Combined With Electrical Device Not On Insulating Substrate Or Layer Patents (Class 438/152)
  • Publication number: 20080067517
    Abstract: A semiconductor device includes a semiconductor substrate including a first region having a cell region and a second region having a peripheral circuit region, first transistors on the semiconductor substrate, a first protective layer covering the first transistors, a first insulation layer on the first protective layer, a semiconductor pattern on the first insulation layer in the first region, second transistors on the semiconductor pattern, a second protective layer covering the second transistors, the second protective layer having a thickness greater than that of the first protective layer, and a second insulation layer on the second protective layer and the first insulation layer of the second region.
    Type: Application
    Filed: January 19, 2007
    Publication date: March 20, 2008
    Inventors: Young-Chul Jang, Won-Seok Cho, Jae-Hoon Jang, Soon-Moon Jung, Yang-Soo Son, Min-Sung Song
  • Patent number: 7326603
    Abstract: A semiconductor device includes a semiconductor substrate that has an oxide film selectively formed on a part thereof; a semiconductor layer that is formed on the oxide film by epitaxial growth; a first gate electrode that is formed on the semiconductor layer; first source/drain layers that are formed on the semiconductor layer so as to be disposed at both sides of the first gate electrode, respectively; a second gate electrode that is formed on the semiconductor substrate; and second source/drain layers that are formed on the semiconductor substrate so as to be disposed at both sides of the second gate electrode, respectively.
    Type: Grant
    Filed: August 24, 2005
    Date of Patent: February 5, 2008
    Assignee: Seiko Epson Corporation
    Inventor: Kei Kanemoto
  • Patent number: 7319378
    Abstract: A comprehensive vehicle anti-theft and alarm system that immediately notifies a vehicle owner when a vehicle is being tampered with. Notification is accomplished via wireless signal to the owners' cell phone, personal digital assistant (PDA), laptop or desktop computer, or other electronic device, or to the police. The signal can be used to provide an audible, inaudible (e.g., vibratory), or visual alert, depending upon the mode the owner has chosen. In addition, the system transmits a photograph or image of the person tampering with the vehicle. The transmitted image(s) may be periodically refreshed. In alternate embodiments of the system, realtime streaming video may be transmitted. The anti-theft system typically includes a GPS receiver that tracks the movements of the vehicle in the event it is actually stolen. Finally, the system includes a communications link that allows the owner to speak directly to the unauthorized occupant of the vehicle.
    Type: Grant
    Filed: April 12, 2005
    Date of Patent: January 15, 2008
    Inventors: Bobbie Thompson, Markeith Boyd, Shirley Lorraine Boyd
  • Publication number: 20070228377
    Abstract: By forming bulk-like transistors in sensitive RAM areas of otherwise SOI-based CMOS circuits, a significant savings in valuable chip area may be achieved since the RAM areas may be formed on the basis of a bulk transistor configuration, thereby eliminating hysteresis effects that may typically be taken into consideration by providing transistors of increased transistor width or by providing body ties. Hence, the benefit of high switching speed may be maintained in speed-critical circuitry, such as CPU cores, while at the same time the RAM circuit may be formed in a highly space-efficient manner.
    Type: Application
    Filed: November 17, 2006
    Publication date: October 4, 2007
    Inventors: Karsten Wieczorek, Manfred Horstmann, Thomas Feudel, Thomas Heller
  • Publication number: 20070181880
    Abstract: A semiconductor device includes a conductive layer formed on a semiconductor substrate. An insulation layer is formed on the conductive layer and includes an opening defined therein that exposes the conductive layer. A semiconductor pattern is formed on the insulation layer and is electrically connected to the conductive layer through the opening. A transistor is formed on the semiconductor pattern.
    Type: Application
    Filed: February 8, 2007
    Publication date: August 9, 2007
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Sung-Bong KIM
  • Patent number: 7253040
    Abstract: An insulating substrate is bonded to a monocrystalline Si substrate that includes a monocrystalline Si thin film transistor and a hydrogen ion implanted portion. After depositing an amorphous Si thin film, the amorphous Si thin film is modified into a polycrystalline Si thin film by irradiation of the excimer laser. In laser irradiation, the irradiation of the laser beam on the monocrystalline Si thin film transistor is blocked either by inserting a mask in part of the optical path of the laser beam, or by irradiating the laser beam before unnecessary portions of the monocrystalline Si substrate is detached. In this way, the irradiation of the laser beam for forming the polycrystalline Si thin film will not damage the monocrystalline Si thin film transistor in a semiconductor device in which the monocrystalline Si thin film transistor, which has been transferred, and the polycrystalline Si thin film transistor, which has been formed on the insulating substrate, are formed on the insulating substrate.
