Surface Condition Patents (Class 356/237.2)
  • Patent number: 10909673
    Abstract: Systems and methods for detecting the cracks in illuminated electronic device screens are disclosed. In one embodiment, the method includes receiving an image of an electronic device screen and retrieving a plurality of kernels, each having values corresponding to a line region and a non-line region, with the orientation of the line region and the non-line region differing for each kernel. At least some of the kernels are applied to the image to obtain, at various locations of the image, values corresponding to the line regions and the non-line regions. Based on the values corresponding to the line regions and the non-line regions, cracks are automatically identified in the electronic device screen.
    Type: Grant
    Filed: March 18, 2019
    Date of Patent: February 2, 2021
    Assignee: ecoATM, LLC
    Inventors: Babak Forutanpour, Jeffrey Ploetner
  • Patent number: 10865139
    Abstract: A large-size synthetic quartz glass substrate has a diagonal length of at least 1,000 mm. Provided that an effective range is defined on the substrate surface, and the effective range is partitioned into a plurality of evaluation regions such that the evaluation regions partly overlap each other, a flatness in each evaluation region is up to 3 ?m. From the quartz glass substrate having a high flatness and a minimal local gradient within the substrate surface, a large-size photomask is prepared.
    Type: Grant
    Filed: May 7, 2018
    Date of Patent: December 15, 2020
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Yoko Ishitsuka, Atsushi Watabe, Daijitsu Harada, Masaki Takeuchi
  • Patent number: 10863661
    Abstract: A substrate working device including: an imaging device configured to image a substrate; a memory device configured to memorize various information; and an image processing device configured to perform, when specified work is performed with respect to multiple substrates, for a leading substrate, leading-substrate processing of performing imaging processing for detecting a specified detection target required for the specified work with respect to a leading image obtained by imaging the leading substrate using the imaging device, acquiring region information related to a region in the leading image in which the detection target was detected, and memorizing the region information in the memory device, and, for subsequent substrates except for the leading substrate, subsequent-substrate processing of setting a partial processing region in a subsequent image of the subsequent substrate captured by the imaging device based on the region information, and performing the image processing with respect to the set proce
    Type: Grant
    Filed: February 23, 2017
    Date of Patent: December 8, 2020
    Assignee: FUJI CORPORATION
    Inventors: Masafumi Amano, Yuki Inaura, Mikiya Suzuki, Shuichiro Kito
  • Patent number: 10845187
    Abstract: Remote measurements using images are particularly useful in structural health monitoring cases in which the installation of contact sensors is difficult. Some limitations, though, associated with photogrammetry-type optical metrology involve the application of speckle patterns, which become even more important with variable working distance or when the required resolution and sensitivity are not a priori known. In this context, multispectral sensing combined with tailored speckle patterns can circumvent some of the challenges of acquiring data at different working distances. The present invention uses multispectral imaging combined controlled generation of speckle patterns to demonstrate an approach for remote sensing related to deformation measurements at the structural level. To demonstrate this approach, two speckle patterns were designed for measurements at specified working distances.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: November 24, 2020
    Assignee: Drexel University
    Inventors: Antonios Kontsos, Fnu Melvin Domin Mathew, Andrew James Ellenberg, Ivan Bartoli
  • Patent number: 10839506
    Abstract: A convolutional neural network may be trained to inspect subjects such as carbon fiber propellers for surface flaws or other damage. The convolutional neural network may be trained using images of damaged and undamaged subjects. The damaged subjects may be damaged authentically during operation or artificially by manual or automated means. Additionally, images of undamaged subjects may be synthetically altered to depict damages, and such images may be used to train the convolutional neural network. Images of damaged and undamaged subjects may be captured for training or inspection purposes by an imaging system having cameras aligned substantially perpendicular to subjects and planar light sources aligned to project light upon the subjects in a manner that minimizes shadows and specular reflections. Once the classifier is trained, patches of an image of a subject may be provided to the classifier, which may predict whether such patches depict damage to the subject.
    Type: Grant
    Filed: July 8, 2019
    Date of Patent: November 17, 2020
    Assignee: Amazon Technologies, Inc.
    Inventors: Aniruddh Raghu, Joseph Rutland, Christian Leistner, Andres Perez Torres
  • Patent number: 10816923
    Abstract: A print head includes a memory, an input and output unit, and a plurality of light emitting elements. The memory is configured to store a first light quantity value obtained by measuring a light quantity of each of the plurality of light emitting elements when supplied with a first reference current value, and a light quantity difference value between the first light quantity value and a second light quantity value obtained by measuring a light quantity of each of the plurality of light emitting elements when supplied with a second reference current value. The input and output unit is configured to output the first light quantity value and the light quantity difference value and receive a correction value determined based on the first light quantity value and the light quantity difference value. The light emitting elements are configured to emit light based on a correction current value corresponding to the correction value.
