Including Specified Control Or Retention Of The Shape Of A Mirror Surface Patents (Class 359/846)
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Patent number: 5978127Abstract: In a light phase grating device, by forming the beam with a bottom conductive layer, the beam will not stick to the conductive layer on the substrate. The triboelectric effect will not occur, because the bottom conductive layer of the beam will allow charges to dissipate.Type: GrantFiled: September 9, 1997Date of Patent: November 2, 1999Assignee: Zilog, Inc.Inventor: John E. Berg
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Patent number: 5975709Abstract: A reflection system, includes a reflecting member having a mirror-finished reflection surface of a spherical shape; and a base member having a base surface of a predetermined shape; and wherein the reflection member and the base member are adhered to each other with one of the bottom surface of the reflection member and the base surface of the base member being made to follow the other to cause deformation of the spherical shape, whereby the reflection surface is formed into an aspherical shape.Type: GrantFiled: April 28, 1994Date of Patent: November 2, 1999Assignee: Canon Kabushiki KaishaInventors: Ryuichi Ebinuma, Yutaka Watanabe
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Patent number: 5956191Abstract: A light weight arcuate reflector facet, for a solar concentrator is disclosed, which comprises a thin mirrored glass sheet such as a microsheet, and a backing sheet or substrate, the glass sheet being bonded to the backing sheet, with the backing sheet providing a smooth surface to the glass sheet. A support member or support structure is attached to the backing sheet and maintains the mirrored glass sheet at a desired radius of curvature. The backing sheet is preferably a composite, and according to one embodiment of a fixed focal length light weight reflector facet, the support member is a resin-impregnated fiberglass sheet having a rib structure. In another embodiment of a variable focal length light weight reflector facet, the support member is a mechanical structure comprising a circular support structure having intersecting center support beams positioned diagonally across the circular support structure.Type: GrantFiled: May 1, 1998Date of Patent: September 21, 1999Assignee: McDonnell Douglas CorporationInventors: James B. Blackmon, Kenneth W. Stone, Stephen M. Kusek
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Patent number: 5949593Abstract: Strut joint assemblies which include built-in off-loading capability or mirror support systems allow a user to minimize the friction developed at the ball joint interface. Each strut joint assembly includes an upper ball joint and a lower ball joint. Each of the ball joints is sealed such that an internal compartment is created which can act essentially as an air spring. By raising the air pressure within these compartments, the load on the ball joint is reduced until the joint separates and air pressure alone carries the entire load. By adjusting the pressure to a value just below the separation pressure, the ball can still maintain contact with the ball socket and carry very little of the actual load. At this pressure, the frictional moment that can be generated by the joint is minimized and is, thus, greatly reduced from the frictional moment developed by a joint which is carrying the full gravity load of the mirror.Type: GrantFiled: March 16, 1998Date of Patent: September 7, 1999Assignee: Eastman Kodak CompanyInventor: Carl A. Lloyd
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Patent number: 5949568Abstract: An inventive array of M.times.N thin film actuated mirrors includes an active matrix, a passivation layer, an etchant stopping layer, and an array of M.times.N actuating structures. Each of the active matrix includes a substrate, an array of M.times.N MOS transistors, M number of source lines, N number of gate lines, an array of M.times.N connecting terminals and an array of M.times.N levelling members, top of the levelling member being at a same level as that of the connecting terminal. Each of the actuating structures includes a first thin film electrode, an thin film electrodisplacive layer, an elastic layer and a conduit, and has a proximal end and a distal end, the proximal end being divided into a first and a second side portions, wherein the first side portion of the proximal end is located on top of the connecting terminal in the active matrix and the second side portion of the proximal end is located on top of the levelling member in the active matrix.Type: GrantFiled: December 3, 1997Date of Patent: September 7, 1999Assignee: Daewoo Electronics Co., Ltd.Inventors: Myung-Kwon Koo, Joon-Mo Nam
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Patent number: 5926309Abstract: A high intensity light modulator includes a micro-mirror light valve target with electrostatically-repelled micro-mirror elements. Each micro-mirror of the target array comprises a base electrode and an overlying micro-mirror element. In operation, charge is deposited upon the micro-mirrors to produce repulsive electrostatic forces that outwardly deflect the micro-mirror elements by an amount proportional to the deposited charge. In one embodiment, an array of micro-mirror light valves is formed directly upon the face plate of a vidicon tube and is addressed using a scanning electron gun.Type: GrantFiled: April 29, 1998Date of Patent: July 20, 1999Assignee: MEMSolutions, Inc.Inventor: Michael J. Little
