Utilizing A Coating To Perfect The Dicing Patents (Class 438/114)
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Patent number: 8802507Abstract: A semiconductor package device, a semiconductor package structure, and fabrication methods thereof are provided, which mainly includes disposing a plurality of semiconductor chips on a wafer formed with TSVs (Through Silicon Vias) and electrically connecting the semiconductor chips to the TSVs; encapsulating the semiconductor chips with an encapsulant; and disposing a hard component on the encapsulant. The hard component ensures flatness of the wafer during a solder bump process and provides support to the wafer during a singulation process such that the wafer can firmly lie on a singulation carrier, thereby overcoming the drawbacks of the prior art, namely difficulty in mounting of solder bumps, and difficulty in cutting of the wafer.Type: GrantFiled: November 2, 2012Date of Patent: August 12, 2014Assignee: Siliconware Precision Industries Co., Ltd.Inventors: Cheng-Chia Chiang, Chin-Huang Chang, Chien-Ping Huang, Chih-Ming Huang, Jung-Pin Huang
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Patent number: 8802545Abstract: The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a cover ring disposed above the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.Type: GrantFiled: March 5, 2012Date of Patent: August 12, 2014Assignee: Plasma-Therm LLCInventors: Chris Johnson, David Johnson, David Pays-Volard, Linnell Martinez, Russell Westerman, Gordon M. Grivna
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Publication number: 20140210054Abstract: A method includes applying a reinforcing wafer to a semiconductor wafer, thereby forming a composite wafer. Further the method includes dividing the composite wafer, thereby generating a plurality of composite chips each including a semiconductor chip and a reinforcing chip.Type: ApplicationFiled: January 30, 2013Publication date: July 31, 2014Applicant: INFINEON TECHNOLOGIES AGInventors: Johann Kosub, Michael Ledutke
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Patent number: 8785246Abstract: A semiconductor circuit design includes an outer seal-ring and an inner seal-ring for each sub-section of the design that may potentially be cut into separate die. The use of multiple seal-rings permits a single circuit design and fabrication run to be used to support flexibly packaging different product releases having different numbers of integrated circuit blocks per packaged unit.Type: GrantFiled: August 3, 2012Date of Patent: July 22, 2014Assignee: PLX Technology, Inc.Inventors: Duc Anh Vu, Jayalakshmana Kumar Pragasam, Vijay Meduri, Seyed Attaran, Michael J. Grubisich, Syed Ahmed, Aniket Singh
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Patent number: 8785247Abstract: According to an embodiment, a chip package is provided, which includes: a substrate having a first surface and a second surface; a device region formed in the substrate; a passivation layer formed overlying the first surface of the substrate; at least a polymer planarization layer formed overlying the passivation layer; a package substrate disposed overlying the first surface of the substrate; and a spacer layer disposed between the package substrate and the passivation layer, wherein the spacer layer and the package substrate surround a cavity overlying the substrate, wherein the polymer planar layer does not extends to an outer edge of the spacer layer.Type: GrantFiled: May 13, 2013Date of Patent: July 22, 2014Inventors: Yu-Lung Huang, Yu-Ting Huang
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Patent number: 8785299Abstract: An embodiment is a device comprising a semiconductor die, an adhesive layer on a first side of the semiconductor die, and a molding compound surrounding the semiconductor die and the adhesive layer, wherein the molding compound is at a same level as the adhesive layer. The device further comprises a first post-passivation interconnect (PPI) electrically coupled to a second side of the semiconductor die, and a first connector electrically coupled to the first PPI, wherein the first connector is over and aligned to the molding compound.Type: GrantFiled: November 30, 2012Date of Patent: July 22, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yi-Chao Mao, Chin-Chuan Chang, Jui-Pin Hung, Jing-Cheng Lin
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Patent number: 8778806Abstract: The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a cover ring disposed above the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.Type: GrantFiled: April 17, 2012Date of Patent: July 15, 2014Assignee: Plasma-Therm LLCInventors: Chris Johnson, David Johnson, David Pays-Volard, Linnell Martinez, Russell Westerman, Gordon M. Grivna
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Patent number: 8778735Abstract: A WLCSP method comprises: depositing a metal bump on bonding pads of chips; forming a first packaging layer at front surface of wafer to cover metal bumps while forming an un-covered ring at the edge of wafer to expose the ends of each scribe line located between two adjacent chips; thinning first packaging layer to expose metal bumps; forming a groove on front surface of first packaging layer along each scribe line by cutting along a straight line extended by two ends of scribe line exposed on front surface of un-covered ring; grinding back surface of wafer to form a recessed space and a support ring at the edge of the wafer; depositing a metal layer at bottom surface of wafer in recessed space; cutting off the edge portion of wafer; and separating individual chips from wafer by cutting through first packaging layer, the wafer and metal layer along groove.Type: GrantFiled: June 29, 2013Date of Patent: July 15, 2014Assignee: Alpha & Omega Semiconductor, Inc.Inventors: Yan Xun Xue, Hamza Yilmaz, Yueh-Se Ho, Jun Lu, Ping Huang, Lei Shi, Lei Duan, Yuping Gong
