Abstract: The invention relates to an electromechanic microsensor (MEMS) (1) comprising drive elements (2, 3, 4) which are moved linearly in an x-y plane and disposed on a substrate for determining at least two, preferably three, components of the yaw rate vector of the substrate, wherein two groups of drive elements (2, 3; 4) exist, which are driven essentially in directions running essentially at right angles to each other. The electromechanic microsensor (MEMS) (1) according to the invention is characterized in that the drive elements (2, 4; 3, 4) which are moved at right angles to each other are connected to one another for synchronizing the movements by means of a coupling device (6, 7) that is rotatably mounted on the substrate.

Abstract: Gyroscopes and pendulous gyroscopic accelerometers with adjustable scale factor are accomplished through control of the net angular momentum of a gyroscopic element such as a rotating or oscillating wheel or other mass. The sensitivity of a gravity gradiometer can be enhanced through use of such instruments, allowing the development of man-portable gravity gradiometers.

Abstract: A device for detecting and measuring a change in angular position with respect to a reference plane is useful in surgical procedures for orienting various instruments, prosthesis, and implants with respect to anatomical landmarks. One embodiment of the device uses three orthogonal rate sensors, along with integrators and averagers, to determine angular position changes using rate of change information. A display provides position changes from a reference position. Various alignment guides are useful with surgical instruments to obtain a reference plane.

Abstract: A wiring substrate includes: a substrate having a first surface and a second surface; a first insulating layer stacked on the first surface; a pad electrode stacked on the first insulating layer; a through electrode connected to the pad electrode; and a second insulating layer disposed between the substrate and the through electrode and between the first insulating layer and the through electrode, wherein a diameter of the through electrode in a connection section between the pad electrode and the through electrode is smaller than a diameter of the through electrode on the second surface side, the first insulating layer, the second insulating layer and the through electrode overlap with each other in a peripheral area of the connection section, when seen from a plan view, and the thickness of the first insulating layer in the area is thinner than the thickness of the first insulating layer in other areas.

Abstract: An arrangement for measuring a rate of rotation using a vibration sensor, being excited and measured by means of capacitive drive elements, and the rotation of said sensor in an axis, excited by a rotation in another axis by means of the Coriolis force, being measured by means of capacitive measuring elements. Excitation voltages can be supplied to the fixed electrodes of the drive elements, the frequency of said voltages corresponding to the resonance frequency or the subharmonic of the resonance frequency of the vibration sensor. An alternating voltage having a first measuring frequency which is higher than the excitation frequency can be supplied to capacitive elements for measuring the excited vibration.

Abstract: One embodiment of the invention includes a magnetic solenoid. The magnetic solenoid includes an elongated sidewall that extends along and surrounds a central axis between spaced apart ends. The central axis can include a center point that is approximately equidistant from the spaced apart ends. The magnetic solenoid also includes a conductive coil that extends along and conforms to the elongated sidewall and comprises a plurality of consecutive loops centered on the central axis. The plurality of consecutive loops can have a consecutive loop-spacing that is non-uniform along the central axis and having a substantial maximum spacing value at approximately the center point.

Abstract: An inertial measurement unit is disclosed which includes a system of gyros for sensing angular rates, a system of accelerometers for sensing angular accelerations, an integrator for deriving gyro-less angular rates from the sensed angular accelerations, and a complimentary filter for blending the sensed angular rates and the gyro-less angular rates to produce a virtual angular rate output for the inertial measurement unit.

Abstract: A method and system for Self-calibrated Azimuth and Attitude Accuracy Enhancing are disclosed, wherein SAAAEMS approach is based on fully auto-calibration self-contained INS principles, not depending on magnetometers for azimuth/heading determination, and thus the system outputs and performance are not affected by the environmental magnetic fields. In order to reduce the system size and cost, this new innovative methods and algorithms are used for SAAAEMS system configuration and integration. Compared to a conventional INS for gyrocompassing, AGNC's approach uses a smaller number of high accuracy sensors: SAAAEMS uses only one 2-axis high accuracy gyro (for example, one DTG) instead of 3-axis; the third axis gyro is a MEMS gyro. It uses only 2 high accuracy accelerometers instead of 3, since the two accelerometers are used only for gyrocompassing not for navigation. These two changes to the conventional INS system configuration remarkably reduce the whole system size and cost.

