Computer Controlled Patents (Class 451/5)
  • Patent number: 8962066
    Abstract: A method of repairing a component removes a prior coating from an underlying metal substrate. Small cooling air holes extend through the substrate and the coating that is to be removed. A new coating layer is placed on the metal substrate, and over the existing cooling air holes. The location of the cooling air holes is identified by inspecting the coated component for the location of indicators of the coating passing over the cooling air holes. The identified location of the indicators is used to control a cutting tool to remove any new coating from the cooling air holes. The basic method may also benefit new manufacture.
    Type: Grant
    Filed: June 4, 2012
    Date of Patent: February 24, 2015
    Assignee: United Technologies Corporation
    Inventor: Steven W. Burd
  • Patent number: 8965555
    Abstract: A method dresses a polishing member with a diamond dresser having diamond particles arranged on a surface thereof. The method includes determining dressing conditions by performing a simulation of a distribution of a sliding distance of the diamond dresser on a surface of the polishing member, and dressing the polishing member with the diamond dresser under the determined dressing conditions. The simulation includes calculating the sliding distance corrected in accordance with a depth of the diamond particles thrusting into the polishing member.
    Type: Grant
    Filed: January 8, 2014
    Date of Patent: February 24, 2015
    Assignee: Ebara Corporation
    Inventors: Akira Fukuda, Yoshihiro Mochizuki, Yutaka Wada, Yoichi Shiokawa, Hirokuni Hiyama
  • Patent number: 8956201
    Abstract: Embodiments described herein generally relate to connecting electronic lapping guides (ELGs) to a lapping controller to prevent the effects of current crowding while reducing connections to the ELGs in single pad lapping. Devices and systems can include a row of sliders including a magnetoresistive (MR) element, a plurality of high resistance ELGs connected to both the wafer and to at least one bonding pad and at least two peripheral grounding vias connected to the wafer. Methods and systems include a wafer comprising a plurality of sliders wherein each slider is connected to a lapping controller and the delivery of current to the ELGs is sequential to groups of sliders such that only one group of ELGs is being measured at any time.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: February 17, 2015
    Assignee: HGST Netherlands, B.V.
    Inventors: David P. Druist, Glenn P. Gee, Edward H. Lee, David J. Seagle, Darrick T. Smith
  • Patent number: 8956200
    Abstract: Embodiments described herein generally relate to connecting Electronic Lapping Guides (ELG) to a lapping controller to reduce resistance from current crowding while reducing connections to the ELG. A device and a system can include a wafer with peripheral grounding vias having a radius of at least 10 ?m, a plurality of sliders with a magnetoresistive (MR) elements; a plurality of ELG electrically coupled to the lapping controller through a combination of the wafer and grounding pads and a bonding pad electrically coupled to the ELG. The ELG or the bonding pad can be positioned in the kerf or the device region of a row. If the ELG and the bonding pad are positioned in separate regions, a noble metal should be used to connect. Further, the number of grounding pads can be reduced by using grounding vias at specific intervals and specific sizes.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: February 17, 2015
    Assignee: HGST Netherlands B.V.
    Inventors: David P. Druist, Glenn P. Gee, Unal M. Guruz, Edward H. Lee, David J. Seagle, Darrick T. Smith
  • Publication number: 20150044945
    Abstract: Provided is a method for grinding electrode tips such that the method is capable of detecting irregular grinding when the maximum torque does not occur. Specifically, a tip dresser includes a holder holding a cutter, a servo motor unit allowing the holder to rotate, and a controller controlling the operation of the servo motor unit. The servo motor unit outputs a torque occurrence signal to the controller when a load torque reaches a predetermined value in regular grinding of a pair of electrode tips. The controller detects irregular grinding when not receiving the torque occurrence signal within a time that corresponds to an elapsed time in the regular grinding.
    Type: Application
    Filed: October 22, 2014
    Publication date: February 12, 2015
    Inventor: Kotaro NAKAJIMA
  • Patent number: 8951096
    Abstract: The invention relates to a method for machining flat workpieces in a double-sided machining tool, which has an upper and a lower work disk, wherein at least one of the work disks is rotatingly driven and the work disks each have an annular work surface, wherein the work surfaces amongst themselves limit an also annular work gap, in which at least one carrier is located, which guides at least one workpiece in the work gap, so that the at least one workpiece is machined in a double-sided manner between the work surfaces. The distance between the work disks is measured at at least two radially spaced measurement locations of the work gap and in that, from the measured distances, a distance between the work disks is determined at a location of the work gap representing the thickness of the at least one workpiece machined in the work gap.
    Type: Grant
    Filed: May 18, 2010
    Date of Patent: February 10, 2015
    Assignee: Peter Wolters GmbH
    Inventors: Jörn Kanzow, Sebastian Jessen, Eckehard Gurgel, Ingo Grotkopp
  • Patent number: 8951095
    Abstract: Various embodiments of a semiconductor processing fluid delivery system and a method delivering a semiconductor processing fluid are provided. In aspect, a system for delivering a liquid for performing a process is provided that includes a first flow controller that has a first fluid input coupled to a first source of fluid and a second flow controller that has a second fluid input coupled to a second source of fluid. A controller is provided for generating an output signal to and thereby controlling discharges from the first and second flow controllers. A variable resistor is coupled between an output of the controller and an input of the second flow controller whereby the output signal of the controller and the resistance of the variable resistor may be selected to selectively control discharge of fluid from the first and second flow controllers.