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Patent number: 8741695Abstract: A semiconductor device includes a metal substrate including a metal base plate, an insulating sheet located on the metal base plate, and a wiring pattern located on the insulating sheet, and a semiconductor element located on the metal substrate. The semiconductor element is sealed with a molding resin. The molding resin extends to side surfaces of the metal substrate. On the side surfaces of the metal substrate, the insulating sheet and the wiring pattern are not exposed from the molding resin, whereas the metal base plate includes a projecting portion exposed from the molding resin.Type: GrantFiled: September 14, 2012Date of Patent: June 3, 2014Assignee: Mitsubishi Electric CorporationInventors: Seiji Oka, Kazuhiro Tada, Hiroshi Yoshida
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Publication number: 20140141570Abstract: A sheet for forming a resin film for a chip, with which a semiconductor device is provided with a gettering function, is obtained without performing special treatment to a semiconductor wafer and the chip. The sheet has a release sheet, and a resin film-forming layer, which is formed on the releasing face of the release sheet, and the resin film-forming layer contains a binder polymer component, a curing component, and a gettering agent.Type: ApplicationFiled: January 24, 2014Publication date: May 22, 2014Applicant: LINTEC CorporationInventors: Tomonori Shinoda, Yoji Wakayama
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Publication number: 20140138857Abstract: The invention provides an encapsulant equipped with the supporting substrate which is an encapsulant for collectively encapsulating a semiconductor devices mounting surface of a substrate having semiconductor devices mounting thereon or a semiconductor devices forming surface of a wafer having semiconductor devices forming thereon, and the encapsulant equipped with the supporting substrate comprises a supporting substrate having a difference of a linear expansion coefficient from that of the substrate or the wafer of 5 ppm or less and a thermosetting resin layer being laminated, wherein the thermosetting resin layer has a shape having a height difference to a thickness direction.Type: ApplicationFiled: October 29, 2013Publication date: May 22, 2014Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Hideki AKIBA, Toshio SHIOBARA, Susumu SEKIGUCHI, Tomoaki NAKAMURA
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Publication number: 20140138856Abstract: A fiber-containing resin substrate for collectively encapsulating a semiconductor-device-mounting surface of a substrate on which semiconductor devices are mounted or a semiconductor-device-forming surface of a wafer on which a semiconductor device is formed, including a resin-impregnated fibrous base material which is obtained by impregnating a fibrous base material with a thermosetting resin and semi-curing or curing the thermosetting resin and has a linear expansion coefficient (ppm/° C.) in an X-Y direction of less than 3 ppm, and an uncured resin layer formed of an uncured thermosetting resin on one side of the resin-impregnated fibrous base material.Type: ApplicationFiled: November 14, 2013Publication date: May 22, 2014Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Susumu SEKIGUCHI, Toshio SHIOBARA, Hideki AKIBA, Tomoaki NAKAMURA
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Publication number: 20140141571Abstract: A process for manufacturing low-profile and flexible integrated circuits includes manufacturing an integrated circuit on a wafer having a thickness larger than the desired thickness. After the integrated circuit is manufactured the integrated circuit may be released with a portion of the wafer leaving a remainder of the bulk portion of the wafer. A second integrated circuit may be manufactured on the remainder of the wafer and the process repeated to manufacture additional integrated circuits from a single wafer. The integrated circuits may be released from the wafer by etching vias through the integrated circuit and into the wafer. The via may be used to start an etch process inside the wafer that undercuts the integrated circuit separating the integrated circuit from the wafer.Type: ApplicationFiled: July 11, 2012Publication date: May 22, 2014Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGYInventors: Muhammad M. Hussain, Jhonathan P. Rojas
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Publication number: 20140138855Abstract: Consistent with an example embodiment, there is a method for assembling a wafer level chip scale processed (WLCSP) wafer; The wafer has a topside surface and an back-side surface, and a plurality of device die having electrical contacts on the topside surface. The method comprises back-grinding, to a thickness, the back-side surface the wafer. A protective layer of a thickness is molded onto the backside of the wafer. The wafer is mounted onto a sawing foil; along saw lanes of the plurality of device die, the wafer is sawed, the sawing occurring with a blade of a first kerf and to a depth of the thickness of the back-ground wafer. Again, the wafer is sawed along the saw lanes of the plurality of device die, the sawing occurring with a blade of a second kerf, the second kerf narrower than the first kerf, and sawing to a depth of the thickness of the protective layer. The plurality of device die are separated into individual device die.Type: ApplicationFiled: August 14, 2013Publication date: May 22, 2014Applicant: NXP B.V.Inventors: Leonardus Antonius Elisabeth VAN GEMERT, Hartmut BUENNING, Tonny KAMPHUIS, Sascha MOELLER, Christian ZENZ
