Abstract: A method for manufacturing a micromechanical sound transducer includes depositing successive layers of first and second membrane support material on a first main surface of a substrate arrangement with a first etching rate and a lower second etching rate, respectively. A layer of membrane material is then deposited. A cavity is created in the substrate arrangement from a side of the substrate arrangement opposite to the membrane support materials and the membrane material at least until the cavity extends to the layer of first membrane support material. The layers of first and second membrane support material are etched by applying an etching agent through the cavity in at least one first region located in an extension of the cavity also in a second region surrounding the first region. The etching creates a tapered surface on the layer of second membrane support material in the second region.

Abstract: The invention relates to a security element including at least one display element for non-resettable visible display of information, wherein said display element comprises a first and a second volume which are fluidically connected via at least one duct, and only one electrically controllable electrode which is associated to one of said volumes and is configured, when charged with an electric voltage, to vary the surface tension of a liquid which is present in said associated volume, wherein said liquid comprises at least an electrically conducting and/or polar and a non-polar fraction, and at least said electrically conducting fraction being completely and in a stable manner provided in that of both volumes which is not associated with an electrode and wherein said electrically conducting and/or polar fraction may be moved irreversibly and at least partly due to a single charging of the electrode into the volume which is associated with an electrode.

Abstract: Embodiments of the present disclosure provide an electrowetting display panel and the manufacturing method thereof The electrowetting display panel comprises: a first glass substrate; a second glass substrate provided opposite to the first glass substrate; a cavity provided between the first glass substrate and the second glass substrate; a colored conductive liquid filled into the cavity; and a reflecting conductive element provided on the surface of the first glass substrate facing away from the second glass substrate, and corresponding to the cavity, wherein the reflecting conductive element is used for controlling the light transmissivity of the colored conductive liquid within the cavity according to the voltage applied to the reflecting conductive element and reflecting the light passing through the colored conductive liquid toward the second glass substrate.

Abstract: An electro-wetting display device includes a light guide plate having a light incident surface and a light output surface, a light source, a transparent electrode, a dielectric layer, a transparent non-polar solution layer, a counter substrate, a light emitting material layer, a counter electrode layer and a transparent polar solution layer. The light source is disposed near the light incident surface. The transparent electrode layer is disposed on the light output surface. The dielectric layer covers the transparent electrode layer and has refractive index n1. The transparent non-polar solution layer is disposed on the dielectric layer and has refractive index n2, and n2?n1. The counter substrate is disposed above the transparent non-polar solution layer. The light emitting material layer and the counter electrode are disposed on the counter substrate. The transparent polar solution layer is disposed between the counter substrate and the light guide plate.

Abstract: A quasi-translator for economically producing pure, smooth translational motion with broad arcuate or error-free motion regardless of orientation, which is useful in numerous interferometer applications including spectroscopy, a Fourier modulator and a Fourier spectrometer are provided. The quasi-translator utilizes a support, an arm including a driving magnet on a first end and a driven element on a second end, an axis for rotation of the arm, a bearing system that controls the rotation of the arm about the axis, a drive coil and a drive amplifier to drive the arm in the arcuate motion. The quasi-translator may be employed in a Fourier modulator to change the optical path difference of the interferometer/quasi-translator at a substantially constant rate of change. The quasi-translator and/or Fourier modulator may be used in a Fourier spectrometer to create an optical spectrum from a light beam and/or electrical signal created from the light beam.

Abstract: An ornamental display device having at least one interferometric modulator, a signal receiver configured to receive an external signal and a processor configured to control the display based on the external signal is disclosed. In one aspect, the external signal is emitted from a controller. In another aspect, the external signal is emitted from a computer.

Abstract: This disclosure provides systems, methods, and apparatus for calibrating and controlling the actuation of an analog interferometric modulator. In one aspect, an electrode of a movable layer of the analog interferometric modulator may include a part for receiving a drive voltage, and an electrically isolated part. A voltage may be sensed from the electrically isolated part, and used to determine the position of the movable layer and/or provide feedback to the drive voltage.

Abstract: This disclosure provides systems, methods, and apparatus for controlling the actuation of an analog interferometric modulator. In one aspect, a voltage may be determined from a sense electrode. A distance between one or more of the electrodes may be determined based on the voltage. The sense electrode may be capacitively coupled to another electrode, and may be implemented in a mirror of a movable layer of an interferometric modulator, or may be implemented in a floating fixed layer of an interferometric modulator.