    Type: Grant
    Filed: August 4, 2004
    Date of Patent: August 7, 2007
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Takashi Itoga, Yutaka Takafuji, Yoshihiro Yamamoto
  • Patent number: 7132689
    Abstract: A liquid crystal display having an applied horizontal electric field comprising: a gate line; a common line substantially parallel to the gate line; a data line arranged to cross the gate line and the common line to define a pixel area; a thin film transistor formed at each crossing of the gate line and the data line; a common electrode formed in the pixel area and connected to the common line; a pixel electrode connected to the thin film transistor, wherein the horizontal electric field is formed between the pixel electrode and the common electrode in the pixel area; a gate pad formed with at least one conductive layer included in the gate line; a data pad formed with at least one conductive layer included in the data line; a common pad formed with at least one conductive layer included in the common line; a passivation film to expose at least one of the gate pad, the data pad and the common pad; and a driving integrated circuit mounted on a substrate to connect directly to one of the gate pad and the data p
    Type: Grant
    Filed: April 2, 2004
    Date of Patent: November 7, 2006
    Assignee: LG.Philips LCD Co., Ltd
    Inventors: Byung Chul Ahn, Byoung Ho Lim
  • Patent number: 7118945
    Abstract: A method of forming an insulating layer including preparing a substrate and depositing an insulating layer on the substrate such that density of a top portion of the insulating layer is different from that of a bottom portion of the insulating layer.
    Type: Grant
    Filed: November 13, 2002
    Date of Patent: October 10, 2006
    Assignee: LG. Philips LCD Co., Ltd.
    Inventors: Eui Hoon Hwang, Chan Il Park
  • Patent number: 7115904
    Abstract: To provide an organic electroluminescent device, a manufacturing method thereof, and an electronic apparatus, which can reduce wiring line resistance, lower power consumption, suppress heating and uniformize brightness. There is provided a method of manufacturing an organic electroluminescent device comprising, on a first electrode, a light-emitting functional layer surrounded by a first partition and a second partition. The method comprises a step of sequentially film-forming a first electrode material and a first partition material on an interlayer insulating film, a step of patterning the first electrode material and the first partition material with a mask to form the first electrode and the first partition in the same shape, and a step of forming the second partition on the interlayer insulating film and the first partition material.
    Type: Grant
    Filed: December 17, 2004
    Date of Patent: October 3, 2006
    Assignee: Seiko Epson Corporation
    Inventors: Yukimasa Ishida, Ryoichi Nozawa
  • Patent number: 7115453
    Abstract: Provided is a technique of effectively removing a metallic element that has catalytic action in terms of the crystallization of a semiconductor film and remains in a semiconductor film obtained using the metallic element. With the technique of the present invention, to remove a catalytic element used to crystallize a semiconductor film having an amorphous structure, gettering is completed by forming a region or a semiconductor film, to which a rare gas element is added, and by having the catalytic element move to the formed region or semiconductor film.
    Type: Grant
    Filed: January 28, 2002
    Date of Patent: October 3, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Osamu Nakamura, Masayuki Kajiwara, Shunpei Yamazaki, Hideto Ohnuma
  • Patent number: 7091073
    Abstract: In contrast to conventional semiconductor components formed on a silicon substrate, the present invention aims at providing a transistor component functioning as a semiconductor component by being placed on an insulating substrate made of plastic and the like. The transistor component according to the present invention comprises a silicon grain 100A with a drain area 402 and a source area 401 formed via a channel area 403, an oxidation film 101 covering the surface of the silicon grain 100A, a gate electrode 300A connecting with the channel area 403 via the oxidation film 101, and a drain electrode 200A electrically connecting with the drain area 402, and a source electrode 400A electrically connecting with the source area 401.
    Type: Grant
    Filed: June 5, 2003
    Date of Patent: August 15, 2006
    Assignee: Seiko Epson Corporation
    Inventor: Satoshi Inoue
  • Patent number: 7078766
    Abstract: A transistor structure fabricated on thin SOI is disclosed. The transistor on thin SOI has gated n+ and p+ junctions, which serve as switches turning on and off GIDL current on the surface of the junction. GIDL current will flow into the floating body and clamp its potential and can thus serve as an output node. The transistor can function as an inverter. The body (either n-well or p-well) is isolated from the n+ or P+ “GIDL switches” by a region of opposite doping type, i.e., p-base and n-base. The basic building blocks of logic circuits, e.g., NAND and NOR gates, are easily implemented with such transistors on thin SOI wafers. These new transistors on thin SOI only need contacts and metal line connections on the VCC and VSS. The connection of fan-outs (between the output and input) can be implemented by capacitor coupling. The transistor structure and operation is useful for high-performance, low-voltage, and low-power VLSI circuits on SOI wafers.
    Type: Grant
    Filed: May 24, 2001
    Date of Patent: July 18, 2006
    Assignee: Taiwan Semiconductor Mfg. Corp.
    Inventor: Min-hwa Chi
  • Patent number: 7078275
    Abstract: An object is to provide a semiconductor device manufacturing method which makes possible a thin film transistor which is little affected by crystal grain boundaries, even when the channel width of the thin film transistor is made larger than the crystal grains of the semiconductor material. To this end, a thin film transistor of this invention comprises a gate electrode 22, source region 24, drain region 25, and channel formation region 26. The silicon film used in forming the active region comprises a plurality of substantially single-crystal silicon crystal grains, and regions including crystal grain boundaries which exist in the longitudinal direction of the channel formation region 26 (the direction L in the drawings) are removed. By this means, crystal grain boundaries are prevented from being included in each channel formation region 26, and the effective channel width can be increased.
