Performance Monitoring Patents (Class 700/108)
  • Publication number: 20100174394
    Abstract: An apparatus for the removal of bottles or containers from a bottle or container cleaning arrangement in a bottle or container filling plant. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims. Therefore, any statements made relating to the abstract are not intended to limit the claims in any manner and should not be interpreted as limiting the claims in any manner.
    Type: Application
    Filed: July 10, 2009
    Publication date: July 8, 2010
    Inventor: Klaus JENDRICHOWSKI
  • Publication number: 20100174395
    Abstract: A method of testing a physical manufacturing automation system for manufactured work pieces is provided via a testing system and includes connecting a computer-simulated manufacturing automation system to a controller of the physical manufacturing automation system, wherein the computer-simulated manufacturing automation system is configured to represent a portion of the physical manufacturing automation system, including a simulated work piece. The method then includes concurrently running the physical manufacturing automation system and the computer-simulated manufacturing automation system via the controller, with the physical automation system running in the absence of the physical work pieces.
    Type: Application
    Filed: January 6, 2009
    Publication date: July 8, 2010
    Applicant: GM GLOBAL TECHNOLOGY OPERATIONS, INC.
    Inventors: Fangming Gu, Chengyin Yuan, Stephan R. Biller
  • Publication number: 20100174393
    Abstract: A photomask for integrated circuit production comprising a substrate, one or more layers and a detector for monitoring a process parameter of the integrated circuit production in combination with one or more of the following: communication circuitry for communicating with external equipment for the integrated circuit production, a computational processor for analyzing the monitored process parameter, and a data storage component. In addition, a method of integrated circuit production comprising the steps of providing a photomask in the integrated circuit production process and monitoring a process parameter of the integrated circuit production using the photomask, in combination with one or more following steps: analyzing the monitored process parameter using the photomask; communicating the monitored process parameter from the photomask to external equipment involved in the integrated circuit production; and storing the monitored process parameter in the photomask.
    Type: Application
    Filed: March 19, 2010
    Publication date: July 8, 2010
    Inventor: Christopher Progler
  • Patent number: 7751921
    Abstract: In order to detect an abnormality of semiconductor manufacturing apparatus, a biaxial coordinate system having first and second axes respectively assigned two different monitoring parameters selected from plural apparatus status parameters representing statuses of semiconductor manufacturing apparatus is prepared. As monitoring parameters, for example, a cumulative film thickness for deposition processes that have previously been performed in deposition apparatus and an opening of the pressure control valve located in a vacuum exhaust path to control the internal pressure of a reaction vessel are selected. Values of monitoring parameters obtained when the semiconductor manufacturing apparatus was normally operating are plotted on the biaxial coordinate system. A boundary between a normal condition and an abnormality status is set around a plot group.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: July 6, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Koichi Sakamoto, Minoru Obata, Noriaki Koyama
  • Patent number: 7751922
    Abstract: A processing furnace for performing prescribed heat treatment on plural substrates, a boat for carrying the plural substrates that are laid one over another in the boat into and out of the processing furnace, a substrate detecting sensor for detecting the plural substrates laid one over another in the boat by changing a relative position of the substrate detecting sensor with respect to each of the plural substrates, and a control section for registering reference positions of the plural substrates and an allowable range of positional deviations from the reference positions of the plural substrates are provided.
    Type: Grant
    Filed: October 3, 2005
    Date of Patent: July 6, 2010
    Assignee: Hitachi Kokusai Electric Inc.
    Inventors: Makoto Hirano, Norichika Yamagishi, Akihiro Yoshida
  • Patent number: 7751911
    Abstract: A failure alarm device includes: an operation instruction capturing unit; an operation status signal capturing unit; and a timing and alarming unit for starting timing when the operation instruction capturing unit captures a start-operation instruction and the operation status signal capturing unit captures an operation status signal indicative of that the CMP apparatus is in the preset operation status, and for alarming if a duration of the operation status signal indicative times out. During operation of the CMP apparatus, when there occurs an unexpected failure in a computer or control software or the CMP apparatus is powered off, an alarm can be initiated in a timely way so as to inform an apparatus engineer to obviate the failure, and wafer rejects in the CMP apparatus can be avoided. A failure alarm method is also provided.