    Type: Grant
    Filed: April 25, 2005
    Date of Patent: February 10, 2015
    Assignees: Samsung Austin Semiconductor, L.P., Samsung Electronics Co., Ltd.
    Inventors: Randall Lujan, Ahmed Ali, Michelle Garel, Josh Tucker
  • Publication number: 20150038053
    Abstract: Polishing method comprising a step of receiving a surface to be polished, a configuration step during which the polishing machine is configured, and a polishing step during which the optical surface is polished, wherein the angle of inclination of the pin is between 2° and 20°, the inner cusp point is between ?10 mm and 10 mm, the outer cusp point is between R?15 mm and R?5 mm, the speed of advance is between 100 mm/min and 2000 mm/min; the speed of rotation is between 500 rpm and 3000 rpm; and the bearing force is between 50 N and 180 N.
    Type: Application
    Filed: March 6, 2013
    Publication date: February 5, 2015
    Inventors: Alain Batard, Eric Gacoin, Jonathan Saulny, Jean Stephane
  • Patent number: 8944884
    Abstract: A method of controlling a polishing operation includes polishing a first layer of a substrate, during polishing, obtaining a sequence over time of measured spectra with an in-situ optical monitoring system, for each measured spectrum from the sequence of measured spectra, fitting an optical model to the measured spectrum, the fitting including finding parameters that provide a minimum difference between an output spectrum of the optical model and the measured spectrum, the parameters including an endpoint parameter and at least one non-endpoint parameter, the fitting generating a sequence of fitted endpoint parameter values, each endpoint parameter value of the sequence associated with one of the spectra of the sequence of measured spectra, and determining at least one of a polishing endpoint or an adjustment of a pressure to the substrate from the sequence of fitted endpoint parameter values.
    Type: Grant
    Filed: February 21, 2013
    Date of Patent: February 3, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Dominic J. Benvegnu
  • Patent number: 8944883
    Abstract: A system for magnetorheological finishing of a substrate. A spherical wheel meant for carrying a magnetorheological finishing fluid houses a variable-field permanent magnet system having north and south iron pole pieces separated by primary and secondary gaps with a cylindrical cavity bored through the center. A cylindrical permanent magnet magnetized normal to the cylinder axis is rotatably disposed in the cavity. An actuator allows rotation of the permanent magnet to any angle, which rotation changes the distribution of flux in the magnetic circuit through the pole pieces. Thus, one can control field intensity in the gaps by positioning the permanent magnet at whatever angle provides the required field strength. Because the field also passes above the pole pieces, defining a fringing field outside the wheel surface, the variable field extends through a layer of MR fluid on the wheel, thus varying the stiffness of the MR fluid as may be desired for finishing control.
    Type: Grant
    Filed: March 2, 2010
    Date of Patent: February 3, 2015
    Assignee: QED Technologies International, Inc.
    Inventor: William Kordonski
  • Patent number: 8944315
    Abstract: A device and a method for processing an optical lens are proposed, whereby lens-production data and/or geometric data of the lens are determined from desired optical data of the lens when a corresponding activation code is acquired. Preferably, the lens or a block piece and/or an assigned shipping container is/are provided with the activation code and/or other information relative to the lenses that are to be processed.
    Type: Grant
    Filed: September 29, 2011
    Date of Patent: February 3, 2015
    Assignee: Schneider GmbH & Co. KG
    Inventor: Gunter Schneider
  • Patent number: 8942842
    Abstract: A method of generating a library of reference spectra includes storing an optical model for a layer stack having at a plurality of layers, receiving user input identifying a set of one or more refractive index functions and a set of one or more extinction coefficient functions a first layer from the plurality of layers, wherein the set of one or more refractive index functions includes a plurality of different refractive index functions or the set of one or more extinction coefficient functions includes a plurality of different extinction coefficient functions, and for each combination of a refractive index function from the set of refractive index functions and an extinction coefficient function from the set of extinction coefficient functions, calculating a reference spectrum using the optical model based on the refractive index function, the extinction coefficient function and a first thickness of the first layer.
    Type: Grant
    Filed: April 28, 2011
    Date of Patent: January 27, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Dominic J. Benvegnu, Xiaoyuan Hu
  • Publication number: 20150024659
    Abstract: A method of controlling polishing includes polishing a substrate of a non-metallic layer undergoing polishing and a metal layer underlying the non-metallic layer; storing a metal reference spectrum, the metal reference spectrum being a spectrum of light reflected from a same metal material as the metal layer; measuring a sequence of raw spectra of light reflected from the substrate during polishing with an in-situ optical monitoring system; normalizing each raw spectrum in the sequence of spectra to generate a sequence of normalized spectra, of which normalizing includes a division operation where the measured spectrum is in the numerator and the metal reference spectrum is in the denominator; and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on at least one normalized predetermined spectrum from the sequence of normalized spectra.
