Utilizing A Coating To Perfect The Dicing Patents (Class 438/114)
-
Patent number: 11688716Abstract: Provided is a semiconductor chip mounting tape. The semiconductor chip mounting tape comprises a tape base film including first and second surfaces opposite to each other; and an adhesive film including a third surface facing the first surface of the tape base film, and a fourth surface opposite to the third surface, wherein the adhesive film includes a plurality of voids therein, and the fourth surface of the adhesive film may be adhered to a semiconductor chip.Type: GrantFiled: February 5, 2021Date of Patent: June 27, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Soo Hwan Lee
-
Patent number: 11652085Abstract: The present disclosure provides a fan-out wafer-level packaging structure and a method for packaging the same. The structure includes: two or more semiconductor chips with a bonding pad, the semiconductor chips are arranged in a fan-out wafer array, and each of the semiconductor chips has an initial position, respectively; a plastic packaging layer, covering surfaces of the semiconductor chips and between the semiconductor chips, each of the semiconductor chips has an offset position, respectively, and the offset position has an offset distance relative to the initial position; a redistribution layer formed on the semiconductor chips, to realize interconnection between the semiconductor chips, the redistribution layer includes at least one first redistribution layer, the first redistribution layer is formed on a surface of the semiconductor chips and is aligned and in contact with the bonding pad of the semiconductor chips; and a metal bump formed on the redistribution layer.Type: GrantFiled: June 1, 2022Date of Patent: May 16, 2023Assignee: SJ SEMICONDUCTOR (JIANGYIN) CORPORATIONInventor: Hailin Zhao
-
Patent number: 11646278Abstract: The present disclosure provides a package structure and a packaging method. The package structure provided by the present disclosure includes: a package base and a redistribution layer disposed on the package base; where the package base includes a plurality of device areas; and a channel set is provided in the device area, where the channel set is used to connect an electronic device, and the redistribution layer is used to lead a subset of to-be-protected channels that needs electrostatic protection in the channel set out to a preset area on the package base, so that all or part of channels in the subset of to-be-protected channels form a series circuit in the preset area, and the series circuit is used to connect with an electrostatic discharge end. The package structure of the present disclosure can provide electrostatic protection for the channel that needs to be protected during a packaging process.Type: GrantFiled: December 28, 2020Date of Patent: May 9, 2023Assignee: Shenzhen Goodix Technology Co., Ltd.Inventors: Hanjian Leng, Baoquan Wu, Wei Long
-
Patent number: 11574857Abstract: A semiconductor package includes a circuit board structure, a redistribution layer structure, a package structure, and a ring structure. The redistribution layer structure has a first region and a second region surrounding the first region. The redistribution layer structure is disposed over and electrically connected to the circuit board structure. A metal density in the second region is greater than a metal density in the first region. The package structure is disposed over the first region of the redistribution layer structure. The package structure is electrically connected to the redistribution layer structure. The ring structure is disposed over the second region of the redistribution layer structure.Type: GrantFiled: March 23, 2020Date of Patent: February 7, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ching-Feng Yang, Hsin-Yu Pan, Kai-Chiang Wu, Chien-Chang Lin
-
Patent number: 11502032Abstract: A chip package including an integrated circuit component, a thermal conductive layer, an insulating encapsulant and a redistribution circuit structure is provided. The integrated circuit component includes an amorphous semiconductor portion located at a back surface thereof. The thermal conductive layer covers the amorphous semiconductor portion of the integrated circuit component, wherein thermal conductivity of the thermal conductive layer is greater than or substantially equal to 10 W/mK. The insulating encapsulant laterally encapsulates the integrated circuit component and the thermal conductive layer. The redistribution circuit structure is disposed on the insulating encapsulant and the integrated circuit component, wherein the redistribution circuit structure is electrically connected to the integrated circuit component.Type: GrantFiled: December 21, 2020Date of Patent: November 15, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Guan-Yu Chen, An-Jhih Su, Der-Chyang Yeh, Li-Hsien Huang, Ming-Shih Yeh
-
Patent number: 11495549Abstract: A packaged electronic device includes a multilayer lead frame with first and second trace levels, a via level, an insulator, a conductive landing pad and a conductive crack arrest structure, the conductive landing pad has a straight profile that extends along a first direction along a side of the multilayer lead frame, the conductive crack arrest structure has a straight profile along the first direction and the conductive crack arrest structure is spaced from the conductive landing pad along an orthogonal second direction.Type: GrantFiled: February 25, 2021Date of Patent: November 8, 2022Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Naweed Anjum, Michael Gerald Amaro, Charles Allen Devries, Jr.