    Type: Grant
    Filed: December 5, 2007
    Date of Patent: July 6, 2010
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventor: Yigang Zhang
  • Patent number: 7752088
    Abstract: Providing an on site server with a data base and an on site handheld computer/scanner. Comparing and updating location input in the server database through the handheld computer/scanner at the site of physical assets being inventoried. Adding racks and rows of racks and inputting the location of the racks into the handheld computer/scanner. Specifying the location of power supplies and the type of power supplies. Designating rack unit positions and selecting manufacturer/model numbers for rack mounted devices. Entering specifications of rack mounted devices, and inputting floor mounted devices into the handheld computer/scanner. Defining floor mounted devices power connections and updating the handheld computer/scanner.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: July 6, 2010
    Inventor: Joseph Coschera
  • Publication number: 20100168891
    Abstract: A computer model is formed of a mounting component (18) to be mounted at a target location on a mounting surface (12) of a base component (11). A position and viewing direction of a digital camera (3) is determined relative to the base component (11) and a live image (11?) of the base component as viewed by the camera (3) is displayed on a monitor (4). The monitor (4) also displays a mounting component target image (18?) generated by a computer (2) of the mounting component (18) mounted at the target location on the mounting surface (12) superimposed over the live image (11?) of the base component. A user physically moves the mounting component (18) relative to the base component (11) until a live image of the mounting component as viewed by the camera (3) coincides with the mounting component target image (18?).
    Type: Application
    Filed: August 21, 2007
    Publication date: July 1, 2010
    Inventor: George Kretsis
  • Publication number: 20100168898
    Abstract: A control system for controlling the display of an injection molding machine (IMM) includes a human machine interface (HMI), a driver, a controller, a timer, and a time display module. The controller controls the driver to drive the IMM to do a plurality of operations. The time display module controls the HMI to display working times of operations that have been done, and the working time of an operation that is in process in the current work cycle. The timer records working time of each operation by starting to time at the beginning of each operation, and stopping timing at the end of each operation.
    Type: Application
    Filed: December 31, 2008
    Publication date: July 1, 2010
    Applicant: FOXNUM TECHNOLOGY CO., LTD.
    Inventors: HSUAN-HUNG HSU, HSING-CHANG LIU
  • Publication number: 20100161101
    Abstract: A software agent is described that receives an information request to retrieve information based on a name defined by a configured manufacturing data model. The agent serves the request by relating data coming from one or multiple backend systems and adding contextual data (Metadata). A result set is prepared to correspond to the format and filtering criteria defined in the information request, and the agent produces a response in a normalized format. The response contains the requested data and metadata used for navigation and contextualization purposes. The response in the normalized format is transmitted by the agent synchronously or asynchronously based on criteria specified in the request.
    Type: Application
    Filed: October 5, 2009
    Publication date: June 24, 2010
    Applicant: Invensys Systems, Inc.
    Inventors: Nicolas Pouyez, Keynon Basinger, Nicholas Beets, Stephane Bischoff, James Eric O'Hearn, Ravi Kumar Herunde Prakash, Patrick Parsy, Christian-Marc Pouyez
  • Publication number: 20100161102
    Abstract: In a method of providing a material amount for a generative manufacturing method, a three-dimensional object (2) is formed by selectively solidifying layers of a material at locations corresponding to the cross-section of the object (2) in the respective layers. It is the object of the present invention to provide a method, by which the quality of the manufactured objects is reproducibly recorded and, thus, further improved. Therefore, the method is characterized by the steps of: providing at least one first material amount, which is characterized by at least one feature; detecting data, which relate to the at least one feature of the first material amount; and storing data, which relate to the at least one feature of the first material amount.
    Type: Application
    Filed: December 1, 2009
    Publication date: June 24, 2010
    Applicant: EOS GmbH Electro Optical Systems
    Inventors: Thomas Mattes, Ludger Hümmeler, Markus Frohnmaier
  • Publication number: 20100161103
    Abstract: By controlling the flow rate of one or more gaseous components of an etch ambient during the formation of metal lines and vias on the basis of feedback measurement data from critical dimensions, process variations may be reduced, thereby enhancing performance and reliability of the respective metallization structure.
    Type: Application
    Filed: March 5, 2010
    Publication date: June 24, 2010
    Inventors: Matthias SCHALLER, Uwe SCHULZE, Mathias BARANYAI
  • Patent number: 7742833
    Abstract: Systems and methods that facilitate discovery of history data via a locator component associated with a plant embedded historian(s) of an industrial programmer (e.g., a controller device.) Such locator component can further detect micro historians that are distributed on the back plane of an industrial network. The locator component can be part of applications running on a control unit, which can function as a management control center for the industrial network system. A common data model can be employed to expose functionality and data of the organization to the embedded historian component.
    Type: Grant
    Filed: September 28, 2006
    Date of Patent: June 22, 2010
    Assignee: Rockwell Automation Technologies, Inc.
