Multilayer Patents (Class 310/364)
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Publication number: 20150077476Abstract: There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.Type: ApplicationFiled: November 18, 2014Publication date: March 19, 2015Inventors: Toshihiro SHIMIZU, Hiroshi ITO, Jiro KATO, Eiju HIRAI
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Patent number: 8970095Abstract: In a piezoelectric actuator including a substrate, an insulating layer formed on the substrate, an adhesive layer formed on the insulating layer, a Pt lower electrode layer formed on the adhesive layer, and a PZT piezoelectric layer formed on the Pt lower electrode layer, the adhesive layer is made of TiOx having a composition x which is graded so that the composition x on the side of thio insulating layer is larger than the composition x on the side of the Pt lower electrode layer.Type: GrantFiled: February 17, 2012Date of Patent: March 3, 2015Assignee: Stanley Electric Co., Ltd.Inventor: Susumu Nakamura
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Patent number: 8970094Abstract: A piezoelectric ceramic material has the general formula: P1-c-dDcZd(PbO)w where: 0<c?0.025; 0?d?0.05; 0?w?0.05; where P stands for a compound having the formula [Pb1-vAgIv][(Zr1-yTiy)1-uCuIIu]O3, where 0.50?1?y?0.60; 0<u?0.0495; 0?v?0.02, and D stands for a component of the general formula [(M1O)1-p(M2O)p]a[Nb2O5]1-a, where M1 stands for Ba1-tSrt, where 0?t?1, M2 stands for Sr and/or Ca, and 0<p<1 and ?<a<1 and Z stands for a compound of the general formula: Pb(L1Rr)O3 where L is present in the oxidation state II or III, and R is present in the oxidation state VI or V, and: LII is selected from among Fe, Mg, Co, Ni and Cu in combination with RVI=W, where 1=½ and r=½, or LIII is selected from among Fe, Cr and Ga in combination with RV=Nb, Ta or Sb, where 1=½ and r=½, or LIII is selected from among Fe, Cr and Ga in combination with RVI=W, where 1=? and r=?.Type: GrantFiled: December 15, 2010Date of Patent: March 3, 2015Assignee: EPCOS AGInventors: Michael Schossmann, Adalbert Feltz
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Publication number: 20150054388Abstract: A ceramic electronic component includes an electronic component body and first and second metal terminals. The electronic component body includes a bare ceramic body and first and second outer electrodes. The first and second outer electrodes of the electronic component body are connected respectively to the first and second metal terminals by solders containing Sn as a main constituent. An alloy layer containing Ni—Sn is provided in at least a portion of a bonding interface between adjacent two of the first and second metal terminals and the first and second outer electrodes.Type: ApplicationFiled: August 7, 2014Publication date: February 26, 2015Inventors: Yoji ITAGAKI, Nobumichi KIMURA, Tomoaki MATSUDA
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Patent number: 8956486Abstract: In a manufacturing method for a monolithic ceramic electronic component, a plurality of green chips arrayed in row and column directions which are obtained after cutting a mother block are spaced apart from each other and then tumbled, thereby uniformly making the side surface of each of the green chips an open surface. Thereafter, an adhesive is applied to the side surface. Then, by placing a side surface ceramic green sheet on an affixation elastic body, and pressing the side surface of the green chips against the side surface ceramic green sheet, the side surface ceramic green sheet is punched and stuck to the side surface.Type: GrantFiled: August 29, 2013Date of Patent: February 17, 2015Assignee: Murata Manufacturing Co., Ltd.Inventors: Togo Matsui, Minoru Dooka, Hiroyoshi Takashima, Kenichi Okajima
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Patent number: 8957565Abstract: An acoustic wave device includes a first electrode film arranged on a top surface of a piezoelectric substrate and defining electrodes including IDT electrodes and a second electrode film arranged to extend from the top surface of the piezoelectric substrate to a portion of a top surface of the first electrode film. The second electrode film defines electrodes including a wiring electrode 9 and pad electrodes and is made of a layered metal film including a plurality of metal films deposited in layers. The lowermost layer of the second electrode film is made of a metal selected from the group consisting of aluminum-copper alloy, nickel-chromium alloy, aluminum-silicon alloy, aluminum-titanium alloy, titanium, and copper, and the lowermost layer of the second electrode film is arranged to extend to a side surface of the second electrode film.Type: GrantFiled: April 26, 2013Date of Patent: February 17, 2015Assignee: Murata Manufacturing Co., Ltd.Inventor: Motoji Tsuda
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Patent number: 8957566Abstract: A power generation unit includes a first piezoelectric device having a pair of electrodes, a second piezoelectric device stacked on the first piezoelectric device, a switch electrically connected between the pair of electrodes, a current detection section adapted to detect a current generated in the second piezoelectric device, and a control section adapted to control the switch, and the control section electrically connects the switch for a predetermined period in at least either one of a case in which the current detected by the current detection section reaches a level one of equal to and higher than a first reference value or a case in which the current reaches a level one of equal to and lower than a second reference value.Type: GrantFiled: October 2, 2012Date of Patent: February 17, 2015Assignee: Seiko Epson CorporationInventors: Kunio Tabata, Atsushi Oshima, Hiroyuki Yoshino, Noritaka Ide, Yasuhiro Ono, Atsuya Hirabayashi