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Patent number: 8728866Abstract: A method for manufacturing a semiconductor device comprises: forming a circuit pattern and a first metal film on a first major surface of a body wafer; forming a through-hole penetrating the body wafer from a second major surface of the body wafer and reaching the first metal film; forming a second metal film on a part of the second major surface of the body wafer, on an inner wall of the through-hole, and on the first metal film exposed in the through-hole; forming a recess on a first major surface of a lid wafer; forming a third metal film on the first major surface of the lid wafer including inside the recess of the lid wafer; with the recess facing the circuit pattern, and the first metal film contacting the third metal film, joining the lid wafer to the body wafer; and dicing the joined body wafer and lid wafer along the through-hole.Type: GrantFiled: April 4, 2011Date of Patent: May 20, 2014Assignee: Mitsubishi Electric CorporationInventors: Ko Kanaya, Yoshihiro Tsukahara, Shinsuke Watanabe
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Patent number: 8713789Abstract: A method of manufacturing a microphone comprising a substrate, a transducer element that is mounted on a top side of the substrate, a covering layer that covers the transducer element and forms a seal with the top side of the substrate, a shaped covering material that covers the substrate, the transducer element and the covering layer, and a sound opening that extends through the covering material and the covering layer. Methods for manufacturing a microphone and for manufacturing a plurality of microphones are also disclosed.Type: GrantFiled: April 26, 2011Date of Patent: May 6, 2014Assignee: Epcos AGInventors: Anton Leidl, Wolfgang Pahl
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Patent number: 8716066Abstract: A method of forming a packaged semiconductor device includes loading an array of package sites in position for saw singulation, saw singulating the array of package sites, and performing a non-electrolytic plating operation on exposed lead tips of individual packages from the array of package sites as the array of package sites is saw singulated.Type: GrantFiled: July 31, 2012Date of Patent: May 6, 2014Assignee: Freescale Semiconductor, Inc.Inventor: Leo M. Higgins, III
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Patent number: 8703583Abstract: A technique with which die bonding can be carried out without forming a void in a bond area is provided. A vacuum supply line that connects to a vacuum chuck hole formed in the bottom face of a vacuuming collet and supplies the vacuuming collet with reduced pressure for vacuum chucking a chip is constructed of two systems. That is, the vacuum supply line is so structured that a first pipe and a second pipe connect to the vacuuming collet. The first pipe supplies the vacuuming collet with a vacuum that provides suction force when a chip is unstuck from a dicing tape and transported to a mounting position on a wiring substrate. The second pipe supplies the vacuuming collet with a vacuum that provides suction force when a chip is mounted over a wiring substrate. The intensity of the vacuum (suction force) supplied to the vacuuming collet is controlled by opening or closing valves respectively installed in the pipes.Type: GrantFiled: November 13, 2009Date of Patent: April 22, 2014Assignee: Renesas Electronics CorporationInventors: Hiroshi Maki, Masayuki Mochizuki, Ryuichi Takano, Yoshiaki Makita, Haruhiko Fukasawa, Keisuke Nadamoto, Tatsuyuki Okubo
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Patent number: 8704382Abstract: The present invention provides a film for flip chip type semiconductor back surface, which is to be formed on a back surface of a semiconductor element flip-chip connected on an adherend, the film including a wafer adhesion layer and a laser marking layer, in which the wafer adhesion layer has a light transmittance of 40% or more in terms of a light having a wavelength of 532 nm and the laser marking layer has a light transmittance of less than 40% in terms of a light having a wavelength of 532 nm.Type: GrantFiled: December 22, 2010Date of Patent: April 22, 2014Assignee: Nitto Denko CorporationInventors: Naohide Takamoto, Takeshi Matsumura, Goji Shiga
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Patent number: 8698311Abstract: A package substrate may include an insulating substrate, a dummy pad, a signal pad and a plug. The dummy pad may be formed on an upper surface of the insulating substrate. The signal pad may be formed on the upper surface of the insulating substrate. The signal pad may have an upper surface protruded from an upper surface of the dummy pad. The plug may be vertically formed in the insulating substrate. The plug may have an upper end exposed through the upper surface of the insulating substrate and connected with the signal pad and the dummy pad, and a lower end exposed through a lower surface of the insulating substrate. Thus, a signal bump may accurately make contact with the protruded upper surface of the signal pad.Type: GrantFiled: August 30, 2012Date of Patent: April 15, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Tae-Gyu Kang, Ho-Tae Jin, Tae-ho Moon, Il-soo Choi, Jong-Eun Lee
