With Positive Or Negative Ion Acceleration Patents (Class 313/359.1)
  • Patent number: 8319410
    Abstract: The filament clamp assembly has a pair of bifurcated clamps to hold the connecting leads of a filament within a cavity of a cathode of a separate cathode assembly. The filament clamp assembly is mounted on the insulator block in self-aligning relation. The cathode assembly has a tungsten cathode with an internal cavity to receive the filament that is secured within a retainer shield made of one of tungsten, molybdenum and graphite by a threaded graphite cylindrical collar.
    Type: Grant
    Filed: December 29, 2009
    Date of Patent: November 27, 2012
    Assignee: Ion Technology Solutions, LLC
    Inventor: Manuel A. Jerez
  • Patent number: 8314404
    Abstract: An ion beam system uses a separate accelerating electrode, such as a resistive tube, to accelerate the ions while maintaining a low electric field at an extended, that is, distributed ion source, thereby improving resolution. A magneto-optical trap can be used as the ion source.
    Type: Grant
    Filed: September 20, 2010
    Date of Patent: November 20, 2012
    Assignees: FEI Company, The United States of America as represented by the Secretary of Commerce, The National Institute of Standards and Technology
    Inventors: Jabez McClelland, Brenton J. Knuffman, Adam V. Steele, Jonathan H. Orloff
  • Patent number: 8299713
    Abstract: A method of accelerating charged particles using a laser pulse fired through a plasma channel contained in a capillary, wherein the plasma waveguide has deviations along its length that cause deviations in the plasma density contained therein, the deviations in plasma density acting to promote charged particle injection into a wake of a passing laser pulse. A radiation source based on a laser-driven plasma accelerator in a plasma waveguide in which the plasma waveguide and/or laser injection process is/are controlled so as to produce an undulating path for the laser pulse through the waveguide, the undulation exerting a periodic transverse force on charged particles being accelerated in the wake of the laser pulse, the resulting charged particle motion causing controlled emission of high frequency radiation pulses.
    Type: Grant
    Filed: September 11, 2007
    Date of Patent: October 30, 2012
    Assignee: Isis Innovation Limited
    Inventors: Simon Martin Hooker, Anthony Joseph Gonsalves, Dino Anthony Jaroszynski, Wim Pieter Leemans
  • Publication number: 20120200217
    Abstract: A method of production of a radio frequency accelerator which has a tubular part 1 which forms an acceleration cavity, including a temporary assembly step of making a plurality of component members 11 to 14 which have shapes obtained by splitting the tubular part 1 mate with each other to temporarily assemble them into the shape of the tubular part 10 and a welding step of welding the plurality of component members 11 to 14 together. The temporary assembly step includes a step of placing, inside of the tubular part 1, support members 21 for contacting the inside surface of the tubular part 1 and supporting the tubular part 1 from the inside, and the welding step includes a step of welding the plurality of component members 11 to 14 along the butt lines 51 by friction stir welding.
    Type: Application
    Filed: October 14, 2010
    Publication date: August 9, 2012
    Applicants: TOKYO INSTITUTE OF TECHNOLOGY, TIM CORPORATION, INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION
    Inventors: Noriyosu Hayashizaki, Toshiyuki Hattori, Takuya Ishibashi, Fujio Naito, Eiichi Takasaki, Hideaki Yamauchi
  • Patent number: 8205428
    Abstract: A standard 4-pole electric motor stator with capacitive plates in-line with the magnetic poles, but electrically 90° out of phase, produces two Lorentz force geometries 90° out of phase with each other (i.e., vertical, horizontal). An alternating source electrically rotates this pair of Lorentz geometries producing a propagating electromagnetic wave at the source frequency within the vacant internal cavity. Any charged particle within the cavity and along its axis will be accelerated or decelerated from an initial velocity via the Lorentz force. The rotating geometry provides for the coupling of the Lorentz force through a current loop and diamagnetism, providing acceleration and deceleration of non-charged particles. The force coupling is dependent upon the material's electromagnetic properties, the frequencies generated by the capacitive stator, and the velocity of the particles within the capacitive stator's influence.
    Type: Grant
    Filed: February 5, 2009
    Date of Patent: June 26, 2012
    Assignee: Lockheed Martin Corporation
    Inventor: Dale W. Boren
  • Patent number: 8164066
    Abstract: The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system.
