Abstract: In the case of a deformable mirror (11) with a mirror plate (13) which is in glass form in particular for high laser frequencies and an axial actuator (20) which concentrically engages the rear side of the mirror surface (17)—with a reduced actuator stroke movement for the same dome-like configuration height—the dome configuration of the convex curvature of the mirror surface (17) is now of larger area and at the same time better approximated to the desirable sphere if, instead of the central application of force, the arrangement provides for decentral application of force at diametrally opposite locations. For that purpose the actuator (20) operates on a ring (25) which is disposed behind the mirror plate 13 and which is preferably integral with the mirror plate (13).

Abstract: A variable-profile optical device includes a light-transmission elastic member in which an elasticity of a first surface is set to be higher than that of a second surface disposed opposite to the first surface, wherein a pressure is applied to the second surface of the elastic member, so that the second surface of the elastic member is selectively deformed, and a focus distance may be varied.

Abstract: A variable mirror that is readily formable and can be readily and precisely changed into various configurations as desired is provided. The variable mirror includes a mirror body formed of an elastic or flexible material and having one surface functioning as a reflecting surface. The mirror body is capable of changing the reflecting surface configuration. The rigidity of the mirror body varies in a direction parallel to the one surface.

Abstract: A deformable curvature mirror capable of controlled deformation by applying electrical voltages to electrode segments on the back of the mirror. Two plates of an electro-restrictive material, such as PZT or PMN, are jointed together with at least one conductive layer sandwiched therebetween. One plate has an outer conductive layer and a mirrored surface on the outer conductive layer. The conductive layers are electrically grounded. The other plate has a pattern of a plurality of electrode segments on the outer surface with each electrode segment having a separate electrical terminal for applying a variable electrical voltage thereto for separately transmitting a variable current through each electrode segment and through at least the other plate for causing variable expansion of the plate and thereby selectively deforming that plate and, in turn, the deformable curvature mirror.

Abstract: A universally oriented liquid mirror. A liquid and a penetrable unit are operatively connected to provide a mirror that can be universally oriented.

Abstract: The invention relates to a device for influencing a laser beam by means of an adaptive mirror (12) in the beam path, having a piezoelectric adjusting member (17) arranged on the back of the mirror (12), it being the case that, in order to achieve low-aberration deformation of the mirror (12) for the purpose of influencing the divergence of the beam, there is provided between the adjusting member (17) and the back (24) of the mirror (12) a pressure-transmitting device (19) which acts on a large area of the deformable surface of the mirror (12).

Abstract: A renewable liquid reflecting zone plate. Electrodes are operatively connected to a dielectric liquid in a circular or other arrangement to produce a reflecting zone plate. A system for renewing the liquid uses a penetrable substrate.

Abstract: The present invention is a structure for holding and forming an optical mirror disc. A puller plate is attached to an elastic layer to the back surface of the mirror. A tensioner applies axial tension to the puller plate. A perimeter support engages the perimeter of the disc and reacts the axial tension into an axial compression force acting on the perimeter of the disc, flexing the disc into a desired shape.

Abstract: An electromagnetic reflector having a multilayer structure where the electromagnetic reflector is configured to reflect multiple electromagnetic frequencies.

Abstract: A rear view mirror (1) for a motor vehicle is disclosed having a mirror element, in the mirror surface of which the driver may observe the traffic behind the driver. In order variably to be able to vary the reflection detail shown in the rear view mirror (1), the mirror element (2) is composed of a plurality of component mirrors (3). These component mirrors (3) are arranged so as to be pivotally mounted on a base plate (5) and the angle of reflection of each component mirror (3) may be adjusted through control of at least one associated drive unit (6).

Abstract: A mirror for use in a catadioptric system, is provided which is a substantially circular mirror having a rotationally symmetric cross section by a set of points substantially close to a curve satisfied by a differential equation as follows: 2 ⁢ F ′ ⁡ ( x ) 1 - F ′ ⁡ ( x ) 2 = d ⁡ ( x ) - x F ⁡ ( x ) where x is the radius of the mirror and F(x) is the cross-sectional shape.

