Electrical Or Optical Patents (Class 427/10)
  • Patent number: 8691322
    Abstract: A method for measuring the thickness of a coating on a component section of a rotating component, wherein a heat expansion of the component section is determined by detecting a component core temperature and an actual coating thickness is produced, a device for conducting a method of this type having a temperature detecting system and having an evaluating device, as well as a production process and a coating system, are disclosed.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: April 8, 2014
    Assignee: MTU Aero Engines GmbH
    Inventors: Jochen Zierhut, Susanne Hogger
  • Patent number: 8686711
    Abstract: A method for calibrating a high frequency measuring device so as to accurately measure plasma processing parameters within a chamber. A calibration parameter is calculated from a first set of three reference loads measured by a high frequency measurement device. A second calibration parameter is calculated from S parameters measured between a connection point where the high-frequency measuring device is connected and the inside of the chamber of a plasma processing device. A second set of three reference loads, which include the impedance previously calculated and encompass a range narrower than that encompassed by the first set of three reference loads, is measured with the reference loads in the chamber.
    Type: Grant
    Filed: March 15, 2011
    Date of Patent: April 1, 2014
    Assignee: DAIHEN Corporation
    Inventors: Ryohei Tanaka, Yoshifumi Ibuki
  • Patent number: 8679573
    Abstract: An apparatus includes a piezoelectric print head capable of ejecting a droplet of a coating substance towards a stent strut, a sensor capable of sensing a parameter of the droplet, and a controller, communicatively coupled to the print head and the sensor, capable of determining if the parameter of the droplet meets a requirement. A method includes ejecting a droplet of a coating substance towards a stent strut with a piezoelectric print head, sensing a parameter of the droplet, and determining whether the parameter of the droplet meets a requirement.
    Type: Grant
    Filed: June 28, 2006
    Date of Patent: March 25, 2014
    Assignee: Advanced Cardiovascular Systems, Inc.
    Inventors: Jason Van Sciver, Greg Teaby, Phil Foreman, Manish Gada
  • Publication number: 20140011040
    Abstract: Methods and systems for coating metal substrates are provided. The methods and systems include sequential application of low flow and high flow powder coatings followed by a single heating step to provide a cured coating. The methods and systems include a marker that allows coating uniformity to be monitored and assessed during application. The described methods provide coatings with optimal surface smoothness and edge coverage.
    Type: Application
    Filed: September 5, 2013
    Publication date: January 9, 2014
    Applicant: Valspar Sourcing, Inc.
    Inventors: Owen H. Decker, Thomas E. Reno, Robert D. Breitzman, Carlos A. Concha, Jeffrey D. Rogozinski
  • Publication number: 20130323407
    Abstract: An apparatus for depositing a material layer on a sample inside a vacuum chamber comprises a sample stage (100) for arranging at least one sample (103a, 103b, 103c, 103d); an evaporation source (101, 201), connected to a current source, for a thread-shaped evaporation material (102, 202); a quartz oscillator (105) for measuring the deposited material layer thickness; and an evaluation device (113) associated with the oscillator (105). An electronic control system (112) associated with the evaporation source (101, 201) is configured to deliver electric current in the form of at least two current pulses having a pulse length less than or equal to 1 s. The evaluation device (113) takes into account transient decay behavior of the oscillator (105) immediately after a current pulse to derive the material layer thickness deposited after each pulse. The invention further relates to a method that can be carried out using said apparatus.
    Type: Application
    Filed: May 31, 2013
    Publication date: December 5, 2013
    Inventors: Paul WURZINGER, Anton LANG
  • Publication number: 20130313480
    Abstract: Provided herein are processes for depositing a plasma coating on a substrate and coated substrates obtained thereby. More particularly, processes for characterizing a plasma coating on a substrate are provided. The process for depositing a plasma coating includes the step of exposing the substrate to a plasma. The plasma includes at least one coating precursor and one fluorophore other than the coating precursor.
    Type: Application
    Filed: May 24, 2013
    Publication date: November 28, 2013
    Applicant: VITO NV
    Inventor: Marjorie Dubreuil
  • Patent number: 8501399
    Abstract: A method of detection comprising a conjugate of a randomly and asymmetrically branched dendritic polymer.
    Type: Grant
    Filed: July 12, 2010
    Date of Patent: August 6, 2013
    Assignee: ANP Technologies, Inc.
    Inventors: Ray Yin, Dujie Qin, Jing Pan
  • Patent number: 8501416
    Abstract: The present invention relates generally to microfluidic structures, and more specifically, to microfluidic structures and methods including meandering and wide channels. Microfluidic systems can provide an advantageous environment for performing various reactions and analysis due to a reduction in sample and reagent quantities that are required, a reduction in the size of the operating system, and a decrease in reaction time compared to conventional systems. Unfortunately, the small size of microfluidic channels can sometimes result in difficulty in detecting a species without magnifying optics (such as a microscope or a photomultiplier). A series of tightly packed microchannels, i.e., a meandering region, or a wide channel having a dimension on the order of millimeters, can serve as a solution to this problem by creating a wide measurement area.
