Performance Monitoring Patents (Class 700/108)
  • Publication number: 20100280645
    Abstract: Method for manufacturing one or more products, comprising operation of two or more processes which are or are suspected to be subject to mutual disturbance, wherein either a process which is or which is suspected to be subject to disturb one or more of the remaining process or processes, or a process which is or which is suspected to be subject to be disturbed by one or more of the remaining processes or processes, causes an interruption or modification of the operation of the relevant remaining process or processes during a state of such potential disturbance.
    Type: Application
    Filed: June 21, 2010
    Publication date: November 4, 2010
    Applicant: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO
    Inventors: ERIK CHRISTIAN NICOLAAS PUIK, Lucas Willem Mathieu Tillie
  • Publication number: 20100274377
    Abstract: An industrial control system is provided. The system includes tagged data that is collected from a plurality of sustainability factor-associated data sources across an industrial automation environment, where the tagged data is associated with a portion of a process that is attributed to the sustainability factor data sources. A manufacturing model is associated with the tagged data, where the manufacturing model is employed to enhance the efficiencies of the process.
    Type: Application
    Filed: April 24, 2009
    Publication date: October 28, 2010
    Applicant: Rockwell Automation Technologies, Inc.
    Inventors: Philip John Kaufman, Marcia Elaine Walker, Steven Anthony Lombardi
  • Patent number: 7822574
    Abstract: In the present invention, substrates in a plurality of lots are successively processed in a coating and developing treatment system, and line width measurement is performed for some of substrates of the substrate which have been through processing in each lot. The line width measurement of two successive lots is performed such that the last line width measurement in the previous lot of the two successive lots has been completed at the time of completion of processing of a substrate which is first subjected to the line width measurement in the subsequent lot. According to the present invention, the measurement of product substrates can be performed without decreasing the throughput of the product substrates.
    Type: Grant
    Filed: October 9, 2007
    Date of Patent: October 26, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Kunie Ogata, Shinichi Shinozuka, Yoshihiro Kondo
  • Patent number: 7822500
    Abstract: A polishing apparatus has a polishing table (18) having a polishing surface (40) and a top ring (20) for pressing a substrate against the polishing surface (40) while independently controlling pressing forces applied to a plurality of areas (C1-C4) on the substrate. The polishing apparatus has a sensor (52) for monitoring substrate conditions of a plurality of measurement points on the substrate, a monitor unit (53) for performing a predetermined arithmetic process on a signal from the sensor (52) to generate a monitor signal, and a controller (54) for comparing the monitor signal of the measurement points with the reference signal and controlling the pressing forces of the top ring (20) so that the monitor signal of the measurement point converges on the reference signal.
    Type: Grant
    Filed: June 20, 2005
    Date of Patent: October 26, 2010
    Assignee: Ebara Corporation
    Inventors: Yoichi Kobayashi, Yasumasa Hiroo, Tsuyoshi Ohashi
  • Patent number: 7822783
    Abstract: The present invention is a method of obtaining information regarding an individual's environment using a programmable device. The first step of the method is sensing a psychomotor behavioral element of an activity engaged by the individual. The type of activity engaged by the individual can be any sensible activity under the sun, including breathing, thinking, generating heat, etc. The next step in the inventive method is determining the preferred modalities of the individual based on the psychomotor behavioral element of the activity engaged by the individual. Provided herein are calculations used for determining the preferred modalities of the individual based on the psychomotor behavioral element of the activity. In the present context, the preferred modalities are the semi-conscious or nonconscious desires of the individual, indicated by nonconscious actions, to experience her environment in a specific manner. The information obtained by the inventive method can be used in several ways.
    Type: Grant
    Filed: March 21, 2008
    Date of Patent: October 26, 2010
    Inventor: Joseph Carrabis
  • Publication number: 20100268366
    Abstract: According to an exemplary embodiment of the present invention, a diagnosis system for detecting a state of emergency during assembly of a fuselage (101) of an airplane is provided, which is adapted for detecting an emergency event and outputting information relating to the actual position of the emergency event. This may provide for a fast error identification during airplane assembly.
    Type: Application
    Filed: November 29, 2007
    Publication date: October 21, 2010
    Applicant: AIRBUS OPERATIONS GMBH
    Inventor: Horst Kott
  • Patent number: 7818086
    Abstract: An component mounter including a warning notification apparatus, which includes a warning generating unit which generates a warning for notifying that an action involving human resource is required, by referring to warning generation information, a warning level judging unit which judges a level of the warning indicating difficulty of an action to be taken in response to the warning by referring to warning level judgment information, and a warning notification unit which specifies an operator permitted to perform the action in response to the warning by referring to execution permission authentication information, and outputs the warning notifying the specified operator of the warning.
