Abstract: The system includes a current injection device in electrical communication with the switch mode power supply. The current injection device is positioned to alter the initial, non-zero load current when activated. A prognostic control is in communication with the current injection device, controlling activation of the current injection device. A frequency detector is positioned to receive an output signal from the switch mode power supply and is able to count cycles in a sinusoidal wave within the output signal. An output device is in communication with the frequency detector. The output device outputs a result of the dounted cycles, which are indicative of damage to an a remaining useful life of the switch mode power supply.

Abstract: A method and tooling for inspecting a contour of an edge of a cutout formed in a disk, each cutout fixedly receiving a turbine blade. A first device receives the disk containing the cutouts. A second device has a sensor associated with the movement of an instrument, the first device securing the disk at a predetermined orientation to the sensor. The disk is secured to the first device, the instrument being directed along the cutout defining a path substantially parallel to a surface of the contour, the instrument remaining in physical contact with the surface of the contour. The sensor transmits a signal associated with instrument movement to an algorithm to convert the signal to two-dimensional positions along the tangent path along the surface of the contour. The acceptability of the edge contour of the cutout is determined by comparing the two-dimensional positions to predetermined ranges of values.

Abstract: A real time method and apparatus for indicating preventative maintenance in a molding system. The molding system could be a metal molding system or a plastics molding system. Real time threshold status data is compared to real time operational parameter data as measured by sensors located on the molding system. If an out of tolerance condition is detected and validated by a comparator, then an indicator is provided to notify the need for preventative maintenance.

Abstract: A method for conducting diagnostic tests of spray equipment in a hazardous environment. The method includes automatically gathering test data, comparing the automatically gathered test data to a database of baseline data, and providing a signal if the automatically gathered data differs from the baseline data by a predetermined amount.

Abstract: A method for processing thermography signals. A time series of radiometric data is measured from a surface (104) of an object (102) over a period of heating and subsequent cooling, and a mathematical curve (1, 2) is fit to the data. An amplitude aspect and one or more shape aspects are identified for each curve. The amplitude and shape aspects are then used together to characterize features such as defects in the object. The amplitude and shape aspects for an array of such data may be combined in a single noise-free visual display (100) by associating hue (color) with the shape-aspect and luminance (brightness) with the amplitude aspect. Optionally, a second shape aspect may be identified and associated with saturation on the display. A visible image of the object may be overlaid on the display.

Abstract: A data observation device for observing internal data of a control device for controlling a machine tool, an industrial machine, an industrial robot, or the like which has at least one drive shaft driven by one selected from a servo motor, a spindle motor. The device includes: means which specifies observational data targeted for observation; means which specifies trigger data used to determine a timing of a trigger for starting and/or terminating acquisition of the observational data; means which sets a trigger condition for applying the trigger based on a value of the trigger data; and means which judges whether or not the trigger condition is satisfied in the control device, selectively starts and terminates acquisition of a value of the observational data, and displays the acquired observational data.

Abstract: A purpose of the invention is to determine abnormal condition of a steering angle sensor at an early stage even in a vehicle, in which a yaw-rate sensor is not provided. An abnormal condition determining system of the invention has a first means for detecting whether the vehicle has passed through a curved road, based on geographical data and position data from a navigation system. The system further has a second means for determining an abnormal condition of the steering angle sensor, when an output change of the steering angle sensor does not reach a predetermined amount in spite that the first means detects that the vehicle has passed through the curved road.

Abstract: A system and method for assessing and monitoring a structure are provided. The system includes at least one non-destructive inspection sensor carried by the structure and configured for acquiring data in response to ambient events associated with the structure. The system also includes a data acquisition system configured to communicate with the non-destructive inspection sensor and provide information indicative of a defect in the structure based on the data acquired by the non-destructive inspection sensor in response to the ambient events.

Abstract: A plurality of causal ladder is assembled in advance from component system events taken from previous system failures. The ladders classify the various transitions the system goes through from one set of observed states to another in multiple stages representing issues of differing urgency, importance and need for remediation. These stages are used at runtime to determine the criticality of any abnormal system activity and to accurately predict the component failure prior to the system crashing. Each ladder comprises a plurality of elevated stages representing criticality of the problem. At runtime, the causal ladder engine correlates real-time events received from the system to stages of one or more pre-constructed causal ladders and identifies a probable problem (and/or the faulty component) from the corresponding causal ladder. The causal ladder engine also determines the stage of the problem from event occurrences. At each stage, a different potential solution is identified for the problem.