Abstract: A heating element adjusts the curvature of a cylindrical wobble correction mirror to compensate and correct the scan line bow for an optical scanner. A current applied through the heating element along one side of the mirror will cause the mirror to bend vertically for a horizontal beam to adjust the scan line bow for a single beam and approximately equalize the scan line bow for multiple beams.

Abstract: An optical deflection device. The device includes a substrate (e.g., silicon, silicon on insulator) comprising a plurality of die thereon. Each of the die has a plurality of movable mirror devices in an array configuration. Each of the movable mirrors is supported by at least one torsion bar to a frame structure, which is formed on the substrate. Each of the die also has a peripheral region defining a street that surrounds the array configuration to define the die. A plurality of tabs is formed in the street to join one die to another die on the substrate. At least two of the tabs are separated from each other in a sequential manner by a recessed region defined there between. The tabs and the recessed region are positioned to each other in a sequential manner.

Abstract: A micro-mirror device and associated method, the device including a substrate, address electrodes provided on the substrate, and a micro-mirror facing the substrate and spaced a predetermined distance from the substrate. The micro-mirror device is adapted so that the slope of the micro-mirror can be adjusted by electrostatic attraction forces between the address electrodes and the micro-mirror. The micro-mirror device further includes auxiliary electrodes formed on and projected from the substrate. The upper portions of the auxiliary electrodes are disposed in the vicinity of the micro-mirror, so that distances between the micro-mirror and the auxiliary electrodes can remain small, even when the micro-mirror is inclined by electrostatic attraction forces in one direction. Accordingly, restoration of the micro-mirror is enhanced by electrostatic attraction forces of the auxiliary electrodes.

Abstract: A reflecting mirror of a deformable mirror for laser beam is disclosed, which is produced having a high heat conductivity, a low Young's modulus and a high 0.2% yield strength, so as to realize high precision of shape control of the reflecting surface and broadening of the control range. The reflecting mirror is made of a copper alloy comprising copper having 3% by weight or less of magnesium and 1% by weight or less of phosphorous added thereto, or aluminum, an aluminum alloy, copper or a copper alloy, having been subjected to cold working, or subjected to cold working and then heat treatment.

Abstract: A system for adjusting a deformable mirror including a reaction plate, a plurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures coupled on a first end to the pneumatic actuators, and coupled on a second end to the non-reflective side the deformable mirror, the plurality of push-pull flexures being disposed at various locations on the back of the deformable mirror. The respective pairs of push-pull flexures and pneumatic actuators are operated to support and alter the shape of the deformable mirror to allow for correction of a plurality of optical aberrations.

Abstract: A variable shape mirror comprises a frame member having an opening, and a thin film having a first region including a reflecting plane and a second region of higher rigidity than the first region disposed in the outer periphery of the first region, being supported in the opening of the frame member. Other variable shape mirror comprises a frame member having a first opening and a second opening, a first thin film having a reflecting plane, forming an electrode, and supported in the first opening of the frame member, a second thin film forming an electrode electrically conducting with the electrode of the first thin film, and supported in the second opening of the frame member, and a substrate bonded to the frame member at a specified interval, and having an electrode at a position opposite to the electrode of the second thin film.

Abstract: A reflecting apparatus includes a flexible mirror and at least one rocker arm coupling an applied force to a plurality of spaced-apart locations on the mirror to adjust the shape of the mirror. The reflecting apparatus may be used in an interferometer in the path of one of the interfering beams, and adjustments of the shape of the mirror may be used to control the interference pattern generated. The interference pattern created by the apparatus may be used to create fiber Bragg gratings and phase masks, including chirped gratings and masks. An interferometer may use such a reflecting apparatus in the path of each interfering beam.

Abstract: In a system for specific deformation of optical elements in an imaging device, in particular in a projection exposure machine having a projection lens for micro-lithography, for the purpose of eliminating image errors or for active adjustment, piezoelectric elements are applied as actuators in the form of thin plates, films or layers to surfaces to be deformed, or integrated into them. In conjunction with an adaptronic servo loop having sensors, forces and/or moments are exerted on the optical elements for their specific deformation by means of a controlled activation of the piezoelectric elements as actuators.

