Multilayer Patents (Class 310/364)
  • Patent number: 8044557
    Abstract: An upper adhesion layer 35 formed between a piezoelectricity layer 32 and an upper electrode layer 34 so as to abut on the piezoelectricity layer 32 and the upper electrode layer 34 is included. The upper adhesion layer 35 includes a first tungsten layer 47 made of tungsten in which an ? phase and a ? phase coexist and a second tungsten layer 48 made of ?-phase tungsten. The first tungsten layer 47 is configured so as to abut on the piezoelectricity layer 32. It is possible to obtain a piezoelectric device which is capable of improving the adhesion property of both the piezoelectricity layer and the electrode layer and reducing a basic point voltage fluctuation at the time of high-temperature operation so as to improve reliability.
    Type: Grant
    Filed: April 24, 2008
    Date of Patent: October 25, 2011
    Assignee: Panasonic Corporation
    Inventors: Michihiko Hayashi, Masahiro Yasumi, Shoji Okamoto
  • Patent number: 8040025
    Abstract: Striped sheets each having a structure in which two types of first layers and second layers are stacked in the X direction are prepared. More specifically, first raw material sheets having the same composition as the first layers and second raw material sheets having the same composition as the second layers are regularly alternately stacked in the X direction to prepare a uniaxial stack. The uniaxial stack is then cut along the X direction to prepare the striped sheets. A large number of striped sheets and a large number of homogeneous sheets are then collected to form a sheet group. The striped sheets and the homogeneous sheets are alternately stacked in the Y direction different from the X direction to prepare a biaxial stack having two stacking axes in the X direction and the Y direction. The biaxial stack is fired to produce a ceramic structure.
    Type: Grant
    Filed: October 16, 2007
    Date of Patent: October 18, 2011
    Assignee: NGK Insulators, Ltd.
    Inventors: Makoto Ohmori, Natsumi Shimogawa, Tsutomu Nanataki
  • Publication number: 20110248607
    Abstract: A piezoelectric actuator of a multilayer design which has a stack of piezoelectric layers and electrode layers arranged in between. The electrode layers are contacted by way of two outer electrodes, which have a multiplicity of wires. The outer electrodes are fastened in fastening regions on first side faces of the stack (11) and are led around the edge of the stack that is closest to the respective fastening region.
    Type: Application
    Filed: October 2, 2009
    Publication date: October 13, 2011
    Inventors: Stefan Brantweiner, Siegfried Fellner
  • Patent number: 8035277
    Abstract: According to an exemplary embodiment, a method of forming a multi-layer electrode for growing a piezoelectric layer thereon includes a step of forming a high conductivity metal layer over a substrate. The method further includes a step of forming a seed layer over the high conductivity metal layer. The method further includes a step of forming a high density metal layer over the seed layer. The method further includes a step of forming a piezoelectric layer over the high density metal layer. The high conductivity metal layer, the seed layer, and the high density metal layer form the multi-layer electrode on which the piezoelectric layer is grown.
    Type: Grant
    Filed: August 1, 2008
    Date of Patent: October 11, 2011
    Assignee: Avago Technologies Wireless IP (Singapore) Pte.Ltd.
    Inventors: Bradley P. Barber, Craig E. Carpenter, Paul P. Gehlert, Christopher F. Shepard
  • Publication number: 20110241494
    Abstract: A monolithic multilayer actuator made of a sintered stack of thin films of piezoceramio with embedded metallic internal electrodes. All metallic internal electrodes of one polarity are electrically connected in parallel by way of a base metallization applied to the stack and wherein an external electrode is connected in an electrically conducting manner to the base metallization for electrical contacting purposes. In order to provide that the external electrode can be applied to the base metallization using simple and cost-effective means so that said electrode is expandable such that it dissipates the cracks arising from cracking energy in the actuator without the external electrode disconnecting in the process that are sintered together, the layer being applied onto the base metallization.
    Type: Application
    Filed: November 19, 2009
    Publication date: October 6, 2011
    Inventor: Reiner Bindig
  • Publication number: 20110234708
    Abstract: A piezoelectric element includes a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode. The first electrode includes a first electroconductive layer having a first surface at the piezoelectric layer side and a second electroconductive layer having a second surface at the first surface side. The second electroconductive layer mainly contains lanthanum nickelate and is disposed on the first surface. The first electrode, the piezoelectric layer and the second electrode overlap with each other when viewed in the direction of the normal to the first surface to form an overlap portion acting as a driving portion. At least part of the second electroconductive layer is disposed within the sides of the first surface within the driving portion, and the second surface has a smaller area than the first surface within the driving portion.
    Type: Application
    Filed: March 23, 2011
    Publication date: September 29, 2011
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Masao NAKAYAMA, Hideki HAHIRO
  • Publication number: 20110228013
    Abstract: A piezoelectric element includes a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a resin layer that covers at least the side surfaces of the first electrode. The first electrode includes a metal layer and an anti-oxidation layer. The metal layer is formed of a base metal. The anti-oxidation layer is disposed between the metal layer and the piezoelectric layer to prevent contact between the metal layer and the piezoelectric layer.