Abstract: A tuning fork oscillating piece includes: a base; a pair of oscillating arms extending from the base in directions substantially parallel with each other; a drive piezoelectric element provided at least on one main surface or side surface of each of the oscillating arms to allow bending oscillation of the oscillating arms by piezoelectric distortion caused by applied charge; a detection piezoelectric element provided on the surface opposed to the surface of each of the oscillating arms on which the drive piezoelectric element is provided to convert the piezoelectric distortion caused by the bending oscillation of the oscillating arms into charge and output the charge. The drive piezoelectric element has a drive piezoelectric section. The detection piezoelectric element has a detection piezoelectric section. The absolute value of the piezoelectric d constant of the drive piezoelectric section is larger than the absolute value of the piezoelectric d constant of the detection piezoelectric section.

Abstract: A demodulator is provided for demodulating an amplitude-modulated input signal defined by a carrier signal having a carrier frequency modulated by a modulating signal, the demodulator including an amplifier stage having a gain and structured to receive the amplitude-modulated input signal, and a gain control stage coupled to the amplifier stage and configured to vary the gain of the amplifier stage according to the carrier frequency of the carrier signal.

Abstract: A method of processing signals from an accelerometer/gyroscopic-based input device includes providing the input device within a vehicle. An accelerometer/gyroscopic-based second device is also provided within the vehicle. The input device is manually actuated while the vehicle is in motion. First signals are transmitted from the input device in response to the manually actuating step. Second signals are transmitted from the second device in response to the motion of the vehicle. The first signals are adjusted dependent upon the second signals.

Abstract: A piezoelectric device includes a piezoelectric film and an electrode film. The piezoelectric film is constituted of lead zirconium titanate represented by Pb1+X(ZrYTi1?Y)O3+X, where X is 0 or more and 0.3 or less and Y is 0 or more and 0.55 or less, the piezoelectric film having a tension stress. The electrode film applies a voltage to the piezoelectric film.

Abstract: An inertial sensor, comprises a detection element detecting an amount of a physical quantity in a detection axis direction, a plurality of support members having flexibility and supporting nearly a center of the detection element, and a package substrate housing the detection element and the plurality of support members. In a case when an X-axis is defined as an extending direction of the plurality of support members, a Y-axis is perpendicular to the X-axis in a plane including the detection element, and a Z-axis is perpendicular to the X-axis and the Y-axis, one of load components in a direction of the Y-axis of the detection member applied to the plurality of support members is nearly equal to other among the plurality of support members, and one of load components in a direction of the Z-axis is nearly equal to the other among the plurality of support members.

Abstract: An object is to provide a tuning-fork type piezoelectric unit in which as well as maintaining the vibration characteristics in the stationary condition when miniaturized, the bond strength is maintained, and also the frequency change for before and after a drop impact test is suppressed.

Abstract: The present invention is related to sensor arrangements and particularly to sensor arrangements for symmetric response in a x-, y- and z-coordinate system. The arrangement comprises four gyroscopes with one axis arranged into different directions of sensitivity.

Abstract: An operating method for a Coriolis gyro. Digital read signals are produced that represent a measure of the instantaneous amplitudes/frequencies of the stimulation oscillation/read oscillation of the gyro resonator. Force signals are applied to the resonator. The force signals are controlled as a function of the digital read signals so that the stimulation oscillation/read oscillation assume specific amplitudes/frequencies. The force signals are produced from quantized output signals from a pulse modulator. The modulator is fed with digital stimulation/compensation signals derived from the digital read signals.

Abstract: A vehicle crash sensing system and method are provided for sensing a vehicle crash event. The system includes a linear acceleration sensor located on a vehicle for sensing linear acceleration along a first sensing axis and generating a linear acceleration signal. The system has linear crash sensing logic for determining a crash event along the first sensing axis as a function of the sensed linear acceleration. The system also has signal processing circuitry for processing the linear acceleration signal and generating a processed linear acceleration signal. The system has an angular rate sensor located on the vehicle for sensing an angular roll rate of the vehicle about a second sensing axis and generating a roll rate signal. The system further includes rollover crash sensing logic for determining a rollover event of the vehicle about the second sensing axis as a function of the processed linear acceleration signal and the roll rate signal.