    Inventors: Robert J. Herbst, Frank Anthony Palmieri, Jr., Taryl J. Jasper, Robert J. McGreevy, John T. Campbell, John J. Baier
  • Publication number: 20100152879
    Abstract: A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a process parameter being monitored during recipe execution. The tool also includes a logic circuitry configured for receiving a set of meta-data wherein each meta-data includes identification data about the substrate and the process recipe being executed. The logic circuitry is also configured for receiving a set of process data streams, each of which being associated with a specific process recipe. The logic circuitry further includes storing the meta-data and the process data streams associated with the first process recipe as a first file and the meta-data and the process data streams associated with the second process recipe as a second file.
    Type: Application
    Filed: February 23, 2010
    Publication date: June 17, 2010
    Inventors: Chad R. Weetman, Chung-Ho Huang, Jacqueline Seto, John Jensen
  • Publication number: 20100152877
    Abstract: A component mounting method for mounting a component on a substrate is used by a component mounter including: a mounting head mounting the component on the substrate; and an inspection head inspecting a surface status of the substrate. The component mounting method includes: repeatedly mounting a component to be mounted on a predetermined substrate by the mounting head; determining whether or not the component to be mounted is a predetermined component; and when the determination is made that the component to be mounted is the predetermined component, performing at least one of (i) inspecting a mounting status of the predetermined component after mounting the predetermined component and (ii) inspecting a status of a mounting surface on which the predetermined component is to be mounted, before mounting the predetermined component.
    Type: Application
    Filed: May 20, 2008
    Publication date: June 17, 2010
    Inventor: Yasuhiro Maenishi
  • Patent number: 7738978
    Abstract: A method for forecasting batch end conditions through their depiction as a multi-dimensional regions of uncertainty is disclosed. A visualization of the current condition of a continuous process and visualization of the simulated effect of user control moves are generated for a user. Volume visualization tools for viewing and querying intersecting solids in 3-dimensional space are utilized to perform the process visualization. Interactive tools for slicing multi-dimensional (>3) regions and drawing superimposed projections in 3-D space are provided. Additionally, graphical manipulation of the views of process conditions is accomplished by changing the hypothetical future values of contributing variables online in order to provide users the ability to simulate the effect of proposed control actions.
    Type: Grant
    Filed: March 6, 2006
    Date of Patent: June 15, 2010
    Assignee: The MathWorks, Inc.
    Inventors: Rajiv Singh, James G. Owen
  • Publication number: 20100145493
    Abstract: A process automation system for determining, monitoring and/or influencing different process variables and/or state variables in at least one manufacturing or analytical process. Included is: at least one control station; and a plurality of field devices; wherein in each field device at least one sensor is provided for ascertaining a measured value of a process variable and/or state variable and/or an actuator is provided for influencing a process variable and/or state variable by means of an actuating value. Each field device makes available its cyclically or acyclically ascertained, measuring-device-specific, measured values and/or actuating values of the process variable and/or state variable to every other field device of the process automation system as information, and the current information of all ascertained measured values and/or actuating values of the process variables and/or state variables is available to each field device as a current process-state-vector.
    Type: Application
    Filed: October 15, 2007
    Publication date: June 10, 2010
    Applicant: Endress + Hauser GmbH + Co KG
    Inventors: Andreas Gommlich, Dietmar Spanke, Detlev Wittmer, Dirk Boghun, Herwig Jorg, Romer Matthias
  • Patent number: 7735055
    Abstract: A method of creating photo mask data includes preparing design data of a photo mask, generating drawing data of the photo mask by using the design data, generating inspection control information configured to control inspection of defect on the photo mask by using the drawing data, and generating drawing and inspection data including the drawing data and the inspection control information by providing the drawing data with the inspection control information.
    Type: Grant
    Filed: July 22, 2005
    Date of Patent: June 8, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tomohiro Tsutsui, Osamu Ikenaga
  • Patent number: 7729792
    Abstract: A version control system helps to keep track of versions of process plant items that may represent, or be capable of representing, entities in a process plant. The process plant items may comprise, for example, module objects which may be capable of specifically representing process entities of the process plant. These module objects may be created from module class objects which may be capable of generically representing process entities of the process plant. Version data is stored and associated with a module object. The version data may comprise data indicative of a version of a module class object that was used to create the module object. The version data may also comprise data indicative of a version of the module object. Configuration systems, version control systems, viewing systems, debugging systems, run-time monitoring systems, asset management systems, etc., may examine or permit viewing of the version control data associated with an item.
    Type: Grant
    Filed: September 6, 2006
    Date of Patent: June 1, 2010
    Assignee: Fisher-Rosemount Systems, Inc.