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Patent number: 8691666Abstract: A method for producing a chip (13) in which a die bonding adhesive layer (24) and a wafer (1) are laminated on a close-contact layer (31) of a fixing jig (3), the chip is formed by completely cutting the wafer and the die bonding adhesive layer and then the chip is picked up together with the die bonding adhesive layer from the fixing jig by deforming the close-contact layer of the fixing jig. In the method the fixing jig is provided with the close-contact layer and a jig base (30) that is provided with a plurality of protrusions (36) on one side and a sidewall (35) at the outer circumference section of the one side. The close-contact layer is laminated on the surface of the jig base provided with the protrusions and is bonded on the upper surface of the sidewall. On the surface of the jig base provided with the protrusions, a partitioned space is formed by the close-contact layer, the protrusions, and the sidewall.Type: GrantFiled: April 15, 2008Date of Patent: April 8, 2014Assignee: Lintec CorporationInventors: Takeshi Segawa, Naofumi Izumi
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Patent number: 8685795Abstract: A flank wettable semiconductor device is assembled from a lead frame or substrate panel by at least partially undercutting the lead frame or substrate panel with a first cutting tool to expose a flank of the lead frame and applying a coating of tin or tin alloy to the exposed flank prior to singulating the lead frame or substrate panel into individual semiconductor devices. The method includes electrically interconnecting lead frame flanks associated with adjacent semiconductor devices before applying the coating of tin or tin alloy. The lead frame flanks may be electrically interconnected during wire bonding.Type: GrantFiled: May 3, 2012Date of Patent: April 1, 2014Assignee: Freescale Semiconductor, Inc.Inventor: Jinquan Wang
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Patent number: 8679931Abstract: The present invention relates to a dicing tape-integrated film for semiconductor back surface, which includes: a dicing tape including a base material layer, a first pressure-sensitive adhesive layer and a second pressure-sensitive adhesive layer stacked in this order, and a film for semiconductor back surface stacked on the second pressure-sensitive adhesive layer of the dicing tape, in which a peel strength Y between the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer is larger than a peel strength X between the second pressure-sensitive adhesive layer and the film for semiconductor back surface, and in which the peel strength X is from 0.01 to 0.2 N/20 mm, and the peel strength Y is from 0.2 to 10 N/20 mm.Type: GrantFiled: July 27, 2011Date of Patent: March 25, 2014Assignee: Nitto Denko CorporationInventors: Fumiteru Asai, Goji Shiga, Naohide Takamoto
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Patent number: 8679895Abstract: Embodiments relate to IC current sensors fabricated using thin-wafer manufacturing technologies. Such technologies can include processing in which dicing before grinding (DBG) is utilized, which can improve reliability and minimize stress effects. While embodiments utilize face-up mounting, face-down mounting is made possible in other embodiments by via through-contacts. IC current sensor embodiments can present many advantages while minimizing drawbacks often associated with conventional IC current sensors.Type: GrantFiled: September 25, 2012Date of Patent: March 25, 2014Assignee: Infineon Technologies AGInventors: Mario Motz, Udo Ausserlechner
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Patent number: 8682466Abstract: A method to enable wafer result prediction includes collecting manufacturing data from various semiconductor manufacturing tools and metrology tools; choosing key parameters using an autokey method based on the manufacturing data; building a virtual metrology based on the key parameters; and predicting wafer results using the virtual metrology.Type: GrantFiled: February 5, 2008Date of Patent: March 25, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Francis Ko, Chih-Wei Lai, Kewei Zuo, Henry Lo, Jean Wang, Ping-Hsu Chen, Chun-Hsien Lim, Chen-Hua Yu
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Publication number: 20140073090Abstract: A semiconductor device includes a semiconductor substrate on which a structure portion is provided except a peripheral portion thereof, and has a laminated structure including low dielectric films and wiring lines, the low dielectric films having a relative dielectric constant of 3.0 or lower and a glass transition temperature of 400° C. or higher. An insulating film is formed on the structure portion. A connection pad portion is arranged on the insulating film and connected to an uppermost wiring line of the laminated structure portion. A bump electrode is provided on the connection pad portion. A sealing film made of an organic resin is provided on a part of the insulating film which surrounds the bump electrode. Side surfaces of the laminated structure portion are covered with the insulating film and/or the sealing film.Type: ApplicationFiled: November 15, 2013Publication date: March 13, 2014Applicant: TERAMIKROS, INC.Inventors: Aiko Mizusawa, Osamu Okada, Takeshi Wakabayashi, Ichiro Mihara