    Type: Application
    Filed: March 15, 2011
    Publication date: September 22, 2011
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Koji OHASHI, Masao NAKAYAMA, Noboru FURUYA
  • Patent number: 8007903
    Abstract: A ceramic member in which the metal layers with high void ratio are sufficiently sintered to lower a residue of resin is produced. The method for manufacturing a ceramic member which comprises a step of forming a stacked compact from a plurality of metallic paste layers containing a metal component M1 that are stacked one on another via ceramic green sheets, and a step of firing the stacked compact, wherein at least one of plural metallic paste layers is formed as a second metallic paste layer that has the mass percentage X higher than that of the metallic paste layer that adjoin therewith in the stacking direction and a ceramic powder is contained in the second metallic paste layer in the step of forming the stacked compact, the mass percentage X being the proportion of the metal component M1 to the total metal content in the metallic paste layer.
    Type: Grant
    Filed: February 27, 2007
    Date of Patent: August 30, 2011
    Assignee: Kyocera Corporation
    Inventors: Takeshi Okamura, Shigenobu Nakamura, Tomohiro Kawamoto, Nobuyuki Ito, Takafumi Tsurumaru, Tsuyoshi Setoguchi
  • Patent number: 8004161
    Abstract: A multilayered piezoelectric element and a method of producing the multilayered piezoelectric element are disclosed. The multilayered piezoelectric element is made of piezoelectric ceramic layers and electrode formation layers which are alternately laminated. The piezoelectric ceramic layers are made of crystal oriented ceramic as polycrystalline material. The crystal oriented ceramic is made mainly of an isotropic perovskite type compound in which the specific {100} crystal plane of each of crystal grains that form the polycrystalline material is oriented. The electrode formation layers have electrode parts forming inner electrodes containing a conductive metal. The isotropic perovskite type compound is expressed by a general formula (1): [Agh{Lix(K1-yNay)1-x}1-h]j(Nb1-z-wTazSbw)O3-k ??(1), where 0?x?0.2, 0?y?1, 0?z?0.4, 0?w?0.2, x+z+w>0, 0<h?0.05, 0.94?j?1, and 0?k?0.5).
    Type: Grant
    Filed: May 29, 2009
    Date of Patent: August 23, 2011
    Assignees: Denso Corporation, Nippon Soken, Inc.
    Inventors: Toshiatsu Nagaya, Kouji Noda, Masatoshi Ikeda, Masaya Nakamura, Daisuke Shibata
  • Patent number: 7999442
    Abstract: To provide a piezoelectric actuator that is small in size, large in displacement, high in rigidity, excellent in controllability, and excellent in stability, the present invention provides a piezoelectric actuator, including: a first piezoelectric member that is bent and displaced in a thickness direction; and a second piezoelectric member that is bent and displaced in a direction opposite to the first piezoelectric member. In the piezoelectric actuator, the first piezoelectric member and the second piezoelectric member are stacked on each other in the thickness direction of the first piezoelectric member and the second piezoelectric member, and the center portion in the longitudinal direction of the first piezoelectric member and the center portion in the longitudinal direction of the second piezoelectric member, or both ends of the first piezoelectric member and both ends of the second piezoelectric member are fixed to each other.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: August 16, 2011
    Assignee: Seiko Instruments Inc.
    Inventor: Akihiro Iino
  • Patent number: 7982367
    Abstract: Disclosed is a piezoelectric/electrostrictive element equipped with a piezoelectric/electrostrictive drive unit having a piezoelectric/electrostrictive body, and a film external terminal electrode containing substantially no glass component and being disposed on at least one surface of the piezoelectric/electrostrictive body. The external terminal electrode is an electrode having a laminated structure equipped with a first electrode layer made of a first electrode material being disposed to contact the piezoelectric/electrostrictive body closely and containing a first metal component and a piezoelectric/electrostrictive material, and a second electrode layer made of a second electrode material containing a second metal component and substantially no piezoelectric/electrostrictive material, which the first and second metal components are in the same element system.
    Type: Grant
    Filed: September 10, 2010
    Date of Patent: July 19, 2011
    Assignee: NGK Insulators, Ltd.
    Inventors: Masayuki Uetani, Haruhiko Ito
  • Publication number: 20110164095
    Abstract: A method for manufacturing a piezoelectric element comprising forming a titanium film containing titanium; forming a platinum film containing platinum on the titanium film; forming a piezoelectric precursor film containing bismuth, lanthanum, iron and manganese on the platinum film; crystallizing the piezoelectric precursor film to form a piezoelectric layer by firing the piezoelectric precursor film in an atmosphere of an inert gas; and forming an electrode on the piezoelectric layer.
