Abstract: A heated resonator includes a base substrate, a piezoelectric piece having a thickness and a top side and a bottom side, a first electrode on the top side, a second electrode opposite the first electrode on the bottom side, an anchor connected between the piezoelectric piece and the base substrate, and a heater on the piezoelectric material. A thermal resistor region in the piezoelectric piece is between the heater and the anchor.

Abstract: An electro-mechanical transducer provides a very low frequency wide band response by using a quad configuration of piezoelectric cantilevers, providing additive output between the resonant frequencies of the cantilevers and achieves this at great depths under free flooded or oil filled conditions.

Abstract: An interactive panel including a substrate, wherein a seismic wave is intended to propagate, and at least two piezoelectric transduction devices each including two piezoelectric transducers. Each piezoelectric transducer includes two piezoelectric elements each with two surfaces each covered by an electrode. The four electrodes of each piezoelectric transducer are interconnected to supply, when opposing stresses are applied to the piezoelectric elements of the transducer, an electrical measurement signal that depends on the angle between a main plane and an opposite stress-separation plane. Two piezoelectric transducers of a same device have a same central axis and their respective main planes form a non-zero angle thereinbetween. Each piezoelectric transduction device is attached to the substrate such that movement of the substrate during passage of the seismic wave causes stress on the piezoelectric elements, in opposite directions on either side of the stress-separation plane.

Abstract: Disclosed herein is a method of manufacturing an inertial sensor. The method of manufacturing an inertial sensor 100 includes (A) applying a polymer 120 to a base substrate 110, (B) patterning the polymer 120 so as to form an opening part 125 in the polymer 120, (C) completing a cap 130 by forming a cavity 115 on the base substrate 110 exposed fro the opening part 125 through an etching process in a thickness direction, and (D) bonding the cap 130 to a device substrate 140 by using a polymer 120, whereby the polymer 120 is applied to the base substrate 110 in a constant thickness D3, such that the cap 130 may be easily bonded to the device substrate 140 by using the polymer 120.

Abstract: Piezoelectric compounds of the formula xNamBinTiO3-yKmBinTiO3-zLimBinTiO3-pBaTiO3 where (0<x?1), (0?y?1), (0?z?1), (0.3?m?0.7), (0.3?n?0.7), (0<p?1) (0.9?m/n?1.1) as well as to doped variations thereof are disclosed. The material is suitable for high power applications.

Abstract: A manufacturing method of an electromechanical transducing device includes forming a vibration plate on a substrate; forming a first electrode made of a metal on the vibration plate; forming a second electrode made of an electrically conductive oxide on the first electrode; coating a surface modification material and carrying out surface modification of only the first electrode; forming an electromechanical transducing film on the second electrode; and forming a third electrode made of an electrically conductive oxide on the electromechanical transducing film.

Abstract: Provided is an active piezoelectric energy harvester, which can control a direct current voltage applied to an embedded variable capacitance layer to precisely adjust a resonance frequency in real time, and thus achieve a simpler structure and a smaller size compared to a conventional one that adjusts the resonance frequency using a separate variable capacitor provided outside. Further, the active piezoelectric energy harvester can precisely adjust the resonance frequency even when the frequency of vibration varies over time as in a real natural vibration environment or when it is degraded to undergo a variation in its own resonance frequency, and thus can continuously maintain optimal energy conversion characteristics.

Abstract: A micro-electro-mechanical device includes a substrate; a piezoelectric actuator disposed on the substrate; and an elastic member affixed to the substrate at a first end thereof, and mechanically coupled to the piezoelectric actuator; wherein the elastic member comprises at least one of: a notch, a groove, and a recess.

Abstract: Disclosed is a piezo-electrically actuated micro-mechanical deformable member comprising a corrugated longitudinal beam (521) formed in a substrate, and having a first anchored end (502) and a second end (509), as well as a plurality of piezoelectric film (PZET) actuating segments (522, 523, 524) formed in or on at least some grooves and ridges of the corrugated beam, the beam (521) being configured to assume one of a number of different geometric configurations depending upon which of a corresponding set of electric actuation signals (105) are applied to the PZET elements, the electric actuation signals establishing corresponding electric fields in the associated PZET segments to thereby deform the member.

