Projection Of Structured Light Pattern Patents (Class 356/603)
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Patent number: 8325350Abstract: An apparatus and a method for measuring a three-dimensional shape are disclosed. The apparatus includes a transfer stage, a first projector, a second projector, a camera unit and a control unit. The transfer stage transfers a measurement object to a measurement position. The first projector irradiates a first pattern light having a first equivalent wavelength toward the measurement object in a first direction. The second projector irradiates a second pattern light having a second equivalent wavelength that is different from the first equivalent wavelength toward the measurement object in a second direction. The camera unit takes a first pattern image that is generated when the first pattern light is reflected by the measurement object, and a second pattern image that is generated when the second pattern light is reflected by the measurement object.Type: GrantFiled: October 8, 2009Date of Patent: December 4, 2012Assignee: Koh Young Technology Inc.Inventor: Min-Young Kim
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Patent number: 8326020Abstract: Provided is a structural light based three-dimensional depth imaging method and system using signal separation coding and error correction thereof capable of detecting, removing and correcting corresponding errors between a projection apparatus and an image photographing apparatus caused by phenomena such as reflection on an object surface, blurring by a focus, and so on, using geometrical constraints between the projection apparatus and the image photographing apparatus. Here, the projection apparatus projects light, and the image photographing apparatus obtains the light. The depth imaging method includes projecting light from a projection apparatus, obtaining the light using an image photographing apparatus, and measuring a distance or a three-dimensional depth image. Therefore, it is possible to provide a structural light based three-dimensional depth imaging method and system using geometrical conditions capable of precisely obtaining three-dimensional depth information of target environment.Type: GrantFiled: March 29, 2007Date of Patent: December 4, 2012Inventors: Suk-han Lee, Jong-moo Choi, Dae-sik Kim, Seung-sub Oh
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Patent number: 8313446Abstract: The measurement installation comprises a measurement computer system comprising: an identification system (19) that identifies a region of interest on a plane image; a pairing system (20) that determines on each plane image the two-dimensional coordinates of an anatomical point by searching for correlation between the region of interest and a corresponding zone on each other image; and a calculation unit (21) that determines the three-dimensional coordinates of the anatomical point of the individual in the measurement space on the basis of the two-dimensional coordinates and of a relationship obtained by calibration.Type: GrantFiled: February 22, 2006Date of Patent: November 20, 2012Inventors: Gérard Di Mascio, Arnaud Lecerf
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Publication number: 20120274946Abstract: A method and system for interference based detection of height (H) of a microscopic structure. Wherein N*(Ws/2)>H>(N?1)*(Ws/2); wherein N is a positive integer, w1 is a first wavelength of first light beams used to generate first interference patterns, w2 is a second wavelength of second light beams used to generate second interference patterns, and Ws is a synthetic wavelength and equals a ratio between (i) a product of a multiplication of w1 by w2 and (ii) a difference between w1 and w2.Type: ApplicationFiled: May 1, 2012Publication date: November 1, 2012Applicant: CAMTEK LTD.Inventor: Gilad GOLAN
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Patent number: 8290245Abstract: The present invention relates to an imaging apparatus and method for measuring the three-dimensional characteristics of an object using range data acquisition and analysis. The imaging apparatus comprises: means for configuring the range data acquisition and analysis before starting the measuring; means for creating an image of the object by detecting reflected light from the object using at least one sensor comprising pixels; means for acquiring range data of the object from the created image measured in sensor pixel units; means for calibrating the acquired range data from sensor pixel values to world-coordinates; means for rectifying the calibrated range data by re-sampling the range data onto a uniformly spaced grid; and, means for analyzing the calibrated and rectified range data in order to obtain the three-dimensional characteristics of the object.Type: GrantFiled: June 13, 2005Date of Patent: October 16, 2012Assignee: Sick IVP ABInventors: Henrik Turbell, Mats Gokstorp
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Patent number: 8280152Abstract: The invention relates to a method for optically scanning the three-dimensional geometry of an object by means of triangulation, in which a pattern (9, 9?) is projected onto the object (7) to be scanned in order to obtain a 3D data set, and the projected pattern (9, 9?) is recorded in an image (40, 41). In a first step for the production of at least one first image (40), a first pattern (9) is projected and in a second step for the creation of at least one further image (40), a further pattern (9?) deviating from the first as regards position or shape is projected onto the object (7) to be scanned and the image (41) is created. The first image (40) and the further image (41) comprise at least one common point (44). The 3D data acquired from the images (40, 41) are merged in a subsequent step on the basis of the 3D data of the at least one common point (44) such that the 3D data acquired from said images (40, 41) agree at least with reference to the 3D data of the common point (44) in the 3D data set.Type: GrantFiled: April 29, 2010Date of Patent: October 2, 2012Assignee: Sirona Dental Systems GmbHInventors: Frank Thiel, Joachim Pfeiffer