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: April 24, 2012
    Assignee: VG Systems Limited
    Inventors: Bryan Barnard, Christopher Glenister
  • Patent number: 8159118
    Abstract: An electron gun includes the following: a primary thermionic electron source, a secondary thermionic electron source and a focusing electrode disposed within a first housing that includes one or more reference members adjustably attached to a housing support connected to a first platform; an anode and one or more focusing coils disposed within a second housing comprising one or more insulating members adjustably connected to the first platform; and one or more deflection coils disposed within a third housing connected to the second housing and located opposite said first housing.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: April 17, 2012
    Assignee: United Technologies Corporation
    Inventors: Viktor A. Tymashov, Oleg L. Zhdanov, Sergiy I. Ryabenko, Andriy A. Tsepkalov, Steven M. Burns
  • Publication number: 20120074874
    Abstract: The present invention provides an electron emitting element, comprising: a first electrode; an insulating fine particle layer formed on the first electrode and composed of insulating fine particles; and a second electrode formed on the insulating fine particle layer, wherein the insulating fine particle layer is provided with recesses formed in a surface thereof, the surface facing the second electrode, the recesses each having a depth smaller than a thickness of the insulating fine particle layer, and when a voltage is applied between the first electrode and the second electrode, electrons provided from the first electrode are accelerated in the insulating fine particle layer to be emitted though the second electrode.
    Type: Application
    Filed: February 23, 2011
    Publication date: March 29, 2012
    Inventors: Kanako HIRATA, Hiroyuki HIRAKAWA, Ayae NAGAOKA, Yasuo IMURA, Tadashi IWAMATSU
  • Publication number: 20120056541
    Abstract: Provided is an ion generating device for an air-conditioner duct, which can be easily attached to the inside of an existing air conditioner duct and can ensure a desired ion generation quantity. The ion generating elements of the sub-units (3, 4, 5) of the ion generating device are connected to the drive circuit of the ion generating device main unit (2), and are driven by the drive circuit.
    Type: Application
    Filed: February 2, 2010
    Publication date: March 8, 2012
    Inventors: Toshio Mamiya, Masato Urushisaki, Hiroaki Kiyohara
  • Patent number: 8122701
    Abstract: An electrostatic colloid thruster for implementing a method of ionizing a liquid is disclosed herein. The electrostatic colloid thruster includes an electrically conductive extractor having a plurality of holes defined therethrough; an ultrasonic atomizer having an electrically conductive atomization surface at least partially facing the extractor and being arranged relative thereto so as to define a gap; a reservoir system in fluid communication with the atomization surface; and an electrical power source in electrical communication with both the extractor and the atomization surface. The apparatus and method are generally utile in various applications including, for example, spacecraft propulsion, paint spray techniques, semiconductor fabrication, biomedical processes, and the like.
    Type: Grant
    Filed: August 23, 2010
    Date of Patent: February 28, 2012
    Assignee: The Boeing Company
    Inventor: Weidong Song
  • Patent number: 8080930
    Abstract: Spindt-type field-emission cathodes for use in electric propulsion (EP) systems having self-assembling nanostructures that can repeatedly regenerate damaged cathode emitter nanotips. A nanotip is created by applying a negative potential near the surface of a liquefied base metal to create a Taylor cone converging to a nanotip, and solidifying the Taylor cone for use as a field-emission cathode. When the nanotip of the Taylor cone becomes sufficiently blunted or damaged to affect its utility, the base metal is re-liquefied by application of a heat source, a negative potential is reapplied to the surface of the base metal to recreate the Taylor cone, and a new nanotip is generated by solidifying the base metal.
    Type: Grant
    Filed: September 7, 2007
    Date of Patent: December 20, 2011
    Assignee: Michigan Technological University
    Inventor: Lyon Bradley King
  • Patent number: 7999239
    Abstract: Techniques for reducing an electrical stress in a acceleration/deceleration system are disclosed. In one particular exemplary embodiment, the techniques may be realized as an acceleration/deceleration system. The acceleration/deceleration system may comprise an acceleration column including a plurality of electrodes having apertures through which a charged particle beam may pass. The acceleration/deceleration system may also comprise a plurality of voltage grading components respectively electrically coupled to the plurality of electrodes. The acceleration/deceleration system may further comprise a plurality of insulated conductors disposed proximate the plurality of voltage grading components to modify an electrical field about the plurality of voltage grading components.
    Type: Grant
    Filed: January 2, 2008
    Date of Patent: August 16, 2011
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Kasegn D. Tekletsadik, Russell J. Low
  • Publication number: 20110188638
    Abstract: The disclosure relates to systems and methods for interleaving operation of a linear accelerator that use a magnetron as the source of electromagnetic waves for use in accelerating electrons to at least two different ranges of energies. The accelerated electrons can be used to generate x-rays of at least two different energy ranges. In certain embodiments, the accelerated electrons can be used to generate x-rays of at least two different energy ranges. The systems and methods are applicable to traveling wave linear accelerators.