    Type: Grant
    Filed: September 24, 2008
    Date of Patent: October 19, 2010
    Assignee: Panasonic Corporation
    Inventors: Yoshiaki Awata, Kazuhiko Itose, Kenichiro Ishimoto
  • Patent number: 7818083
    Abstract: A system is provided for providing automated washing and verifying compliance of use. The system provides for identifying individual users of one or more cleaning stations through various technologies, such as RFID. Individual's use of cleaning stations is monitored to determine compliance with hand-washing requirements. A compliance report may be generated based on data associated with one or more individuals' use of the cleaning station(s). Educational and/or entertainment content may be displayed to the user when he or she is using the cleaning station. Additionally, the cleaning station may identify containers having authorized consumables such as soap or disinfectant. Optional automated collection and forwarding of hygiene compliance information is performed to provide compliance monitors, such as a regulatory agency, with such information.
    Type: Grant
    Filed: September 7, 2007
    Date of Patent: October 19, 2010
    Assignee: Resurgent Health & Medical, LLC
    Inventors: James Glenn, Douglas Swartz
  • Publication number: 20100260410
    Abstract: A closed-loop control method for an electron beam freeform fabrication (EBF3) process includes detecting a feature of interest during the process using a sensor(s), continuously evaluating the feature of interest to determine, in real time, a change occurring therein, and automatically modifying control parameters to control the EBF3 process. An apparatus provides closed-loop control method of the process, and includes an electron gun for generating an electron beam, a wire feeder for feeding a wire toward a substrate, wherein the wire is melted and progressively deposited in layers onto the substrate, a sensor(s), and a host machine. The sensor(s) measure the feature of interest during the process, and the host machine continuously evaluates the feature of interest to determine, in real time, a change occurring therein. The host machine automatically modifies control parameters to the EBF3 apparatus to control the EBF3 process in a closed-loop manner.
    Type: Application
    Filed: March 31, 2010
    Publication date: October 14, 2010
    Applicants: Space Administration
    Inventors: Karen M. Taminger, Robert A. Hafley, Richard E. Martin, William H. Hofmeister
  • Patent number: 7813893
    Abstract: A method that involves matching the trend of process outcome with the trend of process variables to identify the variables that have an impact on the process outcome is disclosed. The method for process trend matching comprises processing of raw data of process outcome and of process variables using an outlier filtering method, smoothing these data using common smoothing algorithm like Kernel, dividing smoothed raw data equally into time intervals, computing the gradients of the points at both ends of the time intervals, and translating the gradients into a scale based on the magnitude of the gradients. The following steps comprise comparing the process outcome and each process variable independently for same time frame, and assigning a score for both outcome and variable. The sum of the scores is then computed which is used to determine the quality of fit. A real-time monitoring system is then set up to monitor these variables for any drifts.
    Type: Grant
    Filed: January 18, 2007
    Date of Patent: October 12, 2010
    Assignee: TECH Semiconductor Singapore Pte Ltd
    Inventors: Kien Hoong Fong, Wei Fu, Jun Shi
  • Patent number: 7813974
    Abstract: Method and apparatus for detecting duplicate shipments at one or more materials handling facilities in a distribution system. For each package processed at one or more downstream processing station(s), a destination identifier (customer/address combination) and one or more item identifiers for item(s) in the package may be obtained. An analysis of the obtained data may be performed in accordance with an analysis interval (e.g., thirty minutes or one hour). For every analysis interval, all destination-identifier/item-identifier combinations obtained in the analysis interval may be examined to determine the number of instances each destination-identifier/item-identifier combination occurred in aggregated data (a window, e.g. two weeks or one month of data). The number of destination-identifier/item-identifier combinations that have an occurrence count greater than a specified number may be counted, and if the sum is greater than a specified threshold, an alarm may be raised.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: October 12, 2010
    Assignee: Amazon Technologies, Inc.
    Inventors: Roberta M. Braum, Jason Seung Jin Lee, Felix F. Antony
  • Publication number: 20100256794
    Abstract: A computing cloud system includes at least one data storage unit configured to store information associated with at least one manufacturing execution system. The computing cloud system also includes at least one processing unit configured to execute instructions associated with the at least one manufacturing execution system and at least one communications interface configured to receive information from the at least one manufacturing site and to interpret the information.
    Type: Application
    Filed: April 1, 2009
    Publication date: October 7, 2010
    Applicant: Honeywell International Inc.