Abstract: An automatic trip device, a network system using it and control method thereof is related to providing the prediction of a potential electrical accident, in which measuring data including a temperature and a current from each of temperature and current sensors is received, the measuring data is stored in a data memory, the measuring data and a setting data are compared with each another and analyzed, an indicating portion display the life spans of an appliance equipment and mechanism and a power line section accommodating the interrupter, a temperature resistance coefficient based on the temperature stored is calculated, the temperature resistance coefficient is compared with one previously stored for the warning, the power line is interrupted and a warning portion is controlled to generate a warning signal if the calculated temperature resistance coefficient is higher than the warning temperature resistance one, thereby interrupting an accidental high current, rapidly, to protect persons and installments in

Abstract: A force-moment sensor (1) is used as a switch, with which, depending on the introduction of forces and moments onto an operating part (5) of the force-moment sensor (1), software or hardware functions of a device (2, 2?) to be controlled are triggered. For this purpose, the output signals of the force-moment sensor (1) are analysed by comparisons with threshold values. The selection of a device or a function thereof does not have to be chosen in advance, but takes place while introducing a force or a moment into the sensor. The introduced forces or moments in each degree of freedom of the sensor are analysed. The selection of the device or function coincides with the driving. The device can thus be simplified since no special facilities for selecting devices or functions must be provided. Additionally, the selection and driving are accelerated by this temporal coincidence.

Abstract: A system and method is described herein that includes a software-based functionality to assess the relationship between reliability, operational, maintenance and plant betterment activities and to determine the frontier of efficient spending and other measures of performance to achieve a level of reliability that is based on data from units of similar design and performance.

Abstract: An automated location system that includes providing the number of rows and columns of a receptacle to the automated location system; scanning the receptacle to determine changes in reflectivity; creating an X values list and a Y values list from the scan; and determining a location for each of a cavity from the X values list and from the Y values list.

Abstract: A method of simulating deformation of a rubber material with a filler part made of one filler particle and a rubber part surrounding the filler pan, comprises the steps of: dividing the rubber material into a finite number of elements to form a rubber material model; performing deformation calculation of the rubber material model based on a predetermined condition; and acquiring necessary data from the deformation calculation; wherein the step of dividing includes the steps of: dividing the filler part into a finite number of elements to form a filler model; and dividing the rubber part into a finite number of elements to form a rubber model disposed around the filler model, the rubber model having strain-rate dependence such that the viscoelastic property varies with strain rate thereof.

Abstract: A sensor interface is disclosed including a flexible substrate in which are embedded sensors for measuring physical parameters such as temperature, displacement, velocity, acceleration, stress, strain, pressure and force present between objects such as a railcar bearing and a truck side frame. The substrate is positioned between the objects of interest Electronic components such as a data processing unit, a data storage device, a communication device and a power source may also be embedded within the substrate. The electronic devices communicate with one another and the sensors to process signals generated by the sensors indicative of the parameters being measured.

Abstract: A system for providing reliable, unalterable mechanical data associated with the mechanical properties of a concrete mass. The system includes a logger, a second memory device and an outbound data transfer device. The logger is provided with one or more sensors, a microprocessor and a first memory device. The one or more sensors measure physical properties of the concrete mass and generate data associated with the physical properties. The microprocessor receives the data from the sensor and calculates maturity data and mechanical strength data. The first memory device stores the mechanical strength data within the concrete mass in an unalterable form. The second memory device is located outside the concrete mass. The outbound data transfer device transfers the mechanical strength data from the first memory device to the second memory device.

Abstract: The disclosure relates to a measured-value acquisition device for measuring physical values of a technical process in a process engineering system, for converting the physical value into an adequate electrical value and outputting the latter to a communications medium. For the flexible acquisition of a plurality of measurement signals with the least possible installation effort, it is proposed that the function group for measured-value acquisition and the function group for measured-value processing are physically separate from one another and can be logically connected to one another via a wireless communications link, that the function group for measured-value processing is connected via a conductor loop to a superordinate device, in which the power can be supplied and the measurement information can be transmitted over the same pair of wires, and that the function group for measured-value acquisition can be arranged directly at the measuring site and can have a local power supply.

Abstract: The present invention is directed to a system and method of monitoring assets of an enterprise, wherein the assets perform a process and include machines subject to vibration. The system includes a vibration diagnostic software system integrated with a process automation system and a computerized maintenance management system to provide a single window interface for controlling and monitoring a process, for monitoring and analyzing the vibration of the machines associated with the process and for managing the maintenance of the machines. This integration brings vibration data collection, transmission, analysis, historical recording, display and maintenance activities all together in a defined workflow.