    Type: Application
    Filed: January 29, 2010
    Publication date: August 4, 2011
    Inventors: Paul Dennis Treas, Roger Heering Miller
  • Patent number: 7952069
    Abstract: A mass spectrometer includes an ionization chamber, a temperature control unit which controls the temperature in the ionization chamber to vaporize a sample in at least one of solid and liquid state in the ionization chamber, an introduction unit which introduces the sample into the ionization chamber, an ion supply unit which supplies ions to the ionization chamber to ionize, in the ionization chamber, the sample vaporized in the ionization chamber, and a mass analyzer which measures the mass of the molecules of the ionized sample.
    Type: Grant
    Filed: April 28, 2009
    Date of Patent: May 31, 2011
    Assignee: Canon Anelva Corporation
    Inventors: Yoshiro Shiokawa, Megumi Nakamura, Harumi Maruyama, Aiko Wada
  • Patent number: 7947969
    Abstract: A stacked conformation radiotherapy system capable of homogenizing a radiation dose distribution, including an irradiation head and irradiation control means. The irradiation head projects a particle beam accelerated by an accelerator, toward an object to-be-irradiated, and it includes wobbler electromagnets for deflecting and scanning the particle beam. In carrying out stacked conformation radiotherapy by deflecting and scanning the particle beam, the irradiation control means subjects the wobbler electromagnets to magnetization controls so that the particle beam may depict a one-stroke revolving orbit which begins with a start point and returns to the start point, and it performs a control so that the irradiation period of the particle beam to be outputted from the irradiation head may become integral times a wobbler cycle which is required for the particle beam to make one revolution of the revolving orbit.
    Type: Grant
    Filed: January 31, 2008
    Date of Patent: May 24, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventor: Yuehu Pu
  • Patent number: 7931784
    Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful products, such as fuels. For example, systems can use feedstock materials, such as cellulosic and/or lignocellulosic materials and/or starchy materials, to produce ethanol and/or butanol, e.g., by fermentation.
    Type: Grant
    Filed: April 3, 2009
    Date of Patent: April 26, 2011
    Assignee: Xyleco, Inc.
    Inventor: Marshall Medoff
  • Publication number: 20110089808
    Abstract: The invention relates to an ion accelerator arrangement comprising an ionization chamber which is surrounded by a chamber wall and a magnetic arrangement that is disposed outside the chamber wall. Steps are taken to dissipate lost heat occurring on the chamber wall, and advantageous solutions are provided to protect permanent-magnet elements of the magnetic arrangement.
    Type: Application
    Filed: September 12, 2008
    Publication date: April 21, 2011
    Inventors: Hans-Peter Harmann, Norbert Koch, Mathias Clages
  • Publication number: 20110080085
    Abstract: The invention relates to a surface section that is exposed to an ion flow, in particular for a drive arrangement in a spacecraft, comprising an electrostatic ion accelerator arrangement. According to the invention, in order to reduce erosion, an intermediate potential energy surface is provided, the surface being advantageous in that it allows a magnetic field that is essentially parallel to the surface section to be formed.
    Type: Application
    Filed: September 12, 2008
    Publication date: April 7, 2011
    Inventors: Hans-Peter Harmann, Norbert Koch, Guenter Kornfeld
  • Publication number: 20100296843
    Abstract: An electron emitting element of the present invention includes an electron acceleration layer sandwiched between an electrode substrate and a thin-film electrode, and the electron acceleration layer includes a fine particle layer containing insulating fine particles and a basic dispersant. This makes it possible to provide an electron emitting element which does not cause insulation breakdown in an insulating layer and which can be produced at a low cost.
    Type: Application
    Filed: February 2, 2010
    Publication date: November 25, 2010
    Inventors: Hiroyuki Hirawaka, Ayae Nagaoka, Yasuo Imura, Tadashi Iwamatsu
  • Patent number: 7791260
    Abstract: A gas-fed hollow cathode keeper can reduce ion bombardment erosion by expelling gas through the keeper faceplate. The expelled gas effectively creates a high-pressure “shield” around the keeper such that bombarding ions suffer energy-reducing collisions before impacting the keeper. If the bombarding ion energy is reduced enough, the erosion is eliminated since sputtering is a threshold phenomenon.