    Type: Application
    Filed: June 9, 2014
    Publication date: January 22, 2015
    Inventor: Jeffrey Drue David
  • Publication number: 20150017879
    Abstract: An improved destructive and visual measurement automation system and a method for measuring a web thickness of a microdrill are provided. When a dual-axis motion platform module moves the microdrill to a first position, a reflection module reflects a first image in a first direction toward a second direction. A vision module receives the reflected first image in the second direction and outputs the received first image to a computer. According to the first image, the computer performs a positioning procedure and a grinding procedure to drive a drill grinding module to grind the microdrill to a sectional position to be measured of the microdrill. When the microdrill is moved to a second position, the vision module outputs a second image to the computer. According to the second image, the computer performs an image computing procedure to obtain the web thickness at the sectional position to be measured.
    Type: Application
    Filed: April 16, 2014
    Publication date: January 15, 2015
    Applicant: National Taiwan Ocean University
    Inventors: Wen-Tung CHANG, Yu-Yun LU
  • Publication number: 20150017880
    Abstract: A film-thickness measuring apparatus and a film-thickness measuring method capable of improving an accuracy of the film-thickness measurement are disclosed. The film-thickness measuring apparatus includes a substrate stage configured to support a substrate horizontally, a rinsing water supply structure configured to supply rinsing water onto an entire surface of the substrate on the substrate stage, a film-thickness measuring head configured to transmit light to a measurement area of the surface of the substrate on the substrate stage, produce a spectrum of reflected light from the measurement area, and determine a film thickness of the substrate from the spectrum, and a fluid supply structure configured to form a flow of a gas on a path of the light and supply the flow of the gas onto the measurement area.
    Type: Application
    Filed: July 9, 2014
    Publication date: January 15, 2015
    Inventors: Toshikazu NOMURA, Takeshi IIZUMI, Katsuhide WATANABE, Yoichi KOBAYASHI
  • Patent number: 8932106
    Abstract: A polishing apparatus is used for polishing a substrate such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a polishing table having a polishing surface, a substrate holding apparatus configured to hold the substrate and to press the substrate against the polishing surface, and a controller. The substrate holding apparatus includes an elastic membrane configured to form a substrate holding surface which is brought into contact with the substrate, a carrier provided above the elastic membrane, at least one pressure chamber formed between the elastic membrane and the carrier, and an infrared light detector configured to measure thermal energy from the elastic membrane. The controller calculates an estimate value of a temperature of the elastic membrane using a measured value of the infrared light detector.
    Type: Grant
    Filed: September 7, 2011
    Date of Patent: January 13, 2015
    Assignee: Ebara Corporation
    Inventors: Makoto Fukushima, Katsuhide Watanabe, Hozumi Yasuda, Satoru Yamaki
  • Patent number: 8932105
    Abstract: Method for the machining of gear teeth whose tooth flanks deviate from their specified geometry by a machining allowance, wherein the machining allowance is removed through an infeed of at least two infeed steps, each of which is followed by a machining pass with a profiling tool that rotates about a tool axis, wherein for this operation the profiling tool—after it has been set to a position relative to the gear wheel that depends on the angle at which the plane of rotation of the tool which is orthogonal to the tool axis is tilted against the axis of the gear wheel—is brought into engagement with the gear teeth, wherein after each infeed step the material within the resultant engagement area of the tool is removed, wherein after the last infeed step with a tilt angle setting of the profiling tool that is determined by the design angle of the latter, the area of tool engagement extends over the entire flank height, so that the next machining pass will remove the amount of material required to attain the speci
    Type: Grant
    Filed: June 7, 2011
    Date of Patent: January 13, 2015
    Assignee: Gleason-Pfauter Maschinenfabrik GmbH
    Inventors: Wilfried Heidelmann, Dragan Vucetic
  • Patent number: 8932107
    Abstract: A polishing apparatus includes a platen to hold a polishing pad having a plurality of optical apertures, a carrier head to hold a substrate against the polishing pad, a motor to generate relative motion between the carrier head and the platen, and an optical monitoring system. The optical monitoring system includes at least one light source, a common detector, and an optical assembly configured to direct light from the at least one light source to each of a plurality of separated positions in the platen, to direct light from each position of the plurality of separated positions to the substrate as the substrate passes over said each position, to receive reflected light from the substrate as the substrate passes over said each position, and to direct the reflected light from each of the plurality of separated positions to the common detector.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: January 13, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Boguslaw A. Swedek, Dominic J. Benvegnu, Sivakumar Dhandapani
  • Patent number: 8930013
    Abstract: A method of controlling polishing includes polishing a substrate having a second layer overlying a first layer, detecting exposure of the first layer with an in-situ monitoring system, receiving an identification of a selected spectral feature and a characteristic of the selected spectral feature to monitor during polishing, measuring a sequence of spectra of light from the substrate while the substrate is being polished, determining a first value for the characteristic of the feature at the time that the first in-situ monitoring technique detects exposure of the first layer, adding an offset to the first value to generate a second value, and monitoring the characteristic of the feature and halting polishing when the characteristic of the feature is determined to reach the second value.