Abstract: A method for fabricating electrostatic transducers and arrays electrically separates the substrate segments of the transducer elements from each other using a technique involving two cutting steps, in which the first step forms a patterned opening in the substrate to make a partial separation of substrate segments, and the second step completes the separation after the substrate segments have been secured to prevent instability of the substrate segments upon completion of the second step. The securing of the substrate segments may be accomplished by filling a nonconductive material in the partial separation or securing the transducer array on a support substrate. When the substrate is conductive, the separated substrate segments serve as separate bottom electrodes that can be individually addressed. The method is especially useful for fabricating ID transducer arrays.

Abstract: A piezoelectric energy harvesting device (PEHD) comprising a driving element, conducting element, piezoelectric layer and non-piezoelectric layer capable of converting ambient mechanical energy into electrical energy. The piezoelectric layer may be constructed from PMN-PT or PZT having a thickness of about 1-150 ?m. The PEHD may be used to generate about 1 W. The harvested energy may be stored and used to power microelectronic devices and rechargeable battery technologies.

Abstract: An energy harvesting apparatus and method that is especially well suited for harvesting low frequency broadband vibration energy from a vibrating structure is presented. The apparatus includes a pair of disc springs that are arranged in an opposing relationship. A threaded fastening member and a threaded nut extend through apertures in each of the disc springs and enable a predetermined preload force to be applied to the disc springs. The preload effectively “softens” the disc springs, thus heightening the sensitivity of the disc springs to low frequency, low amplitude vibration energy. A piezoelectric material ring is secured to each of the disc springs. Each piezoelectric material ring experiences changes in strain as its associated disc spring deflects in response to vibration energy experienced from a vibrating structure.

Abstract: An expansion and contraction actuator has a first long actuator portion and a second long actuator portion that face each other and connection members that connect the long sides of each of the first long actuator portion and the second long actuator portion to each other, in which a part of the first long actuator portion and a part of the second long actuator portion are apart from each other to thereby form a hollow structure, the first long actuator portion and the second long actuator portion each have a pair of long electrodes and a long electrolyte layer having an electrolyte, long internal electrodes thereof are the same cathode or anode electrodes, long external electrodes thereof are counter electrodes thereto, and the actuator expands and contracts in the direction of the screw axis by voltage application.

Abstract: It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film. The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2—BaTiO3 layer with a (111) orientation, where 0.30?x?0.46 and 0.51?y?0.62.

Abstract: In an inactive region, a farthest dummy electrode formed in a base end portion and an isolated dummy electrode island are located at positions along an extension from an individual internal electrode toward the base end portion. Such a configuration allows the area of the dummy electrode to be reduced, compared with a dummy electrode continuously formed in the inactive region. Therefore, the cost incurred by the dummy electrode is reduced, which leads to reduction in manufacturing cost of a piezoelectric unit.

Abstract: An actuator element includes a first element unit configured to have one end being a fixed end and the other end being a free end and bends when voltage is applied, and a second element unit configured to have a shorter element length than the first element unit, have one end connected to the first element unit and bend in the opposite direction to the first element unit when voltage is applied and may support the first element unit.

Abstract: A wafer level package of micro electromechanical system (MEMS) microphone includes a substrate, a number of dielectric layers stacked on the substrate, a MEMS diaphragm, a number of supporting rings and a protective layer. The MEMS diaphragm is disposed between two adjacent dielectric layers. A first chamber is between the MEMS diaphragm and the substrate. The supporting rings are disposed in some dielectric layers and stacked with each other. An inner diameter of the lower supporting ring is greater than that of the upper supporting ring. The protective layer is disposed on the upmost supporting ring and covers the MEMS diaphragm. A second chamber is between the MEMS diaphragm and the protective layer. The protective layer defines a number of first through holes for exposing the MEMS diaphragm. The wafer level package of MEMS microphone has an advantage of low cost.