-
Patent number: 11476203Abstract: Stitched die structures, and methods for interconnecting die are described. In an embodiment, a stitched die structure includes a semiconductor substrate that includes a first die area of a first die and a second die area of a second die separate from the first die area. A back-end-of-the-line (BEOL) build-up structure spans over the first die area and the second die area, and includes a first metallic seal directly over a first peripheral area of the first die area, a second metallic seal directly over a second peripheral area of the second die area, and a die-to-die routing extending through the first metallic seal and the second metallic seal to electrically connect the first die to the second die.Type: GrantFiled: March 29, 2021Date of Patent: October 18, 2022Assignee: Apple Inc.Inventors: Sanjay Dabral, Jun Zhai
-
Patent number: 11177005Abstract: A semiconductor memory device includes a plurality of first sub-blocks defined in a first memory chip; and a plurality of second sub-blocks defined in a second memory chip that is stacked on the first memory chip in a stack direction. Each of a plurality of memory blocks includes one of the plurality of first sub-blocks and one of the plurality of second sub-blocks, and wherein an erase voltage is separately applied to the first memory chip and the second memory chip in an erase operation, and the erase operation is performed in a sub-block.Type: GrantFiled: July 10, 2020Date of Patent: November 16, 2021Assignee: SK hynix Inc.Inventor: Sung Lae Oh
-
Patent number: 11107789Abstract: A method for manufacturing a semiconductor device according to the present invention includes at least the following three steps: (A) a step of preparing a first structure (100) including an adhesive laminate film (50) having a heat-resistant resin layer (10), a flexible resin layer (20) and an adhesive resin layer (30) in this order, and a first semiconductor component (60) adhered to the adhesive resin layer (30) and having a first terminal (65); (B) a step of performing solder reflow processing on the first structure (100) in a state where the first semiconductor component (60) is adhered to the adhesive resin layer (30); and (C) a step of, after the step (B), peeling the heat-resistant resin layer (10) from the adhesive laminate film (50).Type: GrantFiled: March 27, 2017Date of Patent: August 31, 2021Assignee: MITSUI CHEMICALS TOHCELLO, INC.Inventor: Eiji Hayashishita
-
Patent number: 11094646Abstract: Warpage and breakage of integrated circuit substrates is reduced by compensating for the stress imposed on the substrate by thin films formed on a surface of the substrate. Particularly advantageous for substrates having a thickness substantially less than about 150 ?m, a stress-tuning layer is formed on a surface of the substrate to substantially offset or balance stress in the substrate which would otherwise cause the substrate to bend. The substrate includes a plurality of bonding pads on a first surface for electrical connection to other component.Type: GrantFiled: April 22, 2019Date of Patent: August 17, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shin-Puu Jeng, Clinton Chao, Szu-Wei Lu
-
Patent number: 11058038Abstract: Electromagnetic shields for sub-modules of electronic modules are disclosed. Electronic modules may include multiple sub-modules arranged on a substrate with an electromagnetic shield arranged to conformally cover the sub-modules as well as portions of the substrate that are uncovered by the sub-modules. Electromagnetic shields are disclosed that are configured to extend between sub-modules to form one or more divider walls. The one or more divider walls may be configured to extend below mounting surfaces of electronic components in the sub-modules to provide improved reduction of electromagnetic interference (EMI) or crosstalk between various sub-modules. Electromagnetic shields are also disclosed that form perimeter sidewalls that extend below mounting surfaces of electronic components of sub-modules to provide improved reduction of EMI from other modules or other external sources.Type: GrantFiled: June 5, 2020Date of Patent: July 6, 2021Assignee: Qorvo US, Inc.Inventors: Kelly M. Lear, Thomas Scott Morris, Jeffrey Miller, Jeffrey Dekosky
-
Patent number: 11031354Abstract: A method includes forming an interposer, which includes a semiconductor substrate, and an interconnect structure over the semiconductor substrate. The method further includes bonding a device die to the interposer, so that a first metal pad in the interposer is bonded to a second metal pad in the device die, and a first surface dielectric layer in the interposer is bonded to a second surface dielectric layer in the device die. The method further includes encapsulating the device die in an encapsulating material, forming conductive features over and electrically coupling to the device die, and removing the semiconductor substrate. A part of the interposer, the device die, and portions of the conductive features in combination form a package.Type: GrantFiled: September 13, 2019Date of Patent: June 8, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Fa Chen, Hsien-Wei Chen, Chih-Chia Hu, Chen-Hua Yu
-
Patent number: 10916436Abstract: Provided is a plasma dicing method. The plasma dicing method includes: performing plasma etching on a first surface of a substrate exposed between a plurality of membrane structures; forming a passivation layer on a semiconductor wafer to cover the plurality of membrane structures and at least one trench; performing plasma etching on a second surface of the substrate such that a through hole exposing a portion of the plurality of membrane structures and a dicing lane connected to the trench and having a width less than a width of the through hole are formed at the substrate; and removing the passivation layer and singulating the semiconductor wafer into a plurality of devices including a membrane partially exposed by the through hole.Type: GrantFiled: November 26, 2019Date of Patent: February 9, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Choongho Rhee, Sungchan Kang, Hyunwook Kang, Cheheung Kim, Yongseop Yoon, Jaehyung Jang, Hyeokki Hong