    Type: Grant
    Filed: July 19, 2019
    Date of Patent: October 27, 2020
    Assignee: TOSHIBA TEC KABUSHIKI KAISHA
    Inventor: Shigeru Morino
  • Patent number: 10816482
    Abstract: The present disclosure regards a large area functional metrology system for inspecting nanophotonic devices. The large area functional metrology system can include one or more light sources, optical components such as lenses and polarizers, and one or more camera sensors. The light source can irradiate light onto a nanophotonic device while the optical components can guide the light through the system and modulate states of the light. The camera sensor can record images of the nanophotonic device interacting with the irradiated light. The images can be taken as a function of one or more states. The system can also include a detector which can processes the images in order to detect defects. The defects can then be classified using one or more defect signatures. Based on this classification, the root causes of the defects can be automatically identified.
    Type: Grant
    Filed: October 26, 2017
    Date of Patent: October 27, 2020
    Assignee: Board of Regents, The University of Texas System
    Inventors: S. V. Sreenivasan, Brian Gawlik, Shrawan Singhal
  • Patent number: 10818528
    Abstract: Self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers. The wafer carrier system may include a housing configured for transport within the automated material handling system. A support is configured to support a semiconductor wafer within a housing. A metrology system is disposed within the housing. The metrology system is operable to measure at least one characteristic of the wafer. The metrology system may include a sensing unit and a computing unit operably connected to the sensing unit.
    Type: Grant
    Filed: January 15, 2019
    Date of Patent: October 27, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Abner Bello, Stephanie Waite, William J. Fosnight, Thomas Beeg
  • Patent number: 10816952
    Abstract: A control method for a processing apparatus includes the steps of suspending a processing operation of a processing unit during the formation of a processed groove and then imaging the processed groove by using an imaging unit to obtain a detected image, inspecting the condition of the processed groove according to the detected image, inputting a selected one of plural parameters into an input area displayed on a touch panel from an operator in adjusting the parameters to optimize inspection conditions, moving an input cursor from the input area according to the input of the selected parameter, and executing the inspection of the processed groove by using the selected parameter input in the input area.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: October 27, 2020
    Assignee: DISCO CORPORATION
    Inventor: Satoshi Miyata
  • Patent number: 10811290
    Abstract: In an embodiment, a workstation includes: a processing chamber configured to process a workpiece; a load port configured to interface with an environment external to the workstation; a robotic arm configured to transfer the workpiece between the load port and the processing chamber; and a defect sensor configured to detect a defect along a surface of the workpiece when transferred between the load port and the processing chamber.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: October 20, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yan-Hong Liu, Chien-Chih Wu, Che-Fu Chen
  • Patent number: 10809631
    Abstract: A method of monitoring a device manufacturing process, the method including; obtaining an estimated time variation of a process parameter; determining, on the basis of the estimated time variation, a sampling plan for measurements to be performed on a plurality of substrates to obtain information about the process parameter; measuring substrates in accordance with the sampling plan to obtain a plurality of measurements; and determining an actual time variation of the process parameter on the basis of the measurements.
    Type: Grant
    Filed: April 12, 2018
    Date of Patent: October 20, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Everhardus Cornelis Mos, Jochem Sebastiaan Wildenberg, Marcel Hendrikus Maria Beems, Erik Johannes Maria Wallerbos
  • Patent number: 10770298
    Abstract: Provided is an automatic inspection device and method for inspecting processing quality of laser processing equipment that forms a modified area by irradiating a laser beam into an object to be processed. The automatic inspection device includes: an image film coated on a bottom surface of the object to be processed; an image sensing unit configured to detect a damage image of the object to be processed formed on the image film through irradiation of the laser beam; and an image processing unit configured to process the damage image detected by the image sensing unit.
    Type: Grant
    Filed: August 17, 2016
    Date of Patent: September 8, 2020
    Assignee: EO TECHNICS CO., LTD.
    Inventors: Hak Yong Lee, Sang Young Park, Nack Hoon Kim, Ho Chul Choi
  • Patent number: 10769774
    Abstract: The application provides a method and a device for detecting a defect in a steel plate, as well as an apparatus and a server therefor. The method for detecting a defect in a steel plate comprises: receiving image data of the steel plate, and generating a defect detection request according to the image data; monitoring computing loads of a plurality of servers, and sending the image data and the defect detection request to a first server; receiving, from the first server, a detection result obtained by calculating the image data using the detection model; and operating according to the detection result, wherein the detection result comprises a selected one of a pass result and a defect result. With the proposed method, the position and the classification of the at least one defect can be obtained, so that the detection accuracy is improved.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: September 8, 2020
    Assignee: BEIJING BAIDU NETCOM SCIENCE AND TECHNOLOGY CO., LTD.