    Inventors: J. Michael Lucas, Arthur Webb, Mark J. Nixon, Larry O. Jundt, Jian Li, Dennis L. Stevenson, Michael G. Ott, Herschel O. Koska, Robert B. Havekost
  • Patent number: 7729789
    Abstract: Disclosed are systems and methods for on-line monitoring of operation of a process in connection with process measurements indicative of the operation of the process. In some cases, the operation of the process is simulated to generate model data indicative of a simulated representation of the operation of the process and based on the process measurements. A multivariate statistical analysis of the operation of the process is implemented based on the model data and the process measurements. The output data from the multivariate statistical analysis may then be evaluated during the operation of the process to enable the on-line monitoring of the process involving, for instance, fault detection via classification analysis of the output data.
    Type: Grant
    Filed: September 6, 2006
    Date of Patent: June 1, 2010
    Assignee: Fisher-Rosemount Systems, Inc.
    Inventors: Terrence L. Blevins, Mark J. Nixon, Gregory K. McMillan
  • Patent number: 7725298
    Abstract: An improved method, apparatus, and computer instructions for generating trace data. In response to detecting a new trace event, a determination is made as to whether the new trace event occurred at an expected period of time with respect to a prior trace event. A time stamp in the trace data is placed in response to a determination that the new trace event did not occur at the expected period of time, wherein time stamps occurring at the expected period if time are eliminated from the trace data and wherein compression of the trace data occurs.
    Type: Grant
    Filed: December 13, 2007
    Date of Patent: May 25, 2010
    Assignee: International Business Machines Corporation
    Inventors: Frank Eliot Levine, Milena Milenkovic, Robert J. Urquhart
  • Patent number: 7725617
    Abstract: The invention relates to a data output method and to a data output system comprising: a printing device; a database device, in which corresponding reference data and/or control data are stored for a plurality of data output system users; and a data output control device that delivers, at points in time determined by the data output control device, output data sets allocated to corresponding users to the printing device, wherein a predefined subset of the output data sets is—for performing a test printing—delivered to the printing device in advance already.
    Type: Grant
    Filed: October 25, 2004
    Date of Patent: May 25, 2010
    Assignee: UBS AG
    Inventors: Giuseppe Codispoti, Ernst Dubach
  • Publication number: 20100125354
    Abstract: A hybrid data collection and component installation scheme for optimizing equipment cost, throughput, and quality practices in a multi-stage manufacturing environment. A kit comprising a plurality of parts corresponding to an order for a product is received from one of the stages in the multi-stage manufacturing environment. The parts in the kit were validated in the stage using data collected about the plurality of parts in the stage. At a subsequent stage in the manufacturing environment, a determination is made if the product qualifies for mass installation. If the product qualifies for mass installation, a set of parts in the kit is selected for mass installation. The set of parts are re-verified using the data collected in the previous stage in the environment to determine if the set of parts selected for mass installation is valid. If valid, the set of parts are installed en masse.
    Type: Application
    Filed: November 14, 2008
    Publication date: May 20, 2010
    Applicant: International Business Machines Corporation
    Inventors: Ivory Wellman Knipfer, Jason Scott Lee, Matthew H. Zemke
  • Patent number: 7720560
    Abstract: A system and method for monitoring a semiconductor manufacturing process is disclosed. The system communicates with one or more process tools, and monitors each tool during a predetermined process window time. Errors and warnings are provided to users, allowing corrective action to be taken. Additionally, the system of the present invention can initiate automatic adjustment of the process tools to maintain an efficient manufacturing operation.
    Type: Grant
    Filed: July 26, 2007
    Date of Patent: May 18, 2010
    Assignee: International Business Machines Corporation
    Inventors: Clayton David Menser, Jr., Jeffrey Paul Gilfford
  • Patent number: 7715936
    Abstract: A computer-based system and method for production planning are described that relies on developing factory shop floor modeling. This modeling includes simulating the factory shop floor to create a Virtual Factory. This Virtual Factory provides the ability to assess any possible production sequence for determining an optimal of production sequence according to the criteria defined the user.
    Type: Grant
    Filed: August 23, 2007
    Date of Patent: May 11, 2010
    Assignee: I-Factory Inc.
    Inventor: Rainer Thierauf
  • Patent number: 7715937
    Abstract: A method and system sorts manufactured integrated circuit devices by evaluating performance characteristics of the manufactured integrated circuit devices. All of the integrated circuit devices are manufactured using an identical design, and differences in the performance characteristics among the integrated circuit devices occurs because of variations including manufacturing line variations. The integrated circuit devices are sorted into groups according to the performance characteristics and are utilized in different computing devices depending upon individual performance requirements of the computing devices.
