Abstract: A method for fabricating a low frequency quartz resonator includes metalizing a top-side of a quartz wafer with a metal etch stop, depositing a first metal layer over the metal etch stop, patterning the first metal layer to form a top electrode, bonding the quartz wafer to a silicon handle, thinning the quartz wafer to a desired thickness, depositing on a bottom-side of the quartz wafer a hard etch mask, etching the quartz wafer to form a quartz area for the resonator and to form a via through the quartz wafer, removing the hard etch mask without removing the metal etch stop, forming on the bottom side of the quartz wafer a bottom electrode for the low frequency quartz resonator, depositing metal for a substrate bond pad onto a host substrate wafer, bonding the quartz resonator to the substrate bond pad, and removing the silicon handle.

Abstract: Methods and apparatus relating to use and/or provision of a rake piezo actuator are described. In one embodiment, a piezo patch may be coupled to a plurality of blades (e.g., to cause the blades to oscillate and provide air flow between fins of one or more heat sinks). Other embodiments are also described.

Abstract: A method for generating electrical energy from a first motion having a low and/or variable frequency is provided. The method including: transferring the first motion to a first device; and intermittently transferring the first motion from the first device to a second device operating at a frequency which is higher and/or more constant that the first motion.

Abstract: An actuator includes a base, an arm having an elastic property and supported by the base, electrostatic-driving electrodes provided on the base and the arm, respectively, and a piezoelectric-driving layer. The piezoelectric-driving layer includes a first electrode layer on the arm, a piezoelectric layer on the first electrode layer, and a second electrode layer on the piezoelectric layer. This actuator can be driven quickly with a low voltage.

Abstract: It is made possible to provide a piezoelectric driven MEMS device having the distance between the action end and the fixed electrode which is kept constant regardless of whether the residual strain is large or small and having a mechanism which is excellent in reproducibility and reliability. Two piezoelectric driven actuators each having a folded beam structure are disposed in parallel and in a line-symmetric manner, and connected to each other in the vicinity of an action end.

Abstract: Embodiments include strain sensor devices for detecting movement, morphological changes or other physical parameters within a patient's body tissue. Some embodiments are directed specifically to measuring parameters within a patient's heart and may also be configured to communicate with an implantable stimulation device and associated external programming device.

Abstract: A MEMS vertical displacement device for vertically displacing and tilting a vertically displaceable platform. The vertically displaceable platform may be displaced using a plurality of recurve actuators configured to provide vertical displacement without horizontal movement. The vertically displaceable platform may be tilted about two axes to yield tilting that is advantageous in numerous applications. The recurve actuators may be thermal, piezoelectric or formed from other appropriate materials.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: A piezoelectric actuator includes a first piezoelectric layer, a second piezoelectric layer stacked on the first piezoelectric layer, a first electrode arranged on the first piezoelectric layer, a second electrode arranged between the first and second piezoelectric layers, and a third electrode arranged on the second piezoelectric layer. A portion of the third electrode faces the second electrode, and another portion of the third electrode faces the first electrode. The first electrode does not face at least a portion of the second electrode. A portion, of the second piezoelectric layer, sandwiched between the second electrode and the third electrode is polarized in a first direction in a thickness direction thereof, and portions, of the first and the second piezoelectric layers, which are sandwiched between the first electrode and the third electrode and between which the second electrode is not arranged, are polarized in a direction opposite to the first direction.

Abstract: A suspended film bulk acoustic micro-resonator that includes a beam made of a piezoelectric material fixed to a support and sandwiched between excitation electrodes. The resonator also includes a mechanism modifying limiting conditions of the resonator composed of the excited beam to modify the micro-resonator resonant frequency.

Abstract: A drug delivery pump which uses a piezoelectric drive system to advance a small syringe piston to deliver a liquid drug and a method thereof are disclosed. The present invention has a cost and size advantage compared to traditional pumps and is a very compact and potentially disposable pump device design.

