Projection Of Structured Light Pattern Patents (Class 356/603)
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Patent number: 7796277Abstract: An apparatus for determining surface topology of a portion (26) of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.Type: GrantFiled: December 3, 2008Date of Patent: September 14, 2010Assignee: Cadent Ltd.Inventors: Noam Babayoff, Isaia Glaser-Inbari
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Publication number: 20100222684Abstract: Methods, systems, and apparatus for estimating physical parameters using three dimensional representations. In one aspect, predetermined light patterns are projected onto an object and light patterns resulting from an interaction of the projected light patterns and portions of the object are detected. Three dimensional locations of multiple light elements in the detected light pattern are determined, and physical parameters of the object, for example, weight, are estimated based on the locations.Type: ApplicationFiled: February 3, 2010Publication date: September 2, 2010Applicant: Body Surface Translations, Inc.Inventors: Karol Hatzilias, Giorgos Hatzilias, James Alan Burns Emsley, Harris Bergman, Chris Van Buren, John Durbin, Nate Bergland
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Publication number: 20100208274Abstract: The invention is related to an apparatus for the representation of a geometrical figure on the surface of a patient's body that is situated on a support, comprising at least one projection device, by which a given geometrical figure can be projected onto the three-dimensional surface of the patient's body, at least one control device and at least one optical sensor device, by which the geometrical figure projected onto the surface of the patient's body can be acquired and the acquired data can be supplied to the control device, wherein the control device is realised to determine the three-dimensional coordinates of the geometrical figure projected onto the patient's body from the data acquired by the sensor device, and wherein the control device is realised to compare the determined three-dimensional coordinates of the geometrical figure projected onto the patient's body with desired three-dimensional coordinates.Type: ApplicationFiled: February 12, 2010Publication date: August 19, 2010Applicant: LAP GmbH Laser ApplikationenInventors: Johann Kindlein, Tim Thurn
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Publication number: 20100209002Abstract: The invention relates to a method for optically scanning the three-dimensional geometry of an object by means of triangulation, in which a pattern (9, 9?) is projected onto the object (7) to be scanned in order to obtain a 3D data set, and the projected pattern (9, 9?) is recorded in an image (40, 41). In a first step for the production of at least one first image (40), a first pattern (9) is projected and in a second step for the creation of at least one further image (40), a further pattern (9?) deviating from the first as regards position or shape is projected onto the object (7) to be scanned and the image (41) is created. The first image (40) and the further image (41) comprise at least one common point (44). The 3D data acquired from the images (40, 41) are merged in a subsequent step on the basis of the 3D data of the at least one common point (44) such that the 3D data acquired from said images (40, 41) agree at least with reference to the 3D data of the common point (44) in the 3D data set.Type: ApplicationFiled: April 29, 2010Publication date: August 19, 2010Applicant: SIRONA DENTAL SYSTEMS GMBHInventors: FRANK THIEL, JOACHIM PFEIFFER
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Patent number: 7768656Abstract: A system and method are provided for the 3D measurement of the shape of material objects using non-contact structured light triangulation. The system includes a light projector for projecting a structured light pattern onto the surface of any object and a camera for capturing an image of the structured light pattern acting on the surface of the object. The system further includes computing device for determining the 3D measurement of the surface shape of the illuminated object through a triangulation algorithm employed based on a calculated correspondence between the projected structured light and the captured image. The structured light includes coded elements that lie within planes passing through vertices of the central projection areas of both the projector and the camera also that pass through the space of the object being measured.Type: GrantFiled: August 28, 2007Date of Patent: August 3, 2010Assignee: Artec Group, Inc.Inventors: Nikolay L. Lapa, Yury A. Brailov
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Publication number: 20100149551Abstract: A structured light imaging system for measuring coordinates of a surface may include a first imaging lens, a spatial light modulator provided after the first imaging lens, a second imaging lens provided after the spatial light modulator, and an imaging sensor provided after that second imaging light modulator. A method of measuring coordinates of a surface using a structured light imaging system may include illuminating the surface with structured light from a projector and adjusting light intensity at each pixel of the imaging system by using a feedback loop system such that each pixel of the imaging sensor will operate in a linear response range.Type: ApplicationFiled: December 16, 2009Publication date: June 17, 2010Applicant: FARO TECHNOLOGIES, INC.Inventor: Yuri Malinkevich