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Patent number: 5923482Abstract: The present invention selectively corrects astigmatism and is simple and inexpensive to implement. A spherical mirror is bent to simultaneously increase radius of curvature in one plane and decrease radius of curvature in the plane at right angles thereto. In one implementation the mirror disposed in a mounting that includes a plurality of abutment surfaces against which a front surface of the spherical mirror abuts to effect bending of the mirror when it is appropriately disposed in the mounting. The plurality of abutment surfaces includes at least two bending surfaces and at least two support surfaces. The bending surfaces are higher than the support surfaces, relative to a surface of the mounting from which they extend.Type: GrantFiled: March 14, 1997Date of Patent: July 13, 1999Assignee: Waters Investments LimitedInventor: Anthony C. Gilby
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Patent number: 5920422Abstract: A method for manufacturing an array of thin film actuated mirrors capable of ensuring an optimum optical efficiency is disclosed. The method includes the steps of: forming a thin film sacrificial layer on top of an active matrix; forming an array of semifinished actuating structures on top of the thin film sacrificial layer, wherein each of the semifinished actuating structures includes a thin film electrodisplacive member, a second thin film electrode and an elastic member; forming selectively a polymer layer; depositing a first thin film layer on top of each of the semifinished actuating structures; removing the polymer layer, thereby forming an array of actuating structures, each of the actuating structures having a first thin film electrode and the semifinished actuating structure; and removing the thin film sacrificial layer, thereby forming the array of thin film actuated mirrors.Type: GrantFiled: December 17, 1996Date of Patent: July 6, 1999Assignee: Daewoo Electronics Co., Ltd.Inventor: Jong-Sam Kim
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Patent number: 5907441Abstract: A dual action support cylinder placed between a support (2) and a load (1) for applying on said load a nominal force of about 400 to 3900N for a low displacement of less than 1 cm, having a body (1) forming a vessel connected to said support (2) and closed on both sides by a cover (11, 12), said covers and body defining a housing with two chambers (32, 33), each sealed by a flexible membrane (36, 39). The two covers (11, 12) are connected to each other by connecting means (16) comprising ties (45) arranged through the body (10) and the covers (11, 12). The body (10) has a cylinder flange (30, 31) placed on either side of a core member (50) and cooperating with a collar (37, 40) for gripping the inner edge of each membrane (36, 39), wherein the movement of the cylinder is guided by metallic membranes.Type: GrantFiled: November 25, 1996Date of Patent: May 25, 1999Assignee: Giat IndustriesInventor: Jean-Louis Sapy
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Patent number: 5900996Abstract: A variable magnification mirror having a thin diaphragm provided with a reflective front surface includes a mechanism for deforming the diaphragm from a flat shape, yielding unity magnification of images formed by the reflective surface, to adjustably greater curvatures yielding adjustably larger magnification factors. The mechanism includes a screw-driven, flexible circular puller plate fastened to a rear central portion of the rear surface of the reflective diaphragm, the outer peripheral edge of the diaphragm being held axially fixed with respect to the screw. In the preferred embodiment, the puller plate is so constructed as to have greater flexibility at outer radial portions thereof to accommodate larger angular defections of the outer radial portions of the diaphragm, thereby aiding in maintenance of substantially spherical, distortion free contour.Type: GrantFiled: September 4, 1996Date of Patent: May 4, 1999Inventor: Zlatko Zadro
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Patent number: 5898515Abstract: An improved microminiature radiation reflector is formed in a silicon support body with a fabricated cantilever member extending over a cavity that has been etched in the support body. The cantilever member has a reflection surface for reflecting incident radiation to a first position when the cantilever member is not deflected. An electromagnet is formed in the silicon support body adjacent the free end of the cantilever member for deflecting the cantilever member into the cavity of the support body so as to cause incident radiation to be reflected to a second position. An array of radiation reflectors is also disclosed for forming images from electrical signals applied to the electromagnets of selected ones of the radiation reflectors as a function of the position of their reflected radiation in the to be formed image.Type: GrantFiled: November 21, 1996Date of Patent: April 27, 1999Assignee: Eastman Kodak CompanyInventors: Edward P. Furlani, William J. Grande, Syamal K. Ghosh
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Patent number: 5893549Abstract: Mirror support means having a metal block machined with a first pair of slots shaped to receive a first pair of curved mirrors and a second pair of slots shaped to receive a second pair of curved mirrors. The block is sufficiently resiliently deformable to enable the slots to be widened to receive the mirrors and then for the mirrors to be clamped in position, the slots being accurately machined so that the mirrors are bent into their required forms of curvature. The use of a unitary block simplifies the construction and setting up of the support means for the mirrors.Type: GrantFiled: November 27, 1996Date of Patent: April 13, 1999Assignee: Medical Research CouncilInventors: Ladislav Pina, Adolf Inneman, Ulrich Wolfgang Arndt, David Keith Bowen