Abstract: A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

Abstract: One embodiment of the invention includes a magnetic solenoid. The magnetic solenoid includes an elongated sidewall that extends between spaced apart ends. The elongated sidewall can surround a central axis that extends longitudinally along the sidewall. The elongated sidewall can have a radius that is defined by a compound equation that varies the radius as a function of position along the central axis.

Abstract: A method and apparatus are described for fabricating a high aspect ratio MEMS device by using metal thermocompression bonding to assemble a reference wafer (100), a bulk MEMS active wafer (200), and a cap wafer (300) to provide a proof mass (200d) formed from the active wafer with bottom and top capacitive sensing electrodes (115, 315) which are hermetically sealed from the ambient environment by sealing ring structures (112/202/200a/212/312 and 116/206/200e/216/316).

Abstract: The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device includes a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.

Abstract: An angular velocity sensor device includes a structure having an angular velocity detecting element and a vibration body formed thereon. The structure is mounted on the case and the angular velocity detecting element is isolated from external vibrations without the need for rubber and gel vibration dampening materials. Permanent magnets of the same polarity are mounted opposite one another on the structure and the case. The magnetic repulsion is generated between the structure and the case to cause the structure to be housed within the case in a levitated state.

Abstract: An input device includes a main body and a motion sensor unit. The main body has a longitudinal axis. The motion sensor unit is configured and arranged to detect rotation of the main body about the longitudinal axis. The motion sensor unit has an X-axis angular velocity sensor configured and arranged to detect an angular velocity of the main body about an X-axis in a three-dimensional orthogonal coordinate system defined by the X-axis, a Y-axis and a Z-axis. The X-axis coincides with the longitudinal axis of the main body and the Y-axis and the Z-axis being orthogonal to each other in a first plane perpendicular to the X-axis.

Abstract: The invention relates to an inertial sensor arrangement (2), in particular for installation in a motor vehicle, having a sensor module (8) which is fitted to a carrier (6) and comprises a micromechanically produced inertial sensor and an evaluation circuit. The invention provides for the sensor module (8) to be connected to the carrier (6) by means of an elastic coupling element (14).

Abstract: A method for operation of and simultaneous analysis of a rate-of-turn sensor, comprising an oscillator element and a Coriolis element arranged on the oscillation element is disclosed, comprising the following method steps: generation of a digital operating signal with an excitation frequency corresponding to the resonant frequency of the oscillator element, digital to analogue conversion of the digital operating signal and operation of the oscillator element with the analogue operating signal, recording a Coriolis speed of the Coriolis element occurring about a normal to both oscillation axes due to the rotation of the rate-of-turn sensor with generation of an analogue Coriolis' signal proportional to the Coriolis speed, analogue-to-digital conversion of the analogue Coriolis signal, phase-sensitive multiplication of the digital Coriolis signal with the digital operating signal to form an intermediate signal, generation of a control signal proportional to the rate of turn of the rate-of-turn sensor from the i

Abstract: Embodiments of the invention provide a blending filter based on extended Kalman filter (EKF), which optimally integrates the IMU navigation data with all other satellite measurements tightly-coupled integration filter. This blending filter can be easily implemented with minor modification to the position engine of stand-alone GNSS receiver. Provided is a low-complexity tightly-coupled integration filter for sensor-assisted global navigation satellite system (GNSS) receiver. The inertial measurement unit (IMU) contains inertial sensors such as accelerometer, magnetometer, and/or gyroscopes Embodiments also include method for pedestrian dead reckoning (PDR) data conversion for ease of GNSS/PDR integration. The PDR position data is converted to user velocity measured at the time instances where GNSS position/velocity estimates are available.

Abstract: An inertial measurement unit (IMU) includes an assembly including a plurality of gyroscopes. Each gyroscope has an associated motor bias control loop gain setting. The IMU further includes an electronic device in signal communication with the gyroscopes. The device is configured to set the loop gain setting of a first gyroscope of the plurality to a first value to commence a startup time period of operation of the first gyroscope. The device is further configured to set the loop gain setting of the first gyroscope to a second value to commence a normal time period of operation of the first gyroscope.