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Patent number: 8279450Abstract: The present invention aims to provide an intra-oral measurement device and an intra-oral measurement system capable of measuring an inside of an oral cavity at high accuracy without increasing a size of the device, and includes a light projecting unit for irradiating a measuring object including at least a tooth within an oral cavity with light, a lens system unit for collecting light reflected by the measuring object, a focal position varying mechanism for changing a focal position of the light collected by the lens system unit, and an imaging unit for imaging light passed through the lens system unit.Type: GrantFiled: January 26, 2010Date of Patent: October 2, 2012Assignee: Panasonic CorporationInventors: Sadafumi Oota, Seiji Hamano, Fumio Sugata
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Patent number: 8270044Abstract: A scanning apparatus includes a scanning head that scans an image of a document positioned on a stage glass, but varying in its distance therefrom. A boundary line is detected to determine an amount of skew therein. A skew line is compared with an established reference line, and a correction factor is calculated based on the result of the comparison. The original image processed to map the boundary line to the reference line and image data inside of the boundary line is similarly mapped based on the calculated correction factor. Beneficially, skews of an image produced when a thick book is scanned can be corrected simply.Type: GrantFiled: June 22, 2007Date of Patent: September 18, 2012Assignee: Samsung Electronics Co., Ltd.Inventor: Hyeon-seok Seo
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Patent number: 8243285Abstract: A manufacturing method and system are disclosed for illuminating a target. A light controller has a plurality of pixels, and light is projected from at least a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first angle. The pixels are controlled to establish illumination characteristics for first and second optical paths between the light controller and the target.Type: GrantFiled: September 25, 2009Date of Patent: August 14, 2012Inventor: David Fishbaine
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Patent number: 8238641Abstract: There is provided a method of evaluating quantitatively surface properties such as cleanness and quality of the surface of a work that has been evaluated in the past by visual appearance inspection. A determined pattern 14 is made from plural concentric circles arranged at a center of an object lens in a taking picture device 12. A front edge of a probe is in contact with the surface of a work by the probe 10 that is provided at a middle portion of a cylindrical case 11 in a vertical direction so that the surface of the work and the determined pattern face each other. The determined pattern is illuminated by light of a light source so that a reflected image of the determined pattern is projected onto the surface of the work. A picture of the reflected image is taken by the taking picture device. The resulted image data includes standard deviation of brightness distribution of the resulted image data positioned on radius lines extending in all directions to outside from a center of the ring pattern image.Type: GrantFiled: June 20, 2008Date of Patent: August 7, 2012Assignee: ARC Harima Co., Ltd.Inventors: Kazuhisa Shibata, Hiroyuki Ishigaki
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Patent number: 8218153Abstract: The resolution of an optical measurement system for measuring a surface of an object, wherein a measurement light strip is captured on a surface of an object by means of a matrix sensor with a resolution limited by quantization in a quantization direction, can be improved by calculating an effective mapping location in the quantization direction on the basis of the associated real mapping location and a further real mapping location adjacent to the associated real mapping location in a direction perpendicular to the quantization direction.Type: GrantFiled: December 12, 2007Date of Patent: July 10, 2012Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Guenther Kostka, Peter Schmitt
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Publication number: 20120130598Abstract: An object detection system for a mobile machine is disclosed. The object detection system may have a first array of laser beam transmitters configured to generate a first plurality of grid lines on a ground surface, and a second array of laser beam transmitters configured to generate a second plurality of grid lines on the ground surface and produce a plurality of intersections with the first plurality of grid lines. The object detection system may also have a receiver configured to detect the plurality of intersections and generate a signal used to create an electronic terrain map based on the detection. At least one of the first and second arrays of laser beam transmitters may be selectively movable during operation to change a location of the plurality of intersections.Type: ApplicationFiled: November 22, 2010Publication date: May 24, 2012Inventors: Ramadev Burigsay Hukkeri, Samir Med Kherat
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Publication number: 20120120412Abstract: A surface measurement module for 3-D triangulation-based image acquisition of a surface-under-inspection and under observation by at least one camera. The module having: (a) a casing housing an optical system comprising a plurality of lens elements positioned between a fixed-pattern optic and a light source; (b) an output of said fixed-pattern optic comprising a multi-frequency pattern comprising a plurality of pixels representing at least a first and second superimposed sinusoid projected simultaneously, each of the sinusoids represented by the pixels having a unique temporal frequency and each of the pixels projected to satisfy I n p = A p + ? k = 1 K ? B k p ? cos ? ( 2 ? ? ? ? f k ? y p + 2 ? ? ? ? k ? ? n N ) Eq . ? ( 1.Type: ApplicationFiled: November 15, 2011Publication date: May 17, 2012Applicant: Seikowave, Inc.Inventors: Matthew W. BELLIS, Daniel L. Lau
