Abstract: A method is provided for the determination a thickness error in a previously deposited layer using the reflection monitor signal of the currently-depositing layer. This thickness error is then used to compute corrections to the thickness of the currently-depositing layer and the next layer which corrects for the thickness error in the previous layer. The method is stable with respect to noise in the optical monitor signal. The technique is applicable for optical coating designs which are not necessarily quarter wave. The approach avoids the buildup of thickness errors from layer to layer and thus is applicable for very thick designs with many layers. Near the end of a currently depositing layer the monitor signal is used to fit the admittance of the base stack under the current layer. This establishes the parameters in an exact reflectance model used for the rate or thickness monitoring of the current layer.

Abstract: Thin film processing systems and methods are provided having a moving deposition sensor capable of translation and/or rotation in a manner that exposes the sensor to thin film deposition environments in a flux region substantially the same as the deposition environments experienced by one or more moveable substrates during a selected deposition period. In one embodiment, a thin film monitoring and control system is provided wherein one or more moveable substrates and a moveable deposition sensor are moved along substantially coincident trajectories in a flux region of a thin film deposition system for a selected deposition period. Systems and methods of the present invention may include SC-cut quartz crystal microbalance sensors capable of excitation of at least two different resonant modes.

Abstract: A zinc or zinc alloy plated steel sheet expressing a performance provided with both corrosion resistance and surface conductivity is provided. The zinc or zinc alloy plated steel sheet of the present invention is a zinc or zinc alloy plated steel sheet having an arithmetic average roughness Ra of a zinc-plated layer surface defined by JIS B 0601, obtained by a stylus-type surface roughness meter defined by JIS B 0651, of 0.3 ?m to 2.0 ?m and a maximum peak height Rp of 4.0 ?m to 20.0 ?m, wherein the arithmetic average roughness Ra (peak) obtained by measuring a range of evaluation length of 20 ?m of peak parts of 80% or more of the Rp by an electron beam 3D roughness analyzer is 70% or more of the arithmetic average roughness Ra (average) obtained by measuring a range of evaluation length of 20 ?m of parts of a height of ±20% about an average line, obtained by a stylus-type surface roughness meter, by an electron beam 3D roughness analyzer.

Abstract: In a previous experiment of a deposition work of depositing a film with a uniform thickness on a long strip base material in the longitudinal direction thereof, an elapsed time from the start of the deposition work and an output of a power supply at the elapsed time are measured. The resulting relation between the elapsed time and the output is stored in a storage device. Subsequent deposition on a long strip base material is performed by a method in which first, the output of the power supply is controlled to be stabilized at a desired value using a crystal oscillator thickness gauge in a pre-heating step before the start of the deposition work, and then, a base material transport device is driven to start the deposition work on the long strip base material after a desired deposition rate is obtained. After the start of the deposition work, the output of the power supply is controlled to coincide with the output at the elapsed time stored in the storage device.

Abstract: A method of evaluating a coating applied to a surface comprises the step of applying the coating to the surface. The coating including a conversion gel to chemically bind the surface and an indicator substantially uniformly distributed throughout the coating wherein the indicator modifies an appearance of the coating. The method further comprising the step of determining whether the indicator is present on the surface at a substantially uniform concentration.

Abstract: A method of coating metal wire with extrudate using an extrusion system. The method includes the steps of advancing the metal wire through an extrusion die of the extrusion system and extruding molten extrudate over the metal wire as the metal wire is advanced through the extrusion die. Image data is generated, using one or several electronic cameras, concurrently with the advancing, and extruding to provide visual feedback indicative of the concentricity or non-concentricity of extrudate surrounding the metal wire as the metal wire exits the extrusion die.

