Abstract: An imaging module including a plurality of imaging systems for capturing images of a receiver medium. An illumination system illuminates the receiver medium with an illumination pattern. First and second imaging systems are positioned to capture images of the receiver medium, each including at least a portion of the illumination pattern. The first and second images are analyzed to determine a relative position of the illumination pattern in the first and second images. Imaging system alignment parameters for use in aligning images captured with the first and second imaging systems are determined responsive to the determined relative position.

Abstract: A method of measuring a height of 3-dimensional shape measurement apparatus includes irradiating a first grid pattern light from a plurality of first lighting devices and a second grid pattern light from a plurality of second lighting devices which are alternatively arranged to the first lighting devices toward a target object wherein the first grid pattern light has a first equivalent wavelength and the second grid pattern light has a second equivalent wavelength that is different from the first equivalent wavelength, and obtaining a first pattern image corresponding to the first grid pattern light and a second pattern image corresponding to the second grid pattern light, generating combined pattern images by combining the first and second pattern images obtained from the first and second lighting devices adjacent to each other among the plurality of first and second lighting devices, calculating heights of the target object according to a combined equivalent wavelength of the combined pattern images, and de

Abstract: The present invention provides a technology capable of measuring three-dimensional shapes by applying a stereo method even in the case that an object has a specular surface. A shape measuring apparatus 1 is equipped with a pattern position specification section 20 (before-movement pattern position specification section, after-movement pattern position specification section), an image capturing position calculation section 30 (before-movement image capturing position calculation section, after-movement image capturing calculation section), a pixel area specification section 40 (second pixel area specification section), an inclination angle calculation section 50 (before-movement inclination angle calculation section, after-movement inclination angle calculation section), a height-direction coordinate determination section 60, and an output section 80.

Abstract: The surface shape of a three-dimensional object is acquired with an optical sensor. The sensor, which has a projection device and a camera, is configured to generate three-dimensional data from a single exposure, and the sensor is moved relative to the three-dimensional object, or vice versa. A pattern is projected onto the three-dimensional object and a sequence of overlapping images of the projected pattern is recorded with the camera. A sequence of 3D data sets is determined from the recorded images and a registration is effected between subsequently obtained 3D data sets. This enables the sensor to be moved freely about the object, or vice versa, without tracking their relative position, and to determine a surface shape of the three-dimensional object on the fly.

Abstract: A shape measuring apparatus includes: an image pick-up section that captures an image of two reflection spot groups of a pattern reflected in a first surface M1 and a second surface of a transparent flat plate and generates an image containing two reflection images separated in a direction perpendicular to a direction of extending; a first surface reflection spot group estimating section that estimates from the image a first surface reflection spot group of the pattern generated by the first surface of the transparent flat plate; an inclination angle calculating section that calculates an inclination angle of the first surface of the transparent flat plate at an estimated position of the first surface reflection spot group; and a surface shape determining section that determines a shape of the first surface of the transparent flat plate based on the calculated inclination angle.

Abstract: A system for and methods of performing lateral measurements of a work fixed to an XY translation stage of a CNC machine comprises coupling a range-detecting laser scanner to a tool mount of the CNC machine that is translatable along the X, Y, and Z axes. The work is surrounded by reflectors that are coupled to the XY translation stage, preferably parallel to the X and Y axes. The laser scanner is initially positioned at a predetermined coordinate, and its laser output is directed toward one of the reflectors. The distance from the laser scanner to the work is measured and is correlated with the laser scanner position to determine a coordinate of the work. The scanner is then incremented along one of the X and Y axes and another coordinate of the work is determined. The periphery of the work is similarly scanned, and the lateral measurements are determined therefrom.

Abstract: A pattern projector, comprising a light source, configured to emit a beam of light. A transparent substrate, which has a pair of mutually-opposed planar surfaces is configured to receive and propagate the beam within the substrate by total internal reflection between the planar surfaces. The transparent substrate comprises a diffractive structure that is formed on one of the planar surfaces and is configured to direct at least a part of the beam to propagate out of the substrate in a direction that is angled away from the surface and to create a pattern comprising multiple interleaved light and dark areas.