Abstract: An inertia sensing module is connected to a portable electronic device. The inertia sensing module includes an accelerometer unit for generating at least one of acceleration sensing signals ax, ay, az corresponding to the directions of X, Y, Z respectively; a gyroscope unit for generating at least one of angular rate sensing signals ?x, ?y, ?z corresponding to the axes of X, Y, Z respectively; and a connector module having a plug that is inserted into a docking connector of the portable electronic device. With the inertia sensing module being connected to or disconnected from the portable electronic device, a user can control a specific cursor or graphic user interface on a picture of an electronic game player via his/her own motions.

Abstract: A control component of an apparatus in one example is configured to signal a plurality of electrodes arranged in at least first, second, third, and fourth radial electrode groups along first, second, third, and fourth axes at approximately 0, 45, 90, and 135 degrees, respectively, around the planar resonator. During a first time period, the control component is configured to signal: the first radial electrode group to induce a drive oscillation in the planar resonator, the third radial electrode group to sense the drive oscillation, the second radial electrode group to sense a Coriolis force induced oscillation, and the fourth radial electrode group to null the Coriolis force induced oscillation.

Abstract: A synchronous detection circuit includes: an offset compensation circuit which generates an offset compensation voltage to compensate an offset voltage superposed on a direct current voltage signal; and a temperature compensation circuit which generates a temperature compensation voltage to compensate variation of a direct current reference voltage that depends on a temperature in a signal path of a sensing circuit. In the circuit, the synchronous detection circuit synchronously detects an alternating current signal, the offset compensation voltage and the temperature compensation voltage are respectively superposed on the alternating current signal which is input into the synchronous detection circuit, and the synchronous detection circuit synchronously detects the alternating current signal on which the offset compensation voltage and the temperature compensation voltage have been superposed.

Abstract: A demodulator includes input terminals, for receiving an input signal, and an amplifier stage having a gain. The input signal is amplitude-modulated and is defined by a carrier signal at a carrier frequency and by a modulating signal. The demodulator includes, moreover, a gain-control stage, coupled to the amplifier stage for varying the gain of the amplifier stage according to a sinusoid of a frequency equal to the carrier frequency, on the basis of the carrier signal.

Abstract: An inertial sensor includes a mesoscaled disc resonator comprised of micro-machined substantially thermally non-conductive wafer with low coefficient of thermal expansion for sensing substantially in-plane vibration, a rigid support coupled to the resonator at a central mounting point of the resonator, at least one excitation electrode within an interior of the resonator to excite internal in-plane vibration of the resonator, and at least one sensing electrode within the interior of the resonator for sensing the internal in-plane vibration of the resonator. The inertial sensor is fabricated by etching a baseplate, bonding the substantially thermally non-conductive wafer to the etched baseplate, through-etching the wafer using deep reactive ion etching to form the resonator, depositing a thin conductive film on the through-etched wafer.

Abstract: Integrated micromachined inertial sensing unit with multi-axis angular rate and acceleration sensors and method of fabricating the same. Micromachined angular rate and acceleration sensors are integrated together with an application-specific integrated circuit (ASIC) in one compact package. The ASIC combines many separate functions required to operate multiple rate sensors and accelerometers into a single chip. The MEMS sensing elements and the ASIC are die-stacked, and electrically connected either directly using ball-grid-arrays or wirebonding. Through the use of a single package and single ASIC for multiple angular rate and acceleration sensors, significant reduction in cost is achieved.

Abstract: An apparatus includes a first capacitive sensor connected to a first supply voltage, a second capacitive sensor connected to a second supply voltage, a sensing circuit for producing a sense voltage in response to current flowing in the first and second capacitive sensors, a first mixer for combining the sense voltage with a first reference voltage to produce a first signal representative of in-plane displacement between electrodes of the first and second capacitive sensors, and a second mixer for combining the sense voltage with a second reference voltage to produce a second signal representative of out-of-plane displacement between the electrodes of the first and second capacitive sensors.