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Publication number: 20150042212Abstract: A method can be used for producing a fully active stack. A stack has the sides A, B, C and D running along the stacking direction. The method includes combining and temporarily making contact with the internal electrodes that make contact with the respective side on one of the sides B or D, such that the internal electrodes that make contact with the respective side can be electrically driven selectively. The electrically driven internal electrodes are electrochemically coated on the sides A and C. The stack is singulated to form a fully active stack with the electrochemically coated internal electrodes on the sides A? and C?. A method for producing a multilayer component comprising the fully active stack and a fully active multilayer component producible according to the method are furthermore proposed.Type: ApplicationFiled: February 5, 2013Publication date: February 12, 2015Inventors: Dieter Somitsch, Franz Rinner
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Patent number: 8946975Abstract: A piezoelectric vibrating piece includes an excitation unit in a rectangular shape, a framing portion, and a connecting portion. The excitation unit includes two principal surfaces, a pair of excitation electrodes on the principal surfaces, a first side extending in a first direction, and a second side extending in a second direction. The second side is longer than the first side, and is perpendicular to the first direction. The framing portion surrounds the excitation unit. The connecting portion connects the excitation unit to the framing portion. The connecting portion has a third side which is connected to the first side and extends in the first direction and a fourth side which is connected to the framing portion and extends in the first direction. A thickness of the connecting portion is thinner than that of the framing portion. The third side has a different length from that of the fourth side.Type: GrantFiled: October 28, 2012Date of Patent: February 3, 2015Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Takumi Ariji, Takehiro Takahashi
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Patent number: 8946971Abstract: The present invention provides an actuator which uses a cationically conductive polymer electrolyte and shows a large deformation response. The actuator has a pair of opposing electrodes and an intermediate layer arranged between the pair of the electrodes, which actuator being curved and displaced when voltage is applied to the electrodes, wherein the intermediate layer has at least: the cationically conductive polymer electrolyte having an ether bond site and an anion site in its molecule; and a weakly acidic material which interacts with the ether bond site.Type: GrantFiled: December 6, 2011Date of Patent: February 3, 2015Assignee: Canon Kabushiki KaishaInventors: Tetsuo Hino, Jun Yamamoto
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Publication number: 20150028725Abstract: An ultrasonic transducer includes a stack of flat electrodes between which are interposed ceramic wafers of substantially same surface area as the electrodes, stacked contours of the ceramic wafers and electrode wafers defining substantially flat or cylindrical side faces of the stack. A method of manufacturing the transducer includes: alternatively stacking a ceramic wafer and an electrode wafer, placing between each ceramic wafer and its two neighbouring electrodes a composition of which at least 75% by weight, or at least 80% by weight, that includes silver nanoparticles having a grain size of smaller than or equal to 80 nanometres, or smaller than or equal to 60 nanometres; and compressing the stack by heating to a temperature of less than or equal to 280° C., or between 200° C. and 250° C.Type: ApplicationFiled: June 21, 2012Publication date: January 29, 2015Applicant: RENAULT s.a.s.Inventors: Laurent Levin, Gustavo Greca
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Publication number: 20140375174Abstract: Textured PMN-PZT fabricated by templated grain growth (TGG) method has a piezoelectric coefficient (d) of 3 to 5 times that of its random counterpart. By combining this TGG method with low-temperature co-firing ceramics (LTCC) techniques, co-fired multilayer textured piezoelectric ceramic materials with inner electrodes were produced at a temperature as low as 925° C., which silver could be used. Trilayer PMN-PZT ceramics prepared by this method show a strain increase of 2.5 times, a driving voltage decrease of 3 times, and an equivalent piezoelectric coefficient (d*) improvement of 10 to 15 times that of conventional random ceramic counterparts. Further, a co-fired magnetostrictive/piezoelectric/magnetostrictive laminate structure with silver inner electrode was also synthesized. The integration of textured piezoelectric microstructure with the cost-effective low-temperature co-fired layered structure achieves strong magnetoelectric coupling.Type: ApplicationFiled: February 1, 2013Publication date: December 25, 2014Applicant: VIRGINIA TECH INTELLECTUAL PROPERTIES, INC.Inventors: Yongke Yan, Shashank Priya