Abstract: An energy conversion apparatus having a pair of flexible beams that are supported at first ends thereof from a base. The beams each include at least one piezoelectric material layer. Second ends of each of the beams are operatively coupled to rigid links. The rigid links are in turn operatively coupled to a working element that may form, in one application, a drive member for a motor, or in a second application form a valve element for an electronic fuel injection system, or in a third application form a piston for a fluid pump. The working element is free to move linearly in a path generally parallel to the longitudinal axes of the flexible beams. As electrical signals are applied to and removed from the piezoelectric material layer(s) of each flexible beam, the beams flex repeatedly and uniformly over their full lengths. This causes a linear movement of the working element that can be used to help form a rotational motor output or a linearly moving fluid control element.

Abstract: A piezoelectric transducer is described that is configured for use within a path length control apparatus of an optical device. The transducer comprises at least one void formed within a central region of the piezoelectric transducer, the one void or alternatively, the multiple voids, utilized at least in part to limit a curvature induced into a mirror during operation of the piezoelectric transducer.

Abstract: There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.

Abstract: An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.

Abstract: Because of the natural ability to reject clock jitter, the SRC circuits include an internal oscillator to provide an operating clock signal. The internal oscillator can be operated independently of any external frequency control signal, including input and output frame clocks. The internal oscillator can be implemented as a relatively low-cost fixed frequency oscillator. The use of a relatively low precision, inexpensive internal oscillator in an SRC circuit reduces the overall cost of SRC circuits while providing acceptable performance. Accordingly, reducing costs of SRC circuits also has a positive cost/benefit affect on the digital signal processing systems that use SRC circuits.

Abstract: A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operating end, and a second piezoelectric actuator connected to the first piezoelectric actuator via a connecting part at the first operating end of the first piezoelectric actuator, and extending from the connecting part to a second operating end, the second piezoelectric actuator being shorter than the first piezoelectric actuator.

Abstract: A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.

Abstract: A piezoelectric/electrostrictive device is provided including a substrate section and an operation section disposed on the substrate section. The operation section includes a piezoelectric/electrostrictive film and an electrode film, and the device operates by displacement of the operation section. The piezoelectric/electrostrictive films and electrode films are alternately laminated so that uppermost and lowermost layers form the electrode films. The operation section and the substrate section are integrally fired, and the substrate section is ceramic material containing a titanium element.

Abstract: Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.

Abstract: Piezoelectric elements for power generation and/or actuation are described. An aspect is directed to generators utilizing piezoelectric elements for electrical power generation. Such a generator can use one or more arrays of piezoelectric cantilevers for electrical power generation in conjunction with modulated air pressure used for exciting the cantilevers. The pressure level/modulation and cantilever area can be controlled variables for maximizing the bending, and hence energy generation, of the cantilevers. A further aspect is directed to hydraulic fluid actuators utilizing a pumping mechanism that includes a piezoelectric element. The linear actuators can advantageously utilize the high force and high frequency characteristics of a piezoelectric membrane in conjunction with a large stroke and actuation direction conversion afforded by hydraulic transmission.

Abstract: An actuator according to the present invention includes: a base 1; a movable section 7 capable of displacement relative to the base 1; elastic supporting members 13a to 13c for supporting the movable section 7 so as to allow the movable section 7 to make a displacement relative to the base 1; and a plurality of driving sections 6a to 6c for causing the movable section 7 to be displaced relative to the base 1. The plurality of driving sections 6a to 6c respectively include driving force transmitting sections 10a to 10c which come in contact with the movable section when transmitting driving force to the movable section 7.

Abstract: A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.

Abstract: An actuator, comprising at least one beam capable of generating flexural oscillations, at least one pair of electric supply terminals (23, 24) which supply oscillation-inducing electric power to the beam(s), and a holding mechanism which holds the beam(s), the holding mechanism including at least one holding member (12) to hold one portion of the beam(s) and a case (13) jointed to the holding member and configured to contain the beam(s) therein.