-
Patent number: 10886315Abstract: The present disclosure provides a photosensitive assembly and formation method thereof, a lens module, and an electronic device. The method for forming the photosensitive assembly includes providing a transparent cover plate; providing a photosensitive chip, including a photosensitive region and a peripheral region surrounding the photosensitive region; bonding the transparent cover plate to the photosensitive chip through a bonding layer, the bonding layer located in the peripheral region of the photosensitive chip, and the transparent cover plate, the bonding layer, and the photosensitive chip enclosing a cavity that accommodates the photosensitive region; and forming a sealing layer to at least cover the sidewall of the bonding layer and the sidewall of the transparent cover plate. According to the present disclosure, a sealing layer is formed on the sidewall of the bonding layer and the sidewall of the transparent cover plate to increase the effect for sealing the cavity.Type: GrantFiled: December 19, 2018Date of Patent: January 5, 2021Assignee: Ningbo Semiconductor International CorporationInventor: Da Chen
-
Patent number: 10879122Abstract: A wafer processing method includes: a wafer providing step of providing a wafer by placing a thermoplastic polymer sheet on an upper surface of a substrate on which the wafer is supported and positioning a back surface of the wafer on an upper surface of the polymer sheet; a sheet thermocompression bonding step of evacuating an enclosing environment in which the wafer is provided through the polymer sheet on the substrate, heating the polymer sheet, and pressing the wafer toward the polymer sheet to pressure-bond the wafer through the polymer sheet to the substrate; and a dividing step of positioning a cutting blade on the front surface of the wafer and cutting the wafer along the division lines to divide the wafer into individual device chips.Type: GrantFiled: July 17, 2019Date of Patent: December 29, 2020Assignee: DISCO CORPORATIONInventors: Shigenori Harada, Takashi Okamura, Jinyan Zhao
-
Patent number: 10868360Abstract: An antenna structure, a manufacturing method thereof, and a communication device are disclosed. The antenna structure includes a first substrate, a second substrate, a dielectric layer, a plurality of first electrodes and a plurality of second electrodes. The dielectric layer is disposed between the first substrate and the second substrate; the plurality of first electrodes are disposed at intervals on a side of the first substrate adjacent to the dielectric layer; the plurality of second electrodes are disposed at intervals on a side of the second substrate adjacent to the dielectric layer; a side of the first substrate facing the second substrate includes a plurality of first recess portions each including a first concaved surface which is dented into the first substrate; the dielectric layer is at least partly disposed in the plurality of first recess portions.Type: GrantFiled: January 8, 2018Date of Patent: December 15, 2020Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Yongchun Lu, Xinyin Wu, Hongfei Cheng, Chunping Long
-
Patent number: 10847400Abstract: Methods for bonding and de-bonding a thin substrate film to a carrier plate are provided herein. In some embodiments, a method of processing a semiconductor substrate includes applying a polymer layer that is non-adhesive to a carrier plate formed of a dielectric material. A second layer is then applied to the polymer layer. One or more redistribution layers are then formed on the second layer. The second layer is then separated from the carrier plate via at least one of magnetic induction heating, infrared exposure, or electrostatic repulsion.Type: GrantFiled: February 26, 2019Date of Patent: November 24, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Sriskantharajah Thirunavukarasu, Arvind Sundarrajan, Karrthik Parathithasan, Qi Jie Peng, Manorajh Arunakiri
-
Patent number: 10825948Abstract: A solar cell comprising an epitaxial sequence of layers of semiconductor material forming a solar cell deposited using an MOCVD reactor; a metal layer disposed on top of the sequence of layers of semiconductor material, the metal layer including a top surface layer composed of gold or silver; a polymer film; depositing a first metallic adhesion layer disposed on the polymer film that has a coefficient of thermal expansion substantially different from that of the top surface layer on one surface of the polymer film; a second metallic adhesion layer deposited over the first metallic adhesion layer and having a different composition from the first metallic adhesion layer and having no chemical elements in common; and the second metallic adhesion layer of the polymer film being permanently bonded to the metal layer of the sequence of layers of semiconductor material by a thermocompressive diffusion bonding technique.Type: GrantFiled: January 3, 2019Date of Patent: November 3, 2020Assignee: SolAero Technologies Corp.Inventors: Michael Riley, Mark Stan, Arthur Cornfeld
-