Abstract: A system and method for monitoring freeplay within an actuator is provided. In accordance with various embodiments, the method includes collecting a plurality of actuator parameter data sets during a predetermined period. During the predetermined time period the actuator drive motor is commanded to extend and retract an actuator output ram operably connected to a movable component of a structural system such as a mobile platform. The method additionally includes selectively isolating various sets of the plurality of actuator parameter data sets that meet specific predetermined criterion. Furthermore, the method includes computing an amount of freeplay value within the actuator based on the isolated actuator parameter data sets.

Abstract: Methods and systems are described for a system for obtaining information regarding a flow. These methods and systems comprise a signal generator configured to generate an alternating current signal at a carrier frequency and a transformer arranged to receive the generated signal, wherein the transformer and carrier frequency are selected so that the generated signal resonates at the carrier frequency. The alternating signal is then used to cause plasma to form across a gap between two electrodes, wherein the voltage drop across the gap is directly proportional to the flow's velocity. This voltage may then be measured to determine the flow velocity.

Abstract: A method and a device for determining motion parameters of a conductive, profiled surface (22) relative to a sensor (3), with the sensor (3) comprising at least one coil for generating an electromagnetic alternating field, which is subjected, because of the feedback resulting from position changes between the surface (22) and the sensor (3), to a variation, which is determined by means of the coil (16). The position change is derived from the coupling impedance (Zc) of the coil (16), and the real component (Rc) and the imaginary component (Xc) of the complex coupling impedance (Zc) of the coil (16) are determined, with a distance d between the sensor (3) and the surface (22) being computed based on the determined values while using an algorithm as a basis.

Abstract: Determining a shaft balance adjustment includes measuring an initial vibration of the shaft, determining if the initial vibration is greater than a predetermined value, and, if the initial vibration is greater than the predetermined value, determining an adjustment by choosing a best adjustment for each possible location for adjustments. Choosing the best adjustment may include choosing an adjustment that causes a lower amount of vibration than adjustments not chosen. Measuring an initial vibration may include using an accelerometer. Measuring an initial vibration may include using conditioning electronics in connection with the accelerometer. The predetermined value may be 0.01 ips.

Abstract: A structural health management system is disclosed. The structural health management system comprises a zone of sensors. A first sensor data collector is coupled to a first subset of the sensors in the zone; and a second sensor data collector coupled to a second subset of the sensors in the zone. In the present invention, loss of a sensor data collector does not result in the loss of ability to perform nondestructive testing in an entire zone.

Abstract: A method of monitoring a microelectronic manufacturing process includes the implementation of a monitoring sensor that is configured to operate in an inter-process mode. During an inter-process mode, a first valve is opened in order to initiate transfer of a processing substrate between at least one processing chamber and a transfer chamber. The monitoring sensor is programmed to monitor the interior of the at least one processing chamber only after the first valve is opened.

Abstract: In one embodiment, a pressure transmitter is provided which diagnoses the condition of a primary element and/or an impulse line which connects to a pressure sensor. A difference circuit coupled to the pressure sensor has a difference output which represents the sensed pressure minus a moving average. A calculate circuit receives the difference output and calculates a trained output of historical data obtained during an initial training time. The calculate circuit also calculates a monitor output of current data obtained during monitoring or normal operation of the transmitter. A diagnostic circuit receives the trained output and the monitor output and generates a diagnostic output indicating a current condition.

Abstract: A method is performed in an electronic system having (i) hardware configured to perform electronic operations and (ii) an air filter configured to remove contamination from an air stream that cools the hardware. The method, which identifies when to change an air filter, involves obtaining, from a set of particle sensors, a set of sensor signals in response to sensed particles in the air stream. The method further involves generating particle count data and processing the data based on the set of sensor signals, and providing an output signal having one of a first value and a second value based on the particle count data. The output signal indicates that the air filter should be changed when the output signal has the first value. The output signal indicates that the air filter should not be changed when the output signal has the second value.

Abstract: A system and method for detecting erosion in turbine engine blades is provided. The blade erosion detection system includes a sensor data processor and a cluster analysis mechanism. The sensor data processor receives engine sensor data, including exhaust gas temperature (EGT) data, and augments the sensor data to determine sensor data residual values and the rate of change of the sensor data residual values. The augmented sensor data is passed to the cluster analysis mechanism. The cluster analysis mechanism analyzes the augmented sensor data to determine the likelihood that compressor blade erosion has occurred. Specifically, the cluster analysis mechanism performs a 2-tuple cluster feature analysis using Gaussian density functions that provide approximations of normal and eroded blades in a turbine engine. The 2-tuple cluster feature analysis thus provides the probability that the sensor data indicates erosion has occurred in the turbine engine.