Abstract: A method of coating by supplying a liquid material from a nozzle tip to form a film on a substrate surface facing to the nozzle, having the steps of: preparing a translation mechanism, which is capable of moving the nozzle in an in-plane direction and in a thickness direction of the substrate; making the nozzle to come gradually closer to the substrate, after positioning of the nozzle on the in-plane of the substrate, by using the translation mechanism; detecting electric current flowing through the nozzle from the substrate surface, when a semiconductor droplet supplied from the nozzle tip contacts with an electrode installed at the substrate surface; stopping accession of the nozzle to the substrate, when the electric current exceeds threshold value set in advance; and making the nozzle tip apart from the substrate farther than in the stopping, so as to coat the substrate with the liquid material.

Abstract: A disclosed film deposition apparatus includes a transparent window in a ceiling plate of a vacuum chamber. A film thickness of a film deposited on a substrate is measured by emitting light to the substrate through the transparent window by a film thickness measurement system that includes optical units arranged on or above the transparent window, optical fiber cables connected to the corresponding optical units, a measurement unit to which the optical fiber cables are connected, and a control unit electrically connected to the measurement unit in order to control the measurement unit.

Abstract: A method for producing a multi-layer photonic structure having at least one group of alternating layers of high index material and low index material may include, determining a characteristic property function for the multi-layer photonic structure, determining a thickness multiplier for the at least one group of alternating layers based on a comparison of the characteristic property function to a target profile, adjusting the characteristic property function with the determined thickness multiplier, and comparing an adjusted characteristic property function to the target profile, wherein, when the adjusted characteristic property function does not approximate the target profile, at least one additional group of layers is added to the multi-layer photonic structure.

Abstract: A method for inspecting golf balls is disclosed. The method comprises the steps of providing at least one sensor capable of obtaining images of the infrared radiation emitted from the ball, obtaining at least one image of the ball using the sensor after paint or a coating has been applied to the surface of the ball, and determining whether the liquid was applied evenly on the surface of the ball. Preferably, the image is obtained during the transient period when the solvent in the paint or coating is evaporating. A number of numerical analysis can be used to determine the evenness of the paint or coating.

Abstract: A method for inspecting golf balls is disclosed. An imager such as a camera captures a spectral image of the golf ball. The spectral image is captured line-by-line as the golf ball rotates. The lines are then packed together to form a three-dimensional spectral image of the golf ball showing full spectral information for every pixel. The resultant three-dimensional spectral image is then analyzed, such as using a pattern matching or threshold analysis tool. If a golf ball passes the inspection, it is permitted to advance in the processing. If the golf ball does not pass the inspection, it may be diverted. This inspection system is capable of detecting very subtle color differences, so the system is particularly applicable for use in inspecting primer coat coverage.

Abstract: An extrusion and inspection apparatus is provided. Specifically, the apparatus includes a generally horizontal surface adapted to support a substrate and a coating die that extrudes fluid onto the substrate. A shuttle having a bridge with the coating die mounted thereon moves the coating die generally parallel to the substrate. In addition to lateral motion parallel to the substrate, the apparatus includes a gauging member that positions the die to at least one predetermined position above the substrate. A light source secured to the bridge is also employed to illuminate the substrate before and/or after coating. The apparatus also includes an imager secured to the bridge where the imager obtains images of the substrate during illumination.

Abstract: A method and apparatus for controlling the thickness of a thin film or thin layer of discrete particles or of a heterogeneous mixture characterized in that the interfacial tension forces between the solution or suspension and its environment are used as the driving forces to evenly spread the solution, suspension or mixture while the solvent evaporates and/or dilutes.

Abstract: A method and apparatus for controlling coating material deposition on to a medical device. Images of material drops in flight are captured and an average single drop volume value is calculated by conversion of the captured drop images to a volume measurement. The average single drop volume value is used to calculate a total number of drops necessary to apply a desired amount of coating. Alternately, material is applied and the amount of material deposited is accumulated and adjustments are made to deposit only a desired amount of coating material. A drop volume is determined for either every drop or a sampling of drops as the drops are being applied. Adjustments to the coating process include changing drop size and changing a number of drops to be deposited.