Patent number: 10707176Abstract: A method of manufacturing a semiconductor package that includes: disposing a semiconductor chip on a support board; sealing the semiconductor chips with a sealant to form a sealed body on the support board, thereby forming sealed semiconductor chips; and forming a rewiring layer and bumps on a side where the semiconductor chip is disposed, after the support board is removed from the sealed body The method also includes an individualizing step of cutting the sealed body along regions corresponding to division lines on the support board, to perform individualization in such a manner that the sealed semiconductor chips each have an upper surface and a lower surface larger than the upper surface, with a side wall inclined from the upper surface toward the lower surface; and a step of forming a conductive shield layer on the upper surfaces and the side walls of the plurality of sealed semiconductor chips.Type: GrantFiled: May 24, 2018Date of Patent: July 7, 2020Assignee: DISCO CORPORATIONInventor: Youngsuk Kim
-
Patent number: 10700014Abstract: A method of manufacturing a semiconductor package includes: bonding a plurality of semiconductor chips to a plurality of mounting regions on a wiring board partitioned by crossing streets; supplying a liquid resin to a front surface side of the wiring board onto which the plurality of semiconductor chips have been bonded, to seal the plurality of semiconductor chips in a collective manner, thereby forming a sealed board; cutting the sealed board along the regions corresponding to the streets, to individualize the sealed chips in such a manner that the sealed chips each have an upper surface and a lower surface larger than the upper surface, with a side surface inclined from the upper surface toward the lower surface; and forming a conductive shield layer on the upper surfaces and the side surfaces of the plurality of sealed chips.Type: GrantFiled: September 29, 2017Date of Patent: June 30, 2020Assignee: DISCO CORPORATIONInventor: Youngsuk Kim
-
Patent number: 10651137Abstract: A method of manufacturing a package structure is provided with the following steps, providing a first die, a second die and a third die; forming a first redistribution layer located on and electrically coupled to the first die, the second die and the third die; and forming an antenna located on and electrically coupled to the first die, the second die and the third die, wherein a distance of an electrical connection path between the first die and the antenna is smaller than or equal to a distance of an electrical connection path between the second die and the antenna and a distance of an electrical connection path between the third die and the antenna.Type: GrantFiled: July 23, 2018Date of Patent: May 12, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chen-Hua Yu, Kuo-Chung Yee
-
Patent number: 10475676Abstract: In a processing method, a surface protective tape peeling step of peeling a surface protective tape off the top surface of a wafer is performed in a state in which an expanding sheet is expanded while a preliminary expanding step of expanding the expanding sheet is performed after an affixing step is performed. Therefore, the surface protective tape can be peeled off the top surface of the wafer while a tension is applied to the expanding sheet. It is thereby possible to prevent chips from coming into contact with each other and being damaged. When an expanding step is thereafter performed, the expanding sheet is expanded by an amount of expansion which amount is a value larger than an amount of expansion of the expanding sheet in the preliminary expanding step. Thus, sufficient intervals can be formed between the chips, and the chips can be transported smoothly.Type: GrantFiled: May 23, 2018Date of Patent: November 12, 2019Assignee: DISCO CORPORATIONInventors: Karl Heinz Priewasser, Akiko Kigawa
-
Patent number: 10410883Abstract: Methods of forming vias in substrates having at least one damage region extending from a first surface etching the at least one damage region of the substrate to form a via in the substrate, wherein the via extends through the thickness T of the substrate while the first surface of the substrate is masked. The mask is removed from the first surface of the substrate after etching and upon removal of the mask the first surface of the substrate has a surface roughness (Rq) of about less than 1.0 nm.Type: GrantFiled: May 31, 2017Date of Patent: September 10, 2019Assignee: Corning IncorporatedInventors: Robert Alan Bellman, Shiwen Liu
-
Patent number: 10373868Abstract: According to various embodiments, a method for processing a substrate may include: processing a plurality of device regions in a substrate separated from each other by dicing regions, each device region including at least one electronic component; wherein processing each device region of the plurality of device regions includes: forming a recess into the substrate in the device region, wherein the recess is defined by recess sidewalls of the substrate, wherein the recess sidewalls are arranged in the device region; forming a contact pad in the recess to electrically connect the at least one electronic component, wherein the contact pad has a greater porosity than the recess sidewalls; and singulating the plurality of device regions from each other by dicing the substrate in the dicing region.Type: GrantFiled: January 18, 2016Date of Patent: August 6, 2019Assignees: INFINEON TECHNOLOGIES AUSTRIA AG, TECHNISCHE UNIVERSITAET GRAZInventors: Martin Mischitz, Markus Heinrici, Michael Roesner, Oliver Hellmund, Caterina Travan, Manfred Schneegans, Peter Irsigler, Friedrich Kroener
-
Patent number: 10242932Abstract: In an embodiment, a semiconductor device includes a semiconductor substrate having a front surface, a LDMOS transistor arranged in the front surface of the substrate and having an intrinsic source, and a through substrate via. A first conductive layer lines sidewalls of the through substrate via and extends from the through substrate via onto the front surface of the semiconductor substrate and is electrically coupled with the intrinsic source.Type: GrantFiled: June 24, 2016Date of Patent: March 26, 2019Assignee: Infineon Technologies AGInventors: Albert Birner, Helmut Brech, Matthias Zigldrum
-