    Type: Grant
    Filed: April 19, 2006
    Date of Patent: August 6, 2013
    Assignee: President and Fellows of Harvard College
    Inventors: Vincent Linder, Samuel K. Sia, George M. Whitesides, Max Narovlyansky, Adam Siegel
  • Patent number: 8491971
    Abstract: The producing method of a gas barrier layer uses a material having at least one Si—H bond, a material having at least one N—H bond, and at least one of nitrogen gas, hydrogen gas and a noble gas and forms the gas barrier layer by plasma-enhanced CVD using a plasma in which an emission intensity A of emission at 414 nm, an emission intensity B of emission at 336 nm, an emission intensity C of emission at 337 nm, and an emission intensity D of emission at 656 nm satisfy formulas a to c: 2<B/A<20??Formula a: C/B<2??Formula b: 0.5<D/B<50.
    Type: Grant
    Filed: March 24, 2010
    Date of Patent: July 23, 2013
    Assignee: Fujifilm Corporation
    Inventor: Toshiya Takahashi
  • Patent number: 8486485
    Abstract: An imprintable medium dispenser includes a chamber, a nozzle, and an actuator connected to the chamber and configured to be actuated and thereby generate a pressure wave within the chamber such that imprintable medium is dispensed from the nozzle. The imprintable medium dispenser is provided with a control circuit which includes a monitoring apparatus configured to receive a transient oscillation signal generated when the actuator is actuated, and to monitor the operation of the imprintable medium dispenser by monitoring the transient oscillation signal.
    Type: Grant
    Filed: July 29, 2011
    Date of Patent: July 16, 2013
    Assignee: ASML Netherlands B.V.
    Inventors: Johan Frederik Dijksman, Anke Pierik, Martin Maurice Vernhout, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Ivar Schram
  • Patent number: 8420155
    Abstract: An alloyed semiconductor quantum dot comprising an alloy of at least two semiconductors, wherein the quantum dot has a homogeneous composition and is characterized by a band gap energy that is non-linearly related to the molar ratio of the at least two semiconductors; a series of alloyed semiconductor quantum dots related thereto; a concentration-gradient quantum dot comprising an alloy of a first semiconductor and a second semiconductor, wherein the concentration of the first semiconductor gradually increases from the core of the quantum dot to the surface of the quantum dot and the concentration of the second semiconductor gradually decreases from the core of the quantum dot to the surface of the quantum dot; a series of concentration-gradient quantum dots related thereto; in vitro and in vivo methods of use; and methods of producing the alloyed semiconductor and concentration-gradient quantum dots and the series of quantum dots related thereto.
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: April 16, 2013
    Assignee: Indiana University Research and Technology Corporation
    Inventors: Shuming Nie, Robert E. Bailey
  • Publication number: 20130052772
    Abstract: A method of manufacturing an optical reflector including an alternating stack of at least one first layer of complex refraction index n1 and at least one second layer of complex refraction index n2, in which the first layer includes semiconductor nanocrystals, including the following steps: calculation of the total number of layers of the stack, of the thicknesses of each of the layers and of the values of complex refraction indices n1 and n2 on the basis of the characteristics of a desired spectral reflectivity window of the optical reflector, including the use of an optical transfer matrices calculation method; calculation of deposition and annealing parameters of the layers on the basis of the total number of layers and of the values of previously calculated complex refraction indices n1 and n2; deposition and annealing of the layers in accordance with the previously calculated parameters.
    Type: Application
    Filed: August 10, 2012
    Publication date: February 28, 2013
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT
    Inventors: Kavita Surana, Mathieu Baudrit, Pierre Mur, Philippe Thony
  • Patent number: 8377503
    Abstract: A method for real-timely monitoring thickness change of a coating film is disclosed. In the method, a coating module having a chamber and a film thickness-monitoring module containing an SPR optical fiber sensor, a light source, a light-receiving detector, and optical fibers are first provided. The optical fibers are used to connect the SPR optical fiber sensor with the light source and the light-receiving detector. The SPR optical fiber sensor has a sensing area and is arranged in the chamber. The light source provides the SPR optical fiber sensor with light. Then, a substrate is put into the chamber. While coating process is performed on the substrate, a film is also formed on the sensing area of the SPR optical fiber sensor. The light-receiving detector receives signals output from the sensing area of the SPR optical fiber sensor and then outputs signals of light-intensity change.