Abstract: A method of calculating a thickness of a layer may include forming the layer on a substrate in a chamber, measuring optical emission spectrum data from the chamber, and calculating the thickness of the layer from the optical emission spectrum data. A method of forming a layer may include depositing the layer on a substrate in a chamber, measuring optical emission spectrum data from the chamber, calculating a thickness of the layer using the optical emission spectrum data, and ending the depositing of the layer when the calculated thickness of the layer is within a target thickness range.

Abstract: A wall film monitoring system includes first and second microwave mirrors in a plasma processing chamber each having a concave surface. The concave surface of the second mirror is oriented opposite the concave surface of the first mirror. A power source is coupled to the first mirror and configured to produce a microwave signal. A detector is coupled to at least one of the first mirror and the second mirror and configured to measure a vacuum resonance voltage of the microwave signal. A control system is connected to the detector that compares a first measured voltage and a second measured voltage and determines whether the second voltage exceeds a threshold value. A method of monitoring wall film in a plasma chamber includes loading a wafer in the chamber, setting a frequency of a microwave signal output to a resonance frequency, and measuring a first vacuum resonance voltage of the microwave signal.

Abstract: Light is irradiated onto a glass substrate of an organic EL element, and the characteristics of an organic film are analyzed. In the sample analyzing apparatus, in such a way that the glass substrate is located on the upper side, the organic EL element is placed on a stage. The light is irradiated towards the glass substrate, and an amplitude ratio and a phase difference which are related to the organic EL element are measured. Also, the sample analyzing apparatus selects a model of a structure corresponding to reflected lights K1 to K3 of the irradiated light and calculates the amplitude ratio and the phase difference. The sample analyzing apparatus compares the measured result and the result calculated from the model, and properly executes the fitting, and determines the best model among the several models and then analyzes the characteristics related to the organic EL element.

Abstract: A phosphor layer forming apparatus (1) in which a paste (21) containing a phosphor is discharged so as to cover each of a plurality of light-emitting elements (11) mounted on a substrate (10) includes the following: a discharge portion (12) for discharging the paste (21) in the form of droplets onto each of the light-emitting elements (11); a measurement portion (13) for measuring the thickness of individual phosphor layers that are formed of the paste (21) covering each of the light-emitting elements (11); and a discharge control portion (14) for controlling the amount of the paste (21) to be redischarged for each phosphor layer in accordance with the thickness of the individual phosphor layers measured by the measurement portion (13). This phosphor layer forming apparatus can reduce the manufacturing time.

Abstract: The invention provides sensor, preferably biosensor devices and method of fabrication. The devices have significant advantages over the prior art methods having compatibility with future trends in clinical diagnostics and chemical detection. The underlying principle involves the integration of nanometer diameter, micron long metal or semiconductor rods onto a substrate to form a suspended nanomechanical cantilevers. The cantilever rods are rigidly attached to the substrate on one or both ends, and resonate at a characteristic frequency depending on the diameter, length, and stiffness of the rod. The metal or semiconductor rods are integrated onto the substrate using electrofluidic or fluidic assembly techniques. A receptor coating is placed on the metal or semiconductor rods prior to or following rod alignment using self-assembly chemistries.

Abstract: A system and method for recognition of images may include the use of alignment markers. The image recognized may be a pattern from an array, a character, a number, a shape, and/or irregular shapes. The pattern may be formed by elements in an array such as an identification marking and/or a sensor array. More particularly, the system and method relate to discriminating between images by accounting for the orientation of the image. The size and/or location of alignment markers may provide information about the orientation of an image. Information about the orientation of an image may reduce false recognitions. The system and method of image recognition may be used with identification markings, biosensors, micro-fluidic arrays, and/or optical character recognition systems.

Abstract: The invention relates to an object, in particular a security element for security papers, bank notes, identity card or the like, as well as a security paper and a document of value with such a security element. Furthermore, the invention relates to a method for producing the object, in particular the security element or the security paper and the document of value with such a security element. The method in particular serves for manufacturing a precious-metal-coloured, preferably gold-coloured coating on a substrate.