Patent number: 10199253Abstract: A method of manufacturing a semiconductor device includes disposing a peel-off layer on the second surface of the first substrate, wherein the second surface of the first substrate comprises semiconductor integrated circuits, and the peel-off layer does not extend to an outer peripheral portion of the first substrate, bonding a second substrate to the peel-off layer via a bonding layer, attaching a tape onto the first surface of the first substrate, wherein the tape comprises an adhesive agent having an adhesive strength capable of being lowered by UV irradiation, irradiating a portion of the adhesive agent provided at the outer peripheral portion with UV rays directed toward the first surface, and separating the first substrate from the second substrate at the adhesive agent portion and the peel-off layer portion.Type: GrantFiled: March 2, 2015Date of Patent: February 5, 2019Assignee: Toshiba Memory CorporationInventors: Masaya Shima, Kenji Takahashi
-
Patent number: 10141217Abstract: The present invention is to provide a dicing-tape integrated film for the backside of a semiconductor that is capable of suppressing the increase of the peel strength between the dicing tape and the film for the backside of a flip-chip semiconductor due to heating. The dicing-tape integrated film for the backside of a semiconductor has a dicing tape having a substrate and a pressure-sensitive adhesive layer formed on the substrate and a film for the backside of a flip-chip semiconductor formed on the pressure-sensitive adhesive layer of the dicing tape, in which the difference (?2??1) of the surface free energy ?2 and the surface free energy ?1 is 10 mJ/m2 or more, where ?1 represents the surface free energy of the pressure-sensitive adhesive layer and ?2 represents the surface free energy of the film for the backside of a flip-chip semiconductor.Type: GrantFiled: May 13, 2015Date of Patent: November 27, 2018Assignee: NITTO DENKO CORPORATIONInventors: Naohide Takamoto, Hiroyuki Hanazono, Akihiro Fukui
-
Patent number: 10032722Abstract: A package structure has a first die, a second die, the third die, a molding compound, a first redistribution layer, an antenna and conductive elements. The first die, the second die and the third die are molded in a molding compound. The first redistribution layer is disposed on the molding compound and is electrically connected to the first die, the second die and the third die. The antenna is located on the molding compound and electrically connected to the first die, the second die and the third die, wherein a distance of an electrical connection path between the first die and the antenna is smaller than or equal to a distance of an electrical connection path between the second die and the antenna and a distance of an electrical connection path between the third die and the antenna. The conductive elements are connected to the first redistribution layer, wherein the first redistribution layer is located between the conductive elements and the molding compound.Type: GrantFiled: September 1, 2016Date of Patent: July 24, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chen-Hua Yu, Kuo-Chung Yee
-
Patent number: 9991151Abstract: A chip spacing maintaining apparatus for maintaining the spacing between any adjacent ones of a plurality of chips obtained by dividing a workpiece attached to an expand sheet, the expand sheet being supported at its peripheral portion to an annular frame is provided. The chip spacing maintaining apparatus includes a far-infrared radiation applying unit for applying far-infrared radiation toward the expand sheet expanded in a target area between the outer circumference of the workpiece and the inner circumference of the annular frame, thereby shrinking the expand sheet in the target area, and an air layer forming unit provided adjacent to the far-infrared radiation applying unit, the air layer forming unit having a nozzle hole for discharging a gas toward the workpiece in applying the far-infrared radiation from the far-infrared radiation applying unit toward the expand sheet, thereby forming an air layer above the workpiece.Type: GrantFiled: July 1, 2015Date of Patent: June 5, 2018Assignee: DISCO CORPORATIONInventors: Atsushi Hattori, Atsushi Ueki
-
Patent number: 9978701Abstract: A highly reliable semiconductor device capable of heavy current conduction and high temperature operation has a module structure in which a semiconductor chip and a circuit pattern are electrically connected via a wire. A front surface metal film is formed on a front surface electrode of the chip, and the wire is bonded to the front surface metal film by wire bonding. The chip has a front surface electrode on the front surface of an Si substrate or an SiC substrate, and has a rear surface substrate on the rear surface thereof. The front surface metal film is a Ni film or a Ni alloy film of having a thickness ranging from 3 ?m to 7 ?m. The wire is an Al wire having an increased recrystallizing temperature and improved strength due to controlling the crystal grain sizes before wire bonding to a range of 1 ?m to 20 ?m.Type: GrantFiled: September 3, 2015Date of Patent: May 22, 2018Assignee: FUJI ELECTRIC CO., LTD.Inventors: Takashi Saito, Fumihiko Momose, Kazumasa Kido, Yoshitaka Nishimura
-
Patent number: 9929102Abstract: A fan-out semiconductor package includes: a first interconnection member having a through-hole; a semiconductor chip disposed in the through-hole and having an active surface having connection pads disposed thereon and an inactive surface opposing the active surface; an encapsulant filling at least portions of spaces between walls of the through-hole and side surfaces of the semiconductor chip; and a second interconnection member disposed on the active surface of the semiconductor chip and including a redistribution layer electrically connected to the connection pads of the semiconductor chip through vias, wherein the side surface of the semiconductor chip has a step portion.Type: GrantFiled: March 8, 2017Date of Patent: March 27, 2018Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Sang Jin Lee, Dong Hun Lee