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Patent number: 5889256Abstract: In the present invention, a curvature variable reflector made from a material capable of elastically deforming in response to a fluid pressure is formed to a curved-face mirror by making use of a pressure by a fluid such as air so that a diameter of a laser beam coming into a converging optical member can be changed at a high speed step by step or smoothly. And by controlling the fluid pressure step by step or steplessly according to a type or thickness of a work, machining can always be performed with an appropriate laser beam diameter.Type: GrantFiled: March 6, 1996Date of Patent: March 30, 1999Assignee: Mitsubushi Denki Kabushiki KaishaInventor: Hajime Osanai
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Patent number: 5886811Abstract: Thin film AMA has a substrate having electrical wiring and a connecting terminal, an actuator formed on the substrate, a supporting element formed between the substrate and the actuator for supporting the actuator, a reflecting member formed on the actuator, and a plurality of posts formed between the actuator and the reflecting member for supporting the reflecting member. The reflecting member is supported by a first post formed on the actuator and by a second post and a third post correspondingly formed on an actuator adjacent to the actuator. So, a deflection or tilting downward of the reflecting member can be prevented so that tilting angle of the reflecting members can be made uniform. Further, as the length of the reflecting member between the first post and the second post, or between the first post and the third post is shorter, the tilting angle of the reflecting member is bigger.Type: GrantFiled: September 30, 1997Date of Patent: March 23, 1999Assignee: Daewoo Electronics Co., Ltd.Inventor: Yong-Ki Min
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Patent number: 5880896Abstract: A deformable mirror including: a flexible member including a reflective surface for reflecting light incident thereupon; and a reference surface substrate including a support portion for supporting a peripheral portion of the flexible member, and a curved portion provided inside the support portion, the curved portion providing a space for allowing for the flexible member to be elastically deformed. A height of a central portion of the curved portion of the reference surface substrate is set to be equal to or less than a height of the support portion of the reference surface substrate. The flexible member is elastically deformed by being drawn toward the curved portion of the reference surface substrate, thereby giving a predetermined aberration to light incident upon the reflective surface of the flexible member.Type: GrantFiled: August 5, 1997Date of Patent: March 9, 1999Assignee: Sharp Kabushiki KaishaInventors: Yorishige Ishii, Hirotsugu Matoba, Susumu Hirata, Shingo Abe, Tetsuya Inui
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Patent number: 5877905Abstract: An improved support for a telescope mirror using a system of three bars which are joined at their ends to the back of the mirror with compliant adhesive pads. Preferably, one end is joined to the center of the mirror while the others are joined on the circumference of a circle centered on the center of the mirror. In this preferred embodiment, there is an approximately right triangular relationship between the centers of the bars. The backs of the bars are coupled at their centers to mirror adjusting mechanisms by further compliant pads. The numbers of support points can be increased by coupling further bars or triangles between the circumferential support points of the original three bars and the back of the mirror. Again coupling is provided by compliant adhesive pads. The thickness and size of all pads are controlled to provide stiff support in compression and shear along with resilient support in bending.Type: GrantFiled: April 14, 1997Date of Patent: March 2, 1999Inventor: Richard A. Schwartz
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Patent number: 5862002Abstract: An array of M.times.N electrostrictive actuated mirrors for use in an optical projection system is prepared by using a relatively thick (100-150 .mu.m) electrostrictive ceramic wafer whose mechanical properties remain intact, which in turn facilitates the manufacturing process, comprising the steps of: (a) preparing a ceramic wafer made of an electrostrictive material, having top and bottom surfaces; (b) providing on the top surface of the ceramic wafer M vertically oriented first trenches; (c) filling the M trenches with an electrically conductive material; (d) providing N-1 horizontally oriented grooves; (e) covering the top surface, including the N-1 grooves thereon, with a layer of a dielectric material; (f) mounting the ceramic wafer on an active matrix; (g) providing a metallic layer on the bottom surface of the ceramic wafer; (h) forming a photoresistive layer on top of the metallic layer; (i) forming on the ceramic wafer N-1 horizontally oriented cuts, thereby forming an array of M.times.Type: GrantFiled: January 22, 1997Date of Patent: January 19, 1999Assignee: Daewoo Electronics Co., Ltd.Inventor: Jeong-Beom Ji
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Patent number: 5862003Abstract: A microelectromechanical micromotion amplifier generates a controlled lateral motion in response to a small deformation in the axial direction of a MEM beam or body. Lateral motion is produced by buckling of one or more long slender beams, the buckling motion being relatively large with respect to the axial motion which causes such lateral motion. The beams may be designed with a slight asymmetry to achieve gradual buckling in a desired direction. The device is capable of amplifying a driving motion in the range of 1-5 micrometers to produce a transverse motion in the range of 50-200 micrometers.Type: GrantFiled: June 20, 1996Date of Patent: January 19, 1999Inventors: Muhammad T. A. Saif, Trent Huang, Noel C. MacDonald