    Type: Grant
    Filed: April 20, 2011
    Date of Patent: January 6, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Harry Q. Lee, Thian Choi Lim, Gary Ka Ho Lam
  • Patent number: 8920080
    Abstract: A machine tool 1 comprises a bed 11, a column 12, a spindle head 15, a spindle 16, a saddle 17, a table 18, a feed mechanism for moving the spindle head 15, the saddle 17 and the table 18 in Z-axis, Y-axis and X-axis directions respectively, a position detector for detecting the positions of the spindle head 15, saddle 17 and table 18, a controller for feedback controlling the feed mechanism, a position detector 51 for detecting the position of the spindle head 15, a position detector 54 for detecting the position of the spindle head 15, a position detector 57 for detecting the position of the table 18, and a measurement frame 50 which is configured with a different member from the bed 11 and the column 12 and on which readers 53, 56, 59 of the position detectors 51, 54, 57 are disposed.
    Type: Grant
    Filed: March 24, 2011
    Date of Patent: December 30, 2014
    Assignees: DMG Mori Seiki Co., Ltd., Intelligent Manufacturing Systems International
    Inventors: Kazuo Yamazaki, Toru Fujimori
  • Patent number: 8915766
    Abstract: A knife sharpener includes a knife holder in which a knife is inserted so that an edge of the knife is exposed, at least one edge sensor, configured to detect the edge of the knife, at least one abrader, the at least one abrader having a sharpening surface angled to meet an edge of the knife at a sharpening angle of one side of the knife, a motive mechanism connected to the holder and the at least one abrader, and a computing device in communication with the edge sensor and the motive mechanism, and configured to cause the at least one abrader to traverse the edge of the knife using the motive mechanism, in response to the at least one edge sensor. A method for knife sharpening involves directing the abrader to traverse the edge of the knife, responsive to input from an edge sensor.
    Type: Grant
    Filed: May 22, 2014
    Date of Patent: December 23, 2014
    Inventor: Dmitriy Kolchin
  • Publication number: 20140370785
    Abstract: A saw grinding apparatus comprises a saw blade mount for mounting a saw blade thereto; a tool rack comprising multiple tool bays each for storing a grinding tool; and at least one computer numerically controlled (CNC) multiple axes grind wheel manipulator which uses each grinding tool to perform a saw grinding operation. The manipulator includes a spindle connectable to a grinding tool and is movable to a grinding position wherein a grinding operation can be performed on a saw blade mounted to the saw blade mount. The manipulator is also movable to a tool change position wherein the spindle can engage a grinding tool stored in a tool bay and can deposit a grinding tool in an empty tool bay.
    Type: Application
    Filed: December 21, 2012
    Publication date: December 18, 2014
    Inventors: Justin Williams, Matt Williams, Brodie Shute, Evan Hohert, Steve Stuber, Saqib Naveed, Alex Makhnev
  • Patent number: 8911280
    Abstract: A method and an apparatus for machining an exterior surface of a metal alloy casing of a portable electronic device to form a combination of a flat edge surface, a curved edge surface and a flat bottom surface is disclosed. The flat edge surface is abraded by contacting a first flat section of a rotating cutting tool along a first circuit of a pre-determined continuous spiral path. The curved edge surface is abraded by contacting a convex section of the rotating cutting tool along additional circuits of the first pre-determined continuous spiral path. The pitch of vertical movement of the cutting tool is adjusted for each circuit of the continuous spiral path based on a resulting curvature of the metal alloy casing. The bottom surface is abraded by contacting a flat section of the cutting tool along a second pre-determined alternating direction linear path.
    Type: Grant
    Filed: January 31, 2011
    Date of Patent: December 16, 2014
    Assignee: Apple Inc.
    Inventors: Jeremy C. Franklin, Kevin Gibbs, Christopher J. Stringer, Daniel J. Coster, Donald Q. Ross, III, David Kim, Chuan You Su, Max A. Maloney, Erik D. Gillow
  • Patent number: 8912790
    Abstract: A measuring device for measuring a film thickness of a silicon wafer (1) comprises: position and velocity sensors (4) linearly arranged along a longitudinal direction into first and second position and velocity sensor arrays spaced apart from each other in a lateral direction, in which the position and velocity sensors (4) in the first position and velocity sensor array are in one-to-one correspondence with the position and velocity sensors (4) in the second position and velocity sensor array in the lateral direction; an eddy current sensor (2) disposed in a symmetrical plane between the first position and velocity sensor array and the second position and velocity sensor array and perpendicular to the lateral direction; and a controller connected to the position and velocity sensors (4) and the eddy current sensor (2) respectively for controlling measurement of the thickness of the film according to detection signals from the position and velocity sensors (4) and the eddy current sensor (2).