Abstract: A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.

Abstract: A structured light sensor system for measuring contour of a surface includes a control module that coordinates control of both a projection system and an imaging system to operate the structured light sensor system in three different modes. The imaging system is configured to selectively capture an image of light reflected off of the surface. In point mode, the imaging system is on for a first period during which the projection system projects a point of light onto the surface. In line mode, the imaging system is on for a second period during which the projection system projects onto the surface a first plurality of points of light forming a line of light. In area mode, the imaging system is on for a third period during which the projection system projects onto the surface a second plurality of points of light forming a plurality of lines of light.

Abstract: A method for the non-contact measurement of a scene's 3D geometry is based on the concurrent projection of multiple and overlapping light patterns of different wavelengths and/or polarity onto its surfaces. Each location in the overlapping light patterns is encoded (code-word) by the combined arrangements of code elements (code-letters) from one or more of the overlapping patterns. The coded light reflected from the scene is imaged separately for each wavelength and/or polarity by an acquisition unit and code-letters are combined at each pattern location to yield a distinct code-word by a computing unit. Code-words are then identified in the image, stereo-matched, and triangulated, to calculate the range to the projected locations on the scene's surface.

Abstract: The invention relates to an apparatus for the three-dimensional measurement of an object, and comprises a projection system for projecting a pattern onto a surface by means of electromagnetic radiation having at least two different wavelengths or at least two different wavelength ranges; and a detector system for detecting the projected pattern at the at least two different wavelengths or at at least two different respective wavelengths from the at least two different wavelength ranges. The invention further relates to a method for the three-dimensional measurement of an object.

Abstract: A method and an apparatus of profiling a surface are disclosed. The method comprises projecting slit pattern light toward a target object in at least two directions in sequence to obtain pattern images reflected on the target object, obtaining heights by using the pattern images according to the directions, obtaining vector fields showing a direction of maximum variation of height, obtaining confidence indexes of the heights corresponding to the at least two directions, obtaining integrated vector fields by using the confidence indexes and the vector fields, and calculating height of each position of the target object by using the integrated vector fields. Therefore, accuracy is enhanced.

Abstract: A device for measuring three dimensional shape includes a first irradiation unit, a first grating control unit, a second irradiation unit, a second grating control unit, an imaging unit, and an image processing unit. After performance of a first imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of said first light pattern of multiply varied phases, a second imaging operation is performed as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of said second light pattern of multiply varied phases. After completion of the first imaging operation and the second imaging operation, shifting or switching operation of the first grating and the second grating is performed simultaneously.

Abstract: A surface measurement module for 3-D triangulation-based image acquisition of a subject-under-inspection and under observation by at least one camera. The module having: (a) casing housing an optical system comprising a plurality of lens elements positioned between a fixed-pattern optic and a light source; (b) an output of said fixed-pattern optic comprising a multi-frequency pattern comprising a plurality of pixels representing at least a first and second superimposed sinusoid projected simultaneously, each of the sinusoids represented by the pixels having a unique temporal frequency and each of the pixels projected to satisfy I n p = A p + ? k = 1 K ? B k p ? cos ? ( 2 ? ? ? ? ? f k ? y p + 2 ? ? ? ? ? kn N ) Eq . ? ( 1.

Abstract: A laser projector for chassis alignment has a laser light source emitting a laser light beam, an optical element which generates a structured laser light pattern when it is irradiated by the laser light beam, a detector which is situated in such a way that it is irradiated by a sub-area of the structured laser light pattern and generates an output signal which is correlated with the radiation, and an evaluation unit which compares the output signal generated by the detector with at least one predefined setpoint value and turns off the laser light source if it detects a significant deviation of the output signal from the setpoint value.