Abstract: This disclosure provides systems, methods and apparatus for display assemblies. In one aspect, a display assembly may include a first panel, a second panel, and a third panel. The second panel may be spaced apart from the first panel, and the third panel may be spaced apart from the second panel. A first perimeter frame may join the first panel and the second panel, with the first perimeter frame defining a first cavity in between the first panel and the second panel. The first cavity may be substantially filled with a first liquid. A second perimeter frame may join the second panel and the third panel, with the second perimeter frame defining a second cavity in between the second panel and the third panel. The second cavity may be substantially filled with a second liquid.

Abstract: This disclosure provides systems, methods and apparatus related to an electromechanical display device. In one aspect, an analog interferometric modulator includes a reflective display pixel having a reflector, and a movable first absorbing layer positionable at a distance d1 from the reflector, the first absorbing layer and the reflector defining a first gap therebetween. The apparatus also includes a second absorbing layer disposed at a distance d2 from the first absorbing layer, the first absorbing layer disposed between the second absorbing layer and the reflector, the second absorbing layer and the first absorbing layer defining a second gap therebetween. In addition, at least two of the reflector, the first absorbing layer and second absorbing layer are movable to synchronously either increase or decrease the thickness dimension of the first gap and the second gap.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for driving an array of tri-state devices. The array of tri-state devices may form an array of display elements, and the array may be passively addressed. According to one aspect, the array includes two segment lines and one common line connected to each tri-state display element. According to another aspect, the array includes two common lines and one segment line connected to each tri-state display element.

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for accurately positioning a movable conductive layer of a reflective display element. In one aspect, an initial position of the movable conductive layer with respect to at least one or more fixed conductive layers is sensed. A charging voltage may be determined based at least in part on the initial position. The charging voltage may be applied to the movable conductive layer.

Abstract: Methods, systems, devices and/or apparatuses are provided that selectively reflect the infrared spectrum independent of other regions of the solar spectrum in order to actively manage solar heat gain across surfaces such as windows, skylights, roofs, siding and the like.

Abstract: An electrowetting display device that features dual-mode operation. The display device can operate in either a low-power consumption bistable mode, or a higher-power consumption fast switching (video-rate) mode.

Abstract: An optical element includes: a first electrode and a second electrode that are arranged opposite each other, in which the first electrode allows part of incident light to pass therethrough and reflects another part of the incident light, and the second electrode reflects light that has passed through the first electrode; a first dielectric film and a second dielectric film covering the first electrode and the second electrode, respectively; and a first medium and a second medium each interposed and sealed in a space containing a cavity portion between the first dielectric film and the second dielectric film, in which the first medium and the second medium have refractive indices different from one another, and one of the first medium and the second medium is a polar liquid.

Abstract: Methods of estimating the size of an ocular lens capsule.

Abstract: The disclosure provides an apparatus for reducing speckle in a projection visual display (PVD) system, a method of reducing visible speckle in a PVD system and a PVD system incorporating the method or apparatus. In one embodiment, the apparatus includes a diffuser interposable in an optical path of a PVD system and a diffuser actuator having a single drive axis configured to cause the diffuser to travel in a Lissajous curve at least partially transverse to the optical path.

Abstract: A resonant cavity with tunable nanowire. The resonant cavity includes a substrate. The substrate is coupleable to an optical resonator structure. The resonant cavity also includes a plurality of nanowires formed on the substrate. The plurality of nanowires is actuated in response to an application of energy.

Abstract: This disclosure provides systems, methods and apparatus for storage capacitors. In one aspect, an electromechanical systems (EMS) device includes a substrate, an optical stack disposed over the substrate, a mechanical layer positioned over the optical stack, and a storage capacitor. The optical stack includes a stationary electrode and at least one dielectric layer disposed over the stationary electrode, and the storage capacitor includes a first plate, a second plate and a dielectric structure disposed between the first and second plates. The first plate includes a portion of the mechanical layer positioned over an optically non-active region of the device, and the dielectric structure of the storage capacitor includes a portion of the at least one dielectric layer of the optical stack.

Abstract: A laser absorption layer is first selectively formed in a seal pattern region surrounding an array of electromechanical systems elements, followed by depositing an antistiction layer as a blanket layer over the substrate and the laser absorption layer. The antistiction layer is then selectively removed from the seal pattern using a laser. An epoxy sealing material is provided in the seal pattern where the antistiction layer was removed and a backplate is sealed to the substrate using epoxy.