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: December 16, 2014
    Assignee: Tsinghua University
    Inventors: Xinchun Lu, Pan Shen
  • Publication number: 20140364038
    Abstract: The described embodiments relate generally to lapping operations and related systems and apparatuses. Various embodiments of lapping tables are described for applying a lapping operation to a non-planar surface of a workpiece. For example, methods and apparatus are described which allow a lapping operation to be applied to a curved outer surface portion of a cylindrical workpiece. Lapping of non-planar outer surfaces of workpieces is conducted by rotating the workpieces during the lapping operations.
    Type: Application
    Filed: February 20, 2014
    Publication date: December 11, 2014
    Applicant: Apple Inc.
    Inventors: Simon Regis Louis Lancaster-Larocque, Collin D. Chan
  • Patent number: 8905816
    Abstract: A system for system for controlling functions of a multi-feed blasting apparatus is disclosed. Tank pressure, charge/discharge control, status of a vessel cover, total hours of pressurization or operation for the vessel and individual feed lines, ambient environmental or weather conditions, and abrasive material level inside the vessel may also be monitored and controlled by the disclosed system.
    Type: Grant
    Filed: February 13, 2013
    Date of Patent: December 9, 2014
    Assignee: Marco Group International, Inc.
    Inventors: Chris Gramling, Richard McLaughlin
  • Patent number: 8900033
    Abstract: An object of the present invention is to provide a method of polishing silicon wafers, capable of suppressing generation of undesired sounds from carriers and reducing the thickness variation of the wafers after polished. The method is a wafer polishing method in which wafers 20 are polished by supplying a polishing solution to surfaces 30a of a pair of polishing pads 30 positioned above and below carriers 10 each having a circular hole 11 for retaining the wafers 20, the carriers 10 being thinner than the wafers 20; and sliding the polishing pads 30 relatively to the carriers 10, thereby simultaneously polishing both surfaces of the wafers 20 retained in the carriers 10. The method is characterized in that information sourced from the carriers 10 when a difference between the thickness of the carriers 10 and the thickness of the wafers 20 reaches a predetermined value is detected to calculate the thickness of the wafers 20, thereby terminating polishing.
    Type: Grant
    Filed: November 30, 2010
    Date of Patent: December 2, 2014
    Assignee: Sumco Corporation
    Inventors: Kazushige Takaishi, Keiichi Takanashi, Tetsurou Taniguchi, Shinichi Ogata, Shunsuke Mikuriya
  • Publication number: 20140349551
    Abstract: The invention relates to a device and method for using same for sanding a predetermined impression into a workpiece. The device has a pattern belt positioned inside the area formed by a sanding belt. A pad is positioned inside the area formed by the pattern belt. A raised pattern is formed on the outer surface of the pattern belt. In use, the pad is selectively controlled to contact the pattern belt, thereby urging the raised pattern of the pattern belt to contact the sanding belt. The portion of the sanding belt contacted by the pattern belt is urged toward the workpiece so that the predetermined impression is sanded into the workpiece.
    Type: Application
    Filed: August 8, 2014
    Publication date: November 27, 2014
    Inventors: ROBERT BRYAN BOGGS, JOSEPH SHANNON MILLER, MICHAEL SCOTT STANDRIDGE, JASON RICHARD SHAW
  • Patent number: 8893387
    Abstract: A method for producing a dental shaped part includes checking an outer contour of a tool of machining equipment, using least one gauge provided on a blank formed from a tooth restoration material from which a dental shaped part is to be machined using the machining equipment. The method also includes machining the dental shaped part from the blank using the tool of the machining equipment, when the outer contour of the tool corresponds to the at least one gauge provided on the blank.
    Type: Grant
    Filed: October 12, 2011
    Date of Patent: November 25, 2014
    Assignee: Sirona Dental Systems GmbH
    Inventors: Franz Basler, Peter Fornoff
  • Patent number: 8894467
    Abstract: The system delivers media blasting material to an interior surface of a large storage tank comprises a substantially upright support structure secured to the surface to be blasted. The upright support structure is preferably vertical. A frame extends across the upright support structure. An extendable arm is affixed to the frame at a section. The section is securely and pivotably attached to the section in such a way to enable the arm to rotate freely inside the large storage tank, so that the blaster secured at the end of the extendable arm can blast the entire interior surface of the large storage tank while the upright support structure remains in place. A robot blaster is positioned at the end of the extendable arm and performs the media blasting. A work station is located nearby the site of the large storage tank and controls the position of the extendable arm relative to the interior surface being blasted via a processor and the operation of the blasting delivery system.
    Type: Grant
    Filed: June 22, 2012
    Date of Patent: November 25, 2014
    Inventor: Robert J. Santure
  • Publication number: 20140342125
    Abstract: A system and method for imparting a textured surface effect in a board. The system and method are configured to releasably secure a charge on a table; determine a random abrasion pattern for the charge with at least one programmable controller; and control at least one abrasion assembly with the at least one programmable controller in accord with the random abrasion pattern to selectively engage and remove desired portions of the upper surface of the charge with the at least one abrasion assembly to form a randomized textured surface effect thereon.