    Type: Grant
    Filed: April 11, 2003
    Date of Patent: July 18, 2006
    Assignee: Seiko Epson Corporation
    Inventors: Yasushi Hiroshima, Mitsutoshi Miyasaka
  • Patent number: 7075002
    Abstract: A method of manufacturing a thin-film solar cell, comprising the steps of: forming an amorphous silicon film on a substrate; placing a metal element that accelerates the crystallization of silicon in contact with the surface of the amorphous silicon film; subjecting the amorphous silicon film to a heat treatment to obtain a crystalline silicon film; depositing a silicon film to which phosphorus has been added in contact with the crystalline silicon film; and subjecting the crystalline silicon film and the silicon film to which phosphorus has been added to a heat treatment to getter the metal element from the crystalline film.
    Type: Grant
    Filed: August 6, 1997
    Date of Patent: July 11, 2006
    Assignee: Semiconductor Energy Laboratory Company, Ltd.
    Inventors: Shunpei Yamazaki, Yasuyuki Arai
  • Patent number: 7075155
    Abstract: A structure for protecting a semiconductor circuit from electrostatic discharge is provided. The structure comprises a semiconductor substrate of a first conductivity type having two wells of a second conductivity type spaced laterally apart. The wells each comprise a first portion having a first concentration of an impurity of the second conductivity type and a second portion comprising source and drain regions having a second concentration of an impurity of the second conductivity type. The second concentration is greater than the first concentration. The wells are implanted in the substrate of a silicon-on-insulator semiconductor device. Conductive plugs extend through the silicon and insulator layers and make electrical contact with the wells, allowing the dissipation of excess current and heat into the semiconductor substrate.
    Type: Grant
    Filed: June 14, 2004
    Date of Patent: July 11, 2006
    Assignee: Advanced Micro Devices, Inc.
    Inventor: Mario M. Pelella
  • Patent number: 7071039
    Abstract: A semiconductor device includes a first semiconductor region having a buried oxide layer formed therein, a second semiconductor region in which the buried oxide layer does not exist, a trench formed to such a depth as to reach at least the buried oxide layer in a boundary portion between the first and second semiconductor regions, and an isolation insulating layer buried in the trench.
    Type: Grant
    Filed: February 10, 2003
    Date of Patent: July 4, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hajime Nagano, Takashi Yamada, Tsutomu Sato, Ichiro Mizushima, Osamu Fujii
  • Patent number: 7064018
    Abstract: A method of forming a semiconductor device includes fabricating digital circuits comprising a programmable logic circuit on a substrate; selectively fabricating either a memory circuit or a conductive pattern substantially above the digital circuits to program said programmable logic circuit; and fabricating a common interconnect and routing layer substantially above the digital circuits and memory circuits to connect digital circuits and one of the memory circuit or the conductive pattern.
    Type: Grant
    Filed: May 17, 2004
    Date of Patent: June 20, 2006
    Assignee: Viciciv Technology
    Inventor: Raminda Udaya Madurawe
  • Patent number: 7052941
    Abstract: Vertically oriented semiconductor devices may be added to a separately fabricated substrate that includes electrical devices and/or interconnect. The plurality of vertically oriented semiconductor devices are physically separated from each other, and are not disposed within the same semiconductor body, or semiconductor substrate. The plurality of vertically oriented semiconductor devices may be added to the separately fabricated substrate as a thin layer including several doped semiconductor regions which, subsequent to attachment, are etched to produce individual doped stack structures. Alternatively, the plurality of vertically oriented semiconductor devices may be fabricated prior to attachment to the separately fabricated substrate. The doped stack structures may form the basis for diodes, capacitors, n-MOSFETs, p-MOSFETs, bipolar transistors, and floating gate transistors.
    Type: Grant
    Filed: June 21, 2004
    Date of Patent: May 30, 2006
    Inventor: Sang-Yun Lee
  • Patent number: 7045413
    Abstract: Methods of manufacturing a semiconductor integrated circuit using selective disposable spacer technology and semiconductor integrated circuits manufactured thereby: The method includes forming a plurality of gate patterns on a semiconductor substrate. Gap regions between the gate patterns include first spaces having a first width and second spaces having a second width greater than the first width. Spacers are formed on sidewalls of the second spaces, and spacer layer patterns filling the first spaces are also formed together with the spacers. The spacers are selectively removed to expose the sidewalls of the first spaces. As a result, the semiconductor integrated circuit includes wide spaces enlarged by the removal of the spacers and narrow and deep spaces filled with the spacer layer patterns.