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Publication number: 20140368091Abstract: There is provided a piezoelectric device, including: a multilayered body in which a piezoelectric layer having a first internal electrode formed thereon and a piezoelectric layer having a second internal electrode formed thereon are alternately formed; a first insulating via formed in the first internal electrode layer; a second insulating via formed in the second internal electrode layer; a first conductive via formed in the multilayered body and penetrating through the first insulating via; and a second conductive via formed in the multilayered body and penetrating through the second insulating via, wherein a diameter of the first insulating via is larger than a diameter of the first conductive via, and a diameter of the second insulating via is larger than a diameter of the second conductive via.Type: ApplicationFiled: September 17, 2013Publication date: December 18, 2014Applicant: SAMSUNG ELECTRO-MECHANICS, CO., LTD.Inventors: Boum Seock KIM, Jung Wook SEO
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Patent number: 8884499Abstract: A piezoelectric element includes a substrate, a lower electrode layer, a piezoelectric layer, and an upper electrode layer. The lower electrode layer is fixed to the substrate and the piezoelectric layer is formed on the lower electrode layer. The upper electrode layer is formed on piezoelectric layer. The lower electrode layer contains pores therein and has a larger thermal expansion coefficient than the piezoelectric layer.Type: GrantFiled: August 6, 2012Date of Patent: November 11, 2014Assignee: Panasonic CorporationInventors: Toshinari Noda, Takashi Kubo, Hisao Suzuki, Naoki Wakiya, Naonori Sakamoto
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Publication number: 20140292156Abstract: A piezoelectric/electrostrictive element includes a substrate, an adhesive layer, a first conductive layer, an anchor portion and a second conductive layer. The substrate contains a ceramic as a main component. The substrate has a main surface. The adhesive layer is formed on the main surface of the substrate. The adhesive layer contains a metal oxide as a main component. The first conductive layer is formed on the adhesive layer. The anchor portion is formed on the adhesive layer. The anchor portion is embedded in the conductive layer. The anchor portion contains glass as a main component. The second conductive layer is disposed opposite to the first conductive layer with the substrate located in-between.Type: ApplicationFiled: March 25, 2014Publication date: October 2, 2014Applicant: NGK Insulators, Ltd.Inventor: Toshikatsu KASHIWAYA
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Publication number: 20140292948Abstract: A liquid ejecting head includes a piezoelectric element including a first electrode, a second electrode, and a piezoelectric layer between the first and the second electrodes. The piezoelectric layer includes a buffer layer disposed on the first electrode and containing Bi and an element selected from Al, Si, Cr, and Mn and a complex oxide layer disposed on the buffer layer and having a perovskite structure containing Bi, Fe, Ba, and Ti.Type: ApplicationFiled: March 6, 2014Publication date: October 2, 2014Applicant: Seiko Epson CorporationInventor: Tomohiro Sakai
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Patent number: 8847471Abstract: A piezoelectric element includes a first electrode, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, and a covering layer covering the side surfaces of the first and second multilayer composites and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first and second multilayer composites each include a piezoelectric layer and a second electrode over the piezoelectric layer. The first electrode contains a metal that can react with chlorine, and has at least one of a bump and a dip at the surface thereof between the first multilayer composite and the second multilayer composite.Type: GrantFiled: September 7, 2011Date of Patent: September 30, 2014Assignee: Seiko Epson CorporationInventor: Hideki Hahiro
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Publication number: 20140265729Abstract: The present invention provides a piezoelectric material which has excellent insulating and piezoelectric properties and which contains no lead and potassium and also provides a piezoelectric element and a multilayered piezoelectric element each using the above piezoelectric material. The piezoelectric material is a perovskite-type metal oxide represented by the following general formula (1). (1?x){(NayBa1-z)(NbzTi1-z)O3}-xBiFeO3??(1) In the formula, 0<x?0.015, 0.80?y?0.95, 0.85?z?0.95 are satisfied. The piezoelectric element includes the above piezoelectric material and a pair of electrodes each provided in contact therewith. The multilayered piezoelectric element includes piezoelectric material layers formed of the above piezoelectric material and electrodes containing at least one internal electrode so as to be alternately laminated with each other.Type: ApplicationFiled: October 22, 2012Publication date: September 18, 2014Inventors: Shunsuke Murakami, Takayuki Watanabe, Makoto Kubbota