Abstract: A tire-generated sound detection sensor detects a tire-generated sound that is generated from a tire while the vehicle is running. A wheel rotation sensor detects a wheel rotation speed. A preprocessor calculates feature quantities corresponding to a road surface state and tire-generated sound sources. A feature vector generator generates a feature vector having, as components, the feature quantities calculated by the preprocessor and the detected wheel rotation speed. A judgment processor estimates a state of a road surface on which the vehicle is running on the basis of the feature vector generated by the feature vector generator and feature vectors that are stored in a judgment map memory so as to be correlated with a plurality of road surface states, respectively, and each of which corresponds to a road surface state and tire-generated sound sources.

Abstract: A motor vehicle power steering system, including a steering column and a power steering motor. The column has an upper part bearing a steering wheel and a lower part acting on a mechanical steering device. A setpoint at which the motor should apply a power assist to the steering column is set on the basis of information concerning the torque exerted on the steering wheel. The information is obtained by measuring angles at the steering wheel and at the lower part of the column, and the setpoint is established by comparing the two angle measurements, taking into account the rigidity of the steering column between the two angle-measuring points.

Abstract: A method of fault event identification which comprises the steps of receiving a plurality of parameter measurements, performing single fault isolation to establish one of the plurality of parameter measurements as an event start, one of the plurality of parameter measurements as an event detect, and one of the parameter measurements as an event end wherein a latency period extends from the event start to the event detect and a blackout period extends from the event start to the event end, performing multiple fault isolation to establish a first trend line for the plurality of parameter measurements prior to the blackout period and after the blackout period, reprocessing the parameter measurements in the latency period, processing the parameter measurements in the blackout period, calculating a model IC from the reprocessed parameter measurements, calculating a plurality of single fault vectors, calculating an estimate for each of the single fault vectors, calculating a normalized error for each of said plural

Abstract: A first magnetic field generated by a first coil operatively associated with a first portion of a vehicle interacts with at least one conductive element operatively associated with or at least a part of a second portion of the vehicle so as to generate an eddy current in the conductive element, which affects the magnetic field sensed by a magnetic sensor. A conductive element operatively coupled to a portion of the vehicle susceptible to a crash, e.g. a bumper or a door, provides for sensing a crash with the signal from the magnetic sensor. In another aspect, a second magnetic field is generated in the frame of a vehicle by a second coil wherein the frame is adapted so that the reluctance of the associated magnetic circuit is responsive to a crash. Signals from the first or second coils may be used to sense the associated magnetic fields.

Abstract: This invention is a method to determine the condition of rotating equipment, namely drive spindles, to enable the timely maintenance or replacement of same. The method uses an electrical signal from a vibration sensor mounted on part of the drive train to measure the level of vibration energy when the equipment is rotating under loaded and unloaded conditions. The relative vibration under the loaded and unloaded conditions is used as an indicator of equipment condition. Typically there is more vibration under load when the equipment is in good condition. When the level of vibration under the no-load condition matches or exceeds that seen under load, the equipment needs to be serviced or replaced.

Abstract: A method of determining performance characteristics and/or internal structural features of hyperelastic polymer materials includes performing at least one macro-level loading experiment on a sample comprised of a given composition. From the macro-level loading experiment, a set of internal structural features are determined. More particularly, tensile and compressive uniaxial loading data is collected and fit with a stress-strain function being a ratio of two polynomials. A curve fit analysis yields a set of coefficients relating the uniaxial loading data to the stress-strain function. From these coefficients, a set of statistical parameters are calculated, yielding information about internal microstructural features of the polymer composition, and therefore, performance characteristics of a part comprised of the given polymer composition.

Abstract: A work mounting device in which an operation for teaching a robot to mount a work on a work mounting member is automated. The work is gripped by a hand placed on an arm tip portion of the robot and the operation for mounting the work on the work mounting member is taught. A plurality of distance sensors are disposed on the work mounting member or the hand. Distances between each sensor and the work or distances between each sensor and the work mounting member are measured. A robot controller maintains an attitude of the robot so that the distances detected by the distance sensors are uniform and, at the same time, allows the work to approach the work mounting member so that a plurality of holes of the work are engaged with a plurality of respective protrusions of the work mounting member.