    Type: Grant
    Filed: February 5, 2004
    Date of Patent: May 16, 2006
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sang-Eun Lee, Yun-Heub Song
  • Patent number: 7022557
    Abstract: A thin film transistor array substrate, and its manufacturing method, that is made using a three-round mask process. Gate patterns, each of which includes a gate line consisting of a transparent metal pattern and a gate metal pattern, a gate electrode, a lower gate pad, a lower data pad, and a pixel electrode are formed using a first mask process. A second mask process forms a gate insulating pattern and a semiconductor pattern. A third mask process forms source and drain patterns, each of which includes a data line, a source electrode, a drain, electrode, an upper gate pad and an upper data pad. Additionally, the gate metal pattern on an upper portion of the pixel electrode is removed.
    Type: Grant
    Filed: September 29, 2004
    Date of Patent: April 4, 2006
    Assignee: LG.Philips LCD Co., Ltd.
    Inventors: Woong Kwon Kim, Heung Lyul Cho, Seung Hee Nam
  • Patent number: 6977408
    Abstract: An EEPROM device exhibiting high saturation current and low signal propagation delay and a process for fabricating the device that includes the formation of refractory metal silicide regions in the source and the drain regions and the gate electrode of an MOS transistor within an EEPROM memory cell. A floating-gate protect layer is formed over the floating-gate electrode and a relatively thick cap oxide layer is formed to overlie the floating-gate protect layer and the source and drain regions and gate electrode of the MOS transistor. A doped oxide layer is formed to overlie the cap oxide layer. The cap oxide layer is formed to a thickness sufficient to create strain in the channel region of the MOS transistor, while not having a thickness that could cause poor data retention in the EEPROM memory cell.
    Type: Grant
    Filed: June 30, 2003
    Date of Patent: December 20, 2005
    Assignee: Lattice Semiconductor Corp.
    Inventors: Chih-Chuan Lin, Sunil D. Mehta
  • Patent number: 6972218
    Abstract: The present invention relates to a method of fabricating a semiconductor device that allows assuredly ion implanting an impurity to a support substrate and a semiconductor device that can rapidly operate an electric potential of the support substrate. According to the present fabricating method, an impurity is ion implanted over an entire surface of a support substrate under a buried oxide film; accordingly, the impurity can be delivered to other than a bottom portion of a contact hole. Accordingly, a low electric resistance layer extending from a lower portion of an element formation region to a lower portion of an element isolation region can be formed. As a result, an electric current can be flowed much from a contact to the support substrate at the lower portion of the element formation region.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: December 6, 2005
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Koichi Kishiro
  • Patent number: 6972220
    Abstract: An anti-fuse structure that can be programmed at low voltage and current and which potentially consumes very little chip spaces and can be formed interstitially between elements spaced by a minimum lithographic feature size is formed on a composite substrate such as a silicon-on-insulator wafer by etching a contact through an insulator to a support semiconductor layer, preferably in combination with formation of a capacitor-like structure reaching to or into the support layer. The anti-fuse may be programmed either by the selected location of conductor formation and/or damaging a dielectric of the capacitor-like structure. An insulating collar is used to surround a portion of either the conductor or the capacitor-like structure to confine damage to the desired location. Heating effects voltage and noise due to programming currents are effectively isolated to the bulk silicon layer, permitting programming during normal operation of the device.
    Type: Grant
    Filed: February 12, 2003
    Date of Patent: December 6, 2005
    Assignee: International Business Machines Corporation
    Inventors: Claude L. Bertin, Ramachandra Divakaruni, Russell J. Houghton, Jack A. Mandelman, William R. Tonti
  • Patent number: 6967129
    Abstract: This invention provides a semiconductor device having high operation performance and high reliability. An LDD region 707 overlapping with a gate wiring is arranged in an n-channel TFT 802 forming a driving circuit, and a TFT structure highly resistant to hot carrier injection is achieved. LDD regions 717, 718, 719 and 720 not overlapping with a gate wiring are arranged in an n-channel TFT 804 forming a pixel unit. As a result, a TFT structure having a small OFF current value is achieved. In this instance, an element belonging to the Group 15 of the Periodic Table exists in a higher concentration in the LDD region 707 than in the LDD regions 717, 718, 719 and 720.
    Type: Grant
    Filed: June 9, 2003
    Date of Patent: November 22, 2005
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Murakami, Jun Koyama, Yukio Tanaka, Hidehito Kitakado, Hideto Ohnuma
  • Patent number: 6943067
    Abstract: The present invention describes a process for three-dimensional integration of semiconductor devices and a resulting device. The process combines low temperature wafer bonding methods with backside/substrate contact processing methods, preferably with silicon on insulator devices. The present invention utilizes, in an inventive fashion, low temperature bonding processes used for bonded silicon on insulator (SOI) wafer technology. This low temperature bonding technology is adopted for stacking several silicon layers on top of each other and building active transistors and other circuit elements in each one. The back-side/substrate contact processing methods allow the interconnection of the bonded SOI layers.
    Type: Grant
    Filed: September 30, 2002
    Date of Patent: September 13, 2005
    Assignee: Advanced Micro Devices, Inc.