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Patent number: 8823244Abstract: A monolithic multilayer actuator made of a sintered stack of thin films of piezoceramio with embedded metallic internal electrodes. All metallic internal electrodes of one polarity are electrically connected in parallel by way of a base metallization applied to the stack and wherein an external electrode is connected in an electrically conducting manner to the base metallization for electrical contacting purposes. In order to provide that the external electrode can be applied to the base metallization using simple and cost-effective means so that said electrode is expandable such that it dissipates the cracks arising from cracking energy in the actuator without the external electrode disconnecting in the process that are sintered together, the layer being applied onto the base metallization.Type: GrantFiled: November 19, 2009Date of Patent: September 2, 2014Assignee: CeramTec GmbHInventor: Reiner Bindig
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Publication number: 20140184022Abstract: A piezoelectric film having a porosity between 20 and 40%, a thickness ranging from tens of microns to less than a few millimeters can be used to form an ultrasonic transducer UT for operation in elevated temperature ranges, that emit pulses having a high bandwidth. Such piezoelectric films exhibit greater flexibility allowing for conformation of the UT to a surface, and obviate the need for couplings or backings.Type: ApplicationFiled: August 24, 2011Publication date: July 3, 2014Applicant: NATIONAL RESEARCH COUNCIL OF CANADAInventors: Makiko Kobayashi, Cheng-Kuei Jen
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Patent number: 8756777Abstract: A method of manufacturing a ladder filter including first and second resonators includes: forming a piezoelectric film on an entire surface of a substrate that has respective lower electrodes of the first and second resonator formed thereon, an conductive film on the piezoelectric film, and a second film on the conductive film; forming a pattern of the second film in a prescribed region in the second area; forming a first film on an entire surface of the substrate; etching the first film, forming a pattern of the first film, the second film and the conductive film in the second area, and forming a pattern of the first film and the conductive film in the first area, to form respective upper electrodes from the conductor film; and thereafter, etching the piezoelectric film to form respective patterns of the piezoelectric film in the first and second areas, respectively.Type: GrantFiled: December 28, 2009Date of Patent: June 24, 2014Assignee: Taiyo Yuden Co., Ltd.Inventors: Shinji Taniguchi, Tokihiro Nishihara, Tsuyoshi Yokoyama, Masafumi Iwaki, Go Endo, Yasuyuki Saitou, Hisanori Ehara, Masanori Ueda
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Publication number: 20140167568Abstract: In object to provide a unit of piezoelectric element having a preferable bending strength and preferably used as a part of a driving unit, a unit of piezoelectric element comprising: a multilayer piezoelectric element, having internal electrodes laminated having a piezoelectric body layer in-between and a pair of external electrodes formed on side surfaces extending along laminating direction and electrically connected to the internal electrodes, a wiring part connected to the external electrodes via a solder part, wherein a solder is solidified, a resin part, joining one end surface in the laminating direction of the multilayer piezoelectric element and a mounting surface of a connection member placed to face the one end surface, wherein the resin part is continuous from the one end surface and the mounting surface to the solder part; and the resin part covers the solder part, is provided.Type: ApplicationFiled: August 30, 2013Publication date: June 19, 2014Inventors: Satoshi OZAWA, Shuto Ono, Akio Abe, Kohsuke Shimazaki
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Patent number: 8742651Abstract: Exemplary piezoelectric vibrating pieces have an excitation electrode and an extraction electrode having uniform thickness in the vibrating region to prevent unnecessary vibrations and degradation of vibration characteristics. An exemplary piezoelectric vibrating piece includes a vibrating portion having an excitation electrode of a first thickness (d1), an outer frame surrounding the vibrating portion with a gap therebetween, a joining portion connecting the vibrating portion and the outer frame, and an extraction electrode connected to the excitation electrode and extending on the vibrating portion, joining portion, and outer frame. The extraction electrode has the first thickness d1 throughout the vibrating portion and a second thickness (d2>d1) on the outer frame.Type: GrantFiled: April 24, 2012Date of Patent: June 3, 2014Assignee: Nihon Dempa Kogyo Co., Ltd.Inventor: Shuichi Mizusawa
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Patent number: 8733905Abstract: A piezoelectric device includes a substrate; and a laminated film formed above the substrate. The laminated film includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in this order, and the lower electrode layer is a metal electrode layer containing as one or more main components one or more nonnoble metals and/or one or more nonnoble alloys. Preferably, the one or more main components are one or more of the metals Cr, W, Ti, Al, Fe, Mo, In, Sn, Ni, Cu, Co, and Ta, and alloys of the metals.Type: GrantFiled: January 10, 2012Date of Patent: May 27, 2014Assignee: FUJIFILM CorporationInventors: Takamichi Fujii, Takayuki Naono, Yoshikazu Hishinuma