Abstract: A piezoelectric fan includes a piezoelectric actuator patch (110, 210, 310) and a blade (120, 220, 320) attached to the piezoelectric actuator patch. The blade has a hole (121, 127, 221) in it, and a door (122, 128, 222) is adjacent to the hole and attached to the blade (as with a hinge (123, 129, 223)) such that the door is capable of opening and closing.

Abstract: An underwater acoustic projector comprising one or more cylindrical shell segments (8), each shell segment (8) having an even number of drivers (10) mounted therein, and the method of manufacturing said projector. The shell segments (8) preferably are formed with a longitudinal slot (14) and have arcuate segments (16), preferably of a dielectric material extending along the sides of the slot (14) for retaining the drivers (10) within the shell segments (8). The combined lengths of the driver is between 70% and 90% of the shell segment (8) length.

Abstract: A piezoelectric/electrostrictive device is provided, including a rotor substantially in the form of a rectangular parallelepiped. The rotor has a pair of opposed surfaces, a first movable section fixed to a first end of one of the surfaces, a first piezoelectric/electrostrictive element for actuating the first movable section, and a second movable section fixed to a second end of the other one of the surfaces. The second end is diametrically opposed to the first end. A second piezoelectric/electrostrictive element for actuating the second movable section is also included.

Abstract: There is provided a bimorph element including a silicon oxide layer, a high expansion coefficient layer that is formed on the silicon oxide layer and has a thermal expansion coefficient higher than a thermal expansion coefficient of the silicon oxide layer, and a deformation preventing film that covers a surface of the silicon oxide layer and prevents the silicon oxide layer from being deformed over time. The deformation preventing film has a transmission factor of moisture and oxygen lower than that of the silicon oxide layer. The deformation preventing film is a silicon oxide film that is formed with energy higher than that used in a case that forms the silicon oxide layer. The deformation preventing film is a silicon nitride film or a metallic film.

Abstract: Electroactive polymer transducers for sensory feedback applications are disclosed.

Abstract: In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.

Abstract: A method provides tactile feedback emulating a click like feedback provided by one or more low cost, thin piezoelectric devices (142) to an input device (110) of an electronic device (100), the piezoelectric devices (142) being driven by two or more low voltage pulses (804, 806) within the temporal acuity of human touch.

Abstract: An object of the present invention is to provide a thin and light-weight actuator module structure comprising a multi-layer structure such as a bimorph or unimorph structure that can be formed in an arbitrary shape and deformed in an arbitrary direction, which is high in safety and durability and can be easily fabricated, as well as a method of manufacturing the same. An actuator has a structure such that a striped internal stress distribution is induced within a plane of a bending type actuator of a laminate structure, thereby allowing the actuator to bend so as to constitute a part of a cylindrical shape whose central axis is parallel to the striped direction.

Abstract: A liquid transporting apparatus includes individual electrodes 32, wirings 35 having contact points 35a respectively, FPC 40 having terminals 42a, a cavity plate 10, and individual cooling passages 47 formed in the cavity plate 10. Each of the individual cooling passages 47 is formed at a position which is between one of the individual electrodes 32 and one of the contact points 35a and which faces one of the wirings 35. When the FPC 40 and the wirings 35 are joined, a conductive material 45 between the terminals 42a of the FPC 40 and the contact points 35a of the wirings 35 are melted while a cooling liquid 60 is being flowed in the individual cooling passages 47, thereby cooling the molten conductive material 45. Thus, it is possible to suppress the flowing of conductive material 45 from the contact points 35a to their surroundings.

Abstract: An object of the present invention is to provide a thin and light-weight actuator module structure comprising a multi-layer structure such as a bimorph or unimorph structure that can be formed in an arbitrary shape and deformed in an arbitrary direction, which is high in safety and durability and can be easily fabricated, as well as a method of manufacturing the same. An actuator has a structure such that a striped internal stress distribution is induced within a plane of a bending type actuator of a laminate structure, thereby allowing the actuator to bend so as to constitute a part of a cylindrical shape whose central axis is parallel to the striped direction.