    Type: Application
    Filed: March 17, 2014
    Publication date: November 20, 2014
    Inventors: John J. M. Rees, Conrad Layson Fernandez, Eric John Levan, David Emmett Milligan, Leonard Lee Hixon, JR., Edward Keith Huitt, Robert Louis Shelnutt, III, David Edward Voyles, Gregory Kevin Espy, Roman Morris
  • Patent number: 8892238
    Abstract: A method and an apparatus for shaping an edge at a juncture of two adjoining surfaces of a part. A first surface and a second surface of the part are abraded by contacting a polishing surface of a polishing wheel to the first surface and to the second surface. The polishing surface spins in opposite rotational directions about an axis parallel to the edge when contacting the first and second surfaces respectively. The polishing surface moves at different translational speeds and the polishing wheel spins at different rotational speeds along straight segments and along curved segments of the edge. The shaped edge has a visually smooth and geometrically uniform appearance.
    Type: Grant
    Filed: January 26, 2010
    Date of Patent: November 18, 2014
    Inventors: Edward T. Sweet, Roberto Ortega, Andrew Davidson, Simon Lancaster, Thomas Johannessen
  • Patent number: 8892236
    Abstract: A fluid jet system is configured to etch a workpiece to a plurality of depths to produce an etched part corresponding to a computer image.
    Type: Grant
    Filed: June 17, 2009
    Date of Patent: November 18, 2014
    Assignee: OMAX Corporation
    Inventor: Carl C. Olsen
  • Patent number: 8892568
    Abstract: A method of controlling polishing includes storing a library having a plurality of reference spectra, polishing a substrate, measuring a sequence of spectra of light from the substrate during polishing, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum using a matching technique other than sum of squared differences to generate a sequence of best matching reference spectra, and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on the sequence of best matching reference spectra. Finding a best matching reference spectrum may include performing a cross-correlation of the measured spectrum with each of two or more of the plurality of reference spectra from the library and selecting a reference spectrum with the greatest correlation to the measured spectrum as a best matching reference spectrum.
    Type: Grant
    Filed: October 10, 2011
    Date of Patent: November 18, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Dominic J. Benvegnu, Xiaoyuan Hu
  • Publication number: 20140335761
    Abstract: The present invention relates to a detection apparatus of chemical mechanical polishing conditioner, comprising: a working platform with a working plane; a placement base disposed on the working plane of the working platform, for carrying a chemical mechanical polishing conditioner; an image capture device forming one or a plurality of captured images on different regions of the chemical mechanical polishing conditioner; a display device; an image recognition module, wherein the captured images are performed a color matching by the image recognition module to determine one or a plurality of risk diamonds on the chemical mechanical polishing conditioner, and the coordinate location of the risk diamonds are outputted into the display device; and a mobile platform for moving the risk diamonds to specified locations. A detection method of the above mentioned detection apparatus is also disclosed.
    Type: Application
    Filed: April 15, 2014
    Publication date: November 13, 2014
    Applicant: Kinik Company
    Inventors: Jui-Lin CHOU, Chia Chun WANG, Chia-Feng CHIU, Wen-Jen LIAO, Jen Feng CHEN, Yi-Ting LIN
  • Patent number: 8882564
    Abstract: A gear grinding machine, whose tool spindle (18) is supported on a first swivel-motion unit (17) seated on a first linear-motion unit (15), has a second linear-motion unit (19) which is arranged on the first linear-motion unit (15) and carries a dressing spindle (21) that is capable of being driven in rotary movement.
    Type: Grant
    Filed: September 4, 2009
    Date of Patent: November 11, 2014
    Assignee: Gleason-Pfauter Maschinenfabrik GmbH
    Inventor: Claus Kobialka
  • Patent number: 8882562
    Abstract: A scratch removal tool that includes a motor, a housing, a rotatable shaft operably coupled to the motor and movable in an axial direction along a length of the shaft, and a head assembly. The head assembly includes a shroud member having an open end, a pad member, a slurry input, a slurry output, and a seal member. The pad member is positioned within the shroud and mounted to the shaft. Rotation of the shaft rotates the pad member. Axial movement of the shaft moves the pad member relative to the open end of the shroud. The slurry input and slurry are in fluid communication with the pad member. The seal member is positioned at the open end of the shroud.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: November 11, 2014
    Assignee: TCG International Inc.
    Inventors: Jonathan P. Thomas, Keith A. Beveridge, Chad J. Olson
  • Publication number: 20140329439
    Abstract: A TSV (through silicon via) reveal process using CMP (chemical mechanical polishing) may be acoustically monitored and controlled to detect TSV breakage and automatically respond thereto. Acoustic emissions received by one or more acoustic sensors positioned proximate a substrate holder and/or a polishing pad of a CMP system may be analyzed to detect TSV breakage during a CMP process. In response to detecting TSV breakage, one or more remedial actions may automatically occur. In some embodiments, a polishing pad platen may have one or more acoustic sensors integrated therein that extend into a polishing pad mounted on the polishing pad platen. Methods of monitoring and controlling a TSV reveal process are also provided, as are other aspects.