    Inventors: Paul F. McLaughlin, Andrew Duca, Matthew G. Burd
  • Publication number: 20100256795
    Abstract: A system includes a computing cloud having at least one data storage unit and at least one processing unit. The computing cloud is configured to provide at least one service. The system also includes a plurality of clients each configured to communicate with the computing cloud and at least one industrial automation unit and to transmit information associated with the at least one industrial automation unit to the computing cloud. The at least one processing unit in the computing cloud is configured to determine a status of the at least one industrial automation unit using the information provided the clients.
    Type: Application
    Filed: April 1, 2009
    Publication date: October 7, 2010
    Applicant: Honeywell International Inc.
    Inventors: Paul F. McLaughlin, Kevin P. Staggs
  • Publication number: 20100256793
    Abstract: According to one aspect of the invention a system and method for minimizing assembly line manufacturing including an override is provided. Each workstation is equipped with a docking station. A first database is in communication with the programmable controller and the docking station, and the docking station is also in communication with the workstation tools as well as the programmable controller. The override is disposed on a docking station. The system includes a checklist of tasks that each workstation tool is to perform. Accordingly the first database will receive the checklist for each part and will record whether or not each particular part had each of its tasks performed properly. The override may be actuated so as to allow a part to flow downstream the assembly line even though the all the tasks were not completed properly, thus minimizing manufacturing disruptions.
    Type: Application
    Filed: April 6, 2009
    Publication date: October 7, 2010
    Applicant: Toyota Motor Engineeting & Manufacturing North America, Inc.
    Inventors: Gary Lee, Bruce Peter Fleming, Chris Rudolf Loates
  • Patent number: 7809456
    Abstract: A Managing component supply for complex products is achieved by monitoring the delivery performance of component suppliers and optimizing the times at which orders are placed. Supply delivery performance targets are set for each supplier, and component order times are optimized by 1) optimizing safety stock for each component, 2) calculating optimal times to place supply orders in order to maintain the safety stock level, and then 3) iterating safety stock calculations in order to minimize overall inventory costs and maximize supply availability. The process takes into account supply lead times, component costs, and target tolerances for delays in the assembly of components. The effects of changes in supply lead time performance on assembly schedules are projected for planning purposes.
    Type: Grant
    Filed: July 17, 2008
    Date of Patent: October 5, 2010
    Assignee: International Business Machines Corporation
    Inventor: Kaan Kudsi Katircioglu
  • Patent number: 7809461
    Abstract: In estimating a curved surface model by approximating the shape of the board surface of a circuit board, auxiliary measurement spots are set other than measurement spots on the board surface, eligibility as a sampling displacement magnitude in estimating a curved surface model is determined according to a difference in a displacement magnitude from a work reference surface. When the sampling displacement magnitude is determined to be ineligible, a new measurement spot is reset. By this operation, a local increase and decrease in the displacement magnitude due to a discontinuity of the board surface exerts no influence on the estimation of the curved surface model, and the curved surface model approximated more closely to the shape of the actual board surface is estimated, leading to an improvement in the work quality with the working height adjusted to the proper height.
    Type: Grant
    Filed: November 24, 2006
    Date of Patent: October 5, 2010
    Assignee: Panasonic Corporation
    Inventors: Takahiro Noda, Tadashi Endo, Osamu Okuda, Kazuhide Nagao
  • Publication number: 20100249976
    Abstract: A method and system for evaluating a performance of a semiconductor manufacturing tool while manufacturing microelectronic devices are disclosed. At least one report is generated based on executions of at least one statistical test. The report includes at least one heat map having rows that correspond to sensors, columns that correspond to trace data obtained during recipe steps, and cells at the intersection of the rows and the columns. At least one sensor in the tool obtains trace data of a recipe step while manufacturing at least one microelectronic device. A computing device analyzes the obtained trace data to determine a level of operational significance found in the data and assigns a score to the trace data that indicates a level of operational significance. Then, the computing device places the score in a corresponding cell of the heat map. A user uses the cell for evaluating the tool performance.
    Type: Application
    Filed: March 31, 2009
    Publication date: September 30, 2010
    Applicant: International Business Machines Corporation
    Inventors: Ehud Aharoni, Robert J. Baseman, Ramona Kei, Oded Margalit, Kevin Mackey, Michal Rosen-Zvi, Raminderpal Singh, Noam Slonim, Hong Lin, Fateh All Tipu, Adam Daniel Ticknor, Timothy M. McCormack
  • Publication number: 20100249968
    Abstract: A method and system for factory resource optimization identification is described herein. In one embodiment, an expected usage rate is determined for a resource in a manufacturing facility and an actual usage rate is determined for the resource in the manufacturing facility. A comparison between the expected usage rate and the actual usage rate is facilitated. A determination is made, based on the comparison, of whether a variance between the expected usage rate and the actual usage rate exceeds a threshold. A notification is provided if the variance exceeds the threshold.