Abstract: A hybrid piezoelectric energy harvesting transducer system includes: (a) first and second symmetric, pre-curved piezoelectric elements mounted separately on a frame so that their concave major surfaces are positioned opposite to each other; and (b) a linear piezoelectric element mounted separately on the frame and positioned between the pre-curved piezoelectric elements. The pre-curved piezoelectric elements and the linear piezoelectric element are spaced from one another and communicate with energy harvesting circuitry having contact points on the frame. The hybrid piezoelectric energy harvesting transducer system has a higher electromechanical energy conversion efficiency than any known piezoelectric transducer.

Abstract: A semiconductor device includes beam portions and piezoelectric portions. Each of the beam portions is formed to extend in a first direction with one end fixed at a substrate by use of a supporting member and warped by residual stress with the supporting member set as a starting point. Each of the piezoelectric portions is connected to the other end of the corresponding beam portion and formed to extend in a second direction intersecting with the first direction and moves parallel to the substrate in a first direction and in a direction opposite to the first direction by application of bias voltage.

Abstract: Disclosed herein is a diffractive thin-film piezoelectric light modulator, in which a lower protective layer is formed on a lower support to prevent the lower support from being over-etched when etching, thus increasing the surface smoothness of the lower support and of a micro-mirror. In addition, a method of fabricating the diffractive thin-film piezoelectric light modulator is also provided.

Abstract: This invention expands functions possible with electric equipment using charge contorting Piezo technology. We replace engines and motors with Piezo units. These power electric vehicles using nudging by Piezo strips to turn shafts or axles holding propellers or wheels. Ranges of speeds these electric air, land, and sea vehicles can go match that of gas-powered vehicles. The fuel is electrons, which are stored in circuits of rechargeable batteries laminated into their bodies and interior structure. Piezos nudge either radiating spokes or bars on squirrel cage attached to the shaft or axle rotating them at a range of speed in both directions and stopping that rotation. Steerage is achieved with Piezo trim tabs that, when charged, move the control surfaces as rudders in planes and ships, and elevators and ailerons in planes. These tabs with positive power applied change their position in one direction, and with negative power, in the other direction. Releasing gas into a section of a vehicle increases buoyancy.

Abstract: The present invention relates to mechanical-electrical power conversion systems. The systems comprise one or more electroactive polymers that convert between electrical and mechanical energy. When a voltage is applied to electrodes contacting an electroactive polymer, the polymer deflects. This deflection may be converted into rotation of a power shaft included in a motor. Repeated deflection of the polymer may then produce continuous rotation of the power shaft.

Abstract: Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element.

Abstract: An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.

Abstract: There is disclosed a piezoelectric/electrostrictive porcelain composition capable of manufacturing, at a comparatively low sintering temperature, a piezoelectric/electrostrictive body which is dense and superior in crystallinity and which has satisfactory piezoelectric/electrostrictive characteristics so that deviation of the composition is not easily generated. The piezoelectric/electrostrictive porcelain composition contains as a major component a piezoelectric/electrostrictive porcelain composition component including a PbMg1/3Nb2/3O3—PbZrO3—PbTiO3 ternary solid solution system composition and NiO or including a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary solid solution system composition, and further contains lead germanate.

Abstract: A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.

Abstract: A mechanism for capturing mechanical energy and converting it to electrical energy for use continually charging or providing emergency power to mobile, battery-powered devices comprises a plurality of elongated piezoelectric elements mounted at one or support points to one or more support structures. The plurality of piezoelectric elements are preferably structured and arranged so that at least each three-dimensional coordinate axis has at least one element with a dominant mode of deflection in a plane normal to the axis, in order to permit harvesting energy from forces applied in any direction without regard to the orientation of the energy harvesting mechanism to the source of forces. This results in improved coupling of the transducer with the random movements or vibrations that may not confined to any particular plane or in a plane that is not necessarily aligned with the plane in which a piezoelectric element is designed to bend, thus improving the efficiency of energy capture.