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Publication number: 20140139075Abstract: A piezoelectric device that prevents defects due to pyroelectric charge without limiting how the piezoelectric device can be used includes a first metal layer located on a bonding surface of a piezoelectric single crystal substrate. A second metal layer is located on a bonding surface of a support substrate. The first and second metal layers are overlaid on each other to define a metal bonded layer. Subsequently, by oxidizing the metal bonded layer, a semi-conducting layer is formed.Type: ApplicationFiled: January 27, 2014Publication date: May 22, 2014Applicant: Murata Manufacturing Co., Ltd.Inventor: Takashi IWAMOTO
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Publication number: 20140104345Abstract: There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.Type: ApplicationFiled: December 18, 2013Publication date: April 17, 2014Applicant: SEIKO EPSON CORPORATIONInventors: Toshihiro SHIMIZU, Hiroshi ITO, Jiro KATO, Eiju HIRAI
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Patent number: 8692443Abstract: An electrical component comprises a lead-based perovskite crystal material layer between a lower electrode on the surface of a substrate and an upper electrode, characterized in that the lower electrode comprises a stabilizing first layer made of a first material and a seeding second layer made of a second material, the first and second materials having the same chemical composition but different structural parameters and/or densities. A process for fabricating a component is also provided, in which the material with a perovskite structure may be PZT with a (100) or (111) orientation.Type: GrantFiled: May 25, 2012Date of Patent: April 8, 2014Assignee: Commissariat a l'Energie Atomique et aux Energies AlternativesInventors: Matthieu Cueff, Emmanuel Defay, Gwenael Le Rhun
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Patent number: 8692442Abstract: The invention provides a transducer comprising conductors and a laminate. The laminate comprises a film of a dielectric polymer material arranged between first and second electrodes. Each electrode is in electrically conductive communication with at least one of the conductors to facilitate an electrical potential between the electrodes and thereby enable deflection of the polymer material in response to an electrical field. At least one of the conductors is an elastically deformable conductor comprising a compliant core which is electrically conductive. The core is enclosed in a containment having elastomeric properties.Type: GrantFiled: February 14, 2012Date of Patent: April 8, 2014Assignee: Danfoss Polypower A/SInventors: Alan David Poole, Jakob Oubaek
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Publication number: 20140085694Abstract: A piezoelectric actuator includes a plurality of piezoelectric layers, a plurality of electrodes between which each of the piezoelectric layers is placed so that the electrodes and the piezoelectric layers alternate with each other, and a substrate on which the plurality of piezoelectric layers and the plurality of electrodes are formed.Type: ApplicationFiled: September 20, 2013Publication date: March 27, 2014Applicant: MITSUMI ELECTRIC CO., LTD.Inventors: Hisanori AGA, Ayu Sugiyama
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Publication number: 20140062263Abstract: A piezoelectric actuator unit includes a plurality of laminated piezoelectric elements, a first external electrode positioned on a first side surface of each piezoelectric element, and a conductive member connected to each first external electrode with a solder including indium, bismuth, or a mixture thereof, and some of the indium and/or bismuth in the solder is diffused into the soldered portions of the conductive member.Type: ApplicationFiled: March 15, 2013Publication date: March 6, 2014Applicant: HONDA MOTOR CO., LTD.Inventor: HONDA MOTOR CO., LTD.
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Patent number: 8664837Abstract: A piezoelectric device includes a piezoelectric vibrating piece, a base plate, which has a connecting electrode on one principal surface and a mounting terminal on another principal surface, in a rectangular shape, and a lid plate. The another principal surface of the base plate includes a pair of sides that face one another. At least the pair of sides has a level difference portion depressed toward the one principal surface side and a castellation passing through from the another principal surface to the one principal surface. A wiring electrode extracted from the mounting terminal to the one principal surface of the base plate is at a part of the level difference portion and the castellation. The wiring electrode and the mounting terminal include a metal film formed by sputtering or vacuum evaporation and an electroless plating film formed on the metal film by electroless plating.Type: GrantFiled: February 19, 2013Date of Patent: March 4, 2014Assignee: Nihon Dempa Kogyo Co., Ltd.Inventor: Shuichi Mizusawa
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Patent number: 8648517Abstract: A multilayer piezoelectric element includes a plurality of piezoelectric layers and a plurality of metal layers stacked alternately. The plurality of metal layers include a plurality of low-filled metal layers having a lower filling rate of metal composing the metal layers than oppositely disposed metal layers adjacent to each other in a stacking direction. The plurality of metal layers may include a plurality of thin metal layers having a smaller thickness than oppositely disposed metal layers adjacent to each other in a stacking direction. Where the plurality of metal layers are composed mainly of an alloy, the plurality of metal layers may include a plurality of high-ratio metal layers having a higher ratio of a component constituting the alloy than oppositely disposed metal layers adjacent to each other in a stacking direction.Type: GrantFiled: December 27, 2012Date of Patent: February 11, 2014Assignee: Kyocera CorporationInventors: Takeshi Okamura, Masaki Terazono, Tomohiro Kawamoto, Takafumi Tsurumaru, Shigenobu Nakamura, Ken Yamamoto