    Type: Grant
    Filed: April 22, 2010
    Date of Patent: February 19, 2013
    Assignee: Forward Electronics Co., Ltd.
    Inventors: Yu-Chia Tsao, Chung-Pei Lee, Ko-Shao Chen, Jia-Huey Tsao, Chun-Chih Lin, Ren-Kun Liang
  • Patent number: 8377501
    Abstract: A coating and developing system and control method is provided. The system and control method curtails the amount of time for which a substrate is held with no purpose while improving the throughput of the coating and developing system. An inspection station through which a substrate processed in a processing station is transferred to a carrier station includes a plurality of different inspection modules respectively taking different inspection times, a buffer unit for temporarily holding a substrate and a substrate carrying means controlled by a controller. When the inspection module is engaged in inspecting a substrate, the substrate carrying means carries another substrate to be inspected by the same inspection module to the buffer unit and the substrate is held in the buffer unit. Thus, the holding of wafers in the inspection modules can be suppressed and the throughput can be improved.
    Type: Grant
    Filed: September 11, 2007
    Date of Patent: February 19, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Yasushi Hayashida, Yoshitaka Hara, Tomohiro Kaneko
  • Patent number: 8329247
    Abstract: A method for producing a multi-layer photonic structure having at least one group of alternating layers of high index material and low index material may include, determining a characteristic property function for the multi-layer photonic structure, determining a thickness multiplier for the at least one group of alternating layers based on a comparison of the characteristic property function to a target profile, adjusting the characteristic property function with the determined thickness multiplier, and comparing an adjusted characteristic property function to the target profile, wherein, when the adjusted characteristic property function does not approximate the target profile, at least one additional group of layers is added to the multi-layer photonic structure.
    Type: Grant
    Filed: February 19, 2009
    Date of Patent: December 11, 2012
    Assignee: Toyota Motor Engineering & Manufacturing North America, Inc.
    Inventors: Debasish Banerjee, Benjamin Alan Grayson, Minjuan Zhang, Masahiko Ishii
  • Patent number: 8313794
    Abstract: Thermally insulating layer incorporating a distinguishing agent and method for inspecting the insulating layer are provided. The distinguishing agent may be used for determining a remaining thickness of the thermally insulating layer.
    Type: Grant
    Filed: January 4, 2008
    Date of Patent: November 20, 2012
    Assignee: Siemens Energy, Inc.
    Inventor: Steven James Vance
  • Patent number: 8304961
    Abstract: There is provided a method for testing a piezoelectric/electrostrictive actuator, wherein the displacement of a piezoelectric/electrostrictive actuator is estimated on the basis of the relations between one or more frequency characteristic values selected from the group consisting of the heights and areas of the peaks of the resonance waveforms and the difference of the maximum and minimum of the first order or first to higher orders of the resonance frequency characteristic values of the piezoelectric/electrostrictive actuator and the k-th order (k=1 to 4) of the first or first to higher orders of resonance frequencies. According to this piezoelectric/electrostrictive actuator testing method, a piezoelectric/electrostrictive actuator can be tested with high precision without actually driving the same as a product and without being accompanied by any disassembly/breakage.
    Type: Grant
    Filed: October 15, 2010
    Date of Patent: November 6, 2012
    Assignee: NGK Insulators, Ltd.
    Inventors: Naoki Goto, Takao Ohnishi
  • Publication number: 20120263866
    Abstract: A method for determining the layer thickness of a component to be coated is provided. The monitoring of the process is automated by carrying out laser triangulation measurement before and after the coating of the component. At least one reference point on the component is used to determine the distortion of the blade or vane. A device for carrying out the method is also provided.
    Type: Application
    Filed: June 21, 2010
    Publication date: October 18, 2012
    Inventors: Torsten Melzer-Jokisch, Andreas Oppert, Dimitrios Thomaidis
  • Publication number: 20120258239
    Abstract: An evaporator for evaporating a material onto a substrate is described. The evaporator includes a guiding means for guiding the material towards at least one opening nozzle. The guiding means includes a measurement outlet for a portion of the material. The evaporator further includes a first measurement system configured for generating a first signal correlated with a deposition rate of the evaporator and having a first detector positioned for being coated by the material and a second optical measurement system for generating a second signal correlated with the deposition rate of the evaporator and wherein the second signal is based on the portion of the material of the measurement outlet.
    Type: Application
    Filed: April 12, 2011
    Publication date: October 11, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventor: Uwe HOFFMANN
  • Patent number: 8282984
    Abstract: A processing condition inspection method of a damage recovery process for reforming a film having OH groups generated by damages from a predetermined process by using a processing gas includes preparing a substrate having an OH group containing resin film, measuring an initial film thickness of the OH group containing resin film, performing a damage recovery process on the substrate after measuring the initial film thickness, measuring a film thickness of the OH group containing resin film after the damage recovery process, calculating a film thickness difference of the OH group containing resin film before and after the damage recovery process, and determining whether processing conditions of the damage recovery process are appropriate or inappropriate based on the film thickness difference.