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Publication number: 20120120413Abstract: A surface measurement module for 3-D triangulation-based image acquisition of a subject-under-inspection and under observation by at least one camera. The module having: (a) casing housing an optical system comprising a plurality of lens elements positioned between a fixed-pattern optic and a light source; (b) an output of said fixed-pattern optic comprising a multi-frequency pattern comprising a plurality of pixels representing at least a first and second superimposed sinusoid projected simultaneously, each of the sinusoids represented by the pixels having a unique temporal frequency and each of the pixels projected to satisfy I n p = A p + ? k = 1 K ? B k p ? cos ? ( 2 ? ? ? ? ? f k ? y p + 2 ? ? ? ? ? kn N ) Eq . ? ( 1.Type: ApplicationFiled: November 15, 2011Publication date: May 17, 2012Applicant: Seikowave, Inc.Inventors: Matthew W. BELLIS, Daniel L. Lau
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Publication number: 20120086951Abstract: An optoelectronic sensor (10) is provided with a plurality of light transmitters (14) and light receivers (26) that form between one another a field (20) of mutually parallel monitoring beams (18), wherein beam shaping optics (16, 24) are assigned to the light transmitters (14) and the light receivers (26). The optics (16, 24) comprise a geometry and arrangement leading to a mutual overlap of the optics (16, 24) in a direction diagonal, in particular perpendicular, to the field (20).Type: ApplicationFiled: August 17, 2011Publication date: April 12, 2012Applicant: SICK AGInventors: Daniel KIETZ, Jürgen BÜRGER, Axel HAUPTMANN, Günter HIRT
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Patent number: 8144341Abstract: A method for making a sample for evaluation of laser irradiation position and evaluating the sample, and an apparatus which is switchable between a first mode of modification of semiconductor and a second mode of making and evaluating the sample. Specifically, a sample is made by irradiating a semiconductor substrate for evaluation with a pulse laser beam while the semiconductor substrate is moved for evaluation at an evaluation speed higher than a modifying treatment speed, each relative positional information between pulse-irradiated regions in the sample is extracted, and stability of the each relative positional information between pulse-irradiated regions is evaluated. The evaluation speed is such a speed that separates the pulse-irradiated regions on the sample from each other in a moving direction.Type: GrantFiled: October 24, 2011Date of Patent: March 27, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Ryusuke Kawakami, Miyuki Masaki
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Patent number: 8140295Abstract: An auto-referenced sensing device for scanning an object to provide three-dimensional surface points, including: a Light-Emitting Diode (LED) light source emitting light for illuminating and enabling image acquisition of retro-reflective target positioning features provided at a fixed position on the object; a laser pattern projector, additional to the LED light source, for providing a projected laser pattern on a surface of the object for illuminating and enabling image acquisition of dense points between the retro-reflective target positioning features; at least a pair of cameras for simultaneously acquiring a 2D image of the object, the projected laser pattern and the retro-reflective target positioning features are apparent on the image, wherein the simultaneous images contain both positioning measurements from the retro-reflective target positioning features and dense surface measurements from the points enabled by the projected laser pattern.Type: GrantFiled: December 3, 2010Date of Patent: March 20, 2012Assignee: Creaform Inc.Inventors: Patrick Hebert, Éric Saint-Pierre, Dragan Tubic
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Publication number: 20120057174Abstract: A laser scanner or a laser tracker includes a light source that emits a light beam within an environment, and a data capture component that captures the light beam reflected back to the laser scanner or tracker from the environment. The laser scanner or tracker also includes a projector integrated within a body of the laser scanner or tracker or mounted to the body of the laser scanner or tracker at a predetermined location, the projector being operable to project visible information onto an object located within the environment, the projected visible information being indicative of images, data or information, the projected visible information being at least one of design intent information, information acquired by the laser scanner or tracker, or guidance to an operator.Type: ApplicationFiled: September 8, 2011Publication date: March 8, 2012Applicant: FARO TECHNOLOGIES, INC.Inventor: Clark H. Briggs
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Patent number: 8125635Abstract: Apparatus for performing Raman analysis may include a laser source module, a beam delivery and signal collection module, a spectrum analysis module, and a digital signal processing module. The laser source module delivers a laser beam to the beam delivery and signal collection module. The beam delivery and signal collection module delivers the laser source beam to a sample, collects Raman scattered light scattered from the sample, and delivers the collected Raman scattered light to the spectrum analysis module. The spectrum analysis module demultiplexes the Raman scattered light into discrete Raman bands of interest, detects the presence of signal energy in each of the Raman bands, and produces a digital signal that is representative of the signal energy present in each of the Raman bands. The digital signal processing module is adapted to perform a Raman analysis of the sample.Type: GrantFiled: June 21, 2011Date of Patent: February 28, 2012Assignee: PD-LD, Inc.Inventors: Vladimir Sinisa Ban, Boris Leonidovich Volodin, Neal R. Stoker