Abstract: A method of protecting a resonating sensor is described. The protected resonating sensor may include at least one passive ultrasonically excitable resonating sensor unit. Each sensor unit has one or more vibratable members having a resonating frequency that varies as a function of a physical variable in a measurement environment. The sensor is protected by forming one or more protective chambers defined between a compliant member and the vibratable member(s). A substantially non-compressible medium is disposed within the protective chamber(s). The compliant member has a first side that may be exposed to a measurement environment and a second side that may be exposed to the substantially non-compressible medium. The substantially non-compressible medium may be a liquid or gel and is in contact with the vibratable member(s). When the medium is a liquid, the chamber is sealed. When the medium is a gel, the chamber may be sealed or non-sealed.

Abstract: A construction is presented, which is comprised of two piezoelectric bending cantilevers, of different lengths, called a first bender and a second bender respectively, in which both benders bend in opposite directions. The second bender is mechanically in series connected to the first bender, thereby increasing the rotation angle of the tip of the second bender. The length of the second bender is chosen thus that in sinusoidal excitation, the tip of the second bender remains at the same point throughout the entire cycle, while it does undergo rotation. In this fashion a virtual axis at the tip of the second bender is created. The width of both benders is chosen such that the moment that the second bender can exert on an object that is connected to it, enables the construction to drive an optical element to scanning vibratory rotary motion with a large angle at high frequencies.

Abstract: An electronics filter circuit includes an electromechanical resonator that is mounted directly to the surface of a silicon integrated circuit, rather than being a surface mounted or leaded filter can on a circuit board. This filter circuit allows the integrated circuit electronic package to be significantly smaller than a conventional electromechanical resonator package. The electromechanical resonator may be protected during processing and during use with a protective cover that is made of a material such as titanium. The protective cover is attached to the integrated circuit chip.

Abstract: Piezoelectric actuators are provided. In some instances, the piezoelectric actuators are high-precision piezoelectric actuators. The piezoelectric beams may have a bi-chevron configuration. Also provided are methods of making the piezoelectric actuators, e.g., using Micro-Electro-Mechanical System (MEMS) fabrication techniques, and methods of using the piezoelectric actuators, e.g., as valves in fluid dispensing systems.

Abstract: The present invention provides electroactive polymers, transducers and devices that maintain pre-strain in one or more portions of an electroactive polymer. Electroactive polymers described herein may include a pre-strained portion and a stiffened portion configured to maintain pre-strain in the pre-strained portion. One fabrication technique applies pre-strain to a partially cured electroactive polymer. The partially cured polymer is then further cured to stiffen and maintain the pre-strain. In another fabrication technique, a support layer is coupled to the polymer that maintains pre-strain in a portion of an electroactive polymer. Another embodiment of the invention cures a polymer precursor to maintain pre-strain in an electroactive polymer.

Abstract: A flexural vibration piece includes: a base portion; a vibrating arm extending from the base portion and having a first surface, a second surface opposing the first surface, and side surfaces connecting the first surface and second surface, wherein a laminated structure including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and second electrode, is formed on each of the first surface and second surface, the piezoelectric layer formed on the first surface side and the piezoelectric layer formed on the second surface side have mutually opposite polarization directions, and the first electrode formed on the first surface side and the first electrode formed on the second surface side are connected to each other.

Abstract: A piezoelectric actuator of the presently disclosed subject matter can include: a first actuator including a first piezoelectric driving part; and a second actuator including a second piezoelectric driving part. A central portion of the first actuator can be supported. The first actuator can be bent and deformed by applying a first driving voltage to the first piezoelectric driving part, so that both end portions of the first actuator can be displaced in a thickness direction of the first actuator. Both end portions of the second actuator can be coupled to the both end portions of the first actuator. The second actuator can be bent and deformed in the opposite direction to the first actuator by applying a second driving voltage to the second piezoelectric driving part, so that a central portion of the second actuator can be displaced in a thickness direction of the second actuator.

Abstract: A driving device capable of multidimensional positioning by the single device has a shaft-like driving member 4, an electromechanical transducer 3 which has a plurality of expandable portions 11, 12 and which holds one end of the driving member 4, the expandable portions being provided in parallel so that each of the expandable portions can separately expands and contracts in a axial direction of the driving member 4, and a movable member 5 which frictionally engages on the driving member 4 and which can displace slidingly on the driving member 4, and a drive circuit which applies to some of the expandable portions 11, 12 a low change rate of direct-current voltage component different from that applied to other expandable portions 11, 12, and which applies to all the expandable portions 11, 12 a common alternating voltage component fluctuating with a common period.