    Inventors: Jiabing Leng, Minghao Liu, Yang Liang, Yawei Wen, Faen Zhang, Jiangliang Guo, Jin Tang, Shiming Yin
  • Patent number: 10764570
    Abstract: The present invention relates to a rotating inspector for a camera module. The rotating inspector includes a rotary table having one or more socket units on which the camera module mounted; a plurality of inspection devices disposed around the rotary table to inspect the camera module; test boards disposed on the rotary table, each of test boards being connected to the one or more socket units, respectively to control the camera module and generate inspection data for the camera module; a first data processing unit disposed on the rotary table and analyzing the inspection data to generate result data for possible defects of the camera module; a second data processing unit disposed outside the rotary table, the second data processing unit being configured to receive the result data and to sort and store the received data; and a data transmission unit transmitting the result data generated in the first data processing unit to the second data processing unit.
    Type: Grant
    Filed: January 20, 2019
    Date of Patent: September 1, 2020
    Assignee: ISMedia Co., Ltd.
    Inventors: Seong Cheol Hong, Dong Choon Kim, Sung Oh Yim, Yong Woo Han, Eun Seok Shin, Cheon Su Mun, Min Seog Choi
  • Patent number: 10763148
    Abstract: A semiconductor defects inspection apparatus for inspection of bubble defects of an object is provided. The semiconductor defects inspection apparatus includes a carrier, an optical system, an infrared image capturing device, and a processing unit. The carrier is adapted for bearing the object. The optical system provides an illumination beam to the object to produce an image beam. The infrared image capturing device is disposed on a transmission path of the image beam. The infrared image capturing device is adapted for receiving the image beam to be transformed into an image information. The processing unit is electrically connected to the infrared image capturing device and adapted for analyzing the object according to the image information.
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: September 1, 2020
    Assignee: UTECHZONE CO., LTD.
    Inventors: Chien-Wen Huang, Po-Tsung Lin, Chih-Heng Fang
  • Patent number: 10748284
    Abstract: An image processing device includes a processor comprising hardware, wherein the processor is configured to execute: acquiring intraluminal images; generating, for each of the intraluminal images, lesion information by estimating a visual point with respect to a lesion region extracted from each of the intraluminal images and analyzing a three-dimensional structure of the lesion, the lesion information indicating any of a top portion, a rising portion, and a marginal protruding portion in the lesion region; and extracting, based on the lesion information, a target image satisfying a prescribed condition from the intraluminal images.
    Type: Grant
    Filed: November 16, 2018
    Date of Patent: August 18, 2020
    Assignee: OLYMPUS CORPORATION
    Inventors: Takashi Kono, Yamato Kanda, Takehito Hayami
  • Patent number: 10732128
    Abstract: There may be provided a method for evaluating an object, that may include evaluating a region of the object by a first evaluation module to provide first evaluation results that are related to multiple sites of the region; finding, using a mapping between values of first evaluation results and values of second evaluation results, (a) a first site of the multiple sites that does not require an evaluation by a second evaluation module, and (b) a second site of the multiple sites that requires an evaluation by the second evaluation module; wherein the second evaluation module is more reliable than the first evaluation module; evaluating the second site by the second evaluation module to provide second evaluation results of the second sites; estimating, based on first evaluation results of the first site and on the mapping, a state of the first site; and providing an evaluation of the region based on the state of the first site, and on the second evaluation result of the second site.
    Type: Grant
    Filed: October 17, 2018
    Date of Patent: August 4, 2020
    Inventor: Menachem Regensburger
  • Patent number: 10732915
    Abstract: A manufacturing assistance apparatus includes a display, an imaging device, a completion determining unit, and a display controller. The display is configured to display operation information that is related to any of operation processes of a workpiece. The imaging device is configured to perform imaging of the workpiece, and output image data obtained by the imaging. The completion determining unit is configured to determine whether current one of the operation processes is completed, on a basis of the image data outputted from the imaging device. The display controller is configured to cause, when the current one of the operation processes is determined by the completion determining unit as being completed, the display to display the operation information that is related to subsequent one of the operation processes.
    Type: Grant
    Filed: October 30, 2018
    Date of Patent: August 4, 2020
    Assignee: SUBARU CORPORATION
    Inventors: Yasunori Shibao, Yuichi Nagai, Iwao Murata, Marosuke Kikuchi, Kei Suzuki
  • Patent number: 10725390
    Abstract: An inspection substrate for inspecting a component, such as a liquid confinement system, of an apparatus for processing production substrates is discussed. The inspection substrate includes a body having dimensions similar to a production substrate so that the inspection substrate is compatible with the apparatus, an illumination device, such as light emitting diodes, embedded in the body, a sensor, such as an imaging device or a pressure sensor, that is embedded in the body and configured to generate inspection information, such as image data, relating to a parameter of the component of the apparatus proximate to the inspection substrate, and a storage device embedded in the body and configured to store the inspection information.
