Abstract: Embodiments relate to a MEMS IMU having an automatic gain control. The dynamic measurement range of the MEMS IMU is controlled by controlling the gain of a signal amplifier before the analog to digital converter (ADC) to make full use of the ADC range. In one embodiment, two or more MEMS inertial sensor sets are installed in the IMU. One of the sensor sets is for high accuracy with low dynamic range, and the other set or sets is for higher dynamic range with less resolution or accuracy. In one implementation, a digital processor determines which of the sensor sets to be used according to the system dynamic estimation. In another implementation, the system weights the sensor outputs from the sensor sets according to the system dynamics.

Abstract: In order to mitigate the negative effects of a change in atmospheric pressure, an improved capacitance diaphragm gauge (CDG) sensor incorporates an independent ambient atmospheric pressure sensor near the CDG sensor body. The ambient atmospheric sensor is located outside the CDG sensor body to sense the ambient atmospheric pressure surrounding the CDG sensor body. The ambient atmospheric sensor provides an output that represents the ambient atmospheric pressure. A sensor output processing circuit receives the output of the ambient atmospheric sensor as well as the output of the CDG sensor. The processing circuit utilizes the output from the ambient atmospheric pressure sensor to fine tune the CDG measurement of pressure by executing an in situ, real time, automatic calibration adjustment of the CDG.

Abstract: The invention relates to a signal processing device having a first signal processing unit (101), a second signal processing unit (103), a third signal processing unit (105), and a safety unit (107). The first signal processing unit (101) and the second signal processing unit (103) are operable in parallel for providing signal processing redundancy, and are designed to output an output signal in each case in response to an input signal. The safety unit (107) is designed to replace the first signal processing unit (101) or the second signal processing unit (103) with the third signal processing unit (105).

Abstract: Methods and systems determine a correspondence of two sets of data, each data set represents an object. A weighted graph is created from each data set, and a Laplacian is determined for each weighted graph, from which spectral components are determined. The spectral components determine a coordinate of a node in a weighted graph. Nodes of a weighted graph are weighted with a quantified feature related to anode. A coordinate related to a quantified feature of a node is added to the coordinate based on the spectral components. Spectral components related to a weighted graph are reordered to a common ordering. Reordered spectral components related to the first and second data set are aligned and a correspondence is determined. An object may be a brain and a feature may be a sulcal depth. Other objects for which a correspondence may be determined include an electrical network, an image and a social network.

Abstract: A method comprises collecting a data set of field characterization measurements at a location inside a reverberant cavity excited by signals having multiple discrete electromagnetic frequencies; and performing a number (n) of circular shifts on the data set by a frequency step (?f) and computing a covariance-based coefficient at each shift until the coefficient indicates a lack of correlation. The method further comprises computing a quality factor (Q) of the reverberant cavity as fc/(?f×n), where fc is center frequency of the data set.

Abstract: A fringe image phase distribution analysis technique that performs one-dimensional discrete Fourier transform using temporal intensity information or spatial intensity information to calculate the phase distribution of the fringe image. To improve the analysis accuracy of the phase distribution, a plurality of phase-shifted moiré fringe images is generated from high-dimensional intensity data by a thinning-out (down-sampling) process and an image interpolation process, and the phase distribution of the moiré fringe is calculated by a two-dimensional or three-dimensional discrete Fourier transform. In addition, the phase distribution of thinned-out is added to calculate the phase distribution of an original fringe image. Since high-dimensional intensity information which is present in both spatio-domain and temporal-domain is used, phase distribution analysis is less likely to be affected by random noise or vibration.

Abstract: A system for sensing in an industrial environment includes a processing node configured to receive a first sensor data from a first sensor and a second sensor data from a second sensor, both of which are disposed in the industrial environment. The processing node is further configured to process randomly sampled data from at least one of the first sensor data and the second sensor data to generate processed sensor data that includes the randomly sampled data. The processing node further configured to identify data of interest from the processed sensor data based on comparison of the processed sensor data with a sampling dictionary of predetermined information. The processing node further configured to filter and assemble the identified data of interest to create a set of compressed data, and transmit the set of compressed data to a predetermined destination.