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Publication number: 20120019836Abstract: A three-dimensional shape measuring apparatus measures by analyzing an optical pattern projected to the measurement target, and luminance of the optical pattern. The apparatus includes a mounting stage having a reference plane of a height of the measurement target, a measurement head that projects the optical pattern, to the measurement target and reference plane, to capture images of the optical patterns, and a displacement portion displaces the measurement head in a height direction. A phase computing portion computes a phase of the optical pattern in a certain pixel included in the captured image. A height computing portion computes a height of the measurement target based on the phase, and a feed amount computing portion computes a displacement amount based on the height. The height computing portion computes the height based on the phase and corrects the height based on the displacement amount, thereby computing the height of the measurement target.Type: ApplicationFiled: March 26, 2010Publication date: January 26, 2012Applicant: OMRON CORPORATIONInventors: Yuki Honma, Daisuke Mitsumoto, Sunao Takemura
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Publication number: 20120013917Abstract: The present invention provides a measuring device, comprising a light source unit 2 for projecting a pulsed distance measuring light 10 toward an object to be measured, a projecting light optical system 3 for projecting the pulsed distance measuring light emitted from the light source unit on the object to be measured, a light receiving optical system 4 for receiving a reflected pulsed distance measuring light 10? from the object to be measured, a light receiving part 6 having a single photodetector 12 for detecting the reflected pulsed distance measuring light as received, and a control unit 7 for measuring a distance by measuring time from light emission of the pulsed distance measuring light to receipt of the reflected pulsed distance measuring light based on a detection signal from the photodetector, wherein the light source unit has a plurality of light emitting sources 8 arranged in a known relation with respect to an optical axis of the projecting light optical system, and a driving unit 9 for drivingType: ApplicationFiled: June 13, 2011Publication date: January 19, 2012Applicant: KABUSHIKI KAISHA TOPCONInventors: Fumio Ohtomo, Kaoru Kumagai
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Patent number: 8094322Abstract: In a method for the determination of the 3D coordinates of an object (2), a pattern is projected (1) onto the object (2) and the pattern reflected by the object (2) is taken (3) and evaluated. To improve such a method, a pattern is projected onto a first part region (12) of the object (2) in a first step and the pattern reflected by this part region (12) of the object (2) is taken. In a second step, a pattern is projected onto a second part region of the object (2) and the pattern reflected by this part region of the object (2) is taken. The patterns taken are evaluated.Type: GrantFiled: March 25, 2009Date of Patent: January 10, 2012Assignee: Steinbichler Optotechnik GmbHInventors: Thomas Mayer, Marcus Steinbichler, Alexander Frey
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Publication number: 20110310399Abstract: A sensor system and method for analyzing a feature in a sensing volume. The system imaging the feature with a first sensor and a second sensor that cooperate to form a contiguous sensing volume.Type: ApplicationFiled: September 1, 2011Publication date: December 22, 2011Applicant: Perceptron, Inc.Inventors: Shyam P. Keshavmurthy, Chengchih Lin, David Crowther
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Publication number: 20110299094Abstract: Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.Type: ApplicationFiled: February 23, 2009Publication date: December 8, 2011Applicant: DIMENSIONAL PHOTONICS INTERNATIONAL, INC.Inventors: Robert F. Dillon, Neil H. K. Judell, Timothy I. Fillion, Gurpreet Singh, Nathan E. Wallace
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Patent number: 8064684Abstract: An interface that allows a user to explore complex three dimensional datasets. The user manipulates a physical modeling material that defines the geometry of a surface that intersects a voxel dataset and the intersected voxel values are projected back onto the surface of the physical material as image data. A position sensor captures position data specifying the geometry of the surface, a processor compares the array of data values with the captured position data to identify selected ones of these data values whose position in the array corresponds to the geometry of the surface, and a projector for illuminates the surface with an image representative of the data at the array/surface intersection.Type: GrantFiled: October 29, 2003Date of Patent: November 22, 2011Assignee: Massachusetts Institute of TechnologyInventors: Carlo Filippo Ratti, Benjamin Tarquinn Fielding Piper, Yao Wang, Hiroshii Ishii
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Patent number: 8064068Abstract: A system for sensing a three-dimensional topology of a test surface is provided. A first illumination source generates first patterned illumination from a first point of view. A second illumination source generates second patterned illumination from a second point of view, the second point of view differing from the first point of view. An area array image detector simultaneously acquires at least first and second fringe images relative to the first and second patterned illuminations. A controller is coupled to the first and second sources and to the detector. The controller generates a height topology of the test surface based on images acquired while the first and second patterned illuminators are energized.Type: GrantFiled: January 23, 2009Date of Patent: November 22, 2011Assignee: CyberOptics CorporationInventors: Lance K. Fisher, Paul R. Haugen