    Type: Application
    Filed: March 24, 2010
    Publication date: September 30, 2010
    Inventors: Andreas Neuber, Parth Sethia, Parris C.M. Hawkins, Krishna Vepa, Raymond Murray
  • Patent number: 7805279
    Abstract: Factories (102-104) have host computers (107) for monitoring industrial equipment (106). Each host computer (107) is connected to a management host computer (108) on a vendor (101) side through the internet (105). The host computer (107) on the factory side detects occurrence of a trouble of the industrial equipment (106) and notifies the vendor side of status information representing a trouble state. In response to this, the host computer (108) on the vendor side notifies the factory side of response information representing a countermeasure against the trouble state.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: September 28, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Nobuaki Ogushi, Hirohisa Ohta, Yoshito Yoneyama, Masaya Ogura
  • Patent number: 7802082
    Abstract: Methods and systems to dynamically configure computing apparatuses, such as desktop computers and portable computing devices, are disclosed. Embodiments generally comprise configuration systems that communicate with the computing apparatuses, retrieve hardware and/or software information from the apparatuses, and use the information to configure and/or load software onto the apparatuses. The computing apparatuses being configured may comprise desktop computers, computer workstations, or servers, as well as handheld and/or portable computing devices such as notebook or palm-held computers, cellular telephones, and portable media players. In many embodiments, the configuring systems compare information pertaining to installed hardware and software of the computing device, compare the information to software compatibility databases, select software and other configuration information based upon the comparison, and configure the computing apparatuses with the selected software and other configuration information.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: September 21, 2010
    Assignee: Intel Corporation
    Inventors: Mike Kruse, Ajay Garg, Joseph Lyman
  • Patent number: 7801700
    Abstract: Some embodiments of the present invention provide a system that generates a simulated vibration pattern in a computer subsystem. During operation, a vibration pattern is monitored at a location in the computer subsystem, wherein the vibration pattern is monitored while the computer subsystem is incorporated into the computer system and the computer system is operating. Then, the vibrations of the computer subsystem are mimicked by generating the simulated vibration pattern at the same location in the computer subsystem based on the monitored vibration pattern.
    Type: Grant
    Filed: August 5, 2008
    Date of Patent: September 21, 2010
    Assignee: Oracle America, Inc.
    Inventors: Kenny C. Gross, Anton A. Bougaev, Aleksey M. Urmanov
  • Patent number: 7801635
    Abstract: The invention can provide a method of etch processing a wafer using a Real-Time Parameter Tuning (RTPT) procedure to receive an input message that can include a pass-through message, a real-time feedforward message, or a real-time optimization message, or any combination thereof. The RTPT procedures can use real-time wafer data to create, modify, and/or use etch recipe data, etch profile data, and/or etch model data. In addition, RTPT procedures can use real-time wafer data to create, modify, and/or use process recipe data, process profile data, and/or process model data.
    Type: Grant
    Filed: January 30, 2007
    Date of Patent: September 21, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Merritt Funk, Sachin Deshpande, Kevin Lally
  • Patent number: 7801634
    Abstract: A mounter for a manufacturing management method suppresses an occurrence of inventory shortage or excess inventory as much as possible, and provides energy savings when manufacturing is not performed at full capacity. A throughput determining step acquires manufacturing information included in a manufacturing plan while manufacturing equipment is manufacturing mounted boards and determines a throughput of the manufacturing equipment for the mounted boards based on the manufacturing information while the manufacturing equipment is manufacturing a sequence of the mounted boards. A manufacturing condition determining step determines a manufacturing condition for decreasing power consumption of the manufacturing equipment within a range of throughput not lower than the determined throughput in the case where the throughput determined in the throughput determining step is equal to or lower than a current throughput of the manufacturing equipment.