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Patent number: 8658515Abstract: The present invention aims to provides a method of manufacturing a film for a semiconductor device in which a dicing film, a die bond film, and a protecting film are laminated in this order, including the steps of: irradiating the die bond film with a light ray having a wavelength of 400 to 800 nm to detect the position of the die bond film based on the obtained light transmittance and punching the dicing film out based on the detected position of the die bond film, and in which T2/T1 is 0.04 or more, wherein T1 is the light transmittance of the portion where the dicing film and the protecting film are laminated and T2 is the light transmittance of the portion where the dicing film, the die bond film, and the protecting film are laminated.Type: GrantFiled: March 8, 2012Date of Patent: February 25, 2014Assignee: Nitto Denko CorporationInventors: Koichi Inoue, Miki Morita, Yuichiro Shishido
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Patent number: 8652927Abstract: A method for forming a capacitor stack is described. In some embodiments of the present invention, a first electrode structure is comprised of multiple materials. A first material is formed above the substrate. A portion of the first material is etched. A second material is formed above the first material. A portion of the second material is etched. Optionally, the first electrode structure receives an anneal treatment. A dielectric material is formed above the first electrode structure. Optionally, the dielectric material receives an anneal treatment. A second electrode material is formed above the dielectric material. Typically, the capacitor stack receives an anneal treatment.Type: GrantFiled: January 10, 2013Date of Patent: February 18, 2014Assignee: Intermolecular, Inc.Inventors: Sandra Malhotra, Hanhong Chen, Wim Y. Deweerd, Edward L. Haywood, Hiroyuki Ode, Gerald Richardson
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Patent number: 8652877Abstract: A layered chip package includes a main body, and wiring that includes a plurality of wires disposed on a side surface of the main body. The main body includes a plurality of stacked layer portions. A method of manufacturing the layered chip package includes the step of fabricating a layered substructure and the step of cutting the layered substructure. The layered substructure includes: a plurality of arrayed pre-separation main bodies; a plurality of accommodation parts disposed between two adjacent pre-separation main bodies; and a plurality of preliminary wires accommodated in the accommodation parts. The accommodation parts are formed in a photosensitive resin layer by photolithography. In the step of cutting the layered substructure, the plurality of pre-separation main bodies are separated from each other, and the wires are formed by the preliminary wires.Type: GrantFiled: December 6, 2010Date of Patent: February 18, 2014Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Hiroshi Ikejima, Atsushi Iijima
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Patent number: 8647966Abstract: In one aspect of the present invention, a method of sawing a semiconductor wafer will be described. A semiconductor wafer is positioned in a wafer sawing apparatus that includes a sawing blade and a movable support structure that physically supports the semiconductor wafer. The semiconductor wafer is coupled with the support structure with various layers, including a die attach film, an adhesive and a base film. The die attach film is cut with the sawing blade. During the cutting operation, a contact portion of the sawing blade engages one of the layers and moves at least partly in one direction. While the contact portion of the sawing blade engages the layer, the support structure moves in the opposite direction. Various aspects of the present invention relate to arrangements and a wafer sawing apparatus that involve the aforementioned sawing method.Type: GrantFiled: June 9, 2011Date of Patent: February 11, 2014Assignee: National Semiconductor CorporationInventors: Ken Fei Lim, You Chye How, Kooi Choon Ooi
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Patent number: 8647956Abstract: The present invention relates to a dicing tape-integrated film for semiconductor back surface, which includes: a dicing tape including a base material layer, a first pressure-sensitive adhesive layer and a second pressure-sensitive adhesive layer stacked in this order, and a film for semiconductor back surface stacked on the second pressure-sensitive adhesive layer of the dicing tape, in which a peel strength Y between the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer is larger than a peel strength X between the second pressure-sensitive adhesive layer and the film for semiconductor back surface, and in which the peel strength X is from 0.01 to 0.2 N/20 mm, and the peel strength Y is from 0.2 to 10 N/20 mm.Type: GrantFiled: July 27, 2011Date of Patent: February 11, 2014Assignee: Nitto Denko CorporationInventors: Fumiteru Asai, Goji Shiga, Naohide Takamoto
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Patent number: 8642386Abstract: A technique to fabricate a package. A thin wafer supported by a wafer support substrate (WSS) is formed. The WSS-supported thin wafer layer is diced into a plurality of WSS-supported thin dice. A WSS-supported thin die is bonded to a first heat spreader (HS) to form a HS-reinforced thin die.Type: GrantFiled: August 9, 2011Date of Patent: February 4, 2014Assignee: Intel CorporationInventor: Daoqiang Lu