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: July 28, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Floor Lodewijk Keukens, Ferdy Migchelbrink, Jeroen Arnoldus Leonardus Johannes Raaymakers, Arnoldus Johannes Martinus Jozeph Ras, Gheorghe Tanasa, Jimmy Matheus Wilhelmus Van De Winkel, Daan Daniel Johannes Antonius Van Sommeren, Marijn Wouters, Miao Yu
  • Patent number: 10717269
    Abstract: A print quality examination device is provided in a printing machine (1) provided with a printing unit (3) that performs printing on a mirror-reflection member (5a) of a sheet (5) to which the mirror-reflection member (5a) is added. The print quality examination device of the printing machine is provided with an examination camera (18a) that images a picture printed on the sheet (5), a light source (18h) that irradiates the sheet (5) with light, and a print quality examination unit (18g) that examines the quality of the picture printed by the printing unit (3) based on image data imaged by the examination camera (18a). The examination camera (18a) or the light source (18h) is configured to be movably supported on an arc about a detection point (P) imaged by the examination camera (18a) for the sheet (5).
    Type: Grant
    Filed: July 12, 2017
    Date of Patent: July 21, 2020
    Assignees: KOMORI CORPORATION, GLORY LTD.
    Inventors: Hiromitsu Numauchi, Takashi Suto, Sayuri Yanagiuchi, Ryuzo Tanigawa
  • Patent number: 10705027
    Abstract: A detecting method of optically detecting a surface defect of a moving steel material includes an irradiation step of irradiating an examination target part with illumination light beams from different directions by two or more distinguishable light sources whose light emission durations are set based on at least an allowable positional displacement of an image, the two or more distinguishable light sources repeatedly emitting light such that their light emission timings thereof do not overlap each other; and a detection step of obtaining images by reflected light beams of the respective illumination light beams and detecting a surface defect in the examination target part by executing subtraction processing between the obtained images.
    Type: Grant
    Filed: August 27, 2018
    Date of Patent: July 7, 2020
    Assignee: JFE Steel Corporation
    Inventors: Hiroaki Ono, Toshifumi Kodama, Takahiro Koshihara, Akihiro Ogawa, Yukinori Iizuka
  • Patent number: 10698006
    Abstract: An inspection apparatus includes a tester unit that applies a stimulus signal to a semiconductor apparatus, an MO crystal arranged to face a semiconductor apparatus, a light source that outputs light, an optical scanner that irradiates the MO crystal with light output from light source, a light detector that detects light reflected from the MO crystal arranged to face the semiconductor apparatus D and outputs a detection signal, and a computer that generate phase image data based on a phase difference between a reference signal generated based on a stimulus signal and the detection signal, the phase image data including a phase component indicating the phase difference, and generates an image indicating a path of a current from the phase image data.
    Type: Grant
    Filed: February 2, 2016
    Date of Patent: June 30, 2020
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomonori Nakamura, Akihiro Otaka
  • Patent number: 10697762
    Abstract: An apparatus for checking tires described as a linear camera having an objective line lying on an optical plane; a first, a second and a third light source for emitting respectively a first, a second and a third light radiation; a command and control unit for selectively activating at least one from among the first, second and third light source and activating the linear camera in order to acquire a two-dimensional image of a linear surface portion of the tire synchronously with the activation of the first, second and third source. The first and second light source lie on opposite sides of the optical plane. Furthermore, the first, second and third light source include each one or more sub-sources each having a respective main extension direction parallel to the optical plane and the distance of the sub-sources of the third light source from the optical plane is less than the distance of the first and second light source from the optical plane.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: June 30, 2020
    Assignee: PIRELLI TYRE S.P.A.
    Inventors: Vincenzo Boffa, Alessandro Held, Valeriano Ballardini, Giuseppe Casadio Tozzi
  • Patent number: 10690544
    Abstract: Reflective imager sub-systems that have a non-circular entrance pupil and provide substantially increased throughput to a detecting component of a system are disclosed.
    Type: Grant
    Filed: October 17, 2018
    Date of Patent: June 23, 2020
    Assignee: Wavefront Research, Inc.
    Inventor: Thomas A. Mitchell
  • Patent number: 10670537
    Abstract: A inspection system includes an illumination source to generate an illumination beam, focusing elements to direct the illumination beam to a sample, a detector, collection elements configured to direct radiation emanating from the sample to the detector, a detection mode control device to image the sample in two or more detection modes such that the detector generates two or more collection signals based on the two or more detection modes, and a controller. Radiation emanating from the sample includes at least radiation specularly reflected by the sample and radiation scattered by the sample. The controller determines defect scattering characteristics associated with radiation scattered by defects on the sample based on the two or more collection signals. The controller also classifies the one or more particles according to a set of predetermined defect classifications based on the one or more defect scattering characteristics.