    Type: Application
    Filed: January 3, 2011
    Publication date: July 7, 2011
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Masahisa Nawano, Takayuki Yonemura, Tomokazu Kobayashi
  • Patent number: 7969066
    Abstract: In a multilayer piezoelectric actuator, external electrodes are formed on external surfaces of a multilayer piezoelectric body in which a plurality of internal electrodes and a plurality of piezoelectric layers are stacked on top of one another. Each of the external electrodes includes a base electrode and a stress-absorbing external-electrode member formed on the base electrode. The stress-absorbing external-electrode member is provided with an elastically deformable elastic structure, and a planar portion, which is continuous with the elastic structure and has at least an area sufficient for bonding a feeder terminal such as a lead line thereto.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: June 28, 2011
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Shigeharu Kasai, Satoshi Shindou, Koichi Hayashi
  • Patent number: 7958608
    Abstract: The piezoelectric device includes a substrate, a first electrode formed on the substrate, a piezoelectric film formed on the first electrode and a second electrode formed on a second side of the piezoelectric film which is away from a first side where the first electrode is formed. The first electrode is composed of a first layer in contact with the substrate and a second layer in contact with the piezoelectric film. The first layer is formed of a material that is wet etched at a different rate than the substrate. The ink-jet head includes the piezoelectric device, a liquid droplet storing/ejecting member for ejecting ink droplets through a ink spout and provided on the piezoelectric device and a diaphragm for vibrating in response to expansion or contraction of the piezoelectric device and provided between the piezoelectric device and the liquid droplet storing/ejecting member.
    Type: Grant
    Filed: September 8, 2008
    Date of Patent: June 14, 2011
    Assignee: Fujifilm Corporation
    Inventors: Takamichi Fujii, Yasukazu Nihei, Yoshikazu Hishinuma, Tsuyoshi Mita
  • Publication number: 20110128328
    Abstract: A piezoelectric actuator may include a piezoelectric layer. The piezoelectric actuator may also include an electrode layer which is disposed on a surface of the piezoelectric layer. The piezoelectric actuator may further include a metal terminal which is disposed on the electrode layer, and configured as a contact point with respect to an external terminal. The piezoelectric actuator may yet further include a metal layer which is disposed between the piezoelectric layer and each of the metal terminal and the electrode layer.
    Type: Application
    Filed: September 28, 2010
    Publication date: June 2, 2011
    Applicant: BROTHER KOGYO KABUSHIKI KAISHA
    Inventor: Yasunori Kobayashi
  • Publication number: 20110122205
    Abstract: An actuator includes a vibration plate, a first conductive layer formed on an upper surface of the vibration plate and extending in a predetermined direction, a piezoelectric layer covering the first conductive layer, a second conductive layer formed on an upper surface of the piezoelectric layer, a metal layer formed on the upper surface of the vibration plate and on an upper surface of the second conductive layer, and an electrode electrically connected to the metal layer. The first conductive layer, the second conductive layer, and the piezoelectric layer interposed between the first and second conductive layers form a driving unit. A plurality of the driving units are disposed in a direction perpendicular to the predetermined direction. The metal layer intersects a plurality of the second conductive layers so as to be electrically connect the plurality of second conductive layers.
    Type: Application
    Filed: November 24, 2010
    Publication date: May 26, 2011
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Eiju HIRAI
  • Patent number: 7948156
    Abstract: A piezoelectric resonator device comprises a piezoelectric resonator plate, a base for holding the piezoelectric resonator plate, a lid for hermetically enclosing the piezoelectric resonator plate held on the base, and a support member made of a brittle material for reducing external stress to the piezoelectric resonator plate. The piezoelectric resonator plate is held on the base via a support member. In this case, the base, the piezoelectric resonator plate, and the support member are bonded with each other using a base bonding member and a piezoelectric resonator plate bonding member (connection bumps) by FCB using ultrasonic waves. The base is electrically and mechanically bonded with the support member via the base bonding member in a plurality of areas of the support member using ultrasonic waves.
    Type: Grant
    Filed: November 30, 2006
    Date of Patent: May 24, 2011
    Assignee: Daishinku Corporation
    Inventors: Syunsuke Satoh, Shinichi Koyama
  • Publication number: 20110115341
    Abstract: A method of forming an actuator and an actuable device formed by this method are disclosed. This method includes depositing a photoimageable material to form a first photoimageable layer on a piezoelectric layer; patterning the first photoimageable layer to form an aperture; and disposing a first conductive layer on the first photoimageable layer. The first conductive layer partially overlies the first photoimageable layer such that a first portion of the first conductive layer contacts the first photoimageable layer and a second portion of the first conductive layer electrically contacts the piezoelectric layer in the aperture.