Abstract: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

Abstract: A packaged micromirror assembly (10; 110) is disclosed. The assembly (10) includes a micromirror (70) formed of a lower element (60) having a central mounting portion (63) surrounded by an intermediate gimbal portion (62) and a frame portion (61). A magnet standoff (68) is attached to the central mounting portion (63) and an upper mirror surface (65) is attached to the magnet standoff (68). The micromirror (70) may be packaged into a body (30) with coil drivers (36). A magnetic field generated by the coil drivers (36) applies a torque to the magnet standoff (68) causing it to rotate; because of silicon hinges in the lower element (60), the upper mirror (65) can rotate in two axes. An alternative embodiment of the assembly (110) rotates a lower mirror element (130) and an upper mirror (15) attached thereto by a standoff (68) by way of an electrostatic force.

Abstract: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

Abstract: A membrane mirror having an optical quality spherical shape maintained by differential pressure takes a near parabolic shape when a plunger-induced displacement of the central area of the mirror is introduced. The focal length can be adjusted by varying the differential pressure.

Abstract: A digital control for light beams. A position of an output light beam is changed based on a digital input control formed of a plurality of bits. The device may use movable mirrors to change the position of the output light beams.

Abstract: A deformable curvature mirror capable of controlled deformation by applying electrical voltages to electrode segments on the back of the mirror. Two plates of an electro-restrictive material, such as PZT or PMN, are jointed together with at least one conductive layer sandwiched therebetween. One plate has an outer conductive layer and a mirrored surface on the outer conductive layer. The conductive layers are electrically grounded. The other plate has a pattern of a plurality of electrode segments on the outer surface with each electrode segment having a separate electrical terminal for applying a variable electrical voltage thereto for separately transmitting a variable current through each said electrode segment and through at least the other plate for causing variable expansion of the plate and thereby selectively deforming that plate and, in turn, the deformable curvature mirror.

Abstract: An optical apparatus for producing chromatic dispersion. The apparatus includes a virtually imaged phased array (VIPA) generator, a mirror and a lens. The VIPA generator receives an input light at a respective wavelength and produces a corresponding collimated output light traveling from the VIPA generator in a direction determined by the wavelength of the input light, the output light thereby being spatially distinguishable from an output light produced for an input light at a different wavelength. The mirror has a cone shape, or a modified cone shape. The lens focuses the output light traveling from the VIPA generator onto the mirror so that the mirror reflects the output light. The reflected light is directed by the lens back to the VIPA generator. In this manner, the apparatus provides chromatic dispersion to the input light.

Abstract: An optical mirror system with multi-axis rotational control is disclosed. The mirror system includes an optical surface assembly, and at least one leg assembly coupled to the optical surface assembly. The at least one leg assembly supports the optical surface above a substrate. A system and method in accordance with the present invention can operate with many different actuator mechanisms, including but not limited to, electrostatic, thermal, piezoelectric, and magnetic. An optical mirror system in accordance with the present invention accommodates large mirrors and rotation angles. Scanning mirrors can be made with this technique using standard surface-micromachining processes, or a deep RIE etch process. A device in accordance with the present invention meets the requirements for a directly scalable, high port count optical switch, utilizing a two mirror per optical I/O port configuration.

Abstract: A reflecting panel adjusting mechanism includes a support means for supporting a reflecting panel 1 at three points through spherical bearing units (7a, 7b and 7c) rotatable in all directions on axes (6a, 6b and 6c) turning only in the radial direction, the support means having turning arms (8a, 8b and 8c), etc; and jacks (9a, 9b and 9c) for moving the turning axes of the support means vertically; wherein inclination and height of the reflecting panel are adjusted.

Abstract: A deformable mirror assembly is provided employing a pressure differential across the mirror element to flex the mirror into a configuration. The configuration is determined by an array of positioning members, each having a fixed back end and a movable front end. The invention employs long-stroke electromagnet actuators with built-in position sensing.