    Type: Grant
    Filed: December 2, 2008
    Date of Patent: October 9, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Reiko Sasahara, Jun Tamura, Shigeru Tahara
  • Patent number: 8268385
    Abstract: A method is provided for the determination a thickness error in a previously deposited layer using the reflection monitor signal of the currently-depositing layer. This thickness error is then used to compute corrections to the thickness of the currently-depositing layer and the next layer which corrects for the thickness error in the previous layer. The method is stable with respect to noise in the optical monitor signal. The technique is applicable for optical coating designs which are not necessarily quarter wave. The approach avoids the buildup of thickness errors from layer to layer and thus is applicable for very thick designs with many layers. Near the end of a currently depositing layer the monitor signal is used to fit the admittance of the base stack under the current layer. This establishes the parameters in an exact reflectance model used for the thickness monitoring of the current layer.
    Type: Grant
    Filed: May 14, 2008
    Date of Patent: September 18, 2012
    Inventor: William H. Southwell
  • Patent number: 8257784
    Abstract: In one embodiment, a method for identifying an article of manufacture may include: producing a plurality of multilayer photonic structures, wherein each of the plurality of multilayer photonic structures has a unique intensity profile; incorporating one of the plurality of multilayer photonic structures that produces the unique intensity profile into a coating; and generating an electronic code corresponding to the unique intensity profile of one of the plurality of multilayer photonic structures.
    Type: Grant
    Filed: August 10, 2010
    Date of Patent: September 4, 2012
    Assignee: Toyota Motor Engineering & Manufacturing North America, Inc.
    Inventors: Benjamin Alan Grayson, Debasish Benerjee, Minjuan Zhang, Yasuo Uehara, Masahiko Ishii
  • Patent number: 8252362
    Abstract: Evaluation methods that employ the near infrared spectrum have generally had a low specificity and in particular have encountered difficulty in the evaluation of trace components, and the accurate measurement of coating quantity by methods using the near infrared spectrum has been quite problematic. The quantity of coating applied to a coating target, such as granules or uncoated tablets, is measured based on the absorption or scattering of light in the 800 to 1100 nm wavelength region by an additive coated on the coating target. The use of polyethylene glycol or a long-chain hydrocarbyl-containing compound as the additive is preferred.
    Type: Grant
    Filed: February 2, 2006
    Date of Patent: August 28, 2012
    Assignee: Eisai R&D Management Co., Ltd.
    Inventors: Makoto Yokoyama, Koji Ukai
  • Patent number: 8241699
    Abstract: A vapor deposition device 100 for moving a sheet-like substrate 4 in a roll-to-roll system in a chamber 2 to continuously form a vapor deposition film on the substrate 4. The vapor deposition device 100 comprises an evaporation source 9 for evaporating a vapor-depositing material; a transportation section including first and second rolls 3 and 8 for holding the substrate 4 in the state of being wound therearound and a guide section for guiding the substrate 4; and a shielding section, located in a vapor deposition possible zone, for forming a shielded zone which is not reachable by the vapor-depositing material from the evaporation source 9.
    Type: Grant
    Filed: March 10, 2008
    Date of Patent: August 14, 2012
    Assignee: Panasonic Corporation
    Inventors: Sadayuki Okazaki, Kazuyoshi Honda, Tomofumi Yanagi, Shoichi Imashiku
  • Patent number: 8226802
    Abstract: A technology which is capable of an accurate measurement of the film thickness even if an exfoliation occurs is provided. A difference frequency ?f0 is calculated from a resonance frequency f0 of a film thickness sensor at a current time a0 and a resonance frequency f1 at an immediate past time a1, and whether the exfoliation has occurred or not is detected from its sign and a comparison result relative to a reference value. When the exfoliation has occurred, a corrected film thickness value T? is obtained by adding the thickness ?t0 of the exfoliation film to an increased film thickness value T which is determined from a resonance frequency fx measured at a future time ax to be converted to the thickness of a film on a film forming object, and whether the formation of the film should be terminated is judged in comparison to an aimed value.
    Type: Grant
    Filed: March 17, 2010
    Date of Patent: July 24, 2012
    Assignee: ULVAC, Inc.
    Inventors: Masato Fukao, Toru Kimura
  • Patent number: 8221299
    Abstract: Membrane-encased structures such as biological cells, liposomes, and vesicles, are conveyed through one or more channels in a rotating disk for individual exposure to optical elements or to electrodes, for purposes of transfection or flow cytometry. The rotation of the disk serves either to provide centrifugal force to urge the cells against one wall of the channel and in certain embodiments to move the cells through the channels, or to draw cells at preselected times or intervals into the exposure zone, or all three.