    Type: Grant
    Filed: July 26, 2007
    Date of Patent: September 7, 2010
    Assignee: The Regents of The University of Michigan
    Inventors: Alec Gallimore, Joshua Rovey
  • Patent number: 7786431
    Abstract: A beam generator for generating an electrically neutral dual-particle (proton and electron) beam with a uniform magnetic pole orientation imposed on the particles. The uniform orientation gives the dual-particle beam a uniform magnetic field, enabling magnetic modulation of the beam and making the beam self-collimating. Proton and electron beams are generated separately but under common control to ensure equal particle densities to ensure net electrical neutrality when combined. The proton and electron beams may also be concurrently magnetically or electrostatically modulated before being combined. A magnetic lens imposes uniform right, neutral, or left spin on the combined beam. A resonant chamber with fixed or variable resonant frequency determines the frequency of a carrier signal modulated by the modulated combined beam. Electric neutrality prevents detection of the beam with antennas that rely on a signal inducing a voltage on a conductor.
    Type: Grant
    Filed: June 17, 2008
    Date of Patent: August 31, 2010
    Inventors: Raymond S. Donofrio, Richard von Hack-Prestinary, Larry Fullerton
  • Patent number: 7768187
    Abstract: The invention relates to charged particle beam accelerators, in particular electron beam accelerators, and can be used for physics, chemistry and medicine. The inventive charged particle beam accelerator comprises a metallic shell fitted with a dielectric material layer arranged therein, and a vacuum channel for electron transit embodied along the central symmetry axis of said metallic shell. In addition, the metallic shell is fitted with a ferroelectric material layer arranged therein. Said ferroelectric material layer can be arranged between the metallic shell and the dielectric material layer or in said dielectric material layer. The invention provides an object with a very important property, i.e. said property makes it possible to control the accelerator parameters and regulate the phase balance of the charged particle beam and the wave that accelerates the particles.
    Type: Grant
    Filed: March 2, 2004
    Date of Patent: August 3, 2010
    Inventors: Alexei Dmitrievich Kanareikin, Elizaveta Arkadievna Nenasheva
  • Publication number: 20100187970
    Abstract: Apparatus for the production of a charged particle beam, comprising: an ion source plasma chamber (104), having a door (106), and an accelerator (102) mounted on the face of the door remote from the ion source plasma chamber.
    Type: Application
    Filed: February 21, 2008
    Publication date: July 29, 2010
    Applicant: Nordiko Technical Services Limited
    Inventors: Timothy Andrew James Holmes, Mervyn Howard Davis
  • Patent number: 7763873
    Abstract: An ion radiation therapy machine provides a steerable beam for treating a tumor within the patient where the exposure spot of the beam is controlled in width and/or length to effect a flexible trade-off between treatment speed, accuracy, and uniformity.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: July 27, 2010
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: Ryan Thomas Flynn, Thomas R. Mackie
  • Patent number: 7710007
    Abstract: Devices and methods for producing relativistic particles are provided. The devices and methods involve collision of a thin collimated plasma layer from opposite sides with two counter-propagating ultra-intense laser (UL) electromagnetic (EM) pulses. The plasma layer is sufficiently thin so that the pulses penetrate and conjointly propagate through the plasma layer. The Lorenz force between induced skin currents and the magnetic field of the propagating pulses accelerates a number of “in-phase” plasma particles to relativistic velocities.
    Type: Grant
    Filed: February 15, 2007
    Date of Patent: May 4, 2010
    Assignee: William Marsh Rice University
    Inventor: Edison Liang
  • Patent number: 7667379
    Abstract: In accordance with one embodiment of the present invention, the hollow-cathode apparatus comprises a small-diameter tantalum tube with a plurality of tantalum-foil radiation shields, wherein the plurality of shields in turn comprise one or more spiral windings external to that tube and approximately flush with the open end from which electron emission takes place. The axial length of at least one of the inner windings (closer to the tantalum tube) is equal to or less than approximately half the length of the tantalum tube. An enclosed keeper surrounds the cathode. To start the cathode, a flow of ionizable inert gas, usually argon, is initiated through the cathode and out the open end. An electrical discharge is then started between the keeper and the hollow cathode. When heated to operating temperature, electrons exit from the open end of the hollow cathode.
    Type: Grant
    Filed: January 25, 2006
    Date of Patent: February 23, 2010
    Assignee: Kaufman & Robinson, Inc.