    Inventor: David Greenlaw
  • Patent number: 6940130
    Abstract: A body contact structure utilizing an insulating structure between the body contact portion of the active area and the transistor portion of the active area is disclosed. In one embodiment, the present invention substitutes an insulator for at least a portion of the gate layer in the regions between the transistor and the body contact. In another embodiment, a portion of the gate layer is removed and replaced with an insulative layer in regions between the transistor and the body contact. In still another embodiment, the insulative structure is formed by forming multiple layers of gate dielectric between the gate and the body in regions between the transistor and the body contact. The body contact produced by these methods adds no significant gate capacitance to the gate.
    Type: Grant
    Filed: October 16, 2003
    Date of Patent: September 6, 2005
    Assignee: International Business Machines Corporation
    Inventors: Andres Bryant, Peter E. Cottrell, John J. Ellis-Monaghan, Robert J. Gauthier, Jr., Edward J. Nowak, Jed H. Rankin, Fariborz Assaderaghi
  • Patent number: 6936847
    Abstract: Thin film transistors for a display device each include a semiconductor layer made of polysilicon having a channel region, drain and source regions at both sides of the channel region and doped with impurity of high concentration, and an LDD region arranged either between the drain region and the channel region or between the source region and the channel region and doped with impurity of low concentration. An insulation film is formed over an upper surface of the semiconductor layer and has a film thickness which decreases in a step-like manner as it extends to the channel region, the LDD region, the drain and the source regions; and a gate electrode is formed over the channel region through the insulation film. Such a constitution can enhance the numerical aperture and can suppress the magnitude of stepped portions in a periphery of the thin film transistor.
    Type: Grant
    Filed: April 8, 2003
    Date of Patent: August 30, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Hideo Tanabe, Shigeo Shimomura, Makoto Ohkura, Masaaki Kurita, Yasukazu Kimura, Takao Nakamura
  • Patent number: 6927105
    Abstract: A thin film transistor array substrate, and manufacturing methods thereof, having a dual data link structure comprised of a first data link made from a gate metal layer and of a second data link made from a transparent conductive layer. A gate pad made from the gate metal layer electrically connects directly with the first data link, and to the second data link via a data pad protection electrode that passes through contact holes. The data pad protection electrode makes surface connections to the data pad. A data line is electrically connected via a contact electrode to the first data link. The data line and the data pad are formed from different metal layers. The data pad is protected by a gate insulating layer. The contact electrode is extended from the second data link.
    Type: Grant
    Filed: August 20, 2003
    Date of Patent: August 9, 2005
    Assignee: LG.Philips LCD Co., Ltd.
    Inventor: Hae Jin Yun
  • Patent number: 6917074
    Abstract: A multiplexer structure includes a semiconductor substrate having a shared diffusion region. A first gate having a first finger and a second finger is disposed on the shared diffusion region, and a second gate having a first finger and a second finger is disposed on the shared diffusion region. A contact for a first input node is disposed on the shared diffusion region between the first and second fingers of the first gate, and a contact for a second input node is disposed on the shared diffusion region between the first and second fingers of the second gate. A contact for a collector node is disposed on the shared diffusion region between the first and second gates. In operation, closing the first gate electrically connects the first input node and the collector node, and closing the second gate electrically connects the second input node and the collector node.
    Type: Grant
    Filed: July 23, 2003
    Date of Patent: July 12, 2005
    Assignee: Altera Corporation
    Inventor: David Lewis
  • Patent number: 6902960
    Abstract: An oxide interface and a method for fabricating an oxide interface are provided. The method comprises forming a silicon layer and an oxide layer overlying the silicon layer. The oxide layer is formed at a temperature of less than 400° C. using an inductively coupled plasma source. In some aspects of the method, the oxide layer is more than 20 nanometers (nm) thick and has a refractive index between 1.45 and 1.47. In some aspects of the method, the oxide layer is formed by plasma oxidizing the silicon layer, producing plasma oxide at a rate of up to approximately 4.4 nm per minute (after one minute). In some aspects of the method, a high-density plasma enhanced chemical vapor deposition (HD-PECVD) process is used to form the oxide layer. In some aspects of the method, the silicon and oxide layers are incorporated into a thin film transistor.
    Type: Grant
    Filed: November 14, 2002
    Date of Patent: June 7, 2005
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Pooran Chandra Joshi, John W. Hartzell, Masahiro Adachi, Yoshi Ono
  • Patent number: 6884668
    Abstract: To provide devices relating to a manufacturing method for a semiconductor device using a laser crystallization method, which is capable of reducing a cost involved in a design change, preventing a grain boundary from developing in a channel formation region of a TFT, and preventing a remarkable reduction in mobility of the TFT, a decrease in an ON current, and an increase in an OFF current due to the grain boundary and to a semiconductor device formed by using the manufacturing method. In a semiconductor device according to the present invention, among a plurality of TFTs formed on a base film, some TFTs are electrically connected to form logic elements. The plurality of logic elements are used to form a circuit. The base film has a plurality of projective portions having a rectangular or stripe shape.