    Type: Grant
    Filed: March 18, 2019
    Date of Patent: June 2, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Guoheng Zhao, J. K. Leong, Michael Kirk
  • Patent number: 10655956
    Abstract: A displacement measuring apparatus includes an illumination system to obliquely irradiate the target object surface with beams, a sensor to receive a reflected light from the target object surface, an optical system to diverge the reflected light in a Fourier plane with respect to the target object surface, a camera to image a diverged beam in the Fourier plane, a gravity center shift amount calculation circuitry to calculate a gravity center shift amount of the reflected light in the light receiving surface of the sensor, based on a light quantity distribution of the beam imaged by the camera, and a measurement circuitry to measure a heightwise displacement of the target object surface by an optical lever method, using information on a corrected gravity center position obtained by correcting the gravity center position of the reflected light received by the sensor by using the gravity center shift amount.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: May 19, 2020
    Assignee: NuFlare Technology, Inc.
    Inventors: Riki Ogawa, Hiroyuki Nagahama
  • Patent number: 10627220
    Abstract: An apparatus for checking tires described as a linear camera having an objective line lying on an optical plane; a first, a second and a third light source for emitting respectively a first, a second and a third light radiation; a command and control unit for selectively activating at least one from among the first, second and third light source and activating the linear camera in order to acquire a two-dimensional image of a linear surface portion of the tire synchronously with the activation of the first, second and third source. The first and second light source lie on opposite sides of the optical plane. Furthermore, the first, second and third light source include each one or more sub-sources each having a respective main extension direction parallel to the optical plane and the distance of the sub-sources of the third light source from the optical plane is less than the distance of the first and second light source from the optical plane.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: April 21, 2020
    Assignee: PIRELLI TYRE S.P.A.
    Inventors: Vincenzo Boffa, Alessandro Held, Valeriano Ballardini, Giuseppe Casadio Tozzi
  • Patent number: 10612913
    Abstract: Apparatus and methods are described for determining the tomography and/or topography of an object. A light source generates light, and an optical element generates a 2D pattern from the light and directs the 2D pattern toward the object. An objective lens focuses the 2D pattern at an image plane, and a 2D imager acquires at least one image of the 2D pattern. The image has variable image contrast that varies according to displacement of a surface of the object from the image plane, such that maximal image contrast of the 2D pattern is achieved when the surface of the object and the image plane are coincident. A processing unit, operatively coupled to the 2D imager, derives the object's tomography and/or topography at least partially responsively to the variable image contrast of the image. Other applications are also described.
    Type: Grant
    Filed: July 17, 2018
    Date of Patent: April 7, 2020
    Assignee: ADOM, ADVANCED OPTICAL TECHNOLOGIES LTD.
    Inventors: Yoel Arieli, Yoel Cohen
  • Patent number: 10574180
    Abstract: An innovative portable reflected light sensor for non-destructively measuring characteristics of performance enhancement coatings applied to substrates such as solar photovoltaic panels is described. The innovative portable sensor provides a light source and a photodetector for measuring light incident on a substrate surface from the light source, and reflected to the photodetector. The spot size of the illuminated region of the substrate is at least 1 cm2 in area, thus averaging over a relatively wide portion of the substrate surface relative to existing fiber optic devices. A single measurement may then be representative of the coating. The innovative portable reflected light sensor is adapted to measure substrates in the field, and is especially adapted for assessing coating quality during the coating process. The innovative sensor also comprises a signal processing circuit that performs analysis of the measurements and feeds back status of the coating to the operator for coating process control.
    Type: Grant
    Filed: May 15, 2016
    Date of Patent: February 25, 2020
    Assignee: Pellucere Technologies, Inc.
    Inventor: John Arthur De Vos
  • Patent number: 10564126
    Abstract: An inspection apparatus comprises a light output unit configured to output first light having a first wavelength and second light having a second wavelength, a magneto-optical crystal arranged so that a reflection film faces a measurement target, a light detection unit configured to detect the first light and the second light, and a light guide optical system configured to guide the first light and the second light toward the magneto-optical crystal and the measurement target, and guide the first light reflected by the magneto-optical crystal and the second light reflected by the measurement target toward the light detection unit. The light guide optical system comprises an optical path switching element configured to perform switching between optical paths of a plurality of optical elements so that the first light and the second light are selectively incident on the light detection unit.
    Type: Grant
    Filed: November 15, 2016
    Date of Patent: February 18, 2020
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventor: Tomonori Nakamura
  • Patent number: 10540759
    Abstract: Wafer edge profile images are analyzed at locations around a bonded wafer, which may have a top wafer and a carrier wafer. An offset curve is generated based on the wafer edge profile images. Displacement of the top wafer to the carrier wafer is determined based on the offset curve. The wafer edge profile images may be generated at multiple locations around the wafer. The wafer edge profile images may be shadowgram images. A system to determine displacement of the top wafer to the carrier wafer can include an imaging system connected with a controller.