Abstract: In a multiple-axis free-space-coupled single-mode fiber-optic transmission system, such as an optical cross-connect switch, a method and apparatus are provided for the closed loop attenuation of optical beam power signals employed to align and cause dithering via MEMS mirrors which are manipulated to impose on the optical beam frequency modulation and, in particular, a time-varying set of induced mirror angles that yield a desired time history of optical power level that is modulated according to a digital code in the frequency modulation pattern.

Abstract: A heads-up display system is configured for use in a vehicle. The system includes a standard vehicle window (i.e. no special coatings), an image projector, and a vehicle dashboard equipped with a faceted reflective surface. The image projector is configured to project an image onto the faceted reflective surface. The faceted reflective surface is configured to reflect the image from the image projector onto a window surface of the standard vehicle window. The window surface is oriented to reflect the image from the faceted reflective surface toward an occupant. The faceted reflective surface may be disposed within a plurality of troughs separated by a plurality of diffuse reflecting partitions. The plurality of troughs may be configured to shield the occupant from extraneous reflections. The faceted reflective surface may include a plurality of electrically controlled facets. The plurality of electrically controlled reflective facets may be an array of electrowetting cells.

Abstract: A pixel structure including a substrate, at least one switch, at least one color filter, a passivation layer and at least one pixel electrode is provided. The substrate has at least one sub-area. The switch is disposed on the sub-area and has an gate insulator that covers the sub-area of the substrate. The switch is electrically connected to a scan line and a data line. The color filter is disposed on the gate insulator, wherein the color filter is in contact with the switch and the gate insulator. A contact via is formed in the color filter and the gate insulator such that a part of the switch is exposed thereby. The pixel electrode is disposed on the passivation layer and electrically connected to the switch through the contact via. A display panel including the above-mentioned pixel structure is also provided.

Abstract: A light control device 1 includes a light source 10, a prism 20, a spatial light modulator 30, a drive unit 31, a control unit 32, a lens 41, an aperture 42, and a lens 43. The spatial light modulator 30 is a phase modulating spatial light modulator, includes a plurality of two-dimensionally arrayed pixels, is capable of phase modulation in each of these pixels in a range of 4? or more, and presents a phase pattern to modulate the phase of light in each of the pixels. This phase pattern is produced by superimposing a blazed grating pattern for light diffraction and a phase pattern having a predetermined phase modulation distribution, and with a phase modulation range of 2? or more.

Abstract: An optical filter is provided, including a first plurality and second plurality of alternating first and second material layers, where the first plurality of layers is at a first angle to incident light and has a cut-on edge, and the second plurality of layers is at a second angle to the incident light and a cut-off edge; where polarization splitting of the first plurality of layers at the cut-on edge and polarization splitting of the second plurality of layers at the cut-off edge do not exceed approximately 1 percent for any first and second angle between approximately 0 and 40 degrees; and the s-stopband wavelength of the second plurality of layers is approximately less than or equal to the cut-on edge wavelength, which is less than the cut-off edge wavelength, which is approximately less than or equal to the s-stopband wavelength of the first plurality of layers.

Abstract: Security documents often incorporate optically variable devices to prevent or hinder counterfeiters. Disclosed herein are layered optically variable devices such as colour-shift foils that employ a piezoelectric layer, and methods for their production and use. Such devices afford new techniques for a user of a security document to check quickly and easily whether the security document is a legitimate document or a counterfeit copy by placing an electrical potential difference across the security document.

Abstract: This disclosure provides systems, methods and apparatus for an electromechanical systems reflective display device. In one aspect, an electromechanical systems display device includes a reflective layer and an absorber layer. The absorber layer is spaced apart from the reflective layer to define a cavity between the absorber layer and the reflective layer. The absorber layer is capable of transmitting light into the cavity, absorbing light, and reflecting light, and includes a metal layer. A plurality of matching layers are on a surface of the absorber layer facing away from the cavity, the plurality of matching layers including a first matching layer disposed on the absorber layer and a second matching layer disposed on the first matching layer.

Abstract: The present invention is directed to luminance enhancement structure for reflective display devices. The luminance enhancement structure comprises grooves and columns, wherein said grooves have a triangular cross-section and a top angle, and said grooves and columns are in alternating order and in a continuous form in one direction. The luminance enhancement structure not only can reduce the total internal reflection, but also especially can enhance the on-axis brightness of a display device.