Abstract: An apparatus and method for simultaneously coating and measuring a part including a part support, a sprayer, a part measurer including a digital camera and a display device, all of which are positioned adjacent to the part support. The sprayer applies a coating to a section of the part while the part measurer continuously measures at least two dimensions of the section. The digital camera takes at least one picture of the entire section of the part while the part is being coated and enables a user to accurately determine the cross section of the part to the optimum finished part configuration and size and also detect defects, blemishes or coating irregularities formed on the section. The apparatus and method of the present invention significantly reduces the margin of error related to the application of coatings to parts, the number of defective parts and increases the overall efficiency.

Abstract: A method is provided for the determination of the time to terminate the deposition of an optical thin film using an exact model for the reflectance. This model is used to fit the reflectance measurements to determine the deposition rate, from which the time to deposit the entire layer is determined, as well as finding the admittance of the base stack at the beginning of the current layer. The layer deposition is terminated at the calculated time resulting in precise thickness control. This ability to fit the base admittance enables the determination of the reflection model parameters for each layer being deposited so that the accuracy of each layer is independent of previously deposited layers. This means that there is no build up of errors from layer to layer as the deposition progresses, enabling the deposition of coating designs with higher precision, including non periodic and non quarter wave designs.

Abstract: The method of the present invention generates a regularly lined electric field inside a container 1 retaining a sample formed by dispersing particle groups in a liquid by a voltage being applied to an electrode pair 2 provided in the container 1, generates a diffraction grating by a density distribution of the particle groups in the sample inside the container 1, and when acquiring a diffusion coefficient of particles from a temporal variation of intensity in a disappearing process of a diffracted light obtained by irradiating a beam of light to the diffraction grating generated by the density distribution of the particle groups, performs a particle size analysis of the particle groups by using an approximate analysis expression of a diffracted light attenuation, I(t)=?exp[?2q2Dt] which uses q=2?/? defined by a particle concentration modulation period ? in the density distribution diffraction grating of the particle groups, and the Einstein-Stokes relation.

Abstract: A method of producing a finish for a paper substrate, wherein the finish provides the paper substrate with a color that matches the color of a target object. In accordance with the method, calculations are performed to determine the quantities of at least one group of colorants required to produce a semitransparent wood stain from a vehicle, wherein when the semitransparent wood stain is applied to the paper substrate, the paper substrate will have a color that matches the target object. The calculations are performed using reflectance measurements of the target object obtained using a spectrophotometer and previously obtained spectral data of the colorants as applied to a paper substrate. The colorants used to form the transparent or semitransparent wood stain do not include a white colorant or black-and-white masstone.

Abstract: Evaluation methods that employ the near infrared spectrum have generally had a low specificity and in particular have encountered difficulty in the evaluation of trace components, and the accurate measurement of coating quantity by methods using the near infrared spectrum has been quite problematic. The quantity of coating applied to a coating target, such as granules or uncoated tablets, is measured based on the absorption or scattering of light in the 800 to 1100 nm wavelength region by an additive coated on the coating target. The use of polyethylene glycol or a long-chain hydrocarbyl-containing compound as the additive is preferred.

Abstract: The invention involves methods, assays, and components for the detection and analysis of binding between biological or chemical species, and can specifically be used for drug discovery. In an example where drug discovery is carried out, different candidate drugs can be attached to different articles such as magnetic beads. The beads can be exposed to colloid particles carrying signaling entities, or other signaling entities, immobilized with respect to protein targets of the drug candidates. After incubation, all beads are drawn to separate surface locations magnetically. Beads are released from surface locations where it is determined that signaling entities do not exist, and are removed from the assay. Beads held at other surface locations then are released, re-distributed, and re-attracted to surface locations. This is repeated with appropriate wash steps, until individual drug candidates can be isolated and identified.