Abstract: A method for optimizing a rotor assembly for a gas turbine engine is disclosed. The rotor assembly includes rotating parts including a first journal and one or more rotor disks. The method includes determining vector components for a total parallelism vector for each rotating part, determining a total parallelism sum including determining a magnitude of each total parallelism vector and adding the magnitudes into a single sum, and determining a minimum value for the total parallelism sum including selecting the rotor disk build angles and the second journal build angle that result in the smallest value for the total parallelism sum.

Abstract: The disclosure relates to a method for reconstructing the source of an electromagnetic field. Firstly, a measurement space separate from the source is selected so that the measurement space is connected to the source via a magnetically homogeneous spatial region. Measured values of the electromagnetic field emitted by the source are recorded on the surface of the measurement space so that the electromagnetic field in the measurement space can be uniquely determined in the context of an error bound determined by the discreteness of the measured values. A mathematical model of the electromagnetic source is developed which has a multiplicity of unknowns, and a system of equations is set up that relates the unknowns of the model to the measured values. The system of equations is solved in order to determine the characteristics of the electromagnetic source. The disclosure also relates to an arrangement for carrying out the method.

Abstract: A locator for locating a concealed conductor carrying an alternating current having at least first and second frequencies, the alternating current produced by at least one dedicated signal generator. The locator includes at least one magnetic field sensor operable to convert electromagnetic radiation from the conductor into a field strength signal; a digital analog converter configured to generate a digitized signal dependent upon the field strength signals from the magnetic field sensor; a digital signal processor configured to isolate components of the digitized signal resulting from the first frequency and the second frequency; and process the isolated components to generate one or more signals indicative of the proximity of the conductor to the detector; and an output configured to generate an audio and/or visual indication of the proximity of the conductor, wherein the isolated signal components resulting from the first frequency signal and the second frequency signal are contemporaneously processed.

Abstract: A measuring device for the measurement of differential signals including a real-time portion, which contains two probes, a signal adder and a triggering device. The probes each record a partial signal of a differential signal. The signal adder adds the partial signals to form a differential signal. The triggering device implements a triggering on the basis of the differential signal.

Abstract: Methods, systems and devices are provided for displaying monitored activity data in substantial real-time on a screen of a computing device. One example method includes capturing motion data associated with activity of a user via an activity tracking device. The motion data is quantified into a plurality of metrics associated with the activity of the user. The method includes connecting the activity tracking device with a computing device over a wireless data connection, and sending motion data from the activity tracking device to the computing device for display of one or more of the plurality of metrics on a graphical user interface of the computing device. At least one of the plurality of metrics displayed on the graphical user interface is shown to change in substantial real-time based on the motion data.

Abstract: A target detection assembly includes a detection member adapted to generate a first input signal, and an emulator module is removably secured to the detection member. The emulator module includes an emulator housing assembly removably secured to the detection member and a selection portion is disposed on the emulator housing assembly. The selection portion is configured to be oriented in a first and second selection mode. In the first selection mode, a first emulation circuit disposed within the emulator housing assembly receives the first input signal, processes the first input signal, and outputs a first output signal that is different than the first input signal. In the second selection mode, a second emulation circuit disposed within the emulator housing assembly receives the first input signal, processes the first input signal, and outputs a second output signal that is different than the first input signal and the first output signal.

Abstract: A digitizer system (DS) may include one or more input channels to receive sample data, and an acquisition state machine (ASM) to organize the sample data into one or more acquisition records according to events of interest, and generate framing information corresponding to the one or more acquisition records. The events of interest may be identified by a trigger circuit in the DS, and relayed to the ASM for organizing the sample data. The DS may further include a data interface capable of receiving the one or more acquisition records and the framing information, encoding the one or more acquisition records and the framing information into encoded data, and transmitting the encoded data to an expansion module. The expansion module may receive the encoded data, decode the encoded data, and recover the sample data from the decoded data according to the framing information and the one or more acquisition records.

Abstract: A method or apparatus for monitoring human activity using an inertial sensor is described. The method includes monitoring accelerations, and identifying a current user activity from a plurality of user activities based on the accelerations. In one embodiment, each of the plurality of user activities is associated with one of a plurality of types of periodic human motions that are detectable by the portable electronic device, and wherein the identification of the current user activity is made based on detecting two or more instances of the periodic human motion associated with the user activity. The method further includes counting periodic human motions appropriate to the current user activity.