Abstract: A computer-implemented process, system, and computer-readable storage medium having stored thereon, program code and instructions for 3-D triangulation-based image acquisition of a contoured surface/object-of-interest under observation by at least one camera, by projecting onto the surface-of-interest a multi-frequency pattern comprising a plurality of pixels representing at least a first and second superimposed sinusoid projected simultaneously, each of the sinusoids represented by the pixels having a unique temporal frequency and each of the pixels projected to satisfy I n p = A p + ? k = 1 K ? B k p ? cos ? ( 2 ? ? ? ? f k ? y p + 2 ? ? ? ? kn N ) Eq . ? ( 1.1 ) where Inp is the intensity of a pixel in the projector for nth projected image in a particular instant in time; K is an integer representing the number of component sinusoids (e.g.

Abstract: A measurement assembly (12) for measuring a feature (14A) on a surface (16) includes a metrology system (18), a mover assembly (19), a pointer (22), and a control system (24). The metrology system (18) generates a measurement beam (26), and the mover assembly (19) selectively adjusts the direction of the measurement beam (26). The pointer (22) is handheld and generates a pointer beam (34) that can be selectively directed at the surface (16) to form a pointer spot (36) on the surface (16). Further, the control system (24) controls the mover assembly (19) to move the direction of the measurement beam (26) until the measurement beam (26) is approximately directed at the pointer spot (36).

Abstract: An adaptive depth sensing system (ADSS) illuminates a scene with a pattern that is constructed based on an analysis of at least one prior-generated depth map. In one implementation, the pattern is a composite pattern that includes two or more component patterns associated with different depth regions in the depth map. The composite pattern may also include different illumination intensities associated with the different depth regions. By using this composite pattern, the ADSS can illuminate different objects in a scene with different component patterns and different illumination intensities, where those objects are located at different depths in the scene. This process, in turn, can reduce the occurrence of defocus blur, underexposure, and overexposure in the image information.

Abstract: There is provided a component mounting apparatus, which includes: a nozzle which sucks a component; a nozzle supporting member, on which the nozzle is installed, which moves in a vertical direction with respect to an upper surface of a substrate on which the component sucked at the nozzle is mounted; an optical system which captures an image of a leading edge portion of the nozzle where the component is sucked in a component mounting operation, from a side direction, such that an optical axis of the optical system is inclined at a predetermined angle with respect to a sucking surface of the nozzle; and an analyzer which analyzes the image of the leading edge portion to determine whether a sucking state of the component sucked by the nozzle is normal or abnormal.

Abstract: A system for simultaneous real-time three-dimensional geometry and color texture acquisition. The system includes a system processor for generating at least three phase shifted black and white fringe patterns with a phase shift of 2 ?/3, a light projector adapted to project the fringe patterns onto an object, the projector being electrically connected with the system processor, and a color camera for capturing the fringe patterns to generate at least three raw fringe images. The fringe images are used to calculate a black and white texture image which is further converted to a color image by employing a demosaicing algorithm. The fringe images are also used to calculate a wrapped phase map that is further processed to generate a continuous unwrapped phase map by employing a phase unwrapping algorithm and the unwrapped phase map is converted to co-ordinates using calibrated system parameters for point-by-point three-dimensional shape measurement.

Abstract: Volume dimensioning employs techniques to reduce multipath reflection or return of illumination, and hence distortion. Volume dimensioning for any given target object includes a sequence of one or more illuminations and respective detections of returned illumination. A sequence typically includes illumination with at least one initial spatial illumination pattern and with one or more refined spatial illumination patterns. Refined spatial illumination patterns are generated based on previous illumination in order to reduce distortion. The number of refined spatial illumination patterns in a sequence may be fixed, or may vary based on results of prior illumination(s) in the sequence. Refined spatial illumination patterns may avoid illuminating background areas that contribute to distortion. Sometimes, illumination with the initial spatial illumination pattern may produce sufficiently acceptable results, and refined spatial illumination patterns in the sequence omitted.