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Patent number: 5859724Abstract: A method for manufacturing an array of thin film actuated mirrors, which is capable of minimizing the effect of a heat treatment involved in the manufacture of the thin film actuated mirror, is disclosed. The method includes the steps of: providing an active matrix having an array of connecting terminals; forming a contact member on top of each of the connecting terminals; forming a thin film sacrificial layer on top of the active matrix; forming an array of actuating structures on top of the thin film sacrificial layer, wherein each of the actuating structures has a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode and an elastic member having a contact hole; and removing the thin film sacrificial layer, thereby forming the array of thin film actuated mirrors.Type: GrantFiled: December 16, 1996Date of Patent: January 12, 1999Assignee: Daewoo Electronics Co., Ltd.Inventor: Yun-Woo Nam
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Patent number: 5835292Abstract: A mirror apparatus includes a flexible mirror mounted in a frame and a shuttle assembly shiftable along a generally upright axis having a cam element for selectively engaging a cam follower coupled with the rear face of the mirror in order to flex the mirror outwardly.Type: GrantFiled: June 2, 1997Date of Patent: November 10, 1998Assignees: Rockwood Industries, Inc., Franklin PharmaceuticalsInventors: William R. Pickett, James D. Parks
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Patent number: 5831780Abstract: A continually supported assembly capable of being space launched includes a base and a thin optical substrate having a light collecting first surface and an opposite rear surface. An elastically coupling medium couples the rear surface of optical substrate and said base to one another. At least one force-coupled actuator is interspersed within said elastic coupling medium for controllably altering the shape of said optical substrate.Type: GrantFiled: January 31, 1996Date of Patent: November 3, 1998Assignee: Raytheon CompanyInventor: Michael H. Krim
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Patent number: 5825801Abstract: The laser apparatus according to the present invention comprises an output mirror for reflecting a portion of a laser beam and transmitting therethrough a remaining thereof; a full reflection mirror located at a position opposite to this output mirror for completely reflecting a laser beam and changing the curvature; a laser medium provided between the output mirror and the full reflection mirror for causing induced emission; an aperture means for deciding a beam mode of a laser beam generated between the output mirror and the full reflection mirror and changing the aperture diameter; and a converging means for converging an outgoing laser beam from the output mirror and changing a distance from the output mirror according to a machining path; and the laser apparatus changes a curvature of the full reflection mirror and also changes a diameter of the aperture means.Type: GrantFiled: February 24, 1997Date of Patent: October 20, 1998Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Satoshi Nishida, Shigeto Takeshima
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Patent number: 5822109Abstract: A method for the manufacturing of an array of M.times.N thin film actuated mirrors for use in an optical projection system, the inventive method includes the steps of: preparing an active matrix; depositing a passivation layer and an etchant stopping layer; depositing a thin film sacrificial layer; creating an array of M.times.N pairs of empty cavities and a continuous sacrificial area to thereby form a combination layer; forming an array of M.times.N actuated mirror structures, each of the actuated mirror structures including a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member; and removing the thin film sacrificial layer, thereby forming the array of M.times.N thin film actuated mirrors.Type: GrantFiled: May 23, 1997Date of Patent: October 13, 1998Assignee: Daewoo Electronics Co., Ltd.Inventor: Yong-Bae Jeon
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Patent number: 5822110Abstract: A light valve modulator of reflective operation which includes a multi-layer structure which is controlled electrostatically, comprises a transparent substrate supporting a first transparent deformable layer and a second insulating dielectric deformable layer, with a mirror layer sandwiched between, and a third, dielectric insulating layer on the outside of the second layer, at least one of the layers between the second layer and the substrate being electrically conductive, and the third dielectric layer being capable of receiving an electric charge pattern by means of one or more electron beams, whereby the mirror layer is locally deformed by electrostatic forces occurring between the third layer and the conductive layer.The twin deformably layers allow good sensitivity, while the outside dielectric layer which receives charge from an electron beam protects the deformable layers from electron bombardment and the cathode from outgassing.Type: GrantFiled: May 13, 1997Date of Patent: October 13, 1998Inventor: Rad Hassan Dabbaj
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Patent number: 5798878Abstract: The control of a mirror's shape, such as for use in large reflecting telescopes, is associated with discrete points so as to avoid incurring constraints and exerting undesirable stress on the reflecting mirror through control unrelated to the mechanical characteristics. Thus, a reflecting mirror is approximated by a non-constrained circular plate having a similar mechanical structure, and an eigenfunction value arithmetic unit calculates values of Bessel-Fourier functions which are eigenfunctions of free vibrations of the circular plate. Using these function values, a mode displacement identification unit approximates a required mirror displacement, which is necessary to correct for wavefront distortion, with a linear combination up to a prescribed mode of vibration of the eigenfunction. A support mechanism command unit controls an actuator so that the value of the linear combination function equals the amount of mirror displacement at a position supported by a reflecting mirror support mechanism.Type: GrantFiled: November 12, 1996Date of Patent: August 25, 1998Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Kouki Asari, Hiromichi Mori, Eiichi Sakai