Abstract: Physiological signal quality classification methods and systems designed to improve ambulatory monitoring. Physiological signals are classified as good, noisy or weak based on signal properties. Once classified, signals are processed differently depending on their classification in order to encourage reliance on reliable physiological data, discourage reliance on unreliable physiological data and induce action to improve signal quality. For example, for a good signal, physiological data may be extracted from the signal and displayed to a person being monitored. For a noisy signal, a noisy signal notification may be displayed to the person in lieu of extracted physiological data. For a weak signal, a weak signal notification may be displayed to the person in lieu of extracted physiological data.

Abstract: A method of obtaining a consistent evaluation of the state of the system which has been monitored by measurement of multiple parameters of that system. The multiple parameters are used to calculate a single dimensional value based on the distance between the current state and normal states of the system using a Parzen Windows probability function. Consistent single dimensional values regardless of the dimensionality of the original data set can be obtained by finding a relationship between the single dimensional value and the probability of status of the system. Different relationships are obtained for different dimensionalities of data sets. Sensor malfunction can also be detected by testing the probability of the state implied by measuring all of the available parameters against the probability of the state implied by ignoring different individual ones of the parameters. A significant disparity in the two probabilities indicate possible sensor malfunction.

Abstract: In order to set an inspection area in an inspection apparatus for inspecting a board, a plurality of measurement areas are set on a board, and then reference data and measurement data of at least one adjacent measurement area that is adjacent to a target measurement area for inspecting a measurement target, among the measurement areas, are acquired. Thereafter, at least one feature object is extracted from the adjacent measurement area. Then, a distortion degree is acquired by comparing reference data and measurement data corresponding to the feature object with each other, and thereafter the distortion degree is compensated for, to set an inspection area in the target measurement area. Thus, a conversion relation between the reference data and the measurement data may be correctly acquired, and an inspection area, in which distortion is compensated for, may be correctly set.

Abstract: The distributor module serves for distributing electrical power to at least two connected measuring devices (S1, S2) and for forwarding to at least one superordinated electronic data processing unit (NLU) information concerning at least one physical, measured variable transmitted from the connected at least two measuring devices. For this, the distributor module comprises a module housing (100) as well as an electronics module placed within the module housing (100).

Abstract: A method for predicting services to be performed may include determining all devices which will require service in a designated period of time; determining the devices nearest to a particular technician; determining the devices that the technician can fix; determining the devices which meet goals of at least one of the customer and the service provider; and generating a list of devices to be fixed. The predictive method described herein may also include gathering information about the failure rate of parts on devices to be serviced and using such information to determine the devices which will require service within the designated period of time.

Abstract: The present invention relates to methods for identifying optical materials, and more specifically to methods employed to identify glass and other optical materials used in medical devices. The method includes the steps of (1) selecting refractive index liquids matching a given optical sample; (2) determining the matching points for the refractive index liquids; and (3) calculating the refractive indices and selecting best fit optical materials. The invention also relates to a system for identifying optical materials. The system is under the control and operation of a computing device which documents, displays and stores all the data.

Abstract: A readout apparatus and method for processing spatially distributed signals is disclosed. The readout apparatus and method may reduce/eliminate the impact gain variations among a plurality of sensing channels. This is done by continuously varying the dispersion properties of a signal distribution device, which may induce a spatial shift of the signal distribution during data acquisition, allowing the distributed signals to move across the sensor area. Shifting of the distributed signals may occur multiple times, hence eliminating the impact of gain variation across the sensor array. The accumulated data may be re-assembled subsequently to complete the readout operation.

Abstract: The invention discloses a real-time detection system for detecting the real-time machining by a rotating machine or rotating quality thereof. The real-time detection system comprises a signal capture module, a preprocessor, a processor and a comparison module. The signal capture module is used to capture a time-sequence signal of the rotating machine. The preprocessor is coupled to the signal capture module for receiving the time-sequence signal and generating a stationary time-sequence signal. The processor is coupled to the preprocessor for receiving the stationary time-sequence signal and calculating a plurality of entropies of the stationary time-sequence signal. The comparison module with an entropy table or a feature judgment mechanism of the entropy variation is coupled to the processor for receiving the plurality of entropy and comparing the plurality of entropy according to the entropy table or the feature judgment of the entropy variation and generating a quality signal.