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Patent number: 8049213Abstract: A method of measuring dimensional characteristics includes providing a substrate and forming a reflective layer over the substrate. A dielectric layer is then formed over the reflective layer. The dielectric layer includes a grating pattern and a resistivity test line inset in a transparent region. Radiation is then directed onto the dielectric layer so that some of the radiation is transmitted through the transparent region to the reflective layer. A radiation pattern is then detected from the radiation reflected and scattered by the metal grating pattern. The radiation pattern is analyzed to determine a first dimensional information. Then the resistance of the resistivity test line is measured, and that resistance is analyzed to determine a second dimensional information. The first and second dimensional informations are then compared.Type: GrantFiled: December 18, 2007Date of Patent: November 1, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ching-Chung Su, Yi-Wei Chiu, Tzu Chan Weng, Yih Song Chiu, Pin Chia Su, Chih-Cherng Jeng, Kuo-Hsiu Wei
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Patent number: 8045184Abstract: A method for making a sample for evaluation of laser irradiation position and evaluating the sample, and an apparatus which is switchable between a first mode of modification of semiconductor and a second mode of making and evaluating the sample. Specifically, a sample is made by irradiating a semiconductor substrate for evaluation with a pulse laser beam while the semiconductor substrate is moved for evaluation at an evaluation speed higher than a modifying treatment speed, each relative positional information between pulse-irradiated regions in the sample is extracted, and stability of the each relative positional information between pulse-irradiated regions is evaluated. The evaluation speed is such a speed that separates the pulse-irradiated regions on the sample from each other in a moving direction.Type: GrantFiled: January 28, 2009Date of Patent: October 25, 2011Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Ryusuke Kawakami, Miyuki Masaki
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Patent number: 8040527Abstract: The invention describes an optical deflection element for the refractive production of a spatially structured bundle of light beams fanned concentrically to an optical axis of the deflection element. The optical deflection element has a base body made of optically transparent material, and has a light input and output side. The light input side is configured such that a primary bundle of light beams can be coupled in the base body. The light output side has a cylindrically symmetrical contour, which defines a recess in the base body. The fanning of the primary bundle of light beams is achieved by refraction on rotationally symmetric interfaces, which are variably inclined relative to the optical axis. The invention further relates to an optical measuring device for the three-dimensional measurement of a cavity in an object and a method for producing a concentrically fanned, spatially structured bundle of light beams.Type: GrantFiled: January 28, 2008Date of Patent: October 18, 2011Assignee: Siemens AktiengesellschaftInventors: Martin Kunz, Anton Schick, Michael Stockmann
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Patent number: 8032327Abstract: A method for obtaining three-dimensional surface points of an object in an object coordinate system having two groups of steps. The method includes providing a set of target positioning features on the object. In a first group of steps, acquiring 2D first images of the object, extracting 2D positioning features; calculating a first set of calculated 3D positioning features; computing first transformation parameters, cumulating the first set of transformed 3D positioning features to provide and augment the set of reference 3D positioning features. In a second group of steps, providing a projected pattern on a surface of the object; acquiring 2D second images of the object, extracting 2D surface points and second sets of 2D positioning features; calculating a set of 3D surface points; calculating a second set of calculated 3D positioning features; computing second transformation parameters, transforming the 3D surface points into transformed 3D surface points.Type: GrantFiled: December 3, 2010Date of Patent: October 4, 2011Assignee: Creaform Inc.Inventors: Patrick Hebert, Éric Saint-Pierre, Dragan Tubic
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Patent number: 8014002Abstract: A structured light sensor system for measuring contour of a surface includes an imaging lens system, an image capturing device, a first set of micro electromechanical system (MEMS) mirrors, and a control module. The imaging lens system focuses light reflected from the surface, wherein the imaging lens system has a corresponding lens plane. The image capturing device captures the focused light and generates data corresponding to the captured light, wherein the image capturing device has a corresponding image plane that is not parallel to the lens plane. The first set of MEMS mirrors direct the focused light to the image capturing device. The control module receives the data, determines a quality of focus of the captured light based on the received data, and controls the first set of MEMS mirrors based on the quality of focus to maintain a Scheimpflug tilt condition between the lens plane and the image plane.Type: GrantFiled: April 1, 2009Date of Patent: September 6, 2011Assignee: Perceptron, Inc.Inventors: Shyam P. Keshavmurthy, Chengchih Lin, Alfred A. Pease, Richard A. Krakowski