    Type: Grant
    Filed: February 21, 2003
    Date of Patent: April 26, 2005
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Atsuo Isobe, Tamae Takano, Hidekazu Miyairi
  • Patent number: 6875645
    Abstract: A method of fabricating a pixel structure. A gate is formed over the substrate and then an insulation layer is formed over the substrate covering the gate. A channel layer is formed over the insulation layer above the gate. A pair of source/drain terminals is formed over the channel layer, thereby producing a thin film transistor on the substrate. A passivation layer is formed over the substrate covering the thin film transistor. A photoresist layer is formed over the passivation layer. Using the gate, the source/drain terminals as a mask, a back exposure process and a photoresist development are sequentially conducted to pattern the photoresist layer. Using the patterned photoresist layer as an etching mask, the passivation layer and the insulation layer are etched to expose a sidewall of the drain terminal. The photoresist layer is removed.
    Type: Grant
    Filed: August 29, 2003
    Date of Patent: April 5, 2005
    Assignee: Au Optronics Corporation
    Inventor: Han-Chung Lai
  • Patent number: 6858448
    Abstract: A semiconductor device evaluation method includes the steps of measuring a total injected electron quantity before an insulating film causes a dielectric breakdown and obtaining the ratio between the total injected electron quantity and a total injected electron quantity before retention degradation is caused. In this method, using the ratio and the total injected electron quantity, the total injected electron quantity before the retention degradation is caused is calculated.
    Type: Grant
    Filed: June 5, 2002
    Date of Patent: February 22, 2005
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventor: Kenji Okada
  • Patent number: 6853037
    Abstract: A semiconductor device includes a relatively lower threshold level MOSFET and relatively higher threshold level MOSFETs of n- and p-types. The higher threshold level MOSFETs have gate oxide films which is thicker than that of the lower threshold level MOSFET and, in addition, the gate oxide film of the higher threshold level MOSFET of n-type is thicker than that of the higher threshold level MOSFET of p-type. To fabricate the semiconductor device, implantation treatments of fluorine ions are carried out before the gate oxide treatment. Specifically, as for the higher threshold level MOSFETs of n- and p-types, implantation treatments of fluorine ions are independently carried out with unique implantation conditions.
    Type: Grant
    Filed: June 4, 2001
    Date of Patent: February 8, 2005
    Assignee: NEC Electronics Corporation
    Inventors: Tomohiko Kudo, Naohiko Kimizuka
  • Patent number: 6844223
    Abstract: The present invention relates to a highly integrated SOI semiconductor device and a method for fabricating the SOI semiconductor device by reducing a distance between diodes or well resistors without any reduction in insulating characteristics. The device includes a first conductivity type semiconductor substrate and a surface silicon layer formed by inserting an insulating layer on the semiconductor substrate. A trench is formed by etching a predetermined portion of surface silicon layer, insulating layer and substrate to expose a part of the semiconductor substrate to be used for an element separating region, and a STI is formed in the trench. A transistor is constructed on the surface silicon layer surrounded by the insulating layer and STI with a gate electrode being positioned at the center thereof and with source/drain region being formed in the surface silicon layer of both edges of the gate electrode for enabling its bottom part to be in contact with the insulating layer.
    Type: Grant
    Filed: December 17, 2003
    Date of Patent: January 18, 2005
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young-Gun Ko, Byung-Sun Kim
  • Patent number: 6838322
    Abstract: A method for forming a polysilicon FinFET (10) or other thin film transistor structure includes forming an insulative layer (12) over a semiconductor substrate (14). An amorphous silicon layer (32) forms over the insulative layer (12). A silicon germanium seed layer (44) forms in association with the amorphous silicon layer (32) for controlling silicon grain growth. The polysilicon layer arises from annealing the amorphous silicon layer (32). During the annealing step, silicon germanium seed layer (44), together with silicon germanium layer (34), catalyzes silicon recrystallization to promote growing larger crystalline grains, as well as fewer grain boundaries within the resulting polysilicon layer. Source (16), drain (18), and channel (20) regions are formed within the polysilicon layer. A double-gated region (24) forms in association with source (16), drain (18), and channel (20) to produce polysilicon FinFET (10).
    Type: Grant
    Filed: May 1, 2003
    Date of Patent: January 4, 2005
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Daniel T. Pham, Alexander L. Barr, Leo Mathew, Bich-Yen Nguyen, Anne M. Vandooren, Ted R. White
  • Patent number: 6835608
    Abstract: A method for crystallizing an amorphous film by doping phosphorus and using FE-MIC, and method for fabrication an LCD by using the same. The method for crystallizing an amorphous film includes forming an amorphous film containing an impurity on a substrate, forming a metal layer on the amorphous film, heat treating the amorphous film, and applying an electric field to the amorphous film.
    Type: Grant
    Filed: July 8, 2002
    Date of Patent: December 28, 2004
    Assignee: LG. Philips LCD Co., Ltd.