    Type: Grant
    Filed: June 3, 2009
    Date of Patent: July 17, 2012
    Assignee: Bio-Rad Laboratories, Inc.
    Inventor: Charles W. Ragsdale
  • Patent number: 8216826
    Abstract: A fluid analyzing apparatus. The fluid analyzing apparatus sequentially or simultaneously detects and analyzes a multiplex fluid sample with suitable analyzing elements. Meanwhile, the fluid analyzing apparatus may be disassembled to a first unit, a second unit and a third unit, such that the analyzing elements therein are easily disposed and replaced. The fluid analyzing apparatus analyzes and detects the multiplex fluid sample by allowing the multiplex fluid sample to sequentially or simultaneously flow through a plurality of target chambers. The fluid analyzing apparatus sequentially or simultaneously transports the multiplex fluid sample to the target chambers, thereby enhancing the speed and analysis thereof.
    Type: Grant
    Filed: October 14, 2008
    Date of Patent: July 10, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Kun Feng Lee, Pei-Shin Jiang, Yuh-Jiuan Lin
  • Publication number: 20120156363
    Abstract: A gas injection system for a chemical vapor deposition system includes a gas manifold comprising a plurality of valves where each of the plurality of valves has an input that is coupled to a process gas source and an output for providing process gas. Each of a plurality of gas injectors has an input that is coupled to the output of one of the plurality of valves and an output that is positioned in one of a plurality of zones in a chemical vapor deposition reactor. A controller having a plurality of outputs where each of the plurality of outputs is coupled to a control input of one of the plurality of valves. The controller instructs at least some of the plurality of valves to open at predetermined times to provide a desired gas flow to each of the plurality of zones in the chemical vapor deposition reactor.
    Type: Application
    Filed: December 17, 2010
    Publication date: June 21, 2012
    Applicant: VEECO INSTRUMENTS INC.
    Inventors: William E. Quinn, Eric A. Armour
  • Patent number: 8197912
    Abstract: A method for manufacturing thin film panels comprises providing a laser patterning system, depositing a base layer on a glass substrate, separating the base layer by scribing a plurality of separation lines corresponding with a predefined scribe pattern, depositing a functional layer on the base layer, determining a first base layer separation edge, moving the translation stage by a first distance, activating the laser array and moving the translation stage by a second distance, deactivating the laser array, determining subsequent separation edges of the base layer and scribing lines therein, depositing a top layer on the functional layer, determining a first functional layer separation edge, operating the stepper motor to move the translation stage by a third distance, activating the laser array and moving the translation stage by a fourth distance, deactivating the laser array, and determining subsequent separation edges of the functional layer and scribing lines therein.
    Type: Grant
    Filed: March 12, 2009
    Date of Patent: June 12, 2012
    Assignee: International Business Machines Corporation
    Inventors: Rainer Krause, Gerd Pfeiffer
  • Patent number: 8182861
    Abstract: Thin film processing systems and methods are provided having a moving deposition sensor capable of translation and/or rotation in a manner that exposes the sensor to thin film deposition environments in a flux region substantially the same as the deposition environments experienced by one or more moveable substrates during a selected deposition period. In one embodiment, a thin film monitoring and control system is provided wherein one or more moveable substrates and a moveable deposition sensor are moved along substantially coincident trajectories in a flux region of a thin film deposition system for a selected deposition period. Systems and methods of the present invention may include SC-cut quartz crystal microbalance sensors capable of excitation of at least two different resonant modes.
    Type: Grant
    Filed: October 12, 2010
    Date of Patent: May 22, 2012
    Assignee: Research Electro-Optics, Inc.
    Inventors: William David Lee, Dale C. Ness, Alan D. Streater
  • Patent number: 8173201
    Abstract: A film-forming method includes: a) discharging a liquid including a film material on an object so as to form a liquid film made of the liquid; b) irradiating the liquid film with light and thus detecting light from the liquid film so as to measure distribution of an optical constant, which is related to a film thickness of a thin film, with respect to the liquid film; and c) drying the liquid film on the object so as to form the thin film by converting the distribution of the optical constant into distribution of a temperature of the liquid film based on converting information that relates the optical constant of the liquid film to the temperature of the liquid film and thus forming the distribution of the temperature on the liquid film.
