12, 2013
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Sue Siyang Zhang, Yi Zheng, Qiping Zhong, Honglin Zhu
  • Patent number: 8365393
    Abstract: Methods for manufacturing a magnetic head for a disk drive. The methods include the steps of depositing a first non-magnetic spacer layer, depositing a plating seed layer on the first non-magnetic spacer layer and plating at least one side shield and a pole tip layer on the plating seed layer, each of the at least one side shield and the pole tip layer separated by a trench. Then the method includes depositing a first non-magnetic material in the trench using ion-beam assisted deposition and planarizing using a chemical-mechanical polishing step.
    Type: Grant
    Filed: July 28, 2009
    Date of Patent: February 5, 2013
    Assignee: Seagate Technology LLC
    Inventors: Mourad Benakli, Michael Mallary
  • Patent number: 8353098
    Abstract: A method of manufacturing a perpendicular magnetic recording head capable of easily and accurately forming a main magnetic-pole layer having a shape suitable for concentrating a magnetic flux is provided. A nonmagnetic layer having a recessed section (a first recessed section and a second recessed section) is formed, and then an additional nonmagnetic layer is formed on an inner surface of the recessed section. Then, a magnetic layer is formed in the recessed section formed with the additional nonmagnetic layer, and then the magnetic layer is cut to form an air bearing surface, so as to form the main magnetic-pole layer.
    Type: Grant
    Filed: March 12, 2010
    Date of Patent: January 15, 2013
    Assignee: SAE Magnetics (H.K.) Ltd.
    Inventors: Tetsuya Mino, Naoto Matono, Ikuhito Onodera, Kazushi Nishiyama, Michitoshi Tsuchiya, Kenji Sasaki
  • Patent number: 8355222
    Abstract: A perpendicular magnetic write head includes: a magnetic pole; a pair of nonmagnetic side gap layers provided on both sides in a track-width direction of the magnetic pole; a nonmagnetic trailing gap layer provided on a trailing side of the magnetic pole; a magnetic shield layer so provided as to surround the magnetic pole with both of the nonmagnetic side gap layer and the nonmagnetic trailing gap layer in between; and a magnetic seed layer formed between the nonmagnetic trailing gap layer and the magnetic shield layer, and having a saturation magnetic flux density higher than that of the magnetic shield layer. The magnetic seed layer is not formed between the nonmagnetic side gap layer and the magnetic shield layer.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: January 15, 2013
    Assignee: SAE Magnetics (H.K.) Ltd.
    Inventors: Tetsuya Mino, Naoto Matono, Ikuhito Onodera, Kazushi Nishiyama, Michitoshi Tsuchiya, Kenji Sasaki
  • Patent number: 8347488
    Abstract: A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.
    Type: Grant
    Filed: December 9, 2009
    Date of Patent: January 8, 2013
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Liubo Hong, Aron Pentek, Yi Zheng
  • Patent number: 8347489
    Abstract: A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.
    Type: Grant
    Filed: September 1, 2010
    Date of Patent: January 8, 2013
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Liubo Hong, Aron Pentek, Yi Zheng, Honglin Zhu
  • Patent number: 8347487
    Abstract: A fabricating method of a magnetoresistance sensor is provided with cost effective and process flexibility features. Firstly, a substrate is provided. Then, at least one magnetoresistance structure and at least one bonding pad are formed over the substrate, wherein the bonding pad is electrically connected with the magnetoresistance structure. Then, a passivation layer is formed over the magnetoresistance structure and the bonding pad. Then, a magnetic shielding and concentrator structure is formed over the passivation layer at a location corresponding to the magnetoresistance structure. Finally, bonding pad openings is formed on the passivation layer by patterned polyimide, thereby exposing the bonding pad. After bonding pad was opened, the patterned polyimide can be removed or retained as an additional protection layer.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: January 8, 2013
    Assignee: Voltafield Technology Corporation
    Inventors: Fu-Tai Liou, Chih-Chien Liang, Chien-Min Lee
  • Patent number: 8341825
    Abstract: A thermally-assisted magnetic head includes a slider including an air bearing surface (ABS) and a waveguide with a core that extends from a light entering surface to the ABS, and a laser diode (LD) unit attached to the light entering surface. The LD unit faces the light entering surface, and a photo detector faces the ABS. A polarizer that only transmits light having a polarization component orthogonal to a polarization direction of linearly polarized laser light is disposed between the ABS and the photo detector. An LD of the LD unit is activated, and the linearly polarized laser light enters the core from the light entering surface. Light radiated from the ABS enters the polarizer, and an alignment of the slider and the LD unit is performed while the photo detector detects the light transmitted through the polarizer.