Abstract: Mechanical springs and sliders as used in microfabricated actuators to provide an asymmetric spring constant are described. The asymmetric spring constant provides a propensity for deflection towards one direction, and a propensity for separation (i.e. restoration) towards the other direction. The asymmetry and slider system provides a passive mechanical means to achieve faster switching times and higher switch restoring forces.

Abstract: A harmonic buckling actuator is comprised of numerous buckling units engaged to a rotational track/gear. Each buckling unit includes two input translational actuators. One end of each input actuator is constrained to rotate about a rotational joint that is rigidly attached to a common ground. The other end of each input actuator is constrained to move with the other actuator of the same buckling unit along a single output axis via another rotational joint that is the output of the buckling unit. The inactivated, unforced configuration of each buckling unit is such that the input actuators are nearly collinear with the line segment connecting the unit's grounded rotational joints. This line segment is parallel to the output axis of the track/gear. The buckling units are arrayed around the track/gear such that their outputs are spatially phased within the groves of the track/gear. Harmonic activation of the buckling units generates torque on the track/gear about its output axis.

Abstract: The present invention provides a low frequency acoustic transducer for non-destructive testing of a test structure. The transducer is arranged for conversion between electrical energy and acoustic energy associated with an acoustic wave propagating through a portion of the test structure. The transducer comprises a bending actuator for generating the acoustic wave by generating a vibration from an electrical signal or for generating an electrical signal from a vibration generated by the received acoustic wave. The bending actuator has a vibration surface and a contact area surrounded by a portion of the vibration surface. The transducer further comprises a mode setting member that has a rigid portion which is in direct mechanical contact with the bending actuator at the contact area such that, within the contact area, an amplitude of the vibration is substantially suppressed. The location and shape of the contact area determine a bending mode associated with a resonance frequency of the bending actuator.

Abstract: A detection sensor (10) includes: plural beam-like resonators (30A, 30B), a vibration characteristic of which changes according to adsorption or sticking of a substance having a mass and one end of each of which is fixed; a driving unit (40) that vibrates the resonators; and a detecting unit (40) that detects a change in the vibration in the resonators to detect the substance. The plural resonators have lengths different from one another. When the length of an arbitrary resonator is represented as L, a difference ?L between the length L and the length of the other resonators is set to satisfy the following condition: 2(?L/L)>1/Q (Q represents a Q factor of the resonators). The driving unit vibrates the respective plural resonators at frequencies corresponding to resonant frequencies of the resonators.

Abstract: A phased array ultrasound transducer is made from a plurality of independently excitable elements that are arranged in a row in the azimuthal direction, configured so that azimuthal aiming of an outgoing ultrasound beam is controlled by timing the excitation of the elements. The geometry of the elements is configured to focus the outgoing beam in the elevation direction so as to improve the images of target regions located at or about a particular radial distance. In some embodiments, this is accomplished by forming each element from a plurality of subelements that are stacked in the elevation direction, with the subelements of any given element all (a) wired together and (b) positioned at about the same distance from a substantially rod-shaped focal region.

Abstract: An ultrasonic piezoelectric transducer device includes a transducer array consisting of an array of vibrating elements, and a base to which the array of vibrating elements in the transducer array are attached. The base include integrated electrical interconnects for carrying driving signals and sensed signals between the vibrating elements and an external control circuit. The base can be an ASIC wafer that includes integrated circuitry for controlling the driving and processing the sensed signals. The interconnects and control circuits in the base fit substantially within an area below the array of multiple vibrating elements.

Abstract: A micro-electro-mechanical device including a substrate with a main surface, a piezoelectric actuator with a first side mechanically coupled to the substrate, an elastic member with a first end mechanically coupled to the substrate, and a transfer member mechanically coupling a second side of the piezoelectric actuator to the elastic member. The piezoelectric actuator is positioned lateral to an unfixed region of the elastic member. The method includes applying a voltage to a piezoelectric actuator altering the piezoelectric actuator's dimension vertical to the main surface of the substrate; and mechanically transferring the alteration to a coupling point of an elastic member.