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Publication number: 20100141932Abstract: Systems and methods to control projection of a pattern are provided. A particular method includes receiving first three-dimensional coordinates that specify one or more locations on a surface of a workpiece where the one or more locations correspond to a part definition to be projected onto the surface. The method also includes computing scan angles for a scanning system based on the first three-dimensional coordinates. The scan angles specify angles used by the scanning system to direct a beam of light to project the part definition onto the surface. The method also includes sending control signals to the scanning system based on the scan angles.Type: ApplicationFiled: February 16, 2010Publication date: June 10, 2010Applicant: The Boeing CompanyInventors: Jonathan M. Saint Clair, Mitchell D. Voth, David C. Soreide, William D. Sherman
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Patent number: 7724379Abstract: It is possible to measure a 3-dimensional shape by using a projector and an imaging device without requiring calibration in advance. A pattern light is applied from a projector to an object and this is imaged by an imaging device to capture an image as an input. An in-camera parameter, an in-projector parameter, a parameter of positional relationship between the camera and the projector are estimated. By using the estimation results, a 3-dimensional shape of the object is measured. When a laser pointer is attached to the projector and a laser is applied to the object for capturing an image as an input, scaling of the object shape can also be estimated. Moreover, when measuring a plurality of objects or measuring the same objects a plurality of times, the accuracy of the 3-dimensional shape respectively obtained can be increased by simultaneously processing the inputs.Type: GrantFiled: May 12, 2005Date of Patent: May 25, 2010Assignee: Technodream21, Inc.Inventors: Hiroshi Kawasaki, Ryo Furukawa
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Patent number: 7724932Abstract: A method for creating three-dimensional models of intra-oral scenes and features. The intra-oral scene is illuminated by a two-dimensional array of structured illumination points, with anti-aliasing achieved by using stored two-dimensional patterns of pixels for anti-aliasing. Using a single camera to form images reduces the amount of apparatus necessary to introduce into the patient's mouth. Three-dimensional models are obtained from the single image by triangulation with a stored image of the structured illumination onto a reference surface such as a plane. Alternative methods include the use of “bar-coded” one-dimensional patterns.Type: GrantFiled: October 31, 2007Date of Patent: May 25, 2010Assignee: Densys LtdInventors: Maurice Moshe Ernst, Micha Geffen, Carmi Cohen, Uri Neta
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Patent number: 7717574Abstract: For objects with non-Lambertian surfaces, an object surface is mapped by effectively modifying the reflective properties of the object surface being sensed. By effectively making the surface Lambertian with high albedo, a calibration imaging task is achieved using a typical camera from a single or small number of camera positions. The calibration method temporarily modifies the surface properties of the imaged object by applying a thin and opaque layer, such as a coating, covering, or veneer, to the object for the duration of the calibration imaging task. The surface of this layer is a Lambertian reflector, with medium to high albedo. The layer is snugly applied, so a shape of the layer is as close as possible to that of the surface. Once the layer is applied, imaging of the layer surface essentially yields the same shape as the underlying object.Type: GrantFiled: September 28, 2006Date of Patent: May 18, 2010Assignee: Obscura Digital, Inc.Inventors: Niklas Lundback, Travis Threlkel, William C. Thibault
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Patent number: 7720260Abstract: The embodiments described herein include an object detection system and method for identifying objects within an area. In one embodiment, the objection detection system may formulate an outline of a detected object and generate a three-dimensional shape or image of the object. Object information may be used to determine and communicate the position, range, and bearing of the object.Type: GrantFiled: September 13, 2006Date of Patent: May 18, 2010Assignee: Ford Motor CompanyInventors: Perry Macneille, Gianna Gomez-Levi
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Patent number: 7701591Abstract: The invention provides a handheld electronic gauge that is configured to obtain measurement data for an object, such as a wheel, rail, axle, or the like. The gauge includes one or more position sensors that automatically determine when the gauge is in a measurement position. The invention also provides a handheld computing device that can automatically determine when a gauge is in the measurement position and automatically obtain measurement data using the gauge. As a result, the invention provides a solution for measuring an object, such as a railway wheel, that is portable and capable of repeatedly providing various desired measurements, irrespective of the operator.Type: GrantFiled: April 27, 2009Date of Patent: April 20, 2010Assignee: International Electronic Machines CorporationInventors: Zahid F. Mian, Robert MacAllister, William Peabody
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Publication number: 20100091302Abstract: An apparatus and a method for measuring a three-dimensional shape are disclosed. The apparatus includes a transfer stage, a first projector, a second projector, a camera unit and a control unit. The transfer stage transfers a measurement object to a measurement position. The first projector irradiates a first pattern light having a first equivalent wavelength toward the measurement object in a first direction. The second projector irradiates a second pattern light having a second equivalent wavelength that is different from the first equivalent wavelength toward the measurement object in a second direction. The camera unit takes a first pattern image that is generated when the first pattern light is reflected by the measurement object, and a second pattern image that is generated when the second pattern light is reflected by the measurement object.Type: ApplicationFiled: October 8, 2009Publication date: April 15, 2010Applicant: KOH YOUNG TECHNOLOGY INC.Inventor: Min-Young KIM