Abstract: A method and apparatus are provided for attenuating an optical beam. The method includes selecting a level of attenuation to be applied to the optical beam. A pattern of on-state and off-state pixels in a two dimensional spatial light modulator (SLM) is selected such that the pattern will modulate the optical beam to provide the selected level of attenuation. Finally, the optical beam is directed onto the SLM while tile pixels are arranged in the selected pattern. The pattern is periodic along a first axis and symmetric along a second axis along which an intensity distribution of die optical beam extends.

Abstract: By selectively placing color filters with different transmittance spectrums on an array of modulator elements each having the same reflectance spectrum, a resultant reflectance spectrum for each modulator element and it's respective color filter is created. In one embodiment, the modulator elements in an array are manufactured by the same process so that each modulator element has a reflectance spectrum that includes multiple reflectivity lines. Color filters corresponding to multiple colors, such as red, green, and blue, for example, may be selectively associated with these modulator elements in order to filter out a desired wavelength range for each modulator element and provide a multiple color array. Because the modulator elements are manufactured by the same process, each of the modulator elements is substantially the same and common voltage levels may be used to activate and deactivate selected modulation.

Abstract: An array of display elements, such as interferometric modulators, is integrated with collapsible cavity microelectromechanical system (MEMS) electrical switches. The electrical switches and the display elements may be at least partially formed with the same manufacturing operations. The switches may form row or column select functions for the display elements.

Abstract: A pixel structure having a plurality of display regions is provided. The pixel structure includes a transparent substrate, an active device layer, and a plurality of reflective display units. The transparent substrate has a first side and a second side opposite to each other. The active device layer is disposed on one of the first side and the second side of the substrate. The reflective display units are respectively located in the display regions and driven by the active device layer. Two reflective display units are located at the same display region to provide different display colors. Two closely adjacent display regions provide different display colors when display simultaneously.

Abstract: This disclosure provides systems, methods, and apparatus for fabricating electromechanical systems devices. In one aspect, a method of sealing an electromechanical systems device includes etching a sacrificial layer. The sacrificial layer is formed between a surface of a substrate and a shell layer and is etched through etch holes in the shell layer formed over the electromechanical systems device. The etch holes in the shell layer have a diameter greater than about one micron. The shell layer is then treated. A seal layer is deposited on the treated shell layer. The seal layer hermetically seals the electromechanical systems device.

Abstract: This disclosure provides systems, methods, and apparatus for providing illumination using a light-turning stack having diffractive light-turning features to eject light out of the light-turning stack. In one aspect, light ejected from the light-turning stack may be applied to illuminate a display. The light-turning stack includes a light-guiding layer having a surface on which the diffractive light-turning features are disposed. A planarization layer having a refractive index different than a refractive index of the light-guiding layer directly contacts the diffractive light-turning features and has a planar surface opposite the light-turning features. The light-guiding layer can also have a planar surface opposite the light-turning features. Both these planar surfaces, on opposite sides of the light turning stack, facilitate the integration of the light-guiding layer with other layers of material, including functional layers.

Abstract: Signals employed to align and cause dithering via MEMS mirrors in an optical cross connect switch are manipulated to impose, on the optical beam (steered via the MEMS mirrors) amplitude modulation and in particular a time-varying set of induced mirror angles that yield a desired time history of optical power level that is modulated according to a digital code in the amplitude modulation pattern. The controlled time sequence expressed as a time-varying optical power level can be used for in-band signaling along the same optical channels available for conventional optical data. The amplitude modulated signal is conveyed through the cross connect switch and is useful for example in control and command of the cross connect switch.

Abstract: A light modulator pixel unit and a method for manufacturing the same are provided. The light modulator pixel unit includes top, movable and bottom electrodes. Under control of a control circuit, the movable electrode may shift to first, second and third positions corresponding to modulations of first, second and third monochromatic lights, respectively. When the movable electrode is at a certain position, the incident light corresponding to the position may be divided into two parts, one is reflected by the top electrode, and the other one may bypass the top electrode and be reflected by the movable electrode. The two parts may interfere destructively. The light modulator pixel unit of the present invention can control monochromatic lights of three special wavelengths by time division, and enable color control and gray control. The unit is applicable in the field of projection display and panel system.