-
Patent number: 9911683Abstract: The film for back surface of flip-chip semiconductor according to the present invention is a film for back surface of flip-chip semiconductor to be formed on a back surface of a semiconductor element having been flip-chip connected onto an adherend, wherein a tensile storage elastic modulus at 23° C. after thermal curing is 10 GPa or more and not more than 50 GPa. According to the film for back surface of flip-chip semiconductor of the present invention, since it is formed on the back surface of a semiconductor element having been flip-chip connected onto an adherend, it fulfills a function to protect the semiconductor element. In addition, since the film for back surface of flip-chip semiconductor according to the present invention has a tensile storage elastic modulus at 23° C. after thermal curing of 10 GPa or more, a warp of the semiconductor element generated at the time of flip-chip connection of a semiconductor element onto an adherend can be effectively suppressed or prevented.Type: GrantFiled: April 18, 2011Date of Patent: March 6, 2018Assignee: NITTO DENKO CORPORATIONInventors: Naohide Takamoto, Goji Shiga
-
Patent number: 9847430Abstract: High field-effect mobility is provided for a transistor including an oxide semiconductor. Further, a highly reliable semiconductor device including the transistor is provided. In a bottom-gate transistor including an oxide semiconductor layer, an oxide semiconductor layer functioning as a current path (channel) of the transistor is sandwiched between oxide semiconductor layers having lower carrier densities than the oxide semiconductor layer. In such a structure, the channel is formed away from the interface of the oxide semiconductor stacked layer with an insulating layer in contact with the oxide semiconductor stacked layer, i.e., a buried channel is formed.Type: GrantFiled: November 3, 2016Date of Patent: December 19, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
-
Patent number: 9831381Abstract: A package substrate machining method is provided. The package substrate includes a ceramic substrate, a plurality of device chips arranged on one face of the ceramic substrate, and a coating layer made of a resin that covers the entire one face of the ceramic substrate. The package substrate machining method includes a first laser-machined groove formation step adapted to form, in the coating layer, first laser-machined grooves along scheduled division lines set up on the package substrate by irradiating a laser beam at a wavelength absorbable by the coating layer from the coating layer side of the package substrate; and a second laser-machined groove formation step adapted to form, in the ceramic substrate and after the first laser-machined groove formation step, second laser-machined grooves along the scheduled division lines by irradiating a laser beam from the ceramic substrate side of the package substrate.Type: GrantFiled: August 26, 2016Date of Patent: November 28, 2017Assignee: Disco CorporationInventor: Yuta Yoshida
-
Patent number: 9666437Abstract: A method for manufacturing a semiconductor device including a semiconductor chip having a front surface electrode and a rear surface electrode provided on a front surface and a rear surface, respectively, the method includes a front surface electrode layer forming step of forming a front surface electrode layer as the front surface electrode on a front surface of a semiconductor wafer forming the semiconductor chip; a thinning step of grinding a rear surface of the semiconductor wafer to reduce a thickness of the semiconductor wafer after the front surface electrode layer forming step; a plating step of forming an electrode plating film as the front surface electrode on a surface of the front surface electrode layer after the thinning step; and a rear surface electrode forming step of forming the rear surface electrode on the ground rear surface of the semiconductor wafer after the plating step.Type: GrantFiled: October 8, 2015Date of Patent: May 30, 2017Assignee: FUJI ELECTRIC CO., LTD.Inventor: Yuichi Urano
-
Patent number: 9630837Abstract: A structure and a fabrication method thereof are provided. The method includes the following operations. A device substrate having a first surface and a second surface opposite to each other is received. A carrier substrate having a third surface and a fourth surface opposite to each other is received. An intermediate layer is formed between the third surface of the carrier substrate and the second surface of the device substrate. The second surface of the device substrate is attached to the third surface of the carrier substrate. The device substrate is thinned from the first surface. A device is formed over the first surface of the device substrate. The carrier substrate and the device substrate are patterned from the fourth surface to form a cavity in the carrier substrate, the intermediate layer and the device substrate.Type: GrantFiled: January 15, 2016Date of Patent: April 25, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chia-Hua Chu, Chun-Wen Cheng
-
Patent number: 9609793Abstract: A electromagnetic shielding film includes a conductive supporting substrate which includes a cured material of a thermosetting resin including a conductive filler; a metal thin film layer which covers one surface of the conductive supporting substrate; a thermosetting adhesive layer which covers a surface of the metal thin film layer; and a peeling substrate which covers the other surface of the conductive supporting substrate.Type: GrantFiled: June 30, 2014Date of Patent: March 28, 2017Assignee: SHIN-ETSU POLYMER CO., LTD.Inventor: Toshiyuki Kawaguchi
-