Abstract: Mechanisms are described which receive and transfer forces via transducers having one or more persistent deformations in changeable locations. Actuator or propulsion embodiments are powered by elastic or variable length transducers that exert forces on the deformed members which in turn exert forces onto ambient fluid such as air or water. Generator embodiments receive forces from ambient moving fluid via deformed members which transfer those forces to elastic or variable length transducers which convert those forces into electrical energy.

Abstract: A robot and method of manufacturing the same are disclosed. Embodiments of the robot include robots with piezoelectric appendages and microrobots of very small sizes, for example, robots with appendage lengths equal to approximately 300 ?m. Further embodiments include a plurality of piezoelectric appendages, each appendage including a plurality of piezoelectric members coupled to one another at two locations, while other embodiments include appendages with piezoelectric members coupled to one another at three locations. Various embodiments are capable of jumping, walking upside down, carrying heavy loads, and/or walking with foreign object contamination in one or more appendages. Still further embodiments include energy storage members that store the energy generated by an appendage when the appendage is subject to external forces.

Abstract: The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror (1), the element being mechanically coupled to a frame (4) with a bendable coupling (2A), wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.

Abstract: A polymer actuator device includes an electrolyte layer, a pair of electrode layers that are provided on both surfaces of the electrolyte layer in a thickness direction of the electrolyte layer, a polymer actuator that is bent when a voltage is applied between the pair of electrode layers, and terminal parts that apply a voltage to the polymer actuator. The polymer actuator includes a deformable portion and a supported portion. A conductive porous member is interposed between a first electrode layer, which is positioned on the side of the supported portion of the polymer actuator corresponding to a negative electrode, and the terminal part.

Abstract: A piezoelectric device for generating a voltage, comprising a vibratory blade with a first end secured to a fixed substrate and a second, free end which can be moved by applying a mechanical pulse thereon. At least one separate piezoelectric element is provided on one side of blade in such a way that it is deformed by the oscillation of the blade following the application of said mechanical pulse, and thereby generates a voltage. The device is characterized in that the blade is generally U shaped and has two substantially planar arms joined together via a curved intermediate portion. A first arm is secured to the substrate and a second arm has the free end.

Abstract: A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

Abstract: A piezoelectric device for generating an electrical voltage, comprises a vibrating plate having a portion integral with a fixed support and at least one free end capable of moving under the effect of a mechanical pulse, and at least one piezoelectric element attached to one face of the plate so as to deform under the effect of the oscillations of the plate that result from said mechanical pulse, thus generating an electrical voltage. The plate has a U-shaped or V-shaped general configuration, possessing two substantially planar branches joined by a curved linking portion integral with the support.

Abstract: The present invention discloses a physical/biochemical sensor using a multisized piezoelectric microcantilever resonator array which enables to quantitatively and simultaneously analyze a mass loading effect and a surface stress change effect and a manufacturing method thereof. In the physical/biochemical sensor using the multisized piezoelectric microcantilever resonator array, a plurality of piezoelectric micro-cantilever resonators having different sizes is arrayed so as to quantitatively and discriminately analyze a surface stress change as well as a sensor surface mass change induced by an adsorbed sensing-target material occurring in a sensing process. Thus, the mass loading effect and the surface stress change effect can be quantitatively and simultaneously analyzed.

Abstract: Tunable vibration energy scavengers and methods of operating the same are disclosed. The disclosed energy scavengers comprise a beam with a main body, wherein the beam comprises at least one flap and means for changing a shape of the at least one flap, wherein the at least one flap is physically attached to the main body along a longitudinal side of the main body. The disclosed methods comprise tuning the shape of the at least one flap, thereby tuning the stiffness of the structure.