    Type: Grant
    Filed: November 16, 2010
    Date of Patent: January 1, 2013
    Assignee: TDK Corporation
    Inventors: Shinji Hara, Koji Shimazawa, Eiji Komura, Tsutomu Chou, Seiichi Takayama
  • Patent number: 8336194
    Abstract: A method of fabricating a tunneling magnetoresistance (TMR) reader is disclosed. A TMR structure comprising at least one ferromagnetic layer and at least one nonmagnetic insulating layer is provided. A first thermal annealing process on the TMR structure is performed. A reader pattern definition process performed on the TMR structure to obtain a patterned TMR reader. A second thermal annealing process is performed on the patterned TMR reader.
    Type: Grant
    Filed: November 3, 2009
    Date of Patent: December 25, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Lu Yuan, Jian X. Shen, Geoffrey W. Anderson, Christopher Ng
  • Patent number: 8333008
    Abstract: A method and system for fabricating a perpendicular magnetic recording head, and the head so formed, are described. The method includes depositing an underlayer directly on an insulating layer. The underlayer preferably includes at least one of a nonferromagnetic metal, silicon oxide, and silicon nitride. A pole layer, which has a pole removal rate, is provided on the underlayer. The method and system further include forming a perpendicular magnetic recording pole from the pole layer. The perpendicular magnetic recording pole has a top and a bottom that is narrower than the top. The process of forming the perpendicular magnetic recording pole further includes removing a portion of the pole layer such that a pole removal rate for the pole layer is less than or substantially equal to a removal rate of the underlayer during the removing step.
    Type: Grant
    Filed: July 29, 2005
    Date of Patent: December 18, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Kyusik Sin, Lei Wang, Yingjian Chen
  • Patent number: 8335051
    Abstract: A recording head having a narrowed track has a high recording magnetic field strength and a high recording magnetic field gradient has certain problems which may be difficult to overcome. In one embodiment, a magnetic film, which overhangs from a track width, is provided on a trailing side of a. region retracted from an ABS of a main pole facing a recording medium. Thereby, a magnetic field strength on the trailing side is increased so that a difference in distribution of magnetic field strength defined by a geometrical bevel angle given to the main pole is increased. Consequently, writing performance of the main pole is improved while forming a large magnetic clearance angle with respect to an adjacent track and suppresses writing into an adjacent track when skew occurs. Other systems and methods are also disclosed regarding a head with a high recording magnetic field using an overhanging magnetic film.
    Type: Grant
    Filed: December 11, 2009
    Date of Patent: December 18, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Isao Nunokawa, Mikito Sugiyama, Kikuo Kusukawa, Kimitoshi Etoh
  • Patent number: 8322022
    Abstract: A method for providing energy assisted magnetic recording (EAMR) heads is described. The method comprises bonding a plurality of lasers to a first substrate. The plurality of lasers corresponds to the plurality of EAMR heads and is for providing energy to a plurality of EAMR transducers. The method further comprises fabricating the plurality of EAMR transducers for the plurality of EAMR heads on a second substrate, bonding the first substrate to the second substrate such that the plurality of EAMR transducers and the plurality of lasers reside between the first substrate and the second substrate, removing at least one of the first substrate and the second substrate, and separating a remaining substrate into the plurality of EAMR heads.
    Type: Grant
    Filed: June 28, 2010
    Date of Patent: December 4, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ge Yi, Hongxing Yuan, Ming Sun, Dujiang Wan
  • Patent number: 8325440
    Abstract: A magnetic head incorporates: a medium facing surface; a coil; a pole layer; first and second shields disposed to sandwich the pole layer therebetween; a first gap layer disposed between the first shield and the pole layer; a second gap layer disposed between the second shield and the pole layer; and a substrate. The first shield is located closer to the substrate than the second shield. The magnetic head further incorporates an antireflection film disposed between the first shield and the first gap layer or between the first gap layer and the pole layer. The pole layer is formed by frame plating.
    Type: Grant
    Filed: March 26, 2007
    Date of Patent: December 4, 2012
    Assignees: TDK Corporation, Sae Magnetics (H.K.) Ltd.
    Inventors: Tatsuya Harada, Koichi Otani, Hidetaka Kawano, Kenji Yokoyama, Naoto Matono
  • Patent number: 8316527
    Abstract: The method provides a magnetoresistive device. The magnetoresistive device is formed from a plurality of magnetoresistive layers. The method includes providing a mask. The mask covers a first portion of the magnetoresistive element layers in at least one device area. The magnetoresistive element(s) are defined using the mask. The method includes depositing hard bias layer(s). The method also includes providing a hard bias capping structure on the hard bias layer(s). The hard bias capping structure includes a first protective layer and a planarization stop layer. The first protective layer resides between the planarization stop layer and the hard bias layer(s). The method also includes performing a planarization. The planarization stop layer is configured for the planarization.