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Patent number: 5796880Abstract: In an optical transmitter, an input optical fiber delivers an optical signal to a fiber coupling modulator whose reflective surface is transformable in response to the data to be transmitted. In a first state of the modulator corresponding to a first data value, the reflective surface is flat and smooth. The optical signal, which may be a continuous-wave light, is reflected from the surface and efficiently coupled to an output fiber. In a second state of the modulator corresponding to a second data value, the reflective surface is controllably deformed to cause an aberration in reflecting the optical signal. As a result, a much reduced amount of light energy is coupled to the output fiber.Type: GrantFiled: November 18, 1996Date of Patent: August 18, 1998Assignee: Lucent Technologies Inc.Inventors: Joseph Earl Ford, James Albert Walker
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Patent number: 5788579Abstract: An illusion mirror light display has a frame with a view opening, a front partially reflective mirror, a second fully reflective mirror, a middle frame member located between the front and second mirrors, one or more light sources installed on the periphery of the middle frame member for displaying a lighting illusion effect which is viewed through the view opening, and retaining members for retaining all of the elements within the frame. When the illusion mirror light display is activated, it provides an illusion effect. The illusion mirror light display also has pressure points for causing the light sources to emit at that location.Type: GrantFiled: January 14, 1997Date of Patent: August 4, 1998Inventors: Steve R. Cherry, Bernard F. Mikelis
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Patent number: 5784190Abstract: Micro-mechanical flappers for use as an electronic display technology and methods related to the fabrication thereof are disclosed. These methods are consistent with standard silicon based semiconductor processing used to make integrated circuits. One embodiment shows how cross-talk or flapper-to-flapper interference is minimized using a Digital Signal Processor (DSP) to compensate for this undesirable effect. Also disclosed is the construction of a micro-mechanical flapper that uses a combination of two springs, viz. a leaf spring and a torsion spring, to reduce maximum bending stress and to lower operating voltage. Also, the spring construction is made such that axial stability is improved over a single leaf spring approach and a light shield is integrated onto the flapper assembly so that the overhead stationary electrode is simply a supporting glass plate with a transparent conducting layer over its surface.Type: GrantFiled: April 27, 1995Date of Patent: July 21, 1998Assignee: John M. BakerInventor: Eugene R. Worley
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Patent number: 5781355Abstract: The invention is directed to a stress-free support which includes two parts 1 and 2 having different linear thermal expansion coefficients. One part can, for example, be a mirror support made of Zerodur and the second part can be an aluminum support structure. A compensating stress-free support with flexure joints (121 to 126, 211 to 213, 214 to 216) increases the stiffness with respect to tilting. The stress-free support has a low weight and a low structural elevation. The entire arrangement is planar.Type: GrantFiled: February 20, 1997Date of Patent: July 14, 1998Assignee: Carl-Zeiss-StiftungInventor: Hans-Jurgen Meier
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Patent number: 5777807Abstract: A deformable mirror for a laser beam material machining apparatus including a housing for supporting a mirror plate, an electro-mechanical actuator disposed within a jacket tube, a pressure portion disposed at one end of the actuator and a rear end adaptor with a prestressing screw at the other end of the actuator for operatively acting on the mirror plate. The materials of the jacket tube and the housing as well as the materials of the pressure portion and the rear end adaptor are so selected on the basis of their linear coefficients of thermal expansion, such that a temperature change will cause essentially similar overall linear expansion.Type: GrantFiled: June 16, 1995Date of Patent: July 7, 1998Assignee: Diehl GmbH & Co.Inventors: Klaus Bar, Reinhard Schmiedl, Brigitte Freisleben
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Patent number: 5777781Abstract: An optical projection system, displaying an image of pixels on a projection screen, includes a light source for generating a white light beam, wherein the white light beam has a first, a second and a third primary light components, each of the primary light components being one of the primary colors, a pixel filter for filtering the white light beam into each of the primary light beams of each of the primary light components, wherein the pixel filter made of a set of R, G, B color sections, and an array of M.times.N actuated mirrors provided with an active matrix, M and N being positive integers, respectively, each of the actuated mirrors being capable of reflecting the white light beam from the light source to any one of the color sections and modulating an intensity of the light beam passing through the pixel filter in response to an electric signal applied to the active matrix.Type: GrantFiled: October 29, 1996Date of Patent: July 7, 1998Assignee: Daewoo Electronics Co., Ltd.Inventors: Seong-Woo Nam, Zu-Seong Hwang