Abstract: The invention concerns an optical monitoring system for the measurement of layer thicknesses of thin coatings applied in a vacuum, particularly on moving substrates, during the coating process, in which the light intensity of the light of a light source injected into a reference light guide and released by a first piezoelectric or electrostrictive or magnetostrictive light chopper is registered by a light detector unit in a reference phase, the light of the light source in a measuring phase is injected into a first measuring light guide and the light released by a second piezoelectric or electrostrictive or magnetostrictive light chopper is directed to the substrate, and the light intensity of the light reflected or transmitted from the substrate is registered by the light detector unit through a second measuring light guide, and a remaining light intensity is registered by the light detector unit in at least one dark phase, wherein the reference phase, the measuring phase, and the dark phase are shifted in t

Abstract: Defects and/or particles during an imprint lithography process may provide exclusion zones and/or transition zones in the patterned layer. Exclusion zones and/or transition zones in the patterned layer may be identified to provide a region of interest on a template.

Abstract: A strip coating system includes a first pulley carrying a flexible metal or Al substrate wound up on the first pulley. A second, take-up, pulley is provided for taking up the coated substrate. The coating process is a continuous coating process, during which the first pulley and the second pulley are rotated to move the substrate continuously past a coating tool for depositing coating particles on a surface of the substrate. After having passed the coating section with a speed v, the substrate carrying a coating layer on the surface thereof passes an infrared spectroscopic measurement device for measuring the layer thickness of the coating layer. Feedback controls are provided to control one or more process parameters of the coating tool responsive to the measurement of the thickness of the coating layer detected by the measurement tool. Thus, an in situ online measurement of the thickness of the coating layer may be implemented.

Abstract: A method for inspecting golf balls is disclosed. An imager such as a camera captures a digital image of the golf ball. The golf ball image is separated into regions, and a brightness level is determined for each region using a histogram tool. The brightness level of the region is compared with a reference level. If the brightness level of the region is significantly different from the reference level, then the golf ball is diverted. The regions are located from image to image using pattern matching and/or edge finding tools. The environmental light conditions are altered to facilitate the pattern matching and edge finding.

Abstract: A manufacturing method of optical goods, including: injecting a material composition stored in a tank into a cavity provided inside a mold; and polymerizing and curing the injected material composition, in which a viscosity of the material composition stored in the tank is measured.

Abstract: Disclosed herein is a substrate comprising a first surface having fuser oil thereon, a portion of the first surface including a coating comprising a tracer material and a fuser oil-mitigating wax, the quantity of tracer material being indicative of the quantity of coating on the substrate. A printing system comprising a printer, a coater configured to deposit a coating comprising a wax and a tracer material on a portion of a substrate to mitigate fuser oil, a tracer exciter configured to excite the tracer material, and a tracer detector configured to detect the electromagnetic radiation emitted from the tracer material is also disclosed, along with a corresponding method.

Abstract: A method is disclosed for producing graphenic materials by templated growth along a preformed graphenic material lattice edge, wherein at least one of the graphenic material or template is translated during growth of the graphenic material. A method for preparing CNTs from preformed CNT substrates in the presence of cylindrical templating structures and a reactive carbon source in a fluid phase is also disclosed, wherein at least one of the CNT substrate or the cylindrical templating structure is translated during addition of carbon atoms to the CNT substrate. A method is also disclosed for preparing CNTs from preformed CNT substrates in the presence of cylindrical templating structures and a carbon source in a fluid phase, wherein non-thermalized excited states are produced on the CNT substrate and at least one of the CNT substrate or the cylindrical templating structure is translated during addition of carbon atoms to the CNT substrate.

Abstract: A method of measuring a coating deposits a layer of coating on an object. A laser beam is projected on the layer of the coating. A reflection of the project laser beam is received by the laser sensor. From this information, the thickness of the layer of the coating on the object is determined. A value related to the thickness of the layer of the coating may then be compared to a desired value.