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Patent number: 7990545Abstract: The invention provides for surface mapping of in-vivo imaging subjects using a single camera and an illuminator that projects a plurality of targets such as spots on the subject. By limiting the depth-of-field of the camera lens, or of the illuminator optics, or both, a spatial plane is defined in which the spots are most sharply in focus. Controlled displacement of this plane relative to the subject is achieved through movement of the mechanical stage on which a subject is placed; or through movement of the best-focus plane by adjustment of the camera, lens, or illuminator optics. Images are taken at several relative positions of the best-focus plane and the subject, and the height of individual points on the subject is determined through analysis of focus, given the known displacements. A mesh or other surface can be constructed from individual point locations, to provide a surface map of the subject. Accuracy of 0.5 mm can be readily attained for mice and similarly sized subjects.Type: GrantFiled: December 27, 2007Date of Patent: August 2, 2011Assignee: Cambridge Research & Instrumentation, Inc.Inventors: Peter Domenicali, Clifford Hoyt, Peter Miller
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Patent number: 7961309Abstract: A metrology tool is arranged to measure a parameter of a substrate that has been provided with a pattern in a lithographic apparatus. The metrology tool includes a base frame, a substrate table, a sensor, a displacement system, a balance mass, and a bearing. The substrate table is constructed and arranged to hold the substrate. The sensor is constructed and arranged to measure a parameter of the substrate. The displacement system is configured to displace the substrate table or the sensor with respect to the other in a first direction. The bearing is configured to movably support the first balance mass so as to be substantially free to translate in a direction opposite of the first direction in order to counteract a displacement of the substrate table or sensor in the first direction.Type: GrantFiled: August 5, 2009Date of Patent: June 14, 2011Assignee: ASML Netherlands B.V.Inventors: Reinder Teun Plug, Arie Jeffrey Maria Den Boef, Karel Diederick Van Der Mast
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Patent number: 7961981Abstract: The present invention relates to a method of obtaining a three-dimensional (3D) image of the outer ear canal. This will be achieved by scanning at least the outer ear canal by use of a video camera, transmitting the image data of the video camera through a connection to a service provider, analyzing the image data by the service provider with respect of acceptance and integrity, transmitting status information back to the video camera and further processing/converting accepted image data into 3D geometric data. Thus, video image data will be retrieved from the part of interest of the ear and the quality and integrity of this information will be checked by the service provider prior to storing and process/converting this data into 3D imaging data that can be used for an automated manufacturing process for the outer shape of hearing devices, hearing protection devices or hearing aid shells.Type: GrantFiled: November 24, 2004Date of Patent: June 14, 2011Assignee: Phonak AGInventor: Christian Berg
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Patent number: 7957007Abstract: A projector that illuminates a scene with multiplexed light patterns includes a passive physical mask, and a set of spatially dispersed optical emitters arranged behind the physical mask. The optical emitters are modulated to project a set of unique optical light patterns.Type: GrantFiled: May 17, 2006Date of Patent: June 7, 2011Assignee: Mitsubishi Electric Research Laboratories, Inc.Inventors: Ramesh Raskar, Paul H. Dietz
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Patent number: 7940384Abstract: Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen are provided. One inspection system configured to block specular reflection and suppress modulation in an image of a specimen includes an illumination subsystem configured to illuminate the specimen with a predetermined pattern of spatially incoherent light. The system also includes an optical element configured to block light reflected from periodic features formed on the specimen and at least some light diffracted from the periodic features. The system further includes a detector configured to detect light that passes through the optical element and to generate an image of the specimen in response to the detected light. The optical element blocks specular reflection and at least partially suppresses modulation in the image due to the periodic features. The system also includes a processor configured to detect defects on the specimen using the image.Type: GrantFiled: December 17, 2007Date of Patent: May 10, 2011Assignee: KLA-Tencor Corp.Inventors: Andrew V. Hill, Robert M. Danen
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Publication number: 20110075156Abstract: A system and method for measuring a height of objects on a moving surface comprising providing a linear image sensor positioned transverse to a direction of travel of the moving surface, and at least one light source positioned collinear to the linear image sensor and proximate to an edge of the moving surface so that the light source projects a unique patterned light sequence across a width of the moving surface, detecting a transverse shift in a portion of the unique patterned light sequence with respect to the direction of travel of the moving surface as an object passes through the unique patterned light sequence, determining an amount of shift of the portion of the unique patterned light sequence, and determining a height of the object based on the portion of the unique patterned light sequence shift.Type: ApplicationFiled: December 8, 2010Publication date: March 31, 2011Applicant: ACCU-SORT SYSTEMS, INC.Inventors: Mehul Patel, Edward Douglas Hatton, Xinping Liu, Paul Poloniewicz