    Inventors: Harold R. Kaufman, James R. Kahn
  • Publication number: 20100033115
    Abstract: A dc accelerator system able to accelerate high currents of proton beams at high energies is provided. The accelerator system includes a dc high-voltage, high-current power supply, an evacuated ion accelerating tube, a proton ion source, a dipole analyzing magnet and a vacuum pump located in the high-voltage terminal. The high-current, high-energy dc proton beam can be directed to a number of targets depending on the applications such as boron neutron capture therapy BNCT applications, NRA applications, and silicon cleaving.
    Type: Application
    Filed: August 11, 2009
    Publication date: February 11, 2010
    Inventors: Marshall R. Cleland, Richard A. Galloway, Leonard DeSanto, Yves Jongen
  • Patent number: 7645994
    Abstract: Disclosed is a device for outputting high and/or low energy X-rays, in which the electron gun power supply provides power to the electron linear accelerating tube under the control of the control system; the microwave power source accelerates electron beams generated by the electron linear accelerating tube under the control of the control system; the electron linear accelerating tube is connected to the electron gun power supply and the microwave power source respectively, to generate high energy electron beams; the high-voltage electron gun power supply provides power to the high-voltage electron gun under the control of the control system; the high-voltage electron gun is connected to the voltage electron gun power supply to generate low energy electron beams; the radiation target receives the high energy electron beams to generate high energy transmission X-rays, and/or receive the low energy electron beams to generate low energy reflection X-rays.
    Type: Grant
    Filed: December 28, 2006
    Date of Patent: January 12, 2010
    Assignees: Tsinghua University, Nuctech Company Limited
    Inventors: Chuanxiang Tang, Huaibi Chen, Yinong Liu, Jianping Cheng, Yaohong Liu, Renkai Li
  • Patent number: 7629589
    Abstract: An apparatus and/or method for controlling an ion beam may be provided, and/or a method for preparing an extraction electrode for the same may be provided. In the apparatus, a plurality of extraction electrodes may be disposed in a path of an ion beam. At least one extraction electrode may include a plurality of sub-grids.
    Type: Grant
    Filed: February 7, 2007
    Date of Patent: December 8, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung-Wook Hwang, Do-Haing Lee, Chul-Ho Shin, Jong-Woo Sun
  • Patent number: 7622721
    Abstract: A focused ion source based on a Hall thruster with closed loop electron drift and a narrow acceleration zone is disclosed. The ion source of the invention has an ion focusing system consisting of two parts. The first part is a ballistic focusing system in which the aperture through which the beam exits the discharge channel is tilted. The second is a magnetic focusing system which focuses the ion beam exiting the discharge channel by canceling a divergent magnetic field present at the aperture through which the beam exits the discharge channel. The ion source of the invention also has an in-line hollow cathode capable of forming a self-sustaining discharge. The invention further reduces substrate contamination, while increasing the processing rate. Further the configuration disclosed allows the ion source to operate at lower operational gas pressures.
    Type: Grant
    Filed: February 9, 2007
    Date of Patent: November 24, 2009
    Inventors: Michael Gutkin, Alexander Bizyukov, Vladimir Sleptsov, Ivan Bizyukov, Konstantin Sereda
  • Patent number: 7602111
    Abstract: A plasma accelerating apparatus and a plasma processing system having the same are provided. The apparatus includes a channel comprising an inner wall, an outer wall spaced apart from the inner wall by a distance for encircling the inner wall, and an end wall connected to an end of the inner wall and the outer wall to form an outlet port at the other ends of the walls; a gas supply portion to supply a gas to an inside of the channel; and a plasma generating and accelerating portion to supply ionization energy to the gas to generate a plasma beam and to accelerate the generated plasma beam toward the outlet port, wherein a coating layer comprising a first layer composed of a carbon nano tube is formed on at least one of the inner wall, the outer wall, and the end wall of the channel.
    Type: Grant
    Filed: April 19, 2006
    Date of Patent: October 13, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Won-tae Lee
  • Patent number: 7589474
    Abstract: A closed drift ion source is disclosed. The ion source has an open end 1 and a central axis 150 around which are arranged outer magnetic pole piece 3, inner magnetic pole piece 5, anode 2, shield 6 and back magnetic shunt 17. In one embodiment the anode 2 and inner magnetic pole piece 5 are annular. Permanent magnets 7 are located behind the shield 6 and in contact with outer magnetic pole piece 3 and the back magnetic shunt 17. As a result the magnetic field lines pass through the magnetic pole pieces and a mirror magnetic field is set up in the discharge region between them. The inner magnetic pole piece 5 is hollow which facilitates production of the mirror magnetic field.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: September 15, 2009
    Assignee: City University of Hong Kong
    Inventors: Paul K. Chu, Deli Tang, Shihao Pu, Honghui Tong, Qingchuan Chen
  • Patent number: 7584601
    Abstract: Several methods of increasing the thrust and energy efficiency of charged particle jet engines operating in a gaseous or liquid medium have been developed. We identify the three main components of charged particle thrust generation and show how to take maximum advantage of each. We also describe several structures and techniques to reduce the energy associated with the generation of charged particles and to minimize the number of charged particles needed to further increase energy efficiency. In addition to the structures and techniques used to increase thrust and energy efficiency, we have also developed several structures and techniques for efficiently controlling the amount and direction of thrust. Finally, we show many uses of these charged particle jet engines and ways to control them.