Abstract: A heat-formable mirror comprising a flat substrate capable of plastic flow upon application of heat and a sputter-deposited coating formed on the surface of the substrate. From the substrate outwardly, the coating comprises a transparent amorphous layer and a reflective layer comprising contiguous first and second different metal films. The first metal film, positioned nearer the substrate than the second metal film, is a reflective metal film, and the second metal film comprises a protective film that is less reflective than the reflective metal film, the second metal film being of niobium, tungsten, tantalum, iron and nickel and being present in a thickness sufficient to protect the first metal film and avoid significant reduction of reflectance during heat forming of the mirror.

Abstract: In the case of a deformable mirror (11) with a mirror plate (13) which is in glass form in particular for high laser frequencies and an axial actuator (20) which concentrically engages the rear side of the mirror surface (17)-with a reduced actuator stroke movement for the same dome-like configuration height-the dome configuration of the convex curvature of the mirror surface (17) is now of larger area and at the same time better approximated to the desirable sphere if, instead of the central application of force, the arrangement provides for decentral application of force at diametrally opposite locations. For that purpose the actuator (20) operates on a ring (25) which is disposed behind the mirror plate 13 and which is preferably integral with the mirror plate (13). If the application of pressure to the rear side of the mirror plate (13) is not along a circular ring but a ring (25) which is of elliptical cross-section, then astigmatism effects are reliably avoided even with large angles of beam incidence.

Abstract: A periphery or a section close to a periphery of a collimation mirror is supported by a supporting section of a pressing board from a rear side of a mirror holder without fixing it, and also the collimation mirror is supported by a supporting section of the mirror holder from the front side at a position closer to the center than to a supporting position of the pressing board, so that a pressure is applied to the pressing board from the rear side by a pressurizing means such as an actuator or the like. A peripheral section of the collimation mirror is indirectly cooled by a cooling plate.

Abstract: A door mirror stay which has a mount plate which is fixed along a door panel, a mirror support which is supported by the mount plate and which supports a mirror unit, and a porous member which is integrally formed with the mount plate, the porous member covering a mount surface of the mount plate. This integrally formed porous member has a function to seal and protect the mount surface. The number of parts of the stay and in turn the number of working steps can be decreased, so that the manufacturing cost can be more lowered than the conventional. In the present invention, the door mirror stay can be a one-piece type stay, or a two-piece type stay. In two-piece type stay, an air flow is prevented from entering the automobile through the gaps between each pieces, so that the wind noise can be lowered.

Abstract: A mirror ideally suited for use in a shower enclosure, bathroom or other high humidity environment is adjustable by a user to provide a magnification increasable from unity to three times or more, as well as being resistant to condensation fogging of viewing surfaces thereof. A fogless adjustable magnification mirror according to the present invention includes a ring-shaped frame which holds within an inner peripheral wall surface thereof a clear front viewing window and a rear flexible mirror plate or diaphragm having a reflective surface and a circular shape. The viewing window and mirror plate are held within the frame in a fluid pressure-tight seal, and form therebetween a sealed hollow cylindrically-shaped interior space or plenum bordered on a peripheral longitudinal surface thereof by the inner annular surface of the frame.

Abstract: A multistage stage deformable mirror structure (10) includes a backup structure (12) having a support surface; a single mirror facesheet (18) having an optical surface (18A); and, interposed between the support surface and the optical surface, at least one intermediate deformable structure (14) that is coupled at a first surface to the support surface through a first set of linear actuators (16) for being deformed by the set first set of actuators. The at least one intermediate deformable structure is also coupled at a second opposing surface to the optical surface through a second set of linear actuators (20) for deforming the optical surface. The optical surface assumes a shape that is a combination of the deformation imparted to the at least one intermediate deformable structure by the first set of linear actuators, and the deformation imparted to it by the second set of linear actuators.

Abstract: A reflector having a mechanically deformable portion of at least one reflective surface is disclosed. By deforming the portion of the reflective surface, discontinuity is introduced in that portion of the reflective surface. The discontinuity in the reflective surface scatters incident radiation signals so as to cause attenuation in the reflected signal. By selectively deforming the portion of the reflective surface, the reflected signal can be modulated to encode data thereon. The mechanically deformable portion of the reflective surface preferably comprises plates integrally formed therein.