    Type: Application
    Filed: May 1, 2013
    Publication date: November 6, 2014
    Inventors: Xiong Yeu Chew, Kommisetti Subrahmanyam, Uday Mahajan, Bogdan Swedek, Rajeev Bajaj, Jianshe Tang
  • Publication number: 20140329440
    Abstract: A method of controlling polishing includes polishing a substrate and receiving an identification of a selected spectral feature, a wavelength range having a width, and a characteristic of the selected spectral feature to monitor during polishing. A sequence of spectra of light from the substrate is measured while the substrate is being polished. A sequence of values of the characteristic of the selected spectral feature is generated from the sequence of spectra. For at least some spectra from the sequence of spectra, a modified wavelength range is generated based on a position of the spectral feature within a previous wavelength range used for a previous spectrum in the sequence of spectra, the modified wavelength range is searched for the selected spectral feature, and a value of a characteristic of the selected spectral feature is determined.
    Type: Application
    Filed: July 15, 2014
    Publication date: November 6, 2014
    Inventors: Jeffrey Drue David, Harry Q. Lee
  • Publication number: 20140323016
    Abstract: A method of polishing a substrate is disclosed. The method includes irradiating the substrate with light; measuring intensity of the reflected light; producing spectral waveform representing relationship between relative reflectance and wavelength of the light; performing a Fourier transform process on the spectral waveform to determine a thickness of the film and a corresponding strength of frequency component; determining whether the determined thickness of the film is reliable or not by comparing the strength of frequency component with a threshold value; calculating a defective data rate representing a proportion of the number of unreliable measured values to the total number of measured values; and changing the threshold value based on the defective data rate.
    Type: Application
    Filed: April 23, 2014
    Publication date: October 30, 2014
    Applicant: EBARA CORPORATION
    Inventor: Toshifumi KIMBA
  • Patent number: 8874250
    Abstract: Methods, systems, and apparatus for spectrographic monitoring of a substrate during chemical mechanical polishing are described. In one aspect, a computer-implemented method includes storing a library having a plurality of reference spectra, each reference spectrum of the plurality of reference spectra having a stored associated index value, measuring a sequence of spectra in-situ during polishing to obtain measured spectra, for each measured spectrum of the sequence of spectra, finding a best matching reference spectrum to generate a sequence of best matching reference spectra, determining the associated index value for each best matching spectrum from the sequence of best matching reference spectra to generate a sequence of index values, fitting a linear function to the sequence of index values, and halting the polishing either when the linear function matches or exceeds a target index or when the associated index value from the determining step matches or exceeds the target index.
    Type: Grant
    Filed: October 4, 2013
    Date of Patent: October 28, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek, Lakshmanan Karuppiah
  • Publication number: 20140308877
    Abstract: The invention concerns a method of grinding a toothed workpiece in which a central axis of the toothed contour profile is defined, wherein the method encompasses at least two work operations. In a first work operation a grinding zone of a grinding tool whose selection is determined by the grinding process to be performed, which rotates about an axis of rotation and is set up for an infeed in the direction of the shortest distance between said central axis and the rotation axis, is brought into grinding engagement with a tooth flank of the workpiece. In a later, second work operation, the tooth flank is brought into grinding engagement with a grinding zone of a grinding tool whose selection is determined by the grinding process to be performed and which is advanced in the infeed direction of the first operation.
    Type: Application
    Filed: November 15, 2012
    Publication date: October 16, 2014
    Inventor: Edgar Weppelmann
  • Patent number: 8858296
    Abstract: A process control system is provided for use with a processing tool for thin film patterning by a material removal processing system. The system includes an optical end-point detector operable within a working area defined by the processing tool when the processing tool is applied to an article, the optical end-point detector performing in-situ measurements of parameters of patterned thin film on the article. An optical integrated monitoring tool is installed with the processing tool and operable outside the working area for measuring parameters of the patterned thin film on the article. A control unit is connected to the end-point detector and to the integrated monitoring tool, and includes processing and computational intelligence responsive to data received from the end-point detector and to the measured data received from the integrated monitoring tool for analyzing data and generating a signal for terminating the patterning of the thin film on the article.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: October 14, 2014
    Assignee: Nova Measuring Instruments Ltd.
    Inventor: Moshe Finarov
  • Publication number: 20140302749
    Abstract: In a lens edging system using a lens edger and an edging control terminal, the lens edger includes a calculation switching section configured to switch a setting of a calculating section so as to select either one of a first calculating section and a second calculating section for calculating edging shape data, and a data acquisition section configured to acquire the edging shape data calculated by the second calculating section from the edging control terminal, wherein when the calculation switching section switches the setting of a calculating section so as to select the second calculating section for calculating the edging shape data, the edging shape data calculated by the second calculating section is acquired by a data acquisition section, and a lens edging section performs edging using the acquired edging shape data.