    Type: Grant
    Filed: June 20, 2017
    Date of Patent: January 21, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Kaushik Sah, Thomas Krah, Shifang Li, Heiko Eisenbach, Moritz Stoerring
  • Patent number: 10534975
    Abstract: A multi-frequency high-precision object recognition method is disclosed, wherein a multi-frequency light emitting unit is used to emits lights of different frequencies onto an object-to-be-tested, and a multi-frequency image sensor unit is used to fetch the image of lights reflected from the object-to-be-tested. In an X axis and a Y axis is a single-piece planar image, while lights of different frequencies is used to form image depth in a Z axis. The sample light in the Z axis includes two infrared light narrow range image signals, each having wavelength between 850 nm and 1050 nm, and wavelength width between 10 nm and 60 nm. Calculate to obtain a plurality of single-piece planar images in the X axis and the Y axis as sampled by different wavelength widths in the Z axis, superimpose the plurality of single-piece planar images into a 3-dimension stereoscopic relief image for precise comparison and recognition.
    Type: Grant
    Filed: July 10, 2018
    Date of Patent: January 14, 2020
    Inventors: Kuan-Yu Lu, Wei-Hsin Huang, Wei-Hung Chang, Chun-Shing Chu
  • Patent number: 10523905
    Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: December 31, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Norihisa Koga, Tadashi Nishiyama, Yasuaki Noda
  • Patent number: 10508994
    Abstract: An image inspection apparatus includes an illuminating section for irradiating illumination light, a line camera in which a plurality of imaging elements are arrayed to be linearly arranged, the line camera receiving the light irradiated from the illuminating section and reflected on the inspection target object, a display section for displaying an image captured by the line camera, an optical axis adjusting section for adjusting an optical axis of the line camera, a trigger setting section for specifying a trigger that specifies timing when the inspection target object is imaged by the line camera, an aspect ratio adjusting section for adjusting longitudinal and lateral pixel resolutions of the image captured by the line camera, and a display control section for displaying the optical axis adjusting section, the trigger setting section, and the aspect ratio adjusting section on the display section in order.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: December 17, 2019
    Assignee: Keyence Corporation
    Inventor: Daisuke Ando
  • Patent number: 10488700
    Abstract: An electrical polarization filter, an electronic apparatus including the electrical polarization filter, and a method of operating the electronic apparatus are provided. The electrical polarization filter includes a liquid crystal panel configured to control a polarization angle of incident light and a polarization unit configured to display a linear polarization characteristic. The liquid crystal panel includes first and second transparent plates, first and second electrodes provided between the first transparent plate and the second transparent plate, and a liquid crystal layer provided between the first electrode and the second electrode, wherein the incident light directly enters one of the first and second transparent plate provided on an outer side. The polarization unit may be a passive type polarization unit or an active type polarization unit.
    Type: Grant
    Filed: February 17, 2017
    Date of Patent: November 26, 2019
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seokyoon Jung, Byounglyong Choi, Dongkyun Kim, Sunghyun Nam, Younghun Sung, Sanghun Lee, Yangho Cho
  • Patent number: 10481103
    Abstract: An inspection device is adapted for inspecting whether or not there is a foreign matter or dirt adhered to a surface of a workpiece or whether or not there is a scratch on the surface of the workpiece. A first polarizing plate having a polarizing axis in a first direction is attached to an open window of the cover part, and a second polarizing plate having a polarizing axis in a second direction orthogonal to the first direction is attached to the open window so as to open and close. In a state where the second polarizing plate is closed, the second polarizing plate overlaps the first polarizing plate. In a state where the second polarizing plate is open, the first polarizing plate and the second polarizing plate are present on a straight line connecting the outside light source and the fuel cell.
    Type: Grant
    Filed: October 11, 2018
    Date of Patent: November 19, 2019
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventor: Yoshihiro Yamagata
  • Patent number: 10473767
    Abstract: A Lidar system may comprise a rotor and a stator. The rotor is configured to rotate with respect to the stator. The rotor comprises at least one supporting body and a plurality of light sources disposed on the at least one supporting body, the plurality of light sources configured to emit a plurality of first light beams. The plurality of light beams are non-uniformly distributed along a vertical direction in a vertical field of view of the Lidar system.
    Type: Grant
    Filed: June 18, 2018
    Date of Patent: November 12, 2019
    Assignee: Hesai Photonics Technology Co., Ltd.
    Inventors: Shaoqing Xiang, Na Li, Yancong Lu
  • Patent number: 10464166
    Abstract: A system (1) for viewing an area (2) for processing materials using laser apparatuses, including acquisition apparatus (6) configured for acquiring one image at a time of the processing area (2) and for generating an acquisition signal (8) containing the data relating to each image acquired. The system (1) includes a screen (9) for viewing the images acquired connected to the acquisition apparatus (6) and configured to receive the acquisition signal (8) and to make visible to the users the images contained therein. More specifically, the system (1) is configured for displaying on the display screen (9) the last image acquired in a pause period (TP) from the laser emission and to keep displayed on the screen the last image acquired during the subsequent obscuring period (TSTOP).
    Type: Grant
    Filed: January 21, 2016
    Date of Patent: November 5, 2019
    Assignee: SISMA S.P.A.