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Patent number: 8642389Abstract: The method comprises providing multiple chips attached to a first carrier, stretching the first carrier so that the distance between adjacent ones of the multiple chips is increased, and applying a laminate to the multiple chips and the stretched first carrier to form a first workpiece embedding the multiple chips, the first workpiece having a first main face facing the first carrier and a second main face opposite to the first main face.Type: GrantFiled: August 6, 2009Date of Patent: February 4, 2014Assignee: Infineon Technologies AGInventors: Thomas Wowra, Joachim Mahler, Manfred Mengel
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Patent number: 8642390Abstract: Organic-adhesive tapes are often used to secure and protect the bumps during wafer processing after bump formation. While residual organic-adhesive tape may remain on the wafer after tape de-lamination, applying a bump template layer on the bumps before laminating the tape allows any residue to be removed afterwards and results in a residue-free wafer.Type: GrantFiled: March 17, 2010Date of Patent: February 4, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung Yu Wang, Jiann-Jong Wang
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Patent number: 8633089Abstract: An array of semiconductor components, comprising a first plurality of semiconductor components and a second plurality of semiconductor components held on a carrier, is bonded onto one or more substrates. The first plurality of semiconductor components is first located for pick-up by a transfer device, and each semiconductor component comprised in the first plurality of semiconductor components is picked up with the transfer device and is bonded onto a respective bonding position on the one or more substrates. After the first plurality of semiconductor components have been picked up and bonded, the carrier is rotated and the second plurality of semiconductor components is located for pick-up by the transfer device. Thereafter, each semiconductor component comprised in the second plurality of semiconductor components is picked up with the transfer device and is bonded onto a respective bonding position on the one or more substrates.Type: GrantFiled: March 28, 2011Date of Patent: January 21, 2014Assignee: ASM Assembly Automation LtdInventors: Man Chung Ng, Keung Chau
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Publication number: 20140008821Abstract: Provided are a sealing resin sheet, wherein a clean, smooth and flat ground surface is obtained by grinding after resin sealing, a method for producing an electronic component package using the same, and an electronic component package obtained by the production method. The present invention provides a sealing resin sheet, wherein a ground surface has a mean surface roughness Ra of 1 ?m or less when grinding is performed under conditions of a grind bite peripheral velocity of 1000 m/minute, a feed pitch of 100 ?m and a cut depth of 10 ?m after a heat curing treatment is performed at 180° C. for 1 hour; and a Shore D hardness at 100° C. after the heat curing treatment is 70 or more.Type: ApplicationFiled: July 3, 2013Publication date: January 9, 2014Inventors: Eiji Toyoda, Yusaku Shimizu
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Publication number: 20140008779Abstract: A wafer level package has a first wafer having a plurality of chips mounted or formed thereon in a plane, and a second wafer that is opposed to the first wafer. The first wafer and the second wafer are joined while a seal frame that seals a periphery of each chip is interposed therebetween. A gap is formed between the seal frames of the chips adjacent to each other. A partial connect part that partially connects the seal frames to each other is provided in the gap formed between the seal frames of the chips adjacent to each other.Type: ApplicationFiled: March 16, 2011Publication date: January 9, 2014Applicant: OMRON CORPORATIONInventors: Toshiaki Okuno, Katsuyuki Inoue, Takeshi Fujiwara, Tomonori Seki
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Patent number: 8617964Abstract: A laser processing method for preventing particles from occurring from cut sections of chips obtained by cutting a silicon wafer is provided. An irradiation condition of laser light L for forming modified regions 77 to 712 is made different from an irradiation condition of laser light L for forming the modified regions 713 to 719 such as to correct the spherical aberration of laser light L in areas where the depth from the front face 3 of a silicon wafer 11 is 335 ?m to 525 ?m. Therefore, even when the silicon wafer 11 and a functional device layer 16 are cut into semiconductor chips from modified regions 71 to 719 acting as a cutting start point, twist hackles do not appear remarkably in the areas where the depth is 335 ?m to 525 ?m, whereby particles are hard to occur.Type: GrantFiled: December 1, 2011Date of Patent: December 31, 2013Assignee: Hamamatsu Photonics K.K.Inventors: Takeshi Sakamoto, Kenichi Muramatsu