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Patent number: 5768009Abstract: A high intensity image projection system includes a micro-mirror light valve target with micro-mirror elements repulsively pivotally-actuable. Each micro-mirror of the target array comprises a fixed base electrode joined to an overlying micro-mirror element by means of a hinge with each element formed of conductive material. As such, in operation, charge deposited upon either the base electrode or the micro-mirror element is free to migrate, in response to repulsive forces between deposited charges, to the element spaced therefrom. The resulting presence of like charge distributions upon the base electrode and micro-mirror element of a micro-mirror produces a repulsive electrostatic force for pivotally deflecting the micro-mirror element by an amount proportional to the charge deposited thereon. Capacitive charge storage elements and resistive paths are provided for storing and draining the deposited charge between applications of video frame information.Type: GrantFiled: April 18, 1997Date of Patent: June 16, 1998Assignee: E-BeamInventor: Michael J. Little
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Patent number: 5760947Abstract: An array of M.times.N thin film actuated mirrors for use in an optical projection system comprises an active matrix, an array of M.times.N thin film actuating structures, each of the thin film actuating structures including at least a thin film layer of a motion-inducing material, a pair of electrodes, each of the electrodes being provided on top and bottom of the thin film motion-inducing layer, an array of M.times.N supporting members, each of the supporting members being used for holding each of the actuating structures in place by cantilevering each of the actuating structures and also for electrically connecting each of the actuating structures and the active matrix, an array of M.times.N spacer members, each of the spacer members being mounted on the top surface of each of the actuating structures at the distal end thereof, and an array of M.times.N mirror layers for reflecting light beams, each of the mirror layers being secured on each of the spacer members of the actuating structures.Type: GrantFiled: November 8, 1994Date of Patent: June 2, 1998Assignee: Daewoo Electronics Co., Ltd.Inventors: Dong-Kuk Kim, Jeong-Beom Ji, Yong-Ki Min
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Patent number: 5757562Abstract: A mirror having a reflection coefficient that is spatially variable in amplitude and in phase includes at least two parallel spaced reflecting plates. One of the plates is displaced parallel to itself to vary the distance between the plates. At least one of the reflecting plates can be deformed transversely to its plane.Type: GrantFiled: January 28, 1997Date of Patent: May 26, 1998Assignee: Compagnie Industrielle Des Lasers CilasInventors: Victor Victorovich Apollonov, Vladmir Ivanovitch Acsinin, Alexis Borissovitch Egorov, Yuri Lvovitch Kalachev, Vadim Veniaminovitch Kiyko, Victor Ivanovitch Kislov, Alexander Mihailovitch Prokhorov, Jean Cornillault
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Patent number: 5755217Abstract: A method for concentrating solar energy utilizes a pool of a homogenous fluidic substance disposed over a reflective surface. Mechanical energy is controllably imparted to the pool, for example, via synchronized electromechanical transducers, to generate a standing wave of the fluidic substance in the pool. Incoming solar radiation is differentially reflected from the pool and the reflective surface, upon generation of the standing wave in the fluidic substance, to concentrate the incoming solar radiation at a predetermined location spaced from the pool. At that predetermined location is a solar energy collector for absorbing and storing the solar radiation.Type: GrantFiled: September 5, 1996Date of Patent: May 26, 1998Inventors: Robert C. Stirbl, Peter J. Wilk
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Patent number: 5757539Abstract: An inventive array of M.times.N thin film actuated mirrors includes an active matrix, an insulating layer, an etchant stopping layer, and an array of M.times.N actuating structures. Each of the actuating structures has a tip at a distal end thereof and an etching aperture traversing therethrough, and further includes a first thin film electrode with a horizontal stripe, a thin film electrodisplacive member, a second thin film electrode, an elastic member and a conduit. The horizontal stripe, the tip and the etching aperture are created in order to increase the optical efficiency of each of the thin film actuated mirrors, facilitate the removal of the rinse and allow easy removal of the thin film sacrificial layer, respectively.Type: GrantFiled: February 16, 1996Date of Patent: May 26, 1998Assignee: Daewoo Electronics Co. LtdInventor: Yong-Ki Min
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Patent number: 5754331Abstract: An inventive array of M.times.N thin film actuated mirrors includes an active matrix and an array of M.times.N actuating structures. Each of the actuating structures includes an upper thin film electrode, a thin film electrodisplacive member, a lower thin film electrode, an elastic member and a conduit. In the array, since the upper thin film electrode is electrically connected individually to the active matrix through the conduit in each of the actuated mirrors, if one thereof becomes inoperable for any reason, e.g., short-circuit due to the scratch in the upper thin film electrode, other thin film actuated mirrors in the same row or column in the array 200 are not affected.Type: GrantFiled: May 19, 1997Date of Patent: May 19, 1998Assignee: Daewoo Electronics Co., Ltd.Inventor: Yong-ki Min