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Patent number: 7692137Abstract: A photographing section photographs a photographing object, a light-projector projects a light spot parallel to or approximately parallel to an optical axis of the photographing section onto the photographing object, and a detector detects, from an image of the photographing object photographed by the photographing section, a light spot from the light-projector reflected by the photographing object on the basis of an arrangement position of the light-projector relative to the photographing section. A reflected light spot of light projected onto a detection object can be detected with certainty, and erroneous detection of the reflected light spot, in particular, erroneous detection due to disturbance light, can be prevented at a low cost, without an increase in size of the apparatus.Type: GrantFiled: August 22, 2008Date of Patent: April 6, 2010Assignee: Fujitsu LimitedInventors: Takahiro Aoki, Soichi Hama, Mitsuaki Fukuda
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Publication number: 20100060900Abstract: An intra-oral laser digitizer system provides a three-dimensional visual image of a real-world object such as a dental item through a laser digitization. The laser digitizer captures an image of the object by scanning multiple portions of the object in an exposure period. The intra-oral digitizer may be inserted into an oral cavity (in vivo) to capture an image of a dental item such as a tooth, multiple teeth or dentition. The captured image is processed to generate the three-dimension visual image.Type: ApplicationFiled: July 14, 2009Publication date: March 11, 2010Applicant: D4D TECHNOLOGIES, LLCInventors: Henley Quadling, Mark Quadling, Alan Blair
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Patent number: 7676114Abstract: A system for three-dimensional reconstruction of a surface profile of a surface of an object is provided that utilizes a binary pattern projected onto the surface of the object. A binary string consisting of a series of “1”s and “0”s is first created, and a binary pattern of light that is constructed in accordance with the binary string such that bright and dark bands of light of equal widths correspond to “1”s and “0”s from the binary string respectively is projected onto the surface. The binary pattern is shifted with respect to the surface multiple times, during which an image of the binary pattern illuminating the surface is obtained at each position of the binary pattern. Thereafter, a height of each predetermined point on the surface is calculated relative to a reference plane based upon the images cumulatively obtained at said predetermined point.Type: GrantFiled: December 16, 2005Date of Patent: March 9, 2010Assignee: ASM Assembly Automation Ltd.Inventors: Chi Kit Ronald Chung, Jun Cheng, Y. Edmund Lam, Shun Ming Kenneth Fung, Fan Wang, Wing Hong Leung
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Patent number: 7672505Abstract: The present invention relates to three-dimensional shape detection. In the present invention, a plurality of types of pattern lights formed of a series of alternate light and dark patterns are projected onto an object in a time series, an image of the object onto which each pattern light is projected is taken, a plurality of luminance images are generated, a code image having certain codes assigned to the pixels is generated in accordance with a result of threshold processing of the plurality of luminance images with respect to a certain threshold; and the three-dimensional shape of the object is calculated.Type: GrantFiled: September 28, 2006Date of Patent: March 2, 2010Assignee: Brother Kogyo Kabushiki KaishaInventor: Hiroyuki Sasaki
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Publication number: 20100046004Abstract: A pattern projecting apparatus usable with a three-dimensional imaging apparatus includes a light generator which emits a light beam, and a pattern adjusting unit disposed in front of the light generator. The pattern adjusting unit forms a projection pattern on an object, and adjusts a focus of the light beam emitted from the light generator.Type: ApplicationFiled: June 19, 2009Publication date: February 25, 2010Applicant: Samsung Electronics Co., Ltd.Inventors: Jeong-yub Lee, Seung-wan Lee, Woon-bae Kim, Seung-tae Choi
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Publication number: 20100020333Abstract: The invention describes an optical deflection element for the refractive production of a spatially structured bundle of light beams fanned concentrically to an optical axis of the deflection element. The optical deflection element has a base body made of optically transparent material, and has a light input and output side. The light input side is configured such that a primary bundle of light beams can be coupled in the base body. The light output side has a cylindrically symmetrical contour, which defines a recess in the base body. The fanning of the primary bundle of light beams is achieved by refraction on rotationally symmetric interfaces, which are variably inclined relative to the optical axis. The invention further relates to an optical measuring device for the three-dimensional measurement of a cavity in an object and a method for producing a concentrically fanned, spatially structured bundle of light beams.Type: ApplicationFiled: January 28, 2008Publication date: January 28, 2010Inventors: Martin Kunz, Anton Schick, Michael Stockmann