Abstract: A high precision composite optical mirror substrate comprising a lightweight reticulated foam core which is less than about 25 percent dense, an initially separate dense or small pore size faceplate mounted to the core, and a continuous formed in situ encapsulating coating. The coating fully encapsulates the ligaments throughout the reticulated foam core, the juncture between the core and the faceplate, and the faceplate, including the exposed face of the faceplate (the mirror surface). The exposed face of the dense faceplate is shaped to about the desired mirror surface shape. The deposit of coating material on the exposed face of the faceplate is near net shape to the desired mirror surface. The physical characteristics of the composite substrate are dominated by the properties of the coating material. When the coating material is a chemical vapor deposit of silicon carbide, the interlayer is preferably graphite with a thermal expansion coefficient that closely matches that of the silicon carbide.

Abstract: A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface figure changes caused by optical coatings to be primarily spherical in nature. The pedestal optical substrate includes a disk-like optic or substrate section having a top surface that is coated, a disk-like base section that provides location at which the substrate can be mounted, and a connecting cylindrical section between the base and optics or substrate sections. The optic section has an optical section thickness2/optical section diameter ratio of between about 5 to 10 mm, and a thickness variation between front and back surfaces of less than about 10%. The connecting cylindrical section may be attached via three spaced legs or members.

Abstract: An optical attenuator is disclosed that utilizes the concept of destructive and constructive interference to enhance the ability to attenuate the light signal sent between an optical transmitter and an optical receiver. Rather than completely blocking out a portion of the light signal or utilizing a membrane coated with a partially reflecting material, the present invention utilizes a very high reflectivity coating on divided surfaces, and controls the relative distances between each of the divided surfaces and the optical transmitter/receiver.

Abstract: An improved micromechanical device comprising a substrate (104), a rigid deflectable member (302, 314, 326) suspended over the substrate, and at least one spring (328) supported above the substrate and spaced apart from the rigid deflectable member. The spring resists deflection of the rigid deflectable member when the rigid deflectable member deflects to contact the spring. The improved micromechanical device is constructed by fabricating at least one support structure (116) on a substrate, fabricating at least one spring spaced apart from the substrate and supported by at least one of the support structures, and fabricating a deflectable member spaced apart from both the substrate and spring, and supported by at least one of the support structures.

Abstract: Selective adjustment of astigmatism is provided by a spherical mirror bent to simultaneously increase radius of curvature in one plane and decrease radius of curvature in the plane at right angles thereto. In one implementation the mirror disposed in a mounting that includes a plurality of abutment surfaces against which a front surface of the spherical mirror abuts to effect bending of the mirror when it is appropriately disposed in the mounting. The plurality of abutment surfaces includes at least two bending surfaces and at least two support surfaces. The bending surfaces are higher than the support surfaces, relative to a surface of the mounting from which they extend. When the mirror is appropriately disposed in the mounting, the bending surfaces push the mirror at particular bending locations at opposite sides of the mirror in the plane of incidence, while the mirror is supported by the support surfaces at two particular support locations at right angles to the plane of incidence.

Abstract: A method of making a modulator for modulating an incident beam of light uses a substantially planar light reflection surface formed by a light reflection layer associated with a plurality of deformable elements and a light reflection layer associated with a plurality of fixed elements. The fixed and deformable elements are arranged in a cavity of a substrate supporting the modulator. Light is modulated when a current is applied to a conductive element operably associated with the deformable elements causing the light reflective layer associated with the deformable element to deflect towards the base of the cavity from its substantial planar relations with the light reflecting layer of the fixed element.

Abstract: A system (80) for controlling deformations of optical components adapted for use with laser system aperture sharing elements (16) and deformable mirrors. The inventive system (80) includes a control loop (12, 40, 24, 20, 46, 28, 74, 78, 60, 34) for determining a desired temperature pattern. The control loop (12, 40, 24, 46, 28, 74, 78, 60, 34) provides a control signal (45) corresponding to the desired temperature pattern to a heat map applicator (18, 46, 47, 59, 60). The heat map applicator (18, 46, 47, 59, 60) applies the desired temperature pattern to the optical component (16) in response to the control signal and the optical component (16) is selectively deformed in response thereto. In a specific embodiment, the control loop (12, 40, 24, 20, 46, 28, 74, 78, 60, 34) is a closed loop control system that includes an interferometer (74).