Abstract: An oxygen sensing system including an oxygen sensor, a microprocessor and one or more additional sensors for sensing parameters associated with the environment or with the oxygen sensor, accounts for one or more sensed conditions when calculating oxygen levels. The one or more sensors may sense conditions associated with environmental effects or effects of use that may cause the oxygen sensor to degrade over usage or over time. A baseline amplification and measurement circuit coupled to the oxygen sensor may enable the sensor to operate less frequently or for shorter periods of time, thereby increasing the life span, calibration hold time of the sensor, and reducing power requirements.

Abstract: An apparatus for measuring electrical variables includes an external measuring connection, and a converter that converts a plurality of measurement variables into respective electrical measurement variables of a single predefined type. A control device for controlling the converter is provided and at least one type of variable to be measured with the converter can be selected via the control device, and a converter for at least two types of variables to be measured respectively has at least one independent input stage that can be used to detect the measurement variable of the type to be measured and to convert it into a predefined or predefinable type of variable. An electrical signal provided at the measuring connection is analysed in a parallel manner with respect to at least two different criteria via at least two input stages for different types of variables to be measured.

Abstract: To make correct determination of electric charge collection among signals from a semiconductor radiation detector, provided in an embodiment of the present invention is a signal data processing method. The method includes a step of calculating timing data sequences unique to channels (timing data calculation step S02), each of channels corresponding to each of plural electrodes of the radiation detector, from detection signal data sequences. Then, while making a comparison with a first threshold value, a data value for the timing data sequence at timing when a predetermined delay time is elapsed after the timing data sequence reached the first predetermined value is selected as a timing data value for determination for the channel (delay and selection step S04).

Abstract: A calibration curve creating method includes: (a) acquiring observation data of a plurality of samples of a test object; (b) acquiring content of a target component of each sample; (c) estimating a plurality of independent components when the observation data of each sample is separated into the plurality of independent components, and acquiring a mixing coefficient corresponding to the target component for each sample; and (d) acquiring a regression equation of a calibration curve. (c) includes acquiring an independent component matrix by performing a first preprocessing including normalization of the observation data, a second preprocessing including whitening, and an independent component analysis process in this order. ? divergence is used as an independence index of the independent component analysis process, and a robust regression method is used in (d).

Abstract: A sensor interface operates to communicate a sensed quantity along one or more processing pathways and in different data representations. The signal representations can be swapped along one or more locations of the signal processing branches. These branches are independent from one another and combined at an interface component for transmission along a single path or node for a control unit.

Abstract: A sensor device includes: a sensor module mounted on a conductor board; a sensitive element which is sensitive to a variable; a self-test control unit implementing a self-test program, the self-test control unit applying a self-test variable to the sensitive element, taking the self-test program into account; a detection unit detecting a characteristic of the sensitive element which is altered as a result of the applied self-test variable and providing an actual self-test response, taking the altered characteristic into account; and a comparator unit provided on or in the sensor module, the comparator unit comparing the actual self-test response to at least one specified setpoint self-test response and providing comparative information.

Abstract: The interference-compensated sensor for detecting an object located in a detection area in a contactless manner, particularly a rain sensor, is provided with a first and a second measuring channel each having a control device and an output, wherein both measuring channels are substantially identical. The sensor further comprises a main subtractor having an output for outputting the difference of the signals at the outputs of the measuring channels. The sensor is provided with a controller unit having an input that is connected to the output of the main subtractor and with an output for outputting a controller signal, by means of which the two measuring channels can be controlled in such a way that the signal at the output of the main subtractor can be controlled to zero. By means of the magnitude of the signal at the output of the controller, it can be determined if an object is located in the detection area.

Abstract: A method for matching precursor ions to product ions generated in a chromatography—mass spectrometry experiment comprises: choosing a time window defining a region of interest for precursor ion data and product ion data generated by the experiment; constructing a plurality of extracted ion chromatograms (XICs) for the precursor ion data and the product ion data within the region of interest; automatically detecting and characterizing chromatogram peaks within each XIC and automatically generating synthetic analytical fit peaks thereof; discarding a subset of the synthetic analytical peaks which do not satisfy noise reduction rules; performing a respective cross-correlation score calculation between each pair of synthetic analytical fit peaks; and recognizing matches between precursor ions and product ions based on the cross correlation scores.

Abstract: A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.