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Publication number: 20100007896Abstract: A manufacturing method and system are disclosed for illuminating a target. A light controller has a plurality of pixels, and light is projected from at least a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first angle. The pixels are controlled to establish illumination characteristics for first and second optical paths between the light controller and the target.Type: ApplicationFiled: September 25, 2009Publication date: January 14, 2010Inventor: David Fishbaine
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Patent number: 7646896Abstract: A device for user enrollment is adapted to capture an image of a pattern projected on a target and distorted on the three-dimensional (3D) surface of the target, such as a human face, and an image of a two-dimensional (2D) surface of the target. The device can include an illumination unit adapted to project a patterned light onto the surface of the target in an invisible light wavelength, a 3D image capturing device to capture an image of a pattern projected on the target and distorted on the 3D surface of the target. The device can also include a 2D image capturing device adapted to capture an image of a 2D frontal view of the target in visible light. The device can also include an orientation unit that displays the face of the target in order to facilitate the positioning of the target within the proper fields of view.Type: GrantFiled: July 12, 2006Date of Patent: January 12, 2010Assignee: A4VisionInventors: Artiom Yukhin, Andrey Klimov, Sergey Suhovey, Gleb Gusev, Alexey Gostomelsky
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Publication number: 20090323082Abstract: A profile of a surface of an object (12) that has a longitudinal axis is determined by arranging a camera (14) to view a portion of the surface with its viewing axis (15) substantially perpendicular to the longitudinal axis, and arranging two scanning light sources (16, 18) to define planes of illumination which define two lines on the surface, so that the camera produces an image including images of the two lines. From the separation of the two lines in the image the surface profile can be determined. The planes of illumination are preferably inclined to one another, as this can enhance sensitivity.Type: ApplicationFiled: July 26, 2007Publication date: December 31, 2009Applicant: DeltaRail Group LimitedInventors: Sandor Matyas Patko, Peter Daniel Asprey
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Publication number: 20090296081Abstract: A metrology tool is arranged to measure a parameter of a substrate that has been provided with a pattern in a lithographic apparatus. The metrology tool includes a base frame, a substrate table, a sensor, a displacement system, a balance mass, and a bearing. The substrate table is constructed and arranged to hold the substrate. The sensor is constructed and arranged to measure a parameter of the substrate. The displacement system is configured to displace the substrate table or the sensor with respect to the other in a first direction. The bearing is configured to movably support the first balance mass so as to be substantially free to translate in a direction opposite of the first direction in order to counteract a displacement of the substrate table or sensor in the first direction.Type: ApplicationFiled: August 5, 2009Publication date: December 3, 2009Applicant: ASML Netherlands B. V.Inventors: Reinder Teun PLUG, Arie Jeffrey Den Boef, Karel Diederick Van Der Mast
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Patent number: 7602507Abstract: The invention relates to a sensor for measuring the surface of an object, having a contrasting unit (3) for projecting a pattern onto the surface of the object, and having a camera (4) for recording of the pattern projected onto the surface of the object, in which the contrasting unit (3) has an LED projector (5). To achieve high precision and great robustness, the camera (4) and the LED projector (5) are located in the longitudinal direction. In addition, respective deflecting mirrors (8, 11) are assigned to the camera (4) and the LED projector (5) and are located on opposite ends, in the longitudinal direction of the sensor (1), of the housing (2) of the sensor (1).Type: GrantFiled: June 13, 2005Date of Patent: October 13, 2009Assignee: ISRA Vision AGInventors: Enis Ersue, Georg Lambert
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Patent number: 7599050Abstract: A method of inspecting an inspection target surface comprises: irradiating an irradiation light having a predetermined pattern on the inspection target surface; imaging the surface irradiated with the irradiation light; and inspecting the inspection target surface based on an obtained image of the inspection target surface. The irradiation light irradiated from an irradiation face has a mesh-like pattern including meshes of a same shape. Each mesh has an irradiation area smaller than a non-irradiation area in a plane normal to the optical axis. The inspection target surface is inspected based on lightness/darkness information of an image area in the obtained image corresponding to a non-irradiated area in the inspection target surface. A light point having intermediate brightness and formed in a dark face formed within the mesh is extracted as a defect candidate.Type: GrantFiled: October 20, 2004Date of Patent: October 6, 2009Assignee: Daihatsu Motor Co., Ltd.Inventors: Chie Ishikawa, Makoto Iwata, Mamoru Sakaue, Keisuke Kuroki