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Patent number: 8617928Abstract: Provided is a dicing die-bonding film which is excellent in balance between retention of a semiconductor wafer upon dicing and releasability upon picking up. Disclosed is a dicing die-bonding film comprising a dicing film having a pressure-sensitive adhesive layer on a substrate material, and a die-bonding film formed on the pressure-sensitive adhesive layer, wherein the pressure-sensitive adhesive layer contains a polymer including an acrylic acid ester as a main monomer, 10 to 40 mol % of a hydroxyl group-containing monomer based on the acrylic acid ester, and 70 to 90 mol % of an isocyanate compound having a radical reactive carbon-carbon double bond based on the hydroxyl group-containing monomer, and is also cured by irradiation with ultraviolet rays under predetermined conditions after film formation on the substrate material, and wherein the die-bonding film contains an epoxy resin, and is also bonded on the pressure-sensitive adhesive layer after irradiation with ultraviolet rays.Type: GrantFiled: December 16, 2008Date of Patent: December 31, 2013Assignee: Nitto Denko CorporationInventors: Katsuhiko Kamiya, Takeshi Matsumura, Shuuhei Murata, Hironao Ootake
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Patent number: 8614139Abstract: The present invention provides a dicing film with a protecting film that enables to paste a dicing film to a semiconductor wafer without a shift in position while reducing a downtime. There is provided a dicing film with a protecting film in which a dicing film and a protecting film are laminated, wherein the difference between the transmittance of the protecting film and the transmittance of the dicing film with a protecting film at a portion of the dicing film where light for detecting a film transmits first is 20% or more in a wavelength of 600 to 700 nm.Type: GrantFiled: March 8, 2012Date of Patent: December 24, 2013Assignee: Nitto Denko CorporationInventors: Yuichiro Shishido, Takeshi Matsumura
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Publication number: 20130334680Abstract: A multi-chip modular wafer level package of a high voltage unit for an implantable cardiac defibrillator includes one or more high voltage (HV) component chips encapsulated with other components thereof in a polymer mold compound of a single reconstituted wafer, wherein all interconnect segments are preferably located on a single side of the wafer. To electrically couple a contact surface of each HV chip, located on a side of the chip opposite the interconnect side of the wafer, the reconstituted wafer may include conductive through polymer vias; alternately, either wire bonds or layers of conductive polymer are formed to couple the aforementioned contact surface to the corresponding interconnect, prior to encapsulation of the HV chips. In some cases one or more of the components encapsulated in the reconstituted wafer of the package are reconstituted chips.Type: ApplicationFiled: June 15, 2012Publication date: December 19, 2013Inventors: Mark R. Boone, Mohsen Askarinya, Randolph E. Crutchfield, Erik J. Herrmann, Mark S. Ricotta, Lejun Wang
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Patent number: 8609473Abstract: A method for fabricating a stackable integrated circuit layer and a device made from the method are disclosed. A stud bump is defined on the contact pad of an integrated circuit die and the stud-bumped die encapsulated in a potting material to define a potted assembly. A predetermined portion of the potting material is removed whereby a portion of the stud bump is exposed. One or more electrically conductive traces are defined on the layer surface and in electrical connection with the stud bump to reroute the integrated circuit contacts to predetermined locations on the layer to provide a stackable neolayer.Type: GrantFiled: October 12, 2011Date of Patent: December 17, 2013Assignee: ISC8 Inc.Inventors: Peter Lieu, James Yamaguchi, Randy Bindrup, W. Eric Boyd
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Publication number: 20130316499Abstract: A chip package and a fabrication method thereof are provided according to an embodiment of the invention. The chip package includes a semiconductor substrate containing a chip and having a device area and a peripheral bonding pad area. A plurality of conductive pads is disposed at the peripheral bonding pad area and a passivation layer is formed over the semiconductor substrate to expose the conductive pads. An insulating protective layer is formed on the passivation layer at the device area. A packaging layer is disposed over the insulating protective layer to expose the conductive pads and the passivation layer at the peripheral bonding pad area. The method includes forming an insulating protective layer to cover a plurality of conductive pads during a cutting process and removing the insulating protective layer on the conductive pads through an opening of a packaging layer.Type: ApplicationFiled: August 2, 2013Publication date: November 28, 2013Applicant: XINTEC INC.Inventors: Ching-Yu NI, Chia-Ming CHENG, Nan-Chun LIN
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Publication number: 20130313719Abstract: A method for manufacturing a chip package is provided. The method including: holding a carrier including a plurality of dies; forming a separation between the plurality of dies by removing from the carrier one or more portions of the carrier between the plurality of dies; forming an encapsulation material in the removed one or more portions between the plurality of dies; separating the dies through the encapsulation material.Type: ApplicationFiled: May 25, 2012Publication date: November 28, 2013Applicant: INFINEON TECHNOLOGIES AGInventors: Karl Adolf Dieter MAYER, Guenter TUTSCH, Horst THEUSS, Manfred ENGELHARDT, Joachim MAHLER