Abstract: A method for recording pulse signals which allows the reconstruction of a time reference. The time of every pulse signal event can be determined by counting sampling result bits preceding the respective sampling result bit using the known sampling frequency. For this purpose, every period of the sampling frequency is associated with a bit representing the respective sampling result and the sampling result bits are stored one by one and per channel in data blocks. The sampling frequency is preferably higher than a pixel clock, a sampling result bit associated with a flank of the pixel clock being marked. The pixel clock can thus be synchronized with the individual events exactly per sampling period. The invention further relates to the field of fluorescence correlation spectroscopy using confocal microscopes or laser scanning microscopes.

Abstract: A system and method for processing sensor signals is disclosed. The system comprises a sensor array, a multiplexer, a converter, a selection module and a combination module. The sensor array measures a physical parameter in a first dimension on a seat and generates a first set of sensor signals. The sensor array measures the physical parameter in a second dimension on the seat and generates a second set of sensor signals. The multiplexer multiplexes the first set of sensor signals into a first signal stream and the second set of sensor signals into a second signal stream. The converter converts the first signal stream to a first set of digital signals and the second signal stream to a second set of digital signals. The selection module determines a set of first-dimension data and a set of second-dimension data. The combination module forms a set of two-dimensional data.

Abstract: A “periodic signal parameter” (PSP) indicates periodic patterns in an autocorrelated vibration waveform and potential faults in a monitored machine. The PSP is calculated based on statistical measures derived from an autocorrelation waveform and characteristics of an associated vibration waveform. The PSP provides an indication of periodicity and a generalization of potential fault, whereas characteristics of the associated waveform indicate severity. A “periodic information plot” (PIP) is derived from a vibration signal processed using two analysis techniques to produce two X-Y graphs of the signal data that share a common X-axis. The PIP is created by correlating the Y-values on the two graphs based on the corresponding X-value. The amplitudes of Y-values in the PIP is derived from the two source graphs by multiplication, taking a ratio, averaging, or keeping the maximum value.

Abstract: A processing apparatus including one or more processors and memory receives sensor measurements generated by one or more sensors of one or more devices, pre-classifies the sensor measurements as belonging to one of a plurality of pre-classifications, and selects one or more feature types to extract from the sensor measurements based at least in part on the pre-classification of the sensor measurements. The processing apparatus also extracts features of the one or more selected feature types from the sensor measurements and determines a state of a respective device of the one or more devices in accordance with a classification of the sensor measurements determined based on the one or more features extracted from the sensor measurements.

Abstract: Material classification using illumination by spectral light from multiple different incident angles, coupled with measurement of light reflected from the illuminated object of unknown material, wherein the incident angle and/or spectral content of each light source is selected based on a mathematical clustering analysis of training data, so as to select a subset of only a few light sources from a superset of many light sources.

Abstract: An embodiment of an electronic device having a plurality of trimmable operative parameters is provided. The electronic device includes a trimming circuit for applying a plurality of trimming actions to each parameter for causing a corresponding correction of the parameter, for at least one reference parameter, a measuring circuit for measuring the reference parameter responsive to the application of at least part of the trimming actions, and for forcing the application of the selected trimming action for the reference parameter. For each non-reference parameter different from the at least one reference parameter, the electronic device includes a selection circuit for selecting one of the trimming actions for the non-reference parameter corresponding to the selected trimming action for the at least one reference parameter, and a biasing circuit for forcing the application of the selected trimming action for each non-reference parameter.

Abstract: Disclosed are methods and systems for optoelectronic detection and location of moving objects. The disclosed methods and systems capture one-dimensional images of a field of view through which objects may be moving, make measurements in those images, select from among those measurements those that are likely to correspond to objects in the field of view, make decisions responsive to various characteristics of the objects, and produce signals that indicate those decisions. The disclosed methods and systems provide excellent object discrimination, electronic setting of a reference point, no latency, high repeatability, and other advantages that will be apparent to one of ordinary skill in the art.

Abstract: When line break detection of signal line Ln is carried out, potential smaller than signal line Ln?1 having lower potential than signal line Ln is supplied to signal line Ln, and potentials of signal line Ln and signal line Ln?1 are compared. If potential of signal line Lc>signal line Li, it is detected no line break, and if signal line Lc<signal line Li, it is detected that a line break exists. Then, potential larger than signal line Ln+1 having higher potential than signal line Ln is supplied to signal line Ln, and potentials of the signal line Ln and signal line Ln+1 are compared. If potential of signal line Lc<signal line Li, it is detected no line break, and if signal line Lc>signal line Li, it is detected that a line break exists.