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Patent number: 7586598Abstract: A metrology tool is arranged to measure a parameter of a substrate that has been provided with a pattern in a lithographic apparatus. The metrology tool includes a base frame, a substrate table constructed and arranged to hold the substrate, a sensor constructed and arranged to measure a parameter of the substrate, a displacement system configured to displace the substrate table or the sensor with respect to the other in a first direction, a balance mass, and a bearing configured to movably support the first balance mass so as to be substantially free to translate in a direction opposite of the first direction in order to counteract a displacement of the substrate table or sensor in the first direction.Type: GrantFiled: May 21, 2007Date of Patent: September 8, 2009Assignee: ASML Netherlands B.V.Inventors: Reinder Teun Plug, Arie Jeffrey Den Boef, Karel Diederick Van Der Mast
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Patent number: 7583391Abstract: A three-dimensional measuring apparatus, method, and program for acquiring many pieces of information on a pattern of light by a single projection and highly accurate three-dimensional information at high speed. The three-dimensional measuring apparatus comprises a pattern projector serving as projecting means for projecting a pattern of light onto a measurement object, a camera serving as imaging means for capturing an image of the measurement object illuminated with the pattern of light, and a computer for processing data on the image captured by the camera. The computer computes the direction angle of each individual pattern of light which forms the projected pattern of light from the intensity value of the projected pattern of light detected from the captured image, divides the intensity distribution, and computes the depth distance from the phase value at each measuring point of the divided pattern. Thus, highly accurate three-dimensional information is acquired.Type: GrantFiled: October 24, 2005Date of Patent: September 1, 2009Assignee: School Juridical Person of Fukuoka Kogyo DaigakuInventor: Cunwei Lu
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Patent number: 7573583Abstract: An intra-oral laser digitizer system provides a three-dimensional visual image of a real-world object such as a dental item through a laser digitization. The laser digitizer captures an image of the object by scanning multiple portions of the object in an exposure period. The intra-oral digitizer may be inserted into an oral cavity (in vivo) to capture an image of a dental item such as a tooth, multiple teeth or dentition. The captured image is processed to generate the three-dimension visual image.Type: GrantFiled: February 26, 2007Date of Patent: August 11, 2009Assignee: D4D Technologies, LLCInventors: Henley S. Quadling, Mark S. Quadling, Alan Blair
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Patent number: 7573586Abstract: A method of measuring a coating thickness involves projecting a pattern of light on a surface. A first reflection of the pattern of light is received by a first image capturing device. A second reflection of the pattern of light is received by an image capturing device which may be the same or a different image capturing device. The first reflection is compared with the second reflection. A first dated map of the surface is created by comparing the first reflection and the second reflection. A coating is deposited on the surface. A second data map of the surface with the coating is created by comparing reflections. The first data map and the second data map are then compared to determine a thickness of the coating.Type: GrantFiled: June 2, 2008Date of Patent: August 11, 2009Assignee: United Technologies CorporationInventors: Jesse R. Boyer, Gene P. Allocca, Randall W. Joyner, Jeffrey K. Pearson
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Patent number: 7570370Abstract: A method serves for the determination of the 3D coordinates of an object (2). A fringe pattern is projected onto the object (2) in the method. The light reflected by the object (2) is recorded and evaluated. To improve such a method, the fringe pattern is projected onto the object (2) by an imaging element (only FIGURE).Type: GrantFiled: October 11, 2007Date of Patent: August 4, 2009Assignee: Steinbichler Optotechnik GmbHInventors: Markus Steinbichler, Thomas Mayer, Markus Estermann
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Patent number: 7565005Abstract: A three-dimensional data processing technique is disclosed which makes natural CG reproduction of a real existing object possible with as small a data amount and as small a calculation amount as possible. Three-dimensional data processing method, program, and system acquire first data showing at least one of a surface shape or taken images of a real existing object and generate a bump map for creating a three-dimensional image of the object based on the first data.Type: GrantFiled: February 17, 2004Date of Patent: July 21, 2009Assignee: Canon Kabushiki KaishaInventor: Yasuhiro Sawada
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Patent number: 7545516Abstract: A method and system for full-field fringe-projection for 3-D surface-geometry measurement, referred to as “triangular-pattern phase-shifting” is disclosed. A triangular grey-scale-level-coded fringe pattern is computer generated, projected along a first direction onto an object or scene surface and distorted according to the surface geometry. The 3-D coordinates of points on the surface are calculated by triangulation from distorted triangular fringe-pattern images acquired by a CCD camera along a second direction and a triangular-shape intensity-ratio distribution is obtained from calculation of the captured distorted triangular fringe-pattern images. Removal of the triangular shape of the intensity ratio over each pattern pitch generates a wrapped intensity-ratio distribution obtained by removing the discontinuity of the wrapped image with a modified unwrapping method. Intensity ratio-to-height conversion is used to reconstruct the 3-D surface coordinates of the object.Type: GrantFiled: December 1, 2006Date of Patent: June 9, 2009Assignee: University of WaterlooInventors: Peirong Jia, Jonathan David Kofman, Chad English