Abstract: A film-forming method includes: a) discharging a liquid including a film material on an object so as to form a liquid film made of the liquid; b) measuring distribution of an optical constant related to a film thickness of a thin film by irradiating the liquid film with light from a first light source so as to detect light from the liquid film; and c) modulating light from a second light source corresponding to the optical constant of the liquid film based on converting data indicating a relation between the optical constant and light wave information of the light from the second light source while irradiating the liquid film with the light from the second light source so as to dry the liquid film to form the thin film on the object.

Abstract: A film-forming method includes: a) discharging a liquid including a film material on an object so as to form a liquid film made of the liquid; b) irradiating the liquid film with light and thus detecting light from the liquid film so as to measure distribution of an optical constant, which is related to a film thickness of a thin film, with respect to the liquid film; and c) drying the liquid film on the object so as to form the thin film by converting the distribution of the optical constant into distribution of a temperature of the liquid film based on converting information that relates the optical constant of the liquid film to the temperature of the liquid film and thus forming the distribution of the temperature on the liquid film.

Abstract: A base material processing apparatus comprises a device for irradiating light from a light transmissive film side to a base material during film formation on a surface of the base material or film processing of the film formed on the surface of the base material. The apparatus also comprises film physical characteristic measuring device for receiving reflected light coming from the base material during the film formation or the film processing, detecting interference light formed by first reflected light and second reflected light contained in the reflected light, the first reflected light being reflected from a surface of the film, the second reflected light being reflected from an interface between the film and the base material, and measuring a physical characteristic of the film with a peak valley technique.

Abstract: A method of coating a substrate by thermal application of the coating materials using a plasma jet is disclosed. The properties of the plasma jet are determined by controllable process parameters. The coating material and a process gas mixture are injected into the plasma jet where the coating material is partly or completely evaporated depending on the controllable parameters. The phases of the coating material present in vapor and, optionally, condensed form are at least partly deposited on the substrate. A diagnostic measuring method determines the relative proportion of vapor and/or condensed phase for the coating material transported in the plasma jet. The controllable process parameters are set with respect to desired values using such measured data. Regulation of direct manufacture of the coating, particularly a multi-layer coating system, is carried out with respect to these desired values, which correspond to a predetermined vapor or condensed phase proportion.

Abstract: A system and method for uniform deposition of material layers on wafers in a rotating disk chemical vapor deposition reaction system is provided, wherein one or more substrates are rotated on a carrier about an axis while maintaining surfaces of the one or more substrates substantially perpendicular to the axis of rotation and facing in an upstream direction along the axis of rotation. During rotating a first gas is discharged in the downstream direction towards the one or more substrates from a first set of gas inlets. A second gas is discharged in the downstream direction towards the one or more substrates from at least one movable gas injector, and the at least one movable gas inlet is moved with a component of motion in a radial direction towards or away from the axis of rotation.

Abstract: An auxiliary layer is provided over a main surface of a sample, wherein the sample may be a semiconductor substrate. The auxiliary layer may have an essentially plane surface and is transparent or semi-transparent to an inspection radiation with a wave length between, for example, 193 and 800 nm. The sample coated with the auxiliary layer is inspected for defects in the sample via an imaging method that may use coherent radiation. After inspection, the auxiliary layer is removed. Dependent on the defect count, a process of manufacturing integrated circuits may be continued or the sample may be reworked or discarded.

Abstract: A phosphor paste is applied to inner surfaces of a cell. Then, a conveyer moves a substrate relative to a CCD camera at a constant speed. Simultaneously, two LEDs radiate visible light onto a portion, to be inspected, of the substrate. The visible light is light configured to have a wavelength so as to be able to prevent the phosphor of the phosphor paste from being excited and emitting light and reflected by a liquid surface of the phosphor paste to produce reflected light. Thereafter, the CCD camera captures an image of the phosphor paste and a data processor processes the received image data, and determines whether a phosphor layer formed by drying the phosphor paste will normally be formed, prior to formation of phosphor layer.