    Type: Grant
    Filed: June 7, 2006
    Date of Patent: September 21, 2010
    Assignee: Panasonic Corporation
    Inventors: Hiroaki Kurata, Yasuhiro Maenishi
  • Publication number: 20100234970
    Abstract: A method includes: initializing first and second variables; operating equipment based on the variables; measuring first and second parameters; determining a new value for the first variable based on the first parameter, and calculating a new value for the second variable based on the second parameter and the current value of the second variable; and repeating the operating, measuring, determining and calculating. According to a different aspect, an apparatus includes a computer-readable medium storing a computer program. When executed, the program causes: initializing of first and second variables; operating equipment based on the variables; receiving measured first and second parameters; determining a new value for the first variable based on the first parameter, and calculating a new value for the second variable based on the second parameter and the current value of the second variable; and repeating the operating, measuring, determining and calculating.
    Type: Application
    Filed: March 13, 2009
    Publication date: September 16, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Feng Tsai, Andy Tsen
  • Patent number: 7797130
    Abstract: According to typical inventive practice, a baseline describing a statistical distribution is established for a set of historical occurrences of an event. Comparison is made between the baseline and at least one current occurrence of the same event. Any current occurrence that is anomalous vis-à-vis the baseline is considered a possible leading indicator. According to some inventive embodiments of graphical presentation of such comparison, at least one graphical baseline comparative display component is rendered that includes a “bar” (describing a historical statistical distribution with respect to a criterion pertaining to occurrence of an event) and a “slider” (describing one or more current occurrences of the event). The bar includes at least one band representing a statistical mean range, and at least one band representing a statistical outlier range. Situation of the slider along the bar indicates whether and to what extent the current occurrence(s) is/are anomalous vis-à-vis the baseline.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: September 14, 2010
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Eric J. Silberg, Phong Hua Nguyen, Daniel P. Everson, Naipei P. Bi
  • Publication number: 20100228376
    Abstract: A method and system for the use of prediction data in monitoring actual production targets is described herein. In one embodiment, a process is provided to receive data from a plurality of source systems in a manufacturing facility and generate a prediction pertaining to a future state of the manufacturing facility based on the data received from the plurality of source systems. A recent state of the manufacturing facility is determined based on the data received from the plurality of source systems and a comparison between the recent state and the prediction is facilitated.
    Type: Application
    Filed: February 10, 2010
    Publication date: September 9, 2010
    Inventors: Richard Stafford, David E. Norman
  • Publication number: 20100228372
    Abstract: A per-station start time scheduler identifies a station that is unavailable to perform a task over a time interval. The scheduler identifies a plurality of stations and a start time of a task. The scheduler monitors each of the plurality of stations using a station time constraint corresponding to the task. Upon detecting that a station is unavailable to perform a task over a time interval, the scheduler sends a notification specifying the station that is unavailable to perform the task.
    Type: Application
    Filed: March 5, 2010
    Publication date: September 9, 2010
    Applicant: APPLIED MATERIALS, INC.
    Inventor: David Everton Norman
  • Publication number: 20100228373
    Abstract: A version control system helps to keep track of versions of process plant items that may represent, or be capable of representing, entities in a process plant. The process plant items may comprise, for example, module objects which may be capable of specifically representing process entities of the process plant. These module objects may be created from module class objects which may be capable of generically representing process entities of the process plant. Version data is stored and associated with a module object. The version data may comprise data indicative of a version of a module class object that was used to create the module object. The version data may also comprise data indicative of a version of the module object. Configuration systems, version control systems, viewing systems, debugging systems, run-time monitoring systems, asset management systems, etc., may examine or permit viewing of the version control data associated with an item.
    Type: Application
    Filed: May 13, 2010
    Publication date: September 9, 2010
    Applicant: FISHER-ROSEMOUNT SYSTEMS, INC.
    Inventors: J. Michael Lucas, Arthur Webb, Mark J. Nixon, Larry O. Jundt, Jian Li, Dennis L. Stevenson, Michael G. Ott, Herschel O. Koska, II, Robert B. Havekost
  • Publication number: 20100222912
    Abstract: During the production of a product by means of a production machine, an evaluation device receives actual states of components of the production machine, detected by sensors at detection times, and/or operating states of a control device of the production machine at the defined detection times. The evaluation device compares the states of each detection time transmitted thereto with pre-defined state combinations and thus determines fulfilled state combinations. For each fulfilled state combination, the evaluation device selects relevant states from the states of the respective detection time transmitted thereto, and corresponding information and the respective detection time are stored with the relevant states such that they are available for other evaluations.
    Type: Application
    Filed: May 29, 2006
    Publication date: September 2, 2010
    Inventors: Michael Kaever, Volker Maier
  • Patent number: 7787967
    Abstract: A function block used in another process control system is previously associated with an data item by taking the function block being as data on a same rank as the data item. A definition-information generating section previously generates definition information about the function block associated with the data item, depending upon OPC browse information. An information-processing executing section executes a predetermined information processing by use of the association and the definition information.