    Inventors: Franco Beber, Federico Cumerlato
  • Patent number: 10467591
    Abstract: A system and a method for detecting a substrate and a manufacturing device are disclosed. The detection system includes: an emitting unit and a control unit; wherein the emitting unit provides a first reference light and a second reference light, the first reference light propagates to the control unit, the second reference light is modulated by the substrate to generate a test light, the test light propagates to the control unit; the control unit obtains and compares a power of the first reference light and a power of the test light so as to determine whether a foreign matter is present on a surface of the substrate. The detection system can prevent foreign matters such as photoresist from influencing other manufacturing devices such as cleaning and deposition devices, which is beneficial to the maintenance and service of the manufacturing devices.
    Type: Grant
    Filed: October 21, 2016
    Date of Patent: November 5, 2019
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Wusheng Li, Zhengliang Li, Zhen Liu
  • Patent number: 10468239
    Abstract: The invention relates to mass spectrometers having secondary electron multipliers with series of discrete dynode stages. The invention particularly relates to an operation with extended dynamic measuring range and extended lifetime. The invention is based on not adapting the dynamic measuring range by control of the gain of the trans-impedance amplifier, nor controlling the multiplier operating voltage, which both are usually too slow, but alternating a number of active and passive dynode stages of a discrete dynode multiplier. Each dynode stage is connected to a discrete voltage supply circuit, being able to be de-energized and short-cut; the multiplier gain is feedback-controlled by energizing or short-cutting dynode stages, serially from the end of the multiplier, as a function of a last measured ion signal; and the multiplier has a single trans-impedance amplifier and a single analog-to-digital converter, measuring and digitizing the output current of the last active dynode stage.
    Type: Grant
    Filed: May 14, 2018
    Date of Patent: November 5, 2019
    Inventors: Urs Steiner, Felician Muntean
  • Patent number: 10446096
    Abstract: Aspects of the subject technology relate to an image generation device that generates an image with good white balance while preventing burn-in of a liquid crystal element, and a head-up display. A light adjustment unit includes a liquid crystal element for adjusting a polarization angle of laser light, and adjusts the polarization angle of the laser light in order to adjust the intensity of laser light that is oriented in an emission direction. A light detection unit detects the light intensity of the laser light (reflected light) that has passed through the light adjustment unit. A control unit corrects outputs of a plurality of light sources based on the light intensity of the laser light (reflected light) detected by the light detection unit at a timing different from a timing at which a voltage applied to the liquid crystal element is reversed.
    Type: Grant
    Filed: July 4, 2016
    Date of Patent: October 15, 2019
    Assignee: NIPPON SEIKI CO., LTD.
    Inventors: Yasuhiro Yamakawa, Takashi Nakamura
  • Patent number: 10444161
    Abstract: A metrology system includes an image device and a controller. The image device includes a spectrally-tunable illumination device and a detector to generate images of a sample having metrology target elements on two or more sample layers based on radiation emanating from the sample in response to illumination from the spectrally-tunable illumination device. The controller determines layer-specific imaging configurations of the imaging device to image the metrology target elements on the two or more sample layers within a selected image quality tolerance in which each layer-specific imaging configuration includes an illumination spectrum from the spectrally-tunable illumination device. The controller further receives one or more images of the metrology target elements on the two or more sample layers generated using the layer-specific imaging configurations. The controller further provides a metrology measurement based on the one or more images of the metrology target elements on the two or more sample layers.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: October 15, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Amnon Manassen, Daria Negri, Andrew V. Hill, Ohad Bachar, Vladimir Levinski, Yuri Paskover
  • Patent number: 10444640
    Abstract: A metrology apparatus is disclosed that has an optical system to focus radiation onto a structure and directs redirected radiation from the structure to a detection system. The optical system applies a plurality of different offsets of an optical characteristic to radiation before and/or after redirected by the structure, such that a corresponding plurality of different offsets are provided to redirected radiation derived from a first point of a pupil plane field distribution relative to redirected radiation derived from a second point of the pupil plane field distribution. The detection system detects a corresponding plurality of radiation intensities resulting from interference between the redirected radiation derived from the first point of the pupil plane field distribution and the redirected radiation derived from the second point of the pupil plane field distribution. Each radiation intensity corresponds to a different one of the plurality of different offsets.
    Type: Grant
    Filed: October 12, 2018
    Date of Patent: October 15, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Janneke Ravensbergen, Duygu Akbulut, Nitesh Pandey, Jin Lian
  • Patent number: 10438771
    Abstract: Provided is a measurement device including: an irradiation optical system which emits a primary charged quantum beam to a sample for scanning; a detector which detects secondary charged particles generated from the sample; and a signal processing unit which processes an output signal from the secondary charged particle detector which has detected the secondary charged particles, in which the signal processing unit includes a measurement unit which measures widths of a first pattern group calibrated with a well-known first dimension and a second pattern group calibrated with a well-known second dimension, and an operation unit which defines a relationship between the well-known dimensions of the first and second pattern groups and length measurement values of the first and second pattern groups as a function.