    Type: Grant
    Filed: October 11, 2006
    Date of Patent: May 11, 2010
    Assignee: International Business Machines Corporation
    Inventors: Frances S. Clougherty, Benjamin R. Bayat
  • Publication number: 20100100215
    Abstract: Power consumption required for producing a product is obtained more accurately and in an earlier stage. Actual line power consumption of a production line, apparatus characteristics of each apparatus of the production line, a rated power of each apparatus, and numerical data of each specification item of each product are received (S31). A coefficient for each apparatus is determined by using a relation between an apparatus characteristic and a ratio (coefficient) of the actual power consumption to the rated power of the apparatus (S32). A correlated specification item for each apparatus is determined by using an apparatus characteristic-correlated specification item relation that relates an apparatus characteristic and a specification item correlated with the apparatus power consumption (S33). Power consumption of each apparatus is obtained by allotting the actual line power consumption to each apparatus by using the rated power and coefficient of each apparatus (S34).
    Type: Application
    Filed: July 31, 2009
    Publication date: April 22, 2010
    Inventors: Tomohiko AKAHORI, Osamu NAMIKAWA
  • Patent number: 7703079
    Abstract: Overall system performance improvements resulting from improvements to individual system components may be predicted by analyzing the effects of artificial performance degradations inserted into the individual components. Measuring and analyzing a negative overall system effect caused by negative changes to an individual component may predict a positive overall system performance improvement resulting from an improvement to the individual component of similar magnitude to the inserted negative changes. System performance prediction may be used to analyze and predict system performance changes related to various computing resources, such as execution time (speed), memory usage, network bandwidth, file I/O, and/or disk storage space, among others.
    Type: Grant
    Filed: May 3, 2005
    Date of Patent: April 20, 2010
    Assignee: Oracle America, Inc.
    Inventors: Andrew P. Burrows, Andrew M. Bowers
  • Publication number: 20100094448
    Abstract: A method for controlling semiconductor manufacturing equipment in a waiting mode, comprising: retrieving information about a waiting time for a product to be provided to the semiconductor manufacturing equipment on a production line, the product being to be subjected to predetermined processing by the semiconductor manufacturing equipment; comparing the waiting time with a period of time required for energy saving control, the period of time required for energy saving control including: lowering electric power and other energy used by the semiconductor manufacturing equipment in the waiting mode to a low-energy level at which the processing is not ready, and then raising the electric power and the other energy to a level at which the processing is ready; and providing the energy saving control during the waiting time if the waiting time is longer than the required period of time.
    Type: Application
    Filed: December 10, 2009
    Publication date: April 15, 2010
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Tetsu TOMINE
  • Patent number: 7698242
    Abstract: Example systems and methods to maintain process control systems are disclosed. A disclosed example method involves retrieving first information and determining whether the first information is associated with a process control system. If the first information is associated with the process control system, second information is generated to indicate that the first information is associated with the process control system. It is also determined whether the first information is associated with a particular node of the process control system. If the first information is associated with the particular node of the process control system, third information is generated to indicate that the first information is associated with the particular node.
    Type: Grant
    Filed: August 16, 2006
    Date of Patent: April 13, 2010
    Assignee: Fisher-Rosemount Systems, Inc.
    Inventors: Kim O. Van Camp, Trevor Duncan Schleiss
  • Patent number: 7698011
    Abstract: An operating condition monitoring apparatus includes a load-time information acquisition unit 203 obtaining load-time information, of one or more production apparatuses 11, concerning load time allocated to production within a predetermined period, an operating-time information acquisition unit 204 obtaining operating-time information, of one or more production apparatuses 11, concerning operating time that is operable time for the production apparatuses within the predetermined period, an individual operating-rate calculation unit 205 calculating an individual operating rate of one or more production apparatuses 11 by dividing the operating time indicated in the operating-time information by the load time indicated in the load-time information, and an output unit 213 outputting the individual operating rate, in order to identify the production apparatus causing the stoppage of a production line.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: April 13, 2010
    Assignee: Omron Corporation
    Inventors: Manabu Tsuda, Toru Fujii
  • Publication number: 20100082143
    Abstract: Systems and methods for efficiently improving manufacturing conditions are presented herein. A data collection component can record one or more manufacturing parameters of a product during a manufacture of the product. A historical component can retrieve stored manufacturing information related to the product. In addition, a prediction component can predict, during the manufacture, an outcome associated with the manufacture. The prediction can be based on, at least in part, the recorded manufacturing parameter(s) and the retrieved information. A specification component can determine a desired characteristic state for at least one of the recorded manufacturing parameters, and a suggestion component can recommend, during the manufacture, an adjustment of at least one parameter based on, at least in part, the predicted outcome and the desired characteristic state for the at least one recorded manufacturing parameter(s).