Abstract: To provide an operating device control device for obtaining information about a rotational angle of an operating device, while reducing the influence due to an individual difference and/or variation of a reference sensor signal in accordance with a sensor signal output from the gyro sensor mounted in the operating device. A control device of an operating device having a gyro sensor for detecting an angular velocity and outputting a sensor signal in accordance with the detected angular velocity, the control device obtains an output signal from signal output means for outputting an output signal in accordance with a difference between the sensor signal output from the gyro sensor and a predetermined reference signal, then estimates a reference sensor signal to be output by the gyro sensor when no angular velocity is detected, based on the output signal, and changes the predetermined reference signal according to the estimated reference sensor signal.

Abstract: A microstructured component having a layered construction may allow implementation of component structures having a layer thickness of more than 50 ?m, e.g., more than 100 ?m. Capping of the component structure may allow vacuum enclosure of the component structure with a hermetically sealed electrical connection. The layered construction of the microstructured component includes a carrier including at least one glass layer, e.g., a PYREX™ layer, a component structure, arranged in a silicon layer, which is bonded to the glass layer, and a cap, which is positioned over the component structure and is also bonded to the glass layer.

Abstract: A vibratory gyroscope including a vibrator (10) integrally having a plate-like body portion (11) spreading along a reference plane, three drive arms (12, 13, 14) extending in a first direction from the body portion along the reference plane, and two detection arms (15, 16) extending in a second direction opposite to the first direction from the body portion along the reference plane. The three drive arms are composed of two exciting drive arms (12, 13) that are excited in mutually opposite phases in the reference plane and a non-exciting drive arm (14) located between the two exciting drive arms. Each of the three drive arms has an arm width in a width direction along the reference plane and perpendicular to the first direction. Each of the two detection arms has an arm width greater than that of the drive arm in the width direction, thereby suppressing generation of vibrations along the reference plane.

Abstract: An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.

Abstract: A disc resonator gyroscope (DRG) and method of manufacture. The DRG has a surrounding pattern of bond metal having a symmetry related to the symmetry of a resonator device wafer that enables more even dissipation of heat from a resonator device wafer of the DRG during an etching operation. The metal bond frame eliminates or substantially reduces the thermal asymmetry that the resonator device wafer normally experiences when a conventional, square bond frame is used, which in turn can cause geometric asymmetry in the widths of the beams that are etched into the resonator device wafer of the DRG.

Abstract: Four sensor units (SUA1 to SUA4) are disposed symmetrically about a point, on both top and bottom and left and right centering around one point of a support (15e). Furthermore, four sensor units (SUA1 to SUA4) are designed so that all the components are fully in tuning-fork structure. Drive frames (5, 5) of the sensor units (SUA1, SUA2) disposed adjacent to each other in a first direction (Y) are vibrated in mutually inverted phases, and drive frames of the other sensor units (SUA3, SUA4) disposed adjacent to each other in a second direction (X) are vibrated in mutually inverted phases as well. Moreover, the drive frames of the sensor units (SUA1, SUA2) and the drive frames of the other sensor units (SUA3, SUA4) are operated in synchronization in the state in which phases are shifted by 90 degrees. Whereby, it is possible to reduce or prevent vibration coupling in the driving direction and in the detection direction, and the leakage (loss) of excitation energy and Coriolis force.

Abstract: An oscillation driver circuit that drives a physical quantity transducer includes a one-input/two-output comparator. The one-input/two-output comparator includes a shared differential section that compares a voltage signal input from a drive current/voltage conversion amplifier circuit with a given voltage, a first output section that receives a signal output from the differential section, variably adjusts a voltage amplitude of the received signal, and outputs the resulting signal, and a second output section that receives the signal output from the differential section, and outputs a synchronous detection reference signal of which the voltage amplitude is fixed.

Abstract: System having one or more inertial sensors in which one or more of the sensor input axes are modulated in orientation about an axis substantially perpendicular to the input, or sensitive, axis of the sensor and, in some embodiments, by also enhancing the accuracy of such a system to provide improved signal to noise ratio and reduced sensitivity to errors in alignment of the sensor axes to the dither axes.

Abstract: A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar outer member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar inner member coplanar with and flexibly coupled to the outer member such that it is capable of rotary oscillatory motion relative to the outer member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the outer member about the drive axis, and one or more sensors that detect oscillation of the inner member about the output axis.