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Patent number: 8592853Abstract: A semiconductor light emitting element includes: a semiconductor layer; first electrodes arranged in a staggered array on an upper surface of the semiconductor layer; and a second electrode on a lower surface of the semiconductor layer. Each first electrode includes an external connection, a first elongated portion which extends from the external connection toward a central region of the upper surface of the semiconductor layer, and a second elongated portion which extends from the external connection to a near-edge region of the semiconductor layer. In addition, the first electrodes are arrayed so that a near-tip part of the first elongated portion of each first electrode is opposed to a near-tip part of the first elongated portion of each of an adjacent one or ones of the first electrodes in a direction in which the first electrodes arranged, on the central region of the semiconductor layer.Type: GrantFiled: August 25, 2011Date of Patent: November 26, 2013Assignee: Nichia CorporationInventors: Hidetoshi Tanaka, Keiji Emura
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Patent number: 8586415Abstract: A dicing/die-bonding film including a pressure-sensitive adhesive layer (2) on a supporting base material (1) and a die-bonding adhesive layer (3) on the pressure-sensitive adhesive layer (2), wherein a releasability in an interface between the pressure-sensitive adhesive layer (2) and the die-bonding adhesive layer (3) is different between an interface (A) corresponding to a work-attaching region (3a) in the die-bonding adhesive layer (3) and an interface (B) corresponding to a part or a whole of the other region (3b), and the releasability of the interface (A) is higher than the releasability of the interface (B). The dicing/die-bonding film is excellent in balance between retention in dicing a work and releasability in releasing its diced chipped work together with the die-bonding adhesive layer.Type: GrantFiled: December 14, 2011Date of Patent: November 19, 2013Assignee: Nitto Denko CorporationInventors: Takeshi Matsumura, Masaki Mizutani
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Patent number: 8586422Abstract: A semiconductor device is made by providing a semiconductor die having an optically active area, providing a leadframe or pre-molded laminated substrate having a plurality of contact pads and a light transmitting material disposed between the contact pads, attaching the semiconductor die to the leadframe so that the optically active area is aligned with the light transmitting material to provide a light transmission path to the optically active area, and disposing an underfill material between the semiconductor die and leadframe. The light transmitting material includes an elevated area to prevent the underfill material from blocking the light transmission path. The elevated area includes a dam surrounding the light transmission path, an adhesive ring, or the light transmission path itself can be the elevated area. An adhesive ring can be disposed on the dam. A filler material can be disposed between the light transmitting material and contact pads.Type: GrantFiled: March 13, 2012Date of Patent: November 19, 2013Assignee: STATS ChipPAC, Ltd.Inventors: Zigmund R Camacho, Henry D Bathan, Lionel Chien Hui Tay, Amel Senosa Trasporto
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Patent number: 8574961Abstract: A semiconductor device (10) is made by mounting the bottom surfaces (31, 44, 54) of a semiconductor die (14) and a lead (15, 17) on a tape (12) and over a hole (19) in the tape. A vacuum is drawn through the hole to secure the die in place when the lead's top surface (43) is wirebonded to a top surface (32) of the semiconductor die. A molding material (49) is formed to encapsulate the top surface of the semiconductor die and to expose its bottom surface.Type: GrantFiled: April 29, 2003Date of Patent: November 5, 2013Assignee: Semiconductor Components Industries, LLCInventors: James Howard Knapp, Jay A. Yoder, Harold G. Anderson
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Patent number: 8569108Abstract: A coating for a microelectronic device comprises a polymer film (131) containing a filler material (232). The polymer film has a thermal conductivity greater than 3 W/m·K and a thickness (133) that does not exceed 10 micrometers. The polymer film may be combined with a dicing tape (310) to form a treatment (300) that simplifies a manufacturing process for a microelectronic package (100) and may be used in order to manage a thermal profile of the microelectronic device.Type: GrantFiled: September 13, 2012Date of Patent: October 29, 2013Assignee: Intel CorporationInventors: Dingying Xu, Leonel R. Arana, Nachiket R. Raravikar, Mohit Mamodia, Rajasekaran Swaminathan, Rahul Manepalli
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Patent number: 8569877Abstract: Embodiments of the present invention are directed to metallic solderability preservation coating on connectors of semiconductor package to prevent oxide. Singulated semiconductor packages can have contaminants, such as oxides, on exposed metal areas of the connectors. Oxidation typically occurs on the exposed metal areas when the semiconductor packages are not stored in appropriate environments. Copper oxides prevent the connectors from soldering well. An anti-tarnish solution of the present invention is used to coat the connectors during sawing, after sawing, or both of a semiconductor array to preserve metallic solderability. The anti-tarnish solution is a metallic solution, which advantageously allows the semiconductor packages to not need be assembled immediately after fabrication.Type: GrantFiled: October 15, 2009Date of Patent: October 29, 2013Assignee: UTAC Thai LimitedInventors: Woraya Benjavasukul, Thipyaporn Somrubpornpinan, Panikan Charapaka