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Patent number: 5754330Abstract: Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a reflecting member formed on the actuator. The actuator has a plurality of actuating portions in which adjacent actuating portions tilt in opposite directions one after another. Each actuating portion has bottom electrodes, active layers, top electrodes, and via contacts. The top electrodes and bottom electrodes of the actuating portions are cross-connected, so electric fields are generated in opposite directions. The reflecting member installed on the actuator has a large tilting angle. Therefore, the light efficiency of the light reflected by the reflecting member increases and the contrast of the picture projected onto a screen also increases.Type: GrantFiled: March 6, 1997Date of Patent: May 19, 1998Assignee: Daewoo Electronics Co., Ltd.Inventor: Yun-Woo Nam
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Patent number: 5751750Abstract: A laser system with compensated optics contains at least one optical element which is thermally coupled to a heat source in order to thermally compensate for a deformation of optical elements disposed in a beam path of the laser system. The deformation is brought about by the laser beam.Type: GrantFiled: February 10, 1997Date of Patent: May 12, 1998Assignee: Rofin-Sinar Laser GmbHInventors: Dirk Friede, Hermann Hage, Karl-Heinz Herzner, Volker Scholz
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Patent number: 5751503Abstract: A light weight arcuate reflector facet, for a solar concentrator comprises a thin mirrored glass sheet such as a microsheet, and a backing sheet or substrate, the glass sheet being bonded to the backing sheet, with the backing sheet providing a smooth surface to the glass sheet. A support member or support structure is attached to the backing sheet and maintains the mirrored glass sheet at a desired radius of curvature. The backing sheet is preferably a composite, and according to one embodiment of a fixed focal length light weight reflector facet, the support member is a resin-impregnated fiberglass sheet having a rib structure. In another embodiment of a variable focal length light weight reflector facet, the support member is a mechanical structure comprising a circular support structure having intersecting center support beams positioned diagonally across the circular support structure.Type: GrantFiled: January 21, 1997Date of Patent: May 12, 1998Assignee: McDonnell Douglas CorporationInventors: James B. Blackmon, Kenneth W. Stone, Stephen M. Kusek
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Patent number: 5745309Abstract: A new adaptive optics system and method of operation, whereby the method removes tilt control, and includes the steps of using a steering mirror to steer a wavefront in the desired direction, for aiming an impinging aberrated light beam in the direction of a deformable mirror. The deformable mirror has its surface deformed selectively by means of a plurality of actuators, and compensates, at least partially, for existing aberrations in the light beam. The light beam is split into an output beam and a sample beam, and the sample beam is sampled using a wavefront sensor. The sampled signals are converted into corresponding electrical signals for driving a controller, which, in turn, drives the deformable mirror in a feedback loop in response to the sampled signals, for compensating for aberrations in the wavefront. To this purpose, a displacement error (gradient) of the wavefront is measured, and adjusted by a modified gain matrix, which satisfies the following equation:G'=(I-X(X.sup.T X).sup.-1 X.sup.Type: GrantFiled: March 25, 1997Date of Patent: April 28, 1998Assignee: The United States of America as represented by the United States Department of EnergyInventor: Joseph Thaddeus Salmon
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Patent number: 5719695Abstract: A high contrast spatial light modulator (40) formed of micro-mechanical pixels (10). The supporting superstructure comprising the posts (12) and hinges (16) of the pixels (10) are shielded by an umbrella-like elevated light shield (42) extending over the hinge and posts. These light shields (42) are generally square in shape, and have edges arranged at approximately 45.degree. with respect to the incident light to minimize diffraction of light therefrom into projection optics. The upper surfaces of the shields may be anodized to achieve a non-reflective, black surface when viewed through darkfield optics. The shields (42) are fabricated using conventional semiconductor processes, which are a natural extension of the baseline process.Type: GrantFiled: December 5, 1996Date of Patent: February 17, 1998Assignee: Texas Instruments IncorporatedInventor: Scott D. Heimbuch
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Patent number: 5708524Abstract: An array of M.times.N thin film actuated mirrors includes an active matrix including a substrate with an array of M.times.N pairs of connecting terminals and an array of M.times.N transistors, and an array of M.times.N actuating structures, each of the actuating structures having an actuating and a light reflecting portions, wherein the actuating portion further includes a first and a second parts. Each of the actuating structures is provided with a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member and a first and a second conduits.Type: GrantFiled: May 3, 1996Date of Patent: January 13, 1998Assignee: Daewoo Electronics Co.,Ltd.Inventor: Yong-Ki Min
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Patent number: 5701192Abstract: An array of thin film actuated mirrors includes an active matrix and an array of actuating structures, each of the actuating structures including an elastic member, a pair of conduits, a second thin film electrode with a stripe, a thin film electrodisplacive member and a first thin film electrode.Type: GrantFiled: April 29, 1996Date of Patent: December 23, 1997Assignee: Daewoo Electronics Co., Ltd.Inventors: Jeong-Beom Ji, Yong-Ki Min