Abstract: Systems and methods for incident detection are provided. A system for incident detection comprises a network including at least one detector for detecting events in the network, a detection module capable of processing data from the at least one detector, and a calibration module capable of calibrating a plurality of bands for the incident detection based on a plurality of decision variables, wherein the plurality of bands define thresholds that are time-varying for all measurement locations in the network, and the thresholds are estimated using nonparametric quantile regression.

Abstract: Provided are a motion recognition apparatus, a motion recognition system and a motion recognition method that enable ‘event motions’ to be recognized with a small number of calculations. The motion recognition system, which recognizes user motions by using sensor data, is configured to be provided with: a cyclical loss detection means for detecting cyclical losses of sensor data when a user is moving; and a recognition processing means for setting data intervals to be used for recognizing motions in accordance with the cyclical losses of sensor data that were detected, and for recognizing user motions on the basis of sensor data for the data intervals that have been set.

Abstract: A method and device for estimating the quantity of light received by an element of at least a participating medium belonging to a light ray crossing the at least a participating medium and having as origin a light source. As to optimize the estimation and the rendering of the at least a medium, the method comprises determining a pseudo-metric function according to intersection points between the participating medium and the light ray, the pseudo-metric function representing the distance only along the part(s) of the light ray crossing the participating medium; estimating first projection coefficients in a functions basis, the first coefficients being representative of an extinction function along the light ray according to the pseudo-metric function; and estimating the quantity of light received by the element according to the first projection coefficients.

Abstract: Systems and methods for incident detection are provided. A system for incident detection comprises a network including at least one detector for detecting events in the network, a detection module capable of processing data from the at least one detector, and a calibration module capable of calibrating a plurality of bands for the incident detection based on a plurality of decision variables, wherein the plurality of bands define thresholds that are time-varying for all measurement locations in the network, and the thresholds are estimated using nonparametric quantile regression.

Abstract: A system, method and computer program product for determining whether a material meets an alpha particle emissivity specification that includes measuring a background alpha particle emissivity for the counter and measuring a combined alpha particle emissivity from the counter containing a sample of the material. The combined alpha particle emissivity includes the background alpha particle emissivity in combination with a sample alpha particle emissivity. The decision statistic is computed based on the observed data and compared to a threshold value. When the decision statistic is less than the threshold value, the material meets the alpha particle emissivity specification. The testing times are computed based on pre-specified criteria so as to meet the needs of both Producer and Consumer.

Abstract: A system and method for processing highly undersampled multi-echo spin-echo data by linearizing the slice-resolved extended phase graph model generates highly accurate T2 maps with indirect echo compensation. Principal components are used to linearize the signal model to estimate the T2 decay curves which can be fitted to the slice-resolved model for T2 estimation. In another example of image processing for highly undersampled data, a joint bi-exponential fitting process can compensate for image variations within a voxel and thus provide partial voxel compensation to produce more accurate T2 maps.

Abstract: Systems, methods, and other embodiments associated with analyzing utility data to identify diversion of a utility resource within a distribution system of a utility provider are described. In one embodiment, a method includes analyzing, by at least a processor of a computer, the utility data based, at least in part, on diversion rules to identify characteristics that correlate with diversion of the utility resource. The utility data is data from multiple independent sources of the utility provider. The example method may also include calculating a theft score that identifies a likelihood that the utility resource is being diverted from a location in a geographic area based, at least in part, on the identified characteristics.

Abstract: A spectral data processing apparatus includes an analyzer configured to perform principal component analysis of spectral data acquired for each of a plurality of regions of a sample, wherein the analyzer obtains an eigenvector by performing the principal component analysis of first spectral data of a first region out of the plurality of regions, and performs the principal component analysis of second spectral data of a second region different from the first region out of the plurality of regions using the obtained eigenvector.

Abstract: A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.

Abstract: A measurement target is captured using two types of illumination patterns set such that only color features of specular objects change, the two images that are obtained are compared, and objects are identified as being specular objects or diffuse objects depending on whether the color features change markedly. At this time, the emission intensity distribution of each illumination pattern is devised such that specular lobe components that are included in reflected light are canceled out.