    Type: Grant
    Filed: September 1, 2005
    Date of Patent: September 8, 2009
    Inventors: Tristram Walker Metcalfe, III, Walter Timmons Cardwell, Jr.
  • Patent number: 7576342
    Abstract: The invention is intended to increase the number of patients treatable using one wheel having a thickness varied in the rotating direction to change energy of an ion beam passing the wheel. Ion beam delivery equipment for irradiating an ion beam to a patient for treatment comprises a beam generator for producing and accelerating the ion beam, an beam delivery nozzle including a range modulation wheel which has a predetermined thickness distribution in the rotating direction and is rotated on a travel passage of the ion beam generated from the beam generator to control a range of the ion beam, and an irradiation controller for controlling the beam producing and accelerating operation of the beam generator in accordance with the phase of rotation of the range modulation wheel.
    Type: Grant
    Filed: June 6, 2007
    Date of Patent: August 18, 2009
    Assignees: Hitachi, Ltd., Board of Regents, University of Texas System
    Inventors: Kazuo Hiramoto, Hiroshi Akiyama, Masaki Yanagisawa, Hisataka Fujimaki, Alfred P. Smith, Wayne Newhauser
  • Patent number: 7576339
    Abstract: An ion implantation apparatus includes an ion beam source for generating an ion beam; an implantation energy controller disposed on a path of the ion beam for controlling the ion implantation energy of the ion beam so that an ion beam having a first implantation energy is created for a first period of time and an ion beam having a second implantation energy is created for a second period of time; a beam line for accelerating the ion beam; and an end station for mounting a substrate, into which the ion beam accelerated by the beam line is implanted onto the substrate.
    Type: Grant
    Filed: June 2, 2006
    Date of Patent: August 18, 2009
    Assignee: Hynix Semiconductor Inc.
    Inventors: Kyoung Bong Rouh, Seung Woo Jin, Min Yong Jung, Yong Soo Jung
  • Patent number: 7554106
    Abstract: An ion implantation apparatus comprises an ion beam source for generating an initial ion beam, a bundled ion beam generator adapted to change the initial ion beam into a bundled ion beam based on a predetermined frequency to pass the bundled ion beam for a first time while passing the initial ion beam for a second time, a beam line for accelerating the ion beam having passed through the ion beam generator, and an end station for arranging a wafer therein to allow the ion beam accelerated by the beam line to be implanted in the wafer, the end station operating to move the wafer in a direction perpendicular to an ion beam implantation direction, so as to implant the bundled ion beam in a first region of the wafer and the initial ion beam in a second region of the wafer.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: June 30, 2009
    Assignee: Hynix Semiconductor Inc.
    Inventors: Kyoung Bong Rouh, Seung Woo Jin, Min Yong Lee, Yong Soo Jung
  • Publication number: 20090153015
    Abstract: Spindt-type field-emission cathodes for use in electric propulsion (EP) systems having self-assembling nanostructures that can repeatedly regenerate damaged cathode emitter nanotips. A nanotip is created by applying a negative potential near the surface of a liquefied base metal to create a Taylor cone converging to a nanotip, and solidifying the Taylor cone for use as a field-emission cathode. When the nanotip of the Taylor cone becomes sufficiently blunted or damaged to affect its utility, the base metal is re-liquefied by application of a heat source, a negative potential is reapplied to the surface of the base metal to recreate the Taylor cone, and a new nanotip is generated by solidifying the base metal.
    Type: Application
    Filed: September 7, 2007
    Publication date: June 18, 2009
    Applicant: MICHIGAN TECHNOLOGICAL UNIVERSITY
    Inventor: Lyon Bradley King
  • Patent number: 7547891
    Abstract: The present invention provides ion sampling apparatuses that can be used in a fast polarity-switching electric field. In some embodiments, the ion sampling apparatus comprises a capillary made with an insulator, with a resistive inner or outer surface. Devices and systems comprising the ion sampling apparatuses, as well as methods of use thereof, are also provided.