Abstract: A pump using a piezoelectric diaphragm is designed to allow the diaphragm to be supported appropriately and accurately and to facilitate assembly of housing members. The peripheral edge of a sheet metal of a unimorph diaphragm 40 on the side thereof facing a first housing member 14 is pressed and supported with the ridge of an annular projection 52 annularly provided along the peripheral edge of a vent chamber 38. The first to third housing members 14, 16 and 30 are stacked on one another, and the first and third housing members 14 and 30 are welded together by ultrasonic welding such that the first and second housing members 14 and 16 abut against each other at abutting portions 66 and 68 and the second and third housing members 16 and 30 abut against each other at abutting portions 70 and 72, thereby definitely determining the positional relationship between the housing members.

Abstract: A piezoelectric power generator that includes a piezoelectric laminate in which a plurality of rectangular-shaped piezoelectric elements each having electrodes formed on a substrate are connected at both ends thereof to each other, and in which a portion other than connection portions is capable of vibrating. In the piezoelectric laminate, a portion of the element at the uppermost layer is a fixed portion, and a weight is mounted to the element (free end) at the lowermost layer. Each piezoelectric element is decreased in rigidity from the element at the uppermost layer toward the element at the lowermost layer.

Abstract: Described is an electroactive elastomer actuator having at least one first band-shaped electroactive elastomer coating and at least one first and one second surface electrode, which are separated by the at least one first electroactive elastomer coating. At least one second electroactive elastomer coating is applied to a surface of the second surface electrode facing away from the electroactive elastomer coating, which forms a band-shaped coating material jointly with the first and second surface electrodes and the first elastomer coating located between the two surface electrodes. The band-shaped coating material is wound around a flat coil form while forming at least two coating material layers. A surface of the first surface electrode facing away from the first elastomer coating makes surface contact with the second electroactive elastomer coating.

Abstract: A MEMS vertical displacement device for vertically displacing and tilting a vertically displaceable platform. The vertically displaceable platform may be displaced using a plurality of recurve actuators configured to provide vertical displacement without horizontal movement. The vertically displaceable platform may be tilted about two axes to yield tilting that is advantageous in numerous applications. The recurve actuators may be thermal, piezoelectric or formed from other appropriate materials.

Abstract: In one aspect, the invention relates to a headset that includes an element that generates energy in response to forces. The headset includes at least one vibratable piezoelectric element; a first circuit element in electrical communication with the at least one vibratable piezoelectric element; and a signal processing element, the signal processing element disposed within the headset and at least partially energized by mechanical changes in the vibratable piezoelectric element.

Abstract: An actuator includes a first bending portion having a first electrode layer, a first electrolyte layer on a first surface of the first electrode layer, and a second electrode layer in contact with the first electrolyte layer; and a second bending portion having the first electrode layer, a second electrolyte layer on a second surface of the first electrode layer, the second surface facing the first surface, and a third electrode layer in contact with the second electrolyte layer, in which the first surface of the first electrode layer includes a region where the first electrolyte layer is not arranged, the second surface of the first electrode layer includes a region where the second electrolyte layer is not arranged, the first bending portion is adjacent to the second bending portion, and the bending direction of the first bending portion is opposite to the bending direction of the second bending portion.

Abstract: A switched mode power supply is provided. The switched mode power supply includes a transformer, which includes at least one primary winding connected to a DC voltage via a switching element and a secondary winding connected to a load via a rectifier circuit including at least one diode, and at least one piezoelectric fan which generates an air flow at the transformer and/or at the switching element and/or at the diode. The air flow produced can be guided in a targeted manner onto the components to be cooled, with the air flow remaining low and therefore, no contamination by air particles arises.

Abstract: In a piezoelectric electroacoustic transducing device which is to be incorporated in an electronic apparatus such as a portable telephone, and which is used as a sound source, the sound pressure of the low-frequency range is improved, the productivity is improved, and acoustic characteristics are stabilized. A piezoelectric electroacoustic transducing device 10 has: a frame 15; a piezoelectric vibrator 11 in which piezoelectric elements 12A, 12B are bonded to a metal plate 13; and a plate- and ring-like support member 14 which supports a peripheral portion of the piezoelectric vibrator 11 on the frame 15. A step 14C corresponding to the thickness of the metal plate 13 is disposed in the support member 14, and the metal plate 13 is adhered to the inside of the step 14C in an embedded manner.

Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.