Abstract: A computer-implemented process and apparatus for automatically identifying compounds in a sample mixture. The process involves receiving a a representation of a measured condition of the sample mixture, using the representation of a measured condition of the sample mixture to select a set of reference spectra of compounds suspected to be contained in the sample mixture, from a library of reference spectra, receiving a representation of a test spectrum having peaks associated with compounds therein, the test spectrum being produced from the sample mixture under the measured condition and combining reference spectra from the set of reference spectra to produce a matching composite spectrum having peaks associated with at least some of the suspected compounds, that match peaks in the test spectrum, the compounds associated with the reference spectra that combine to produce the matching spectrum being indicative of the compounds in the sample mixture.

Abstract: An airflow metering device, including a conventional airflow sensing device signally connected to a signal processor is shown, having an input flow signal correlatable to a magnitude of mass air flowing past the airflow sensing device. The signal processor is operable to determine a flow correction factor based upon a direction and magnitude of the mass air flowing past the airflow sensing device. The output of the airflow metering device is an accurate measure of airflow, and comprises the input flow signal of the airflow sensing device adjusted by the flow correction factor determined by the signal processor.

Abstract: Apparatus is disclosed for sensing impact events in reciprocating machinery. The apparatus establishes first and second reference or threshold voltages, where the second reference voltage is greater than the first reference voltage. The number of impact events (N1) in a time window that exceed the first reference voltage and the number of impact events (N2) in a time window that exceed the second reference voltage are counted and an output current is generated representative of the number of such impact events. If no impact greater than the lower threshold voltage is received during a given time window, the apparatus detects and stores a peak voltage corresponding to the impact having the greatest magnitude received during that time window. Apparatus according to the present invention produces an output current based on the magnitude of that peak voltage.

Abstract: A wire harness design aiding apparatus for designing a wire harness includes: a display unit for three dimensionally displaying an object on which the wire harness is to be arranged and the wire harness on a CAD display in a state that two points of the wire harness is constrained; a guide line setting unit for setting, based on a constraining direction of the wire harness with respect to the object, guide lines which are intersection points of a guide plane which is parallel to the wiring jig plate and extends passing the axial line of the main line and an outer surface of the main line, and displaying the guide line on the CAD display; and a branch line setting unit for branching out the branch line from a position on the main line in a direction along the guide plane.

Abstract: Method for predicting properties of a product of cellulose-fibre-based pulp, paper or paperboard, wherein a suspension of cellulose fibre is subjected to analysis, during manufacture of the product, by spectroscopic measurements of a sample quantity of the suspension, in a spectrum in the wavelength range 200–2500 nm. The method comprises diluting each sample quantity prior to analysis, dewatering and drying one partial flow and subjecting that partial flow to spectroscopic measurements, and analyzing a second partial flow of the diluted sample quantity for physical fiber data, by means of image analysis. Each sample quantity analyzed generates at least 100 data points from the spectroscopic measurement distributed in the selected spectrum, and at least 50 data points with regard to the physical fibre data, in the form of one or more physical fibre property distributions with regard to at least one physical property selected from fibre length, fibre width and fibre shape.

Abstract: A method, apparatus, and system for determining the integrity of a sealed container utilizing one or more force signals which are converted into absolute force units is disclosed, providing a method that uses quantitative parameters, and can be validated. The force signals are measured in multiple data collection channels, and can be individually enabled or disabled by an operator to facilitate machine setup and troubleshooting. A user interface provides a display showing the force applied during the container-sealing process, as well as summary information regarding the status of multiple container-sealing machines in a production line.

Abstract: Engine measuring equipment for obtaining engine torque regarded as necessary for engine performance assessments for a short time period during a period when engine revolution is under a transient state is disclosed. The engine measuring equipment includes a central control unit for controlling throttle opening degrees due to revolution of the engine and load torque of the dynamometer; a detector connected to an output shaft of the engine, for detecting measurement data including at least revolution and shaft torque of the engine driven by controlling the central control unit; and a signal processing unit for measuring engine torque based on measurement data from the detector. The signal processing unit operates so as to calculate the engine torque based on time series data of the revolution and the shaft torque detected with the detector to measure engine torque from transient state data.