Abstract: A durable large stroke deformable mirror. In the illustrative embodiment, the mirror (10') includes a faceplate (12') constructed of a first material, and a backplate (14') constructed of a second material different from the first material. The faceplate (12') is connected to the backplate (14') at an interface (16'), and the backplate (14') is connected to a set of actuators (20') capable of inducing large mirror (10') deflections. In a specific embodiment, the first material is chosen for its excellent optical qualities and the second material is chosen for its flexibility and durability, allowing for large mirror (10') deflections. To ensure the durability of the connection at the interface (16'), the faceplate (12') and the backplate (14') have matching coefficients of thermal expansion. In addition, the interface (16') is placed at the neutral axis of the mirror (10') for reducing stresses at the interface (16').

Abstract: A Light-weight low cost mirror for astronomical purposes and a method of manufacturing said light-weight mirror is disclosed. The light-weight mirror is comprised of an optical plate a backing plate and a core disposed between said optical plate and said backing plate. The core is comprised of a plurality of core strips. Said core strips are assembled in an arrangement wherein the core strips, the optical plate and the backing plate form cavities by the intersection of the core strips with the backing and the optical plate. The cavities are open the outside diameter edge of the mirror. A method is also disclosed for manufacturing the mirror by fusing the core to opposing faces of the optical plate and backing plate. Melt support assemblies are used to support the unfused backing plate and core strips. The unfused assembly is heated to the glass melting temperature to fuse the core to the optical plate and backing plate.

Abstract: An array of M.times.N thin film actuated mirrors for use in an optical projection system comprises an active matrix, an array of M.times.N thin film actuating structures, each of the thin film actuating structures being provided with a first and a second actuating parts, each of the first and second actuating parts including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the motion-inducing thin film layer, an array of M.times.N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, and an array of M.times.

Abstract: The invention relates to spatial light modulators (SLM) for amplitude and phase modulation of incident light. A "flexure" hinge which is provided between the SLM's substrate and micromirror comprises integral hinged sections which allow for the micromirror to tilt or to move in a piston-like fashion relative to the substrate in response to an electrostatic force. The hinge is particularly advantageous for large mirrors. In addition, the hinge can provide improved heat sinking capability over previously reported SLM hinge designs based on torsion bars and cantilever beams. The flexure hinge has sufficient mechanical flexibility that the SLM actuation voltage required is not excessively high. The flexure hinge has many applications, the preferred ones being a SLM for modulating high-energy beams and a SLM for optical channel switching.

Abstract: A reflector includes a frame over which is stretched a flexible sheet of reflective material to define a curved reflecting surface of pre-determined geometry. The frame defines arcuate sections portions of which support the sheet and lie on the surface of pre-determined geometry. At least one of the arcuate sections is deformable to displace the respective sheet supporting portion and thereby adjust the tension in the flexible sheet.

Abstract: An array of M.times.N thin film actuated mirrors for use in an optical projection system, the array comprises an active matrix including a substrate and an array of M.times.N connecting terminals and an array of M.times.N actuating structures. Each of the actuating mirror structures includes a first thin film electrode, a barrier member, a thin film electrodisplacive member, a second thin film electrode and an elastic member. In order to improve mirror morphology and improve the adhesivity between thin films, the barrier layer is placed on top of the thin film electrodisplacive layer and the top surface of second thin film layer is ion-damaged by using an ion beam, respectively.

Abstract: A deformable mirror compatible with short wavelength (extreme ultraviolet) radiation that can be precisely controlled to nanometer and subnanometer accuracy is described. Actuators are coupled between a reaction plate and a face plate which has a reflective coating. A control system adjusts the voltage supplied to the actuators; by coordinating the voltages supplied to the actuators, the reflective surface of the mirror can be deformed to correct for dimensional errors in the mirror or to produce a desired contour.