Abstract: A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.

Abstract: A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.

Abstract: A method for manufacturing a plasma display comprises: a phosphor painting process for painting phosphor layer in ribs formed on a back plate; and a phosphor inspection process that includes the steps of: irradiating the phosphor layer with ultraviolet light; preparing an imaging system so that the imaging system images the emitted light beam to acquire information on brightness; comparing the brightness information with correlation between a shape model of the phosphor layer and brightness signal information that have been obtained in advance; and obtaining a painted state of the phosphor layer painted in the ribs; and a process for feeding back the applied state of the phosphor layer, which has been obtained in the phosphor inspection process, to the phosphor painting process so that the manufacturing equipment is controlled in the phosphor painting process.

Abstract: Systems and methods for in-situ monitoring of the formation of parasitic particles during the deposition of a III-V nitride film with, e.g., metal-organic chemical vapor deposition (MOCVD) are described. In accordance with certain embodiments, at least one light source capable of generating a light beam at a desired wavelength is positioned relative to a reaction chamber so as to pass a light beam into the reaction chamber. Multiple optical detectors capable of detecting light from the beam are positioned relative to the reaction chamber to monitor desired reaction and growth conditions. More particularly, a first optical detector is positioned so as to detect light reflected from a deposition surface within the reaction chamber so as to monitor growth rate and/or composition of a film during deposition.

Abstract: A printed electronic device and methods for determining the electrical value of the device. A dielectric material is contact printed on a substrate using a preset force. The substrate has a pressure sensitive material that is optically responsive in direct proportion to the amount of force imparted by the contact printing. The force of the contact printing causes the pressure sensitive material to form a pattern that is quantifiable to the amount of force. The pattern is then optically inspected and compared to sets of standards in order to quantify the amount of force that was used in printing. The thickness of the printed dielectric material is then calculated based on the quantified force by comparing to another set of standards. The electrical value of the printed material is calculated based on the calculated thickness of the printed dielectric material, the surface area of the printed dielectric material, and the dielectric constant of the dielectric material.

Abstract: A real-time system adapted to a PVD apparatus for monitoring and controlling film uniformity is described. The system includes a shielding plate, a monitoring device, and a data processing program. The shielding plate is disposed on an inner wall of a reaction chamber above a wafer stage. An opening in the center of the shielding plate exposes the wafer. The monitoring device including a scanner and a sensor respectively disposed on opposite sidewalls of the reaction chamber between the shielding plate and the wafer stage is used for measuring the flux of the particles on every portion of the wafer to acquire real-time uniformity data including a function of the wafer position and the flux. The data processing program compares the real-time uniformity data and reference uniformity data, and a feedback signal is outputted to the PVD apparatus to adjust the process parameter thereof for controlling film uniformity.

Abstract: This invention relates to a method for manufacturing an implantable medical device, having a surface covered with a coating that can include a desired amount of a biologically active material, using an ultraviolet (UV) laser. The invention also pertains to a method for manufacturing an implantable medical device having a surface covered with a coating having more than one layer wherein a desired portion of the top layer is ablated with an ultraviolet (UV) laser. Also, the invention relates to a method for measuring a thickness of a coating applied to an implantable medical device. Furthermore, the invention is directed to a method for manufacturing an implantable medical device having a surface covered with a coating free of webbing or cracking.

Abstract: A method of fabricating semiconductor integrated circuits includes (1) providing a spin-on tool comprising a rotatable platen for holding and spinning a wafer disposed thereon, a fluid supply system for providing spin-on solution onto the wafer, and a detector fixed in a position above the wafer, wherein the wafer has a radius R; (2) spin-on coating the wafer by depositing the spin-on solution onto surface of the wafer from its center and spinning-off to leave a spin coat material layer; and (3) spinning the wafer and scanning the spin coat material layer by impinging an incident light beam emanated from the fixed detector and detecting a reflected light beam.