    Type: Application
    Filed: May 21, 2009
    Publication date: May 19, 2011
    Inventors: Jeffrey Birkmeyer, Darren T. Imai, Andreas Bibl, Zhenfang Chen
  • Patent number: 7944128
    Abstract: An electronic component includes an electronic component body, first and second outer electrodes, and first and second inner electrodes. The first outer electrode includes a first conductive layer that does not include silver and a second conductive layer that is deposited on the first conductive layer so as to be positioned at an outermost layer and that includes silver. The second conductive layer includes a first contact portion in contact with a first main surface and is not in contact with first and second side surfaces. A first inner conductor is provided on a virtual straight or substantially straight line connecting a second inner electrode closest to the first contact portion and the first contact portion in the shortest distance. The first inner conductor is connected only to the first outer electrode or is connected to none of the first and second outer electrodes.
    Type: Grant
    Filed: June 23, 2010
    Date of Patent: May 17, 2011
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Toshimi Oguni, Katsutomo Aritomi
  • Publication number: 20110109701
    Abstract: A piezoelectric device includes a first electrode and a facing second electrode, with a piezoelectric layer therebetween. The first electrode includes a first conductive layer, a first intermediate layer that contacts the first conductive layer, a second intermediate layer that contacts the first intermediate layer, and a second conductive layer that contacts the second intermediate layer and the piezoelectric layer. The first conductive layer contains a metal and an alloy. The metal is Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Fe, Co, Ni, Cu, Ag, or Au, and the alloy contains at least one of the foregoing metals. The first intermediate layer contains a nitrogen compound. The second intermediate layer contains a metal and an alloy. The metal is Ti, Zr, W, Ta, or Al, and the alloy contains at least two of the foregoing metals. The second conductive layer contains a conductive oxide.
    Type: Application
    Filed: November 10, 2010
    Publication date: May 12, 2011
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Koji OHASHI
  • Patent number: 7936108
    Abstract: A multi-layer piezoelectric element of high durability wherein the internal electrodes and the external electrodes do not break even when operated continuously over a long period of time under high electric field and high pressure is provided. The first multi-layer piezoelectric element according to the present invention comprises a stack formed by stacking piezoelectric layers and internal electrodes alternately one on another and external electrodes formed on a first side face and on a second side face of the stack, wherein one of the adjacent internal electrodes is connected to the external electrode formed on the first side face and the other internal electrode is connected to the external electrode formed on the second side face, and the external electrodes include an electrically conductive material and glass and is formed from a porous electrically conductive material that has a three-dimensional mesh structure.
    Type: Grant
    Filed: June 23, 2010
    Date of Patent: May 3, 2011
    Assignee: Kyocera Corporation
    Inventor: Shigenobu Nakamura
  • Publication number: 20110090289
    Abstract: An electro-mechanical transducer includes a plurality of independent elements. Each of the plurality of independent elements includes one of a substrate and a foundation film, a first electrode of oxide disposed on the one of the substrate and the foundation film, an electro-mechanical transducer film disposed on the first electrode, a second electrode of oxide disposed on the electro-mechanical transducer film, and a third electrode of metal formed on the first electrode as a common electrode conductive to the first electrode and common to at least two of the plurality of independent elements.
    Type: Application
    Filed: October 20, 2010
    Publication date: April 21, 2011
    Inventor: Satoshi MIZUKAMI
  • Patent number: 7923896
    Abstract: A surface acoustic wave device including an SiO film has improved frequency temperature characteristics, prevents an increase in insertion loss, obtains a reflection coefficient of an electrode that is sufficiently high, and achieves more preferable resonant characteristics and filter characteristics. The surface acoustic wave device includes a LiNbO3 substrate having a plurality of grooves formed in an upper surface thereof, an IDT electrode primarily composed of Pt provided in the grooves, a SiO2 layer arranged so as to cover the upper surface of the LiNbO3 substrate and the IDT electrode, a surface of the SiO2 layer is planarized, a response of a Rayleigh wave is utilized, and Euler angles of the LiNbO3 substrate are in a range of (0°±5°, 208° to 228°, 0°±5°).
    Type: Grant
    Filed: June 11, 2010
    Date of Patent: April 12, 2011
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Tetsuya Kimura, Michio Kadota, Mari Yaoi
  • Publication number: 20110074252
    Abstract: A method for manufacturing a piezoelectric actuator is provided. The method includes: forming a diffusion-preventive layer having an electrical conductivity on a partial surface thereof on a surface of a vibration plate formed of a metallic material; forming a piezoelectric layer on the surfaces of the diffusion-preventive layer and the vibration plate; forming an electrode in an area of the piezoelectric layer which overlaps the partial surface of the diffusion-preventive layer having the electrical conductivity; forming an extraction electrode in an area of the piezoelectric layer which does not overlap the diffusion-preventive layer; and heating the piezoelectric layer and the vibration plate after the piezoelectric layer is formed so as to diffuse metallic atoms of the metallic material of which the vibration plate is formed to the piezoelectric layer, thereby making the extraction electrode be in conduction with the partial surface of the diffusion-preventive layer having the electrical conductivity.