    Type: Grant
    Filed: August 5, 2008
    Date of Patent: May 8, 2012
    Assignee: Seiko Epson Corporation
    Inventors: Hirotsuna Miura, Yoshikazu Hama
  • Publication number: 20120093697
    Abstract: A honeycomb catalyst body includes a honeycomb structure and a catalyst. The honeycomb structure includes a porous honeycomb fired body having at least one cell wall defining a plurality of cells extending along a longitudinal direction of the porous honeycomb fired body. The plurality of cells is provided in parallel with one another. The honeycomb fired body contains silicon carbide particles and a silica layer formed on a surface of each of the silicon carbide particles. The silica layer has a thickness of from about 5 nm to about 100 nm measured by X-ray photoelectron spectroscopy. The catalyst contains at least one of oxide ceramics and zeolite. The catalyst is provided on a surface of the silica layer. An amount of at least one of the oxide ceramics and the zeolite is about 50 g/L or more.
    Type: Application
    Filed: October 3, 2011
    Publication date: April 19, 2012
    Applicant: IBIDEN CO., LTD.
    Inventors: Misako Iwakura, Kohei Ota
  • Patent number: 8158430
    Abstract: The present invention provides fluidic devices and systems that allow detection of analytes from a biological fluid. The methods and devices are particularly useful for providing point-of-care testing for a variety of medical applications.
    Type: Grant
    Filed: August 6, 2008
    Date of Patent: April 17, 2012
    Assignee: Theranos, Inc.
    Inventors: Shaunak Roy, Malissa Takahashi, Ian Gibbons, Edmond Ku, Thanh Dang, Tammy Burd, Adam Vollmer, Elizabeth A. Holmes
  • Patent number: 8133528
    Abstract: An electron gun evaporation apparatus capable of efficiently using an evaporation source includes an electron beam position controller which determines, as an applicable range, a range within which the distribution of the film thickness growth rate is almost constant in each scanning direction of an electron beam to be applied to an evaporation source in a crucible for the irradiation position of the electron beam, on the basis of information pertaining to the electron beam irradiation position and the film thickness growth rate in the electron beam irradiation position.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: March 13, 2012
    Assignee: Canon Anelva Corporation
    Inventor: Masato Nakayama
  • Patent number: 8101424
    Abstract: The present invention relates to detecting and/or measuring scattering effects due to the aggregating metallic nanostructures or the interaction of plasmonic emissions from approaching metallic nanoparticles. The scattering effects may be measured at different angles, different wavelengths, changes in absorption and/or changes in polarization relative to changes in the distances between nanoparticles.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: January 24, 2012
    Assignee: University of Maryland, Baltimore County
    Inventor: Chris D. Geddes
  • Patent number: 8091505
    Abstract: In a method for testing a negative electrode of a secondary battery, light is irradiate to an active material layer formed on a current collector having a plurality of projections at least on one side thereof, the active material layer including first columnar bodies of active material grown obliquely from the projections. The angle is measured between the reflected light from the active material layer and a normal line parallel to the thickness direction of the current collector.
    Type: Grant
    Filed: February 1, 2008
    Date of Patent: January 10, 2012
    Assignee: Panasonic Corporation
    Inventors: Hideharu Takezawa, Shinya Fujimura, Sadayuki Okazaki, Kazuyoshi Honda
  • Patent number: 8088434
    Abstract: A method is disclosed for producing graphenic materials by templated growth along a preformed graphenic material lattice edge, wherein at least one of the graphenic material or template is translated during growth of the graphenic material. A method for preparing CNTs from preformed CNT substrates in the presence of cylindrical templating structures and a reactive carbon source in a fluid phase is also disclosed, wherein at least one of the CNT substrate or the cylindrical templating structure is translated during addition of carbon atoms to the CNT substrate. A method is also disclosed for preparing CNTs from preformed CNT substrates in the presence of cylindrical templating structures and a carbon source in a fluid phase, wherein non-thermalized excited states are produced on the CNT substrate and at least one of the CNT substrate or the cylindrical templating structure is translated during addition of carbon atoms to the CNT substrate.
    Type: Grant
    Filed: June 9, 2008
    Date of Patent: January 3, 2012
    Assignee: CXnanophysics, LLC
    Inventor: Nolan Nicholas
  • Patent number: 8075942
    Abstract: Disclosed are methods for producing optical filters on a substrate. In particular, methods for producing microengineered optical filters for the ultraviolet/visible/infrared portions of the electromagnetic spectrum are disclosed, as well as a computer-based system and method for precisely matching predefined target transmission spectra using various coating materials whose spectra can be combined and weighted for the matching. In addition, methods for producing printed optical filters comprising multiple coating components to produce composite optical filters whose transmission spectra match predefined target filter spectrum specifications are disclosed, where the thickness and fill factor of each component coating is tailored, based on the weighting of each component coating transmission spectrum.