Abstract: Depth values in a scene are measured by projecting sets of patterns on the scene, wherein each set of patterns is structured with different spatial frequency using different encoding functions. Sets of images of the scene is acquired, wherein there is one image for each pattern in each set. Depth values are determining for each pixel at corresponding locations in the sets of images. The depth values of each pixel are analyzed, and the depth value is returned if the depth values at the corresponding locations are similar. Otherwise, the depth value is marked as having an error.

Abstract: A three-dimensional measurement apparatus comprises a detection unit configured to detect a plurality of intersection positions between first pattern light in which a bright part and a dark part are alternately arranged and second pattern light in which a phase of the first pattern light is shifted, by using tone values of a first image obtained by capturing a target object onto which the first pattern light is projected and tone values of a second image obtained by capturing the target object onto which the second pattern light is projected; and a measurement unit configured to calculate a third position based on a first intersection position included in the plurality of intersection positions and a second intersection position that is adjacent to the first intersection position and measure a three-dimensional position of the target object based on an interval between the third positions.

Abstract: Alignment of two surfaces of two objects in a manufacturing process is achieved by determining a best fit orientation of the two objects with respect to each other using captured images reflected from the two surfaces. An image pattern is projected on a surface of each object, and a reflected image pattern is captured from the surface of each object. A reconstructed surface is determined from the captured reflected image patterns, and the two reconstructed surfaces are superimposed to determine a best fit orientation of the two objects with respect to each other. One or more movable portions of a base are actuated to align the two surfaces to each other to achieve the determined best fit orientation.

Abstract: The disclosure relates to a scanning device for detecting the contour of an object. The scanning device has a light source for generating a light pattern on the surface area of the object, and a camera for detecting the light pattern on the surface area of the object. The disclosure describes that the one light source includes at least one incoherent spot light source, and that between the at least one spot light source and the object, a shadow caster defines the light pattern on the surface area of the object. The disclosure also relates to a method for detecting the contour of an object.

Abstract: The invention provide a shape measuring device, a shape measuring method, and a shape measuring program capable of clearly observing a surface state of a measuring object while measuring a shape of the measuring object at high accuracy. Light irradiated by a light projecting unit is reflected by a measuring object and received by a light receiving unit. Stereoscopic shape data of the measuring object is generated by a triangular distance measuring method. The light irradiated by the light projecting unit is reflected by the measuring object and received by the light receiving unit. All-focus texture image data of the measuring object is generated by synthesizing texture image data of a plurality of portions of the measuring object while changing a focus position of the light receiving unit. The stereoscopic shape data and the all-focus texture image data are synthesized to generate synthesized data.

Abstract: A three dimensional measurement apparatus includes a projection unit that projects, to a measurement target object, a first pattern light including alternately arranged bright parts and dark parts and a second pattern light in which a phase of the first pattern light is shifted, and an imaging unit that images the measurement target object on which the first or second pattern light is projected. When a period of repetitions of the bright parts and the dark parts of the pattern light is one period, a range of imaging on the measurement target object by one pixel included in the imaging unit is an image distance, and the length of one period of the projected pattern light on the measurement target object surface is M times the image distance, the projection unit and the imaging unit are arranged to satisfy “2×N?0.2?M?2×N+0.2 (where N is not less than 2)”.

Abstract: A three-dimensional shape measuring apparatus measures by analyzing an optical pattern projected to the measurement target, and luminance of the optical pattern. The apparatus includes a mounting stage having a reference plane of a height of the measurement target, a measurement head that projects the optical pattern, to the measurement target and reference plane, to capture images of the optical patterns, and a displacement portion displaces the measurement head in a height direction. A phase computing portion computes a phase of the optical pattern in a certain pixel included in the captured image. A height computing portion computes a height of the measurement target based on the phase, and a feed amount computing portion computes a displacement amount based on the height. The height computing portion computes the height based on the phase and corrects the height based on the displacement amount, thereby computing the height of the measurement target.