    Type: Application
    Filed: September 15, 2010
    Publication date: March 31, 2011
    Applicant: BROTHER KOGYO KABUSHIKI KAISHA
    Inventor: Keiji KURA
  • Patent number: 7898145
    Abstract: A boundary acoustic wave device includes a piezoelectric substance made of LiNbO3 having a surface obtained by rotating a Y axis by about 15°±10° as a primary surface, a dielectric substance which is made of a silicon oxide and which is laminated to the piezoelectric substance, and an electrode structure disposed at a boundary between the piezoelectric substance and the dielectric substance and which includes an IDT arranged to utilize a boundary acoustic wave propagating along the boundary. When the density of the IDT, the thickness thereof, the wavelength deter-mined by the period of electrode fingers of the IDT, and the duty ratio thereof are represented by ? (kg/m3), H (?m), ? (?m), and x, respectively, x and the product of H/? and ? are set in a range that satisfies the following formula (1): (H/?)×?>70.7924(x+0.055)(?2.884)+797.09??Formula (1).
    Type: Grant
    Filed: March 24, 2009
    Date of Patent: March 1, 2011
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Masakazu Mimura, Yasuhisa Fujii, Masaru Yata, Norihiko Nakahashi
  • Publication number: 20110043078
    Abstract: A piezoelectric component that has a superior level of molding pressure resistance while reducing the height and size thereof, is manufactured at low cost by using a photosensitive resin film to which is added a nano filler or a mica filler.
    Type: Application
    Filed: August 13, 2010
    Publication date: February 24, 2011
    Applicant: NIHON DEMPA KOGYO CO., LTD.
    Inventor: Toshimasa Tsuda
  • Patent number: 7893597
    Abstract: A surface acoustic wave element 1 includes an IDT electrode 11 having an electrode finger 11a on a piezoelectric substrate 10. The electrode finger 11a is formed by laminating an intermediate layer 12 and an electrode layer 13 having a higher coefficient of thermal expansion than that of the intermediate layer 12. The electrode finger 11a has a cross section of a trapezoidal shape that widens nearer to the piezoelectric substrate 10. An angle ?1 formed with a side surface of the intermediate layer 12 is formed larger than an angle ?1 formed with a side surface of the electrode layer 13.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: February 22, 2011
    Assignee: Kyocera Corporation
    Inventors: Yuriko Nishimura, Shigehiko Nagamine, Kiyohiro Iioka
  • Publication number: 20110037351
    Abstract: A multilayer piezoelectric actuator having external electrodes formed on external surfaces of a multilayer piezoelectric body in which a plurality of internal electrodes and a plurality of piezoelectric layers are stacked on top of one another. Each of the external electrodes includes a base electrode and a stress-absorbing electrode member formed on the base electrode. The stress-absorbing electrode member includes an elastic structure that elastically deforms when subject to an external force and fixed portions that are fixed to the base electrode. The fixed portions have a shape that extends parallel to edge portions of the internal electrodes, and each of the fixed portions has a width dimension that does not reach an adjacent internal electrode in the stacking direction.
    Type: Application
    Filed: October 7, 2010
    Publication date: February 17, 2011
    Inventors: Shigeharu Kasai, Satoshi Shindou, Koichi Hayashi, Yasuhiro Morimoto
  • Patent number: 7888849
    Abstract: TO reduce frequency variations caused by a change in frequency constant and suppress unnecessary vibrations in the case where the frequency constant of apiezoelectric substrate has a gradient. A piezoelectric resonator has vibrating electrodes 4 and 5 facing each other, which are formed on two major surfaces of apiezoelectric substrate Ia, and trapped vibrations are generated between the two vibrating electrodes. The piezoelectric substrate Ia has a constant thickness. The frequency constant of the piezoelectric substrate Ia has a gradient in a surface direction. The vibrating electrodes 4 and 5 are formed to have a gradient thickness so that the thickness gradually increases as the frequency constant of the piezoelectric substrate increases. By forming the vibrating electrodes to have a gradient thickness, unnecessary in-band vibrations are suppressed, and frequency variations are reduced.
    Type: Grant
    Filed: July 27, 2007
    Date of Patent: February 15, 2011
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Masakazu Yoshio, Koichi Yamasaki
  • Publication number: 20110018401
    Abstract: In a multilayer piezoelectric actuator, external electrodes are formed on external surfaces of a multilayer piezoelectric body in which a plurality of internal electrodes and a plurality of piezoelectric layers are stacked on top of one another. Each of the external electrodes includes a base electrode and a stress-absorbing external-electrode member formed on the base electrode. The stress-absorbing external-electrode member is provided with an elastically deformable elastic structure, and a planar portion, which is continuous with the elastic structure and has at least an area sufficient for bonding a feeder terminal such as a lead line thereto.