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Patent number: 7532333Abstract: A method teaches how to measure—even strongly curved—specular surfaces with an apparatus that measures a shape as well as local surface normals absolutely. This is achieved by the observation and evaluation of patterns that are reflected at the surface. The reflected patterns are observed from different directions. The evaluation is done by termination of those locations in space, where the surface normals that are observed from different directions, have at least deviations against each other.Type: GrantFiled: April 25, 2005Date of Patent: May 12, 2009Assignees: 3D-Shape GmbH, The University of ErlangenInventors: Gerd Haeusler, Markus Knauer, Ralf Lampalzer
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Patent number: 7532331Abstract: In target shape reconstruction, in order to determine efficiently and quickly the profile of complex targets on a substrate, the various degrees of freedom or variable parameters of the various shapes of which a single profile is made up can be reduced by linking together the variable parameters using simple formulae or by approximating the shape of the overall profile such that it takes in to account the various shapes making up that profile. Fewer parameters gives rise to fewer iterations of calculations on those parameters, which increases the speed of profile reconstruction.Type: GrantFiled: September 14, 2006Date of Patent: May 12, 2009Assignee: ASML Netherlands B.V.Inventors: Antoine Gaston Marie Kiers, Goce Naumoski
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Patent number: 7525667Abstract: The invention provides a handheld electronic gauge that is configured to obtain measurement data for an object, such as a wheel, rail, axle, or the like. The gauge includes one or more position sensors that automatically determine when the gauge is in a measurement position. The invention also provides a handheld computing device that can automatically determine when a gauge is in the measurement position and automatically obtain measurement data using the gauge. As a result, the invention provides a solution for measuring an object, such as a railway wheel, that is portable and capable of repeatedly providing various desired measurements, irrespective of the operator.Type: GrantFiled: May 23, 2005Date of Patent: April 28, 2009Assignee: International Electronic Machines Corp.Inventors: Zahid F. Mian, Robert MacAllister, William Peabody
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Patent number: 7525669Abstract: A high speed, phase shifting scanning profilometry system is disclosed. A high speed CMOS sensor having more than 3 rows of pixels, in one embodiment having 1024, each row of which being randomly accessible, is positioned above a workpiece movable below the camera. The workpiece is illuminated in a non-uniform manner by an illumination source configured to project a predetermined pattern or gradient of light. As the workpiece is moved under the sensor, selected rows of pixels register the non-uniform light reflected from the workpiece and provide the data to a computer for calculating a surface profile for that row.Type: GrantFiled: July 9, 2004Date of Patent: April 28, 2009Inventor: Mohsen Abdollahi
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Publication number: 20090097039Abstract: It is possible to measure a 3-dimensional shape by using a projector and an imaging device without requiring calibration in advance. A pattern light is applied from a projector to an object and this is imaged by an imaging device to capture an image as an input. An in-camera parameter, an in-projector parameter, a parameter of positional relationship between the camera and the projector are estimated. By using the estimation results, a 3-dimensional shape of the object is measured. When a laser pointer is attached to the projector and a laser is applied to the object for capturing an image as an input, scaling of the object shape can also be estimated. Moreover, when measuring a plurality of objects or measuring the same objects a plurality of times, the accuracy of the 3-dimensional shape respectively obtained can be increased by simultaneously processing the inputs.Type: ApplicationFiled: May 12, 2005Publication date: April 16, 2009Applicant: TECHNODREAM21, INC.Inventors: Hiroshi Kawasaki, Ryo Furukawa
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Patent number: 7508529Abstract: A multi-range non-contact probe is provided which performs approximate range-finding measurement functions in addition to more precise structured light measurement functions. The probe is compatible with a probe control interface which allows advanced measuring capabilities and functions to be used with a probe head system that provides a limited number of wired connections. A laser beam of the probe is directed along a first optical path during a first period for providing structured light measurement functions and is directed along a second optical path for a second time period range finding functions. A single beam modification element having at least first and second portions with different types of optical characteristics is moved to output the laser beam from the first portion along the first optical path and then to output the laser beam from the second portion along the second optical path.Type: GrantFiled: July 31, 2006Date of Patent: March 24, 2009Assignee: Mitutoyo CorporationInventors: Paul Gladnick, Scott Harsila