Abstract: A method for imaging an object using a microscope includes obtaining axial response data, the axial response data representative of a relationship between a separation between a top surface of the object and an objective lens of the microscope and an intensity of light reflected by the top surface of the object; positioning the object at a distance from the objective lens that is within a linear region of the axial response data; sequentially illuminating the object with a plurality of periodic patterns; obtaining a plurality of images of the object, each image resulting from the illumination of the object with a corresponding one of the plurality of periodic patterns; determining a reconstructed image of the object based on the plurality of images of the object; and, based on variations in the intensity of the reconstructed image, determining a topographic profile of the top surface of the object.

Abstract: The invention provide a shape measuring device, a shape measuring method, and a shape measuring program capable of clearly observing a surface state of a measuring object while measuring a shape of the measuring object at high accuracy. Light irradiated by a light projecting unit is reflected by a measuring object and received by a light receiving unit. Stereoscopic shape data of the measuring object is generated by a triangular distance measuring method. The light irradiated by the light projecting unit is reflected by the measuring object and received by the light receiving unit. All-focus texture image data of the measuring object is generated by synthesizing texture image data of a plurality of portions of the measuring object while changing a focus position of the light receiving unit. The stereoscopic shape data and the all-focus texture image data are synthesized to generate synthesized data.

Abstract: Pattern lights A and B of which patterns respectively having bright and dark sections have been in an inverted relation are projected on a subject to calculate luminance distributions L1 and L2 of the subject and average values Ave(L1) and Ave(L2) of the distributions. A luminance distribution obtained by multiplying a luminance distribution L0 of the subject of only a natural light component by a coefficient ? is subtracted from the luminance distribution L2 obtained by projecting the pattern light B on the subject and a correction value L2? thereof is calculated so that a difference e of the average values become zero. Then, an intersection point of the luminance distribution L1 obtained by projecting the pattern light A on the subject and the correction value L2? of the luminance distribution L2 obtained by projecting the pattern light B on the subject is derived.

Abstract: A structured light 3D scanner consisting of a specially designed fixed pattern projector and a camera with a specially designed image sensor is disclosed. A fixed pattern projector has a single fixed pattern mask of sine-like modulated transparency and three infrared LEDs behind the pattern mask; switching between the LEDs shifts the projected patterns. An image sensor has pixels sensitive in the visual band, for acquisition of conventional image and the pixels sensitive in the infrared band, for the depth acquisition.

Abstract: Apparatus for performing Raman spectroscopy may include a first laser source having a first emission wavelength and a second laser source having a second emission wavelength. A separation between the first and second emission wavelengths may correspond to a width of a Raman band of a substance of interest. A switch may provide switching between the first and second laser sources. An ensemble of individually addressable laser emitters may be provided. A Bragg grating element may receive laser light from the ensemble. An optical system may direct light from the Bragg grating element into an optical fiber. A combined beam through the optical fiber may contain light from each of the emitters.

Abstract: A laser scanner or a laser tracker includes a light source that emits a light beam within an environment, and a data capture component that captures the light beam reflected back to the laser scanner or tracker from the environment. The laser scanner or tracker also includes a projector integrated within a body of the laser scanner or tracker or mounted to the body of the laser scanner or tracker at a predetermined location, the projector being operable to project visible information onto an object located within the environment, the projected visible information being indicative of images, data or information, the projected visible information being at least one of design intent information, information acquired by the laser scanner or tracker, or guidance to an operator.

Abstract: A measurement assembly (12) for measuring a feature (14A) on a surface (16) includes a metrology system (18), a mover assembly (19), a pointer (22), and a control system (24). The metrology system (18) generates a measurement beam (26), and the mover assembly (19) selectively adjusts the direction of the measurement beam (26). The pointer (22) is handheld and generates a pointer beam (34) that can be selectively directed at the surface (16) to form a pointer spot (36) on the surface (16). Further, the control system (24) controls the mover assembly (19) to move the direction of the measurement beam (26) until the measurement beam (26) is approximately directed at the pointer spot (36).