    Inventors: Jin Jang, Kyung Ho Kim
  • Patent number: 6835629
    Abstract: Integrated circuit including a power component with vertical current flow and at least one low or medium voltage component, the at least one low or medium voltage component formed in a first semiconductor layer separated from a second semiconductor layer by an insulating material layer. The power component with vertical current flow is formed in the second semiconductor layer, and excavations are formed in the insulating material layer which extend from a free surface of the first semiconductor layer to the second semiconductor layer, said excavations having lateral walls of insulating material and being filled up with a conductor material in order to electrically contact active regions of the power component in the second semiconductor layer by electrodes placed on the free surface of the first semiconductor layer.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: December 28, 2004
    Assignee: STMicroelectronics S.r.l.
    Inventor: Piero Fallica
  • Publication number: 20040253773
    Abstract: A silicon on insulator shaped structure formed to reduce floating body effect comprises a T-shaped active structure and a body contact for back bias. Etching a T-shape through two layers of oxide will form the T-shaped active areas. A back bias is formed when a metal line is dropped through the SOI structure and reaches a contact plug. This contact plug is doped with N+ or P+ dopant and is embedded in a Si substrate. The T-active shaped structure is used to reduce the short channel effects and junction capacitance that normally hinder the effectiveness of bulk transistors. The back bias is used as a conduit for generated holes to leave the SOI transistor area thus greatly reducing the floating effects generally associated with SOI structures.
    Type: Application
    Filed: June 16, 2003
    Publication date: December 16, 2004
    Inventor: Woo-Tag Kang
  • Publication number: 20040235226
    Abstract: An electrical interconnection method includes: a) providing two conductive layers separated by an insulating material on a semiconductor wafer; b) etching the conductive layers and insulating material to define and outwardly expose a sidewall of each conductive layer; c) depositing an electrically conductive material over the etched conductive layers and their respective sidewalls; and d) anisotropically etching the conductive material to define an electrically conductive sidewall link electrically interconnecting the two conductive layers. Such is utilizable to make thin film transistors and other circuitry.
    Type: Application
    Filed: June 16, 2004
    Publication date: November 25, 2004
    Inventors: Charles H. Dennison, Monte Manning
  • Patent number: 6821828
    Abstract: A technique of reducing fluctuation between elements is provided in which a semiconductor film having a crystal structure is obtained by using a metal element that accelerates crystallization of a semiconductor film and then the metal element remaining in the film is removed effectively. A barrier layer is formed on a semiconductor film having a crystal structure by plasma CVD from monosilane and nitrous oxide as material gas. In a step of forming a gettering site, a semiconductor film having an amorphous structure and containing a high concentration of noble gas element, specifically, 1×1020 to 1×1021 /cm3, is formed by plasma CVD. The film is typically an amorphous silicon film. Then gettering is conducted.
    Type: Grant
    Filed: September 24, 2002
    Date of Patent: November 23, 2004
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Mitsuhiro Ichijo, Taketomi Asami, Noriyoshi Suzuki
  • Publication number: 20040227189
    Abstract: A semiconductor device including: a cell transistor including: a pair of source and drain regions formed in a surface portion of a silicon substrate so as to have a predetermined space therebetween; a channel region sandwiched by the source and drain regions; a gate formed above the channel region with a gate dielectric film being formed therebetween; and a silicon plug formed on the silicon substrate, the silicon plug electrically contacting the source and drain regions, an upper portion of the silicon plug being a first self-aligned silicide portion.
    Type: Application
    Filed: February 27, 2004
    Publication date: November 18, 2004
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Takeshi Kajiyama
  • Patent number: 6818487
    Abstract: A semiconductor device is presented which includes a self-aligned, planarized thin-film transistor which can be used in various integrated circuit devices, such as static random access memory (SRAM) cells. The semiconductor device has a first field-effect transistor and a second field-effect transistor. The second field-effect transistor overlies the first field-effect transistor, and the first field-effect transistor and the second field-effect transistor share a common gate. The second field-effect transistor includes a source and a drain which are self-aligned to the shared gate in a layer of planarized semiconductor material above the first field-effect transistor. In one embodiment, the second field-effect transistor is a thin-film transistor, and the shared gate has a U-shape wrap-around configuration at a body of the thin-film transistor.
    Type: Grant
    Filed: July 31, 2003
    Date of Patent: November 16, 2004
    Assignee: International Business Machines Corporation
    Inventors: Louis L. Hsu, Jack Allan Mandelman, William Robert Tonti, Li-Kong Wang
  • Patent number: 6808966
    Abstract: This invention provides a semiconductor device having high operation performance and high reliability. An LDD region 707 overlapping with a gate wiring is arranged in an n-channel TFT 802 forming a driving circuit, and a TFT structure highly resistant to hot carrier injection is achieved. LDD regions 717, 718, 719 and 720 not overlapping with a gate wiring are arranged in an n-channel TFT 804 forming a pixel unit. As a result, a TFT structure having a small OFF current value is achieved. In this instance, an element belonging to the Group 15 of the Periodic Table exists in a higher concentration in the LDD region 707 than in the LDD regions 717, 718, 719 and 720.