    Type: Grant
    Filed: October 25, 2007
    Date of Patent: August 31, 2010
    Assignee: Yokogawa Electric Corporation
    Inventor: Kenji Torigoe
  • Patent number: 7787978
    Abstract: An apparatus, method, and computer program are provided for controller performance monitoring in a process control system. A level of disturbance associated with the process system is determined, and at least one value identifying a stability measure of a controller in the process system is determined using the determined level of disturbance and operating data associated with operation of the process system. The at least one value is compared to at least one threshold value, and a problem with the controller is identified based on the comparison. As an example, the process system could represent a product production system. Also, the operating data could include at least one of: measurement data from one or more sensors and control data for one or more actuators. The controller may be operable to receive the measurement data and generate the control data.
    Type: Grant
    Filed: October 3, 2006
    Date of Patent: August 31, 2010
    Assignee: Honeywell International Inc.
    Inventors: Sachindra K. Dash, Sujit V. Gaikwad, Konstantinos Tsakalis
  • Patent number: 7785477
    Abstract: The invention relates to a filtration system and method for carrying out a process for the filtration of fluids, comprising at least one filtration device with at least one filtration element comprising readable data and a check and/or test apparatus to which the filtration device may be connected, by means of data and testing means lines. The check and/or testing device is connected to a process controller, by data exchange means, for regulation and control of the filtration process and the process controller is connected to a filtration databank, by means of data exchange means, which comprises data sets for at least one filter element and/or for each filtration device and/or for the filtration process. The invention further relates to a computer program product for carrying out a filtration process on fluids whereby program components may be called up from a program memory which support the carrying out of the filtration process.
    Type: Grant
    Filed: March 3, 2009
    Date of Patent: August 31, 2010
    Assignee: Sartorius Stedim Biotech GmbH
    Inventors: Christian Oldendorf, Oscar-Werner Reif, Maik Jornitz
  • Patent number: 7783372
    Abstract: An automated throughput control system and method is provided. By gathering tool specific information of a plurality of process tools on entity level, appropriate throughput related performance characteristics may be calculated with high statistical significance during moderately short time intervals. Moreover, the performance characteristics obtained from tool information may be compared to reference data, for instance provided by dynamic simulation calculations, to identify high, as well as low, performing equipment on the basis of standard process control mechanisms.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: August 24, 2010
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Gunnar Flach, Thomas Quarg
  • Patent number: 7783455
    Abstract: The present invention is generally directed to various methods and systems for isolating process equipment using sensor data. In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target process operation, acquiring support facility data using a plurality of sensors, and analyzing the acquired support facility data to determine a cause for the processing tools producing different process results.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: August 24, 2010
    Assignee: GlobalFoundries Inc.
    Inventor: Elfido Coss, Jr.
  • Publication number: 20100211201
    Abstract: A control node has a sequence table and subscribers, with the sequence table having data records each having an identification for an action of a manufacturing sequence associated with the control node, an identification for a subscriber carrying out the action and an identification of a parameter set associated with the action, and wherein each subscriber has a sequence interpreter which is designed to read and to interpret the sequence table, and to initiate the actions associated with the subscriber.
    Type: Application
    Filed: February 11, 2010
    Publication date: August 19, 2010
    Inventors: Josef Papenfort, Ralf Heitmann, Gerd Hoppe, Itzko Christow
  • Patent number: 7778798
    Abstract: A system and method for measuring tool performance of a multi-path cluster semiconductor fabrication tool. The system comprises a status data unit for receiving up or down status data for each element of the tool for respective operational time periods; a performance value assignment unit for assigning a performance value to the tool for each time period based on the status data of the elements during said each time period; and an operational uptime unit for determining an operational uptime for a period covering the time periods of the tool based on multiplying the respective time periods with the corresponding assigned performance values.
    Type: Grant
    Filed: October 12, 2006
    Date of Patent: August 17, 2010
    Assignee: Systems on Silicon Manufacturing Co. Pte. Ltd.
    Inventors: Swee Keng Ang, Hanif Bin Mohamed Mohamed, Joo Ming Jackson Tan
  • Patent number: 7774086
    Abstract: A computer program product that determines a polishing endpoint includes obtaining spectra from different zones on a substrate during different times in a polishing sequence, matches the spectra with indexes in a library and uses the indexes to determining a polishing rate for each of the different zones from the indexes. An adjusted polishing rate can be determined for one of the zones, which causes the substrate to have a desired profile when the polishing end time is reached.