Abstract: An apparatus for measuring a height of an object plane or multiple points on an object is disclosed. The apparatus comprises an imaging system having a focal plane passing through a focal point of the imaging system, wherein the focal plane of the imaging system is tilted at an oblique angle with respect to the object plane such that only a small portion of the object is in focus. Alternatively, the focal plane is tilted at an oblique angle with respect to a scanning direction of the imaging system during relative movement between the imaging system and the object.

Abstract: To provide a diffractive optical element and a measuring device capable of generating light spots of dispersive type. The problem is resolved by providing a diffractive optical element having concaves and convexes and diffracting incident light in two dimensions so as to generate diffracted light, wherein when the number of a part of light spots formed by the diffracted light is denoted by n, an average distance W to the nearest neighbor in the light spots normalized by an area of a region onto which the light spots are projected falls within a range of 1/(2×n1/2)<W<1/(n1/2).

Abstract: Apparatus for performing Raman spectroscopy may include a first laser source having a first emission wavelength and a second laser source having a second emission wavelength. A separation between the first and second emission wavelengths may correspond to a width of a Raman band of a substance of interest. An optical switch may provide switching between the first and second laser sources. An ensemble of individually addressable laser emitters may be provided. A Bragg grating element may receive laser light from the ensemble. An optical system may direct light from the Bragg grating element into an optical fiber. A combined beam through the optical fiber may contain light from each of the emitters.

Abstract: An apparatus and method are disclosed for dynamic keystone correction. A measurement module measures distances from a projector to each of at least three projected points of a first projected image projected on a first surface with projection angles between each projected point. The at least three projected points are endpoints for at least two vectors with a target ratio of vector lengths. An adjustment module calculates an actual ratio of actual vector lengths of the at least two vectors. The adjustment module further adjusts a first aspect ratio of first projected image until the actual ratio is equivalent to the target ratio.

Abstract: A 3D shape measurement apparatus for measuring a 3D shape of an object existing on a measurement area, comprising, a pattern projection unit for projecting a pattern having a periodicity onto the measurement area, and a capturing unit for capturing an image of the area where the pattern is projected, wherein the measurement area is specified by a reference plane, a projection area of the pattern projection unit, and a capturing area of the capturing unit, and the pattern projection unit projects the pattern to be focused on the reference plane. The apparatus further comprises a first calculation unit for calculating phase information of a pattern of the captured image, a second calculation unit for calculating defocus amounts of the pattern in the captured image, and a third calculation unit for calculating a 3D shape of the object based on the phase information and the defocus amounts.

Abstract: The present invention describes a device for surveying a surface (104) in a real world coordinate system (111). The device comprises a pattern projecting unit (101) adapted for projecting a predefined pattern (105) onto the surface (104), an optical measurement system (102) adapted for determining positional and image data of a projected pattern (106) on the surface (104), wherein the positional and image data are indicative of the predefined pattern (105) in a measuring coordinate system (112), and a processing unit (103) adapted for determining transformation data based on the predefined pattern (105) and the determined positional and image data of the projected pattern (106). The transformation data allow a transformation between the real world coordinate system (111) and the measuring coordinate system (112) to thereby survey the surface (104).

Abstract: Embodiments related to establishing and maintaining precision alignment in an optical system are disclosed. For example, one disclosed embodiment provides an optical device comprising an outer casing and a rigid optical support disposed within an interior of the outer casing and to which a plurality of optical components are mounted. The embodiment further comprises a printed circuit board spatially separated from the optical support and the plurality of optical components, wherein one or more electrical components are mounted to the printed circuit board. The embodiment also comprises one or more electrical conductors electrically connecting the one or more electrical components to the one or more optical components.