Patent number: 9583391Abstract: There is provided a wafer processing method including a modified layer forming step. In the wafer processing method, the power of a pulse laser beam set in the modified layer forming step is set to a power that forms modified layers and cracks in such a manner that a wafer is allowed to be divided into individual device chips before the thickness of the wafer reaches a finished thickness and, after the wafer is divided into the individual device chips, the time until the thickness of the wafer reaches the finished thickness is such a time that damage due to rubbing of the individual device chips against each other is not caused through grinding under a predetermined grinding condition set in a back surface grinding step.Type: GrantFiled: July 5, 2016Date of Patent: February 28, 2017Assignee: Disco CorporationInventor: Masaru Nakamura
-
Patent number: 9515237Abstract: A method for producing a light emitting device includes a first bonding step including disposing a first bonding member a mounting substrate, placing a light emitting element on the mounting substrate such that the first bonding member is located between a mounting face of the light emitting element and the mounting substrate, and hardening the first bonding member thereby bonding the light emitting element and the mounting substrate such that, in a plan view, an entirety of the first bonding member is contained within an area of the mounting face of the light emitting element; and a second bonding step including disposing a second bonding member on the upper face of the mounting substrate such that, in a plan view, the second bonding member is located at at least a portion of an outer edge of the mounting face of the light emitting element, and hardening the second bonding member.Type: GrantFiled: March 23, 2016Date of Patent: December 6, 2016Assignee: NICHIA CORPORATIONInventor: Hideaki Takeda
-
Patent number: 9408311Abstract: A method of manufacturing an electronic component module includes sealing a surface of an aggregate substrate on which a plurality of electronic components are mounted with a sealing resin and cutting boundary portions between electronic component modules from an outer surface of the sealing resin to a position at least partially through the aggregate substrate to form first grooves. A shield layer is formed by coating the outer surface of the sealing resin with a conductive resin and filling the first grooves with the conductive resin, and recesses are formed at positions on the shield layer where the first grooves are formed. The boundary portions between electronic component modules are cut along the corresponding recesses so that second grooves each having a width smaller than the width of a corresponding one of the recesses are formed, and the aggregate substrate is singulated into the individual electronic component modules.Type: GrantFiled: July 5, 2013Date of Patent: August 2, 2016Assignee: Murata Manufacturing Co., Ltd.Inventors: Koichi Kanryo, Akio Katsube, Shunsuke Kitamura
-
Patent number: 9368456Abstract: A semiconductor package includes a dielectric layer in which a chip is embedded, interconnection parts disposed on a first surface of the dielectric layer, through connectors each of which penetrates a portion of the dielectric layer over the chip to electrically couple the chip to a corresponding one of the interconnection parts, a shielding plate covering a second surface of the dielectric layer that is opposite to the first surface, and a shielding encapsulation part connected to one of the interconnection parts and covering sidewalls of the dielectric layer. The shielding encapsulation part includes a portion contacting the shielding plate.Type: GrantFiled: May 29, 2014Date of Patent: June 14, 2016Assignee: SK HYNIX INC.Inventor: Qwan Ho Chung
-
Patent number: 9299592Abstract: A package structure and a packaging method of wafer level chip scale package are provided. The packaging method includes: providing a carrier, and disposing a plurality of chips on the carrier; forming a plurality of adhesive layers on a surface of the corresponding chips; covering a conductive cover plate, bonding the conductive cover plate with the chips through the adhesive layers, and dividing out a plurality of packaging spaces by the conductive cover plate for disposing the chips respectively; and providing an insulation material to fill the packaging spaces through via holes on the conductive cover plate to form a first insulation structure; finally, removing the carrier.Type: GrantFiled: December 18, 2014Date of Patent: March 29, 2016Assignees: NIKO SEMICONDUCTOR CO., LTD., Super Group Semiconductor Co. LTD.Inventors: Chih-Cheng Hsieh, Hsiu-Wen Hsu, Chun-Ying Yeh, Chung-Ming Leng
-
Patent number: 9236429Abstract: A semiconductor structure includes a substrate, a dam element, a first isolation layer, a second isolation layer, and a conductive layer. The substrate has a conductive pad, a trench, a sidewall, a first surface, and a second surface opposite to the first surface. The conductive pad is located on the second surface. The trench has a first opening at the first surface, and has a second opening at the second surface. The dam element is located on the second surface and covers the second opening. The dam element has a concave portion that is at the second opening. The first isolation layer is located on a portion of the sidewall. The second isolation layer is located on the first surface and the sidewall that is not covered by the first isolation layer, such that an interface is formed between the first and second isolation layers.Type: GrantFiled: April 29, 2015Date of Patent: January 12, 2016Assignee: XINTEC INC.Inventors: Yu-Lin Yen, Sheng-Hao Chiang, Hung-Chang Chen, Ho-Ku Lan, Chen-Mei Fan
-