    Type: Application
    Filed: September 30, 2010
    Publication date: January 27, 2011
    Inventors: Shigeharu Kasai, Satoshi Shindou, Koichi Hayashi
  • Patent number: 7872401
    Abstract: There is provided a piezoelectric vibrator 1 that includes a base substrate 2, a lid substrate 3, a piezoelectric vibrating reed 4, a pair of external electrodes 38 and 39, a pair of through electrodes 32 and 33, and routing electrodes 36 and 37. Both surfaces of the base substrate 2 are polished. The lid substrate 3 includes a recess 3a for a cavity C and is bonded to the base substrate. The piezoelectric vibrating reed 4 is bonded to the upper surface of the base substrate so as to be received in a cavity that is formed between the base substrate and the lid substrate. The pair of external electrodes 38 and 39 is formed on the lower surface of the base substrate. The pair of through electrodes 32 and 33 is formed so as to pass through the base substrate, maintains airtightness in the cavity, and is electrically connected to the pair of external electrodes, respectively.
    Type: Grant
    Filed: August 12, 2010
    Date of Patent: January 18, 2011
    Assignee: Seiko Instruments Inc.
    Inventors: Osamu Onitsuka, Kazuyoshi Sugama, Sumihiko Kurita
  • Publication number: 20110006644
    Abstract: A piezoelectric multilayer component includes a stack of piezoceramic layers, which are arranged one on top of the other, and electrode layers. The stack has a first area and a second area. The second area contains a disturbance material, which is used to make the second area less mechanically robust than the first area.
    Type: Application
    Filed: July 20, 2010
    Publication date: January 13, 2011
    Inventors: Georg Kuegerl, Oliver Dernovsek, Alexander Glazunov
  • Patent number: 7868523
    Abstract: An elastic wave device has a structure that prevents cracks from being formed in a piezoelectric substrate in flip-chip bonding using a bump, that minimizes the contact resistance in a contact portion where wiring patterns are electrically connected to each other, and that improves the insertion loss.
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: January 11, 2011
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Nobuhira Tanaka, Hisashi Yamazaki
  • Publication number: 20100327703
    Abstract: Disclosed is a piezoelectric/electrostrictive element equipped with a piezoelectric/electrostrictive drive unit having a piezoelectric/electrostrictive body, and a film external terminal electrode containing substantially no glass component and being disposed on at least one surface of the piezoelectric/electrostrictive body. The external terminal electrode is an electrode having a laminated structure equipped with a first electrode layer made of a first electrode material being disposed to contact the piezoelectric/electrostrictive body closely and containing a first metal component and a piezoelectric/electrostrictive material, and a second electrode layer made of a second electrode material containing a second metal component and substantially no piezoelectric/electrostrictive material, which the first and second metal components are in the same element system.
    Type: Application
    Filed: September 10, 2010
    Publication date: December 30, 2010
    Applicant: NGK Insulators, Ltd.
    Inventors: Masayuki Uetani, Haruhiko Ito
  • Publication number: 20100320876
    Abstract: A piezoelectric multilayer component has a stack of green piezoceramic layers arranged one on top of the other. A first electrode layer is applied onto a piezoceramic layer and contains a first metal. A structured sacrificial layer is applied onto a further piezoceramic layer, adjacent to the first electrode layer in the stacking direction, and contains a higher concentration of the first metal than does the first electrode layer. When the intermediate product is sintered, the first metal diffuses from the structured sacrificial layer to the first electrode layer and in the process leaves cavities which form a weak layer.
    Type: Application
    Filed: July 20, 2010
    Publication date: December 23, 2010
    Inventors: Oliver Dernovsek, Alexander Glazunov
  • Patent number: 7855488
    Abstract: The present invention relates to a piezoelectrical device whose electrode layers contain copper. The usage of copper in electrode layers is enabled by a debindering process, which is carried out by steam.
    Type: Grant
    Filed: April 19, 2006
    Date of Patent: December 21, 2010
    Assignee: Epcos AG
    Inventors: Adalbert Feltz, Sigrid Gansberger, Heinz Florian, Harald Kastl
  • Publication number: 20100314973
    Abstract: A piezoelectric device is disclosed. The piezoelectric device includes a first magnetic layer, a second magnetic layer and a piezoelectric layer. The piezoelectric layer is disposed between the first magnetic layer and the second magnetic layer. Both the first magnetic layer and the second magnetic layer are electrically conductive layers and are capable of generating magnetic fields.
    Type: Application
    Filed: June 10, 2009
    Publication date: December 16, 2010
    Applicant: Ritek Corporation
    Inventor: Wei-Hsiang Wang
  • Patent number: 7847469
    Abstract: A micro-cantilever of a simple structure and capable of obtaining a larger displacement at a low voltage including a plate-like piezoelectric substrate having electrode films as an upper electrode and a lower electrode formed on both surfaces thereof, a plate-like resilient member in close contact with the piezoelectric substrate on the side of the lower electrode and a support for supporting a driving member in a cantilever manner, in which a thin-walled portion is formed to the vicinity of a base portion of the driving member supported by the support.