    Type: Application
    Filed: September 30, 2008
    Publication date: April 1, 2010
    Applicant: ROCKWELL AUTOMATION TECHNOLOGIES, INC.
    Inventors: Michael John Pantaleano, Bruce Gordon Fuller, Robert Joseph McGreevy, Ian Edward Tooke, Kevin John Albert, John Joseph Baier, Jan Pingel
  • Publication number: 20100082138
    Abstract: A system is disclosed providing visualization of a production control framework. The system includes a database storing production control data associated with one or more entities and a production control system coupled with the database and configured to model a production control framework of the one or more entities. The production control system includes one or more work centers authorizing one or more tasks for one or more parts and one or more manufacturing processes that produce one or more finished parts using the one or more parts.
    Type: Application
    Filed: September 23, 2009
    Publication date: April 1, 2010
    Inventors: Timothy R. Hayes, Aamer Rehman
  • Patent number: 7689730
    Abstract: The invention relates to a data output method and to a data output system comprising: a printing device; a database device in which corresponding reference data and/or control data are stored for a plurality of data output system users; a data output control device providing or compiling corresponding output data sets and delivering same to the printing device; and a device for monitoring the providing or compiling and/or the delivering of the output data sets to the printing device.
    Type: Grant
    Filed: October 25, 2004
    Date of Patent: March 30, 2010
    Assignee: UBS AG
    Inventors: Giuseppe Codispoti, Ernst Dubach
  • Patent number: 7689312
    Abstract: A method, computer program product, and system for handling an error that occurs during processing of a job in a manufacturing system are provided. The method, computer program product, and system provide for determining a first location in the job where a first subsystem of the manufacturing system is currently processing, identifying a second location in the job where a second subsystem of the manufacturing system completed processing before the error occurred at the second subsystem, the second subsystem being connected in series to and downstream from the first subsystem, and providing a controller-generated repositioning instruction for the first subsystem based on the first location and the second location.
    Type: Grant
    Filed: October 31, 2005
    Date of Patent: March 30, 2010
    Assignee: Infoprint Solutions Company, LLC
    Inventors: Robert W. Goings, Dwight R. Palmer, Rodney L. Sherwood
  • Patent number: 7689298
    Abstract: A number of methods to support process quality and maintenance during control of an industrial process such as welding are provided. The methods provide, among other things: automatic process limit programming based on runtime data; user-initiated process limit programming based on upcoming data; correlate equipment deterioration based on capability measurement; correlate tip dressers/formers to new; detect electrical deterioration; integrate process data with programmed data for a visual aid; and quantify process variation in welding tools (pareto of stddev of the c-factor).
    Type: Grant
    Filed: April 19, 2007
    Date of Patent: March 30, 2010
    Inventor: David R. Britton
  • Patent number: 7689028
    Abstract: A method for predicting a processing result includes a process of performing a principal component analysis on a plurality of detected data obtained during a first standard processing, to construct a principal component analysis model; a process of obtaining residuals of the principal component analysis model as first residuals; a process of performing a second standard processing; and a process of obtaining a plurality of detected data from a plurality of detectors during the second standard processing. And, the detected data obtained during the second standard processing are applied to the principal component analysis model, to obtain second residuals. The method further includes a process of weighting the second residuals based on weighting references, and constructing a new multivariate analysis model with use of the weighted second residuals; and a process of predicting a processing result of the second standard processing with use of the multivariate analysis model.
    Type: Grant
    Filed: November 10, 2004
    Date of Patent: March 30, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Shinji Sakano, Satoshi Harada
  • Publication number: 20100076584
    Abstract: A sampling inspection method is provided. The sampling inspection method is adapted for a multi-product production line including a plurality of tools. The sampling inspection method includes the steps of: providing a tool record, which records a sampling data of each of the tools; then checking each sampling data recorded in the tool record, and finding out at least one unsampled tool from the tools; then defining a plurality of product lots as being performed with process operations by at least one of the at least one unsampled tool; and determining at least one of the product lots for performing a sampling inspection.