Patent number: 9196534Abstract: A method for preparing semiconductor devices in a flip chip process comprises forming deep grooves surrounding each of the semiconductor chips; depositing a first plastic package material to form a first plastic package layer covering front surface of the semiconductor wafer and filling the deep grooves; depositing a metal layer at back surface of the semiconductor wafer after grinding; grinding an outermost portion of the metal layer thus forming a ring area located at back surface around edge of the semiconductor wafer not covered by the metal layer; cutting the first plastic package layer, the semiconductor wafer, the metal layer and the first plastic package material filled in the deep grooves along a straight line formed by two ends of each of the deep grooves filled with the first plastic package material; and picking up the semiconductor devices and mounting on a substrate without flipping the semiconductor devices.Type: GrantFiled: February 24, 2013Date of Patent: November 24, 2015Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Yan Xun Xue, Ping Huang, Hamza Yilmaz, Yueh-Se Ho, Lei Shi, Liang Zhao, Ping Li Wu, Lei Duan, Yuping Gong
-
Patent number: 9177919Abstract: A chip package including a first substrate having a first surface and a second surface opposite thereto is provided. The first substrate has a micro-electric element and a plurality of conducting pads adjacent to the first surface. The first substrate has a plurality of openings respectively exposing a portion of each conducting pad. A second substrate is disposed on the first surface. An encapsulation layer is disposed on the first surface and covers the second substrate. A redistribution layer is disposed on the second surface and extends into the openings to electrically connect the conducting pads.Type: GrantFiled: November 13, 2014Date of Patent: November 3, 2015Assignee: XINTEC INC.Inventors: Chien-Hung Liu, Ying-Nan Wen
-
Method for separating a plurality of dies and a processing device for separating a plurality of dies
Patent number: 9165895Abstract: A method for separating a plurality of dies is provided.Type: GrantFiled: November 7, 2011Date of Patent: October 20, 2015Assignee: INFINEON TECHNOLOGIES AGInventors: Helmut Brunner, Manfred Engelhardt -
Patent number: 9153566Abstract: A semiconductor device manufacturing method includes forming grooves in a surface of a semiconductor substrate, stacking a plurality of semiconductor chips in each area of the semiconductor substrate surrounded by the grooves to form stacked bodies, forming a first sealing resin layer that covers spaces between the plurality of semiconductor chips and lateral sides of the stacked bodies, separating the semiconductor substrate to singulate the stacked bodies, mounting the stacked bodies on a wiring substrate, forming a second sealing resin layer that seals the stacked bodies on the wiring substrate, separating the wiring substrate to singulate a portion of the wiring substrate with a single stacked body thereon, and grinding a portion of the semiconductor substrate in a thickness direction from a side of the semiconductor substrate opposite to the stacked bodies, after forming the first sealing resin layer and before singulating the wiring substrate.Type: GrantFiled: September 2, 2014Date of Patent: October 6, 2015Assignee: Kabushiki Kaisha ToshibaInventor: Takao Sato
-
Patent number: 9142457Abstract: The present invention provides a dicing die bond film in which yielding and breaking of the dicing film are prevented and in which the die bond film can be suitably broken with a tensile force. In the dicing die bond film of the present invention, the tensile strength of the contact part in which the outer circumference of the push-up jig contacts the dicing film at 25° C. is 15 N or more and 80 N or less and the yield point elongation is 80% or more, the tensile strength of the wafer bonding part of the dicing film at 25° C. is 10 N or more and 70 N or less and the yield point elongation is 30% or more, [(the tensile strength of the contact part)?(the tensile strength of the wafer bonding part)] is 0 N or more and 60 N or less, and the breaking elongation rate of the die bond film at 25° C. is more than 40% and 500% or less.Type: GrantFiled: September 21, 2011Date of Patent: September 22, 2015Assignee: NITTO DENKO CORPORATIONInventors: Shumpei Tanaka, Takeshi Matsumura
-
Patent number: 9130056Abstract: Methods of dicing semiconductor wafers, each wafer having a plurality of integrated circuits, are described. In an example, a method of dicing a semiconductor wafer having integrated circuits on a front side thereof involves laminating a pre-patterned bi-layer wafer-level underfill material stack on the integrated circuits of the semiconductor wafer. The pre-patterned bi-layer wafer-level underfill material stack has regions corresponding to the integrated circuits and gaps corresponding to dicing streets between the integrated circuits. The method also involves plasma etching to form trenches in the semiconductor wafer in alignment with the dicing streets to singulate the integrated circuits. An upper layer of the pre-patterned bi-layer wafer-level underfill material stack protects the integrated circuits during the plasma etching.Type: GrantFiled: October 3, 2014Date of Patent: September 8, 2015Assignee: Applied Materials, Inc.Inventors: James M. Holden, James S. Papanu, Wei-Sheng Lei, Brad Eaton, Ajay Kumar
-
Patent number: 9087764Abstract: A method and structure for forming an array of micro devices is disclosed. An array of micro devices is formed over an array of stabilization posts included in a stabilization layer. The stabilization layer is bonded to a spacer side of a carrier substrate. The spacer side of the carrier substrate includes raised spacers extending from a spacer-side surface of the carrier substrate.Type: GrantFiled: July 26, 2013Date of Patent: July 21, 2015Assignee: Luxvue Technology CorporationInventors: Clayton Ka Tsun Chan, Andreas Bibl