    Type: Grant
    Filed: March 17, 2009
    Date of Patent: December 13, 2011
    Assignee: Nanoport Technologies
    Inventors: Andrew Julius Muray, Kathleen Muray
  • Publication number: 20110300290
    Abstract: There are provided a device for fabricating an electrode by a roll-to-roll process and a method for fabricating an electrode. The device for fabricating an electrode includes an unwinding roll and a winding roll travelling an electrode material; a film forming roll disposed between the unwinding roll and the winding roll allowing the electrode material to travel along a cylindrical surface of the film forming roll and having a cooling unit cooling the electrode material; and an evaporation unit receiving a lithium source and mounted for the received lithium source to form a thin film in the electrode material positioned on the film forming roll. Thereby, the lithium is deposited in a vacuum atmosphere such that the process is simple and the deposition rate and the deposition uniformity of lithium can be improved.
    Type: Application
    Filed: November 3, 2010
    Publication date: December 8, 2011
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Hak Kwan Kim, Dong Hyeok Choi, Hong Seok Min, Hyun Chul Jung, Bae Kyun Kim
  • Patent number: 8034723
    Abstract: A film deposition apparatus for depositing a film on a substrate by performing a cycle of alternately supplying at least two kinds of reaction gases that react with each other on the substrate to produce a layer of a reaction product in a vacuum chamber is disclosed. The film deposition apparatus includes a ring-shaped locking member that may be provided in or around a wafer receiving portion of a turntable in which the substrate is placed, in order to keep the substrate in the substrate receiving portion.
    Type: Grant
    Filed: December 21, 2010
    Date of Patent: October 11, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Yukio Ohizumi, Manabu Honma
  • Patent number: 8030088
    Abstract: A sample collection apparatus which measures biological samples and can be used to provide the early detection of respiratory diseases, for example tuberculosis induced by the pathogen mycobacterium tuberculosis. The sample collection apparatus has a sample collection unit and a corresponding complementary reader unit. The collection unit collects a sample exhaled from the user through a collection vessel with an optical interrogation region. The sample is spread on the inside of the vessel over the interrogation region and subsequently analyzed. The test results are displayed via the reader unit.
    Type: Grant
    Filed: December 6, 2007
    Date of Patent: October 4, 2011
    Assignee: Rapid Biosensor Systems Limited
    Inventors: Elaine Marie McCash, Nicol John Murray
  • Publication number: 20110222144
    Abstract: A method for producing a multilayer coating (17) for reflecting radiation in the soft X-ray or EUV wavelength range on an optical element (8, 9) which is operated at an operating temperature (TOP) of 30° or more, preferably of 100° C. or more, particularly preferably of 150° C. or more, in particular of 250° C. or more, comprising: determining an optical design for the multilayer coating (17) which defines an optical desired layer thickness (nOP dOP) of the layers (17.1, 17.2) of the multilayer coating (17) at the operating temperature (TOP), and applying the layers (17.1, 17.2) of the multilayer coating (17) with an optical actual layer thickness (nB dB) chosen in such a way that a layer thickness change (nOP dOP?nB dB) caused by thermal expansion of the layers (17.1, 17.2) between the coating temperature (TB) and the operating temperature (TOP) is compensated for.
    Type: Application
    Filed: December 10, 2010
    Publication date: September 15, 2011
    Applicant: CARL ZEISS SMT Gmbh
    Inventors: Hartmut ENKISCH, Stephan MUELLENDER, Martin ENDRES
  • Publication number: 20110212256
    Abstract: An vapor deposition control system includes a multi-level control scheme.
    Type: Application
    Filed: February 11, 2011
    Publication date: September 1, 2011
    Applicant: First Solar, Inc.
    Inventors: Markus E. Beck, Ming L. Yu, Erel Milshtein, Ashish Bodke, Ulrich A. Bonne, Raffi Garabedian
  • Patent number: 8008068
    Abstract: A nonhemolytic sensor for determination of analytes in erythrocyte-containing biological fluids is disclosed that comprises an optical material having a deposit on a surface thereof, where this deposit includes an analyte-reactive reagent and a particulate means for suppressing hemolysis of erythrocytes in an erythrocyte-containing biological fluid, such as whole blood. Thus, a porous array of negatively charged particles, e.g., polymeric beads having a plurality of carboxylate surface groups, are disposed on a sampling surface of an optical sensor, and suppress hemolysis of erythrocytes coming into contact with the sampling surface. In the case of an optical sensor, such particles can simultaneously enhance reflectance of a light beam transmitted through the optical material to the sampling surface site.
    Type: Grant
    Filed: May 13, 2008
    Date of Patent: August 30, 2011
    Assignee: Light Pointe Medical, Inc.
    Inventor: Hiroshi Nomura
  • Publication number: 20110206830
    Abstract: A reverse interferometric method for the determination of the thickness of a layer of material employs a multi-wavelength light source which generates a light beam which comprises a time-variant series of different monochromatic wavelengths. The beam is reflected from the body of material being measured and is detected by a broad spectrum wavelength detector which produces a signal comprising a series of data points indicating the reflectivity of the sample as a function of the time-variant series of monochromatic wavelengths. A signal processor processes these data points to fit them to a model waveform, and the frequency of the model waveform is used to calculate the thickness of the body of material. Further disclosed are apparatus for carrying out the method and use of the method in a continuous process for the fabrication of thin film materials.