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Publication number: 20140035439Abstract: A piezoelectric device according to the present invention is provided with a first electrode film, a first nonmetal electroconductive intermediate film provided on the first electrode film, a piezoelectric film provided on the first nonmetal electroconductive intermediate film, a second nonmetal electroconductive intermediate film provided on the piezoelectric film, and a second electrode film provided on the second nonmetal electroconductive intermediate film. A linear expansion coefficient of the first nonmetal electroconductive intermediate film is larger than those of the first electrode film and the piezoelectric film, and a linear expansion coefficient of the second nonmetal electroconductive intermediate film is larger than those of the second electrode film and the piezoelectric film.Type: ApplicationFiled: August 3, 2012Publication date: February 6, 2014Applicant: TDK CORPORATIONInventors: Katsuyuki KURACHI, Yasuhiro AIDA, Hitoshi SAKUMA, Kazuhiko MAEJIMA
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Publication number: 20130342079Abstract: The invention relates to an electronic component having a layer sequence, which comprises at least a first electrode (10), a second electrode (20) and an active region (30) and contains monoatomic carbon layers at least in sub-regions.Type: ApplicationFiled: November 22, 2011Publication date: December 26, 2013Applicant: EPCOS AGInventors: Edgar Schmidhammer, Gudrun Henn
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Patent number: 8613500Abstract: A piezoelectric actuator may include a piezoelectric layer. The piezoelectric actuator may also include an electrode layer which is disposed on a surface of the piezoelectric layer. The piezoelectric actuator may further include a metal terminal which is disposed on the electrode layer, and configured as a contact point with respect to an external terminal. The piezoelectric actuator may yet further include a metal layer which is disposed between the piezoelectric layer and each of the metal terminal and the electrode layer.Type: GrantFiled: September 28, 2010Date of Patent: December 24, 2013Assignee: Brother Kogyo Kabushiki KaishaInventor: Yasunori Kobayashi
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Patent number: 8587179Abstract: Regarding a boundary acoustic wave device in which at least a part of an IDT electrode is embedded in a groove disposed in a piezoelectric substrate, the acoustic velocity is increased. A boundary acoustic wave device is provided with a piezoelectric substrate, a first dielectric layer, and an IDT electrode. The surface of the piezoelectric substrate is provided with a groove. The IDT electrode is disposed at the boundary between the piezoelectric substrate and the first dielectric layer in such a way that at least a part thereof is located in the groove. In the inside of the groove, the groove angle ?, which is the size of an angle formed by an upper end portion of the inside surface of the groove with the surface of the piezoelectric substrate, is less than 90 degrees.Type: GrantFiled: November 29, 2012Date of Patent: November 19, 2013Assignee: Murata Manufacturing Co., Ltd.Inventors: Mari Yaoi, Tetsuya Kimura
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Publication number: 20130300806Abstract: A piezoelectric element includes a substrate; a first conductive layer disposed on or above the substrate; a piezoelectric layer covering a top and a side of the first conductive layer; a relaxing layer disposed on or above the piezoelectric layer and along an edge of a top surface of the piezoelectric layer; and a second conductive layer covering at least the relaxing layer and the piezoelectric layer.Type: ApplicationFiled: July 11, 2013Publication date: November 14, 2013Inventor: Masao Nakayama
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Patent number: 8573754Abstract: A method for manufacturing a piezoelectric element comprising forming a titanium film containing titanium; forming a platinum film containing platinum on the titanium film; forming a piezoelectric precursor film containing bismuth, lanthanum, iron and manganese on the platinum film; crystallizing the piezoelectric precursor film to form a piezoelectric layer by firing the piezoelectric precursor film in an atmosphere of an inert gas; and forming an electrode on the piezoelectric layer.Type: GrantFiled: January 3, 2011Date of Patent: November 5, 2013Assignee: Seiko Epson CorporationInventors: Masahisa Nawano, Takayuki Yonemura, Tomokazu Kobayashi
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Patent number: 8575820Abstract: A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric layer stacked on the second electrode, and a third electrode stacked on the second piezoelectric layer. The stacked bulk acoustic resonator further includes an inner raised region formed in an inner portion on a surface of at least one of the first, second and third electrodes, and an outer raised region formed along an outer perimeter on the surface of the at least one of the first, second or third electrodes. The outer raised region surrounds the inner raised region and defines a gap between the inner raised region and the outer raised region.Type: GrantFiled: March 29, 2011Date of Patent: November 5, 2013Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.Inventors: Alexandre Augusto Shirakawa, Paul Bradley, Dariusz Burak, Stefan Bader, Chris Feng