    Type: Grant
    Filed: February 16, 2007
    Date of Patent: June 16, 2009
    Assignee: Agilent Technologies, Inc.
    Inventors: Alex Mordehai, Craig P. Love, Mark H. Werlich
  • Publication number: 20090134804
    Abstract: The present patent letters discloses a Hall Current accelerator with a solenoid Hall field, a collimated gas source, an anode, intermediate Hall effect ionization magnetic field structures and intermediate acceleration electrodes. The Hall field in this case is the end cusp field(s) of a common solenoid magnetic field.
    Type: Application
    Filed: November 28, 2007
    Publication date: May 28, 2009
    Inventor: Mark Edward Morehouse
  • Patent number: 7498588
    Abstract: A method of producing an ion beam in a tandem accelerator, the method includes the acts of insulating, in a cavity containing an insulating gas under pressure, a beam tube having first and second ends and a terminal situated between the first and second ends; seating, using a load lock valve, the insulating gas under pressure; generating an operating voltage using a first voltage source situated outside the cavity when the operating voltage is less than or equal to a threshold value; generating the operating voltage using a second voltage source situated inside the cavity when the operating voltage is greater than the threshold value; coupling the terminal to the first or second voltage sources; generating, using a particle source, an ion beam; and accelerating the ion beam in a first and second parts of the beam tube.
    Type: Grant
    Filed: May 7, 2008
    Date of Patent: March 3, 2009
    Assignee: International Business Machines Corporation
    Inventors: Michael S. Gordon, Carl Emil Bohnenkamp
  • Patent number: 7459704
    Abstract: Ion sources and methods for generating molecular ions in a cold operating mode and for generating atomic ions in a hot operating mode are provided. In some embodiments, first and second electron sources are located at opposite ends of an arc chamber. The first electron source is energized in the cold operating mode, and the second electron source is energized in the hot operating mode. In other embodiments, electrons are directed through a hole in a cathode in the cold operating mode and are directed at the cathode in the hot operating mode. In further embodiments, an ion beam generator includes a molecular ion source, an atomic ion source and a switching element to select the output of one of the ion sources.
    Type: Grant
    Filed: November 8, 2005
    Date of Patent: December 2, 2008
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Joseph C. Olson, Anthony Renau, Donna L. Smatlak, Kurt Deckerlucke, Paul Murphy, Alexander S. Perel, Russell J. Low, Peter Kurunczi
  • Patent number: 7446467
    Abstract: An image display apparatus for forming an image in an image displaying region provided with a vacuum chamber having an electron source substrate and an image forming substrate has an ion pump for evacuating the vacuum chamber by an action of a magnet-filed-forming portion through an aperture portion formed in the electron source substrate or an image displaying substrate, wherein the magnet-filed-forming portion is arranged so that a shadow formed by perpendicularly projecting the magnet-filed-forming portion onto the electron source substrate or the image forming substrate can be located outside the image displaying region.
    Type: Grant
    Filed: August 15, 2005
    Date of Patent: November 4, 2008
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hisanori Tsuda, Masaru Kamio, Ihachiro Gofuku, Yasue Sato
  • Patent number: 7439526
    Abstract: The fabrication of modern semiconducting integrated circuits often requires implantation steps that involve high currents of low-energy charged dopant atoms. When employing such beams, the addition of electrons or negative ions for neutralizing the effects of space charge is often crucial for achieving success. Without this supplement, ion beams can ‘blow-up’ causing loss of intensity and disruption of beam focusing. In the present disclosure, methods are presented for introducing and constraining neutralizing low-energy electrons and negative ions within the boundaries of ribbon beams within regions of magnetic field deflection. Apparatus is described for maintaining neutralization based upon a reduction of electron losses, plasma bridge connections and secondary electron production. As part of plasma introduction to the deflection region a novel cryogenic pumping apparatus selectively removes neutral atoms from a plasma stream.