Abstract: An combined object capturing system and display device and associated method are provided for capturing and measuring an object near a display device. The object capturing system may include at least one projection device for projecting a structured light pattern onto a surface of the object, at least one detection device for capturing at least one image of the structured light pattern acting on the surface of the object, and a computing device for determining a measurement relating to the captured image. The display device may provide a position for the object to assume with respect to the object capturing system. The object capturing system may be combined with, attached to or otherwise positioned alongside the display device. The measurement may be processed constantly and may determine a level of use of the display device, a computer connected to the display device or any device connected to the display device.

Abstract: System and method for tridimensional cartography of a structural surface. Two wires are extended in front and along the structural surface so as to define a reference surface. A measuring unit comprising a laser arrangement and a camera is moved in front of the structural surface so as to progressively scan the surface. Tow distinct light planes directed toward the structural surface are projected by means of the laser arrangement. Images of the structural surface containing lines resulting from an intersection of the light planes with the structural surface and four reference points resulting from an intersection of the light planes with the wires are captured by means of the camera. The images are processed to determine the 3D coordinates of the lines defining the mapping in a reference system bound to the reference surface considering the position and the orientation of the measuring unit based on the reference points.

Abstract: A method for controlling focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident light beams with an object positioned proximate to the focal region. The reflected light beams return to and propagate through the lens. The method also includes detecting a phase of each of the reflected light beams and determining a degree-of-focus of the optical system with respect to the object by comparing the phases of the reflected light beams.

Abstract: A method for controlling a focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident light beams with an object positioned proximate to the focal region. The reflected light beams return to and propagate through the lens. The method also includes determining relative separation measured between the reflected light beams and determining a degree-of-focus of the optical system with respect to the sample based upon the relative separation.

Abstract: Systems and methods for processing images in a structured light system which may be used to determine the correspondences in a camera-projector system. Those correspondences can later be used to construct a 3D model, to calibrate a projector or for other purposes. The optical and geometric characteristics of the system are initially determined. The capability of establishing correspondences is affected by the limitations of the system and the properties of the surfaces. Once images of the patterns projected on the surface are acquired, they are iteratively segmented and deconvolved using the known characteristics of the system. The result is a set of correspondences with a reduction of artifacts introduced by the limitations of the system.

Abstract: A measurement device includes a pattern light characteristic setting unit configured to set illumination light having a pattern light characteristic to be projected onto a measurement object, a reflected light measurement unit configured to measure reflected light when the measurement object is irradiated with the illumination light on, an image feature extraction unit configured to extract from the measured reflected light an image feature based on a physical characteristic of the measurement object, a feature distribution calculation unit configured to calculate a distribution characteristic for each local region of the image feature, and a pattern light control unit configured to control the pattern light characteristic of the illumination light, which includes a pattern light characteristic for distance measurement and a pattern light characteristic for image feature extraction, based on the calculated distribution characteristic for each local region.

Abstract: A method for making a sample for evaluation of laser irradiation position and evaluating the sample, and an apparatus which is switchable between a first mode of modification of semiconductor and a second mode of making and evaluating the sample. Specifically, a sample is made by irradiating a semiconductor substrate for evaluation with a pulse laser beam while the semiconductor substrate is moved for evaluation at an evaluation speed higher than a modifying treatment speed, each relative positional information between pulse-irradiated regions in the sample is extracted, and stability of the each relative positional information between pulse-irradiated regions is evaluated. The evaluation speed is such a speed that separates the pulse-irradiated regions on the sample from each other in a moving direction.

Abstract: An apparatus for measuring a height of an object plane or multiple points on an object is disclosed. The apparatus comprises an imaging system having a focal plane passing through a focal point of the imaging system, wherein the focal plane of the imaging system is tilted at an oblique angle with respect to the object plane such that only a small portion of the object is in focus. Alternatively, the focal plane is tilted at an oblique angle with respect to a scanning direction of the imaging system during relative movement between the imaging system and the object.