    Type: Application
    Filed: September 19, 2008
    Publication date: March 25, 2010
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Kai-Ping Huang, Sung-Lin Tsai, Michael Kian Ann Wee, Boon-Wah Chong
  • Publication number: 20100065155
    Abstract: A system and a method for monitoring the performance of a subsystem of a forest machine. The method comprises the steps of: collecting data relating to the function of said subsystem or the performing of said function; determining one or more characteristic values to describe the performance continually according to data; and monitoring the variation of said one or more characteristic values in time, wherein, for example, the variation of said one or more characteristic values in time is displayed in the form of a graphic presentation to the user.
    Type: Application
    Filed: May 12, 2006
    Publication date: March 18, 2010
    Applicant: JOHN DEERE FORESTRY OY
    Inventors: Arto Peltomae, Aki Putkonen, Kari Lehmusvaara, Timo Käppi
  • Patent number: 7680553
    Abstract: Methods of interfacing nanomaterials used to monitor and execute the pharmaceutical manufacturing process are disclosed herein. The nanomaterials are useful to provide a plurality of analysis to the manufacturing process. Consequently, the methods provide a means to perform validation and quality manufacturing on an integrated level whereby pharmaceutical manufacturers can achieve data and product integrity and ultimately minimize cost.
    Type: Grant
    Filed: March 8, 2007
    Date of Patent: March 16, 2010
    Assignee: SMP Logic Systems LLC
    Inventor: Shane M. Popp
  • Publication number: 20100063610
    Abstract: A method and system employing said method for analyzing process module performance in semiconductor manufacturing. The method and system include process modules as part of a process tool. A process initiated in the process module includes steps. Each step includes specified performance parameters. A detection device detects at least one predetermined measurement in the process module. A program and processor generate data about the process module and steps and generates data about the steps and the process module. The program provides statistical analysis of the steps and the environment of the process module using the generated data and the performance parameters. The program determines variations between the process step performance parameters and the generated data about the process steps.
    Type: Application
    Filed: September 8, 2008
    Publication date: March 11, 2010
    Inventors: David Angell, Bruce Raymond Clemens, Michael W. Mock, Gary R. Moore, Kathy Shackett, Nancy Tovey, Justin Wai-chow Wong
  • Publication number: 20100063611
    Abstract: Systems and methods (300) for offline/online performance monitoring of batch processes (BPs) involving obtaining archived data (AD) obtained during runs of BP and including information defining a batch quality attribute for each run. The method also involves forming clusters by classifying AD for the runs into classes based on the batch quality attribute(s) and building a first multivariate statistical model (MSM) using AD. The method can further involve building a wavelet analysis based feature matrix (FM) using AD, forming a first projection (1200) by projecting FM onto a first MSM, building a second MSM (1300) using information obtained from the first projection, and computing centroids (C902, . . . , C918) and boundary profiles for the clusters (902, . . . , 918). The method can involve performing an online/offline performance monitoring (700/800) using an integrated version of the first and second MSM, a classification algorithm, centroids, and boundary profiles.
    Type: Application
    Filed: September 11, 2008
    Publication date: March 11, 2010
    Inventors: Shailesh Rajnikant Patel, Ramprasad Yelchuru, Srikanth Ryali, Pradeep K. Shetty, Gudi Ravindra
  • Publication number: 20100063609
    Abstract: A method of controlling a multiple spindle machine includes measuring the motor currents provided to a first spindle and a second spindle over a period of time, establishing an amount of time between impacts on a workpiece of a cutting tooth of the first spindle relative to a cutting tooth of the second spindle based on the measured motor currents of the first spindle and the second spindle, determining an angle to shift the second spindle relative to the first spindle, and increasing or decreasing the amount of time between impacts to obtain the determined shift angle for the second spindle.
    Type: Application
    Filed: September 5, 2008
    Publication date: March 11, 2010
    Applicant: Cincinnati Machine, LLC
    Inventor: Mark Douglas Kohring
  • Patent number: 7676294
    Abstract: A visualization system that generates a visualization of manufacturing operations and corresponding workflow is provided. An interface component receives input concerning displayed objects and information. A context component can detect, infer or determine context information regarding an entity or application. A workflow component binds workflow information to industrial automation manufacturing-related information. A visualization component dynamically generates a visualization from a set of display objects to present to a user that is a function of the received context information, workflow information, and industrial automation manufacturing-related information.
    Type: Grant
    Filed: September 27, 2007
    Date of Patent: March 9, 2010
    Assignee: Rockwell Automation Technologies, Inc.