    Type: Application
    Filed: December 6, 2012
    Publication date: October 9, 2014
    Inventors: Masahiko Samukawa, Takashi Daimaru, Ryosuke Sato
  • Patent number: 8851958
    Abstract: A method for simultaneous double-side material-removing processing of at least three workpieces includes disposing the workpieces in a working gap between rotating upper and lower working disks of a double-side processing apparatus. The workpieces lie in freely movable fashion in respective openings in a guide cage and are moved under pressure in the working gap using the guide cage. Upon attaining a preselected target thickness of the workpieces, a deceleration process is initiated that includes reducing an angular velocity ?i(t) of a respective drive i of each of the upper working disk, lower working disk and guide cage to a standstill. The reducing is carried out such that ratios of the angular velocities ?i(t) with respect to one another as a function of time t deviate by no more than 10% from initial ratios of the angular velocities ?i(t) corresponding to when the preselected target thickness was attained.
    Type: Grant
    Filed: September 4, 2012
    Date of Patent: October 7, 2014
    Assignee: Siltronic AG
    Inventor: Georg Pietsch
  • Publication number: 20140295736
    Abstract: The present relates to an apparatus and method for blending added material with base material on manufactured components. The apparatus comprises an abrasive device having an abrasive surface for removing exceeding added material, and a guide fixed to the abrasive device. The method determines a trajectory of the abrasive surface with respect to a manufactured component: determines which of a plurality of contact points of the guide shall be in contact with the manufactured component along the trajectory; actuates the abrasive device; and controls position and angle of the abrasive surface en the manufactured component along the trajectory, while keeping the determined contact point in contact with the manufactured component. A force is applied to the abrasive device when the abrasive surface is in contact with the manufactured component and transferred when the guide gets in contact with the base material.
    Type: Application
    Filed: May 8, 2013
    Publication date: October 2, 2014
    Inventor: Francois-Imran Arrien
  • Publication number: 20140295737
    Abstract: There is provided a polishing apparatus capable of detecting uneven wear occurring on a polishing pad and detecting an appropriate replacement timing of the polishing pad. The polishing apparatus detects, every predetermined time, a value of rotation speed or a value of rotation torque of a table drive shaft for rotationally driving a polishing table or a dresser drive shaft for driving a dresser, or a value of swing torque of a dresser swing shaft for driving the dresser; calculates a change quantity thereof based on the value of the detected rotation speed, the value of the detected rotation torque, or the value of the detected swing torque; determines whether or not the change quantity exceeds a predetermined value; and notifies a user of a warning when a determination is made that the change quantity exceeds the predetermined value.
    Type: Application
    Filed: March 28, 2014
    Publication date: October 2, 2014
    Inventors: Ryuichi Kosuge, Tadakazu Sone
  • Patent number: 8844120
    Abstract: A method for providing a magnetic transducer including an underlayer is provided. The method comprises providing a recessed region in the underlayer. The recessed region includes a front having an angle from horizontal. The angle is greater than zero and less than ninety degrees. The method further comprises providing an assist pole layer in the recessed region, providing a main pole layer, a portion of the main pole layer residing on the assist pole layer, and defining a main pole from the assist pole layer and the main pole layer.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: September 30, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Yong Shen, Zhigang Bai
  • Patent number: 8845391
    Abstract: An apparatus for polishing a substrate includes a rotatable polishing table supporting a polishing pad, a substrate holder configured to hold the substrate and press the substrate against a polishing surface of the polishing pad on the rotating polishing table so as to polish the substrate, and a pad-temperature detector configured to measure a temperature of the polishing surface of the polishing pad. The apparatus also includes a pad-temperature regulator configured to contact the polishing surface to regulate the temperature of the polishing surface, and a temperature controller configured to control the temperature of the polishing surface by controlling the pad-temperature regulator based on information on the temperature of the polishing surface detected by the pad-temperature detector.
    Type: Grant
    Filed: December 21, 2010
    Date of Patent: September 30, 2014
    Assignee: Ebara Corporation
    Inventors: Tadakazu Sone, Yasuyuki Motoshima, Toru Maruyama, Katsutoshi Ono, Yoichi Shiokawa
  • Patent number: 8845390
    Abstract: A predictive calculation method for calculating the shape of a cross-section of an engagement ridge of an ophthalmic lens obtained by beveling the lens with a beveling grindwheel driven in accordance with an initial path setting. The method includes the following steps: acquiring the initial path setting for the beveling grindwheel relative to the lens; determining at least two approximations (Sii, Sij) of the shape of the cross-section under consideration of the engagement ridge, the approximations being deduced from the intersection between the beveling grindwheel and the ophthalmic lens when the beveling grindwheel is situated at two distinct positions of the initial path setting; determining the intersection between these two approximations; and deducing therefrom the shape (Si) of the cross-section under consideration of the engagement ridge.
    Type: Grant
    Filed: June 16, 2011
    Date of Patent: September 30, 2014
    Assignee: Essilor International (Compagnie Generale d'Optique)
    Inventors: Frédéric Dubois, Eric Belloni, David Freson, Richard Kot