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Publication number: 20130286106Abstract: A liquid droplet jetting apparatus includes a flow passage structural body having a nozzle and a pressure chamber communicated with the nozzle, and a piezoelectric actuator provided on the flow passage structural body to apply jetting energy to a liquid inside the pressure chamber. The piezoelectric actuator has a piezoelectric layer arranged to face the pressure chamber, a low-potential electrode provided on the piezoelectric layer, and a high-potential electrode provided on the piezoelectric layer and to which a higher potential is applied than to the low-potential electrode. The high-potential electrode has a first electrode layer arranged to contact with the piezoelectric layer and formed of gold, and a second electrode layer stacked on the first electrode layer to extend in a predetermined direction, having a width shorter than that of the first electrode layer, and formed of a conductive material more likely to cause migration than gold.Type: ApplicationFiled: March 26, 2013Publication date: October 31, 2013Applicant: BROTHER KOGYO KABUSHIKI KAISHAInventors: Masaaki DEGUCHI, Shohei KOIDE
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Patent number: 8569936Abstract: There are provided a piezoelectric resonator and an electrode structure thereof. The piezoelectric resonator includes: a piezoelectric body oscillated according to an electrical signal; and first and second electrodes each including first and second electrode layers stacked on respective both surfaces of the piezoelectric body, wherein the first electrode layer includes one or more selected from the group consisting of chromium (Cr), nickel (Ni), titanium (Ti), and an alloy including any one thereof, the ratio of the thickness of the first electrode layer to the thickness of the first or second electrode is 3% to 30%; and the second electrode layer includes copper (Cu) or an alloy including copper (Cu), and the ratio of the thickness of the second electrode layer to the thickness of the first or second electrode is 70% to 97%.Type: GrantFiled: October 6, 2011Date of Patent: October 29, 2013Assignee: Samsung Electro-Mechanics Co., Ltd.Inventor: Jang Ho Park
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Patent number: 8551003Abstract: An ultrasonic probe and an ultrasonic diagnosis device which can improve electrical safety for an operator are provided. The ultrasonic probe 2 has an insulating portion 62 between a mounting board 43 and a case 25. Since electrical leakage from the internal device of the ultrasonic probe 2 can be prevented, electrical safety of the ultrasonic probe 2 for the operator can be improved. A conductive film 61 is provided on the ultrasonic wave radiation side of a cMUT chip 20, and a conductive member 63 is provided along the insulating member 62. A conductive film 61 and a conductive member 63 are connected by a conductive member 64. A closed space having a ground potential is formed by the conductive film 61, the conductive member 63 and a coaxial cable 55 connected to ground. Main components or the body circuits of the ultrasonic probe 2 are contained in the closed space having the ground potential and shielded electrically from the outside.Type: GrantFiled: May 14, 2008Date of Patent: October 8, 2013Assignee: Hitachi Medical CorporationInventors: Makoto Fukada, Shuzo Sano, Akifumi Sako
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Patent number: 8546998Abstract: Disclosed are apparatus and methodology for minimizing and compensating for cracking in piezoelectric devices so as to maintain long term functionality of the devices. Compensation for cracking is achieved by applying solid conductive electrodes over the entire surface of the piezoelectric device and extending the electrodes beyond the perimeter of the piezoelectric device. In this way electrical connections are maintained even in the presence of cracking. Cracking of the piezoelectric device is limited by minimizing the local bending moment of the piezoelectric device by way of applying insulative support materials that may vary in thickness.Type: GrantFiled: June 26, 2008Date of Patent: October 1, 2013Assignee: Michelin Recherche et Technique S.A.Inventor: David Alan Weston
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Publication number: 20130250007Abstract: A piezoelectric thin film element includes a vibration plate, a lower electrode provided on the vibration plate and made of a conductive oxide, a piezoelectric thin film provided on the lower electrode and made of a polycrystalline substance, and an upper electrode provided on the piezoelectric thin film, wherein the lower electrode includes a titanium oxide film formed on the vibration plate, a platinum film formed on the titanium oxide film, and a conductive oxide film formed on the platinum film and, the platinum film and the conductive oxide film being a solid film with no holes.Type: ApplicationFiled: March 15, 2013Publication date: September 26, 2013Applicant: RICOH COMPANY, LTD.Inventors: Masahiro Ishimori, Masaru Shinkai, Satoshi Mizukami