    Type: Grant
    Filed: January 22, 2008
    Date of Patent: December 7, 2010
    Assignee: Taiyo Yuden Co., Ltd.
    Inventors: Kentaro Nakamura, Ryuichi Kondou
  • Publication number: 20100282874
    Abstract: A multi-layer piezoelectric element of high durability wherein external electrodes do not peel off the surface of a stack even when operated continuously over a long period of time under a high electric field and a high pressure, a method for manufacturing the same and an injection apparatus using the same are provided. The multi-layer piezoelectric element comprises a stack 10 consisting of a plurality of piezoelectric layers 1 and a plurality of metal layers 2 which are stacked alternately one on another and external electrodes (covering member) 4 that cover at least a part of the side faces of the stack 10, wherein at least one metal layer 2a among the plurality of metal layers 2 is a porous metal layer 2a which has more voids than the metal layers 2b that adjoin the metal layer 2a on both sides thereof in the stacking direction, and a part of the external electrodes 4 infiltrates between two piezoelectric layers 1, 1 which adjoin the porous metal layer 2a in the stacking direction.
    Type: Application
    Filed: October 26, 2006
    Publication date: November 11, 2010
    Applicant: KYOCERA CORPORATION
    Inventors: Shigenobu Nakamura, Susumu Ono, Takeshi Kato, Koichi Nagasaki
  • Patent number: 7808162
    Abstract: A stacked piezoelectric element comprising a driving unit and a non-driving unit, and a vibration wave driving apparatus, which are capable of suppressing occurrences of deformation, particularly warping, that are generated during firing and polarization of the stacked piezoelectric element. A driving unit has a first conductive layer and a first piezoelectric layer consisting of a piezoelectric material, which is driven by an application of voltage to the first conductive layer to generate vibration on the stacked piezoelectric element. A non-driving unit has a plurality of second conductive layers and a plurality of second piezoelectric layers consisting of the piezoelectric material, which is arranged to have a thickness that enables generation of the vibration.
    Type: Grant
    Filed: April 3, 2007
    Date of Patent: October 5, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yutaka Maruyama, Tomoyoshi Kato
  • Patent number: 7808155
    Abstract: A monolithic piezoelectric element includes an element assembly in which internal electrode layers and piezoelectric ceramic layers are laminated alternately. The internal electrode layers contain an Ag—Pd alloy, which has an Ag content of 85 percent by weight or more as a primary component, a metal element having a valence of at least one of pentavalence or hexavalence. The piezoelectric ceramic layers contain a composite oxide represented by Pb(Ti,Zr)O3 as a primary component, a part of Ag contained in the internal electrode layers is almost uniformly diffused therein and, the metal element is diffused in the form of a metal oxide in such a way that the concentration is reduced with decreasing proximity to the internal electrode layers. In this manner, a monolithic piezoelectric element having a desired large piezoelectric constant can be obtained without inviting an increase in cost even when a firing treatment is conducted at low temperatures.
    Type: Grant
    Filed: June 4, 2009
    Date of Patent: October 5, 2010
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Atsushi Yamamoto, Koji Ogiso, Koichi Hayashi
  • Publication number: 20100244634
    Abstract: An actuator includes an ion-conductive polymer layer made of a first ion-conductive polymer, a pair of electrode layers provided one on each side of the ion-conductive polymer layer and made of a second ion-conductive polymer and conductive powder, and ions contained in the ion-conductive polymer layer and electrode layers. The first and second ion-conductive polymers differ in functional group type from each other.
    Type: Application
    Filed: March 19, 2010
    Publication date: September 30, 2010
    Applicant: SONY CORPORATION
    Inventors: Nobuyuki Nagai, Masayuki Sugasawa, Kazuomi Murakami
  • Publication number: 20100244633
    Abstract: An actuator includes: an ion conductive polymer layer including an ion conductive polymer; a pair of electrode layers disposed on both surfaces of the ion conductive polymer layer; and an ionic liquid contained in the ion conductive polymer layer and the electrode layers; wherein the electrode layers contain at least an ion conductive polymer and carbon powder, and kinds of carbon powders included on an inside and an outside of the electrode layers are different from each other.
    Type: Application
    Filed: March 16, 2010
    Publication date: September 30, 2010
    Applicant: SONY CORPORATION
    Inventors: Nobuyuki Nagai, Masayuki Sugasawa, Kazuomi Murakami
  • Patent number: 7805276
    Abstract: In an embodiment, an apparatus and method capable of determining the time and location of a projectile's impact is disclosed. In another embodiment, an apparatus and method capable of determining the time and location of a projectile's impact as well as the direction from whence the projectile came is disclosed.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: September 28, 2010
    Assignee: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: Terry Byers, Frank L. Gibbons, Eric L. Christiansen
  • Patent number: 7795789
    Abstract: A piezoelectric component includes at least one monolithic piezo element, having at least a first electrode layer, at least a second electrode layer and at least one piezoceramic layer located between the electrode layers. The piezoelectric component is characterized in that at least between one of the electrode layers and the piezoceramic layer is provided an uncoupling layer which is in direct contact with at least one of the layers for mechanically uncoupling the electrode layer and the piezoceramic layer. A method for producing such a piezoelectric component is disclosed. The piezoelectric component is used in automotive technique for controlling an internal combustion engine injection valve.