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Patent number: 7916932Abstract: A 3D depth imaging method and system are disclosed. The 3D depth imaging method involves radiating light at a measurement target object using a projection means and imaging the light using an image receiving means, and includes the steps of assigning a unique transmitting side address to a signal corresponding to each pixel of the projection means to encode the signal; projecting multiple light patterns at the projection means to transmit the signal; receiving the encoded signal at the image receiving means; separating the received signal to restore the address; and determining a pixel position of the object using the transmitting side address and the restored address. With the 3D depth imaging method and system, it is possible to exactly separate signals received by the image receiving means even when the signals are overlap and the geometrical structure of the object varies, and it is also possible to obtain a depth image that is robust against ambient environmental noise.Type: GrantFiled: February 15, 2006Date of Patent: March 29, 2011Assignee: IN-G Co., Ltd.Inventors: Suk-Han Lee, Jong-Moo Choi, Dae-Sik Kim, Seung-Sub Oh
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Patent number: 7912673Abstract: A system, apparatus and method for three-dimensional scanning and digitization of the surface geometry of objects are claimed. The system includes a hand-held apparatus that is auto-referenced. The system is auto-referenced since it does not need any positioning device to provide the 6 degree of freedom transformations that are necessary to integrate 3D measurements in a global coordinate system while the apparatus is manipulated to scan the surface. The system continuously calculates its own position and orientation from observation while scanning the surface geometry of an object. To do so, the system exploits a triangulation principle and integrates an apparatus that captures both surface points originating from the reflection of a projected laser pattern on an object's surface and 2D positioning features originating from the observation of target positioning features.Type: GrantFiled: March 13, 2006Date of Patent: March 22, 2011Assignee: Creaform Inc.Inventors: Patrick Hébert, Éric Saint-Pierre, Dragan Tubic
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Patent number: 7901096Abstract: The invention is directed to a method for illuminating an object and projecting its image on a ground glass screen. Optical comparators conventionally use incandescent illumination, either mercury arc or halogen. The use of an array of high intensity LED devices, provides many options for packaging the required optical components used in comparators.Type: GrantFiled: July 16, 2007Date of Patent: March 8, 2011Assignee: Dorsey Metrology InternationalInventor: Peter Donald Klepp
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Patent number: 7889338Abstract: A coordinate measuring machine for the structured illumination of substrates is disclosed. The incident light illumination means and/or the transmitted light illumination means have a pupil access via which at least one optical element is positionable in the optical illumination path. The size and/or type and/or the polarization of the pupil illumination may be manipulated such that the structured illumination of the substrate in the coordinate measuring machine corresponds to the structured illumination of this substrate in the exposure process with a stepper.Type: GrantFiled: May 27, 2008Date of Patent: February 15, 2011Assignee: Vistec Semiconductor Systems GmbHInventor: Michael Heiden
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Patent number: 7872764Abstract: A predictive suspension system for a vehicle includes an imaging sensor, and energy source and a control. The imaging sensor is disposed at a vehicle and has a generally downward field of view, with the field of view encompassing an area forward of a tire of the vehicle. The energy source is operable to emit illumination in at least one linear pattern so that the linear pattern is projected onto a portion of the area forward of the tire of the vehicle that is encompassed by the field of view of the imaging sensor. The control processes image data captured by the imaging sensor and detects surface irregularities on a surface in front of the vehicle tire in response to the image processing.Type: GrantFiled: October 15, 2008Date of Patent: January 18, 2011Assignee: Magna Electronics Inc.Inventors: Michael J. Higgins-Luthman, Yuesheng Lu, Duane W. Gebauer
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Patent number: 7869061Abstract: A surface-distortion measuring device and a surface-distortion measuring method can quantitatively, rapidly, and highly accurately measure and evaluate surface-distortion distribution at all of observable points on a specular or semi-specular surface of a measurement target. The device includes pattern displaying means 2 capable of switching and displaying a plurality of kinds of light-and-shade patterns 5, capturing means 3 for capturing mirror images, reflected in the specular or semi-specular surface of a measurement target 1, of the plurality of light-and-shade patterns displayed on the pattern displaying means, and surface-distortion distribution calculating means 10 for performing image processing on the captured mirror images of the plurality of light-and-shade patterns to calculate surface-distortion distribution of the measurement-target surface.Type: GrantFiled: September 14, 2006Date of Patent: January 11, 2011Assignees: JFE Steel Corporation, JFE Techno-Research CorporationInventors: Kentaro Sato, Takanobu Saito, Takashi Iwama, Akihide Yoshitake, Mitsuaki Uesugi