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Publication number: 20130250009Abstract: An electromechanical conversion element for converting an electric signal into mechanical displacement or converting mechanical displacement into an electric signal, includes a bottom electrode in which an alumina film, a metal film, and a conductive oxide film are sequentially laminated; an electromechanical conversion film disposed on the conductive oxide film of the bottom electrode; and a top electrode disposed on the electromechanical conversion film, wherein the metal film is solid.Type: ApplicationFiled: March 21, 2013Publication date: September 26, 2013Applicant: RICOH COMPANY, LTD.Inventors: Masahiro Ishimori, Masaru SHINKAI, Satoshi MIZUKAMI, Takahiko KURODA
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Patent number: 8531092Abstract: Piezoelectric devices are disclosed that are mountable on the surface of a printed circuit board or the like. An exemplary device comprises a piezoelectric vibrating piece enclosed and sealed within a package including at least a cover and a base-substrate formed of glass or piezoelectric material. The package includes frame-shaped metallic films formed in peripheral regions of inner main surfaces of the cover and/or the base substrate. The frame-shaped metallic films are used for sealing the package using a eutectic material (e.g., solder). At least one mounting terminal is provided on the outer (bottom) main surface of the base-substrate. At least one of the frame-shaped metallic films and mounting terminals includes a chromium foundation layer formed on the surface of the glass or piezoelectric material, a middle layer of NiW alloy formed on the surface of the chromium layer, and a gold layer formed on the surface of the middle layer.Type: GrantFiled: April 22, 2011Date of Patent: September 10, 2013Assignee: Nihon Dempa Kogyo Co., Ltd.Inventors: Ryoichi Ichikawa, Shuichi Mizusawa
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Publication number: 20130221806Abstract: A nano-piezoelectric generator includes a first electrode and a second electrode, at least one nano-piezoelectric unit, formed of a semiconductor piezoelectric material having a nano-structure, disposed between the first and the second electrodes, and an interlayer, formed of an insulating material, disposed between the first electrode and the at least one nano-piezoelectric unit.Type: ApplicationFiled: February 22, 2013Publication date: August 29, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventor: SAMSUNG ELECTRONICS CO., LTD.
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Patent number: 8513863Abstract: A piezoelectric resonator device includes: a top electrode layer with a patterned structure, a top piezoelectric layer adjacent to the top layer, a middle metal layer adjacent to the top piezoelectric layer opposite the top layer, a bottom piezoelectric layer adjacent to the middle layer opposite the top piezoelectric layer, and a bottom electrode layer with a patterned structure and adjacent to the bottom piezoelectric layer opposite the middle layer. The top layer includes a first plurality of electrodes inter-digitated with a second plurality of electrodes. A first one of the electrodes in the top layer and a first one of the electrodes in the bottom layer are coupled to a first contact, and a second one of the electrodes in the top layer and a second one of the electrodes in the bottom layer are coupled to a second contact.Type: GrantFiled: June 11, 2009Date of Patent: August 20, 2013Assignee: QUALCOMM MEMS Technologies, Inc.Inventors: Philip J. Stephanou, Justin P. Black
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Publication number: 20130187516Abstract: A piezoelectric element includes a substrate, and at least a lower electrode layer, a piezoelectric film represented by a general formula of (NaxKyLiz)NbO3 (0?x?1, 0?y?1, 0?z?0.2, x+y+z=1); and an upper electrode layer successively formed on the substrate. The piezoelectric film has a crystal structure of pseudo-cubic crystal, tetragonal crystal, orthorhombic crystal, monoclinic crystal or rhombohedral crystal, or has a state that at least two of the crystal structures coexist. The piezoelectric film is preferentially oriented to certain specific axes that are not more than two axes of crystal axes in the crystal structures. At least one of domain crystal component of a c-axis orientation domain crystal component and an a-axis orientation domain crystal component exists as the components of the crystal axes oriented.Type: ApplicationFiled: January 22, 2013Publication date: July 25, 2013Applicant: Hitachi Cable, Ltd.Inventor: Hitachi Cable, Ltd.
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Patent number: 8492959Abstract: A bonding structure that provides excellent conductivity and bonding between a piezoelectric body and a metal plate includes a metal plate and an electrode of a piezoelectric body bonded to one another with an electrically conductive adhesive so as to provide electrical conductivity, the electrically conductive adhesive includes carbon black with a nano-level average particle size, and has a paste form included in a solventless or solvent-based resin so that the carbon black forms an aggregate with an average particle size of about 1 ?m to about 50 ?m. The electrically conductive adhesive is applied between the metal plate and the electrode of the piezoelectric body, and the metal plate and the piezoelectric body are subjected to heating and pressurization so that the carbon black aggregate is deformed, thereby hardening the electrically conductive adhesive.Type: GrantFiled: December 27, 2011Date of Patent: July 23, 2013Assignee: Murata Manufacturing Co., Ltd.Inventors: Hiroki Kitayama, Hideo Nakagoshi, Kiyoshi Kurihara