Abstract: A display element (10) includes an upper substrate (first substrate) (2), a lower substrate (second substrate) (3), and a polar liquid (16) that is sealed in a display space (S) formed between the upper substrate (2) and the lower substrate (3) so as to be moved toward an effective display region (P1) or a non-effective display region (P2). A rib (14) hermetically divides the inside of the display space (S) in accordance with each of a plurality of pixel regions (P). A movement space (K) in which an oil (insulating fluid) (17) is moved is provided for each of the pixel regions (P).

Abstract: According to one embodiment of the present invention a digital micro-mirror device is taught that includes a pixel occupying an area of the device and a hinge coupled to the pixel and positioned such that at least a portion of the hinge falls outside the area of the pixel.

Abstract: A method and device for manipulating color in a display is disclosed. In one embodiment, a display comprises interferometric display elements formed to have spectral responses that produce white light. In one embodiment, the produced white light is characterized by a standardized white point.

Abstract: This disclosure provides systems, methods and apparatus for an electromechanical systems device. In one aspect, an electromechanical systems device may include a substrate and a movable layer positioned apart from the substrate. The movable layer and the substrate may define a cavity. The movable layer may be movable to increase the size of the cavity or to decrease the size of the cavity. The movable layer also may include a first anchor point attaching the movable layer to the substrate and a first feature associated with the first anchor point. The first feature may include a protrusion of the movable layer into or out from the cavity.

Abstract: An embodiment is a display unit. The display unit includes a substrate layer, a layer of colored fluid on the substrate layer, and a transparent actuator element on the layer of the colored fluid. The layer of colored fluid has a thickness and a color. The transparent actuator element modulates the thickness of the colored fluid upon activated by a force such that the colored fluid is changed from a first state to a second state or vice versa. The modulated thickness provides a variable optical density of the colored fluid.

Abstract: This disclosure provides systems, methods and apparatus for a via structure. In one aspect, an apparatus includes a substrate and a first electromechanical systems device on a surface of the substrate. The first electromechanical systems device includes a first metal layer and a second metal layer. A first via structure can be included on the surface of the substrate. The first via structure includes the first metal layer, the second metal layer, and a third metal layer. The first metal layer of the first electromechanical systems device may be the same metal layer as the first metal layer of the first via structure.

Abstract: The present invention relates to a light modulating device, comprising a SLM and a pixelated optical element, in which a group of at least two adjacent pixels of the SLM in combination with a corresponding group of pixels in the pixelated optical element form a macropixel, the pixelated optical element being of a type such that its pixels comprise a fixed content, each macropixel being used to represent a numerical value which is manifested physically by the states of the pixels of the SLM and the content of the pixels of the pixelated optical element which form the macropixel.

Abstract: A MEMS micro-minor device includes, a single package; a first mirror and second minor, wherein at least one of the minors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-minor can be deflected to the second minor.

Abstract: A plasmonic display device is provided that uses physical modulation mechanisms. The device is made from an electrically conductive bottom electrode and a first dielectric layer overlying the bottom electrode. The first dielectric layer is a piezoelectric material having an index of expansion responsive to an electric field. An electrically conductive top electrode overlies the first dielectric layer. A first plasmonic layer, including a plurality of discrete plasmonic particles, is interposed between the top and bottom electrodes and in contact with the first dielectric layer. In one aspect, the plasmonic particles are an expandable polymer material covered with a metal coating having a size responsive to an electric field.

Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

Abstract: Systems, methods and apparatus are provided for electromechanical systems devices having a non-uniform gap under a mechanical layer. An electromechanical systems device includes a movable element supported at its edges over a substrate by at least two support structures. The movable element can be spaced from the substrate by a gap having two or more different heights in two or more corresponding distinct regions. The gap has a first height in a first region below the gap, such as an active area of the device, and a second height in a second region adjacent the support structure. In an interferometric modulator implementation, the second region can be encompasses within an anchor region with a black mask.

Abstract: A display device comprising picture elements, which are constituted by electrowetting elements having at least one first fluid and a second fluid immiscible with each other within a space between a first support plate and a second support plate, the second fluid being electro-conductive or polar. The first fluid in each element is at the side of the first support plate confined by element walls, and the second fluid is shared by a plurality of picture elements, characterized by a preventer for preventing first fluid portions from being expelled from its confinement when forces other than electrowetting forces are exerted on this fluid.

Abstract: Operating methods of an array of electromechanical pixels resulting in efficient and reliable operation of light modulating elements. The invention simplifies the design of electromechanical light modulators and permits the construction of large size displays with greater mechanical tolerances on glass substrates.

Abstract: An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process.