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Patent number: 7860549Abstract: The present invention provides systems and methods for obtaining a three-dimensional (3D) representation of one or more light sources inside a sample, such as a mammal. Mammalian tissue is a turbid medium, meaning that photons are both absorbed and scattered as they propagate through tissue. In the case where scattering is large compared with absorption, such as red to near-infrared light passing through tissue, the transport of light within the sample is described by diffusion theory. Using imaging data and computer-implemented photon diffusion models, embodiments of the present invention produce a 3D representation of the light sources inside a sample, such as a 3D location, size, and brightness of such light sources.Type: GrantFiled: September 29, 2009Date of Patent: December 28, 2010Assignee: Xenogen CorporationInventors: Daniel G. Stearns, Bradley W. Rice, Michael D. Cable
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Patent number: 7852477Abstract: A method for calculating a correction amount to a focus amount or an exposure dose in exposing a substrate with an exposure apparatus includes a storing step of storing plural sets, each of which is a combination of a set focus amount, a set exposure dose, and first image information of a pattern formed on the substrate through an exposure with the set focus amount and the set exposure dose, the plural sets having different focus amounts and/or different exposure doses, an obtaining step of obtaining second image information of a pattern formed on the substrate through another exposure, and a selecting step of finding a correlation value between the second image information obtained in the obtaining step and the first image information in the plural sets stored in the storing step, and of selecting at least two sets having two highest correlation values among the plural sets.Type: GrantFiled: May 25, 2007Date of Patent: December 14, 2010Assignee: Canon Kabushiki KaishaInventor: Tomoyuki Miyashita
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Patent number: 7853046Abstract: An imaging method and system are presented for use in automatic monitoring the body condition of an animal A predetermined region of interest on the animal body is imaged, and data indicative of the acquired one or more images is processed to obtain a three-dimensional representation of the region of interest. The three-dimensional representation is analyzed to determine a predetermined measurable parameter indicative of a surface relief of the region of interest which is indicative of the body condition of the imaged animal. The technique of the present invention is useful for determining the energy balance condition of the animal (e.g., dairy cow) or the tendency in the energy balance change, to thereby enable appropriately adjusting nutrition of the specific animal; as well as for determining the existence of in coordination and/or locomotion in the animal's natural marching.Type: GrantFiled: July 27, 2003Date of Patent: December 14, 2010Assignee: Vet-Tech Ltd.Inventor: David Sharony
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Patent number: 7830529Abstract: A method for optically measuring a surface is described, in particular, for a surface having a spherical form and a high reflection of radiation. The surface is illuminated by at least one radiation source, as well as by at least one structured light source, in order to produce an illumination structure on the surface to be measured, and to then record the illumination structure using a camera; prior to measuring the surface, a coating being applied thereto in order to reduce the reflected radiation, the electrostatic coating principle being followed when applying the coating to the spherical surface. Thus, a method for optically measuring a surface is described, which provides for a coating to be uniformly deposited on the entire surface of the test object and to have a thickness of less than 0.01 mm.Type: GrantFiled: November 8, 2006Date of Patent: November 9, 2010Assignee: MTU Aero Engines GmbHInventors: Benjamin Grosskurth, Wilhelm Satzger
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Patent number: 7826067Abstract: Described is a method and apparatus for obtaining additional information from an object and a method for surface imaging and three-dimensional imaging. Single lens, single aperture, single sensor system and stereo optic systems are enhanced via selective filtering, use of defocusing information, use of an addressable pattern, image matching, and combinations thereof.Type: GrantFiled: January 22, 2008Date of Patent: November 2, 2010Assignee: California Institute of TechnologyInventors: Morteza Gharib, Emilio Graff, Francisco Pereira
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Patent number: 7812972Abstract: A reticle has a mask substrate, a test pattern established on the mask substrate having an asymmetrical diffraction grating so as to generate positive first order diffracting light and negative first order diffracting light in different diffraction efficiencies, and a device pattern adjacent to the test pattern established on the mask substrate.Type: GrantFiled: August 27, 2008Date of Patent: October 12, 2010Assignee: Kabushiki Kaisha ToshibaInventors: Takashi Sato, Masafumi Asano, Hideki Kanai
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Patent number: 7804586Abstract: A 3D scanning apparatus configured to image a physical entity comprises a radiation projector for projecting a plurality of radiation stripes onto the physical entity, a detector for detecting striped radiation received from the physical entity; and a data storage device for storing the received radiation as a pixellated bitmap image, the apparatus characterised in that the physical entity, the radiation projector and the detector are geometrically arranged to constrain the number of times that each received stripe is permitted to occur in a given pixel row of the bitmap, the geometrica) constraint determining a stored occlusion classification comprising a plurality of types of occlusions and the apparatus additionally comprising an occlusion type processing means configured to utilise the classification for detecting the various types of occlusions in said received image data.Type: GrantFiled: February 3, 2005Date of Patent: September 28, 2010Assignee: Sheffield Hallam UniversityInventors: Marcos A. Rodrigues, Alan Robinson, Lyuba Alboul