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Patent number: 5699181Abstract: A deformable mirror device and a manufacturing method thereof, which decreases the possibility of damage to a substrate having an address scanning circuit and increases the efficiency of light reflection of a moving mirror. First and second moving mirrors and first and second posts are fabricated on a substrate. An address scanning circuit (SRAM) is fabricated on another substrate, independently. Finally, both the substrates are combined. The second post is vertically formed by sputtering after the second moving mirror is formed.Type: GrantFiled: April 25, 1996Date of Patent: December 16, 1997Assignee: Samsung Electronics Co., Ltd.Inventor: Bum-Kyoo Choi
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Patent number: 5691836Abstract: An optically addressed spatial light modulator includes a reflective modulation element, a detector for detecting radiation, a micro-lens focusing a write beam on the detector and a read beam on the modulator element, and a circuit receiving a signal output from the detector generated in response to the write beam. The circuit alters the modulation element in accordance with the signal from the photodetector. The read beam is thus modulated in accordance with the amount of alteration of the modulation element. The read and write beams intercept the micro-lens at different angles and may have the same or differing wavelengths. Including multiple photodetectors on a single pixel allows use of a plurality of write beams. An array of the elements may be used to modulate a plurality of read beams.Type: GrantFiled: July 11, 1995Date of Patent: November 25, 1997Assignee: SY Technology, Inc.Inventor: Rodney L. Clark
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Patent number: 5689380Abstract: A thin film actuated mirror for an actuated mirror array includes a pedestal, a piezoelectric structure mounted to the pedestal, and a mirror surface interconnected to the piezoelectric structure such that the mirror surface tilts in response to the deformation of the piezoelectric material layer. The pedestal includes a first pedestal section and a second pedestal section, and the piezoelectric structure is divided into a first portion and a second portion. The piezoelectric structure includes a piezoelectric material layer having two opposing surfaces, and two metal electrodes, the electrodes being mounted on opposing surfaces of the piezoelectric material. The piezoelectric structure first portion is mounted to the first pedestal section at a proximal end of the piezoelectric structure and the second portion is mounted to the second pedestal section at a distal end of the piezoelectric structure.Type: GrantFiled: April 17, 1995Date of Patent: November 18, 1997Assignee: Aura Systems, Inc.Inventor: Gregory Um
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Patent number: 5680262Abstract: A method of fabricating a reflective stretched membrane mirror for use in the collection and focusing of solar energy includes a tensioning fixture to which a plurality of air-actuated cylinders are attached. The piston arm of each cylinder is in turn connected to an air-actuated clamp which is designed to hold a portion of the peripheral edge of the reflective film which is to be stretched. Depending upon the properties of the film and its tensioning characteristics, cylinders which need the same air pressure are connected in common to a single regulator. The regulators are then connected to an air compressor and the sheet of reflective film is tensioned to a desired level at which point it is adhesively bonded to a circular frame. Once a first reflective film is bonded to a top side of the frame, the process is repeated with a second reflective film bonded to the back or opposite side of the frame.Type: GrantFiled: May 26, 1995Date of Patent: October 21, 1997Assignee: Cummins Power Generation, Inc.Inventors: Patrick K. Soliday, Gary W. Thomas, Monte A. McGlaun, Michael J. Taylor
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Patent number: 5677800Abstract: The present invention is a viewing assembly that can selectively create optical compound corrections in the images reflected from the viewing assembly. The viewing assembly includes a reflective surface coupled to a supporting body in such a manner that the reflective surface conforms to the contour of the supporting body. The contour of the supporting body is selectively altered by the viewer of the viewing assembly, thereby changing the shape of the reflective surface and creating desired optical corrections in the viewed reflected images.Type: GrantFiled: June 7, 1995Date of Patent: October 14, 1997Assignee: Image Optical CorporationInventors: David B. Soll, Richard Evans Feinbloom
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Patent number: 5677783Abstract: A modulator for modulating incident rays of light, the modulator comprising a plurality of equally spaced apart beam elements, each of which includes a light reflective planar surface. The elements are arranged parallel to each other with their light reflective surfaces parallel to each other. The modulator includes means for supporting the beam elements in relation to one another and means for moving the beam elements relative to one another so that the beams move between a first configuration wherein the modulator acts to reflect the incident rays of light as a plane mirror, and a second configuration wherein the modulator diffracts the incident rays of light as they are reflected therefrom.Type: GrantFiled: March 13, 1995Date of Patent: October 14, 1997Assignee: The Board of Trustees of the Leland Stanford, Junior UniversityInventors: David M. Bloom, Francisco S. A. Sandejas, Olav Solgaard, Raj B. Apte