    Inventors: John Joseph Baier, Clifton Harold Bromley, Mark Hobbs, Teunis Hendrik Schouten, Douglas James Reichard, Kevin George Gordon, Taryl Jon Jasper, Robert Joseph McGreevy, Bruce Gordan Fuller
  • Patent number: 7676296
    Abstract: Disclosed is a method of verifying a recipe execution program. When a computer executes a recipe execution program, the computer sends instructions, which are issued based on a process recipe data defining specific operations to be performed by a substrate processing apparatus, to the substrate processing apparatus. When a computer executes a log output program, the computer outputs a log data indicating the instructions sent to the substrate processing apparatus. When a computer executes a comparing and checking program, the computer compares the log data which the process recipe data corresponding to the log data.
    Type: Grant
    Filed: September 8, 2006
    Date of Patent: March 9, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Katsuhisa Fujii, Masato Nomura, Shuji Ohno, Toshifumi Sohara
  • Patent number: 7676295
    Abstract: A computer-implemented method for managing substrate processing data. Substrate process data is acquired while a substrate is processed in a plasma-processing chamber of a cluster tool. The method includes receiving meta-data that identifies at least one of an identification of the substrate and a process. The method further includes receiving from transducers process data streams, each of the process data streams pertaining to a process parameter being monitored. Individual data items in each of the process data streams are being collected in accordance to one of a first methodology and a second methodology. The first methodology represents data collection that is periodic in time. The second methodology represents data collection that happens when predefined events occur. The method also includes storing individual data items associated with process data streams in a single file. The single file stores only data pertaining to a single recipe used to process the substrate.
    Type: Grant
    Filed: February 18, 2005
    Date of Patent: March 9, 2010
    Assignee: Lam Research Corporation
    Inventor: Chad R. Weetman
  • Patent number: 7676447
    Abstract: A scientific experiment control system includes a main controller for high-level control, an experimental manager for lower-level control of scientific experiments, and a roll-up engine for automatically propagating modifications (or “changes”) within the system to ensure consistency across the system and instruments which are linked to it in an automatic and dynamic manner. When any of experiment control objects automatically detects a change event as defined by any of the metrics inherited from the metric objects it transmits a notification to an interface. The latter automatically instantiates a change event object, which is managed in a queue by an input interface of the roll-up engine. The roll-up engine automatically interrogates the network of objects contained in the program object to determine the identity of every object in the hierarchy down to the notifying object which is involved in performance of the current experiment run.
    Type: Grant
    Filed: February 10, 2006
    Date of Patent: March 9, 2010
    Assignee: Kinematik Research Limited
    Inventors: Dante Borillo, Kevin Brendan Keenan
  • Patent number: 7667858
    Abstract: A process step in fabricating a structure on a wafer in a wafer application having one or more process steps and one or more process parameters is controlled by determining a correlation between a set of profile models and one or more key profile shape variables. Each profile model is defined using a set of profile parameters to characterize the shape of the structure. Different sets of profile parameters define the profile models in the set. The one or more key profile shape variables include one or more profile parameters or one or more process parameters. One profile model is selected from the set of profile models based on the correlation and a value of at least one key profile shape variable of the process of the wafer application to be used in fabricating the structure. The structure is fabricated in a first fabrication process cluster using the process step and the value of the at least one key profile shape variable. A measured diffraction signal is obtained off the structure.
    Type: Grant
    Filed: January 12, 2007
    Date of Patent: February 23, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Jeffrey Alexander Chard, Junwei Bao, Manuel Madriaga
  • Patent number: 7668613
    Abstract: Activities within various environments (e.g., industrial control environment) can be automated through a number of interchangeable modules configured to perform an action or series of actions. Each interchangeable module can be dedicated to a specific function or task (e.g., quality control, performance) and can take into consideration various business aspects. A sequence in which the actions should be performed can be assigned and the appropriate module automatically initiated based on the sequence. A user can manually select a module in order to have a particular function automatically implemented, such as inserting a quality control module into a rack so that functions relating to quality control are automatically implemented. When a different task is desired, the quality control module can be removed and replaced with a different module.
    Type: Grant
    Filed: September 28, 2007
    Date of Patent: February 23, 2010
    Assignee: Rockwell Automation Technologies, Inc.
    Inventors: John J. Baier, Robert J. McGreevy
  • Patent number: 7660680
    Abstract: Systems and methods are provided for automatically totalizing materials from multiple feed locations in parallel while mitigating device requirements to monitor such locations. In one aspect, an industrial automation system to process materials is provided. The system includes a totalizer component to determine an aggregated amount of materials supplied from at least two feed locations. A logic component periodically monitors at least one of the feed locations to determine the amount of each material.
    Type: Grant
    Filed: June 26, 2006
    Date of Patent: February 9, 2010
    Assignee: Rockwell Automation Technologies, Inc.
    Inventor: John R. Parraga