    Type: Grant
    Filed: August 4, 2008
    Date of Patent: August 10, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey Drue David, Dominic J. Benvegnu, Harry Q. Lee, Boguslaw A. Swedek, Lakshmanan Karuppiah
  • Patent number: 7774081
    Abstract: There is provided a manufacturing system for manufacturing an electronic device through a plurality of manufacturing stages. The manufacturing system includes a plurality of manufacturing apparatuses performing processes corresponding to the plurality of manufacturing stages.
    Type: Grant
    Filed: March 12, 2008
    Date of Patent: August 10, 2010
    Assignee: Advantest Corporation
    Inventors: Toshiyuki Okayasu, Shigetoshi Sugawa, Akinobu Teramoto
  • Patent number: 7774082
    Abstract: First feedforward calculation is executed when a preprocessing surface profile is measured and a processing chamber with its processing parameter value having been obtained through the first feedforward calculation judged to be within an allowable range is determined. Wafer transfer is executed only in conjunction with a processing chamber having a processing parameter value judged to be within the allowable range, and the wafer is carried to the entry point of the processing chamber. Then, second feedforward calculation is executed by reflecting the results of feedback calculation executed based upon the most recent processing having been executed in the particular processing chamber and wafer processing is executed in the processing chamber based upon the processing parameter value calculated in the second feedforward calculation.
    Type: Grant
    Filed: October 4, 2007
    Date of Patent: August 10, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Shigeru Kubota, Shinji Sakano
  • Patent number: 7769480
    Abstract: In an inspection procedure of a completed product of an automatic transmission main body at a unit factory, a control system transmits a control signal to an actuator to receive characteristic data (hardware performance information) output in response to operation of the automatic transmission main body according to the control signal. The hardware performance information of the automatic transmission main body is brought into correspondence with hardware identification information, and set in a database as learning value data. The learning value data of the automatic transmission main body is transferred to a vehicle factory to be aggregated in a database management system at the vehicle factory.
    Type: Grant
    Filed: May 24, 2005
    Date of Patent: August 3, 2010
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventors: Tomoyuki Kano, Masato Matsubara
  • Patent number: 7769482
    Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
    Type: Grant
    Filed: October 23, 2007
    Date of Patent: August 3, 2010
    Assignee: Brooks Automation, Inc.
    Inventors: Patrick D. Pannese, Vinaya Kavathekar, Peter van der Meulen
  • Patent number: 7769629
    Abstract: A system and method for providing online incentive programs that allows participants in the programs to access hierarchical reports detailing the current status of the incentive programs. The incentive programs include means to restrict access to the various hierarchical reports to prevent the different levels of management from accessing information relating to higher levels of management. Participants may therefore monitor their performance, as well as the performance of those individuals who are under their control.
    Type: Grant
    Filed: September 23, 2002
    Date of Patent: August 3, 2010
    Assignee: Marketing Technology Concepts, Inc.
    Inventors: George Kriza, Travis Kriza
  • Publication number: 20100191361
    Abstract: A method, controller, and system for controlling a manufacturing process (batch-type or continuous-type) with a multivariate model are described. Dependent variable data and manipulated variable data are received. Dependent variable data represents values of uncontrolled process parameters from a plurality of sensors. Manipulated variable data represents controlled or setpoint values of controllable process parameters of a plurality of process tools. A predicted operational value, multivariate statistic, or both are determined based on the received data, and operating parameters of the manufacturing process are determined based on the predicted score, multivariate statistic, or both.
    Type: Application
    Filed: January 23, 2009
    Publication date: July 29, 2010
    Applicant: MKS Instruments, Inc.
    Inventors: Christopher Peter McCready, Svante Bjarne Wold
  • Patent number: 7765020
    Abstract: Methods and apparatuses for presenting multivariate fault contributions in a user interface are described. A user interface is provided to illustrate a fault for a sample manufactured by a process containing multiple variables, each having at least two components. The user interface presents one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis and graphically illustrates contributions to the fault associated with the multiple variables by associating a contribution of each component in the one group of components of the multiple variables to each corresponding component in the second group of components of the multiple variables.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: July 27, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Y. Sean Lin, Alexander T. Schwarm
  • Patent number: 7765021
    Abstract: A method, and computer program product and system for performing the method, is provided for designing a mask used in the manufacture of semiconductor integrated circuits, in which a model of the lithographic process is used during the mask design process. More particularly, the on-wafer process model is a function of optical image parameters that are calibrated using measurements from a test pattern. An uncertainty metric for the predicted response simulated by the on-wafer process model is computed for a given evaluation point of interest as a function of a distance metric between the collective optical image parameters simulated at the given evaluation point and the collective optical image parameters at the calibration data points. The uncertainty metric preferably is also a function of the sensitivity of the on-wafer process model response to changes in the optical image parameters.