Abstract: A vibration test system for structures comprises a vibration exciter that vibrates a real model portion, a load meter that measures a load, and a computer that receives a numerical model representing a numerical model portion. The computer includes a block that calculates a displacement, which is made in a predetermined time after completion of measurement, according to a load value and an external force value. A signal production block produces a command signal using as a target value the displacement calculated by the displacement calculation block. A step control block controls the displacement calculation block and signal production block so that they will act cyclically. The displacement calculation block uses an ?OS method to time integrate a solution of a vibrational equation.

Abstract: The present invention provides systems and methods to used a measured driving-point response of a nonlinear material to determined one or more elastic properties of the material. The present invention takes advantage of the full information represented by the transient component, the steady-state component, the anharmonic components, and the nonlinear response components of a measured driving-point response of a real nonlinear material, without limitation in the use of large-amplitude forces. The elastic properties are determined by forming and solving a time-domain system of linear equations representing a differential equation model of the driving-point motions of the material. Based on a single, short duration, large-amplitude driving point measurement, both linear and nonlinear properties can be determined; both large-amplitude and near-zero amplitude properties can be determined; and elastic-wave speed and elastic moduli and their variation with depth can be determined.

Abstract: A hardness tester for measuring hardness of a sample by applying a predetermined test load to the sample with an indenter attached to an indenter attaching member so as to form an indentation on the sample, comprises: the indenter attaching member to which the indenter is attached detachably; the indenter which comprises an identification member with identification information to identify the indenter; an indenter information storing member to store indenter information and the identification information of the indenter, where the indenter information is matched with the respective identification information; an identification information acquiring member to acquire the identification information from the identification member when the indenter is attached to the indenter attaching member; an indenter information acquiring member to acquire the indenter information corresponding to the identification information acquired by the identification information acquiring from the indenter information storing member.

Abstract: In a network print environment in which printers of various residual amount outputting methods exist mixedly, in an information processing apparatus for monitoring a supplement of consumables which are used in the printer which can communicate via a communication line in order to recognize that consumables have properly and newly been supplemented in each printer, there is provided a mechanism having a discriminating unit for discriminating whether the consumables have newly been supplemented into the printer or not by a discriminating method according to the residual amount outputting method of the consumables of the printer.

Abstract: A method of evaluating a gravity-type flow conveyance system is disclosed. The method includes the steps of identifying, quantifying and totaling all upstream inflow sources to compute an anticipated flow at a plurality of access points in the system. The actual depth of flow at each access point is then measured and converted to a theoretical flow for each access point. The anticipated flow and the theoretical flow are then compared to determine whether any restrictions on flow might exist in the system and also to prioritize further inspection and repair of the system.

Abstract: An industrial process diagnostic apparatus is provided which can identify a source, or “root cause”, of an aberration in an industrial process. A plurality of process configuration models are provided which each represent a physical (or actual) implementation of an industrial process. One of the plurality of models is selected and diagnostics performed on the process using the selected model and at least one process signal related to the process. Based upon the diagnostics, a root cause of the aberration is determined.

Abstract: A system for controlling blade tip clearance in a turbine. The system includes a stator including a shroud having a plurality of shroud segments and a rotor including a blade rotatable within the shroud. An actuator assembly is positioned radially around the shroud and includes a plurality of actuators. A sensor senses a turbine parameter and generates a sensor signal representative of the turbine parameter. A modeling module generates a tip clearance prediction in response to turbine cycle parameters. A controller receives the sensor signal and the tip clearance prediction and generates at least one command signal. The actuators include at least one actuator receiving the command signal and adjusts a position of at least one of the shroud segments in response to the command signal.

Abstract: A method and system for providing data representing crankshaft position. For each rising edge of the crankshaft signal, a position value and a factor value are stored in a look-up table. Cam and crankshaft signals are used to locate an initial crankshaft position. This initial position value is used as a pointer to the look-up table, and incremented with each rising pulse of the crankshaft signal. Data from the table is used to extrapolate crankshaft position from crankshaft signal values to a desired resolution in degree angle units.

Abstract: Systems and methods that improve process control in semiconductor manufacturing are disclosed. According to an aspect of the invention, conditions in a cluster tool environment and/or a wafer therein can be monitored in-situ via, for example, a scatterometry system, to determine whether parameters associated with wafer production are within control limits. A cluster tool environment can include, for example, a lithography track, a stepper, a plasma etcher, a cleaning tool, a chemical bath, etc. If an out-of-control condition is detected, either associated with a tool in the cluster tool environment or with the wafer itself, compensatory measures can be taken to correct the out-of-control condition. The invention can further employ feedback/feed-forward loop(s) to facilitate compensatory action in order to improve process control.