    Type: Grant
    Filed: March 9, 2006
    Date of Patent: September 14, 2010
    Assignee: Siemens Aktiengesellschaft
    Inventor: Carsten Schuh
  • Patent number: 7795788
    Abstract: An IDT electrode (3) on a piezoelectric substrate (2) has an electrode including first metal layers (31a, 31b) formed of titanium or a titanium alloy, or chromium or a chromium alloy and second metal layers (32a, 32b) formed of aluminum or an aluminum alloy, copper or a copper alloy, or gold or a gold alloy, which are laminated alternately. The orientation degrees in the first metal layer (31a) that is closest to the surface of the piezoelectric substrate (2) in the first metal layers (31a, 31b) and the second metal layer (32a) that is closest to the surface of the piezoelectric substrate (2) in the second metal layers (32a, 32b) are higher than the orientation degrees in the upper metal layers. As compared with the prior art where the orientation degrees in the first metal layers (31a, 31b) and the second metal layers (32a, 32b) are not considered, the power handling capability of the IDT electrode (3) can be significantly improved.
    Type: Grant
    Filed: October 25, 2005
    Date of Patent: September 14, 2010
    Assignee: Kyocera Corporation
    Inventors: Yuuko Yokota, Shigehiko Nagamine, Kiyo Yamahara
  • Publication number: 20100225711
    Abstract: A liquid ejecting head is provided which includes a pressure generating room communicating with a nozzle opening, and a piezoelectric element generating a pressure change in the pressure generating room. In the above liquid ejecting head, the piezoelectric element includes a first electrode, a piezoelectric layer provided on the first electrode and having a thickness of 5 ?m or less, and a second electrode provided on the piezoelectric layer at a side opposite to that of the first electrode, the piezoelectric layer contains lead, zirconium, and titanium, and a Schottky barrier value at the interface between the first electrode and the piezoelectric layer is in the range of 0.76 to 1.29 eV.
    Type: Application
    Filed: February 23, 2010
    Publication date: September 9, 2010
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Jiro KATO, Satoshi DENDA, Ichiro ASAOKA
  • Patent number: 7791256
    Abstract: A multi-layer piezoelectric element of high durability wherein the internal electrodes and the external electrodes do not break even when operated continuously over a long period of time under high electric field and high pressure is provided. The first multi-layer piezoelectric element according to the present invention comprises a stack formed by stacking piezoelectric layers and internal electrodes alternately one on another and external electrodes formed on a first side face and on a second side face of the stack, wherein one of the adjacent internal electrodes is connected to the external electrode formed on the first side face and the other internal electrode is connected to the external electrode formed on the second side face, and the external electrodes include an electrically conductive material and glass and is formed from a porous electrically conductive material that has a three-dimensional mesh structure.
    Type: Grant
    Filed: September 22, 2004
    Date of Patent: September 7, 2010
    Assignee: Kyocera Corporation
    Inventor: Shigenobu Nakamura
  • Patent number: 7791248
    Abstract: An example flexoelectric piezoelectric composite has a piezoelectric response, which may be a direct piezoelectric effect, a converse piezoelectric effect, both effects, or only one effect. The flexoelectric composite comprises a first material, which may be substantially isotropic, the first material being present in a shaped form. The shaped form gives a piezoelectric response due to a flexoelectric effect in the first material. The shaped form may have ?m symmetry, or a polar variant of this form such as 4 mm symmetry.
    Type: Grant
    Filed: June 28, 2007
    Date of Patent: September 7, 2010
    Assignee: The Penn State Research Foundation
    Inventors: L. Eric Cross, Wenyi Zhu, Nan Li, John Y. Fu
  • Patent number: 7786655
    Abstract: The present invention relates to piezoelectric vibrators such as a resonator used as a timing element, discriminator, filter or the like, and fabricating methods thereof. The piezoelectric vibrators of the present invention may be fabricated by forming a piezoelectric body of piezoelectric sheets, of which the thickness is controlled, and simultaneously sintering the sheets along with cover layers, on which grooves are formed. Also, the piezoelectric vibrator of the present invention is fabricated by laminating the piezoelectric sheets, of which the thickness is controlled, providing internal electrodes between the sheets, and forming external electrodes insulated from the internal electrodes.
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: August 31, 2010
    Assignee: INNOCHIPS TECHNOLOGY
    Inventors: In Kil Park, Duk Hee Kim