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Patent number: 7505619Abstract: A dark field surface inspection tool and system are disclosed herein. The tool includes an illumination source capable of scanning a light beam onto an inspection surface. Light scattered by each inspection point is captured as image data by a photo detector array arranged at a fourier plane. The images captured are adaptively filtered to remove a portion of the bright pixels from the images to generate filtered images. The filtered images are then analyzed to detect defects in the inspection surface. Methods of the invention include using die-to-die comparison to identify bright portions of scattering patterns and generate unique image filters associated with those patterns. The associated images are then filtered to generate filtered images which are then used to detect defects. Also, data models of light scattering behavior can be used to generate filters.Type: GrantFiled: December 20, 2005Date of Patent: March 17, 2009Assignee: KLA-Tencor Technologies CorporationInventors: Evan R. Mapoles, Grace H. Chen, Christopher F. Bevis, David W. Shortt
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Patent number: 7502100Abstract: In three-dimensional measurement where circular polarized light or elliptical polarized light is projected as measurement light, correct measurement results can be obtained irrespective of the difference in intensity between primary reflected light and secondary reflected light.Type: GrantFiled: June 5, 2006Date of Patent: March 10, 2009Assignee: Konica Minolta Sensing, Inc.Inventors: Toshio Kawano, Masayuki Yamada
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Patent number: 7502103Abstract: A metrology tool is arranged to measure a parameter of a substrate that has been provided with a pattern in a lithographic apparatus. The metrology tool includes a base frame, a substrate table constructed and arranged to hold the substrate, at least one sensor constructed and arranged to measure a parameter of the substrate, a displacement system to displace one of the substrate table and sensor with respect to the other one of the substrate table and sensor in at least a first direction, a first balance mass, and a first bearing which movably supports the first balance mass so as to be substantially free to translate in the opposite direction of the first direction in order to counteract a displacement of the one of the substrate table and sensor in the first direction.Type: GrantFiled: May 31, 2006Date of Patent: March 10, 2009Assignee: ASML Netherlands B.V.Inventors: Reinder Teun Plug, Arie Jeffrey Den Boef, Karel Diederick Van Der Mast
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Patent number: 7502125Abstract: A measuring apparatus of this invention comprises: a projector; a camera; a generator that generates, from a photographed image of a fringe pattern projected by the projector at a time of calibration onto each of surfaces, first tuples, each including coordinates of a point on a light receiving plane (LRP) of the camera, light intensity of the point and the height of the surface; a converter that converts the light intensity to a phase angle of the projected fringe pattern (PFP), and generates second tuples, each including the coordinates of the point on the LRP, the phase angle and the height of the surface; a hypersurface generator that generates data representing a tensor product type composite hypersurface (TPTCH) from data of the second tuples; an extractor that extracts data of third tuples, each including coordinates of a point on the LRP and light intensity from a photographed image of a fringe pattern projected by the projector at a time of measurement onto an object to be measured; a second converteType: GrantFiled: August 24, 2004Date of Patent: March 10, 2009Assignee: Fujitsu LimitedInventor: Tatsuhiko Suzuki
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Publication number: 20090059241Abstract: A system and method are provided for the 3D measurement of the shape of material objects using non-contact structured light triangulation. The system includes a light projector for projecting a structured light pattern onto the surface of any object and a camera for capturing an image of the structured light pattern acting on the surface of the object. The system further includes computing device for determining the 3D measurement of the surface shape of the illuminated object through a triangulation algorithm employed based on a calculated correspondence between the projected structured light and the captured image. The structured light includes coded elements that lie within planes passing through vertices of the central projection areas of both the projector and the camera also that pass through the space of the object being measured.Type: ApplicationFiled: August 28, 2007Publication date: March 5, 2009Applicant: Artec VenturesInventors: Nikolay L. Lapa, Yury A. Brailov
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Patent number: 7492470Abstract: The invention relates to a method for three-dimensional shape measurement of a body or of a part thereof, in particular of a dental object such as a model, by scanning non-contact distance measurement using an optical sensor device comprising a beam source, where the shape of the body subjects reproducing areas to a beam at various incidence angles (impinging beam), and the reflected beam (measuring beam) is measured, with the body being adjusted relative to the optical sensor device. To permit measurement with high precision of the body and undercuts thereof, without tilting being necessary, it is proposed that for shape measurement of the respectively measured area the beam (measuring beam) reflected therefrom, which describes an angle ? to a surface normal corresponding to the respective area, is taken into account, said angle being equal to or smaller than a predefined critical angle ?GR relative to the surface normal.Type: GrantFiled: April 7, 2006Date of Patent: February 17, 2009Assignee: Degudent GmbHInventors: Erik Büchler, Hartmut Brinkmann, Andre Garthaus, Philip Von Schroeter