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: October 8, 2019
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Michio Hatano, Yoshinori Nakayama, Masaru Matsuzaki, Hiroki Kawada, Yoshinori Momonoi, Zhigang Wang
  • Patent number: 10430985
    Abstract: A display system comprises a wearable display device for displaying augmented reality content. The display device comprises a display area comprising light redirecting features that are configured to direct light to a user. The display area is at least partially transparent and is configured to provide a view of an ambient environment through the display area. The display device is configured to determine that a reflection of the user is within the user's field of view through the display area. After making this determination, augmented reality content is displayed in the display area with the augmented reality content augmenting the user's view of the reflection. In some embodiments, the augmented reality content may overlie on the user's view of the reflection, thereby allowing all or portions of the reflection to appear to be modified to provide a realistic view of the user with various modifications made to their appearance.
    Type: Grant
    Filed: January 18, 2017
    Date of Patent: October 1, 2019
    Assignee: Magic Leap, Inc.
    Inventors: Christopher M. Harrises, Nicole Elizabeth Samec, Nastasja U. Robaina, Mark Baerenrodt, Adam Carl Wright, Adrian Kaehler
  • Patent number: 10429319
    Abstract: The present disclosure is directed to a system for inspecting a sample with multiple wavelengths of illumination simultaneously via parallel imaging paths. The system may include at least a first detector or set of detectors configured to detect illumination reflected, scattered, or radiated along a first imaging path from a selected portion of the sample in response to the first wavelength of illumination and a second detector or set of detectors configured to concurrently detect illumination reflected, scattered, or radiated along a second imaging path from the selected portion of the sample (i.e. the same location on the sample) in response to the second wavelength of illumination, where the second imaging path may at least partially share illumination and/or detection optics with an autofocus channel.
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: October 1, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Shiow-Hwei Hwang, Amir Bar, Grace Hsiu-Ling Chen, Daniel L. Cavan
  • Patent number: 10424059
    Abstract: Implementations of the present disclosure relate to methods, systems, and computer program products for quality evaluation. In one implementation, a computer-implemented method is disclosed. In the method, a pattern period may be extracted from an image of a target object, the pattern period indicating a period of a pattern that is repeated in the image. A reference image may be generated by repeating the pattern based on the extracted pattern period. Quality of the target object may be evaluated by comparing the generated reference image and the image of the target object. In other implementations, a computer-implemented system and a computer program product for quality evaluation are disclosed.
    Type: Grant
    Filed: September 11, 2017
    Date of Patent: September 24, 2019
    Assignee: International Business Machines Corporation
    Inventors: Jing Chang Huang, Jun Zhu, Jun Chi Yan, Guo Qiang Hu
  • Patent number: 10416551
    Abstract: An image pickup apparatus includes a receiver that receives, from an external apparatus, an instruction for changing a zoom position of a lens, a controller that performs control processing to change a zoom position of the lens based on a received instruction, and a determination unit that determines whether the external apparatus includes a function regarding zooming of the lens. While determining the external apparatus including the function, the controller controls a zoom adapter, which performs a zoom setting of the lens and is attached to the lens, to change a zoom position of the lens based on a zoom setting notified by the external apparatus. While determining the external apparatus not including the function, the controller controls the zoom adapter to change a zoom position of the lens based on a zoom setting performed in the zoom adapter.
    Type: Grant
    Filed: December 8, 2015
    Date of Patent: September 17, 2019
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Sentaro Aihara, Ken Minoda
  • Patent number: 10401677
    Abstract: The present disclosure relates to a display device including a display panel on which an image is displayed, a polarizer disposed on the display panel, a lower fluorescent filter disposed on the polarizer, and an upper fluorescent filter disposed on the lower fluorescent filter. The present disclosure may improve visibility when an image is displayed on the display device and light of a laser pointer in a visible light region is emitted thereto by absorbing the light using the upper and lower fluorescent filters, converting the light into light in a long wavelength band, which is a higher wavelength band than that of the absorbed light, and emitting the light in the long wavelength band.
    Type: Grant
    Filed: November 29, 2017
    Date of Patent: September 3, 2019
    Assignee: LG Display Co., Ltd.
    Inventors: Ji-Su Han, Dae-Heung Lee, Hye-Jeong Park
  • Patent number: 10401842
    Abstract: The present disclosure relates to control systems for controlling and dynamically configuring a production line. The production line includes one or multiple peripheral devices respectively located throughout the production line. A controller, or control unit, may, in one embodiment, extract binary instructions included in a file received from a source external to the controller, and the controller operates each of the devices on the production line based on the binary instructions embedded in the file.
    Type: Grant
    Filed: May 1, 2015
    Date of Patent: September 3, 2019
    Assignee: SICPA HOLDING SA
    Inventors: Jesper Spring, Iacopo Giangrandi, Francesca Acerra, Philippe Leuba, Frederic Defever