Abstract: The present invention provides the stress detection method for force sensor device with multiple axis sensor device and force sensor device employing this method, whose installation angle is arbitrary. The stress detection method includes, first and second force sensors whose detection axes are orthogonal to each other. When the detection axis of first force sensor forms angle ? with direction of detected stress Ax, and the stress component of direction perpendicular to direction of the detected stress Ax is Az, output Apx of the axis direction of first force sensor is found as Apx=?x (Ax×cos ?+Az×sin ?), and output Apz of the axis direction of the second force sensor is found as Apz=?z (Ax×sin ?+Az×cos ?), and, when ?x and ?z are detection sensitivity coefficients of first and second force sensors respectively, the detection sensitivity coefficient ?z of second force sensor is set as ?z=?x tan ?, and the detected stress Ax is found as Ax=(Apx?Apz)/?x(cos ??tan ?×sin ?).

Abstract: The invention relates to measuring devices used in measuring angular velocity, and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensor of angular velocity according to the present invention seismic masses (1), (2), (36), (37) are connected to support areas by means of springs or by means of springs and stiff auxiliary structures, which give the masses (1), (2), (36), (37) a degree of freedom in relation to an axis of rotation perpendicular to the plane of the wafer formed by the masses, and in relation to at least one axis of rotation parallel to the plane of the wafer. The structure of the sensor of angular velocity according to the present invention enables reliable and efficient measuring particularly in compact oscillating micro-mechanical sensors of angular velocity.

Abstract: The present invention provides an angular velocity sensor and a method of fabrication thereof that facilitates the work of affixing a tuning-fork-type crystal element and adjusting the same, preventing waste caused by scrapping defective products and also encouraging miniaturization of components.

Abstract: A crystal oscillator used as a clock source and further having an angular velocity detection capability is provided with: a tuning fork type crystal unit provided with excitation electrodes for exciting tuning fork vibration and sensing electrodes for detecting electric charge generated by the Coriolis force; an oscillation circuit connected to the excitation electrodes for both exciting the tuning fork vibration and for supplying a clock signal as output based on the tuning fork vibration; and a detection circuit connected to the sensing electrodes for supplying an angular velocity signal in accordance with the electric charge. The tuning fork crystal unit has first and second tuning fork arms for realizing the tuning fork vibration. The excitation electrodes are provided on the side surfaces of the first tuning fork arm and the sensing electrodes are provided on the side surfaces of the second tuning fork arm.

Abstract: A nanomechanical (NEMS) gyroscope includes an integrated circuit substrate, a pair of spaced apart contact pads disposed on the substrate, and a movable nanoscale element forming at least a portion of a first electrically conductive path electrically coupling the contact pads. The movable element experiences movement comprising rotation, changes in rotation, or oscillation upon the gyroscope experiencing angular velocity or angular acceleration. Movement of the gyro introduces geometrically induced phase changes which results in phase and/or frequency changes in ac current flowing through the movable element. An inertial measurement unit (IMU) can include an integrated circuit substrate having a three axis gyroscope formed on the substrate and a three axis accelerometer, which is preferably formed on the same substrate.

Abstract: A motion sensor may detect linear and/or angular acceleration and/or angular velocity of a body relative to one axis, two orthogonal axes or three orthogonal axes. Movement of the body or reference structure may be detected relative to one or more spinning rotors. The rotor(s) may be suspended for rotation and/or other movement relative to the reference structure without physical contacting the reference structure. In one embodiment, the rotor(s) may be electrostatically suspended in such a way that movement of the rotor(s) relative to the reference structure may be detected.

Abstract: This invention provides a dynamical quantity sensor having a novel structure, wherein first beams 3, 4, 5, 6 are extended from side walls of a recess 2 of a substrate 1, and an intermediate support member 7 is disposed on the first beams 3, 4, 5, 6. Second beams 8, 9, 10, 11 extending in a direction crossing substantially perpendicularly the first beams 3, 4, 5, 6 are disposed on the intermediate support member 7, and a weight 12 is disposed on the second beams 8, 9, 10, 11. Opposing electrodes 17 and 19 and opposing electrodes 18 and 20 are used as electrodes for excitation, and opposing electrodes 13 and 15 and opposing electrodes 14 and 16 are used as electrodes for detecting an angular velocity. The movement of the weight 12 resulting from the application of the angular velocity is detected.