    Type: Grant
    Filed: June 9, 2003
    Date of Patent: October 26, 2004
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Murakami, Jun Koyama, Yukio Tanaka, Hidehito Kitakado, Hideto Ohnuma
  • Publication number: 20040195574
    Abstract: A liquid crystal display having an applied horizontal electric field comprising: a gate line; a common line substantially parallel to the gate line; a data line arranged to cross the gate line and the common line to define a pixel area; a thin film transistor formed at each crossing of the gate line and the data line; a common electrode formed in the pixel area and connected to the common line; a pixel electrode connected to the thin film transistor, wherein the horizontal electric field is formed between the pixel electrode and the common electrode in the pixel area; a gate pad formed with at least one conductive layer included in the gate line; a data pad formed with at least one conductive layer included in the data line; a common pad formed with at least one conductive layer included in the common line; a passivation film to expose at least one of the gate pad, the data pad and the common pad; and a driving integrated circuit mounted on a substrate to connect directly to one of the gate pad and the data p
    Type: Application
    Filed: April 2, 2004
    Publication date: October 7, 2004
    Inventors: Byung Chul Ahn, Byoung Ho Lim
  • Patent number: 6797548
    Abstract: A method of fabricating silicon TFTs (thin-film transistors) is disclosed. The method comprises a crystallization step by laser irradiation effected after the completion of the device structure. First, amorphous silicon TFTs are fabricated. In each of the TFTs, the channel formation region, the source and drain regions are exposed to laser radiation illuminated from above or below the substrate. Then, the laser radiation is illuminated to crystallize and activate the channel formation region, and source and drain regions. After the completion of the device structure, various electrical characteristics of the TFTs are controlled. Also, the amorphous TFTs can be changed to polysilicon TFTs.
    Type: Grant
    Filed: December 11, 2001
    Date of Patent: September 28, 2004
    Assignee: Semiconductor Energy Laboratory Co., Inc.
    Inventors: Hongyong Zhang, Naoto Kusumoto
  • Patent number: 6794231
    Abstract: A liquid crystal display panel (and a method for manufacturing the liquid crystal display panel) includes a gate line and a signal line intersecting the gate line at an intersection portion where the gate line and the signal line intersect each other. The gate line includes at least two conductive portions and at least one opening portion on the intersection portion.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: September 21, 2004
    Assignee: International Business Machines Corporation
    Inventors: Osamu Tokuhiro, Hiroyuki Ueda
  • Publication number: 20040173851
    Abstract: In a semiconductor device having a semiconductor element having a plurality of SOI-Si layers, the height of element isolation regions from the surface of the semiconductor substrate are substantially equal to each other. Alternatively, the element isolation regions are formed at the equal height on the semiconductor substrate and then a plurality of SOI-Si layers appropriately different in thickness are formed. In this manner, it is possible to obtain element isolation regions having substantially the same height from the semiconductor substrate and desired element regions having SOI-Si layers different in height. The thickness of a single crystalline silicon film (SOI-Si layer) may be appropriately changed by another method which includes depositing an amorphous silicon film and applying a heat processing to form an epi layer, and removing an unnecessary portion.
    Type: Application
    Filed: March 24, 2004
    Publication date: September 9, 2004
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Yukihiro Ushiku
  • Publication number: 20040173850
    Abstract: A semiconductor-on-insulator chip is provided which includes a substrate that is formed of an electrically insulating material; a semiconducting layer overlying the substrate; a first region in the semiconducting layer that has a first thickness, the first region includes silicon regions defined by a shallow trench isolation; and a second region in the semiconducting layer that has a second thickness, the second region includes active regions defined by mesa isolation.
    Type: Application
    Filed: March 8, 2003
    Publication date: September 9, 2004
    Inventor: Yee-Chia Yeo
  • Patent number: 6787408
    Abstract: A method for forming an electrical insulating layer on bit lines of the flash memory is disclosed. A conductive layer, a mask layer and a cap layer are sequentially formed on a semiconductor substrate and then are etched to form a plurality of spacing. Afterwards, a dielectric layer is formed on the semiconductor substrate and a planarized layer is then formed on the dielectric layer. The planarized layer and the dielectric layer are etched sequentially wherein the etching rate of the planarized layer is less than that of the dielectric layer. Next, the dielectric layer is etched to remove a portion of the dielectric layer wherein the etching rate of the dielectric layer is higher than that of the cap layer, and thus a spacing dielectric layer is formed on the spacing. Thereafter, the cap layer is stripped wherein the etching rate of the dielectric layer is less than that of the mask layer so that the spacing dielectric layer has a round top and slant sides.
    Type: Grant
    Filed: August 16, 2001
    Date of Patent: September 7, 2004
    Assignee: Macronix International Co., Ltd.
    Inventors: Chien-Wei Chen, Jiun-Ren Lai