Abstract: To provide a piezoelectric actuator that is small in size, large in displacement, high in rigidity, excellent in controllability, and excellent in stability, the present invention provides a piezoelectric actuator, including: a first piezoelectric member that is bent and displaced in a thickness direction; and a second piezoelectric member that is bent and displaced in a direction opposite to the first piezoelectric member. In the piezoelectric actuator, the first piezoelectric member and the second piezoelectric member are stacked on each other in the thickness direction of the first piezoelectric member and the second piezoelectric member, and the center portion in the longitudinal direction of the first piezoelectric member and the center portion in the longitudinal direction of the second piezoelectric member, or both ends of the first piezoelectric member and both ends of the second piezoelectric member are fixed to each other.

Abstract: A peristaltic pump for conveying a fluid comprises a flexible tube having an outer surface and a lumen for carrying the fluid such as a therapeutic agent. The tube has a length defined by opposed ends of the tube, the outer surface of the body carrying a plurality of longitudinally spaced-apart electroactive polymer actuators. The plurality of actuators are adapted to be responsive to electrical signals for energizing the actuators sequentially along the length of the tube to move a lumen pinch-off along the length of the tube to thereby convey the fluid from one end of the tube to the other end by means of a peristaltic pumping action. The peristaltic pump may be incorporated into a medical lead, such as an endocardial pacing lead, carrying at least one electrode.

Abstract: A hybrid electromechanical actuator has two different types of electromechanical elements, one that expands in a transverse direction when electric power is applied thereto and one that contracts in a transverse direction when electric power is applied thereto. The two electromechanical elements are (i) disposed in relation to one another such that the transverse directions thereof are parallel to one another, and (ii) mechanically coupled to one another at least at two opposing edges thereof. Electric power is applied simultaneously to the elements.

Abstract: An energy harvesting apparatus and method. In one form the apparatus makes use of a pair of flexible beams that are supported at first ends thereof from a base. Second ends of each of the beams are operatively coupled to rigid links. The rigid links are in turn operatively coupled to a mass component that is free to move linearly in a path generally parallel to the longitudinal axes of the flexible beams. Movement of the mass component in response to vibration forces causes a twisting moment to be applied at the second end of each flexible beam. This causes a uniform flexing of each of the flexible beams. A piezoceramic material layer on each beam generates electrical signals in response to the flexing motion of the beam.

Abstract: Microelectromechanical systems with structures having piezoelectric actuators are described. The structures each have a body that supports piezoelectric islands. The piezoelectric islands have a first surface and a second opposite surface. The piezoelectric islands can be formed, in part, by forming cuts into a thick layer of piezoelectric material, attaching the cut piezoelectric layer to a body having etched features and grinding the piezoelectric layer to a thickness that is less than the depths of the cuts. Conductive material can be formed on the piezoelectric layer to form electrodes.

Abstract: A piezoelectric/electrostrictive device includes a base 11 having a pair of movable parts 11a, 11b opposing each other and a connecting part 11c that connects movable parts 11a, 11b with each other at one end thereof as well as piezoelectric/electrostrictive elements 12a, 12b disposed on the side surfaces of movable parts 11a, 11b of base 11. The piezoelectric/electrostrictive device is constructed in a simple structure with fewer components. Base 11 is integrally formed in an open-box shape or in a horseshoe shape by bending one sheet of band-shaped flat plate. Movable parts 11a, 11b extend for a predetermined length from respective ends of connecting part 11c to the other ends. The other ends of movable parts 11a, 11b constitute a mounting site for mounting a component to be controlled or a component to be tested.