    Type: Grant
    Filed: January 16, 2008
    Date of Patent: July 27, 2010
    Assignee: International Business Machines Corporation
    Inventors: Scott M. Mansfield, Lars W. Liebmann, Mohamed Talbi
  • Patent number: 7761180
    Abstract: A system and method for monitoring product through a batch manufacturing plant is provided. The system includes, a parallel flow mode when product flows concurrently from at least two units to a single unit; and a serial flow mode where product flows from one unit to another at a given time, wherein the batch manufacturing plant is modeled based on the parallel and serial flow modes. A lot association is built based on product flow and a parent/child record is created for lot association. The system also includes a data collection system that collects phase information for every unit and a procedure identifier is used to create a batch identifier, where a batch identifier is associated with each lot on each unit through which product is flowing to and/or from at a given time.
    Type: Grant
    Filed: February 25, 2009
    Date of Patent: July 20, 2010
    Assignee: Vigilistics, Inc.
    Inventors: Charles J Scalfani, Donald L Gaudino, Craig A. Nelson, Steven C. McCormick, Therese M. Sonnenfeld, Todd A Soutar
  • Publication number: 20100179676
    Abstract: The system comprises a conveyor for conveying a plurality of moulds along a production path on which is located a plurality of stations, each of which can execute at least one corresponding operation. Each mould carries an electronic identification device including memory devices from and to which information or data can be read and written without contact by means of an antenna. Each station is provided with an electronic unit including a processor, having memory devices and at least one antenna, and designed to read and/or write information or data from or to the memory devices of a mould passing through the station. An initial input station transfers or writes to the memory devices of each mould passing through it information identifying the products to be formed in the mould and relating to corresponding forming operations.
    Type: Application
    Filed: June 19, 2008
    Publication date: July 15, 2010
    Applicant: SOREMARTEC S.A.
    Inventors: Eugenio Alessandria, Massimo Giacosa
  • Patent number: 7756678
    Abstract: A method for advanced condition monitoring of an asset system includes using a plurality of auto-associative neural networks to determine estimates of actual values sensed by at least one sensor in at least one of the plurality of operating regimes; determining a residual between the estimated sensed values and the actual values sensed by the at least one sensor from each of the plurality of auto-associative neural networks; and combining the residuals by using a fuzzy supervisory model blender; performing a fault diagnostic on the combined residuals; and determining a change of the operation of the asset system by analysis of the combined residuals. An alert is provided if necessary. A smart sensor system includes an on-board processing unit for performing the method of the invention.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: July 13, 2010
    Assignee: General Electric Company
    Inventors: Piero Patrone Bonissone, John Erik Hershey, Robert James Mitchell, Jr., Rajesh Venkat Subbu, Jr., Avinash Vinayak Taware, Xiao Hu
  • Patent number: 7756598
    Abstract: WIP status updates, as received from semiconductor manufacturing suppliers, is converted to transactions. In one approach, supply chain events, for example lot splits, lot merges, and lot scrap, are identified based on previous lot statuses and current lot statuses from the WIP status update. Identified events are interpreted as transactions, which can be used to interface with a transactional system such as an ERP system.
    Type: Grant
    Filed: December 30, 2008
    Date of Patent: July 13, 2010
    Assignee: eSilicon Corporation
    Inventors: Sabhapathi Naidu Annamaneni, Sarangkumar Sharadchandra Bhavsar
  • Patent number: RE41476
    Abstract: A computer based system is provided that is capable of displaying component and process structures for configurable product classes stored in a data structure. Product classes in the data structure are represented by product nodes. Components, which are abstractions of concrete items used in the product, are represented by component nodes. Component nodes are mapped to each product class with which the component is associated, and are associated with one or more component variants, which are concrete items used in the manufacture of a particular product variant. Process nodes, which are abstractions of actual steps required to produce a product variant, known as process variants, are represented by process nodes. The computer based system can display several alternative views of the data structure. For example, upon receiving a selection for a particular product class, the computer based system converts and can graphically display all component and process nodes associated with that product class.
    Type: Grant
    Filed: April 23, 2003
    Date of Patent: August 3, 2010
    Assignee: SAP Aktiengesellschaft
    Inventors: Peter Muehleck, Adam Polly