    Type: Grant
    Filed: April 1, 2008
    Date of Patent: November 27, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Liubo Hong, Honglin Zhu
  • Patent number: 8307540
    Abstract: A method provides an EAMR transducer. A sacrificial post is provided on an NFT distal from the ABS. This post has an edge proximate and substantially parallel to the ABS. A sacrificial mask is provided on the NFT between the post and the ABS. Optical material(s) are provided. The post is between the optical material(s) and the ABS. The post is removed. A heat sink post corresponding to the post is provided. The heat sink post has a bottom thermally coupled with the NFT and an edge proximate and substantially parallel to the ABS. Part of the heat sink post is removed, forming a heat sink having a top surface at an acute angle from the ABS. Nonmagnetic material(s) are provided on the optical material(s). A pole having a bottom surface thermally coupled with the heat sink and coil(s) are provided.
    Type: Grant
    Filed: March 10, 2011
    Date of Patent: November 13, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ut Tran, Kevin K. Lin, Yufeng Hu
  • Patent number: 8296931
    Abstract: According to an aspect of an embodiment, a method for manufacturing a storage medium includes providing a medium plate member for forming the storage medium and a guide member; and aligning the medium plate member and the guide member so that the medium plate member and the guide member are placed adjacently and the surfaces of the medium plate member and the guide member form a substantially common plane. The method further includes guiding a burnishing member for burnishing the medium plate member onto the surface of the guide member; and sliding the burnishing member on the guide member onto the medium plate member so as to burnish the surface of the medium plate member.
    Type: Grant
    Filed: July 16, 2008
    Date of Patent: October 30, 2012
    Assignee: Showa Denko K.K.
    Inventors: Hiroyoshi Okumura, Eishin Yamakawa
  • Patent number: 8296930
    Abstract: A method for manufacturing a magnetoresistive sensor that results in the sensor having a very flat top magnetic shield. The process involves depositing a plurality of sensor layers and then depositing a thin high density carbon CMP stop layer over the sensor layers and forming a mask over the CMP stop layer. An ion milling is performed to define the sensor. Then a thin insulating layer and magnetic hard bias layer are deposited. A chemical mechanical polishing is performed to remove the mask and a reactive ion etching is performed to remove the remaining carbon CMP stop layer. Because the CMP stop layer is very dense and hard, it can be made very thin. This means that when it is removed by reactive ion etching, there is very little notching over the sensor, thereby allowing the upper shield to be very thin.
    Type: Grant
    Filed: December 22, 2009
    Date of Patent: October 30, 2012
    Assignee: Hitachi Global Storage Technologies Netherlands B.V.
    Inventors: Shin Funada, Quang Le, Thomas L. Leong, Jui-Lung Li, Chang-Man Park, Ning Shi, Hicham M. Sougrati
  • Patent number: 8286333
    Abstract: A method of fabricating a recording head includes depositing an insulator material onto at least a portion of a first member, wherein the insulator material forms an insulator film having a film thickness. The method further includes depositing a writer pole material onto the insulator film, wherein the writer pole material forms a writer pole member, and wherein the insulator film is between the writer pole member and a contact layer. Further, in some embodiments, the film thickness determines the distance between the writer pole member and the first contact member and also determines the distance between the writer pole member and the second contact member.
    Type: Grant
    Filed: March 19, 2008
    Date of Patent: October 16, 2012
    Assignee: Seagate Technology LLC
    Inventors: Nurul Amin, Ibro Tabakovic, Eric S. Linville, Ming Sun
  • Patent number: 8282843
    Abstract: A method of manufacturing a perpendicular magnetic head having a writing element that writes magnetic information to a recording medium includes forming a main magnetic pole part generating a magnetic field on a substrate; removing at least a part of the substrate and a material existing at a circumference of the main magnetic pole part to expose an entire circumference of the main magnetic pole part at a surface that becomes an opposing medium surface (ABS) opposite to the recording medium; forming a shield gap film that is made of a nonmagnetic material so as to cover the entire circumference of the main magnetic pole part at least at the surface that becomes the ABS; and forming a shield layer so as to cover an entire circumference of the shield gap film at least at the surface that becomes the ABS.
    Type: Grant
    Filed: November 10, 2009
    Date of Patent: October 9, 2012
    Assignee: TDK Corporation
    Inventors: Tatsuhiro Nojima, Hisayoshi Watanabe, Masachika Hashino
  • Patent number: 8276258
    Abstract: A method and system provide a magnetic transducer that includes an underlayer and a first nonmagnetic layer on the underlayer. The method and system include providing a first trench in the first nonmagnetic layer. The first trench has at least one edge corresponding to at least one side shield. The method and system also include providing a second nonmagnetic layer in the first trench and providing a second trench in the second nonmagnetic layer. The method and system include providing the main pole. At least part of the main pole resides in the second trench. The method and system further include removing at least a portion of the second nonmagnetic layer between the edge(s) and the main pole. The method and system also provide the side shield(s) in the first trench. The side shield(s) extend from at least an air-bearing surface location to not further than a coil front location.
    Type: Grant
    Filed: August 26, 2008
    Date of Patent: October 2, 2012
    Assignee: Western Digital (Fremont), LLC
    Inventors: Ut Tran, Zhigang Bai