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Patent number: 7489408Abstract: A projector (20) projects a structured light pattern (46) along a first optical axis (44) onto a surface (80). A viewer (50) attached to the projector (20) receives a reflection of the structured light pattern (46) from the surface (80) along a second optical axis (54), and digitizes a two-dimensional snapshot. The optical axes (44, 54) are non-parallel, and they meet within a common field of view of the projector (20) and the viewer (50). A computer (61) interfaced to the viewer (50) receives the digitized snapshot, and analyzes it to mathematically model the surface for display and inspection. The projector and attached viewer are designed as a hand-held unit with a hand grip (66) and a trigger button (68) to trigger a snapshot. A guide tip (70) on the unit extends beside the two optical axes (44, 54) to the common field of view to position the hand-held unit.Type: GrantFiled: November 15, 2005Date of Patent: February 10, 2009Assignee: General Electric CompanyInventors: Kevin George Harding, Shu-Guo Tang, Craig Alan Cantello
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Patent number: 7486805Abstract: Disclosed is an optical system for measuring the topography of a test object, comprising a system for projecting an optically recognizable test pattern onto the surface of an object area that is to be measured, and an image-recording system and image-evaluation system for determining the parallactically displaced image coordinates of the test pattern in the object area that is to be measured, the distance of the centers of the aperture diaphragms of the projection system and the image-recording system forming a test basis. Said optical system is characterized in that the test pattern consists of a limited number of elements that are placed at regular intervals in at least one first axial direction, said axial direction being rotated by an angle a relative to the vertical projection of the test basis.Type: GrantFiled: August 26, 2005Date of Patent: February 3, 2009Assignee: Storz Endoskop Produktions GmbHInventor: Beat Krattiger
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Patent number: 7480061Abstract: Disclosed herein is a 3D shape measurement method and apparatus using a stereo moiré technique. The 3D shape measurement method measures the 3D shape of an object to be measured using a digital pattern projector and first and second cameras. The method includes a first step of projecting a phase-shifted fringe pattern onto the object to be measured using the digital pattern projector, a second step of acquiring four fringe images using each of the first and second cameras, and then acquiring two pieces of phase information using a moiré technique, and a third step of acquiring a pair of corresponding points, which satisfy stereo phase conditions for making all 2? ambiguity constants as integers, using the two pieces of phase information and then measuring the 3D shape of the object using the corresponding points.Type: GrantFiled: November 27, 2007Date of Patent: January 20, 2009Assignee: Korea Advanced Institute of Science and TechnologyInventors: Hyun Ki Lee, Hyung Suck Cho
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Publication number: 20080285056Abstract: A structured light 3D scanner consisting of a specially designed fixed pattern projector and a camera with a specially designed image sensor is disclosed. A fixed pattern projector has a single fixed pattern mask of sine-like modulated transparency and three infrared LEDs behind the pattern mask; switching between the LEDs shifts the projected patterns. An image sensor has pixels sensitive in the visual band, for acquisition of conventional image and the pixels sensitive in the infrared band, for the depth acquisition.Type: ApplicationFiled: May 17, 2007Publication date: November 20, 2008Inventor: Ilya Blayvas
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Patent number: 7436524Abstract: The present invention has a three-dimensional apparatus including a lattice pattern placed in an optical path and having a slit-like light transmitting portion formed of pitches set at fixed intervals, and a projecting optical system that projects a lattice pattern image formed by the lattice pattern on the sample so that the image is inclined at a predetermined angle. A lattice pitch is determined on the basis of set parameters including the magnification of an observing system. A pattern is formed by the lattice pitch. The pattern is used to pick up a deformed lattice pattern image using a TV camera. An image of each position is acquired while shifting the lattice pattern over several levels. A phase is determined. A height is then determined using the difference between the phase and a basic phase corresponding to a pre-provided magnification or the like. The height is then displayed.Type: GrantFiled: November 23, 2005Date of Patent: October 14, 2008Assignee: Olympus CorporationInventors: Hironori Utsugi, Go Ryu, Hideki Obuchi
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Patent number: 7436498Abstract: An apparatus for determining the shape of a gemstone, including irregularities on its surface, is provided, The apparatus comprises a platform adapted to support the gemstone, a scanning system adapted to provide geometrical information concerning the three-dimensional convex envelope of the gemstone, an illumination system adapted to project on the gemstone a plurality of laser beams, an imaging system adapted to capture reflections of at least a part of said laser beams from the surface of the gemstone, and a processor. The processor is adapted to calculate, based on said geometrical information, a predicted reflection of each laser beam, to compare the captured reflections with said predicted reflections and to relate each captured reflection to its corresponding predicted reflection, to determine said shape of the gemstone based on the comparison and said geometrical information.Type: GrantFiled: June 8, 2006Date of Patent: October 14, 2008Assignee: Sarin Technologies Ltd.Inventors: Avi Kerner, Yedidya Ariel, Nur Arad