    Type: Application
    Filed: February 19, 2010
    Publication date: August 25, 2011
    Applicant: United Solar Ovonic LLC
    Inventors: Arun Kumar, William Thomas Sommerville
  • Publication number: 20110189380
    Abstract: A device for manufacturing a display device includes a deposition source; a deposition thickness calculator for calculating a deposition thickness of a deposition material deposited on a substrate; and a controller for controlling a power of a heater which heats the deposition source by comparing the deposition thickness calculated with a reference thickness. The controller controls the power of the heater either at least one time for each substrate on which the thin film is to be deposited or at regular intervals while the deposition material is deposited. Influence of measurement noise that is included in a quartz crystal sensor for measuring a deposition speed may be minimized, and distribution of deposition thickness of an organic light emitting material may be reduced, thereby increasing the yield of the deposition process and producing quality display devices.
    Type: Application
    Filed: October 1, 2010
    Publication date: August 4, 2011
    Applicant: SAMSUNG MOBILE DISPLAY CO., LTD.
    Inventors: Won-Hyouk Jang, Eu-Gene Kang, Joo-Hwa Lee, Min-Jeong Hwang
  • Publication number: 20110148279
    Abstract: A white LED phosphor film is provided. The white LED phosphor film includes a transparent phosphor carrier, and an LED phosphor layer. The LED phosphor layer is manufactured on the phosphor carrier by screen printing process. A method of manufacturing the white LED phosphor film is also provided.
    Type: Application
    Filed: November 9, 2010
    Publication date: June 23, 2011
    Inventors: Bingqian Li, Hongcun Peng, Weiguo Wang
  • Publication number: 20110151107
    Abstract: A method for real-timely monitoring thickness change of a coating film is disclosed. In the method, a coating module having a chamber and a film thickness-monitoring module containing an SPR optical fiber sensor, a light source, a light-receiving detector, and optical fibers are first provided. The optical fibers are used to connect the SPR optical fiber sensor with the light source and the light-receiving detector. The SPR optical fiber sensor has a sensing area and is arranged in the chamber. The light source provides the SPR optical fiber sensor with light. Then, a substrate is put into the chamber. While coating process is performed on the substrate, a film is also formed on the sensing area of the SPR optical fiber sensor. The light-receiving detector receives signals output from the sensing area of the SPR optical fiber sensor and then outputs signals of light-intensity change.
    Type: Application
    Filed: April 22, 2010
    Publication date: June 23, 2011
    Applicant: Forward Electronics Co., Ltd.
    Inventors: Yu-Chia Tsao, Chung-Pei Lee, Ko-Shao Chen, Jia-Huey Tsao, Chun-Chih Lin, Ren-Kun Liang
  • Patent number: 7927651
    Abstract: There is provided a biosensor capable of increasing a detecting sensitivity of a target substance of glutamate, by using a nano wire having excellent electrical characteristics and by immobilizing a receptor of glutamate to be detected on a substrate which is disposed between a nano wire and another nano wire and a method for manufacturing the same. The biosensor for detecting glutamate according to the present invention can be manufactured with an arrangement in which the nano wire is selectively arranged on a solid substrate in a matrix. Since this biosensor can prevent the degradation of the nano wire in the electrical characteristic, it can sensitively detect glutamate even through a small amount thereof is contained in a food so that it can be effectively used in detecting the food additive existing in the processed foodstuffs.
    Type: Grant
    Filed: April 4, 2007
    Date of Patent: April 19, 2011
    Assignees: Seoul National University Industry Foundation, Mitech Corporation
    Inventors: Seung-Hun Hong, Byung-Yang Lee, Dong-Joon Lee
  • Patent number: 7901945
    Abstract: A system and method for recognition of images may include the use of alignment markers. The image recognized may be a pattern from an array, a character, a number, a shape, and/or irregular shapes. The pattern may be formed by elements in an array such as an identification marking and/or a sensor array. More particularly, the system and method relate to discriminating between images by accounting for the orientation of the image. The size and/or location of alignment markers may provide information about the orientation of an image. Information about the orientation of an image may reduce false recognitions. The system and method of image recognition may be used with identification markings, biosensors, micro-fluidic arrays, and/or optical character recognition systems.
    Type: Grant
    Filed: July 16, 2008
    Date of Patent: March 8, 2011
    Assignee: Board of Regents the University of Texas System
    Inventors: Jason E. Meiring, Timothy B. Michaelson, C. Grant Willson