    Type: Grant
    Filed: December 20, 2005
    Date of Patent: October 21, 2008
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Kenneth H. Purser, Norman L. Turner
  • Patent number: 7420182
    Abstract: This invention features a combined radio frequency (RF) and Hall Effect ion source and plasma accelerator system including a plasma accelerator having an anode and a discharge zone, the plasma accelerator for providing plasma discharge. A gas distributor introduces a gas into the plasma accelerator. A cathode emits electrons attracted to the anode for ionizing the gas and neutralizing ion flux emitted from the plasma accelerator. An electrical circuit coupled between the anode and the cathode having a DC power source provides DC voltage. A magnetic circuit structure including a magnetic field source establishes a transverse magnetic field in the plasma accelerator that creates an impedance to the flow of the electrons toward the anode to enhance ionization of the gas to create plasma and which in combination with the electric circuit establishes an axial electric field in the plasma accelerator.
    Type: Grant
    Filed: April 27, 2006
    Date of Patent: September 2, 2008
    Assignee: Busek Company
    Inventors: Vladimir Hruby, Kurt Hohman, Thomas Brogan
  • Patent number: 7405411
    Abstract: In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The multi-piece outer cathode allows precision adjustments to be made, thereby permitting adjustment of the magnetic gap between the inner and outer cathodes. This allows improved performance to be realized, and/or prolonged operating life of certain components. This may also permit multiple types of gap adjustment to be performed with different sized outer cathode end pieces. In certain example embodiments, cathode fabrication costs may also be reduced.
    Type: Grant
    Filed: May 6, 2005
    Date of Patent: July 29, 2008
    Assignee: Guardian Industries Corp.
    Inventor: Hugh A. Walton
  • Patent number: 7397049
    Abstract: A system, method and program product for determining parallelism of an ion beam using a refraction method, are disclosed. One embodiment includes determining a first test position of the ion beam while not exposing the ion beam to an acceleration/deceleration electrical field, determining a second test position of the ion beam while exposing the ion beam to an acceleration/deceleration electrical field, and determining the parallelism of the ion beam based on the first test position and the second test position. The acceleration/deceleration electrical field acts to refract the ion beam between the two positions when the beam is not parallel, hence magnifying any non-parallelism. The amount of refraction, or lateral shift, can be used to determine the amount of non-parallelism of the ion beam. An ion implanter system and adjustments of the ion implanter system based on the parallelism determination are also disclosed.
    Type: Grant
    Filed: March 22, 2006
    Date of Patent: July 8, 2008
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Raymond Callahan, David Olson, Wilhelm P. Platow, Stanislav S. Todorov
  • Patent number: 7391147
    Abstract: A light detector having a cathode wafer, a cavity wafer and an anode wafer. The cathode wafer may be bonded to one side of the cavity wafer and the anode wafer may be bonded to another side of the cavity wafer. The cathode wafer may have numerous cathodes, the anode wafer numerous anodes and the cavity wafer numerous cavities which may be aligned on a one-to-one basis to form a wafer structure of a plurality of detectors which may be diced into separable detector chips. When there is a voltage potential across a cathode and an anode, and a gas such as Ne or the like in the cavity, a reception of light such as ultra violet may result in an electronic discharge between the cathode and anode of the light detector.
    Type: Grant
    Filed: December 12, 2003
    Date of Patent: June 24, 2008
    Assignee: Honeywell International Inc.
    Inventors: Barrett E. Cole, Robert E. Higashi
  • Patent number: 7381949
    Abstract: A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: June 3, 2008
    Assignee: Coincident Bearns Licensing Corporation
    Inventor: Michael Mauck
  • Patent number: 7378672
    Abstract: A particle beam therapeutic apparatus can ensure the uniformity of dose distribution by overlapping the desired loci of the irradiation of a particle beam a reduced number of times. A flow of a particle beam transported so as to be irradiated to a diseased part is caused to deflect in two mutually orthogonal directions perpendicular to the direction of travel of the particle beam. The irradiation position of the particle beam is scanned, upon each period, in a manner to return to a position of irradiation located at the start of the period, whereby a plurality of loci drawn within one period are overlapped with one another thereby to irradiate a desired planned dose to the diseased part. The particle beam can be interrupted only at the end of the period.
    Type: Grant
    Filed: October 4, 2005
    Date of Patent: May 27, 2008
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Hisashi Harada
  • Publication number: 20080111461
    Abstract: Devices and methods for producing relativistic particles are provided. The devices and methods involve collision of a thin collimated plasma layer from opposite sides with two counter-propagating ultra-intense laser (UL) electromagnetic (EM) pulses. The plasma layer is sufficiently thin so that the pulses penetrate and conjointly propagate through the plasma layer. The Lorenz force between induced skin currents and the magnetic field of the propagating pulses accelerates a number of “in-phase” plasma particles to relativistic velocities.
    Type: Application
    Filed: February 15, 2007
    Publication date: May 15, 2008
    Inventor: Edison Liang